JPH01183627A - Manufacture of liquid crystal display device - Google Patents
Manufacture of liquid crystal display deviceInfo
- Publication number
- JPH01183627A JPH01183627A JP777188A JP777188A JPH01183627A JP H01183627 A JPH01183627 A JP H01183627A JP 777188 A JP777188 A JP 777188A JP 777188 A JP777188 A JP 777188A JP H01183627 A JPH01183627 A JP H01183627A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- display device
- crystal display
- oriented film
- tilt angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000010408 film Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 9
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 3
- 239000011737 fluorine Substances 0.000 claims abstract description 3
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- -1 polytetrafluoroethylene Polymers 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 12
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 230000002209 hydrophobic effect Effects 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000010436 fluorite Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- IIZPXYDJLKNOIY-JXPKJXOSSA-N 1-palmitoyl-2-arachidonoyl-sn-glycero-3-phosphocholine Chemical compound CCCCCCCCCCCCCCCC(=O)OC[C@H](COP([O-])(=O)OCC[N+](C)(C)C)OC(=O)CCC\C=C/C\C=C/C\C=C/C\C=C/CCCCC IIZPXYDJLKNOIY-JXPKJXOSSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- WSFMFXQNYPNYGG-UHFFFAOYSA-M dimethyl-octadecyl-(3-trimethoxysilylpropyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCCCC[N+](C)(C)CCC[Si](OC)(OC)OC WSFMFXQNYPNYGG-UHFFFAOYSA-M 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229940067606 lecithin Drugs 0.000 description 1
- 235000010445 lecithin Nutrition 0.000 description 1
- 239000000787 lecithin Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、文字や記号、あるいは画像の表示を行う液晶
表示装置に関するものである。より詳しくは、液晶分子
の基板壁面でのブレ・チルト角が比較的、大きくする必
要のあるモード、すなわちスーパー・ツィステッド・ネ
マチック（ＳＴＮ）またはスーパー・ハイアフリンゼン
ト・イフエクト（ＳＢＥ）モード、ダノブ（ＤＡＰ）や
ハン（ＨＡＮ）等の複層折制ｊＴ！ｉモード（ＥＣＢ）
、ポジ型ゲスト・ホスト（ＧＨ）モード等の液晶表示
装置に関する。そのうちでも、特に液晶分子の配向膜に
関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a liquid crystal display device that displays characters, symbols, or images. More specifically, the mode in which the blur/tilt angle of the liquid crystal molecules at the substrate wall surface needs to be relatively large, that is, the super twisted nematic (STN) or super high fringe effect (SBE) mode, the Danob ( Multilayer folding jT such as DAP) and HAN! i-mode (ECB)
, relates to a liquid crystal display device such as a positive guest-host (GH) mode. Among these, it particularly relates to alignment films for liquid crystal molecules.
従来の技術
近年、液晶表示装置は薄型・軽量という特徴により、パ
ーソナル・コンピュータ、ワードプロセサーなどの端末
表示や、薄型テレビなどの映像表示に用いられている。2. Description of the Related Art In recent years, liquid crystal display devices have been used for displaying terminals such as personal computers and word processors, and for displaying images on flat-screen televisions due to their thinness and light weight.
高品位、大容量表示には、色々な液晶パネルの表示モー
ドのうちでも、ＳＴＮないしＳＢＥモードがふされしい
と認められている。このモードは上下基板の間にネマチ
ック液晶分子が捻れ構造を有する、ツィステッド・ネマ
チック構造を有するものであるが、さらにこの捻れ角が
１２０°〜３６０°程度にし、しかも入射、１線偏光も
パネルに対して複屈折に入れられる。場合によっては、
入射直線偏光は液晶分子軸に、はぼ沿って入れる場合も
ある。Among various liquid crystal panel display modes, STN or SBE mode is recognized as suitable for high-quality, large-capacity display. This mode has a twisted nematic structure in which the nematic liquid crystal molecules have a twisted structure between the upper and lower substrates, but this twist angle is set to about 120° to 360°, and moreover, the incident and single-line polarized light can also be applied to the panel. On the other hand, it is included in birefringence. In some cases,
In some cases, the incident linearly polarized light enters along the axis of the liquid crystal molecules.
