JP7074488B2 - Ultrasonic probe - Google Patents

Ultrasonic probe Download PDF

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JP7074488B2
JP7074488B2 JP2018016160A JP2018016160A JP7074488B2 JP 7074488 B2 JP7074488 B2 JP 7074488B2 JP 2018016160 A JP2018016160 A JP 2018016160A JP 2018016160 A JP2018016160 A JP 2018016160A JP 7074488 B2 JP7074488 B2 JP 7074488B2
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ultrasonic probe
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JP2019132748A (en
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利英 福井
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Kobe Steel Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

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Description

本発明は、検査対象の欠陥を検査する超音波プローブに関するものである。 The present invention relates to an ultrasonic probe for inspecting a defect to be inspected.

従来、非破壊で鋼材等の検査対象に存在する欠陥を検査する手段の一つとして、いわゆる二振動子垂直プローブが知られている。例えば、特許文献１には、送信用振動子と、送信用音響的遅延材と、受信用振動子と、受信用音響的遅延材と、音響的隔離板と、を備える超音波探触子（二振動子垂直プローブ）が開示されている。 Conventionally, a so-called two-oscillator vertical probe has been known as one of means for inspecting defects existing in an inspection target such as steel materials in a non-destructive manner. For example, Patent Document 1 describes an ultrasonic probe (with a transmitting oscillator, a transmitting acoustic delay material, a receiving vibrator, a receiving acoustic delay material, and an acoustic isolation plate). (Dual oscillator vertical probe) is disclosed.

特開２００３－３０２３８８号公報Japanese Patent Application Laid-Open No. 2003-302388

特許文献１に記載されるような超音波探触子では、検査対象の内部に存在する欠陥を検知することは可能であるものの、検査対象の表面領域（表面ないしその近傍の領域）の欠陥を検査することはできない。 Although it is possible to detect defects existing inside the inspection target with an ultrasonic probe as described in Patent Document 1, defects in the surface region (the surface or a region in the vicinity thereof) of the inspection target are detected. It cannot be inspected.

本発明の目的は、検査対象の内部領域に加え、表面領域に存在する欠陥をも検査することが可能な超音波プローブを提供することである。 An object of the present invention is to provide an ultrasonic probe capable of inspecting a defect existing in a surface region as well as an internal region to be inspected.

前記課題を解決するために、本発明者らは、いわゆる二振動子垂直プローブでの欠陥の検査時にクリーピング波が生じることに着目した。クリーピング波は、送信振動子から送信された超音波（縦波）が検査対象に横波として入射する際に生じる超音波であり、検査対象の表面領域を伝播する縦波である。このクリーピング波を用いることによって、検査対象の表面領域に存在する欠陥を検知可能となることに想到した。 In order to solve the above problems, the present inventors have focused on the generation of creeping waves when inspecting defects with a so-called two-oscillator vertical probe. The creeping wave is an ultrasonic wave generated when an ultrasonic wave (longitudinal wave) transmitted from a transmission oscillator is incident on an inspection target as a transverse wave, and is a longitudinal wave propagating in a surface region of the inspection target. By using this creeping wave, we came up with the idea that defects existing in the surface area to be inspected can be detected.

本発明は、このような観点に基づいてなされたものである。具体的に、本発明は、超音波として縦波を送信する送信振動子と、超音波を受信する第１受信振動子と、超音波を受信する第２受信振動子と、超音波を吸収する音響隔離部と、前記送信振動子、前記第１受信振動子、前記第２受信振動子及び前記音響隔離部を保持するくさびと、を備え、前記くさびは、前記送信振動子から送信された縦波が横波として検査対象に入射し、かつ、前記横波の前記検査対象への入射時に前記検査対象の表面領域を伝播するクリーピング波を生じさせる角度で前記送信振動子を保持する送信振動子保持部と、前記検査対象内を伝播する横波が前記検査対象の内部領域に存在する欠陥で反射することにより生成された反射超音波を前記第１受信振動子が受信可能な角度で当該第１受信振動子を保持する第１受信振動子保持部と、前記送信振動子保持部と前記第１受信振動子保持部との間で前記音響隔離部を保持する音響隔離部保持部と、前記クリーピング波が前記検査対象の表面領域に存在する欠陥で反射することにより生成される反射クリーピング波を前記第２受信振動子が受信可能な角度で当該第２受信振動子を保持する第２受信振動子保持部と、を有する、超音波プローブを提供する。 The present invention has been made based on such a viewpoint. Specifically, the present invention absorbs ultrasonic waves, a transmitting oscillator that transmits longitudinal waves as ultrasonic waves, a first receiving oscillator that receives ultrasonic waves, and a second receiving oscillator that receives ultrasonic waves. It includes an acoustic isolation unit, a transmission oscillator, a first reception oscillator, a second receiving oscillator, and a wedge holding the acoustic isolation portion, and the wedge is a vertical unit transmitted from the transmission oscillator. A transmitter holding that holds the transmitter at an angle that causes a creeping wave that propagates in the surface area of the inspection target when the wave is incident on the inspection target as a transverse wave and the transverse wave is incident on the inspection target. The first reception is performed at an angle at which the first receiving oscillator can receive the reflected ultrasonic waves generated by reflecting the transverse wave propagating in the inspection target and the unit by a defect existing in the internal region of the inspection target. The first receiving oscillator holding portion that holds the vibrator, the acoustic isolation portion holding portion that holds the acoustic isolation portion between the transmitting vibrator holding portion and the first receiving vibrator holding portion, and the creeping. The second received vibration holding the second receiving oscillator at an angle at which the second receiving oscillator can receive the reflected creeping wave generated by the wave reflected by the defect existing in the surface region of the inspection target. Provided is an ultrasonic probe having a child holding portion.

