JP6121797B2 - Protective cover device for lamp, lamp with cover device, and method of attaching lamp to lamp holder - Google Patents

Protective cover device for lamp, lamp with cover device, and method of attaching lamp to lamp holder Download PDF

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JP6121797B2
JP6121797B2 JP2013106744A JP2013106744A JP6121797B2 JP 6121797 B2 JP6121797 B2 JP 6121797B2 JP 2013106744 A JP2013106744 A JP 2013106744A JP 2013106744 A JP2013106744 A JP 2013106744A JP 6121797 B2 JP6121797 B2 JP 6121797B2
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lamp
cylindrical cover
cover
glass tube
discharge lamp
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JP2014229414A (en
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小川　正明
正明 小川
満博 内山
満博 内山
悠太 吉田
悠太 吉田
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Orc Manufacturing Co Ltd
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Description

本発明はランプ用保護カバー装置、カバー装置付ランプ、及びランプのランプホルダに対する取り付け方法に関する。   The present invention relates to a protective cover device for a lamp, a lamp with a cover device, and a method for attaching the lamp to a lamp holder.

特許文献１は、放電ランプと、放電ランプに対して着脱可能なランプ用保護カバー装置を開示している。
この放電ランプは、陽極及び該陽極との間で放電を行う陰極を内蔵する発光管を有するガラス管部と、ガラス管部の両端部にそれぞれ接続する陽極側口金及び陰極側口金と、を具備している。発光管の内部には、大気圧より高圧の希ガスが封入されている。陽極側口金は陽極に対して電力を供給可能であり、陰極側口金は陰極に対して電力を供給可能である。
ランプ用保護カバー装置は、放電ランプに対して着脱可能な通気性シート（カバー）と、ガラス管部に装着した通気性シートの表面に巻き付けた糸と、を備えている。 Patent Document 1 discloses a discharge lamp and a protective cover device for a lamp that can be attached to and detached from the discharge lamp.
The discharge lamp includes a glass tube portion having an arc tube containing an anode and a cathode for discharging between the anode, and an anode side cap and a cathode side cap connected to both ends of the glass tube portion, respectively. doing. A rare gas having a pressure higher than atmospheric pressure is sealed inside the arc tube. The anode side base can supply power to the anode, and the cathode side base can supply power to the cathode.
The protective cover device for a lamp includes a breathable sheet (cover) that can be attached to and detached from the discharge lamp, and a thread wound around the surface of the breathable sheet attached to the glass tube portion.

通気性シートは、筒状状態でガラス管部の表面（並びに陽極側口金及び陰極側口金の表面）に装着してある。
糸は、ガラス管部（並びに陽極側口金及び陰極側口金）に装着したシートの表面に巻き付けてあり（又はシートに周方向に並べて形成した複数の孔に挿入してあり）、その両端部どうしを互いに結んでいる。そのため、糸によって通気性シートのガラス管部（並びに陽極側口金及び陰極側口金）に対する装着状態が保持されている。
また、糸の両端どうしの結び目を解くと、糸から通気性シートに及んでいた締付力が消失するので、通気性シートをガラス管部（並びに陽極側口金及び陰極側口金）から容易に取り外すことが可能になる。 The breathable sheet is attached to the surface of the glass tube part (and the surfaces of the anode side base and the cathode side base) in a cylindrical state.
The yarn is wound around the surface of the sheet attached to the glass tube part (and the anode-side base and the cathode-side base) (or inserted into a plurality of holes formed side by side in the circumferential direction), and both ends thereof Are tied together. Therefore, the attachment state with respect to the glass tube part (and anode side nozzle | cap | die and cathode side nozzle | cap | die) of a breathable sheet is hold | maintained with the thread | yarn.
Also, when the knots between the ends of the yarn are broken, the tightening force that has spread from the yarn to the breathable sheet disappears, so the breathable sheet can be easily removed from the glass tube (and the anode and cathode caps). It becomes possible.

運搬中に放電ランプを床面に落下させると、落下時の衝撃によって発光管が破損するおそれがある。また、放電ランプの運搬、交換時の取り扱いよって、発光管の表面に（小さな）傷が付いたり、発光管の表面に異物が付着することもあり、このような状況で放電ランプを点灯すると、放電ランプが発生する熱によって、この傷や異物を起点として発光管が破損するおそれがある。
このように発光管が破損すると、破損したガラス片が希ガスの（大気圧より高い）圧力によって周囲に飛散するおそれがある（なお、このような問題は、発光管の内部に封入した希ガスがランプ非点灯時においては大気圧より低いものの、ランプ点灯時には大気圧より高くなるタイプの放電ランプにおいても同様に生じる）。
さらに、半導体製造工場のクリーンルーム内に設けた半導体用露光装置にこの放電ランプ及びランプハウスを適用した場合に発光管が破損すると、破損したガラス片等によってクリーンルームの空気を汚染することになる。 If the discharge lamp is dropped on the floor surface during transportation, the arc tube may be damaged by the impact at the time of dropping. Also, depending on the handling of the discharge lamp during transportation and replacement, there may be (small) scratches on the surface of the arc tube, or foreign objects may adhere to the surface of the arc tube. Due to the heat generated by the discharge lamp, the arc tube may be damaged starting from this scratch or foreign matter.
When the arc tube is broken in this way, the broken glass piece may be scattered to the surroundings by the pressure of the rare gas (higher than atmospheric pressure) (Note that such a problem is caused by the rare gas enclosed in the arc tube. This also occurs in a discharge lamp that is lower than atmospheric pressure when the lamp is not lit but higher than atmospheric pressure when the lamp is lit).
Further, when this discharge lamp and lamp house are applied to a semiconductor exposure apparatus provided in a clean room of a semiconductor manufacturing factory, if the arc tube is damaged, the air in the clean room is contaminated by a broken glass piece or the like.

また、高圧の希ガスが発光管の内部に封入されているので、放電ランプ製造時に生じた発光管の残留歪や発光管表面のマイクロクラックに起因して、放電ランプの非点灯時に発光管が破損し、ガラス片が周囲に飛散するおそれがある。さらに、封入されたガス体が常温で大気圧以下の放電ランプであっても、点灯時に当該ガス体が大気圧より高圧になって、これらを起点としてガラス管が破裂することが経験的に知られている。   In addition, since the high-pressure rare gas is sealed inside the arc tube, the arc tube is not illuminated when the discharge lamp is not lit due to residual distortion of the arc tube and microcracks on the arc tube surface that occur during the manufacture of the discharge lamp. There is a risk of breakage and scattering of glass pieces. Furthermore, even if the enclosed gas body is a discharge lamp at room temperature and below atmospheric pressure, it is empirically known that when the lamp is turned on, the gas body becomes higher than atmospheric pressure and the glass tube bursts starting from these. It has been.

しかし特許文献１では、通気性シートによって放電ランプの表面を保護しているので、放電ランプの床面への落下や放電ランプ製造時に生じた発光管の残留歪やガラス管部表面のマイクロクラック等に起因して発光管が破損したとしても、上記問題は発生しない。   However, in Patent Document 1, since the surface of the discharge lamp is protected by a breathable sheet, the discharge lamp falls on the floor, the residual distortion of the arc tube generated during the manufacture of the discharge lamp, the micro crack on the surface of the glass tube portion, Even if the arc tube is damaged due to the above, the above problem does not occur.

特許第４５７８０１４号公報Japanese Patent No. 4578014

ランプハウスに放電ランプを取り付けると、両者の間に形成される隙間は微少なものとなる。従って、仮に通気性シートを装着したまま放電ランプをランプハウスに取り付けた場合は、ランプハウス内で糸の両端どうしの結び目を解く作業を行うのが極めて困難になる。
そのため、特許文献１の放電ランプをランプハウスに取り付ける場合は、ランプハウスへの取付け前に、予め糸の両端どうしの結び目を解いて放電ランプから通気性シートを取り外しておき、その後に放電ランプをランプハウスに取り付けることになる。 When a discharge lamp is attached to the lamp house, the gap formed between the two becomes very small. Therefore, if the discharge lamp is attached to the lamp house with the breathable sheet attached, it is extremely difficult to perform the work of untying the knots between the ends of the yarn in the lamp house.
Therefore, when the discharge lamp of Patent Document 1 is attached to the lamp house, the breathable sheet is removed from the discharge lamp by previously tying the knots between the ends of the yarn before attaching to the lamp house. It will be attached to the lamp house.

しかし、発光管の表面を剥き出しにしたまま放電ランプをランプハウスに取り付けると、放電ランプのランプハウスへの取り付け作業中に、発光管がランプハウスへ接触して発光管が破損し、破損したガラス片が周囲に飛散するおそれがある。
また、発光管の表面に（小さな）傷が付いたり、発光管の表面に異物が付着することがある。このような状況で放電ランプを点灯させると、上記したように、傷や異物を起点として発光管が破損し、破損したガラス片が周囲に飛散するおそれがある。 However, if the discharge lamp is attached to the lamp house with the surface of the arc tube exposed, the arc tube will come into contact with the lamp house during the installation of the discharge lamp to the lamp house. There is a risk of the pieces flying around.
In addition, the surface of the arc tube may be (small) scratched or foreign matter may adhere to the surface of the arc tube. When the discharge lamp is lit in such a situation, as described above, the arc tube may be damaged starting from scratches or foreign matter, and the broken glass pieces may be scattered around.

