JP6132426B2 - Laser equipment - Google Patents

Description

  The present invention requires several hours until the operating state in an industrial laser device because it has a temperature-dependent characteristic with a long time constant of about several hours caused by the thermal effect that has become inevitable due to high output. In a laser device that has a power drift with a time constant of about several hours for deterioration of the nonlinear crystal used in the laser device, a steady state was reached in a short time after the power was turned on. It has the function of shortening the time to reach the temperature equilibrium state by bringing about the same laser oscillation state as the case, and also has the function of preventing long-term drift due to nonlinear crystal degradation that appears suddenly. The present invention relates to a control device capable of reducing time.

  High-power laser devices often have a long time from power-on to operation due to heat. For example, in a high-power femtosecond laser device of about 50 KHz and 20 W, it takes about 2 hours from power-on to thermal equilibrium.

  One of the factors depending on heat is a thermal effect generated in the laser oscillation element itself (laser crystal). This thermal effect is caused by the fact that excitation energy injected from the semiconductor laser into the laser oscillation element is not completely converted into a laser by the laser oscillation element but is partially converted into heat. As a result, thermal distortion due to heat generation occurs, and movement (axis deviation) of the optical axis occurs.

  Other factors include stress distortion to the mechanical holder due to heat generated by the laser beam on the reflection mirror, deterioration due to heat generation of the nonlinear crystal used to cut out the amplified pulse, and misalignment of the optical axis. As a whole laser apparatus, an optical axis shift occurs due to thermal distortion in which several factors are superimposed.

  Problems caused by heat generation of the laser oscillation element itself can be detected by, for example, detecting a change in the optical axis by placing a photodetector on the optical axis that is determined to be appropriate, and capturing a signal whose intensity changes. A method for controlling the optical axis has been established by a method such as controlling the current of a semiconductor laser used for excitation using information.

  In addition, when various optical elements arranged to guide the laser beam cause mechanical stress distortion due to changes in environmental temperature such as room temperature, resulting in optical axis deviation, an appropriate optical axis is used. A method for stabilizing the optical axis is also established by controlling the fine movement mechanism provided in the holding mechanism of each optical element by using the signal change information at the position of the light detection device. .

  There are many unresolved parts in the control method of the defect in which a plurality of thermal factors generated due to high output are superimposed. In industrial high-power lasers, when it takes several hours to reach thermal equilibrium, it is desired to shorten the time from power-on to operation from the viewpoint of operating rate.

JP 2006-303235 A JP 2005-221807 A JP 2006-324557 A

  In general, in order to stabilize the intensity of laser output light, a laser device takes out a part (approximately several percent) of the output light, measures it with a photodetector, and forms a feedback circuit consisting of an electronic circuit and a computer. Then, stabilization is achieved by controlling an energy injection source (for example, a semiconductor laser for excitation) of the laser device. This method is called APC (Advanced Process Control) control. (See Patent Document 1).

In the APC control when the excitation source is a semiconductor laser, the current of the excitation semiconductor laser is controlled by a signal from the photodetector. The laser oscillation medium on the excited side becomes heat except for the energy converted into oscillation, and the heat generation changes the refractive index inside the laser medium, thus affecting the optical axis of the laser beam.
However, the APC control has a relatively good response to the stress strain of the holding device that fixes the laser oscillation medium.

  However, the thermal distortion generated inside the transmission optical medium and the mirrors arranged on the transmission path until the laser beam output from the laser resonator is taken out of the device originates from the inside of the laser oscillation medium. Since it has a long time constant that is different from the thermal distortion, it is not easy to track and control the influence caused by the heat of the entire laser device by APC control.

  If an attempt is made to stabilize the optical axis of the entire laser device only by APC control, it is necessary to extremely increase the current injected into the semiconductor laser of the pumping source, and thus the adverse effect of shortening the life of the semiconductor laser. Occurs.

  Furthermore, the optical axis misalignment caused by thermal distortion caused by the laser beam transmission process of the laser device is also affected by the installation environment, such as thermal expansion distortion due to room temperature fluctuations of the mechanical components. It takes a long time to reach a thermal equilibrium state, and the optical axis control becomes complicated.

  Although the control method described in Patent Document 2 functions appropriately for such an optical axis shift having a long time constant due to such a complicated overlapping factor, the APC is suitable for the optical axis shift due to heat generation of the laser medium. Agile responsiveness like control cannot be expected.

