JP6983701B2 - Cooling equipment and inspection equipment - Google Patents

Cooling equipment and inspection equipment Download PDF

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JP6983701B2
JP6983701B2 JP2018046890A JP2018046890A JP6983701B2 JP 6983701 B2 JP6983701 B2 JP 6983701B2 JP 2018046890 A JP2018046890 A JP 2018046890A JP 2018046890 A JP2018046890 A JP 2018046890A JP 6983701 B2 JP6983701 B2 JP 6983701B2
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cooling
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pipe portion
cooling device
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JP2019161053A (en
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直己 下島
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Anritsu Corp
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Description

本発明は、簡単な構造でありながら、所定の範囲を均一に冷却できるとともに、冷却する位置や冷却の程度を必要に応じて任意に調整することができる冷却装置と、係る冷却装置を筐体内に備えた検査装置に関するものである。 The present invention includes a cooling device having a simple structure, capable of uniformly cooling a predetermined range, and arbitrarily adjusting the cooling position and the degree of cooling as needed, and the cooling device in the housing. It is related to the inspection device prepared for.

下記特許文献1には、冷却装置を備えた組合せ計量装置の発明が開示されている。この発明の組合せ計量装置は、測定駆動部40に複数のホッパ等が設けられており、ホッパの開閉駆動により熱が発生する。発生した熱は、測定駆動部40に連結された循環路A及び熱交換部41からなる冷却装置で放熱される。循環路Aの経路中にファン28を設けることにより空気循環を促進できる。測定駆動部40には温度検出器44が設けられ、熱制御手段42は検出した温度によってファン28の回転数を制御する。熱交換部41に除湿器を設ければ除湿を行うこともできる。測定制御部40の内部で発生する熱を簡単な構成で放散することができ、計量精度、耐久性及び信頼性を向上させることができる。 The following Patent Document 1 discloses an invention of a combination weighing device including a cooling device. In the combination weighing device of the present invention, a plurality of hoppers and the like are provided in the measurement driving unit 40, and heat is generated by driving the opening and closing of the hopper. The generated heat is dissipated by the cooling device including the circulation path A connected to the measurement drive unit 40 and the heat exchange unit 41. Air circulation can be promoted by providing the fan 28 in the path of the circulation path A. The measurement drive unit 40 is provided with a temperature detector 44, and the heat control means 42 controls the rotation speed of the fan 28 according to the detected temperature. Dehumidification can also be performed by providing a dehumidifier in the heat exchange unit 41. The heat generated inside the measurement control unit 40 can be dissipated with a simple configuration, and the measurement accuracy, durability and reliability can be improved.

下記特許文献2には、冷却装置を備えたX線異物検出装置の発明が開示されている。この発明のX線異物検出装置1では、温度センサ14で検出した筐体3内の温度が所定温度以上である時、制御手段10が制御弁13を開として筐体3内にボルテックスチューブ11で冷却空気を供給し、X線発生手段7を冷却する。同時にアクチュエータ20が作動されて扉16が駆動され、筐体3の排気口15が開放される。筐体内の圧力上昇が抑えられ、排気によって冷却効率が向上する。不使用時にはアクチュエータは作動せず扉が排気口を閉止するので清掃時に内部に水が入ることはない。使用時に冷却空気が筐体内に供給されても筐体内の圧力が上昇せず、内部の熱を効率的に排出でき、清掃時に筐体内へ水分が浸入しない。 The following Patent Document 2 discloses an invention of an X-ray foreign matter detecting device including a cooling device. In the X-ray foreign matter detection device 1 of the present invention, when the temperature in the housing 3 detected by the temperature sensor 14 is equal to or higher than a predetermined temperature, the control means 10 opens the control valve 13 and the vortex tube 11 in the housing 3 is used. Cooling air is supplied to cool the X-ray generating means 7. At the same time, the actuator 20 is operated to drive the door 16, and the exhaust port 15 of the housing 3 is opened. The pressure rise inside the housing is suppressed, and the cooling efficiency is improved by exhaust. When not in use, the actuator does not operate and the door closes the exhaust port, so water does not enter inside during cleaning. Even if cooling air is supplied to the inside of the housing during use, the pressure inside the housing does not rise, the heat inside can be efficiently discharged, and moisture does not enter the housing during cleaning.

下記特許文献3には、冷却装置を備えた印刷基板収容ユニットの発明が開示されている。この発明の印刷基板収容ユニットは、大型コンピュータの外筺1に、CPU10などが実装された一乃至複数の印刷基板9が収納された構成となっている。この外筺1の前面に設けられたパネル5には、一乃至複数個のパイプ導入口11が設けられている。このパイプ導入口11から、印刷基板9の所望のCPU10に対応する位置に通風穴16が設けられた一乃至複数個の冷却パイプ15が挿入され、冷却パイプ15は外筺1内部で着脱自在に固定されている。冷却パイプ15に冷却風を送り込む手段としては小型のファンを用いることができ、大型コンピュータの低騒音化を図ることができる。 The following Patent Document 3 discloses an invention of a printed circuit board accommodating unit provided with a cooling device. The printed circuit board accommodating unit of the present invention has a configuration in which one or a plurality of printed circuit boards 9 on which a CPU 10 or the like is mounted are housed in an outer housing 1 of a large computer. The panel 5 provided on the front surface of the outer housing 1 is provided with one or a plurality of pipe introduction ports 11. From this pipe introduction port 11, one or a plurality of cooling pipes 15 having ventilation holes 16 provided at positions corresponding to the desired CPU 10 of the printed circuit board 9 are inserted, and the cooling pipes 15 are detachably attached and detached inside the outer housing 1. It is fixed. A small fan can be used as a means for sending the cooling air to the cooling pipe 15, and the noise of a large computer can be reduced.

