JPH01228688A - Machining head for laser bean machine - Google Patents

Machining head for laser bean machine

Info

Publication number
JPH01228688A
JPH01228688A JP63055136A JP5513688A JPH01228688A JP H01228688 A JPH01228688 A JP H01228688A JP 63055136 A JP63055136 A JP 63055136A JP 5513688 A JP5513688 A JP 5513688A JP H01228688 A JPH01228688 A JP H01228688A
Authority
JP
Japan
Prior art keywords
laser beam
condenser lens
nozzle
laser
fine adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63055136A
Other languages
Japanese (ja)
Inventor
Masaru Kaneoka
優 金岡
Motoi Kitani
木谷 基
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP63055136A priority Critical patent/JPH01228688A/en
Publication of JPH01228688A publication Critical patent/JPH01228688A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035Aligning the laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To increase accuracy of laser beam machining by constituting to carry out fine adjustments of a condenser lens and a nozzle and adjusting an inclination of a laser beam incident on the condenser lens and allowing the center of the condensed laser beam to coincide with the center of the nozzle. CONSTITUTION:A condenser lens fine adjustment means 8a to move the condenser lens 3 in the X-Y directions by an adjusting screw 9 to carry out the fine adjustment and a nozzle fine adjustment means 10 to move the nozzle 4 in the X-Y directions by an adjusting screw 11 to carry out the fine adjustment are arranged. By this method, the inclination of the laser beam incident on the condenser lens is adjusted and the center of the condensed laser beam is coincident with the center of the nozzle and machining with high accuracy can be carried out.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、レーザ加工機の加工ヘッドに関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a processing head of a laser processing machine.

〔従来の技術〕[Conventional technology]

第2図は例えば特開昭61−279391号公報に示さ
れた従来のV−ザ加工機の加工ヘッドを示す断面図でめ
る。
FIG. 2 is a sectional view showing a machining head of a conventional V-za machining machine disclosed in, for example, Japanese Unexamined Patent Publication No. 61-279391.

レーザ発振器(図示せず)から収り出でれたレーザ光(
1)は、一般にペンドミツ−(図示せず)により反射さ
れてレーザ光ガイド管(2)内を加工ヘッド部へと導か
れる。
Laser light (
1) is generally reflected by a pendant (not shown) and guided through a laser light guide tube (2) to the processing head.

そして、レーザ光(1)はレーザ光ガイドif (2)
の出力端部に設けられた集光レンズ(8)によって集光
さ扛、高エネルギー密度のレーザ光となってノズノシ(
4)先端のレーザ光通過口(5)から被加工物(6)表
面に照射でれる。なお、V−ザ加工に際してはアシスト
ガス供給口(7)から、アシストガスがノズ/l/ (
4)のレーザ光通過口(5)から加工部分に噴射嘔れる
。このアシストガスには、例えば窒素、アルゴンガスお
よび酸素等が用いられ、レーザ加工時に発生するt&加
工物(6)のスラッジ等を吹き飛ば丁役目全果たしてい
る。
And the laser light (1) is guided by the laser light guide if (2)
The light is focused by the condensing lens (8) provided at the output end of the laser beam, and becomes a high energy density laser beam.
4) The surface of the workpiece (6) is irradiated from the laser beam passage port (5) at the tip. In addition, during V-za processing, assist gas is supplied from the assist gas supply port (7) to the nozzle/l/(
4) The laser beam is emitted from the laser beam passage port (5) onto the processed part. This assist gas includes, for example, nitrogen, argon gas, oxygen, etc., and plays the role of blowing off sludge from the t&workpiece (6) generated during laser processing.