本超音波プローブでは、送信振動子から送信されて検査対象の内部に進入した横波が検査対象の内部領域に存在する欠陥で反射することにより生成された反射超音波を受信する第１受信振動子と、送信振動子から送信された縦波の検査対象への入射時に生じたクリーピング波が検査対象の表面領域に存在する欠陥で反射することにより生成される反射クリーピング波を受信する第２受信振動子と、を有しているので、検査対象の内部領域に存在する欠陥に加え、表面領域に存在する欠陥をも検知することができる。なお、表面領域とは、検査対象の表面からクリーピング波の数波長程度の深さに相当する領域を意味する。 In this ultrasonic probe, the first receiving ultrasonic wave that receives the reflected ultrasonic wave generated by the transverse wave transmitted from the transmitting vibrator and entering the inside of the inspection target is reflected by the defect existing in the internal region of the inspection target. The second is to receive the reflected creeping wave generated by the creeping wave generated when the longitudinal wave transmitted from the transmission oscillator is incident on the inspection target and reflected by the defect existing in the surface region of the inspection target. Since it has a receiving oscillator, it can detect defects existing in the surface region in addition to defects existing in the internal region to be inspected. The surface region means a region corresponding to a depth of several wavelengths of creeping waves from the surface to be inspected.

また、前記第２受信振動子保持部は、前記音響隔離部保持部と前記第１受信振動子保持部との間に設けられていることが好ましい。 Further, it is preferable that the second receiving oscillator holding portion is provided between the acoustic isolation portion holding portion and the first receiving oscillator holding portion.

このようにすれば、送信振動子から送信された縦波を第２受信振動子が受信することが回避されるので、第２受信振動子が超音波を受信した際に生成される信号のＳＮ比が高まる。 By doing so, it is possible to prevent the second receiving oscillator from receiving the longitudinal wave transmitted from the transmitting oscillator, so that the SN of the signal generated when the second receiving oscillator receives the ultrasonic wave. The ratio increases.

さらに、前記第２受信振動子保持部は、前記第１受信振動子と前記第２受信振動子とのなす角が７０度以上１１０度以下となるように前記第２受信振動子を保持していることが好ましい。 Further, the second receiving oscillator holding unit holds the second receiving oscillator so that the angle formed by the first receiving oscillator and the second receiving oscillator is 70 degrees or more and 110 degrees or less. It is preferable to have.

このようにすれば、検査対象の内部領域に存在する欠陥での反射時に生成された反射超音波を第２受信振動子が受信することが抑制される。具体的に、前記反射超音波（横波）は、再びくさび内に進入するときに縦波になるので、この縦波を受信する第１受信振動子と第２受信振動子とのなす角が７０度以上１１０度以下に設定されることにより、その縦波を第２受信振動子が受信することが抑制される。 By doing so, it is suppressed that the second receiving oscillator receives the reflected ultrasonic wave generated at the time of reflection by the defect existing in the internal region of the inspection target. Specifically, since the reflected ultrasonic wave (transverse wave) becomes a longitudinal wave when it enters the wedge again, the angle formed by the first receiving oscillator and the second receiving oscillator that receives this longitudinal wave is 70. By setting the degree to 110 degrees or more, reception of the longitudinal wave by the second receiving oscillator is suppressed.

また、前記超音波プローブにおいて、超音波を受信する第３受信振動子をさらに備え、前記くさびは、前記反射クリーピング波を前記第３受信振動子が受信可能な角度で当該第３受信振動子を保持する第３受信振動子保持部と、を有し、前記第３受信振動子保持部は、前記送信振動子保持部と前記第１受信振動子保持部とを結ぶ方向について前記送信振動子保持部を基準として前記音響隔離部保持部とは反対側に設けられていることが好ましい。 Further, the ultrasonic probe further includes a third receiving oscillator for receiving ultrasonic waves, and the wedge has the third receiving oscillator at an angle at which the reflected creeping wave can be received by the third receiving oscillator. The third receiving vibrator holding unit has a third receiving vibrator holding unit, and the third receiving vibrator holding unit has the transmitting vibrator in a direction connecting the transmitting vibrator holding unit and the first receiving vibrator holding unit. It is preferable that the holding portion is provided on the side opposite to the acoustic isolation portion holding portion as a reference.

