JPH01235814A - Displacement detecting sensor - Google Patents

Displacement detecting sensor

Info

Publication number
JPH01235814A
JPH01235814A JP6223588A JP6223588A JPH01235814A JP H01235814 A JPH01235814 A JP H01235814A JP 6223588 A JP6223588 A JP 6223588A JP 6223588 A JP6223588 A JP 6223588A JP H01235814 A JPH01235814 A JP H01235814A
Authority
JP
Japan
Prior art keywords
light
light shielding
detected
displacement
magnetic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6223588A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Sato
佐藤 光広
Hiroyuki Kusuyama
樟山 裕幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP6223588A priority Critical patent/JPH01235814A/en
Publication of JPH01235814A publication Critical patent/JPH01235814A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve reliability by effecting the movement of a light shielding body by the displacement of an object to be detected in a non-contact state by a magnetic material which is separately provided to the side of the object to be detected. CONSTITUTION:The light emitted by a light emitting element is emitted as collimated beams 3a of light by a rod lens 2 via an optical fiber cable 1. The exit light beams 3a are subjected to 90 deg. directional change by a 1st reflecting mirror 6, then to 90 deg. directional change by the 2nd reflecting mirror 6' so that the entire light is projected as the reflected light beams 3b parallel with the exit light beams 3a on the rod lens 2', and is received by the light receiving element via the optical fiber cable 1'. Another magnetic material 16 mounted to the side of the object to be detected is provided to the outside of the magnetic material 15. The magnetic material 15 on the light shielding body 5 side is attracted and moved in a non-contact state as the magnetic material 16 is moved like a dotted line by the displacement of the object to be detected. A light shielding piece 5a is thereby moved and the optical path between the reflecting mirrors 6 and 6' is shut off as shown by the dotted line. The generation of a trouble is thus obviated even if the entire part of the detecting system is hermetically closed and, therefore, the stable state is maintained over a long period of time and the reliability is improved.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、被検出体に変位があったときに当該変位の有
無を光学的に検知する変位検知センサに関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a displacement detection sensor that optically detects the presence or absence of displacement when a detected object is displaced.

[従来の技術と問題点] 例えば精密工作機械のバイトのストロークの動きなどを
監視するなめに所定位置に発・受光素子を配置しておき
、バイトが所定のストロークで動作する際に当該バイト
の移動によって変位する遮光板を設けておき、前記発・
受光素子の光学系路内に前記遮光板が出入することによ
りバイトが正確なストロークで動作しているか否かを検
知する変位検知センサがある。この種変位検知センサは
、従来の電気的接点方式によるものと相違し、検知手段
が非接触式であるから、接点部の庸耗といった問題がな
く、寿命を大巾に伸ばし得るのみならず、誤動作も少な
いことから信頼性の向上にも寄与し得るなど多くの長所
を有しており、光関係システムの長足の進歩に伴い最近
注目を集めるようになった。
[Prior art and problems] For example, in order to monitor the stroke movement of a cutting tool in a precision machine tool, a light emitting/receiving element is placed at a predetermined position. A light-shielding plate that is displaced by movement is provided, and the light emitting and
There is a displacement detection sensor that detects whether the cutting tool is operating with an accurate stroke by moving the light shielding plate in and out of the optical system path of the light receiving element. This type of displacement detection sensor differs from conventional electric contact type sensors in that the detection means is non-contact type, so there is no problem of wear and tear on the contact parts, and the service life can be greatly extended. It has many advantages, such as fewer malfunctions and can contribute to improved reliability, and has recently attracted attention as optical-related systems continue to advance.

第4および5図に、この種従来の光学的変位センサの2
様の実施例を示す。
4 and 5 show two conventional optical displacement sensors of this kind.
An example is shown below.

