JP5971050B2 - Shape measuring apparatus and shape measuring method - Google Patents

Description

  The present invention relates to a shape measuring device and a shape measuring method.

  As a method for measuring the three-dimensional shape of a measurement object, a method using both a phase shift method and a spatial encoding method is known. In the phase shift method, a plurality of phase shift patterns obtained by shifting the phase of a sinusoidal fringe pattern whose luminance periodically changes by a predetermined amount are projected onto a measurement object. Then, the shape of the measurement object is measured by imaging the measurement object on which the phase shift pattern is projected and obtaining the phase of the sinusoidal fringe pattern for each pixel from the imaged phase shift image.

  However, the phase of the sine wave fringe pattern is only a relative value indicating a value during one period (for example, −π to + π), and in order to obtain the absolute phase of each point, the fringe order of that point is specified. Processing to do is necessary. The fringe order is a value representing an n-th period fringe counted from one end to the other end.

  A spatial coding method is used as a technique for such processing. The spatial coding method uses a spatial code pattern that is a binary pattern of light and dark areas, projects the spatial code pattern onto the measurement object by the number of bits necessary to divide the space, and the spatial code pattern is projected. The measured measurement object is imaged. As the projected spatial code pattern changes, the brightness at each point of the measurement object changes. By combining the light / dark cycle of the spatial code pattern and the cycle of the phase shift pattern, when the mode of change of light / dark at each point of the measurement object is specified, the fringe order at that point can be specified. Thus, according to the spatial coding method, the fringe order of each point can be specified based on the change in brightness at each point.

  In the spatial coding method, the contrast of a spatial code pattern is determined for each pixel from a spatial code image obtained by imaging a measurement object on which the spatial code pattern is projected. For this reason, for example, when determining brightness / darkness from the luminance of each pixel of the spatial code image, it is determined whether the luminance is low because it hits the dark part of the spatial code pattern, or whether the luminance is low because the reflectance of the measurement object is low May be difficult. Therefore, when the reflectance of the measurement target is different at each point of the measurement target, there is a possibility that the light / dark determination may be inaccurate, and the shape of the measurement target may not be measured accurately. Therefore, in addition to the projection and imaging of the spatial code pattern of the bright part and the dark part, a method for accurately determining the brightness by projecting and imaging the inverted code pattern obtained by inverting the bright part and the dark part is known ( For example, see Patent Document 1).

JP 2008-145139 A

  However, in addition to projection and imaging of the spatial code pattern of the bright part and the dark part, the method of projecting and imaging the inverted code pattern obtained by inverting the bright part and the dark part increases the measurement time. An object of the present shape measuring apparatus and shape measuring method is to provide a shape measuring apparatus and a shape measuring method capable of keeping the measurement time short.

The shape measuring apparatus described in the present specification is a pattern in which luminance periodically changes, and includes a plurality of phase shift patterns whose phases are shifted from each other, and a binary pattern of a dark part and a bright part, wherein the bright part And a plurality of spatial code patterns having different periods of the dark portion are separately projected onto the measurement object, an imaging device that images the measurement object, and the plurality of phase shift patterns are projected and the plurality A bright reference image generated with a brightness higher than the average brightness in each pixel from a plurality of phase shift images obtained by imaging the measurement object on which the spatial code pattern is not projected, and a brightness lower than the average brightness in each pixel and the dark reference image generated, a reference image generation unit that generates a reference image including a plurality of spatial code pattern is projected and the plurality of phase shift A plurality of spatial code image captured the turn is not projected the measurement object, it is compared with the bright portion reference image and the dark area reference image to determine the brightness of each pixel of the plurality of spatial code image A calculation unit that calculates the shape of the measurement object using the determination unit, the light / dark information of the plurality of spatial code images determined by the determination unit, and the phase information obtained from the plurality of phase shift images And.