特開2001−255199号公報Japanese Unexamined Patent Publication No. 2001-255199 特開2009−300379号公報Japanese Unexamined Patent Publication No. 2009-300379 実開平5−38987号公報Jikkenhei 5-38987 Gazette

上記特許文献1、2に記載された発明の冷却装置は、組合せ計量装置やX線異物検出装置の筐体内を全体として冷却するものであって、同装置の筐体内の特定位置又は箇所を選択的に冷却するものではない。 The cooling device of the invention described in Patent Documents 1 and 2 cools the inside of the housing of the combination measuring device and the X-ray foreign matter detecting device as a whole, and selects a specific position or location in the housing of the device. It does not cool down.

また、上記特許文献3に記載された発明の冷却装置を構成する複数本の冷却パイプは、それぞれ筐体内に設けられた特定の印刷基板を冷却対象として筐体内の所定位置に所定の姿勢で設置されており、実施例では各冷却パイプは真上にある印刷基板に対して冷却気体を吹き付けるような配置で固定されている。従って、冷却対象又は冷却位置が変更になった場合には、冷却パイプの交換や配置変更が必要になる。 Further, the plurality of cooling pipes constituting the cooling device of the invention described in Patent Document 3 are installed in a predetermined position in a predetermined position in the housing with a specific printed substrate provided in the housing as a cooling target. In the embodiment, each cooling pipe is fixed in an arrangement that blows cooling gas onto the printed substrate directly above. Therefore, when the cooling target or the cooling position is changed, it is necessary to replace or change the arrangement of the cooling pipes.

本発明は、以上説明した従来の技術における課題に鑑みてなされたものであり、簡単な構造でありながら、所定の冷却範囲を均一に冷却できるとともに、冷却範囲内に設けられた特定の部品等を効果的に冷却できる冷却装置と、これを筐体内に設けた検査装置を提供することを目的としている。 The present invention has been made in view of the problems in the prior art described above, and although it has a simple structure, it can uniformly cool a predetermined cooling range, and specific parts provided within the cooling range, etc. It is an object of the present invention to provide a cooling device capable of effectively cooling the surface and an inspection device provided with the cooling device in the housing.

請求項1に記載された冷却装置15は、
一端部が冷却気体の供給源に接続されるとともに他端部は閉止され、長手方向に間隔をおいて形成された複数の孔17,17a,17b,17cを有する管部16と、
前記孔17,17a,17b,17cから挿入され前記管部16の内部に選択的に配置される中実の調節部材18,18a,18b,18cと、
を具備することを特徴としている。
The cooling device 15 according to claim 1 is
A pipe portion 16 having a plurality of holes 17, 17a, 17b, 17c formed at intervals in the longitudinal direction, with one end connected to a cooling gas supply source and the other end closed.
The solid adjusting members 18, 18a, 18b, 18c inserted from the holes 17, 17a, 17b, 17c and selectively arranged inside the pipe portion 16,
It is characterized by having.

請求項2に記載された冷却装置15は、請求項1に記載の冷却装置15において、
前記調節部材18,18a,18b,18cが、冷却気体の風量を増大させたい前記孔17,17a,17b,17cの前記他端部側に隣接する他の前記孔17,17a,17b,17cに設けられることを特徴としている。
The cooling device 15 according to claim 2 is the cooling device 15 according to claim 1.
The adjusting members 18, 18a, 18b, 18c are formed in the other holes 17, 17a, 17b, 17c adjacent to the other end side of the holes 17, 17a, 17b, 17c for which the air volume of the cooling gas is desired to be increased. It is characterized by being provided.

請求項3に記載された冷却装置15は、請求項1又は2に記載の冷却装置15において、
前記孔17が丸孔17aであることを特徴としている。
The cooling device 15 according to claim 3 is the cooling device 15 according to claim 1 or 2.
The hole 17 is characterized by being a round hole 17a.

請求項4に記載された冷却装置15は、請求項1又は2に記載の冷却装置15において、
前記孔17がねじ孔17bであることを特徴としている。
The cooling device 15 according to claim 4 is the cooling device 15 according to claim 1 or 2.
The hole 17 is characterized by being a screw hole 17b.

請求項5に記載された検査装置1は、
請求項1乃至4に記載の冷却装置15が筐体2内の所望の位置に設けられたことを特徴としている。
The inspection device 1 according to claim 5 is
The cooling device 15 according to claims 1 to 4 is provided at a desired position in the housing 2.

請求項1に記載された冷却装置15によれば、供給源から管部16に冷却気体を供給し、管部16に形成された複数の孔17,17a,17b,17cから、冷却対象である部品等又は所定の空間に対して冷却気体を噴射し、その温度を低下させることができる。 According to the cooling device 15 according to claim 1, the cooling gas is supplied from the supply source to the pipe portion 16, and the cooling target is obtained from the plurality of holes 17, 17a, 17b, 17c formed in the pipe portion 16. The temperature can be lowered by injecting a cooling gas onto a part or the like or a predetermined space.