第4図は、光の反射にプリズム4を使用する例を示すも
のであり、図示してない発光素子より出射された光を光
ファイバ1aで導き、ロッドレンズ2により平行光とさ
れた出射光3aをプリズム4により反射して反射光3b
となし、ロッドレンズ2″より入力せしめて光ファイバ
1゛aを介し図示してない受光素子により受光するよう
に構成されるものである9反射光3bの光路部分には、
図示してない被検出体の変位に応じて図中矢印方向に変
位する遮光板5が設けられており、遮光板5が変位して
点線位置に移動することで反射光3bの光路を遮断し、
再び変位して実線位置に戻ることにより反射光3bの光
路が開かれるようになっている。このようにして受光素
子が反射光3bの有無を検出することにより被検出体の
変位を検知する。
FIG. 4 shows an example of using a prism 4 for reflecting light, in which light emitted from a light emitting element (not shown) is guided through an optical fiber 1a, and the emitted light is made into parallel light by a rod lens 2. 3a is reflected by the prism 4 to produce reflected light 3b.
In the optical path portion of the reflected light 3b, which is configured to be inputted from the rod lens 2'' and received by a light receiving element (not shown) via the optical fiber 1a,
A light-shielding plate 5 is provided that displaces in the direction of the arrow in the figure in accordance with the displacement of a detected object (not shown), and when the light-shielding plate 5 displaces and moves to the dotted line position, it blocks the optical path of the reflected light 3b. ,
By being displaced again and returning to the solid line position, the optical path of the reflected light 3b is opened. In this way, the light receiving element detects the presence or absence of the reflected light 3b, thereby detecting the displacement of the object to be detected.

第5図は、第4図のプリズム4の代りに45゜の反射面
を有する2枚の反射16.6−を設置し  、たもので
あり、本実施例の場合には2枚の反射鏡6.6−の間に
遮光板5を配置し、この反射鏡の間の光路を遮断できる
ようにしてあり、センサの設置条件によってこのようう
な位置に遮光板5を設置した方が能率的な場合に選択さ
れる。
In Fig. 5, two reflecting mirrors 16.6- with 45° reflecting surfaces are installed in place of the prism 4 in Fig. 4, and in the case of this embodiment, two reflecting mirrors are used. A light shielding plate 5 is placed between 6 and 6 to block the optical path between the reflecting mirrors.Depending on the installation conditions of the sensor, it may be more efficient to install the light shielding plate 5 at such a position. Selected in case.

しかし、上記第4および5図に示された従来構成のセン
サにはつぎのような問題点がある。
However, the conventional sensor shown in FIGS. 4 and 5 has the following problems.

第1に遮光板5の変位移動が被検出体とのメカニカルな
接触により行なわれるという問題である。
The first problem is that the displacement movement of the light shielding plate 5 is performed by mechanical contact with the object to be detected.

確かに変位の検知手段は光学的な非接触状態で行なわれ
るが、遮光板を接触方式で移動させたのでは結局従来の
電気的接点方式と余り変りがなく、接触部の摩耗は不可
避であり、そのための動作不良のおそれはなお避は難い
It is true that the displacement detection means is carried out in an optical non-contact state, but if the light shielding plate is moved by the contact method, it is ultimately not much different from the conventional electrical contact method, and wear of the contact part is inevitable. However, it is still difficult to avoid the risk of malfunction.

第2に、センサ部分を塵埃や湿度、外力あるいは放射線
などから防護するためにセンサ部をケース内に収納した
い場合が多いが、上記の通り遮光板を機械的な接触によ
り変位させる以上、ケース内に完全密閉することができ
ないという問題がある。これを敢えて実行しようとする
には被検出体までもケース内に納めてやらねばならず、
寸法的にきわめて大型化することは避は難いのである。
Second, in many cases it is desirable to store the sensor part inside a case to protect it from dust, humidity, external force, radiation, etc. However, as mentioned above, since the light shielding plate is displaced by mechanical contact, The problem is that it cannot be completely sealed. In order to dare to carry out this, the object to be detected must also be placed inside the case.
It is unavoidable that the size will become extremely large.