本発明は、ガラス管部の表面をカバーで覆ったままランプを取付対象に接続することが可能で、しかも取付対象に接続したランプからカバーを容易に取り外すことが可能なランプ用保護カバー装置、カバー装置付ランプ、及びランプのランプホルダに対する取り付け方法を提供することを目的とする。   The present invention is a protective cover device for a lamp that can connect a lamp to an attachment target while covering the surface of the glass tube portion with the cover, and can easily remove the cover from the lamp connected to the attachment target, It is an object of the present invention to provide a lamp with a cover device and a method for attaching the lamp to a lamp holder.

本発明のランプ用保護カバー装置は、一対の電極を内蔵するガラス管部及び該ガラス管部の両端部にそれぞれ接続する一対の口金を備え、かつ一方の上記口金がランプホルダに対して着脱可能なランプに対して着脱可能な保護カバー装置において、上記一方の口金の上記ランプホルダに対する接続部を避けて上記ガラス管部を着脱可能に覆い、かつ少なくとも一部が塑性変形して上記ガラス管部に対して接触する第一筒状カバーと、上記ガラス管部及び上記第一筒状カバーの塑性変形部に対して、縮径方向に弾性変形して着脱可能に被さる第二筒状カバーと、を備えることを特徴としている。   The protective cover device for a lamp according to the present invention includes a glass tube portion containing a pair of electrodes and a pair of caps connected to both ends of the glass tube portion, and one of the caps can be attached to and detached from the lamp holder. In a protective cover device detachably attachable to a simple lamp, the glass tube portion is detachably covered by avoiding the connection portion of the one base to the lamp holder, and at least part of the glass tube portion is plastically deformed. A first cylindrical cover that is in contact with the second tubular cover that is elastically deformed in a reduced diameter direction and detachably attached to the glass tube portion and the plastic deformation portion of the first cylindrical cover; It is characterized by having.

上記ガラス管部が、上記電極を内蔵する発光管と、該発光管から互いに離間する方向に延びかつ上記口金にそれぞれ接続する一対の封止管と、を備え、上記第二筒状カバーが、一方の上記口金及び該口金に接続する一方の上記封止管に被さてもよい。   The glass tube portion includes an arc tube containing the electrode, and a pair of sealing tubes extending in directions away from the arc tube and connected to the base, respectively, and the second cylindrical cover includes: You may cover one said nozzle | cap | die and one said sealing pipe connected to this nozzle | cap | die.

上記第二筒状カバーが、上記一方の上記封止管の表面の８０％以上の領域に弾性変形しながら被さってもよい。   The second cylindrical cover may cover the region of 80% or more of the surface of the one sealing tube while being elastically deformed.

上記第二筒状カバーが、上記ランプの発光管の直接透過範囲の範囲外に位置した状態で、上記ガラス管部及び上記第一筒状カバーの上記塑性変形部に対して被さってもよい。   The second cylindrical cover may be placed on the glass tube portion and the plastic deformation portion of the first cylindrical cover in a state where the second cylindrical cover is located outside the direct transmission range of the arc tube of the lamp.

上記第一筒状カバーと上記第二筒状カバーの少なくとも一方が、一方の端部が閉じた筒状部材であってもよい。   At least one of the first cylindrical cover and the second cylindrical cover may be a cylindrical member with one end closed.

本発明のカバー装置付ランプは、上記ランプ用保護カバー装置と、上記ランプと、を備えることを特徴としている。   The lamp with a cover device according to the present invention includes the protective cover device for a lamp and the lamp.

本発明のランプのランプホルダに対する取り付け方法は、対の電極を内蔵するガラス管部及び該ガラス管部の両端部にそれぞれ接続する一対の口金を備えるランプの一方の上記口金のランプホルダに対する取り付け方法において、上記一方の口金の上記ランプホルダに対する接続部を避けながら、第一筒状カバーを上記ガラス管部に着脱可能に被せ、かつ上記第一筒状カバーの少なくとも一部を塑性変形させながら上記ガラス管部に対して接触させるステップ、上記ガラス管部及び上記第一筒状カバーの塑性変形部に対して、第二筒状カバーを縮径方向に弾性変形させながら着脱可能に被せるステップ、上記第二筒状カバーを上記ランプ及び上記第一筒状カバーから取り外すステップ、上記一方の口金を上記ランプホルダに接続するステップ、及び上記第一筒状カバーを上記ランプから取り外すステップを有することを特徴としている。   The method of attaching the lamp of the present invention to the lamp holder is a method of attaching one of the caps to the lamp holder of a lamp having a glass tube portion containing a pair of electrodes and a pair of caps connected to both ends of the glass tube portion. The first cylindrical cover is detachably covered on the glass tube part while avoiding the connection part of the one base to the lamp holder, and at least a part of the first cylindrical cover is plastically deformed. A step of contacting the glass tube portion, a step of detachably covering the plastic deformation portion of the glass tube portion and the first cylindrical cover while elastically deforming the second cylindrical cover in the reduced diameter direction, the above Removing the second cylindrical cover from the lamp and the first cylindrical cover; connecting the one base to the lamp holder; And the first cylindrical cover is characterized by a step of removing from the lamp.

第二筒状カバーをランプから取り外すと一方の口金の接続部が露出する。そのため、第一筒状カバーをランプに装着したまま、一方の口金の接続部をランプホルダに接続することが可能である。
また、第二筒状カバーが弾性変形可能なので、第二筒状カバーをランプから容易に取り外すことが可能である。
さらに第二筒状カバーをランプから取り外した後も、第一筒状カバーの少なくとも一部が塑性変形しながらガラス管部に接触するので、（意図的に第一筒状カバーを引っ張らない限り）第一筒状カバーはガラス管部を覆い続ける。そのため、仮にランプのランプホルダへの取り付け作業中に、第一筒状カバー（のガラス管部を覆っている部分）がランプホルダの周辺に位置する周辺部材（例えばランプハウス）へ接触することによりガラス管部が破損したとしても、破損したガラス片が周囲に飛散するのを第一筒状カバーによって防ぐことが可能である。また、ガラス管部がランプホルダや上記周辺部材に接触することがないので、ガラス管部の表面に（小さな）傷が付いたり、ガラス管部の表面に異物が付着するおそれを低減できる。そのためランプを点灯させたときに、この傷や異物を起点としてガラス管部が破損するおそれを小さくすることが可能である。
さらに第一筒状カバーをランプに対して引っ張ると、第一筒状カバーの塑性変形部が拡径方向に変形してガラス管部から外周側に離間するので、第一筒状カバーをランプから容易に取り外すことが可能である。 When the second cylindrical cover is removed from the lamp, the connection portion of one base is exposed. Therefore, it is possible to connect the connection portion of one base to the lamp holder while the first cylindrical cover is attached to the lamp.
Further, since the second cylindrical cover can be elastically deformed, the second cylindrical cover can be easily detached from the lamp.
Furthermore, even after the second cylindrical cover is removed from the lamp, at least part of the first cylindrical cover comes into contact with the glass tube part while being plastically deformed (unless the first cylindrical cover is intentionally pulled). The first cylindrical cover continues to cover the glass tube portion. Therefore, when the lamp is attached to the lamp holder, the first cylindrical cover (the portion covering the glass tube portion) comes into contact with a peripheral member (for example, a lamp house) located around the lamp holder. Even if the glass tube portion is broken, the broken glass pieces can be prevented from being scattered around by the first cylindrical cover. In addition, since the glass tube portion does not contact the lamp holder or the peripheral member, it is possible to reduce the possibility that the surface of the glass tube portion will be damaged (small) or foreign matter may adhere to the surface of the glass tube portion. For this reason, when the lamp is turned on, it is possible to reduce the possibility that the glass tube portion will be damaged starting from the scratch or foreign matter.
Further, when the first cylindrical cover is pulled with respect to the lamp, the plastic deformation portion of the first cylindrical cover is deformed in the diameter increasing direction and separated from the glass tube portion to the outer peripheral side, so that the first cylindrical cover is separated from the lamp. It can be easily removed.

本発明を適用した一実施形態の放電ランプ、保護カバー装置、及び半導体用露光装置に内蔵させたランプハウスの正面図である。It is a front view of the lamp house built in the discharge lamp of one embodiment to which the present invention is applied, a protective cover device, and a semiconductor exposure device. 互いに分離した保護カバー装置と放電ランプの正面図である。It is a front view of the protective cover apparatus and discharge lamp which were mutually separated. 保護カバー装置を装着した放電ランプの正面図である。It is a front view of the discharge lamp equipped with the protective cover device. （ａ）は第二筒状カバーを放電ランプから取り外した様子を示す正面図であり、（ｂ）は放電ランプの一方の口金をランプホルダに接続した様子を示す正面図であり、（ｃ）は第一筒状カバーを放電ランプから取り外した様子を示す正面図である。(A) is a front view which shows a mode that the 2nd cylindrical cover was removed from the discharge lamp, (b) is a front view which shows a mode that one base of the discharge lamp was connected to the lamp holder, (c) FIG. 3 is a front view showing a state where a first cylindrical cover is removed from a discharge lamp. 発光管とその周辺部材の拡大断面図である。It is an expanded sectional view of an arc tube and its peripheral member. 本発明の変形例の保護カバー装置を装着した放電ランプの正面図である。It is a front view of the discharge lamp which mounted | wore with the protective cover apparatus of the modification of this invention. （ａ）は第二筒状カバーを放電ランプから取り外した様子を示す正面図であり、（ｂ）は放電ランプの一方の口金をランプホルダに接続した様子を示す正面図であり、（ｃ）は第一筒状カバーを放電ランプから取り外した様子を示す正面図である。(A) is a front view which shows a mode that the 2nd cylindrical cover was removed from the discharge lamp, (b) is a front view which shows a mode that one base of the discharge lamp was connected to the lamp holder, (c) FIG. 3 is a front view showing a state where a first cylindrical cover is removed from a discharge lamp.

