JP6307378B2 - Linear actuator - Google Patents

Linear actuator Download PDF

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Publication number
JP6307378B2
JP6307378B2 JP2014155280A JP2014155280A JP6307378B2 JP 6307378 B2 JP6307378 B2 JP 6307378B2 JP 2014155280 A JP2014155280 A JP 2014155280A JP 2014155280 A JP2014155280 A JP 2014155280A JP 6307378 B2 JP6307378 B2 JP 6307378B2
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movable body
linear actuator
permanent magnet
axial direction
gel
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JP2016032416A (en
Inventor
正 武田
正 武田
北原　裕士
裕士 北原
猛 須江
猛 須江
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Nidec Sankyo Corp
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Nidec Sankyo Corp
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Priority to JP2014155280A priority Critical patent/JP6307378B2/en
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to KR1020177002105A priority patent/KR20170037956A/en
Priority to CN201580039907.1A priority patent/CN106575913B/en
Priority to PCT/JP2015/070699 priority patent/WO2016017474A1/en
Priority to EP15827480.3A priority patent/EP3176930A4/en
Priority to US15/500,331 priority patent/US10252295B2/en
Priority to CN201910665649.8A priority patent/CN110323910B/en
Priority to CN201910665658.7A priority patent/CN110277892B/en
Publication of JP2016032416A publication Critical patent/JP2016032416A/en
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本発明は、磁気駆動機構を備えたリニアアクチュエータに関するものである。   The present invention relates to a linear actuator provided with a magnetic drive mechanism.

携帯電話気等の分野では、着信等を振動によって報知するデバイスが用いられており、かかるデバイスとしては、永久磁石を備えた可動体を固定体に設けたコイルで駆動するリニアアクチュエータが提案されている（特許文献１、２参照）。かかるリニアアクチュエータによれば、コイルに供給する駆動信号によって振動の強弱や周波数が可変である。   In the field of mobile phone, etc., a device for notifying an incoming call by vibration is used, and as such a device, a linear actuator for driving a movable body provided with a permanent magnet by a coil provided on a fixed body has been proposed. (See Patent Documents 1 and 2). According to such a linear actuator, the intensity and frequency of vibration can be varied by the drive signal supplied to the coil.

特開２０１２−１３５７５５号公報JP 2012-135755 A 特開２００６−７１６１号公報JP 2006-7161 A

磁気駆動機構を備えたリニアアクチュエータにおいて、コイルに供給する駆動信号によって振動の強弱や周波数が可変となるように構成するには、可動体に十分な推力を付与する必要があるが、特許文献２に記載の構成のように、支軸の周りにコイルを配置し、コイルの周りに永久磁石を配置した場合、大きな推力を得ることができない。かといって、永久磁石を軸線方向に複数配置した場合には、部品点数が増大し、リニアアクチュエータのコストが嵩む。また、特許文献２に記載のリニアアクチュエータでは、可動体を貫通する支軸によって可動体を支持する構成であるため、部品点数が多いという問題点もある。さらに、特許文献２に記載の構成では、可動体が振動した際、振動の周波数によっては、可動体が共振するという問題点もある。   In a linear actuator provided with a magnetic drive mechanism, it is necessary to apply a sufficient thrust to a movable body in order to make the strength and frequency of vibration variable by the drive signal supplied to the coil. When the coil is arranged around the support shaft and the permanent magnet is arranged around the coil as in the configuration described in (1), a large thrust cannot be obtained. However, when a plurality of permanent magnets are arranged in the axial direction, the number of parts increases and the cost of the linear actuator increases. Further, the linear actuator described in Patent Document 2 has a problem in that the number of parts is large because the movable body is supported by a support shaft that penetrates the movable body. Furthermore, the configuration described in Patent Document 2 has a problem that when the movable body vibrates, the movable body resonates depending on the frequency of vibration.

以上の問題点に鑑みて、本発明の課題は、少ない部品点数で、可動体に適正な振動を発生させることができるリニアアクチュエータを提供することにある。   In view of the above problems, an object of the present invention is to provide a linear actuator that can generate an appropriate vibration in a movable body with a small number of parts.

上記課題を解決するために、本発明に係るリニアアクチュエータは、円柱状の永久磁石を１つ備えた可動体と、該永久磁石を径方向外側で囲むコイルボビンを備えた固定体と、前記可動体と前記コイルボビンとに接続され、前記コイルボビンに対して前記可動体が軸線方向に移動可能に支持された状態とするバネ部材と、前記コイルボビンに巻回され、前記永久磁石とともに前記可動体を軸線方向に駆動する磁気駆動機構を構成するコイルと、軸線方向において前記固定体と前記可動体との間に挟まれたゲル状ダンパー部材と、を有していることを特徴とする。   In order to solve the above-described problems, a linear actuator according to the present invention includes a movable body having one cylindrical permanent magnet, a fixed body having a coil bobbin surrounding the permanent magnet on the outside in the radial direction, and the movable body. And a spring member connected to the coil bobbin so that the movable body is supported so as to be movable in the axial direction relative to the coil bobbin, and the movable body is wound together with the permanent magnet in the axial direction. And a gel damper member sandwiched between the fixed body and the movable body in the axial direction.

本発明では、可動体の駆動に磁気駆動機構を用い、かつ、バネ部材を可動体および固定体との間に接続してあるため、磁気駆動機構による推進力とバネ部材の付勢力とを利用して、可動体を軸線方向に駆動することができる。また、可動体には円柱状の永久磁石が設けられ、固定体では、永久磁石を径方向外側で囲むコイルボビンにコイルが巻回されている。このため、永久磁石およびコイルを大径化できるので、永久磁石が１つであるという簡素な構成でも、可動体に大きな推力を付与することができる。また、軸線方向において固定体と可動体との間にゲル状ダンパー部材が挟まれているという簡素な構成で可動体の共振を抑制することができる。また、可動体が永久磁石の径方向外側でバネ部材に支持されているため、可動体を支軸で支持しなくても、可動体に傾きが発生しにくい。それ故、
本発明によれば、少ない部品点数でリニアアクチュエータを構成することができるとともに、可動体に適正な振動を発生させることができる。 In the present invention, the magnetic drive mechanism is used to drive the movable body, and the spring member is connected between the movable body and the fixed body, so the propulsive force of the magnetic drive mechanism and the biasing force of the spring member are used. Thus, the movable body can be driven in the axial direction. The movable body is provided with a cylindrical permanent magnet. In the fixed body, a coil is wound around a coil bobbin that surrounds the permanent magnet on the outer side in the radial direction. For this reason, since a permanent magnet and a coil can be enlarged in diameter, a big thrust can be given to a movable body also with a simple structure that there is one permanent magnet. Further, resonance of the movable body can be suppressed with a simple configuration in which the gel-like damper member is sandwiched between the fixed body and the movable body in the axial direction. Further, since the movable body is supported by the spring member on the outer side in the radial direction of the permanent magnet, the movable body is unlikely to be inclined even if the movable body is not supported by the support shaft. Therefore,
According to the present invention, it is possible to configure a linear actuator with a small number of parts and to generate appropriate vibrations in the movable body.

本発明において、前記コイルボビンは、前記可動体に対して軸線方向の一方側で重なる底板部と、該底板部から軸線方向の他方側に突出して前記永久磁石を径方向外側で囲む円筒部と、を備え、前記底板部には、軸線方向からみたとき、前記円筒部の内周面と前記可動体の外周面との間に構成された隙間に重なるスリットが周方向の複数個所に形成されていることが好ましい。かかる構成によれば、リニアアクチュエータを組み立てる際、スリットからシム等の治具を配置して円筒部の内周面と可動体の外周面との間に適正な隙間を設けることができる。従って、周方向のいずれの個所においても、隙間の幅を適正に設定できるので、可動体を支軸で支持しなくても、可動体に傾きが発生しにくい。   In the present invention, the coil bobbin includes a bottom plate portion that overlaps on one side in the axial direction with respect to the movable body, a cylindrical portion that protrudes from the bottom plate portion to the other side in the axial direction and surrounds the permanent magnet on a radially outer side, In the bottom plate portion, when viewed in the axial direction, slits are formed at a plurality of locations in the circumferential direction so as to overlap gaps formed between the inner peripheral surface of the cylindrical portion and the outer peripheral surface of the movable body. Preferably it is. According to this configuration, when assembling the linear actuator, a jig such as a shim can be arranged from the slit to provide an appropriate gap between the inner peripheral surface of the cylindrical portion and the outer peripheral surface of the movable body. Accordingly, since the gap width can be set appropriately at any location in the circumferential direction, the movable body is unlikely to be inclined even if the movable body is not supported by the support shaft.

本発明において、前記可動体は、前記永久磁石に軸線方向の一方側で重なる第１コアと、前記永久磁石に軸線方向の他方側で重なる第２コアと、を備え、前記第１コアは、前記永久磁石より大径であって、前記隙間は、前記円筒部の内周面と前記第１コアの外周面との間に位置することが好ましい。かかる構成によれば、永久磁石の外周面と円筒部の内周面との間で位置決めを行う場合より、可動体の外周面と円筒部の内周面との位置決めを行いやすい。   In the present invention, the movable body includes a first core that overlaps the permanent magnet on one side in the axial direction, and a second core that overlaps the permanent magnet on the other side in the axial direction. Preferably, the gap is larger than the permanent magnet, and the gap is located between the inner peripheral surface of the cylindrical portion and the outer peripheral surface of the first core. According to this configuration, it is easier to position the outer peripheral surface of the movable body and the inner peripheral surface of the cylindrical portion than when positioning between the outer peripheral surface of the permanent magnet and the inner peripheral surface of the cylindrical portion.