The shape measurement method described in the present specification is a pattern in which luminance is periodically changed and a plurality of phase shift patterns whose phases are shifted from each other is projected, and is a binary pattern of a bright part and a dark part. And a bright part reference image generated with a brightness higher than the average brightness in each pixel from a plurality of phase shift images obtained by imaging a measurement object on which a plurality of spatial code patterns having different periods of the dark part are not projected , and each pixel Generating a reference image including a dark part reference image generated at a luminance lower than the average luminance in the measurement object, and the measurement object on which the plurality of spatial code patterns are projected and the plurality of phase shift patterns are not projected the by comparing the plurality of spatial code image the bright portion reference image and the dark area reference image captured, each of the plurality of spatial code image Using the step of determining lightness and darkness in the element, the light and dark information of the plurality of spatial code images obtained in the step of determining light and darkness, and the phase shift information obtained from the plurality of phase shift images, the measurement target Calculating the shape of the object.

  According to the shape measuring apparatus and the shape measuring method described in this specification, the measurement time can be shortened.

FIG. 1 is a block diagram illustrating the shape measuring apparatus according to the first embodiment. FIG. 2 is a block diagram illustrating a functional configuration of the control unit. FIG. 3 is a flowchart for explaining a shape measuring method by the shape measuring apparatus according to the first embodiment. FIG. 4 is a top view showing a phase shift pattern. FIG. 5A to FIG. 5D are top views showing phase shift images. FIG. 6A is a top view showing a bright reference image, and FIG. 6B is a top view showing a dark reference image. FIG. 7 is a top view showing a spatial code pattern. FIG. 8A to FIG. 8E are top views showing spatial code images. 9 (a) to 9 (d) are top views of the phase shift image, FIGS. 9 (e) to 9 (i) are top views of the spatial code image, and FIGS. 9 (j) to 9 (n). ) Is a top view of a spatial code image when an inverted code pattern is used. FIG. 10 is a schematic diagram showing luminance in a pixel having a phase shift image. FIG. 11 is a schematic diagram showing luminance at a position where the phase shift pattern exists. FIG. 12A is a top view of a phase shift pattern in which the maximum brightness and the minimum brightness differ depending on the position, and FIG. 12B is a top view of the spatial code pattern in that case.

  Hereinafter, embodiments will be described with reference to the drawings.

  FIG. 1 is a block diagram illustrating the shape measuring apparatus according to the first embodiment. As illustrated in FIG. 1, the shape measurement apparatus 100 according to the first embodiment includes a projection apparatus 10, an imaging apparatus 20, and a computer 30. The projection device 10 is, for example, a projector, and projects the phase shift pattern and the spatial code pattern generated by the computer 30 onto the measurement object 50. The imaging device 20 is a camera, for example, and images the measurement object 50 on which the phase shift pattern and the spatial code pattern are projected. The imaging device 20 images the measurement object 50 from a direction different from the projection direction of the projection device 10. The computer 30 includes a control unit 32 including a CPU (Central Processing Unit) and a storage unit 34 including a ROM (Read Only Memory) and a RAM (Random Access Memory). An input unit 36 including a keyboard and / or mouse and a display unit 38 including a liquid crystal display are connected to the computer 30. The control unit 32 controls the computer 30 and the projection device 10 and the imaging device 20. The storage unit 34 stores a control program for controlling the operation of the control unit 32, image data captured by the imaging device 20, and the like.

  FIG. 2 is a block diagram illustrating functions realized by the cooperation of hardware such as a CPU and software stored in a ROM or the like in the control unit 32 of the computer 30. As illustrated in FIG. 2, the control unit 32 includes a pattern generation unit 40, a reference image generation unit 42, a determination unit 44, and a calculation unit 46.

The pattern generation unit 40 generates a plurality of phase shift patterns that are periodically changing in luminance and are out of phase with each other. The phase shift pattern is a projection pattern used in the phase shift method. The pattern generation unit 40 generates a phase shift pattern that is a sinusoidal fringe pattern, for example, by creating pattern data P shown in the following equation 1 based on data input from the input unit 36. In Equation 1, a is an identifier indicating that it is data of the phase shift method, n is a pattern number, α and β are variables that control the amplitude and intensity of the projected sine wave, λ is the wavelength of the sine wave, and (X, Y) is the coordinates of the pattern. In the first embodiment, it is assumed that four phase shift patterns are generated (that is, n = 1 to 4).

