JP6653058B2 - CMM - Google Patents

Description

  The present invention relates to a coordinate measuring machine, and in particular, measures the shape, dimensions, and the like of a work (measurement target) using probes provided so as to be movable in X, Y, and Z axes orthogonal to each other. It relates to a coordinate measuring machine.

  The coordinate measuring machine is a contact-type measuring machine using a probe, detects coordinates (X, Y, Z) of the tip when the tip of the probe touches a work (object to be measured), and detects the coordinate value. The shape, dimensions, etc. of the work are measured from the set of. For this reason, the probe is provided so as to be movable in each of three directions (X axis, Y axis, Z axis) orthogonal to each other.

  The mechanism for moving the probe is generally provided on the Y-axis moving body moving along the Y-axis, the X-axis moving body provided on the Y-axis moving body and moving along the X-axis, and provided on the X-axis moving body. The probe is attached to the Z-axis moving body, which comprises a Z-axis moving body that moves along the Z-axis. Since the accuracy of the mechanism for moving the probe is directly reflected on the measurement accuracy of the workpiece, it is important for a three-dimensional measuring machine how high-accuracy the configuration can be. In particular, since the Y-axis moving body has the X-axis moving body and the Z-axis moving body mounted thereon, it is required to move with high precision without deformation or the like. For this reason, in the coordinate measuring machine, various types of mechanisms for moving the probe along the Y-axis have been proposed (for example, Patent Documents 1 and 2).

  FIG. 12A is a front view showing a schematic configuration of a coordinate measuring machine called a bridge type.

  The bridge-type coordinate measuring machine 1000 has a portal shape in which a Y-axis moving body 1002 includes a pair of legs 1002A and 1002B. The Y-axis moving body 1002 has both legs 1002A and 1002B supported by air bearings, and is slidably supported in the Y-axis direction. That is, one leg 1002A is slidably supported by one guide rail 1006 provided on the base 1004 via the air pad 1008A, and the other leg 1002B is placed on the horizontal surface of the base 1004 via the air pad 1008B. It is slidably supported (for example, Patent Documents 3 and 4).

  In addition, as a bridge-type three-dimensional measuring machine, a method in which both legs are slidably supported by a mechanical linear motion guide bearing (linear motion guide) (for example, Patent Document 5 or the like), or one leg is used. There is known a system in which a portion is slidably supported by a pair of mechanical linear guide bearings and the other leg is slidably supported by an air bearing (for example, Patent Document 6).

  FIG. 12B is a front view showing a schematic configuration of a coordinate measuring machine called a gantry type.

  In the gantry type coordinate measuring machine 1100, the Y-axis moving body 1102 has a bar shape. The Y-axis moving body 1102 is arranged so as to bridge over a pair of columns 1106A and 1106B provided on the base 1104, and is slidable on the columns 1106A and 1106B via linear motion guides 1108A and 1108B. Supported (for example, Patent Document 7).

  FIG. 12C is a front view showing a schematic configuration of a coordinate measuring machine called a cantilever type.

  In the cantilever type coordinate measuring machine 1200, the Y-axis moving body 1202 has a bar shape. The Y-axis moving body 1202 is cantilevered by one column 1206 provided on the base 1204, and is slidably supported on the column 1206 via a pair of linear motion guides 1208A and 1208B (for example, see Patent Reference 8 etc.).

JP-A-5-248840 JP 2000-510241 A Japanese Utility Model Publication No. 7-3283 JP-A-5-99651 Japanese Utility Model Publication No. Hei 7-25605 JP 2006-287098 A JP 2010-122118 A JP 2010-181157 A

  The three-dimensional measuring machine of the bridge type, in which both legs are floated and supported by air bearings, has the advantage that the Y-axis moving body can be guided with little sliding resistance without causing deformation of the Y-axis moving body. .

  However, the three-dimensional measuring machine of the bridge type, in which both legs are supported by air bearings, has a problem that dynamic displacement in the pitching direction and the yawing direction during acceleration / deceleration is large. The dynamic displacement in the pitching direction and the yawing direction at the time of acceleration / deceleration appears as vibration and converges with time. However, if measurement is performed before the convergence, there is a problem that a measurement error occurs. In particular, in the bridge type three-dimensional measuring machine, the center of gravity of the moving body is located above the supporting point on the driving side, and the distance between them is large, so that the structure easily falls down. Therefore, there is a disadvantage that the moment of inertia in the pitching direction, which is proportional to the ease of falling during acceleration / deceleration, increases, causing vibration in the pitching direction and easily causing a pitching error.

  Also, in a bridge type three-dimensional measuring machine of a type in which both legs are levitated and supported by air bearings, sliding resistance does not exist in both legs. In this case, when the Y-axis moving body is propelled at the intermediate position between the two legs, the Y-axis moving body moves in a well-balanced manner. However, when only one leg is driven, the driven-side leg moves with a delay. As a result, the left and right propulsion balance cannot be maintained. Therefore, there is a disadvantage that a dynamic error in the yawing direction increases.

  In addition, if both legs are supported by air bearings, there is no sliding resistance, so that it takes a long time to settle until the minute vibrations after driving settle down.

  Furthermore, in the bridge type, since the position of the center of gravity is relatively higher than the position of the fulcrum, the pitching error due to the inertial force at the time of starting movement becomes large, and it takes an extremely long time until the swing in the front-rear direction due to the pitching stops. There is also a disadvantage.

  There is also a drawback that the consumption of compressed air is large and the running cost is high.

  On the other hand, a three-dimensional measuring machine of a bridge type in which both legs are supported by a linear motion guide has a disadvantage that sliding resistance generated in both legs is increased. If only one leg is driven in a state where both sides have high sliding resistance, the driven leg moves with a delay, so that the left and right propulsion cannot be balanced, and the dynamic error in the yawing direction increases. There is a disadvantage that. As a result, there is a disadvantage that the hysteresis of the movement is increased on the left and right sides of the linear motion guide, the yawing is increased, and a measurement error is easily caused.

  In addition, since the drive unit is supported by the two linear guides, there is a disadvantage that the drive unit easily generates heat (the heat generated by the drive unit generates thermal stress in the apparatus main body and causes deformation of the guide unit).

  Furthermore, when the parallelism between the two linear guides is not maintained with high precision or when the parallelism between the two linear guides gradually deteriorates due to aging over time, the linear guides interfere with each other. Then, there is a disadvantage that the Y-axis moving body is deformed (twisted, bent, etc.) at the time of movement, and the movement is not smooth. In general, the error of the contact position of the probe due to the bending of the Y-axis moving body can be corrected to some extent by a correction formula or the like obtained from the measurement result of the reference work, but it is necessary to accurately correct the influence of the change in the bending amount. Is difficult.

  Also, in a CMM having a configuration in which one leg is supported by a pair of linear motion guides and the other leg is supported by an air bearing, one leg is supported by two linear motion guides. However, there is a disadvantage that the sliding resistance is large and the driving section easily generates heat.

  Further, the support portions of the pair of linear motion guides have a structure that does not allow displacement in the rotation direction. In this case, when the parallelism between the pair of linear motion guides and the air bearing is not maintained with high accuracy, that is, strictly speaking, the level of the linear motion guide and the level position of the surface plate (the work mounting surface of the surface plate). Is changed in the Y-axis direction, the other leg portion responds to the drag received from the air bearing while the Y-axis moving body moves in the Y-axis direction. The structure cannot be rotated. As a result, there is a disadvantage that the Y-axis moving body is deformed in a form of warping in the X-axis direction. In general, the parallelism between the sliding surface of the linear guide and the sliding surface of the air bearing has a processing error.

  Similarly, the gantry-type three-dimensional measuring device is supported by two linear motion guides, and thus has a disadvantage that sliding resistance is large and yawing error is large. Further, if the parallelism between the two linear guides is not maintained with high precision, there are disadvantages that the Y-axis moving body is deformed at the time of movement and that the movement is not smooth at the time of movement.

  Further, at a reference plane position for correcting the height of the probe from the base plate, a reference plane defined by a linear motion guide in the Z direction of the probe and a reference plane to be measured, that is, a reference plane defined by the base plate. However, there is a disadvantage that it is not always possible to obtain a highly accurate Z displacement when the Y-axis moving body moves because the reference planes are completely independent and different from each other.

  Further, the gantry type three-dimensional measuring machine has a drawback that the visibility of the measurement area is poor because a pair of columns is installed on the base.

  Further, the cantilever type three-dimensional measuring machine has a disadvantage that it has low rigidity and is easily bent by its own weight because the Y-axis moving body is cantilevered.

  The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a three-dimensional measuring machine which has a small pitching error and a yawing error and can perform high-accuracy measurement based on a surface plate.

  The means for solving the problem are as follows.

  A first aspect is a Y-axis guide, a Y-axis moving body guided by the Y-axis guide and moving in the Y-axis direction, an X-axis guide provided in the Y-axis mobile, and an X-axis guide. An X-axis moving body that is guided and moves in the X-axis direction, a Z-axis guide provided on the X-axis moving body, a Z-axis moving body that is guided by the Z-axis guide and moves in the Z-axis direction, A measuring unit provided on a moving body, wherein the measuring unit is moved in the X-axis, Y-axis, and Z-axis directions to measure the work. A guide rail, a slider slidably provided on the guide rail via a plurality of rolling elements, one end of the Y-axis moving body in the X-axis direction is connected, and a slider for guiding the Y-axis moving body in the Y-axis direction; Attached to the guide surface parallel to the X-axis and X-axis, and the other end of the Y-axis moving body in the X-axis direction It is, to form an air film between the guide surface and air pad for slidably supported in a non-contact and the other end of the X-axis direction of the Y-axis moving body relative to the guide surface, a measuring machine comprising a.

