JP7304083B2 - Inspection device and inspection method - Google Patents

Description

TECHNICAL FIELD The present invention relates to an inspection apparatus and an inspection method for inspecting the presence or absence of peeling at joints in a packaging container formed by joining sheet members, for example.
This application claims priority based on Japanese Patent Application No. 2019-022080 filed on February 8, 2019, and the entire disclosure thereof is incorporated herein.

There is a packaging container that contains the contents. The contents are, for example, retort food, drinking water, electronic equipment, and the like. Such packaging containers are required to accommodate contents in a sealed state.
The packaging container is sealed by welding or bonding the periphery of the sheet member (including the film member) to join the opening.
If the joint is insufficient due to peeling or the like occurring at the jointed portion, there is a possibility that the sealed state cannot be maintained. Therefore, an inspection is performed to determine whether the bonding state satisfies the criteria.

As an apparatus for performing this inspection, there is, for example, an ultrasonic inspection apparatus. An ultrasonic inspection apparatus transmits ultrasonic waves to a packaging container (workpiece) to be inspected, and receives and analyzes the ultrasonic waves transmitted through the packaging container. By obtaining this analysis result, the ultrasonic inspection apparatus determines whether or not there is peeling or the like at the joint.
Such a determination is made by comparing the received ultrasonic measurement data with a threshold value. Thresholds are generally established prior to testing.
As an example of an ultrasonic inspection apparatus, there is an ultrasonic inspection apparatus described in Patent Document 1.

U.S. Pat. No. 6,920,793

The threshold has been determined based on the experience of workers and the like. However, because the transmission of ultrasonic waves varies depending on the material, thickness, shape, etc. of the packaging container, skill is required to determine a threshold suitable for the inspection object.

The present invention has been made in view of such circumstances. An example of an object of the present invention is to provide an inspection apparatus and an inspection method capable of easily setting threshold values.

An inspection apparatus according to an aspect of the present invention includes a transmission unit that irradiates a plurality of mutually different positions of a first standard object among inspection objects with ultrasonic waves; a receiving unit configured to receive a first plurality of ultrasonic waves transmitted through respective positions; and a plurality of threshold values corresponding to each of the plurality of positions based on the received intensity of each of the first plurality of ultrasonic waves. a calculating unit to be obtained; a storage unit that stores values representing the plurality of threshold values and the plurality of positions in a state of being associated with each other; a control unit that irradiates the ultrasonic wave from the transmission unit to the inspection section and determines whether or not the workpiece to be inspected satisfies a criterion based on the reception intensity received by the reception unit; The multiple thresholds are multiple thresholds that can be used for determination by the control unit .

An inspection method according to an aspect of the present invention includes irradiating a plurality of mutually different positions of a first standard object among inspection objects with ultrasonic waves, and generating a plurality of ultrasonic waves transmitted through the plurality of mutually different positions. is received, based on the received intensity of each of the plurality of ultrasonic waves, a plurality of thresholds corresponding to each of the plurality of positions are obtained, and in a state of being associated with each other, the plurality of thresholds and the plurality of A value representing a position is stored in a storage unit, and the ultrasonic wave is irradiated from the transmission unit to an inspection section including a plurality of mutually different positions of the inspection work among the inspection object, and the reception intensity received by the reception unit. The plurality of thresholds can be used to determine whether the inspection work satisfies the criteria . A test method that is multiple thresholds.

According to the embodiment of the present invention, the threshold used for inspection can be easily set by using the reception intensity obtained when inspecting an inspection object that satisfies the inspection criteria.

1 is a block diagram showing a configuration example of an ultrasonic inspection system 1 according to an embodiment; FIG. 4 is a diagram for explaining the positional relationship between a transmitter 260, a receiver 280, and an inspection object 40; FIG. 4 is a bird's-eye view showing the appearance of an inspection object 400, which is an example of the inspection object 40. FIG. FIG. 11 is a bird's-eye view showing the appearance of a packaging container 450 that is another example of the inspection object 40; It is a figure explaining an example of reference data and threshold data. 4 is a flowchart for explaining the operation of the ultrasonic inspection apparatus 20 to obtain a threshold value; 4 is a flowchart for explaining determination operations of the ultrasonic inspection apparatus 20. FIG. FIG. 4 is a diagram illustrating measurement data of an inspection object 40B that has been determined to satisfy inspection criteria; FIG. 4 is a diagram for explaining measurement data of an inspection object 40B that has been determined not to satisfy inspection criteria; It is a figure explaining the measurement data in case a hole and a drinking mouth are contained in an inspection object area|region. It is a figure explaining the measurement data in case a hole and a drinking mouth are contained in an inspection object area|region. It is a figure explaining the case where between the start position p1 and the end position p2 is shorter than normal time. FIG. 10 is a diagram illustrating a case of inspecting an inspection object in which positions such as holes provided in the peripheral portion are arranged at positions different from the prescribed positions;

One embodiment of the present invention will be described in detail below. The following embodiments are examples for explaining the present invention, and are not intended to limit the present invention only to the embodiments. Also, the present invention can be modified in various ways without departing from the gist thereof. Furthermore, those skilled in the art can adopt embodiments in which each element described below is replaced with equivalents, and such embodiments are also included in the scope of the present invention.

(embodiment)
FIG. 1 is a block diagram showing a configuration example of an ultrasonic inspection system 1 according to an embodiment. The ultrasonic inspection system 1 inspects an inspection object 40 using ultrasonic waves. In the example shown in FIG. 1 , the ultrasonic inspection system 1 includes a display device 10 , an ultrasonic inspection device 20 and a transport device 30 .

The display device 10 is connected to the ultrasonic inspection device 20 . The display device 10 displays various information output from the ultrasonic inspection apparatus 20 . As the display device 10, for example, a liquid crystal display device can be used.

The ultrasonic inspection device 20 is connected to the display device 10 . The ultrasonic inspection apparatus 20 receives the ultrasonic waves irradiated to the inspection object 40 and inspects the inspection object 40 based on the reception result.
The transport device 30 transports the inspection object 40 .
The conveying device 30 is, for example, a belt conveyor. An inspection object 40 is placed on the belt 32 of the conveying device 30 . In the conveying device 30, the rollers 31 (rollers 31a and 31b) are rotated. Thereby, the conveying device 30 conveys the inspection target 40 along the inspection direction and passes through a predetermined inspection position between the transmitting section 260 and the receiving section 280 . Rotation of the roller 31 is controlled by, for example, a control command value output from a drive control section (not shown) of the ultrasonic inspection apparatus 20 . The position at which the inspection object 40 is placed with respect to the transport device 30 may be corrected by a position correction mechanism. The position correction mechanism may be a guide that corrects or positions the inspection object 40 with respect to the ultrasonic inspection apparatus 20 so that it is at a predetermined position.

