JP6024156B2 - Ultrasonic measuring device, electronic device, diagnostic device and ultrasonic device - Google Patents

Description

  The present invention relates to an ultrasonic measurement device, an electronic device, a diagnostic device, an ultrasonic device, and the like.

  2. Description of the Related Art As an apparatus for irradiating ultrasonic waves toward an object and receiving reflected waves from interfaces with different acoustic impedances inside the object, for example, an ultrasonic diagnostic apparatus for inspecting the inside of a human body is known . As an ultrasonic device (ultrasonic probe) used in an ultrasonic diagnostic apparatus, in Patent Document 1, piezoelectric elements are arranged in a matrix array, and a wire is provided for each row and column so that beams are emitted in the row direction and the column direction. A technique for scanning is disclosed. However, with this method, it is necessary to control the delay in the row direction in accordance with the signal delay in the column direction, and there is a problem that the circuit scale of the signal generation circuit increases.

JP 2006-61252 A

  According to some aspects of the present invention, it is possible to provide an ultrasonic measurement device, an electronic device, a diagnostic device, an ultrasonic device, and the like that can perform efficient scanning with a simple configuration.

  One aspect of the present invention is directed to an ultrasonic device having an ultrasonic element array, and first to first nth direction terminals (n is an integer of 2 or more). A first signal generation circuit that supplies a first drive voltage, and a second second to a mth (m is an integer greater than or equal to 2) second direction terminal of the ultrasonic device. A plurality of ultrasonic elements arranged in a matrix array of m rows and n columns, and wiring along a first direction. Connected to the first first direction terminal to the nth first direction terminal, and supplies the first drive voltage to the plurality of ultrasonic elements, the first first direction electrode line to the nth. The first direction electrode line and a second direction intersecting the first direction, the first second direction terminal to A first second direction electrode line to an mth second direction electrode line connected to the mth second direction terminal and supplying the second drive voltage to the plurality of ultrasonic elements; The first direction electrode line of the first to the nth direction electrode lines from the first first direction electrode line to the nth first direction electrode line (j is an integer satisfying 1 ≦ j ≦ n) The ultrasonic elements arranged in the j-th column are connected to the first electrodes respectively, and the i-th (i is 1 ≦ 1) of the first to m-th second-direction electrode lines. the second direction electrode line of i ≦ m is connected to the second electrode of each of the ultrasonic elements arranged in the i-th row of the ultrasonic element array, and the second signal generation circuit is , Ultrasonic waves for supplying the second drive voltages having different voltages to the first second direction terminal to the m-th second direction terminal. Related to the constant unit.

  According to one aspect of the present invention, the first driving voltage is supplied to the first to nth first direction electrode lines, and the second driving voltage is supplied to the first to mth second direction electrode lines. As a result, the number of wirings is smaller than when each ultrasonic element is driven independently, and the configuration of the ultrasonic measurement apparatus can be simplified. Further, since the second driving voltages having different voltages can be supplied to the first to m-th second direction electrode lines, the m ultrasonic elements arranged in the j-th column can be mutually connected. Different voltages can be applied. As a result, the intensity of the ultrasonic wave radiated from each of the m ultrasonic elements can be made different.

  In the aspect of the invention, the second signal generation circuit may be configured such that the voltage is monotonously increased from the first second direction terminal toward the mth second direction terminal. Alternatively, the second driving voltage whose voltage decreases monotonously may be supplied.

  According to this configuration, the first ultrasonic element to the m-th ultrasonic element are arranged in the j-th column and connected to the first to m-th second direction electrode lines. A monotonically decreasing voltage or a monotonically increasing voltage can be applied toward the ultrasonic element. As a result, the intensity of the ultrasonic wave radiated from each ultrasonic element can be monotonously increased or monotonously decreased from the first ultrasonic element toward the m-th ultrasonic element.

  In the aspect of the invention, the second signal generation circuit may radiate from the ultrasonic element array by changing a voltage gradient of the second drive voltage at which the voltage monotonously increases or decreases. You may change the setting position of the scanning surface which is a surface along the scanning direction of the ultrasonic beam.

  In this way, by changing the voltage gradient of the second drive voltage, the setting position of the scan surface can be variably set, so that two-dimensional scanning or the like becomes possible.

  In the aspect of the invention, the first signal generation circuit may be connected to the first first-direction electrode line to the n-th first-direction electrode line, which are the drive electrode lines. A first driving voltage for performing phase scanning may be supplied to the first direction terminal to the nth first direction terminal.

  In this way, since the first driving voltages having different phases can be supplied to the first to nth first direction electrode lines, the ultrasonic beam radiated from the ultrasonic element array is supplied to the second driving line. Scan along direction.

  According to another aspect of the present invention, the first driving is performed with respect to the first direction terminal from the first first direction terminal to the n-th (n is an integer of 2 or more) of the ultrasonic device having the ultrasonic element array. A second driving voltage is applied to a first signal generation circuit that supplies a voltage and a first second direction terminal to m-th (m is an integer of 2 or more) second direction terminals of the ultrasonic apparatus. A second signal generation circuit to be supplied, wherein the ultrasonic element array is wired along a first direction with a plurality of ultrasonic elements arranged in a matrix array of m rows and n columns, The first first direction electrode line to the nth first direction connected to the first first direction terminal to the nth first direction terminal and supplying the first drive voltage to the plurality of ultrasonic elements. Wired along an electrode line and a second direction intersecting the first direction, the first second direction terminal to the m-th second A first second direction electrode line to an mth second direction electrode line that is connected to a direction terminal and supplies the second driving voltage to the plurality of ultrasonic elements, and the first first direction electrode line. Among the direction electrode lines to the nth first direction electrode lines, the jth (j is an integer satisfying 1 ≦ j ≦ n) first direction electrode lines are arranged in the jth column of the ultrasonic element array. I of the first to second direction electrode lines to the m-th second direction electrode line (i is an integer satisfying 1 ≦ i ≦ m). ) Second direction electrode lines are connected to the second electrodes of the ultrasonic elements arranged in the i-th row of the ultrasonic element array, respectively, and the second signal generation circuit includes the first Related to an ultrasonic measurement device that supplies the second drive voltage having a different voltage to a second direction terminal to the m-th second direction terminal That.

  According to another aspect of the present invention, the first driving voltage is supplied to the first to nth first direction electrode lines, and the second driving voltage is supplied to the first to mth second direction electrode lines. By doing so, the number of wirings can be reduced compared to driving each ultrasonic element independently, and the configuration of the ultrasonic measurement apparatus can be simplified. Further, since the second driving voltages having different voltages can be supplied to the first to m-th second direction electrode lines, the m ultrasonic elements arranged in the j-th column can be mutually connected. Different voltages can be applied. As a result, the intensity of the ultrasonic wave radiated from each of the m ultrasonic elements can be made different.

