JP6509330B2 - Fine structure separation filter - Google Patents

Description

[Cross-reference to related applications]
This application claims the benefit of US Provisional Application Ser. No. 62 / 070,778, filed Sep. 5, 2014, US Provisional Application Ser. No. 62 / 123,717, filed Nov. 25, 2014, 2015. Claim the benefit of priority of US Provisional Application No. 62 / 176,125 filed Feb. 9, and US Provisional Application No. 62 / 179,582 filed May 11, 2015. All of them are incorporated herein by reference in their entirety, including all references cited by them. This application is also related to US Patent Application No. 14 / 701,528 filed May 1, 2015, which is hereby incorporated by reference in its entirety including all references cited by it. Incorporated into

  The present technology relates generally to separation filters and chromatography, and more specifically, but not exclusively, microstructured panels, microstructured substrates with compound flow orifices, and various types of filtration composed of these substrates A system, for example a chromatography device.

  According to some embodiments, the present technology is: (a) a microstructure filter having a plurality of layers of structural material spaced to create an inlet channel and an outlet channel; Adjacent ones of the inlet and outlet channels are separated from one another by cross channels that filter fluid from the inlet channel towards the outlet channel, the cross channels comprising a portion of the plurality of layers of structural material A microstructured filter having filter features formed by removing; and (b) a housing configured to receive the microstructured filter, the housing being an apparatus for testing a fluid With a housing, configured to connect, chromatography or other type of separation It can be directed to the device.

  The technology is: (a) a microstructured filter having a plurality of sacrificial material layers and an outer layer of structural material etched to create an inlet channel and an outlet channel, the inlet channel and the outlet Adjacent ones of the channels are separated from one another by crossed channels that filter fluid from the inlet channel towards the outlet channel, the crossed channels being formed by etching away a portion of the sacrificial layer The plurality of layers of sacrificial material are: (i) a base material; (ii) a first layer of sections of sacrificial material equidistantly spaced from one another, the first layer being a base A first layer disposed on the material; (iii) a second layer deposited on the first layer, the second layer being a section of the first layer A second layer having sacrificial pairs of sections offset from the sections of the first layer to cover the space between the second layer; (iv) deposited on the second layer A third layer, the second layer having a sacrificial section triplets offset from the section of the second layer, and (v) on the third layer A fourth layer deposited on the fourth layer, the section being continuous and extending over half the length of the microstructure filter; and (vi) the outer layer of the structural material is a fourth layer A housing arranged on the layer; a microstructure filter, as well as (b) a housing adapted to receive the microstructure filter, the housing being configured to connect to a chromatograph apparatus for testing a fluid Have a housing Can be directed to a filter device.

  According to yet another embodiment, the present technology is: (a) a microstructured filter having crossed channels that filter fluid from an inlet channel to an outlet channel, the crossed channels etching a portion of the sacrificial layer Having a microstructured filter mechanism formed by removing, wherein the microstructured filter mechanism comprises nanostructures, wherein the nanostructures are introduced into the fluid as the fluid passes from the inlet channel towards the outlet channel A microstructured filter, which increases the surface area of the filter mechanism which attracts the particles present; and (b) a housing adapted to receive the microstructured filter, the housing being connected to a chromatographic device for testing the fluid It may be directed to a filter device, having a housing, configured as described above.

  Specific embodiments of the present technology are illustrated by the accompanying drawings. It will be appreciated that the drawings are not necessarily to scale and that details which make it difficult to recognize details or other details not necessary for an understanding of the technology may be omitted. It will be understood that the technology is not necessarily limited to the specific embodiments illustrated herein.

FIG. 1 is an isometric view of a separation filter constructed in accordance with the present technology.

FIG. 2 is an isometric view of the filter panel of FIG. 1;

FIG. 3 is a front view of the filter panel shown in FIG. 2;

FIG. 4 is an enlarged front view of the microstructure region shown in FIG. 3;

FIG. 5 is an isometric view of the microstructure region shown in FIG. 4;

FIG. 5 is an enlarged view similar to that shown in FIG. 4, including fluid streamlines.

FIG. 5 is an enlarged view similar to that shown in FIG. 4 showing one alternative embodiment.

FIG. 5 is an enlarged view similar to that shown in FIG. 4 showing one alternative embodiment.

FIG. 5 is an enlarged view similar to that shown in FIG. 4 showing one alternative embodiment.

FIG. 10 is an isometric view of one of the alternative embodiments shown in FIG. 9;

11 is a different perspective of the isometric view shown in FIG.

It is an enlarged view of FIG.

FIG. 13 is a side view of the enlarged view shown in FIG. 12;

7 shows a fabrication process of layered microstructures.

FIG. 7 is a front view of one alternative embodiment of a filter panel, including a sensing area.

FIG. 7 is a front view of one alternative embodiment of a filter panel that includes two microstructured areas and two sensing areas.

FIG. 6 is an isometric view of one alternative embodiment of a separation filter with multiple filter panels.