  According to this aspect, the one end of the Y-axis moving body is slidably supported on one guide rail via the slider, and the other end is floated and supported on the guide surface via the air pad. Thereby, the Y-axis moving body is supported so as to be able to swing (rotate) around an axis parallel to the Y-axis (swing (rotation) is possible in the rolling direction) around the slider support portion by the guide rail. Supported.). That is, flexible swinging (rotation) of the Y-axis moving body around the support portion of the slider becomes possible. Accordingly, the air pad at the other end takes a behavior based on the measurement base position on the guide surface with a constant drag, so that measurement in the Z direction can be performed with the measurement base as a reference. In addition, this makes it possible to prevent the Y-axis moving body from bending and deforming. That is, when the two guide rails are slidably supported via a slider, if the parallelism of the two guide rails is not maintained with high accuracy, deformation such as twisting occurs in the Y-axis moving body. One end is supported by one guide rail, and the other end is floated and supported by an air pad, so that the difference in parallelism between the two can be determined by the swing of the Y-axis moving body (Y-axis starting from the slider support by the guide rail). It can be absorbed by the rotational movement (rotational movement in the rolling direction) about the parallel axis, and the deformation of the Y-axis moving body can be prevented. Further, since both ends are supported, deformation due to its own weight, such as cantilever support, can be prevented. As a result, measurement errors caused by deformation of the Y-axis moving body can be prevented.

  In addition, since one end is supported by one guide rail via the slider, the straightness for the Y-axis moving body to move on the Y-axis is defined by the slider on the guide rail. Therefore, the vehicle travels straight in the Y-axis direction with reference to one guide rail, and does not swing right and left when moving in the Y-axis direction. Thereby, the displacement in the yawing direction can be suppressed. Generally, in the case of levitation support using an air bearing, it is difficult to ensure linearity for moving the Y-axis moving body in the Y-axis direction, and displacement in the yawing direction is large. For this reason, if both ends are floated and supported by the air bearings, the directions are slightly changed left and right with respect to the moving direction, and the displacement in the yawing direction is increased. On the other hand, the straightness for moving the Y-axis moving body in the Y-axis direction by supporting one end with the guide rail as in this embodiment is defined by the straightness of the guide rail based on the guide rail at one end. Can be done. Therefore, the Y-axis moving body moves straight with reference to one of the guide rails. As a result, displacement in the yawing direction can be suppressed. Thus, vibration in the yawing direction during acceleration / deceleration can be suppressed, and highly accurate measurement can be performed.

  In addition, by adopting a configuration in which only one side is supported by the air pad, the consumption of compressed air can be reduced. As a result, running costs can be reduced. Furthermore, by adopting a configuration in which the guide rail is supported by one guide rail, sliding resistance can be reduced. As a result, heat generation of the driving unit (motor) can be suppressed, and deformation of the base due to thermal stress can be suppressed.

  A second mode is a mode in which the measuring device of the first mode further includes a Y-axis driving unit that drives the slider to move the Y-axis moving body in the Y-axis direction.

  According to this aspect, the Y-axis driving means for driving the Y-axis moving body is provided not on the air pad side but on the guide rail side. Thereby, the error due to yawing of the Y-axis moving body can be further reduced. That is, the magnitude of the sliding resistance is different between one slider portion and the other air pad portion, and the slider portion is much larger. When driving the Y-axis moving body, by providing the driving means on the slider side having a large sliding resistance, it becomes possible to make the Y-axis moving body go straight based on the straightness of the guide rail. Thereby, when the Y-axis moving body moves in the Y direction, it does not move while slightly changing the direction to the left and right, and moves along the straightness of the guide rail. As a result, errors due to yawing of the Y-axis moving body can be further reduced.

  The effect according to this aspect is an effect independent of the effect according to the first aspect, that is, the effect of swingably supporting the Y-axis moving body (the effect of preventing deformation of the Y-axis moving body). is there. In this aspect, in a measuring machine having a measuring unit in the center, as a means for supporting the measuring unit, one end is supported by a slider that slides along a guide rail, and the other end is provided with a mechanism that floats and supports by an air pad, Providing a drive system on the slider side has an effect of reducing yawing (moving while changing directions slightly alternately left and right) that occurs during movement. That is, in this aspect, when driving the Y-axis moving body while taking into account the balance of the sliding resistance and the balance of the sliding resistance, the Y-axis moving body is made to go straight while reducing the moment of inertia that slightly changes the direction to the left and right, As a result, a unique effect of eliminating errors due to yawing is produced.

  As described above, when both ends of the Y-axis moving body are levitated and supported by the air pad, the reference straightness cannot be ensured, and there is no sliding resistance. Has the disadvantage of increasing yaw. Also, when both ends are supported by sliders, similarly, if only one side is driven, there is a disadvantage that the yawing error is further increased. In addition, when they are not parallel to each other, there is a disadvantage that the movement itself is not smooth.

  According to a third aspect, in the measuring machine of the first or second aspect, the guide rail is disposed above the measuring section.

  The guide rail serves as a fulcrum for supporting the Y-axis moving body. Strictly, the fulcrum is at two points: a guide rail portion and a guide surface portion that supports the air pad. However, since the air pad is not in contact with the surface plate, the point that substantially supports the Y-axis moving body is It becomes a guide rail part. On the other hand, it is most desirable that the position of the center of gravity in the Y-axis movement be a measurement unit (when the measurement is performed with a probe, near the tip of the probe) from the viewpoint of measurement error. However, strictly speaking, it is slightly above the measuring section. However, it is possible to position the position of the center of gravity below the fulcrum position of the guide rail. Since the position of the center of gravity is lower than the position of the fulcrum to be slid by such a driving mechanism, a structure in which the entire Y-axis moving mechanism is hard to fall down can be provided. By adopting such a structure that is hard to fall, an effect that the error in the pitching direction (the error that swings in the front-rear direction when moving) can be significantly reduced. By setting the position of the measuring unit (the position of the probe when measuring with a probe) lower than the position of the guide rail serving as a fulcrum, pitching errors can be greatly reduced.

  A fourth aspect is the measuring instrument according to any one of the first to third aspects, further comprising a surface plate having a work mounting surface parallel to the X axis and the Y axis, wherein the work mounting surface is a guide surface of the air pad. It is an aspect which also serves as.

  According to this aspect, the surface plate for mounting the work is provided, and the work mounting surface of the surface plate serves as the guide surface of the air pad. Thereby, it is not necessary to provide a separate guide surface, and the configuration can be simplified. In addition, since the work mounting surface of the surface plate is generally flattened with high precision, the Y-axis moving body can be guided with high precision.

  In addition, the following effects can be obtained by using the work mounting surface of the surface plate as the guide surface of the air pad. The reference surface in the Z direction of the work is based on the surface (top surface) of the surface plate, that is, the work mounting surface (surface surface). When measuring with a probe, the probe can be brought into contact with the work placement surface, and the contact point can be defined as 0 point, and the height can be defined based on the work placement surface. On the other hand, the reference surface of the Y-axis moving body including the probe is also the work mounting surface. The Y-axis moving body is configured to continuously move up and down with reference to the work mounting surface by the levitation force of the air pad, and the guide rail side, which is one support point, swings (rotates) around the center of the guide rail. Move). For example, even when the parallelism between the guide rail and the surface plate is not ensured, the Y-axis moving body is lifted with respect to the work mounting surface under a constant floating force formed by the air pad, and the guide rail portion is The Y-axis moving body is adjusted by swinging (rotating), and follows the Y-axis moving body without bending. Therefore, since the workpiece and the probe are both based on the workpiece mounting surface, accurate measurement can be performed under the same reference plane.

  In addition, since the reference plane for measurement is defined as a single plane for both the workpiece and the probe, control and management can be facilitated, and even if there is a slight aging of the device, by successively configuring, High-precision measurement can be ensured for a long time.

  Further, when the guide rail is disposed above the measuring section, the following effects are obtained. When the guide rail is disposed above the measurement section, the measurement site of the work is located approximately in the middle between two fulcrums supporting the Y-axis moving body (the surface plate facing the guide rail and the air pad) in the Z direction and the X direction. Position. The existence of the measurement site of the work almost at the intermediate position between the two fulcrums as described above means that minute vibrations and small displacements at each fulcrum part are not promoted, but are canceled out or at least reduced. Will be done. In the case of a bridge-type measuring device or a gantry-type measuring device, the measurement site of the work is located farther away than the positions of the two fulcrums. For this reason, there is a problem that a slight vibration of the fulcrum portion is promoted by the moment, resulting in a larger error. However, according to the present embodiment, the problem that vibration and displacement are promoted does not occur.

  A fourth aspect is the measuring instrument according to any one of the first to third aspects, wherein the Y-axis moving body has a leg parallel to the Z-axis and an X-axis extending from the upper end of the leg parallel to the X-axis. It has an L-shape composed of a base portion, a slider is connected to the tip of the X-axis base, an air pad is attached to the lower end of the leg, and the X-axis base is provided with X-axis guide means. is there.

  According to this aspect, the Y-axis moving body has an L-shape including the X-axis base portion and the leg portions. The Y-axis moving body has a slider connected to the tip of the X-axis base, an air pad attached to the lower end of the leg, and is supported movably in the Y-axis direction. By adopting the L-shape, the moving portion can be reduced in weight as compared with the bridge type. As a result, the moment of inertia during acceleration / deceleration can be reduced, and dynamic displacement (vibration) in the pitching direction can be reduced. Further, the visibility of the measurement area can be improved.