  In the aspect of the invention, the second direction is a scan direction in which an ultrasonic beam is scanned by phase scanning, and the first direction intersects the second direction. It may be a slice direction.

  In this way, the setting position of the scan plane can be variably set along the first direction, and the ultrasonic beam can be scanned along the set scan plane in the second direction. As a result, two-dimensional scanning can be performed with a simple configuration.

  In one embodiment of the present invention, the ultrasonic element array includes a substrate in which a plurality of openings are arranged in an array, and each ultrasonic element provided for each opening of the plurality of openings includes the openings. And a piezoelectric element part provided on the vibration film, the piezoelectric element part covering a lower electrode provided on the vibration film and at least a part of the lower electrode And the upper electrode provided so as to cover at least a part of the piezoelectric film, wherein the first electrode is one of the upper electrode and the lower electrode, The second electrode may be the other of the upper electrode and the lower electrode.

  In this way, since the voltage difference between the voltage of the first electrode and the voltage of the second electrode is applied to the piezoelectric film, changing the voltage difference expands and contracts the piezoelectric film, Can be generated.

  Another aspect of the present invention relates to an electronic apparatus including the ultrasonic measurement device according to any one of the above.

  Another aspect of the present invention relates to a diagnostic apparatus including any one of the ultrasonic measurement apparatuses described above and a display unit that displays display image data.

  According to another aspect of the present invention, since the setting position of the scanning surface of the ultrasonic beam can be variably set, two-dimensional scanning can be performed with a simple configuration, and the ultrasonic echo image can be efficiently used. Can be obtained.

  In another aspect of the present invention, an ultrasonic element array, a first first direction terminal to which a first drive voltage is input to an nth (n is an integer of 2 or more) first direction terminal, a second A voltage switching circuit for setting a driving voltage of the ultrasonic element array, wherein the ultrasonic element array is wired along a first direction with a plurality of ultrasonic elements arranged in a matrix array of m rows and n columns, A first first direction electrode line to an nth first terminal connected to the first first direction terminal to the nth first direction terminal and supplying the first drive voltage to the plurality of ultrasonic elements. A directional electrode line is wired along a second direction intersecting the first direction, is connected to the voltage switching circuit, and supplies the second drive voltage to the plurality of ultrasonic elements. A second direction electrode line to an mth second direction electrode line, and the first first direction electrode line to the nth first direction. Among the electrode lines, the j-th (j is an integer satisfying 1 ≦ j ≦ n) first direction electrode line is a first electrode of each ultrasonic element arranged in the j-th column of the ultrasonic element array. The i-th (i is an integer satisfying 1 ≦ i ≦ m) second-direction electrode lines of the first to second-direction electrode lines to the m-th second-direction electrode lines are Connected to the second electrode of each of the ultrasonic elements arranged in the i-th row of the acoustic wave element array, and the voltage switching circuit includes the first second-direction electrode line to the m-th second-direction electrode line. On the other hand, the present invention relates to an ultrasonic apparatus that supplies the second drive voltages having different voltages.

  According to another aspect of the present invention, the first driving voltage is supplied to the first to nth first direction electrode lines, and the second driving voltage is supplied to the first to mth second direction electrode lines. As a result, the number of wirings is smaller than when each ultrasonic element is driven independently, and the configuration of the ultrasonic apparatus can be simplified. Further, since the second driving voltages having different voltages can be supplied to the first to m-th second direction electrode lines, the m ultrasonic elements arranged in the j-th column can be mutually connected. Different voltages can be applied. As a result, the intensity of the ultrasonic wave radiated from each of the m ultrasonic elements can be made different.

1A and 1B are basic configuration examples of an ultrasonic element. The structural example of an ultrasonic measurement apparatus. The figure explaining the phase scan in an ultrasonic measuring device. The 1st figure explaining intensity distribution of an ultrasonic wave. FIG. 3 is a second diagram illustrating the intensity distribution of ultrasonic waves. FIG. 3 is a third diagram illustrating the intensity distribution of ultrasonic waves. An example of the relationship between the voltage applied to an ultrasonic element, and the displacement amount of an ultrasonic element. The 1st figure explaining the intensity distribution of an ultrasonic wave in the case of supplying mutually different 2nd drive voltage. FIG. 6 is a second diagram illustrating the intensity distribution of ultrasonic waves when supplying different second drive voltages. The 3rd figure explaining the intensity distribution of an ultrasonic wave in the case of supplying the mutually different 2nd drive voltage. An example of a timing chart of the first drive voltage and the second drive voltage. 12A and 12B are examples of the intensity distribution of the ultrasonic beam in the slice direction by simulation. 13A and 13B show first and second configuration examples of the second signal generation circuit. The basic structural example of an ultrasonic probe and a diagnostic apparatus (electronic device).

  Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Not necessarily.

1. Ultrasonic Element FIGS. 1A and 1B show a basic configuration example of an ultrasonic element UE included in the ultrasonic measurement apparatus (or ultrasonic apparatus) of the present embodiment. The ultrasonic element UE of the present embodiment includes a vibration film (membrane, support member) MB and a piezoelectric element unit. The piezoelectric element portion includes a lower electrode (first electrode layer) EL1, a piezoelectric film (piezoelectric layer) PE, and an upper electrode (second electrode layer) EL2. Note that the ultrasonic element UE of the present embodiment is not limited to the configuration of FIG. 1, and various components such as omitting some of the components, replacing them with other components, and adding other components. Variations are possible.

  FIG. 1A is a plan view of an ultrasonic element UE formed on a substrate (silicon substrate) SUB, as viewed from a direction perpendicular to the substrate on the element formation surface side. FIG. 1B is a cross-sectional view showing a cross section along A-A ′ of FIG.

  The first electrode layer EL1 is formed of, for example, a metal thin film on the vibration film MB. As shown in FIG. 1A, the first electrode layer EL1 may be a wiring that extends to the outside of the element formation region and is connected to the adjacent ultrasonic element UE.

The piezoelectric film PE is formed of, for example, a PZT (lead zirconate titanate) thin film, and is provided so as to cover at least a part of the first electrode layer EL1. The material of the piezoelectric film PE is not limited to PZT. For example, lead titanate (PbTiO ₃ ), lead zirconate (PbZrO ₃ ), lead lanthanum titanate ((Pb, La) TiO ₃ ), etc. May be used.

  The second electrode layer EL2 is formed of, for example, a metal thin film, and is provided so as to cover at least a part of the piezoelectric film PE. As shown in FIG. 1A, the second electrode layer EL2 may be a wiring that extends outside the element formation region and is connected to the adjacent ultrasonic element UE.

