JP6952627B2 - Board storage container unlock mechanism - Google Patents

Board storage container unlock mechanism Download PDF

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JP6952627B2
JP6952627B2 JP2018042615A JP2018042615A JP6952627B2 JP 6952627 B2 JP6952627 B2 JP 6952627B2 JP 2018042615 A JP2018042615 A JP 2018042615A JP 2018042615 A JP2018042615 A JP 2018042615A JP 6952627 B2 JP6952627 B2 JP 6952627B2
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storage container
slide
unlocking
substrate storage
base plate
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JP2019160894A (en
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森田　泰史
泰史 森田
濱田　浩三
浩三 濱田
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JEL Corp
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JEL Corp
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Priority to KR1020180081621A priority patent/KR102148565B1/en
Priority to CN201810788930.6A priority patent/CN110239832B/en
Priority to TW107127356A priority patent/TWI662642B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D55/00—Accessories for container closures not otherwise provided for
    • B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Description

本発明は基板収納容器のロック解除機構に係り、半導体ウエハ等の基板を複数枚積層して運搬可能な基板収納容器のロック機構解除機構に関する。 The present invention relates to an unlocking mechanism for a substrate storage container, and relates to an unlocking mechanism for a substrate storage container capable of stacking and transporting a plurality of substrates such as semiconductor wafers.

半導体ウエハ等の基板を複数枚積層して容器本体内に収容し、蓋をしてロックした状態で運搬するための基板収納容器として、特許文献１に開示された半導体ウエハー収納容器（以下、基板収納容器と記す。）が知られている。この基板収納容器において、特許文献１の添付図に示されたように、容器本体に被せた蓋体３をロック状態にするには、平面視して略四角形状からなる底面板の隅角部に立設された係止片９の上端の係止爪８を蓋体３に形成された係止穴１５の周囲の蓋体上面板１３上面部に係止させようになっている。 A semiconductor wafer storage container (hereinafter referred to as a substrate) disclosed in Patent Document 1 as a substrate storage container for stacking a plurality of substrates such as semiconductor wafers, accommodating them in the container body, and transporting them in a locked state with a lid. It is referred to as a storage container.) In this substrate storage container, as shown in the attached drawing of Patent Document 1, in order to lock the lid 3 covered on the container body, a corner portion of a bottom plate having a substantially quadrangular shape in a plan view is required. The locking claw 8 at the upper end of the locking piece 9 erected in the lid 3 is locked to the upper surface of the lid upper surface plate 13 around the locking hole 15 formed in the lid 3.

特開２００４−４３００１号公報Japanese Unexamined Patent Publication No. 2004-43001

特許文献１に開示された基板収納容器は、従来の基板収納容器で採用されていたような、蓋体を回転させて開閉させる構造に比べて、優れたロック機構を有しているが、上述した係止爪を外して蓋体のロック状態を解除する手段は示されていない。この種の基板収納容器は、処理前の基板を連続的に取り出してカセット等に移し替え、また半導体製造装置で所定の処理が施された基板をカセット等から基板収納容器に移し替える基板移載装置に利用することも想定されている。移載の一連の連続作業を、制御された基板搬送ロボットを利用して行う移載装置内においては、上述した基板収納容器のロック機構の解除動作および蓋の開閉動作を自動的に行う必要がある。 The substrate storage container disclosed in Patent Document 1 has an excellent locking mechanism as compared with a structure in which the lid is rotated to open and close as used in the conventional substrate storage container. No means has been shown to remove the locking claws to unlock the lid. In this type of substrate storage container, the substrate before processing is continuously taken out and transferred to a cassette or the like, and the substrate that has been subjected to a predetermined treatment by the semiconductor manufacturing apparatus is transferred from the cassette or the like to the substrate storage container. It is also expected to be used for equipment. In the transfer device that performs a series of continuous transfer operations using a controlled board transfer robot, it is necessary to automatically perform the above-mentioned unlocking mechanism of the board storage container and opening / closing operation of the lid. be.

そこで、本発明の目的は上述した従来の技術が有する問題点を解消し、係止部材による蓋体のロックを行うような基板収納容器において、蓋体のロック状態を迅速に行うことができる基板収納容器のロック解除機構を提供することにある。 Therefore, an object of the present invention is to solve the problems of the above-mentioned conventional techniques, and to quickly lock the lid in a substrate storage container that locks the lid with a locking member. The purpose is to provide an unlocking mechanism for the storage container.