FIG. 18 is an isometric view of the through-hole filter panel section shown in FIG. 17;

FIG. 19 is an isometric view of one alternative filter panel as shown in FIG. 18 with staggered inlets and outlets.

FIG. 5 is an enlarged view of one alternative embodiment of the microstructured area of the filter panel shown in FIG.

FIG. 21 is an enlarged view of FIG. 20, including exemplary dimensions.

FIG. 5 is an enlarged front view of one alternative embodiment of the microstructure region shown in FIG. 4;

FIG. 1 is a perspective view of one exemplary microstructured filter panel.

FIG. 24 is an enlarged perspective view of the microstructured filter panel of FIG. 23;

FIG. 23 is a side perspective view of the microstructured filter panel of FIGS. 23-24.

FIG. 5 is a perspective view of a plurality of microstructured filter panels in a stacked configuration.

FIG. 1 is a perspective view of one exemplary microstructured filter device for use in a chromatographic device.

FIG. 28 is a cross-sectional view of the exemplary microstructured filter device of FIG.

FIG. 29 is an end view of the microstructured filter device of FIG. 28.

It is a perspective view of a fine structure filter.

It is another perspective view of a fine structure filter.

The openings of the layers of the spacer and the microstructure filter are collectively shown. The openings of the layers of the spacer and the microstructure filter are collectively shown.

Figure 7 shows a nanoscale coating applied to the filter mechanism of a microstructure filter device.

6 is another exemplary microstructured filter device.

FIG. 35 is an enlarged view of the first end of the fine structure filter device of FIG. 34;

It is the figure which further expanded the microstructure filter of the microstructure filter apparatus of FIG.

FIG. 37 is a further enlarged view of FIG. 36.

FIG. 1 is a perspective view of one exemplary microstructured filter device in a tubular configuration.

FIG. 39 is a cutaway view of the microstructured filter device of FIG. 38.

FIG. 1 is a perspective view of one exemplary chromatography device.

FIG. 1 is an exploded view of a chromatograph showing a microstructured filter.

FIG. 41 is a diagram of a portion of a microstructured filter of the device of FIG. 40.

FIG. 43 is a further enlarged view of the fine structure filter of FIG. 42.

FIG. 7 shows an additional perspective view of a microstructured filter. FIG. 7 shows an additional perspective view of a microstructured filter.

FIG. 1 is a perspective view of a microstructured filter showing channels and bars.

FIG. 1 is a perspective view of a microstructured filter showing spacer (structure) material.

Fig. 6 shows a cut cross section displaying a filter arrangement with a nanoscale coating.

A top down view of the layers of the microstructure filter is shown showing offsetting of the layers.

Figure 1 shows a photoresist, deposition and etching process to create a microstructured filter.

Shown is a frit in combination with a chromatographic connector.

The perspective view of a frit is shown collectively and a plurality of passages are displayed. The perspective view of a frit is shown collectively and a plurality of passages are displayed.

FIG. 1 shows a front view of one exemplary disc-shaped microstructured filter device. FIG. 1 shows a front view of one exemplary disc-shaped microstructured filter device.

FIG. 55 shows an enlargement of the microstructure filter of the microstructure filter device of FIGS. 53-54. FIG. 55 shows an enlargement of the microstructure filter of the microstructure filter device of FIGS. 53-54. FIG. 55 shows an enlargement of the microstructure filter of the microstructure filter device of FIGS. 53-54. FIG. 55 shows an enlargement of the microstructure filter of the microstructure filter device of FIGS. 53-54. FIG. 55 shows an enlargement of the microstructure filter of the microstructure filter device of FIGS. 53-54.

Fig. 7 shows another detail section of the microstructure filter of the microstructure filter device.

FIG. 1 shows a front view of one exemplary disc-shaped microstructured filter device with a layered configuration.

It is an expansion perspective view of the filter mechanism of the fine structure filter of a fine structure filter apparatus.

The figures collectively show the process for creating the thin bars forming the filter mechanism of the microstructure filter. The figures collectively show the process for creating the thin bars forming the filter mechanism of the microstructure filter. The figures collectively show the process for creating the thin bars forming the filter mechanism of the microstructure filter.

  While the present technology is capable of many different forms of embodiments, several specific embodiments are shown in the drawings and will be described in detail herein, but the present disclosure is not It should be understood that the principles are to be considered as illustrative and that the present technology is not intended to be limited to the illustrated embodiments.

  The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present technology. As used herein, the singular forms “one,” “is,” and “above” and when not indicating a numerical value are intended to include the plural as well, unless the context clearly indicates otherwise. ing. As used herein, the terms "having" and / or "including" specify the presence of the recited feature, integers, steps, operations, elements and / or components, but one It will be further understood that it does not exclude the presence or addition of or more other features, integers, steps, operations, elements and / or components, and / or groups thereof.

  It will be understood that like or similar elements and / or components referred to herein may be identified using like reference characters throughout the drawings. It will be further understood that some of the drawings are merely schematic representations of the present technology. As such, some of the components may be distorted from their actual scale for clarity of illustration.

