JP6009193B2 - Vacuum exhaust device - Google Patents

Description

  The present invention relates to an evacuation apparatus that can compress a gas from an ultrahigh vacuum to an atmospheric pressure, and more particularly to an evacuation apparatus that can freely select a mounting posture.

Conventionally, in a semiconductor manufacturing apparatus or the like, a combination of a turbo molecular pump and a dry vacuum pump has been used to exhaust a gas in a chamber to obtain a clean ultra-high vacuum. In this case, the turbo molecular pump for exhausting the ultra-high vacuum region and the dry vacuum pump from the atmospheric pressure region to the medium vacuum region are driven by individual power supply devices and individually controlled.
As the vacuum pump, the turbo molecular pump and the dry vacuum pump, which are used in the exhaust (vacuum) area, are divided, but when using the turbo molecular pump, the turbo molecular pump can be evacuated to the medium vacuum area. Requires a rough grinding operation with a dry vacuum pump, and the installation of a dry vacuum pump (coarse grinding pump) was essential in order to use a turbo molecular pump.

  In addition, an air-evacuated turbo molecular pump designed to exhaust from the atmospheric region has been devised as an advanced form of the turbo molecular pump, but there is a need for the mechanical strength of a rotating body that requires ultra-high speed rotation. There are many issues in the heat dissipation of gas compression heat generated during exhaust from the region to the ultra-high vacuum region, the structure of the large torque and ultra-high speed motor required for exhaust and the drive power supply source, etc. Not reached.

Conventionally, when creating an ultra-high vacuum, a positive displacement vacuum pump (oil rotary pump, roots type dry pump, screw type dry pump) that is a vacuum pump capable of creating a vacuum of several torr to 10 ⁻² Torr, Further, it is common to use a momentum transfer vacuum pump (turbo molecular pump) or a gas reservoir vacuum pump (cryo pump) that can create an ultra-high vacuum upstream (see Patent Documents 1, 2, and 3). That is, two vacuum pumps are connected in series to create an ultra-high vacuum. Volumetric vacuum pumps are often installed (placed) on the installation surface such as the ground, and momentum transfer vacuum pumps and gas storage vacuum pumps are close to the vacuum container (vacuum chamber) that you want to achieve ultrahigh vacuum. Or connected directly to the vacuum vessel. A vacuum pump installed in the vicinity of the vacuum vessel or directly connected to the vacuum vessel is referred to as a first vacuum pump, and a positive displacement vacuum pump installed on an installation surface such as the ground is referred to as a second vacuum pump. The second vacuum pump is not installed in the vicinity of the vacuum vessel for reasons such as vibration, noise, and sometimes using oil, but is installed in a remote place, for example, downstairs. Therefore, the second vacuum pump is connected to the first vacuum pump by a long vacuum pipe. For this reason, the exhaust capacity of the second vacuum pump needs to be a capacity that takes into account the conductance of the vacuum pipe, and needs to be increased in capacity by the pipe conductance.

On the other hand, a vacuum pump that realizes compression from an ultrahigh vacuum to an atmospheric pressure with a single rotating shaft is disclosed in the following documents.
1) Japanese Patent Laid-Open No. 60-204997 (Patent Document 4)
It is a momentum transfer type vacuum pump that includes a spiral groove pump part and a centrifugal pump part and can be compressed from ultrahigh vacuum to atmospheric pressure by a single unit. Since the turbine blade and the centrifugal blade are arranged in series on the same rotating shaft, the exhaust efficiency in the atmospheric pressure region of the centrifugal blade arranged on the atmospheric pressure side is poor and the driving power is large.
2) Japanese Patent No. 2680156 (Patent Document 5)
It is a momentum transfer type vacuum pump that includes a centrifugal compression pump stage and a circumferential flow compression pump stage and can be compressed from ultrahigh vacuum to atmospheric pressure by a single unit. Since the centrifugal blade and the vortex blade are arranged in series on the same rotation axis, the exhaust efficiency in the atmospheric pressure region of the vortex blade arranged on the atmospheric pressure side is poor, and the driving power is large.

  Summarizing the problems of the prior art that can compress from ultra-high vacuum to atmospheric pressure with a single vacuum pump, the problem of exhaust performance limitations due to the provision of blades with different exhaust principles on the same rotating shaft, and in the atmospheric pressure region There is a problem of increase in driving power due to the use of a momentum transfer type pump unit with poor exhaust efficiency.

Japanese Patent Laid-Open No. 11-40094 JP 2000-131476 A JP 2002-147386 A JP 60-204997 A Japanese Patent No. 2680156

As described above, in a vacuum exhaust apparatus in which a gas can be compressed from an ultrahigh vacuum to an atmospheric pressure by connecting two vacuum pumps composed of a positive displacement vacuum pump and a momentum transfer vacuum pump in series, the positive displacement type Since the vacuum pump has high exhaust efficiency in the atmospheric pressure region, a high-efficiency exhaust system can be realized, but it is installed near the vacuum container (vacuum chamber) due to the generation of vibrations and heat generation due to compression to atmospheric pressure. Not.
Further, in a vacuum pump that can compress from ultrahigh vacuum to atmospheric pressure with a single vacuum pump, there are problems of restriction of exhaust performance and increase of driving power.

  The present invention has been made in view of the above points, and is an evacuation apparatus capable of compressing a gas from an ultrahigh vacuum to an atmospheric pressure. The evacuation system can be simplified, the operation power can be reduced, and the efficiency can be improved. In addition, an object of the present invention is to provide a vacuum exhaust apparatus that can be attached in an arbitrary direction in the vicinity of the vacuum vessel or directly to the vacuum vessel.

In order to achieve the above object, the vacuum evacuation apparatus of the present invention includes a first vacuum pump that can be evacuated to a high vacuum or lower, and a second vacuum pump that can be evacuated from atmospheric pressure to medium vacuum or low vacuum, An evacuation apparatus for evacuating from an atmospheric pressure to a high vacuum or lower, wherein the first vacuum pump and the second vacuum pump are connected and integrated, and the first vacuum pump and the second vacuum pump An anti-vibration mechanism is provided in the connecting portion, and separately from the connecting portion, an exhaust passage component made of an anti-vibration material that connects the exhaust port of the first vacuum pump and the intake port of the second vacuum pump is provided . It is characterized by that.
Here, high vacuum refers to a state of pressure of 0.1 to 10-5 Pa, medium vacuum refers to a state of pressure of 100 to 0.1 Pa, and low vacuum refers to a pressure of less than atmospheric pressure to 100 Pa. The state of pressure. In addition, the ultrahigh vacuum means a pressure state of 10-5 to 10-8 Pa, and the ultrahigh vacuum means a pressure state of 10-8 Pa or less (as a vacuum state that can be created on the earth) At present, it is about 10-10 Pa).

  According to the present invention, by connecting and integrating the first vacuum pump and the second vacuum pump, the user can construct and implement ultra-high vacuum exhaust in the container with one pump system. A combination of a first vacuum pump that can be evacuated to a high vacuum or lower and a second vacuum pump that can be evacuated from atmospheric pressure to a medium vacuum or a low vacuum, enables a medium vacuum region and an ultra-high vacuum. In the region, each pump can exhaust with appropriate power consumption. Accordingly, there is provided a pump that does not essentially become an operation state with low exhaust efficiency as one pump system, for example, a pump that exhausts in the ultra-high vacuum region with a positive displacement vacuum pump or exhausts in the atmospheric region with a momentum transfer pump. It is possible.

The above-mentioned "connecting and integrating the first vacuum pump and the second vacuum pump" means that the first vacuum pump and the second vacuum pump are physically integrated by connecting and integrating the first vacuum pump and the second vacuum pump. One pump unit. In this case, a control device that collectively controls the operation of the entire pump of the vacuum evacuation device may be attached to the pump unit and integrated, or may be installed in the vicinity of the pump unit. When connecting and integrating the first vacuum pump and the second vacuum pump, the first vacuum pump and the second vacuum pump may be directly connected, or the first vacuum pump and the second vacuum pump may be connected together. A connecting member may be provided between the two vacuum pumps.
The vibration of the second vacuum pump that compresses and exhausts to atmospheric pressure is much greater than that of the first vacuum pump. If the vacuum evacuation apparatus of the present invention in which the first vacuum pump and the second vacuum pump are integrated is vibrated, there is a possibility that it cannot be installed near the vacuum vessel. Therefore, the vibration level transmitted to the first vacuum pump is reduced by providing an anti-vibration mechanism for preventing vibration from the second vacuum pump at the connecting portion of the two pumps. Anti-vibration mechanisms include anti-vibration rubber (natural rubber, nitrile rubber, silicon rubber, fluoro rubber, etc.), springs, etc. with Young's modulus of 1000 KPa or less (1000 to 10 KPa), Asker C hardness of 50 or less (50 to 4). Conceivable.
When the exhaust passage part is made of a material or structure having high rigidity, vibration is conducted from the part. According to the present invention, the vibration propagating from the second vacuum pump to the first vacuum pump can be suppressed by molding the exhaust passage part with a material having an anti-vibration effect. As a vibration-proof material, a rubber material such as natural rubber, nitrile rubber, silicon rubber, fluorine rubber, etc. having a Young's modulus of 1000 KPa or less (1000 to 10 KPa) and an Asker C hardness of 50 or less (50 to 4) is used. Alternatively, it may be formed into a block shape.

According to a preferred aspect of the present invention, the axis of the rotary shaft of the first vacuum pump and the axis of the rotary shaft of the second vacuum pump are arranged orthogonal to each other. .
In the first vacuum pump and the second vacuum pump, there is no significant difference in the directionality of vibration generated during operation, that is, in the direction where the vibration energy is large. Vibration caused by unbalance of the rotating body is generated. If the rotary shafts of the first vacuum pump and the second vacuum pump are arranged in parallel (in series) in the unitized vacuum exhaust apparatus of the present invention, the direction perpendicular to the axis of the rotary shaft (radial direction) ) Occurs at the same time in the first vacuum pump and the second vacuum pump, and there is a possibility of damage to pump machine parts due to the occurrence of resonance vibration. Moreover, radial vibrations are superimposed and transmitted to the vacuum container as excessive vibrations. For this reason, in the present invention, the axis of the rotary shaft of the first vacuum pump and the axis of the rotary shaft of the second vacuum pump are arranged in a direction orthogonal to each other, so that the first is attached to the vacuum vessel side. In this structure, the radial vibration component of the rotary shaft of the vacuum pump is suppressed.