The inspection object 40 is inspected by the ultrasonic inspection apparatus 20 . A region on the inspection object 40 to be inspected is called an inspection target region. For example, the entire periphery of the first sheet member 40a of the inspection object 40 and the entire periphery of the second sheet member 40b of the inspection object 40 are joined (sealed) to each other. The inspection object 40 is a packaging container having a space for containing contents on the inner peripheral side. Both the first sheet member 40a and the second sheet member 40b are flexible.
In the inspection object 40, the inspection target area is a joint. The joint portion is a portion where two sheet members forming the packaging container are to be joined. In the inspection object 40, the peripheral edge portion, which is the area covering the entire peripheral edge, is the joint.
Specific examples of inspection items will be described. A first example is whether or not there is peeling in the peripheral portion 41 . A second example is whether or not the peripheral portion 41 has holes or scratches. A third example is whether or not the peripheral portion 41 is joined in a state in which no foreign object is sandwiched. A fourth example is whether or not the singular point in the peripheral portion 41 is at a specified position. A singular point is, for example, a position where a hole, a spout, a notch, a printed portion, or the like provided in the peripheral portion 41 is provided.

<Configuration of ultrasonic inspection apparatus 20>
The ultrasonic inspection apparatus 20 includes, for example, an operation unit 210, a control unit 220, a signal control unit 230, a transmission control unit 240, a reception processing unit 250, a transmission unit 260, a reception unit 280, and a camera (imaging device) 290.
The ultrasonic inspection apparatus 20 includes a computer at least in part. This computer includes a processor such as a CPU (Central Processing Unit) and a program memory that stores programs executed by the processor. In the ultrasonic inspection apparatus 20, each functional unit (the operation unit 210, the control unit 220, the signal control unit 230, the transmission control unit 240, the reception processing unit 250, the transmission unit 260, and the reception unit 280) is, for example, a CPU (Central Processing Unit) by executing a program stored in a program memory. Some or all of these functional units may be realized by hardware such as LSI (Large Scale Integration), ASIC (Application Specific Integrated Circuit), or FPGA (Field-Programmable Gate Array).

The operation unit 210 can be composed of a keyboard, a mouse, and the like. The operation unit 210 accepts input operations for various types of information related to ultrasound examinations in accordance with user operations. The operation unit 210 supplies various information to the control unit 22 according to input operations.

The control section 220 controls each section of the ultrasonic inspection apparatus 20 . The control unit 220 indicates, for example, various information input from the operation unit 210, analysis results (for example, measurement data) obtained from the signal control unit 230, which will be described later, and the presence or absence of an abnormality determined by the determination unit 222. The result is output to the display device 10. FIG. The information output to the display device 10 is information related to ultrasonic inspection, for example, information related to the inspection object 40, the wavelength and intensity of the ultrasonic waves to be transmitted, the speed at which the inspection object 40 is transported, and the received ultrasonic waves. It is information such as an analysis result and a judgment result of judging the presence or absence of peeling.
In addition, the control unit 220 controls the transmission unit 260 and the reception unit 280 so that ultrasonic waves can be applied to the inspection target area, and also controls the position of the inspection object 40 with respect to the transmission unit 260 and the reception unit 280. Control. In this embodiment, the inspection target area may be at least a partial area of the peripheral portion 41 of the inspection object 40 .

The signal control unit 230 generates a signal for controlling ultrasonic waves to be transmitted. The ultrasonic waves to be transmitted are, for example, burst waves. The signal control unit 230 generates a burst signal according to the transmission timing and intensity of ultrasonic waves to be transmitted. The signal control section 23 outputs the generated signal to the transmission control section 240 .
The signal control unit 230 also acquires the ultrasonic signal (reception signal) received by the reception unit 280 via the reception processing unit 250 . The signal control unit 230 analyzes the intensity and phase of the acquired ultrasonic signal and outputs the analysis result (for example, measurement data) to the control unit 220 .

When analyzing the intensity and phase of the acquired ultrasonic signal, the signal control unit 230 may extract a signal in a predetermined time interval and analyze the intensity and phase using the extracted signal. When the state of ultrasonic waves changes in time series, it is possible to improve the accuracy of determination by using ultrasonic waves in time intervals that can be analyzed with high accuracy. For example, the signal control unit 230 detects the ultrasonic waves received by the receiving unit 280 in a predetermined time interval (for example, a time interval corresponding to one wavelength of the transmitted ultrasonic waves) after the reception is detected. Extract the signal corresponding to , and analyze the wavelength and intensity.

Further, the signal control unit 230 may perform signal processing such as phase detection on the acquired ultrasonic signal. When ultrasonic waves with different phases are mixed in the ultrasonic waves, the signal control unit 230 separates the ultrasonic waves with different phases from each other, so that the accuracy of determination can be improved.

The transmission control section 240 generates a burst wave with a predetermined frequency output from an oscillator (not shown) according to the burst signal from the signal control section 230 . The transmission control section 240 outputs the generated burst waves to the transmission section 260 .
The reception processing unit 250 acquires the reception signal received by the reception unit 280 and performs processing for facilitating analysis of the acquired reception signal. For example, the reception processing unit 250 amplifies the amplitude of the acquired reception signal using an amplifier. Further, the reception processing unit 250 may filter out wavelengths different from the wavelength of the transmitted ultrasonic waves from the acquired ultrasonic waves.

The transmission unit 260 transmits burst waves (ultrasonic waves) generated by the transmission control unit 240 .
The receiving section 280 receives the ultrasonic waves transmitted by the transmitting section 260 . The receiving section 280 outputs the received signal to the reception processing section 250 . The receiver 280 may include an A/D converter.
The camera 290 captures a bird's-eye view of the inspection object 40 placed on the transport device 30 . The camera 290 outputs imaging results (image data) to the control section 220 . This camera 290 may use either an area sensor (a camera whose imaging range is two-dimensional) or a line sensor.

(Positional relationship between ultrasonic inspection device 20 and inspection object 40)
Here, the positional relationship among the transmitting section 260, the receiving section 280, and the inspection object 40 will be described with reference to FIG.