  Figures 1-22 collectively show separation filters with microstructured panels. Microstructured panels are accurately replicated on film from tooling made using semiconductor processing techniques. The separation panels may be covered with a front cover or layered on top of each other to form an enclosed panel. The flow of liquid through the microstructured panel is influenced by coating the surface of the panel with the material or by constructing the material to attract or repel particles or molecules in the fluid. It is also good. Alternatively, the separation panel may be made of semiconductor material rather than being replicated from the semiconductor master.

  Referring to FIG. 1, a separation filter is shown. Fluid enters the separation filter at the inlet pipe. The opening of the inlet tube extends through the front plate. Fluid exiting the separation filter exits the separation filter via the outlet tube. The opening of the outlet tube also extends through the front plate. The filter panel is sealed to the back of the front plate. The back of the front panel is generally flat and not shown.

  Referring to FIG. 2, the filter panel is shown without the inlet and outlet pipes and the front plate. The inlet area is coincident with the opening of the inlet pipe. Likewise, the outlet area is coincident with the opening of the outlet tube. The inlet area is a recessed pocket in the filter panel. Fluid flows from the inlet region towards the inlet enlargement region. The inlet enlarged area is also a recessed pocket in the separation panel.

  The cross section of the inlet enlarged area is shown as increasing along the flow path. The amount of scaling up or down is a parameter that will be designed for the particular application of the separation filter. The depth of expansion is illustrated as being constant. This does not have to be the case.

  The entrance enlarged area is connected to the microstructured area. Figures 2, 3, 4 and 5 show microstructured regions at various angles and levels of detail. The microstructure region shares the same depth as the inlet region and the inlet dilation region. The microstructured area is generally as high as the depth of the pocket.

  As mentioned above, the surface coverage of the microstructured panel or the material composition of the microstructured panel will be of the type that interacts with the compounds in the fluid. Removal of chemicals or particles from potable water can be one application of the disclosed separation filter. It is desirable to keep chemicals or particles from the fluid using this type of filter.

  Another use of separation panels is chromatography. When used in chromatography, different compounds are usually separated from one another in different proportions as the fluid flows through the separation filter.

  It should be noted that the coatings or materials deployed with the filter used for the particular separation task of the filter are not part of the present invention. One skilled in the art of separation filters and materials used for particular applications may design materials for particular fluids.

  Referring to FIG. 5, the microstructure can be seen in an enlarged isometric view. The microstructures are generally diamond-shaped in cross section and extend from the pocket surface of the separation panel towards the front of the separation panel. This particular embodiment has a constant cross section from the base to the front. The geometry of the diamond-shaped microstructure generally results in a constant cross-section of the fluid path through the microstructure region.

  Referring to FIG. 6, the streamlines of the fluid flowing around the microstructure are shown. These streamlines were generated using computational fluid dynamics analysis. It should be noted that, for most applications of the disclosed type of filter, the flow will be a laminar flow type.

  As the fluid flows along the surface of the microstructure, the boundary layer develops and the thickness grows. The fluid in contact with the surface of the filter microstructure is essentially stationary in relation to the fluid flowing intermediate between adjacent microstructures. The further the fluid is from the finer surface, the less the particles are attracted to the surface of the microstructure.

  The midpoint is where the fluid velocity is greatest. This higher velocity fluid strikes the top of the next column of microstructures. The boundary layer which begins to form at the top of the next column of microstructures was previously the farthest from the surface of the first column of microstructures.

  Referring to FIG. 7, one alternative embodiment of the microstructure is shown. These microstructures are also arranged to separate the channels, similar to the diamond shaped design.

  Referring to FIG. 8, another alternative embodiment of the microstructure is shown. The microstructures are elongated (tapered) along the flow path to offset the growth of the boundary layer.

  Referring to FIGS. 9, 10, 11, 12 and 13, another alternative embodiment of the microstructure is shown. These microstructures differ from the previously disclosed microstructures in that they do not have a constant cross section. These microstructures have small spacers (in cross section) placed between the thin planes of relatively large structural materials. This embodiment produces more surface area per section of the separation filter panel. This type of panel requires more complex manufacturing processes.

  Referring to FIG. 14, a process for fabricating these microstructures is described.

  Referring to FIG. 15, additional "piping" has been added to the separation panel. Channels to and from the sensing area are shown. These additional features can be added to any of the embodiments disclosed in the present disclosure. The sensing area can be used to measure light transmission or reflection of the fluid as it exits the separation filter. This may be useful when separation filters are used for chromatography.

  Referring to FIG. 16, two different microstructured areas and two sensing areas are combined in series along the flow path. The first microstructure region may be coated with a different material than the second region.

  Referring to FIG. 17, another alternative embodiment of the separation filter is shown. The separation filter is configured with a large number of through-hole filter panels sandwiched between the front and rear panels.

  Referring to FIG. 18, a through hole filter panel is shown. The inlet area of the through-hole filter panel passes through the entire panel. This allows inlet and outlet fluid to flow to all of the panels in the sandwich structure. The back panel does not have any holes.