Further, the pattern generation unit 40 generates a plurality of spatial code patterns that are binary patterns of bright portions and dark portions and have different periods of the bright portions and the dark portions. The spatial code pattern is a projection pattern used in the spatial coding method. The pattern generation unit 40 generates a spatial code pattern by creating pattern data P shown in the following equation 2 based on data input from the input unit 36, for example. Note that the pattern generation unit 40 may generate a gray code pattern as a binary pattern. In Equation 2, c is an identifier indicating that the data is spatial coding data, n is a pattern number, & is a bit operator that performs a logical AND for each bit, INT () is a function that truncates the decimal point, α and β is the same value that was used when creating Equation 1, λ is the wavelength of the sine wave of Equation 1, and (X, Y) are the coordinates of the pattern. In the first embodiment, a case of 5 bits that divides the space into 32 at maximum (that is, n = 1 to 5) is assumed.

  By generating the phase shift pattern and the spatial code pattern according to Equations 1 and 2, the maximum luminance of the phase shift pattern and the luminance of the bright portion of the spatial code pattern can be made the same for each position. Further, the minimum luminance of the phase shift pattern and the luminance of the dark portion of the spatial code pattern can be made the same for each position.

The reference image generation unit 42 generates a reference image from a plurality of phase shift images obtained by imaging the measurement object 50 onto which a plurality of phase shift patterns are projected. As a specific method for generating the reference image, for example, there are the following methods. The four phase shift patterns of Formula 1 are projected onto the measurement object 50 by the projection device 10, and the measurement target object 50 on which the phase shift pattern is projected is imaged by the imaging device 20, whereby four phase shift images are obtained. obtain. The luminance I of this phase shift image is expressed by the following formula 3. In Equation 3, a is an identifier indicating that it is data of the phase shift method, n is a pattern number, θ is a phase value proportional to shape information, and (x, y) is a coordinate in the phase shift image.

次に、各画素における最小輝度を下記の数６、最大輝度を下記の数７によって算出する。これにより、各画素における最小輝度を算出した暗部基準画像と各画素における最大輝度を算出した明部基準画像とを、基準画像として生成することができる。数６及び数７において、ｂは位相シフト画像から最大輝度及び最小輝度を算出したデータであることを示す識別子である。

The maximum luminance and the minimum luminance in each pixel are calculated from the four phase shift images in Equation 3. First, A (x, y) and B (x, y) in Equation 3 are calculated from Equation 4 and Equation 5 below.

Next, the minimum luminance in each pixel is calculated by the following equation 6 and the maximum luminance is calculated by the following equation 7. Accordingly, it is possible to generate a dark part reference image in which the minimum luminance in each pixel is calculated and a bright part reference image in which the maximum luminance in each pixel is calculated as a reference image. In Equations 6 and 7, b is an identifier indicating that it is data obtained by calculating the maximum luminance and the minimum luminance from the phase shift image.

The determination unit 44 compares the plurality of spatial code images obtained by imaging the measurement object 50 onto which the plurality of spatial code patterns are projected with a reference image, thereby determining the brightness of each pixel of the plurality of spatial code images. judge. For example, the determination unit 44 determines the brightness of each pixel of the spatial code image based on the following Equation 8. In Equation 8, I ^c (n of the pattern number is omitted) is the luminance at each pixel of the spatial code image.

  The calculation unit 46 uses the phase information obtained from the plurality of phase shift images and the brightness information of the plurality of spatial code images obtained by determining the brightness of each pixel, and calculates the height of each point of the measurement object 50. By calculating the height, the shape of the measurement object 50 is calculated. Since the method for calculating the shape of the measurement object 50 is a well-known technique, detailed description thereof is omitted here.

  FIG. 3 is a flowchart for explaining a shape measuring method by the shape measuring apparatus according to the first embodiment. As shown in FIG. 3, the control unit 32 of the computer 30 generates a phase shift pattern (step S10). For example, the control unit 32 generates the four phase shift patterns by creating the above-described pattern data 1 based on the data input from the input unit 36. FIG. 4 is a top view showing a phase shift pattern. In FIG. 4, two phase shift patterns out of the four phase shift patterns are shown, and the rest are omitted. The four phase shift patterns are patterns in which the luminance changes periodically, and the phases are shifted from each other by π / 2.

