JP7004596B2 - pressure sensor - Google Patents

Description

The present invention relates to a pressure sensor.

Conventionally, a pressure sensor that detects the pressure of a fluid such as a liquid or a gas is known. For example, the pressure sensor described in Patent Document 1 includes a semiconductor pressure detection element, a base, a receiving member arranged facing the base, and a diaphragm sandwiched between the base and the receiving member, and these are inside a cover. It is stored in. Here, a pressure receiving space in which oil is sealed is formed between the base and the diaphragm. The semiconductor pressure detection element is provided on the base in a state of being arranged in the pressure receiving space. The base, receiving member and diaphragm are each made of metal. The cover is made of metal such as stainless steel and is joined to the outer peripheral portion of the receiving member by laser welding. The inside of the cover is filled with epoxy-based or urethane-based resin.

Japanese Unexamined Patent Publication No. 2016-45172

In the pressure sensor described in Patent Document 1, since the cover is made of a metal such as stainless steel, it is difficult to reduce the weight. Therefore, it is conceivable that the cover is made of a non-metal such as resin. However, in the pressure sensor described in Patent Document 1, when the cover is made of non-metal, the cover is fixed to the base only by the adhesive force of the resin filled in the cover. In such a case, if the adhesive strength is reduced, the cover may come off from the base together with the resin and parts in the cover, resulting in failure.

An object of the present invention is to provide a pressure sensor capable of fixing a metal sensor support member and a non-metal cover to each other with high reliability.

An exemplary invention of the present application comprises a sensor element that outputs a signal according to the pressure of a fluid.
A sensor support member having a first main surface on one side and a second main surface on the other side, on which the sensor element is mounted and made of a metal material,
A terminal that is electrically connected to the sensor element and penetrates the sensor support member from the one side to the other side.
A pressure sensor that covers the second main surface of the sensor support member and has a case that is attached to the sensor support member, has a through hole for accommodating a part of the terminal, and is made of a non-metal material. And,
An overhanging portion having a width equal to or greater than the minimum width of the through hole is formed in a portion of the terminal protruding from the through hole to the other side.
A pressure sensor characterized in that the overhanging portion and the through hole form a blocking portion that prevents the sensor support member and the case from separating from each other.

According to the exemplary invention of the present application, the blocking portion prevents the sensor support member and the case from separating from each other, so that the metal sensor support member and the non-metal cover are fixed to each other with high reliability. can do.

FIG. 1 is a vertical cross-sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a vertical cross-sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. FIG. 3 is a vertical sectional view schematically showing a fixed state between the sensor support member and the case. FIG. 4 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to the second embodiment of the present invention. FIG. 5 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to Reference Example 1 of the present invention. FIG. 6 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to the third embodiment of the present invention. FIG. 7 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to Reference Example 2 of the present invention.

Hereinafter, the pressure sensor of the present invention will be described in detail based on the embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a vertical cross-sectional view (a view cut along an axis ax) showing a schematic configuration of a pressure sensor according to a first embodiment of the present invention. FIG. 2 is a vertical cross-sectional view (a partially enlarged view of FIG. 1) showing a sensor support member and a case. First, the outline of the pressure sensor 1 shown in these figures will be described with reference to FIGS. 1 and 2.

In the following, for convenience of explanation, the axis ax shown in FIG. 1 will be appropriately used for description. Here, the direction parallel to the axis ax (vertical direction in FIG. 1) is the "axial direction", the direction orthogonal to the axis ax is the "radial direction", and the direction around the axis centered on the axis ax is the "circumferential direction". Say. Further, in the axial direction, the side closer to the mounted body (mounting member 2 side) described later is "one side" or "lower side", and the far side (opposite side to the mounting member 2) is "other side" or "upper side". Say.

The axis ax is the central axis of the pressure sensor 1, and is a line segment that passes through the center of the sensor support member 4 described later and extends in the thickness direction of the sensor support member 4. Further, "upper side" and "lower side" do not indicate the positional relationship and direction when the pressure sensor 1 is actually attached to the attached body.