上記目的を達成するために、本発明は、基板収納容器の蓋体をロックする係止部材の係止を解除するために前記基板収納容器を載置する台板の下部に備えられた基板収納容器のロック解除機構であって、前記台板に回動可能に支持され、前記台板に設けられた開口を介して前記基板収納容器の一の係止部材の近傍に延在するように設けられ、回動して前記係止部材を外方に押圧して前記蓋体のロックを解除するロック解除部材と、直動して前記ロック解除部材を所定角度回動させるスライド部材と、該スライド部材に所定の直動動作を入力するシリンダとを備えた駆動機構と、前記スライド部材に一端が連接された第１のリンクアームと、該第１のリンクアームの他端が連接された同期リングと、該同期リングに連接された第２のリンクアームを介して前記駆動機構のスライド部と同量のスライド量が入力されるスライド部材と、該スライド部材のスライド動作によって回動し、前記基板収納容器の他の係止部材を外方に押圧して前記蓋体のロックを解除するロック解除部材とを備えた従動機構とで構成されたことを特徴とする。 In order to achieve the above object, the present invention provides a substrate storage provided under the base plate on which the board storage container is placed in order to unlock the locking member that locks the lid of the board storage container. A container unlocking mechanism that is rotatably supported by the base plate and is provided so as to extend in the vicinity of one locking member of the substrate storage container through an opening provided in the base plate. An unlocking member that rotates and presses the locking member outward to unlock the lid, a slide member that moves linearly to rotate the unlocking member by a predetermined angle, and the slide. A drive mechanism including a cylinder for inputting a predetermined linear motion to the member, a first link arm having one end connected to the slide member, and a synchronization ring having the other end of the first link arm connected to the member. A slide member in which the same amount of slide as the slide portion of the drive mechanism is input via the second link arm connected to the synchronization ring, and the slide member is rotated by the slide operation of the slide member to rotate the substrate. It is characterized in that it is composed of a driven mechanism including an unlocking member that unlocks the lid by pressing another locking member of the storage container outward.

前記スライド部材は、前記台板下面に設けられたガイド部材に倣って摺接するガイド摺接体と、前記シリンダのピストンロッドからの入力動作を受けるスライド本体とからなり、該スライド本体は、スライド方向先端にくさび状斜面部が形成され、スライドして前記ロック解除部材の対向するくさび状斜面部に当接し、前記ロック解除部材を所定角度だけ回動させることが好ましい。 The slide member is composed of a guide sliding contact body that slides in accordance with a guide member provided on the lower surface of the base plate and a slide main body that receives an input operation from the piston rod of the cylinder, and the slide main body is in a sliding direction. It is preferable that a wedge-shaped slope portion is formed at the tip thereof, slides into contact with the opposite wedge-shaped slope portion of the unlocking member, and the unlocking member is rotated by a predetermined angle.

前記ロック解除部材は、前記台板に回動支持され、前記スライド部材の当接により回動するレバー保持体と、該レバー保持体と一体的に回動して前記係止部材を押圧するレバー部材とからなることが好ましい。 The unlocking member is a lever holding body that is rotationally supported by the base plate and rotates by abutting the slide member, and a lever that rotates integrally with the lever holding body to press the locking member. It is preferably composed of a member.

前記同期リングは、前記駆動機構のスライド部材のスライド量に応じて生じる前記第１のリンクアームの変位に応じて所定角度回動し、前記同期リングに連接された第２のリンクアームを介して前記従動機構に、前記駆動機構のスライド部と同量のスライド量を入力することが好ましい。 The synchronization ring rotates by a predetermined angle according to the displacement of the first link arm generated according to the slide amount of the slide member of the drive mechanism, and is connected to the synchronization ring via the second link arm. It is preferable to input the same amount of slide amount as the slide portion of the drive mechanism into the driven mechanism.

前記ロック解除部材のレバー部材は、前記蓋体が取り除かれた間、前記係止部材を押圧した状態を保持して前記基板収納容器を前記台板上に固定保持することが好ましい。 It is preferable that the lever member of the unlocking member holds the locking member pressed while the lid body is removed to fix and hold the substrate storage container on the base plate.

２台の前記駆動機構と２台の前記従動機構とが、前記同期リング、前記第１のリンクアーム、及び前記第２のリンクアームを介して同期して動作することが好ましい。 It is preferable that the two drive mechanisms and the two driven mechanisms operate synchronously via the synchronization ring, the first link arm, and the second link arm.

前記従動機構は、前記スライド部の位置検出部が設けられることが好ましい。 It is preferable that the driven mechanism is provided with a position detecting portion of the slide portion.

本発明の基板収納容器のロック解除機構の一実施形態を示した概略平面図。The schematic plan view which showed one Embodiment of the lock release mechanism of the substrate storage container of this invention. 図１に示したロック解除機構の構成及び動作状態を示した部分拡大平面図。A partially enlarged plan view showing the configuration and operating state of the unlocking mechanism shown in FIG. 図１に示したロック解除機構の構成及び動作状態を示した部分拡大側面図。A partially enlarged side view showing the configuration and operating state of the unlocking mechanism shown in FIG. 1. 本発明の基板収納容器の蓋体を取り外し、基板の移し替えを行う状態を示した動作状態説明図。The operating state explanatory view which showed the state which removed the lid body of the board storage container of this invention, and transferred a board. 本発明のロック解除機構を適用する基板収納容器一例の構成を示した平面図、側面図、一部断面図。A plan view, a side view, and a partial cross-sectional view showing the configuration of an example of a substrate storage container to which the unlocking mechanism of the present invention is applied.

以下、本発明の基板収納容器１のロック解除機構１０（以下、単にロック解除機構１０と記す。）の一実施形態について添付図面を参照して説明する。 Hereinafter, an embodiment of the unlocking mechanism 10 (hereinafter, simply referred to as the unlocking mechanism 10) of the substrate storage container 1 of the present invention will be described with reference to the accompanying drawings.

図１は、図５各図に一例として示した基板収納容器１のロック機構、すなわち基板収納容器１の本体の底板６に設けられた係止部材としての係止片５の係止動作によって蓋体２がロックされた状態を解除するためのロック解除機構１０の概略構成を示した平面図である。 FIG. 1 shows a lid by the locking mechanism of the substrate storage container 1 shown as an example in each of FIGS. 5, that is, the locking operation of the locking piece 5 as a locking member provided on the bottom plate 6 of the main body of the substrate storage container 1. It is a top view which showed the schematic structure of the lock release mechanism 10 for releasing the locked state of body 2.