As shown in FIG. 2, the transmitter 260 and the receiver 280 are arranged with a gap in one direction (Z-axis direction). The transmitter 260 and the receiver 280 are fixed to a base (not shown) of the ultrasonic inspection apparatus 20 . Thereby, the distance between the transmitter 260 and the receiver 280 is maintained. The transmitting section 260 transmits ultrasonic waves toward the receiving section 280 from a transmitting surface 261 facing the receiving section 280 . The receiving section 280 receives the ultrasonic waves transmitted from the transmitting section 260 on a receiving surface 281 facing the transmitting section 260 .
In FIG. 2, the conveying direction of the inspection object 40 by the conveying device 30 is the X-axis direction. The X-axis direction is orthogonal to the arrangement direction (Z-axis direction) of the transmitter 260 and the receiver 280 .
The end 411 of the inspection object 40 is the edge of the inspection object 40 that extends linearly when viewed from the Z-axis direction. A boundary line 420 of the inspection object 40 indicates a boundary line between a bonded portion and a non-bonded portion. This boundary line 420 is a line along the edge of the inspection object 40 .
The positions of the end portion 411 and the boundary line 420 may be detected by image data obtained from a camera (for example, the camera 290) that captures an image of the inspection target 40 from above.

The inspection object 40 is arranged between the transmitter 260 and the receiver 280 . The ultrasonic waves transmitted by the transmitting unit 260 reach the inspection object 40, and the ultrasonic waves transmitted through the inspection object 40 reach the receiving unit 280 and are received. The ultrasonic waves transmitted from the transmitter 260 are focused at a predetermined position. The area where the ultrasound is focused is the area S1 (see FIG. 2). The inspection object 40 is conveyed on the XY plane passing through the area S1.

FIG. 3 is a bird's-eye view showing the appearance of a packaging container 400, which is an example of the inspection object 40. As shown in FIG. In the example of FIG. 3, the packaging container 400 is arranged on the XY plane.
The packaging container 400 can contain beverages or liquid foods. A drinking spout 423 is provided at the left end in FIG. The drinking spout 423 is provided substantially in the center of the peripheral portion 410 in the X-axis direction. The shape of the drinking spout 423 seen from the Y-axis direction is substantially circular. This drinking spout 423 is a channel that allows communication between the inside and the outside of the packaging container 400 . A lid 425 is attached to the mouthpiece 423 . When the lid 425 is removed, the end of the drinking spout 423 is exposed, and the beverage or the like stored in the packaging container 400 can be drunk.

A region S1 indicates an ultrasonic wave irradiation region on the XY plane. The position of the region S1 in the Y-axis direction is a position a distance d1 to the right from the left end of the packaging container 400 in FIG. The distance d1 is set to be equal to or less than the width of the peripheral portion 410 so that an area to be inspected (inspection target area) is irradiated with ultrasonic waves. The distance d1 is determined according to inspection purposes and inspection items. In the example of FIG. 3, when inspecting the joint on the left side of the packaging container 400, the inspection target area is a strip-shaped area along the inspection direction 430 (X-axis direction).

The packaging container 400 is conveyed by the conveying device 30 to move relative to the ultrasonic inspection device 20 in the X-axis direction. Then, the ultrasonic waves are applied to the peripheral portion 410 along the inspection direction 430 (the direction along the X-axis). The receiving section 280 receives this ultrasonic wave. Based on this received signal, it is possible to inspect each position of the periphery 410 along the inspection direction 430 . In this case, the inspection is performed for the peripheral portion 410 and the mouthpiece 423 .

Although the case of inspecting the joint portion on the left side of the peripheral portion 410 has been described, the present invention is not limited to such a case. It is also possible to inspect the upper side, the right side, and the lower side of the peripheral edge portion 410 .
Also, after the inspection is performed at the position of the distance d1, the same packaging container 400 may be inspected at a distance different from the distance d1.

FIG. 4 is a bird's-eye view showing the appearance of a packaging container 450 that is another example of the inspection object 40. As shown in FIG. In the example of FIG. 4, the packaging container 450 is arranged on the XY plane.
The packaging container 450 can accommodate foods (fluid foods, viscous foods, dry foods, etc.), electronic components, stationery, and the like. A hole 470 is provided at the left end of FIG. This hole 470 is provided substantially in the center of the peripheral portion 460 in the X-axis direction. Holes 470 are used, for example, to hook packaging container 450 onto hooks of a display device.
There is a printed portion 471 at the peripheral portion 460 . The printed portion 471 is a portion where a character string is printed on the peripheral portion 460 by a laser printer, a hot printer, or the like. When printed on the printed portion 471 , the thickness of the printed portion 471 in the Z-axis direction is different from the thickness of the peripheral edge portion 460 . For example, the thickness of the printed portion 471 when engraved by a laser printer is thinner than the thickness of the peripheral edge portion 460 . The thickness of the printed portion 471 when stamped by a hot printer is thicker than the thickness of the surrounding edge portion 460 by the amount of the printing tape. A character string printed on the printing unit 471 represents a manufacturing lot, a manufacturing line, or the like.

In FIG. 4, the position of the region S1 in the Y-axis direction is a position away from the left end of the packaging container 450 by a distance d2 to the right. The distance d2 is set equal to or less than the width of the peripheral portion 460 .
The packaging container 450 is conveyed by the conveying device 30 to move relative to the ultrasonic inspection device 20 in the X-axis direction. Then, the ultrasonic waves are applied to the peripheral portion 460 along the inspection direction 480 (the direction along the X-axis). The receiving section 280 receives this ultrasonic wave. Based on this received signal, it is possible to inspect each position of the peripheral portion 460 along the inspection direction 480 . In this case, the inspection is performed on the peripheral portion 460 , the hole 470 and the printed portion 471 .
By changing the direction in which the packaging container 450 is arranged with respect to the conveying device 30 , it is possible to perform inspection along the inspection direction 472 . For example, when inspecting the joint on the lower side in the example of FIG. That is, the presence or absence of the notch 473 and the position of the notch 473 can also be inspected. Notch 473 is an opening for packaging container 450 .

(Configuration of control unit 220)
Returning to FIG. 1 , the control unit 220 has a storage unit 221 , a determination unit 222 and a threshold calculation unit 223 . The controller 220 may or may not include an edge detector 224 .
The storage unit 221 stores reference data, threshold data, and determination data. The storage unit 221 includes storage media such as HDD (Hard Disk Drive), flash memory, EEPROM (Electrically Erasable Programmable Read Only Memory), RAM (Random Access read/write Memory), ROM (Read Only M emory), or these any combination of storage media. A non-volatile memory, for example, can be used for this storage unit 221 .