According to a preferred aspect of the present invention, the bearings supporting the rotary shaft of the first vacuum pump and the rotary shaft of the second vacuum pump are self-lubricating bearings, semi-solid lubricants or solid lubricants. It is any of an enclosed bearing, a gas bearing, and a magnetic bearing, and the rotation of the rotary shaft can be maintained regardless of the installation direction of the first vacuum pump and the second vacuum pump. It is possible.
According to the present invention, the bearing that supports the rotating shaft of the first vacuum pump and the bearing that supports the rotating shaft of the second vacuum pump are rolling materials that contain self-lubricating material or grease in the raceway. Either a bearing, a self-lubricating journal bearing, or a non-contact bearing such as a gas bearing or a magnetic bearing is used, and the rotating shaft is in a healthy state regardless of the installation direction. The rotation can be maintained. Since the vacuum evacuation device of the present invention is a pump unit integrated into one in appearance, the user is conscious that the first vacuum pump and the second vacuum pump are combined inside. Absent. In general, a dry vacuum pump used as the second vacuum pump uses a lubricating oil having a low viscosity such as mineral oil for a bearing portion, and therefore has a certain degree of restriction in the mounting direction of the pump itself. On the other hand, the turbo molecular pump used as the first vacuum pump supports the rotating body using a ball bearing or non-contact bearing using a lubricating oil mainly composed of grease. There are no restrictions. The dry vacuum pump of the present invention uses a bearing that can support a rotating body without using low-viscosity lubricating oil such as mineral oil in the bearing portion, so that there is a particular restriction in the mounting direction as a pump unit. The structure does not occur.

According to a preferred aspect of the present invention, the first vacuum pump and the second vacuum pump are integrated by integrating the bottom part of the first vacuum pump and the casing of the second vacuum pump. It is characterized by integrating.
According to the present invention, the bottom part of the first vacuum pump and the pump casing of the second vacuum pump are configured as an integrated part, and further, the first vacuum pump and the second vacuum pump are included in the integrated part. An exhaust passage that communicates with each other is taken in. Thus, by sharing the bottom part and the pump casing, the number of parts can be reduced (cost reduction) and the volume of the entire unit can be reduced. Further, by incorporating the exhaust passages of the two pumps into the integrated part, the exhaust passage can be shortened, so that conductance is increased and the capacity of the second vacuum pump is reduced. If it does so, the further cost reduction and volume reduction in the whole pump unit can be achieved. Moreover, the heat conductivity of the two pumps is improved by integrating the bottom part and the pump casing. The second vacuum pump that compresses to atmospheric pressure consumes more power and generates more heat than the first vacuum pump on the ultra-high vacuum side. When the second vacuum pump uses cooling water, if the thermal conductivity between the two pumps is increased, only the cooling mechanism installed in the second vacuum pump can be used to efficiently Pump cooling (heat dissipation) can be performed.

According to a preferred aspect of the present invention, a heat insulating member is provided at a connecting portion between the first vacuum pump and the second vacuum pump, or a contact area of the connecting portion is reduced.
When cooling water is not used for cooling the second vacuum pump, in order to deteriorate the thermal conductivity of the connecting portion of the first vacuum pump and the second vacuum pump, a heat insulating member is provided in the connecting portion. Alternatively, it is effective to reduce the contact area of the connecting portion, or both. When the second vacuum pump is not allowed to use cooling water, the heat dissipation method is forced air cooling. The second vacuum pump that compresses to atmospheric pressure consumes more power and generates more heat than the first vacuum pump on the ultra-high vacuum side. Compared to specifications that can efficiently exhaust heat with cooling water, the exhaust heat performance with forced air cooling is inferior, and if the thermal conductivity between the two pumps is good, the amount of heat generated from the second vacuum pump is the first. It is conceivable that some conductivity is transmitted to the one vacuum pump side, and in some cases, the operation of the first vacuum pump may be hindered. Therefore, by providing a heat insulating member at the connecting part of the two pumps or reducing the contact area of the connecting part, the heat conduction is deteriorated, and the heat conduction from the second vacuum pump to the first vacuum pump is minimized. suppress.

According to a preferred embodiment of the present invention, the anti-vibration mechanism, characterized in that it consists of anti-vibration material.

According to a preferred embodiment of the present invention, wherein a first vacuum pump second vacuum pump, it characterized Rukoto connected by a plurality of connecting portions.

According to a preferred aspect of the present invention, there is provided a bypass flow path that connects the intake port of the first vacuum pump and the intake port of the second vacuum pump to bypass the first vacuum pump. Features.
In the present invention, by providing a bypass flow path that connects the intake port of the first vacuum pump and the intake port of the second vacuum pump, the intake port of the second vacuum pump is changed from the intake port of the first vacuum pump. It is possible to bypass the first vacuum pump by directly evacuating to the rotor, preventing damage to the rotating body due to a sudden increase in load on the first vacuum pump even when a vacuum break of the vacuum vessel occurs can do.

According to a preferred aspect of the present invention, an exhaust passage part connecting the exhaust port of the first vacuum pump and the intake port of the second vacuum pump is connected to the second vacuum during the first vacuum pump operation. A backflow prevention valve for preventing backflow from the pump to the first vacuum pump is provided.
Since the present invention has a pump configuration in which the first vacuum pump and the second vacuum pump are integrated, including the exhaust flow path between the first vacuum pump and the second vacuum pump, the pressure condition of the flow path Is known, and when an abnormality occurs in the operating state of each pump, for example, when the back pressure of the first vacuum pump suddenly rises due to a failure of the second vacuum pump, the pressure difference inside the pipe itself By installing a backflow prevention valve having a structure that automatically closes, it is possible to prevent a sudden rise in pressure on the exhaust side of the first vacuum pump.

  According to a preferred aspect of the present invention, the control device for controlling the first vacuum pump and the second vacuum pump is connected to the first vacuum pump so as to be integrated or separately provided. To do.

According to a preferred aspect of the present invention, the control device, when each of the first vacuum pump and the second vacuum pump reaches a rated rotational speed, and there is no gas introduction from the outside to the vacuum vessel to be exhausted, It is possible to control so that the motor applied voltage of at least one vacuum pump is lowered and the operation is continued at the maximum motor efficiency point.
According to a preferred aspect of the present invention, the control device controls the inside of the chamber to be exhausted while individually changing the pump rotation speed according to the exhaust gas flow rate for each of the first vacuum pump and the second vacuum pump. It is possible to control so that the pressure is maintained at a target pressure condition.

In the first vacuum pump and the second vacuum pump that are unitized, the flow path piping set to a predetermined diameter and length is constant, and each of the first vacuum pump and the second vacuum pump There is regularity in changes in flow rate and pressure when the rotation speed fluctuates.
Normally, when the pump exhaust speed control is performed, the intake side opening area is adjusted by using a valve or the like. On the other hand, in the present invention, the pressure in the vacuum vessel is not controlled by adjusting the opening of the valve provided between the vacuum vessel and the pump, but either the first vacuum pump or the second vacuum pump. Alternatively, by controlling the rotational speeds of both pumps, the exhaust speed of each vacuum pump can be adjusted, and the exhaust speed of the entire pump system can be adjusted. That is, it is possible to adjust the pressure in the vacuum vessel with one pump system without using a control valve or the like.

  According to a preferred aspect of the present invention, the first vacuum pump is a turbo molecular pump, and the second vacuum pump is a dry vacuum pump.

According to a preferred aspect of the present invention, the second vacuum pump is a dry vacuum pump, a pair of magnet rotors are attached to the rotation shafts of the pair of pump rotors in the dry vacuum pump, and the number of magnetic poles of the magnet rotor is mutually The magnet rotor is arranged so that different magnetic poles are attracted to each other, and switching of energization to a multi-phase armature composed of an iron core and a winding arranged at least one radially outer side of the magnet rotor is performed as described above. At least one of the magnet rotors is driven to synchronously invert the pair of pump rotors.

ADVANTAGE OF THE INVENTION According to this invention, a biaxial pump rotor can be rotated synchronously with an opposite direction with the motor of a simple structure provided with the winding which rotates a permanent magnet and a permanent magnet. Therefore, a timing gear that synchronizes the two-shaft pump rotors is unnecessary, and the pump can realize oil-free, low vibration and noise. If oil is used for bearings, timing gears, etc., if the pump is tilted, the oil leaks, so the mounting posture of the pump is limited, but the mounting posture of the pump can be freely selected because it is oil-free. In addition, there is no vibration or noise associated with timing gear contact.
The present invention can suppress vibration transmitted from the second vacuum pump to the first vacuum pump by using the dry pump having the above configuration as the second vacuum pump. It can be connected to the pump and integrated. When integrating the first vacuum pump and the second vacuum pump, the mounting posture of the second vacuum pump can be freely selected. And when attaching the unit which integrated the 1st vacuum pump and the 2nd vacuum pump to evacuation objects, such as a vacuum vessel (vacuum chamber), the attachment posture of an integrated unit can be chosen freely. .

According to a preferred aspect of the present invention, the first vacuum pump and the second vacuum pump are each composed of a combination of one unit or a combination of a plurality of units with respect to one unit. To do.
According to a preferred aspect of the present invention, the first vacuum pump and the second vacuum pump are connected and integrated by an intake / exhaust path.
According to the present invention, by integrating a plurality of second vacuum pumps with one first vacuum pump, coarse grinding with an exhaust capacity suitable for the exhaust capacity of the first vacuum pump. A pump can be constructed. In addition, since the plurality of second vacuum pumps can be controlled in parallel when performing pressure control in the vacuum vessel, more appropriate pressure control is possible. Furthermore, even if one of the second vacuum pumps is stopped, the remaining second vacuum pump can back up the first vacuum pump, so that one of the second vacuum pumps Even if stopped, it is possible to prevent a situation in which the first pump stops and the pressure in the vacuum vessel rapidly rises.
By integrating a plurality of first vacuum pumps with one second vacuum pump, the rotor of the first vacuum pump can be reduced in size. Further, by integrating two vacuum pumps or three vacuum pumps, control by one control device becomes possible.