The vibration film (membrane) MB is provided so as to close the opening CAV by, for example, a two-layer structure of a SiO ₂ thin film and a ZrO ₂ thin film. The vibration film MB supports the piezoelectric film PE and the first and second electrode layers EL1 and EL2, and can vibrate according to the expansion and contraction of the piezoelectric film PE to generate ultrasonic waves.

  The opening (cavity region) CAV is formed by etching by reactive ion etching (RIE) or the like from the back surface (surface on which no element is formed) side of the silicon substrate SUB. Ultrasonic waves are radiated from the opening OP of the cavity region CAV.

  The first electrode of the ultrasonic element UE is formed by the first electrode layer EL1, and the second electrode is formed by the second electrode layer EL2. Specifically, the portion of the first electrode layer EL1 covered with the piezoelectric film PE forms the first electrode, and the portion of the second electrode layer EL2 that covers the piezoelectric film PE is the second electrode. An electrode is formed. That is, the piezoelectric film PE is provided between the first electrode and the second electrode.

  The piezoelectric film PE expands and contracts in the in-plane direction when a voltage is applied between the first electrode and the second electrode, that is, between the first electrode layer EL1 and the second electrode layer EL2. One surface of the piezoelectric film PE is joined to the vibration film MB via the first electrode layer EL1, but the second electrode layer EL2 is formed on the other surface, but on the second electrode layer EL2. No other layers are formed. Therefore, the vibration film MB side of the piezoelectric film PE is not easily expanded and contracted, and the second electrode layer EL2 side is easily expanded and contracted. Therefore, when a voltage is applied to the piezoelectric film PE, a convex bend is generated on the cavity region CAV side, and the vibration film MB is bent. By applying an AC voltage to the piezoelectric film PE, the vibration film MB vibrates in the film thickness direction, and an ultrasonic wave is radiated from the opening OP by the vibration of the vibration film MB. The voltage applied to the piezoelectric film PE is, for example, 10 to 30 V, and the frequency is, for example, 1 to 10 MHz.

2. Ultrasonic Measuring Device FIG. 2 shows a configuration example of the ultrasonic measuring device 300 of the present embodiment. The ultrasonic measurement apparatus 300 of this configuration example includes a first signal generation circuit 110 and a second signal generation circuit 120. Further, the ultrasonic measurement device 300 may further include an ultrasonic device 200. The ultrasonic measurement apparatus 300 according to the present embodiment is not limited to the configuration shown in FIG. 2, and various components such as omitting some of the components, replacing them with other components, and adding other components. Can be implemented.

  The first signal generation circuit 110 includes a first signal generation circuit 110 for the first to n-th (n is an integer of 2 or more) first direction terminals X1 to Xn of the ultrasonic device 200 having the ultrasonic element array 100. Drive voltages VDR1 to VDRn are supplied. For example, in FIG. 2, the first drive voltages VDR1 to VDR12 for performing phase scanning are supplied to the first to twelfth first direction terminals X1 to X12. Specifically, VDR1 is supplied to X1, VDRM2 is supplied to X2, and VDR3 to VDR8 are supplied to X3 to X8 in the same manner.

  The second signal generation circuit 120 has second drive voltages VCOM <b> 1 to VCOM <b> 1 that are different from each other with respect to the first to m-th (m is an integer of 2 or more) second direction terminals Y <b> 1 to Ym of the ultrasonic device 200. Supply VCOMm. For example, in FIG. 2, the second drive voltages VCOM1 to VCOM8 having different voltages are supplied to the first to eighth second direction terminals Y1 to Y8. Specifically, VCOM1 is supplied to Y1, VCOM2 is supplied to Y2, and VCOM3 to VCOM8 are supplied to Y3 to Y8 in the same manner. Each of the second drive voltages VCOM1 to VCOM8 is a constant DC voltage, and does not necessarily include the ground potential (ground potential, 0 V).

  FIG. 2 shows an example where m = 8 and n = 12, but other values may be used.

  The ultrasonic device 200 includes an ultrasonic element array 100, first to nth first direction terminals X1 to Xn, and first to mth second direction terminals Y1 to Ym.

  The ultrasonic element array 100 includes a plurality of ultrasonic elements UE arranged in a matrix array of m rows and n columns, first to nth first direction electrode lines LX1 to LXn, and first to mth second directions. The electrode lines LY1 to LYm are included. The ultrasonic element UE can be configured as shown in FIGS. 1A and 2B, for example. Specifically, as shown in FIG. 2, the ultrasonic elements UE in the first to eighth rows (mth row in a broad sense) are arranged in the first direction D1, and intersect with the first direction. The ultrasonic elements UE in the first column to the twelfth column (nth column in a broad sense) are arranged in the second direction D2. In the following description, when specifying the position of the ultrasonic element UE in the array, for example, the ultrasonic element positioned in the fourth row and sixth column is denoted as UE46.

  The first to twelfth (nth in a broad sense) first direction electrode lines LX1 to LX12 are wired along the first direction D1 in the ultrasonic element array 100, and a plurality of ultrasonic waves of the ultrasonic element array 100 are provided. A first driving voltage is supplied to the element. The first to twelfth (nth in a broad sense) first direction terminals X1 to X12 are connected to the first to twelfth first direction electrode lines LX1 to LX12. Of the first to twelfth first direction electrode lines LX1 to LX12, the jth direction electrode line LXj (j is an integer satisfying 1 ≦ j ≦ 12) is arranged in the jth column of the ultrasonic element array 100. It is connected to the 1st electrode which each ultrasonic element UE arranged has.

  The first to eighth (mth in a broad sense) second direction electrode lines LY <b> 1 to LY <b> 8 are wired along a second direction D <b> 2 that intersects the first direction D <b> 1, and the plurality of ultrasonic element arrays 100. A second drive voltage is supplied to the ultrasonic element. The first to eighth (mth in a broad sense) second direction terminals Y1 to Y8 are connected to the first to eighth second direction electrode lines LY1 to LY8. Of the first to eighth second-direction electrode lines LY1 to LY8, the i-th (i is an integer satisfying 1 ≦ i ≦ 8) second-direction electrode line LYi is arranged in the i-th row of the ultrasonic element array 100. It is connected to the 2nd electrode which each ultrasonic element UE arranged has.

  Specifically, for example, for the ultrasonic element UE11 shown in FIG. 2, the first electrode is connected to the first first-direction electrode line LX1, and the second electrode is connected to the first second-direction electrode line LY1. Connected. For example, for the ultrasonic element UE46 shown in FIG. 2, the first electrode is connected to the sixth first direction electrode line LX6, and the second electrode is connected to the fourth second direction electrode line LY4. .

