JP6082082B2 - Fluid mechanism and support member constituting the fluid mechanism - Google Patents

Description

  The present invention relates to a fluid mechanism that measures and controls the flow rate of a material gas used in a semiconductor process, for example, and a support member that constitutes the fluid mechanism.

For example, a mass flow controller which is a conventional fluid device unit has a flow sensor or a flow control valve which is a fluid device as shown in Patent Document 1, and a fluid flow rate is determined by an information processing circuit provided separately or integrally. Is controlled to a set value.
Recently, in order to reduce the footprint, etc., it is required to slim the fluid mechanism including the mass flow controller.

  Therefore, for example, the present inventors are developing a mass flow controller having a very small dimension in the width direction, which is a direction orthogonal to the longitudinal direction when viewed from the plane direction. In such a mass flow controller, one or a plurality of fluid devices are provided between an input port into which a fluid is introduced and an output port from which the fluid is derived, and the direction connecting the input port and the output port as viewed from a plane is determined. It is set in the longitudinal direction.

  With such a configuration, even when providing a plurality of fluid paths in parallel, for example, by arranging a plurality of mass flow controllers adjacent to each other so that their longitudinal directions are parallel to each other, it is very compact. A flow control mechanism can be constructed.

  By the way, in addition to the mass flow controller, such a flow control mechanism includes an auxiliary external fluid device such as an open / close valve used when the flow path is completely closed or stopped in an abnormal state. It may be added corresponding to. Such an external fluid device is normally disposed at the front and back along the longitudinal direction of the mass flow controller.

JP 2011-154433 A

  However, when the arrangement dimension when viewed from the planar direction of the external fluid device is larger than the width dimension of the mass flow controller, the external fluid device is arranged by aligning the center line along the longitudinal direction of the mass flow controller. As shown in FIG. 10, the mass flow controllers must be arranged apart from each other, and not only a useless space is generated, but also the significance of slimming the mass flow controller is lost. In addition, as shown in FIG. 11, if the center line between the external fluid device and the mass flow controller is shifted, the mass flow controllers can be adjacent to each other. Is not preferable. Furthermore, since external fluid devices are arranged before and after the longitudinal direction of the mass flow controller, there is a limit when it is desired to reduce the longitudinal dimension.

  The present invention is intended to solve such a problem, and it is a main intended problem to be able to efficiently and compactly arrange a plurality of fluid device units and external fluid devices attached to them as a set. At the same time, the fluid flow paths corresponding to the respective fluid device units can be made as equal in length as possible so as to make it difficult to cause a response shift in fluid supply or the like.

  That is, in the fluid mechanism according to the present invention, one or a plurality of fluid devices are provided between the input port through which the fluid flows and the output port through which the fluid flows out, and the input port and the output port are connected to each other when viewed from the planar direction. A fluid device unit in which the connecting direction is set to the longitudinal direction, and a support member that supports the plurality of fluid device units adjacent to each other so that the longitudinal directions thereof are substantially parallel to each other.

  The support member includes an inflow channel that is connected to the input port and introduces fluid to the input port, and an outflow channel that is connected to the output port and extracts fluid from the output port, The introduction port formed at the start end of the inflow channel is disposed on the outer side of one of the outermost fluid device units in the width direction that is a direction orthogonal to the longitudinal direction when viewed from the plane direction. And the outlet port formed at the end of the outflow channel is arranged further outside of the other fluid device unit located on the outermost side in the width direction.

  In such a case, since the plurality of fluid device units closely arranged with the side surfaces adjacent to each other are not provided around the longitudinal direction, the outlet / inlet ports are provided on the sides. Even if the size of the external fluid device to be operated is larger than the width size of the fluid device unit, it is possible to achieve a compact configuration with a high area efficiency so as to minimize the footprint without generating a useless space. Furthermore, the longitudinal dimension can be suppressed to the longitudinal dimension of only the fluid device unit.

  In addition, the fluid device unit is arranged so that the input ports and the output ports are substantially in series along the width direction, and the inflow channel is provided with the introduction port substantially aligned in the longitudinal direction. The input ports connected in order from the end closest to the input port are connected in order to the end close to the introduction port of the input ports substantially aligned in the width direction, and the outflow channel is connected to the longitudinal direction. The derivation ports that are generally arranged in the order are connected to the output ports that are arranged substantially in the width direction in order from the end closest to the output port, in order to be connected to the end that is close to the derivation port. When comparing the length of each flow path from the port to the outlet port, the short inflow flow path is connected to the long outflow flow path, so variation in the length of each flow path can be suppressed. Problem of Resolution can be.

