JPH01134336A - Liquid crystal display device and its production - Google Patents

Liquid crystal display device and its production

Info

Publication number
JPH01134336A
JPH01134336A JP62292363A JP29236387A JPH01134336A JP H01134336 A JPH01134336 A JP H01134336A JP 62292363 A JP62292363 A JP 62292363A JP 29236387 A JP29236387 A JP 29236387A JP H01134336 A JPH01134336 A JP H01134336A
Authority
JP
Japan
Prior art keywords
liquid crystal
spacer
crystal display
display device
alignment film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62292363A
Other languages
Japanese (ja)
Inventor
Seiichi Taniguchi
誠一 谷口
Nobuyasu Yamagishi
庸恭 山岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62292363A priority Critical patent/JPH01134336A/en
Publication of JPH01134336A publication Critical patent/JPH01134336A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars

Landscapes

  • Liquid Crystal (AREA)

Abstract

PURPOSE:To obtain a liquid crystal display device in which spacers do not exist in picture element parts and do not deteriorate the degree of orientation by disposing and fixing the spacers to island shapes on the oriented film formed on at least one substrate with electrodes. CONSTITUTION:The oriented film 1 consisting of UV curing type or thermosetting type polyamide is formed on at least one substrate of one set of the substrates 2 with the electrodes. Photosensitive polyimide 3 consisting of the UV curing type polyamide or a mixture composed of a pigment and the UV curing type polyimide is applied on this oriented film 1 to a prescribed film thickness. Only the prescribed part is exposed by photolithography and is then worked to the spacers 5 of the prescribed shape. The spacers 5 are thereby fixed to the surface of the oriented film 1 except the picture element parts on the substrate 2 with the electrodes, by which the light leakage, etc., in the picture elements are prevented.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、文字あるいは画像表示用の液晶表示装置に関
し、特に液晶分子の配列を定める配向膜上にスペーサを
固定した電極付基板を有する液晶表示装置およびその製
造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a liquid crystal display device for displaying characters or images, and more particularly to a liquid crystal display device having a substrate with electrodes on which spacers are fixed on an alignment film that determines the alignment of liquid crystal molecules. and its manufacturing method.

従来の技術 従来の液晶表示装置の製造方法として、配向膜を形成す
る方法は凸版印刷法等による印刷方式と、スピナーある
いはガンスプレー等による塗布方式があった。また液晶
表示装置内の電極付基板間に介在するスペーサに、材質
がガラスあるいは有機樹脂等からなり、形状が円柱や球
であるものを用いた。この時ガラスの組成として液晶と
の信頼性の点でアルカリ系の元素を極めて少なくするこ
とが望ましく、例えばS10□を主成分としてム(12
05+Fe 203. Na2O、に20等が含まれ、
NaおよびKが0.7 ppm  程度のものを用いて
いる。また有機樹脂にベンゾグアナミン・ホルムアルデ
ヒド縮合物(既存化学物質構造別分類整理番号7−31
)を成分とした硬化球状微粒子を用いた。スペーサの分
散方法として、気中法と液中法がある。気中法は、スペ
ーサを装置内で気流とともに分散する方式で、吐出気流
を0.3Ks+/i程度、1ts d/win程度とし
自由落下させるものや、逆に吐出気流を4Kg/crl
程度、200 l/win程度で強制落下させるものが
ある。前者は比較的均一に分散できるが落下時間に長時
間を必要とした。また後者は落下時間を比較的短縮でき
るが、工夫を要し、ともするとスペーサの固まりを吐出
することになる。
BACKGROUND OF THE INVENTION Conventional methods for manufacturing liquid crystal display devices include printing methods such as letterpress printing and coating methods using a spinner or gun spray to form an alignment film. Further, spacers interposed between electrode-attached substrates in a liquid crystal display device are made of glass, organic resin, or the like, and have a cylindrical or spherical shape. At this time, it is desirable to minimize the amount of alkaline elements in the glass composition from the viewpoint of reliability with the liquid crystal. For example, with S10□ as the main component and M
05+Fe 203. Na2O, contains 20 etc.
A material containing about 0.7 ppm of Na and K is used. In addition, benzoguanamine formaldehyde condensate (existing chemical substance structure classification reference number 7-31) is added to organic resin.
) was used. There are two methods for dispersing spacers: an in-air method and an in-liquid method. The air method is a method in which the spacer is dispersed with the airflow within the device, and the discharge airflow is about 0.3Ks+/i or 1ts d/win and is allowed to fall freely, or conversely, the discharge airflow is set to 4Kg/crl.
There are some that are forced to fall at a rate of about 200 l/win. The former can be dispersed relatively uniformly, but requires a long time to fall. Although the latter method can relatively shorten the falling time, it requires some ingenuity and may result in a lump of spacer being ejected.