[発明の目的] 本発明は、上記したような従来技術の欠点を解消し、光
学的な変位検知センサにおいてセンサ部分を完全密閉す
ることを可能とするばかりでなく、遮光体への変位付与
についても完全な非接触方式となし得る新規な光学的変
位検知センサを提供しようとするものである。
[Object of the Invention] The present invention eliminates the drawbacks of the prior art as described above, and not only makes it possible to completely seal the sensor part in an optical displacement detection sensor, but also makes it possible to completely seal the sensor part in an optical displacement detection sensor. The present invention also aims to provide a novel optical displacement detection sensor that can be completely non-contact type.

[発明の概要] 本発明は、遮光体の変位に磁力を利用するものであり、
遮光体の少なくとも一部を磁性体をもって構成し、変位
を検知する光学的系路および遮光体を密閉ケース内に収
納する一方、遮光体の移動は密閉ケース外の磁性体によ
る遮光体側磁性体への移動誘起により行なわせ得るよう
に構成しなものであって、それにより遮光体の変位を完
全な非接触方式で行なわせ得ると共に全体の密閉ケース
内への収納を可能ならしめたものである。
[Summary of the invention] The present invention utilizes magnetic force to displace a light shielding body,
At least a part of the light shielding body is made of a magnetic material, and the optical system for detecting displacement and the light shielding body are housed in a sealed case, while the movement of the light shielding body is caused by the magnetic body outside the sealed case toward the magnetic body on the light shielding body side. The light shielding body is constructed so that it can be displaced by inducing the movement of the light shielding body, thereby making it possible to displace the light shielding body in a completely non-contact manner, and also making it possible to store the entire body in a sealed case. .

[実施例] 以下に、本発明について実施例図面を参照し説明する。[Example] The present invention will be described below with reference to the drawings.

第1図は本発明に係る変位検知センサの具体的構成例を
示す断面図である。
FIG. 1 is a sectional view showing a specific example of the configuration of a displacement detection sensor according to the present invention.

1.1″は内部に光ファイバを有する光フアイバケーブ
ル、7.7−は当該光フアイバケーブルの端末に取付け
られたコネクタ、8.8−はコネクタ7.7゛と対をな
すレセプタクル、2.2′は前記レセプタクル8,8−
内の光ファイバの端末に設けられなロッドレンズである
1.1'' is an optical fiber cable having an optical fiber inside; 7.7- is a connector attached to the end of the optical fiber cable; 8.8- is a receptacle paired with the connector 7.7''; 2. 2' is the receptacle 8, 8-
This is a rod lens installed at the end of the optical fiber.

図示してない発光素子により発光された光は、光フアイ
バケーブル1の光ファイバを介しロッドレンズ2より平
行出射光3aとなって出射される。
Light emitted by a light emitting element (not shown) is emitted from the rod lens 2 via the optical fiber of the optical fiber cable 1 as parallel emitted light 3a.

出射光3aの先方には45°方向の反射面を有する第1
の反射jfi6があり、当該反射鏡6によって90°方
向転換せしめられた光は第2の反射鏡6゛でもう一度9
0゛方向転換せられ、出射光3aと平行な反射光3bと
なって全光がロッドレンズ2“に入射し、光フアイバケ
ーブル1゛を介して図示してない受光素子に受光される
At the front of the emitted light 3a, there is a first mirror having a reflective surface in the 45° direction.
There is a reflection jfi6, and the light whose direction is changed by 90 degrees by the reflector 6 is reflected once again by 90 degrees by the second reflector 6゛.
The direction is changed to 0°, and the reflected light 3b becomes parallel to the emitted light 3a, and all the light enters the rod lens 2'' and is received by a light receiving element (not shown) via the optical fiber cable 1''.