  The second signal generation circuit 120 supplies second drive voltages VCOM1 to VCOM8 whose voltage monotonously increases or decreases from the first second direction terminal Y1 to the eighth second direction terminal Y8. Also good. Here, the voltage monotonously increasing from Y1 to Y8 means that the second drive voltage supplied to Y1 to Y8 has a relationship of VCOM1 <VCOM2 <VCOM3 <... <VCOM8. The voltage monotonously decreasing from Y1 to Y8 means that the second drive voltage supplied to Y1 to Y8 has a relationship of VCOM1> VCOM2> VCOM3>...> VCOM8.

  Further, the second signal generation circuit 120 changes the voltage gradient of the second drive voltages VCOM1 to VCOM8 in which the voltage monotonously increases or the voltage gradient of the second drive voltages VCOM1 to VCOM8 in which the voltage monotonously decreases. By doing so, the setting position of the scan plane can be changed. The scan plane is a plane along the scan direction of the ultrasonic beam emitted from the ultrasonic element array 100. That is, this is a surface on which the ultrasonic beam emitted from the ultrasonic element array 100 is scanned. For example, when the first direction D1 is the slice direction and the second direction D2 is the scan direction of the phase scan, the scan plane is a plane perpendicular to the array plane and parallel to the second direction D2. The relationship between the voltage gradient of the second drive voltage and the scan surface setting position will be described later in detail.

  Here, the voltage gradient of the second drive voltage is the interval between the ultrasonic elements in the k-th (k is an integer satisfying 1 ≦ k ≦ m−1) rows and the ultrasonic elements in the (k + 1) -th row of the ultrasonic element array 100. When (row interval) is ΔYk, it is given by (VCOMk + 1−VCOMk) / ΔYk. When the line intervals are equal, that is, when the lines are arranged at equal intervals, (VCOMk + 1−VCOMk) / ΔY is given as ΔY. When the voltage difference VCOMk + 1−VCOMk is constant regardless of k, the voltage difference is given by ΔVCOM / ΔY with ΔVCOM. For example, in the configuration example of FIG. 2, since the row interval ΔY is a fixed value, the voltage gradient of the second drive voltage can be changed by changing the voltage difference VCOMk + 1−VCOMk.

  Note that the first signal generation circuit 110 and the second signal generation circuit 120 may be combined into one signal generation circuit. Alternatively, a part of the second signal generation circuit 120 may be provided on the same substrate as the ultrasonic element array 100.

  In the configuration example of FIG. 2, the first to twelfth first direction electrode lines LX1 to LX12 supply the first drive voltage, and the first to eighth second direction electrode lines LY1 to LY8 are the second drive. Although a voltage is supplied, it is not limited to this. The first direction electrode lines LX1 to LX12 may supply the second drive voltage, and the second direction electrode lines LY1 to LY8 may supply the first drive voltage.

  In the following description, the first drive voltage is also called a drive signal (or drive signal voltage), and the second drive voltage is also called a common voltage. The first direction electrode lines LX1 to LX12 are also called drive electrode lines, and the second direction electrode lines LY1 to LY8 are also called common electrode lines.

  Drive signals (first drive voltages) VDR1 to VDR12 whose voltages change at a predetermined frequency are supplied to the drive electrode lines (first direction electrode lines) LX1 to LX12 by the first signal generation circuit 110. The common signal lines (second direction electrode lines) LY1 to LY8 are supplied with common voltages (second drive voltages) VCOM1 to VCOM8 having different voltages by the second signal generation circuit 120. A voltage difference between the drive signal voltage and the common voltage is applied to each ultrasonic element UE, and ultrasonic waves with a predetermined frequency are emitted. For example, the difference VDR1−VCOM1 between the drive signal voltage VDR1 supplied to the drive electrode line LX1 and the common voltage VCOM1 supplied to the common electrode line LY1 is applied to the ultrasonic element UE11 of FIG. Similarly, a difference VDR6-VCOM4 between the drive signal voltage VDR6 supplied to the drive electrode line LX6 and the common voltage VCOM4 supplied to the common electrode line LY4 is applied to the ultrasonic element UE46.

  When the phases of the twelve drive signals supplied to the drive electrode lines LX11 to LX12 coincide with each other, the ultrasonic waves radiated from the respective ultrasonic elements are synthesized, and the direction perpendicular to the ultrasonic element array 100 is obtained. Ultrasonic waves radiated in the (normal direction of the array surface) are formed. On the other hand, when the twelve drive signals supplied to the drive electrode lines LX11 to LX12 have a phase difference with each other, the synthesized ultrasonic wave is radiated in a direction shifted from the normal direction of the array surface according to the phase difference. The If this phenomenon is used, the radiation direction of the ultrasonic wave can be changed by changing the phase difference of each drive signal. Scanning the radiation direction (beam direction) of ultrasonic waves by controlling the phase difference of each drive signal is called “phase scanning”.

  FIG. 3 is a diagram for explaining phase scanning in the ultrasonic measurement apparatus 300 of the present embodiment. For simplicity, FIG. 3 illustrates four ultrasonic elements UE1 to UE4. UE1 to UE4 are arranged at equal intervals d. The phase of the supplied drive signals VDR1 to VDR4 is the fastest in VDR1, and is delayed by a predetermined phase difference in the order of VDR2, VDR3, and VDR4. That is, the drive signals VDR1 to VDR4 are supplied with a predetermined time difference Δt in the order of VDR1, VDR2, VDR3, and VDR4.

FIG. 3 shows wavefronts W1 to W4 of ultrasonic waves emitted from the ultrasonic elements UE1 to UE4 at a certain time. The ultrasonic waves radiated from the respective ultrasonic elements are combined to form a wavefront WT of the combined ultrasonic wave. The ray direction DT of the wavefront WT becomes the synthesized ultrasonic radiation direction (beam direction). The angle θs formed by the beam direction DT and the normal direction of the array surface is
sin θs = c × Δt / d (1)
Given in. Here, c is the speed of sound, Δt is the time difference of the drive signals, and d is the element spacing.

  Thus, the beam direction can be changed by changing the phase difference (time difference) of the drive signals supplied to each ultrasonic element, that is, phase scanning. Specifically, for example, in the configuration example shown in FIG. 2, the beam direction is changed along the second direction D2 by changing the phase difference (time difference) of the drive signals supplied to the drive electrode lines LX1 to LX12. It can be scanned. That is, the second direction D2 is the scan direction of the phase scanning, and the first direction D1 is the slice direction.