本発明において、前記固定体は、前記底板部に対して前記可動体とは反対側に重なる固定板を備えていることが好ましい。かかる構成によれば、軸線方向の一方側を固定板で塞ぐことができるので、可動体の外周面と円筒部の内周面との間等に異物が侵入しにくい。   In the present invention, it is preferable that the fixed body includes a fixed plate that overlaps the opposite side of the movable body with respect to the bottom plate portion. According to such a configuration, since one side in the axial direction can be closed by the fixed plate, foreign matter is unlikely to enter between the outer peripheral surface of the movable body and the inner peripheral surface of the cylindrical portion.

本発明において、前記固定板は、前記スリットを前記可動体とは反対側から塞いでいることが好ましい。かかる構成によれば、可動体とコイルボビンとの間や、可動体と固定板との間がエアーダンパーとして作用する。このため、ゲル状ダンパー部材のみを利用した場合に比して、可動体の共振をより確実に抑制することができる。また、可動体とコイルボビンとの間や、可動体と固定板との間がエアーダンパーとして作用するため、ゲル状ダンパー部材に求められる要求を緩和することができる。   In the present invention, the fixed plate preferably closes the slit from the side opposite to the movable body. According to such a configuration, the air damper acts between the movable body and the coil bobbin or between the movable body and the fixed plate. For this reason, compared with the case where only a gel-like damper member is utilized, the resonance of a movable body can be suppressed more reliably. In addition, since the air damper acts between the movable body and the coil bobbin, or between the movable body and the fixed plate, it is possible to relax the requirements for the gel-like damper member.

本発明において、前記第１コアおよび前記底板部には、前記ゲル状ダンパー部材が内側に配置された貫通穴が形成され、前記ゲル状ダンパー部材は、軸線方向において、前記固定板と前記可動体との間に挟まれていることが好ましい。かかる構成によれば、ゲル状ダンパー部材を永久磁石とコイルボビンとの間に配置する場合に比して、軸線方向においてゲル状ダンパー部材を配置するスペースを拡大することができる。それ故、ゲル状ダンパー部材として軸線方向の寸法が大のものを配置することができるので、可動体の共振をより確実に抑制することができる。   In the present invention, the first core and the bottom plate portion are formed with a through hole in which the gel-like damper member is disposed inside, and the gel-like damper member has the fixed plate and the movable body in the axial direction. It is preferable to be sandwiched between According to such a configuration, it is possible to expand a space for arranging the gel-like damper member in the axial direction as compared with the case where the gel-like damper member is arranged between the permanent magnet and the coil bobbin. Therefore, since the gel-like damper member having a large dimension in the axial direction can be disposed, the resonance of the movable body can be more reliably suppressed.

本発明において、前記固定板と前記可動体との間では、径方向外側に向けて開口する開口部が周方向で延在しており、前記固定板には、前記開口部に沿って粘着部材が設けられていることが好ましい。かかる構成によれば、可動体の外周面と円筒部の内周面との間等に異物が侵入しにくい。   In the present invention, between the fixed plate and the movable body, an opening that opens radially outward extends in the circumferential direction, and the fixing plate has an adhesive member along the opening. Is preferably provided. According to such a configuration, it is difficult for foreign matter to enter between the outer peripheral surface of the movable body and the inner peripheral surface of the cylindrical portion.

本発明において、前記粘着部材は、前記固定板の軸線方向の他方側の面に形成された溝内に配置されていることが好ましい。かかる構成によれば、粘着部材を配置するスペースを容易に確保することができる。   In this invention, it is preferable that the said adhesive member is arrange | positioned in the groove | channel formed in the surface of the other side of the axial direction of the said fixed plate. According to this configuration, a space for arranging the adhesive member can be easily secured.

本発明において、前記ゲル状ダンパー部材は、例えば、シリコーンゲルからなる。   In the present invention, the gel damper member is made of, for example, a silicone gel.

本発明では、可動体の駆動に磁気駆動機構を用い、かつ、バネ部材を可動体および固定体との間に接続してあるため、磁気駆動機構による推進力とバネ部材の付勢力とを利用して、可動体を軸線方向に駆動することができる。また、可動体には円柱状の永久磁石が設けられ、固定体では、永久磁石を径方向外側で囲むコイルボビンにコイルが巻回されている。このため、永久磁石およびコイルを大径化できるので、永久磁石が１つであるという簡素な構成でも、可動体に大きな推力を付与することができる。また、軸線方向において固定体と可動体との間にゲル状ダンパー部材が挟まれているという簡素な構成で可動体の共振を抑制することができる。また、バネ部材は、可動体の永久磁石を径方向外側で囲むコイルボビンに接続されている等、可動体が径方向外側でバネ部材に支持されている。このため、可動体を支軸で支持しなくても、可動体に傾きが発生しにくい。それ故、本発明によれば、少ない部品点数でリニアアクチュエータを構成することができるとともに、可動体に適正な振動を発生させることができる。   In the present invention, the magnetic drive mechanism is used to drive the movable body, and the spring member is connected between the movable body and the fixed body, so the propulsive force of the magnetic drive mechanism and the biasing force of the spring member are used. Thus, the movable body can be driven in the axial direction. The movable body is provided with a cylindrical permanent magnet. In the fixed body, a coil is wound around a coil bobbin that surrounds the permanent magnet on the outer side in the radial direction. For this reason, since a permanent magnet and a coil can be enlarged in diameter, a big thrust can be given to a movable body also with a simple structure that there is one permanent magnet. Further, resonance of the movable body can be suppressed with a simple configuration in which the gel-like damper member is sandwiched between the fixed body and the movable body in the axial direction. Further, the movable member is supported by the spring member on the radially outer side, such as being connected to a coil bobbin that surrounds the permanent magnet of the movable member on the radially outer side. For this reason, even if the movable body is not supported by the support shaft, the movable body is unlikely to be inclined. Therefore, according to the present invention, a linear actuator can be configured with a small number of parts, and appropriate vibrations can be generated in the movable body.

本発明の実施の形態１に係るリニアアクチュエータの斜視図である。It is a perspective view of the linear actuator which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係るリニアアクチュエータの分解視図である。It is an exploded view of the linear actuator which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係るリニアアクチュエータの断面図である。It is sectional drawing of the linear actuator which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係るリニアアクチュエータにおいて、コイルを巻回したコイルボビンにバネ部材８を取り付けた様子を示す斜視図である。In the linear actuator which concerns on Embodiment 1 of this invention, it is a perspective view which shows a mode that the spring member 8 was attached to the coil bobbin which wound the coil. 本発明の実施の形態１に係るリニアアクチュエータに用いたバネ部材、コイルボビンおよびコイルを分解した様子を軸線方向の他方側からみた分解斜視図である。It is the disassembled perspective view which looked at a mode that the spring member, coil bobbin, and coil which were used for the linear actuator which concerns on Embodiment 1 of this invention were decomposed | disassembled from the other side of the axial direction. 本発明の実施の形態１に係るリニアアクチュエータに用いたコイルボビンの説明図である。It is explanatory drawing of the coil bobbin used for the linear actuator which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係るリニアアクチュエータに用いたコイルボビンの第１スリットから治具を挿入した状態を拡大して示す拡大断面図である。It is an expanded sectional view which expands and shows the state which inserted the jig | tool from the 1st slit of the coil bobbin used for the linear actuator which concerns on Embodiment 1 of this invention. 本発明の実施の形態２に係るリニアアクチュエータの断面図である。It is sectional drawing of the linear actuator which concerns on Embodiment 2 of this invention.

図面を参照して、本発明の実施の形態を説明する。なお、以下の説明において、軸線Ｌとは可動体６の中心軸線であり、軸線Ｌは可動体６の重心を通っている。また、以下の説明では、軸線Ｌが延在する方向（軸線方向）において、可動体６が位置する側を一方側Ｌ１とし、固定体２の固定板４が位置する側を他方側Ｌ２として説明する。   Embodiments of the present invention will be described with reference to the drawings. In the following description, the axis L is the central axis of the movable body 6, and the axis L passes through the center of gravity of the movable body 6. In the following description, in the direction (axial direction) in which the axis L extends, the side on which the movable body 6 is positioned is referred to as one side L1, and the side on which the fixed plate 4 of the fixed body 2 is positioned is described as the other side L2. To do.

［実施の形態１］
（全体構成）
図１は、本発明の実施の形態１に係るリニアアクチュエータ１の斜視図である。図２は、本発明の実施の形態１に係るリニアアクチュエータ１の分解視図である。図３は、本発明の実施の形態１に係るリニアアクチュエータ１の断面図であり、図３（ａ）、（ｂ）、（ｃ）は、可動体６が軸線Ｌ方向の他方側Ｌ２に位置する状態の断面図、可動体６が軸線Ｌ方向の中間位置（原点位置）に位置する状態の断面図、および可動体６が軸線Ｌ方向の一方側Ｌ１に位置する状態の断面図である。 [Embodiment 1]
(overall structure)
FIG. 1 is a perspective view of a linear actuator 1 according to Embodiment 1 of the present invention. FIG. 2 is an exploded view of the linear actuator 1 according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view of the linear actuator 1 according to the first embodiment of the present invention. FIGS. 3A, 3B, and 3C show the movable body 6 positioned on the other side L2 in the axis L direction. FIG. 6 is a cross-sectional view in a state where the movable body 6 is positioned at an intermediate position (origin position) in the axis L direction, and a cross-sectional view in a state where the movable body 6 is positioned on one side L1 in the axis L direction.