一方、本実施例においては、前記出・反射光3a、3b
と平行方向に前後移動し得る遮光体5があり、遮光体5
の一部は遮光片5aに形成され、該遮光片5aが図中点
線位置まで変位することで前記反射鏡6および6−の間
で光路を遮断し得るようになっている。11は上記遮光
体5を保持しているホルダ、12は遮光体5の先端に取
付けられてホルダ11の空間11a内を遮光体5の前記
移動方向に動き得る角型片である。
On the other hand, in this embodiment, the emitted and reflected lights 3a and 3b
There is a light shielding body 5 that can move back and forth in a direction parallel to the light shielding body 5.
A part of the light shielding piece 5a is formed on a light shielding piece 5a, and by moving the light shielding piece 5a to a position indicated by a dotted line in the figure, the optical path can be blocked between the reflecting mirrors 6 and 6-. Reference numeral 11 denotes a holder that holds the light shield 5, and 12 is a square piece that is attached to the tip of the light shield 5 and can move within the space 11a of the holder 11 in the moving direction of the light shield 5.

第2図は、上記のように構成されるホルダ11の部分断
面図であり、第3図は第2図のA−A断面図を示すもの
である。角型片12は図のように4角形(4角に限定は
されない)に形成されて遮光体5の基幹5bに固定され
、ホルダ11の空間11aも角型片12の外形に見合っ
た断面4角形に形成されることにより、遮光体5が回転
することなく進退移動ができるようになっている。13
は上記のようにして進退移動する遮光体5をホームポジ
ションに復帰させるためのスプリング、14は遮光体5
の移動を円滑ならしめるベアリングであり、15は遮光
体″5の外郭に取付けられた磁性体である。磁性体15
の外側には図示してない被検出体側に取付けられた別個
の磁性体16があり、外側磁性体16が被検出体の変位
により第1図中点線のように移動することで遮光体5側
の磁性体15を非接触的に引き付は移動させ、それによ
って前記遮光片5aが移動せしめられ、反射m6.6−
間の光路を前記第1図中点線で示したように遮断するよ
うに構成される。
FIG. 2 is a partial cross-sectional view of the holder 11 constructed as described above, and FIG. 3 is a cross-sectional view taken along the line AA in FIG. The square piece 12 is formed into a square shape (not limited to four corners) as shown in the figure and is fixed to the main body 5b of the light shielding body 5, and the space 11a of the holder 11 also has a cross section 4 corresponding to the outer shape of the square piece 12. By being formed into a rectangular shape, the light shielding body 5 can move forward and backward without rotating. 13
14 is a spring for returning the light shielding body 5 that moves forward and backward as described above to the home position; 14 is the light shielding body 5;
15 is a magnetic body attached to the outer shell of the light shielding body "5.Magnetic body 15
There is a separate magnetic body 16 attached to the side of the object to be detected (not shown) on the outside of the body, and when the outer magnetic body 16 moves as shown by the dotted line in FIG. The magnetic body 15 is attracted and moved in a non-contact manner, thereby moving the light shielding piece 5a, and the reflection m6.6-
The structure is such that the optical path between them is blocked as shown by the dotted line in FIG.

上記のように構成される光学系路、反射鏡および遮光体
などは露出配置であっても機能において相違するところ
はないが、精密装置類などに適用するには、塵埃や外力
、湿気などより全体を保護するため、パツキン9.9−
を有する密閉ケース10内に収納してしまうことが望ま
しく、またそれが可能である。
Although there is no difference in function even if the optical system path, reflector, light shielding body, etc. configured as above are placed in an exposed position, they must be protected from dust, external force, moisture, etc. when applied to precision equipment. To protect the whole, Patsukin 9.9-
It is desirable and possible to house the device in a sealed case 10 having a

すなわち、本発明は、上記の通り非接触的に遮光体を変
位せしめることが可能であるから、検知系全体を密閉化
してしまってもなんの不具合も生じないのである。第1
図に示すように全体を密閉ケース10内に収納し、当該
ケース10の外側に被検出体側の磁性体16を配置する
のである。遮光体5は外側磁性体16と遮光体側磁性体
15の磁力による相互引き合いにより変位せしめられる
から、磁性体15と16との間にケースの外壁が存在し
ていても動作上全く問題ないのであり、このことが従来
不可清明された密閉ケース内への検知系の収納を可能な
らしめ、より精密な動作とそれに伴う信頼性の確保を可
能ならしめたものである。
That is, in the present invention, since it is possible to displace the light shielding body in a non-contact manner as described above, no problem occurs even if the entire detection system is sealed. 1st
As shown in the figure, the entire device is housed in a sealed case 10, and a magnetic body 16 on the side of the detected object is placed outside the case 10. Since the light shielding body 5 is displaced by mutual attraction due to the magnetic force of the outer magnetic body 16 and the light shielding side magnetic body 15, there is no operational problem even if the outer wall of the case exists between the magnetic bodies 15 and 16. This makes it possible to house the detection system in a sealed case, which has been impossible in the past, and makes it possible to ensure more precise operation and associated reliability.

