JP6220618B2 - Resonant circuit and oscillation circuit - Google Patents

Resonant circuit and oscillation circuit Download PDF

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JP6220618B2
JP6220618B2 JP2013204199A JP2013204199A JP6220618B2 JP 6220618 B2 JP6220618 B2 JP 6220618B2 JP 2013204199 A JP2013204199 A JP 2013204199A JP 2013204199 A JP2013204199 A JP 2013204199A JP 6220618 B2 JP6220618 B2 JP 6220618B2
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武仁 石井
武仁 石井
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Nihon Dempa Kogyo Co Ltd
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Description

本発明は、共振回路及び発振回路に関するものである。   The present invention relates to a resonance circuit and an oscillation circuit.

従来、共振周波数が異なる複数の水晶振動子を用いることにより、単一の水晶振動子で調整可能な周波数範囲よりも広い周波数範囲で発振周波数を調整できる反共振回路が知られている（例えば、特許文献１を参照）。   Conventionally, by using a plurality of crystal resonators having different resonance frequencies, an anti-resonance circuit that can adjust an oscillation frequency in a frequency range wider than a frequency range that can be adjusted by a single crystal resonator is known (for example, (See Patent Document 1).

図９は、従来の反共振回路４００の構成例を示す。図９において、反共振回路４００は、交流信号源４３０の出力抵抗４４０と負荷抵抗４５０とに接続されている。   FIG. 9 shows a configuration example of a conventional anti-resonance circuit 400. In FIG. 9, the anti-resonance circuit 400 is connected to the output resistor 440 and the load resistor 450 of the AC signal source 430.

反共振回路４００は、出力抵抗４４０と負荷抵抗４５０との間における異なる経路に接続された水晶振動子４１１及び水晶振動子４２１を備える。水晶振動子４１１が接続された第１の経路には、減衰器４１２、インダクタ４１３及びキャパシタ４１４が直列に設けられている。水晶振動子４１１は、インダクタ４１３とキャパシタ４１４との接続点とグランドとに接続されている。同様に、水晶振動子４２１が接続された第２の経路には、減衰器４２２、インダクタ４２３及びキャパシタ４２４が直列に設けられている。水晶振動子４２１は、インダクタ４２３とキャパシタ４２４との接続点とグランドとに接続されている。   The anti-resonance circuit 400 includes a crystal resonator 411 and a crystal resonator 421 connected to different paths between the output resistor 440 and the load resistor 450. In the first path to which the crystal resonator 411 is connected, an attenuator 412, an inductor 413, and a capacitor 414 are provided in series. The crystal resonator 411 is connected to a connection point between the inductor 413 and the capacitor 414 and the ground. Similarly, an attenuator 422, an inductor 423, and a capacitor 424 are provided in series on the second path to which the crystal resonator 421 is connected. The crystal resonator 421 is connected to a connection point between the inductor 423 and the capacitor 424 and the ground.

水晶振動子４１１及び水晶振動子４２１は、それぞれ異なる共振周波数を有しており、キャパシタ４１４及びキャパシタ４２４を介して互いに接続されている。これにより、反共振回路４００は、水晶振動子４１１の共振周波数と水晶振動子４２１の共振周波数との間の周波数において共振する。減衰器４１２及び減衰器４２２の減衰率を変化させることにより、反共振回路４００の反共振周波数が変化する。   The crystal resonator 411 and the crystal resonator 421 have different resonance frequencies, and are connected to each other via a capacitor 414 and a capacitor 424. As a result, the anti-resonance circuit 400 resonates at a frequency between the resonance frequency of the crystal resonator 411 and the resonance frequency of the crystal resonator 421. By changing the attenuation rates of the attenuator 412 and the attenuator 422, the anti-resonance frequency of the anti-resonance circuit 400 changes.

特開２００７−２９５２５６号公報JP 2007-295256 A

ところで、水晶振動子、ＭＥＭＳ（Micro-Electro-Mechanical Systems）振動子等の高いＱを有する共振子の共振周波数は、ｆＬ＝（１／２π）√｛（Ｃ１＋ＣＬ）／Ｌ１Ｃ１ＣＬ｝で表される。ここで、Ｃ１は振動子の等価回路のモーショナルキャパシタンス、ＣＬは負荷容量、Ｌ１は振動子の直列インダクタンスである。 By the way, the resonance frequency of a resonator having a high Q such as a crystal resonator or a MEMS (Micro-Electro-Mechanical Systems) resonator is f L = (1 / 2π) √ {(C 1 + C L ) / L 1 C. 1 C L }. Here, C 1 is the motional capacitance of the equivalent circuit of the resonator, the C L load capacitor, L 1 is a series inductance of the transducer.

Ｃ１が比較的小さいＭＥＭＳ振動子を用いた発振回路においては、振動子に印加するバイアス電圧を調整することによって周波数の調整が行われる。しかし、集積回路や個別部品において実現できる数ｐＦオーダーの容量値に対してＣ１が非常に小さい振動子を発振回路に用いた場合は、ＣＬ＞＞Ｃ１の関係に基づいてｆＬ＝（１／２π）√（１／Ｌ１Ｃ１）と近似できるので、共振周波数は、振動子が有するＬ１及びＣ１に基づいて定められる。したがって、上記の振動子を発振回路に用いる場合には、振動子の共振周波数の温度特性が、そのまま発振周波数の温度特性に反映されてしまう。 In the oscillation circuit C 1 is used a relatively small MEMS resonator, the frequency adjustment is performed by adjusting the bias voltage applied to the vibrator. However, when an oscillator having a very small C 1 with respect to a capacitance value of the order of several pF that can be realized in an integrated circuit or individual components is used in the oscillation circuit, f L == based on the relationship of C L >> C 1 Since (1 / 2π) √ (1 / L 1 C 1 ) can be approximated, the resonance frequency is determined based on L 1 and C 1 of the vibrator. Therefore, when the above vibrator is used in an oscillation circuit, the temperature characteristic of the resonance frequency of the vibrator is directly reflected in the temperature characteristic of the oscillation frequency.