このように、長手方向に間隔をおいて複数の孔17,17a,17b,17cが形成された管部16の一端部から、閉止された他端部に向けて冷却気体を供給すると、管部16の内径や孔17,17a,17b,17cの内径等の諸条件によっては、各孔17,17a,17b,17cから噴射される冷却気体の風量が一定にならず、冷却対象を均一かつ効率的に冷却することが困難となる場合がある。請求項1に記載された冷却装置15では、そのような場合であっても、管部16に形成された複数の孔17,17a,17b,17cのうち、状況から必要と認められる孔17,17a,17b,17cを選択し、その孔17,17a,17b,17cから管部16の内部に調節部材18,18a,18b,18cを配置するものとした。このように調節部材18,18a,18b,18cで管部16内の冷却気体の流路を部分的に閉塞したため、調節部材18,18a,18b,18cを設けた孔17,17a,17b,17cよりも上流側の隣の孔17,17a,17b,17c、すなわち管部16の一端部側の隣の孔17,17a,17b,17cから噴射される冷却気体の風量が増加し、その結果として、複数の孔17,17a,17b,17cからそれぞれ噴射される冷却気体の風量は、調節部材18,18a,18b,18cを設けない場合に比べて均一化される。従って、調節部材18,18a,18b,18cを設ける孔17,17a,17b,17cを適宜に選択すれば、調節部材18,18a,18b,18cを設けない複数の孔17,17a,17b,17cから冷却対象に向けて吹き出す冷却気体の風量を可及的に均一化し、冷却を効率化し、冷却対象の全体について速やかな冷却効果を得ることができる。 In this way, when the cooling gas is supplied from one end of the pipe portion 16 in which a plurality of holes 17, 17a, 17b, 17c are formed at intervals in the longitudinal direction toward the closed other end portion, the pipe portion Depending on various conditions such as the inner diameter of the 16 and the inner diameters of the holes 17, 17a, 17b, 17c, the air volume of the cooling gas injected from the holes 17, 17a, 17b, 17c is not constant, and the cooling target is uniform and efficient. It may be difficult to cool the gas. In the cooling device 15 according to claim 1, even in such a case, among the plurality of holes 17, 17a, 17b, 17c formed in the pipe portion 16, the holes 17, which are deemed necessary from the situation, 17a, 17b, 17c were selected, and the adjusting members 18, 18a, 18b, 18c were arranged from the holes 17, 17a, 17b, 17c inside the pipe portion 16. Since the flow path of the cooling gas in the pipe portion 16 is partially blocked by the adjusting members 18, 18a, 18b, 18c in this way, the holes 17, 17a, 17b, 17c provided with the adjusting members 18, 18a, 18b, 18c. The air volume of the cooling gas injected from the adjacent holes 17, 17a, 17b, 17c on the upstream side, that is, the adjacent holes 17, 17a, 17b, 17c on the one end side of the pipe portion 16 increases, and as a result. The air volume of the cooling gas injected from the plurality of holes 17, 17a, 17b, 17c, respectively, is made uniform as compared with the case where the adjusting members 18, 18a, 18b, 18c are not provided. Therefore, if the holes 17, 17a, 17b, 17c in which the adjusting members 18, 18a, 18b, 18c are provided are appropriately selected, a plurality of holes 17, 17a, 17b, 17c in which the adjusting members 18, 18a, 18b, 18c are not provided are appropriately selected. The air volume of the cooling gas blown out from the cooling target to the cooling target can be made uniform as much as possible, the cooling efficiency can be improved, and a rapid cooling effect can be obtained for the entire cooling target.

より具体的に冷却装置15の使用態様を説明する。例えば冷却対象が長手形状である場合には、冷却対象の長手方向に沿って冷却装置15の管部16を配置し、管部16の複数の孔17,17a,17b,17cを冷却対象と対面する方向に向け、調節部材18,18a,18b,18cを、設置が必要な孔17,17a,17b,17cに配置することにより、各孔17,17a,17b,17cから冷却気体を均一に吹き出して冷却対象の全体に吹き付け、長手形状の冷却対象を均一かつ効率よく冷却することができる。 More specifically, the usage mode of the cooling device 15 will be described. For example, when the cooling target has a longitudinal shape, the pipe portion 16 of the cooling device 15 is arranged along the longitudinal direction of the cooling target, and the plurality of holes 17, 17a, 17b, 17c of the pipe portion 16 face the cooling target. By arranging the adjusting members 18, 18a, 18b, 18c in the holes 17, 17a, 17b, 17c that need to be installed, the cooling gas is uniformly blown out from the holes 17, 17a, 17b, 17c. It can be sprayed on the entire cooling target to uniformly and efficiently cool the long-shaped cooling target.

また、冷却対象が所定の空間である場合には、必要に応じて調節部材18,18a,18b,18cを孔17,17a,17b,17cに配置し、管部16の複数の孔17,17a,17b,17cを空間の上方に向ければ、熱が溜まり易い空間の上方に冷却気体を均一に供給することができ、空間内の空気を満遍なく攪拌して空間内を効率的に冷却することができる。 When the cooling target is a predetermined space, the adjusting members 18, 18a, 18b, 18c are arranged in the holes 17, 17a, 17b, 17c as needed, and a plurality of holes 17, 17a of the pipe portion 16 are arranged. By directing, 17b, 17c to the upper part of the space, the cooling gas can be uniformly supplied to the upper part of the space where heat tends to accumulate, and the air in the space can be evenly agitated to efficiently cool the space. can.