The pressure sensor 1 shown in FIG. 1 is a sensor attached to an attached body (not shown) and used to detect the pressure of a fluid from the attached body. Here, the attached body is not particularly limited, but is, for example, an in-vehicle control valve used in an automatic transmission (AT) or a continuously variable transmission (CVT) of an automobile. The fluid (fluid to be measured) is not particularly limited and may be either a gas or a liquid. Further, the conditions such as the type, temperature, and pressure of the fluid are not limited, but for example, when the attached body is the above-mentioned in-vehicle control valve, the fluid is an oil such as ATF (Automatic Transmission Fluid).

As shown in FIG. 1, the pressure sensor 1 is attached to a mounting member 2 that is detachably attached to an attached body, a sensor support member 4 that is joined to the mounting member 2 via a diaphragm 3, and a sensor support member 4. It has a mounted sensor element 5, a case 9 attached to the sensor support member 4, and an outer member 13 attached to the case 9.

The mounting member 2 is arranged on one side (lower side) with respect to the sensor support member 4, and has a through hole 21 penetrating along the axial direction. The fluid from the attached body is introduced into the through hole 21 from the lower side. That is, the through hole 21 constitutes a flow path that guides the fluid from the attached body toward the sensor element 5. Further, the mounting member 2 has a male screw portion 22 arranged along the axial direction and a head portion 23 provided at the upper end portion of the male screw portion 22. The male screw portion 22 is screwed into the female screw provided on the attached body. The head 23 has a hexagonal shape when viewed from the axial direction, and can be sandwiched by a tool such as a spanner.

Since the pressure sensor 1 has such a mounting member 2, the pressure sensor 1 can be relatively easily mounted on the mounted body. Further, the pressure sensor 1 can be removed from the attached body for maintenance and the like. Further, for example, a rubber O-ring 14 is arranged at the end of the male screw portion 22 on the head 23 side. With this O-ring 14, it is possible to secure the sealing property between the pressure sensor 1 and the attached body in a state where the pressure sensor 1 is attached to the attached body. The mounting member 2 may be mounted on the body to be mounted, and is not limited to the above-mentioned form having the male screw portion 22.

The mounting member 2 is made of a metal material. The metal material is not particularly limited, but for example, stainless steel such as SUS304 is preferably used. By constructing the mounting member 2 with such a metal material, the heat resistance of the mounting member 2, resistance to fluid, and the like can be enhanced. The mounting member 2 is manufactured, for example, by casting and cutting.

A sensor support member 4 is attached to the upper end of such an attachment member 2 via a diaphragm 3. Here, the diaphragm 3 and the sensor support member 4 are each made of a metal material such as stainless steel, and are joined to the mounting member 2 by welding.

As described above, if all of the mounting member 2, the diaphragm 3, and the sensor support member 4 are made of a metal material, the pressure sensor 1 is measured, for example, when the mounted body is an in-vehicle control valve. Even if the fluid is hot oil, the pressure sensor 1 can exhibit excellent durability.

The diaphragm 3 has a plate shape or a sheet shape, is arranged between the mounting member 2 and the sensor support member 4, and closes the opening on the other side of the through hole 21 of the mounting member 2 described above. Therefore, a first chamber S1 formed by the through hole 21 of the mounting member 2 described above is formed below the diaphragm 3. Then, the diaphragm 3 bends and deforms due to the pressure of the fluid in the first chamber S1. On the other hand, a second chamber S2 is formed between the diaphragm 3 and the sensor support member 4 on the upper side of the diaphragm 3. The sensor element 5 is housed in the second chamber S2, and a pressure transmission medium for transmitting the pressure received by the diaphragm 3 from the liquid in the first room S1 to the sensor element 5 is filled (contained).