図１、図２および図３（ｂ）に示すように、本形態のリニアアクチュエータ１は、固定体２と、可動体６と、可動体６と固定体２とに接続されたバネ部材８とを有しており、バネ部材８は、固定体２に対して可動体６を軸線Ｌ方向に移動可能に支持している。また、リニアアクチュエータ１は、可動体６を軸線Ｌ方向に駆動する磁気駆動機構５を有している。   As shown in FIGS. 1, 2, and 3 (b), the linear actuator 1 of the present embodiment includes a fixed body 2, a movable body 6, and a spring member 8 connected to the movable body 6 and the fixed body 2. The spring member 8 supports the movable body 6 so as to be movable in the direction of the axis L with respect to the fixed body 2. The linear actuator 1 has a magnetic drive mechanism 5 that drives the movable body 6 in the direction of the axis L.

（可動体６の構成）
可動体６は、磁気駆動機構５を構成する永久磁石５３を１つ有している。永久磁石５３
は、軸線Ｌを中心軸線とする円柱状であり、軸線Ｌ方向においてＮ極とＳ極とに着磁されている。また、可動体６は、永久磁石５３に軸線方向の一方側Ｌ１で重なる第１コア７１と、永久磁石５３に軸線Ｌ方向の他方側Ｌ２で重なる第２コア７２とを備えている。 (Configuration of movable body 6)
The movable body 6 has one permanent magnet 53 that constitutes the magnetic drive mechanism 5. Permanent magnet 53
Is a cylindrical shape having the axis L as the central axis, and is magnetized into the N pole and the S pole in the direction of the axis L. The movable body 6 includes a first core 71 that overlaps the permanent magnet 53 on one side L1 in the axial direction, and a second core 72 that overlaps the permanent magnet 53 on the other side L2 in the axial line L direction.

第１コア７１は、軸線Ｌを中心とする円環状であり、中心に貫通孔７１０を有している。また、第１コア７１は、外径寸法が永久磁石５３の外径寸法よりわずかに大きく、第１コア７１の外周面７１５は、永久磁石５３の外周面５３５より径方向外側に張り出している。かかる第１コア７１は、永久磁石５３の軸線Ｌ方向の一方側Ｌ１の面に接着等の方法で固定されている。   The first core 71 has an annular shape centered on the axis L, and has a through hole 710 at the center. Further, the outer diameter of the first core 71 is slightly larger than the outer diameter of the permanent magnet 53, and the outer peripheral surface 715 of the first core 71 projects outward in the radial direction from the outer peripheral surface 535 of the permanent magnet 53. The first core 71 is fixed to the surface of the permanent magnet 53 on the one side L1 in the axis L direction by a method such as adhesion.

第２コア７２は、永久磁石５３に軸線Ｌ方向の他方側Ｌ２で重なる端板部７２１と、端板部７２１の外縁から軸線Ｌ方向の一方側Ｌ１に延在する円筒状の側板部７２２とを備えている。また、側板部７２２の軸線Ｌ方向の一方側Ｌ１の端部で径方向内側に突出したストッパ用の凸部７２３を有している。本形態において、第２コア７２は、３枚の磁性板（第１磁性板７６、第２磁性板７７、および第３磁性板７８）によって構成されている。   The second core 72 includes an end plate portion 721 that overlaps the permanent magnet 53 on the other side L2 in the axis L direction, and a cylindrical side plate portion 722 that extends from the outer edge of the end plate portion 721 to the one side L1 in the axis L direction. It has. Moreover, it has the convex part 723 for stopper which protruded in the radial direction inner side at the edge part of the one side L1 of the axis line L direction of the side-plate part 722. FIG. In this embodiment, the second core 72 is composed of three magnetic plates (a first magnetic plate 76, a second magnetic plate 77, and a third magnetic plate 78).

第１磁性板７６は、永久磁石５３に軸線Ｌ方向の他方側Ｌ２で重なる円形の端板部７６１と、端板部７６１の外縁から軸線Ｌ方向の一方側Ｌ１に延在する円筒状の側板部７６２とを備えている。第２磁性板７７は、第１磁性板７６の端板部７６１よりわずかに小さな円板状であり、第１磁性板７６の端板部７６１に軸線Ｌ方向の一方側Ｌ１で積層されている。この状態で、第２磁性板７７は、穴７７３の縁等を利用して第１磁性板７６の端板部７６１に溶接されている。このため、第２コア７２の端板部７２１は、第１磁性板７６の端板部７６１と、第２磁性板７７とによって構成されている。従って、第２コア７２の端板部７２１の厚さは、第１磁性板７６の端板部７６１の板厚と第２磁性板７７の板厚との和に相当し、第１コア７１の板厚より大である。なお、第２磁性板７７の軸線Ｌ方向の他方側Ｌ２の面は、外周縁に沿って段部７７４が形成されている。   The first magnetic plate 76 includes a circular end plate portion 761 that overlaps the permanent magnet 53 on the other side L2 in the axis L direction, and a cylindrical side plate that extends from the outer edge of the end plate portion 761 to the one side L1 in the axis L direction. Part 762. The second magnetic plate 77 has a disk shape slightly smaller than the end plate portion 761 of the first magnetic plate 76, and is stacked on the end plate portion 761 of the first magnetic plate 76 on one side L1 in the axis L direction. . In this state, the second magnetic plate 77 is welded to the end plate portion 761 of the first magnetic plate 76 using the edge of the hole 773 or the like. Therefore, the end plate portion 721 of the second core 72 is constituted by the end plate portion 761 of the first magnetic plate 76 and the second magnetic plate 77. Therefore, the thickness of the end plate portion 721 of the second core 72 corresponds to the sum of the plate thickness of the end plate portion 761 of the first magnetic plate 76 and the plate thickness of the second magnetic plate 77. It is larger than the plate thickness. A step portion 774 is formed along the outer peripheral edge of the surface of the second magnetic plate 77 on the other side L2 in the axis L direction.

第３磁性板７８は円筒状の胴部７８１を有しており、胴部７８１の軸線Ｌ方向の他方側Ｌ２の端部が第１磁性板７６の側板部７６２の軸線Ｌ方向の一方側Ｌ１の端部に溶接等によって連結されている。このため、第２コア７２の側板部７２２は、第１磁性板７６の側板部７６２と、第３磁性板７８の胴部７８１とによって構成されている。ここで、第１磁性板７６の側板部７６２の軸線Ｌ方向の一方側Ｌ１の端部には、周方向の複数個所に切り欠き７６３が形成されており、第１磁性板７６の側板部７６２と第３磁性板７８の胴部７８１とを溶接等によって連結する際、切り欠き７６３には、後述するバネ部材８の可動体側連結部８２が保持される。また、第３磁性板７８は胴部７８１の軸線Ｌ方向の一方側Ｌ１の端部で径方向内側に折れ曲がった環状部７８２を有しており、かかる環状部７８２によって、第２コア７２のストッパ用の凸部７２３が構成されている。このように構成した第２コア７２は、第２磁性板７７が永久磁石５３の軸線Ｌ方向の他方側Ｌ２の面に接着等の方法で固定されている。   The third magnetic plate 78 has a cylindrical body portion 781, and the end portion of the other side L2 of the body portion 781 in the axis L direction is one side L1 of the side plate portion 762 of the first magnetic plate 76 in the axis L direction. It is connected to the end of this by welding or the like. Therefore, the side plate portion 722 of the second core 72 is constituted by the side plate portion 762 of the first magnetic plate 76 and the body portion 781 of the third magnetic plate 78. Here, notches 763 are formed at a plurality of positions in the circumferential direction at the end of one side L1 of the side plate 762 of the first magnetic plate 76 in the axis L direction, and the side plate 762 of the first magnetic plate 76 is formed. And the body 781 of the third magnetic plate 78 are connected by welding or the like, the notch 763 holds a movable body side connecting portion 82 of the spring member 8 described later. The third magnetic plate 78 has an annular portion 782 that is bent radially inward at one end L1 of the trunk portion 781 in the axis L direction, and the annular portion 782 serves as a stopper for the second core 72. A convex portion 723 is formed. In the second core 72 configured as described above, the second magnetic plate 77 is fixed to the surface of the other side L2 of the permanent magnet 53 in the axis L direction by a method such as adhesion.