  Next, the control unit 32 transfers the phase shift pattern pattern data generated in step S10 to the projection apparatus 10, and projects the phase shift pattern from the projection apparatus 10 onto the measurement object 50 (step S12). Next, the control unit 32 captures an image of the measurement object 50 onto which the phase shift pattern is projected by the imaging device 20, and acquires a phase shift image (step S14). FIG. 5A to FIG. 5D are top views showing phase shift images. The control unit 32 causes the storage unit 34 to store the acquired image data of the phase shift image.

  Next, the control unit 32 generates a reference image from the acquired phase shift image (step S16). For example, the control unit 32 uses Equations 3 to 7 above, and generates, as the reference image, a bright reference image in which the maximum luminance in each pixel is calculated and a dark reference image in which the minimum luminance in each pixel is calculated. . FIG. 6A is a top view showing a bright reference image, and FIG. 6B is a top view showing a dark reference image. The control unit 32 stores the generated image data of the reference image in the storage unit 34.

  Next, the control unit 32 generates a spatial code pattern (step S18). For example, the control unit 32 generates the five spatial code patterns by creating the pattern data of Formula 2 based on the data input from the input unit 36. FIG. 7 is a top view showing a spatial code pattern. In FIG. 7, two of the five spatial code patterns are illustrated, and the rest are not illustrated. The five spatial code patterns are binary patterns composed of a bright part and a dark part, and the brightness of the bright part and the dark part is the same as the maximum brightness and the minimum brightness of the phase shift pattern for each position, and the light / dark cycle is They are different from each other.

  Next, the control unit 32 transfers the pattern data of the spatial code pattern generated in step S18 to the projection apparatus 10, and projects the spatial code pattern from the projection apparatus 10 onto the measurement object 50 (step S20). Next, the control unit 32 captures an image of the measurement object 50 onto which the spatial code pattern is projected with the imaging device 20, and acquires a spatial code image (step S22). FIG. 8A to FIG. 8E are top views showing spatial code images. The control unit 32 causes the storage unit 34 to store the acquired image data of the spatial code image.

  Next, the control unit 32 compares the spatial code image with the reference image, and determines the brightness at each pixel of the spatial code image (step S24). For example, the control unit 32 compares the spatial code image, the bright part reference image, and the dark part reference image for each pixel by using the above formula 8, and determines the brightness at each pixel of the spatial code image. Thereby, the light / dark information of the spatial code image is obtained, and the fringe order can be specified.

  Next, the control unit 32 determines the height of each point of the measurement object 50 from the phase information (θ (x, y)) obtained from the plurality of phase shift images and the light / dark information (stripe order) of the plurality of spatial code images. And calculates the shape of the measurement object 50 (step S26) Since the method for calculating the shape of the measurement object 50 is a well-known technique, detailed description thereof is omitted here.

  As described above, according to the first embodiment, the reference image is generated from the plurality of phase shift images obtained by capturing the measurement object 50 on which the plurality of phase shift patterns are projected. By comparing a plurality of spatial code images obtained by imaging the measurement object 50 onto which a plurality of spatial code patterns are projected with a reference image, light and darkness in each pixel of the plurality of spatial code images is determined. Then, the shape of the measurement object 50 is calculated using the light / dark information of the plurality of spatial code images obtained by determining the light / dark of each pixel and the phase information obtained from the plurality of phase shift images. As described above, in the first embodiment, the light / dark determination of the spatial code image is performed by comparing with the reference image generated from the plurality of phase shift images. For this reason, the number of times of projection and imaging can be reduced as compared with the case where the bright / dark judgment of the spatial code image is performed using the inverted code pattern obtained by inverting the bright part and the dark part in addition to the spatial code pattern of the bright part and the dark part. Measurement time can be kept short.

  For example, in the case of using four phase shift patterns and five spatial code patterns, if the inverted code pattern is used, the number of times of imaging is 14 as shown in FIGS. 9A to 9N. End up. 9A to 9D are top views of the phase shift image, FIGS. 9E to 9I are top views of the spatial code image, and FIGS. 9J to 9 (N) is a top view of a spatial code image when an inverted code pattern is used. However, in the first embodiment, as shown in FIGS. 5 (a) to 5 (d) and FIGS. 8 (a) to 8 (e), the number of imaging can be reduced to 9, so that the measurement time is shortened. Can be suppressed.