By transmitting the pressure of the fluid to the sensor element 5 by using the diaphragm 3 and the pressure transmission medium in this way, even if the sensor element 5 does not have resistance to the fluid, the sensor element 5 is damaged by the fluid. The pressure of the fluid can be detected while preventing it. A liquid is preferably used as the pressure transfer medium. In particular, from the viewpoint of reducing the adverse effect on the sensor element 5 and reducing the change in the characteristics of the pressure transmission medium due to a temperature change or the like, it is preferable to use a liquid such as silicone oil as the pressure transmission medium. This is because silicone oil has good insulation, excellent chemical stability and a high boiling point. If the sensor element 5 has resistance to a fluid, the diaphragm 3 and the pressure transmission medium may be omitted.

Further, the sensor support member 4 is made of a plate material whose axial direction is the thickness direction, and has a shape such that the central portion becomes a dome shape toward the other side (upper side) by press working, for example. The sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the opposite side (the other side). The first main surface 43 forms a second chamber S2 with the diaphragm 3. A sensor element 5 is mounted in the central portion of such a first main surface 43. Here, the sensor element 5 is bonded to the first main surface 43 with an adhesive such as a fluorine-based adhesive.

The sensor element 5 is an element that outputs a signal according to the pressure received. Although not shown, the sensor element 5 includes, for example, a silicon substrate having a diaphragm on which a piezo resistance element is arranged, and a glass substrate bonded to the silicon substrate. A closed space is formed between these substrates, and the diaphragm bends and deforms due to the pressure received with reference to the pressure in the space. Then, the piezo resistance element outputs a signal corresponding to this bending deformation. The method for detecting the bending deformation of the diaphragm is not limited to the method using the piezo resistance element, and may be, for example, a capacitance method or the like.

Further, the sensor support member 4 has a plurality of through holes 45 and one through hole 46 that open in the first main surface 43 and the second main surface 44. The terminal 6 penetrates each of the plurality of through holes 45, and the gap between the wall surface defining the through hole 45 and the terminal 6 is filled with the sealing material 7. The terminal 6 is fixed to the sensor support member 4 via the sealing material 7. The terminal 6 is a lead pin and is made of a metal material such as an iron-nickel alloy. The lower ends of at least two of the plurality of terminals 6 are connected to the sensor element 5 via a bonding wire. Further, the sealing material 7 is made of a glass material (insulating material) such as borosilicate glass, and seals the above-mentioned gap. The through hole 46 is a hole used for introducing the above-mentioned pressure transmission medium into the second chamber S2 at the time of manufacturing the pressure sensor 1. The upper opening of the through hole 46 is closed by the ball 8. The ball 8 is made of, for example, a metal material and is joined to the sensor support member 4, for example, by welding.

Here, as shown in FIG. 2, the terminal 6 has an overhanging portion 61 arranged at the upper end of the terminal 6. The overhanging portion 61 has a width equal to or larger than the minimum width of the through hole 94 above the through hole 94 of the case 9 described later. As a result, it is possible to prevent the sensor support member 4 and the case 9 from being separated from each other due to the contact between the overhanging portion 61 and the case 9. Such an overhanging portion 61 and a through hole 94 constitute a blocking portion 20 that prevents the sensor support member 4 and the case 9 from separating from each other. The blocking unit 20 and related matters will be described in detail later.

A case 9 is attached to the second main surface 44 of the sensor support member 4. Here, the case 9 is adhered to the second main surface 44 with an adhesive 15 such as an epoxy adhesive. In this way, the sensor support member 4 and the case 9 are joined via the adhesive 15. As a result, the case 9 can be fixed to the sensor support member 4. Further, by filling the gap between the sensor support member 4 and the case 9 with the adhesive 15, the sealing property inside the case 9 can be improved.

As shown in FIG. 2, the case 9 has a bottomed cylindrical case body 91 that opens downward. The case body 91 includes a recess 93 that is open on the sensor support member 4 side. The recess 93 accommodates a part of the terminal 6 and the ball 8. Further, the case body 91 has at least one through hole 94 penetrating along the axial direction. The terminal 6 described above penetrates through the through hole 94, and the overhanging portion 61 is arranged above the through hole 94.