According to a preferred aspect of the present invention, the first vacuum pump and the second vacuum pump have an axial dimension ratio of 1 to 0 when the first vacuum pump is 1. .6, and the volume ratio of the second vacuum pump when the first vacuum pump is 1 is 0.3 to 0.5.
Since the second vacuum pump can be made smaller than the first vacuum pump, the mounting posture is not restricted when the second vacuum pump is attached to the first vacuum pump.
Further, by adopting a combination of the above dimensional ratio and volume ratio in the first vacuum pump and the second vacuum pump, one first vacuum pump having an exhaust capacity several times that of the second vacuum pump It is also possible to integrate a plurality of second vacuum pumps.
According to a preferred aspect of the present invention, each of the plurality of connecting portions includes an anti-vibration material, and the plural anti-vibration materials are spaced apart from each other.
According to a preferred aspect of the present invention, the vibration-proof material is attached to a fastening part that fastens the first vacuum pump and the second vacuum pump, and a fixing bolt is inserted through the vibration-proof material. By screwing the fixing bolt into the first vacuum pump, the fastening component is fixed to the first vacuum pump via the vibration isolating material.
According to a preferred aspect of the present invention, the second vacuum pump is a positive displacement vacuum pump having a pair of rotors, and the pair of rotors are rotated in synchronization with each other in opposite directions by a magnet coupling. To do.
According to a preferred aspect of the present invention, the axis of the rotary shaft of the first vacuum pump and the axis of the rotary shaft of the second vacuum pump are arranged orthogonal to each other, and the first vacuum pump and bottom parts, by integrating the casing of the second vacuum pump, characterized in that it is integrated with the second vacuum pump and said first vacuum pump.

The present invention has the following effects.
(1) By integrating a first vacuum pump that can be evacuated to a high vacuum or lower and a second vacuum pump that can be evacuated from atmospheric pressure to medium vacuum or low vacuum, ultra-high vacuum evacuation can be performed by a single pump. It becomes possible to build with the system. In addition, it has a configuration of a combination of a first vacuum pump that can be evacuated to a high vacuum or lower and a second vacuum pump that can be evacuated from atmospheric pressure to medium vacuum or low vacuum, so that it can be used in medium and ultra high vacuum regions. Each pump can be exhausted in a highly efficient operating state, and the power consumption of the entire system can be reduced.
(2) Since the second vacuum pump as the auxiliary pump can be integrated with the first vacuum pump, the installation space (footprint) of the auxiliary pump can be reduced.
(3) When integrating the first vacuum pump and the second vacuum pump, the mounting posture of the second vacuum pump can be freely selected. And when mounting a pump unit in which the first vacuum pump and the second vacuum pump are integrated to an exhaust target such as a vacuum vessel (vacuum chamber), the mounting posture of the integrated pump unit can be freely selected. Can do.
(4) The internal pressure of the vacuum vessel is not controlled by adjusting the opening of a valve provided between the vacuum vessel and the pump, but the rotation of either the first vacuum pump or the second vacuum pump or both of them. By controlling the speed, it is possible to adjust the exhaust speed of each vacuum pump and to adjust the exhaust speed of the entire pump system. That is, it is possible to adjust the pressure in the vacuum vessel with one pump system without using a control valve or the like.

1 (a), (b), and (c) are views showing a first embodiment of the vacuum exhaust apparatus according to the present invention, and FIG. 1 (a) is a partial sectional front view of the vacuum exhaust apparatus, FIG. FIG. 1B is a partial cross-sectional side view of the vacuum exhaust apparatus, and FIG. 1C is a partial cross-sectional bottom view of the vacuum exhaust apparatus. FIG. 2 is a schematic cross-sectional view showing a detailed structure of the first vacuum pump shown in FIG. FIG. 3 is a schematic cross-sectional view showing a detailed structure of the second vacuum pump shown in FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. FIGS. 5A, 5B, and 5C are views showing another example of the mounting posture of the second vacuum pump, and FIG. 5A is a partial cross-sectional front view of the vacuum exhaust device. FIG. 5B is a partial cross-sectional side view of the vacuum exhaust device, and FIG. 5C is a partial cross-sectional bottom view of the vacuum exhaust device. 6A and 6B are front views showing a vacuum exhaust apparatus in which a control device is installed in the first vacuum pump. FIGS. 7A and 7B are schematic cross-sectional views showing an embodiment in which the bottom part of the first vacuum pump and the pump casing of the second vacuum pump are integrated. FIG. 8 is a schematic view showing an aspect in which a vibration isolation mechanism is provided between the fastening surfaces of the first vacuum pump and the second vacuum pump. FIG. 9 is a schematic view showing an aspect in which a vibration isolation mechanism is provided in a fastening part that fastens the first vacuum pump and the second vacuum pump. 10 (a), (b), and (c) are diagrams showing a detailed structure of a fastening part including the fastening part and the vibration isolating bush shown in FIG. 9, and FIG. 10 (a) is a sectional view of the fastening part. FIG. 10B is a bottom view of the fastening portion, and FIG. 10C is an exploded perspective view of the vibration isolating bush. FIGS. 11A and 11B are front views showing an embodiment in the case where a pump unit (evacuation apparatus) in which a first vacuum pump and a second vacuum pump are integrated is attached to a vacuum container (vacuum chamber). FIG. 12 (a) and 12 (b) are views showing a mounting posture in which the second vacuum pump is attached to the side surface of the first vacuum pump. FIG. 12 (a) is a partial sectional front view, and FIG. ) Is a bottom view. 13 (a), (b), and (c), the second vacuum pump is attached to the side surface of the first vacuum pump, and the fastening parts for fastening the first vacuum pump and the second vacuum pump are prevented. FIG. 13A is a partial cross-sectional front view, FIG. 13B is a partial cross-sectional bottom view, and FIG. 13C is a cross-sectional view showing a detailed structure of a fastening portion. is there. FIG. 14 is a schematic view showing an aspect in which a backflow prevention valve is provided in an exhaust passage component that connects the exhaust port of the first vacuum pump and the intake port of the second vacuum pump. FIG. 15 is a schematic diagram showing an aspect in which a bypass pipe is provided to connect the intake port of the first vacuum pump and the intake port of the second vacuum pump to bypass the first vacuum pump. FIG. 16 shows the rotation when the rotational speed control of each pump is performed as a method of adjusting the pressure adjustment in the container while the first vacuum pump is constituted by a turbo molecular pump and the second vacuum pump is constituted by a dry pump. It is the graph which compared the vacuum evacuation device of this invention and the conventional vacuum evacuation device about the change of speed (rotation speed) and pressure. FIG. 17 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of second vacuum pumps are integrated with one first vacuum pump. FIG. 18 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of second vacuum pumps are connected to and integrated with one first vacuum pump through an intake / exhaust path. FIG. 19 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of first vacuum pumps and one second vacuum pump are connected and integrated by an intake / exhaust path. FIG. 20 is a control circuit diagram of a vacuum exhaust apparatus in which two first vacuum pumps and one second vacuum pump are connected and integrated. FIG. 21 shows a method in which one first vacuum pump is constituted by a turbo molecular pump and two second vacuum pumps are constituted by dry pumps, and the rotational speed control of each pump is performed as a method for adjusting the pressure adjustment in the container. It is the graph which showed the change of the rotational speed (rotation speed) and pressure at the time of performing. FIG. 22 is a diagram showing another aspect of the turbo molecular pump in the vacuum exhaust apparatus according to the present invention. FIG. 23 is a diagram showing another aspect of the turbo molecular pump in the vacuum exhaust apparatus according to the present invention. FIG. 24 is a diagram showing another aspect of the turbo molecular pump in the vacuum exhaust apparatus according to the present invention. FIG. 25 is a diagram showing another aspect of the turbo molecular pump in the vacuum exhaust apparatus according to the present invention.

Hereinafter, an embodiment of an evacuation apparatus according to the present invention will be described with reference to FIGS. 1 to 25, the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.
1 (a), (b), and (c) are views showing a first embodiment of the vacuum exhaust apparatus according to the present invention, and FIG. 1 (a) is a partial sectional front view of the vacuum exhaust apparatus, FIG. FIG. 1B is a partial cross-sectional side view of the vacuum exhaust apparatus, and FIG. 1C is a partial cross-sectional bottom view of the vacuum exhaust apparatus.
As shown in FIGS. 1 (a), (b), and (c), the vacuum evacuation device of the present invention includes a first vacuum pump 1 capable of evacuating to a high vacuum or lower, and from atmospheric pressure to medium vacuum or low vacuum. A device having a second vacuum pump 2 that can be evacuated and exhausting from atmospheric pressure to an ultra-high vacuum region, wherein the first vacuum pump 1 and the second vacuum pump 2 are unitized and configured as an integrated device Has been. That is, the first vacuum pump 1 and the second vacuum pump 2 are connected and integrated. The first vacuum pump 1 is a turbo molecular pump, and the second vacuum pump 2 is a dry vacuum pump. The exhaust port of the first vacuum pump 1 and the intake port of the second vacuum pump 2 are connected by an exhaust passage component 3.

  Normally, when the gas in a given container is evacuated from the atmospheric pressure region to the ultra-high vacuum region, first, after evacuating to a medium vacuum pressure using a positive displacement pump (dry pump) as the second vacuum pump, The exhaust operation is performed following the stage of starting the turbo molecular pump as the vacuum pump and exhausting to the ultra-high vacuum region. In the conventional method, a second vacuum pump (for example, a dry pump) that handles medium vacuum pressure and a first vacuum pump (for example, a turbo molecular pump) that handles an ultra-high vacuum range are prepared, and a series of exhaust is possible. The exhaust system was constructed by connecting with piping. However, in such a method, even if the same container is exhausted depending on the length and diameter of the exhaust pipe connecting the dry pump and the turbo molecular pump, fluctuations in the exhaust time and power required for exhausting, Special knowledge may be required in equipment planning, such as the need to change the selection of itself.

  In the present invention, the first vacuum pump 1 composed of a turbo molecular pump and the second vacuum pump 2 composed of a dry vacuum pump are integrated into a unit so that the user can perform one ultra-high vacuum exhaust in the container. The pump system can be constructed and implemented, and the combination of a turbo molecular pump and a dry vacuum pump allows each pump to have appropriate power consumption in the mid-vacuum and ultra-high vacuum ranges. It becomes possible to exhaust. Therefore, the present invention is a pump that does not essentially become an operation state with poor exhaust efficiency as a pump system, for example, a pump that exhausts in the ultra-high vacuum region with a positive displacement vacuum pump or exhausts in the atmospheric region with a momentum transfer pump. Can be provided.

