JP6367194B2 - レーザビームを用いた被加工物の加工装置 - Google Patents
レーザビームを用いた被加工物の加工装置 Download PDFInfo
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- JP6367194B2 JP6367194B2 JP2015525901A JP2015525901A JP6367194B2 JP 6367194 B2 JP6367194 B2 JP 6367194B2 JP 2015525901 A JP2015525901 A JP 2015525901A JP 2015525901 A JP2015525901 A JP 2015525901A JP 6367194 B2 JP6367194 B2 JP 6367194B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0064—Anti-reflection devices, e.g. optical isolaters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1022—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
- H01S3/1024—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping for pulse generation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
2 制御ユニット
3 搬送ファイバ
4 視準光学系
5 周波数逓倍器
6a フォーカス光学系
6b 視準光学系
7 非線形結晶
8 サーモスタット装置
9 センサ装置
10 光学調整モジュール
11 吸収器
12 円偏光子
13 光アイソレータ
14 フォーカス光学系
15 加工ヘッド
16 搬送ファイバ
17 コリメータ装置
18 ビーム成形装置
19 ビーム成形装置
20 偏向光学系
21 フォーカス光学系
22 被加工物
23 偏向ミラー
24 センサ
25 センサ
26 信号処理ユニット
27 ビームスプリッタ
28 モニタ
29a パルス
29b パルス列
Claims (8)
- レーザビーム(L)を用いて被加工物(22)を加工する装置であって、1nmよりも小さい帯域幅を有するパルス化された1次レーザビーム(L1)を生成するためのレーザビーム源としてファイバレーザ(1)を有し、前記1次レーザビーム(L1)のビーム通路内に、周波数逓倍された2次レーザビーム(L2)を生成するための周波数逓倍器モジュール(5)が配置され、前記周波数逓倍器モジュール(5)から出射するレーザビーム(L1’,L2)のビーム通路内に光学調整モジュール(10)が配置されていて、その光学調整モジュール(10)により1次レーザビーム(L1”)の強度が2次レーザビーム(L2)の強度に対して相対的に調整可能であり、
また、コリメータ装置(17)と、偏向光学系(20)と、被加工物(22)にレーザビーム(L 1 ”,L 2 )を集束するためのフォーカス光学系(21)とを含む加工ヘッド(15)を有し、さらに、前記被加工物(22)から軸方向に出射する放射を取り出して検出するための装置を有し、前記偏向光学系(20)が偏向ミラー(23)を含み、その偏向ミラー(23)が1次レーザビームおよび2次レーザビームに対して狭帯域で高反射性であり、かつ被加工物(22)から出射するプラズマ放射および熱放射に対して透過性である装置。 - レーザビーム(L)を用いて被加工物(22)を加工する装置であって、1nmよりも小さい帯域幅を有するパルス化された1次レーザビーム(L1)を生成するためのレーザビーム源としてファイバレーザ(1)を有し、前記1次レーザビーム(L1)のビーム通路内に、周波数逓倍された2次レーザビーム(L2)を生成するための周波数逓倍器モジュール(5)が配置され、前記周波数逓倍器モジュール(5)から出射するレーザビーム(L1’,L2)のビーム通路内に光学調整モジュール(10)が配置されていて、その光学調整モジュール(10)により1次レーザビーム(L1”)の強度が2次レーザビーム(L2)の強度に対して相対的に調整可能であり、
また、前記レーザビーム(L 1 ,L 1 ’,L 1 ”,L 2 )を案内するための1つ又は複数の搬送ファイバ(3,16)を有し、全ての搬送ファイバ(3,16)が15μmよりも大きいコア直径を有し、さらに、コリメータ装置(17)と、偏向光学系(20)と、被加工物(22)にレーザビーム(L 1 ”,L 2 )を集束するためのフォーカス光学系(21)とを含む加工ヘッド(15)を有し、また、前記被加工物(22)から軸方向に出射する放射を取り出して検出するための装置を有し、かつ、前記被加工物(22)から軸方向に出射する放射(R a )がファイバ光学式のビームスプリッタ(27)を介して前記搬送ファイバ(3,16)から取り出される装置。 - 前記1次レーザビーム(L1)が直線偏光されている請求項1または2記載の装置。
- 前記ファイバレーザ(1)がシングルモードファイバレーザ又は低モードファイバレーザである請求項1乃至3のいずれか1つに記載の装置。
- 前記ファイバレーザ(1)が準連続発振(qcw)ファイバレーザである請求項1乃至4のいずれか1つに記載の装置。
- 前記周波数逓倍器モジュール(5)に円偏光子(12)が後続接続されている請求項1乃至5のいずれか1つに記載の装置。
- 前記レーザビーム(L1”,L2)のビーム通路内にある複数の光学的な構成要素が石英ガラスから成る請求項1乃至6のいずれか1つに記載の装置。
- 被加工物(22)から加工中に出射する放射(Ra,Rna)のパルス波形またはパルス列の変化および時間的経過を分析し、この分析に基づいて加工プロセスを制御するための制御信号を生成する信号処理ユニット(26)を有する請求項1又は2に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12179826 | 2012-08-09 | ||
EP12179826.8 | 2012-08-09 | ||