特に、ＭＥＭＳ振動子の共振周波数の温度特性は−３０ｐｐｍ／℃程度であり、温度変化に対する周波数変化範囲が比較的大きい。したがって、ＭＥＭＳ振動子を用いた発振回路においては、バイアス電圧を調整するだけでは、温度変化を相殺して安定した発振周波数を得ることが困難である。   In particular, the temperature characteristic of the resonance frequency of the MEMS vibrator is about −30 ppm / ° C., and the frequency change range with respect to the temperature change is relatively large. Therefore, in an oscillation circuit using a MEMS vibrator, it is difficult to obtain a stable oscillation frequency by canceling the temperature change only by adjusting the bias voltage.

図９に示した反共振回路４００においては、単一のＭＥＭＳ振動子のバイアス電圧を調整する場合よりも広い周波数範囲で反共振周波数を変化させることができる。しかし、反共振回路４００において、反共振周波数におけるＱの値を発振回路に用いることができる程度に大きな値にするために、インダクタ４１３及びインダクタ４２３のインダクタンス値を十分に大きな値にしなければならなかった。具体的には、特許文献１においては、インダクタ４１３及びインダクタ４２３のインダクタンス値として２７μＨが例示されている。   In the anti-resonance circuit 400 shown in FIG. 9, the anti-resonance frequency can be changed in a wider frequency range than when the bias voltage of a single MEMS vibrator is adjusted. However, in the anti-resonance circuit 400, in order to make the Q value at the anti-resonance frequency large enough to be used in the oscillation circuit, the inductance values of the inductor 413 and the inductor 423 must be sufficiently large. It was. Specifically, in Patent Document 1, 27 μH is exemplified as the inductance values of the inductor 413 and the inductor 423.

しかし、インダクタは、温度変化に応じてインダクタンス値が大きく変化する。また、振動子のばらつきに応じてインダクタンス値を調整することも困難である。したがって、インダクタを用いた共振回路においては、安定した発振周波数の発振信号を得ることができなかった。さらに、μＨオーダーのインダクタンス値を有するインダクタは、集積回路に内蔵することが困難であった。したがって、従来の反共振回路４００を用いて、安定した発振周波数の発振信号を得られる発振回路を、低コストで量産することができなかった。   However, the inductance value of the inductor changes greatly according to the temperature change. It is also difficult to adjust the inductance value according to the variation of the vibrator. Therefore, an oscillation signal having a stable oscillation frequency cannot be obtained in a resonance circuit using an inductor. Furthermore, it has been difficult to incorporate an inductor having an inductance value on the order of μH in an integrated circuit. Therefore, an oscillation circuit that can obtain an oscillation signal having a stable oscillation frequency by using the conventional anti-resonance circuit 400 cannot be mass-produced at a low cost.

そこで、本発明はこれらの点に鑑みてなされたものであり、振動子の共振周波数と異なる周波数で共振させることができる共振回路及び発振回路を提供することを目的とする。   Accordingly, the present invention has been made in view of these points, and an object thereof is to provide a resonance circuit and an oscillation circuit that can resonate at a frequency different from the resonance frequency of the vibrator.

本発明の第１の実施態様に係る共振回路は、第１共振周波数で共振する第１振動子と、前記第１共振周波数と異なる第２共振周波数で共振し、かつ、振動位相が前記第１振動子と逆相である第２振動子と、前記第１振動子及び前記第２振動子の等価回路定数を調整する調整部と、前記第１振動子が有する第１等価並列容量、及び前記第２振動子が有する第２等価並列容量を打ち消す負性容量回路と、を備える。   The resonance circuit according to the first embodiment of the present invention includes a first vibrator that resonates at a first resonance frequency, resonates at a second resonance frequency different from the first resonance frequency, and has a vibration phase of the first resonator. A second vibrator having a phase opposite to that of the vibrator, an adjustment section for adjusting an equivalent circuit constant of the first vibrator and the second vibrator, a first equivalent parallel capacitance of the first vibrator, A negative capacitance circuit that cancels the second equivalent parallel capacitance of the second vibrator.

前記調整部は、例えば、前記調整部は、前記第１振動子及び前記第２振動子に印加する直流電圧を変化させることにより、前記等価回路定数を調整する。また、前記第１振動子及び前記第２振動子は、例えば、静電駆動型ＭＥＭＳ振動子である。   For example, the adjustment unit adjusts the equivalent circuit constant by changing a DC voltage applied to the first vibrator and the second vibrator. The first vibrator and the second vibrator are, for example, electrostatic drive type MEMS vibrators.

前記第１振動子及び前記第２振動子は、例えば、互いに直列に接続されており、前記負性容量回路は、前記第１振動子及び前記第２振動子の接続点とグランドとの間に設けられている。   For example, the first vibrator and the second vibrator are connected in series with each other, and the negative capacitance circuit is connected between a connection point of the first vibrator and the second vibrator and a ground. Is provided.

上記の共振回路は、互いに並列に接続された前記第１振動子及び前記第２振動子と接続されており、かつ前記第１振動子及び前記第２振動子と入出力される平衡信号を不平衡信号に変換する変換部をさらに備え、前記負性容量回路は、前記第１振動子及び前記変換部の接続点とグランドとの間、並びに、前記第２振動子及び前記変換部の接続点とグランドとの間に設けられていてもよい。   The resonance circuit is connected to the first vibrator and the second vibrator connected in parallel to each other, and does not receive a balanced signal input / output to / from the first vibrator and the second vibrator. A conversion unit that converts the signal into a balanced signal is further provided, and the negative capacitance circuit includes a connection point between the first vibrator and the conversion unit and a ground, and a connection point between the second vibrator and the conversion unit. And between the ground and the ground.

本発明の第２の実施態様に係る発振回路は、上記の共振回路と、前記共振回路の入出力間に設けられた増幅回路と、を備える。   An oscillation circuit according to a second embodiment of the present invention includes the above resonance circuit and an amplifier circuit provided between the input and output of the resonance circuit.

本発明に係る発振回路によれば、振動子の共振周波数と異なる周波数で共振させることができるという効果を奏する。   According to the oscillation circuit of the present invention, it is possible to resonate at a frequency different from the resonance frequency of the vibrator.