  Further, according to the first embodiment, the brightness of the bright part of the spatial code pattern is the same as the maximum brightness of the phase shift pattern for each position, and the brightness of the dark part is the same as the minimum brightness of the phase shift pattern for each position. is there. The reference image includes, from a plurality of phase shift images, a bright reference image generated by calculating the maximum luminance at each pixel, and a dark reference image generated by calculating the minimum luminance at each pixel. . Then, as shown in the above equation 8, the brightness of each pixel of the spatial code image is determined based on whether the luminance of each pixel of the spatial code image is closer to the brightness of the bright reference image or the dark reference image. . For this reason, it is possible to accurately determine the brightness and darkness of each pixel of the spatial code image.

図３のステップＳ１８において、例えば下記の数１０を用いて、明部の輝度が、複数の位相シフトパターンにおける平均輝度より高く、暗部の輝度が、前記平均輝度より低い、空間コードパターンを生成する。なお、数１０において、γ（Ｘ、Ｙ）は、０＜γ（Ｘ、Ｙ）≦α（Ｘ、Ｙ）を満たす値である。

その後、図３のステップＳ２０とＳ２２を、実施例１と同じ方法で実行する。そして、図３のステップＳ２４において、例えば下記数１１を用いて、空間コード画像と平均輝度画像との輝度差を画素毎に計算することで、空間コード画像の各画素における明暗を判定する。

In the first embodiment, the case where two reference images, ie, a bright reference image and a dark reference image, are generated as reference images. However, the present invention is not limited to this. For example, an average luminance image at each pixel may be generated from a plurality of phase shift images and used as a reference image. A specific example in the case where an average luminance image is used as the reference image will be described below. First, steps S10 to S14 in FIG. 3 are executed in the same manner as in the first embodiment. Then, in step S16 of FIG. 3, for example by using the number 9 below, from a plurality of phase-shifted images, and generates an average luminance image to calculate the average luminance I ^b at each pixel, and this is referred to as reference images.

In step S18 of FIG. 3, for example, using the following Equation 10, a spatial code pattern is generated in which the brightness of the bright part is higher than the average brightness in the plurality of phase shift patterns and the brightness of the dark part is lower than the average brightness. . In Equation 10, γ (X, Y) is a value that satisfies 0 <γ (X, Y) ≦ α (X, Y).

Thereafter, steps S20 and S22 of FIG. 3 are executed in the same manner as in the first embodiment. In step S24 of FIG. 3, the brightness difference between each pixel of the spatial code image is determined by calculating the luminance difference between the spatial code image and the average luminance image for each pixel using, for example, Equation 11 below.

  Further, even when two reference images, a bright reference image and a dark reference image, are used as the reference image, the case is not limited to the case of the first embodiment. FIG. 10 is a schematic diagram showing luminance in a pixel having a phase shift image. The horizontal axis in FIG. 10 is the phase, and the vertical axis is the luminance. As shown in FIG. 10, the luminance of a pixel having a phase shift image can be represented by a sine wave having the maximum luminance and the minimum luminance. In the first embodiment, a case has been described in which the reference image includes a bright part reference image generated with the maximum luminance in each pixel and a dark part reference image generated with the minimum luminance from a plurality of phase shift images. However, the present invention is not limited to this. The reference image may include a bright portion reference image generated with a luminance higher than the average luminance in each pixel and a dark portion reference image generated with a luminance lower than the average luminance in each pixel. For example, the reference image includes a bright part reference image generated at a luminance higher than the average luminance and lower than the maximum luminance at each pixel, and a dark portion reference image generated at a luminance lower than the average luminance and higher than the minimum luminance at each pixel. , May be included.

FIG. 11 is a schematic diagram showing luminance at a position where the phase shift pattern exists. The horizontal axis in FIG. 11 is the phase, and the vertical axis is the luminance. In the first embodiment, the case where the brightness of the bright part and the dark part of the spatial code pattern is the same as the maximum brightness and the minimum brightness of the phase shift pattern for each position has been described. However, the present invention is not limited to this. As shown in FIG. 11, the brightness of the bright part of the spatial code pattern may be higher than the average brightness of the phase shift pattern for each position, and the brightness of the dark part may be lower than the average brightness of the phase shift pattern for each position. It should be noted that there is a relationship of the following Expression 12 between X3 and X4 in FIG. 11 and X1 and X2 in FIG.

