JP6977557B2 - Inspection equipment - Google Patents

Description

The present invention relates to an inspection device such as a photomask.

If the photomask has defects such as foreign matter, it hinders the exposure, so the photomask is visually inspected for defects such as foreign matter in advance. In the visual inspection, the inspection is performed based on the photographed image of the photomask, but in a normal inspection device, the pattern forming surface of the photomask may be turned up when the photomask is transported by the SMIF (Standard Mechanical Interface) pod. , The specifications are such that the pattern forming surface (hereinafter sometimes referred to as the inspection surface) is photographed with a camera from above the photomask.

However, this specification causes a problem of dust falling from the camera or the like located at the upper part to the inspection surface of the photomask. In addition, air conditioning is performed by downflow in the inspection device to maintain cleanliness, but static electricity is generated because the downflow air hits the inspection surface of the photomask from above, and there is a risk of electrostatically adsorbing dust. ..

On the other hand, there is an example in which the side side of the photomask is held by a holder, the inspection surface is placed facing downward, and the photograph is taken from below with a camera (JP2012-208185). In this case, dust can be prevented from falling on the inspection surface of the photomask from the camera or the like, and electrostatic adsorption of dust can be suppressed because air does not directly hit the inspection surface.

FIG. 25 is an example of an inspection device 100 for photographing the inspection surface of a photomask from below. In the inspection device 100, a robot room 300 provided with a robot 500 for transporting a photomask and an inspection room 400 provided with a photomask inspection machine 600 are arranged adjacent to each other. The inspection device 100 is provided in the clean room 800.

The inspection machine 600 is arranged on the vibration isolation table 700. In the inspection machine 600, the side side of the photomask (not shown) is held by the holder 601 and arranged with the inspection surface facing downward, and the inspection surface is photographed by the lower camera 602.

The robot room 300 and the inspection room 400 are connected by an opening (passing port) 302, and the inspection room 400 is connected to the clean room 800 through the opening 402. Blowers 301 and 401 made of FFUs (Fan Filter Units) are provided on the ceilings of the robot chamber 300 and the inspection chamber 400, whereby air forming a downflow is sent out. Further, in order to eliminate static electricity, ionizers 303 and 304 are provided near the upper wall of the robot room 300, and ionizers 403 and 404 are provided near the upper wall of the inspection room 400.

The air forming the downflow sent out into the inspection chamber 400 generates a rotating flow that entrains the airflow below the outer edge of the holder 601. Therefore, dust may stay in the vicinity of the inspection surface of the photomask, and the inspection surface may be contaminated. In (JP2012-208185), the inspection surface of the photomask is covered with a transparent protective member for shooting, but even in this case, there is a possibility that a problem may occur during shooting due to dust adhering to the protective member.

Further, in the inspection device 100 of FIG. 25, an air flow as shown by an arrow is generated in the robot chamber 300 and the inspection chamber 400. In this example, low-clean air containing dust moves from the lower part of the robot chamber 300 to the inspection chamber 400 through the opening (passage port) 302, which may cause contamination of the inspection surface of the photomask. Further, in the inspection room 400, an air flow that stays in the vicinity of the ionizer 404 on the opening 42 side is also generated, and the cleanliness in the vicinity of the ionizer 404 tends to decrease.

The present invention has been made in consideration of the above points, and an object of the present invention is to provide an inspection device capable of effectively avoiding contamination of an inspection target.

Another object of the present invention is to provide an inspection device that avoids contamination of the inspection target due to dust falling from a camera or the like and electrostatic adsorption, and prevents dust from accumulating in the vicinity of the inspection surface.

The present invention for solving the above-mentioned problems is provided with a camera for photographing the inspection target from below, a moving stage for determining the imaging position of the inspection target, and a side of the inspection target provided above the moving stage. It is provided with an inspection room in which an inspection machine having a side is held, and a blower portion for sending downward airflow is provided at the upper part of the inspection room, and the moving stage has an opening on the upper surface. The inspection apparatus is covered with a cover, and the opening edge of the cover is located inside the outer edge of the holder, at least in part.

In the present invention, according to the above configuration, the inspection surface to be inspected can be photographed from below with a camera to prevent dust from the camera and contamination due to electrostatic adsorption of dust, and an airflow from the vicinity of the outer edge of the holder toward the inside of the cover. As a result, the dust below the outer edge of the holder can be caught and flowed into the cover, and the accumulation of dust in the vicinity of the inspection surface to be inspected can be prevented. In addition, it is possible to prevent dust generated when the moving stage is moved from being scattered in the inspection room.

It is desirable that the inside of the cover is exhausted. In addition, it is desirable that the exhaust in the cover discharges the dust in the cover to the outside of the clean room in which the inspection device is arranged. This makes it possible to reliably generate the above airflow. In addition, dust inside the cover can be suitably discharged to the outside of the clean room. Dust that can be generated from the drive unit and wiring of the inspection machine is less clean than dust generated from other parts, so if it is released into a clean room, it will indirectly contaminate the inspection target such as a photomask. , It is desirable to discharge directly to the outside of the clean room as described above.

It is desirable that a robot room is further provided, which communicates with the inspection room through an opening (passing port) and in which a robot for transporting the inspection target is arranged, and an opening is provided in the lower part of the robot room. This makes it possible to prevent air containing dust from moving from the lower part of the robot room to the inspection room.

It is desirable that the height position of the lower edge of the opening is below the holder. As a result, the downflow airflow can be secured even in the vicinity of the inspection machine, and the airflow from the vicinity of the outer edge of the holder toward the inside of the cover can be reliably generated.