As shown in FIG. 1, the electronic component 10 is mounted on the case 9 in a state of being sealed with a potting material 11 such as an epoxy resin. The electronic component 10 is electrically connected to the terminal 6 described above via wiring (not shown), and has a circuit for processing a signal from the sensor element 5 described above. Further, the electronic component 10 is electrically connected to the terminal 12 supported by the case 9. The terminal 12 projects upward from the case 9 in the axial direction.

From the viewpoint of weight reduction of the case 9, the constituent material of the case 9 may be a non-metal material, a ceramic material or the like, but a resin material is preferable. By forming the case 9 with a resin material, it is possible not only to reduce the weight of the case 9, but also to form the case 9 easily and with high accuracy by injection formation, for example, even if the shape of the case 9 is complicated. be able to. In addition, the adhesiveness of the case 9 with the adhesive 15 can be enhanced. The resin material is not particularly limited, and examples thereof include PPS (Polyphenylene sulfide) resin having excellent heat resistance. Further, a fiber such as glass fiber or carbon fiber, an inorganic filler such as alumina particles or zirconia particles may be added to the resin material.

Further, a resin outer member 13 covering the terminal 12 protruding from the case 9 is attached to the case 9 with an epoxy-based adhesive or the like. The outer member 13 is a housing for a female connector and has a recess 131 into which a male connector (not shown) is inserted.

The outline of the pressure sensor 1 has been described above. As described above, the pressure sensor 1 has a sensor element 5 that outputs a signal corresponding to the pressure of the fluid, a sensor support member 4 on which the sensor element 5 is mounted, and a sensor support member 4 from one side to the other. It has a penetrating terminal 6, a case 9 attached to a sensor support member 4, and a blocking portion 20.

Here, the sensor support member 4 has a first main surface 43 on one side and a second main surface 44 on the opposite side (the other side), and is made of a metal material. The sensor element 5 is mounted in the central portion of the first main surface 43. Further, the terminal 6 penetrates the sensor support member 4 from one side to the other side. On the other hand, the case 9 has a through hole 94 that covers the second main surface 44 of the sensor support member 4 and houses a part of the terminal 6, and is made of a non-metal material. The blocking portion 20 is provided on the terminal 6 and the case 9 to prevent the sensor support member 4 and the case 9 from separating from each other. As a result, the case body 91 is sandwiched between the terminal 6 side portion (the overhanging portion 61 described later) constituting the blocking portion 20 and the sensor support member 4, and the case body 91 (case 9) becomes the sensor support member 4. On the other hand, it is supported in the axial direction. Further, the inclined surface of the second main surface 44 of the sensor support member 4 (the outer peripheral surface of the portion where the outer diameter of the sensor support member 4 becomes smaller toward the upper side in the axial direction) and the inclined surface of the inner peripheral surface of the case body 91. The case body 91 (case 9) is centered and aligned in the central axis ax direction by contact with (the inner peripheral surface of the portion where the inner diameter of the case body 91 becomes smaller toward the upper side in the axial direction). Become.

Therefore, the non-metal case 9 is stably fixed to the metal sensor support member 4. Therefore, even if the adhesive 15 deteriorates, the conduction state between the terminal 6 and the terminal 12 described above can be maintained. Hereinafter, the blocking unit 20 and related matters will be described in detail with reference to FIG.

FIG. 3 is a vertical sectional view schematically showing a fixed state between the sensor support member and the case.
As shown in FIG. 3, the blocking portion 20 is arranged on the other side portion of the terminal 6, and has an overhanging portion 61 having a width W2 equal to or larger than the minimum width W1 of the through hole 94 on the other side of the through hole 94 of the case 9. Have. As a result, it is possible to prevent the sensor support member 4 and the case 9 from being separated from each other due to the contact between the overhanging portion 61 and the case 9. Here, the "minimum width W1" means the smallest length in the direction orthogonal to the central axis of the through hole 94 (in the present embodiment, the direction orthogonal to the axial direction). Further, the "width W2" means the length of the overhanging portion 61 in the same direction as the direction of the minimum width W1.