  In the first embodiment, the case where the maximum brightness and the minimum brightness are constant in the phase shift pattern and the brightness of the bright part and the dark part is constant in the spatial code pattern has been described. That is, the case where the values of α and β are constant in the above formulas 1 and 2 has been described. However, the present invention is not limited to this, and the maximum luminance and the minimum luminance change in the phase shift pattern, and the luminance of the bright part and the dark part of the spatial code pattern is made the same as the maximum luminance and the minimum luminance of the phase shift pattern for each position. Good. That is, in the above equation 1, the values of α and β may be changed in the phase shift pattern, and in the above equation 2, the same values as α and β used in equation 1 may be used for each position.

  12A is a top view of a phase shift pattern in which the maximum brightness and the minimum brightness change depending on the position, and FIG. 12B is a top view of the spatial code pattern in that case. As shown in FIG. 12A, the maximum luminance and the minimum luminance change depending on the position, and the maximum luminance and the minimum luminance are higher in the left half of the phase shift pattern than in the right half. In this case, as shown in FIG. 12B, the brightness of the bright part and the dark part of the spatial code pattern is the same as the maximum brightness and the minimum brightness of the phase shift pattern for each position.

  Here, advantages of using the patterns as shown in FIGS. 12A and 12B will be described. For example, the reflectance may be different at each point of the measurement object. In this case, if a phase shift pattern in which the maximum luminance and the minimum luminance are constant in the pattern as shown in FIG. 4 is used, the luminance at a pixel in the phase shift image is too high due to the reflectance of each point of the measurement object. Or it may be too low. Similarly, when a spatial code pattern in which the brightness of the bright part and the dark part is constant in the pattern as shown in FIG. 7 is used, the brightness of a pixel of the spatial code image may be too high or too low.

  On the other hand, for example, when the reflectance of the measurement object is low in the left half and high in the right half, if the phase shift pattern as shown in FIG. Can be adjusted to the desired size. Similarly, when the spatial code pattern as shown in FIG. 12B is used, the brightness of the bright and dark portions of the spatial code image can be adjusted to a desired size in the image. Therefore, when the reflectance of the measurement object is different at each point, the phase shift pattern has the maximum luminance and the minimum luminance depending on the position according to the reflectance at each point of the measurement object. It is preferable to change. In addition, the spatial code pattern is also preferably a case where the brightness of the bright part and the dark part changes depending on the position.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims.・ Change is possible.

DESCRIPTION OF SYMBOLS 10 Projection apparatus 20 Imaging apparatus 30 Computer 32 Control part 34 Storage part 36 Input part 38 Display part 40 Pattern generation part 42 Reference | standard image generation part 44 Judgment part 46 Calculation part 50 Measurement object

Claims (9)