ここでいう工夫とは例えば基板を除電し静電的に中和す
ること、スペーサの供給に霧吹き原理等を用いて流速を
高めスペーサの固まりを防止すること、スペーサをフィ
ルターに通し予め固まりを除去すること等である。まだ
形状が円柱であれ、球であれスペーサに用いる微粉体は
静電気の影響を受けやすいので、気中法では特に静電気
対策が必要になる。
The ideas mentioned here include, for example, removing static electricity from the substrate and neutralizing it electrostatically, using a spray principle to increase the flow rate and preventing spacers from clumping, and passing the spacers through a filter to remove any clumping beforehand. etc. The fine powder used for spacers, whether cylindrical or spherical, is susceptible to static electricity, so static electricity countermeasures are especially necessary in the air method.

液中法はスピナー等を用いて分散する方法が一般に知ら
れている。スペーサを混入させる液にアルコールやアセ
トンを用いると配向膜表面を侵し配向特性を劣化させる
ことになる。したがって化学的に安定なフロン液を用い
、スペーサを混入した溶液をスピンナーに設置した電極
付基板上の配向膜の上に滴化し、100 r、p、m、
程度、60秒程度後、200 Or、p、m、程度、3
分程度稼動させスペーサを分散する。また滴下する代り
に配向膜表面にまんべんなくスペーサを混入した液を落
下させた後スピンナーヲ稼動させるとよりいっそう均一
な分散を実現する。
As the submerged method, a method of dispersing using a spinner or the like is generally known. If alcohol or acetone is used as a liquid to mix spacers, it will attack the surface of the alignment film and deteriorate the alignment properties. Therefore, using a chemically stable fluorocarbon solution, the solution containing the spacer was formed into droplets on the alignment film on the electrode-equipped substrate set on a spinner, and 100 r, p, m,
After about 60 seconds, 200 Or, p, m, about 3
Operate for about a minute to disperse the spacers. Further, instead of dropping the solution mixed with spacers, the solution mixed with spacers can be evenly dropped on the surface of the alignment film and then the spinner can be operated to achieve more uniform dispersion.

配向膜にポリイ°ミド、ポリビニルアルコール等の有機
材料を用いる。例えば凸版印刷法を用いて印刷する場合
、ポリイミドの重量と溶剤の重量の比は約7.54 W
 を程度であり、スピナー塗布する場合、約4.51 
W tであり、スプレーガン塗布する場合、約3%wt
である。配向膜塗布後硬化するのに加熱炉を用いN2中
で、170’C程度から350℃程度の範囲で数時間加
熱する。
Organic materials such as polyimide and polyvinyl alcohol are used for the alignment film. For example, when printing using letterpress printing, the ratio of the weight of polyimide to the weight of solvent is approximately 7.54 W.
When applying with a spinner, it is approximately 4.51
Wt, and when applied with a spray gun, approximately 3%wt
It is. After the alignment film is applied, it is cured by heating in a N2 atmosphere at a temperature ranging from about 170'C to about 350C for several hours using a heating furnace.

このようにして配向膜を形成後、スペーサを分散した状
態を第7図に示す。カラー液晶テレビ等の液晶表示装置
にカラーフィルタ付の電極付基板とTPT素子(薄膜ス
イッチング素子)付の電極付基板を用いるが、第7図に
おいて、そのTPT素子素子型極付基板上に配向膜を形
成した後、気中法でスペーサ24を分散した状態を示し
ている。
FIG. 7 shows a state in which spacers are dispersed after forming an alignment film in this manner. A liquid crystal display device such as a color liquid crystal television uses a substrate with an electrode with a color filter and a substrate with an electrode with a TPT element (thin film switching element). The figure shows a state in which the spacers 24 are dispersed by an air method after forming.