  Furthermore, there is a nonlinear crystal among the optical elements through which the laser beam passes. This nonlinear crystal is arranged for the purpose of controlling the traveling direction of the laser beam passing therethrough. In this nonlinear crystal, part of the laser beam that passes through is absorbed in the nonlinear crystal and becomes heat, which degrades the nonlinear crystal. When the nonlinear crystal deteriorates, its physical property value changes, so that the optical axis of the passing laser beam changes. Since the optical axis shift due to such a change in physical property value occurs suddenly, the countermeasure is not easy.

  Each of the problems is a problem that has become remarkable due to an increase in the intensity of the laser, and becomes a larger problem as the output intensity of the industrial laser apparatus increases.

  In order to solve the above technical problem, in the present invention, the laser device is made possible by technically incorporating all the features of the APC control method, the optical axis stabilization control method by the fine movement mechanism, and the remote analysis diagnosis method. The optical axis was stabilized.

  In the present invention, the intensity of the laser beam generated from the laser device is detected by a single optical sensor, and the signal value is used as the input signal of the APC control device. At the same time, the signal value detected by the optical sensor is used as an input signal for optical axis stabilization control by the fine movement mechanism. By detecting the laser intensity with a single optical sensor, optical axis control such as correction of differences in electrical characteristics between sensors that occur when multiple optical sensors are used and correction depending on the installation location Remove complicating factors.

  Further, the present invention uses the optical axis stabilization control method by the fine movement mechanism, but the control is performed so that the control to the fine movement mechanism is stopped in the optimum value of the same optical sensor as described above, that is, in the almost optimal state of the laser device. The device is initialized and a dead zone is set for the control of the fine movement mechanism. Only the APC control functions in the insensitive region, and the control is performed so as to maintain the optimum predetermined set value of the optical sensor, thereby maintaining the optimum state of the laser device.

  The control loop in which this insensitive area is set does not reach the optimum state even after a certain period of time has elapsed, or the APC control increases the current of the pumping semiconductor laser more than necessary, and the predetermined set value is set. If it exceeds, the setting of the insensitive area is canceled and the optical axis control is set to return to the fine movement mechanism.

Next, a threshold is set for the signal intensity of a single optical sensor, a dead area is set between the threshold and the optimum value (maximum value), and the optical axis changes in a short time inside and outside the dead area. The APC control preferentially controls the deviation, and the fine movement mechanism controls the optical axis deviation that changes over a long time.
The time indicating the short time threshold and the long time threshold is, for example, 1 minute. The time indicating the threshold is appropriately determined depending on the number of mirrors in the laser device, the number of nonlinear elements, or the components such as the characteristics of the semiconductor laser.
In the change in signal intensity detected by the optical sensor, the factor that changes in a short time is the intensity change of the semiconductor laser that is the excitation source or the thermal distortion of the optical element located near the semiconductor laser that is also the large heat source This is considered to be caused by the optical axis shift. On the other hand, in the signal detected by the optical sensor, it is considered that the factor that changes over a long time is due to the distortion of the optical element in a place far from a large heat source. Furthermore, the cause of the long-term change may be a nonlinear optical crystal that deteriorates slowly or an optical axis shift due to a change in refractive index.
With a single optical sensor, it is not possible to distinguish what causes the signal intensity to change, but the response time of the signal intensity is divided into a short-time area and a long-time area. By controlling based on the characteristics of a system that includes two lasers, the semiconductor lasers that excite it, it is possible to control the optical axis misalignment caused by complicated thermal distortion and stabilize the entire laser system. Become.

  A computer that generally controls the laser apparatus has control of an APC control function and its control information collection function, and also has fine movement mechanism control and its control information collection function. Furthermore, since the computer can exchange information with another computer through the Internet, it has a remote diagnosis function.

  The computer for remote diagnosis can use the remote diagnosis function to acquire and analyze the operation information of APC control and fine movement mechanism control from a central computer of the laser apparatus. In addition, the computer for remote diagnosis can change the position of the optical axis passing through the nonlinear crystal by finely moving the nonlinear crystal by controlling the fine movement mechanism during the non-operation time of the laser device. As a result, in the present invention, since the nonlinear crystal can be used as fresh as possible, the APC control and the fine movement mechanism control are operated in parallel, thereby causing a sudden power fluctuation stochastically. It has the function of avoiding problems due to deterioration of nonlinear crystals, which is considered to be a factor.