以下、図１から図５を参照しながら本発明の一実施形態について説明する。
図２等に示す放電ランプ１０は、ガラス製のガラス管部１１と、ガラス管部１１の両端部に固定した第一口金１８及び第二口金１９と、を具備している。ガラス管部１１は、略球状をなす発光管１２と、発光管１２に対して互いに同軸状態で接続する一対の封止管１３（ステム）と、を一体的に具備している。発光管１２の内部空間には大気圧より高圧の希ガス（例えばＸｅガス、Ｋｒガス、Ａｒガスなど）、もしくは希ガスを主成分とした混合ガスが封入してある。なお、封入されている希ガス、もしくは希ガスを主成分とした混合ガスの圧力は大気圧以下であっても良い。また発光管１２の内部空間には一対の電極（１５および１６）が固定状態で配設してある。
一方の封止管１３の端部には第一口金１８が固定してあり、他方の封止管１３の端部には第二口金１９が固定してある。第一口金１８及び第二口金１９は共に金属（導電性材料）により構成したものであり、図示するように第一口金１８及び第二口金１９の外径は封止管１３の外径より大きい。ガラス管部１１の内部には第一口金１８と電極１５を接続する導電部材（図示略）と、第二口金１９と電極１６を接続する導電部材（図示略）が配設してある。 Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
A discharge lamp 10 shown in FIG. 2 and the like includes a glass tube portion 11 made of glass, and a first cap 18 and a second cap 19 fixed to both ends of the glass tube portion 11. The glass tube portion 11 is integrally provided with a substantially spherical arc tube 12 and a pair of sealing tubes 13 (stems) connected to the arc tube 12 in a coaxial state. The inner space of the arc tube 12 is filled with a rare gas (eg, Xe gas, Kr gas, Ar gas, etc.) higher than atmospheric pressure, or a mixed gas containing a rare gas as a main component. Note that the pressure of the enclosed rare gas or the mixed gas containing the rare gas as a main component may be equal to or lower than the atmospheric pressure. A pair of electrodes (15 and 16) are fixedly disposed in the inner space of the arc tube 12.
A first base 18 is fixed to the end of one sealing tube 13, and a second base 19 is fixed to the end of the other sealing tube 13. Both the first cap 18 and the second cap 19 are made of metal (conductive material), and the outer diameter of the first cap 18 and the second cap 19 is the outer diameter of the sealing tube 13 as shown in the figure. Greater than. A conductive member (not shown) for connecting the first base 18 and the electrode 15 and a conductive member (not shown) for connecting the second base 19 and the electrode 16 are disposed inside the glass tube portion 11.

放電ランプ１０に対して着脱可能な保護カバー装置２０は、第一筒状カバー２１と第二筒状カバー２３を具備している。
第一筒状カバー２１は、ある程度の大きさを加えたときに塑性を示す柔軟な材料（例えばポリエチレン）を原料とする薄膜（例えば厚さ０．０５ｍｍ以上かつ０．１５ｍｍ以下）により構成した、両端が開口する筒状部材である（図２参照）。第一筒状カバー２１の原料は弾性を有していても良いが、その場合は弾性限度（または降伏点）の小さいものを利用するのが好ましい。第一筒状カバー２１を円筒形状にしたときの第一筒状カバー２１の内径は発光管１２の中央部（最大径部）の外径より大きい。第一筒状カバー２１は無色透明であるのが好ましいが、有色であってもよい。また第一筒状カバー２１は通気性を有する膜材により構成してもよい。
第二筒状カバー２３は、弾性（伸縮性）を有する柔軟な材料（例えば高密度ポリエチレン、低密度ポリエチレン、ポリプロピレン等）を原料とする薄膜（例えば、厚さ０．５ｍｍ以上かつ１．５ｍｍ以下）により構成した、両端が開口する筒状部材である（図２参照）。自由状態にある第二筒状カバー２３を円筒形状にしたときの第二筒状カバー２３の内径は封止管１３の外径以下である。ただし第二筒状カバー２３を拡径方向に弾性変形させると、第二筒状カバー２３の内径は封止管１３、第一口金１８、及び第二口金１９の外径より大きくなる。また第二筒状カバー２３を網目状の薄膜により構成してもよい。 The protective cover device 20 that can be attached to and detached from the discharge lamp 10 includes a first cylindrical cover 21 and a second cylindrical cover 23.
The first cylindrical cover 21 is constituted by a thin film (for example, a thickness of 0.05 mm or more and 0.15 mm or less) made of a flexible material (for example, polyethylene) that exhibits plasticity when a certain size is added, It is a cylindrical member which both ends open (refer FIG. 2). The raw material of the first cylindrical cover 21 may have elasticity, but in that case, it is preferable to use a material having a small elastic limit (or yield point). The inner diameter of the first cylindrical cover 21 when the first cylindrical cover 21 is cylindrical is larger than the outer diameter of the central portion (maximum diameter portion) of the arc tube 12. The first cylindrical cover 21 is preferably colorless and transparent, but may be colored. Moreover, you may comprise the 1st cylindrical cover 21 with the film | membrane material which has air permeability.
The second cylindrical cover 23 is a thin film (for example, a thickness of 0.5 mm or more and 1.5 mm or less) made of a flexible material (for example, high density polyethylene, low density polyethylene, polypropylene, etc.) having elasticity (stretchability). ) And is a cylindrical member that is open at both ends (see FIG. 2). The inner diameter of the second cylindrical cover 23 when the second cylindrical cover 23 in the free state is cylindrical is equal to or smaller than the outer diameter of the sealing tube 13. However, when the second cylindrical cover 23 is elastically deformed in the diameter increasing direction, the inner diameter of the second cylindrical cover 23 becomes larger than the outer diameters of the sealing tube 13, the first base 18, and the second base 19. Moreover, you may comprise the 2nd cylindrical cover 23 with a mesh-shaped thin film.

図１及び図３に示すように、第一筒状カバー２１及び第二筒状カバー２３は放電ランプ１０に対して装着可能である。
一方の開口端部を通して第一筒状カバー２１の内部に放電ランプ１０を挿入し、第一筒状カバー２１の一方の端部を第一口金１８側の封止管１３の表面全体に被せる（第一口金１８には被せない）ことにより、第一筒状カバー２１を放電ランプ１０に対して装着可能である（図４（ｂ）参照）。
第二筒状カバー２３は、第一筒状カバー２１を装着した放電ランプ１０に対して装着可能である。即ち、外力を加えて内径が第一口金１８の外径より大きくなるまで弾性変形（拡径）させた第二筒状カバー２３の内部に第一口金１８及び（第一口金１８側の）封止管１３（第一筒状カバー２１の一部）を挿入した後に、第二筒状カバー２３に加えていた外力を除去することにより、第二筒状カバー２３を第一口金１８及び（第一口金１８側の）封止管１３（第一筒状カバー２１の一部）に被せることができる（図３参照）。
第二筒状カバー２３を第一口金１８及び封止管１３に被せた後も第二筒状カバー２３の外径は自由状態より大きいままなので、第一筒状カバー２１の封止管１３を覆う部分に対して第二筒状カバー２３の内面から力（弾性変形力）が及ぶ。すると第一筒状カバー２１の封止管１３を覆う部分が塑性変形し、この塑性変形部の内面から封止管１３に力が及ぶ。そのため、第一筒状カバー２１の塑性変形部と第一口金１８側の封止管１３全体の接触状態が確実に保持される。
このように放電ランプ１０を第一筒状カバー２１及び第二筒状カバー２３によって被覆するので、放電ランプ１０の運搬中に放電ランプ１０を床面に落下させたり壁等にぶつけた場合に、ガラス管部１１が破損したり、ガラス管部１１の表面に（小さな）傷が付くのを抑制できる。 As shown in FIGS. 1 and 3, the first cylindrical cover 21 and the second cylindrical cover 23 can be attached to the discharge lamp 10.
The discharge lamp 10 is inserted into the first cylindrical cover 21 through one open end, and one end of the first cylindrical cover 21 is placed over the entire surface of the sealing tube 13 on the first base 18 side. By not covering the first base 18, the first cylindrical cover 21 can be attached to the discharge lamp 10 (see FIG. 4B).
The second cylindrical cover 23 can be attached to the discharge lamp 10 to which the first cylindrical cover 21 is attached. That is, the first cap 18 and the first cap 18 side (the first cap 18 side) are elastically deformed (expanded) until the inner diameter becomes larger than the outer diameter of the first cap 18 by applying an external force. After the sealing tube 13 (a part of the first cylindrical cover 21) is inserted, the external force applied to the second cylindrical cover 23 is removed, so that the second cylindrical cover 23 is removed from the first base. 18 and the sealing tube 13 (on the first cap 18 side) (a part of the first cylindrical cover 21) (see FIG. 3).
Even after the second cylindrical cover 23 is placed on the first base 18 and the sealing tube 13, the outer diameter of the second cylindrical cover 23 remains larger than the free state, so the sealing tube 13 of the first cylindrical cover 21. A force (elastic deformation force) extends from the inner surface of the second cylindrical cover 23 to the portion covering the surface. Then, the portion covering the sealing tube 13 of the first cylindrical cover 21 is plastically deformed, and force is applied to the sealing tube 13 from the inner surface of the plastic deformation portion. Therefore, the contact state of the plastic deformation portion of the first cylindrical cover 21 and the entire sealing tube 13 on the first base 18 side is reliably maintained.
Since the discharge lamp 10 is covered with the first cylindrical cover 21 and the second cylindrical cover 23 in this way, when the discharge lamp 10 is dropped on the floor surface or hit against a wall or the like during transportation of the discharge lamp 10, It can suppress that the glass tube part 11 is damaged or the surface of the glass tube part 11 is damaged (small).