液晶分子の捻り角を９０°以上、かなり大きくする場合
、他の捻り角の領域等が発生し、ディスクリネーション
を誘起しやすく、均一表示の障害となる。これは、所望
の液晶分子の捻れの状態と、障害となる液晶分子の捻れ
の状態のエネルギーが、はとんど等しくなるためである
。これを避けるために、基板表面において液晶分子が基
板面に対して３°〜３０°の角度（以後、プレ・チルト
角と称する）で立つようにされる（たとえば、アプライ
ド・フイブラス・レターズ、４５（１０）。When the twist angle of the liquid crystal molecules is made considerably large, such as 90° or more, regions of other twist angles are generated, which tends to induce disclination, which impedes uniform display. This is because the energies of the desired twisted state of the liquid crystal molecules and the twisted state of the liquid crystal molecules that pose an obstacle are almost equal. In order to avoid this, the liquid crystal molecules on the substrate surface are made to stand at an angle of 3° to 30° (hereinafter referred to as the pre-tilt angle) with respect to the substrate surface (for example, Applied Fibers Letters, 45 (10).
１９８４年１）月１５日発行）、−船釣なツイス７テド
・ネマチック・モードの場合、プレ・チルト角は０°〜
３°の範囲にある。(Published on January 15, 1984), - In the boat fishing Twist 7 ted nematic mode, the pre-tilt angle is 0° ~
It is in the range of 3°.
前記のための、すなわち、プレ・チルト角を３°〜３０
’にするために、今まで、液晶分子の配向膜として、−
酸化硅素等の斜方蒸着または特殊な有機樹脂層が使用さ
れる。For the above, i.e. the pre-tilt angle is 3°~30
To achieve this, until now, as an alignment film for liquid crystal molecules, −
Oblique vapor deposition or special organic resin layers such as silicon oxide are used.
また、ＤＡＰやＨＡＮ、ポジ型ＯＨなどのモードの場合
には、基板壁面に対して液晶分子の長軸をほぼ垂直に立
てる、すなわちプレ・チルト角をほぼ９０°にする必要
がある。従来、両親媒性の界面剤の塗布が使われてきた
。たとえば、タンパク質の１種であるレシチンや有機シ
ランの１種であるＤＭＯＡＰ等である（液晶・応用編、
岡野。Furthermore, in the case of modes such as DAP, HAN, and positive OH, it is necessary to make the long axes of liquid crystal molecules almost perpendicular to the substrate wall surface, that is, to make the pre-tilt angle approximately 90°. Traditionally, the application of amphiphilic surfactants has been used. Examples include lecithin, which is a type of protein, and DMOAP, which is a type of organic silane.
Okano.
小林 共編）。(Co-edited by Kobayashi).
発明が解決しようとする課題
しかしながら、斜方蒸着法による従来の配向膜の形成法
では、１０’Ｔｏｒｒ程度の真空を使ったプロセスであ
ることから工程が複雑になること、蒸着機が高価である
ゆえに、液晶表示装置のコストが上昇するという課題が
あった。Problems to be Solved by the Invention However, in the conventional method of forming an alignment film using the oblique evaporation method, the process is complicated because the process uses a vacuum of about 10' Torr, and the evaporation machine is expensive. Therefore, there was a problem that the cost of the liquid crystal display device increased.
また、前述の特殊な有機樹脂配向膜の場合、プレ・チル
ト角を約３°以上に均一に、再現性良く実現するために
は、前記有機樹脂の塗布、硬化条件や、これに続くラビ
ング工程の管理を＠格にする必要があり、歩留りも悪く
なる傾向にある。特にプレ・チルトをｌＯ°以上にする
場合には、再現性が非常に難しい。プレ・チルトが均一
でないと、液晶表示装置の質を大きく劣化させる。In addition, in the case of the above-mentioned special organic resin alignment film, in order to achieve a uniform pre-tilt angle of about 3° or more with good reproducibility, it is necessary to adjust the application and curing conditions of the organic resin, and the subsequent rubbing process. It is necessary to use @ status for management, and the yield tends to be poor. Especially when the pre-tilt is 10° or more, reproducibility is very difficult. If the pre-tilt is not uniform, the quality of the liquid crystal display device will be greatly degraded.