なお、レーザ加工ヘッドは、レーザ光ガイド管(2)の
出力端部に設けられたノズル(4)中心と、レーザガイ
ドv(2)の心馳とは一致するように一体構成塾れてい
る。また、集光レンズ(3)はレーザ光ガイド管(2)
とノズル(4)の接続部分に設けられたX−Y方向碌調
機構(8)に取り付けられていて、調整ネジ(9)の誠
整で集光レンズ(8)の位置をX−Y方向に微調できる
。つまり、集光レンズ(3)をX−Y方向画調機構(8
)に取り付けるとき、レンズのレンズ保持部の取り付は
誤差かめって、第8図に示すようにレーザ光(1)の光
軸と集光レンズ(3)の中心とが位置ズレ(A)を生じ
ることがめる。この場合、X−Y方向la調機構(8)
の調整ネジ(9)により集光レンズ(3)tレーザ光ガ
イド管(2)に対しX−Y方向に微調して、第4図に示
すように集光レンズ(3)の中心をレーザ光(1)の光
軸と一致嘔ぜるものでるる。したがって、レーザ光ガイ
ネトIN(2)の8軸とノズル(4)のV−ザ光通過口
(5)の中心とが一致するように一陣構成でれているた
め、集光レンズ(3)のX−Y方向への移動によってレ
ーザ光(1)は、ノズ/I/(4)のレーザ光通過口(
5)の中心を通過して被加工物(6)に照射1れること
になる。
The laser processing head is integrally constructed so that the center of the nozzle (4) provided at the output end of the laser light guide tube (2) coincides with the center of the laser guide (2). . In addition, the condenser lens (3) is connected to the laser light guide tube (2).
It is attached to the X-Y direction adjustment mechanism (8) provided at the connection part of the and nozzle (4), and the position of the condenser lens (8) can be adjusted in the X-Y direction by adjusting the adjustment screw (9). It can be finely adjusted. In other words, the condenser lens (3) is
), the attachment of the lens holding part of the lens may have a slight error, causing the optical axis of the laser beam (1) and the center of the condensing lens (3) to be misaligned (A) as shown in Figure 8. It can be seen that this occurs. In this case, the X-Y direction la adjustment mechanism (8)
Finely adjust the condenser lens (3) and the laser light guide tube (2) in the X-Y direction using the adjustment screw (9), and align the center of the condenser lens (3) with the laser beam as shown in Figure 4. It coincides with the optical axis of (1).It makes me vomit. Therefore, since the 8 axes of the laser beam IN (2) and the center of the V-za light passage port (5) of the nozzle (4) coincide with each other, the condenser lens (3) By moving in the X-Y direction, the laser beam (1) passes through the laser beam passage opening (
5) and is irradiated onto the workpiece (6).

〔発明がI’JI決しようとする課題〕しかしながら、
レーザ発拐器から取り出てれたレーザ光(1)が集光レ
ンズ(3)へ入射する角度は第5図に示すように、集光
レンズ(3)の中心(3a)に対しである煩きθをもっ
て入射することがある。これは、レーザ光(1)を集光
レンズ(3)に導く経路に設けられた複数のペンドミラ
ーの調整不良などによるものであり、この調整には多大
な時間と熟練を要する。したがって、レーザ光(1)が
集光レンズ(3)へ傾いて入射した場合は、第5図に示
すようにレーザ光(1)の焦点位置は集光レン、ズ(3
)の中心(3a)から外れた位置(A1)に結ばれてし
1い、このまま加工を行うと被加工物の切@溝が傾いて
し1うという課題があった。
[The problem that the invention attempts to solve] However,
As shown in Figure 5, the angle at which the laser beam (1) taken out from the laser emitter is incident on the condenser lens (3) is relative to the center (3a) of the condenser lens (3). The light may be incident with a nuisance θ. This is due to maladjustment of the plurality of pendor mirrors provided in the path that guides the laser beam (1) to the condenser lens (3), and this adjustment requires a great deal of time and skill. Therefore, when the laser beam (1) is incident on the condenser lens (3) at an angle, the focal position of the laser beam (1) is
) is tied at a position (A1) away from the center (3a) of the workpiece, and if machining is continued as it is, there is a problem that the cut/groove of the workpiece will be tilted.

この発明は上記のような課題を解消するためにな嘔れた
もので、レーザ光が集光レンズへ傾いて入射した場合で
も、被加工物への入射角度全調整することで、精度の高
いレーザ加工ができるレーザ加工機の加工ヘッドを得る
ことを目的とする。
This invention was developed to solve the above problems, and even when the laser beam enters the condenser lens at an angle, it can achieve high precision by fully adjusting the angle of incidence on the workpiece. The purpose of this invention is to obtain a processing head for a laser processing machine capable of laser processing.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に保るレーザ加工機の加工ヘッドは、[レーザ
光を集光して被加工物へ照射する集光レンズ金X−Y方
向に微調する集光レンズ微調手段と、集光レンズによっ
て集光嘔れたレーザ光の通過口を有したノズ)v 2 
X −Y方向に微調するノズル微調手段と全油えたもの
である。
The processing head of the laser processing machine according to the present invention includes a condenser lens that condenses the laser beam and irradiates it onto the workpiece; a condenser lens fine adjustment means that finely adjusts the laser beam in the X-Y direction; Nozzle with a passage hole for the emitted laser light) v 2
It is fully oil-filled and includes nozzle fine adjustment means for fine adjustment in the X-Y direction.