  The above "connecting and integrating the first vacuum pump 1 and the second vacuum pump 2" means connecting and integrating the first vacuum pump 1 and the second vacuum pump 2, As shown in FIG. 1 (a), one physical pump unit is used. In this case, a control device that collectively controls the operation of the entire pump of the vacuum exhaust device may be attached to the unit and integrated, or may be installed in the vicinity of the unit.

  As shown in FIGS. 1 (a), (b), and (c), the second vacuum pump 2 is composed of a screw-type dry vacuum pump, and includes a pair of screw rotors 52a and 52b in the pump casing. (To be described later).

FIG. 2 is a schematic cross-sectional view showing a detailed structure of the first vacuum pump 1 shown in FIG.
As shown in FIG. 2, the turbo molecular pump constituting the first vacuum pump 1 includes a turbine blade exhaust part 10 and a thread groove exhaust part 20 in the pump casing 9 sequentially from the intake port side to the exhaust port side. It is arranged and configured. The turbine blade exhaust unit 10 includes a turbine blade 11 as a multistage rotor blade, and a multistage stationary blade 14 arranged immediately after the turbine blade 11. The multistage turbine blades 11 are formed integrally with a substantially cylindrical rotor 12, and the rotor 12 is fixed to a rotating shaft 13. On the other hand, the multistage stationary blades 14 are fixed to the pump casing 9 by being sandwiched by spacers 15 stacked in the pump casing 9. Thereby, in the turbine blade exhaust part 10, the turbine blades 11 as the rotating blades and the fixed blades 14 are alternately arranged.

The thread groove exhaust portion 20 includes a cylindrical thread groove 21 formed on the outer peripheral surface of the cylindrical rotor 12 and a cylindrical thread groove spacer 22 disposed to face the outer peripheral side of the cylindrical thread groove 21. It is configured. The thread groove spacer 22 is fixed to the pump casing 9.
A stator 25 is disposed inside the rotor 12, and the stator 25 includes a base portion 26 fixed to the lower flange 9 lf of the pump casing 9 and a sleeve portion 27 extending upward from the base portion 26. The sleeve portion 27 of the stator 25 is provided with a bearing motor portion 30 having a motor that applies a rotational driving force to the rotary shaft 13 and a bearing that rotatably supports the rotary shaft 13.

  The bearing motor unit 30 includes a motor 31 that applies a rotational driving force to the rotary shaft 13, an upper radial magnetic bearing 32 and a lower radial magnetic bearing 33 that support the rotary shaft 13 in the radial direction, and an exhaust side by an exhaust action of the exhaust unit. And a thrust magnetic bearing 34 acting in a direction to cancel the thrust force generated by the differential pressure on the intake side. The motor 31 is composed of a high frequency motor. The upper radial magnetic bearing 32, the lower radial magnetic bearing 33, and the thrust magnetic bearing 34 are all active magnetic bearings.

  An upper flange 9uf is formed at the upper end of the pump casing 9, and the inside of the upper flange 9uf is an intake port SP, and a vacuum vessel (vacuum chamber) to be evacuated is connected to the upper flange 9uf. Further, a flange 26f is formed on the base portion 26 of the stator 25, and the inside of the flange 26f is an exhaust port DP. An exhaust passage part 3 (see FIG. 1) is connected to the flange 26 f, and the first vacuum pump 1 including a turbo molecular pump is communicated with the second vacuum pump 2 by the exhaust passage part 3.

  FIG. 3 is a schematic cross-sectional view showing a detailed structure of the second vacuum pump 2 shown in FIG. As shown in FIG. 3, the second vacuum pump 2 is composed of a screw-type dry vacuum pump. Two rotary shafts 51 a and 51 b are arranged in parallel in a pump casing 50 of the vacuum pump, and the rotary shafts 51 a and 51 b are rotatably supported by bearings 53. A screw rotor 52a having right-handed teeth is fixed to the rotating shaft 51a, and a screw rotor 52b having left-handed teeth is fixed to the rotating shaft 51b. The screw rotors 52a and 52b are arranged side by side in alignment between the bearings 53 that support the rotary shafts 51a and 51b.

  As shown in FIG. 3, a minute clearance is formed between the outer peripheral portions of the screw rotors 52 a and 52 b and the inner peripheral surface of the pump casing 50, and the screw rotors 52 a and 52 b rotate without contact in the pump casing 50. It is possible. Also, right-handed and left-handed teeth are formed at the opposing portions of the screw rotors 52a and 52b, and the screw rotors 52a and 52b rotate in a non-contact manner. A pair of magnet rotors 54, 54 are fixed to the ends of the rotating shafts 51a, 51b. In addition, an intake port SP and an exhaust port DP are provided on a side surface of the pump casing 50 (a surface parallel to the paper surface of FIG. 3). The intake port SP of the second vacuum pump 2 is connected to the exhaust port DP of the first vacuum pump 1 by an exhaust passage component 3 (see FIG. 1). One bearing 53 is fixed to the pump casing 50, and the other bearing 53 is fixed to the bearing housing 55 and the bearing retainer 56. The bearing housing 55 is fixed to the pump casing 50, and the bearing retainer 56 is fixed to the bearing housing 55.

  4 is a cross-sectional view taken along line IV-IV in FIG. As shown in FIG. 4, the pair of magnet rotors 54, 54 have the same configuration and are arranged in parallel. Each magnet rotor 54 includes a yoke 54b made of a magnetic material and a ring-shaped magnet 54a attached to the outer peripheral surface thereof. The magnet 54a is magnetized to 8 poles, and thereby, 8-pole magnetic poles are formed on the outer peripheral surface of each magnet rotor 54. Although the number of magnetic poles of the magnet rotor 54 is eight, the number of magnetic poles may be an even number (2n: n = 1, 2,...). The pair of magnet rotors 54, 54 are opposed to each other so that different magnetic poles attract each other, and are disposed with a clearance C maintained. The pair of screw rotors 52a and 52b can be rotated in synchronism in the opposite directions smoothly by the magnet coupling action of the pair of magnet rotors 54 and 54. In addition, when it is desired to further increase the force of the pair of screw rotors 52a and 52b rotating in synchronization, not only one set of magnet rotors but also a plurality of sets may be attached to the rotating shafts 51a and 51b.

  The screw-type dry vacuum pump has a driving method by a three-phase (U, V, W) armature 57 composed of an iron core 57a and a winding 57b arranged close to a part of the outer peripheral surface of each magnet rotor 54. Adopted. Two sets of three-phase armatures 57 are arranged on the side opposite to the side where the magnet rotors 54 face each other. This has the aim of canceling the force that the magnet rotors 54 attract each other by the attractive force acting between the magnet rotor 54 and the iron core 57a. Note that the opening angle of each phase of the armature 57 arranged around the rotation shafts 51a and 51b is 60 degrees.

Three-phase winding _{57b (U 1, V 1,} W 1, U 1 ', V 1', W 1 ') is biaxially synchronized by a pair of magnet rotors 54, 54 and a pair of armature 57 A brushless DC motor is configured. The windings U ₁ ′, V ₁ ′, W ₁ ′ are wound in the opposite direction to the windings U ₁ , V ₁ , W ₁ , respectively. According to the magnetic pole position of the magnet rotor 54, the magnet rotor 54 is driven by switching six energizations of i _UV , i _VW , i _WU , i _VU , i _WV , i _UW .

  According to the screw-type dry vacuum pump shown in FIGS. 3 and 4, the two-axis screw rotors 52a and 52b are synchronized in opposite directions with a motor having a simple configuration including a permanent magnet and a winding for rotating the permanent magnet. Can be rotated. Therefore, a timing gear that synchronizes the biaxial screw rotors 52a and 52b is unnecessary, and the pump can realize oil-free, low vibration and noise. If oil is used for bearings, timing gears, etc., if the pump is tilted, the oil leaks, so the mounting posture of the pump is limited, but the mounting posture of the pump can be freely selected because it is oil-free. In addition, there is no vibration or noise associated with timing gear contact.

  By using the dry pump having such a structure as the second vacuum pump 2, vibrations transmitted from the second vacuum pump 2 to the first vacuum pump 1 can be suppressed. One vacuum pump 1 can be connected and integrated. When integrating the first vacuum pump 1 and the second vacuum pump 2, the mounting posture of the second vacuum pump 2 can be freely selected. And when attaching the unit which united the 1st vacuum pump 1 and the 2nd vacuum pump 2 to exhaust objects, such as a vacuum vessel (vacuum chamber), it can choose the attachment posture of an integrated unit freely. Can do.

  Next, refer to FIGS. 1A, 1B, and 1C for the mounting posture when mounting the second vacuum pump 2 configured as shown in FIGS. 3 and 4 to the first vacuum pump 1. FIG. To explain. As shown in FIGS. 1A, 1 </ b> B, and 1 </ b> C, the second vacuum pump 2 has a pair of screw rotors 52 a and 52 b arranged in parallel in a direction parallel to the lower surface of the first vacuum pump 1. Is attached. That is, the pair of screw rotors 52a and 52b in the second vacuum pump 2 includes the first rotor 52a and the shaft center 52ax and 52bx of the rotor 52b that are orthogonal to the shaft center 1x of the first vacuum pump 1 and the first rotor. The vacuum pump 1 is set so as to be spaced apart from the lower surface of the vacuum pump 1 by the same distance.

FIGS. 5A, 5 </ b> B, and 5 </ b> C are diagrams illustrating another example of the mounting posture when the second vacuum pump 2 is mounted to the first vacuum pump 1. FIG. FIG. 5B is a partial cross-sectional front view of the vacuum exhaust device, FIG. 5B is a partial cross-sectional side view of the vacuum exhaust device, and FIG. 5C is a partial cross-sectional bottom view of the vacuum exhaust device.
As shown in FIGS. 5A, 5 </ b> B, and 5 </ b> C, the second vacuum pump 2 is attached so that a pair of screw rotors 52 a and 52 b are vertically aligned with the lower surface of the first vacuum pump 1. It has been. The pair of screw rotors 52a and 52b in the second vacuum pump 2 includes the first vacuum pump in which the shaft centers 2ax and 2bx of the screw rotors 52a and 52b are orthogonal to the shaft center 1x of the rotating shaft of the first vacuum pump 1. 1 is set so as to be parallel to each other with a vertical interval from the bottom surface.