  The port mentioned here refers to the ports formed at the beginning and end of the flow path, but is not limited to those having a special physical structure such that any member can be attached. I can't. For example, when two flow paths are continuous, the port is a conceptual one formed between the flow paths.

  As a specific aspect in which the space-saving effect of the present invention is more remarkably exhibited, the fluid device unit is arranged substantially along the longitudinal direction on the outer side in the width direction and connected to each introduction port. The same number of upstream external fluid devices as the fluid device units and / or the other fluid device unit are arranged along the longitudinal direction on the outer side in the width direction and connected to the respective outlet ports. The number of downstream external fluid devices equal to the number of fluid device units may be further provided, and the shortest dimension required for disposing the external fluid device when viewed from the plane direction may be larger than the width direction dimension of the fluid device unit. .

  In order to keep the longitudinal dimension of the entire system within the longitudinal dimension of the fluid device unit, the overall longitudinal dimension in the arrangement state of the upstream external fluid device and the arrangement state of the downstream external fluid device It is preferable that the number of fluid device units is determined so that the overall longitudinal dimension of the fluid device substantially matches or becomes smaller than the longitudinal dimension of the fluid device unit.

  In order to realize space saving with a simpler configuration, the support member has a flat plate shape, the inflow channel and the outflow channel are formed therein, and the fluid device unit is formed on the upper surface thereof. It is desirable to have attached.

  The fluid device unit further includes an information processing circuit that controls the fluid device or calculates an output from the fluid device, and the information processing circuit is shared by each fluid device unit. If so, not only space saving but also cost reduction can be achieved.

  As a specific mode in which the footprint cannot be unnecessarily expanded, the fluid device unit further includes a first housing that covers the fluid device, and a second housing that houses the information processing circuit is an upper surface of the first housing. The contour of the second housing viewed from the plane direction of the second housing can be substantially contained within the contour of the first housing adjacent to each other viewed from the plane direction. .

  As described above, according to the present invention, it is possible to efficiently and compactly arrange a plurality of fluid device units and external fluid devices attached to them as a set. In addition, by devising the route of the inflow / outflow channel, it is possible to align the response characteristics of each fluid from the introduction port to the outlet port.

The fluid circuit diagram of the fluid mechanism in one Embodiment of this invention. The whole perspective view of the fluid mechanism in the embodiment. The fluid circuit diagram of the mass flow controller in the same embodiment. The whole perspective view of the mass flow controller in the embodiment. The longitudinal cross-sectional view which shows the internal structure of the massflow controller in the embodiment. The cross-sectional view which shows the internal structure of the massflow controller in the embodiment. The disassembled perspective view of the fluid resistance member in the embodiment. The bottom view and partial sectional view of a support member in the embodiment. The fluid flowchart which shows the flow of the fluid in the embodiment. The schematic diagram which shows the example of arrangement | positioning of the conventional fluid mechanism. The schematic diagram which shows the example of arrangement | positioning of the conventional fluid mechanism. The bottom view of the support member in other embodiments of the present invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The fluid mechanism 100 according to the present embodiment is used in, for example, a semiconductor manufacturing apparatus, and forms a plurality (four in this case) of parallel gas supply lines as shown in FIG. To do. In each material gas supply line, an upstream open / close valve V1 as an upstream external fluid device, a mass flow controller 10 as a fluid device unit, and a downstream open / close valve V2 as a downstream external fluid device are arranged in this order from the upstream side. In each material gas supply line, the flow rate of the material gas can be controlled independently of each other.

  In addition, as shown in FIG. 2, the fluid mechanism physically includes a support member 9 that supports these in addition to the upstream side open / close valve V1, the mass flow controller 10 and the downstream side open / close valve V2. It has. Each part will be described below.

  The mass flow controller 10 includes a body 1 having an internal channel 1a through which a fluid flows, and a flow rate adjustment as a fluid device provided on the internal channel 1a, as shown in a fluid circuit diagram in FIG. 3 and a perspective view in FIG. A pressure sensor 21, 22 and a fluid resistance element 3, which are fluid devices for measurement for measuring the mass flow rate of a fluid that is provided downstream of the flow rate adjustment valve 4 and flows through the internal flow path 1 a An information processing circuit 6 for calculating the flow rate flowing through the internal flow path 1a based on the pressure measured by the pressure sensors 21 and 22 and controlling the flow rate adjusting valve 4 so that the measured flow rate becomes a predetermined target flow rate; A first housing 7 attached to the body 1 and covering the flow rate adjusting valve 4 and the pressure sensors 21 and 22 is provided.