スペーサ24は、TFT素子部26.配線部26゜画素
部27にまんべんなくほぼ均一に分散されている。分散
方法を気中法にせよ液中法にせよほぼ同じ結果を得る。
The spacer 24 is connected to the TFT element section 26. The wiring portion 26° and the pixel portion 27 are evenly and almost uniformly distributed. Almost the same results are obtained whether the dispersion method is an air method or a liquid method.

また画素部にスペーサを存在させないような選択分散を
これらの方法にて行うのは困難であった。
Furthermore, it is difficult to perform selective dispersion without the presence of spacers in the pixel portion using these methods.

発明が解決しようとした問題点 このように従来の液晶表示装置の製造方法では、液晶表
示装置内で1組の電極付基板間の間隙を形成するのに円
柱まだは球の形状をしたスペーサを分散したが、電極付
基板上にまんべんなくほぼ均一に分散できるものの画素
部にスペーサが存在させないように選択分散することが
困難であった。
Problems that the invention sought to solve As described above, in the conventional manufacturing method of a liquid crystal display device, a cylindrical or spherical spacer is used to form a gap between a pair of electrode-attached substrates in a liquid crystal display device. However, although it was possible to disperse the particles evenly and almost uniformly on the electrode-attached substrate, it was difficult to selectively disperse the particles so that no spacers were present in the pixel portions.

したがって画素部に存在するスペーサによりその部分に
液晶が存在せず光抜けが生じコントラストの低下等を招
いた結果として画質が劣化した。
Therefore, due to the spacer present in the pixel portion, the liquid crystal is not present in that portion, causing light leakage, resulting in a decrease in contrast and the like, resulting in deterioration of image quality.

本発明はかかる点に鑑みてなされたもので、簡易な構成
で、スペーサを画素部に存在させず、配向膜上に固定し
、かつ配向度を劣化させることがないという液晶表示装
置およびその製造方法を提供することを目的とした。
The present invention has been made in view of the above points, and includes a liquid crystal display device having a simple configuration, a spacer not being present in the pixel portion, fixed on the alignment film, and not deteriorating the degree of alignment, and manufacturing thereof. The purpose was to provide a method.

問題点を解決するだめの手段 本発明は上記問題点を解決するため、1組の電極付基板
と、前記電極付基板上に形成された配向膜と、スペーサ
とから構成され、前記スペーサが少なくとも一方の前記
電極付基板上に形成された前記配向膜上に固定され、前
記スペーサが島状に配置されることを特徴とした液晶表
示装置である。
Means for Solving the Problems In order to solve the above problems, the present invention is composed of a set of electrode-equipped substrates, an alignment film formed on the electrode-equipped substrates, and a spacer, and the spacers include at least The liquid crystal display device is characterized in that the spacers are fixed on the alignment film formed on one of the electrode-equipped substrates and are arranged in an island shape.

また本発明は1組の電極付基板と、前記電極付基板上に
形成された配向膜と、スペーサとから構成された液晶表
示装置を製造する際、前記基板上に前記配向膜を塗布す
る工程と、前記配向膜を硬化する工程と、前記スペーサ
を形成する材料を塗布する工程と、フォトリングラフィ
により前記スペーサを所定の形状に露光する工程と、エ
ツチングにより前記スペーサを所定の形状に加工する工
程とからなることを特徴とした液晶表示装置の製造方法
である。
The present invention also provides a step of applying the alignment film onto the substrate when manufacturing a liquid crystal display device comprising a set of electrode-equipped substrates, an alignment film formed on the electrode-equipped substrate, and a spacer. a step of curing the alignment film; a step of applying a material for forming the spacer; a step of exposing the spacer to a predetermined shape by photolithography; and a step of processing the spacer into a predetermined shape by etching. A method of manufacturing a liquid crystal display device is characterized in that it comprises the steps of:

作用 本発明の液晶表示装置は、配向膜を形成した後にスペー
サを配向膜上の画素部以外に形成する構成であり、画素
部においてスペーサによる光抜けを防止し画質を向上さ
せるという効果を有するものである。また、本発明の液
晶表示装置の製造方法は、配向膜を形成した後スペーサ
を形成する際配向膜の表面を予め硬化しているので配向
膜表面の配向特性を劣化させることがなく、かつ画素部
以外にスペーサを選択して形成するので画素部において
スペーサによる光抜けを防止し画質を向上させるという
効果を有するものである。
Function The liquid crystal display device of the present invention has a structure in which a spacer is formed on the alignment film other than the pixel area after forming the alignment film, and has the effect of preventing light leakage due to the spacer in the pixel area and improving image quality. It is. In addition, in the method for manufacturing a liquid crystal display device of the present invention, the surface of the alignment film is hardened in advance when forming the spacer after forming the alignment film, so that the alignment characteristics of the surface of the alignment film are not deteriorated, and the pixel Since the spacer is selectively formed in areas other than the pixel area, it has the effect of preventing light leakage due to the spacer in the pixel area and improving image quality.

