JPH01265134A - Measuring instrument for energy absorption factor of condensing lens - Google Patents
Measuring instrument for energy absorption factor of condensing lensInfo
- Publication number
- JPH01265134A JPH01265134A JP9335788A JP9335788A JPH01265134A JP H01265134 A JPH01265134 A JP H01265134A JP 9335788 A JP9335788 A JP 9335788A JP 9335788 A JP9335788 A JP 9335788A JP H01265134 A JPH01265134 A JP H01265134A
- Authority
- JP
- Japan
- Prior art keywords
- condensing lens
- laser beam
- shielding plate
- integrating sphere
- energy absorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 12
- 238000007707 calorimetry Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、レーザ用光学部品の1つである集光レンズ、
特に、K Cl + K B rl N aCl +
Z nse、 CdTe、 G e。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a condenser lens, which is one of optical components for a laser;
In particular, K Cl + K B rl NaCl +
Znse, CdTe, Ge.
Si、 GaAs、 InSbなどで作られるCo、
CO,、YAG等の大出力レーザ用業光レンズのエネル
ギー吸収率測定装置に関する。Co made from Si, GaAs, InSb, etc.
This invention relates to an energy absorption rate measuring device for industrial optical lenses for high-output lasers such as CO, YAG, etc.
(従来の技術)
レーザカロリメトリー法を用いてレーザ用集光レンズの
エネルギー吸収率を測定するときには、測定対象物であ
る集光レンズの焦点距離がいろいろ異なるため、レンズ
通過後のレーザ光を常に完全にパワーメータでとらえる
ことが難しく、正確な測定が不可能であった。また、パ
ワーメータ等からの散乱反射光が、集光レンズ周囲の熱
平衡を乱したり、集光レンズに直接照射されるために集
光レンズの温度変化の測定値に誤差を与えるという問題
があった。(Prior art) When measuring the energy absorption rate of a laser condensing lens using the laser calorimetry method, the focal length of the condensing lens, which is the object to be measured, varies. It was difficult to capture this with a power meter, making accurate measurement impossible. In addition, there are problems in that the scattered reflected light from a power meter, etc. disturbs the thermal equilibrium around the condenser lens, and the condenser lens is directly irradiated, giving an error in the measured value of the temperature change of the condenser lens. Ta.
(発明が解決しようとする課題)
本発明は、上記の問題を解消し、種々の焦点距離を有す
る集光レンズについて、散乱反射光の影響を除いて、集
光レンズのエネルギー吸収率を精確に測定することがで
きる装置を提供しようとするものである。(Problems to be Solved by the Invention) The present invention solves the above problems and accurately determines the energy absorption rate of a condenser lens with various focal lengths by eliminating the influence of scattered reflected light. The aim is to provide a device that can perform measurements.
(課題を解決するための手段)
本発明は、レーザカロリメトリー法を用いて集光レンズ
のエネルギー吸収率を測定する装置において、レーザ光
路に測定対象物である集光レンズ、ピンホールを有する
散乱反射光遮蔽板、及び、アパーチャをレーザ光路に向
けた積分球を置き、該遮蔽板をレーザ光の焦点位置にす
る移動手段を設け、かつ、集光レンズ側面に熱電対を付
設し、該熱電対及び積分球のディテクタからの信号をデ
ータロガに収集するようにしたことを特徴とする集光レ
ンズのエネルギー吸収率測定装置である。なお、遮蔽板
は、例えば銅、アルミニウム等の赤外光を反射する性質
を有する材料で作られる。(Means for Solving the Problems) The present invention provides an apparatus for measuring the energy absorption rate of a condensing lens using a laser calorimetry method. A light shielding plate and an integrating sphere with the aperture facing the laser beam path are placed, a moving means is provided to place the shielding plate at the focal position of the laser beam, and a thermocouple is attached to the side surface of the condensing lens. and a data logger that collects signals from a detector of an integrating sphere. Note that the shielding plate is made of a material having a property of reflecting infrared light, such as copper or aluminum.
(作用)
第1図は、本発明の1具体例である集光レンズのエネル
ギー吸収率測定装置の概念図である。(Function) FIG. 1 is a conceptual diagram of an apparatus for measuring energy absorption rate of a condenser lens, which is a specific example of the present invention.
レーザ光路に集光レンズ11ピンホールを有する散乱反
射光遮蔽板2、及び積分球3を配置し、上記3者のうち
いずれかを光軸に沿って移動することによって、レーザ
光の焦点距離に遮蔽板2を置き、レーザ光のみを通過さ
せ、かつ、散乱反射光を集光レンズに照射しないように
遮蔽する役割をする。また、遮蔽板2のピンホールを通
過したレーザ光を、アパーチャを経て総てを受けるよう
に積分球3を配置する。By arranging a condensing lens 11, a scattered reflection light shielding plate 2 having a pinhole, and an integrating sphere 3 in the laser beam path, and moving any one of the above three along the optical axis, the focal length of the laser beam can be adjusted. A shielding plate 2 is placed to allow only the laser beam to pass through and to shield the scattered reflected light from irradiating the condenser lens. Furthermore, the integrating sphere 3 is arranged so as to receive all of the laser light that has passed through the pinhole of the shielding plate 2 through the aperture.