It is desirable that the stage of the robot be covered with a cover having an opening on the upper surface. This makes it possible to suitably prevent the diffusion of dust that may be generated from the robot.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide an inspection device that avoids contamination of an inspection target due to dust falling from a camera or the like or electrostatic adsorption, and prevents dust from staying in the vicinity of the inspection surface.

The second inspection device according to the present invention is
Inspection machine and
A blower, which is located above the inspection machine and forms a downward airflow, is provided.
The inspection machine is
A holder that holds the inspection target and
A camera that captures the inspection target and
A moving stage that is connected to one of the holder and the camera and moves relative to the holder and the other of the camera together with the holder and the one of the cameras.
It has a cover that separates the moving stage from the holder.

According to the second inspection device according to the present invention, the diffusion of dust generated from the moving stage, which is a movable portion, can be prevented by the cover. This makes it possible to effectively prevent dust from adhering to the inspection target held in the holder.

In the second inspection device according to the present invention, an opening may be formed at a position facing the inspection target held by the holder or the holder of the cover.

In the second inspection apparatus according to the present invention
The moving stage and the cover are arranged below the holder.
An opening is formed at a position facing the holder of the cover or the inspection target held by the holder from below.
At least in part, the open edge of the cover may be located inside the outer edge of the holder.
According to such an inspection device, the airflow from the vicinity of the outer edge of the holder toward the inside of the cover can entrain the dust below the outer edge of the holder and flow it into the cover, and the dust near the inspection surface to be inspected. Can be effectively prevented from staying.

In the second inspection device according to the present invention, the exhaust inside the cover may be performed. According to such an inspection device, it is possible to more reliably prevent the diffusion of dust generated from the moving stage, which is a movable portion.

In the second inspection device according to the present invention, the dust in the cover may be discharged to the outside of the clean room in which the inspection device is housed by the exhaust gas in the cover. According to such an inspection device, it is possible to more reliably prevent dust from adhering to the inspection target by being discharged to the outside of the clean room.

The second inspection device according to the present invention may further include an ionizer provided in the inspection chamber accommodating the inspection machine. According to such an inspection device, static electricity can be removed from the inspection room, and dust can be effectively prevented from adhering to the inspection target due to static electricity.

The second inspection device according to the present invention may further include a straightening vane provided in the inspection chamber accommodating the inspection machine and connected to the outlet of the blower. According to such an inspection device, it is possible to effectively prevent the retention of air in the inspection room, and it is possible to effectively avoid a local decrease in cleanliness in the inspection room.

In the second inspection apparatus according to the present invention, an inspection room exhaust port leading to the outside of the inspection room is provided on the wall partitioning the inspection room accommodating the inspection machine, and the lower edge of the inspection room exhaust port is provided. The height position may be equal to or lower than the holder. According to such an inspection device, it is possible to effectively prevent the accumulation of dust in the inspection room and the adhesion of dust to the inspection target.

In the second inspection apparatus according to the present invention, the inspection chamber opening may be connected to the suction means. According to such an inspection device, it is possible to effectively prevent the accumulation of dust in the inspection room and the adhesion of dust to the inspection target.

In the second inspection apparatus according to the present invention, a passage port for transporting the inspection target to the inspection machine in the inspection room is provided on a wall partitioning an inspection room for accommodating the inspection machine, and the passage is provided. The height position of the lower edge of the mouth may be equal to or lower than the holder. According to such an inspection device, it is possible to effectively prevent the accumulation of dust in the inspection room and the adhesion of dust to the inspection target. In addition, it is possible to prevent the inflow of dust from the robot room to the inspection room.

The second inspection device according to the present invention is
The inspection machine is further equipped with a robot for transporting the inspection target.
The inspection machine is housed in the inspection room and is housed in the inspection room.
The robot is provided in a robot room which is connected to the inspection room through a passage port.
A robot room exhaust port leading to the outside of the robot room is provided on the wall that divides the robot room.
The height position of the lower edge of the robot chamber exhaust port may be set to be equal to or lower than the holder.
According to such an inspection device, it is possible to effectively prevent the accumulation of dust in the robot room and the adhesion of dust to the inspection target.

In the second inspection device according to the present invention, the robot chamber exhaust port may be connected to the suction means. It is possible to effectively prevent the accumulation of dust in the robot room and the adhesion of dust to the inspection target.

The second inspection device according to the present invention further comprises a robot for transporting the inspection target to the inspection machine.
The inspection machine is housed in the inspection room and is housed in the inspection room.
The robot is provided in a robot room which is connected to the inspection room through a passage port.
A robot room exhaust port leading to the outside of the robot room is provided on the wall that divides the robot room.
The robot chamber exhaust port may be provided at a position deviated from the position facing the passage port.
According to such an inspection device, it is possible to effectively prevent the generation of airflow flowing through both the exhaust port and the passage port of the robot chamber. Therefore, it is possible to effectively prevent dust outside the inspection device from passing through the robot room and flowing into the inspection room not only during the operation of the inspection device but also during non-operation of the inspection device such as maintenance.

The second inspection device according to the present invention is
The inspection machine is further equipped with a robot for transporting the inspection target.
The robot
An arm that holds the inspection target and
A drive stage that connects to the arm and drives the arm,
It may have a robot cover that separates the drive stage from the arm.
According to such an inspection device, the diffusion of dust generated from the drive stage, which is a movable portion, can be prevented by the robot cover. As a result, it is possible to effectively prevent dust from adhering to the inspection target held by the arm.