〔作用〕[Effect]

この発明においては、集光レンズ微調手段により集光レ
ンズへ傾いて入射したレーザ光の傾きが調整され、ノズ
ル微調手段により集光されたレーザ光とノズル中心とが
一致するように調整堰れる。
In this invention, the inclination of the laser beam that is obliquely incident on the condenser lens is adjusted by the condenser lens fine adjustment means, and the laser beam focused by the nozzle fine adjustment means is adjusted so that it coincides with the center of the nozzle.

〔弁明の夾施例〕[Example of explanation]

以下、この発明の一実施例を第1図について説明するが
、従来のものと同−又は相当部分には同一符号を付し説
明を省略する。図において、(8a)は調整ネジ(9)
により集光レンズ(3)iX−Y方向に移動して微調を
行う集光レンズ微調手段、(10)は調整ネジα1)に
よレンズ)v (4) f X −Y方向に移動して微
調全行うノズル微調手段である。
Hereinafter, an embodiment of the present invention will be described with reference to FIG. 1, in which the same or equivalent parts as in the conventional one are denoted by the same reference numerals and the explanation thereof will be omitted. In the figure, (8a) is the adjustment screw (9)
Condensing lens (3) I Fine adjustment means for fine adjustment by moving the condensing lens in the X-Y direction, (10) Fine adjustment means for fine adjustment by moving the condensing lens in the i This is a nozzle fine adjustment means that does all the work.

レーザ加工機においては、レーザ尭倣器(図示せず)か
ら出力てれたレーザ光(1)は、レーザ光(1)が導か
れる経路に設けられたペンドミラー(図示せず)によっ
て反射され、レーザ光ガイド管(2)内を集光レンズ(
3)1で導かれる。そして、集光レンズ(3)に入射し
たレーザ光(1)は集光されて、ノズル(4)のレーザ
光通過口(5)からレーザ光(1)の焦点位置近傍に設
置された被加工物(6)表面に照射嘔れて加工が行われ
る。このとき、アシストガス供給口(7)からノズル(
4)のレーザ光通過口(5)ヲ経てアシストガスが噴射
され、被加工物(6)のレーザ光照射点(加工部分)を
被い加工を促進する。
In a laser processing machine, a laser beam (1) output from a laser imprinter (not shown) is reflected by a pend mirror (not shown) provided in a path along which the laser beam (1) is guided. A condenser lens (
3) Guided by 1. The laser beam (1) incident on the condensing lens (3) is then condensed and passed through the laser beam passage opening (5) of the nozzle (4) to the workpiece placed near the focal point of the laser beam (1). The surface of the object (6) is irradiated and processed. At this time, from the assist gas supply port (7) to the nozzle (
Assist gas is injected through the laser beam passage port (5) in step 4), covering the laser beam irradiation point (machining part) of the workpiece (6) and promoting the machining.