保護カバー装置２０が装着された放電ランプ１０は、半導体用露光装置（図示略）に内蔵させたランプハウス（取付対象）に対して装着可能である。このランプハウスは、ミラー３０と、ランプホルダ３４と、第一給電ケーブル３５と、第二給電ケーブル３６と、を具備している。すり鉢状（縦断面形状は楕円形）のミラー３０の下端には下端開口３１が形成してあり、ミラー３０の上端には下端開口３１より大径の上端開口３２が形成してある。ランプホルダ３４は、ミラー３０の直上に固定状態で配設してある。第一給電ケーブル３５の一端は電源（直流電源、又は交流電源）の一方の電極に接続しており、第一給電ケーブル３５の他端はランプホルダ３４に接続している。
放電ランプ１０を上記ランプハウスに取り付ける際は、まず第二筒状カバー２３を放電ランプ１０に対して第二口金１９と反対側に引っ張って、第二筒状カバー２３を第一口金１８及び封止管１３から取り外す（図４（ａ）参照）。
第二筒状カバー２３を放電ランプ１０から取り外すと、図４（ｂ）に示すように第一口金１８が露出する。また第二筒状カバー２３を放電ランプ１０から取り外した後も、第一筒状カバー２１の上部は塑性変形状態を維持し、この塑性変形部の少なくとも一部が第一口金１８側の封止管１３の表面に接触し続けるので、第一筒状カバー２１の放電ランプ１０に対する仮固定状態が維持される。放電ランプ１０と第一筒状カバー２１の一体物は、第一口金１８側を上方に位置させた状態でミラー３０の下方から下端開口３１を通してミラー３０の内部空間に挿入可能であり、第一口金１８の上端面（接続部）をランプホルダ３４に対して接続できる。放電ランプ１０の上端面をランプホルダ３４に接続すると、第一口金１８と第一給電ケーブル３５がランプホルダ３４を介して電気的に導通可能となり、さらに図１に示すように第二口金１９及び第一筒状カバー２１の下端部（第二口金１９の周囲に位置する部分）が下端開口３１の下方に位置する。 The discharge lamp 10 to which the protective cover device 20 is attached can be attached to a lamp house (attachment target) built in a semiconductor exposure apparatus (not shown). The lamp house includes a mirror 30, a lamp holder 34, a first power supply cable 35, and a second power supply cable 36. A lower end opening 31 is formed at the lower end of a mortar-like (longitudinal section is oval) mirror 30, and an upper end opening 32 having a larger diameter than the lower end opening 31 is formed at the upper end of the mirror 30. The lamp holder 34 is disposed in a fixed state immediately above the mirror 30. One end of the first power supply cable 35 is connected to one electrode of a power supply (DC power supply or AC power supply), and the other end of the first power supply cable 35 is connected to the lamp holder 34.
When the discharge lamp 10 is attached to the lamp house, first, the second cylindrical cover 23 is first pulled to the opposite side of the second base 19 with respect to the discharge lamp 10, and the second cylindrical cover 23 is attached to the first base 18 and It removes from the sealing pipe | tube 13 (refer Fig.4 (a)).
When the second cylindrical cover 23 is removed from the discharge lamp 10, the first base 18 is exposed as shown in FIG. Even after the second cylindrical cover 23 is removed from the discharge lamp 10, the upper portion of the first cylindrical cover 21 remains in a plastically deformed state, and at least a part of the plastically deformed portion is sealed on the first base 18 side. Since it keeps contacting the surface of the stop tube 13, the temporarily fixed state with respect to the discharge lamp 10 of the 1st cylindrical cover 21 is maintained. The integrated unit of the discharge lamp 10 and the first cylindrical cover 21 can be inserted into the internal space of the mirror 30 from the lower side of the mirror 30 through the lower end opening 31 with the first base 18 side positioned upward. The upper end surface (connecting portion) of the mouthpiece 18 can be connected to the lamp holder 34. When the upper end surface of the discharge lamp 10 is connected to the lamp holder 34, the first base 18 and the first power supply cable 35 can be electrically connected via the lamp holder 34. Further, as shown in FIG. And the lower end part (portion located around the second base 19) of the first cylindrical cover 21 is located below the lower end opening 31.

このようにして放電ランプ１０をランプハウスに接続したら、第一筒状カバー２１の下端部を手で掴みながら第一筒状カバー２１全体を下向きに引っ張る。すると第一筒状カバー２１の上部（第一口金１８側の封止管１３を被覆している塑性変形部）が拡径方向に塑性変形するので、第一筒状カバー２１の上部が第一口金１８側の封止管１３から外周側に離れる。そして第一筒状カバー２１の上端部が発光管１２の中央部（最大径部）より下方に移動すると（図４（ｃ）参照）、第一筒状カバー２１は重力に従って下方へ移動し、下端開口３１を通ってミラー３０の下方に落下する。
第一筒状カバー２１を放電ランプ１０の表面から取り外したら、放電ランプ１０の第二口金１９に第二給電ケーブル３６の一端を接続し、さらに第二給電ケーブル３６の他端を上記電源の他方の電極に接続する。 When the discharge lamp 10 is connected to the lamp house in this way, the entire first cylindrical cover 21 is pulled downward while grasping the lower end portion of the first cylindrical cover 21 by hand. Then, since the upper part of the first cylindrical cover 21 (plastic deformation part covering the sealing tube 13 on the first base 18 side) is plastically deformed in the diameter increasing direction, the upper part of the first cylindrical cover 21 is It leaves | separates from the sealing pipe | tube 13 by the side of the nozzle | cap | die 18 to the outer peripheral side. And if the upper end part of the 1st cylindrical cover 21 moves below from the center part (maximum diameter part) of the arc_tube | light_emitting_tube 12 (refer FIG.4 (c)), the 1st cylindrical cover 21 will move below according to gravity, It falls below the mirror 30 through the lower end opening 31.
When the first cylindrical cover 21 is removed from the surface of the discharge lamp 10, one end of the second power supply cable 36 is connected to the second base 19 of the discharge lamp 10, and the other end of the second power supply cable 36 is connected to the other end of the power source. Connect to the electrode.

このようにして放電ランプ１０から保護カバー装置２０を取り外した後に、半導体用露光装置に設けたＯＮ／ＯＦＦ制御スイッチをＯＮ状態に切り換えると、電極１５と電極１６の間で放電が発生し放電ランプ１０が点灯する。すると放電ランプ１０から出射された光がミラー３０によって上方に反射され、上端開口３２及び上端開口３２の上方に配置した光学系（図示略）を通り抜けて半導体（図示略）の表面に照射されるので、半導体の表面に所望パターンの回路が形成される。
一方、ＯＮ／ＯＦＦ制御スイッチをＯＦＦ状態に切り換えれば放電ランプ１０が消灯する。 After the protective cover device 20 is removed from the discharge lamp 10 in this way, when the ON / OFF control switch provided in the semiconductor exposure apparatus is switched to the ON state, a discharge occurs between the electrode 15 and the electrode 16 and the discharge lamp 10 lights up. Then, the light emitted from the discharge lamp 10 is reflected upward by the mirror 30, passes through the upper end opening 32 and the optical system (not shown) disposed above the upper end opening 32, and is irradiated onto the surface of the semiconductor (not shown). Therefore, a circuit having a desired pattern is formed on the surface of the semiconductor.
On the other hand, when the ON / OFF control switch is switched to the OFF state, the discharge lamp 10 is turned off.