第１の実施形態に係る共振回路の構成を示す。1 shows a configuration of a resonance circuit according to a first embodiment. 第１の実施形態に係る共振回路の等価回路を示す。1 shows an equivalent circuit of a resonance circuit according to a first embodiment. 第１の実施形態に係る第１振動子及び第２振動子の利得の周波数特性を示す。The frequency characteristic of the gain of the 1st vibrator and the 2nd vibrator concerning a 1st embodiment is shown. 第１の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonant circuit which concerns on 1st Embodiment is shown. 第１の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonant circuit which concerns on 1st Embodiment is shown. 第１の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonant circuit which concerns on 1st Embodiment is shown. 第２の実施形態に係る共振回路の構成を示す。The structure of the resonance circuit which concerns on 2nd Embodiment is shown. 第２の実施形態に係る共振回路の等価回路を示す。The equivalent circuit of the resonance circuit which concerns on 2nd Embodiment is shown. 第２の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonance circuit which concerns on 2nd Embodiment is shown. 第２の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonance circuit which concerns on 2nd Embodiment is shown. 第２の実施形態に係る共振回路の利得の周波数特性を示す。The frequency characteristic of the gain of the resonance circuit which concerns on 2nd Embodiment is shown. 第３の実施形態に係る発振回路の構成を示す。The structure of the oscillation circuit which concerns on 3rd Embodiment is shown. 従来の発振回路の構成を示す。The structure of the conventional oscillation circuit is shown.

＜第１の実施形態＞
［共振回路１の構成］
図１は、第１の実施形態に係る共振回路１の構成を示す図である。共振回路１は、第１振動子１０と、第２振動子２０と、調整部３０と、負性容量回路４０と、入力端子５０と、出力端子６０とを備える。 <First Embodiment>
[Configuration of Resonant Circuit 1]
FIG. 1 is a diagram illustrating a configuration of a resonance circuit 1 according to the first embodiment. The resonance circuit 1 includes a first vibrator 10, a second vibrator 20, an adjustment unit 30, a negative capacitance circuit 40, an input terminal 50, and an output terminal 60.

第１振動子１０は、第１共振周波数ｆｒ１で共振する。第２振動子２０は、第１共振周波数と異なる第２共振周波数ｆｒ２で共振し、かつ、振動位相が第１振動子１０と逆相である。第１振動子１０及び第２振動子２０は、例えば、複数の電極の内側に円盤状の振動体が設けられており、ワイングラスモードで振動する静電駆動型ＭＥＭＳ振動子である。 The first vibrator 10 resonates at the first resonance frequency fr 1 . The second vibrator 20 resonates at a second resonance frequency fr 2 different from the first resonance frequency, and the vibration phase is opposite to that of the first vibrator 10. The first vibrator 10 and the second vibrator 20 are, for example, electrostatic drive type MEMS vibrators that are provided with a disk-like vibrating body inside a plurality of electrodes and vibrate in a wine glass mode.

第１振動子１０は、複数の電極１００（電極１００ａ、電極１００ｂ、電極１００ｃ、電極１００ｄ）を有する。また、第１振動子１０は、複数の電極１００の内側に設けられた振動体１０１を有する。第１振動子１０においては、電極１００ａに印加された高周波電圧に応じて、振動体１０１が所定の周波数で振動し、発振信号が電極１００ｂ、電極１００ｃ及び電極１００ｄから出力される。   The first vibrator 10 includes a plurality of electrodes 100 (electrode 100a, electrode 100b, electrode 100c, electrode 100d). The first vibrator 10 includes a vibrating body 101 provided inside the plurality of electrodes 100. In the first vibrator 10, the vibrating body 101 vibrates at a predetermined frequency according to the high-frequency voltage applied to the electrode 100a, and oscillation signals are output from the electrode 100b, the electrode 100c, and the electrode 100d.

同様に、第２振動子２０は、複数の電極２００（電極２００ａ、電極２００ｂ、電極２００ｃ、電極２００ｄ）を有する。また、第２振動子２０は、複数の電極２００の内側に設けられた振動体２０１を有する。第２振動子２０においては、電極２００ａに印加された高周波電圧に応じて、振動体２０１が所定の周波数で振動し、発振信号が電極２００ｂ、電極２００ｃ及び電極２００ｄから出力される。   Similarly, the second vibrator 20 includes a plurality of electrodes 200 (electrodes 200a, 200b, 200c, and 200d). The second vibrator 20 includes a vibrating body 201 provided inside the plurality of electrodes 200. In the second vibrator 20, the vibrating body 201 vibrates at a predetermined frequency according to the high-frequency voltage applied to the electrode 200a, and oscillation signals are output from the electrode 200b, the electrode 200c, and the electrode 200d.

第１振動子１０の４つの電極のうち、互いに隣接する電極においては、互いに逆位相電流が、互いに対向する電極においては、互いに同位相電流が発生する。図１においては、電極１００ａに入力される信号と同位相で振動する信号が出力される電極１００ｃが、電極２００ａに接続されており、電極２００ａに入力される信号と逆位相で振動する信号が出力される電極２００ｄが、出力端子６０に接続されている。すなわち、第１振動子１０は、入力の振動位相と出力の振動位相とが同相であり、第２振動子２０は、入力の振動位相と出力の振動位相とが逆相である。   Out of the four electrodes of the first vibrator 10, opposite phase currents are generated at adjacent electrodes, and in-phase currents are generated at electrodes facing each other. In FIG. 1, an electrode 100c that outputs a signal that vibrates in the same phase as a signal input to the electrode 100a is connected to the electrode 200a, and a signal that vibrates in an opposite phase to the signal input to the electrode 200a. The output electrode 200d is connected to the output terminal 60. That is, in the first vibrator 10, the input vibration phase and the output vibration phase are in phase, and in the second vibrator 20, the input vibration phase and the output vibration phase are opposite in phase.

調整部３０は、第１振動子１０及び第２振動子２０の等価回路定数を調整する。具体的には、調整部３０は、第１振動子１０及び第２振動子２０のそれぞれに直流の静電駆動電圧を出力する。第１振動子１０及び第２振動子２０のそれぞれは、静電駆動電圧が印加されると、等価回路定数が変化する。調整部３０は、第１振動子１０に印加する静電駆動電圧Ｖｐ１と第２振動子２０に印加する静電駆動電圧Ｖｐ２とを独立して制御することができる。   The adjustment unit 30 adjusts equivalent circuit constants of the first vibrator 10 and the second vibrator 20. Specifically, the adjustment unit 30 outputs a DC electrostatic drive voltage to each of the first vibrator 10 and the second vibrator 20. Each of the first vibrator 10 and the second vibrator 20 changes its equivalent circuit constant when an electrostatic drive voltage is applied. The adjustment unit 30 can independently control the electrostatic drive voltage Vp1 applied to the first vibrator 10 and the electrostatic drive voltage Vp2 applied to the second vibrator 20.