ここで、本発明のロック解除機構１０を適用する基板収納容器１の構成について、図５各図を参照して説明する。図５（ａ）は基板収納容器１の上面の蓋体２の平面形状、同図（ｂ）は基板収納容器１の側面形状を示している。同図（ａ）に示したように、蓋体２の四隅にはロック用係止孔３が形成されている。このロック用係止孔３の一部は係止蓋板４で塞がれ、この係止蓋板４には、起立姿勢を初期状態とする弾性撓み可能な板状の係止片５（図５（ｃ））の上端に形成された係止爪５ａが係止される。４箇所の係止爪５ａの係止動作により、基板収納容器１の蓋体２は、本体に確実にロックされた状態が保持されている。なお、基板収納容器１のロック機構が蓋体２の対角位置の２箇所に設けられている場合もある。その場合には、各ロック機構の配置位置に対応してロック解除機構が設けられることは言うまでもない。 Here, the configuration of the substrate storage container 1 to which the unlocking mechanism 10 of the present invention is applied will be described with reference to each figure of FIG. FIG. 5A shows the planar shape of the lid 2 on the upper surface of the substrate storage container 1, and FIG. 5B shows the side surface shape of the substrate storage container 1. As shown in FIG. 6A, locking holes 3 for locking are formed at the four corners of the lid body 2. A part of the locking hole 3 for locking is closed by a locking lid plate 4, and the locking lid plate 4 has an elastically flexible plate-shaped locking piece 5 (FIG. 5) in which the standing posture is set to the initial state. The locking claw 5a formed at the upper end of 5 (c)) is locked. The lid 2 of the substrate storage container 1 is securely locked to the main body by the locking operation of the four locking claws 5a. In some cases, the locking mechanisms of the substrate storage container 1 are provided at two diagonal positions of the lid body 2. In that case, it goes without saying that the unlocking mechanism is provided corresponding to the arrangement position of each locking mechanism.

次に、本発明の実施形態のロック解除機構１０の構成について、基板収納容器１の四隅にロック機構がある場合を例に説明する。ロック解除機構１０は、図１、図５（ａ）に示したように、基板収納容器１（図１では二点鎖線表示）の四隅に配置されたロック機構としての４箇所の係止片５（図１では破線表示）の近傍に４台の係止解除レバー動作機構１００（後述する。）が配置されている。ロック解除機構１０は、図４（ａ）に示したように、基板収納容器１が所定位置に載置されるベースプレートの下面に、図示しない固定ボルト等の取付手段によって固定されている。このようにロック解除機構１０をベースプレート７の下側に配置することにより基板収納容器１へパーティクルが侵入するリスクを低減することができる。一方、ベースプレート７の上面にはガイドブロック８が立設され、ベースプレート７上に載置される基板収納容器１の各側面の位置が正確に規定されるようになっている。また、基板収納容器１の４箇所のロック機構位置に対応するベースプレート７には略長方形形状の開口が形成されている。この開口からは後述するロック解除機構１０の係止解除レバー１３５が挿通される。 Next, the configuration of the unlocking mechanism 10 according to the embodiment of the present invention will be described by exemplifying the case where the locking mechanisms are provided at the four corners of the substrate storage container 1. As shown in FIGS. 1 and 5A, the unlocking mechanism 10 has four locking pieces 5 as locking mechanisms arranged at the four corners of the substrate storage container 1 (indicated by a two-dot chain line in FIG. 1). Four unlocking lever operating mechanisms 100 (described later) are arranged in the vicinity of (indicated by a broken line in FIG. 1). As shown in FIG. 4A, the lock release mechanism 10 is fixed to the lower surface of the base plate on which the substrate storage container 1 is placed at a predetermined position by a mounting means such as a fixing bolt (not shown). By arranging the unlocking mechanism 10 under the base plate 7 in this way, the risk of particles invading the substrate storage container 1 can be reduced. On the other hand, a guide block 8 is erected on the upper surface of the base plate 7, and the positions of the side surfaces of the substrate storage container 1 placed on the base plate 7 are accurately defined. Further, a substantially rectangular opening is formed in the base plate 7 corresponding to the four lock mechanism positions of the substrate storage container 1. The unlocking lever 135 of the unlocking mechanism 10 described later is inserted through this opening.

本発明の一実施形態のロック解除機構１０は、図１、図２（ａ）、図３（ａ）に示したように、その中心位置と基板収納容器１の中心位置とが一致するように位置する同期リング１１と、同期リング１１に一端がベアリング軸受１２を介して連結された４本のリンクアーム１０１，１５１と、各リンクアーム１０１，１５１の他端にベアリング軸受１３を介して連結された４台の解除レバー動作機構１００から構成されている。以上の構成のうち、同期リング１１は回動中心が保持されるように図示しない軸受を介してリング保持部材１４によってベースプレート７の下面に吊持されている。また、解除レバー動作機構１００のスライド部１２０の直動動作を案内するガイドバー１１５もベースプレート７の下面に固着保持されている。 As shown in FIGS. 1, 2 (a), and 3 (a), the unlocking mechanism 10 of the embodiment of the present invention has its center position coincided with the center position of the substrate storage container 1. The synchronized ring 11 is located, four link arms 101 and 151 having one end connected to the synchronous ring 11 via a bearing bearing 12, and the other end of each link arm 101 and 151 connected via a bearing bearing 13. It is composed of four release lever operation mechanisms 100. In the above configuration, the synchronous ring 11 is suspended from the lower surface of the base plate 7 by the ring holding member 14 via a bearing (not shown) so that the center of rotation is held. Further, the guide bar 115 that guides the linear movement of the slide portion 120 of the release lever operation mechanism 100 is also fixed and held on the lower surface of the base plate 7.