以上説明したように本実施形態では、ガラス管部１１及び第二口金１９を第一筒状カバー２１で覆ったまま放電ランプ１０を取付対象であるランプハウス（ランプホルダ３４）に取り付けることが可能である。
さらに第二筒状カバー２３を放電ランプ１０から取り外した後も第一筒状カバー２１の上部（塑性変形部）が第一口金１８側の封止管１３に接触し続けるので（第一筒状カバー２１の放電ランプ１０に対する装着状態が維持されるので）、仮に放電ランプ１０のランプハウスへの取り付け作業中に、第一筒状カバー２１（の発光管１２を覆っている部分）がミラー３０へ接触することにより発光管１２が破損したとしても、破損したガラス片が周囲に飛散するのを第一筒状カバー２１によって防ぐことが可能である。また、発光管１２がミラー３０に接触することがないので、発光管１２の表面に（小さな）傷が付いたり、発光管１２の表面に異物が付着するおそれを低減できる。そのため放電ランプ１０を点灯させたときに、この傷や異物を起点として発光管１２が破損するおそれを小さくすることが可能である。
さらに、第一筒状カバー２１の下端部がミラー３０の下端開口３１の下方に位置するので、ランプホルダ３４に接続した放電ランプ１０から第一筒状カバー２１を容易に取り外すことができる。 As described above, in this embodiment, the discharge lamp 10 can be attached to the lamp house (lamp holder 34) to be attached while the glass tube portion 11 and the second base 19 are covered with the first cylindrical cover 21. It is.
Furthermore, even after the second cylindrical cover 23 is removed from the discharge lamp 10, the upper portion (plastic deformation portion) of the first cylindrical cover 21 continues to contact the sealing tube 13 on the first base 18 side (first cylinder). Since the mounting state of the cylindrical cover 21 to the discharge lamp 10 is maintained), the first cylindrical cover 21 (the portion covering the arc tube 12) is mirrored during the mounting operation of the discharge lamp 10 to the lamp house. Even if the arc tube 12 is damaged by contact with 30, the first cylindrical cover 21 can prevent the broken glass pieces from being scattered around. In addition, since the arc tube 12 does not come into contact with the mirror 30, it is possible to reduce the possibility that the surface of the arc tube 12 is damaged (small) or foreign matter adheres to the surface of the arc tube 12. For this reason, when the discharge lamp 10 is turned on, it is possible to reduce the possibility of the arc tube 12 being damaged starting from this scratch or foreign matter.
Furthermore, since the lower end portion of the first cylindrical cover 21 is located below the lower end opening 31 of the mirror 30, the first cylindrical cover 21 can be easily removed from the discharge lamp 10 connected to the lamp holder 34.

さらに筒状部材からなる第一筒状カバー２１は、放電ランプ１０から取り外したときに第一筒状カバー２１からほぼ真下に向かって落下するので、落下時に第一筒状カバー２１がミラー３０に接触する可能性は低い。そのため、ミラー３０に傷やクラックが生じたり、ミラー３０に異物が付着するおそれは殆どない。   Further, since the first cylindrical cover 21 made of a cylindrical member falls from the first cylindrical cover 21 almost directly downward when being removed from the discharge lamp 10, the first cylindrical cover 21 falls on the mirror 30 when dropped. The possibility of contact is low. Therefore, there is almost no possibility that the mirror 30 is scratched or cracked, or that foreign matter adheres to the mirror 30.

さらに放電ランプ１０に第一筒状カバー２１を被せたときに、第一筒状カバー２１の下部が第二口金１９を覆いかつ下端開口３１の下方に位置する。そのため放電ランプ１０をランプハウスに取り付ける作業者は、放電ランプ１０のランプハウスへの取付作業が完了したときに、まだ保護カバー装置２０が放電ランプ１０に装着されたままであることを容易に認識できる。従って、保護カバー装置２０を放電ランプ１０に装着したまま放電ランプ１０を点灯させてしまい、放電ランプ１０が発生する熱によって第一筒状カバー２１が溶けてガラス管部１１の表面に付着する（さらに、付着することによりガラス管部１１の破裂等を誘因する）リスクを低減できる。   Further, when the discharge tube 10 is covered with the first cylindrical cover 21, the lower portion of the first cylindrical cover 21 covers the second base 19 and is positioned below the lower end opening 31. Therefore, an operator who attaches the discharge lamp 10 to the lamp house can easily recognize that the protective cover device 20 is still attached to the discharge lamp 10 when the operation of attaching the discharge lamp 10 to the lamp house is completed. . Accordingly, the discharge lamp 10 is turned on while the protective cover device 20 is mounted on the discharge lamp 10, and the first cylindrical cover 21 is melted by the heat generated by the discharge lamp 10 and adheres to the surface of the glass tube portion 11 ( Furthermore, the risk of causing the glass tube portion 11 to rupture or the like by adhering can be reduced.

放電ランプ１０の照明光は電極間での放電による発光の中心（以下、輝点）から放射される。電源が直流電源の場合は、陰極の先端部が輝点となることから、電極１５の先端部もしくは電極１６の先端部が輝点となる。輝点から放射される照明光の一部は、電極によって遮光されるか、もしくは電極の表面で反射する。その為、放電ランプ１０の外部へ放射される照明光の主な発光管透過範囲は、輝点を中心として電極１５、１６によって遮光及び反射されずに、輝点から照明光が直接発光管１２を透過する範囲（以下、直接透過範囲）となる。したがって、陰極が電極１５の場合は、輝点は電極１５の先端部となり、発光管１２の直接透過範囲は図５のＡに示す通りとなる。即ち、電極１５の先端部が輝点となる場合は、照明光は主に発光管１２の一部を透過することになる。同様に陰極が電極１６の場合は、発光管１２の直接透過範囲は図５のＢに示す通りとなる。
また電源が交流電源の場合は極性（陰極および陽極）が絶えず変化する為、電極１５の先端部と電極１６の先端部が交互に輝点となり、発光管１２の直接透過範囲は図５のＣに示す通りとなる。この場合も照明光は発光管１２全体及び封止管１３を透過するのではなく発光管１２の一部を主に透過することになる。
第一筒状カバー２１が接触圧力を伴った状態でガラス管部１１の表面に密着すると、第一筒状カバー２１をガラス管部１１から取り外すときに、第一筒状カバー２１の内面の成分が剥離してガラス管部１１の表面に付着することが知られている。しかし本実施形態では第二筒状カバー２３を発光管１２に被せていないので、（第一口金１８側の封止管１３の表面に第一筒状カバー２１の内面の成分が付着するおそれはあるものの）発光管１２の表面に第一筒状カバー２１の内面の成分が付着するおそれはない。
そのため、電源の種類に拘わらず、仮に第一口金１８側の封止管１３の表面に第一筒状カバー２１の内面の成分が付着したとしても、放電ランプ１０が点灯したときに発光管１２の一部が失透する（照明光が上記付着成分によって透過不能になる）ことはなく、この付着成分は照明光の光量に影響を与えない。 The illumination light of the discharge lamp 10 is radiated from the center of light emission (hereinafter referred to as “bright spot”) due to discharge between the electrodes. When the power source is a direct current power source, the tip of the cathode is a bright spot, so the tip of the electrode 15 or the tip of the electrode 16 is a bright spot. Part of the illumination light emitted from the bright spot is shielded by the electrode or reflected by the surface of the electrode. Therefore, the main arc tube transmission range of the illumination light radiated to the outside of the discharge lamp 10 is not shielded and reflected by the electrodes 15 and 16 around the bright spot, but the illumination light is directly emitted from the bright spot. Is a range that transmits light (hereinafter referred to as a direct transmission range). Therefore, when the cathode is the electrode 15, the bright spot is the tip of the electrode 15, and the direct transmission range of the arc tube 12 is as shown in FIG. That is, when the tip portion of the electrode 15 becomes a bright spot, the illumination light is mainly transmitted through a part of the arc tube 12. Similarly, when the cathode is the electrode 16, the direct transmission range of the arc tube 12 is as shown in FIG.
When the power source is an AC power source, the polarity (cathode and anode) constantly changes, so that the tip of the electrode 15 and the tip of the electrode 16 alternately become bright spots, and the direct transmission range of the arc tube 12 is shown in FIG. It becomes as shown in. Also in this case, the illumination light does not pass through the entire arc tube 12 and the sealing tube 13 but mainly through a part of the arc tube 12.
When the first cylindrical cover 21 is brought into close contact with the surface of the glass tube portion 11 with a contact pressure, components of the inner surface of the first cylindrical cover 21 are removed when the first cylindrical cover 21 is removed from the glass tube portion 11. Is known to peel off and adhere to the surface of the glass tube portion 11. However, in this embodiment, since the second cylindrical cover 23 is not covered with the arc tube 12, (the component of the inner surface of the first cylindrical cover 21 adheres to the surface of the sealing tube 13 on the first base 18 side). There is no possibility that components on the inner surface of the first cylindrical cover 21 will adhere to the surface of the arc tube 12.
Therefore, regardless of the type of power source, even if the components on the inner surface of the first cylindrical cover 21 adhere to the surface of the sealing tube 13 on the first base 18 side, the arc tube when the discharge lamp 10 is turned on. Part of 12 is not devitrified (the illumination light cannot be transmitted by the attached component), and this attached component does not affect the amount of illumination light.