静電駆動電圧が大きくなると、第１振動子１０及び第２振動子２０の等価直列キャパシタンスが大きくなり、等価直列抵抗及び等価直列インダクタンスが小さくなる。具体的には、静電駆動電圧がｎ倍になると、等価直列キャパシタンスは約ｎ２倍になり、等価直列抵抗は約１／ｎ２になる。したがって、調整部３０が出力する静電駆動電圧に応じて、第１振動子１０及び第２振動子２０のそれぞれが有する等価直列キャパシタンス、等価直列抵抗及び等価直列インダクタンスを変化させることができる。 As the electrostatic drive voltage increases, the equivalent series capacitance of the first vibrator 10 and the second vibrator 20 increases, and the equivalent series resistance and equivalent series inductance decrease. Specifically, when the electrostatic drive voltage is increased by n times, the equivalent series capacitance is approximately n 2 times and the equivalent series resistance is approximately 1 / n 2 . Therefore, the equivalent series capacitance, equivalent series resistance, and equivalent series inductance of each of the first vibrator 10 and the second vibrator 20 can be changed according to the electrostatic drive voltage output from the adjustment unit 30.

静電駆動電圧を変化させても、第１振動子１０及び第２振動子２０のそれぞれの単体の共振周波数はほとんど変化しない。しかし、共振回路１においては第１振動子１０と第２振動子２０とが互いに直列に接続されているので、調整部３０が、第１振動子１０に印加する静電駆動電圧Ｖｐ１と、第２振動子２０に印加する静電駆動電圧Ｖｐ２とを変化させることで、共振回路１の共振周波数は、第１共振周波数と第２共振周波数との間で変化する。   Even if the electrostatic drive voltage is changed, the resonance frequency of each of the first vibrator 10 and the second vibrator 20 hardly changes. However, in the resonance circuit 1, the first vibrator 10 and the second vibrator 20 are connected in series with each other, so that the adjusting unit 30 applies the electrostatic drive voltage Vp1 applied to the first vibrator 10 and the first By changing the electrostatic drive voltage Vp2 applied to the two vibrators 20, the resonance frequency of the resonance circuit 1 changes between the first resonance frequency and the second resonance frequency.

負性容量回路４０は、第１振動子１０及び第２振動子２０の間のノードとグランドとの間に設けられている。負性容量回路４０は、正の電圧を印加すると電荷を放出する性質を持つ回路である。例えば、負性容量回路４０は、オペアンプ又は複数のトランジスタのような能動素子と、キャパシタ及び抵抗のような受動素子とを組み合わせて構成される公知の回路により構成される。   The negative capacitance circuit 40 is provided between a node between the first vibrator 10 and the second vibrator 20 and the ground. The negative capacitance circuit 40 is a circuit having a property of discharging charges when a positive voltage is applied. For example, the negative capacitance circuit 40 is configured by a known circuit configured by combining an active element such as an operational amplifier or a plurality of transistors and a passive element such as a capacitor and a resistor.

図２は、第１の実施形態に係る共振回路１の等価回路図である。
第１振動子１０は、等価並列キャパシタ１０２、等価直列抵抗１０３、等価直列インダクタ１０４、等価直列キャパシタ１０５、及びトランス１０６を有する。トランス１０６は、結合係数が−１である。等価並列キャパシタ１０２は、等価直列抵抗１０３の一端と、トランス１０６の一端とに接続されている。 FIG. 2 is an equivalent circuit diagram of the resonance circuit 1 according to the first embodiment.
The first vibrator 10 includes an equivalent parallel capacitor 102, an equivalent series resistor 103, an equivalent series inductor 104, an equivalent series capacitor 105, and a transformer 106. Transformer 106 has a coupling coefficient of -1. The equivalent parallel capacitor 102 is connected to one end of the equivalent series resistor 103 and one end of the transformer 106.

同様に、第２振動子２０は、等価並列キャパシタ２０２、等価直列抵抗２０３、等価直列インダクタ２０４、等価直列キャパシタ２０５、及びトランス２０６を有する。第２振動子２０は、第１振動子１０と逆相で振動するので、トランス２０６の結合係数が１である点で、トランス１０６と異なる。等価並列キャパシタ２０２は、等価直列抵抗２０３の一端と、トランス２０６の一端とに接続されている。   Similarly, the second vibrator 20 includes an equivalent parallel capacitor 202, an equivalent series resistor 203, an equivalent series inductor 204, an equivalent series capacitor 205, and a transformer 206. Since the second vibrator 20 vibrates in the opposite phase to the first vibrator 10, it differs from the transformer 106 in that the coupling coefficient of the transformer 206 is 1. The equivalent parallel capacitor 202 is connected to one end of the equivalent series resistor 203 and one end of the transformer 206.

ここで、負性容量回路４０の容量値は、等価並列キャパシタ１０２及び等価並列キャパシタ２０２の容量値と符号が反対であり、かつ、等価並列キャパシタ１０２の容量値と等価並列キャパシタ２０２の容量値とを合計した値に等しい。したがって、第１振動子１０と第２振動子２０との間に負性容量回路４０が設けられていることにより、第１振動子１０、第２振動子２０及び負性容量回路４０の接続点から見ると、等価並列キャパシタ１０２及び等価並列キャパシタ２０２が見えない状態になる。その結果、共振回路１は、第１振動子１０の反共振周波数及び第２振動子２０の反共振周波数の影響を受けにくくなり、第１振動子１０の共振周波数と第２振動子２０の共振周波数との間で共振しやすくなる。   Here, the capacitance values of the negative capacitance circuit 40 have opposite signs to the capacitance values of the equivalent parallel capacitor 102 and the equivalent parallel capacitor 202, and the capacitance value of the equivalent parallel capacitor 102 and the capacitance value of the equivalent parallel capacitor 202 are Is equal to the sum of Therefore, since the negative capacitance circuit 40 is provided between the first vibrator 10 and the second vibrator 20, the connection point between the first vibrator 10, the second vibrator 20, and the negative capacitance circuit 40. From the perspective, the equivalent parallel capacitor 102 and the equivalent parallel capacitor 202 are not visible. As a result, the resonance circuit 1 is less affected by the anti-resonance frequency of the first vibrator 10 and the anti-resonance frequency of the second vibrator 20, and the resonance frequency of the first vibrator 10 and the resonance of the second vibrator 20. It tends to resonate with the frequency.