また、冷却対象が、冷却装置の管部に比べて小さいか又は短い部品等であり、筐体2内又は所定の空間内の特定位置に設けられており、管部16に設けられた複数の孔17,17a,17b,17cのうち、ある特定の孔17,17a,17b,17cが、当該部品等の冷却に最も寄与すると考えられる位置及び向きを有している場合には、その孔17,17a,17b,17cよりも下流側の隣の孔17,17a,17b,17c、すなわち管部16の他端部側の隣の孔17,17a,17b,17cに調節部材18,18a,18b,18cを配置する。これにより、当該部品の冷却に最も有効な孔17,17a,17b,17cから噴射される冷却気体の風量が増すので、当該部品を特に効果的に冷却することができる。 Further, the object to be cooled is a component or the like that is smaller or shorter than the pipe portion of the cooling device, is provided at a specific position in the housing 2 or a predetermined space, and a plurality of parts provided in the pipe portion 16. Of the holes 17, 17a, 17b, 17c, if a specific hole 17, 17a, 17b, 17c has a position and orientation that is considered to contribute most to the cooling of the component or the like, the hole 17 , 17a, 17b, 17c, adjacent holes 17, 17a, 17b, 17c on the downstream side, that is, adjacent holes 17, 17a, 17b, 17c on the other end side of the pipe portion 16, and adjusting members 18, 18a, 18b. , 18c are placed. As a result, the air volume of the cooling gas injected from the holes 17, 17a, 17b, 17c, which are most effective for cooling the component, is increased, so that the component can be cooled particularly effectively.

請求項2に記載された冷却装置15によれば、管部16に設けられた複数の孔17,17a,17b,17cのうち、ある特定の孔17,17a,17b,17cからの冷却空気の風量を増大させたい場合は、その孔17,17a,17b,17cよりも下流側の隣の孔17,17a,17b,17c、すなわち管部16の他端部側の隣の孔17,17a,17b,17cに調節部材18,18a,18b,18cを配置する。これにより、前記特定の孔17,17a,17b,17cから噴射される冷却気体の風量が増す。管部16の配置が、前記特定の孔17,17a,17b,17cからの冷却空気が特定の部品等に吹き付けられるようになっている場合には、上述したような調節部材18,18a,18b,18cの配置によって当該部品等を特に効果的に冷却できる。 According to the cooling device 15 according to claim 2, the cooling air from a specific hole 17, 17a, 17b, 17c among the plurality of holes 17, 17a, 17b, 17c provided in the pipe portion 16 If you want to increase the air volume, the adjacent holes 17, 17a, 17b, 17c on the downstream side of the holes 17, 17a, 17b, 17c, that is, the adjacent holes 17, 17a, on the other end side of the pipe portion 16. The adjusting members 18, 18a, 18b, 18c are arranged on the 17b, 17c. As a result, the air volume of the cooling gas injected from the specific holes 17, 17a, 17b, 17c increases. When the arrangement of the pipe portion 16 is such that the cooling air from the specific holes 17, 17a, 17b, 17c is blown to the specific parts or the like, the adjusting members 18, 18a, 18b as described above are used. The arrangement of, 18c can cool the parts and the like particularly effectively.

請求項3に記載された冷却装置15によれば、管部16の孔17が丸孔17aであり、調節部材18としては円柱形のピン18a等を用いることができるため、孔17に対する調節部材18の挿入、抜脱が容易である。 According to the cooling device 15 according to claim 3, since the hole 17 of the pipe portion 16 is a round hole 17a and a cylindrical pin 18a or the like can be used as the adjusting member 18, the adjusting member for the hole 17 is used. 18 can be easily inserted and removed.

請求項4に記載された冷却装置15によれば、管部16の孔17がねじ孔17bであり、調節部材18としてはねじ18bを用いることができるため、孔17に対する調節部材18の挿入の程度を調節することにより、調節部材18が管部16の内部を閉塞する程度を調節して孔17から吹き出す冷却気体の風量を所望の状態に設定することができる。 According to the cooling device 15 according to claim 4, since the hole 17 of the pipe portion 16 is a screw hole 17b and the screw 18b can be used as the adjusting member 18, the adjusting member 18 is inserted into the hole 17. By adjusting the degree, the degree to which the adjusting member 18 closes the inside of the pipe portion 16 can be adjusted to set the air volume of the cooling gas blown out from the hole 17 to a desired state.

請求項5に記載された検査装置1によれば、請求項1乃至4に記載された冷却装置15が、検査装置1の筐体2の内部で上述したような冷却効果を発揮することにより、検査装置1が作動中に発生する熱を効果的に冷却し、検査装置1の作動を安定かつ確実とし、もって検査の精度や効率を向上させることができる。 According to the inspection device 1 according to the fifth aspect, the cooling device 15 according to the first to fourth aspects exerts the above-mentioned cooling effect inside the housing 2 of the inspection device 1. The heat generated during the operation of the inspection device 1 can be effectively cooled, the operation of the inspection device 1 can be made stable and reliable, and the accuracy and efficiency of the inspection can be improved.