The overhanging portion 61 is a part of the terminal 6. That is, the overhanging portion 61 and the terminal 6 are a part of a single member. As a result, the number of parts of the pressure sensor 1 can be reduced.

The width of the overhanging portion 61 has a maximum width W2 at the lower end of the overhanging portion 61, and is continuously reduced from the lower side to the upper side until the width becomes smaller than the minimum width W1. In other words, the width of the overhanging portion 61 gradually increases as it approaches the sensor support member 4. Thereby, when assembling the sensor support member 4 and the case 9, the overhanging portion 61 can be relatively easily inserted from one side of the through hole 94 of the case 9 and arranged on the other side (hereinafter, “easy to arrange”). Also called "sex"). Further, in a state where the overhanging portion 61 is arranged on the other side of the through hole 94 of the case 9, it is difficult for the overhanging portion 61 to enter the through hole 94, so that the overhanging portion 61 is unilaterally from the other side of the through hole 94 of the case 9. It is possible to reduce the possibility of pulling out to the side (hereinafter, also referred to as "pull-out prevention"). The overhanging portion 61 having such a shape can be formed by, for example, pressing, cutting, or the like. The shape of the overhanging portion 61 is not limited to the shape shown in the drawing, as long as the overhanging portion 61 has a width W2.

Further, the width W2 may be the minimum width W1 or more, but in the case of the present embodiment, it is preferable that the width W2 is larger than the minimum width W1 from the viewpoint of prevention of pulling out, and from the viewpoint of both ease of placement and prevention of slipping out. Therefore, it is preferably 1.05 times or more and 2 times or less, and preferably 1.1 times or more and 1.5 times or less with respect to the minimum width W1.

Further, the overhanging portion 61 may have a width W2 in at least one direction intersecting the axial direction, and the width in a direction different from the direction having the width W2 is smaller than the minimum width W1 of the through hole 94. Is preferable. This makes it easier to insert the overhanging portion 61 from one side to the other side of the through hole 94 of the case 9 when assembling the sensor support member 4 and the case 9.

Further, the minimum width W1 of the through hole 94 of the case 9 may be the width W0 or more of one side portion of the terminal 6, but in the case of the present embodiment, the width W0 is 1.05 times or more 1. It is preferably 2 times or less, and preferably 1.1 times or more and 1.2 times or less. As a result, it is possible to easily achieve both ease of placement and prevention of disconnection.

<Second Embodiment>
FIG. 4 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to the second embodiment of the present invention. Hereinafter, the second embodiment shown in FIG. 4 will be described, but the same matters as those of the first embodiment described above will be omitted. In FIG. 4, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The pressure sensor 1A shown in FIG. 4 has the same configuration as that of the first embodiment described above, except that it has an overhanging portion 62 instead of the overhanging portion 61 of the first embodiment. The overhanging portion 62 extends unilaterally from the other end of the terminal 6 in a direction intersecting the axial direction. That is, the overhanging portion 62 is a portion in which the other end portion of the terminal 6 is bent by about 90 °. The overhanging portion 62 has a width W2 equal to or larger than the minimum width W1 of the through hole 94. The overhanging portion 62 and the through hole 94 constitute a blocking portion 20A that prevents the sensor support member 4 and the case 9 from separating from each other.

In this way, the overhanging portion 62 is a portion in which the terminal 6 is deformed. Thereby, the overhanging portion 62 can be obtained by using the existing terminal. The overhanging portion 62 is preferably elastically deformable. As a result, when assembling the sensor support member 4 and the case 9, if the overhanging portion 62 is elastically deformed so that the entire terminal 6 becomes linear, the terminal 6 is compared with the through hole 94 of the case 9. It can be easily penetrated. The overhanging portion 62 may be obtained by penetrating the terminal 6 in the state before deformation through the through hole 94 of the case 9, and then plastically deforming the portion of the terminal 6 located on the other side of the case 9.

Also in the second embodiment as described above, the metal sensor support member 4 and the non-metal case 9 can be fixed to each other with high reliability as in the first embodiment described above.