図３は、第１振動子１０及び第２振動子２０の利得の周波数特性を示す図である。図３における実線は第１振動子１０の周波数特性、点線は第２振動子２０の周波数特性を示す。第１振動子１０の周波数特性及び第２振動子２０の周波数特性には、利得が大きくなる共振点と利得が小さくなる反共振点（減衰ノッチ）とが存在することがわかる。また、第１振動子１０及び第２振動子２０の振動位相が逆相であるため、第１振動子１０の特性と第２振動子２０の特性との間で、共振点に対する反共振点の周波数軸上の位置が、逆になっている。   FIG. 3 is a diagram illustrating frequency characteristics of gains of the first vibrator 10 and the second vibrator 20. The solid line in FIG. 3 indicates the frequency characteristics of the first vibrator 10 and the dotted line indicates the frequency characteristics of the second vibrator 20. It can be seen that the frequency characteristic of the first vibrator 10 and the frequency characteristic of the second vibrator 20 have a resonance point where the gain increases and an anti-resonance point (attenuation notch) where the gain decreases. In addition, since the vibration phases of the first vibrator 10 and the second vibrator 20 are opposite to each other, the anti-resonance point with respect to the resonance point is between the characteristics of the first vibrator 10 and the second vibrator 20. The position on the frequency axis is reversed.

第１振動子１０の共振周波数ｆｒ１は約５１．９０ＭＨｚであり、反共振周波数ｆａ１は約５１．８８ＭＨｚである。また、第２振動子２０の共振周波数ｆｒ２は約５２．１０ＭＨｚであり、反共振周波数ｆｒ２は、約５２．１２ＭＨｚである。すなわち、第１振動子１０及び第２振動子２０の共振周波数と反共振周波数との関係は、ｆａ１＜ｆｒ１＜ｆｒ２＜ｆａ２である。このような関係があることにより、共振回路１においては、第１振動子１０及び第２振動子２０の反共振点の影響を受けることなく、共振周波数ｆｒ１と共振周波数ｆｒ２との間の周波数で発振することができる。 The resonance frequency fr 1 of the first vibrator 10 is about 51.90 MHz, and the anti-resonance frequency fa 1 is about 51.88 MHz. The resonance frequency fr 2 of the second vibrator 20 is about 52.10 MHz, and the anti-resonance frequency fr 2 is about 52.12 MHz. That is, the relationship between the resonance frequency and the anti-resonance frequency of the first vibrator 10 and the second vibrator 20 is fa 1 <fr 1 <fr 2 <fa 2 . Due to this relationship, the resonance circuit 1 is not affected by the anti-resonance points of the first vibrator 10 and the second vibrator 20 and is between the resonance frequency fr 1 and the resonance frequency fr 2 . Can oscillate at a frequency.

図４Ａ、図４Ｂ及び図４Ｃは、第１振動子１０に印加する静電駆動電圧Ｖｐ１及び第２振動子２０に印加する静電駆動電圧Ｖｐ２を変化させた場合の、共振回路１の利得の周波数特性を示す図である。図４Ａは、Ｖｐ１＝３Ｖ、Ｖｐ２＝１０Ｖの場合の周波数特性を示す。図４Ｂは、Ｖｐ１＝Ｖｐ２＝１０Ｖの場合の周波数特性を示す。図４Ｃは、Ｖｐ１＝１０Ｖ、Ｖｐ２＝３Ｖの場合の周波数特性を示す。   4A, 4B and 4C show the gain of the resonance circuit 1 when the electrostatic drive voltage Vp1 applied to the first vibrator 10 and the electrostatic drive voltage Vp2 applied to the second vibrator 20 are changed. It is a figure which shows a frequency characteristic. FIG. 4A shows frequency characteristics when Vp1 = 3V and Vp2 = 10V. FIG. 4B shows frequency characteristics when Vp1 = Vp2 = 10V. FIG. 4C shows frequency characteristics when Vp1 = 10V and Vp2 = 3V.

このように、共振回路１の共振周波数は、第１振動子１０の共振周波数ｆｒ１及び第２振動子２０のｆｒ２のうち、印加する静電駆動電圧が小さい方の振動子、すなわち、等価直列容量が小さい方の振動子の共振周波数に近づく。したがって、Ｖｐ１をＶｐ２よりも小さくすることで、共振回路１の共振周波数は第１振動子１０の共振周波数ｆｒ１に近づき、Ｖｐ２をＶｐ１よりも小さくすることで、共振回路１の共振周波数は第２振動子２０の共振周波数ｆｒ２に近づく。 As described above, the resonance frequency of the resonance circuit 1 is the same as the resonator having the smaller electrostatic drive voltage to be applied, that is, the resonance frequency fr 1 of the first resonator 10 and the fr 2 of the second resonator 20. It approaches the resonant frequency of the vibrator with the smaller series capacitance. Therefore, to be smaller than Vp2 to Vp1, the resonance frequency of the resonance circuit 1 approaches the resonance frequency fr 1 of the first oscillator 10 is made smaller than Vp1 to Vp2, the resonance frequency of the resonance circuit 1 is first It approaches the resonance frequency fr 2 of the two vibrators 20.

［第１の実施形態における効果］
以上のとおり、第１の実施形態に係る共振回路１によれば、第１共振周波数で共振する第１振動子１０と、第１共振周波数と異なる第２共振周波数で共振し、かつ、振動位相が第１振動子１０と逆相である第２振動子２０とが直列に接続されており、第１振動子１０が有する等価並列容量、及び第２振動子２０が有する等価並列容量を打ち消す負性容量回路４０が、第１振動子１０と第２振動子２０との間に設けられている。このような構成により、調整部３０が、第１振動子１０及び第２振動子２０に印加する静電駆動電圧を変化させることで、共振回路１の共振周波数を、第１振動子１０の共振周波数と第２振動子２０の共振周波数との間で変化させることができる。 [Effect in the first embodiment]
As described above, according to the resonance circuit 1 according to the first embodiment, the first vibrator 10 that resonates at the first resonance frequency resonates at the second resonance frequency different from the first resonance frequency, and the vibration phase. Is connected in series to the first vibrator 10 and the second vibrator 20 having the opposite phase, and the negative parallel that the first vibrator 10 has and the equivalent parallel capacity that the second vibrator 20 has is negated. The capacitive capacitor circuit 40 is provided between the first vibrator 10 and the second vibrator 20. With such a configuration, the adjustment unit 30 changes the resonance frequency of the resonance circuit 1 by changing the electrostatic drive voltage applied to the first vibrator 10 and the second vibrator 20. The frequency can be changed between the resonance frequency of the second vibrator 20.