なお、本実施の形態では、解除レバー動作機構１００の直動動作を実現するために、ブロック形状のスライド部１２０と、それを案内するガイドバー１１５を使用し、また４本のリンクアーム１０１，１５１の変位の同期を実現するために、回動可能なリング状の部材（同期リング１１）を使用しているが、それぞれ同等の機能を有する変位機構、リンク機構あるいは動作部材であれば、その形状、構造等は種々設計できることは言うまでもない。 In this embodiment, in order to realize the linear motion of the release lever operation mechanism 100, a block-shaped slide portion 120 and a guide bar 115 for guiding the block-shaped slide portion 120 are used, and four link arms 101, A rotatable ring-shaped member (synchronous ring 11) is used to realize the synchronization of the displacement of 151, but if it is a displacement mechanism, a link mechanism or an operating member having the same functions, the member is used. Needless to say, various shapes, structures, etc. can be designed.

４台の解除レバー動作機構１００は、２台の駆動機構１１０と、２台の従動機構１５０とから構成され、駆動機構１１０によって発生するスライド部１２０の直動動作は、リンクアーム１０１、同期リング１１、リンクアーム１５１を介して従動機構１５０に伝達される。これにより、各解除レバー動作機構１００の駆動機構１１０、従動機構１５０における係止解除レバー１３５の同期動作が実現する。 The four release lever operation mechanisms 100 are composed of two drive mechanisms 110 and two driven mechanisms 150, and the linear operation of the slide portion 120 generated by the drive mechanism 110 is a link arm 101 and a synchronization ring. 11. It is transmitted to the driven mechanism 150 via the link arm 151. As a result, the synchronous operation of the lock release lever 135 in the drive mechanism 110 and the driven mechanism 150 of each release lever operation mechanism 100 is realized.

解除レバー動作機構１００の駆動機構１１０（以下、単に駆動機構１１０と記す。）の構成について、図２（ａ）、図３（ａ）を参照して説明する。駆動機構１１０は、図２（ａ）、図３（ａ）にそれぞれ示したように、上述したガイドバー１１５に沿って直動可能なスライド部１２０と、スライド部１２０の直動動作に伴ってスライド部１２０の一部と当接することで所定角度だけ回動するロック解除部１３０とから構成されている。スライド部１２０は、ベースプレート７（図３（ａ））に支持フランジ１１１を介して支持されたエアシリンダ１１２のピストンロッド１１３の伸縮によってガイドバー１１５に沿って直動することができる。なお、図１、図２各図では、係止解除レバー１３５の構成を示すために、ベースプレート７の開口７ａとその近傍を部分的に示している。 The configuration of the drive mechanism 110 (hereinafter, simply referred to as the drive mechanism 110) of the release lever operation mechanism 100 will be described with reference to FIGS. 2 (a) and 3 (a). As shown in FIGS. 2A and 3A, the drive mechanism 110 is accompanied by a slide portion 120 capable of linearly moving along the guide bar 115 described above and a linear movement of the slide portion 120. It is composed of an unlocking portion 130 that rotates by a predetermined angle when it comes into contact with a part of the sliding portion 120. The slide portion 120 can move linearly along the guide bar 115 by expanding and contracting the piston rod 113 of the air cylinder 112 supported by the base plate 7 (FIG. 3A) via the support flange 111. In each of FIGS. 1 and 2, in order to show the configuration of the unlocking lever 135, the opening 7a of the base plate 7 and its vicinity are partially shown.

スライド部１２０は、ガイド摺接体１２１とスライダ本体とが上下に一体連結されたブロック形状からなる。ガイド摺接体１２１は、ベースプレート７の下面に固定された細長直方体形状のガイドバー１１５の側面と底面とを囲むように摺接して駆動機構１１０を所定ストローク分直動させる。ガイド摺接体１２１を保持するスライダ本体１２２の後端下面には連結シャフト１２６が連接され、この連結シャフト１２６にベアリング軸受１２を介してリンクアーム１０１の一端が連結されている（図３（ａ））。一方、スライダ本体１２２先端には下方に向けて所定角度で傾斜したくさび状斜面部１２２ａが形成されている。スライダ本体１２２にはブラケット１２７を介してエアシリンダ１１２のピストンロッド１１３の伸縮動作が伝達される。なお、エアシリンダ１１２に代えて電動モータ等、所定の変位ストロークを生成可能な各種の駆動源を使用することができる。 The slide portion 120 has a block shape in which the guide sliding contact body 121 and the slider main body are integrally connected vertically. The guide sliding contact body 121 is slidably contacted so as to surround the side surface and the bottom surface of the elongated rectangular parallelepiped-shaped guide bar 115 fixed to the lower surface of the base plate 7, and the drive mechanism 110 is linearly moved by a predetermined stroke. A connecting shaft 126 is connected to the lower surface of the rear end of the slider body 122 that holds the guide sliding contact body 121, and one end of the link arm 101 is connected to the connecting shaft 126 via a bearing bearing 12 (FIG. 3 (a). )). On the other hand, a wedge-shaped slope portion 122a that is inclined downward at a predetermined angle is formed at the tip of the slider main body 122. The expansion / contraction operation of the piston rod 113 of the air cylinder 112 is transmitted to the slider body 122 via the bracket 127. Instead of the air cylinder 112, various drive sources capable of generating a predetermined displacement stroke, such as an electric motor, can be used.