  Referring to FIG. 19, one alternative embodiment of a filter panel is shown with vertically offset inlet and outlet regions. This geometry creates a flow path that is more common in length than that disclosed in the previous figures.

  Referring to FIG. 20, one alternative embodiment of the filter panel is shown with slight vertical offsets at the vertical height of the microstructure within the microstructure region. By placing the microstructures at slightly different heights, the tips of the microstructures break apart slightly different points in the flow path. Without offsets, the same cross section of the flow would repeatedly contact the surface of the microstructure as the flow travels through the microstructure.

  The streamlines are only shown for the height of one of the fluid flows. The flow through this type of separation filter will likely be one with a low Reynolds number. Low Reynolds number flow results in a stratified boundary layer.

  The first column breaks the flow stream at a particular height. These heights can be accurately located if the microstructures are fabricated directly from the semiconductor type process, or if they are replicated from tools made in the semiconductor process. The second column of microstructures cuts the flow field directly at the center of the flow between the microstructures in the first column.

  The third column is slightly offset vertically from the first column. The fluid cut by the third column of microstructures is cut slightly above the path cut by the first column of microstructures. It may be desirable to design this vertical offset while considering the flow rate and the attraction between particles or compounds in the fluid and the surface of the microstructure.

  Continuous microstructure columns will be staggered by the same amount. With only a relatively small number of microstructures offset, it can be ensured that all regions of the flow path pass very close to the surface of the microstructure.

  Exemplary dimensions of the embodiment shown in FIG. 20 are shown in FIG. The design is shown with a space of 20 μm between all of the microstructures. The third column of microstructures is offset vertically upward from the first column of microstructures by 2 μm. Fluid flowing 2 μm above the center of the plurality of microstructured first columns will in any case be cut in half by the tip of the microstructures of the third column. The fluid flowing 4 μm above the center of the first column of microstructures will be cut in half by the top of the microstructure of the fifth column. A total of 20 columns of microstructure would be required to break the fluid flow every 2 μm interval. In order to break the fluid flow every 1 μm interval, twice as many microstructure columns would be required. By varying the column offsets, the system can be designed to be suitable for efficient separation of particles or compounds from the fluid. It should be noted that for a 2 μm column offset, the particles are not further than 1 μm from the surface. It is either less than 1 μm above or less than 1 μm above the surface of the microstructure. It should be further noted that laminar flow of fluid is required. If the flow becomes turbulent, the cutting sequence (alignment) will be disturbed.

  It should be noted that these values are given to describe the geometrical advantages of 3D microstructure filter technology. Those knowledgeable in fluid chemistry would like to design structures for specific fluids, particles, microstructured surface materials and flow rates.

  The illustrated microstructures are consistent with those made in or replicated from semiconductor processes. These fabrication techniques consistently produce features that are 10 times deep and deep. According to this guideline, the microstructure can be 300 μm deep. The total cross section of the flow field is then 15 square mm (sq. Mm). The length of the flow microstructures need only be 2 mm in length for a 2 μm cutting interval. For a 1 μm cutting interval, the length will be 4 mm in length. For a length of 4 mm, the total volume of the microstructure volume is only 0.6 cubic mm or 0.6 μl. Only a small sample size is required because of this small volume. Furthermore, because of the short path length, the pressure to move the fluid through the microstructure is relatively small. A further advantage is that all flow paths are equal in length and cross section. This common path length is equivalent to the consistent attraction of particles along the flow path. If it is desired to have more fluid, the filter panels may be stacked together as shown in FIG.

  Referring to FIG. 22, one alternative embodiment of the filter panel is shown with the microstructures in a truncated shape on the distal side. Cutting off the tips disrupts and generally mixes the flow and mixes the flow vertically. The mixed flow increases the likelihood that all areas of the flow path can be in close proximity to the surface of at least one microstructure. This embodiment is less desirable than the previously described embodiment, but will still provide reasonable performance.

  The technology is directed to separation, and more specifically, but not by way of limitation, to a separation mechanism having multiple microstructures made or coated from materials commonly used in separations. . Some of these materials are mentioned in the prior art section. These separate microstructured panels are configured to maximize the separation of compounds within the fluid. Separation filters may be used for chromatography or reverse chromatography.

  FIG. 23 shows one exemplary multilayer microstructured filter panel 2300. Panel 2300 is shown in more detail in FIGS. 24 and 25. An enlarged view of one section of panel 2300 is shown in FIG. 24, while a second cross-sectional view of filter panel 2300 is shown in FIG. The panel 2300 consists of a base material 2302, also called a wafer. A plurality of alternating structural layers and sacrificial layers (eg, structural layer 234 and sacrificial layer 2306) are disposed on the base material 2302. One exemplary process for creating a layered structure is described above in more detail. Also, additional aspects of fine structure filter creation are found in applicant's pending US patent application (application number X, filing date X). The U.S. patent application, including all references cited therein, is incorporated herein by reference in its entirety.