3. FIG. 4 is a first diagram for explaining the ultrasonic intensity distribution (beam profile). In FIG. 4, a 6-row 6-column ultrasonic element array will be described for simplicity. FIG. 4 shows the beam profile BP1 related to the first direction D1, the beam profile BP2 related to the second direction D2, and the peak position PK of the beam. The center line C1 is a straight line passing through the center of the ultrasonic element array along the first direction D1, and the center line C2 is a straight line passing through the center of the ultrasonic element array along the second direction D2.

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied so that VDR6 is the fastest and is delayed from VDR6 to VDR1 by a certain time difference. Therefore, by the above-described phase scanning, the peak position in the second direction D2 is shifted from the center line C1 to the LX1 side as indicated by the beam profile BP2.

  The common voltage VCOM having the same voltage is supplied to the common electrode lines LY1 to LY6. Since the voltage applied to each ultrasonic element UE is the difference between the drive signal voltage and the common voltage, the voltages applied to the six ultrasonic elements connected to the same drive electrode line are the same. For example, the voltage applied to the six ultrasonic elements UE11, UE21, UE31, UE41, UE51, and UE61 connected to the drive electrode line LX1 is VDR1-VCOM. Therefore, the intensity of the ultrasonic waves emitted from the six ultrasonic elements is the same. As a result, the peak position of the synthesized ultrasonic wave in the first direction D1 is on the center line C2 as indicated by the beam profile BP1.

  FIG. 5 is a second diagram for explaining the intensity distribution (beam profile) of ultrasonic waves.

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied at the same timing, that is, without a phase difference (time difference). Accordingly, since the phases of the ultrasonic waves radiated from the respective ultrasonic elements coincide with each other, the peak position in the second direction D2 of the intensity of the synthesized ultrasonic wave is on the center line C1 as indicated by the beam profile BP2. .

  The common voltage VCOM having the same voltage is supplied to the common electrode lines LY1 to LY6. Therefore, the peak position in the first direction D1 of the intensity of the synthesized ultrasonic wave is on the center line C2 as indicated by the beam profile BP1.

  FIG. 6 is a third diagram for explaining the ultrasonic intensity distribution (beam profile).

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied so that VDR1 is the earliest and is delayed from VDR1 to VDR6 by a certain time difference. Therefore, by the above-described phase scanning, the peak position in the second direction D2 is shifted from the center line C1 to the LX6 side as indicated by the beam profile BP2.

  The common voltage VCOM having the same voltage is supplied to the common electrode lines LY1 to LY6. Therefore, the peak position in the first direction D1 of the intensity of the synthesized ultrasonic wave is on the center line C2 as indicated by the beam profile BP1.

  As shown in FIGS. 4 to 6, when the common voltage VCOM having the same voltage is supplied to the common electrode lines LY1 to LY6, the peak position PK of the ultrasonic intensity is on the center line C2. By performing phase scanning, the ultrasonic beam can be scanned along a plane (scanning plane) that includes the center line C2 and is perpendicular to the array plane.

  FIG. 7 shows an example of the relationship between the voltage (applied voltage) applied to the ultrasonic element and the displacement amount of the ultrasonic element. The horizontal axis is the applied voltage, and the vertical axis is the amount of displacement. As shown in FIG. 7, the relationship between the applied voltage and the amount of displacement is non-linear.

  Since the voltage applied to the ultrasonic element is the difference VDR−VCOM between the drive signal voltage VDR and the common voltage VCOM, even if the VDR is the same, the applied voltage is different if the VCOM is different. The drive signal is a signal whose voltage changes at a predetermined frequency (a signal having an AC component). For example, when the AC component is a sine wave, VDR is given by the following equation as a function of time t.

VDR = VA × sin ωt + VB (2)
Here, VA is the voltage amplitude of the AC component, ω is the angular frequency of the AC component, and VB is the voltage of the DC component.

  Consider three ultrasonic elements UE1, UE2, and UE3 to which common voltages VCOM1, VCOM2, and VCOM3, each of which is supplied with the VDR in the equation (2) and that have different voltages from each other. Applied voltages VE1, VE2, and VE3 of UE1, UE2, and UE3 are expressed by the following equations.

VE1 = VDR−VCOM1 = VA × sin ωt + VB−VCOM1 (3)
VE2 = VDR−VCOM2 = VA × sin ωt + VB−VCOM2 (4)
VE3 = VDR−VCOM3 = VA × sin ωt + VB−VCOM3 (5)
When VCOM1>VCOM2> VCOM3, the DC component of each applied voltage has the following relationship.

VB-VCOM1 <VB-VCOM2 <VB-VCOM3 (6)
Therefore, as shown in FIG. 7, the applied voltages VE1, VE2, and VE3 vary within a range of ± VA around the respective DC components VB-VCOM1, VB-VCOM2, and VB-VCOM3. Since the relationship between the applied voltage and the displacement amount is non-linear, assuming that the displacement amounts corresponding to VE1, VE2, and VE3 are D1, D2, and D3, D1>D2> D3. That is, the displacement amount of UE1 is the largest, and the displacement amount decreases from UE1 toward UE3.

  As described above, in a plurality of ultrasonic elements to which common voltages having different voltages are supplied, the displacement amount increases as the common voltage increases, and thus the intensity of the emitted ultrasonic wave increases.

  FIG. 8 is a first diagram illustrating the intensity distribution (beam profile) of ultrasonic waves when supplying different second drive voltages (common voltages). Similar to FIGS. 4 to 6, the beam profile BP1 related to the first direction D1, the beam profile BP2 related to the second direction D2, and the peak position PK of the beam are shown for the 6 × 6 ultrasonic element array. The center line C1 is a straight line passing through the center of the ultrasonic element array along the first direction D1, and the center line C2 is a straight line passing through the center of the ultrasonic element array along the second direction D2.

  Common voltages VCOM1 to VCOM6 whose voltages monotonously decrease from LY1 to LY6 are supplied to the common electrode lines LY1 to LY6. As described with reference to FIG. 7, the displacement amount increases as the common voltage increases, and the intensity of the emitted ultrasonic wave also increases. For example, six ultrasonic elements UE11 connected to the drive electrode line LX1, In UE21, UE31, UE41, UE51, and UE61, the ultrasonic intensity emitted from UE11 is the highest, and the ultrasonic intensity gradually decreases from UE11 toward UE61. As a result, the peak position of the synthesized ultrasonic wave in the first direction D1 is shifted from the center line C2 to the LY1 side as indicated by the beam profile BP1.

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied so that VDR6 is the fastest and is delayed from VDR6 to VDR1 by a certain time difference. Therefore, by the above-described phase scanning, the peak position in the second direction D2 is shifted from the center line C1 to the LX1 side as indicated by the beam profile BP2.