ロック解除部１３０は、スライダ本体１２２の斜面部のくさび状斜面部１２２ａと対向する傾斜のくさび状斜面部１３２ａが形成されたレバー保持体１３２と、基板収納容器１の係止片５に沿って延在する係止解除レバー１３５とが一体連結された構成からなる。レバー保持体１３２は回動支持軸１３３を介してベースプレート７の下面に回動可能に保持されている。よって、後述するように、レバー保持体１３２が所定角度だけ回動すると係止解除レバー１３５は根元部から所定角度だけ回動する（図３（ｂ））。 The unlocking portion 130 is provided along the lever holder 132 on which the wedge-shaped slope portion 132a of the slope portion of the slider main body 122 is formed and the wedge-shaped slope portion 132a of the inclination facing the wedge-shaped slope portion 122a, and the locking piece 5 of the substrate storage container 1. The structure is such that the extending unlocking lever 135 is integrally connected. The lever holder 132 is rotatably held on the lower surface of the base plate 7 via the rotation support shaft 133. Therefore, as will be described later, when the lever holder 132 rotates by a predetermined angle, the unlocking lever 135 rotates by a predetermined angle from the root portion (FIG. 3B).

解除レバー動作機構１００の従動機構１５０（以下、単に従動機構１５０と記す。）の構成について、図１を参照して説明する。本実施形態において、従動機構１５０は図１に示したように、２台の対向位置にある駆動機構１１０とほぼ直交する向きに２台が配置されている。各従動機構１５０は、図２（ａ）、図３（ａ）にそれぞれ示した駆動機構１１０のうち、エアシリンダ１１２とその伸縮動作をスライド部１２０に伝達するブラケット１２７を備えない構成からなる。他の構成として、図１に示したように、スライド部１６０の直動動作状態を検出する検出部１８０を備える。それ以外の構成は駆動機構１１０と同様である。従動機構１５０への駆動力は、上述したように、駆動機構１１０のスライダ本体１２２の後端下面に連接されたリンクアーム１０１、同期リング１１、リンクアーム１５１を介して従動機構１５０に伝達される。すなわち、図１に示したように、駆動機構１１０のスライダ本体１２２の外方へ向かう直動動作に連動して駆動機構１１０のリンクアーム１０１がスライダ本体１２２の移動に追従し、同期リング１１を反時計回りに回動させる。この同期リング１１の回動に伴い、この従動機構１５０に連結されたリンクアーム１５１に外方に向かう同量の変位が伝えられ、リンクアーム１５１は、連結された従動機構１５０のスライド部１６０をガイドバー１５５に沿って駆動機構１１０のスライド量と同量分だけ外方にスライドさせる。 The configuration of the driven mechanism 150 (hereinafter, referred to as a simple driven mechanism 150) of the release lever operating mechanism 100 will be described with reference to FIG. In the present embodiment, as shown in FIG. 1, two driven mechanisms 150 are arranged in a direction substantially orthogonal to the two driven mechanisms 110 located at opposite positions. Each of the driven mechanisms 150 is configured not to include the air cylinder 112 and the bracket 127 for transmitting the expansion / contraction operation thereof to the slide portion 120 among the drive mechanisms 110 shown in FIGS. 2 (a) and 3 (a), respectively. As another configuration, as shown in FIG. 1, a detection unit 180 for detecting the linear operation state of the slide unit 160 is provided. Other than that, the configuration is the same as that of the drive mechanism 110. As described above, the driving force to the driven mechanism 150 is transmitted to the driven mechanism 150 via the link arm 101, the synchronization ring 11, and the link arm 151 connected to the lower surface of the rear end of the slider body 122 of the driving mechanism 110. .. That is, as shown in FIG. 1, the link arm 101 of the drive mechanism 110 follows the movement of the slider body 122 in conjunction with the outward linear motion of the slider body 122 of the drive mechanism 110, and the synchronization ring 11 is moved. Rotate counterclockwise. Along with the rotation of the synchronization ring 11, the same amount of displacement outward is transmitted to the link arm 151 connected to the driven mechanism 150, and the link arm 151 slides the sliding portion 160 of the connected driven mechanism 150. Slide outward along the guide bar 155 by the same amount as the slide amount of the drive mechanism 110.