  As shown in FIGS. 4 to 6 and the like, the body 1 is, for example, a metal having a long and thin rectangular parallelepiped shape. One surface parallel to the longitudinal direction of the body 1 is set as a component mounting surface 1c, and components such as the flow rate adjusting valve 4 and the pressure sensors 21 and 22 are mounted only on the component mounting surface 1c. It is configured. Further, the surface opposite to the mounting surface 1c is a fixing surface 1b for fixing the body 1 to a panel or the like. In this embodiment, the input port 1d of the internal channel 1a is opened at one end in the longitudinal direction of the fixed surface 1b, and the output port 1e of the internal channel 1a is opened at the other end. . It should be noted that a plurality of mass flow controllers 10 can be arranged so that the side surfaces of the body 1 are in close contact or close to each other without attaching anything to the other two surfaces (hereinafter referred to as side surfaces) parallel to the longitudinal direction. It is configured.

  The internal flow path 1a extends from one end portion to the other end portion in the longitudinal direction of the body 1, and is viewed from a planar direction that is perpendicular to the component mounting surface 1c (hereinafter also referred to as a plan view). ), And the fluid flows substantially parallel to the longitudinal direction. Hereinafter, a direction perpendicular to the longitudinal direction when viewed from the plane direction is referred to as a width direction.

  As shown in FIG. 5 and the like, the flow rate adjusting valve 4 has a columnar shape and is vertically attached to the component mounting surface 1c. The maximum width dimension of the flow rate adjusting valve 4 is set smaller than or equal to the width dimension (dimension in the direction orthogonal to the longitudinal direction) of the component mounting surface 1c. As shown in FIG. In a state where the regulating valve 4 is attached to the body 1, the flow regulating valve 4 is configured not to protrude in the width direction from the body 1.

  Among the members constituting the flow regulating valve 4, the valve seat member 42 forms a fluid introduction passage 42 b that is a through hole extending in the axial direction at the center and a fluid outlet passage 42 c that is a through hole extending in the axial direction around the valve seat member 42. An annular seat surface is formed so as to protrude from the top surface so as to surround the central through hole. Then, when a valve body member 41 (to be described later) is brought into close contact with the seat surface, the fluid introduction path 42b and the fluid lead-out path 42c are closed, and when separated, the fluid introduction path 42b and the fluid lead-out path 42c are separated. It is comprised so that it may be in the open state which communicates.

  The valve seat member 42 is fitted into a bottomed recess 1f opened at one end of the component mounting surface 1c. The bottomed recess 1f is provided at a position where the internal flow path 1a is divided, and in a state where the valve seat member 42 is fitted, the upstream internal flow path 1a (1) of the internal flow path 1a. The end is connected to the fluid introduction path 42b of the valve seat member 42, and the start end of the downstream side internal flow path 1a (2) of the internal flow path 1a is connected to the fluid outlet path 42c of the valve seat member 42. It is constituted as follows.

  On the other hand, among the members constituting the flow rate adjusting valve 4, the valve body member 41 is a diaphragm-like member provided at a position facing the seat surface. The valve body member 41 is moved so as to be able to contact and separate from the seating surface by a laminated piezoelectric element 43 as an actuator provided on the opposite side to the seating surface. The laminated piezoelectric element 43 is accommodated in a columnar casing 44 that is erected from the component mounting surface 1c.

  However, with this configuration, by applying a predetermined voltage to the laminated piezoelectric element 43, the distance between the seating surface 42a and the valve body member 41 can be controlled, and the flow rate of the fluid can be controlled.

  As described above, as the flow rate measuring device, the fluid resistance member 3 provided on the internal flow path 1a and a pair of pressure sensors for measuring the fluid pressure on the upstream side and the downstream side of the fluid resistance member 3, respectively. 21 and 22 are used. Each part will be described in detail.

  As shown in FIGS. 5, 7, etc., the fluid resistance member 3 has a rectangular parallelepiped shape in which a plurality of rectangular thin plates 3a are laminated, and is configured so that the fluid flowing inside becomes a laminar flow. Therefore, it should be called a laminar resistance element. The fluid resistance member 3 is provided with a communication passage 3c penetrating in the center and a small-diameter channel 3d whose inner end communicates with the communication passage 3c and whose outer end opens on a side surface. 3d becomes a resistance flow path. The small-diameter channel 3d is formed by providing the book plate 3a with slits 3b, and the channel resistance can be adjusted by changing the shape and number of the slits 3b formed in the book plate 3a. It is.