ところで、レーザ光振器から出力芒れたレーザ光(1)
は、一般に複数のペンドミラーにより反射されて集光レ
ンズ(3)1で導かれるため、集光レンズ(3)に入射
するレーザ光(1)は必ずしも集光レンズ(3)に対し
て垂直とはならず、ある程度傾いた状態で入射すること
になる。この状態で加工を行った場合は、先に述べたよ
うに加工楠反に悪影響を与えることになる。そこで、こ
の発明によるレーザ加工機の加工ヘッドは、レーザ光(
1)がめる傾きをもって集光レンズ(3)に入射(7た
ときは、集光レンズ微調手段(8a)の調整ネジ(9)
によって集光レンズ(8)t−X−Y方向に移!0させ
てレーザ光(1)の入射角度を調整する。即ち、第5図
に示すように、集光レンズ(3)の中心(3a)に対し
て光軸(1a)がある角度θで入射したレーザ光(1)
は、七の入射角θの′!1ではA1の位置に焦点を結ぶ
ことになるが、例えば集光レンズ(3)全図の破線で示
す位置に移動の すれば、入射角θは同じでも光軸は1b″#、位置に移
vJ−rるため焦点も移動した光軸(1b)上のA2の
位置に移動することになる。これによって、被加工物(
6)へは傾きのないレーザ光(1)が照射されるのであ
る。一方、以上のようにしてV−ザ光(1)の傾きを調
整した後に、レーザ光(1)の中心とノズル(4)の中
心を一致芒せる場合は、ノズiv徽調手段も(10)の
調整ネジ(11)によってノス′ル(4)金X−Y方向
に移動石ぜて調整すればよい。このように、レーザ光(
1)の傾きやノズ/I/(4)位置が調整ちれた加工ヘ
ッドによりレーザ加工を行う場合には、レーザ光(1)
が被加工物(6)に対して傾き金もたずに照射されると
ともに、ノズル(4)のレーザ光通過口(5)から噴射
でれるアシストガスも加工部分全均一に被うことになる
ので精度の高い加工が可能となるのである。
By the way, the laser beam output from the laser beam oscillator (1)
Generally, the laser beam (1) incident on the condenser lens (3) is not necessarily perpendicular to the condenser lens (3) because it is reflected by a plurality of pend mirrors and guided by the condenser lens (3) 1. Instead, it will be incident at a certain angle. If processing is carried out in this state, it will have an adverse effect on the processed camphor fabric, as described above. Therefore, the processing head of the laser processing machine according to the present invention uses a laser beam (
1) Inject the light into the condenser lens (3) at a tilted angle.
Move the condenser lens (8) in the t-X-Y direction! 0 to adjust the incident angle of the laser beam (1). That is, as shown in FIG. 5, the laser beam (1) is incident on the optical axis (1a) at a certain angle θ with respect to the center (3a) of the condenser lens (3).
is the angle of incidence θ of seven! 1, the focus will be focused at position A1, but for example, if the condenser lens (3) is moved to the position shown by the broken line in the full diagram, the optical axis will be moved to position 1b''#, even though the incident angle θ is the same. vJ-r, the focal point also moves to the position A2 on the optical axis (1b).As a result, the workpiece (
6) is irradiated with laser light (1) without any inclination. On the other hand, if the center of the laser beam (1) and the center of the nozzle (4) can be aligned after adjusting the inclination of the V laser beam (1) as described above, the nozzle IV adjustment means (10 ) can be adjusted by moving the nozzle (4) in the X-Y direction using the adjustment screw (11). In this way, the laser beam (
When laser processing is performed using a processing head whose inclination in 1) and nozzle/I/(4) position are adjusted, the laser beam (1)
is irradiated onto the workpiece (6) without tilting, and the assist gas injected from the laser beam passage port (5) of the nozzle (4) also covers the entire processed area uniformly. Therefore, highly accurate machining is possible.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、集光レンズに入射した
レーザ光の傾きを調整するとともに、集光でれたレーザ
光中心とノズル中心とを一致δぜるように構成したので
、ペンドミラーの調整が簡単になる一方、非常に精度の
高い加工が実現できるレーザ加工機の加工ヘッドが得ら
れる効果がある。
As described above, according to the present invention, the inclination of the laser beam incident on the condensing lens is adjusted, and the center of the condensed laser beam is aligned with the center of the nozzle. This has the effect of providing a processing head for a laser processing machine that can perform processing with very high precision while making adjustments easier.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例によるレーザ加工機の加工
ヘッドを示す縦断面図、第2図は従来のレーザ加工機の
加工ヘッドを示す縦断面図、第3図および第4図は従来
加工ヘッドの動作説明図、第5図はレーザ光の焦点位置
を説明するための図である。 図において、(1)はレーザ光、(2)はレーザ光カイ
ト管、(11は集光レンズ、(4)はノズル、(5)に
レーザ光通過口、(6)は被加工物、(8a)は集光レ
ンズ微調手段、(10)はノズ/L’徽調手段である。 なお、図中、同一符号は同−又は相当部分を示す。
FIG. 1 is a longitudinal sectional view showing a processing head of a laser processing machine according to an embodiment of the present invention, FIG. 2 is a longitudinal sectional view showing a processing head of a conventional laser processing machine, and FIGS. 3 and 4 are conventional FIG. 5, which is an explanatory diagram of the operation of the processing head, is a diagram for explaining the focal position of the laser beam. In the figure, (1) is a laser beam, (2) is a laser beam kite tube, (11 is a condenser lens, (4) is a nozzle, (5) is a laser beam passage hole, (6) is a workpiece, ( 8a) is a condensing lens fine adjustment means, and (10) is a nozzle/L' adjustment means. In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] レーザ発振器から出力されたレーザ光を導くレーザ光ガ
イド管と、このレーザ光ガイド管に設けられ、上記レー
ザ光を集光する集光レンズと、このレンズをX−Y方向
に移動する集光レンズ微調手段と、上記集光レンズによ
り集光されたレーザ光を被加工物に照射するとともに加
工に用するアシストガスを噴射するレーザ光通過口を有
したノズルと、このノズルをX−Y方向に移動するノズ
ル微調手段とを備えたことを特徴とするレーザ加工機の
加工ヘッド。
A laser light guide tube that guides the laser light output from the laser oscillator, a condenser lens provided in the laser light guide tube that condenses the laser beam, and a condenser lens that moves this lens in the X-Y direction. a nozzle having a fine adjustment means, a laser beam passage opening for irradiating the workpiece with the laser beam focused by the condensing lens and injecting assist gas used for processing; A processing head for a laser processing machine, characterized by comprising a moving nozzle fine adjustment means.
JP63055136A 1988-03-09 1988-03-09 Machining head for laser bean machine Pending JPH01228688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63055136A JPH01228688A (en) 1988-03-09 1988-03-09 Machining head for laser bean machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63055136A JPH01228688A (en) 1988-03-09 1988-03-09 Machining head for laser bean machine