FIG. 5 shows an example of measurement data and thresholds of an inspection object 40A (reference work, standard object, first standard object, second standard object) used as a reference for obtaining thresholds. It is a figure explaining. The inspection object 40A used as a reference is an inspection object 40 that has been confirmed to meet inspection standards. The measurement data of the inspection object 40A is called reference data. The measurement data is obtained by receiving ultrasonic waves (the first plurality of ultrasonic waves, the second plurality of ultrasonic waves, the third plurality of ultrasonic waves) transmitted to the inspection target area of the inspection object 40. FIG. 10 shows the obtained reception intensity for each of a plurality of positions in the inspection target area; FIG. Of the measurement data, the measurement data obtained from the inspection object 40A can be used as reference data. Among the inspection objects 40, a workpiece that is not used as a reference is an inspection object 40B (inspection workpiece). The measurement data obtained from this inspection object 40B can be used to determine whether or not the inspection object 40B satisfies the criteria. The specifications of the inspection object 40A and the inspection object 40B are the same. Here, the plurality of positions in the inspection target area may be different positions within the inspection target area. For example, the plurality of positions of the inspection target area may be different positions along the inspection direction within the inspection target area. The plurality of positions may be arranged in the inspection target area of the inspection target 40A in the direction in which the transmitting unit 260 relatively moves with respect to the inspection target 40A. The multiple positions may be arranged in a straight line. This reference data is written in the storage section 221 by the control section 220 based on the measurement data obtained from the signal control section 230 .
The horizontal axis of FIG. 5 represents the measurement time, and the vertical axis represents the reception intensity.
The measurement time represents the elapsed time from the start of measurement of the inspection object 40A to the end of measurement. The reception intensity represents the signal intensity when the reception unit 280 directly receives the ultrasonic waves emitted from the transmission unit 260 or receives them after passing through the inspection object 40A. At the start of measurement, since there is no test object 40A between the receiving unit 280 and the transmitting unit 260, the ultrasonic waves are not blocked by the test object 40A, and the received intensity is high. When the inspection object 40A is conveyed by the conveying device 30 and comes between the receiving section 280 and the transmitting section 260, the reception intensity decreases (time t1). When the inspection object 40A finishes passing between the receiving section 280 and the transmitting section 260, the reception intensity increases again (time t2). Therefore, the interval from time t1 to time t2 is the section in which the inspection object 40A is measured, and the positions p1 and p2 on the inspection object 40A corresponding to the times t1 and t2 are both ends of the inspection object 40A ( inspection start position and end position).
Here, the measurement positions from positions p1 to p2 of the inspection object 40A are obtained from the speed of the conveying device 30 and the measurement time. As an example, when an inspection apparatus that measures ultrasonic reception signals every 1 millisecond transports an inspection object 40A at a speed of 1000 mm/second, reception signals are generated at a plurality of positions on the inspection object 40A at intervals of 1 mm. measured. In this way, measurement results obtained at different positions along the inspection direction can be used as reference data.
In addition, when the conveying device 30 moves at a constant speed, it can be said that the horizontal axis indicates the measurement position along with the time axis. In the following embodiments, it is assumed that the conveying speed is constant, and the horizontal axis is the measurement position.

Based on the acquired reference data 500, the threshold calculation unit 223 calculates thresholds that can be used to determine whether or not the inspection object satisfies the criteria for a plurality of positions in the inspection target area. demand. For example, threshold calculator 223 obtains first threshold 510 , second threshold 520 , and third threshold 530 .
(Regarding the first threshold)
Based on the reference data 500 , the threshold calculator 223 obtains a threshold for specifying an inspection section when inspecting the inspection object 40 . The inspection interval is a time interval from when the inspection object 40 conveyed by the conveying device 30 reaches the area S1 until it finishes passing through the area S1. Using the signals in this inspection interval, determination in the determination operation described later is performed.
Threshold calculation unit 223 calculates the reception intensity (first reception intensity) when there is no inspection object 40A between transmission unit 260 and reception unit 280 and the inspection object between transmission unit 260 and reception unit 280. A value between the reception intensity (second reception intensity) when the object 40A is present is obtained as the first threshold value 510 .
When obtaining first threshold 510 , threshold calculator 223 may obtain an average value of the first reception strength and the second reception strength, and use this average as first threshold 510 .

Here, among the reference data 500, the section in which the reception intensity is less than the first threshold value 510 corresponds to the inspection section Sa. The inspection section Sa is a section from the start position p1 to the end position p2. Signals in the inspection section Sa are treated as measurement data from the inspection start position p1 to the inspection end position p2 on the inspection object 40 .

Threshold calculator 223 obtains at least one of second threshold 520 and third threshold 530 . Here, a case of obtaining both the second threshold 520 and the third threshold 530 will be described.
A second threshold 520 indicates the upper threshold used to determine the test. A third threshold 530 represents a lower threshold. That is, in the inspection of the inspection object 40, when the reception intensity is between the third threshold and the second threshold, the inspection object 40 is determined to meet the criteria.
The threshold calculator 223 obtains the second threshold 520 and the third threshold 530 based on the reference data 500 included in the inspection section Sa. For example, the threshold calculator 223 first obtains the average value of the received signal strength in the inspection section Sa. Then, the threshold value calculator 223 adds (adds or subtracts) a margin (expected variation range) to the average value, and uses the reception strength having a value larger than the average value as the second threshold value. A value 520 is obtained, and a reception strength having a value smaller than the average value is obtained as a third threshold value 530 . Alternatively, the second threshold value 520 and the third threshold value 530 may be obtained by adding a margin to the median value of the reception intensity in the inspection section Sa. Alternatively, the second threshold 520 and the third threshold 530 may be obtained by selecting one of the reception intensities included in the inspection section Sa and adding a margin to the selected reception intensities. A standard deviation value or a value obtained by multiplying the standard deviation value by a variable may be used as the margin. Also, a specified value corresponding to the material and thickness of the inspection object 40 may be used as the margin.
Also, in obtaining the second threshold value 520, an average waveform may be used instead of the average value of the reception strength. The average waveform is a waveform obtained by averaging waveforms represented by a plurality of reference data obtained by measuring a plurality of inspection objects 40A that satisfy the inspection criteria.
In the example of FIG. 5, the second threshold value 520 and the third threshold value 530 respectively show the case where the same value (constant value) is obtained at any measurement position.
Threshold calculation section 223 obtains threshold values (first threshold value 510, second threshold value 520, and third threshold value 530). It is written in the storage unit 221 in association with the value representing the measurement position. The value representing the measurement position is represented by the distance from the end of the inspection object 40A or the coordinates with respect to a reference point (for example, corner) on the inspection object 40. FIG.