（固定体２の構成）
図４は、本発明の実施の形態１に係るリニアアクチュエータ１において、コイル５５を巻回したコイルボビン３にバネ部材８を取り付けた様子を示す斜視図であり、図４（ａ）、（ｂ）は、コイルボビン３を軸線Ｌ方向の他方側Ｌ２からみた斜視図、およびコイルボビン３を軸線Ｌ方向の一方側Ｌ１からみた斜視図である。図５は、本発明の実施の形態１に係るリニアアクチュエータ１に用いたバネ部材８、コイルボビン３およびコイル５５を分解した様子を軸線Ｌ方向の他方側Ｌ２からみた分解斜視図である。図６は、本発明の実施の形態１に係るリニアアクチュエータ１に用いたコイルボビン３の説明図であり、図６（ａ）、（ｂ）、（ｃ）、（ｄ）は、コイルボビン３を軸線Ｌ方向の他方側Ｌ２からみた平面図、コイルボビン３を軸線Ｌ方向の一方側Ｌ１からみた底面図、コイルボビン３の側
面図、およびコイルボビン３のスリットを軸線Ｌ方向の他方側Ｌ２からみた様子を拡大して示す説明図である。 (Configuration of fixed body 2)
FIG. 4 is a perspective view showing a state where the spring member 8 is attached to the coil bobbin 3 around which the coil 55 is wound in the linear actuator 1 according to Embodiment 1 of the present invention, and FIGS. These are the perspective view which looked at the coil bobbin 3 from the other side L2 of the axis line L direction, and the perspective view which looked at the coil bobbin 3 from the one side L1 of the axis line L direction. FIG. 5 is an exploded perspective view of the state in which the spring member 8, the coil bobbin 3, and the coil 55 used in the linear actuator 1 according to Embodiment 1 of the present invention are disassembled, as viewed from the other side L2 in the axis L direction. 6 is an explanatory diagram of the coil bobbin 3 used in the linear actuator 1 according to the first embodiment of the present invention. FIGS. 6 (a), 6 (b), 6 (c), and 6 (d) show the coil bobbin 3 as an axis. A plan view of the L direction from the other side L2, a bottom view of the coil bobbin 3 from the one side L1 in the axis L direction, a side view of the coil bobbin 3, and a state in which the slit of the coil bobbin 3 is viewed from the other side L2 in the axis L direction. It is explanatory drawing shown.

図２、図３（ｂ）、図４、図５および図６に示すように、固定体２は、磁気駆動機構５のコイル５５が巻回されたコイルボビン３を有している。コイルボビン３は、可動体６に対して軸線Ｌ方向の一方側Ｌ１で重なる底板部３１と、底板部３１から軸線Ｌ方向の他方側Ｌ２に突出した円筒部３２とを備えており、円筒部３２は、永久磁石５３と第２コア７２の側板部７２２との間で永久磁石５３を径方向外側で囲んでいる。また、固定体２は、コイルボビン３の底板部３１に対して可動体６とは反対側（軸線Ｌ方向の一方側Ｌ１）に重なる固定板４を備えている。   As shown in FIGS. 2, 3 (b), 4, 5 and 6, the fixed body 2 has a coil bobbin 3 around which the coil 55 of the magnetic drive mechanism 5 is wound. The coil bobbin 3 includes a bottom plate portion 31 that overlaps the movable body 6 on one side L1 in the axis L direction, and a cylindrical portion 32 that protrudes from the bottom plate portion 31 to the other side L2 in the axis L direction. Encloses the permanent magnet 53 radially outward between the permanent magnet 53 and the side plate portion 722 of the second core 72. The fixed body 2 includes a fixed plate 4 that overlaps with the bottom plate portion 31 of the coil bobbin 3 on the side opposite to the movable body 6 (one side L1 in the axis L direction).

コイルボビン３において、円筒部３２は、コイル５５が巻回された筒状胴部３２１と、筒状胴部３２１の軸線Ｌ方向の一方側Ｌ１の端部から径方向外側に拡径した円環状の第１フランジ部３２２と、第１フランジ部３２２に対して軸線Ｌ方向の他方側Ｌ２で筒状胴部３２１から径方向外側に拡径した円環状の第２フランジ部３２３とを有している。   In the coil bobbin 3, the cylindrical portion 32 includes an annular body 321 around which the coil 55 is wound, and an annular shape whose diameter is expanded radially outward from an end portion on one side L <b> 1 in the axis L direction of the tubular body 321. The first flange portion 322 has an annular second flange portion 323 that is expanded radially outward from the cylindrical body portion 321 on the other side L2 in the axis L direction with respect to the first flange portion 322. .

ここで、軸線Ｌ方向からみたとき、第２フランジ部３２３は、第１フランジ部３２２より大径である。従って、筒状胴部３２１にコイル５５を巻回した状態で、第１フランジ部３２２は、コイル５５の外周面からわずかに径方向外側に突出しているのに対して、第２フランジ部３２３は、コイル５５の外周面から第１フランジ部３２２より径方向外側に大きく突出している。   Here, when viewed from the direction of the axis L, the second flange portion 323 has a larger diameter than the first flange portion 322. Accordingly, in a state where the coil 55 is wound around the cylindrical body portion 321, the first flange portion 322 slightly protrudes radially outward from the outer peripheral surface of the coil 55, whereas the second flange portion 323 is The coil 55 protrudes greatly outward in the radial direction from the first flange portion 322 from the outer peripheral surface of the coil 55.

コイルボビン３において、円筒部３２の軸線Ｌ方向の一方側Ｌ１の端部から径方向内側に底板部３１が設けられており、底板部３１の中央には貫通穴３１０が形成されている。また、第２フランジ部３２３は、筒状胴部３２１の先端面３２８より軸線Ｌ方向の一方側Ｌ１に設けられている。   In the coil bobbin 3, a bottom plate portion 31 is provided radially inward from an end on one side L <b> 1 in the axis L direction of the cylindrical portion 32, and a through hole 310 is formed in the center of the bottom plate portion 31. The second flange portion 323 is provided on one side L1 in the direction of the axis L from the distal end surface 328 of the cylindrical body portion 321.

図２および図３に示すように、固定板４は、コイルボビン３の底板部３１に対して可動体６とは反対側（軸線Ｌ方向の一方側Ｌ１）に重なる円板部４１と、円板部４１の周方向の１個所から径方向外側に突出した矩形の基板支持部４２とを有している。基板支持部４２には配線基板４６が支持されており、配線基板４６には、コイル５５の端部５５１、５５２が接続されている。   As shown in FIGS. 2 and 3, the fixed plate 4 includes a disc portion 41 that overlaps with the bottom plate portion 31 of the coil bobbin 3 on the side opposite to the movable body 6 (one side L1 in the axis L direction), and a disc And a rectangular substrate support portion 42 protruding radially outward from one circumferential portion of the portion 41. A wiring board 46 is supported on the board support portion 42, and ends 551 and 552 of the coil 55 are connected to the wiring board 46.

（バネ部材８の構成）
図２、図３（ｂ）、図４および図５に示すように、バネ部材８は、固定体２（コイルボビン３）に連結された固定体側連結部８１と、可動体６（第２コア７２）に連結された可動体側連結部８２と、固定体側連結部８１と可動体側連結部８２とに接続された複数本のアーム部８３とを備えた板状バネ部材である。本形態において、固定体側連結部８１は、円環状であり、可動体側連結部８２およびアーム部８３より径方向内側に位置する。ここで、固定体側連結部８１には、コイルボビン３の筒状胴部３２１の先端面３２８から軸線Ｌ方向の他方側Ｌ２に突出した突起３２９が嵌る穴８１９が形成されており、この状態で、固定体側連結部８１と筒状胴部３２１の先端面３２８とが連結されている。 (Configuration of the spring member 8)
As shown in FIGS. 2, 3 (b), 4 and 5, the spring member 8 includes a fixed body side connecting portion 81 connected to the fixed body 2 (coil bobbin 3) and the movable body 6 (second core 72). ) And a plurality of arm portions 83 connected to the fixed body side connecting portion 81 and the movable body side connecting portion 82. In the present embodiment, the fixed body side connecting portion 81 has an annular shape and is located on the radially inner side from the movable body side connecting portion 82 and the arm portion 83. Here, the fixed body side connecting portion 81 is formed with a hole 819 into which a protrusion 329 protruding from the tip end surface 328 of the cylindrical body portion 321 of the coil bobbin 3 to the other side L2 in the axis L direction is fitted. The fixed body side connecting portion 81 and the tip end surface 328 of the cylindrical body portion 321 are connected.

可動体側連結部８２は、周方向で３つに分割されており、３つの可動体側連結部８２の各々からアーム部８３が周方向に延在している。かかる３つの可動体側連結部８２はいずれも、図１および図２を参照して説明したように、第１磁性板７６の側板部７６２と第３磁性板７８の胴部７８１とを溶接等によって連結する際、切り欠き７６３に保持される。   The movable body side connecting portion 82 is divided into three in the circumferential direction, and an arm portion 83 extends in the circumferential direction from each of the three movable body side connecting portions 82. As described with reference to FIG. 1 and FIG. 2, the three movable body side connecting portions 82 are each formed by welding the side plate portion 762 of the first magnetic plate 76 and the body portion 781 of the third magnetic plate 78. When connecting, it is held in the notch 763.

（ボビン３の第１スリット３１１の構成）
図７は、本発明の実施の形態１に係るリニアアクチュエータ１に用いたコイルボビン３
の第１スリット３１１から治具３０を挿入した状態を拡大して示す拡大断面図である。 (Configuration of the first slit 311 of the bobbin 3)
FIG. 7 shows a coil bobbin 3 used in the linear actuator 1 according to the first embodiment of the present invention.
It is an expanded sectional view which expands and shows the state which inserted the jig | tool 30 from the 1st slit 311 of.