  When the vacuum pumping apparatus shown in FIG. 1 and FIG. 5 integrates the first vacuum pump 1 composed of a turbo molecular pump and the second vacuum pump 2 composed of a dry vacuum pump into a unit, the second vacuum pump 2 is an evacuation apparatus in which the axis of the rotation axis of 2 and the axis of the rotation axis of the first vacuum pump 1 are arranged in a direction orthogonal to each other.

  In the dry vacuum pump and the turbo molecular pump, there is no significant difference in the directionality of vibration generated during operation, that is, in the direction where the vibration energy is large, and the rotating body unwinds in the radial direction of the rotating shaft. Vibration due to balance occurs. If the rotating shaft of the turbo molecular pump and the rotating shaft of the dry vacuum pump are arranged in parallel (in series) in the unitized vacuum exhaust apparatus of the present invention, the shaft center of the rotating shaft is Rotational vibration generated in the orthogonal direction (radial direction) may occur simultaneously in the dry pump and the turbo molecular pump, and resonance vibration may occur. Moreover, radial vibrations are superimposed and transmitted to the vacuum container as excessive vibrations. For this reason, in the present invention, the first vacuum pump 1 attached to the vacuum vessel side is disposed by arranging the axis of the rotating shaft of the dry vacuum pump and the axis of the rotating shaft of the turbo molecular pump in an orthogonal direction. In this structure, the radial vibration component of the rotating shaft is suppressed.

  The turbo molecular pump generally used in the first vacuum pump has a free mounting posture as described above, and can be mounted in any direction around the vacuum container. It contributes greatly to. The vacuum evacuation device of the present invention can maintain the characteristics, but when the two pumps are unitized, the shaft center 1x of the first vacuum pump 1 on the side directly attached to the vacuum vessel is unitized. The position of the center of gravity of the evacuated device is adjusted. As a result, for example, when the vacuum evacuation device is installed horizontally, no torsional moment is generated with respect to the shaft center 1x of the first vacuum pump 1, and the deformation on the side of the vacuum vessel to which the vacuum evacuation device is attached is simplified. Or, the installation method is simplified. In addition, the generated vibration does not generate vibration in the torsional direction, and vibration suppression is easy. Since the vacuum evacuation device is installed in the vicinity of the vacuum vessel or directly connected to the vacuum vessel, suppression of vibration is important.

  The bearing that supports the rotating shaft of the first vacuum pump 1 and the bearing that supports the rotating shaft of the second vacuum pump 2 are self-lubricating materials or rolling bearings containing grease or the like in the raceway, or Uses either self-lubricating journal bearings or non-contact bearings such as gas bearings or magnetic bearings, and keeps the rotating shaft rotating in a healthy state regardless of the installation direction. It is possible. Since the vacuum evacuation device of the present invention is a pump unit that is combined into one in appearance, the user is not aware that a dry vacuum pump and a turbo molecular pump are combined inside. A general dry vacuum pump uses a lubricating oil having a low viscosity, such as mineral oil, in the bearing portion, and therefore has a certain degree of restriction in the mounting direction of the pump itself. On the other hand, since the turbo molecular pump supports the rotating body using a ball bearing or non-contact bearing using a lubricating oil mainly composed of grease, there is no particular limitation in the mounting direction. The dry vacuum pump of the present invention uses a bearing that can support a rotating body without using low-viscosity lubricating oil such as mineral oil in the bearing portion, so that there is a particular restriction in the mounting direction as a pump unit. The structure does not occur.

  Next, a description will be given of a control device that collectively controls the operation of the entire pump. The two pumps, the first vacuum pump 1 and the second vacuum pump 2, have separate drive systems (motors). For example, the motor drive power supply specifications are unified and the parts are accommodated in a single box. Therefore, the volume can be reduced and the cost can be reduced rather than dividing the control devices separately. It is desirable to install the control device on the first vacuum pump side. Compared with a turbo molecular pump, a dry pump is at a high temperature due to the generation of heat of compression accompanying compression to atmospheric pressure. In addition, the vibration level of the turbo molecular pump is much smaller than that of the positive displacement dry pump. For this reason, a control device equipped with a large number of precision electronic components is not subject to thermal and vibration effects when installed on the turbo molecular pump side rather than a dry pump, thereby improving the reliability of the entire unit.

FIGS. 6A and 6B are front views showing a vacuum exhaust apparatus in which the control device 4 is installed in the first vacuum pump 1.
In the example shown in FIG. 6A, the control device 4 is attached to the outer peripheral surface of the first vacuum pump 1.
In the example shown in FIG. 6B, the control device 4 is attached to the lower surface of the first vacuum pump 1. Note that an anti-vibration mechanism may be provided in an attachment portion for attaching the control device 4 to the first vacuum pump 1. Anti-vibration rubber (natural rubber, nitrile rubber, silicon rubber, fluorine rubber, etc.), a spring, etc. can be considered as the vibration-proof mechanism.
In the embodiment shown in FIGS. 6A and 6B, an example in which the control device 4 is installed on the first vacuum pump (turbomolecular pump) side is given. However, the control device is installed separately from the pump side. If it is better to do so, the selection is arbitrary.

7A and 7B are schematic cross-sectional views showing an aspect in which the bottom part of the first vacuum pump 1 and the pump casing of the second vacuum pump 2 are integrated.
In the example shown in FIG. 7A, the bottom part 40 of the first vacuum pump 1 and the pump casing 50 of the second vacuum pump 2 are configured as an integrated part 60.
In the example shown in FIG. 7 (b), the bottom part 40 of the first vacuum pump 1 and the pump casing 50 of the second vacuum pump 2 are configured as an integrated part 60. An exhaust passage 3a for communicating the one vacuum pump 1 and the second vacuum pump 2 is taken in.

  As shown in FIGS. 7A and 7B, by sharing the bottom part 40 and the pump casing 50, the number of parts can be reduced (cost reduction) and the volume of the entire unit can be reduced. Moreover, as shown in FIG.7 (b), the exhaust passage 3a of two pumps can also be taken in into the integrated component 60. FIG. If the exhaust paths of the two pumps can be shortened, the conductance increases and the capacity of the second vacuum pump 2 is reduced. If it does so, the further cost reduction and volume reduction in the whole unit can be achieved. Further, since the bottom part 40 and the pump casing 50 are integrated, the thermal conductivity of the two pumps is improved. The second vacuum pump 2 that compresses to atmospheric pressure consumes more power and generates more heat than the first vacuum pump 1 on the ultra-high vacuum side. In the case where the second vacuum pump 2 uses cooling water, if the thermal conductivity between the two pumps is increased, only the cooling mechanism installed in the second vacuum pump 2 can efficiently The stand pump can be cooled (heat radiation).

  When cooling water is not used for cooling the second vacuum pump 2, the fastening portion is insulated to deteriorate the thermal conductivity between the fastening surfaces of the first vacuum pump 1 and the second vacuum pump 2. It is also effective to provide a member, or to reduce the contact cross-sectional area of the fastening portion, or both. When cooling water is not used for cooling the second vacuum pump, the heat dissipation method is forced air cooling. As described above, the second vacuum pump that compresses to atmospheric pressure consumes more power and generates more heat than the first vacuum pump on the ultra-high vacuum side. Compared to specifications that can efficiently exhaust heat with cooling water, the exhaust heat performance with forced air cooling is inferior, and if the thermal conductivity between the two pumps is good, the amount of heat generated from the second vacuum pump is the first. It is conceivable that some conductivity is transmitted to the one vacuum pump side, and in some cases, the operation of the first vacuum pump may be hindered. Therefore, heat conduction between the two pumps is deteriorated, and heat conduction from the second vacuum pump 2 to the first vacuum pump 1 is suppressed as much as possible. Then, heat is exhausted locally using an air cooling fan or the like that matches the cross-sectional area of the second vacuum pump. When heat from the second vacuum pump is conducted to the first vacuum pump and both the first and second vacuum pumps must be air-cooled, the air flow is efficiently distributed to the two pumps. Thus, it is necessary to design and install a fan and a duct (cover) that guides the air flow. However, in the case of local air cooling with only the second vacuum pump, they are simplified. As the heat insulating member, ceramics (alumina, yttria, zirconia), stainless alloy, plastic (PEEK, PTFE), and the like are conceivable.

  FIG. 8 is a schematic view showing an aspect in which a vibration isolation mechanism 61 is provided between the fastening surfaces of the first vacuum pump 1 and the second vacuum pump 2. In the present invention, since the second vacuum pump 2 is configured such that the pair of screw rotors rotate synchronously by the magnetic coupling action, a timing gear for synchronizing the two-axis screw rotors is not necessary. The vibration of the vacuum pump 2 can be drastically reduced. Nevertheless, the vibration of the second vacuum pump 2 that compresses and exhausts to atmospheric pressure is larger than that of the first vacuum pump 1 composed of a turbo molecular pump. Therefore, as shown in FIG. 8, the vibration level transmitted to the first vacuum pump 1 can be increased by providing a vibration isolation mechanism 61 for preventing vibration from the second vacuum pump 2 at the fastening portion of the two pumps. Further reduction can be achieved. As the anti-vibration mechanism 61, anti-vibration rubber (natural rubber, nitrile rubber, silicon rubber, fluorine rubber, etc.), a spring, etc. can be considered.

  Further, in the vacuum exhaust apparatus shown in FIG. 8, the exhaust passage part 3 that connects the exhaust port of the first vacuum pump 1 and the intake port of the second vacuum pump 2 is made of a vibration-proof material. When the exhaust passage part 3 is made of a material or structure having high rigidity, vibration may be conducted from the part. By molding the exhaust passage part 3 with a material having an anti-vibration action, vibrations propagating from the second vacuum pump 2 to the first vacuum pump 1 can be suppressed. As a vibration-proof material, a rubber material such as natural rubber, nitrile rubber, silicon rubber, or fluorine rubber may be used and molded into a tube shape or a block shape. When the exhaust passage part 3 is made of a vibration-proof material part such as rubber, it deforms due to the pressure difference from the atmosphere when the inside of the exhaust passage part 3 is evacuated. Although there is a difference in the degree of deformation depending on the material and shape of the part, a metal coil spring may be inserted inside to suppress deformation. If it is a spring, it will not prevent bending as a vibration-proof material part connected in vacuum. In addition, it is possible to arbitrarily determine how long the coil spring is inserted with respect to the length of the vibration isolating material part.