A plurality of phase shift patterns whose luminance changes periodically, a plurality of phase shift patterns whose phases are shifted from each other, and a binary pattern of dark portions and bright portions, and a plurality of spatial codes having different periods of the bright portions and the dark portions A projection device that projects the pattern onto the measurement object separately ;
An imaging device for imaging the measurement object;
Bright part reference generated from the plurality of phase shift images obtained by imaging the measurement object on which the plurality of phase shift patterns are projected and the plurality of spatial code patterns are not projected with a luminance higher than the average luminance in each pixel. A reference image generation unit that generates a reference image including an image and a dark part reference image generated with a luminance lower than the average luminance in each pixel;
By comparing a plurality of spatial code images obtained by imaging the measurement object on which the plurality of spatial code patterns are projected and the plurality of phase shift patterns are not projected with the bright part reference image and the dark part reference image. a determination unit for determining the brightness of each pixel of the plurality of spatial code image,
A calculation unit that calculates the shape of the measurement object using brightness information of the plurality of spatial code images determined by the determination unit and phase information obtained from the plurality of phase shift images. A shape measuring apparatus characterized by that. The brightness of the bright part of the spatial code pattern is higher than the average brightness of the phase shift pattern for each position, and the brightness of the dark part of the spatial code pattern is lower than the average brightness of the phase shift pattern for each position. shape measuring apparatus according to claim 1, wherein. The reference to the reference image generating unit, including a plurality of phase-shifted images, and the bright area reference image generated by the maximum luminance of each pixel, and a said dark portion reference image generated by the minimum brightness in each pixel shape measuring apparatus according to claim 1 or 2, wherein the generating an image. The brightness of the bright part of the spatial code pattern is the same as the maximum brightness of the phase shift pattern for each position, and the brightness of the dark part of the spatial code pattern is the same as the minimum brightness of the phase shift pattern for each position. shape measurement apparatus of any one of claims 1, wherein 3 that this is. The determination unit determines light and darkness in each pixel of the plurality of spatial code images depending on whether the luminance of each pixel of the plurality of spatial code images is closer to the luminance of the bright part reference image or the dark part reference image. The shape measuring apparatus according to any one of claims 1 to 4, wherein A pattern in which the luminance periodically changes, a plurality of phase shift patterns whose phases are shifted from each other, and a binary pattern of a dark part and a bright part, wherein the periods of the bright part and the dark part are different, and the bright part A plurality of spatial code patterns that are higher than the average luminance of the plurality of phase shift patterns for each position and the luminance of the dark portion is lower than the average luminance of the plurality of phase shift patterns for each position . A projection device for projecting onto
An imaging device for imaging the measurement object;
An average luminance image generated by average luminance at each pixel from a plurality of phase shift images obtained by imaging the measurement object on which the plurality of phase shift patterns are projected and the plurality of spatial code patterns are not projected. A reference image generation unit to generate as
By comparing the plurality of spatial code images obtained by imaging the measurement object on which the plurality of spatial code patterns are projected and the plurality of phase shift patterns are not projected with the average luminance image, the plurality of spatial codes A determination unit for determining brightness and darkness in each pixel of the image;
A calculation unit that calculates the shape of the measurement object using brightness information of the plurality of spatial code images determined by the determination unit and phase information obtained from the plurality of phase shift images. A shape measuring apparatus characterized by that. Wherein the phase shift pattern, shape measurement apparatus of any one of claims 1 to maximum brightness and minimum brightness, characterized in that varies with position 6. A plurality of spatial codes in which a plurality of phase shift patterns whose phases are shifted from each other and whose phases are shifted from each other are projected, and which are binary patterns of a bright part and a dark part and having different periods of the bright part and the dark part A bright part reference image generated with a brightness higher than the average brightness in each pixel, and a dark part generated with a brightness lower than the average brightness in each pixel, from a plurality of phase shift images obtained by imaging a measurement object on which no pattern is projected Generating a reference image including a reference image;
By comparing a plurality of spatial code images obtained by imaging the measurement object on which the plurality of spatial code patterns are projected and the plurality of phase shift patterns are not projected, with the bright part reference image and the dark part reference image , Determining light and dark at each pixel of the plurality of spatial code images;
Calculating the shape of the measurement object using the brightness information of the plurality of spatial code images determined in the step of determining the brightness and the phase shift information determined from the plurality of phase shift images; A shape measuring method comprising: A plurality of phase shift patterns whose phases are periodically changed and whose phases are shifted from each other are projected, and are binary patterns of a bright part and a dark part, and the periods of the bright part and the dark part are different, and the bright part The measurement object on which a plurality of spatial code patterns are not projected is higher than the average luminance of the plurality of phase shift patterns for each position, and the luminance of the dark portion is lower than the average luminance of the plurality of phase shift patterns for each position. Generating, as a reference image, an average luminance image generated by average luminance in each pixel from a plurality of phase shift images obtained by imaging
  By comparing the plurality of spatial code images obtained by imaging the measurement object on which the plurality of spatial code patterns are projected and the plurality of phase shift patterns are not projected with the average luminance image, the plurality of spatial code images Determining light and dark in each pixel of
  Calculating the shape of the measurement object using the brightness information of the plurality of spatial code images determined in the step of determining the brightness and the phase shift information determined from the plurality of phase shift images; A shape measuring method comprising:

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