Publications (1)

Publication Number Publication Date
JPH01228688A true JPH01228688A (en) 1989-09-12

Family

ID=12990366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63055136A Pending JPH01228688A (en) 1988-03-09 1988-03-09 Machining head for laser bean machine

Country Status (1)

Country Link
JP (1) JPH01228688A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996029175A1 (en) * 1995-03-22 1996-09-26 Komatsu Ltd. Position correction apparatus for laser marker
US5910260A (en) * 1995-04-19 1999-06-08 Gerber Garment Technology, Inc. Laser cutter and method for cutting sheet material
WO2003035318A1 (en) * 2001-10-20 2003-05-01 Erlas Erlanger Lasertechnik Gmbh Device and method for laser beam soldering, in particular, laser beam hard soldering
CN100441359C (en) * 2004-05-26 2008-12-10 山崎马扎克公司 Nozzle presetter for laser machining tool of laser beam machine
WO2019180960A1 (en) * 2018-03-23 2019-09-26 Primetals Technologies Japan株式会社 Laser machining head and laser machining apparatus, and laser machining head adjustment method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996029175A1 (en) * 1995-03-22 1996-09-26 Komatsu Ltd. Position correction apparatus for laser marker
US5896233A (en) * 1995-03-22 1999-04-20 Komatsu Ltd. Marking position correcting device for laser marker
US5910260A (en) * 1995-04-19 1999-06-08 Gerber Garment Technology, Inc. Laser cutter and method for cutting sheet material
WO2003035318A1 (en) * 2001-10-20 2003-05-01 Erlas Erlanger Lasertechnik Gmbh Device and method for laser beam soldering, in particular, laser beam hard soldering
CN100441359C (en) * 2004-05-26 2008-12-10 山崎马扎克公司 Nozzle presetter for laser machining tool of laser beam machine
WO2019180960A1 (en) * 2018-03-23 2019-09-26 Primetals Technologies Japan株式会社 Laser machining head and laser machining apparatus, and laser machining head adjustment method
KR20200091908A (en) * 2018-03-23 2020-07-31 프리메탈스 테크놀로지스 재팬 가부시키가이샤 Laser processing head and laser processing device and adjustment method of laser processing head
JPWO2019180960A1 (en) * 2018-03-23 2021-03-11 Primetals Technologies Japan株式会社 Laser processing head, laser processing equipment, and adjustment method of laser processing head

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