このようにすれば、くさびのうち音響隔離部よりも送信振動子が配置されている側の直下に存在する欠陥と、くさびのうち音響隔離部よりも第１受信振動子が配置されている側の直下に存在する欠陥と、の識別が可能となる。 By doing so, a defect existing directly under the side of the wedge where the transmitting oscillator is arranged rather than the acoustic isolation portion, and the side of the wedge where the first receiving oscillator is arranged rather than the acoustic isolation portion. It is possible to distinguish from the defect that exists directly under.

また、前記送信振動子は、広帯域振動子であることが好ましい。なお、広帯域振動子とは、１波又は２波程度の超音波パルスを発生する振動子を指す。 Further, the transmission oscillator is preferably a wideband oscillator. The broadband oscillator refers to an oscillator that generates an ultrasonic pulse of about one or two waves.

この態様では、送信振動子及び第１受信振動子によって検査対象の表面領域に存在する欠陥をも検知することが可能となる。具体的に、広帯域振動子から送信される超音波は、波の数が少ないので、検査対象の表面で反射することにより生成される反射超音波の第１受信振動子での受信信号と、前記表面領域に存在する欠陥で反射することにより生成される反射超音波の第１受信振動子での受信信号と、の識別が可能となる。 In this aspect, it is possible to detect defects existing in the surface region to be inspected by the transmitting oscillator and the first receiving oscillator. Specifically, since the ultrasonic waves transmitted from the wideband oscillator have a small number of waves, the received signal of the reflected ultrasonic waves generated by being reflected on the surface to be inspected and the signal received by the first receiving ultrasonic wave and the above-mentioned It is possible to distinguish the reflected ultrasonic wave generated by the reflection by the defect existing in the surface region from the received signal by the first receiving vibrator.

以上のように、本発明によれば、検査対象の内部領域に加え、表面領域に存在する欠陥をも検査することが可能な超音波プローブを提供することができる。 As described above, according to the present invention, it is possible to provide an ultrasonic probe capable of inspecting a defect existing in a surface region in addition to an internal region to be inspected.

本発明の第１実施形態の超音波プローブの概要を示す図である。It is a figure which shows the outline of the ultrasonic probe of 1st Embodiment of this invention. 送信振動子として広帯域振動子が用いられた場合に第１受信振動子で受信される受信信号の例を示す図である。It is a figure which shows the example of the received signal received by the 1st receiving oscillator when a wideband oscillator is used as a transmitting oscillator. 送信振動子として狭帯域振動子が用いられた場合に第１受信振動子で受信される受信信号の例を示す図である。It is a figure which shows the example of the received signal received by the 1st receiving oscillator when a narrow band oscillator is used as a transmitting oscillator. 本発明の第２実施形態の超音波プローブの概要を示す図である。It is a figure which shows the outline of the ultrasonic probe of the 2nd Embodiment of this invention. 図４に示される超音波プローブの斜視図である。It is a perspective view of the ultrasonic probe shown in FIG. 第１実施形態の超音波プローブの変形例を示す図である。It is a figure which shows the modification of the ultrasonic probe of 1st Embodiment. クリーピング波による欠陥検知信号の例を示す図である。It is a figure which shows the example of the defect detection signal by a creeping wave.

（第１実施形態）
本発明の第１実施形態の超音波プローブ１について、図１を参照しながら説明する。本超音波プローブ１は、検査対象Ｔ（本実施形態では鋼材）の内部領域に存在する欠陥ｆ１に加え、検査対象Ｔの表面ないしその近傍の領域（以下、「表面領域」と称する。）に存在する欠陥ｆ２をも検査可能である。具体的に、この超音波プローブ１は、送信振動子１０と、第１受信振動子２０と、第２受信振動子３０と、音響隔離部４０と、くさび５０と、を備えている。 (First Embodiment)
The ultrasonic probe 1 of the first embodiment of the present invention will be described with reference to FIG. In addition to the defect f1 existing in the internal region of the inspection target T (steel material in the present embodiment), the ultrasonic probe 1 extends to the surface of the inspection target T or a region in the vicinity thereof (hereinafter referred to as “surface region”). The existing defect f2 can also be inspected. Specifically, the ultrasonic probe 1 includes a transmitting oscillator 10, a first receiving oscillator 20, a second receiving oscillator 30, an acoustic isolation unit 40, and a wedge 50.

送信振動子１０は、超音波として縦波Ｌを送信する。具体的に、送信振動子１０として、広帯域振動子（１波又は２波程度の超音波パルスを発生する振動子）が用いられることが好ましい。 The transmission oscillator 10 transmits a longitudinal wave L as an ultrasonic wave. Specifically, as the transmission oscillator 10, it is preferable to use a wideband oscillator (oscillator that generates an ultrasonic pulse of about one or two waves).

第１受信振動子２０及び第２受信振動子３０は、それぞれ、超音波を受信するとともに、その超音波に対応した信号を生成する。この信号は、ケーブルを介して図示略の探傷装置に送られる。 The first receiving oscillator 20 and the second receiving oscillator 30 each receive an ultrasonic wave and generate a signal corresponding to the ultrasonic wave. This signal is sent via a cable to a flaw detector (not shown).