なお、プレ・チルト角を０°〜３°にするのは、確立さ
れた技術であり、容易である。Note that setting the pre-tilt angle to 0° to 3° is an established technique and is easy.
また、２００℃以下でポリ・イミド層が形成し得るポリ
・イミド・レジンを使用する場合、この温度領域では液
晶分子のプレ・チルトは０°〜ｌ°の範囲しか実現でき
ない。Further, when using a polyimide resin that can form a polyimide layer at a temperature below 200°C, the pre-tilt of the liquid crystal molecules can only be realized in the range of 0° to 1° in this temperature range.
ここまで、ポリ・イミド層を中心に述べたが、これはポ
リ・イミド層が有機樹脂のなかで抜群の安定性を有する
ことに基づいている。Up to this point, the description has focused on the polyimide layer, which is based on the fact that the polyimide layer has outstanding stability among organic resins.
さらに高プレ・チルトを要求する場合、すなわちほとん
ど９０°のプレ・チルト角を求める場合、現状では十分
な安定性と再現性をもたらすものは、現在のところ存在
しない。If a higher pre-tilt is required, that is, a pre-tilt angle of almost 90°, there is currently no method that provides sufficient stability and reproducibility.
課題を解決するための手段
本発明は前述のような課題を解決するために、スバフタ
ー法で形成したフッ素を含む有機薄膜を配向膜となすこ
とを特徴とする液晶表示装置の製法を提供するものであ
る。もちろん、前記有機薄膜の形成後、面内の方向付け
のため必要とあらば、ラビング等の処理はされる。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a method for manufacturing a liquid crystal display device, characterized in that an organic thin film containing fluorine formed by a buffetering method is used as an alignment film. It is. Of course, after the formation of the organic thin film, treatment such as rubbing is performed if necessary for in-plane orientation.
このスパッター時に、同時に、紫外光を照射して有機薄
膜を形成するのが、より望ましい。It is more desirable to simultaneously irradiate ultraviolet light during this sputtering to form an organic thin film.
さらにこのときのターゲットとしてはポリ・４フッ化エ
チレン（１’ＴＦＥ）であるのが、より望ましい。Furthermore, it is more desirable that the target at this time be polytetrafluoroethylene (1'TFE).
作用
本発明は前述した構成の液晶表示装置においては、特に
配向膜によって、液晶分子の高いプレ・チルト角を均一
に再現性良く実現でき、質の良い大容量の表示が歩留り
良く得られるようになった。Effects of the present invention In the liquid crystal display device having the above-mentioned configuration, in particular, the alignment film can realize a high pre-tilt angle of the liquid crystal molecules uniformly and with good reproducibility, so that a high-quality, large-capacity display can be obtained with a high yield. became.
高ブレ・チルト角が安定に得られるようになったのは、
表面がフッ素化された有ａ薄膜を配向膜としたことによ
る。これは、前記表面がフン化された樹脂表面によって
、疎水性になることと関係していると思われる。疎水性
になっていることは適当な液体の接触角を測ることによ
り確かめた。The reason why we can now stably obtain high shake and tilt angles is because
This is due to the fact that the aluminium-containing thin film whose surface is fluorinated is used as the alignment film. This seems to be related to the fact that the surface becomes hydrophobic due to the fluorinated resin surface. Hydrophobicity was confirmed by measuring the contact angle of an appropriate liquid.
前記薄膜の膜構造はＥＳＣＡや赤外吸収の測定から、お
およそ推測される。The film structure of the thin film can be roughly estimated from ESCA and infrared absorption measurements.
実施例 以下、本発明の一実施例を図面を用いて説明する。Example An embodiment of the present invention will be described below with reference to the drawings.
本実施例で使われたスパッタリング装置を説明する０図
において、ｌはターゲット、２が基板、３がマツチング
回路、４が高周波発振器、５はアルゴン・ガスの導入口
、６は蛍石からなる窓、７はアルミニウムからなる反射
鏡、８は低圧水銀灯、９は油拡散ポンプへの排気口であ
る。In Figure 0 explaining the sputtering apparatus used in this example, l is a target, 2 is a substrate, 3 is a matching circuit, 4 is a high frequency oscillator, 5 is an argon gas inlet, and 6 is a window made of fluorite. , 7 is a reflecting mirror made of aluminum, 8 is a low-pressure mercury lamp, and 9 is an exhaust port to an oil diffusion pump.