  On the other hand, a rectangular recess 1h is provided at the center in the longitudinal direction of the component mounting surface 1c of the body 1 so as to divide the internal flow path 1a. The recess 1 h is designed so that the fluid resistance member 3 is fitted with no gap in the width direction and with a gap in the longitudinal direction of the body 1.

  Thus, in a state where the fluid resistance member 3 is fitted in the recess 1h, the communication path 3c is connected to the terminal end of the upstream internal flow path 1a (2), and the outer end of the small diameter flow path 3d is the downstream side. It is comprised so that it may communicate with the starting end of the internal flow path 1a (3). That is, the upstream internal flow path 1a (2) is connected to the downstream internal flow path 1a (3) via the communication path 3c and the small diameter flow path 3d.

  As shown in FIGS. 4 to 6 and the like, the pressure sensors 21 and 22 include a main body member 2A having a flat shape and a pressure detection element 2B built in the main body member 2A. The flat body member 2A has a face plate portion (flat surface) perpendicular to the component mounting surface 1c and substantially parallel to the longitudinal direction of the body 1, that is, in plan view, substantially parallel to the fluid flow direction. , Attached to the component mounting surface 1c. Further, as shown in FIG. 6 and the like, the thickness dimension of the pressure sensors 21 and 22 is set smaller than or equal to the width direction dimension of the component mounting surface 1c. It is configured not to protrude in the width direction from 1.

  In the main body member 2A, as shown in FIG. 6, a fluid-filling chamber 2b having a thin disk shape in which a pressure-sensitive surface 2b1 which is one surface parallel to the face plate portion is formed by an elastically deforming diaphragm wall 2A1, and A fluid introduction path 2c that communicates with the fluid filling chamber 2b and the pressure introduction port 2a1 is formed. The pressure inlet 2a1 is opened on the attachment surface 2a to the body 1.

  Here, the pressure detecting element 2B is formed by bridge-connecting four equivalent electric resistance elements attached to the back surface of the diaphragm wall 2A1. However, the present invention is not limited to this, and any material that can measure the deformation amount of the diaphragm wall 2A1 that is deformed by the fluid pressure, such as a piezo element or a capacitance electrode, may be used.

  By the way, the pressure sensor 21 on the upstream side of the pair of pressure sensors 21 and 22 is attached to the central portion in the longitudinal direction of the component attachment surface 1c of the body 1, and the pressure sensor 22 on the downstream side is downstream of that. It is attached to the component mounting surface 1c on the side.

  In particular, the upstream pressure sensor 21 is attached to the body 1 so that the attachment surface 2a hermetically seals the opening of the recess 1h via an annular seal member, and the fluid resistance member 3 in the recess 1h. It is configured to be pressed and clamped between the bottom surface of the recess 1h. As a result, it is not necessary to seal the fluid resistance member 3 with a dedicated lid or the like, and the cost reduction can be achieved by promoting the reduction in the number of parts and the ease of assembly.

  In this state, the communication path 3c in the fluid resistance member 3 is connected to the pressure introduction port 2a1 of the upstream pressure sensor 21, and the internal flow path 1a (2) upstream of the resistance flow path 3a is connected to the communication path 3c. It is constituted so as to communicate with the upstream pressure sensor 21 via.

  On the other hand, the internal flow path 1a (3) on the downstream side of the resistance flow path 3a extends along the longitudinal direction of the body 1 and reaches the fluid outlet 1e, and the pressure inlet is connected to the downstream pressure sensor 22 along the way. 2a1 is connected.

  The information processing circuit 6 physically includes a CPU, a memory, an I / O channel, an A / D converter, a D / A converter, and other analog or digital electric circuits, and the CPU and others according to a program stored in the memory. The information processing circuit 6 is configured to function as a flow rate calculation circuit 61 and a control circuit 62 as shown in FIG.

  Specifically, the flow rate calculation circuit 61 receives pressure measurement signals from the pressure sensors 21 and 22, and flows through the internal flow path 1a based on these values and the fluid resistance characteristics of the fluid resistance member 3 stored in advance. The mass or volume flow rate of the fluid is calculated and output.

On the other hand, the control circuit 62 outputs a control signal to the flow rate adjustment valve 4 to apply a voltage to the laminated piezoelectric element 43, and the fluid flow rate of the internal flow path 1a calculated by the flow rate calculation circuit 61 is instructed from the outside. It controls so that it may become the set flow volume.
Next, the upstream side open / close valve V1 and the downstream side open / close valve V2 will be described.