実施例 以下、本発明の一実施例について、図面に基づいて説明
する。本発明の製造方法に基づいて製造した液晶表示装
置を第6図と第6図に示す。
EXAMPLE Hereinafter, an example of the present invention will be described based on the drawings. A liquid crystal display device manufactured based on the manufacturing method of the present invention is shown in FIGS.

第5図において、液晶表示装置は透明電極13とその上
に配向膜14が付いた前面ガラス板16と、TPT素子
(薄膜トランジスタで構成され画素電極の印加電圧のス
イッチングに用いるトランジスタ素子)部16および画
素部17とその上に配向膜18が付いた液晶表示用基板
19との間に、周辺部には予め所定のスペーサが混合さ
れたシール剤20があり、シール剤20に囲まれたパネ
ル中に液晶21が存在している。そして偏光板22゜2
3が前面ガラス板16と液晶表示用基板19の両面に貼
り付けられることにより構成される。
In FIG. 5, the liquid crystal display device includes a front glass plate 16 having a transparent electrode 13 and an alignment film 14 thereon, a TPT element (a transistor element composed of a thin film transistor and used for switching the voltage applied to the pixel electrode) part 16, and Between the pixel part 17 and the liquid crystal display substrate 19 on which the alignment film 18 is attached, there is a sealant 20 mixed with a predetermined spacer in the peripheral part, and the inside of the panel surrounded by the sealant 20 is A liquid crystal 21 is present on the screen. And polarizing plate 22゜2
3 is attached to both sides of the front glass plate 16 and the liquid crystal display substrate 19.

第6図は、基板19側の構造を示すもので、GはTPT
素子のゲート電極、Iは絶縁膜、ムはアモルファスシリ
コンよりなるチャンネル活性部、Mはソース、ドレイン
電極である。
FIG. 6 shows the structure on the substrate 19 side, where G is TPT.
The gate electrode of the device, I is an insulating film, M is a channel active region made of amorphous silicon, and M is a source and drain electrode.

第1図は本発明の液晶表示装置の製造方法により製造し
た配向膜近傍の断面図である。各工程をaからdまで示
している。第1図aは電極付基板上に配向膜を形成する
工程の基板の断面図である。
FIG. 1 is a cross-sectional view of the vicinity of an alignment film manufactured by the method for manufacturing a liquid crystal display device of the present invention. Each step is shown from a to d. FIG. 1a is a cross-sectional view of the substrate in the step of forming an alignment film on the electrode-attached substrate.

配向膜1を電極付基板2上に形成する方法として、凸版
印刷法、スピナー塗布法、ガンスプレー法等がある。本
発明では感光性ポリイミドをスピナー塗布法により塗布
した。スピンナー条件として約10Or、p、m、 、
約30秒後約400 Or、p、m、、約180秒を行
った。感光性ポリイミドは膜厚約20oO人のほぼ均一
な膜に塗布できた。約90℃、10秒で膜表面を速乾し
た後、所定のパターンのみ露光した。露光光源はHa−
(、d  レーザを用いた。配線部分と対向電極取出部
分に配向膜が塗布されているが露光されないと感光性ポ
リイミドはネガタイプであるため除去できる。また平滑
な面の配向膜が得られ、エツチング洗浄後、所定のパタ
ーンを形成できた。さらに加熱炉に入れてポリイミド部
分を硬化した。
Methods for forming the alignment film 1 on the electrode-attached substrate 2 include a letterpress printing method, a spinner coating method, a gun spray method, and the like. In the present invention, photosensitive polyimide was applied using a spinner coating method. The spinner conditions are approximately 10 Or, p, m, ,
After about 30 seconds, about 400 Or, p, m, and about 180 seconds were carried out. The photosensitive polyimide could be coated into a substantially uniform film with a thickness of about 200m. After quickly drying the film surface at about 90° C. for 10 seconds, only a predetermined pattern was exposed. The exposure light source is Ha-
(, d laser was used.Although an alignment film is applied to the wiring part and the counter electrode extraction part, if it is not exposed to light, the photosensitive polyimide is a negative type and can be removed.Also, an alignment film with a smooth surface can be obtained, and it can be removed by etching. After cleaning, a predetermined pattern could be formed.The polyimide portion was further hardened by placing it in a heating furnace.