  FIG. 9 is a second diagram illustrating the intensity distribution (beam profile) of ultrasonic waves when supplying different second drive voltages (common voltages).

  Similarly to FIG. 8, common voltages VCOM1 to VCOM6 whose voltages monotonously decrease from LY1 to LY6 are supplied to the common electrode lines LY1 to LY6. As a result, the peak position of the synthesized ultrasonic wave in the first direction D1 is shifted from the center line C2 to the LY1 side as indicated by the beam profile BP1.

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied at the same timing, that is, without a phase difference (time difference). Accordingly, since the phases of the ultrasonic waves radiated from the respective ultrasonic elements coincide with each other, the peak position in the second direction D2 of the intensity of the synthesized ultrasonic wave is on the center line C1 as indicated by the beam profile BP2. .

  FIG. 10 is a third diagram for explaining the intensity distribution (beam profile) of ultrasonic waves when different second drive voltages (common voltages) are supplied.

  Similarly to FIG. 8, common voltages VCOM1 to VCOM6 whose voltages monotonously decrease from LY1 to LY6 are supplied to the common electrode lines LY1 to LY6. As a result, the peak position of the synthesized ultrasonic wave in the first direction D1 is shifted from the center line C2 to the LY1 side as indicated by the beam profile BP1.

  The drive signals VDR1 to VDR6 supplied to the drive electrode lines LX1 to LX6 are supplied so that VDR1 is the earliest and is delayed from VDR1 to VDR6 by a certain time difference. Therefore, by the above-described phase scanning, the peak position in the second direction D2 is shifted from the center line C1 to the LX6 side as indicated by the beam profile BP2.

  As shown in FIGS. 8 to 10, by supplying common voltages VCOM1 to VCOM6 whose voltage monotonously decreases from LY1 to LY6, the peak position PK of the ultrasonic intensity is shifted from the center line C2 to the LY1 side. be able to. By performing phase scanning, it is possible to scan an ultrasonic beam along a scan plane set at a position shifted from the center line C2 to the LY1 side. Furthermore, the setting position of the scan plane can be changed by changing the voltage gradient of the common voltages VCOM1 to VCOM6 at which the voltage monotonously decreases.

  Although not shown, contrary to FIGS. 8 to 10, by supplying common voltages VCOM1 to VCOM6 in which the voltage monotonously increases from LY1 to LY6, the peak position PK of the ultrasonic intensity is centerlined. It is possible to shift from C2 to LY6. By performing phase scanning, it is possible to scan an ultrasonic beam along a scan plane set at a position shifted from the center line C2 to the LY6 side. Furthermore, the setting position of the scan plane can be changed by changing the voltage gradient of the common voltages VCOM1 to VCOM6 in which the voltage monotonously increases.

  As described above, according to the ultrasonic measurement apparatus 300 of the present embodiment, the second drive voltage (common voltage) in which the voltage monotonously increases from the common electrode line LY1 to LY6, or the first monotone in which the voltage monotonously decreases. By supplying the second drive voltage and changing the voltage gradient of these second drive voltages, the setting position of the scan plane can be variably set. As a result, when the ultrasonic measurement apparatus 300 of the present embodiment is used in, for example, an ultrasonic diagnostic apparatus or the like, two-dimensional scanning can be performed with a simple configuration, so that an ultrasonic echo image is efficiently acquired. It becomes possible.

  As a method for realizing two-dimensional scanning without using the ultrasonic measurement apparatus 300 of the present embodiment, there is a method of individually driving each ultrasonic element of the ultrasonic element array. However, this method makes it difficult to wire the drive electrode lines in an array having a large number of elements. For example, in the case of an array of m rows and n columns, m × n drive electrode lines are required, and routing the wiring while detouring the elements in the array is a serious problem in layout. On the other hand, in the ultrasonic measurement apparatus 300 according to the present embodiment, the above problem does not occur because n drive electrode lines are sufficient as described above.

  Further, as another method for realizing two-dimensional scanning without using the ultrasonic measurement apparatus 300 of the present embodiment, drive signals for phase scanning are separately applied to both the first direction electrode line and the second direction electrode line. There are ways to supply. However, in this method, since it is necessary to control the delay of the drive signal supplied to the second direction electrode line in accordance with the delay of the drive signal supplied to the first direction electrode line, accurate signal processing is required, and the circuit scale Becomes larger. On the other hand, in the ultrasonic measuring apparatus 300 according to the present embodiment, a DC voltage may be supplied to the second direction electrode line, and thus a simple circuit configuration may be used.

  FIG. 11 is an example of a timing chart of the first drive voltage and the second drive voltage in the ultrasonic measurement apparatus 300 of the present embodiment. FIG. 11 shows an ultrasonic element array of 6 rows and 6 columns as an example.

  In the first period T1, the second drive voltage (common voltage) VCOM1 to VCOM6 has the highest voltage VCOM1, and the voltage decreases monotonously from VCOM1 to VCOM6. Accordingly, the set position of the scan plane is shifted upward (for example, the direction from C2 to LY1 in FIG. 8). In the first period T1a of the first period T1, the first drive voltages (drive signals) VDR1 to VDR6 have the earliest phase in VDR6 and are delayed from VDR6 to VDR1 by a certain time difference. In the intermediate period T1b, VDR1 to VDR6 have the same phase, and in the last period T1c, VDR1 has the earliest phase and is delayed from VDR1 to VDR6 by a certain time difference. By performing phase scanning in this way, scanning can be performed by shifting the set position of the scan surface upward (for example, in the direction from C2 to LY1 in FIG. 8).

  In the second period T2, since the common voltages VCOM1 to VCOM6 are the same voltage, the set position on the scan plane does not shift. The drive signals VDR1 to VDR6 perform phase scanning similar to that of the first period T1 in the first period T2a, the intermediate period T2b, and the last period T2c of the second period T2. By doing so, scanning can be performed without shifting the set position of the scan surface.

  In the third period T3, the voltage VCOM1 is the lowest among the common voltages VCOM1 to VCOM6, and the voltage monotonously increases from VCOM1 to VCOM6. Accordingly, the setting position of the scan plane is shifted downward (for example, in the direction from C2 to LY6 in FIG. 8). The drive signals VDR1 to VDR6 perform phase scanning similar to the first period T1 in the first period T3a, the intermediate period T3b, and the last period T3c of the third period T3. By doing so, it is possible to perform scanning by shifting the set position of the scan surface downward (for example, in the direction from C2 to LY6 in FIG. 8).