(threshold calculation function)
Next, the operation of the above-described ultrasonic inspection apparatus 20 for obtaining the threshold value will be described.
FIG. 6 is a flowchart for explaining the operation of the ultrasonic inspection apparatus 20 to obtain the threshold value.
First, an inspection object 40</b>A, that is, an inspection object 40 (reference work) determined to satisfy the inspection standard is placed on the transport device 30 . Here, a case of inspecting an area having no spout, hole, notch, printed portion, etc. as a target will be described.
The transmitter 260 transmits ultrasonic waves, and the receiver 280 receives ultrasonic waves.
The transport device 30 transports the inspection object 40A (step S101).
The receiving unit 280 sequentially receives ultrasonic waves during a period from before the inspection object 40A reaches the area S1 to after it passes through the area S1.

The control unit 220 acquires the reference data 500 output from the signal control unit 230 via the reception unit 280, the reception processing unit 250, and the signal control unit 230 (step S102). The control unit 220 stores the acquired reference data in the storage unit 221 (step S103). Then, the control unit 220 obtains the first threshold value 510 based on the reference data (step S104). Next, control unit 220 obtains second threshold value 520 (step S105) and obtains third threshold value 530 (step S106). Then, the control unit 220 stores each obtained threshold in the storage unit 221 (step S107).

(judgment function)
Next, the determination operation performed by the ultrasonic inspection apparatus 20 described above will be described.
FIG. 7 is a flowchart for explaining the determination operation performed by the ultrasonic inspection apparatus 20. As shown in FIG. The judging operation is an operation of judging whether or not another inspection object 40B satisfies a criterion using a threshold obtained from measurement data (reference data) of the inspection object 40A.
The transmitter 260 transmits ultrasonic waves, and the receiver 280 receives ultrasonic waves.
The transport device 30 transports the inspection object 40B (step S201).
The receiving unit 280 sequentially receives ultrasonic waves during a period from before the inspection object 40B reaches the area S1 to after it passes through the area S1.
The control unit 220 acquires measurement data output from the signal control unit 230 via the reception processing unit 250 and the signal control unit 230 (step S202). The control unit 220 stores the acquired measurement data in the storage unit 221 (step S203). After reading the first threshold value 510 from the storage unit 221, the control unit 220 determines whether or not the measurement data is equal to or greater than the first threshold value 510 (step S204). The control unit 220 excludes measurement data that is equal to or greater than the first threshold value 510 from the inspection interval, and determines that measurement data that does not exceed the inspection interval belongs to the inspection interval. By this determination, an inspection section for the measurement data is specified (step S205).
Next, the control unit 220 determines whether or not there is measurement data equal to or greater than the second threshold value 520 for each measurement position belonging to the inspection section (step S206). If there is measurement data equal to or greater than the second threshold value 520, the control unit 220 determines that the inspection target 40B does not meet the inspection criteria (step S210).
Next, if there is no measured data above the second threshold 520, the controller 220 determines whether there is measured data below the third threshold 530 for each of the measurement positions belonging to the inspection section. (step S207). If there is measurement data that is less than the third threshold value 530, the control unit 220 determines that the inspection target 40B does not satisfy the inspection criteria (step S210).

On the other hand, when there is no measurement data less than the third threshold value 530, the control unit 220 determines that the inspection target 40B satisfies the inspection standard (step S208). Then, the control unit 220 associates the measurement data with the determination result and stores them in the storage unit 221 (step S209). By storing the measurement data and the determination result in the storage unit 221 in association with each other, it is possible to store them as an inspection history. The inspection object 40B that has been determined to meet the inspection criteria is determined as a non-defective product if it satisfies the inspection criteria that will be performed later.

In this determination operation, determination section 222 determines whether the measured data is greater than or equal to the threshold value or less than the threshold value.
The determination unit 222 reads out the threshold value from the storage unit 221 . The determination unit 222 compares the measurement data obtained from the inspection object 40B with a threshold value and determines the magnitude relationship with respect to the threshold value.
Determining the magnitude relationship in this embodiment does not mean only performing both the determination of whether it is large and the determination of whether it is small. The magnitude relationship may be determined only by determining whether it is large or only determining whether it is small.
Further, the determination as to whether or not the value is large may be determined as to whether or not the value is equal to or greater than the threshold value, or may be determined as to whether or not the value exceeds the threshold value. Also, the determination of whether it is small may be the determination of whether it is equal to or less than the threshold value, or the determination of whether it is less than the threshold value.
Here, the number of threshold values used for determination at one measurement position may be one or plural. If multiple thresholds are used, for example, a first threshold 510, a second threshold 520, and a third threshold 530 can be used. When one threshold is used, any one of the first threshold 510, the second threshold 520, and the third threshold 530 may be used.

FIG. 8A is a diagram illustrating measurement data of an inspection object 40B determined to satisfy inspection criteria.
In FIG. 8A, the horizontal axis represents the measurement position, and the vertical axis represents the reception intensity.
The reception intensity indicated by the measurement data 600 is between the second threshold 520 and the third threshold 530 at any measurement position in the inspection section (the section between the start position p1 and the end position p2). This is the value of received strength. In this case, the determination unit 222 determines that the inspection object 40B from which the measurement data 600 was obtained satisfies the inspection standard.

FIG. 8B is a diagram explaining the measurement data of the inspection object 40B determined not to satisfy the inspection criteria.
In FIG. 8B, the horizontal axis represents the measurement position, and the vertical axis represents the reception intensity.
The reception intensity of the measurement data 610 is less than the third threshold value 530 for the measurement data 611 at the position p11 in the inspection section (the section between the start position p1 and the end position p2). Furthermore, the measurement data 612 at the position p12 is a value equal to or higher than the second threshold value 520. FIG. Therefore, the determination unit 222 determines that the inspection target 40B from which the measurement data 610 is obtained does not satisfy the inspection standard.

As described above, the ultrasonic inspection apparatus 20 according to the embodiment inspects an object to be inspected placed between an ultrasonic transmission unit and an ultrasonic reception unit based on the reception intensity of ultrasonic waves measured by the reception unit. An apparatus that acquires reception intensities measured at a plurality of positions of a reference work, which is one of the inspection objects, as reference data, and obtains reception intensity thresholds for the plurality of positions based on the reference data. A computing unit, a storage unit that associates and stores thresholds and values representing a plurality of positions, measurement data that represents reception strengths at a plurality of positions of an inspection object, and magnitude relationships between the thresholds and the measurement data. and a determining unit for determining.

According to the above-described embodiment, the threshold value can be easily obtained because the threshold value calculator 223 uses the reference data to obtain the threshold value. Also, it takes less time and effort to obtain the threshold value. Also, even an unskilled operator can easily obtain the threshold value.

Further, in the above-described embodiment, since the ultrasonic wave is irradiated while the inspection object 40 is passed between the transmission unit 260 and the reception unit 280, the inspection of the inspection object 40 can be performed in a non-contact manner. It can be carried out.