  A sixth mode is a mode in which the measuring instrument of the fifth mode further includes a Y-axis base provided with a guide rail, and a V-shaped Y-axis column provided on the surface plate and supporting the Y-axis base. It is.

  According to this aspect, the Y-axis base on which the guide rail is provided is installed on the surface plate through the V-shaped Y-axis column. Thereby, the visibility of the measurement area can be improved. Generally, the surface plate is made of stone, and the Y-axis column is made of metal (mainly made of cast iron). However, by making the Y-axis column V-shaped, the Y-axis with respect to the surface plate can be secured while maintaining rigidity. The installation area of the shaft column can be minimized. Thus, the influence of the bimetal can be minimized.

  According to a seventh aspect, in the measuring device according to any one of the first to third aspects, the Y-axis moving body includes an X-axis base portion parallel to the X-axis, and parallel to the Z-axis from both ends of the X-axis base portion. It has a gate shape consisting of a pair of extending legs, a slider is connected to the lower end of one leg, an air pad is attached to the lower end of the other leg, and X-axis guide means is provided on the X-axis base. It is a mode provided.

  According to this aspect, the Y-axis moving body has a gate shape. Thereby, the visibility of the measurement area can be improved.

  An eighth aspect is the measuring instrument according to the seventh aspect, further comprising a surface plate having a work mounting surface parallel to the X axis and the Y axis, wherein the work mounting surface also serves as a guide surface.

  According to this aspect, the surface plate for mounting the work is provided, and the work mounting surface of the surface plate serves as the guide surface of the air pad. Thereby, it is not necessary to provide a separate guide surface, and the configuration can be simplified. In addition, since the work mounting surface of the surface plate is generally flattened with high precision, the Y-axis moving body can be guided with high precision.

  According to a ninth aspect, in the measuring device according to any one of the first to third aspects, a surface plate having a work mounting surface parallel to the X-axis and the Y-axis, and a first Y-axis base provided with a guide rail A first Y-axis column provided on the surface plate and supporting the first Y-axis base; a second Y-axis base having a guide surface; and a second Y-axis base provided on the surface plate. And a supporting second Y-axis column, wherein the Y-axis moving body has a bar shape.

  According to this aspect, the Y-axis moving body has a bar shape. This allows the Y-axis moving body to have a minimum necessary size, that is, a minimum size that can ensure the movement of the X-axis moving body. This makes it possible to reduce the weight of the moving part and reduce the moment of inertia during acceleration and deceleration.

  According to a tenth aspect, in the measuring device according to any one of the first to ninth aspects, the air pad is attached to the Y-axis moving body via a free joint.

  According to this aspect, the air pad is attached to the Y-axis moving body via the free joint. Thus, even if the guide surface has undulation, the air pad can swing along the undulation, and it is possible to prevent the Y-axis moving body from receiving a torsional moment.

  An eleventh aspect is a moving guide mechanism of a measuring instrument for guiding a moving body on which a measuring unit is mounted along a horizontal axis, wherein one guide rail disposed parallel to the axis and a plurality of guide rails are provided on the guide rail. A slider that is slidably provided through the rolling elements, one end of the moving body is connected, and guides the moving body along an axis, a horizontal guide surface, and a guide surface attached to the other end of the moving body. And an air pad that forms an air film between the moving body and the other end of the moving body so as to be slidable in a non-contact manner with respect to the guide surface.

  According to this aspect, the movable body has one end slidably supported on one guide rail via the slider, and the other end floatingly supported on the guide surface via the air pad. Thus, the moving body is supported swingably (swingably in the rolling direction) around an axis parallel to the Y axis starting from the support portion of the slider by the guide rail. As described above, by enabling flexible swing with respect to the moving body, deformation of the moving body can be prevented. Further, since both ends are supported, deformation due to its own weight can be prevented. Thereby, a measurement error caused by the deformation of the moving body can be prevented. Further, since one end is supported by one guide rail via the slider, displacement in the yawing direction can be suppressed. Thus, vibration in the yawing direction during acceleration / deceleration can be suppressed, and highly accurate measurement can be performed. In addition, by adopting a configuration in which only one side is supported by the air pad, the consumption of compressed air can be reduced. As a result, running costs can be reduced. Furthermore, by adopting a configuration in which the guide rail is supported by one guide rail, sliding resistance can be reduced. As a result, heat generation of the driving unit (motor) can be suppressed, and deformation of the base due to thermal stress can be suppressed.

  A twelfth aspect is the movement guide mechanism of the measuring instrument according to the eleventh aspect, wherein the moving body has an L-shape including a leg and a base, and a slider is connected to a tip of the base, In this embodiment, an air pad is attached to the lower end of the unit, and the measuring unit is mounted on the base.

  According to this aspect, the moving body has an L-shape. This makes it possible to reduce the weight of the moving part and reduce the moment of inertia during acceleration / deceleration as compared with the bridge type. Further, the visibility of the measurement area can be improved.

  According to a thirteenth aspect, in a movement guide mechanism of a measuring instrument for guiding a moving body on which a measuring unit is mounted along a horizontal axis, one end of the moving body is supported, and the moving body is linearly guided along the axis. A moving guide mechanism of a measuring machine including one mechanical linear guide bearing and at least one air bearing for floatingly supporting the other end of the moving body.

  According to this aspect, one end of the moving body is supported by the linear motion guide bearing, and the other end is supported by the air bearing. Thus, the moving body can be swingably supported (swingably supported in the rolling direction) by the linear motion guide bearing, and deformation of the moving body can be prevented. Further, since both ends are supported, deformation due to its own weight can be prevented. Thereby, a measurement error caused by the deformation of the moving body can be prevented. Further, since one end is supported by the linear motion guide bearing, displacement in the yawing direction can be suppressed. Thus, vibration in the yawing direction during acceleration / deceleration can be suppressed. Further, by adopting a configuration in which only one side is levitated and supported by an air bearing, the consumption of compressed air can be suppressed. As a result, running costs can be reduced. Further, by adopting a configuration in which the bearing is supported by one linear guide bearing, sliding resistance can be reduced. As a result, heat generation of the driving unit (motor) can be suppressed, and deformation of the base due to thermal stress can be suppressed.

  A fourteenth aspect is the movement guide mechanism for a measuring machine according to the thirteenth aspect, wherein the movable body has an L-shape including a leg portion and a base portion, and a distal end portion of the base portion is supported by the linear motion guide bearing. In this embodiment, the lower end of the leg is supported by an air bearing, and the measuring unit is mounted on the base.

  According to this aspect, the moving body has an L-shape. This makes it possible to reduce the weight of the moving part and reduce the moment of inertia during acceleration / deceleration as compared with the bridge type. Further, the visibility of the measurement area can be improved.

  According to the present invention, high-precision measurement can be performed while suppressing running costs. Also, a measuring instrument with high visibility can be configured.

Front view showing a first embodiment of a measuring instrument according to the present invention. Left side view of the measuring machine shown in FIG. Right side view of the measuring machine shown in FIG. Plan view of the measuring machine shown in FIG. Perspective view showing the configuration of a linear motion guide 6-6 sectional view of FIG. Explanatory drawing of the operation of the measuring device according to the present invention Front view showing a second embodiment of the measuring device according to the present invention. Right side view of the measuring machine shown in FIG. Front view showing a third embodiment of the measuring device according to the present invention. Left side view of the measuring machine shown in FIG. Front view showing the schematic configuration of a conventional measuring instrument

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

<< 1st Embodiment >>
<Device configuration>
FIG. 1 is a front view showing a first embodiment of a measuring device according to the present invention, and FIGS. 2, 3, and 4 are a left side view, a right side view, and a plan view of the measuring device shown in FIG. 1, respectively. It is.

  The measuring device 10 is a so-called three-dimensional measuring device, and measures a shape, a dimension, and the like of a workpiece using a probe provided to be movable in directions of X-axis, Y-axis, and Z-axis orthogonal to each other. .

  In the present embodiment, the X axis and the Y axis form a horizontal axis, and the Z axis forms a vertical axis. Therefore, the plane formed by the X axis and the Y axis forms a horizontal plane, and the plane formed by the X axis and the Z axis and the plane formed by the Y axis and the Z axis form a vertical plane.

  The measuring machine 10 mainly includes a gantry (base) 12, a surface plate 14 provided on the gantry 12, a Y-axis column 16 provided on the surface plate 14, and a Y-axis base 18 supported on the Y-axis column 16. A Y-axis guide mechanism 20 provided on the Y-axis base 18, a Y-axis moving frame (Y-axis moving body) 22 guided along the Y-axis guide mechanism 20 and moving along the Y-axis, and a Y-axis moving frame 22 Y-axis drive unit (Y-axis drive means) 24 for moving the Y-axis along the Y-axis, an X-axis guide mechanism 26 provided on the Y-axis moving frame 22, and an X-axis guide mechanism 26 An X-axis moving frame (X-axis moving body) 28 that moves, an X-axis driving unit (X-axis driving means) 30 that moves the X-axis moving frame 28 along the X-axis, and a Z provided in the X-axis moving frame 28. With the shaft guide mechanism 32 A Z-axis moving frame (Z-axis moving body) 34 that is guided by the Z-axis guide mechanism 32 and moves along the Z-axis; a Z-axis driving unit 36 that moves the Z-axis moving frame 34 along the Z-axis; And a measuring unit 38 provided on the axis moving frame 34.