  12A and 12B show an example of the intensity distribution (beam profile) of the ultrasonic beam in the slice direction by simulation. The horizontal axis represents the coordinates in the slice direction with the center of the array as the origin, and the vertical axis represents the sound pressure (ultrasound intensity).

  FIG. 12A shows the case where the same voltage is supplied to each common electrode line, and the peak position of the beam is at the origin, that is, at the center of the array. On the other hand, FIG. 12B shows a case where a voltage gradient is given to the voltage supplied to each common electrode line, and it can be seen that the peak position of the beam is shifted.

  FIGS. 13A and 13B show first and second configuration examples of the second signal generation circuit 120 of this embodiment. Note that the second signal generation circuit 120 of the present embodiment is not limited to the configuration in FIGS. 13A and 13B, and some of the components may be omitted or replaced with other components. Various modifications such as adding other components are possible.

  The first configuration example shown in FIG. 13A includes signal generation circuits SG1 to SG8. The signal generation circuits SG1 to SG8 generate and output second drive voltages (common voltages) VCOM1 to VCOM8, respectively. The signal generation circuits SG1 to SG8 generate second drive voltages VCOM1 to VCOM8 in which the voltage monotonously increases or decreases based on the control of the control circuit CNTL of the ultrasonic probe 300 (FIG. 14) described later. The voltage gradient of the two drive voltages VCOM1 to VCOM8 can be changed. The signal generation circuits SG1 to SG8 can be realized by analog circuits and logic circuits using CMOS transistors.

  The second configuration example shown in FIG. 13B includes a voltage generation circuit 122 and a voltage switching circuit (multiplexer) 124. The voltage generation circuit 122 generates a plurality of voltages necessary as the second drive voltages (common voltages) VCOM1 to VCOM8. The voltage switching circuit (multiplexer) 124 receives the plurality of voltages from the voltage generation circuit 122, selects and outputs one of the plurality of voltages to each of the second direction terminals Y1 to Y8. By doing so, the voltage switching circuit 124 can output the second drive voltages VCOM1 to VCOM8 whose voltage monotonously increases or decreases, and can change the voltage gradient of the second drive voltages VCOM1 to VCOM8. The voltage generation circuit 122 and the voltage switching circuit 124 are controlled by a control circuit CNTL of an ultrasonic probe 300 (FIG. 14) described later. The voltage generation circuit 122 and the voltage switching circuit 124 can be realized by an analog circuit and a logic circuit using CMOS transistors. The voltage switching circuit 124 may be provided on the same substrate as the ultrasonic element array 100.

4). FIG. 14 shows a basic configuration example of an ultrasonic measurement device (ultrasonic probe) 300 and a diagnostic device (electronic device) 400 according to this embodiment. The ultrasonic probe 300 includes an ultrasonic head unit 220, a first signal generation circuit 110, and a second signal generation circuit 120. The ultrasonic head unit 220 includes an ultrasonic device 200 and a connection unit 210. The first signal generation circuit 110 includes a multiplexer MUX and a pulse signal generator HV_P. The ultrasonic probe 300 further includes a control circuit CNTL, a transmission / reception selector switch T / R_SW, and an analog front end AFE.

  The ultrasonic head unit 220 is detachable through the connection unit 210 and can be exchanged according to the diagnosis target. The connection unit 210 is for electrically connecting the ultrasonic head unit 220 and the main body of the ultrasonic head unit 220, and can be constituted by, for example, a flexible substrate and a connector.

  The ultrasonic device 200 includes an ultrasonic element array 100, first to nth first direction terminals X1 to Xn, and first to mth second direction terminals Y1 to Ym. Note that the voltage switching circuit 124 (FIG. 13B) in the second signal generation circuit 120 may be provided in the ultrasonic device 200. In this case, the voltage switching circuit 124 may be formed on the same substrate as the ultrasonic element array 100.

  The multiplexer MUX performs channel switching between the first drive voltage (drive signal) and the reception signal. For example, when the pulse signal generator HV_P, the transmission / reception selector switch T / R_SW, and the analog front end AFE are configured to correspond to signals for eight channels, the multiplexer MUX outputs the signals for the eight channels to the ultrasonic element array 100. Are distributed to the drive electrode lines LX1 to LXn.

  The pulse signal generator HV_P generates a signal (pulse) for driving the ultrasonic element UE based on the control of the control circuit CNTL.

  The transmission / reception change-over switch T / R_SW performs signal switching at the time of transmission and reception. At the time of reception, the multiplexer MUX and the analog front end AFE are electrically connected to output a reception signal from the ultrasonic head unit 220 to the analog front end AFE. At the time of transmission, the multiplexer MUX and the analog front end AFE are electrically disconnected to prevent the drive signal from being input to the analog front end AFE.

  The analog front end AFE performs amplification, gain setting, frequency setting, A / D conversion (analog / digital conversion), and the like of the received signal, and outputs the detection data (detection information) to the processing unit 320. The analog front end AFE can be composed of, for example, a low noise amplifier, a voltage control attenuator, a programmable gain amplifier, a low pass filter, an A / D converter, and the like.

  The control circuit CNTL controls the phase and frequency of the drive signal for the pulse signal generator HV_P, and controls the second signal generation circuit 120 such as the voltage gradient of the second drive voltage (common voltage). The frequency setting of the received signal is controlled for the analog front end AFE. The control circuit CNTL can be realized by, for example, an FPGA (Field-Programmable Gate Array).

  The diagnostic apparatus 400 includes an ultrasonic probe 300, a control unit 310, a processing unit 320, a UI (user interface) unit 330, and a display unit 340.

  The control unit 310 performs ultrasonic wave transmission / reception control on the ultrasonic probe 300 and controls the processing unit 320 such as image processing of detection data. The processing unit 320 receives detection data from the analog front end AFE and performs necessary image processing, generation of display image data, and the like. A UI (user interface) unit 330 outputs necessary commands (commands) to the control unit 310 based on an operation (for example, a touch panel operation) performed by the user. The display unit 340 is a liquid crystal display, for example, and displays the display image data from the processing unit 320.

  Although the present embodiment has been described in detail as described above, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. In addition, the configurations and operations of the ultrasonic measurement device, the electronic device, the diagnostic device, and the ultrasonic device are not limited to those described in the present embodiment, and various modifications can be made.