次に第1図すは形成された配向膜上にさらに感光性ポリ
イミドを塗布した電極付基板の断面図を示す。感光性ポ
リイミド3をスピナー塗布する。
Next, FIG. 1 shows a sectional view of a substrate with electrodes in which a photosensitive polyimide is further coated on the formed alignment film. Apply photosensitive polyimide 3 using a spinner.

約3μmの膜厚を得るのに数回塗布する方法と1回塗布
する方法を試みた。1回塗布する場合、粘度の管理が難
しかったが、原液の状態で比較的低速の約a o r、
p、m、、約30秒後約50 Or、p、m、、約12
0秒の条件で膜厚を実現できだ。
In order to obtain a film thickness of about 3 μm, we tried a method of applying the film several times and a method of applying it once. When applying once, it was difficult to control the viscosity, but the undiluted solution had a relatively slow rate of approx.
p, m,, about 50 Or, p, m,, about 12 after about 30 seconds
The film thickness could be achieved under conditions of 0 seconds.

第1図Cは所定のスペーサ部分のみ露光する様子を示し
た電極付基板の断面図を示す。露光された部分4は所定
の形状のスペーサである。光源にHe−Cdレーザを用
いた。露光時間は約30秒である。
FIG. 1C is a sectional view of the electrode-attached substrate showing how only a predetermined spacer portion is exposed. The exposed portion 4 is a spacer of a predetermined shape. A He-Cd laser was used as a light source. Exposure time is about 30 seconds.

第1図dは、エツチング処理後スペーサを加熱硬化した
様子を示した電極付基板の断面図である。
FIG. 1d is a cross-sectional view of the electrode-attached substrate showing the spacer heated and hardened after the etching process.

エツチング処理すると前工程で露光された部分がスペー
サ6として形成される。さらに加熱硬化すると図のよう
なスペーサが形成される。
When etching is performed, the portions exposed in the previous step are formed as spacers 6. Further heating and curing forms spacers as shown in the figure.

以上のようにしてスペーサは、1組の電極付基板の対向
する所定の場所に形成される。第2図は対向するスペー
サ゛が当接した様子を示しだ1組の電極付基板の断面図
である。スペーサ6は1組の電極付基板をアライメント
することにより容易に所定の位置合せができる。
As described above, the spacers are formed at predetermined positions facing each other on a pair of electrode-equipped substrates. FIG. 2 is a cross-sectional view of a pair of electrode-attached substrates showing how opposing spacers are in contact with each other. The spacer 6 can be easily aligned in a predetermined position by aligning a pair of electrode-attached substrates.

第3図aはTPT素子部付電極基板の平面図、第3図す
は同基板の断面図である。TPT素子部T上にスペーサ
を形成した場合、スペーサ8はbに示すように半導体部
9を被膜することができる。
FIG. 3a is a plan view of an electrode substrate with a TPT element portion, and FIG. 3 is a sectional view of the same substrate. When a spacer is formed on the TPT element portion T, the spacer 8 can cover the semiconductor portion 9 as shown in b.

この感光性ポリイミドに予め顔料を混入させたスペーサ
を形成すると、遮光膜になりTPT特性を向上させる。
When a spacer is formed by pre-mixing a pigment in this photosensitive polyimide, it becomes a light-shielding film and improves TPT characteristics.

この場合、スペーサは各TPT素子部上に形成するのが
望ましい。スペーサの抑圧が約0.6Kg/6i程度に
するのに相当数のスペーサが必要である。各素子部にス
ペーサが存在すると素子部を傷つけることがない。
In this case, it is desirable that the spacer be formed on each TPT element portion. A considerable number of spacers are required to achieve a spacer suppression of approximately 0.6 Kg/6i. The presence of a spacer in each element portion prevents the element portion from being damaged.