  The gantry 12 supports the surface plate 14 horizontally. The gantry 12 includes three fixing legs 12A and two fall preventing legs 12B. The three fixing legs 12A are arranged at each vertex position of the triangle, and the two fixing legs 12A are arranged at the front and rear corners on the right side of the surface plate 14. The remaining one fixing leg 12A is disposed at the center of the left side of the surface plate 14. The two fall prevention legs 12B are arranged at the front and rear corners on the left side of the surface plate 14.

  At the tip of each fixing leg 12A, a foot 12a whose height can be adjusted is provided. Similarly, the tip of each fall prevention leg 12B is provided with a height-adjustable foot 12b.

  The surface plate 14 is a flat plate whose surface is correctly and smoothly finished. The work to be measured is placed on the surface plate 14. In the measuring device 10 of the present embodiment, the platen 14 is formed in a rectangular shape. The X axis and the Y axis are set parallel to the upper surface (work placement surface (surface)) 14A of the surface plate 14, and the Z axis is set perpendicular to the upper surface (work surface 14A) of the surface plate 14. Is done. The X axis is set in parallel with the front and rear sides of the base 14, and the Y axis is set in parallel with the left and right sides of the base 14.

  In addition, the surface plate 14 is preferably made of a stone material (for example, artificial marble or the like) in order to prevent deformation due to heat or the like.

  The Y-axis column 16 is installed on the surface plate 14 and supports the Y-axis base 18 at a position at a predetermined height from the surface plate 14. The Y-axis column 16 includes a base 16A and two pillars 16B extending upward from both ends of the base 16A, and is formed in a V-shape as a whole. That is, the two support portions 16B are arranged so as to extend outward from the base portion 16A, and are formed in a V-shape. The Y-axis column 16 is installed on the surface plate 14 by fixing the base 16A to the surface plate 14, and is arranged vertically along the Y axis.

  Y-axis column 16 is made of, for example, cast iron. When the Y-axis column 16 is made of cast iron, the influence of the bimetal due to a temperature change between the Y-axis column 16 and the surface plate 14 made of stone material becomes a problem. However, since the Y-axis column 16 of this example is formed in a V-shape, the installation area with the surface plate 14 can be reduced. Thus, the influence of the bimetal can be minimized. In addition, by forming the Y-axis column 16 in a V-shape, lateral visibility (visibility as viewed from the installation side of the Y-axis column 16) can be ensured.

  The Y-axis base 18 is formed in a prism shape. The Y-axis base 18 is supported by the Y-axis column 16 and is disposed at a predetermined height from the surface plate 14. The Y-axis base 18 is provided along the Y-axis.

  Y-axis base 18 is made of, for example, cast iron. It should be noted that the Y-axis base 18 and the Y-axis column 16 can be integrally formed.

  The Y-axis guide mechanism 20 supports a Y-axis moving frame (Y-axis moving body) 22 movably along the Y-axis. The Y-axis guide mechanism 20 includes a Y-axis table 42 and a Y-axis linear guide 44 that supports the Y-axis table 42 movably along the Y-axis.

  The Y-axis linear guide 44 is a so-called mechanical linear guide bearing (also referred to as a linear guide or LM guide (trademark)).

  FIG. 5 is a perspective view showing the configuration of the linear motion guide. FIG. 6 is a sectional view taken along line 6-6 in FIG.

  As shown in the figure, the Y-axis linear guide 44 is slidably supported on the Y-axis guide rail 46 via a single Y-axis guide rail 46 extending linearly and a plurality of balls (rolling elements) 48. And a Y-axis slider 50.

  The Y-axis guide rail 46 includes a base 46A, a support 46B, and a rail 46C, and has a substantially I-shaped cross section. The base 46A is an installation part on the Y-axis base 18. The Y-axis guide rail 46 has a structure in which a rail 46C is supported by a base 46A via a support 46B. The support portion 46B is thinner than the base portion 46A and the rail portion 46C. As a result, the Y-axis guide rail 46 has a substantially I-shaped cross section as a whole.

  The rail portion 46C of the Y-axis guide rail 46 has a ball rolling surface 52 on which the ball 48 rolls. In the Y-axis linear guide 44 of the present embodiment, a total of four ball rolling surfaces 52 are provided, two on each of the left and right sides of the rail portion 46C. Each ball rolling surface 52 is formed along the axis of the Y-axis guide rail 46, and is formed to be inclined at an angle of 45 ° with respect to the bottom surface of the Y-axis guide rail 46 (the bottom surface of the base 46A).

  The Y-axis slider 50 is configured as a block having a substantially U-shaped cross section, and is assembled to the Y-axis guide rail 46 so as to straddle the Y-axis guide rail 46. The Y-axis slider 50 is provided with an infinite circulation path of the ball 48 as a rolling element. The Y-axis slider 50 is slidably supported on the Y-axis guide rail 46 by circulating the ball 48 in the infinite circulation path.

  The Y-axis slider 50 includes a slider body 54 and a pair of end plates 56 attached to both front and rear end faces in the axial direction (sliding direction) of the slider body 54.

  The slider body 54 includes a main girder portion 54A and a pair of leg portions 54B, and is configured as a block having a substantially U-shaped cross section as a whole.

  The main girder portion 54A is formed in a rectangular flat plate shape, and the upper surface portion functions as a mounting surface for the Y-axis table 42.

  The pair of legs 54B are arranged on both left and right sides of the main girder 54A. A load rolling surface 58 on which the ball 48 rolls is provided inside each leg 54B. The load rolling surface 58 is provided corresponding to the ball rolling surface 52 on the guide rail side. That is, when the Y-axis slider 50 is assembled to the Y-axis guide rail 46, the Y-axis slider 50 is arranged to face the ball rolling surface 52 provided on the Y-axis guide rail 46. The Y-axis linear guide 44 of the present embodiment is provided with a total of four ball rolling surfaces 52, two on each of the left and right sides of the rail portion 46C of the Y-axis guide rail 46. For this reason, the Y-axis slider 50 is also provided with a total of four load rolling surfaces 58, two in each leg 54B.

  As described above, the load rolling surface 58 of the slider body 54 is disposed so as to face the ball rolling surface 52 on the guide rail side when the Y-axis slider 50 is mounted on the Y-axis guide rail 46. . As a result, a load passage 60 for the ball 48 is formed between the Y-axis guide rail 46 and the Y-axis slider 50. The ball 48 rolls on the load passage 60 while applying a load between the Y-axis slider 50 and the Y-axis guide rail 46.

  Here, the cross-sectional shape (cross-sectional shape in a direction perpendicular to the axial direction) of each load rolling surface 58 is formed in a circular arc shape having a slightly larger radius of curvature than the radius of curvature of the spherical surface of the ball 48. However, this shape can be appropriately changed in design. The ball rolling surface 52 provided on the Y-axis guide rail 46 is also formed in a circular arc shape.

  Each leg 54B is provided with a ball return passage 62 corresponding to each load passage 60 (two legs are provided for each leg 54B, a total of four ball return passages 62 are provided in one slider body 54). ). The ball return passage 62 has a circular cross section and is formed in parallel with the load passage. The inner diameter of the ball return passage 62 is formed larger than the outer diameter of the ball 48 so that the ball 48 can roll while being released from the load.

  The end plate 56 is formed corresponding to the shape of the slider body 54, and has a substantially U-shaped cross section. The end plate 56 is provided with a direction change path (not shown) corresponding to each ball return path 62 of the slider body 54 (a total of four direction change paths, two on each side, are provided on one end plate 56). Be provided.) The direction change path is formed in a U-shape, and when the end plate 56 is attached to the slider body 54, the ball return path 62 of the slider body 54 and the load path 60 communicate with each other. Thereby, an infinite circulation path of the ball 48 is formed.

  The ball 48 contacts the ball rolling surface 52 of the Y-axis guide rail 46 and the load rolling surface 58 of the Y-axis slider 50 in the load passage 60, and acts between the Y-axis guide rail 46 and the Y-axis slider 50. Rolling the load passage 60 while applying a load.

  When the Y-axis slider 50 moves on the Y-axis guide rail 46, the ball 48 rolls in the load passage 60 in a direction opposite to the moving direction of the Y-axis slider 50. Then, when rolling out from the end of the load passage 60, the load passage 60 is released from the load, and enters the direction change path (not shown) with no load. The ball 48 that has entered the turning path is guided by the turning path, changes its traveling direction by 180 °, and enters the ball return path 62. After the ball 48 travels through the ball return path 62 in a no-load state, it again enters the direction change path, changes its traveling direction by 180 °, and enters the load path 60. Then, the load path 60 rolls while applying the load acting between the Y-axis guide rail 46 and the Y-axis slider 50 again. Thus, the ball 48 circulates in the infinite circulation path while alternately repeating the loaded state and the unloaded state. Thus, the Y-axis slider 50 can smoothly slide along the Y-axis guide rail 46.

  Note that, in the Y-axis linear guide 44 of the present embodiment, a ball is used as a rolling element, but a roller or the like can be used for the rolling element.

  In addition, in the Y-axis linear guide 44 of the present embodiment, the infinite circulation path on which the ball rolls is formed of four rows, but the number of rows of the infinite circulation path is not limited to this. Absent. For example, the infinite circulation path may have two rows.

  In the Y-axis linear guide 44 configured as described above, the Y-axis guide rail 46 is laid on the Y-axis base 18 along the Y-axis. Therefore, the Y-axis slider 50 is movably supported along the Y-axis.