  The alternating structural layers and sacrificial layers are etched to create inlet and outlet channels, such as inlet and outlet channels 2308 and 2310. When a portion of the sacrificial layer is removed, an opening (eg, a hole, a slit, a notch, a slot, etc.) between the inlet channel 2308 and the outlet channel 2310 is created, which causes the cross flow of fluid between them ( Allow cross flow). The size of the opening functions to remove particles from the fluid. In some embodiments, rather than having an opening, the sacrificial material may be comprised of a porous material that filters the fluid.

  In some embodiments, panel 2300 may have an outer layer 2312, which may have a photoresist layer. In one embodiment, each of the structural layers is approximately 75 nanometers in height, while each of the sacrificial layers is approximately 15 nanometers in height. Outer layer 2312 may have a height of approximately 1.5 microns. As mentioned above, the sacrificial layer may be partially etched to create holes or openings.

  Referring to FIG. 26, there is shown a plurality of multilayer microstructured filter panels stacked together. As shown, fluid 2602 enters the inlet channels such as inlet channels 2604 and 2606, passes through the area of cross channels 2608 and 2610, and finally exits the outlet channels such as outlet channels 2612 and 2614. .

  To be sure, as described in more detail below, stacks of multilayer microstructured filter panels and multilayer microstructured filter panels are utilized to manufacture various filtration devices, as well as chromatographic devices. Can be

  FIG. 27 shows another exemplary filter device 2800 constructed from a plurality of multilayer microstructured filter panels. The panel has a base housing 2802 which holds a plurality of multilayer microstructured filter panels. Base housing 2802 may be manufactured from glass or silicon materials, or from other materials that would be known to one skilled in the art with the present disclosure prior to them. Device 2800 is configured to filter fluid 2801 entering one end of device 2800 and exiting the opposite end of the end of device 2800.

  Details of the plurality of multilayer microstructured filter panels are shown in more detail in FIGS. 27-32B. FIG. 28 is a cross-sectional view of the microstructured filter device 2800 of FIG. The microstructured filter panel 2804 has an inlet 2803 and an outlet 2805. Inlets and outlets may be created using etching or other similar processes.

  FIG. 29 is an end view of the device 2800 showing a microstructured filter panel 2804 nested within the base housing 2802. FIG. 30 shows various spacer layers (structural layers), such as structural layer 2806. The series of structural layers and the sacrificial layer constitute a microstructured filter panel 2804. In one embodiment, the microstructured filter panel 2804 is etched to expose a plurality of layered sections, such as layered section 2808.

  FIG. 31 is an enlarged perspective view of the structural layer section of the microstructured filter panel 2804. FIG. The structural layer section shows the various layers of the structural layer, such as structural layer 2810 and sacrificial layer 2812. The series of spacers, eg, spacers 2810, may be comprised of a sacrificial material.

  32A and 32B collectively show an additional perspective view of the microstructured filter panel 2804 and show the layering and the openings created inside the microstructured filter panel 2804. The microstructured filter panel 2804 is with the spacer of the sacrificial layer 2812, the structural layer 2806, and the sacrificial layer section partially (or totally) removed to create an opening 2814 through which fluid can flow. It is shown.

  In some embodiments, the effective surface area or surface area of the microstructured filter panel, such as the cross channels, may be increased by creating nanoscale structures or other texturing on the surface it can. For example, FIG. 33 is an enlarged view of the cross channel section 3402 with the nanoscale coating 3404 applied. Nanoscale coatings 3404 may be created using a deposition process or by etching away the sacrificial material.

  Those of ordinary skill in the art with the present disclosure prior to them will understand that other conventional coating processes can be used to coat three-dimensional features on the surface of the microstructured filter panel. I will.

  The three-dimensional nature of the microstructured filter panel, with or without nanoscale cladding, provides a five-fold increase in particle attraction as compared to lower dimensional filter devices.

  FIG. 34 shows another exemplary filter device 3500. The device 3500 also has a base housing 3502, which may be made of glass or silicon material, or other materials that would be known to those skilled in the art with the present disclosure prior to them. The base housing 3502 is configured with an inlet notch 3504 (an enlarged view is shown in FIG. 35) and an outlet notch 3506. In some embodiments, a portion of the inlet notch 3504 is angled with respect to the reference line X. In some embodiments, a portion of the outlet notch 3506 is also angled with respect to the reference line X. In one embodiment, the inlet notch 3504 extends from the first end of the base housing 3502 and is upwardly angled, and the outlet notch 3506 is from a narrow portion, the base housing 3502 opposite the first end. Make an angle towards the second end.

  The plurality of multilayer microstructured filter panels are combined to create a microstructured filter 3508 positioned at an angle θ with respect to the reference line X. A filter panel 3508 extends between the inlet notch 3504 and the outlet notch 3506.