以上、上記実施形態を利用して本発明を説明したが、本発明は様々な変形を施しながら実施可能である。
例えば、図６から図７に示す変形例の態様で実施してもよい。
この変形例の保護カバー装置２４は第一筒状カバー２５と第二筒状カバー２７を具備している。第一筒状カバー２５は、その全長が第一筒状カバー２１より僅かに長く、かつ、その一端（図６、図７の下端）が閉じている。また第二筒状カバー２７は、その全長が第二筒状カバー２３より僅かに長く、かつ、その一端（図６、図７の上端）が閉じている。
第一筒状カバー２５は、図６、及び図７（ａ）（ｂ）に示す態様で放電ランプ１０に装着可能である。図示するように第一筒状カバー２５の上端は第一口金１８の下部にまで及んでいる。第一筒状カバー２５の第一口金１８及び第一口金１８側の封止管１３を被覆する部分は縮径方向に塑性変形させてあり、かつ第一口金１８及び第一口金１８側の封止管１３に接触圧を及ぼしている。また、第一筒状カバー２５の第二口金１９を被覆する部分も縮径方向に塑性変形させてあり、さらに当該部分の表面に設けた縮径状態保持手段（図示略。例えば、当該部分の表面に貼り付けた粘着テープ等）によって塑性変形状態が保持されている。そのため第一筒状カバー２５の第二口金１９を被覆する部分から第二口金１９に対して接触圧が及んでいる。一方、第一筒状カバー２５の発光管１２を被覆する部分も縮径方向に塑性変形させてあり、さらに当該部分の表面に設けた縮径状態保持手段（図示略。例えば、当該部分の表面に貼り付けた粘着テープ等）によって塑性変形状態が保持されている。但し、第一筒状カバー２５の当該部分は発光管１２の表面に接触していないか、又は、極めて小さい接触圧を及ぼしながら発光管１２の表面に接触する。このようにして第一筒状カバー２５を放電ランプ１０に装着すると、第一筒状カバー２５の上部と下部から放電ランプ１０に対して接触圧が及ぶので、第一筒状カバー２５の放電ランプ１０に対する装着状態が保持される（放電ランプ１０に仮固定される）。
第二筒状カバー２７は、図６に示す態様で放電ランプ１０に装着可能である。図示するように第二筒状カバー２７の下端は第一口金１８側の封止管１３の下端を超えて発光管１２の上部にまで及んでいる。但し第二筒状カバー２７の下端は発光管１２の直接透過範囲外に位置している。そのため、第一筒状カバー２５の封止管１３及び発光管１２の上部を覆う部分に対して第二筒状カバー２７の内面から力（弾性変形力）が及び、さらに第一筒状カバー２５の当該部分の内面から封止管１３及び発光管１２に力が及ぶ。従って、第一筒状カバー２５の当該部分と封止管１３及び発光管１２の上部との接触状態が確実に保持される。
このよう第一筒状カバー２５及び第二筒状カバー２７によって放電ランプ１０全体を被覆するので、放電ランプ１０の運搬中に放電ランプ１０を床面に落下させたり壁等にぶつけた場合に、ガラス管部１１が破損したり、ガラス管部１１の表面に（小さな）傷が付くのを、上記実施形態と比べてより効果的に抑制できる。 As mentioned above, although this invention was demonstrated using the said embodiment, this invention can be implemented, giving various deformation | transformation.
For example, you may implement in the aspect of the modification shown in FIGS.
The protective cover device 24 of this modification includes a first cylindrical cover 25 and a second cylindrical cover 27. The overall length of the first cylindrical cover 25 is slightly longer than that of the first cylindrical cover 21, and one end thereof (the lower end in FIGS. 6 and 7) is closed. The second cylindrical cover 27 is slightly longer in length than the second cylindrical cover 23, and one end thereof (the upper end in FIGS. 6 and 7) is closed.
The first cylindrical cover 25 can be attached to the discharge lamp 10 in the manner shown in FIGS. 6 and 7A and 7B. As shown in the drawing, the upper end of the first cylindrical cover 25 extends to the lower part of the first base 18. The portions of the first cylindrical cover 25 that cover the first cap 18 and the sealing tube 13 on the first cap 18 side are plastically deformed in the diameter reducing direction, and the first cap 18 and the first cap A contact pressure is exerted on the sealing tube 13 on the 18th side. Further, the portion of the first cylindrical cover 25 that covers the second base 19 is also plastically deformed in the direction of diameter reduction, and further, the diameter-reducing state holding means (not shown, for example, of the portion) provided on the surface of the portion. The plastic deformation state is maintained by an adhesive tape or the like affixed to the surface. Therefore, contact pressure is applied to the second base 19 from the portion of the first cylindrical cover 25 that covers the second base 19. On the other hand, the portion of the first cylindrical cover 25 that covers the arc tube 12 is also plastically deformed in the direction of diameter reduction, and is further provided with a reduced diameter state holding means (not shown; for example, the surface of the portion) provided on the surface of the portion. The plastic deformation state is maintained by an adhesive tape or the like affixed to the surface. However, the portion of the first cylindrical cover 25 is not in contact with the surface of the arc tube 12 or is in contact with the surface of the arc tube 12 while exerting a very small contact pressure. When the first cylindrical cover 25 is thus attached to the discharge lamp 10, contact pressure is applied to the discharge lamp 10 from the upper and lower portions of the first cylindrical cover 25, so that the discharge lamp of the first cylindrical cover 25 10 is held (temporarily fixed to the discharge lamp 10).
The second cylindrical cover 27 can be attached to the discharge lamp 10 in the manner shown in FIG. As shown in the figure, the lower end of the second cylindrical cover 27 extends beyond the lower end of the sealing tube 13 on the first base 18 side to the upper portion of the arc tube 12. However, the lower end of the second cylindrical cover 27 is located outside the direct transmission range of the arc tube 12. Therefore, a force (elastic deformation force) is applied from the inner surface of the second cylindrical cover 27 to the portion of the first cylindrical cover 25 that covers the upper portion of the sealing tube 13 and the arc tube 12, and further, the first cylindrical cover 25. The force reaches the sealing tube 13 and the arc tube 12 from the inner surface of the portion. Therefore, the contact state between the portion of the first cylindrical cover 25 and the upper portions of the sealing tube 13 and the arc tube 12 is reliably maintained.
Since the first cylindrical cover 25 and the second cylindrical cover 27 cover the entire discharge lamp 10 as described above, when the discharge lamp 10 is dropped on the floor surface or hit against a wall or the like during transportation of the discharge lamp 10, It can suppress more effectively compared with the said embodiment that the glass tube part 11 is damaged, or a (small) damage | wound is attached to the surface of the glass tube part 11. FIG.

本変形例の放電ランプ１０を上記ランプハウスに取り付ける際は、まず第二筒状カバー２７を第二口金１９と反対側に引っ張って、第二筒状カバー２７を第一口金１８から取り外す（図７（ａ）参照）。
第二筒状カバー２３を放電ランプ１０から取り外すと、図７（ｂ）に示すように第一口金１８の上部が露出する。また第二筒状カバー２７を放電ランプ１０から取り外した後も、第一筒状カバー２５の上部は塑性変形状態を維持したまま第一口金１８、第一口金１８側の封止管１３、及び発光管１２の上部に接触し続け、かつ、第一筒状カバー２５の下部から第二口金１９に対して接触圧が及び続けるので、第一筒状カバー２５の放電ランプ１０に対する仮固定状態が維持される。放電ランプ１０と第一筒状カバー２５の一体物は、第一口金１８側を上方に位置させた状態でミラー３０の下方から下端開口３１を通してミラー３０の内部空間に挿入可能であり、第一口金１８の上部をランプホルダ３４に対して接続できる。第一口金１８の上端面（接続部）をランプホルダ３４に固定すると、第一筒状カバー２５の下端部（第二口金１９の周囲に位置する部分）がミラー３０の下端開口３１の下方に位置する（図示略）。
このようにして放電ランプ１０をランプハウスに接続したら、第一筒状カバー２５の下端部を手で掴みながら第一筒状カバー２５全体を下向きに引っ張る。すると第一筒状カバー２５の中央部（発光管１２を被覆する部分）と下部（第二口金１９を被覆する部分）に設けた上記縮径状態保持手段による当該中央部及び下部の塑性変形状態の保持状態が解除され、当該中央部及び下部が拡径方向に塑性変形して放電ランプ１０から外周側に離間する。さらに第一筒状カバー２５の上部（第一口金１８、第一口金１８側の封止管１３、及び発光管１２の上部を被覆している部分）が拡径方向に塑性変形して放電ランプ１０から外周側に離れる。そして第一筒状カバー２５の上端部が発光管１２の中央部（最大径部）より下方に移動すると（図７（ｃ）参照）、第一筒状カバー２５は重力に従って下方へ移動し、下端開口３１を通ってミラー３０の下方に落下する。
従って、この後に上記実施形態と同じ要領によって放電ランプ１０を電源（直流電源、又は交流電源）に対して接続し、放電ランプ１０を点灯及び消灯させることが可能である。 When the discharge lamp 10 of this modification is attached to the lamp house, first, the second cylindrical cover 27 is pulled to the opposite side of the second base 19 to remove the second cylindrical cover 27 from the first base 18 ( FIG. 7 (a)).
When the second cylindrical cover 23 is removed from the discharge lamp 10, the upper portion of the first base 18 is exposed as shown in FIG. Further, even after the second cylindrical cover 27 is removed from the discharge lamp 10, the upper portion of the first cylindrical cover 25 is maintained in a plastically deformed state, and the first cap 18 and the sealing tube 13 on the first cap 18 side. Since the contact pressure continues to be applied to the second base 19 from the lower part of the first cylindrical cover 25, the first cylindrical cover 25 is temporarily fixed to the discharge lamp 10. State is maintained. The integrated unit of the discharge lamp 10 and the first cylindrical cover 25 can be inserted into the internal space of the mirror 30 from the lower side of the mirror 30 through the lower end opening 31 with the first base 18 side positioned upward. The upper part of the base 18 can be connected to the lamp holder 34. When the upper end surface (connecting portion) of the first base 18 is fixed to the lamp holder 34, the lower end portion of the first cylindrical cover 25 (the portion located around the second base 19) is below the lower end opening 31 of the mirror 30. (Not shown).
When the discharge lamp 10 is connected to the lamp house in this manner, the entire first cylindrical cover 25 is pulled downward while grasping the lower end portion of the first cylindrical cover 25 by hand. Then, the plastic deformation state of the central part and the lower part by the reduced diameter holding means provided in the central part (part covering the arc tube 12) and the lower part (part covering the second cap 19) of the first cylindrical cover 25. Is released, and the central portion and the lower portion are plastically deformed in the diameter-expanding direction and separated from the discharge lamp 10 toward the outer peripheral side. Further, the upper portion of the first cylindrical cover 25 (the portion covering the first cap 18, the sealing tube 13 on the first cap 18 side, and the upper portion of the arc tube 12) is plastically deformed in the diameter increasing direction. It leaves | separates from the discharge lamp 10 to an outer peripheral side. When the upper end portion of the first cylindrical cover 25 moves downward from the central portion (maximum diameter portion) of the arc tube 12 (see FIG. 7C), the first cylindrical cover 25 moves downward according to gravity, It falls below the mirror 30 through the lower end opening 31.
Therefore, after that, the discharge lamp 10 can be connected to a power source (DC power source or AC power source) in the same manner as in the above embodiment, and the discharge lamp 10 can be turned on and off.