  With this function, it is possible to avoid a sudden failure that cannot be handled unless maintenance personnel are stationed near the equipment. For example, when the operation is stopped due to a sudden factor, the repair time expected to take 4 hours or more can be avoided or greatly shortened, and the total operation cost can be reduced.

  The present invention has an important cost by applying or adding a control system that performs the above APC control and fine movement mechanism control to a high-power industrial laser having a problem of heat generation in which a plurality of factors are superimposed on each other. The operating time that is an element can be greatly reduced.

  If the problem is caused only by startup due to heat, it is not necessary to consider the time from power-on to operation if the operation of the industrial laser is always operated and is always in a thermal equilibrium state. However, it is impossible to continue driving indefinitely, and it is not realistic in terms of cost.

  The present invention provides effective operating efficiency by operating a laser for a necessary time in order to reduce power costs.

  Further, even if a malfunction due to an unexpected factor is monitored remotely without always arranging personnel near the apparatus, the control according to the present invention can be performed and the human cost can be reduced.

Conventionally, it has been experimentally found that the rise time without control is about 2 hours when only the optical axis is shifted due to thermal factors, and about 4 hours when sudden factors overlap. ing.
However, when it is controlled by the control system according to the present invention, in about 30 minutes, it can be used stably as a laser device, and the start-up time is greatly shortened.

It is a block diagram showing the whole structure of the method and laser apparatus of the Example by this invention. It is explanatory drawing of the optical axis offset of the laser beam resulting from the heat of absorption of the mirror etc. which are used when transmitting a laser beam. It is explanatory drawing of the optical axis offset resulting from the heat absorption of the optical element through which a beam passes, such as transmission of a laser beam, wavelength conversion, and condensing. It is a figure explaining the coexistence area | region and insensitive area | region in optical axis fine movement mechanism control. It is a figure explaining the fine movement for keeping a nonlinear optical crystal in a fresh state.

  The details of the present invention will be described with reference to the accompanying drawings. FIG. 1 shows an example of the overall configuration of a laser apparatus 1 using the present invention. The laser device 1 is roughly divided into a resonator 2 for generating a main laser, optical systems 10, 8, and 6 for branching, condensing, converting characteristics, or reflecting the generated laser, an optical axis control unit 20, and an APC. It is composed of two control units of the control unit 23 and a computer 27 equipped with integrated control software for the entire system.

The function of the optical axis control unit 20 will be described. Control of the angle of the laser beam traveling direction, that is, optical axis control is performed by an optical axis fine movement mechanism having a biaxial control element as shown in FIG. In the optical axis control by automatic control as performed in this device, the optical axis fine movement mechanism has a mechanical displacement mechanism for changing the angle of the optical element, and an actuator that can change the displacement with an electrical signal For example, a displacement mechanism using a combination of a screw and a motor, a piezoelectric displacement element, or the like is added as a fine movement mechanism.
This fine movement mechanism, for example, can cause a displacement corresponding to the control signal by sending a control signal including the rotation direction and the rotation amount to the motor, and can change the optical axis of the laser beam that passes as a result.
For example, in the optical axis fine movement mechanism as shown in FIG. 2, when the optical element is a reflection mirror, the passing laser beam can change the elevation angle and depression angle of the beam by the movement of the fine movement mechanism. Furthermore, by combining two optical axis fine movement mechanisms as shown in FIG. 2 and allowing the laser beam to pass therethrough, it is possible to control the four axes, that is, by controlling each fine movement mechanism, not only the angle but also the parallel movement of the beam. It can also be made.
The optical control unit 20 functions to control the optical axis of the laser by combining the elevation angle, depression angle, and parallel movement in accordance with the control signal in the process in which the laser passes through a plurality of optical axis fine movement mechanisms as shown in FIG. Have By using this function, if the optical axis deviates from the optimum optical axis, it is corrected to an appropriate optical axis using information analyzed by the computer 27 based on the signal from the light detector 15 (sensor). can do. The computer 27 needs to know the device ID number of the optical axis fine movement mechanism and the displacement amount of the actuator, and the optical control unit 20 and the computer 27 perform bidirectional signal control.