  Fluid can enter inlet notch 3504 and be dispersed into microstructure filter 3508. The fluid passes through the microstructured filter panel 3508 and into the outlet notch 3506. Indeed, fluid can enter the microstructure filter 3508 along the length of the inlet notch 3504 and exit the microstructure filter 3508 along the length of the outlet notch 3506.

  FIG. 36 shows an enlarged view of a portion of the microstructure filter 3508. A plurality of layered sections, such as layered section 3510, and a plurality of structural / supporting sections 3512 are shown. Again, the layered section may consist of layers of structural material and sacrificial material.

  FIG. 37 shows a further enlarged view of a portion of the microstructure filter 3508 displayed in FIG. Layered section 3510 consists of a series of channels and sidewalls 3514 that filter fluid as it passes through microstructure filter 3508. Each of the layers may have channels and sidewalls of different widths. For example, the channels and sidewalls disposed near the inlet notch 3504 may be sized to attract larger particles than particles attracted by the channels and sidewalls proximate the outlet notch 3506 (FIG. 34).

  FIG. 38 is one exemplary filter device 3900 constructed in accordance with the present technology. The filter device 3900 comprises a tubular housing 3902 which has an inlet port 3904 and an outlet port (not shown). The outlet port is identical to the inlet port 3904 but is located at the opposite end of the filter device 3900.

  FIG. 39 shows that the exemplary filter device 3500 of FIGS. 34-37 is utilized within the filter device 3900. That is, housing 3902 is configured to receive an exemplary filter device 3500. Filter device 3500 may be used to filter any fluid for any number of applications.

  FIG. 40 shows one exemplary filter device 4100 in the form of a test column. Device 4100 has a housing 4102 with connectors 4104 and 4106. In some embodiments, the housing 4102 is separable into a first section 4108 and a second section 4110 as shown in FIG. The device 4100 comprises a microstructured filter 4112. The second section 4110 acts as a cover that bounds the top (or outermost) layer of the microstructure filter 4112, ensuring that the fluid passes through the microstructure filter 4112. Inlet tube 4101 delivers fluid from connector 4104 to microstructured filter 4112.

  FIG. 42 shows the microstructure filter 4112 in more detail. The microstructure filter 4112 has an inlet 4114 and an outlet 4116. In some embodiments, the inlet and the outlet are each approximately 1 millimeter wide. The microstructure filter 4112 has a layered section 4120 and a support section 4122. The microstructured filter 4112 is shown in FIG. 43 as having a plurality of layered sections 4120A, 4120B and 4120C which are arranged slightly offset from one another. For example, structural features 4124 of layered section 4120B are positioned slightly higher than structural features 4126 of layered section 4120C. Crossed channels, such as cross channel 4128, have a height of approximately 50 micrometers, and the width of the layered section is approximately 32 micrometers. In some embodiments, the pitch between the individual cross channel features is 10 micrometers.

  44A and 44B are enlarged views of the microstructure filter 4112. FIG.

  FIG. 45 is an enlarged view of the layered section of the microstructure filter 4112 showing the channels, eg, channels 4130 formed in the layered section (also referred to as "bars").

  In some embodiments, spacer material 4132 is utilized to maintain the spacing of the layered sections as shown in FIG.

  FIG. 47 shows that the individual structural layers of the layered section (eg, 4120 AC) can be coated with three-dimensional coating 4134 or manufactured with three-dimensional coating 4134. Again, this increases the surface area of the layered section and improves the filtration capacity of the microstructured filter 4112. Again, one skilled in the art may use various coating processes to coat individual structural layers to create an artifact that results in the creation of a three dimensional aspect on the structural layer.

  FIG. 48 is a top down view of the microstructure filter 4112 taken across the cross-sectional view AA. Layered sections are shown as having individual cross channel filters, eg, filter arrangement 4136. Again, the filter mechanisms 4136 of adjacent layered sections may be arranged offset from one another, which allows the fluid to flow near the surface of the structural layer and certainly that the fluid contacts at least one surface. Do.

  In some embodiments, the features of the structural layer are staggered (or zig-zag) by approximately one nanometer or any other distance per design requirement, or staggered from one another It may be done. Staggering the structural layers causes the fluid 4138 to deflect downward from the filter mechanism 4136 towards the adjacent filter mechanism 4140. Also, staggering and resulting mechanisms reduce and / or eliminate the effects of fluid acceleration as commonly occurs using linear channels or paths. The same effect is achieved in the device of FIG.

  FIG. 49 shows the creation of a microstructured filter beginning with step 5002 of photolithography and deposition of a sacrificial layer. The sections of sacrificial material are spaced apart from one another. Step 5004 includes photolithography and deposition of other sacrificial layers offset from the sacrificial layer of step 5002. The Pairs of sections of the second sacrificial layer are placed on the first section of the sacrificial layer so that half of the sections of the first layer are visible.

  At step 5006, photolithography and deposition of the third sacrificial layer are shown as being offset from the second sacrificial layer at step 5004. The triple section of the sacrificial layer overlaps the sections of the second sacrificial layer and the first sacrificial layer.