FIG. 9 is a schematic view showing an aspect in which a vibration isolation mechanism is provided in a fastening part that fastens the first vacuum pump 1 and the second vacuum pump 2. As shown in FIG. 9, a fastening component 62 is installed between the first vacuum pump 1 and the second vacuum pump 2. A plurality of vibration isolating bushes 63 are attached to the fastening part 62, and the fastening bolts 64 are inserted into the vibration isolating bushes 63 and screwed into the first vacuum pump 1, thereby fastening parts. 62 is fixed to the first vacuum pump 1 via an anti-vibration bush 63.
Further, the fastening part 62 is formed with an exhaust passage 62a that communicates with the intake port SP of the second vacuum pump 2 and an exhaust passage 62b that communicates with the exhaust port DP of the second vacuum pump 2. . The exhaust passage 62 a of the fastening part 62 is connected to the exhaust port DP (see FIG. 2) of the first vacuum pump 1 by the exhaust passage part 3. The exhaust passage 62b of the fastening part 62 allows the exhaust port DP of the vacuum pump 2 to communicate with the atmosphere. The exhaust passage part 3 is composed of a vibration-proof material part made of a rubber material or the like.

FIGS. 10A, 10B, and 10C are views showing a detailed structure of a fastening portion including the fastening component 62 and the vibration isolating bush 63 shown in FIG. 9, and FIG. 10A is a cross section of the fastening portion. FIG. 10 (b) is a bottom view of the fastening portion, and FIG. 10 (c) is an exploded perspective view of the vibration isolating bush 63.
As shown in FIGS. 10 (a) and 10 (b), the fastening component 62 is provided with a plurality of through holes 62h, and flanges 62f (inwardly projecting radially inward from the inner peripheral walls of these through holes 62h). FIG. 10A is formed. As shown in FIG. 10C, the vibration isolating bush 63 includes an upper member 63a composed of a large-diameter ring-shaped portion and a small-diameter ring-shaped portion and a lower member 63b composed of a ring-shaped member. As shown in FIG. 10 (a), the upper member 63a has a small-diameter ring-shaped portion fitted to the inner peripheral surface of the flange portion 62f of the fastening part 62, and a lower surface of the large-diameter ring-shaped portion is the flange portion 62f. Is attached to the fastening part 62 by abutting on the upper surface of the member. The lower member 63b is fitted to the outer peripheral surface of the small-diameter ring-shaped portion of the upper member 63a and is in contact with the lower surface of the flange portion 62f. The fitting portion between the upper member 63a and the lower member 63b is integrated with an adhesive or the like, so that the flange portion 62f of the fastening component 62 is sandwiched between the upper member 63a and the lower member 63b. Accordingly, the vibration isolating bush 63 is attached to the fastening component 62. Thereafter, the fixing bolt 64 is inserted into the vibration isolating bush 63 and the fixing bolt 64 is tightened into the first vacuum pump 1 with a washer 65 interposed between the bolt head and the vibration isolating bush 63. The fastening part 62 is fixed to the first vacuum pump 1 via the vibration-proof bush 63. The fastening component 62 and the second vacuum pump 2 are fixed by bolts or the like.

  According to the present invention, as shown in FIGS. 10A, 10 </ b> B, and 10 </ b> C, the first vacuum pump 1 and the second vacuum pump are used by using a vibration isolation mechanism including a plurality of vibration isolation bushes 63. By fastening 2, the vibration level transmitted from the second vacuum pump 2 to the first vacuum pump 1 can be reduced.

FIGS. 11A and 11B show an embodiment in which a pump unit (evacuation device) in which a first vacuum pump 1 and a second vacuum pump 2 are integrated is attached to a vacuum vessel (vacuum chamber) 5. FIG. In the embodiment shown in FIGS. 11A and 11B, an example of attaching the unit (evacuation apparatus) shown in FIG. 1 to the vacuum vessel is shown.
In the embodiment shown in FIG. 11A, the pump unit in which the first vacuum pump 1 and the second vacuum pump 2 are integrated is attached below the vacuum vessel 5, and the first vacuum pump 1 is arranged so that its axis is in the vertical direction. The axis of the screw rotors 52a and 52b of the second vacuum pump 2 and the axis of the first vacuum pump 1 are orthogonal.
In the embodiment shown in FIG. 11B, the pump unit in which the first vacuum pump 1 and the second vacuum pump 2 are integrated is attached to the side of the vacuum vessel 5, and the first vacuum pump 1 It arrange | positions so that the axial center of the pump 1 may become a horizontal direction. The axis of the screw rotors 52a and 52b of the second vacuum pump 2 and the axis of the first vacuum pump 1 are orthogonal.
A unit in which the first vacuum pump 1 and the second vacuum pump 2 are integrated may be attached above the vacuum vessel 5. Further, as shown in FIG. 5, the pump unit in which the first vacuum pump 1 and the second vacuum pump 2 are integrated is also attached to the vacuum vessel 5 with the same mounting posture as that of FIGS. 11 (a) and 11 (b). Can do.

Next, the attachment posture when attaching the second vacuum pump 2 to the first vacuum pump 1 will be further described.
12 (a) and 12 (b) are views showing a mounting posture in which the second vacuum pump 2 is attached to the side surface of the first vacuum pump 1, and FIG. 12 (a) is a partial sectional front view. (B) is a bottom view.
As shown in FIGS. 12A and 12B, the second vacuum pump 2 is attached to the side surface of the first vacuum pump 1. That is, the outer surface of the cylindrical pump casing of the first vacuum pump 1 is cut out flat, and the second vacuum pump 2 is fixed to the flat surface. In the example shown in FIGS. 12A and 12B, the shaft center 1x of the first vacuum pump 1 and the shaft centers 52ax and 52bx of the screw rotors 52a and 52b of the second vacuum pump 2 are arranged in parallel. ing. In the example shown in FIG. 1 and FIG. 5, the rotational axis of the first vacuum pump 1 and the rotational axis of the second vacuum pump 2 are orthogonal to avoid resonance vibration in the radial direction. Since the second vacuum pump 2 is configured such that the pair of screw rotors rotate synchronously by the magnetic coupling action, a timing gear for synchronizing the two-axis screw rotor is unnecessary, and the second vacuum pump 2 vibration can be dramatically reduced. Therefore, even if the rotating shaft of the first vacuum pump 1 and the rotating shaft of the second vacuum pump 2 are arranged in parallel, there is no possibility that radial resonance vibration will occur.

13A, 13B, and 13C, the second vacuum pump 2 is attached to the side surface of the first vacuum pump 1, and the first vacuum pump 1 and the second vacuum pump 2 are fastened. It is a figure which shows the example which provided the anti-vibration mechanism in the fastening component, Fig.13 (a) is a partial cross section front view, FIG.13 (b) is a partial cross section bottom view, FIG.13 (c) shows the detailed structure of a fastening part. It is sectional drawing shown.
As shown in FIGS. 13 (a) and 13 (b), the second vacuum pump 2 is attached to the side surface of the first vacuum pump 1, and between the first vacuum pump 1 and the second vacuum pump 2. The fastening part 62 is installed. A plurality of vibration isolating bushes 63 are attached to the fastening part 62, and the fastening bolts 64 are inserted into the vibration isolating bushes 63 and screwed into the first vacuum pump 1, thereby fastening parts. 62 is fixed to the first vacuum pump 1 via an anti-vibration bush 63.
As shown in FIG. 13 (c), the fastening part 62, the vibration isolating bush 63, the fixing bolt 64 and the washer 65 have the same configuration as that shown in FIGS. 10 (a), (b) and (c). The mounting method is also the same.

FIG. 14 is a schematic view showing a mode in which a backflow prevention valve is provided in the exhaust passage part 3 that connects the exhaust port of the first vacuum pump 1 and the intake port of the second vacuum pump 2. As shown in FIG. 14, a pump unit in which the first vacuum pump 1 and the second vacuum pump 2 are integrated is attached to a vacuum vessel 5. A backflow prevention valve 6 is installed in the exhaust passage part 3 that connects the exhaust port of the first vacuum pump 1 and the intake port of the second vacuum pump 2.
In the present invention, the first vacuum pump 1 and the second vacuum pump 2 are integrated, including an exhaust passage between the first vacuum pump 1 composed of a turbo molecular pump and the second vacuum pump 2 composed of a dry pump. Since the pressure condition of the flow path is known and an abnormality occurs in the operation state of each pump, for example, when the back pressure of the turbo molecular pump suddenly rises due to the failure of the exhaust side dry pump, By installing the backflow prevention valve 6 having a structure that automatically closes itself with a predetermined pressure difference inside the exhaust passage part 3, it is possible to prevent a sudden pressure increase on the exhaust side of the turbo molecular pump. .

  FIG. 15 is a schematic view showing an aspect in which a bypass pipe is provided to connect the intake port of the first vacuum pump 1 and the intake port of the second vacuum pump 2 to bypass the first vacuum pump 1. As shown in FIG. 15, a bypass pipe 7 that connects the intake port of the first vacuum pump 1 and the intake port of the second vacuum pump 2 is installed. By providing the bypass pipe 7, the first vacuum pump can be bypassed by directly exhausting air from the intake port of the first vacuum pump to the intake port of the second vacuum pump. Even when the vacuum break occurs, the breakage of the rotating body due to a sudden load increase on the first vacuum pump 1 can be prevented.

  Further, the bypass pipe 7 is provided with a bypass valve 8 that opens a flow path directly to the second vacuum pump 2 when the pressure on the vacuum vessel side suddenly rises. The bypass valve 8 is a bypass valve having a structure that automatically opens and closes under pressure conditions of the pipe. In the present invention in which the first vacuum pump 1 composed of a turbo molecular pump and the second vacuum pump 2 composed of a dry pump are integrated into a unit, the channel piping between both pumps is also configured under optimum conditions. It is feasible to be able to.