In the second inspection apparatus according to the present invention
The drive stage and the robot cover are arranged below the arm.
An opening is formed in the upper surface of the robot cover facing the arm.
At least in part, the open edge of the robot cover may be located inside the outer edge of the arm.
According to such an inspection device, the airflow from the vicinity of the outer edge of the arm toward the inside of the robot cover can entrain the dust below the outer edge of the arm and flow it into the robot cover, and in the vicinity of the inspection surface to be inspected. It is possible to prevent the accumulation of dust.

In the second inspection device according to the present invention, the inside of the robot cover may be exhausted. According to such an inspection device, it is possible to more reliably prevent the diffusion of dust generated from the drive stage, which is a movable portion.

In the second inspection device according to the present invention, the dust in the robot cover may be discharged to the outside of the clean room in which the inspection device is housed by the exhaust in the robot cover. According to such an inspection device, it is possible to more reliably prevent dust from adhering to the inspection target by being discharged to the outside of the clean room.

The second inspection device according to the present invention may further include an ionizer provided in the robot chamber for accommodating the robot. According to such an inspection device, it is possible to eliminate static electricity in the robot room and effectively prevent dust from adhering to the inspection target due to static electricity.

The second inspection device according to the present invention may further include a straightening vane provided in the robot chamber accommodating the robot and connected to the outlet of the air blower. According to such an inspection device, it is possible to effectively prevent the retention of air in the robot room, and it is possible to effectively avoid a local decrease in cleanliness in the robot room.

In the second inspection device according to the present invention, the holder may hold the inspection target so that the inspection surface photographed by the camera to be inspected faces downward. According to such an inspection device, it is possible to effectively prevent contamination due to dust fall and electrostatic adsorption of dust.

In the second inspection apparatus according to the present invention, the holder may hold the inspection target so that the inspection surface photographed by the camera to be inspected faces sideways. According to such an inspection device, it is possible to effectively prevent contamination due to dust fall and electrostatic adsorption of dust.

The third inspection device according to the present invention is
An inspection room that houses an inspection machine that inspects the inspection target,
An inspection device including a robot room containing a robot for transporting the inspection target in the inspection machine.
A passage port through which the inspection object conveyed to the inspection machine by the robot passes is provided on the wall separating the inspection room and the robot room.
A robot room exhaust port leading to the outside of the robot room is provided on the wall that divides the robot room.
The robot chamber exhaust port is provided at a position deviated from the position facing the passage port.

According to the third inspection device according to the present invention, it is possible to effectively prevent the generation of airflow flowing through both the robot chamber exhaust port and the ventilation port. Therefore, it is possible to effectively prevent dust outside the inspection device from passing through the robot room and entering the inspection room not only during the operation of the inspection device but also during non-operation of the inspection device such as maintenance.

The fourth inspection device according to the present invention is
An inspection machine that inspects the inspection target and
A robot that conveys the inspection target to the inspection machine,
It is provided with a blower unit that is arranged above the inspection machine and the robot and forms a downward air flow.
The robot
An arm that holds the inspection target and
A drive stage that connects to the arm and drives the arm,
It has a robot cover that partitions the drive stage from the arm.

According to the third inspection device according to the present invention, the diffusion of dust generated from the drive stage, which is a movable portion, can be prevented by the robot cover. As a result, it is possible to effectively prevent dust from adhering to the inspection target held by the arm.

It is a figure for demonstrating one Embodiment by this invention, and is the top view which shows the inspection apparatus. A side view showing an inspection device. Top view showing the inspection machine. A side view showing an inspection machine. Side view showing the inspection machine. The figure which shows the flow of the whole air in a robot room and an inspection room. FIG. 3 is a plan view corresponding to FIG. 3 and showing a modified example of the inspection machine. It is a figure corresponding to FIG. 5, and is the side sectional view which shows one modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing another modification of the inspection machine. FIG. 3 is a plan view corresponding to FIG. 3 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 3 is a plan view corresponding to FIG. 3 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. FIG. 5 is a side sectional view corresponding to FIG. 5 and showing still another modification of the inspection machine. The side view which shows the further modification example of an inspection machine. A side sectional view showing still another modification of the inspection machine. The figure which shows the cover of a robot. The figure which shows the inspection apparatus.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

(1. Inspection device 1)
FIG. 1 is a diagram showing a planar configuration of an inspection device 1 according to an embodiment of the present invention. The inspection device 1 shown in FIG. 1 is arranged in a clean room 8 equipped with an FFU (not shown) and has a SMIF case charging unit 2, a robot room 3, an inspection room 4, and the like. FIG. 2 is a diagram showing a robot chamber 3 and an inspection chamber 4 of the inspection device 1.

The SMIF case loading unit 2 is a space for arranging a transport SMIF pod (not shown) containing a photomask to be inspected. One or more photomasks are housed in the SMIF pod with the pattern forming surface facing up.

The robot chamber 3 communicates with the inspection chamber 4 through the opening (passage port) 32. In the robot room 3, a robot 5 for transporting a photomask is arranged. The robot 5 receives the SMIF pod from the SMIF case loading unit 2, takes out one photomask inside, turns the photomask upside down, and enters the inspection room 4 with the pattern forming surface to be inspected facing down. It is transported and placed in the holder of the inspection machine 6 described later. Further, the robot 5 takes out the photomask after the inspection from the holder, turns the photomask upside down, conveys it to the robot chamber 3 with the pattern forming surface facing up, and stores it in the SMIF pod.