  These on-off valves V1 and V2 are of, for example, an electromagnetic drive type that can take only two states of fully open and fully closed, and as shown in FIG. 2, a mounting plate portion Va having a square plate shape and its face plate portion And a main body Vb having a substantially cylindrical shape standing upright. Therefore, the dimensions required for the arrangement of the on-off valves V1 and V2 are determined by the size of the mounting substrate portion Va when viewed from the plane direction, and the length of one side is the width dimension of the mass flow controller 10 (body 1). Larger than the width dimension).

Next, the support member 9 will be described.
The support member 9 has a rectangular plate shape of equal thickness, and in one face plate portion (hereinafter also referred to as an upper surface), the plurality of mass flow controllers 10, the upstream side open / close valve V1, and the downstream side open / close valve V2 It is something to support.

  The plurality of mass flow controllers 10 are supported so that the side surfaces of the body 1 are in close contact with each other so that they have a rectangular shape in plan view as a whole. That is, the mass flow controllers 10 have their longitudinal directions parallel to each other, and their input ports 1d and output ports 1e are in a width direction that is perpendicular to the longitudinal direction when viewed from the plane direction. It arrange | positions on the supporting member 9 so that it may serially arrange | position at intervals.

  The upstream opening / closing valve V <b> 1 is disposed on the upper surface of the support member 9 in series with the longitudinal direction outside the end of the mass flow controller 10 in the width direction. On the other hand, the downstream on-off valve V2 is arranged on the upper surface of the support member 9 so as to be in series with the longitudinal direction on the opposite side of the upstream on-off valve V1, that is, on the outer side in the width direction of the mass flow controller 10 at the other end. is there.

  Further, the support member 9 includes a plurality of introduction ports 9a serially arranged at equal intervals along the longitudinal direction of one of the outermost mass flow controllers 10 and the longitudinal length of the other outermost mass flow controller unit 10. Derivation ports 9b are provided in series at equal intervals along the direction. The introduction port 9a is connected to the input port 1d to introduce fluid into the input port 1d, and the outlet port 9b is connected to the output port 1e to lead fluid from the output port. belongs to.

  Specifically, the plurality of introduction ports 9a substantially arranged in the longitudinal direction are arranged in order from the end closest to the input port 1d in the end of the input port 1d substantially arranged in the width direction at the end close to the introduction port 9a. The inflow passages 9c in a straight line in plan view and the derivation ports 9b that are generally arranged in the longitudinal direction are connected to the outputs in order from the end close to the output port 1e. An outflow passage 9d having a straight line shape in plan view is formed in order at the end of the port 1e close to the outlet port 9b.

  In this embodiment, the introduction port 9a is formed in the upper surface opening of the hole 91 that is penetrated in the thickness direction of the support member 9. The upstream opening / closing valve V1 is arranged so that the outlet port of the upstream opening / closing valve V1 is positioned on the introduction port 9a.

The inflow channel 9c includes the hole 91, a through hole 92 formed in the support member 9 directly below the input port 1d of the mass flow controller 10 and communicating with the input port 1d, a lower surface opening of the hole 91, and the This is constituted by a bottomed groove 93 formed linearly so as to connect the lower surface opening of the through hole 92.
The same applies to the outlet port 9b and the outflow channel 9d.

  That is, the lead-out port 9b is formed in the upper surface opening of the hole 94 penetrating in the thickness direction of the support member 9, and the downstream port V2 is positioned so that the inlet port of the downstream on-off valve V2 is positioned on the introduction port 9b. A side open / close valve V2 is arranged.

  The outflow passage 9d includes the hole 94, a through hole 95 formed in the support member 9 directly below the output port 1e of the mass flow controller 10 and communicating with the output port 1e, and a lower surface opening of the hole 94. And a bottomed groove 96 formed in a straight line so as to connect the lower surface opening of the through hole 95.

  Although not shown, a sealing plate (not shown) is separately attached to the lower surface of the support member 9 to seal the bottom opening of the bottomed grooves 93 and 96, the holes 91 and 94, or the through holes 92 and 95. It is comprised so that it may do.

  Furthermore, in this embodiment, a part of the information processing circuit 6 is provided in common to each mass flow controller 10, and the common part is the adjacent first housing 7 as shown in FIG. 2. It is accommodated in a second housing 8 provided on the upper surface. Note that portions of the information processing circuit 6 that are not shared are accommodated in the first housings 7, respectively. And the outline seen from the plane direction of the said 2nd housing is comprised so that it may be substantially contained in the outline seen from the plane direction of the said 1st whole housing adjacent to each other.