音響隔離部４０は、超音波を吸収する。本実施形態では、音響隔離部４０は、コルクやゴム等からなる。 The acoustic isolation unit 40 absorbs ultrasonic waves. In the present embodiment, the acoustic isolation section 40 is made of cork, rubber, or the like.

くさび５０は、各振動子１０，２０及び音響隔離部４０を保持する。具体的に、くさび５０は、第１音響遅延材５０Ａと、第２音響遅延材５０Ｂと、を有している。本実施形態では、第１音響遅延材５０Ａは、送信振動子１０を保持する送信振動子保持部５１と、音響隔離部４０を保持する音響隔離部保持部５４と、を有している。第２音響遅延材５０Ｂは、第１受信振動子２０を保持する第１受信振動子保持部５２と、第２受信振動子３０を保持する第２受信振動子保持部５３と、を有している。 The wedge 50 holds the oscillators 10 and 20 and the acoustic isolation unit 40. Specifically, the wedge 50 has a first acoustic delay material 50A and a second acoustic delay material 50B. In the present embodiment, the first acoustic delay material 50A has a transmission oscillator holding unit 51 that holds the transmission oscillator 10 and an acoustic isolation unit holding unit 54 that holds the acoustic isolation unit 40. The second acoustic delay material 50B has a first receiver oscillator holding unit 52 that holds the first receiver oscillator 20, and a second receiver oscillator holding unit 53 that holds the second receiver oscillator 30. There is.

送信振動子保持部５１は、送信振動子１０から送信された縦波Ｌが横波Ｓとして検査対象Ｔに入射し、かつ、前記横波Ｓの検査対象Ｔへの入射時に検査対象Ｔの表面領域を伝播するクリーピング波Ｃを生じさせる角度で送信振動子１０を保持する。具体的に、送信振動子保持部５１は、検査対象Ｔの表面に垂直な直線と、送信振動子１０から送信される縦波Ｌの送信方向（送信振動子１０に垂直な方向）と、のなす角θ１が送信振動子１０から送信される縦波Ｌの臨界角近傍の角度になるように送信振動子１０を保持する。ここで、「臨界角近傍の角度」は、臨界角±５度であり、好ましくは、臨界角±３度である。なお、表面領域は、検査対象Ｔの表面からクリーピング波Ｃの数波長程度の深さに相当する領域を意味する。 The transmission oscillator holding unit 51 captures the surface region of the inspection target T when the longitudinal wave L transmitted from the transmission oscillator 10 is incident on the inspection target T as a transverse wave S and the transverse wave S is incident on the inspection target T. The transmitter 10 is held at an angle that causes the propagating creeping wave C. Specifically, the transmission oscillator holding unit 51 has a straight line perpendicular to the surface of the inspection target T and a transmission direction of the longitudinal wave L transmitted from the transmission oscillator 10 (direction perpendicular to the transmission oscillator 10). The transmission oscillator 10 is held so that the angle θ1 formed is an angle close to the critical angle of the longitudinal wave L transmitted from the transmission oscillator 10. Here, the "angle near the critical angle" is a critical angle ± 5 degrees, preferably a critical angle ± 3 degrees. The surface region means a region corresponding to a depth of several wavelengths of the creeping wave C from the surface of the inspection target T.

第１受信振動子保持部５２は、検査対象Ｔ内を伝播する横波Ｓが検査対象Ｔの内部領域に存在する欠陥ｆ１で反射することにより生成された反射超音波を第１受信振動子２０が受信可能な角度で第１受信振動子２０を保持する。なお、反射超音波は、検査対象Ｔからくさび５０の第２音響遅延材５０Ｂに進入する際に縦波Ｌになる。第１受信振動子２０が反射超音波（縦波Ｌ）を受信した際に生成される信号は、第１受信振動子２０から前記探傷装置に送られる。つまり、送信振動子１０及び第１受信振動子２０によって検査対象Ｔの内部領域に存在する欠陥ｆ１が検知される。 In the first receiver oscillator holding unit 52, the first receiver oscillator 20 transmits the reflected ultrasonic wave generated by the transverse wave S propagating in the inspection target T reflected by the defect f1 existing in the internal region of the inspection target T. The first receiving oscillator 20 is held at a receivable angle. The reflected ultrasonic wave becomes a longitudinal wave L when entering the second acoustic delay material 50B of the wedge 50 from the inspection target T. The signal generated when the first receiving oscillator 20 receives the reflected ultrasonic wave (longitudinal wave L) is sent from the first receiving oscillator 20 to the flaw detector. That is, the defect f1 existing in the internal region of the inspection target T is detected by the transmission oscillator 10 and the first reception oscillator 20.