＜第２の実施形態＞
図５は、第２の実施形態に係る共振回路２の構成を示す図である。図６は、共振回路２の等価回路を示す図である。共振回路２は、第１振動子１０と、第２振動子２０と、調整部３０と、負性容量回路４１と、負性容量回路４２と、入力端子５０と、出力端子６０とを備える。本実施形態に係る第１振動子１０、第２振動子２０、調整部３０、入力端子５０及び出力端子６０は、第１の実施形態に係る共振回路１における第１振動子１０、第２振動子２０、調整部３０、入力端子５０及び出力端子６０と同等である。 <Second Embodiment>
FIG. 5 is a diagram illustrating a configuration of the resonance circuit 2 according to the second embodiment. FIG. 6 is a diagram showing an equivalent circuit of the resonance circuit 2. The resonance circuit 2 includes a first vibrator 10, a second vibrator 20, an adjustment unit 30, a negative capacitance circuit 41, a negative capacitance circuit 42, an input terminal 50, and an output terminal 60. The first vibrator 10, the second vibrator 20, the adjustment unit 30, the input terminal 50, and the output terminal 60 according to the present embodiment are the first vibrator 10 and the second vibration in the resonance circuit 1 according to the first embodiment. It is equivalent to the child 20, the adjusting unit 30, the input terminal 50, and the output terminal 60.

共振回路２においては、入力端子５０と出力端子６０との間で、第１振動子１０及び第２振動子２０が互いに並列に接続されている。調整部３０は、例えば、第１振動子１０及び第２振動子２０のそれぞれに静電駆動電圧を印加することにより、第１振動子１０及び第２振動子２０の等価回路定数を調整する。   In the resonance circuit 2, the first vibrator 10 and the second vibrator 20 are connected in parallel between the input terminal 50 and the output terminal 60. For example, the adjusting unit 30 adjusts the equivalent circuit constants of the first vibrator 10 and the second vibrator 20 by applying an electrostatic drive voltage to each of the first vibrator 10 and the second vibrator 20.

第１振動子１０の電極１００ａ及び第２振動子２０の電極２００ａが、入力端子５０に接続されており、電極１００ｃ及び電極２００ｂが変換部７０に接続されている。電極１００ｃからは、入力端子５０から入力される信号と同位相で振動する信号が出力され、電極２００ｂからは、入力端子５０から入力される信号と逆位相で振動する信号が出力される。   The electrode 100 a of the first vibrator 10 and the electrode 200 a of the second vibrator 20 are connected to the input terminal 50, and the electrode 100 c and the electrode 200 b are connected to the conversion unit 70. The electrode 100c outputs a signal that oscillates in the same phase as the signal input from the input terminal 50, and the electrode 200b outputs a signal that oscillates in the opposite phase to the signal input from the input terminal 50.

負性容量回路４１及び負性容量回路４２は、第１の実施形態に係る負性容量回路４０と同様に、正の電圧を印加すると電荷を放出する性質を持つ回路である。負性容量回路４１は、第１振動子１０及び変換部７０の接続点とグランドとの間に設けられている。負性容量回路４１の容量値は、第１振動子１０の等価並列キャパシタ１０２の容量値と符号が逆で同じ値である。負性容量回路４２は、第２振動子２０及び変換部７０の接続点とグランドとの間に設けられている。負性容量回路４２の容量値は、第２振動子２０の等価並列キャパシタ２０２の容量値と符号が逆で同じ値である。   Similarly to the negative capacitance circuit 40 according to the first embodiment, the negative capacitance circuit 41 and the negative capacitance circuit 42 are circuits having a property of discharging charges when a positive voltage is applied. The negative capacitance circuit 41 is provided between the connection point of the first vibrator 10 and the conversion unit 70 and the ground. The capacitance value of the negative capacitance circuit 41 is the same value with the opposite sign to the capacitance value of the equivalent parallel capacitor 102 of the first vibrator 10. The negative capacitance circuit 42 is provided between the connection point of the second vibrator 20 and the conversion unit 70 and the ground. The capacitance value of the negative capacitance circuit 42 is the same as the capacitance value of the equivalent parallel capacitor 202 of the second vibrator 20 with the opposite sign.

負性容量回路４１及び負性容量回路４２が設けられていることにより、第１振動子１０と変換部７０との接続点から等価並列キャパシタ１０２が見えなくなり、第２振動子２０と変換部７０との接続点から等価並列キャパシタ２０２が見えなくなる。その結果、共振回路１は、第１振動子１０の反共振周波数及び第２振動子２０の反共振周波数の影響を受けにくくなり、第１振動子１０の共振周波数と第２振動子２０の共振周波数との間で共振しやすくなる。   By providing the negative capacitance circuit 41 and the negative capacitance circuit 42, the equivalent parallel capacitor 102 cannot be seen from the connection point between the first vibrator 10 and the conversion unit 70, and the second vibrator 20 and the conversion unit 70 are not visible. The equivalent parallel capacitor 202 cannot be seen from the connection point. As a result, the resonance circuit 1 is less affected by the anti-resonance frequency of the first vibrator 10 and the anti-resonance frequency of the second vibrator 20, and the resonance frequency of the first vibrator 10 and the resonance of the second vibrator 20. It tends to resonate with the frequency.