As shown in FIG. 2, in the upper part of the robot chamber 3, an FFU 31 (blower) is provided on the ceiling, whereby clean air is sent out as a downflow (downward airflow). Further, in order to eliminate static electricity, ionizers 33 and 34 are provided near the wall at the upper part of the robot chamber 3. In addition, in the present embodiment, an opening (robot chamber exhaust port) 35 is provided on the lower side surface of the wall that partitions the robot chamber 3. The robot chamber exhaust port 35 leads to the outside of the inspection chamber 1, and exhaust is performed from this opening into the clean room 8. It should be noted that the suction means is connected to the robot chamber exhaust port 35, or the robot chamber exhaust port 35 is formed as a suction opening of the suction means so that the atmosphere in the robot chamber 3 is forcibly exhausted. good. Further, the robot chamber 3 is provided with a straightening vane 36. The straightening vane 36 is connected to the outlet 31a of the blower portion 31 provided above the robot chamber 3. The straightening vane 36 promotes the formation of downflow in the robot chamber 3 without causing air retention in the robot chamber 3.

In the inspection room 4, the photomask inspection machine 6 is arranged on the vibration isolation table 7. The inspection machine 6 photographs the pattern-forming surface of the photomask, and inspects the appearance of the photomask based on the captured image. The specific inspection method is not particularly limited, and various known methods can be used.

In the upper part of the inspection room 4, as in the robot room 3, an FFU 41 (blower) is provided on the ceiling, whereby clean air is sent out as a downflow (downward airflow). An opening (inspection room exhaust port) 42 is provided on the side surface of the wall that divides the inspection room 4. The inspection room exhaust port 42 leads to the outside of the inspection device 1, and exhaust air is performed from the opening 42 into the clean room 8. It should be noted that the suction means is connected to the inspection room exhaust port 42, or the inspection room exhaust port 42 is formed as a suction opening of the suction means so that the atmosphere in the inspection room 4 is forcibly exhausted. good. Further, rectifying plates 45 and 46 extending downward from the ceiling are provided near the wall on the opening 42 side of the inspection room 4. The straightening vanes 45 and 46 are connected to the outlet 41a of the blower portion 41 provided above the inspection chamber 4. The straightening vanes 45 and 46 promote the formation of downflow in the inspection chamber 4 without causing air retention in the inspection chamber 4. In the example of FIG. 2, the lower end of the straightening vane 45 is in contact with the wall surface of the inspection chamber 4 on the opening 32 side, but it may be separated from the wall surface, and the lower end of the straightening vane 46 is the opening of the inspection chamber 4. Although it is in contact with the wall surface on the portion 42 side, it may be separated from the wall surface.

Ionizers 43 and 44 for static elimination are also provided in the inspection room 4. The ionizer 43 is arranged near the wall on the opening 32 side of the upper part of the examination chamber 4, and the ionizer 44 is arranged on the FFU 41 side of the upper part of the straightening vane 44.

(2. Inspection machine 6)
3 and 4 are views showing the inspection machine 6. FIG. 3 is a view of the inspection machine 6 as viewed from above, and FIG. 4 is a view of the inspection machine 6 as viewed from the direction indicated by the arrow A in FIG.

The inspection machine 6 has a cover 60, an X stage 61, a Y stage 62, a θ stage 63, a camera 64, a holder 65, a clamp 67, and the like. In FIGS. 2 to 4, the shaded portion is a portion covered with the cover 60, and FIGS. 2 to 4 show the components inside the cover 60 for explanation. The handling of the shaded portion is the same in FIGS. 6, 7, 10, and 15 which will be referred to later.

The X stage 61, the Y stage 62, and the θ stage 63 are moving stages for determining the shooting position of the photomask 10, and in the present embodiment, the position of the holder 65, which will be described later, is moved. In the illustrated example, these stages are arranged on top of each other in the order of X stage 61, Y stage 62, and θ stage 63.

The X stage 61 can be moved in the left-right direction in FIG. 3 by a drive unit (not shown).

The Y stage 62 can be moved in the vertical direction in FIG. 3 by a drive unit (not shown).

The θ stage 63 is rotated in the plane of FIG. 3 by a drive unit (not shown).

The camera 64 is a photographing device that photographs the pattern-forming surface of the photomask 10. In the present embodiment, the camera 64 photographs the pattern forming surface of the photomask 10 from below. A hole is provided at a position corresponding to the camera 64 in the X stage 61, the Y stage 62, and the θ stage 63, and the camera 64 is directly fixed to the vibration isolation table 7 by using the hole (see FIG. 5 described later). ).

The holder 65 is provided above the above-mentioned moving stages (X stage 61, Y stage 62, θ stage 63). The holder 65 is a plate material having a U-shaped flat surface, on which a photomask 10 is arranged and a side surface is held. Inside the holder 65, claws 651 protruding into the plane surrounded by a U-shape are provided on three sides, and these claws 651 hold the three sides of the rectangular plate-shaped photomask 10. The remaining side is held by the claw 671 attached to the clamp 67. The inside of the holder 65 means the side close to the photomask 10. Further, in the present embodiment, the photomask 10 is arranged in the holder 65 with the pattern forming surface (inspection surface) of the photomask 10, that is, the surface photographed by the camera 65 facing downward.

The holder 65 is supported on the θ stage 63 by the legs 66. That is, the leg portion 66 connects the holder 65 and the θ stage 63. As shown in FIG. 3, the legs 66 are arranged in the holder 65 at positions corresponding to both corners and both ends of the U-shape.