上記の配置の下でレーザ光を測定対象物である集光レン
ズに導入し、遮蔽板のピンホール及びアパーチャを経て
、積分球で受け、集光レンズの温度変化を熱雷対で検出
し、積分球のディテクタの信号と合わせてデータロガに
送り、集光レンズのエネルギー吸収率を求めるものであ
る。Under the above arrangement, the laser beam is introduced into the condensing lens that is the object to be measured, passes through the pinhole and aperture of the shielding plate, is received by the integrating sphere, and the temperature change of the condensing lens is detected by a thermal lightning pair. This is sent together with the signal from the integrating sphere detector to the data logger to determine the energy absorption rate of the condenser lens.
このように、遮蔽板を集光レンズと積分球の間のレーザ
光の焦点に配置することにより、集光レンズを通過させ
たレーザ光をピンホールを介して総て積分球に導入する
とともに、積分球からの散乱反射光が集光レンズを照射
することを防止することができ、その結果、安定した熱
平衡状態における集光レンズの温度測定を可能にした。In this way, by placing the shielding plate at the focal point of the laser beam between the condenser lens and the integrating sphere, all of the laser beam that has passed through the condenser lens is introduced into the integrating sphere via the pinhole, and It was possible to prevent the scattered reflected light from the integrating sphere from irradiating the condenser lens, and as a result, it became possible to measure the temperature of the condenser lens in a stable thermal equilibrium state.
(実施例)
第1図の装置を用いて、レーザ光の照射による集光レン
ズの温度上昇と遮断後の温度降下を測定した。(Example) Using the apparatus shown in FIG. 1, the temperature rise of the condenser lens due to laser light irradiation and the temperature drop after laser light cutoff were measured.
集光レンズはZn5e製で焦点距離が63.51のもの
を用いた。遮蔽板はCu製で厚さは2■、ピンホールの
直径が0.5閣のものを用いた。また、積分球はCur
Mで直径152閣で、ターゲットは直径25.4mで高
さ5■の円錐形であり、アパーチャの直径は25.4−
のものを用いた。The condenser lens was made of Zn5e and had a focal length of 63.51. The shielding plate was made of Cu, had a thickness of 2 cm, and had a pinhole diameter of 0.5 mm. Also, the integrating sphere is Cur
M has a diameter of 152 cm, the target is a cone with a diameter of 25.4 m and a height of 5 cm, and the aperture diameter is 25.4 -
I used the one from
第2図は、上記の実験結果を示したグラフであり、レー
ザ光の照射による集光レンズの温度上昇と、レーザ光の
遮蔽後の温度降下時における、同一温度における微分係
数の絶対和が各点において士(1,01%以内のバラツ
キであり、安定した熱平衡状態の下にあったことが分か
った。Figure 2 is a graph showing the above experimental results, and shows the absolute sum of the differential coefficients at the same temperature when the temperature of the condensing lens increases due to laser beam irradiation and when the temperature decreases after shielding the laser beam. It was found that the variation in points was within 1.01%, indicating that the temperature was in a stable thermal equilibrium state.
なお、遮蔽板を用いずに、上記と同様の実験を行ったと
ころ、バラツキは上記の10倍を示した。Note that when an experiment similar to the above was conducted without using a shielding plate, the variation was 10 times greater than the above.
第1図は本発明の1具体例である集光レンズのエネルギ
ー吸収率測定装置の概念図であり、第2図は実施例にお
ける集光レンズの吸収率測定結果を示したグラフである
。FIG. 1 is a conceptual diagram of an apparatus for measuring the energy absorption rate of a condensing lens as a specific example of the present invention, and FIG. 2 is a graph showing the results of measuring the absorption rate of the condensing lens in the example.
Claims (1)
ー吸収率を測定する装置において、レーザ光路に測定対
象物である集光レンズ、ピンホールを有する散乱反射光
遮蔽板、及び、アパーチャをレーザ光路に向けた積分球
を置き、該遮蔽板をレーザ光の焦点位置にする移動手段
を設け、かつ、集光レンズ側面に熱電対を付設し、該熱
電対及び積分球のディテクタからの信号をデータロガに
入力するようにしたことを特徴とする集光レンズのエネ
ルギー吸収率測定装置。In an apparatus for measuring the energy absorption rate of a condensing lens using the laser calorimetry method, a condensing lens, which is an object to be measured, a scattered reflection light shielding plate having a pinhole, and an aperture are directed toward the laser beam path. Place an integrating sphere, provide a means for moving the shielding plate to the focal position of the laser beam, attach a thermocouple to the side surface of the condensing lens, and input signals from the thermocouple and the detector of the integrating sphere to a data logger. An apparatus for measuring energy absorption rate of a condenser lens, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9335788A JPH01265134A (en) | 1988-04-18 | 1988-04-18 | Measuring instrument for energy absorption factor of condensing lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9335788A JPH01265134A (en) | 1988-04-18 | 1988-04-18 | Measuring instrument for energy absorption factor of condensing lens |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01265134A true JPH01265134A (en) | 1989-10-23 |
Family
ID=14080026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9335788A Pending JPH01265134A (en) | 1988-04-18 | 1988-04-18 | Measuring instrument for energy absorption factor of condensing lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01265134A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103591910A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | High-precision measurement device for radiometer diaphragm area |
-
1988
- 1988-04-18 JP JP9335788A patent/JPH01265134A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103591910A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | High-precision measurement device for radiometer diaphragm area |
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