第4図aはTPT素子部付電極基板の平面図、第4図す
は同基板の断面図である。TPT素子部以外の配線部1
oにスペーサ11を形成した場合、第2図すに示すよう
な状態でスペーサ11を形成できる。スペーサ11は所
定の数を自在に形成でき、スペーサの所定の押圧力に見
合うだけの所定数のスペーサを形成できる。配線部10
にスペーサ11を形成した場合、TPT素子部12が傷
つくことによりソースとドレインが短絡したり、破損し
たりするのを防止することができる。
FIG. 4a is a plan view of an electrode substrate with a TPT element portion, and FIG. 4 is a sectional view of the same substrate. Wiring section 1 other than TPT element section
In the case where the spacer 11 is formed in the area o, the spacer 11 can be formed in the state shown in FIG. A predetermined number of spacers 11 can be freely formed, and a predetermined number of spacers corresponding to a predetermined pressing force of the spacers can be formed. Wiring section 10
When the spacer 11 is formed in the TPT element portion 12, it is possible to prevent the source and the drain from being short-circuited or damaged due to damage to the TPT element portion 12.

したがって以上のように配向膜上の画素部以外にスペー
サを形成することができ、しがも配向膜表面を傷つける
ことがないため、液晶分子の配向に支障がなく、画質を
向上させるという効果を有する。
Therefore, as described above, spacers can be formed on areas other than the pixel areas on the alignment film, and since the surface of the alignment film is not damaged, there is no problem with the alignment of liquid crystal molecules and the effect of improving image quality is achieved. have

発明の効果 以上のように本発明によれば次の効果を得ることができ
る。
Effects of the Invention As described above, according to the present invention, the following effects can be obtained.

(1)スペーサを電極付基板上の画素部以外の配向膜表
面に固定することにより、光抜は等がなくなる。
(1) By fixing the spacer to the surface of the alignment film other than the pixel portion on the substrate with electrodes, light leakage etc. is eliminated.

(2)配向膜表面とスペーサの境界に塗り垂れ等がない
ため良好な液晶の配向が得られる。
(2) Since there is no dripping or the like at the boundary between the alignment film surface and the spacer, good liquid crystal alignment can be obtained.

(3)表示品質の優れた液晶表示装置が得られる。(3) A liquid crystal display device with excellent display quality can be obtained.

(4)比較的安定に大量の処理を行うことができる。(4) A large amount of processing can be performed relatively stably.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例である液晶表示装置の製造方
法に基づいた工程における基板の断面図、第2図は本発
明の一実施例である液晶表示装置の断面図、第3図&、
bはそれぞれ本発明の一実施例である液晶表示装置の平
面図とx −x’断面図、第4図a、bばそれぞれ本発
明の他の実施例である液晶表示装置の平面図とY−Y’
断面図、第6図は本発明の液晶表示装置の製造方法を用
いて製造した液晶表示装置の断面図、第6図は同装置の
TPT素子部および画素部の断面図、第7図は従来例に
おける液晶表示装置の平面図である。 1・・・・・・配向膜、2・・・・・・電極付基板、3
・・・・・・感光性ポリイミド、4・・・・・・露光さ
れた部分、5・・・・・・スペーサ、6・・・・・・ス
ペーサ、7・山・・TFT素子部、8・・・・・・スペ
ーサ、9・・・・・・半導体部、1o・・・・・・配線
部、11・・・・・・スペーサ、12・・・・・・TF
T素子部、13・・・・・・透明電極、14・・・・・
・配向膜、16・・・・・・前面ガラス板、16・・・
・・・TFT素子部、17・・・・・・画素部、18・
・・・・・配向膜、19・・・・・・液晶表示用基板、
20・・・・・・シール剤、21・・川・液晶、22.
23・・・・・・偏光板、24・・・・・・スペーサ、
25・・印・TFT素子部、26・・・・・・配線部、
27・・・・・・TFT素子部。 代理人の氏名 弁理士 中 尾 敏 男 はが1名第1
図 Cα) (b) (d) 第2図 第3図 (0L) (b) 94導体初 第4図    (α)
FIG. 1 is a cross-sectional view of a substrate in a process based on a method for manufacturing a liquid crystal display device that is an embodiment of the present invention, FIG. 2 is a cross-sectional view of a liquid crystal display device that is an embodiment of the present invention, and FIG. &,
4b is a plan view and an x-x' sectional view of a liquid crystal display device which is an embodiment of the present invention, respectively, and FIGS. 4a and 4b are a plan view and Y -Y'
6 is a sectional view of a liquid crystal display device manufactured using the method of manufacturing a liquid crystal display device of the present invention, FIG. 6 is a sectional view of a TPT element portion and a pixel portion of the same device, and FIG. 7 is a sectional view of a conventional liquid crystal display device. FIG. 2 is a plan view of a liquid crystal display device in an example. 1...Alignment film, 2...Substrate with electrode, 3
...Photosensitive polyimide, 4...Exposed portion, 5...Spacer, 6...Spacer, 7. Mountain...TFT element part, 8 ...Spacer, 9...Semiconductor part, 1o...Wiring part, 11...Spacer, 12...TF
T element part, 13...Transparent electrode, 14...
・Alignment film, 16...Front glass plate, 16...
...TFT element section, 17... Pixel section, 18.
...Alignment film, 19...Liquid crystal display substrate,
20... Seal agent, 21... River/liquid crystal, 22.
23...Polarizing plate, 24...Spacer,
25...Mark TFT element part, 26...Wiring part,
27...TFT element section. Name of agent: Patent attorney Toshio Nakao (1st person)
Figure Cα) (b) (d) Figure 2 Figure 3 (0L) (b) 94 conductor first Figure 4 (α)