図４および図５に示すように、コイルボビン３において、底板部３１には、周方向の複数個所に第１スリット３１１が円弧状に形成されており、軸線Ｌ方向からみたとき、第１スリット３１１は、筒状胴部３２１の内周面３２５（円筒部３２の内周面３２５）と可動体６の第１コア７１の外周面７１５との隙間Ｇ（図３（ｂ）および図７参照）と重なる位置にある。より具体的には、図７に示すように、軸線Ｌ方向からみたとき、第１スリット３１１の外周縁３１１ａは、筒状胴部３２１の内周面３２５（円筒部３２の内周面３２５）と重なる位置にあり、第１スリット３１１の内周縁３１１ｂは、第１コア７１の外周面７１５と重なる位置にある。その結果、可動体６の永久磁石５３と固定体２のコイル５５との位置が精度よく設定されている。   As shown in FIGS. 4 and 5, in the coil bobbin 3, the bottom plate portion 31 has first slits 311 formed in an arc shape at a plurality of locations in the circumferential direction, and when viewed from the direction of the axis L, the first slit 311. Is a gap G between the inner peripheral surface 325 of the cylindrical body 321 (the inner peripheral surface 325 of the cylindrical portion 32) and the outer peripheral surface 715 of the first core 71 of the movable body 6 (see FIG. 3B and FIG. 7). It is in a position that overlaps. More specifically, as shown in FIG. 7, when viewed from the direction of the axis L, the outer peripheral edge 311a of the first slit 311 is the inner peripheral surface 325 of the cylindrical body 321 (the inner peripheral surface 325 of the cylindrical portion 32). The inner peripheral edge 311 b of the first slit 311 is in a position overlapping the outer peripheral surface 715 of the first core 71. As a result, the positions of the permanent magnet 53 of the movable body 6 and the coil 55 of the fixed body 2 are set with high accuracy.

かかる構成は、リニアアクチュエータ１の組み立て工程において、固定体側連結部８１をコイルボビン３に固定した後、バネ部材８の可動体側連結部８２を第２コア７２に固定する際、第１スリット３１１から薄板状の治具３０（シム）を挿入して、治具３０を筒状胴部３２１の内周面３２５（円筒部３２の内周面３２５）と第１コア７１の外周面７１５との隙間Ｇに介在させることにより、可動体６とコイルボビン３との位置決めを行う。そして、この状態で、バネ部材８の可動体側連結部８２を第２コア７２に固定する。   In such a configuration, in the assembly process of the linear actuator 1, the fixed body side connecting portion 81 is fixed to the coil bobbin 3, and then the movable body side connecting portion 82 of the spring member 8 is fixed to the second core 72 from the first slit 311. A jig 30 (shim) is inserted, and the gap G between the inner peripheral surface 325 of the cylindrical body 321 (the inner peripheral surface 325 of the cylindrical portion 32) and the outer peripheral surface 715 of the first core 71 is inserted into the jig 30. By positioning the movable body 6 and the coil bobbin 3, the movable body 6 and the coil bobbin 3 are positioned. In this state, the movable body side connecting portion 82 of the spring member 8 is fixed to the second core 72.

図４および図６に示すように、コイルボビン３の底板部３１には、第１スリット３１１より径方向内側に第２スリット３１２が形成されている。かかる第２スリット３１２は、バネ部材８を介して可動体６をコイルボビン３に取り付けた後、コイルボビン３の底板部３１に固定板４を接着剤（図示せず）により固定する際、固定板４から切り起こされた位置決め板４３が嵌ることにより、コイルボビン３と固定板４との位置決めが行われる。   As shown in FIGS. 4 and 6, the bottom plate portion 31 of the coil bobbin 3 has a second slit 312 formed radially inward from the first slit 311. The second slit 312 is formed when the fixing plate 4 is fixed to the bottom plate portion 31 of the coil bobbin 3 with an adhesive (not shown) after the movable body 6 is attached to the coil bobbin 3 via the spring member 8. The positioning of the coil bobbin 3 and the fixed plate 4 is performed by fitting the positioning plate 43 cut and raised from the position.

このようにして、コイルボビン３の底板部３１に固定板４を接着剤により固定した際、第１スリット３１１および第２スリット３１２は、接着剤により塞がれることにより、固定体２の内側において、可動体６と固定体２との間は、径方向外側に向けて開口する開口部２０のみで外部と連通する。従って、可動体６と固定体２との間はエアーダンパーとして機能する。   In this way, when the fixing plate 4 is fixed to the bottom plate portion 31 of the coil bobbin 3 with an adhesive, the first slit 311 and the second slit 312 are closed by the adhesive, so that the inside of the fixed body 2 The movable body 6 and the fixed body 2 communicate with the outside only by the opening 20 that opens toward the radially outer side. Accordingly, the space between the movable body 6 and the fixed body 2 functions as an air damper.

なお、第１スリット３１１および第２スリット３１２において、軸線Ｌ方向の一方側Ｌ１の開口縁にはテーパ面３１１ｔ、３１２ｔが形成されている。従って、第１スリット３１１および第２スリット３１２に対して治具３０や位置決め板４３を容易に挿入することができる。また、接着剤が第１スリット３１１および第２スリット３１２に向けて容易に流れ込む。   In the first slit 311 and the second slit 312, tapered surfaces 311 t and 312 t are formed at the opening edge on one side L <b> 1 in the axis L direction. Therefore, the jig 30 and the positioning plate 43 can be easily inserted into the first slit 311 and the second slit 312. In addition, the adhesive easily flows toward the first slit 311 and the second slit 312.

（粘着部材４５の構成）
図１、図２および図３に示すように、固定板４には、開口部２０に沿って粘着部材４５が設けられている。本形態において、粘着部材４５は、固定板４の軸線Ｌ方向の他方側Ｌ２の面に固着された粘着テープや粘着性を備えた塗布物である。本形態において、粘着部材４５は、軸線Ｌ方向からみたとき、固定体４において、コイルボビン３の第１フランジ部３２２の外縁と重なる位置に沿って円環状に形成されている。 (Configuration of adhesive member 45)
As shown in FIGS. 1, 2, and 3, the fixing plate 4 is provided with an adhesive member 45 along the opening 20. In this embodiment, the pressure-sensitive adhesive member 45 is a pressure-sensitive adhesive tape fixed to the surface of the other side L <b> 2 in the axis L direction of the fixed plate 4 or a coated material having adhesiveness. In this embodiment, the adhesive member 45 is formed in an annular shape along the position overlapping the outer edge of the first flange portion 322 of the coil bobbin 3 in the fixed body 4 when viewed from the axis L direction.

（ボビン３の補強リブ３３の構成）
本形態のリニアアクチュエータ１において、可動体６と固定体２との間には、第２コア７２の内周面７２７に径方向内側で対向する第２フランジ部３２３の外周端部３２７によって、外力により可動体６が軸線Ｌに直交する方向に移動した際に可動体６の可動範囲を規制する第１ストッパが構成されている。また、可動体６と固定体２との間には、第２コア７２の凸部７２３と第２フランジ部３２３とによって、外力により可動体６が軸線Ｌの
他方側Ｌ２に移動した際に可動体６の可動範囲を規制する第２ストッパが構成されている。 (Configuration of the reinforcing rib 33 of the bobbin 3)
In the linear actuator 1 of this embodiment, an external force is applied between the movable body 6 and the fixed body 2 by the outer peripheral end portion 327 of the second flange portion 323 that faces the inner peripheral surface 727 of the second core 72 radially inward. Thus, the first stopper is configured to restrict the movable range of the movable body 6 when the movable body 6 moves in the direction orthogonal to the axis L. Further, the movable body 6 is movable between the movable body 6 and the fixed body 2 when the movable body 6 moves to the other side L2 of the axis L by an external force by the convex portion 723 and the second flange portion 323 of the second core 72. A second stopper that restricts the movable range of the body 6 is configured.

但し、第２フランジ部３２３は、薄い円環部であり、ストッパ用として強度が不十分である。そこで、本形態では、コイルボビン３の円筒部３２の外周面のうち、第２フランジ部３２３より軸線Ｌ方向の他方側Ｌ２には第２フランジ部３２３に繋がる補強リブ３３が構成されている。本形態において、補強リブ３３の外周面３３０は、軸線Ｌ方向からみたとき、第２フランジ部３２３の外周端部３２７と重なっている。   However, the second flange portion 323 is a thin annular portion and has insufficient strength for a stopper. Therefore, in this embodiment, a reinforcing rib 33 connected to the second flange portion 323 is formed on the other side L2 in the axis L direction from the second flange portion 323 in the outer peripheral surface of the cylindrical portion 32 of the coil bobbin 3. In this embodiment, the outer peripheral surface 330 of the reinforcing rib 33 overlaps with the outer peripheral end portion 327 of the second flange portion 323 when viewed from the axis L direction.

ここで、補強リブ３３は、アーム部８３の可動体側連結部８２との接続位置８２０から周方向にずれた位置に設けられている。また、補強リブ３３は、アーム部８３の可動体側連結部８２との接続位置８２０からアーム部８３の延在方向に沿って軸線Ｌ方向の他方側Ｌ２から一方側Ｌ１に向けて傾いた斜面３３５を軸線Ｌ方向の他方側Ｌ２に向けている。すなわち、補強リブ３３は、周方向の寸法が軸線Ｌ方向の他方側Ｌ２で短く、軸線Ｌ方向の一方側Ｌ１で長くなっており、最も長い部分が第２フランジ部３２３と繋がっている。   Here, the reinforcing rib 33 is provided at a position shifted in the circumferential direction from the connection position 820 of the arm portion 83 with the movable body side connecting portion 82. Further, the reinforcing rib 33 is a slope 335 inclined from the connecting position 820 of the arm part 83 to the movable body side connecting part 82 toward the one side L1 from the other side L2 in the axis L direction along the extending direction of the arm part 83. Is directed to the other side L2 in the direction of the axis L. That is, the reinforcing rib 33 has a circumferential dimension that is short on the other side L2 in the axis L direction and long on one side L1 in the axis L direction, and the longest part is connected to the second flange portion 323.