音響隔離部保持部５４は、送信振動子保持部５１と第１受信振動子保持部５２との間で音響隔離部４０を保持する。音響隔離部保持部５４に音響隔離部４０が保持されることにより、送信振動子１０から第１音響遅延材５０Ａ内に送信された超音波が検査対象Ｔを経由することなく第１受信振動子２０に至るのが抑制される。 The acoustic isolation unit holding unit 54 holds the acoustic isolation unit 40 between the transmission oscillator holding unit 51 and the first receiving oscillator holding unit 52. By holding the acoustic isolation unit 40 in the acoustic isolation unit holding unit 54, the ultrasonic wave transmitted from the transmission oscillator 10 into the first acoustic delay material 50A does not pass through the inspection target T, but is the first reception oscillator. It is suppressed to reach 20.

第２受信振動子保持部５３は、クリーピング波Ｃが検査対象Ｔの表面領域に存在する欠陥ｆ２で反射することにより生成される反射クリーピング波を第２受信振動子３０が受信可能な角度で当該第２受信振動子３０を保持する。第２受信振動子３０が反射クリーピング波を受信した際に生成される信号は、第２受信振動子３０から前記探傷装置に送られる。つまり、送信振動子１０及び第２受信振動子３０によって検査対象Ｔの表面領域に存在する欠陥ｆ２が検知される。本実施形態では、第２受信振動子保持部５３は、音響隔離部保持部５４と第１受信振動子保持部５２との間に設けられている。この第２受信振動子保持部５３は、第１受信振動子２０と第２受信振動子３０とのなす角θ２が７０度以上１１０度以下となるように第２受信振動子３０を保持することが好ましい。本実施形態では、第２受信振動子保持部５３は、前記角θ２が９０度となるように第２受信振動子３０を保持している。 The second receiver oscillator holding unit 53 has an angle at which the second receiver oscillator 30 can receive the reflected creeping wave generated by the creeping wave C reflected by the defect f2 existing in the surface region of the inspection target T. Holds the second receiving oscillator 30. The signal generated when the second receiving oscillator 30 receives the reflected creeping wave is sent from the second receiving oscillator 30 to the flaw detector. That is, the defect f2 existing in the surface region of the inspection target T is detected by the transmission oscillator 10 and the second receiver oscillator 30. In the present embodiment, the second receiver oscillator holding unit 53 is provided between the acoustic isolation unit holding unit 54 and the first receiver oscillator holding unit 52. The second receiving oscillator holding unit 53 holds the second receiving oscillator 30 so that the angle θ2 formed by the first receiving oscillator 20 and the second receiving oscillator 30 is 70 degrees or more and 110 degrees or less. Is preferable. In the present embodiment, the second receiver oscillator holding unit 53 holds the second receiver oscillator 30 so that the angle θ2 is 90 degrees.

以上に説明したように、本実施形態の超音波プローブ１では、送信振動子１０から送信されて検査対象Ｔの内部に進入した横波Ｓが検査対象Ｔの内部領域に存在する欠陥ｆ１で反射することにより生成された反射超音波を受信する第１受信振動子２０と、送信振動子１０から送信された縦波の検査対象Ｔへの入射時に生じたクリーピング波Ｃが検査対象Ｔの表面領域に存在する欠陥ｆ２で反射することにより生成される反射クリーピング波を受信する第２受信振動子３０と、を有しているので、検査対象Ｔの内部領域に存在する欠陥ｆ１に加え、表面領域に存在する欠陥ｆ２をも検知することができる。 As described above, in the ultrasonic probe 1 of the present embodiment, the transverse wave S transmitted from the transmission oscillator 10 and entering the inside of the inspection target T is reflected by the defect f1 existing in the internal region of the inspection target T. The creeping wave C generated when the first receiving oscillator 20 that receives the reflected ultrasonic waves generated thereby and the longitudinal wave transmitted from the transmitting oscillator 10 are incident on the inspection target T is the surface region of the inspection target T. Since it has a second receiving oscillator 30 that receives the reflected creeping wave generated by being reflected by the defect f2 existing in the surface, in addition to the defect f1 existing in the internal region of the inspection target T, the surface thereof. Defects f2 existing in the region can also be detected.

また、第２受信振動子保持部５３は、音響隔離部保持部５４と第１受信振動子保持部５２との間に設けられているので、送信振動子１０から送信された縦波Ｌを第２受信振動子３０が受信することが回避される。よって、第２受信振動子３０が超音波を受信した際に生成される信号のＳＮ比が高まる。 Further, since the second receiving oscillator holding unit 53 is provided between the acoustic isolation unit holding unit 54 and the first receiving oscillator holding unit 52, the longitudinal wave L transmitted from the transmitting oscillator 10 is the second. 2 It is avoided that the receiving oscillator 30 receives the signal. Therefore, the SN ratio of the signal generated when the second receiving oscillator 30 receives the ultrasonic wave increases.