  Thus, according to such a configuration, the on / off valves V1 and V2 are provided not on the longitudinal direction of the mass flow controller 10 but on the side, so that the arrangement dimensions of the on / off valves V1 and V2 are the same as in this embodiment. Even if it is larger than the width dimension of the mass flow controller 10, it becomes possible to arrange | position the several mass flow controllers 10 closely by making those side surfaces adjoin. Therefore, an area-efficient and compact configuration that minimizes the footprint is possible without generating a useless space.

  Further, when comparing the lengths of the respective flow paths from the introduction port 9a to the outlet port 9b, the short inflow path 9c is connected to the long outflow path 9d as shown by arrows in FIG. Thus, variations in the length of each flow path can be suppressed. Therefore, no major problem arises in response variability. Further, the longitudinal dimension can be substantially suppressed to the longitudinal dimension of only the mass flow controller 10.

  Further, a second housing 8 that accommodates the information processing circuit 6 is provided on the upper surface of the first housing 7, and the outline of the second housing 8 viewed from the plane direction is the entire first housing 7 adjacent to each other. Since it is configured so as to be substantially contained within the contour viewed from the planar direction, a separate space for the information processing circuit 6 is unnecessary when viewed from the planar direction.

The present invention is not limited to the above embodiment. For example, in the above-described embodiment, the mass flow controller (flow rate controller) is described as the fluid device unit. However, other device units such as a flow meter (flow rate measuring device) having no flow rate adjusting valve may be used.
Further, the support member is not limited to a plate shape, and may be formed of a plurality of pipes.
The inflow path and the outflow path may not be linear but bend along the way.
The external fluid device is not limited to an on-off valve, and may be a three-way valve, a pressure sensor, a fluid resistance element, a flow rate adjustment valve, or the like. Further, it is not always necessary to provide the fluid device unit group on both sides, and only one side (for example, only the on-off valve V1) may be used.
The external fluid devices do not need to be arranged in a straight line, and may be slightly zigzag from the viewpoint of arrangement.

  As shown in FIG. 12, in the support member, an input common channel 9e that communicates and shares each input port 1d, and an output common channel that communicates and shares each output port 1e. 9f may be provided. If this is the case, the fluid can be mixed and distributed, and only the input port or only the output port may be shared. For example, when the input port is shared, distribution is possible. In that case, if the same kind of gas is used, only one introduction port may be used and the other introduction ports may be closed.

  In the above embodiment, the number of fluid device units is set to the optimum number of four from the relationship between the dimensions of the fluid device unit and the external fluid device as viewed from the plane direction. Sometimes it is better to change the number.

Furthermore, the input port and the output port in any one or a plurality of adjacent fluid device units may be set in reverse to the other fluid device units. Further, the fluid device units only need to have side surfaces in the longitudinal direction adjacent to each other, and are slightly shifted in the longitudinal direction, that is, the input ports to output ports of the adjacent fluid device units are accurately aligned in the width direction. There is no need. However, the serial connection in the longitudinal direction is not included.
In addition, the present invention is not limited to the illustrated example, and various modifications can be made without departing from the spirit of the present invention.

100 ... Fluid mechanism 10 ... Mass flow controller (fluid equipment unit)
21 ... Upstream pressure sensor (fluid device)
22 ... Upstream pressure sensor (fluid device)
3 ... Fluid resistance member (fluid equipment)
6 ... Information processing circuit 7 ... 1st housing 8 ... 2nd housing 9a ... Introduction port 9b ... Derivation port 1d ... Input port 1e ... Output port 9c ... Inflow Route 9d ... Outflow route

Claims (2)

One or more fluid devices are provided between the input port through which the fluid flows and the output port through which the fluid flows out, and the direction connecting the input port and the output port is set in the longitudinal direction when viewed from the plane. A plurality of fluid equipment units;
An inlet channel connected to the input port for introducing fluid into the input port; and an outlet channel connected to the output port for extracting fluid from the output port; A support member that is adjacently supported so that their longitudinal directions are substantially parallel to each other , and
A fluid mechanism in which the fluid device unit is fixed to the support member only at two points on the input port side and the output port side . The fluid mechanism according to claim 1 , wherein the fluid device unit is fixed to the support member only by one screw member inserted into the input port side and one screw member inserted into the output port side.