  Further, in the Y-axis linear guide 44 of the present embodiment, two Y-axis sliders 50 are supported by one Y-axis guide rail 46 (only one slider is shown in FIG. 5).

  The Y-axis table 42 is formed in a rectangular flat plate shape. The Y-axis table 42 is fixed to the Y-axis slider 50 and installed horizontally (installed in parallel with the XY plane). Therefore, the Y-axis table 42 is slidably supported in a horizontal posture along the Y-axis direction.

  The Y-axis moving frame 22 is guided by the Y-axis guide mechanism 20 and moves along the Y-axis. The Y-axis moving frame 22 is formed in an L-shape having a horizontal beam portion 22A and a vertical support portion 22B, and is vertically disposed along the X-axis (disposed along the X-Z plane). Is done.)

  The beam portion 22A is formed in a substantially prismatic shape, and is disposed along the X axis. The support portion 22B is formed in a substantially prismatic shape, and is disposed along the Z axis. The support portion 22B is connected to one end of the beam portion 22A at the upper end and integrated. Thereby, the Y-axis moving frame 22 having an L-shape as a whole is formed.

  In the Y-axis moving frame 22, the tip of the beam portion 22A is fixed to the Y-axis table 42, and is slidably supported in the Y-axis direction. In addition, the lower end of the column portion 22 </ b> B of the Y-axis moving frame 22 is floated and supported on the surface plate 14 by the air bearing 70.

  The air bearing 70 is provided with an air pad 72 and levitates and supports the column 22B of the Y-axis moving frame 22 using the upper surface (work placement surface) 14A of the surface plate 14 as a guide surface.

  The air pad 72 is formed in a disk shape, and is attached to the lower end of the support 22B. The air pad 72 forms a layer of air between the air pad 72 and the upper surface of the surface plate 14 by injecting compressed air toward the upper surface of the surface plate 14 (work placement surface 14A), thereby forming the strut portion 22B into the surface plate 14. Levitating support to the upper surface of the.

  In this example, the air pad 72 is attached to the lower end of the support 22B via a universal joint 74. That is, the air pad 72 is attached to the lower end of the column 22B in a swingable manner. By attaching the air pad 72 to the column 22B via the universal joint 74 in this way, even if the upper surface (guide surface) 14A of the surface plate 14 has undulation, the air pad 72 swings along the undulation. It is possible to prevent the Y-axis moving frame 22 from receiving a torsional moment.

  As described above, one end (the tip of the beam 22A) of the Y-axis moving frame 22 is slidably supported along the Y-axis direction by one Y-axis linear guide 44, and the other end (the lower end of the column 22B). ) Are floated and supported on the surface plate 14 by the air bearing 70, and are movably supported along the Y axis. By supporting the Y-axis moving frame 22 with such a structure, it is possible to prevent the Y-axis moving frame 22 from being deformed (twisted, bent, and the like) and to move the Y-axis moving frame 22 with high accuracy. This is due to the following mechanism.

  The Y-axis moving frame 22 supports the X-axis moving frame 28 movably in the X-axis direction. For this reason, it is necessary to secure the length of the beam portion 22A at least for the moving stroke of the X-axis moving frame 28. When both ends of the beam portion 22A are supported by a linear motion guide (mechanical linear motion guide bearing) and an air bearing, it is necessary to secure an installation interval between the two by the moving stroke of the X-axis moving frame 28. . When the linear motion guide and the air bearing are separated from each other as described above, a moment in the rolling direction (a moment around the Y axis) is applied to the Y axis moving frame 22 unless the parallelism between them is maintained with high accuracy. appear.

  Now, consider a case where both ends of the Y-axis moving frame 22 are supported by a linear motion guide (mechanical linear motion guide bearing). In this case, the moment generated in the Y-axis moving frame 22 directly acts on the Y-axis moving frame 22 as a bending moment. As a result, the Y-axis moving frame 22 is deformed.

  Similarly, when one end supports an air bearing and the other end is supported by a pair of linear motion guides, the moment acts directly on the Y-axis moving frame 22 as a bending moment. As a result, the Y-axis moving frame 22 is deformed.

  On the other hand, when one end is supported by one Y-axis linear guide 44 and the other end is supported by the air bearing 70 as in the present embodiment, the moment generated in the Y-axis moving frame 22 is Y It is absorbed by the shaft linear guide 44.

  In general, the linear motion guide (mechanical linear motion guide bearing) is strong in load moment in the pitching direction (MP direction in FIG. 5) and yawing direction (MY direction in FIG. 5) due to its structure, but in the rolling direction (FIG. 5). 5) (MR direction). Therefore, when one end is supported by one Y-axis linear guide 44 and the other end is supported by an air bearing 70, the Y-axis moving frame 22 is flexible in the rolling direction (MR) as shown in FIG. Exercise is possible. As a result, even if a moment in the rolling direction is generated on the Y-axis moving frame 22, no load is applied to the Y-axis moving frame 22, and deformation is prevented.

  Further, according to the present structure, since both ends of the Y-axis moving frame 22 are supported, deformation due to its own weight, such as cantilever support, can be prevented.

  In general, levitation support using an air bearing has a disadvantage that displacement in the yawing direction is large. However, by supporting one end by the Y-axis linear guide 44, displacement in the yawing direction can be suppressed. That is, as described above, the linear motion guide has a characteristic that it is strong against load moments in the pitching direction and the yawing direction. (Since the linear motion guide is a pressurized mechanical linear motion guide bearing, it has a yawing rigidity. By supporting one end with the Y-axis linear guide 44, displacement in the yawing direction can be effectively suppressed even when one side is supported by an air bearing.

  Furthermore, by adopting a configuration in which only one side is levitated and supported by the air bearing 70, the consumption of compressed air can be suppressed.

  As described above, by properly utilizing the characteristics of the air bearing and the linear motion guide, the Y-axis moving frame 22 can be supported so as to be movable along the Y-axis without causing deformation.

  The Y-axis driving unit 24 drives the Y-axis moving frame 22 by so-called belt driving. The Y-axis drive unit 24 includes a pair of pulleys 76A and 76B, a drive belt 78 wound around the pair of pulleys 76A and 76B, and a Y-axis motor 80 that rotationally drives one pulley 76A.

  The pair of pulleys 76A and 76B are installed on the Y-axis base 18 via brackets 82A and 82B, respectively. The rotation axis of each pulley 76A, 76B is arranged in parallel with the X axis.

  The drive belt 78 is formed in an endless shape. The drive belt 78 is disposed along the Y axis by being wound around a pair of pulleys 76A and 76B.

  Here, the drive belt 78 is disposed on the same straight line as the Y-axis guide rail 46 of the Y-axis linear guide 44. That is, they are arranged so as to overlap the Y-axis guide rail 46. Thus, by arranging the drive belt 78, the drive point can be arranged on the line which receives the sliding resistance, and the hysteresis of the reciprocating movement can be eliminated.

  In order to arrange the drive belt 78 in this manner, the pair of pulleys 76A and 76B are arranged before and after the Y-axis linear guide 44. Further, the Y-axis moving frame 22 is provided with an insertion hole 84 through which the drive belt 78 passes.

  The Y-axis motor 80 drives one of the pulleys 76A to rotate so that the drive belt 78 runs. Y-axis motor 80 is attached to bracket 82A and connected to pulley 76A.

  The Y-axis drive unit 24 configured as described above drives the Y-axis motor 80 so that the drive belt 78 runs along the Y-axis direction. The drive belt 78 is connected to the Y-axis table 42. Thus, when the Y-axis motor 80 is driven, the Y-axis table 42 moves along the Y-axis. Further, when the Y-axis table 42 moves along the Y-axis, the Y-axis moving frame 22 moves along the Y-axis.

  The X-axis guide mechanism 26 supports the X-axis moving frame 28 movably along the X-axis. The X-axis guide mechanism 26 includes an X-axis table 86 and a pair of X-axis linear guides 88 for guiding the X-axis table 86 along the X-axis direction.

  The configuration of the X-axis linear guide 88 is the same as the configuration of the Y-axis linear guide 44 configuring the Y-axis guide mechanism 20. That is, it is configured to include an X-axis guide rail 90 and an X-axis slider 92 slidably supported by the X-axis guide rail 90 via a plurality of balls (not shown). The X-axis guide rail 90 is laid on the beam 22A of the Y-axis moving frame 22, and is disposed along the X-axis.

  The X-axis table 86 is formed in a rectangular flat plate shape. The X-axis table 86 is fixed to the X-axis slider 92 of each X-axis linear guide 88 and is installed horizontally (installed in parallel with the XY plane). Therefore, the X-axis table 86 is slidably supported in a horizontal posture along the X-axis direction.

  The X-axis moving frame 28 is formed in a prism shape. The X-axis moving frame 28 is vertically attached to the X-axis table 86.

  The X-axis moving frame 28 is movably supported by a pair of X-axis linear guides 88. However, since the interval between the pair of X-axis linear guides 88 is short, the deformation of the X-axis moving frame 28 is problematic. Never be.

  The X-axis drive unit 30 moves the X-axis moving frame 28 with a so-called feed screw. The X-axis drive unit 30 includes a screw rod 94, a nut member 96 screwed to the screw rod 94, and an X-axis motor 98 for driving the screw rod 94 to rotate.

  The screw rod 94 is rotatably attached to the beam 22A of the Y-axis moving frame 22 via a pair of brackets 100. The screw rod 94 is provided along the X axis. The screw rod 94 is disposed between the pair of X-axis linear guides 88.