さらに、第２受信振動子保持部５３は、第１受信振動子２０と第２受信振動子３０とのなす角θ２が９０度となるように第２受信振動子３０を保持しているので、検査対象Ｔの内部領域に存在する欠陥ｆ１での反射時に生成された反射超音波を第２受信振動子３０が受信することが抑制される。具体的に、前記反射超音波（横波Ｓ）は、再びくさび５０の第２音響遅延材５０Ｂ内に進入するときに縦波Ｌになるので、この縦波Ｌを受信する第１受信振動子２０と第２受信振動子３０とのなす角が９０度に設定されることにより、その縦波Ｌを第２受信振動子３０が受信することが抑制される。 Further, since the second receiver oscillator holding unit 53 holds the second receiver oscillator 30 so that the angle θ2 formed by the first receiver oscillator 20 and the second receiver oscillator 30 is 90 degrees. It is suppressed that the second receiving oscillator 30 receives the reflected ultrasonic wave generated at the time of reflection at the defect f1 existing in the internal region of the inspection target T. Specifically, the reflected ultrasonic wave (transverse wave S) becomes a longitudinal wave L when it enters the second acoustic delay material 50B of the wedge 50 again, so that the first receiving oscillator 20 that receives the longitudinal wave L is received. By setting the angle between the and the second receiving oscillator 30 to 90 degrees, it is suppressed that the second receiving oscillator 30 receives the longitudinal wave L.

さらに、送信振動子１０として前記広帯域振動子が用いられることにより、送信振動子１０及び第１受信振動子２０によって検査対象Ｔの表面領域のうちくさび５０と重なっている部位（くさび直下）の一部（音響隔離部４０の直下）に存在する欠陥ｆ２′を検知することが可能となる。具体的に、広帯域振動子から送信される超音波は、波の数が少ないので、図２に示されるように、検査対象Ｔの表面で反射することにより生成される反射超音波の第１受信振動子２０での受信信号Ａ１と、欠陥ｆ２′で反射することにより生成される反射超音波の第１受信振動子２０での受信信号Ａ２と、の識別が可能となる。一方、送信振動子１０として狭帯域振動子が用いられた場合、図３に示されるように、検査対象Ｔの表面で反射することにより生成される反射超音波の第１受信振動子２０での受信信号ａ１と、欠陥ｆ２′で反射することにより生成される反射超音波の第１受信振動子２０での受信信号ａ２と、の識別は困難である。なお、いずれの場合も、欠陥ｆ１で反射することにより生成される反射超音波の第１受信振動子２０での受信信号Ａ３，ａ３は、他の受信信号から明確に識別可能である。 Further, by using the broadband oscillator 10 as the transmission oscillator 10, one of the portions (immediately below the wedge) of the surface region of the inspection target T by the transmission oscillator 10 and the first receiving oscillator 20 that overlaps with the wedge 50. It is possible to detect the defect f2'existing in the unit (immediately below the acoustic isolation unit 40). Specifically, since the ultrasonic waves transmitted from the broadband oscillator have a small number of waves, as shown in FIG. 2, the first reception of the reflected ultrasonic waves generated by the reflection on the surface of the inspection target T is performed. It is possible to distinguish between the received signal A1 in the vibrator 20 and the received signal A2 in the first receiving ultrasonic wave 20 of the reflected ultrasonic wave generated by being reflected by the defect f2'. On the other hand, when a narrow band oscillator is used as the transmitter oscillator 10, as shown in FIG. 3, the reflected ultrasonic wave generated by the reflection on the surface of the inspection target T is generated by the first receiver oscillator 20. It is difficult to distinguish between the received signal a1 and the received signal a2 in the first receiving oscillator 20 of the reflected ultrasonic wave generated by the reflection by the defect f2'. In either case, the received signals A3 and a3 of the first receiving oscillator 20 of the reflected ultrasonic wave generated by being reflected by the defect f1 can be clearly distinguished from other received signals.

（第２実施形態）
次に、図４及び図５を参照しながら、本発明の第２実施形態について説明する。なお、第２実施形態では、第１実施形態と異なる部分についてのみ説明を行い、第１実施形態と同じ構造、作用及び効果の説明は省略する。 (Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. 4 and 5. In the second embodiment, only the parts different from the first embodiment will be described, and the description of the same structure, operation and effect as in the first embodiment will be omitted.

本実施形態の超音波プローブ１は、第３受信振動子３５をさらに備え、くさび５０は、第３受信振動子３５を保持する第３受信振動子保持部５５をさらに有している。 The ultrasonic probe 1 of the present embodiment further includes a third receiving oscillator 35, and the wedge 50 further has a third receiving oscillator holding portion 55 for holding the third receiving oscillator 35.

第３受信振動子３５は、超音波を受信するとともに、その超音波に対応した信号を生成する。この信号は、ケーブルを介して前記探傷装置に送られる。 The third receiving oscillator 35 receives the ultrasonic wave and generates a signal corresponding to the ultrasonic wave. This signal is sent to the flaw detector via a cable.