変換部７０は、第１振動子１０及び第２振動子２０に接続されており、第１振動子１０及び第２振動子２０との間で入出力される平衡信号を、出力端子６０に出力される不平衡信号に変換する。具体的には、変換部７０は、第１振動子１０からの出力信号及び第２振動子２０からの出力信号から構成される平衡信号を、グランドを基準電位とする不平衡信号に変換して、出力端子６０に出力する。共振回路２は、変換部７０が設けられていることにより、第１振動子１０から変換部７０の方向に流れる電流と、変換部７０から第２振動子２０の方向に流れる電流とが打ち消し合うことなく、これらの電流の大きさに応じた不平衡信号を出力することができる。   The converter 70 is connected to the first vibrator 10 and the second vibrator 20, and outputs a balanced signal input / output between the first vibrator 10 and the second vibrator 20 to the output terminal 60. Converted to an unbalanced signal. Specifically, the conversion unit 70 converts the balanced signal composed of the output signal from the first vibrator 10 and the output signal from the second vibrator 20 into an unbalanced signal with the ground as a reference potential. , Output to the output terminal 60. In the resonant circuit 2, since the conversion unit 70 is provided, the current flowing from the first vibrator 10 to the conversion unit 70 and the current flowing from the conversion unit 70 to the second vibrator 20 cancel each other. Therefore, an unbalanced signal corresponding to the magnitude of these currents can be output.

図７Ａ、図７Ｂ及び図７Ｃは、第１振動子１０に印加する静電駆動電圧Ｖｐ１及び第２振動子２０に印加する静電駆動電圧Ｖｐ２を変化させた場合の、共振回路２の利得の周波数特性を示す図である。図７Ａは、Ｖｐ１＝３Ｖ、Ｖｐ２＝１０Ｖの場合の周波数特性を示す。図７Ｂは、Ｖｐ１＝Ｖｐ２＝１０Ｖの場合の周波数特性を示す。図７Ｃは、Ｖｐ１＝１０Ｖ、Ｖｐ２＝３Ｖの場合の周波数特性を示す。   7A, 7B and 7C show the gain of the resonance circuit 2 when the electrostatic drive voltage Vp1 applied to the first vibrator 10 and the electrostatic drive voltage Vp2 applied to the second vibrator 20 are changed. It is a figure which shows a frequency characteristic. FIG. 7A shows frequency characteristics when Vp1 = 3V and Vp2 = 10V. FIG. 7B shows frequency characteristics when Vp1 = Vp2 = 10V. FIG. 7C shows frequency characteristics when Vp1 = 10V and Vp2 = 3V.

このように、共振回路２の共振周波数は、第１振動子１０の共振周波数ｆｒ１及び第２振動子２０のｆｒ２のうち、印加する静電駆動電圧が小さい方の振動子、すなわち、等価直列容量が小さい方の振動子の共振周波数に近づく。したがって、Ｖｐ１をＶｐ２よりも小さくすることで、共振回路２の共振周波数は第１振動子１０の共振周波数ｆｒ１に近づき、Ｖｐ２をＶｐ１よりも小さくすることで、共振回路１の共振周波数は第２振動子２０の共振周波数ｆｒ２に近づく。 As described above, the resonance frequency of the resonance circuit 2 is the vibration of the smaller one of the resonance frequency fr 1 of the first vibrator 10 and the fr 2 of the second vibrator 20 to which the applied electrostatic drive voltage is applied, that is, equivalent. It approaches the resonant frequency of the vibrator with the smaller series capacitance. Therefore, to be smaller than Vp2 to Vp1, the resonance frequency of the resonance circuit 2 is close to the resonance frequency fr 1 of the first oscillator 10 is made smaller than Vp1 to Vp2, the resonance frequency of the resonance circuit 1 is first It approaches the resonance frequency fr 2 of the two vibrators 20.

［第２の実施形態における効果］
以上のとおり、第２の実施形態に係る共振回路２によれば、第１共振周波数で共振する第１振動子１０と、第１共振周波数と異なる第２共振周波数で共振し、かつ、振動位相が第１振動子１０と逆相である第２振動子２０とが並列に接続されており、第１振動子１０が有する等価並列容量を打ち消す負性容量回路４１、及び第２振動子２０が有する等価並列容量を打ち消す負性容量回路４２が、第１振動子１０と変換部７０との間、及び第２振動子２０と変換部７０との間に設けられている。このような構成により、調整部３０が、第１振動子１０及び第２振動子２０に印加する静電駆動電圧を変化させることで、共振回路２の共振周波数を、第１振動子１０の共振周波数と第２振動子２０の共振周波数との間で変化させることができる。 [Effects of Second Embodiment]
As described above, according to the resonance circuit 2 according to the second embodiment, the first vibrator 10 that resonates at the first resonance frequency resonates at the second resonance frequency different from the first resonance frequency, and the vibration phase. Are connected in parallel to the first vibrator 10 and the second vibrator 20 having the opposite phase, the negative capacity circuit 41 for canceling the equivalent parallel capacitance of the first vibrator 10, and the second vibrator 20. A negative capacitance circuit 42 that cancels the equivalent parallel capacitance is provided between the first vibrator 10 and the conversion unit 70, and between the second vibrator 20 and the conversion unit 70. With such a configuration, the adjustment unit 30 changes the resonance frequency of the resonance circuit 2 by changing the electrostatic drive voltage applied to the first vibrator 10 and the second vibrator 20. The frequency can be changed between the resonance frequency of the second vibrator 20.

＜第３の実施形態＞
図８は、第３の実施形態に係る発振回路３００の構成を示す図である。発振回路３００は、第１の実施形態に係る共振回路１を含む負帰還回路３と、共振回路１の入出力間に設けられた増幅回路４と、を備える。負帰還回路３は、共振回路１の代わりに共振回路２を有してもよい。 <Third Embodiment>
FIG. 8 is a diagram illustrating a configuration of an oscillation circuit 300 according to the third embodiment. The oscillation circuit 300 includes a negative feedback circuit 3 including the resonance circuit 1 according to the first embodiment, and an amplification circuit 4 provided between the input and output of the resonance circuit 1. The negative feedback circuit 3 may have a resonance circuit 2 instead of the resonance circuit 1.

負帰還回路３は、共振回路１と、ゲイン調整部８０とを有する。ゲイン調整部８０は、例えば、増幅回路４のゲインを補完する増幅器である。負帰還回路３は、増幅回路４の出力信号を正帰還することにより、共振回路１の共振周波数の発振信号を増幅回路４から出力させる。   The negative feedback circuit 3 includes the resonance circuit 1 and a gain adjustment unit 80. The gain adjusting unit 80 is, for example, an amplifier that complements the gain of the amplifier circuit 4. The negative feedback circuit 3 causes the amplification circuit 4 to output an oscillation signal having a resonance frequency of the resonance circuit 1 by positively feeding back the output signal of the amplification circuit 4.