本発明の実施形態における冷却装置の基本構造及び作用原理を示す模式的な断面図及び平面図である。It is a schematic cross-sectional view and the plan view which show the basic structure and the working principle of the cooling apparatus in embodiment of this invention. 本発明の実施形態における冷却装置の基本構造及び作用原理を示す模式的な断面図及び平面図である。It is a schematic cross-sectional view and the plan view which show the basic structure and the working principle of the cooling apparatus in embodiment of this invention. 本発明の実施形態に係る検査装置を紙面に平行な図中鉛直面で切断した模式的断面図である。It is a schematic cross-sectional view which cut the inspection apparatus which concerns on embodiment of this invention in the vertical plane parallel to the paper surface. 本発明の実施形態における冷却装置の第1の構造例を示す図であり、分図(a)は図3の矢視(a)の方向から見た平面図、分図(b)は分図(a)のa−a切断線における断面図、分図(c)は分図(b)のc−c切断線における断面図である。It is a figure which shows the 1st structural example of the cooling apparatus in embodiment of this invention, the sectional drawing (a) is a plan view seen from the direction of the arrow (a) of FIG. 3, and the sectional drawing (b) is a sectional drawing. (A) is a cross-sectional view at the aa cutting line, and the division diagram (c) is a cross-sectional view at the cc cutting line of the division diagram (b). 本発明の実施形態における冷却装置の第2の構造例を示す図であり、分図(a)は図3の矢視(a)の方向から見た平面図、分図(b)は分図(a)のa−a切断線における断面図、分図(c)は分図(b)のc−c切断線における断面図である。It is a figure which shows the 2nd structural example of the cooling apparatus in embodiment of this invention, the sectional drawing (a) is a plan view seen from the direction of the arrow (a) of FIG. 3, and the sectional drawing (b) is a sectional drawing. (A) is a cross-sectional view at the aa cutting line, and the division diagram (c) is a cross-sectional view at the cc cutting line of the division diagram (b). 本発明の実施形態における冷却装置の第3の構造例を示す図であり、分図(a)は図3の矢視(a)の方向から見た平面図、分図(b)は分図(a)のa−a切断線における断面図、分図(c)は分図(b)のc−c切断線における断面図である。It is a figure which shows the 3rd structural example of the cooling apparatus in embodiment of this invention, the sectional drawing (a) is a plan view seen from the direction of the arrow (a) of FIG. 3, and the sectional drawing (b) is a sectional drawing. (A) is a cross-sectional view at the aa cutting line, and the division diagram (c) is a cross-sectional view at the cc cutting line of the division diagram (b). 本発明の実施形態における冷却装置において調節部材を用いない場合の各孔からの風量を示す模式的な断面図及び平面図である。It is a schematic cross-sectional view and the plan view which shows the air volume from each hole when the adjusting member is not used in the cooling apparatus in embodiment of this invention.

以下、本発明の実施形態を図面を参照して具体的に説明する。
まず、模式的に表現した図1、図2及び図7を参照して実施形態に係る冷却装置の構造と原理を説明する。
図7に示すように、この冷却装置15は、一端部が冷却気体の供給源に接続されるとともに他端部は閉止され、長手方向に間隔をおいて形成された複数の孔17を有する管部16を本体としている。この構成において、一端部から冷却空気を供給すると、管部16の内径や孔17の内径等の諸条件によっては、各孔17から噴射される冷却気体の風量が一定にならず、図7に矢印で示すように、上流から下流に向かうに従って孔17から吹き出す冷却気体の風量が徐々に大きくなっていき、各孔17ごとの風量が一定にならない場合があることを本願発明者は見出した。従って、このような構造の管部16のみによる冷却装置15を検査装置の筐体内に設けても、筐体内を常に均一かつ効率的に冷却することは困難であると考えられる。
Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
First, the structure and principle of the cooling device according to the embodiment will be described with reference to FIGS. 1, 2, and 7 schematically represented.
As shown in FIG. 7, in this cooling device 15, one end is connected to a cooling gas supply source and the other end is closed, and the cooling device 15 is a pipe having a plurality of holes 17 formed at intervals in the longitudinal direction. The main body is the part 16. In this configuration, when cooling air is supplied from one end, the air volume of the cooling gas injected from each hole 17 is not constant depending on various conditions such as the inner diameter of the pipe portion 16 and the inner diameter of the hole 17, and FIG. 7 shows. As shown by the arrow, the inventor of the present application has found that the air volume of the cooling gas blown out from the holes 17 gradually increases from the upstream to the downstream, and the air volume for each hole 17 may not be constant. Therefore, even if the cooling device 15 using only the pipe portion 16 having such a structure is provided in the housing of the inspection device, it is considered difficult to always uniformly and efficiently cool the inside of the housing.

そこで、実施形態の冷却装置15では、管部16に形成された複数の孔17のうち、風量を増やしたい孔17を選択し、その孔17よりも下流側に向けて一つ隣の孔17に調節部材を挿入して管部16内に配置し、管部16の内部を部分的に塞ぐこととした。 Therefore, in the cooling device 15 of the embodiment, the hole 17 for which the air volume is to be increased is selected from the plurality of holes 17 formed in the pipe portion 16, and the hole 17 adjacent to the hole 17 toward the downstream side is selected. An adjusting member was inserted into the pipe portion 16 and placed inside the pipe portion 16 to partially close the inside of the pipe portion 16.

図1に示すように、冷却気体の供給側である一端部(図中右側)から数えて2個目の孔17に調節部材18を配置すると、図7との比較から分かるように、この孔17よりも上流側に一つ隣の孔17からの風量が増加する。調節部材18を配置した孔17よりも下流側に一つ隣の孔17からの風量は調節部材18がない場合よりもやや少なくなるが、その他の下流側の孔17からの風量は図7と比べて大きな変化はなく、全体として見れば、図1における各孔17からの風量は、図7に示す状態よりも平均化している。 As shown in FIG. 1, when the adjusting member 18 is arranged in the second hole 17 counting from one end (right side in the figure) on the supply side of the cooling gas, this hole is as can be seen from the comparison with FIG. The air volume from the hole 17 adjacent to the hole 17 on the upstream side of 17 increases. The air volume from the hole 17 adjacent to the hole 17 on the downstream side of the hole 17 in which the adjusting member 18 is arranged is slightly smaller than that in the case where the adjusting member 18 is not provided, but the air volume from the other holes 17 on the downstream side is shown in FIG. There was no significant change in comparison, and as a whole, the air volume from each hole 17 in FIG. 1 was averaged more than in the state shown in FIG.