このとき、２台の従動機構１５０のスライド部１６０の側部には従動機構１５０のスライド状態を検知する検出部１８０が備えられている。本実施形態では、位置検出センサー１８１としてマイクロフォトセンサーが搭載されている。従動機構１５０のスライド部１６０に取り付けられたドグ１８２の位置を検知して、スライド部１１０、１６０の位置、係止解除レバー１３５、１７５の回動状況、すなわち蓋体２のロック状態、アンロック状態を検知することができる。 At this time, a detection unit 180 for detecting the slide state of the driven mechanism 150 is provided on the side portion of the slide portion 160 of the two driven mechanisms 150. In this embodiment, a microphoto sensor is mounted as the position detection sensor 181. Detecting the position of the dog 182 attached to the slide portion 160 of the driven mechanism 150, the positions of the slide portions 110 and 160, the rotation status of the unlocking levers 135 and 175, that is, the locked state of the lid 2 and the unlocking The state can be detected.

ここで、本発明の基板収納容器１のロック解除機構１０の動作について、基板移載装置のベースプレート７上の所定位置にセットされた基板収納容器１からの基板の取り出し動作を例に、図２〜図５を参照して説明する。
図４（ａ）は、基板収納容器１が基板移載装置内のベースプレート７上の所定位置に載置された状態を示している。基板収納容器１は、４辺がベースプレート７上に立設されたガイドブロック８に規定され、ベースプレート７上の所定位置に正確に載置されている。このとき、基板収納容器１の蓋体２は閉じた状態にあり、図３（ａ）、図５（ｃ）に示したように、本体側の係止片５の上端の係止爪５ａが蓋体２の開口の係止蓋板４に係止してロック状態が保持されている。このロック状態を解除するために、エアシリンダ１１２を駆動し、ピストンロッド１１３を設定されたストロークだけ縮退させる。これに伴い、スライド部１２０は図２（ｂ）、図３（ｂ）に示したように駆動機構１１０の外方に向けてスライドし、スライダ本体１２２先端のくさび状斜面部１１２ａがロック解除部１３０のレバー保持体１３２のくさび状斜面部１３２ａに当接し、レバー保持体を押圧する。これによりレバー保持体１３２は先端のくさび状斜面部１３２ａが持ち上がるように回動支持軸１３２回りに回動する。この回動により係止解除レバー１３５も一体となって回動し、図３（ｂ）に示したように、係止解除レバー１３５は基板収納容器１の係止片５に当接、押圧する。係止片５は樹脂製の細長板状部材であるため、係止解除レバー１３５に押圧され、撓み変形して係止爪５ａが蓋体２の係止蓋板４から外れる。このロック解除動作は、同期リンク１１の作用により、２台の駆動機構１１０と２台の従動機構１５０との間で同時に行われ、４つの係止解除レバー１３５、１７５が同量だけ回動し、基板収納容器１の蓋体２の４つの係止爪５ａのロックは同時に解除される。 Here, regarding the operation of the unlocking mechanism 10 of the substrate storage container 1 of the present invention, the operation of taking out the substrate from the substrate storage container 1 set at a predetermined position on the base plate 7 of the substrate transfer device is taken as an example, FIG. This description will be given with reference to FIG.
FIG. 4A shows a state in which the substrate storage container 1 is placed at a predetermined position on the base plate 7 in the substrate transfer device. The substrate storage container 1 is defined by a guide block 8 whose four sides are erected on the base plate 7, and is accurately placed at a predetermined position on the base plate 7. At this time, the lid 2 of the substrate storage container 1 is in the closed state, and as shown in FIGS. 3 (a) and 5 (c), the locking claw 5a at the upper end of the locking piece 5 on the main body side is The locked state is maintained by being locked to the locking lid plate 4 of the opening of the lid body 2. In order to release this locked state, the air cylinder 112 is driven and the piston rod 113 is degenerated by a set stroke. Along with this, the slide portion 120 slides toward the outside of the drive mechanism 110 as shown in FIGS. 2 (b) and 3 (b), and the wedge-shaped slope portion 112a at the tip of the slider body 122 is unlocked. It abuts on the wedge-shaped slope portion 132a of the lever holder 132 of 130 and presses the lever holder. As a result, the lever holder 132 rotates around the rotation support shaft 132 so that the wedge-shaped slope portion 132a at the tip is lifted. By this rotation, the unlocking lever 135 also rotates integrally, and as shown in FIG. 3B, the unlocking lever 135 abuts and presses against the locking piece 5 of the substrate storage container 1. .. Since the locking piece 5 is an elongated plate-shaped member made of resin, it is pressed by the locking release lever 135 and is bent and deformed so that the locking claw 5a is disengaged from the locking lid plate 4 of the lid body 2. This unlocking operation is performed simultaneously between the two drive mechanisms 110 and the two driven mechanisms 150 by the action of the synchronous link 11, and the four unlocking levers 135 and 175 rotate by the same amount. , The locks of the four locking claws 5a of the lid 2 of the substrate storage container 1 are released at the same time.

このロック解除状態が保持される間、図４（ｂ）に示したように、基板移載装置５０の蓋体吸着保持機構５１が基板収納容器１の上方から降下してロック解除状態の蓋体２を吸着し、上昇して蓋体２を持ち上げる。その後、蓋体吸着保持機構５１は、図４（ｃ）に示したように、蓋体２を保持した状態で側方に退避する。この状態で図示しない基板搬送ロボット（図示せず）によって、基板収納容器１内の基板９が所定の手順で順次、図示しないカセットに移載される。このとき、基板収納容器１の本体は、図３（ｂ）に示したように、係止片５が係止解除レバー１３５によって押圧され、ベースプレート７上に固定保持された状態にある。 While this unlocked state is maintained, as shown in FIG. 4B, the lid body suction holding mechanism 51 of the substrate transfer device 50 descends from above the substrate storage container 1 to lower the lid body in the unlocked state. 2 is adsorbed and ascended to lift the lid 2. After that, as shown in FIG. 4C, the lid body suction holding mechanism 51 retracts to the side while holding the lid body 2. In this state, the substrate 9 in the substrate storage container 1 is sequentially transferred to a cassette (not shown) by a substrate transfer robot (not shown) in a predetermined procedure by a substrate transfer robot (not shown). At this time, as shown in FIG. 3B, the main body of the substrate storage container 1 is in a state where the locking piece 5 is pressed by the locking release lever 135 and fixedly held on the base plate 7.