< Reference example 1 >
FIG. 5 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to Reference Example 1 of the present invention. Hereinafter, Reference Example 1 shown in FIG. 5 will be described, but the same items as those in the first embodiment described above will be omitted. In FIG. 5, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The pressure sensor 1B shown in FIG. 5 has the same configuration as that of the first embodiment described above, except that the overhanging portion 61 of the first embodiment is omitted and the case 9B is replaced with the case 9. Case 9B has at least one through hole 94B that penetrates along the axial direction. The terminal 6 penetrates through the through hole 94B. Here, the terminal 6 has a portion 63 housed in the through hole 94B, and the portion 63 has a width W2 equal to the minimum width W1 of the through hole 94B. As a result, the inner peripheral surface defining the through hole 94B of the case 9B (hereinafter, simply referred to as “inner peripheral surface of the through hole 94B”) can be fixed to the terminal 6 with frictional force. The portion 63 and the through hole 94B constitute a blocking portion 20B that prevents the sensor support member 4 and the case 9B from separating from each other.

In this way, the blocking portion 20B prevents the terminal 6 and the case 9B from separating from each other when the terminal 6 comes into contact with the inner peripheral surface of the through hole 94B. Such a blocking portion 20B can be relatively easily configured only by adjusting the widths of the terminal 6 and the through hole 94B.

Here, it is preferable that the surface of the terminal 6 is roughened. As a result, the frictional force between the terminal 6 and the inner peripheral surface of the through hole 94B can be increased. Therefore, the possibility that the terminal 6 will come out of the through hole 94B of the case 9B can be reduced. The roughening method is not particularly limited, and examples thereof include blasting, etching, and cutting.

Further, the minimum width W1 of the through hole 94B in the state before the terminal 6 is inserted may be equal to the width W2 of the portion 63, but is preferably slightly smaller than the width W2 of the portion 63. As a result, the frictional force between the inner peripheral surface of the through hole 94B and the portion 63 in the state after the terminal 6 is inserted can be increased. Here, by setting the minimum width W1 of the through hole 94B in the state before the terminal 6 is inserted to 95% or more of the width W2 of the portion 63, the terminal 6 can be easily penetrated through the through hole 94B.

Also in Reference Example 1 as described above, the metal sensor support member 4 and the non-metal case 9B can be fixed to each other with high reliability as in the first embodiment described above.

If the inner peripheral surface of the through hole 94B can be fixed to the terminal 6 by a frictional force, the minimum width W1 of the through hole 94B with the terminal 6 inserted may be larger than the width W2 of the portion 63. .. For example, when the position of the through hole 94B is shifted in a direction orthogonal to the axial direction from the position shown in the figure, the terminal 6 can be fixed to the inner peripheral surface of the through hole 94B by a frictional force. In this case, the terminal 6 is slightly elastically deformed, and the terminal 6 is pressed against the inner peripheral surface of the through hole 94B by the elastic force, so that the frictional force between the terminal 6 and the inner peripheral surface can be increased.

< Third Embodiment>
FIG. 6 is a vertical cross-sectional view schematically showing a fixed state of the sensor support member of the pressure sensor and the case according to the third embodiment of the present invention. Hereinafter, the third embodiment shown in FIG. 6 will be described, but the same matters as those of the first embodiment described above will be omitted. In FIG. 6, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The pressure sensor 1C shown in FIG. 6 has the same configuration as that of the first embodiment described above, except that it has an overhanging portion 64 instead of the overhanging portion 61 of the first embodiment. The overhanging portion 64 is a portion where the other end of the terminal 6 is crushed. That is, the overhanging portion 64 has a plate shape, has a thickness smaller than the width W0 of one side portion of the terminal 6, and has a width W2 equal to or larger than the minimum width W1 of the through hole 94. The overhanging portion 64 and the through hole 94 constitute a blocking portion 20C that prevents the sensor support member 4 and the case 9 from separating from each other.

The overhanging portion 64 is a portion in which the terminal 6 is deformed. As a result, the overhanging portion 64 can be obtained by using the existing terminals.