第３受信振動子保持部５５は、前記反射クリーピング波を第３受信振動子３５が受信可能な角度で第３受信振動子３５を保持する。この第３受信振動子保持部５５は、送信振動子保持部５１と第１受信振動子保持部５２とを結ぶ方向（図４の左右方向）について送信振動子保持部５１を基準として音響隔離部保持部５４とは反対側に設けられている。 The third receiver oscillator holding unit 55 holds the third receiver oscillator 35 at an angle at which the third receiver oscillator 35 can receive the reflected creeping wave. The third receiver oscillator holding unit 55 is an acoustic isolation unit with reference to the transmitter oscillator holder 51 in the direction (left-right direction in FIG. 4) connecting the transmitter oscillator holder 51 and the first receiver oscillator holder 52. It is provided on the side opposite to the holding portion 54.

本実施形態では、第１音響遅延材５０Ａの直下に存在する欠陥と第２音響遅延材５０Ｂの直下に存在する欠陥との識別が可能となる。 In the present embodiment, it is possible to distinguish between a defect existing directly under the first acoustic delay material 50A and a defect existing directly under the second acoustic delay material 50B.

また、図５に示されるように、第１音響遅延材５０Ａの表面うち第１音響遅延材５０Ａの下面を除く部位（図５で斜線で示されている部位）には、コルク等からなる超音波を吸収する吸収部６０が設けられている。このため、送信振動子１０から送信された縦波Ｌが第３受信振動子３５で受信されることが抑制される。なお、図５では、吸収部６０の図示は省略されている。 Further, as shown in FIG. 5, the portion of the surface of the first acoustic delay material 50A excluding the lower surface of the first acoustic delay material 50A (the portion shown by the diagonal line in FIG. 5) is a super-cork or the like. An absorption unit 60 for absorbing sound waves is provided. Therefore, it is suppressed that the longitudinal wave L transmitted from the transmission oscillator 10 is received by the third receiver oscillator 35. In FIG. 5, the absorption unit 60 is not shown.

なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく特許請求の範囲によって示され、さらに特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれる。 It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the embodiment described above, and further includes all modifications within the meaning and scope equivalent to the scope of claims.

例えば、第１実施形態では、第２受信振動子３０を保持する第２受信振動子保持部５３が第２音響遅延材５０Ｂに設けられた例が示されたが、図６に示されるように、第２受信振動子保持部５３は、第１音響遅延材５０Ａに設けられてもよい。この場合、第２実施形態と同様に、第１音響遅延材５０Ａに吸収部６０が設けられることが好ましい。 For example, in the first embodiment, an example in which the second receiver oscillator holding portion 53 for holding the second receiver oscillator 30 is provided in the second acoustic delay material 50B is shown, but as shown in FIG. The second receiver oscillator holding portion 53 may be provided on the first acoustic delay material 50A. In this case, it is preferable that the first acoustic delay material 50A is provided with the absorption unit 60 as in the second embodiment.

次に、上記実施形態についてシミュレーションによる検証を実施した。この実施例では、送信振動子１０の周波数が５ＭＨｚに設定され、前記角θ１が２７度に設定され、前記角θ２が９０度に設定された超音波プローブ１が用いられた。また、検査対象Ｔとして、表面に１ｍｍ×１ｍｍの大きさの欠陥ｆ２を有する鋼材が用いられた。 Next, the above embodiment was verified by simulation. In this embodiment, the ultrasonic probe 1 in which the frequency of the transmitter 10 is set to 5 MHz, the angle θ1 is set to 27 degrees, and the angle θ2 is set to 90 degrees is used. Further, as the inspection target T, a steel material having a defect f2 having a size of 1 mm × 1 mm on the surface was used.

この超音波プローブ１で検査対象Ｔを検査したときに第２受信振動子３０から得られた信号が図７に示されている。図７に示されるように、第２受信振動子３０が反射クリーピング波を受信した際に生成される信号Ｂが明確に確認された。また、図示は省略するが、第１受信振動子２０が反射超音波を受信した際に生成される信号も明確に確認された。このように、この実施例では、検査対象Ｔの内部領域に存在する欠陥ｆ１に加え、表面領域に存在する欠陥ｆ２をも検知可能であることが確認された。 The signal obtained from the second receiving oscillator 30 when the inspection target T is inspected by the ultrasonic probe 1 is shown in FIG. As shown in FIG. 7, the signal B generated when the second receiving oscillator 30 receives the reflected creeping wave is clearly confirmed. Further, although not shown, the signal generated when the first receiving oscillator 20 receives the reflected ultrasonic wave is also clearly confirmed. As described above, in this embodiment, it was confirmed that the defect f2 existing in the surface region can be detected in addition to the defect f1 existing in the internal region of the inspection target T.