（ゲル状ダンパー部材９の構成）
図２および図３に示すように、本形態のリニアアクチュエータ１において、軸線Ｌ上の位置において固定体２と可動体６との間にはゲル状ダンパー部材９が配置されている。 (Configuration of Gel Damper Member 9)
As shown in FIGS. 2 and 3, in the linear actuator 1 of this embodiment, a gel-like damper member 9 is disposed between the fixed body 2 and the movable body 6 at a position on the axis L.

より具体的には、固定体２において、固定板４は、可動体６（永久磁石５３）に対して軸線Ｌ方向の一方側Ｌ１で第１コア７１の貫通穴７１０およびボビン３の底板部３１の貫通穴３１０を介して対向する固定体側対向部になっており、軸線Ｌ方向において、永久磁石５３と固定板４との間には、円柱状のゲル状ダンパー部材９が配置されている。ここで、ゲル状ダンパー部材９は、軸線Ｌ方向の一方側Ｌ１の面が固定板４に接着剤により固定され、他方側Ｌ２の面は、永久磁石５３に接着剤により固定されている。この状態で、ゲル状ダンパー部材９は、第１コア７１の貫通穴７１０の内側、およびボビン３の底板部３１の貫通穴３１０の内側を貫通している。   More specifically, in the fixed body 2, the fixed plate 4 includes the through hole 710 of the first core 71 and the bottom plate portion 31 of the bobbin 3 on one side L <b> 1 in the axis L direction with respect to the movable body 6 (permanent magnet 53). The cylindrical gel damper member 9 is disposed between the permanent magnet 53 and the fixed plate 4 in the axis L direction. Here, in the gel-like damper member 9, the surface on one side L <b> 1 in the axis L direction is fixed to the fixing plate 4 with an adhesive, and the surface on the other side L <b> 2 is fixed to the permanent magnet 53 with an adhesive. In this state, the gel damper member 9 penetrates the inside of the through hole 710 of the first core 71 and the inside of the through hole 310 of the bottom plate portion 31 of the bobbin 3.

本形態において、ゲル状ダンパー部材９は、針入度が９０度から１１０度のシリコーンゲルからなる。針入度とは、ＪＩＳ−Ｋ−２２０７やＪＩＳ−Ｋ−２２２０で規定されているように、２５℃で９．３８ｇの総荷重をかけた１／４コーンの針が５秒間に入り込む深さを１／１０ｍｍ単位で表わした値であり、この値が小さいほど硬いことを意味する。   In this embodiment, the gel-like damper member 9 is made of a silicone gel having a penetration of 90 to 110 degrees. The penetration is a depth at which a 1/4 cone needle with a total load of 9.38 g at 25 ° C. enters 5 seconds as defined in JIS-K-2207 and JIS-K-2220. Is a value expressed in units of 1/10 mm, and the smaller this value is, the harder it is.

（本形態の動作および主な効果）
以上説明したように、本形態のリニアアクチュエータ１において、コイル５１への通電を休止している期間、可動体６は、図３（ｂ）に示すように、可動体６の質量とバネ部材８の保持力（付勢力）とが釣り合った原点位置にある。この状態で、コイル５１に正弦波や反転パルス等を供給すると、まず、可動体６は、磁気駆動機構５によって推進力を受け、図３（ｃ）に示すように、バネ部材８の付勢力に抗して、軸線Ｌ方向の一方側Ｌ１に移動する。その際の移動量は、コイル５１に供給される電流値と、バネ部材８の付勢力とによって規定される。そして、バネ部材８の付勢力によって、原点位置に戻った後、逆向きの推進力を受け、図３（ａ）に示すように、バネ部材８の付勢力に抗して、軸線Ｌ方向の他方側Ｌ２に移動する。このようにして、可動体６を軸線Ｌ方向で振動する。その際の移動量は、コイル５１に供給される電流値と、バネ部材８の付勢力とによって規定される。また、振動の周波数は、コイル５１に供給される電流の周波数によって規定される。このため、振動の強弱や周波数が可変である。 (Operation and main effect of this form)
As described above, in the linear actuator 1 according to the present embodiment, during the period when the energization to the coil 51 is suspended, the movable body 6 has the mass of the movable body 6 and the spring member 8 as shown in FIG. The holding force (biasing force) is balanced at the origin position. In this state, when a sine wave, an inversion pulse, or the like is supplied to the coil 51, first, the movable body 6 receives a propulsive force by the magnetic drive mechanism 5, and the urging force of the spring member 8 as shown in FIG. Against this, it moves to one side L1 in the direction of the axis L. The amount of movement at that time is defined by the current value supplied to the coil 51 and the biasing force of the spring member 8. And after returning to an origin position with the urging | biasing force of the spring member 8, as shown to Fig.3 (a), it opposes the urging | biasing force of the spring member 8, and the direction of an axis L direction receives it. Move to the other side L2. In this way, the movable body 6 is vibrated in the direction of the axis L. The amount of movement at that time is defined by the current value supplied to the coil 51 and the biasing force of the spring member 8. The frequency of vibration is defined by the frequency of the current supplied to the coil 51. For this reason, vibration intensity and frequency are variable.

ここで、可動体６には円柱状の永久磁石５３が１つ設けられ、固定体２では、永久磁石５３を径方向外側で囲むコイルボビン３にコイル５５が巻回されている。このため、永久
磁石５３およびコイル５５を大径化できる。また、可動体６は、永久磁石５３の軸線Ｌ方向の両側に第１コア７１および第２コア７２を備えているため、コイル５５に鎖交する磁束密度が高い。従って、永久磁石５３が１つであるという簡素な構成でも、可動体６に大きな推力を付与することができる。 Here, the movable body 6 is provided with one cylindrical permanent magnet 53, and in the fixed body 2, the coil 55 is wound around the coil bobbin 3 that surrounds the permanent magnet 53 on the outer side in the radial direction. For this reason, the permanent magnet 53 and the coil 55 can be increased in diameter. In addition, since the movable body 6 includes the first core 71 and the second core 72 on both sides of the permanent magnet 53 in the axis L direction, the magnetic flux density linked to the coil 55 is high. Therefore, even with a simple configuration in which the number of permanent magnets 53 is one, a large thrust can be applied to the movable body 6.

また、バネ部材８は、可動体６の永久磁石５３を径方向外側で囲むコイルボビン３に接続されている等、可動体６が永久磁石５３の径方向外側でバネ部材８に支持されている。このため、可動体６がバネ部材８によって安定した状態で支持されているため、可動体６を支軸で支持しなくても、可動体６に傾きが発生しにくい。それ故、本形態によれば、少ない部品点数でリニアアクチュエータ１を構成することができるとともに、可動体６に適正な振動を発生させることができる。   Further, the spring member 8 is supported by the spring member 8 on the radially outer side of the permanent magnet 53, such as being connected to a coil bobbin 3 that surrounds the permanent magnet 53 of the movable body 6 on the radially outer side. For this reason, since the movable body 6 is stably supported by the spring member 8, even if the movable body 6 is not supported by the support shaft, the movable body 6 is unlikely to be inclined. Therefore, according to this embodiment, the linear actuator 1 can be configured with a small number of parts, and appropriate vibration can be generated in the movable body 6.

また、第２コア７２では、第１磁性板７６と第２磁性板７７とが積層されているため、第１磁性板７６に対する絞り加工の際の制約から厚さに制限がある場合でも、第２コア７２の端板部７２１を十分な厚さとすることができる。例えば、第２コア７２の端板部７２１の厚さ（端板部７６２の板厚と第２磁性板７７の板厚との和）が第１コア７１の板厚より大である。それ故、コイル５５に鎖交する磁束密度を高めることができるので、可動体６に大きな推力を付与することができる。   In the second core 72, since the first magnetic plate 76 and the second magnetic plate 77 are laminated, even if the thickness is limited due to the restriction during the drawing process on the first magnetic plate 76, The end plate portion 721 of the two cores 72 can be made sufficiently thick. For example, the thickness of the end plate portion 721 of the second core 72 (the sum of the plate thickness of the end plate portion 762 and the plate thickness of the second magnetic plate 77) is larger than the plate thickness of the first core 71. Therefore, since the magnetic flux density linked to the coil 55 can be increased, a large thrust can be applied to the movable body 6.

また、コイルボビン３の底板部３１には、軸線Ｌ方向からみたとき、コイルボビン３の円筒部３２の内周面３２５と可動体６の外周面との間に構成された隙間Ｇに重なる第１スリット３１１が周方向の複数個所に形成されている。このため、リニアアクチュエータ１を組み立てる際、図７を参照して説明したように、第１スリット３１１からシム等の治具３０を配置して円筒部３２の内周面３２５と可動体６の外周面との間に適正な隙間Ｇを設けることができる。従って、周方向のいずれの個所においても、隙間Ｇの幅を適正に設定できるので、可動体６を支軸で支持しなくても、可動体６に傾きが発生しにくい。ここで、第１コア７１は、永久磁石５３より大径であるため、前記の隙間Ｇは、円筒部３２の内周面３２５と第１コア７１の外周面７１５との間に位置する。このため、永久磁石５３の外周面５３５と円筒部３２の内周面３２５との間で位置決めを行う場合より、可動体６の外周面と円筒部３２の内周面３２５との位置決めを行いやすい。   In addition, the bottom plate portion 31 of the coil bobbin 3 has a first slit that overlaps a gap G formed between the inner peripheral surface 325 of the cylindrical portion 32 of the coil bobbin 3 and the outer peripheral surface of the movable body 6 when viewed from the direction of the axis L. 311 are formed at a plurality of locations in the circumferential direction. For this reason, when assembling the linear actuator 1, as described with reference to FIG. 7, a jig 30 such as a shim is disposed from the first slit 311, and the outer peripheral surface of the movable body 6 and the inner peripheral surface 325 of the cylindrical portion 32. An appropriate gap G can be provided between the surface and the surface. Therefore, since the width of the gap G can be set appropriately at any location in the circumferential direction, it is difficult for the movable body 6 to tilt even if the movable body 6 is not supported by the support shaft. Here, since the first core 71 has a larger diameter than the permanent magnet 53, the gap G is located between the inner peripheral surface 325 of the cylindrical portion 32 and the outer peripheral surface 715 of the first core 71. For this reason, it is easier to position the outer peripheral surface of the movable body 6 and the inner peripheral surface 325 of the cylindrical portion 32 than when positioning between the outer peripheral surface 535 of the permanent magnet 53 and the inner peripheral surface 325 of the cylindrical portion 32. .