この変形例の発明は上記実施形態と同様の作用効果を発揮可能であり、さらに以下に説明する特別な作用効果を発揮可能である。
即ち、第一筒状カバー２５の中央部（発光管１２を被覆する部分）と下部（第二口金１９を被覆する部分）を上記縮径状態保持手段によって放電ランプ１０の外形にほぼ沿った形状にしているので、発光管１２の中央部（最大径部）の外径とミラー３０の下端開口３１の径の間に殆ど差がない場合であっても、第一筒状カバー２５を装着した放電ランプ１０を下端開口３１からミラー３０の内部へ円滑に挿入できる。
また第一口金１８は封止管１３より外径が大きいため、第二筒状カバー２７から封止管１３に及ぶ接触圧よりも第二筒状カバー２７から第一口金１８に及ぶ接触圧の方が大きい。そのため第一筒状カバー２５は封止管１３よりも第一口金１８に対してより強い接触圧で接触する。さらに第一筒状カバー２５の上部及び下部を放電ランプ１０に対して塑性変形させながら接触させている。そのため第二筒状カバー２７を放電ランプ１０から取り外した後における第一筒状カバー２５の放電ランプ１０に対する仮固定状態が、上記実施形態より安定する。
さらに第一筒状カバー２５の上部及び下部を放電ランプ１０に対して接触させた状態で第二筒状カバー２７を放電ランプ１０に被せるので、第二筒状カバー２７を放電ランプ１０に被せるときに第一筒状カバー２５の放電ランプ１０に対する仮固定位置がずれるおそれが小さい。 The invention of this modification can exhibit the same operational effects as the above-described embodiment, and can exhibit the special operational effects described below.
That is, the central portion (the portion covering the arc tube 12) and the lower portion (the portion covering the second base 19) of the first cylindrical cover 25 are shaped substantially along the outer shape of the discharge lamp 10 by the reduced diameter state holding means. Therefore, even when there is almost no difference between the outer diameter of the central portion (maximum diameter portion) of the arc tube 12 and the diameter of the lower end opening 31 of the mirror 30, the first cylindrical cover 25 is mounted. The discharge lamp 10 can be smoothly inserted into the mirror 30 from the lower end opening 31.
Further, since the first base 18 has an outer diameter larger than that of the sealing tube 13, the contact from the second cylindrical cover 27 to the first base 18 is higher than the contact pressure from the second cylindrical cover 27 to the sealing tube 13. The pressure is greater. Therefore, the first cylindrical cover 25 contacts the first base 18 with a stronger contact pressure than the sealing tube 13. Further, the upper and lower portions of the first cylindrical cover 25 are brought into contact with the discharge lamp 10 while being plastically deformed. Therefore, the temporarily fixed state with respect to the discharge lamp 10 of the 1st cylindrical cover 25 after removing the 2nd cylindrical cover 27 from the discharge lamp 10 is more stable than the said embodiment.
Further, since the second cylindrical cover 27 is put on the discharge lamp 10 with the upper and lower portions of the first cylindrical cover 25 being in contact with the discharge lamp 10, the second cylindrical cover 27 is put on the discharge lamp 10. Further, there is little possibility that the temporarily fixed position of the first cylindrical cover 25 with respect to the discharge lamp 10 is shifted.

また第一口金１８の上端面（ランプホルダ３４に対する接続部）を第二筒状カバー２７で覆うので、放電ランプ１０の運搬中に第一口金１８の上端面が傷ついたり変形するおそれは小さい。仮に第一口金１８の上端面（接続部）が傷ついたり変形すると、第一口金１８の上端面をランプホルダ３４に接続したときに第一口金１８の上端面とランプホルダ３４の間に隙間が生じ、互いに離間した第一口金１８の上端面とランプホルダ３４の間でスパークが発生して、第一口金１８とランプホルダ３４が破損するおそれがある。しかし、本変形例ではこのような不具合が発生するおそれを抑制できる。
さらに発光管１２と封止管１３の境界部及びその周辺部は、ガラス管部１１の径が急速に変化する部位であり、発光管１２や封止管１３と比較して機械的強度が低いため、他の物（例えばミラー３０等）と接触したときに破損しやすい。しかし第二筒状カバー２７を放電ランプ１０に被せたときに発光管１２と封止管１３の境界部及びその周辺部を第一筒状カバー２５及び第二筒状カバー２７が二重に覆うので、ガラス管部１１の当該部分が破損するおそれを小さくすることが可能である。
さらに第一筒状カバー２５が第二口金１９の下端面を覆い、かつ第二筒状カバー２７が第一口金１８の上端面を覆うので、第一筒状カバー２５及び第二筒状カバー２７を放電ランプ１０から取り外さない限り、放電ランプ１０をランプホルダ３４に接続しかつ第二口金１９に第二給電ケーブル３６を接続することが出来ない。従って、第一筒状カバー２５及び第二筒状カバー２７を放電ランプ１０から取り外さなければ放電ランプ１０を点灯させることが出来ないので、第一筒状カバー２５及び第二筒状カバー２７を放電ランプ１０に装着したまま放電ランプ１０を点灯させてしまい、放電ランプ１０が発生する熱によって第一筒状カバー２５や第二筒状カバー２７を溶かしてガラス管部１１の表面に付着させてしまう（さらに、付着することによりガラス管部１１の破裂等を誘因する）リスクを無くすことが出来る。 Further, since the upper end surface of the first base 18 (connecting portion to the lamp holder 34) is covered with the second cylindrical cover 27, there is a possibility that the upper end surface of the first base 18 may be damaged or deformed during the transportation of the discharge lamp 10. small. If the upper end surface (connection portion) of the first base 18 is damaged or deformed, the upper end surface of the first base 18 and the lamp holder 34 are connected when the upper end surface of the first base 18 is connected to the lamp holder 34. There is a possibility that a gap is generated between the upper end surface of the first base 18 and the lamp holder 34 which are separated from each other, and the first base 18 and the lamp holder 34 are damaged. However, in this modification, it is possible to suppress the possibility that such a problem occurs.
Further, the boundary between the arc tube 12 and the sealing tube 13 and its peripheral portion are portions where the diameter of the glass tube portion 11 changes rapidly, and the mechanical strength is lower than that of the arc tube 12 and the sealing tube 13. Therefore, it easily breaks when it comes into contact with another object (for example, the mirror 30). However, when the second cylindrical cover 27 is put on the discharge lamp 10, the first cylindrical cover 25 and the second cylindrical cover 27 doubly cover the boundary portion between the arc tube 12 and the sealing tube 13 and its peripheral portion. Therefore, it is possible to reduce the possibility that the portion of the glass tube portion 11 is damaged.
Further, since the first cylindrical cover 25 covers the lower end surface of the second base 19 and the second cylindrical cover 27 covers the upper end surface of the first base 18, the first cylindrical cover 25 and the second cylindrical cover are covered. Unless 27 is removed from the discharge lamp 10, the discharge lamp 10 cannot be connected to the lamp holder 34 and the second feeder cable 36 cannot be connected to the second base 19. Therefore, since the discharge lamp 10 cannot be lit unless the first cylindrical cover 25 and the second cylindrical cover 27 are removed from the discharge lamp 10, the first cylindrical cover 25 and the second cylindrical cover 27 are discharged. The discharge lamp 10 is turned on while being mounted on the lamp 10, and the first cylindrical cover 25 and the second cylindrical cover 27 are melted and adhered to the surface of the glass tube portion 11 by the heat generated by the discharge lamp 10. Further, it is possible to eliminate the risk of causing the glass tube portion 11 to rupture due to adhesion.