  The main laser resonator 2 absorbs energy by the excitation laser light 4 from the semiconductor laser 3 and generates a laser beam 5 that is the basis of the laser device 1. At this time, all the energy of the excitation laser beam 4 is not converted into the laser beam 5, but a part thereof is converted into heat, so that the internal components of the laser resonator 2 are distorted due to the heat generation, and as a result, A deviation of the optical axis of the laser beam 5 occurs. The laser beam 5 includes such an optical axis shift due to heat.

  The laser beam 5 taken out from the resonator 2 passes through an optical system 6 for branching, condensing, or reflecting the beam for the purpose of adjusting or adding the characteristics and functions of the laser. In the optical system 6, a dielectric multilayer mirror, a condenser lens, or the like is used.

  FIG. 2 shows an example of a mirror holding fine movement mechanism used inside the optical system 6. When the laser 34 is incident on the unit of the optical system 6, since it is a high-power laser, the reflected laser 35 is not 100% reflected and a part of the transmitted laser 37 is generated. Heat generation 38 occurs due to absorption by the element 33.

  The heat generation 38 generated inside the mirror element 33 causes a mechanical stress distortion 39 in the holding mechanism 32. As a result, since the entire mirror holding mechanism is distorted, the reflection laser becomes a reflection laser 36 different from the case where there is no thermal distortion. The optical axis shift due to such heat generation is corrected by adjusting a fine movement unit composed of the fine movement mechanism 31 and the fine movement mechanism drive actuator 30. The correction is based on a control signal 19 from the optical axis fine movement control unit 20. .

  Returning to the explanation of FIG. 1, the laser 7 output from the optical system 6 is output through an optical mechanism as shown in FIG. The laser 7 is guided to the functional optical system 8. In this functional optical system, for example, as shown in FIG. 3, the incident laser 48 passes through the functional optical element 47 so as to change the characteristics of the laser 48. The change in the characteristics is a wavelength conversion action in which the wavelength of the laser 49 that has passed is different from that of the incident laser 48 or a process of deflecting the incident laser 48 at high speed.

Nonlinear crystals are often used for the functional optical element 47 for changing the light characteristics. When passing through the nonlinear crystal, unlike the case of passing through the lens, the energy of the laser 48 is absorbed by the functional optical element 47 and thus generates heat 51.
The heat generation generates a stress strain 52 inside the holding mechanism 45, and also generates a stress strain 53 inside the peripheral holding mechanism 46. As a result, the optical axis of the laser 50 passes through the thermal strain like the laser 50 passing therethrough. In the case where there is no laser beam, the optical axis is shifted from the passing laser beam 49. Since the optical axis deviation is also superposed on the optical axis deviation due to the temperature dependence of the refractive index of the functional optical element 47, the control for correction is complicated, but the control signal 18 from the optical axis fine movement control unit 20 is complicated. Thus, the optical axis correction is performed by controlling the optical axis fine movement mechanism as shown in FIG. 2 included in the unit of the optical system 8.

  Next, the laser 9 taken out from the optical system 8 is guided to an optical system 10 configured by an optical mechanism similar to that of the optical system 6, and then the final laser 12 is taken out from the output end 13. In the optical system 10 as well, the optical axis deviation is corrected by the control signal 17 from the optical axis fine movement control unit 20 as in the optical system 6.

A part of the laser 12 is branched by the beam splitter 11 to become a beam 14 for measuring an optical axis shift and a change in light intensity.
The beam 14 is a signal of a change in signal intensity that occurs because a part of the beam incident on the light detector 15 is not detected due to an optical axis deviation, and a signal of the intensity of the laser 12 itself, although no optical axis deviation occurs. The change in intensity is superimposed. The superimposed change enters the light detector 15, is converted into an electric signal through an electronic circuit, and becomes a light intensity detection signal 16. The light intensity detection signal 16 is guided to the APC control unit 23, and the information is shared between the APC control unit 23 and the optical axis fine movement control unit 20, and is used for a control procedure as described below.

  Control procedures executed by the light intensity detection signal 16, the optical axis fine movement control unit 20, the APC control unit 23, and the computers 27 and 29 are classified into four patterns.