Claims (4)

【特許請求の範囲】[Claims] (1)1組の電極付基板と、前記電極付基板上に形成さ
れた配向膜と、スペーサとから構成され、前記スペーサ
が少なくとも一方の前記電極付基板上に形成された前記
配向膜上に固定され、前記スペーサが島状に配置される
ことを特徴とした液晶表示装置。
(1) Consisting of a pair of electrode-equipped substrates, an alignment film formed on the electrode-equipped substrate, and a spacer, wherein the spacer is arranged on the alignment film formed on at least one of the electrode-equipped substrates. A liquid crystal display device, wherein the spacers are fixed and arranged in an island shape.
(2)配向膜が紫外線硬化型あるいは熱硬化型のポリイ
ミドからなることを特徴とした特許請求の範囲第1項記
載の液晶表示装置。
(2) The liquid crystal display device according to claim 1, wherein the alignment film is made of ultraviolet curing or thermosetting polyimide.
(3)スペーサが紫外線硬化型ポリイミドからなるか、
あるいは顔料と紫外線硬化型ポリイミドの混合材料から
なることを特徴とした特許請求の範囲第1項記載の液晶
表示装置。
(3) Is the spacer made of ultraviolet curing polyimide?
Alternatively, the liquid crystal display device according to claim 1 is made of a mixed material of a pigment and an ultraviolet curable polyimide.
(4)1組の電極付基板と、前記電極付基板上に形成さ
れた配向膜と、スペーサとから構成された液晶表示装置
を製造する際、前記基板上に前記配向膜を塗布する工程
と、前記配向膜を硬化する工程と、前記スペーサを形成
する材料を塗布する工程と、フォトリソグラフィにより
前記スペーサを所定の形状に露光する工程と、エッチン
グにより前記スペーサを所定の形状に加工する工程とか
らなることを特徴とした液晶表示装置の製造方法。
(4) When manufacturing a liquid crystal display device composed of a set of electrode-equipped substrates, an alignment film formed on the electrode-equipped substrate, and a spacer, a step of applying the alignment film on the substrate; , a step of curing the alignment film, a step of applying a material for forming the spacer, a step of exposing the spacer to a predetermined shape by photolithography, and a step of processing the spacer into a predetermined shape by etching. A method for manufacturing a liquid crystal display device, comprising:
JP62292363A 1987-11-19 1987-11-19 Liquid crystal display device and its production Pending JPH01134336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62292363A JPH01134336A (en) 1987-11-19 1987-11-19 Liquid crystal display device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62292363A JPH01134336A (en) 1987-11-19 1987-11-19 Liquid crystal display device and its production

Publications (1)

Publication Number Publication Date
JPH01134336A true JPH01134336A (en) 1989-05-26

Family

ID=17780835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62292363A Pending JPH01134336A (en) 1987-11-19 1987-11-19 Liquid crystal display device and its production