  In the above-described embodiment, the screw type dry pump has been described as an example of the second vacuum pump. However, a roots type dry pump, a diaphragm pump, a scroll pump, or the like may be used as the second vacuum pump. . However, since the diaphragm pump is a pump based on the exhaust principle that transfers gas by volume change due to the vertical movement of the thin film, when the second vacuum pump is a diaphragm pump, considering the vibration reduction in the entire vacuum exhaust device, the diaphragm pump The vertical movement direction (vibration direction) of the first vacuum pump and the axial direction of the first vacuum pump are preferably parallel.

Next, a control method of a control device that controls the first vacuum pump 1 and the second vacuum pump 2 will be described.
(1) Normally, when adjusting the pumping speed of the pump, the suction side opening area is adjusted by using a valve or the like. On the other hand, in the present invention, the pressure in the vacuum vessel is not controlled by adjusting the opening of the valve provided between the vacuum vessel and the pump (opening area adjustment), but the first vacuum pump 1 or the second vacuum. By controlling the pump rotation speed (pump rotation speed) of one or both of the pumps 2, it is possible to adjust the exhaust speed of each vacuum pump and adjust the exhaust speed of the entire pump system. That is, it is possible to adjust the pressure inside the vacuum vessel without using a device such as a control valve other than the pump, with one pump system.

(2) In FIG. 16, the rotational speed of each pump was controlled as a method of adjusting the pressure adjustment in the container while the first vacuum pump was a turbo molecular pump and the second vacuum pump was a dry pump. It is the graph which compared the vacuum evacuation device of this invention with the conventional vacuum evacuation device about the rotation speed (rotation speed) and pressure change in the case.
When the piping between the first vacuum pump (turbo molecular pump) and the second vacuum pump (dry pump) is installed at a very short distance as in the vacuum exhaust apparatus of the present invention, pressure adjustment is started. After that, the number of rotations of the first vacuum pump is lowered, and the second vacuum pump is started to decelerate when the pressure in the vacuum vessel reaches a predetermined condition (second vacuum pump deceleration start point). Since the length of the pipe connecting the two pumps is short, the pressure change of the vacuum vessel with respect to the deceleration of the second vacuum pump is fast, and as a result, the target vacuum vessel pressure (pressure adjustment completion point) can be reached in the shortest time. . However, when the piping between the first vacuum pump and the second vacuum pump is long as in the conventional vacuum evacuation device, a delay occurs in the pressure change of the vacuum vessel with respect to the deceleration of the second vacuum pump. It takes time to reach the vacuum vessel pressure (pressure adjustment completion point).

第一真空ポンプを1とした場合の第二真空ポンプの概略排気速度比：1/400
第一真空ポンプを1とした場合の第二真空ポンプの概略軸方向寸法比：１〜0.7
第一真空ポンプを1とした場合の第二真空ポンプの概略容積比：0.4

第一真空ポンプを1とした場合の第二真空ポンプの概略排気速度比：1/400
第一真空ポンプを1とした場合の第二真空ポンプの概略軸方向寸法比：0.8〜0.6
第一真空ポンプを1とした場合の第二真空ポンプの概略容積比：0.4
（２）上記組合せで使用できる第二の真空ポンプで、ダイヤフラム型ポンプの場合の例
第二真空ポンプ到達性能：400Pa以下

第一真空ポンプを1とした場合の第二真空ポンプの概略排気速度比：1/1200
第一真空ポンプを1とした場合の第二真空ポンプの概略軸方向寸法比：１.8〜1.3
第一真空ポンプを1とした場合の第二真空ポンプの概略容積比：１

第一真空ポンプを1とした場合の第二真空ポンプの概略排気速度比：1/900
第一真空ポンプを1とした場合の第二真空ポンプの概略軸方向寸法比：１.7〜1.4
第一真空ポンプを1とした場合の第二真空ポンプの概略容積比：2.6 When the first vacuum pump 1 and the second vacuum pump 2 are connected and integrated to construct one pump system, it is desirable to attach the second vacuum pump 2 to the first vacuum pump 1. Therefore, it is desirable that the external dimension of the second vacuum pump 2 is smaller than the external dimension of the first vacuum pump 1.
Next, the external dimensions of the first vacuum pump 1 and the second vacuum pump 2 will be described with specific numerical values. The dimensions described below do not include the electrical system (driver, controller, air cooling fan, etc.), but include only the pump exhaust part and the drive part (motor).
(1) When a magnetic coupling motor is used for the second vacuum pump of the present invention with a biaxial displacement pump (screw type rotor), the second vacuum pump performance: 400 Pa or less

Approximate pumping speed ratio of the second vacuum pump when the first vacuum pump is 1: 1/400
Schematic axial dimension ratio of the second vacuum pump when the first vacuum pump is 1: 1 to 0.7
Approximate volume ratio of the second vacuum pump when the first vacuum pump is 1: 0.4

Approximate pumping speed ratio of the second vacuum pump when the first vacuum pump is 1: 1/400
Schematic axial dimension ratio of the second vacuum pump when the first vacuum pump is 1: 0.8 to 0.6
Approximate volume ratio of the second vacuum pump when the first vacuum pump is 1: 0.4
(2) Example of diaphragm pump with the second vacuum pump that can be used in the above combination Second vacuum pump reachability: 400 Pa or less

Approximate pumping speed ratio of the second vacuum pump when the first vacuum pump is 1: 1/1200
Schematic axial dimension ratio of the second vacuum pump when the first vacuum pump is 1: 1.8 to 1.3
When the first vacuum pump is 1, the approximate volume ratio of the second vacuum pump is 1

Approximate pumping speed ratio of the second vacuum pump when the first vacuum pump is 1: 1/900
Schematic axial dimension ratio of the second vacuum pump when the first vacuum pump is 1: 1.7 to 1.4
Approximate volume ratio of the second vacuum pump when the first vacuum pump is 1: 2.6

As can be seen from the above comparison results, a turbo molecular pump is used for the first vacuum pump of the present invention, a biaxial volume transfer pump (screw type rotor) is used for the second vacuum pump of the present invention, and a magnet coupling motor. Since the volume of the second vacuum pump can be made smaller than the volume of the first vacuum pump, the mounting posture is not restricted when the second vacuum pump is attached to the first vacuum pump. .
Further, by adopting the above combination for the first vacuum pump and the second vacuum pump, a plurality of units can be provided for one first vacuum pump having an exhaust capacity several times that of the second vacuum pump. It is also possible to integrate the second vacuum pump.

  FIG. 17 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of second vacuum pumps 2 are integrated with one first vacuum pump 1. As shown in FIG. 17, two second vacuum pumps 2 are connected to and integrated with one first vacuum pump 1. The exhaust port of the first vacuum pump 1 and the intake ports of the two second vacuum pumps 2 are individually connected by an exhaust passage component 3. In this way, by integrating a plurality of second vacuum pumps 2 with one first vacuum pump 1, a rough exhaust having an exhaust capacity suitable for the exhaust capacity of the first vacuum pump 1 is obtained. It becomes possible to construct a grinding pump.

FIG. 18 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of second vacuum pumps 2 are connected to a single first vacuum pump 1 through an intake / exhaust path and integrated. As shown in FIG. 18, two second vacuum pumps 2 are connected to and integrated with one first vacuum pump 1. The integrated pump unit is attached below the vacuum vessel 5. An exhaust port of one first vacuum pump 1 and an intake port of two second vacuum pumps 2 are connected by an exhaust passage component 3. In this way, by integrating a plurality of second vacuum pumps 2 with one first vacuum pump 1, a rough exhaust having an exhaust capacity suitable for the exhaust capacity of the first vacuum pump 1 is obtained. It becomes possible to construct a grinding pump.
By connecting two second vacuum pumps 2 in parallel to one first vacuum pump 1, it is possible to double the exhaust performance of the second vacuum pump as a whole, When controlling the pressure in the vacuum vessel, the pressure control can be controlled more finely by controlling the pressure regulation control to be performed by one second vacuum pump with two parallel second vacuum pumps. . Moreover, control in a short time becomes possible.
Furthermore, when there is one second vacuum pump, when the second vacuum pump is stopped, the first vacuum pump cannot be continued to operate, and as a result, the pressure in the vacuum vessel rapidly rises. End up. However, if there are two second vacuum pumps, even if one of the second vacuum pumps stops, the other second vacuum pump causes the first vacuum pump to evacuate. The mouth pressure can be made lower than the allowable pressure. Therefore, it is possible to avoid a situation in which the first vacuum pump is stopped and the pressure in the vacuum vessel rapidly increases.

FIG. 19 is a schematic view showing an embodiment of a vacuum exhaust apparatus in which a plurality of first vacuum pumps 1 and one second vacuum pump 2 are connected and integrated through an intake / exhaust path. As shown in FIG. 19, two first vacuum pumps 1 and one second vacuum pump 2 are connected and integrated. The integrated pump unit is attached below the vacuum vessel 5. The exhaust ports of two first vacuum pumps 1 and the intake ports of one second vacuum pump 2 are connected by an exhaust passage component 3. Thus, by integrating the plurality of first vacuum pumps 1 and one second vacuum pump 2, the first vacuum pump 1 can be reduced in size.
When two first vacuum pumps are connected in parallel as shown in FIG. 19 and the second vacuum pump is integrated as a single unit, a high speed is used to increase the exhaust performance of the first vacuum pump. A safe evacuation system can be configured without increasing the size of the rotating pump rotor.

  FIG. 20 is a control circuit diagram of a vacuum exhaust apparatus in which two first vacuum pumps and one second vacuum pump are connected and integrated. As shown in FIG. 20, the motors and inverters for the two first vacuum pumps are indicated by the motor for TMP1, the motor for TMP2, the INV for TMP1, and the INV for TMP2, for one second vacuum pump. These motors and inverters are indicated by a DRY motor and a DDY INV. As shown in this circuit diagram, the three inverters TMP1 INV, TMP2 INV, and DRY INV can be integrally controlled by one controller (CPU). That is, the pressure in the vacuum vessel is optimally controlled by controlling the motor rotation speed of each vacuum pump at a predetermined rotation speed control rate without installing a pressure detector or the like in the intake / exhaust piping of each vacuum pump. Is possible. In FIG. 20, PFC is a power factor correction circuit, and DC / DC is a DC / DC converter.