図2に示すように、冷却気体の供給側である一端部から2個目と4個目の2つの孔17に調節部材18を配置すると、図7との比較から分かるように、これらの孔17よりも上流側の一つ隣にある二つの孔17からの風量がそれぞれ増加する。最下流の孔17からの風量は調節部材18がない図7の場合と比べて大きな違いはなく、全体として見れば、図4における各孔17からの風量は、図7に示す状態よりも平均化しており、図1に示す状態よりもさらに均一になっている。 As shown in FIG. 2, when the adjusting member 18 is arranged in the second and fourth holes 17 from one end on the cooling gas supply side, these holes can be seen from the comparison with FIG. The air volume from the two holes 17 adjacent to each other on the upstream side of 17 increases. The air volume from the most downstream holes 17 is not significantly different from that in FIG. 7 without the adjusting member 18, and as a whole, the air volume from each hole 17 in FIG. 4 is averager than the state shown in FIG. It has become more uniform than the state shown in FIG.

このように調節部材18を取り付けると、調節部材18を設けた孔17よりも上流側の隣の孔17、すなわち管部16の一端部側の隣の孔17から噴射される冷却気体の風量が増加し、複数の孔17からそれぞれ噴射される冷却気体の風量は、調節部材18を設ける前よりも均一化される。 When the adjusting member 18 is attached in this way, the air volume of the cooling gas injected from the adjacent hole 17 on the upstream side of the hole 17 in which the adjusting member 18 is provided, that is, the adjacent hole 17 on the one end side of the pipe portion 16 is increased. The air volume of the cooling gas that is increased and injected from each of the plurality of holes 17 is made more uniform than before the adjusting member 18 is provided.

従って、冷却対象である区画された空間内にこの冷却装置を適切に配置すれば、空間内を効率的に冷却することができる。また、この空間内に冷却対象として特に発熱が高い部品等や、何らかの理由で他の部品よりも許容温度が低く設定されている部品等があれば、特定の孔17が当該部品等に向くように管部16を配置し、特定の孔17の一つ下流の他の孔17に調節部材18を設ければ、当該部品等に冷却気体を集中的に当てて特に効率的に冷却することができる。 Therefore, if this cooling device is appropriately arranged in the partitioned space to be cooled, the space can be efficiently cooled. Further, if there is a part in this space that generates a particularly high amount of heat as a cooling target, or a part whose allowable temperature is set lower than other parts for some reason, the specific hole 17 should face the part or the like. If the pipe portion 16 is arranged in the hole 17 and the adjusting member 18 is provided in the other hole 17 one downstream of the specific hole 17, the cooling gas can be intensively applied to the component or the like to cool the component particularly efficiently. can.

次に、本発明の実施形態を図3〜図6を参照してさらに具体的に説明する。
図3は実施形態の冷却装置が設けられた検査装置1を示す模式的な断面図である。図3に示すように、本実施形態の検査装置1は、脚部3で設置面上に支持された箱型の筐体2を有している。筐体2の下部の内部には、左右両側面にそれぞれ設けられた開口2a,2bから両端が突出するようにベルトコンベア式の搬送部4が設けられている。筐体2の上部の内部には、検査部5が設けられており、搬送部4によって筐体2内を搬送される被検査物Wを検査することができる。なお、検査部5による被検査物Wの検査原理及び検査目的等は問わないし、被検査物Wの種類も特に限定しない。さらに、検査部5は、本検査装置の全体を制御する制御部を含むものとする。
Next, an embodiment of the present invention will be described in more detail with reference to FIGS. 3 to 6.
FIG. 3 is a schematic cross-sectional view showing the inspection device 1 provided with the cooling device of the embodiment. As shown in FIG. 3, the inspection device 1 of the present embodiment has a box-shaped housing 2 supported on the installation surface by the legs 3. Inside the lower part of the housing 2, a belt conveyor type transport unit 4 is provided so that both ends project from the openings 2a and 2b provided on both the left and right side surfaces, respectively. An inspection unit 5 is provided inside the upper part of the housing 2, and the inspected object W transported in the housing 2 can be inspected by the transport unit 4. The inspection principle and inspection purpose of the inspected object W by the inspection unit 5 are not limited, and the type of the inspected object W is not particularly limited. Further, the inspection unit 5 shall include a control unit that controls the entire inspection device.

図3に示すように、検査装置1は、筐体2の上部の内部に冷却装置15を備えている。冷却装置15は検査部5の上方に配置されている。冷却装置15は、一端部が冷却気体の供給源(図示せず)に導管6を介して接続され、他端部が閉止された管部16を有する。管部16は、その長手方向に間隔をおいて複数の孔17が形成されているが、複数の孔17は管部16の周方向について同一の位置にあり、図3では真上の位置にあるため図3には表れない。 As shown in FIG. 3, the inspection device 1 includes a cooling device 15 inside the upper part of the housing 2. The cooling device 15 is arranged above the inspection unit 5. The cooling device 15 has a pipe portion 16 having one end connected to a cooling gas supply source (not shown) via a conduit 6 and the other end closed. A plurality of holes 17 are formed in the pipe portion 16 at intervals in the longitudinal direction thereof, but the plurality of holes 17 are located at the same position in the circumferential direction of the pipe portion 16 and are located directly above in FIG. Therefore, it does not appear in FIG.

図4から図6は、図3に示す実施形態の検査装置1に設けられた冷却装置15の形態例を示す図である。図4から図6の各図において、各分図(a)が、図3の矢視(a)の方向から見た平面図であり、各分図(b)は各分図(a)のa−a切断線での断面図、各分図(c)は各分図(b)のc−c切断線での断面図である。 4 to 6 are views showing an example of the form of the cooling device 15 provided in the inspection device 1 of the embodiment shown in FIG. In each of the views of FIGS. 4 to 6, each segment (a) is a plan view seen from the direction of the arrow (a) of FIG. 3, and each segment (b) is a diagram of each segment (a). A cross-sectional view taken along the aa cutting line, and each segmented view (c) is a cross-sectional view taken along the cc cutting line of each segmented diagram (b).