Control procedure (1):
In the process of executing the control procedure (1) programmed in the computer 27, the signal path 25 connecting the APC control unit 23 and the computer 27 is used to determine the change in the signal intensity obtained from the light intensity detection signal 16. Thus, the current of the semiconductor laser is controlled so as to have a predetermined set value through the signal path 26 connecting the semiconductor laser 3 and the computer 27.

In this control procedure, the intensity of the light intensity detection signal 16 is controlled by the control of the heat source (semiconductor laser 3) generated in the previous stage of the resonator 2, and is mounted on the computer 27 to return to a predetermined set value. Monitor and control by program. The control by this control procedure is a method of controlling the intensity of the laser 12 as a final output to be constant by controlling a portion that is a direct heat source such as current control of the excitation semiconductor laser.
For example, in the case of the optical axis deviation derived from the laser oscillation element in the main resonator 2, the optical axis deviation is relatively sensitively affected by the increase / decrease of the input current to the semiconductor laser 3, so the photodetector is It has a response speed of about several milliseconds to several tens of milliseconds, and is designed so as to be able to cope with a change in incident light intensity with a sufficient response speed. For example, when the computer 27 instructs to give the semiconductor laser a current change with a changing speed of about several tens of milliseconds, the light is detected within a predetermined time (a specific numerical value is determined as a system parameter) after the instruction of the computer 27. The computer senses a change in light intensity, and the computer 27 recognizes that the optical axis is deviated from the laser oscillation element, and the APC control is performed within a predetermined time, for example, within 1 minute.

Control procedure (2):
In the process of executing the control procedure (2) programmed in the computer 27, the light intensity provided from the APC control unit 23 through the signal path 22 using the signal path 24 connecting the optical axis fine movement control unit 20 and the computer 27. By discriminating the information of the detection signal 16 and controlling the optical axis through the control signals 17, 18, and 19 for controlling the optical axis fine movement mechanism of the optical systems 10, 8, and 6, the intensity of the light intensity detection signal 16 is predetermined. Whether or not to return to the set value is monitored and controlled by a program installed in the computer 27.

The control by this control procedure is a method of correcting the intensity change of the laser 12 and the optical axis deviation caused by the optical axis deviation caused by the laser passing through the optical element.
In the case of the optical axis deviation derived from the optical elements of the optical systems 10, 8, and 6, it is not instantaneous. Therefore, even if the optical axis is forcibly changed by increasing / decreasing the input current to the semiconductor laser by the control procedure (1) having a fast response speed, the possibility of instantaneously detecting the optical axis deviation is not possible. However, the result is a sensor analysis process in which a small shift is instantaneously superimposed on a large shift of the optical axis generated by control of the input current to the semiconductor laser, and the optical axis shift caused by the optical systems 10, 8, 6 It cannot be determined that there is.
In the control procedure (1) with a fast response speed, the optical axis deviation may not be detected in the processing system including the light detector. In the control procedure (2), the optical axis 10, 8, and 6 of the optical systems 10, 8, and 6 are finely moved by the computer 27. By intentionally controlling the mechanism, the light detector senses correct correction of the optical axis misalignment or a larger optical axis misalignment, and the computer 27 detects the light derived from the optical element derived from the optical element. Recognize as axis misalignment.
When the response time of APC control is 1 minute or longer, the control procedure (2) is performed.

Control procedure (3):
In the process of executing the control procedure (3) programmed in the computer 27, control using both the control procedure (1) and the control procedure (2) is performed. That is, by using the current control of the semiconductor laser 3 by the APC control unit 23 and the optical axis control by the optical axis fine movement control unit 20 together, whether or not the intensity of the light intensity detection signal 16 returns to a predetermined set value is determined. Monitor and control with the program installed in.

  In the control of the control procedure (3), the balance of priority over the control of the APC control unit 23 and the optical axis fine movement control unit 20 will be described with reference to FIG. FIG. 4 shows the intensity 40 of the light intensity detection signal 16 on the vertical axis. The intensity is, for example, a voltage value if the light intensity detection signal 16 is a voltage, and a current value if the light intensity detection signal 16 is a current. The value 41 of the light intensity detection signal 16 when the final output laser 12 is in the optimum state is preset in the computer 27. This value is a unique value in the laser apparatus 1 and can be determined in a state where the laser apparatus 1 is in a thermal equilibrium state and is operating stably.