まず、パターン化した錫を含む酸化インヂウム透明導電
膜（ＩＴＯ）を表面に有するガラス基板を１セｙト入手
した。これを良く洗浄し、乾燥後、この基板をスパッタ
リング装置内に設置した。ターゲットには市販のポリ・
４フッ化エチレン、いわゆるテフロンを使った。スパッ
タ・ガスとしてはアルゴン・ガスを用い、高周波電力は
５ Ｗ／ｃｄ程度の条件で膜形成を行った。First, one set of glass substrates having a patterned indium oxide transparent conductive film (ITO) containing tin on the surface was obtained. After thoroughly cleaning and drying, this substrate was placed in a sputtering device. Commercially available poly-
I used tetrafluoroethylene, also known as Teflon. Argon gas was used as the sputtering gas, and the film was formed under conditions of high frequency power of approximately 5 W/cd.
さらにもう一つのセットの基板へ同様の条件で、ただし
ユバフタ−時に低圧水銀灯からの紫外光を基板近傍に照
射した。Furthermore, another set of substrates was irradiated with ultraviolet light from a low-pressure mercury lamp in the vicinity of the substrates under the same conditions, but at the time of evaporation.
形成された膜の厚みは、約０．１５μｍであった。The thickness of the formed film was approximately 0.15 μm.
膜構造の解析の結果、はとんどフルオロ・カーボンから
成っていることが判った。この膜は疎水性であることが
確認された。Analysis of the membrane structure revealed that it was made mostly of fluorocarbon. This membrane was confirmed to be hydrophobic.
これを、捻れ角が２３０°となるように、ラビングなら
びにパネルを組み立てた。すなわち、ＳＴＮタイプの液
晶表示装置の組立を企図した。This was rubbed and the panels were assembled so that the twist angle was 230°. That is, the intention was to assemble an STN type liquid crystal display device.
この際、紫外光照射した場合の膜のほうが、比較的硬い
という感触を得た。これにＳＴＮ用液晶を注入して液晶
パネルを得た。これに偏光板を貼付け、完成した。なお
、ブレ・チルト角測定用に捻れ角がＯｏの、いわゆるホ
モジーニアス・セルをも同時に作った。At this time, it was felt that the film irradiated with ultraviolet light was relatively harder. STN liquid crystal was injected into this to obtain a liquid crystal panel. I attached a polarizing plate to this and completed it. In addition, a so-called homogeneous cell with a torsion angle of Oo was also created at the same time for measuring the shake and tilt angles.
プレ チルト角測定は磁場法を使った。測定値は約１６
°であった。The pre-tilt angle was measured using the magnetic field method. Measured value is approximately 16
It was °.
いわゆるｄ／ｐやギャップ等ある程度の最適化を図った
パネルにおける表示特性においては、１／４００駆動で
、従来のパネルに比べて約５０％以上のコントラストの
向上を見た。Regarding the display characteristics of a panel that has been optimized to a certain extent, such as so-called d/p and gap, we have seen an improvement in contrast of about 50% or more compared to a conventional panel at 1/400 drive.
以上本発明は液晶表示装面の表示品位を向上させるのに
本質的なものである。As described above, the present invention is essential for improving the display quality of a liquid crystal display device.
なお、本実施例では、ツイスト・ネマティック・モード
に関して述べたが、ＤＡＰやＨＡＮ、ボン型ＧＨ・モー
ドについても、本発明を実施した結果、効果が大きいこ
とが判った。In this embodiment, the twisted nematic mode has been described, but as a result of implementing the present invention in the DAP, HAN, and Bonn type GH modes, it was found that the present invention is highly effective.
発明の効果
以上のように本発明は、疎水性の安定な配向膜を得て、
良好な表示、モードによっては従来にもまして良好な大
容量表示や、可能な液晶表示装置を得ることができる。Effects of the Invention As described above, the present invention provides a stable hydrophobic alignment film,
Depending on the display mode, it is possible to obtain a larger capacity display that is better than before, and a possible liquid crystal display device.