In the present embodiment, a box-shaped cover 60 is provided so as to cover the X stage 61, the Y stage 62, and the θ stage 63, and the diffusion of dust that may be generated from the drive unit or the like is prevented. That is, the cover 60 covers the moving stages 61, 62, 63 and separates the moving stages 61, 62, 63 from the holder 65. An opening is provided on the upper surface of the cover 60. The opening of the cover 60 faces the holder 65 and the photomask along the normal direction to the inspection surface of the photomask 10 held by the holder 65. In the illustrated example, the opening of the cover 60 faces the holder 65 and the photomask from below in the vertical direction. The position of the opening edge of this opening is shown in FIG. 360a. The planar shape of the opening is defined so as to prevent the legs 66 and the like from coming into contact with the cover 60 when each stage is moved, and although it is rectangular in the example shown in FIG. 3, it is shown in the figure. Not limited to the example, various shapes such as a T-shape can be taken.

FIG. 5 is a vertical sectional view of the inspection machine 6 along the line BB of FIG. As shown in FIG. 5, in the present embodiment, at least in a part, the opening edge 60a of the cover 60 is located inside the outer edge 65a of the holder 65.

In the example of FIG. 5, the opening edge 60a of the cover 60 is located inside the outer edge 65a of the holder 65 by a distance D, and the direction connecting the opening edge 60a and the outer edge 65a of the holder 65 is an inclination angle α with respect to the horizontal direction. It is tilted at.

Further, the inside of the cover 60 is connected to the outside of the clean room 8 through a pipe body 68 (see FIG. 3 and the like) such as a duct, and the air in the cover 60 is sent to the outside of the clean room 8 by an exhaust means (not shown) such as a pump. It is designed to be exhausted directly.

With such a configuration, in the present embodiment, with respect to the downflow air sent from the FFU 41, the airflow from the vicinity of the outer edge 65a of the holder 65 to the inside of the cover 60 as shown by the dotted line arrow in FIG. 5 is in the vicinity of the inspection machine 6. The dust that is below the outer edge 65a of the holder 65 is caught in the dust and flows into the cover 60, and can be discharged to the outside of the clean room 8 as it is. In order to suitably generate the above-mentioned airflow, it is preferable to set the inclination angle α to be approximately 50 degrees or more and 80 degrees or less, although it depends on the design of the device, the equipment environment, and the like.

(3. Air flow in the robot room 3 and the inspection room 4)
FIG. 6 is a diagram showing the entire air flow in the robot chamber 3 and the inspection chamber 4 with arrows.

As described above, in the present embodiment, even if dust is present below the outer edge 65a of the holder 65, the dust flows into the cover 60 by the air flow described with reference to FIG. It is discharged from the inside to the outside of the clean room 8 (see arrow C).

In addition to this, in the present embodiment, the robot chamber exhaust port 35 having an opening on the lower side surface of the robot chamber 3 is provided to control the downflow air volume by the FFU 31, 41, etc. and the air pressure of the robot chamber 3, the inspection chamber 4, and the clean room 8. By adjusting, instead of going from the robot room 3 to the inspection room 4 as shown in FIG. 25 above, the robot room 4 goes to the robot room 3 and is discharged from the robot room exhaust port 35 into the clean room 8 ( (Refer to arrow D) Generates air flow.

As a result, low-clean air containing dust does not move from the lower part of the robot chamber 3 to the inspection chamber 4 and cause contamination of the inspection surface of the photomask 10. Regarding the adjustment of the air volume and the atmospheric pressure for realizing such an air flow, it is preferable to set the magnitude of the down flow air volume and the atmospheric pressure in the order of inspection room 4 ≧ robot room 3> clean room 8. Regarding the adjustment of the air volume and the like, it is also possible to respond to changes in the positive pressure environment of the clean room 8 by using a pressure sensor (not shown) provided at an appropriate position in the inspection device 1 or the clean room 8. It is also possible to control the air volume by the shape of the opening (robot room exhaust port) 32 and the opening (inspection room exhaust port) 42.

Further, in the present embodiment, the amount of air discharged from the inspection room 4 to the clean room 8 through the opening 42 is made larger than the amount of air flowing from the inspection room 4 to the robot room 3 through the opening 32, so that the inspection room 4 is used. The dust inside is discharged to the clean room 8 side as much as possible to improve the cleanliness of the entire inside of the inspection device 1. The difference between the two air volumes can be controlled from the atmospheric pressure difference by using a differential pressure gauge or the like provided at an appropriate position in the inspection device 1 or the clean room 8, and can also be controlled according to extrinsic factors such as the equipment environment and operating conditions. .. Further, control can be performed from the air volume of FFU 31, 41 or the like, and the air volume flowing through the openings 32, 42 may be directly measured and used for control.

In this embodiment, the straightening vanes 36, 45, 46 eliminate the airflow that stays in the vicinity of the ionizers 34, 43, 44 as described in FIG. 25, and the cleanliness in the vicinity of the ionizers 34, 43, 44 is also improved. ing.

Further, in the present embodiment, the height position of the lower edge of the openings (passing port 32, robot room exhaust port 35, inspection room exhaust port 42) is the holder 65 or less. This is because when the lower edges of the openings 32, 35, and 42 are above the holder 65, the downflow flow near the inspection machine 6 is weakened, the possibility of contamination of the inspection surface of the photomask 10 is increased, and the opening is opened. This is because there is also a risk of contamination from 32, 35, 42.

Further, as shown in FIG. 1, the robot chamber exhaust port 35 is provided at a position deviated from the position facing the passing port 32. That is, the robot chamber exhaust port 35 is not arranged at a position facing the passage port 32 along the normal direction of the wall on which the passage port 32 is formed. In the illustrated example, the wall on which the robot chamber exhaust port 35 is formed is connected perpendicularly to the wall on which the passage port 32 is formed. According to this example, it is possible to effectively prevent the generation of airflow flowing through both the robot chamber exhaust port 35 and the passage port 32. Therefore, it is possible to effectively prevent external dust from flowing into the inspection room 4 not only during the operation of the inspection device 1 but also during the non-operation of the inspection device 1 such as maintenance.