  As shown in FIG. 4, the value 41 of the light intensity detection signal 16 in the optimum state is the maximum value of the light intensity detection signal 16. Between the zero value and the maximum value, only the APC control unit dominates and the optical axis fine movement control unit 20 does not operate, and the optical axis fine movement control unit and the APC control unit coexist and perform the control operation. It is divided into a coexistence area 44. In the insensitive area 42, the program of the control procedure (2) is set not to operate.

  The coexistence area and the insensitive area are set so that the control is switched by the boundary value 43 determined by the ratio between the coexistence area and the insensitive area with respect to the value 41 of the light intensity detection signal 16 in the optimum state. The program of the control procedure (3) installed in 27 operates as described above. This boundary value 43 is a unique value in the laser apparatus 1, but information on fine movement and signal path 22 provided from the optical axis fine movement control unit by the signal path 21 in the process until the laser apparatus 1 shifts to the thermal equilibrium state. The computer 27 is programmed so that it can be automatically set by collecting, monitoring, and analyzing the APC control information transmitted by the signal paths 24 and 25.

Control procedure (4):
FIG. 5 shows an example where the functional optical element 47 (see FIG. 3) is a nonlinear optical crystal 56 in the functional optical system 8. The laser beam 57 from the previous stage is guided to the nonlinear optical element 56 through the optical axis fine movement mechanisms 58 and 59, and becomes an outgoing laser beam 60 from the crystal. The nonlinear optical element 56 is attached to the optical element holding mechanism 55, and the optical element holding mechanism is attached to the five-axis movement fine movement mechanism 54.

  In general, since the shape dimension of the nonlinear optical crystal 56 is sufficiently larger than the diameter of the laser beam passing therethrough, the position of the beam passing through the crystal can be moved within the crystal. As shown in the cross-sectional view on the optical axis in FIG. 5, by operating the 5-axis movement fine movement mechanism 54, the laser beam position 63 before movement in the nonlinear optical crystal 56 is changed to the laser beam position 62 after movement. Can be arranged. When the movement of the crystal is not parallel movement, the optical axis of the outgoing laser beam 60 is deviated before and after the movement. This optical axis deviation causes the optical axis fine movement mechanisms 58 and 59 to move to the optical axis fine movement control unit. It can be corrected by controlling with a signal from 20.

  The operation of the above-described control procedure (4) can be executed at any time by a program installed in the computer 27. As a result, it is inevitable that the nonlinear optical crystal 56 always deteriorates due to the passage of the laser beam. However, by moving the position of the laser beam passing through the nonlinear crystal, the nonlinear optical crystal 56 is always in a fresh state. Can be used.

  The nonlinear optical crystal 56 is progressively deteriorated, but may be suddenly destructively deteriorated. To cope with such troubles of the optical element that occur unexpectedly, it is effective to deal with a certain degree of prediction. By connecting the information controlled by the computer 27 with an external computer 29 equipped with remote diagnosis software via the Internet 28 and comparing it with the operating state information in other laser devices of the same specification, It is possible to carry out prediction of troubles arising from a nonlinear optical crystal that occurs unexpectedly. If this analysis information is sent from the computer 28 to the computer 27 and the control procedure (4) is performed, damage can be minimized and the operating rate of the laser device can be improved.

  The nonlinear crystal incorporated in the laser device is used as the same part in terms of specifications. However, the deterioration process of the nonlinear crystal is complicated, and is different for each crystal and follows various forms of damage. However, if the laser apparatus has the same specifications, the range of the laser intensity irradiated to the crystal is limited, and therefore it is possible to accumulate information on a certain degree of deterioration process. For example, the simplest deterioration is a phenomenon in which the intensity of laser to be converted is weakened due to deterioration of conversion efficiency of crystals after a certain period of operation. This information becomes meaningful operating state information by accumulating optical sensor information and elapsed time of laser devices of the same specification. Further, the refractive index of the crystal may change due to deterioration. When the refractive index of a significant region changes compared to the diameter of the laser beam that passes through, the laser beam that passes through passes through an angle different from the angle that has been set to the optimum value. That is, it finally appears as an optical axis shift. Such deterioration is accumulated with the elapsed time together with optical sensor information and optical axis fine movement control information, and combined with manufacturing information as a crystal part, it is exchanged before causing fatal damage etc. Can be dealt with. In other words, by accumulating operation information, in order to maintain the performance of the laser device, the replacement time of the nonlinear crystal that was previously replaced with a new one is appropriately replaced according to the operating state of the system. Is possible.