PCT/EP2013/066723 WO2014023828A2 (de) | 2012-08-09 | 2013-08-09 | Anordnung zum bearbeiten von werkstücken mit einem laserstrahl |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015530251A JP2015530251A (ja) | 2015-10-15 |
JP6367194B2 true JP6367194B2 (ja) | 2018-08-01 |
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Application Number | Title | Priority Date | Filing Date |
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JP2015525901A Active JP6367194B2 (ja) | 2012-08-09 | 2013-08-09 | レーザビームを用いた被加工物の加工装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20150190882A1 (ja) |
EP (1) | EP2882563B1 (ja) |
JP (1) | JP6367194B2 (ja) |
CN (1) | CN104619453B (ja) |
ES (1) | ES2895521T3 (ja) |
HK (1) | HK1206307A1 (ja) |
WO (1) | WO2014023828A2 (ja) |
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WO2016033494A1 (en) * | 2014-08-28 | 2016-03-03 | Ipg Photonics Corporation | System and method for laser beveling and/or polishing |
WO2018217928A1 (en) * | 2017-05-26 | 2018-11-29 | Branson Ultrasonics Corporation | Dual channel feedback for ascertaining fiber bundle throughput |
US11673208B2 (en) * | 2017-07-31 | 2023-06-13 | Ipg Photonics Corporation | Fiber laser apparatus and method for processing workpiece |
US20210093679A1 (en) | 2018-02-05 | 2021-04-01 | Novome Biotechnologies, Inc. | Engineered gut microbes and uses thereof |
WO2020176389A1 (en) | 2019-02-25 | 2020-09-03 | Caribou Biosciences, Inc. | Plasmids for gene editing |
JP2020145345A (ja) * | 2019-03-07 | 2020-09-10 | 株式会社フジクラ | ファイバレーザーの制御装置及び制御方法 |
US11913830B2 (en) * | 2020-11-11 | 2024-02-27 | National Technology & Engineering Solutions Of Sandia, Llc | Laser absorptivity measurement device |
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-
2013
- 2013-08-09 JP JP2015525901A patent/JP6367194B2/ja active Active
- 2013-08-09 WO PCT/EP2013/066723 patent/WO2014023828A2/de active Application Filing
- 2013-08-09 CN CN201380046717.3A patent/CN104619453B/zh active Active
- 2013-08-09 EP EP13755981.1A patent/EP2882563B1/de active Active
- 2013-08-09 ES ES13755981T patent/ES2895521T3/es active Active
-
2015
- 2015-02-09 US US14/616,906 patent/US20150190882A1/en not_active Abandoned
- 2015-07-23 HK HK15107046.2A patent/HK1206307A1/xx unknown
Also Published As
Publication number | Publication date |
---|---|
ES2895521T3 (es) | 2022-02-21 |
CN104619453B (zh) | 2016-08-24 |
WO2014023828A3 (de) | 2014-05-15 |
WO2014023828A2 (de) | 2014-02-13 |
JP2015530251A (ja) | 2015-10-15 |
HK1206307A1 (en) | 2016-01-08 |
CN104619453A (zh) | 2015-05-13 |
EP2882563B1 (de) | 2021-07-28 |
US20150190882A1 (en) | 2015-07-09 |
EP2882563A2 (de) | 2015-06-17 |
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