なお、密閉ケース10内に収納した場合、外部磁性体1
6によって動作せしめられる遮光体5の磁性体15はで
きるだけケース10の内壁近くに配置し、外部磁性体1
6に近接させておくことが望ましい、このためには、第
1図に示すように遮光体5の外郭をケース10の内壁に
向って伸延させ、その先端部に磁性体15を取付けるよ
うにするのがよく、遮光体5の伸延部分に窓5cおよび
5”Cを設置することで伸延部分が光路3a。
Note that when stored in the sealed case 10, the external magnetic body 1
The magnetic body 15 of the light shielding body 5 operated by the external magnetic body 1 is arranged as close to the inner wall of the case 10 as possible.
For this purpose, as shown in FIG. 1, the outer shell of the light shielding body 5 should be extended toward the inner wall of the case 10, and the magnetic body 15 should be attached to its tip. It is preferable to install windows 5c and 5''C in the extended portion of the light shielding body 5, so that the extended portion becomes the optical path 3a.

3bに対する障害となるのを回避すればよい。What is necessary is to avoid it becoming an obstacle to 3b.

なお、上記密閉ケース10の材質については非磁性であ
る必要があり、プラスチック系の材質あるいは金属であ
れば鋼あるいはアルミニウムなどが適当である。また、
検出距離の調整には、遮光片5aの長さを調整してやれ
ばよい4 [発明の効果] 以上の通り、本発明に係る変位検知センサによればつぎ
のようなすぐれた効果を発揮させることができる。
The material of the sealed case 10 needs to be non-magnetic, and suitable plastic materials or metals such as steel or aluminum are suitable. Also,
The detection distance can be adjusted by adjusting the length of the light shielding piece 5a.4 [Effects of the Invention] As described above, the displacement detection sensor according to the present invention can exhibit the following excellent effects. can.

(1)被検出体に対してすべて非接触状態で変位移動を
検出できるから、摩耗などによる損傷部分がないなめ、
接触式にみられたような故障がなく、長期間にわたり安
定状態を維持し信頼性の向上に寄与するところが大きい
(1) Since the displacement movement of the object to be detected can be detected without any contact, there are no damaged parts due to wear etc.
There are no failures like those seen with contact type systems, and the system maintains a stable state over a long period of time, greatly contributing to improved reliability.

(2)非接触式であるが故に検出系全体を密閉ケース内
に収納することができ、防塵、防湿などによる精度保持
が可能となる。
(2) Since it is a non-contact type, the entire detection system can be housed in a sealed case, making it possible to maintain accuracy through dustproofing and moistureproofing.