以上では、基板収納容器１の蓋体２のロックを解除して蓋を開け、収容された基板９を連続して取り出す動作をもとに説明したが、取り出し作業の完了後、蓋体吸着保持機構５１が動作して蓋体２を再び基板収納容器１の本体に被すように動作したことが確認されると、ロック解除機構１０のエアシリンダ１１２のピストンロッド１１３が伸長する。これによりロック解除機構１０の係止解除レバー１３５、１６５による基板収納容器１の係止片５のロック解除状態が解かれ、係止片５は再び初期状態に戻り、蓋体２はロック状態となる。 The above description has been made based on the operation of unlocking the lid 2 of the substrate storage container 1, opening the lid, and continuously taking out the housed substrate 9, but after the removal work is completed, the lid is attracted and held. When it is confirmed that the mechanism 51 operates so as to cover the lid body 2 with the main body of the substrate storage container 1 again, the piston rod 113 of the air cylinder 112 of the lock release mechanism 10 extends. As a result, the unlocked state of the locking piece 5 of the substrate storage container 1 by the unlocking levers 135 and 165 of the unlocking mechanism 10 is released, the locking piece 5 returns to the initial state again, and the lid 2 is in the locked state. Become.

本発明のロック解除機構１０は、駆動機構１１０、従動機構１５０の配置位置、リンクアームのサイズを適宜変更することで、各種の半導体ウエハ等の基板の直径、すなわち各種の基板収納容器１の規格に対応することができる。また、駆動機構１１０、従動機構１５０を組み合わせる駆動形式として、４箇所のロック解除機構１０を有する場合に、１個の駆動機構１１０で３箇所の従動機構１５０を駆動させる駆動形式、２箇所のロック解除機構１０を有する場合に、１個の駆動機構１１０で１箇所の従動機構１５０を駆動させる駆動形式、従動機構１５０を用いずにすべてのロック解除機構１０を駆動機構１１０で駆動させる駆動形式等を適宜設定できる。さらに、駆動機構１１０、従動機構１５０間のリンク機構としては、上述したリンクアーム１０１，１５１、同期リング１１以外にも同等の変位の伝達が可能なリンク機構、伝達機構を用いることができる。 The lock release mechanism 10 of the present invention appropriately changes the arrangement position of the drive mechanism 110 and the driven mechanism 150, and the size of the link arm, so that the diameter of the substrate such as various semiconductor wafers, that is, the standard of various substrate storage containers 1 can be obtained. Can be dealt with. Further, as a drive type in which the drive mechanism 110 and the driven mechanism 150 are combined, when four lock release mechanisms 10 are provided, one drive mechanism 110 drives the three driven mechanisms 150, and two locks are used. When the release mechanism 10 is provided, a drive type in which one drive mechanism 110 drives one driven mechanism 150, a drive type in which all the lock release mechanisms 10 are driven by the drive mechanism 110 without using the driven mechanism 150, etc. Can be set as appropriate. Further, as the link mechanism between the drive mechanism 110 and the driven mechanism 150, a link mechanism and a transmission mechanism capable of transmitting the same displacement can be used in addition to the link arms 101 and 151 and the synchronization ring 11 described above.

なお、本発明は上述した実施形態に限定されるものではなく、各請求項に示した範囲内での種々の変更が可能である。すなわち、請求項に示した範囲内で適宜変更した技術的手段を組み合わせて得られる実施形態も、本発明の技術的範囲に含まれる。 The present invention is not limited to the above-described embodiment, and various modifications can be made within the scope shown in each claim. That is, an embodiment obtained by combining technical means appropriately modified within the scope of the claims is also included in the technical scope of the present invention.

１ 基板収納容器
２ 蓋体
３ ロック用係止孔
５ 係止片
７ ベースプレート（台板）
１０ ロック解除機構
１１ 同期リング
１００ 解除レバー動作機構
１０１，１５１ リンクアーム
１１０ 駆動機構
１１２ エアシリンダ
１１５ ガイドバー
１２０，１６０ スライド部
１２１ ガイド摺接体
１２２ スライダ本体
１１２ａ，１３２ａ くさび状斜面部
１３０ ロック解除部
１３２ レバー保持体
１３５，１７５ 係止解除レバー
１５０ 従動機構
１８０ 検出部 1 Board storage container 2 Lid 3 Locking hole for locking 5 Locking piece 7 Base plate (base plate)
10 Unlocking mechanism 11 Synchronous ring 100 Unlocking lever operating mechanism 101, 151 Link arm 110 Drive mechanism 112 Air cylinder 115 Guide bar 120, 160 Slide part 121 Guide sliding contact body 122 Slider body 112a, 132a Wedge-shaped slope part 130 Unlocking part 132 Lever holder 135,175 Unlocking lever 150 Driven mechanism 180 Detector