１ 超音波プローブ
１０ 送信振動子
２０ 第１受信振動子
３０ 第２受信振動子
３５ 第３受信振動子
４０ 音響隔離部
５０ くさび
５０Ａ 第１音響遅延材
５０Ｂ 第２音響遅延材
５１ 送信振動子保持部
５２ 第１受信振動子保持部
５３ 第２受信振動子保持部
５４ 吸収部保持部
５５ 第３受信振動子保持部
６０ 吸収部
Ｃ クリーピング波
Ｌ 縦波
Ｓ 横波 1 Ultrasonic probe 10 Transmitter oscillator 20 1st receiver oscillator 30 2nd receiver oscillator 35 3rd receiver oscillator 40 Acoustic isolation unit 50 Wedge 50A 1st acoustic delay material 50B 2nd acoustic delay material 51 Transmitter oscillator holder 52 1st receiver oscillator holder 53 2nd receiver oscillator holder 54 Absorber holder 55 3rd receiver oscillator holder 60 Absorber C creeping wave L longitudinal wave S transverse wave

Claims (5)

超音波として縦波を送信する送信振動子と、
超音波を受信する第１受信振動子と、
超音波を受信する第２受信振動子と、
超音波を吸収する音響隔離部と、
前記送信振動子、前記第１受信振動子、前記第２受信振動子及び前記音響隔離部を保持するくさびと、を備え、
前記くさびは、
前記送信振動子から送信された縦波が横波として検査対象に入射し、かつ、前記横波の前記検査対象への入射時に前記検査対象の表面領域を伝播するクリーピング波を生じさせる角度で前記送信振動子を保持する送信振動子保持部と、
前記検査対象内を伝播する横波が前記検査対象の内部領域に存在する欠陥で反射することにより生成された反射超音波を前記第１受信振動子が受信可能な角度で当該第１受信振動子を保持する第１受信振動子保持部と、
前記送信振動子保持部と前記第１受信振動子保持部との間で前記音響隔離部を保持する音響隔離部保持部と、
前記クリーピング波が前記検査対象の表面領域に存在する欠陥で反射することにより生成される反射クリーピング波を前記第２受信振動子が受信可能な角度で当該第２受信振動子を保持する第２受信振動子保持部と、を有する、超音波プローブ。 A transmitter that transmits longitudinal waves as ultrasonic waves,
The first receiver that receives ultrasonic waves and
The second receiver that receives ultrasonic waves and
An acoustic isolation unit that absorbs ultrasonic waves,
The transmitter, the first receiver, the second receiver, and the wedge that holds the acoustic isolation unit are provided.
The wedge
The longitudinal wave transmitted from the transmission oscillator is incident on the inspection target as a transverse wave, and when the transverse wave is incident on the inspection target, the transmission is performed at an angle that causes a creeping wave propagating in the surface region of the inspection target. A transmitter holding unit that holds the vibrator and a transmitter holder
The first receiving oscillator is used at an angle at which the first receiving oscillator can receive the reflected ultrasonic waves generated by the transverse waves propagating in the inspection target being reflected by the defects existing in the internal region of the inspection target. The first receiver oscillator holding unit to hold and
An acoustic isolation unit holding unit that holds the acoustic isolation unit between the transmission oscillator holding unit and the first receiving oscillator holding unit, and an acoustic isolation unit holding unit.
A second receiver holding the second receiver at an angle at which the second receiver can receive the reflected creeping wave generated by the creeping wave reflected by a defect existing in the surface region to be inspected. An ultrasonic probe having 2 receiver oscillator holders. 請求項１に記載の超音波プローブにおいて、
前記第２受信振動子保持部は、前記音響隔離部保持部と前記第１受信振動子保持部との間に設けられている、超音波プローブ。 In the ultrasonic probe according to claim 1,
The second receiving oscillator holding portion is an ultrasonic probe provided between the acoustic isolation portion holding portion and the first receiving oscillator holding portion. 請求項２に記載の超音波プローブにおいて、
前記第２受信振動子保持部は、前記第１受信振動子と前記第２受信振動子とのなす角が７０度以上１１０度以下となるように前記第２受信振動子を保持している、超音波プローブ。 In the ultrasonic probe according to claim 2,
The second receiving oscillator holding unit holds the second receiving oscillator so that the angle formed by the first receiving oscillator and the second receiving oscillator is 70 degrees or more and 110 degrees or less. Ultrasonic probe. 請求項２又は３に記載の超音波プローブにおいて、
超音波を受信する第３受信振動子をさらに備え、
前記くさびは、前記反射クリーピング波を前記第３受信振動子が受信可能な角度で当該第３受信振動子を保持する第３受信振動子保持部と、を有し、
前記第３受信振動子保持部は、前記送信振動子保持部と前記第１受信振動子保持部とを結ぶ方向について前記送信振動子保持部を基準として前記音響隔離部保持部とは反対側に設けられている、超音波プローブ。 In the ultrasonic probe according to claim 2 or 3.
Further equipped with a third receiver oscillator that receives ultrasonic waves,
The wedge has a third receiver oscillator holding portion that holds the third receiver oscillator at an angle at which the third receiver oscillator can receive the reflected creeping wave.
The third receiver oscillator holding portion is located on the side opposite to the acoustic isolation portion holding portion with respect to the transmitter oscillator holding portion in the direction connecting the transmitter oscillator holding portion and the first receiver oscillator holding portion. An ultrasonic probe provided. 請求項１ないし４のいずれかに記載の超音波プローブにおいて、
前記送信振動子は、広帯域振動子である、超音波プローブ。 In the ultrasonic probe according to any one of claims 1 to 4.
The transmission oscillator is an ultrasonic probe which is a broadband oscillator.
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