  The nut member 96 is screwed to the screw rod 94. The nut member 96 is connected to the X-axis table 86. Therefore, when the screw rod 94 is rotated, the X-axis table 86 moves along the X-axis direction according to the amount of rotation.

  The X-axis motor 98 is connected to the screw rod 94 and drives the screw rod 94 to rotate. The X-axis motor 98 is attached to one bracket 100 and connected to the screw rod 94.

  When the X-axis drive unit 30 configured as described above drives the X-axis motor 98, the screw rod 94 rotates, and the X-axis table 86 moves in the X-axis direction according to the amount of rotation. As a result, the X-axis moving frame 28 provided on the X-axis table 86 moves along the X-axis direction.

  The Z-axis guide mechanism 32 supports the Z-axis moving frame 34 movably along the Z-axis. The Z-axis guide mechanism 32 includes a Z-axis table 102 and a pair of Z-axis linear guides 104 for guiding the Z-axis table 102 along the Z-axis direction.

  The configuration of the Z-axis linear guide 104 is the same as the configuration of the Y-axis linear guide 44 constituting the Y-axis guide mechanism 20. That is, it is configured to include a Z-axis guide rail 106 and a Z-axis slider 108 slidably supported by the Z-axis guide rail 106 via a plurality of balls (not shown). The Z-axis guide rail 106 is laid on the X-axis moving frame 28 and arranged along the Z-axis.

  The Z-axis table 102 is formed in a rectangular flat plate shape. The Z-axis table 102 is fixed to the Z-axis slider 108 of each Z-axis linear guide 104 and installed vertically (installed in parallel with the XZ plane). Therefore, the Z-axis table 102 is slidably supported along the XZ plane.

  The Z-axis moving frame 34 is formed in a prism shape. The Z-axis moving frame 34 is attached to the Z-axis table 102 along the Z-axis, and is movably supported along the Z-axis.

  The Z-axis moving frame 34 is movably supported by the pair of Z-axis linear guides 104. However, since the installation interval of the pair of Z-axis linear guides 104 is short, the deformation of the Z-axis moving frame 34 is problematic. Never be.

  The Z-axis drive unit 36 moves the Z-axis moving frame 34 along the Z-axis with a so-called feed screw. The Z-axis drive unit 36 includes a screw rod 110, a nut member 112 screwed to the screw rod 110, and a Z-axis motor 114 for driving the screw rod 110 to rotate.

  The screw rod 110 is rotatably attached to the X-axis moving frame 28 via a pair of brackets 116. The screw rod 110 is provided along the Z axis. The screw rod 110 is provided between the pair of Z-axis linear guides 104.

  The nut member 112 is screwed to the screw rod 110. The nut member 112 is connected to the Z-axis table 102. Therefore, when the screw rod 110 is rotated, the Z-axis table 102 moves along the Z-axis direction according to the amount of rotation.

  The Z-axis motor 114 is connected to the screw rod 110 and drives the screw rod 110 to rotate. The Z-axis motor 114 is attached to one bracket 116 and connected to the screw rod 110.

  When the Z-axis drive unit 36 configured as described above drives the Z-axis motor 114, the screw rod 110 rotates, and the Z-axis table 102 moves in the Z-axis direction according to the amount of rotation. As a result, the Z-axis moving frame 34 provided on the Z-axis table 102 moves along the Z-axis direction.

  The measurement unit 38 is provided on the Z-axis moving frame 34. The measurement unit 38 includes a measurement unit main body 118 and a probe 120. The measurement unit main body 118 is formed in a box shape and incorporates a probe control device (not shown). The probe 120 is arranged vertically downward along the Z-axis from the measurement section main body 118. When the Z-axis moving frame 34 is moved, the probe 120 moves along the Z-axis direction. At the time of measurement, the tip of the probe 120 is brought into contact with the work to be measured, the coordinates (X, Y, Z) of the tip at the time of contact are detected, and the shape, dimensions, etc. of the work are measured from a set of the coordinate values. I do.

  The Y-axis base 18 has a scale (Y-axis scale) (not shown) for detecting the position of the Y-axis moving frame 22 on the Y-axis along the Y-axis. The Y-axis coordinates of the probe 120 are obtained by detecting the position of the Y-axis moving frame 22 using the Y-axis scale.

  The beam portion 22A of the Y-axis moving frame 22 is provided with a scale (X-axis scale) (not shown) for detecting the position of the X-axis moving frame 28 on the X-axis along the X-axis. The X-axis coordinates of the probe 120 are obtained by detecting the position of the X-axis moving frame 28 using the X-axis scale.

  Further, the X-axis moving frame 28 is provided with a scale (Z-axis scale) (not shown) for detecting the position of the Z-axis moving frame 34 on the Z-axis along the Z-axis. The Z-axis coordinates of the probe 120 are obtained by detecting the position of the Z-axis moving frame 34 using the Z-axis scale.

<Action>
As described above, the measuring device 10 of the present embodiment is configured as a three-dimensional measuring device, and measures the shape, dimensions, and the like of a work (object to be measured).

  As shown in FIG. 7, the work W is placed on the surface plate 14.

  The measurement is performed by bringing the tip of the probe 120 into contact with the surface of the work W. That is, by moving the probe 120, the coordinates (X, Y, Z) when the tip of the probe 120 contacts the work W are detected, and the shape, size, and the like of the work are measured from a set of the coordinate values.

  The probe 120 moves along the X, Y, and Z axes by driving the X-axis motor 98, the Y-axis motor 80, and the Z-axis motor 114. That is, when the X-axis motor 98 is driven, the X-axis moving frame 28 moves along the X-axis, and as a result, the probe 120 moves along the X-axis. When the Y-axis motor 80 is driven, the Y-axis moving frame 22 moves along the Y-axis, and as a result, the probe 120 moves along the Y-axis. When the Z-axis motor 114 is driven, the Z-axis moving frame 34 moves along the Z-axis, and as a result, the probe 120 moves along the Z-axis.

  At this time, since the Y-axis moving frame 22 on which the X-axis moving frame 28 and the Z-axis moving frame 34 are mounted is movably supported by one Y-axis linear guide 44 and the air bearing 70, high precision is achieved. Can be moved to the probe 120.

  That is, as described above, in order to support the Y-axis moving frame 22 so as to be movable along the Y-axis, when the Y-axis linear guide 44 and the air bearing 70 are separately installed, the Y-axis moving frame 22 Although a moment in the rolling direction is generated, the Y-axis moving frame 22 can perform a flexible movement in the rolling direction (MR) (can swing around the Y-axis). Even when a moment in the direction is generated, the Y-axis moving frame 22 is supported without being deformed. Thereby, the Y-axis moving frame 22 on which the X-axis moving frame 28 and the Z-axis moving frame 34 are mounted can be stably supported with high precision.

  That is, for example, when both ends of the Y-axis moving frame 22 are respectively supported by the linear motion guides, if the parallelism of the linear motion guides at both ends is not maintained with high precision, the Y-axis moving frame 22 may be deformed by twisting or the like. Although one end is supported by the Y-axis linear guide 44 and the other end is supported by the air bearing 70, the difference in parallelism between the two can be absorbed by the swing of the Y-axis moving frame 22. 22 can be prevented from being deformed.

  In addition, since one end is supported by the Y-axis linear guide 44, the straightness for the Y-axis moving frame 22 to move on the Y-axis depends on the Y-axis guide rail 46 constituting the Y-axis linear guide 44. Of the Y-axis slider 50. Therefore, the vehicle travels straight in the Y-axis direction with reference to one guide rail (Y-axis guide rail 46), and does not swing right and left when moving in the Y-axis direction. Thereby, the displacement in the yawing direction can be suppressed. Generally, it is difficult for the levitation support by the air bearing to secure the straightness during movement, and the displacement in the yawing direction is large. For this reason, if both ends of the Y-axis moving frame 22 are levitated and supported by the air bearings, the direction is slightly changed left and right with respect to the moving direction, and the displacement in the yawing direction is increased. On the other hand, by supporting one end with the Y-axis linear guide 44 as in the present embodiment, the linearity for moving the Y-axis moving frame 22 in the Y-axis direction is Sex. Therefore, the Y-axis moving frame 22 moves straight based on the Y-axis linear guide 44. As a result, displacement in the yawing direction can be suppressed. Thus, vibration in the yawing direction during acceleration / deceleration can be suppressed, and highly accurate measurement can be performed.

  In addition, since the Y-axis moving frame 22 has a structure in which both ends are supported, there is no deformation due to its own weight unlike cantilever support.

  Further, the floating support by the air bearing generally has a disadvantage that displacement in the yawing direction is large. However, in the measuring device 10 of the present embodiment, since one end is supported by the Y-axis linear guide 44, the displacement in the yawing direction is large. Can also be suppressed.

  Further, since only one side is supported by the air bearing 70, the consumption of compressed air can be suppressed.

  Further, in the measuring device 10 of the present embodiment, since the drive belt 78 for driving the Y-axis moving frame 22 is disposed on the Y-axis guide rail 46, it is possible to eliminate the reciprocating hysteresis. That is, since the driving points are arranged on the line receiving the sliding resistance, the hysteresis of the reciprocating movement can be eliminated. Thereby, the error due to yawing of the Y-axis moving frame 22 can be further reduced. That is, there is a difference in the sliding resistance between the part of the one Y-axis linear guide 44 and the part of the other air pad 72, and the part of the Y-axis linear guide 44 is much larger. When the Y-axis moving frame 22 is driven, the driving means is provided on the Y-axis moving guide 44 side where the sliding resistance is large. It is possible to go straight. Thus, when the Y-axis moving frame 22 moves in the Y direction, it can be prevented from moving while slightly changing the direction to the left and right. Thereby, the error due to yawing of the Y-axis moving frame 22 can be further reduced.