図4は、実施形態における冷却装置15の第1の構造例を示す図である。図4に示すように、管部16の周面には、長手方向に間隔をおいて複数の丸孔17aが形成されている。複数の丸孔17aは、管部16の長手方向(軸方向)については所定間隔で配置されており、周方向に関する位置も同一である。しかしながら、複数の丸孔17aの周方向に関する位置は、筐体2の内部における冷却効果を考慮して適宜に設定することができる。すなわち、軸方向に並んでいる複数の丸孔17aは、筐体2内における冷却の目的を達成するために必要な限り、周方向についてはどの位置に配置してもよい。なお、管部16の寸法を例示すると、内径9.8mm、外径13.8mm、肉厚2mmであり、丸孔17aは直径が4mmである。 FIG. 4 is a diagram showing a first structural example of the cooling device 15 in the embodiment. As shown in FIG. 4, a plurality of round holes 17a are formed on the peripheral surface of the pipe portion 16 at intervals in the longitudinal direction. The plurality of round holes 17a are arranged at predetermined intervals in the longitudinal direction (axial direction) of the pipe portion 16, and the positions in the circumferential direction are also the same. However, the positions of the plurality of round holes 17a in the circumferential direction can be appropriately set in consideration of the cooling effect inside the housing 2. That is, the plurality of round holes 17a arranged in the axial direction may be arranged at any position in the circumferential direction as long as it is necessary to achieve the purpose of cooling in the housing 2. To exemplify the dimensions of the pipe portion 16, the inner diameter is 9.8 mm, the outer diameter is 13.8 mm, the wall thickness is 2 mm, and the round hole 17a has a diameter of 4 mm.

図4に例示するように、一端部側から2個目の丸孔17aには、調節部材18としてのピン18aが設けられている。ピン18aは、丸孔17aに隙間無く挿入できる中実の円柱形状であり、長さは管部16の外径よりもやや小さく、丸孔17aに挿入して内周面に突き当てると上端部が管部16の外周面と略同一面になる。先に図1及び図2を参照して原理を説明したように、ピン18aを設けない場合に比べ、一端部側にある2個の丸孔17a(図4において最も右側の丸孔17a)からの風量は増大する。 As illustrated in FIG. 4, a pin 18a as an adjusting member 18 is provided in the round hole 17a second from the one end side. The pin 18a has a solid cylindrical shape that can be inserted into the round hole 17a without a gap, and its length is slightly smaller than the outer diameter of the pipe portion 16. When the pin 18a is inserted into the round hole 17a and abutted against the inner peripheral surface, the upper end portion Is substantially the same as the outer peripheral surface of the pipe portion 16. As described above with reference to FIGS. 1 and 2, the two round holes 17a (the rightmost round hole 17a in FIG. 4) on one end side are compared with the case where the pin 18a is not provided. The air volume of is increased.

図3に示すように、この検査装置1においては、管部16は検査部5の真上に設けられており、管部16の周囲には特にその他の部品等は図示していない。しかしながら、図4に例示したように、管部16の一端部側から2個目の丸孔17aにピン18aが設けられており、筐体2内では、その上流側(一端部側)の丸孔17aの正面に特定の部品等が設けられているとすれば、当該部品等には風量が増大した冷却気体が吹き付けるので、高い冷却効果が得られる。すなわち、図3に示すような検査装置1の筐体2内において、特に冷却したい部品等がある場合には、当該部品等に丸孔17aが対面するように管部16を配置し、その下流側(他端部側)の丸孔17aにピン18aを設ければよい。 As shown in FIG. 3, in the inspection device 1, the pipe portion 16 is provided directly above the inspection portion 5, and other parts and the like are not shown around the pipe portion 16. However, as illustrated in FIG. 4, a pin 18a is provided in the second round hole 17a from the one end side of the pipe portion 16, and in the housing 2, the circle on the upstream side (one end side) thereof. If a specific component or the like is provided in front of the hole 17a, a cooling gas having an increased air volume is blown onto the component or the like, so that a high cooling effect can be obtained. That is, when there is a component or the like that is particularly desired to be cooled in the housing 2 of the inspection device 1 as shown in FIG. 3, the pipe portion 16 is arranged so that the round hole 17a faces the component or the like, and downstream thereof. A pin 18a may be provided in the round hole 17a on the side (the other end side).

図4に示すように一端部側から2個目の丸孔17aにピン18aを設けた場合、または図2を参照して原理を説明したように、2個以上の丸孔17aに適宜間隔でピン18aを設けた場合には、図7を参照して説明した調節部材18を設けない場合に比べ、丸孔17aからの冷却空気の噴射状態が均一化する。検査装置1の筐体2内の空気が温められた場合、温かい空気は筐体2内の上方の位置に溜まり易いので、管部16の多くの丸孔17aから可及的に均一な状態で冷却気体を上方へ吹き出すことにより、筐体2内の空気が満遍なく攪拌され、筐体2内を効率よく冷却することができる。 When the pin 18a is provided in the second round hole 17a from the one end side as shown in FIG. 4, or as described in the principle with reference to FIG. 2, the two or more round holes 17a are appropriately spaced apart from each other. When the pin 18a is provided, the injection state of the cooling air from the round hole 17a becomes uniform as compared with the case where the adjusting member 18 described with reference to FIG. 7 is not provided. When the air in the housing 2 of the inspection device 1 is warmed, the warm air tends to collect in the upper position in the housing 2, so that the air is as uniform as possible from the many round holes 17a of the pipe portion 16. By blowing out the cooling gas upward, the air inside the housing 2 is evenly agitated, and the inside of the housing 2 can be efficiently cooled.