(First modification)
Next, a modified example will be described.
In the first modified example, the inspection of the inspection object 40 in which at least one of the spout, the hole, the notch, the printed part, etc. is included in the inspection target area will be described.
9A and 9B are diagrams for explaining measurement data when the inspection target area includes a hole and a spout. FIG. 9A shows reference data 700, which is measurement data of an inspection object 40A used as a reference, and FIG. 9B shows measurement data 800 of an inspection object 40B for which it is desired to determine whether or not it satisfies the criteria.
9A and 9B, the horizontal axis represents the measurement position, and the vertical axis represents the reception intensity.
The inspection section (the section from the start position p1 to the end position p2) is determined based on the first threshold 511 (or the first threshold 511 and the length of the inspection section). A fixed section from the start position p1 may be defined as the inspection section. The inspection interval includes an interval ps1 and an interval ps2. The reception intensity of the reference data 700 corresponding to the section ps1 is greater than other measurement positions. The reception intensity of the reference data 700 corresponding to the section ps2 is smaller than other measurement positions.
Interval ps1 corresponds to the position of the hole. When the peripheries of the inspection objects 40A and 40B are provided with holes, the ultrasonic waves transmitted from the transmitting section 260 reach the receiving section 280 directly without passing through the sheet member. Therefore, the received signal strength in section ps1 shows a large value.
Section ps2 corresponds to the position where the spout is located. When the test objects 40A and 40B have a spout at the periphery thereof, the ultrasonic waves transmitted from the transmitting unit 260 not only pass through the sheet member, but also pass through the member constituting the spout, and then reach the receiving unit. Reach 280. Therefore, the reception intensity in the section ps2 shows a smaller value than that in the peripheral portion where the drinking spout does not exist.
In the case of the inspection object 40 provided with such a hole or a drinking mouth, it is possible to inspect whether there is peeling in the part without the hole or the drinking mouth, and to inspect whether the hole or the drinking mouth is properly provided. It is desirable to be able to Therefore, in this modified example, the threshold calculator 223 sets a threshold according to the inspection object 40 having at least one of a hole, a spout, a notch, and a printed portion in the peripheral portion. .
The reference data 700 represents the reception result of ultrasonic waves for the inspection object 40A having a hole and a spout in its peripheral portion. The threshold calculator 223 obtains the threshold based on this reference data 700 .

The threshold calculator 223 obtains a second threshold 521 and a third threshold 531 with respect to the reference data 700 belonging to the inspection section, using the received intensity at each measurement position as a reference and adding a margin. The second threshold 521 and the third threshold 531 are obtained for each measurement position in the section from the start position p1 to the end position p2.
In FIG. 9A, the second threshold 521 and the third threshold 531 in the section ps1 are greater than the second threshold 521 and the third threshold 531 at the measurement positions before and after the section ps1, respectively. The reason is that in the section ps1, the ultrasonic waves pass through the holes and are directly received by the receiving section 280, instead of passing through the peripheral portion. Thus, the second threshold 521 and the third threshold 531 have values corresponding to the shape and thickness of the inspection object 40A.
The second threshold 521 and the third threshold 531 in the section ps2 are smaller than the second threshold 521 and the third threshold 531 at the measurement positions before and after the section ps2, respectively. This is because the ultrasonic waves pass through the sheet member and the mouthpiece in the section ps2.
As a result, in inspecting the inspection object 40B, if the measured data has a waveform shape equivalent to that of the reference data 700, the reception intensity thereof falls between the second threshold value 521 and the third threshold value 531. . In that case, the determination unit 222 can determine that the inspection target 40B satisfies the inspection criteria.
In the example of FIG. 9A, the margin of the second threshold value 521 with respect to the reference data 700 varies according to the measurement position, but it is not limited to such an example. The margin of the second threshold 521 with respect to the reference data 700 may be constant regardless of the measurement position. Similarly, the margin of the third threshold value 531 with respect to the reference data 700 varies depending on the measurement position, but is not limited to such an example. The margin of the third threshold 531 with respect to the reference data 700 may be constant regardless of the measurement position.

In FIG. 9B, the reception strength of the measurement data 800 in the section ps5 and the section ps6 is less than the third threshold value 531. In FIG. Although the section ps5 is a section corresponding to the position of the hole, the received strength in the section ps5 is less than the third threshold value 531 . There is a possibility that the holes are not formed normally in this section ps5. For example, when a hole is formed by a punch or the like, there may be cases where portions to be punched remain. In such a case, the determination unit 222 determines that the inspection target 40B does not meet the inspection criteria.
Also, since the section ps6 is a section corresponding to the position of the drinking mouth, the reception intensity in the section ps6 is lowered. However, the section ps6 in which the reception strength of the measured data 800 decreases is located before the section ps2 in which the strength of the third threshold value 531 decreases. Fall below. This is thought to be due to improper installation of the spout. Also in this case, the determination unit 222 determines that the inspection target 40B does not meet the inspection criteria.

(Second modification)
Next, a second modified example will be described.
In the above-described embodiment, the case where the conveying speed of the conveying device 30 is constant has been described. However, even if the conveying device 30 is driven according to the speed command value, it may not always be possible to maintain a constant speed when affected by external factors (for example, unstable voltage of the power supply). In such a case, the determination section 222 can correct the measurement position in the measurement data.
FIG. 10 is a diagram for explaining measurement data when the distance between the start position p1 and the end position p2 of the inspection object 40B of the same type as in FIG. 9A is shorter than normal. In FIG. 10, the horizontal axis represents the measurement position, and the vertical axis represents the reception intensity.
When the interval (distance) between the start position p1 and the end position p2 is shorter than the reference data 700, the waveform shape is shortened in the horizontal direction as shown in the measurement data 810. FIG. The reason why the distance between the start position p1 and the end position p2 is shorter than in the normal case is, for example, that the actual transport speed of the transport device 30 is faster than the speed corresponding to the speed command value.
In such a case, the determination unit 222 adjusts the measurement positions as a whole so that the interval between the start position p1 and the end position p2 matches the interval (distance) between the start position p1 and the end position p2 in normal times. Correct for stretching. Accordingly, inspection can be performed using the threshold value stored in the storage unit 221 .
On the other hand, when the transport speed of the transport device 30 is slower than the speed corresponding to the speed command value, the interval between the start position p1 and the end position p2 is longer than normal. In such a case, the determination unit 222 reduces the measurement positions as a whole so that the interval between the start position p1 and the end position p2 matches the interval between the start position p1 and the end position p2 in normal times. corrected to That is, the determination unit 222 corrects the value representing the measurement position according to the difference between the interval between the start position p1 and the end position p2 and the interval (predetermined interval) between the start position p1 and the end position p2 in the normal state. do. Accordingly, inspection can be performed using the threshold value stored in the storage unit 221 .
Even if the transport speed is a speed corresponding to the speed command value, if the direction of the inspection object 40B placed on the transport device 30 is tilted, the distance from the start position to the end position A short distance may be detected. Even in such a case, the determination unit 222 adjusts the entire measurement position so that the interval (distance) between the start position p1 and the end position p2 matches the interval between the start position p1 and the end position p2 in the reference data. Correction is performed so that the Accordingly, inspection can be performed using the threshold value stored in the storage unit 221 .