  At step 5008, photolithography and deposition of the fourth sacrificial layer is shown. The fourth layer is deposited on the third layer in a continuous section and covers approximately half of the microstructure filter. Next, in step 5010, a structural layer is deposited over the sacrificial layer to create a covering. The device is then etched at step 5112 to create an opening, eg, opening 5114.

  In short, staggered bars can be created by a series of photolithographic processes, deposition processes and etching processes. Sixteen steps can be created with four "digital" layers, and the layers can be staggered with a gradually increasing distance of one nanometer or less.

  FIG. 50 shows one exemplary filter device connector 5100 having a frit 5102. The frit 5102 is placed in the body of the connector in the path of the fluid communication 5104. The frit 5102 can hold the particles and ensure that the longitudinal dispersion of these particles through the filter device is also reduced. Indeed, filter device connector 5100 may be utilized as connector 4104 of FIG.

  The frit 5102 has a diameter D and a width (or thickness) as shown.

  51 and 52 collectively show one exemplary frit 5102 having an outer circumferential sidewall 5106 that encloses a plurality of sections of passages. For example, the frits 5102 may include sections 5108A-E, each arranged in an annular configuration. In some embodiments, the plurality of sections are arranged in a hexagonal shape of the passageway, although other shapes are contemplated for use as well.

  In some embodiments, each progressively moving outward section may be sized to capture particles of different sizes. For example, section 5108A has the passage with the smallest diameter, while section 5108E has the passage with the largest diameter. The sections between section 5108A and section 5108E progressively have larger passages than the sections they surround. In some embodiments, each section may have a specific size of the passageway, and the sections need not be arranged linearly with respect to the pass size.

  In some embodiments, not only the diameter of the passages, but also the spacing of the passages may vary. The density of the passages may be adjusted to the design requirements for the operation of the device.

  Figures 53-65 collectively show further embodiments of microstructured filters that may be utilized in the devices of the present disclosure. In general, these microstructured filters may have a disk with microstructures (e.g., filter mechanisms) that filter either particles or solutes from the fluid. Typically, the upper surface of the disc will be combined into a flat surface to surround the flow channel on the microstructured disc. In some embodiments, layers of discs may be stacked on top of one another. The disks may be configured in a parallel configuration or a series configuration.

As with other microstructured filters, these discs may be coated with different materials to filter different solutes in the fluid. These coatings may comprise nanoscale structures. The disks with different coatings may likewise be configured in either a parallel configuration or a series configuration. In some embodiments, the structure may be coated with copper, zinc, carbon, resin, and SiO ₂ is a number of materials, although many other coatings may be used.

  FIG. 53 shows a disc-shaped fine structure filter 5400. Filter 5400 has a plurality of inlet channels, eg, inlet channel 5402. The inlet channel supplies fluid to a plurality of horizontal channels, such as horizontal channel 5404. The filter 5400 also has an outlet channel 5406 which collects fluid from the horizontal channel. Indeed, the inlet and outlet channels may be switched to their configuration such that the outlet channel becomes an inlet channel and vice versa.

  FIG. 54 shows two detail sections 5408 and 5410 described herein in more detail. 55-59, the filter mechanism of detail section 5408 is shown. For example, in FIG. 55, both large and small flow channels are shown. An inlet channel 5412 is shown, which feeds fluid into the inlet horizontal channel 5416 and the outlet horizontal channel 5418. Outlet channel 5420 collects fluid filtered from inlet horizontal channel 5416 and outlet horizontal channel 5418.

  FIG. 56 shows a horizontal channel with post filter features 5422. Other filter mechanisms such as slits, notches and grooves of various sizes and shapes may be utilized as well.

  FIG. 57 shows a top down view of the inlet horizontal channel 5416 and the outlet horizontal channel 5418. FIG.

  FIG. 58 shows a top down view of the inlet horizontal channel 5416 and the outlet horizontal channel 5418 with a post filter mechanism. FIG. 59 is an enlarged view of a section of the view of FIG.

  FIG. 60 shows detail section 5410 in more detail. The detail section includes a vertical outlet channel 5424, a horizontal inlet channel 5416 and an outlet port 5418. In some embodiments, the vertical outlet channel 5424, the horizontal inlet channel 5416 and the support layer are coplanar with one another.

  FIG. 61 shows another disc-shaped fine structure filter 6200 with a layered design. A more detailed view of the filter mechanism 6202 of the filter 6200 is shown in FIG. The filter mechanism has sidewalls in place of the posts. A more detailed view of the side wall is provided in FIG. In some embodiments, the wall may be 0.1 (“.1”) nanometers high and 0.05 (“.05”) nanometers wide.

  Figures 63-65 illustrate the layer deposition process to create the sidewalls. In FIG. 63, thin bars 6402 are printed or coated on a support surface 6404. The material used for this deposition process may be a sacrificial material. A second layer 6406 may be deposited on the bar 6402 and created from a sacrificial material.

  As shown in FIG. 64, additional bars of structural material and / or sacrificial material may be applied to the bar 6402.