Also in the third embodiment as described above, the metal sensor support member 4 and the non-metal case 9 can be fixed to each other with high reliability as in the first embodiment described above.

< Reference example 2 >
FIG. 7 is a vertical cross-sectional view schematically showing a fixed state between the sensor support member of the pressure sensor and the case according to Reference Example 2 of the present invention. Hereinafter, Reference Example 2 shown in FIG. 7 will be described, but the same items as those in the first embodiment described above will be omitted. In FIG. 7, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The pressure sensor 1D shown in FIG. 7 has the same configuration as that of the first embodiment described above, except that it has an overhanging portion 65 instead of the overhanging portion 61 of the first embodiment. The overhanging portion 65 is a circuit board and is arranged along a plane orthogonal to the axial direction. The other side portion of the terminal 6 penetrates through the overhanging portion 65, and the terminal 6 is joined by a joining material 66 such as solder. As a result, the overhanging portion 65 is fixed to the terminal 6 and is electrically connected to the circuit board of the terminal 6 and the overhanging portion 65. Such an overhanging portion 65 has a width W2 equal to or larger than the minimum width W1 of the through hole 94. The overhanging portion 65 and the through hole 94 constitute a blocking portion 20D that prevents the sensor support member 4 and the case 9 from separating from each other.

In this way, the overhanging portion 65 is a circuit board through which the terminal 6 penetrates and is fixed. Here, if the circuit board normally required for the pressure sensor 1 is used as the overhanging portion 65, the number of parts of the pressure sensor 1 does not increase.

The circuit board used as the overhanging portion 65 may be a flexible board, but is preferably a rigid board. As a result, the mechanical strength of the structure including the overhanging portion 65 and the terminal 6 can be increased.

Also in Reference Example 2 as described above, the metal sensor support member 4 and the non-metal case 9 can be fixed to each other with high reliability as in the first embodiment described above.

Although the pressure sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. Can be done. Further, any other constituent may be added to the present invention.

1 ... Pressure sensor 1A ... Pressure sensor 1B ... Pressure sensor 1C ... Pressure sensor 1D ... Pressure sensor 2 ... Mounting member 3 ... Diaphragm 4 ... Sensor support member 5 ... Sensor element 6 ... Terminal 7 ... Sealing material 9 ... Case 9B ... Case 10 ... Electronic component 11 ... Potting material 12 ... Terminal 13 ... Outer member 14 ... O ring 15 ... Adhesive 20 ... Blocking part 20A ... Blocking part 20B ... Blocking part 20C ... Blocking part 20D ... Blocking part 21 ... Through hole 22 ... Male Screw part 23 ... Head 43 ... First main surface 44 ... Second main surface 45 ... Through hole 46 ... Through hole 61 ... Overhanging part 62 ... Overhanging part 63 ... Part 64 ... Overhanging part 65 ... Overhanging part 66 ... Joining material 91 ... Case body 93 ... Recessed hole 94 ... Through hole 94B ... Through hole 131 ... Recessed hole S1 ... First chamber S2 ... Second chamber W1 ... Minimum width ax ... Axis line

Claims (3)

A sensor element that outputs a signal according to the pressure of the fluid,
A sensor support member having a first main surface on one side and a second main surface on the other side, on which the sensor element is mounted and made of a metal material,
A terminal that is electrically connected to the sensor element and penetrates the sensor support member from the one side to the other side.
A pressure sensor that covers the second main surface of the sensor support member and has a case that is attached to the sensor support member, has a through hole for accommodating a part of the terminal, and is made of a non-metal material. And,
An overhanging portion having a width equal to or greater than the minimum width of the through hole is formed in a portion of the terminal protruding from the through hole to the other side.
A pressure sensor characterized in that the overhanging portion and the through hole form a blocking portion that prevents the sensor support member and the case from separating from each other. The pressure sensor according to claim 1 , wherein the overhanging portion is integrally formed with the terminal . The pressure sensor according to claim 1 or 2, wherein the overhanging portion is formed by bending the other end portion of the terminal at a right angle .

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