また、振動の周波数は、コイル５１に供給される駆動信号の周波数によって規定される。その際、可動体６が、可動体６の質量とバネ部材８のバネ定数に対応する周波数で共振することがあるが、本形態では、固定体２の固定板４と可動体６の永久磁石５３との間にゲル状ダンパー部材９が設けられており、かかるゲル状ダンパー部材９は、可動体６の移動に追従して変形しながら可動体６の振動を吸収する。このため、可動体６の共振を抑制することができる。また、ゲル状ダンパー部材９は、針入度が９０度から１１０度である。このため、ゲル状ダンパー部材９は、ダンパー機能を発揮するのに十分な弾性を有するとともに、ゲル状ダンパー部材９が破断して飛散するような事態が発生しにくい。また、ゲル状ダンパー部材９は、可動体６および固定体２の双方に接着固定されているため、可動体６の移動に伴ってゲル状ダンパー部材９が移動することを防止することができる。   The frequency of vibration is defined by the frequency of the drive signal supplied to the coil 51. At this time, the movable body 6 may resonate at a frequency corresponding to the mass of the movable body 6 and the spring constant of the spring member 8. In this embodiment, the fixed plate 4 of the fixed body 2 and the permanent magnet of the movable body 6 are used. A gel-like damper member 9 is provided between the movable body 6 and the gel-like damper member 9 so as to absorb the vibration of the movable body 6 while deforming following the movement of the movable body 6. For this reason, resonance of the movable body 6 can be suppressed. Further, the gel-like damper member 9 has a penetration of 90 degrees to 110 degrees. For this reason, the gel-like damper member 9 has sufficient elasticity to exert a damper function, and it is difficult for the gel-like damper member 9 to break and scatter. Moreover, since the gel-like damper member 9 is bonded and fixed to both the movable body 6 and the fixed body 2, it is possible to prevent the gel-like damper member 9 from moving as the movable body 6 moves.

また、第１コア７１およびコイルボビン３の底板部３１には、ゲル状ダンパー部材９が内側に配置された貫通穴７１０、３１０が形成され、ゲル状ダンパー部材９は、軸線Ｌ方向において、固定板４と永久磁石５３との間に挟まれている。このため、ゲル状ダンパー部材９を可動体６とコイルボビン３との間に配置する場合に比して、軸線Ｌ方向においてゲル状ダンパー部材９を配置するスペースを拡大することができる。それ故、ゲル状ダンパー部材９として軸線Ｌ方向の寸法が大のものを配置することができるので、可動体６の共振をより確実に抑制することができる。   The first core 71 and the bottom plate portion 31 of the coil bobbin 3 are formed with through holes 710 and 310 in which the gel-like damper member 9 is disposed on the inner side. The gel-like damper member 9 is a fixed plate in the axis L direction. 4 and the permanent magnet 53. For this reason, compared with the case where the gel-like damper member 9 is arrange | positioned between the movable body 6 and the coil bobbin 3, the space which arrange | positions the gel-like damper member 9 in the axis line L direction can be expanded. Therefore, since the gel damper member 9 having a large dimension in the direction of the axis L can be disposed, the resonance of the movable body 6 can be more reliably suppressed.

また、固定体２は、底板部３１に対して可動体６とは反対側に重なる固定板４を備えているため、底板部３１に第１スリット３１１等が形成されていても、軸線Ｌ方向の一方側Ｌ１を固定板４で塞ぐことができる。従って、永久磁石５３の外周面５３５と円筒部３２の内周面３２５との間等に異物が侵入しにくい。また、固定板４は、第１スリット３１１等を塞いでいるため、可動体６とコイルボビン３との間や、可動体６と固定板４との間がエアーダンバーとして作用する。このため、ゲル状ダンパー部材９のみを利用した場合に比して、可動体６の共振をより確実に抑制することができる。また、ゲル状ダンパー部材９に求められる要求を緩和することができる。   Further, since the fixed body 2 includes the fixed plate 4 that overlaps the side opposite to the movable body 6 with respect to the bottom plate portion 31, even if the first slit 311 and the like are formed in the bottom plate portion 31, the axis L direction One side L <b> 1 can be closed with the fixing plate 4. Accordingly, it is difficult for foreign matter to enter between the outer peripheral surface 535 of the permanent magnet 53 and the inner peripheral surface 325 of the cylindrical portion 32. Further, since the fixed plate 4 closes the first slit 311 and the like, the space between the movable body 6 and the coil bobbin 3 or between the movable body 6 and the fixed plate 4 acts as an air damper. For this reason, compared with the case where only the gel-like damper member 9 is used, the resonance of the movable body 6 can be more reliably suppressed. Moreover, the request | requirement requested | required of the gel-like damper member 9 can be eased.

また、固定板４の軸線Ｌ方向の他方側Ｌ２の面には、可動体６と固定板４との開口部２０に沿って粘着部材４５が設けられているため、開口部２０から可動体６と固定板４との間に侵入しようとする塵等の異物を粘着部材４５で捕捉することができる。従って、永久磁石５３の外周面５３５と円筒部３２の内周面３２５との間等に異物が侵入しにくい。   Further, since the adhesive member 45 is provided along the opening 20 between the movable body 6 and the fixed plate 4 on the surface of the other side L2 in the axis L direction of the fixed plate 4, the movable body 6 extends from the opening 20. A foreign substance such as dust that is about to enter between the fixing plate 4 and the fixing plate 4 can be captured by the adhesive member 45. Accordingly, it is difficult for foreign matter to enter between the outer peripheral surface 535 of the permanent magnet 53 and the inner peripheral surface 325 of the cylindrical portion 32.

また、本形態では、コイルボビン３の第２フランジ部３２３をストッパに用いているが、第２フランジ部３２３には補強リブ３３が繋がっている。このため、第２フランジ部３２３は十分な強度を有するため、第２フランジ部３２３を利用してストッパを構成することができる。また、補強リブ３３は、バネ部材８の可動体側連結部８２とアーム部８３との接続位置８２０から周方向にずれた位置に設けられているため、コイルボビン３に補強リブ３３を設けても、補強リブ３３とバネ部材８のアーム部８３とが干渉しにくい。また、補強リブ３３は、アーム部８３の可動体側連結部８２との接続位置８２０からアーム部８３の延在方向に沿って軸線Ｌ方向の他方側Ｌ２から一方側Ｌ１に向けて傾いた斜面３３５を軸線Ｌ方向の他方側Ｌ２に向けている。このため、補強リブ３３とバネ部材８のアーム部８３との干渉を避けつつ、補強リブ３３を周方向の広い範囲にわたって形成することができる。   Further, in this embodiment, the second flange portion 323 of the coil bobbin 3 is used as a stopper, but the reinforcing rib 33 is connected to the second flange portion 323. For this reason, since the 2nd flange part 323 has sufficient intensity | strength, a stopper can be comprised using the 2nd flange part 323. FIG. Further, since the reinforcing rib 33 is provided at a position shifted in the circumferential direction from the connection position 820 between the movable body side connecting portion 82 and the arm portion 83 of the spring member 8, even if the reinforcing rib 33 is provided on the coil bobbin 3, The reinforcing rib 33 and the arm portion 83 of the spring member 8 do not easily interfere with each other. Further, the reinforcing rib 33 is a slope 335 inclined from the connecting position 820 of the arm part 83 to the movable body side connecting part 82 toward the one side L1 from the other side L2 in the axis L direction along the extending direction of the arm part 83. Is directed to the other side L2 in the direction of the axis L. For this reason, the reinforcement rib 33 can be formed over a wide range in the circumferential direction while avoiding interference between the reinforcement rib 33 and the arm portion 83 of the spring member 8.

［実施の形態２］
図８は、本発明の実施の形態２に係るリニアアクチュエータ１の断面図である。なお、本形態の基本的な構成は、実施の形態１と同様であるため、共通する部分には同一の符号を付してそれらの説明を省略する。 [Embodiment 2]
FIG. 8 is a cross-sectional view of the linear actuator 1 according to Embodiment 2 of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, common portions are denoted by the same reference numerals and description thereof is omitted.