(Third modification)
Next, the 3rd modification is demonstrated.
In the third modified example, a case will be described in which a hole, a spout, a notch, a printed portion, etc. provided in the peripheral portion are inspected for an inspection object 40 that is arranged deviated from a prescribed position.
FIG. 11 is a diagram for explaining measurement data when inspecting an inspection object of the same type as in the first modified example, in which a hole and a drinking spout are provided in the periphery.
In FIG. 11, the horizontal axis represents the measurement position, and the vertical axis represents the reception intensity.
The upper graph in FIG. 11 represents measurement data 820 when it is determined that the inspection object 40B satisfies the inspection criteria. The lower graph in FIG. 11 represents the measurement data 830 of the inspection object 40B in which the hole position is provided at a position different from the specified position.
In the measurement data 830, the measurement position ps10 at which the reception intensity peaks is closer to the end position p2 than the measurement position (peak position) ps9 of the measurement data 820. FIG. That is, it indicates that the position of the hole in the peripheral portion of the inspection object 40B in the lower graph of FIG. 11 is located farther from the starting position p1. However, the intensity of the received signal corresponding to the measurement position ps9 of the measurement data 820 is substantially the same as that of the measurement position ps10 of the measurement data 830. FIG.
The measurement data 830 at the measurement position ps9 is below the third threshold 531 and the measurement data 830 at the measurement position ps10 is above the second threshold 521. FIG. Therefore, the determination unit 222 determines that the inspection criteria are not satisfied. Here, the determination unit 222 divides the measurement data 830 into a plurality of sections based on the measurement positions, and determines the measurement positions of the measurement data 830 for the divided sections (divided sections) in the inspection direction (start position p1 direction or end position position p2 direction). The determination unit 222 compares the measurement data 830 whose measurement position has been moved in this way with each threshold value. That is, the determination unit 222 compares the measurement data 830 corresponding to the measurement position (predetermined position) included in the divided section with the threshold values 521 and 531 corresponding to positions shifted in the inspection direction from the measurement position. In this embodiment, the subsection including the measurement position ps10 is moved by a distance d3 in the direction of the starting position p1. When the divided section is moved and the measurement data 830 of the measurement position ps10 included in the divided section after movement falls within the reception intensity between the second threshold value 521 and the third threshold value 531, the determination section 222 , it is determined that the inspection criteria are met when the divided section is moved, and information representing the determination result is stored. Further, it may be determined whether or not the distance d3 by which the divided section is moved is within the allowable range. As a result, it is possible to inspect the presence of a hole and the absence of delamination in an area without a hole even for the inspection object 40B in which the hole is formed at a shifted position.

(Fourth modification)
In the embodiments and modifications described above, the start position in the inspection section is specified using the first threshold. In this fourth modification, the start position is specified based on the imaging result of camera 290 .
The edge detection unit 224 detects the position of the inspection object 40 from the imaging result obtained from the camera 290, thereby determining the inspection interval of the reference data and the inspection interval of the measurement data of the inspection workpiece.
The edge detection unit 224 detects the time when the edge of the inspection object 40 passes through the area S1 from the imaging result of the vicinity of the area S1 obtained from the camera 290 . For example, by synchronizing the imaging cycle of the camera 290 with the ultrasonic transmission cycle of the transmission unit 260, it is possible to associate the time when the end of the inspection object 40 is detected by the camera 290 with the time in the measurement data. is.
If the imaging cycle is an integral multiple of the ultrasonic wave transmission cycle, the accuracy of association can be further improved. With this correspondence, the start time t1 of the inspection section Sa specified using the first threshold value 510 is corrected to the time when the edge detection section 224 detects the edge. A plurality of measurement positions on the inspection object 40 are determined assuming that the corrected time corresponds to the start position (measurement position) p1. The resolution of the captured image is higher than the interval (for example, 1 mm) between the measurement positions on the inspection object 40 . Therefore, the measurement position can be specified with higher accuracy than when the first threshold value 510 is used to specify the start position of the inspection section Sa.

In addition, since edges (start position and end position) can be detected using image data obtained from the camera 290, edges can be detected without providing a sensor such as an encoder in the conveying device 30. Also, even if the transport speed fluctuates, the threshold can be determined after correcting the start position of the measurement data.
In this modified example, a transmission sensor may be provided instead of the camera 290, and the edge of the inspection object 40 may be detected using the detection result of this transmission sensor.

Also, in this embodiment, the starting position can be corrected. Therefore, if there is a value that does not satisfy the inspection criteria in the measurement data, it is possible to specify the measurement position where the value does not satisfy the inspection criteria with reference to the corrected start position. As a result, it is possible to accurately ascertain at which position there is a possibility of a problem.

In the above-described embodiment and modification, the ultrasonic inspection apparatus 20 has explained the case where the inspection object 40 is moved relative to the transmission unit 260 and the reception unit 280 for inspection. However, a plurality of pairs of transmitters and receivers may be arranged in the inspection direction, and measurement may be performed at a plurality of measurement positions in a state in which the inspection object 40 is not relatively moved.

Further, in the above-described embodiment, the case where the conveying device 30 conveys the inspection object 40 laid horizontally on the belt conveyor has been described. However, the conveying device 30 may hold a part of the inspection object 40 and convey the inspection object 40 in a vertical state. In this case, the transmitting unit 260 and the receiving unit 280 are arranged so as to have a positional relationship in which ultrasonic waves can be emitted and received from the periphery of the inspection object 40 in the vertical direction.

In the above-described embodiment, the case where the ultrasonic inspection apparatus 20 is provided with the function of obtaining the threshold has been described, but the present invention is not limited to such a case. For example, the function of obtaining the threshold value may be installed in a device different from the ultrasonic inspection device 20 . More specifically, the storage unit 221 and the threshold calculation unit 223 may be configured as a device in a housing separate from the ultrasonic inspection apparatus 20, with the threshold calculation device. In this case, the threshold calculator may include the edge detector 224 .