As described above, according to the present embodiment, the inspection surface of the photomask 10 can be photographed from below by the camera 64 to prevent dust from the camera and contamination due to electrostatic adsorption of dust, and the outer edge 65a of the holder 65 can be prevented. The airflow from the vicinity toward the inside of the cover 60 can entrain the dust below the outer edge 65a of the holder 65 and flow it into the cover 60, and can prevent the dust from staying in the vicinity of the inspection surface of the photomask 10. With such a device configuration, the inspection surface to be inspected can be prevented from dust by the above measures, and the back surface of the inspection surface is also kept clean by FFU41, so that the cleanliness of both sides of the inspection target is maintained. Become. Therefore, the apparatus configuration of the present embodiment enables both transmission type inspection and reflection type inspection while maintaining a clean state, and the range of inspection application is expanded.

Further, the cover 60 also has an advantage of preventing dust generated from the drive unit, wiring, and the like of the X stage 61, the Y stage 62, and the θ stage 63 from being scattered in the inspection chamber 4.

Further, in the present embodiment, by exhausting the inside of the cover 60, the above-mentioned airflow can be surely generated, and the dust in the cover 60 can be suitably discharged to the outside of the clean room 8. Dust that can be generated from the drive unit, wiring, etc. of the inspection machine 6 is less clean than dust that is generated from other parts, so if it is released into the clean room 8, it will indirectly contaminate the inspection target such as a photomask. Therefore, the above mechanism is used to separately discharge directly to the outside of the clean room. By having such a mechanism, it is possible to inspect a general inspection device including a photomask inspection device installed in the clean room 8 without indirectly contaminating the inspection target.

Further, in the present embodiment, by providing the robot chamber exhaust port 35 having an opening on the lower side surface of the robot chamber 3, air containing dust moves from the lower portion of the robot chamber 3 or the like to the inspection chamber 4 as described above. It is possible to prevent contamination of the inspection surface of the photomask 10.

Further, in the present embodiment, by setting the height position of the lower edges of the openings 32, 35, 42 to the holder 65 or less, a downward airflow (downflow) is stably formed inside the inspection device 1. be able to. Therefore, the downflow airflow can be secured even in the vicinity of the inspection machine 6, and the airflow toward the inside of the cover 60 from the vicinity of the outer edge 65a of the holder 65 can be surely generated.

However, the present invention is not limited to this. It is possible to make various changes to the above-described embodiment. Hereinafter, an example of modification will be described with reference to the drawings. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding portions in the above-described embodiment are used for the portions that can be configured in the same manner as in the above-described embodiment, and duplicates thereof are used. The explanation to be done is omitted.

For example, various changes can be made to the configuration of the cover 60. In one embodiment described above, an example is shown in which all the legs (four legs) 66, the clamp 67 and the camera 64 pass through one opening formed in the cover 60. However, as shown in FIG. 8, for example, the plurality of legs (four legs) 66, the clamp 67, and the camera 64 may pass through different openings. In the example shown in FIG. 8, the cover 60 is formed with four openings. The opening edge 60a of each opening 60 is provided on the outer edge 60a of the opening through which the legs 66, the clamp 67, and the camera 64 passing through the opening when the camera 64 and the moving stages 61, 62, 63 move relative to each other. It is formed so that it does not come into contact with each other. Here, FIG. 8 is a cross-sectional view taken along the line EE of FIG. According to such an example, the opening area defined by the opening edge 60a of each opening does not need to be larger than necessary, and the area can be reduced. Therefore, the moving stages 61, 62, 63, which can be a source of dust and the like, can be effectively covered, and the diffusion of dust in the inspection chamber 3 can be effectively prevented.

Further, FIG. 9 is a cross-sectional view showing the inspection machine 6 with the same cross section as that of FIG. The example shown in FIG. 9 is a modification of the example shown in FIG. In the example shown in FIG. 9, the cover 60 further has a tubular portion 60b that laterally covers the camera 64. In the cover 60 shown in FIG. 9, an opening is formed at the upper end of the tubular portion 60b. The upper end of the tubular portion 60b is located above the upper end of the camera 64. That is, the camera 64 is laterally covered by the cover 60 over its entire length. Since the camera 64 generates heat during use, it is a portion where dust is easily adsorbed. By covering such a portion with the cover 60 and partitioning it from the holder 65, it is possible to effectively prevent the diffusion of dust into the examination room 3.

Another modification will be described with reference to FIGS. 10 to 14. The cover 60 is fixed on the vibration isolation table 7 in the above-described embodiment, but the cover 60 is not limited to this example. In the above-described embodiment, the holder 65 is moved with respect to the cover 60 by the operation of the moving stage. However, for example, in the example shown in FIGS. 10 to 14, the cover 60 does not move relative to the holder 65. According to such a modification, the opening area defined by the opening edge 60a of the opening can be reduced. Further, as shown in FIG. 10, the opening edge 60a of the cover 60 can be positioned inside the outer edge 65a of the holder 65 on the entire circumference thereof. This makes it possible to effectively prevent the retention of gas below the outer edge 65a of the holder 65.

Here, FIG. 10 is a view corresponding to FIG. 3 and is a plan view showing the inspection machine 6. 11 to 14 are side sectional views showing an inspection machine 6 in a cross section taken along the line FF of FIG. 10.