Claims (7)

基板収納容器の蓋体をロックする係止部材の係止を解除するために前記基板収納容器を載置する台板の下部に備えられた基板収納容器のロック解除機構であって、
前記台板に回動可能に支持され、前記台板に設けられた開口を介して前記基板収納容器の一の係止部材の近傍に延在するように設けられ、回動して前記係止部材を外方に押圧して前記蓋体のロックを解除するロック解除部材と、直動して前記ロック解除部材を所定角度回動させるスライド部材と、該スライド部材に所定の直動動作を入力するシリンダとを備えた駆動機構と、
前記スライド部材に一端が連接された第１のリンクアームと、該第１のリンクアームの他端が連接された同期リングと、
該同期リングに連接された第２のリンクアームを介して前記駆動機構のスライド部と同量のスライド量が入力されるスライド部材と、該スライド部材のスライド動作によって回動し、前記基板収納容器の他の係止部材を外方に押圧して前記蓋体のロックを解除するロック解除部材とを備えた従動機構とで構成されたことを特徴とする基板収納容器のロック解除機構。 A mechanism for unlocking the substrate storage container provided at the bottom of the base plate on which the substrate storage container is placed in order to unlock the locking member that locks the lid of the substrate storage container.
It is rotatably supported by the base plate, is provided so as to extend in the vicinity of one locking member of the substrate storage container through an opening provided in the base plate, and is rotated to lock the substrate. An unlocking member that pushes the member outward to unlock the lid, a slide member that moves linearly to rotate the unlocking member by a predetermined angle, and a predetermined linear motion are input to the slide member. With a drive mechanism equipped with a cylinder
A first link arm whose one end is connected to the slide member, and a synchronization ring whose other end is connected to the first link arm.
A slide member in which the same amount of slide as the slide portion of the drive mechanism is input via a second link arm connected to the synchronization ring, and a slide member that rotates by the slide operation of the slide member to rotate the substrate storage container. An unlocking mechanism for a substrate storage container, which comprises a driven mechanism including an unlocking member for pressing another locking member outward to unlock the lid. 前記スライド部材は、前記台板下面に設けられたガイド部材に倣って摺接するガイド摺接体と、前記シリンダのピストンロッドからの入力動作を受けるスライド本体とからなり、該スライド本体は、スライド方向先端にくさび状斜面部が形成され、スライドして前記ロック解除部材の対向するくさび状斜面部に当接し、前記ロック解除部材を所定角度だけ回動させる請求項１に記載の基板収納容器のロック解除機構。 The slide member is composed of a guide sliding contact body that slides in accordance with a guide member provided on the lower surface of the base plate and a slide main body that receives an input operation from the piston rod of the cylinder, and the slide main body is in a sliding direction. The lock of the substrate storage container according to claim 1, wherein a wedge-shaped slope portion is formed at the tip thereof, slides into contact with the opposite wedge-shaped slope portion of the unlocking member, and the unlocking member is rotated by a predetermined angle. Release mechanism. 前記ロック解除部材は、前記台板に回動支持され、前記スライド部材の当接により回動するレバー保持体と、該レバー保持体と一体的に回動して前記係止部材を押圧するレバー部材とからなる請求項１に記載の基板収納容器のロック解除機構。 The unlocking member is a lever holding body that is rotationally supported by the base plate and rotates by abutting the slide member, and a lever that rotates integrally with the lever holding body to press the locking member. The unlocking mechanism for a substrate storage container according to claim 1, which comprises a member. 前記同期リングは、前記駆動機構のスライド部材のスライド量に応じて生じる前記第１のリンクアームの変位に応じて所定角度回動し、前記同期リングに連接された第２のリンクアームを介して前記従動機構に、前記駆動機構のスライド部と同量のスライド量を入力する請求項１乃至請求項３のいずれか１項に記載の基板収納容器のロック解除機構。 The synchronization ring rotates by a predetermined angle according to the displacement of the first link arm generated according to the slide amount of the slide member of the drive mechanism, and is connected to the synchronization ring via the second link arm. The unlocking mechanism for a substrate storage container according to any one of claims 1 to 3, wherein a slide amount equal to that of the slide portion of the drive mechanism is input to the driven mechanism. 前記ロック解除部材のレバー部材は、前記蓋体が取り除かれた間、前記係止部材を押圧した状態を保持して前記基板収納容器を前記台板上に固定保持する請求項３に記載の基板収納容器のロック解除機構。 The substrate according to claim 3, wherein the lever member of the unlocking member holds the locking member in a pressed state while the lid body is removed, and holds the substrate storage container fixedly on the base plate. Unlocking mechanism for storage container. ２台の前記駆動機構と２台の前記従動機構とが、前記同期リング、前記第１のリンクアーム、及び前記第２のリンクアームを介して同期して動作する請求項１に記載の基板収納容器のロック解除機構。 The substrate storage according to claim 1, wherein the two drive mechanisms and the two driven mechanisms operate synchronously via the synchronization ring, the first link arm, and the second link arm. Container unlocking mechanism. 前記従動機構は、前記スライド部の位置検出部が設けられた請求項１に記載の基板収納容器のロック解除機構。 The driven mechanism is the unlocking mechanism of the substrate storage container according to claim 1, wherein the position detecting portion of the slide portion is provided.
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