  Further, by adopting a configuration in which it is supported by one Y-axis linear guide 44, sliding resistance can be reduced. Thus, heat generation of the Y-axis motor 80 can be suppressed, and deformation of the base and the like due to thermal stress can be suppressed.

  When the Y-axis moving frame 22 is swingably supported in the rolling direction (MR) as in the measuring device 10 of the present embodiment, an error may occur in the contact position of the probe due to the swing. Since the error change due to the swing of the Y-axis moving frame 22 has reproducibility, it can be easily corrected.

  As described above, when both ends of the Y-axis moving frame are supported by the linear motion guide, or when one end of the Y-axis moving frame is supported by the pair of linear motion guides, the Y-axis moving frame is deformed (twisted). , Bending, etc.) can occur, but the deformation varies with temperature and the like. Therefore, the reproducibility of the error change is poor, and it is difficult to accurately grasp the influence on the measured value caused by the deformation of the Y-axis moving frame.

  On the other hand, in the measuring device 10 of the present embodiment, the Y-axis moving frame 22 is not deformed, and only the swing of the Y-axis moving frame 22 appears as a measurement error. Since the measurement error due to the swing of the Y-axis moving frame 22 has reproducibility, it can be corrected with high accuracy by applying a generally-known correction technique.

  The correction of the error is performed, for example, by measuring a reference work (a work having a known dimension and shape), calculating a correction formula from the measurement result, and correcting the measurement result using the obtained correction formula. .

  Further, according to measuring device 10 of the present embodiment, since Y-axis moving frame 22 is formed in an L-shape, the weight of Y-axis moving frame 22 can be reduced. As a result, the moment of inertia during acceleration / deceleration can be reduced, and dynamic displacement (vibration) in the pitching direction can be reduced. Further, the visibility of the measurement area from the side can be improved.

  Further, according to measuring device 10 of the present embodiment, work placement surface 14A of surface plate 14 serves as a guide surface of air pad 72. Thereby, it is not necessary to provide a separate guide surface, and the configuration can be simplified. In addition, since the work mounting surface of the surface plate is generally flattened with high precision, the Y-axis moving body can be guided with high precision.

  In addition, since the work mounting surface 14A of the surface plate 14 is used as the guide surface of the air pad 72, the following effects can be obtained independently. The reference surface in the Z direction of the work is the work mounting surface 14A of the surface plate 14. The probe 120 is brought into contact with the workpiece mounting surface 14A, and the height of the probe 120 can be defined on the basis of the workpiece mounting surface, with the point of contact being taken as 0 point. On the other hand, the reference surface of the Y-axis moving frame 22 including the probe 120 also becomes the work mounting surface 14A. The Y-axis moving frame 22 is configured to be constantly moved up and down with reference to the work mounting surface 14A by the floating force of the air pad 72, and the Y-axis linear guide 44, which is one of the support points, is connected to the Y-axis guide rail 46. Swinging (rotating) around the center. For example, even when the parallelism between the Y-axis guide rail 46 and the work placement surface 14A of the surface plate 14 is not ensured, the work placement surface 14A is not affected by the constant floating force formed by the air pad 72. The Y-axis moving frame 22 is lifted as a reference, and is adjusted by swinging (rotating) at the Y-axis guide rail 46, so that the Y-axis moving frame 22 follows without flexing and deforming. Therefore, since two of the workpiece and the probe 120 are based on the workpiece mounting surface 14A, it is possible to perform accurate measurement under the same reference plane.

  In addition, since the reference plane for measurement is defined as a single plane for both the workpiece and the probe 120, control and management can be facilitated, and even if there is a slight aging of the apparatus, by sequentially configuring the apparatus, , High-precision measurement can be secured for a long time.

  Further, in the measuring device 10 of the present embodiment, since the Y-axis linear guide 44 is disposed above the tip of the probe 120, the structure in which the entire Y-axis moving mechanism does not easily fall can be provided. Thereby, the pitching error can be greatly reduced.

  The Y-axis guide rail 46 constituting the Y-axis linear guide 44 serves as a fulcrum for supporting the Y-axis moving frame 22. Strictly, the fulcrum is at two points, that is, the portion of the Y-axis guide rail 46 and the portion of the work mounting surface 14A of the surface plate 14 that supports the air pad 72, but the air pad 72 is not in contact with the surface plate 14. Therefore, the point where the Y-axis moving frame 22 is substantially supported is the Y-axis guide rail 46. On the other hand, the position of the center of gravity in the movement in the Y-axis direction is most preferably near the tip of the probe 120 from the viewpoint of measurement error. However, strictly, it is slightly above the tip of the probe 120. However, it is possible to position the position of the center of gravity below the fulcrum position of the Y-axis guide rail 46. Since the position of the center of gravity is lower than the position of the fulcrum to be slid by such a driving mechanism, a structure in which the entire Y-axis moving mechanism is hard to fall down can be provided. By adopting such a structure that is hard to fall, an effect that the error in the pitching direction (the error that swings in the front-rear direction when moving) can be significantly reduced. By disposing the Y-axis linear guide 44 above the tip of the probe 120 as described above, the pitching error can be greatly reduced, and the measurement accuracy can be further improved.

  Further, when the Y-axis linear guide 44 is disposed above the tip of the probe 120, the following effects are obtained. When the Y-axis guide rail 46 is disposed above the tip of the probe 120, the measurement site of the work includes two fulcrums (parts of the Y-axis guide rail 46) supporting the Y-axis moving frame 22 in the Z direction and the X direction. (The portion of the surface plate 14 facing the air pad 72). As described above, the existence of the measurement site of the work almost at the intermediate position between the two fulcrums does not promote minute vibration or minute displacement at each fulcrum part, but cancels out or at least reduces the size. Will be. In the case of a bridge-type measuring device or a gantry-type measuring device, the measurement site of the work is located farther away than the positions of the two fulcrums. For this reason, there is a problem that a slight vibration of the fulcrum portion is promoted by the moment, resulting in a larger error. However, when the Y-axis linear guide 44 is disposed above the tip of the probe 120, the problem that vibration and displacement are promoted does not occur.

  It is preferable that the Y-axis slider 50 be mounted near the same plane as the lower surface of the beam 22A of the Y-axis moving frame 22 in order to bring the center of gravity closer to the vicinity of the tip of the probe 120. Further, it is preferable that the tip of the probe 120 be moved vertically downward, and a control device for the probe 120 be mounted near the probe to lower the center of gravity.

<< 2nd Embodiment >>
FIG. 8 is a front view showing a second embodiment of the measuring instrument according to the present invention. FIG. 9 is a right side view of the measuring machine shown in FIG.

  As shown in the figure, the measuring device 10A of the present embodiment differs from the measuring device 10 of the first embodiment in that the Y-axis moving frame 22 is formed in a so-called portal shape (a so-called bridge). Type). Therefore, here, only points that are structurally different from the measuring device 10 of the first embodiment will be described, and configurations that are the same as or correspond to those of the measuring device 10 of the first embodiment will be denoted by the same reference numerals. The description is omitted.

  As shown in FIG. 8, the Y-axis moving frame 22 includes a horizontal beam portion 22A and a pair of column portions 22B and 22C extending vertically downward from both ends of the horizontal beam portion 22A. , Are formed in a portal shape as a whole. That is, the measuring device 10 according to the first embodiment is formed on the Y-axis moving frame 22 in substantially the same shape as the shape provided with the support portion 22C.

  In addition, since the Y-axis moving frame 22 is formed in the portal shape in this manner, the measuring device 10A of the present embodiment does not include the Y-axis column.

  In the Y-axis moving frame 22, one of the columns 22B is floated and supported on the surface plate 14 by an air bearing 70, and the other column 22C is supported by the Y-axis guide mechanism 20 so as to be movable in the Y-axis direction.

  The Y-axis guide mechanism 20 includes a Y-axis table 42 and one Y-axis linear guide 44 that supports the Y-axis table 42 movably along the Y-axis.

  The Y-axis linear guide 44 includes a Y-axis guide rail 46 and a Y-axis slider 50 slidably supported by the Y-axis guide rail 46 via a plurality of balls (not shown). The Y-axis guide rail 46 is laid on the Y-axis base 18 along the Y-axis.

  The Y-axis base 18 is formed in a long shape, and is attached to the surface plate 14 along the Y-axis.

  The Y-axis moving frame 22 has a lower end portion of one of the columns 22C fixed to the Y-axis table 42, and is supported movably in the Y-axis direction.

  As described above, also in the measuring machine 10A of the present embodiment, the Y-axis moving frame 22 is supported by the single Y-axis linear guide 44 and the air bearing 70 so as to be movable in the Y-axis direction. Accordingly, the Y-axis moving frame 22 can perform flexible movement in the rolling direction (MR), and can support the Y-axis moving frame 22 without causing deformation.

  Moreover, in the measuring device 10A of the present embodiment, since the Y-axis moving frame 22 is formed in a gate shape, the visibility from the side can be further improved.

  In this example, the Y-axis base 18 is installed on the surface plate 14, and the Y-axis linear motion guides 44 and the like are installed on the Y-axis base 18. However, the Y-axis linear motion guides 44 and the like are fixed. It may be configured to be installed on the board 14.

<< Third Embodiment >>
FIG. 10 is a front view showing a third embodiment of the measuring instrument according to the present invention. FIG. 11 is a left side view of the measuring machine shown in FIG.