  As an application example of the present invention, it is possible to easily correct the optical axis misalignment caused by complicated factors due to heat as laser output increases in the future, improving power efficiency, improving processing efficiency, and maintaining The improvement of the property can be expected.

DESCRIPTION OF SYMBOLS 1 Laser apparatus 2 Main laser resonator 3 Semiconductor laser 4 Excitation laser beam 5 Laser beam 6 Optical system 7 which branches, condenses or reflects 7 Laser 8 Functional optical system 9 Laser 10 Optical system 11 which branches, condenses or reflects Beam splitter 12 Final laser 13 Output end 14 Branch beam 15 Optical detector 16 Optical intensity detection signal 17 Control signal 18 Control signal 19 Control signal 20 Optical axis fine movement control unit 21 Signal path 22 Signal path 23 APC control unit 24 Signal path 25 signal path 26 signal path 27 computer 28 internet line 29 computer 30 fine movement mechanism drive actuator 31 fine movement mechanism 32 holding mechanism 33 mirror element 34 laser 35 reflection laser 36 reflection laser 37 transmission laser 38 heat generation 39 mechanical stress distortion 0 Intensity of light intensity detection signal 41 Optimum value of light intensity detection signal 42 Insensitive area 43 Boundary value 44 Coexistence area 45 Holding mechanism 46 Peripheral holding mechanism 47 Functional optical element 48 Incident laser 49 Passing laser 49 Laser 51 Heat generation 52 Stress distortion 53 Stress Distortion 54 5-axis movement fine movement mechanism 55 Optical element holding mechanism 56 Non-linear optical crystal 57 Laser beam 58 Optical axis fine movement mechanism 59 Optical axis fine movement mechanism 60 Emitted laser beam 61 Crystal position 62 after movement Laser beam position 63 after movement Before movement Laser beam position

Claims (6)

A single photodetector for detecting laser beam light output from a laser device using a semiconductor laser for excitation as an excitation source;
An APC control unit that receives a signal detected by the photodetector and controls the current of the semiconductor laser based on the signal to perform APC control of the optical axis;
An optical axis fine movement control unit for controlling the optical axis by finely controlling the optical system unit through which the laser beam passes;
An optical axis control system comprising:
When the signal intensity detected by the photodetector exceeds a predetermined threshold, only the APC control unit functions to control the optical axis of the laser beam. When the signal intensity is lower than the threshold, the APC control unit and the optical axis fine movement control are performed. Both units are configured to function and control the optical axis,
In order to analyze the signal intensity detected from the photodetector and change the optical axis derived from the heat generation of the laser oscillation element of the excitation semiconductor laser for performing the APC control , or to perform the fine movement control An optical axis control system for discriminating whether the optical axis change is caused by the environmental temperature of an optical element of an optical system unit different from the laser oscillation element according to the response time of the signal intensity detected by the photodetector . When the optical axis fine movement control unit has stopped functioning for a certain period of time, when the optical axis fine movement control unit has stopped functioning, the current value of the semiconductor laser exceeds a preset value, or light detection 2. The optical axis control system according to claim 1, wherein the control function of the optical axis fine movement control unit is restored when the signal intensity of the optical device is equal to or less than the threshold value. The optical axis control system according to claim 1 or 2, wherein a response time of APC control of the semiconductor laser for excitation is within a predetermined time, and a response time of the fine movement control exceeds a predetermined time. The optical system unit includes a nonlinear crystal, meets the deterioration condition of a predetermined non-linear crystal, to determine whether the optical axis changes due to the deterioration of the nonlinear crystal, and controls the said fine control and a semiconductor laser The optical axis control system according to claim 1, which has a function.   The optical axis change information and control information described above are transmitted to the remote computer via the Internet for analysis, and the nonlinear crystal in the laser device is changed without changing the appropriate optical axis of the laser device based on the information. The optical axis control system according to claim 4, which has a function of finely moving the position of the optical axis. 4. The control device according to claim 3, wherein the response time in the APC control of the semiconductor laser for excitation is within 1 minute, while the response time in the fine movement control is 1 minute or more, and the mutual control does not interfere. The optical axis control system described.

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