First, in the example shown in FIGS. 11 and 12, the cover 60 is fixed to the leg portion 66 connecting the moving stages 61, 62, 63 and the holder 65. In the examples shown in FIGS. 13 and 14, the cover 60 is fixed to the moving stages 61, 62, 63, in particular the θ stage 63. In the example shown in FIGS. 11 to 14, the cover 60 moves relative to the vibration isolation table 7 together with the holder 65 as the moving stage moves. Therefore, a gap is formed between the cover 60 and the vibration isolation table 7, and an air flow G that passes through the gap and goes into the cover 60 is formed. Further, in the examples shown in FIGS. 12 and 14, the cover 60 has a cylindrical portion 60b similar to the example shown in FIG. 9, and has the same operation as the example shown in FIG. The effect can be exerted by the tubular portion 60b.

As another modification, the moving stages 61, 62, 63 may drive the camera 64. In one embodiment described above, the holder 65 is moved with respect to the camera 64 by the operation of the moving stage, but the present invention is not limited to this, and the movements of the moving stages 61, 62, and 63 are not limited to this, for example, as shown in FIGS. 15 to 21. The camera 64 may be moved with respect to the holder 65. According to such a modification, the opening area defined by the opening edge 60a of the opening can be reduced. As shown in FIG. 15, it is also possible to position the opening edge 60a of the cover 60 inside the outer edge 65a of the holder 65 on all or most of its circumference. This makes it possible to effectively prevent the retention of gas below the outer edge 65a of the holder 65.

Here, FIG. 15 is a view corresponding to FIG. 3 and is a plan view showing the inspection machine 6. 16 to 21 are side sectional views showing the inspection machine 6 in the cross section taken along the line HH of FIG.

First, in the examples shown in FIGS. 16 and 17, the cover 60 is fixed to the vibration isolation table 7. Therefore, the vibration of the cover 60 itself can be effectively prevented, and the diffusion of dust can be suppressed. Next, in the example shown in FIGS. 18 to 21, the cover 60 moves with respect to the vibration isolation table 7 and the holder 65 together with the camera 64 by driving the moving stages 61, 62, 63. In the example shown in FIGS. 18 and 19, the cover 60 is fixed to the connecting member 64a that connects the moving stages 61, 62, 63 and the camera 64. In the examples shown in FIGS. 20 and 21, the cover 60 is fixed to the moving stages 61, 62, 63, in particular the θ stage 63. In the examples shown in FIGS. 18 to 21, a gap is formed between the cover 60 and the vibration isolation table 7, and an air flow I passing through the gap and toward the inside of the cover 60 is formed. Further, in the examples shown in FIGS. 17, 19 and 21, the cover 60 has a cylindrical portion 60b similar to the example shown in FIG. 9, and is the same as the example shown in FIG. The tubular portion 60b can exert the same effect. In the example shown in FIGS. 19 and 21, the cover 60 has a camera 64, a connecting member 64a, or a connecting member 60c connected to the stages 61, 62, 63 inside the cover 60. A hole 60d is formed in the connecting member 60c, and by passing through the hole 60d, the connection member 60c communicates from the opening of the cover 60 to the exhaust pipe (tube body) 68.

As another modification, the cover 60 can be applied to the inspection machine 6 in which the moving stages 61, 62, 63 and the holder 65 face each other in a direction other than the vertical direction. In the example shown in FIGS. 22 and 23, the holder 65 holds the photomask 10 so that the inspection surface faces in a direction non-parallel to the vertical direction. Specifically, in other words, in the examples shown in FIGS. 22 and 23, the holder 65 holds the photomask 10 so that the inspection surface faces the horizontal direction. In other words, the holder 65 holds the inspection surface of the photomask 10 along the vertical direction. The moving stages 61, 62, 63 and the cover 60 are arranged at positions facing the holder 65 from the horizontal direction. Here, FIG. 22 is a front view showing the inside of the inspection chamber 3 of the inspection device 1 from a horizontal direction, and FIG. 23 is a side sectional view taken along the line JJ of FIG. 22. According to the inspection machine 6 shown in FIGS. 22 and 23, the cover 60 can effectively prevent the diffusion of dust generated from the moving stages 61, 62, 63, as in the above-described embodiment. can. Further, the suction from the opening of the cover 60 can effectively prevent the gas from staying around the outer edge 65a of the holder 65. Further, the downflow (downward airflow) formed by the blower portion 41 can effectively prevent gas from staying around the holder 65 and around the photomask, and also on the photomask due to dust fall. It is possible to effectively prevent the accumulation of dust.

In the example shown in FIG. 23, the holder 65 is an L-shaped plate-shaped member facing the side edge of the photomask from below and from one side. The clamp 67 is located on the other side of the photomask. The claw 671 of the clamp 67 and the claw 651 of the holder 65 have recesses 69 that engage the side edges of the photomask.

Further, not only the inspection machine 6 but also the robot 5 can use the same cover as the cover 60. FIG. 24 is an example in which the cover (robot cover) 55 is provided on the robot 5, and covers the stage (drive stage) 52 in which the arm 51 and the like of the robot 5 are installed, and further covers the pillar portion 53 and the base portion 54 below the stage 52. As described above, a cover (robot cover) 55 having an opening on the upper surface is provided. The cover 55 prevents the diffusion of dust that may be generated from the drive unit or the like of the robot 5. Further, it is also possible to exhaust the inside of the cover 55 in the same manner as the cover 60 and directly discharge the dust in the cover 55 to the outside of the clean room 8, and the same effect as described above can be obtained.

Further, although the inspection machine 6 of the present embodiment inspects the photomask 10, the inspection target may be other than the photomask, and in this case as well, it is possible to prevent contamination of the inspection surface of the inspection target. be.