  An illustration of a section of the completed filter disk is shown in FIG. Indeed, when the sacrificial layer is removed, a filter orifice 6602 (filter mechanism) is created. Again, one surface and multiple surfaces of these bars may be coated if desired.

While various embodiments have been described above, it should be understood that they are presented by way of illustration only and not limitation. The description is not intended to limit the scope of the technology to the specific forms set forth herein. Thus, the breadth and scope of the preferred embodiments should not be limited by any of the above-described exemplary embodiments. It is to be understood that the above description is illustrative and not restrictive. On the contrary, the present description includes such alternatives, modifications and equivalents as defined by the appended claims, and as otherwise understood by those skilled in the art, in the spirit and scope of the present technology. Are intended to be included as possible. Accordingly, the scope of the technology should not be determined with reference to the above description, but instead should be determined with reference to the appended claims, along with their full scope of equivalents.

Claims (14)

A microstructured filter having a plurality of layers of structural material spaced to create an inlet channel and an outlet channel, wherein adjacent ones of the inlet channel and the outlet channel flow from the inlet channel towards the outlet channel A microstructured filter, comprising: a filter mechanism spaced from each other by intersecting channels that filter out, the intersecting channels being formed by removing a portion of the plurality of layers of structural material, and the microstructured filter A housing configured to receive the fluid, the housing being configured to connect to a chromatograph apparatus for testing the fluid,
Have
The housing has an inlet notch at a first end and an outlet notch at a second end, the microstructured filter is disposed between the inlet notch and the outlet notch, the inlet notch being an upper fluid Associated with the path, the upper fluid path having the widest point close to the inlet notch and towards the upper end of the microstructure filter close to the second end of the housing Tapered, the outlet notch being associated with the lower fluid path, the lower fluid path having the widest point close to the outlet notch and at the first end of the housing Adjacent, tapering towards the lower end of the microstructure filter, the plurality of layers of structural material of the microstructure filter being between the upper fluid path and the lower fluid path Meet the space, all fluid flowing into the fluid path of the upper enters the microstructure filter, and flows out from the outlet notch out the fluid path of the lower,
Filter device.   The filter device according to claim 1, wherein the filter mechanism has an opening sized to capture particles present in the fluid.   The microstructured filter comprises a plurality of spacer regions providing structural support between adjacent ones of the plurality of structural layers, and the filter arrangement is disposed between adjacent ones of the plurality of spacer regions The filter device according to claim 1.   The filter device of claim 1, wherein adjacent ones of the plurality of spacer regions are offset from one another such that the filter features of adjacent layers of the plurality of layers are staggered.   The filter device of claim 1, wherein a microstructured filter is contained in the housing such that fluid enters the first end of the microstructured filter and exits the second end of the microstructured filter. .   The filter device of claim 1, wherein the microstructured filter has an etched inlet section and an etched outlet section.   The filter apparatus of claim 1, wherein the housing is a tubular case having an inner shell, the inner shell including a notch for receiving a microstructured filter.   At least a portion of the filter arrangement is provided with a nanoscale surface treatment to increase the surface area of the filter arrangement and thus to increase the attraction exerted on the particles in the fluid by the filter arrangement. The filter device of claim 1.   A housing according to claim 1, wherein the housing comprises a first connector for supplying fluid to a microstructure filter, the first connector being configured to filter fluid before entering the microstructure filter. Filter device.   10. The filter device of claim 9, wherein the frit has an outer circumferential sidewall that encloses a plurality of passage sections.   The sections of the plurality of passageways are arranged in an annular configuration, and the passageways of the sections near the center of the frit are arranged to have passageways of smaller diameter than the passageways of the sections near the peripheral sidewall. 11. A filter device according to item 10.   11. The filter device of claim 10, wherein the sections of the plurality of passages each have a plurality of passages with a specific spacing or diameter. A microstructured filter having a plurality of sacrificial layers and an outer layer of structural material etched to create an inlet channel and an outlet channel, adjacent ones of the inlet channel and the outlet channel from the inlet channel to the outlet channel. Are spaced from one another by intersecting channels that filter fluid towards, the intersecting channels having a filter mechanism formed by etching away a portion of the sacrificial layer, the plurality of sacrificial layers being :
Base material;
A first layer of sections equidistantly spaced from one another, said first layer being disposed on said base material;
A second layer deposited on the first layer, the second layer being offset from the sections of the first layer so as to cover the space between the sections of the first layer Having a double set of sections, the second layer;
A third layer deposited on the second layer, the third layer having a triple of sections offset from the sections of the second layer; and the third layer; A fourth layer deposited on three layers, the section being continuous and extending over half of the length of said microstructured filter;
Have
The outer layer of structural material is disposed on the fourth layer;
A microstructure filter, and a housing configured to receive the microstructure filter, wherein the housing is configured to connect to a chromatographic device for testing the fluid.
A filter device.   14. The filter device of claim 13, wherein spaces are etched into the microstructured filter to create an opening between spacer regions.