The control unit 220 in the above-described embodiment may be realized by a computer. In that case, a program for realizing this function may be recorded in a computer-readable recording medium, and the program recorded in this recording medium may be read into a computer system and executed. It should be noted that the "computer system" referred to here includes hardware such as an OS and peripheral devices. The term "computer-readable recording medium" refers to portable media such as flexible discs, magneto-optical discs, ROMs and CD-ROMs, and storage devices such as hard discs incorporated in computer systems. Furthermore, "computer-readable recording medium" refers to a program that dynamically retains programs for a short period of time, like a communication line when transmitting a program via a network such as the Internet or a communication line such as a telephone line. It may also include something that holds the program for a certain period of time, such as a volatile memory inside a computer system that serves as a server or client in that case. Further, the program may be for realizing a part of the functions described above, or may be capable of realizing the functions described above in combination with a program already recorded in the computer system. It may be implemented using a programmable logic device such as an FPGA (Field Programmable Gate Array).

Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and design and the like are included within the scope of the gist of the present invention.

The present invention may be applied to an inspection apparatus and an inspection method.

1 Ultrasonic inspection system 20 Ultrasonic inspection apparatus 220 Control unit 221 Storage unit 222 Determination unit 223 Threshold calculation unit 224 Edge detection unit 260 Transmission unit 280 Reception unit 290 Camera 40 Inspection Object 41... Periphery

Claims (16)

a transmission unit that irradiates ultrasonic waves to a plurality of mutually different positions of a first standard object among inspection objects;
a receiver that receives a first plurality of ultrasonic waves emitted by the transmitter and transmitted through the plurality of positions;
a calculation unit that calculates a plurality of threshold values corresponding to each of the plurality of positions based on the reception intensity of each of the first plurality of ultrasonic waves;
a storage unit that stores the values representing the plurality of threshold values and the plurality of positions in a state of being associated with each other;
The ultrasonic wave is irradiated from the transmission unit to an inspection section including a plurality of mutually different positions of the inspection work in the inspection object, and the inspection work satisfies the criteria based on the reception intensity received by the reception unit. A control unit that determines whether or not there is
has
The inspection device, wherein the plurality of thresholds are thresholds that can be used for determination by the control unit . The inspection apparatus according to claim 1, wherein the plurality of positions are within an inspection target area of the first standard object, and are arranged in a direction in which the transmitter moves relative to the first standard object. The inspection device according to claim 1 or 2, wherein the plurality of positions are arranged in a straight line. The inspection apparatus according to any one of claims 1 to 3, wherein the plurality of threshold values include a plurality of mutually different values. 5. The plurality of values different from each other are values determined according to whether or not a singular point is at a specified position in the shape of the first standard object for each of the plurality of positions. Inspection equipment as described. The inspection apparatus according to claim 4, wherein the plurality of mutually different values are different values determined according to the thickness of the first standard object for each of the plurality of positions. 1 to 3, wherein the computing unit obtains the plurality of threshold values by adding a predetermined value to a value obtained by performing predetermined processing on the received intensity of each of the first plurality of ultrasonic waves. 7. The inspection device according to any one of 6. The transmitting unit irradiates ultrasonic waves to a second standard object different from the first standard object,
The receiving unit receives a second plurality of ultrasonic waves emitted by the transmitting unit and transmitted through the second standard object,
8. The computing unit obtains the plurality of thresholds based on at least the received intensities of the first plurality of ultrasonic waves and the received intensities of the second plurality of ultrasonic waves. An inspection device according to any one of the preceding paragraphs. The computing unit uses, as the plurality of thresholds, thresholds representing whether or not an inspection standard is satisfied, upper thresholds corresponding to each of the plurality of positions, and thresholds corresponding to each of the plurality of positions. 9. The inspection apparatus according to any one of claims 1 to 8, wherein at least one of lower limit thresholds corresponding to is determined. The inspection apparatus according to claim 9, wherein the computing unit obtains the plurality of upper threshold values and the plurality of lower threshold values. The calculation unit sets the threshold value for specifying the inspection interval when inspecting the inspection object, with the first standard object not present between the transmission unit and the reception unit. the transmitting unit in a state in which the intensity of the ultrasonic wave emitted by the transmitting unit and received by the receiving unit is smaller than that of the ultrasonic wave and the first standard object is between the transmitting unit and the receiving unit; The inspection apparatus according to any one of claims 1 to 10, wherein a value larger than the value of the intensity of the ultrasonic waves emitted by and received by the receiving unit is obtained. from claim 1, further comprising a determination unit that compares the magnitudes of received intensities of the plurality of third ultrasonic waves that have respectively passed through the plurality of positions in the inspection section of the inspection workpiece with the magnitudes of the plurality of threshold values. The inspection device according to claim 11 . The transmitting unit irradiates ultrasonic waves while moving from a first position, which is a starting point, to a second position, which is an end point, of the inspection section of the inspection work ,
The determination unit measures values including values representing a plurality of positions from the first position to the second position, and received intensities of a plurality of ultrasonic waves transmitted through the plurality of positions received by the reception unit. 13. The values representing the plurality of positions in the measurement data are corrected according to the difference between the value representing the first position and the value representing the second position in the data and the difference from a predetermined value. Inspection equipment as described. The determining unit associates the magnitude of the received intensity of the ultrasonic wave transmitted through a predetermined position among the plurality of positions in the inspection section of the inspection workpiece with a position shifted from the predetermined position among the plurality of threshold values. 13. The inspection apparatus according to claim 12, wherein the comparison is made with a threshold magnitude to be applied. 12. from claim 11, further comprising an edge detection unit that determines an inspection section of the inspection object by detecting respective positions of the first standard object or the inspection object from imaging results obtained from an imaging device. 15. The inspection device according to any one of claims 14 to 14. irradiating ultrasonic waves to a plurality of mutually different positions of the first standard object among the inspection objects;
receiving a plurality of ultrasonic waves respectively transmitted through the plurality of positions different from each other;
Obtaining a plurality of threshold values corresponding to each of the plurality of positions based on the received intensity of each of the plurality of ultrasonic waves;
storing in a storage unit the values representing the plurality of threshold values and the plurality of positions in a state of being associated with each other ;
Whether or not the inspection work satisfies the criteria based on the reception intensity received by the reception unit after irradiating the ultrasonic wave from the transmission unit to the inspection section including a plurality of mutually different positions of the inspection work in the inspection object determine whether
including
The inspection method, wherein the plurality of thresholds are thresholds that can be used to determine whether the workpiece to be inspected satisfies a criterion.

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