JPH01105813U

JPH01105813U -

Info

Publication number: JPH01105813U
Application number: JP74488U
Authority: JP
Priority date: 1988-01-07
Filing date: 1988-01-07
Publication date: 1989-07-17

Description

[Brief explanation of the drawing]

第１図は本考案の主要部の実施例を示す構成図
、第２図は偏向板の回転操作部分の説明図、第３
図〜第５図はその動作説明図、第６図は偏向板の
回転操作の手順を示すフローチヤート図、第７図
は従来技術の一例を示す構成図である。１……第１移動物体、２……第１スケール、３
……レーザー光源、４……第１集光レンズ、１５
，３０，３６……移動物体、１６，３１，３７…
…スケール、１７，２８，２９……集光レンズ、
１８，２５，２６，２７……ハーフミラー、１９
，２９，３５……偏向板、２０，２２，３２，３
８……受光素子、２１……電力制御手段、２３，
３３，３９……回転制御手段、２４，３４，４０
……サーボ機構。 Fig. 1 is a configuration diagram showing an embodiment of the main part of the present invention, Fig. 2 is an explanatory diagram of the rotation operation part of the deflection plate, and Fig. 3
5 to 5 are explanatory views of the operation, FIG. 6 is a flowchart showing the procedure for rotating the deflection plate, and FIG. 7 is a configuration diagram showing an example of the prior art. 1...First moving object, 2...First scale, 3
... Laser light source, 4 ... First condensing lens, 15
, 30, 36... moving object, 16, 31, 37...
... Scale, 17, 28, 29 ... Condensing lens,
18, 25, 26, 27...Half mirror, 19
, 29, 35... deflection plate, 20, 22, 32, 3
8... Light receiving element, 21... Power control means, 23,
33, 39...Rotation control means, 24, 34, 40
...Servo mechanism.

Claims

[Scope of utility model registration request]

means for projecting one of the double-end-emitting laser light sources onto a first measurement scale fixed to a first moving object moving in a first direction through a first condensing lens means; The reflected light is reflected onto a second measurement scale fixed to a second object moving in a second direction forming an arbitrary crossing angle with the first direction through a deflection plate that is rotated by a second condensing lens and a first servo mechanism. and a third direction for moving the other of the laser light sources in a third direction forming an arbitrary intersecting angle with the first direction via a third condensing lens and a deflection plate rotated by a second servo mechanism. means for projecting the light onto a third measurement scale fixed to the object; light receiving means for receiving one of the ±1st-order reflected light from the reflection type diffraction grating formed on the second measurement scale; and an output of the light receiving means. a first servo mechanism that operates the first servo mechanism so as to maximize the
a control means, a light receiving means for receiving one of the ±1st-order reflected light from the reflection type diffraction grating formed on the third measurement scale, and a second servo mechanism configured to maximize the output of the light receiving means. A second control means to be operated mixes the ±1st-order reflected light from the reflective diffraction gratings formed on the first, second, and third measurement scales, respectively, and converts the interference light into an electrical signal. An optical scale reading device comprising first, second, and third signal processing means that digitally outputs movement amounts in a first direction, a second direction, and a third direction.