100 ultrasonic element array, 110 first signal generation circuit,
120 second signal generation circuit, 122 voltage generation circuit, 124 voltage switching circuit,
200 ultrasonic device, 210 connection, 220 ultrasonic head unit,
300 Ultrasonic Measuring Device, 310 Control Unit, 320 Processing Unit, 330 UI Unit,
340 display,
UE ultrasonic element, LX1 to LX12 first direction electrode line (drive electrode line),
LY1 to LY8 second direction electrode lines (common electrode lines), X1 to X12 first direction terminals,
Y1-Y8 second direction terminal, VDR1-VDR12 first drive voltage (drive signal),
VCOM1 to VCOM8 Second drive voltage (common voltage)

Claims (10)

An ultrasonic device having an ultrasonic element array;
A first signal generation circuit for supplying a first drive voltage to first to first (n is an integer of 2 or more) first direction terminals of the ultrasonic device;
A second signal generation circuit that supplies a second drive voltage to first to second (m is an integer of 2 or more) second direction terminals of the ultrasonic device.
The ultrasonic element array is:
a plurality of ultrasonic elements arranged in a matrix array of m rows and n columns;
A first wiring that is wired along a first direction, is connected to the first first direction terminal to the nth first direction terminal, and supplies the first driving voltage to the plurality of ultrasonic elements. A first direction electrode line to an nth first direction electrode line;
Wiring is performed along a second direction intersecting the first direction, connected to the first second direction terminal to the m-th second direction terminal, and the second ultrasonic element is connected to the second ultrasonic element. A first second-direction electrode line for supplying a driving voltage to an m-th second-direction electrode line;
The first direction electrode line of the first to the nth direction electrode lines from the first first direction electrode line to the nth first direction electrode line (j is an integer satisfying 1 ≦ j ≦ n) Each of the ultrasonic elements arranged in the j-th row is connected to a first electrode,
Of the first to second direction electrode lines to the m-th second direction electrode line, the i-th (i is an integer satisfying 1 ≦ i ≦ m) second-direction electrode line of the ultrasonic element array Connected to the second electrode of each of the ultrasonic elements arranged in the i-th row,
The second signal generation circuit supplies the second drive voltage having a different voltage to the first second direction terminal to the m-th second direction terminal. measuring device. In claim 1,
The second signal generation circuit includes:
Supplying the second drive voltage from which the voltage monotonously increases or the second drive voltage from which the voltage monotonously decreases from the first second direction terminal toward the m-th second direction terminal An ultrasonic measurement apparatus characterized by: In claim 2,
The second signal generation circuit includes:
Setting a scan plane that is a plane along the scan direction of the ultrasonic beam emitted from the ultrasonic element array by changing a voltage gradient of the second drive voltage in which the voltage monotonously increases or decreases An ultrasonic measurement apparatus characterized by changing a position. In any one of Claims 1 thru | or 3,
The first signal generation circuit includes:
Phase scanning is performed for the first first direction terminal to the nth first direction terminal connected to the first first direction electrode line to the nth first direction electrode line. An ultrasonic measurement apparatus that supplies the first drive voltage. A first signal for supplying a first driving voltage to first to n-th (n is an integer of 2 or more) first direction terminals of an ultrasonic device having an ultrasonic element array. A generation circuit;
A second signal generation circuit that supplies a second drive voltage to first to second (m is an integer of 2 or more) second direction terminals of the ultrasonic device.
The ultrasonic element array is:
a plurality of ultrasonic elements arranged in a matrix array of m rows and n columns;
A first wiring that is wired along a first direction, is connected to the first first direction terminal to the nth first direction terminal, and supplies the first driving voltage to the plurality of ultrasonic elements. A first direction electrode line to an nth first direction electrode line;
Wiring is performed along a second direction intersecting the first direction, connected to the first second direction terminal to the m-th second direction terminal, and the second ultrasonic element is connected to the second ultrasonic element. A first second-direction electrode line for supplying a driving voltage to an m-th second-direction electrode line;
The first direction electrode line of the first to the nth direction electrode lines from the first first direction electrode line to the nth first direction electrode line (j is an integer satisfying 1 ≦ j ≦ n) Each of the ultrasonic elements arranged in the j-th row is connected to a first electrode,
Of the first to second direction electrode lines to the m-th second direction electrode line, the i-th (i is an integer satisfying 1 ≦ i ≦ m) second-direction electrode line of the ultrasonic element array Connected to the second electrode of each of the ultrasonic elements arranged in the i-th row,
The second signal generation circuit supplies the second drive voltage having a different voltage to the first second direction terminal to the m-th second direction terminal. measuring device. In any one of Claims 1 thru | or 5,
The second direction is a scanning direction in which an ultrasonic beam is scanned by phase scanning,
The ultrasonic measurement apparatus, wherein the first direction is a slice direction that intersects the second direction. In any one of Claims 1 thru | or 6.
The ultrasonic element array of the ultrasonic device is:
A substrate having a plurality of openings arranged in an array;
Each ultrasonic element provided for each opening of the plurality of openings,
A vibrating membrane that closes each opening;
A piezoelectric element portion provided on the vibrating membrane;
The piezoelectric element portion is
A lower electrode provided on the vibrating membrane;
A piezoelectric film provided to cover at least a part of the lower electrode;
An upper electrode provided to cover at least a part of the piezoelectric film,
The first electrode is one of the upper electrode and the lower electrode;
The ultrasonic measurement apparatus, wherein the second electrode is the other of the upper electrode and the lower electrode.   An electronic apparatus comprising the ultrasonic measurement device according to claim 1. The ultrasonic measurement device according to any one of claims 1 to 7,
And a display unit that displays the display image data. An ultrasonic element array;
From a first first direction terminal to which a first drive voltage is input to an nth (n is an integer of 2 or more) first direction terminal;
A voltage switching circuit for outputting a second drive voltage,
The ultrasonic element array is:
a plurality of ultrasonic elements arranged in a matrix array of m rows and n columns;
A first wiring that is wired along a first direction, is connected to the first first direction terminal to the nth first direction terminal, and supplies the first driving voltage to the plurality of ultrasonic elements. A first direction electrode line to an nth first direction electrode line;
A first second-direction electrode line that is wired along a second direction that intersects the first direction, is connected to the voltage switching circuit, and supplies the second drive voltage to the plurality of ultrasonic elements. To m-th second direction electrode line,
Of the first to unidirectional electrode lines, the j-th (i is an integer satisfying 1 ≦ j ≦ n) of the first directional electrode lines, the first directional electrode line of the ultrasonic element array. Each of the ultrasonic elements arranged in the j-th row is connected to a first electrode,
Of the first to second direction electrode lines to the m-th second direction electrode line, the i-th (i is an integer satisfying 1 ≦ i ≦ m) second-direction electrode line of the ultrasonic element array Connected to the second electrode of each of the ultrasonic elements arranged in the i-th row,
The ultrasonic switching apparatus, wherein the voltage switching circuit supplies the second drive voltages having different voltages to the first second-direction electrode line to the m-th second-direction electrode line. .

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