また、第一筒状カバー２１を第一口金１８に被せたり、第一筒状カバー２１を第二口金１９に被せないようにしてもよい。また第一筒状カバー２５を第一口金１８に被せないようにしてもよい。
また第二筒状カバー２３を第一口金１８に被せずに、ガラス管部１１のみに被せてもよい。
また第一筒状カバー２１、２５を第一口金１８側の封止管１３に被せる場合は、封止管１３の表面全体に被せる必要はないが、封止管１３の表面（第一口金１８や第二口金１９より発光管１２側において露出している表面）の８０％以上の領域に被せるのが好ましい。第一筒状カバー２１、２５が第一口金１８側の封止管１３の表面の８０％以上の領域を覆う場合は、（第二筒状カバー２３又は第二筒状カバー２７を放電ランプ１０から取り外した上で）第一口金１８が上方に位置するように放電ランプ１０を直立させたときに、（第一筒状カバー２１、２５の自重によって）第一筒状カバー２１、２５の放電ランプ１０に対する仮固定位置が下方にずれるおそれが小さくなる。 Alternatively, the first cylindrical cover 21 may not be covered with the first base 18 or the first cylindrical cover 21 may not be covered with the second base 19. The first cylindrical cover 25 may not be covered with the first base 18.
Alternatively, the second cylindrical cover 23 may be covered only on the glass tube portion 11 without covering the first base 18.
Moreover, when covering the 1st cylindrical covers 21 and 25 on the sealing pipe | tube 13 by the side of the 1st nozzle | cap | die 18, it is not necessary to cover the whole surface of the sealing pipe | tube 13, but the surface (1st opening | mouth) It is preferable to cover a region of 80% or more of the surface exposed on the arc tube 12 side from the gold 18 or the second cap 19. When the first cylindrical covers 21 and 25 cover 80% or more of the surface of the sealing tube 13 on the first base 18 side, the second cylindrical cover 23 or the second cylindrical cover 27 is used as a discharge lamp. When the discharge lamp 10 is erected so that the first base 18 is located above (after being removed from 10), the first cylindrical covers 21, 25 (by the weight of the first cylindrical covers 21, 25) There is less possibility that the temporarily fixed position with respect to the discharge lamp 10 is shifted downward.

１０ 放電ランプ（ランプ）
１１ ガラス管部
１２ 発光管
１３ 封止管（ステム）
１５ 電極
１６ 電極
１８ 第一口金
１９ 第二口金
２０ 保護カバー装置
２１ 第一筒状カバー
２３ 第二筒状カバー
２４ 保護カバー装置
２５ 第一筒状カバー
２７ 第二筒状カバー
３０ ミラー
３１ 下端開口
３２ 上端開口
３４ ランプホルダ
３５ 第一給電ケーブル
３６ 第二給電ケーブル
Ａ 一方の電極が輝点となったときの直接透過範囲
Ｂ 他方の電極が輝点となったときの直接透過範囲
Ｃ ランプ電源が交流電源のときの直接透過範囲 10 Discharge lamp (lamp)
11 Glass tube portion 12 Arc tube 13 Sealing tube (stem)
15 Electrode 16 Electrode 18 First base 19 Second base 20 Protective cover device 21 First cylindrical cover 23 Second cylindrical cover 24 Protective cover device 25 First cylindrical cover 27 Second cylindrical cover 30 Mirror 31 Lower end opening 32 Upper end opening 34 Lamp holder 35 First feeding cable 36 Second feeding cable A Direct transmission range B when one electrode becomes a bright spot Direct transmission range C when the other electrode becomes a bright spot C Lamp power supply Direct transmission range with AC power supply

Claims (7)

一対の電極を内蔵するガラス管部及び該ガラス管部の両端部にそれぞれ接続する一対の口金を備え、かつ一方の上記口金がランプホルダに対して着脱可能なランプに対して着脱可能な保護カバー装置において、
上記一方の口金の上記ランプホルダに対する接続部を避けて上記ガラス管部を着脱可能に覆い、かつ少なくとも一部が塑性変形して上記ガラス管部に対して接触する第一筒状カバーと、
上記ガラス管部及び上記第一筒状カバーの塑性変形部に対して、縮径方向に弾性変形して着脱可能に被さる第二筒状カバーと、
を備えることを特徴とするランプ用保護カバー装置。 A protective cover that is detachable from a lamp that includes a glass tube part that houses a pair of electrodes and a pair of bases that are respectively connected to both ends of the glass tube part, and in which one of the bases is removable from the lamp holder In the device
A first cylindrical cover that detachably covers the glass tube part while avoiding the connection part of the one base to the lamp holder, and at least a part of which is plastically deformed to contact the glass tube part;
A second cylindrical cover that is elastically deformed in a reduced diameter direction and is detachably covered with respect to the plastic deformation portion of the glass tube portion and the first cylindrical cover;
A protective cover device for a lamp, comprising: 請求項１記載のランプ用保護カバー装置において、
上記ガラス管部が、
上記電極を内蔵する発光管と、
該発光管から互いに離間する方向に延びかつ上記口金にそれぞれ接続する一対の封止管と、
を備え、
上記第二筒状カバーが、一方の上記口金及び該口金に接続する一方の上記封止管に被さるランプ用保護カバー装置。 The lamp protective cover device according to claim 1,
The glass tube part is
An arc tube containing the electrode;
A pair of sealing tubes extending in a direction away from the arc tube and connected to the cap, respectively;
With
A protective cover device for a lamp, wherein the second cylindrical cover covers one of the caps and one of the sealing tubes connected to the cap. 請求項２記載のランプ用保護カバー装置において、
上記第二筒状カバーが、上記一方の上記封止管の表面の８０％以上の領域に弾性変形しながら被さるランプ用保護カバー装置。 The protective cover device for a lamp according to claim 2,
A protective cover device for a lamp, which the second cylindrical cover covers while elastically deforming in an area of 80% or more of the surface of the one sealing tube. 請求項１から３のいずれか１項記載のランプ用保護カバー装置において、
上記第二筒状カバーが、上記ランプの発光管の直接透過範囲の範囲外に位置した状態で、上記ガラス管部及び上記第一筒状カバーの上記塑性変形部に対して被さるランプ用保護カバー装置。 The protective cover device for a lamp according to any one of claims 1 to 3,
A protective cover for a lamp that covers the glass tube portion and the plastic deformation portion of the first cylindrical cover in a state where the second cylindrical cover is located outside the direct transmission range of the arc tube of the lamp. apparatus. 請求項１から４のいずれか１項記載のランプ用保護カバー装置において、
上記第一筒状カバーと上記第二筒状カバーの少なくとも一方が、一方の端部が閉じた筒状部材であるランプ用保護カバー装置。 The lamp protection cover device according to any one of claims 1 to 4,
A protective cover device for a lamp, wherein at least one of the first cylindrical cover and the second cylindrical cover is a cylindrical member having one end closed. 請求項１から５のいずれか１項記載の上記ランプ用保護カバー装置と、
上記ランプと、
を備えることを特徴とするカバー装置付ランプ。 The protective cover device for a lamp according to any one of claims 1 to 5,
The above lamp,
A lamp with a cover device, comprising: 一対の電極を内蔵するガラス管部及び該ガラス管部の両端部にそれぞれ接続する一対の口金を備えるランプの一方の上記口金のランプホルダに対する取り付け方法において、
上記一方の口金の上記ランプホルダに対する接続部を避けながら、第一筒状カバーを上記ガラス管部に着脱可能に被せ、かつ上記第一筒状カバーの少なくとも一部を塑性変形させながら上記ガラス管部に対して接触させるステップ、
上記ガラス管部及び上記第一筒状カバーの塑性変形部に対して、第二筒状カバーを縮径方向に弾性変形させながら着脱可能に被せるステップ、
上記第二筒状カバーを上記ランプ及び上記第一筒状カバーから取り外すステップ、
上記一方の口金を上記ランプホルダに接続するステップ、及び
上記第一筒状カバーを上記ランプから取り外すステップ
を有することを特徴とするランプのランプホルダに対する取り付け方法。 In a method of attaching one of the caps to the lamp holder of a lamp comprising a glass tube portion containing a pair of electrodes and a pair of caps respectively connected to both ends of the glass tube portion,
The glass tube is detachably covered with the first cylindrical cover while avoiding a connection portion of the one base to the lamp holder, and at least a part of the first cylindrical cover is plastically deformed. Contacting the part,
Covering the glass tube portion and the plastic deformation portion of the first cylindrical cover in a detachable manner while elastically deforming the second cylindrical cover in the diameter reducing direction;
Removing the second cylindrical cover from the lamp and the first cylindrical cover;
A method of attaching the lamp to the lamp holder, comprising: connecting the one base to the lamp holder; and detaching the first cylindrical cover from the lamp.
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