増幅回路４は、増幅器９０を有する。増幅回路４は、負帰還回路３からの負帰還を受けて、共振回路１の共振周波数の信号を増幅することにより、発振信号を出力する。   The amplifier circuit 4 includes an amplifier 90. The amplifier circuit 4 receives the negative feedback from the negative feedback circuit 3 and amplifies the signal of the resonance frequency of the resonance circuit 1 to output an oscillation signal.

以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更又は改良を加えることが可能であることが当業者に明らかである。そのような変更又は改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。   As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

１、２・・・共振回路、３・・・負帰還回路、４・・・増幅回路、１０・・・第１振動子、２０・・・第２振動子、３０・・・調整部、４０、４１、４２・・・負性容量回路、５０・・・入力端子、６０・・・出力端子、７０・・・変換部、８０・・・ゲイン調整部、９０・・・増幅器、１００・・・電極、１０１・・・振動体、１０２・・・等価並列キャパシタ、１０３・・・等価直列抵抗、１０４・・・等価直列インダクタ、１０５・・・等価直列キャパシタ、１０６・・・トランス、２００・・・電極、２０１・・・振動体、２０２・・・等価並列キャパシタ、２０３・・・等価直列抵抗、２０４・・・等価直列インダクタ、２０５・・・等価直列キャパシタ、２０６・・・トランス、３００・・・発振回路、４００・・・反共振回路、４１１・・・水晶振動子、４１２・・・減衰器、４１３・・・インダクタ、４１４・・・キャパシタ、４２１・・・水晶振動子、４２２・・・減衰器、４２３・・・インダクタ、４２４・・・キャパシタ、４３０・・・交流信号源、４４０・・・出力抵抗、４５０・・・負荷抵抗 DESCRIPTION OF SYMBOLS 1, 2 ... Resonance circuit, 3 ... Negative feedback circuit, 4 ... Amplification circuit, 10 ... 1st vibrator, 20 ... 2nd vibrator, 30 ... Adjustment part, 40 , 41, 42 ... negative capacitance circuit, 50 ... input terminal, 60 ... output terminal, 70 ... conversion unit, 80 ... gain adjustment unit, 90 ... amplifier, 100 ... Electrode 101 ... vibrating body 102 ... equivalent parallel capacitor 103 ... equivalent series resistance 104 ... equivalent series inductor 105 ... equivalent series capacitor 106 ... transformer 200 ..Electrode 201 ... vibrating body 202 ... equivalent parallel capacitor 203 ... equivalent series resistance 204 ... equivalent series inductor 205 ... equivalent series capacitor 206 ... transformer 300 ... Oscillation circuit, 400 ... Anti-resonance circuit 411: Crystal resonator, 412: Attenuator, 413 ... Inductor, 414 ... Capacitor, 421 ... Crystal resonator, 422 ... Attenuator, 423 ... Inductor, 424 ..Capacitors, 430 ... AC signal source, 440 ... Output resistance, 450 ... Load resistance

Claims (6)

第１共振周波数で共振し、入力された電流の位相と同位相の電流を出力する第１振動子と、
前記第１共振周波数と異なる第２共振周波数で共振し、かつ、前記第１振動子に入力された電流の位相と同位相の電流の入力を受け、前記第１振動子が出力する電流の位相と逆位相の電流を出力する第２振動子と、
前記第１振動子及び前記第２振動子の等価回路定数を調整する調整部と、
前記第１振動子が有する第１等価並列容量、及び前記第２振動子が有する第２等価並列容量を打ち消す負性容量回路と、
を備える共振回路。 A first vibrator that resonates at a first resonance frequency and outputs a current in phase with the phase of the input current ;
The phase of the current that resonates at a second resonance frequency that is different from the first resonance frequency, and that receives an input of a current that is in phase with the phase of the current that is input to the first transducer, and that is output by the first transducer A second vibrator that outputs a current in the opposite phase to
An adjustment unit for adjusting equivalent circuit constants of the first vibrator and the second vibrator;
A negative capacitance circuit that cancels the first equivalent parallel capacitance of the first vibrator and the second equivalent parallel capacitance of the second vibrator;
A resonant circuit comprising: 前記調整部は、前記第１振動子及び前記第２振動子に印加する直流電圧を変化させることにより、前記等価回路定数を調整する、
請求項１に記載の共振回路。 The adjusting unit adjusts the equivalent circuit constant by changing a DC voltage applied to the first vibrator and the second vibrator;
The resonant circuit according to claim 1. 前記第１振動子及び前記第２振動子は、静電駆動型ＭＥＭＳ振動子である、
請求項２に記載の共振回路。 The first vibrator and the second vibrator are electrostatically driven MEMS vibrators,
The resonance circuit according to claim 2. 前記第１振動子及び前記第２振動子は、互いに直列に接続されており、
前記負性容量回路は、前記第１振動子及び前記第２振動子の接続点とグランドとの間に設けられている、
請求項１から３のいずれか１項に記載の共振回路。 The first vibrator and the second vibrator are connected in series with each other,
The negative capacitance circuit is provided between a connection point of the first vibrator and the second vibrator and a ground.
The resonance circuit according to any one of claims 1 to 3. 互いに並列に接続された前記第１振動子及び前記第２振動子と接続されており、かつ前記第１振動子及び前記第２振動子と入出力される平衡信号を不平衡信号に変換する変換部をさらに備え、
前記負性容量回路は、前記第１振動子及び前記変換部の接続点とグランドとの間、並びに、前記第２振動子及び前記変換部の接続点とグランドとの間に設けられている、
請求項１から３のいずれか１項に記載の共振回路。 A conversion connected to the first vibrator and the second vibrator connected in parallel to each other, and converting a balanced signal inputted to and outputted from the first vibrator and the second vibrator into an unbalanced signal Further comprising
The negative capacitance circuit is provided between a connection point of the first vibrator and the conversion unit and the ground, and between a connection point of the second vibrator and the conversion unit and the ground.
The resonance circuit according to any one of claims 1 to 3. 請求項１から５のいずれか１項に記載の共振回路と、
前記共振回路の入出力間に設けられた増幅回路と、
を備える発振回路。

A resonance circuit according to any one of claims 1 to 5,
An amplifier circuit provided between the input and output of the resonant circuit;
An oscillation circuit comprising:

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