なお、丸いピン18aと丸孔17aの寸法関係が挿抜可能なものであれば、冷却すべき部品の発熱量や位置等が異なる検査装置1の機種に対応してピン18aの位置を変えることができる。しかしながら、ピン18aと丸孔17aは、脱落の防止のために圧入又は挿入後の溶接で固定する構造でもよい。 If the dimensional relationship between the round pin 18a and the round hole 17a can be inserted and removed, the position of the pin 18a can be changed according to the model of the inspection device 1 in which the calorific value and position of the parts to be cooled are different. can. However, the pin 18a and the round hole 17a may have a structure in which the pin 18a and the round hole 17a are fixed by welding after press fitting or insertion in order to prevent them from falling off.

図5は、実施形態における冷却装置15の第2の構造例を示す図である。この構造例では、管部16の孔がねじ孔17bであり、調節部材がねじ18bである。この構造例によれば、ねじ孔17bに対するねじ18bの挿入の程度を調節することにより、ねじ18bが管部16の内部を閉塞する程度を調節することができ、ねじ孔17bから吹き出す冷却気体の風量を所望の状態に設定することができる FIG. 5 is a diagram showing a second structural example of the cooling device 15 in the embodiment. In this structural example, the hole of the pipe portion 16 is a screw hole 17b, and the adjusting member is a screw 18b. According to this structural example, by adjusting the degree of insertion of the screw 18b into the screw hole 17b, the degree of the screw 18b closing the inside of the pipe portion 16 can be adjusted, and the cooling gas blown out from the screw hole 17b can be adjusted. The air volume can be set to the desired state.

図6は、実施形態における冷却装置15の第3の構造例を示す図である。この構造例では、管部16の孔がスリット17cであり、調節部材が板材18cである。この構造例によれば、管部16に対するスリット18cの加工は容易であり、スリット17cの寸法に適合した板材18cを用意することも容易である。 FIG. 6 is a diagram showing a third structural example of the cooling device 15 in the embodiment. In this structural example, the hole of the pipe portion 16 is a slit 17c, and the adjusting member is a plate material 18c. According to this structural example, it is easy to process the slit 18c on the pipe portion 16, and it is also easy to prepare a plate material 18c suitable for the dimensions of the slit 17c.

なお、冷却気体としては、工場などで容易に入手できるコンプレッサの圧縮空気を利用することができる。すなわち、冷却気体とは、必ずしも冷却用として準備した特別に低温の気体との意味ではなく、冷却対象の温度との関係で冷却に利用しうる温度の気体であればよい。 As the cooling gas, compressed air of a compressor easily available at a factory or the like can be used. That is, the cooling gas does not necessarily mean a specially low-temperature gas prepared for cooling, but may be a gas having a temperature that can be used for cooling in relation to the temperature of the object to be cooled.

また、以上説明した実施形態では、冷却装置15の管部16は丸管であったが、中空長手形状の部材であれば、特に形状を限定するものではない。 Further, in the embodiment described above, the pipe portion 16 of the cooling device 15 is a round pipe, but the shape is not particularly limited as long as it is a member having a hollow longitudinal shape.

1…検査装置
2…筐体
3…脚部
4…搬送部
5…検査部
15…冷却装置
16…管部
17…孔
17a…孔としての丸孔
17b…孔としてのねじ孔
17c…孔としてのスリット
18…調節部材
18a…調節部材としてのピン
18b…調節部材としてのねじ
18c…調節部材としての板材
W…被検査物
1 ... Inspection device 2 ... Housing 3 ... Leg 4 ... Transport section 5 ... Inspection section 15 ... Cooling device 16 ... Pipe section 17 ... Hole 17a ... Round hole as a hole 17b ... Screw hole as a hole 17c ... As a hole Slit 18 ... Adjustment member 18a ... Pin as adjustment member 18b ... Screw as adjustment member 18c ... Plate material as adjustment member W ... Object to be inspected

Claims (5)

一端部が冷却気体の供給源に接続されるとともに他端部は閉止され、長手方向に間隔をおいて形成された複数の孔(17,17a,17b,17c)を有する管部(16)と、
前記孔から挿入され前記管部の内部に選択的に配置される中実の調節部材(18,18a,18b,18c)と、
を具備することを特徴とする冷却装置(15)。
With a pipe portion (16) having a plurality of holes (17, 17a, 17b, 17c) formed at intervals in the longitudinal direction, with one end connected to a cooling gas source and the other end closed. ,
Adjustment member of the real in selectively positioned is inserted from the hole to the inside of the tube portion (18, 18a, 18b, 18c) and,
(15).
前記調節部材(18,18a,18b,18c)が、冷却気体の風量を増大させたい前記孔(17,17a,17b,17c)の前記他端部側に隣接する他の前記孔(17,17a,17b,17c)に設けられることを特徴とする請求項1に記載の冷却装置(15)。 The adjusting member (18, 18a, 18b, 18c) is the other hole (17, 17a) adjacent to the other end side of the hole (17, 17a, 17b, 17c) for which the air volume of the cooling gas is desired to be increased. , 17b, 17c), the cooling device (15) according to claim 1. 前記孔(17)は丸孔(17a)であることを特徴とする請求項1又は2に記載の冷却装置(15)。 The cooling device (15) according to claim 1 or 2, wherein the hole (17) is a round hole (17a). 前記孔(17)はねじ孔(17b)であることを特徴とする請求項1又は2に記載の冷却装置。 The cooling device according to claim 1 or 2, wherein the hole (17) is a screw hole (17b). 請求項1乃至4に記載の冷却装置(15)が筐体(2)内の所望の位置に設けられた検査装置(1)。 The inspection device (1) in which the cooling device (15) according to claims 1 to 4 is provided at a desired position in the housing (2).
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