Country Status (1)

Country Link
JP (1) JPH01134336A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5235446A (en) * 1989-02-09 1993-08-10 Sharp Kabushiki Kaisha Projection type liquid crystal display apparatus with pixels of one panel
EP0649046A2 (en) * 1993-10-19 1995-04-19 Sharp Kabushiki Kaisha A liquid crystal display device and a production method for the same
JPH10104640A (en) * 1996-08-05 1998-04-24 Toray Ind Inc Substrate for liquid crystal display element and color liquid crystal display element including the same
WO1999047967A1 (en) * 1998-03-19 1999-09-23 Matsushita Electric Industrial Co., Ltd. Resin-liquid crystal formed body, liquid crystal device, liquid crystal display comprising the same, and methods of manufacturing the same
US6184959B1 (en) 1997-10-24 2001-02-06 Sharp Kabushiki Kaisha Liquid crystal display device having alignment film that provides alignment upon irradiation and manufacturing method the same
JP2003084266A (en) * 2001-06-29 2003-03-19 Fujitsu Display Technologies Corp Substrate for liquid crystal display device, liquid crystal display device provided with the same and method for manufacturing the same
JP2007025715A (en) * 1996-08-05 2007-02-01 Toray Ind Inc Substrate for liquid crystal display element and color liquid crystal display element including the same
JP2010049288A (en) * 2009-12-02 2010-03-04 Semiconductor Energy Lab Co Ltd Liquid crystal display
JP2022118095A (en) * 2011-05-05 2022-08-12 株式会社半導体エネルギー研究所 Liquid crystal display device
JP2022120136A (en) * 2008-12-03 2022-08-17 株式会社半導体エネルギー研究所 Liquid crystal display device

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5235446A (en) * 1989-02-09 1993-08-10 Sharp Kabushiki Kaisha Projection type liquid crystal display apparatus with pixels of one panel
US5751382A (en) * 1993-04-27 1998-05-12 Sharp Kabushiki Kaisha Liquid crystal display input/output device
US5612803A (en) * 1993-04-27 1997-03-18 Sharp Kabushiki Kaisha Liquid crystal display device with polymeric walls and a production method for the same
US5739889A (en) * 1993-04-27 1998-04-14 Sharp Kabushiki Kaisha Liquid crystal display device and a production method for the same
EP0649046A2 (en) * 1993-10-19 1995-04-19 Sharp Kabushiki Kaisha A liquid crystal display device and a production method for the same
EP0649046A3 (en) * 1993-10-19 1995-10-25 Sharp Kk A liquid crystal display device and a production method for the same.
US5729318A (en) * 1993-10-19 1998-03-17 Sharp Kabushiki Kaisha Liquid crystal display device having polymeric walls
JP2007025715A (en) * 1996-08-05 2007-02-01 Toray Ind Inc Substrate for liquid crystal display element and color liquid crystal display element including the same
JPH10104640A (en) * 1996-08-05 1998-04-24 Toray Ind Inc Substrate for liquid crystal display element and color liquid crystal display element including the same
US6184959B1 (en) 1997-10-24 2001-02-06 Sharp Kabushiki Kaisha Liquid crystal display device having alignment film that provides alignment upon irradiation and manufacturing method the same
KR100382586B1 (en) * 1997-10-24 2003-08-27 샤프 가부시키가이샤 LCD and its manufacturing method
WO1999047967A1 (en) * 1998-03-19 1999-09-23 Matsushita Electric Industrial Co., Ltd. Resin-liquid crystal formed body, liquid crystal device, liquid crystal display comprising the same, and methods of manufacturing the same
JP2003084266A (en) * 2001-06-29 2003-03-19 Fujitsu Display Technologies Corp Substrate for liquid crystal display device, liquid crystal display device provided with the same and method for manufacturing the same
JP2022120136A (en) * 2008-12-03 2022-08-17 株式会社半導体エネルギー研究所 Liquid crystal display device
JP2010049288A (en) * 2009-12-02 2010-03-04 Semiconductor Energy Lab Co Ltd Liquid crystal display
JP2022118095A (en) * 2011-05-05 2022-08-12 株式会社半導体エネルギー研究所 Liquid crystal display device
US11942483B2 (en) 2011-05-05 2024-03-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same

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