実施の形態１では、固定板４の軸線Ｌ方向の他方側Ｌ２の面に粘着部材４５として粘着テープや粘着性を備えた塗布物を設けたが、本形態では、図８に示すように、固定板４の軸線Ｌ方向の他方側Ｌ２の面に形成された溝４８内に粘着部材４５を配置してもよい。かかる構成によれば、粘着部材４５を配置するスペースを容易に確保することができる。   In the first embodiment, an adhesive tape or a coated product having adhesiveness is provided as the adhesive member 45 on the surface of the other side L2 in the axis L direction of the fixed plate 4, but in this embodiment, as shown in FIG. The adhesive member 45 may be disposed in the groove 48 formed on the surface of the other side L2 of the fixing plate 4 in the axis L direction. According to this configuration, it is possible to easily secure a space for arranging the adhesive member 45.

［その他の実施の形態］
上記実施の形態では、ゲル状ダンパー部材９を接着剤により固定した構造を採用したが、ゲル状ダンパー部材９を形成するための前駆体を設けた後、前駆体をゲル化させ、ゲル状ダンパー部材９自身の接着力によって、ゲル状ダンパー部材９を固定してもよい。例えば、実施の形態２ではゲル状ダンパー部材９を形成するためのＵＶ硬化性の前駆体を設けた後、前駆体にＵＶを照射してゲル化させ、ゲル状ダンパー部材９自身の接着力によって、ゲル状ダンパー部材９を固定してもよい。 [Other embodiments]
In the above embodiment, the structure in which the gel-like damper member 9 is fixed with an adhesive is adopted. However, after the precursor for forming the gel-like damper member 9 is provided, the precursor is gelled, and the gel-like damper is formed. The gel-like damper member 9 may be fixed by the adhesive force of the member 9 itself. For example, in Embodiment 2, after providing a UV curable precursor for forming the gel-like damper member 9, the precursor is irradiated with UV to be gelled, and the adhesive force of the gel-like damper member 9 itself is used. The gel-like damper member 9 may be fixed.

上記実施の形態では、軸線Ｌ上に円柱状のゲル状ダンパー部材９を設けたが、さらに軸線Ｌの周りにゲル状ダンパー部材９を配置してもよい。また、軸線Ｌ上に代えて、軸線Ｌの周りにゲル状ダンパー部材９を配置してもよい。   In the above embodiment, the columnar gel-like damper member 9 is provided on the axis L, but the gel-like damper member 9 may be further arranged around the axis L. Further, instead of on the axis L, the gel-like damper member 9 may be arranged around the axis L.

１・・リニアアクチュエータ、２・・固定体、３・・コイルボビン、４・・固定板、５・
・磁気駆動機構、６・・可動体、８・・バネ部材、９・・ゲル状ダンパー部材、２０・・開口部、３０・・治具、３１・・底板部、３２・・円筒部、３３・・補強リブ、４５・・粘着部材、４８・・溝、５１・・コイル、５３・・永久磁石、５５・・コイル、７１・・第１コア、７２・・第２コア、７６・・第１磁性板、７７・・第２磁性板、７８・・第３磁性板、８１・・固定体側連結部、８２・・可動体側連結部、８３・・アーム部、３１０・・底板部の貫通穴、３１１・・第１スリット、３１２・・第２スリット、３２２・・第１フランジ部、３２３・・第２フランジ部、３２５・・円筒部の内周面、３３５・・斜面、７１０・・第１コアの貫通穴、７１５・・第１コアの外周面、７２１・・第２コアの端板部、７２３・・ストッパ用の凸部、７６１・・第１磁性板の端板部、７６２・・第１磁性板の側板部、８２０・・アーム部の可動体側連結部との接続位置、Ｇ・・隙間、Ｌ・・軸線、Ｌ１・・一方側、Ｌ２・・他方側 1 .... Linear actuator 2 .... Fixed body 3 .... Coil bobbin 4 .... Fixing plate 5 ....
Magnetic drive mechanism 6 Movable body 8 Spring member 9 Gel damper member 20 Opening 30 Jig 31 Bottom plate 32 Cylindrical part 33 ..Reinforcing ribs 45..Adhesive members 48..Grooves 51..Coils 53..Permanent magnets 55..Coils 71..First core 72..Second core 76..No. 1 magnetic plate, 77 .. second magnetic plate, 78 .. third magnetic plate, 81.. Fixed body side connecting portion, 82 .. movable body side connecting portion, 83 .. arm portion, 310 .. through hole in bottom plate portion 311 ··· First slit, 312 ··· Second slit, 322 ··· First flange portion, 323 ·· Second flange portion, 325 · · Inner circumferential surface of cylindrical portion, 335 ·· Inclined surface, 710 ··· 1 core through hole, 715 .. outer periphery of the first core, 721 .. end plate of the second core, 723 .. for stopper Convex part, 761 ..End plate part of first magnetic plate, 762 ..Side plate part of first magnetic plate, 820 ..Connection position of arm part to movable body side coupling part, G .. Gap, L. , L1 ... one side, L2 ... other side

Claims (9)

円柱状の永久磁石を１つ備えた可動体と、
該永久磁石を径方向外側で囲むコイルボビンを備えた固定体と、
前記可動体と前記コイルボビンとに接続され、前記コイルボビンに対して前記可動体が軸線方向に移動可能に支持された状態とするバネ部材と、
前記コイルボビンに巻回され、前記永久磁石とともに前記可動体を軸線方向に駆動する磁気駆動機構を構成するコイルと、
軸線方向において前記固定体と前記可動体との間に挟まれたゲル状ダンパー部材と、
を有していることを特徴とするリニアアクチュエータ。 A movable body having one cylindrical permanent magnet;
A stationary body provided with a coil bobbin that surrounds the permanent magnet radially outside;
A spring member connected to the movable body and the coil bobbin, wherein the movable body is supported so as to be movable in the axial direction with respect to the coil bobbin;
A coil that is wound around the coil bobbin and constitutes a magnetic drive mechanism that drives the movable body in the axial direction together with the permanent magnet;
A gel-like damper member sandwiched between the fixed body and the movable body in the axial direction;
The linear actuator characterized by having. 前記コイルボビンは、前記可動体に対して軸線方向の一方側で重なる底板部と、該底板部から軸線方向の他方側に突出して前記永久磁石を径方向外側で囲む円筒部と、を備え、
前記底板部には、軸線方向からみたとき、前記円筒部の内周面と前記可動体の外周面との間に構成された隙間に重なるスリットが周方向の複数個所に形成されていることを特徴とする請求項１に記載のリニアアクチュエータ。 The coil bobbin includes a bottom plate portion that overlaps on one side in the axial direction with respect to the movable body, and a cylindrical portion that protrudes from the bottom plate portion to the other side in the axial direction and surrounds the permanent magnet on a radially outer side,
In the bottom plate portion, when viewed from the axial direction, slits are formed at a plurality of locations in the circumferential direction so as to overlap a gap formed between the inner peripheral surface of the cylindrical portion and the outer peripheral surface of the movable body. The linear actuator according to claim 1. 前記可動体は、前記永久磁石に軸線方向の一方側で重なる第１コアと、前記永久磁石に軸線方向の他方側で重なる第２コアと、を備え、
前記第１コアは、前記永久磁石より大径であって、
前記隙間は、前記円筒部の内周面と前記第１コアの外周面との間に位置することを特徴とする請求項２に記載のリニアアクチュエータ。 The movable body includes a first core that overlaps the permanent magnet on one side in the axial direction, and a second core that overlaps the permanent magnet on the other side in the axial direction.
The first core has a larger diameter than the permanent magnet,
The linear actuator according to claim 2, wherein the gap is located between an inner peripheral surface of the cylindrical portion and an outer peripheral surface of the first core. 前記固定体は、前記底板部に対して前記可動体とは反対側に重なる固定板を備えていることを特徴とする請求項２または３に記載のリニアアクチュエータ。   The linear actuator according to claim 2, wherein the fixed body includes a fixed plate that overlaps with the bottom plate portion on a side opposite to the movable body. 前記固定板は、前記スリットを前記可動体とは反対側から塞いでいることを特徴とする請求項４に記載のリニアアクチュエータ。   The linear actuator according to claim 4, wherein the fixed plate blocks the slit from a side opposite to the movable body. 前記第１コアおよび前記底板部には、前記ゲル状ダンパー部材が内側に配置された貫通穴が形成され、
前記ゲル状ダンパー部材は、軸線方向において、前記固定板と前記可動体との間に挟まれていることを特徴とする請求項４または５に記載のリニアアクチュエータ。 In the first core and the bottom plate portion, a through hole in which the gel-like damper member is disposed inside is formed,
The linear actuator according to claim 4, wherein the gel-like damper member is sandwiched between the fixed plate and the movable body in the axial direction. 前記固定板と前記可動体との間では、径方向外側に向けて開口する開口部が周方向で延在しており、
前記固定板には、前記開口部に沿って粘着部材が設けられていることを特徴とする請求項４乃至６の何れか一項に記載のリニアアクチュエータ。 Between the fixed plate and the movable body, an opening that opens outward in the radial direction extends in the circumferential direction,
The linear actuator according to claim 4, wherein the fixing plate is provided with an adhesive member along the opening. 前記粘着部材は、前記固定板の軸線方向の他方側の面に形成された溝内に配置されていることを特徴とする請求項７に記載のリニアアクチュエータ。   The linear actuator according to claim 7, wherein the adhesive member is disposed in a groove formed on a surface on the other side in the axial direction of the fixed plate. 前記ゲル状ダンパー部材は、シリコーンゲルからなることを特徴とする請求項１乃至８の何れか一項に記載のリニアアクチュエータ。   The linear actuator according to claim 1, wherein the gel-like damper member is made of silicone gel.
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