FIG. 21 shows a method in which one first vacuum pump is constituted by a turbo molecular pump and two second vacuum pumps are constituted by dry pumps, and the rotational speed control of each pump is performed as a method for adjusting the pressure adjustment in the container. It is the graph which showed the change of the rotation speed (rotation speed) and pressure when it performed.
When one first vacuum pump (turbo molecular pump) and two second vacuum pumps (dry pump) are connected and integrated through an intake / exhaust path, pressure adjustment is performed as shown in FIG. Is started, the rotation speed of the first vacuum pump is lowered, and when the pressure in the vacuum vessel rises, the deceleration of one of the two second vacuum pumps is started. At this point, the first vacuum pump continues to decelerate. After stopping the deceleration of the first vacuum pump, the deceleration of the other second vacuum pump is started. Next, the deceleration of the second vacuum pump that has started the deceleration is stopped. The deceleration of the other second vacuum pump is continued, and when the pressure in the vacuum vessel reaches a desired pressure, the deceleration of the other second vacuum pump is stopped. At this point, the pressure adjustment is completed.
Since the three pumps are connected, the pressure change of the vacuum vessel with respect to the deceleration of the second vacuum pump is fast, and the target vacuum vessel pressure (pressure adjustment completion point) can be reached in the shortest time. Furthermore, since the two second vacuum pumps can be used to start and stop the deceleration with a time difference, fine control of the pressure in the vacuum vessel is possible.

22 to 25 are diagrams showing another embodiment of the turbo molecular pump in the vacuum exhaust apparatus according to the present invention.
As shown in FIG. 22, the turbo molecular pump constituting the first vacuum pump 1 includes a rotating blade 111 and a fixed blade 114 along the rotating shaft 113 from the inlet side of the central portion of the pump casing 109 to the left and right sides. Alternatingly arranged. The multistage rotary blades 111 are formed integrally with the rotary shaft 113, and the multistage fixed blades 114 are fixed to the pump casing 109.
The 2nd vacuum pump 2 is comprised similarly to the screw type dry vacuum pump shown by FIG.

  As shown in FIG. 22, the second vacuum pump 2 is attached such that a pair of screw rotors are arranged in parallel in a direction parallel to the lower surface of the first vacuum pump 1. That is, in the pair of screw rotors in the second vacuum pump 2, the axis of the screw rotor and the axis of the rotating shaft of the first vacuum pump 1 are arranged in parallel.

Next, FIG. 23 shows an example in which the mounting posture when the second vacuum pump 2 is attached to the first vacuum pump 1 shown in FIG.
As shown in FIG. 23, the pair of screw rotors in the second vacuum pump 2 has the axis of the screw rotor perpendicular to the axis of the rotary shaft 113 of the first vacuum pump 1 and the first vacuum pump 1. They are arranged so as to be parallel to each other at the same distance from the lower surface.

FIG. 24 shows a vacuum exhaust apparatus in which a fastening part 62 and a vibration isolating bush 63 as shown in FIGS. 9 and 10 are provided between the first vacuum pump 1 and the second vacuum pump 2 shown in FIG. FIG.
25 shows a vacuum exhaust apparatus in which a fastening part 62 and a vibration isolating bush 63 as shown in FIGS. 9 and 10 are provided between the first vacuum pump 1 and the second vacuum pump 2 shown in FIG. FIG. As shown in FIG. 24 and FIG. 25, the first vacuum pump 1 and the second vacuum pump 2 are fastened using a vibration isolation mechanism including a plurality of vibration isolation bushes 63, whereby the second vacuum pump 2. The vibration level transmitted to the first vacuum pump 1 can be reduced.

  Although the embodiment of the present invention has been described so far, the present invention is not limited to the above-described embodiment, and it is needless to say that the present invention may be implemented in various different forms within the scope of the technical idea.

DESCRIPTION OF SYMBOLS 1 1st vacuum pump 2 2nd vacuum pump 3 Exhaust passage part 3a Exhaust passage 4 Control apparatus 5 Vacuum vessel 6 Backflow prevention valve 7 Bypass piping 8 Bypass valve 9,109 Pump casing 10 Turbine blade exhaust part 11,111 Turbine blade DESCRIPTION OF SYMBOLS 12 Rotor 13,113 Rotating shaft 14,114 Fixed blade 15 Spacer 20 Thread groove exhaust part 21 Thread groove spacer 25 Stator 26 Base part 27 Sleeve part 30 Bearing motor part 31 Motor 32 Upper radial magnetic bearing 33 Lower radial magnetic bearing 34 Thrust magnetic bearing 40 Bottom parts 50 Pump casing 51a, 51b Rotating shaft 52a, 52b Screw rotor 53 Bearing 54 Magnet rotor 54a Magnet 54b Yoke 55 Bearing housing 56 Bearing retainer 57 Armature 57a Iron core 57b Winding 60 One Body parts 61 Anti-vibration mechanism 62 Fastening parts 63 Anti-vibration bushes 64 Fixing bolts

Claims (21)

A first vacuum pump that can be evacuated to a high vacuum or lower and a second vacuum pump that can be evacuated from an atmospheric pressure to a medium vacuum or a low vacuum, and a vacuum exhaust device that exhausts from atmospheric pressure to a high vacuum or lower, Connecting and integrating the first vacuum pump and the second vacuum pump;
An anti-vibration mechanism is provided at the connection between the first vacuum pump and the second vacuum pump,
A vacuum exhaust apparatus comprising an exhaust passage component made of a vibration-proof material that connects the exhaust port of the first vacuum pump and the intake port of the second vacuum pump separately from the connecting portion.   2. The vacuum exhaust apparatus according to claim 1, wherein an axis of a rotary shaft of the first vacuum pump and an axis of a rotary shaft of the second vacuum pump are arranged orthogonal to each other.   Bearings that support the rotary shaft of the first vacuum pump and the rotary shaft of the second vacuum pump are self-lubricating bearings, bearings containing semi-solid lubricant or solid lubricant, gas bearings, and magnetic bearings. The rotation shaft is capable of maintaining the rotation of the rotary shaft regardless of the direction in which the first vacuum pump and the second vacuum pump are installed. The vacuum evacuation device according to 1.   The first vacuum pump and the second vacuum pump are integrated by integrating the bottom part of the first vacuum pump and the casing of the second vacuum pump. The vacuum exhaust apparatus according to claim 1.   The vacuum exhaust apparatus according to claim 1, wherein a heat insulating member is provided at a connection portion between the first vacuum pump and the second vacuum pump, or a contact area of the connection portion is reduced.   The evacuation apparatus according to claim 1, wherein the vibration isolation mechanism is made of a vibration isolation material.   The vacuum exhaust apparatus according to claim 1, wherein the first vacuum pump and the second vacuum pump are connected by a plurality of connecting portions.   2. The vacuum according to claim 1, further comprising a bypass flow path that connects the intake port of the first vacuum pump and the intake port of the second vacuum pump to bypass the first vacuum pump. Exhaust system.   From the second vacuum pump to the first vacuum pump during the operation of the first vacuum pump, the exhaust passage part connecting the exhaust port of the first vacuum pump and the intake port of the second vacuum pump. The vacuum exhaust apparatus according to claim 1, further comprising a backflow prevention valve for preventing backflow.   2. The vacuum exhaust apparatus according to claim 1, wherein a controller for controlling the first vacuum pump and the second vacuum pump is connected to the first vacuum pump so as to be integrated or separately provided. .   In the control device, when each of the first vacuum pump and the second vacuum pump reaches a rated rotational speed and there is no gas introduction from the outside into the vacuum container to be exhausted, the motor applied voltage of at least one vacuum pump The evacuation apparatus according to claim 10, wherein the evacuation apparatus can be controlled to continue operation at a maximum motor efficiency point.   The control device maintains the pressure condition in the chamber to be exhausted as a target pressure while individually changing the pump rotation speed according to the exhaust gas flow rate for each of the first vacuum pump and the second vacuum pump. The evacuation apparatus according to claim 10, wherein the evacuation apparatus can be controlled to perform.   The vacuum exhaust apparatus according to any one of claims 1 to 12, wherein the first vacuum pump is a turbo molecular pump, and the second vacuum pump is a dry vacuum pump.   The second vacuum pump is a dry vacuum pump, and a pair of magnet rotors are attached to the rotation shafts of the pair of pump rotors in the dry vacuum pump, and the number of magnetic poles of the magnet rotor is the same, and the magnet rotor is different. At least one of the magnet rotors is driven by switching energization to a multi-phase armature composed of an iron core and a winding disposed at least one radially outer side of the magnet rotor. The evacuation apparatus according to claim 1, wherein the pair of pump rotors are synchronously inverted.   The said 1st vacuum pump and said 2nd vacuum pump are respectively comprised by the combination of 1 unit | set, or the combination of two or more units | sets with respect to 1 unit | set. The vacuum evacuation device according to item 1.   16. The vacuum exhaust apparatus according to claim 15, wherein the first vacuum pump and the second vacuum pump are connected and integrated by an intake / exhaust path.   In the first vacuum pump and the second vacuum pump, the axial dimension ratio of the second vacuum pump when the first vacuum pump is 1 is 1 to 0.6, and the first vacuum pump 17. The vacuum exhaust apparatus according to claim 1, wherein the volume ratio of the second vacuum pump when the pump is 1 is 0.3 to 0.5.   The vacuum evacuation apparatus according to claim 7, wherein each of the plurality of connecting portions includes a vibration-proof material, and the plurality of vibration-proof materials are separated from each other with a space therebetween. The vibration-proof material is attached to a fastening part that fastens the first vacuum pump and the second vacuum pump,
The fastening component is fixed to the first vacuum pump via the vibration isolating material by inserting a fixing bolt through the vibration isolating material and screwing the fixing bolt into the first vacuum pump. The evacuation apparatus according to claim 6 or 18, wherein the evacuation apparatus is provided.   2. The vacuum exhaust according to claim 1, wherein the second vacuum pump is a positive displacement vacuum pump having a pair of rotors, and the pair of rotors are rotated in synchronization with each other in opposite directions by a magnet coupling. apparatus. The axis of the rotating shaft of the first vacuum pump and the axis of the rotating shaft of the second vacuum pump are arranged orthogonal to each other,
The first vacuum pump and the second vacuum pump are integrated by integrating the bottom part of the first vacuum pump and the casing of the second vacuum pump. The vacuum exhaust apparatus according to claim 1.

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