(3)  ケース内に収納しかつ全光式とすることで外
部ノイズを十分に排除することができ、それによる信頼
性向上効果は大きなものがある。
(3) By storing it in a case and using an all-optical system, external noise can be sufficiently eliminated, which has a significant effect on improving reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る実施例の構成を示す断面図、第2
図はホルダ部分近傍の部分断面図、第3図は第2図のA
−A断面図、第4および5図は従来構成における2様の
実施態様を示す説明図である。 1.1−:光フアイバケーブル、 2.2−:ロツドレンズ、 3a二出射光、 3b=反射光、 5:遮光体、 5a:遮光片、 6.6−:反射鏡、 7.7−:コネクタ、 8.8°:レセプタクル、 10:密閉ケース、 11:ホルダ、 12:角型片、 13ニスプリング、 14:ベアリング、 15.16:磁性体。 代理人  弁理士  佐 藤 不二雄 第 1図 g、e’:  し17’タクIし IO: 旭川ブース A−A計1 1JE4図
FIG. 1 is a sectional view showing the configuration of an embodiment according to the present invention, and FIG.
The figure is a partial cross-sectional view of the vicinity of the holder, and Figure 3 is A in Figure 2.
-A cross-sectional view, FIGS. 4 and 5 are explanatory diagrams showing two embodiments of the conventional configuration. 1.1-: Optical fiber cable, 2.2-: Rod lens, 3a two-output light, 3b = reflected light, 5: Light shielding body, 5a: Light shielding piece, 6.6-: Reflector, 7.7-: Connector , 8.8°: Receptacle, 10: Sealed case, 11: Holder, 12: Square piece, 13 Spring, 14: Bearing, 15.16: Magnetic material. Agent Patent Attorney Fujio Sato Figure 1 g, e': Shi17'Taku IIO: Asahikawa Booth A-A Total 1 Figure 1JE4

Claims (2)

【特許請求の範囲】[Claims] (1)発光素子より発光された光を受光素子により受光
する光学系路の中途に被検出体の変位に応じて移動可能
な遮光体を配置し、当該遮光体の少なくとも一部を磁性
体をもって構成しておき、被検出体の変位による遮光体
の移動を当該被検出体側に別途設けられた磁性体によつ
て非接触的に行なわせ得るように構成してなる変位検知
センサ。
(1) A light shielding body that is movable according to the displacement of the object to be detected is arranged in the middle of the optical system path where the light emitted from the light emitting element is received by the light receiving element, and at least a part of the light shielding body is attached with a magnetic material. A displacement detection sensor configured such that a light shielding body can be moved in a non-contact manner by a magnetic body separately provided on the side of the detected object due to displacement of the detected object.
(2)密閉ケース内に発・受光端および発光端よりの出
射光を当該出射光と平行方向に反射させる2枚の反射鏡
を収納配置し、同じく密閉ケース内に収納されている遮
光体は少なくとも一部が磁性体をもって構成されかつ前
記出・反射光に平行方向に前後移動可能に構成されると
共に、当該遮光体の遮光片は前記2枚の反射鏡の間で遮
光し得るように構成し、被検出体の変位があった場合に
は密閉ケース外の磁性体が非接触的にケース内の遮光体
の磁性体に変位移動を誘起せしめ得るよう構成してなる
変位検知センサ。
(2) Two reflecting mirrors that reflect the emitted light from the light emitting/receiving end and the light emitting end in a direction parallel to the emitted light are housed in the sealed case, and the light shielding body which is also housed in the sealed case is At least a part thereof is made of a magnetic material and is configured to be movable back and forth in a direction parallel to the emitted and reflected light, and the light blocking piece of the light blocking body is configured to be able to block light between the two reflective mirrors. The displacement detection sensor is configured such that when there is a displacement of the object to be detected, the magnetic body outside the sealed case can induce displacement movement in the magnetic body of the light shielding body inside the case in a non-contact manner.
JP6223588A 1988-03-16 1988-03-16 Displacement detecting sensor Pending JPH01235814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6223588A JPH01235814A (en) 1988-03-16 1988-03-16 Displacement detecting sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6223588A JPH01235814A (en) 1988-03-16 1988-03-16 Displacement detecting sensor

Publications (1)

Publication Number Publication Date
JPH01235814A true JPH01235814A (en) 1989-09-20

Family

ID=13194293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6223588A Pending JPH01235814A (en) 1988-03-16 1988-03-16 Displacement detecting sensor

Country Status (1)

Country Link
JP (1) JPH01235814A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0454975A2 (en) * 1990-03-30 1991-11-06 Motorola, Inc. Position and motion detector
US7521921B2 (en) 2004-10-26 2009-04-21 Georgia Tech Research Corporation Displacement sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0454975A2 (en) * 1990-03-30 1991-11-06 Motorola, Inc. Position and motion detector
US7521921B2 (en) 2004-10-26 2009-04-21 Georgia Tech Research Corporation Displacement sensor

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