Although some modifications to the above-described embodiment have been described above, it is naturally possible to apply a plurality of modifications in combination as appropriate.

Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to these examples. It is clear that a person skilled in the art can come up with various modified or modified examples within the scope of the technical idea disclosed in the present application, and these also naturally belong to the technical scope of the present invention. Understood.

Claims (24)

A camera that is placed facing the inspection target from below and shoots the inspection target from below,
A moving stage for determining the shooting position of the inspection target, and
A holder provided above the moving stage and holding the side surface of the inspection target,
Equipped with an inspection room where an inspection machine with
The moving stage includes a stage that moves linearly in one direction.
An air blower that sends out an air flow downward is provided at the upper part of the inspection room.
The moving stage is covered with a cover having an opening on the upper surface.
The opening of the cover opens toward the inspection target,
At least in part, the open edge of the cover is located inside the outer edge of the holder.
At least a portion of the camera is located within the cover
The inside of the cover is exhausted ,
An inspection device characterized in that the cover and the holder move relative to the camera as the moving stage moves. The inspection device according to claim 1, wherein the dust in the cover is discharged to the outside of the clean room in which the inspection device is arranged by the exhaust gas in the cover. Further provided is a robot room in which a robot for transporting the inspection target is arranged so as to communicate with the inspection room through an opening.
The inspection device according to claim 1 or 2, wherein an opening is provided in the lower portion of the robot chamber. The inspection device according to claim 3, wherein the height position of the lower edge of the opening is lower than that of the holder. The inspection device according to claim 3 or 4, wherein the stage of the robot is covered with a cover having an opening on the upper surface. Inspection machine and
A blower, which is located above the inspection machine and forms a downward airflow, is provided.
The inspection machine is
A holder that holds the inspection target and
A camera that captures the inspection target and
A moving stage that is connected to one of the holder and the camera and moves linearly relative to the holder and the other of the camera together with the holder and the other of the cameras.
It has a cover that covers the moving stage and partitions the moving stage from the holder.
An opening is formed in the cover at a position facing the holder or the inspection target held by the holder.
The camera is at least partially located within the cover.
The inside of the cover is exhausted ,
An inspection device in which the cover and the holder move relative to the camera as the moving stage moves. The moving stage and the cover are arranged below the holder.
An opening is formed at a position facing the holder of the cover or the inspection target held by the holder from below.
The inspection device according to claim 6, wherein the opening edge of the cover is located inside the outer edge of the holder, at least in part. The inspection device according to claim 6 or 7, wherein the dust in the cover is discharged to the outside of the clean room in which the inspection device is housed by the exhaust gas in the cover. The inspection device according to claim 6, further comprising an ionizer provided in an inspection chamber accommodating the inspection machine. The inspection device according to claim 6, further comprising a straightening vane provided in an inspection chamber accommodating the inspection machine and connected to an outlet of the blower portion. An inspection room exhaust port leading to the outside of the inspection room is provided on the wall that divides the inspection room that houses the inspection machine.
The inspection device according to claim 6, wherein the height position of the lower edge of the inspection chamber exhaust port is equal to or lower than the holder. The inspection device according to claim 11 , wherein the inspection room exhaust port is connected to a suction means. A passage port for transporting the inspection target to the inspection machine in the inspection room is provided on the wall partitioning the inspection room for accommodating the inspection machine.
The inspection device according to claim 6, wherein the height position of the lower edge of the passage port is equal to or lower than the holder. The inspection machine is further equipped with a robot for transporting the inspection target.
The inspection machine is housed in the inspection room and is housed in the inspection room.
The robot is provided in a robot room which is connected to the inspection room through a passage port.
A robot room exhaust port leading to the outside of the robot room is provided on the wall that divides the robot room.
The inspection device according to claim 6, wherein the height position of the lower edge of the robot chamber exhaust port is equal to or lower than the holder. The inspection device according to claim 14 , wherein the robot chamber exhaust port is connected to a suction means. The inspection machine is further equipped with a robot for transporting the inspection target.
The inspection machine is housed in the inspection room and is housed in the inspection room.
The robot is provided in a robot room which is connected to the inspection room through a passage port.
A robot room exhaust port leading to the outside of the robot room is provided on the wall that divides the robot room.
The inspection device according to claim 6, wherein the robot chamber exhaust port is provided at a position deviated from a position facing the passage port. The inspection machine is further equipped with a robot for transporting the inspection target.
The robot
An arm that holds the inspection target and
A drive stage that connects to the arm and drives the arm,
The inspection device according to claim 6, further comprising a robot cover for partitioning the drive stage from the arm. The drive stage and the robot cover are arranged below the arm.
An opening is formed in the upper surface of the robot cover facing the arm.
17. The inspection device according to claim 17, wherein the opening edge of the robot cover is located inside the outer edge of the arm, at least in part. The inspection device according to claim 18 , wherein the inside of the robot cover is exhausted. The inspection device according to claim 19 , wherein the dust in the robot cover is discharged to the outside of the clean room in which the inspection device is housed by the exhaust gas in the robot cover. The inspection device according to claim 17 , further comprising an ionizer provided in a robot room for accommodating the robot. The inspection device according to claim 17 , further comprising a straightening vane provided in a robot room for accommodating the robot and connected to an outlet of the air blower. The inspection device according to any one of claims 6 to 22, wherein the holder holds the inspection target so that the inspection surface photographed by the camera to be inspected faces downward. The inspection device according to any one of claims 6 to 22, wherein the holder holds the inspection target so that the inspection surface photographed by the camera to be inspected faces sideways.

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