  As shown in the figure, the measuring device 10B of the present embodiment differs from the measuring device 10 of the first embodiment in that the Y-axis moving frame 22 is formed in a bar shape extending linearly ( So-called gantry type). Therefore, here, only points that are structurally different from the measuring device 10 of the first embodiment will be described, and configurations that are the same as or correspond to those of the measuring device 10 of the first embodiment will be denoted by the same reference numerals. The description is omitted.

  The Y-axis moving frame 22 is formed in a prismatic bar shape. In other words, the Y-axis moving frame 22 of the measuring device 10 according to the first embodiment is formed in substantially the same shape as the case where the Y-axis moving frame 22 includes only the beam 22A.

  Since the Y-axis moving frame 22 is formed in such a straight bar shape, the measuring machine 10B of the present embodiment is provided with a pair of Y-axis columns on the surface plate. That is, a first Y-axis column 16 and a second Y-axis column 17 are provided.

  The first Y-axis column 16 is formed in a V-shape similarly to the Y-axis column 16 of the measuring device 10 of the first embodiment. The first Y-axis base 18 is horizontally supported on the upper part.

  The second Y-axis column 17 is also formed in a V-shape similarly to the first Y-axis column 16. Above the Y-axis column 17, a second Y-axis base 19 is horizontally supported.

  The second Y-axis base 19 is formed in a prism shape. The upper surface 19A of the second Y-axis base 19 forms a guide surface of the air bearing 70. Therefore, the upper surface 19A of the second Y-axis base 19 is formed smoothly. Further, the second Y-axis base 19 is supported by the second Y-axis column 17 such that the upper surface 19A is horizontal (parallel to the XY plane).

  One end of the Y-axis moving frame 22 is supported by the Y-axis guide mechanism 20 so as to be movable in the Y-axis direction, and the other end is on the guide surface (the upper surface 19A of the second Y-axis base 19) by the air bearing 70. The levitation is supported.

  The Y-axis guide mechanism 20 includes a Y-axis table 42 and one Y-axis linear guide 44 that supports the Y-axis table 42 movably along the Y-axis.

  The Y-axis linear guide 44 includes a Y-axis guide rail 46 and a Y-axis slider 50 slidably supported by the Y-axis guide rail 46 via a plurality of balls (not shown). The Y-axis guide rail 46 is laid on the first Y-axis base 18 along the Y-axis.

  One end of the Y-axis moving frame 22 is fixed to the Y-axis table 42 and is supported movably in the Y-axis direction.

  The air bearing 70 includes an air pad 72, and supports the other end of the Y-axis moving frame 22 by using the upper surface 19A of the second Y-axis base 19 as a guide surface.

  The air pad 72 is attached to the other end of the Y-axis moving frame 22 via a universal joint 74. The air pad 72 forms a layer of air between the air pad 72 and the upper surface 19A of the second Y-axis base 19 by injecting compressed air toward the upper surface 19A of the second Y-axis base 19. The other end of 22 is levitated and supported on the upper surface 19A of the second Y-axis base 19.

  As described above, also in the measuring machine 10A of the present embodiment, the Y-axis moving frame 22 is supported by the single Y-axis linear guide 44 and the air bearing 70 so as to be movable in the Y-axis direction. Accordingly, the Y-axis moving frame 22 can perform flexible movement in the rolling direction (MR), and can support the Y-axis moving frame 22 without causing deformation.

  Further, in measuring device 10B of the present embodiment, since Y-axis moving frame 22 has a bar shape, Y-axis moving frame 22 can be reduced in weight. As a result, the moment of inertia during acceleration / deceleration can be reduced.

  Further, since the Y-axis moving frame 22 can be supported in the Y-axis direction close to the center of gravity, dynamic displacement in the pitching direction during acceleration / deceleration can be suppressed, and a stable and highly accurate guide can be provided.

  On the other hand, the measuring instrument 10B of the present embodiment has a configuration in which the Y-axis columns (the first Y-axis column 16 and the second Y-axis column 17) are erected on both sides of the surface plate 14, so that Visibility of the measurement area from one side decreases.

  Therefore, considering the visibility and the stability of movement, it is preferable that the Y-axis moving frame 22 has an L-shape as a whole as in the first embodiment.

<< Other embodiments >>
In the above embodiment, as a support mechanism for supporting one end of the Y-axis moving frame 22 along the Y-axis, a guide rail (Y-axis guide rail 46) is slidably supported by the guide rail via a rolling element. A linear motion guide (Y-axis linear motion guide 44) composed of a slider (Y-axis slider 50) and a support mechanism for supporting one end of the Y-axis moving frame 22 along the Y-axis. It is not limited. Any structure that can support the Y-axis moving frame 22 so as to be able to swing around the Y-axis when the other end is supported by air bearing. For this purpose, there is provided a configuration in which one guide rail and a slider slidably supported by the guide rail are provided, and the slider is swingably supported in the rolling direction with respect to the guide rail. Any structure that is acceptable) may be used. In this case, it is preferable that the configuration be strong against displacements other than the rolling direction, that is, displacements in the pitching direction and the yawing direction. Thus, the displacement in the pitching direction and the yawing direction can be prevented, and the Y-axis moving frame 22 can be guided with high accuracy along the Y-axis.

  Further, in the above embodiment, the Y-axis slider 50 is driven by a belt to move the Y-axis moving frame 22 in the Y-axis direction. However, the means for driving the Y-axis moving frame 22 (Y-axis driving means) Is not limited to this. Any configuration may be used as long as the Y-axis moving frame 22 can be moved along the Y-axis while allowing the Y-axis moving frame 22 to swing about the support portion of the Y-axis slider 50 as a fulcrum.

  It is preferable that the Y-axis driving unit drives the Y-axis slider 50 to move the Y-axis moving frame 22. By driving the Y-axis slider 50, the Y-axis moving frame 22 can be moved straight based on the straightness of the Y-axis guide rail 46, and yawing of the Y-axis moving frame 22 can be prevented. it can. This effect is independent of the effect of swingably supporting the Y-axis moving frame 22 with the support of the Y-axis slider 50 as a fulcrum. As in the measuring device 10 having the measuring portion in the center as in the measuring device 10 of the above embodiment, as a means for supporting the measuring portion, one end is supported by a slider that slides along a guide rail, and the other end is an air pad. By having a mechanism for supporting the slider and providing a drive system on the slider side, there is an effect of reducing yawing that occurs during movement. That is, the above-described configuration allows the Y-axis moving frame 22 to move straight while reducing the moment of inertia that slightly changes in the left-right direction when driving the Y-axis moving frame 22 while taking into account the balance of the sliding resistance and the balance of the sliding resistance. As a result, a unique effect of eliminating errors due to yawing is produced.

  10, 10A, 10B: measuring machine, 12: gantry, 12A: fixing leg, 12a: foot, 12B: fall prevention leg, 12b: foot, 14: base plate, 14A: upper surface (guide surface) , 16... Y-axis column, first Y-axis column, 16A... Y-column base, 16B... Y-column support, 17... Second Y-axis column, 18. Axis base, 19: second Y-axis base, 19: upper surface (guide surface) of second Y-axis base, 20: Y-axis guide mechanism, 22: Y-axis moving frame, 22A: Beam part of Y-axis moving frame .., 22B, 22C... Y-axis moving frame support, 24... Y-axis driving unit, 26... X-axis guiding mechanism 26, 28... X-axis moving frame, 30. ... Z-axis moving frame, 36 ... Z-axis drive unit, 38 ... Measurement , 42: Y-axis table, 44: Y-axis linear guide, 46: Y-axis guide rail, 46A: Y-axis guide rail base, 46B: Y-axis guide rail support, 46C: Y-axis guide rail 48, ball, 50, Y-axis slider, 52, ball rolling surface, 54, slider body, 54A, main girder of slider body, 54C, slider body leg, 56, end plate, 58, load rolling Surface, 60: load passage, 62: ball return passage, 70: air bearing, 72: air pad, 74: universal joint, 76A, 76B: pulley, 78: drive belt, 80: Y-axis motor, 82A, 82B: bracket, 84 ... insertion hole, 86 ... X-axis table, 88 ... X-axis linear guide, 90 ... X-axis guide rail, 92 ... X-axis slider, 94 ... screw rod, 96 ... nut member, 98 ... X Motor: 100 bracket: 102: Z-axis table; 104: Z-axis linear guide; 106: Z-axis guide rail; 108: Z-axis slider; 110: screw rod; 112: nut member; 114: Z-axis motor; ... Bracket, 118 ... Measurement unit main body, 120 ... Probe

Claims (3)

In a three-dimensional measuring machine that measures a work placed on a surface plate having a work placement surface parallel to the X axis and the Y axis with a probe,
A Y-axis moving body including the probe,
A Y-axis linear motion guide disposed along the Y-axis at a position higher than the surface plate, and a Y-axis linear motion guide that supports one end of the Y-axis moving body so as to be movable in the Y-axis direction;
Y-axis driving means for moving the Y-axis moving body along the Y-axis linear guide,
An air bearing that levitates and supports the other end of the Y-axis moving body with a part of the surface plate as a guide surface;
Equipped with a,
A coordinate measuring machine wherein the Y-axis linear guide is arranged at a position higher than the other end of the Y-axis moving body . A scale for measuring a movement amount of the Y-axis moving body is provided on the Y-axis driving unit side,
The coordinate measuring machine according to claim 1. The Y-axis moving body is rotatable around the Y-axis linear guide.
The coordinate measuring machine according to claim 1.

Images