図は本−実施例で使われたスパッタリング装置の構成断
面図である。
１・・・・・・ターゲット、２・・・・・・基板、３・
・・・・・マツチング回路、４・・・・・・高周波発振
器、５・・・・・・アルゴン・ガスの導入口、６・・・
・・・蛍石からなる窓、７・・・・・・アルミニウムか
らなる反射鏡、８・・・・・・低圧水銀灯、９・・・・
・・油拡散ポンプへの排気口。
代理人の氏名 弁理士 中尾敏男 はか１名／−−−ク
ーゲ・ント
？−−−差オ反
３−一一マッ千ンク回ンζ
４−一一七子問グレ元ま展λｉ
、ｆ−−−７ｒしコ゛ンカズのΔ１人口、（−−一蛍石
〃・ら１−ろ定
７−−− 反４寸鏡
６−−− イかひｉ→（＃ズＪ
γ−−−ぶ￥九℃
？The figure is a cross-sectional view of the structure of the sputtering apparatus used in this example. 1...Target, 2...Substrate, 3.
...Matching circuit, 4...High frequency oscillator, 5...Argon gas inlet, 6...
...Window made of fluorite, 7...Reflector made of aluminum, 8...Low-pressure mercury lamp, 9...
...Exhaust port to oil diffusion pump. Name of agent Patent attorney Toshio Nakao Haka1 person/---Kuge Nt? ---Difference is 3-11 Machinck rotation ζ 4-117 child question gray original λi, f----7r and concus Δ1 population, (--fluorite et al. 1 -Rotation 7--- Anti-4 size mirror 6--- Ikahii → (#'s J γ---bu ¥9℃?
Claims (3)
配向膜となすことを特徴とする液晶表示装置の製法。(1) A method for manufacturing a liquid crystal display device, characterized in that an organic thin film containing fluorine formed by a sputtering method is used as an alignment film.
薄膜を得ることを特徴とする特許請求の範囲第（１）項
記載の液晶表示装置の製法。(2) A method for manufacturing a liquid crystal display device according to claim (1), characterized in that an organic thin film is obtained by simultaneously irradiating ultraviolet light during sputtering.
）であることを特徴とする特許請求の範囲第（１）項ま
たは第（２）項のいずれかに記載の液晶表示装置の製法
。(3) Target is polytetrafluoroethylene (PTFE)
) The method for manufacturing a liquid crystal display device according to claim 1 or 2, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP777188A JPH01183627A (en) | 1988-01-18 | 1988-01-18 | Manufacture of liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP777188A JPH01183627A (en) | 1988-01-18 | 1988-01-18 | Manufacture of liquid crystal display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01183627A true JPH01183627A (en) | 1989-07-21 |
Family
ID=11674939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP777188A Pending JPH01183627A (en) | 1988-01-18 | 1988-01-18 | Manufacture of liquid crystal display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01183627A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2281977A (en) * | 1993-09-18 | 1995-03-22 | Gold Star Co | Orientation film for a liquid crystal display |
| FR2725534A1 (en) * | 1994-10-11 | 1996-04-12 | Luder Ernst | DEPOSITION OF ORIENTATION LAYERS ON A SUBSTRATE FOR ALIGNMENT OF LIQUID CRYSTAL MOLECULES |
| US6753966B2 (en) | 2000-03-10 | 2004-06-22 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
| US6836325B2 (en) | 1999-07-16 | 2004-12-28 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
-
1988
- 1988-01-18 JP JP777188A patent/JPH01183627A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2281977A (en) * | 1993-09-18 | 1995-03-22 | Gold Star Co | Orientation film for a liquid crystal display |
| GB2281977B (en) * | 1993-09-18 | 1998-01-14 | Gold Star Co | Method for forming an orientation film in a liquid crystal display |
| FR2725534A1 (en) * | 1994-10-11 | 1996-04-12 | Luder Ernst | DEPOSITION OF ORIENTATION LAYERS ON A SUBSTRATE FOR ALIGNMENT OF LIQUID CRYSTAL MOLECULES |
| NL1001346C2 (en) * | 1994-10-11 | 1998-08-26 | Lueder Ernst | Method and device for applying orientation layers to a substrate for aligning liquid crystal molecules. |
| US6836325B2 (en) | 1999-07-16 | 2004-12-28 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
| US6753966B2 (en) | 2000-03-10 | 2004-06-22 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
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