JP5899961B2 - Insulation inspection device and insulation inspection method - Google Patents

Description

  The present invention relates to an insulation inspection apparatus for performing an insulation inspection between a plurality of wirings formed on the surface of an inspection object such as a touch panel, and this insulation inspection method, and more particularly, to use a non-contact supply electrode and a detection electrode. It is related with the insulation test | inspection apparatus which can perform the insulation test between the wiring formed on a test | inspection object, and its method, without damaging a test | inspection object.

  Conventionally, an inspection object having wirings arranged in a matrix formed in an x-axis direction and a y-axis direction formed on an ITO film called a touch panel (or touch screen or touch screen) is an x-axis direction. A contact (needle-like conduction probe) is brought into contact with each of the wirings arranged in the y-axis direction, and inspection of a short circuit between each wiring and the adjacent wiring is performed.

  However, in the method in which the contact is in contact with each wiring as described above, the wiring formed on the ITO film and the contact are not stable, and the electrical characteristics are unstable due to the instability of the contact resistance due to the oxide film. It had a problem that could not be measured accurately. Further, since the contact is brought into pressure contact with the wiring to be inspected, there is a problem that a dent is formed by the contact of the contact with the wiring.

  In order to solve such a problem, a non-contact type inspection method as disclosed in Patent Document 1 has been proposed. In the technique disclosed in Patent Document 1, a base electrode is prepared to be placed on a placement portion on which an inspection object is placed, and the capacitance between the base electrode and a wiring to be inspected, other than the base electrode and the inspection subject The insulation of the wiring to be inspected is inspected using the capacitance with the other wiring.

  In the technique disclosed in Patent Document 1, since the capacitance with the base electrode on which the inspection object is arranged must be inspected, the base electrode corresponding to the size of the wiring and the capacitance with the base electrode are set. A configuration that must be detected must be provided, and the device cannot be simplified or simplified.

  In addition, as described in Patent Document 1, in the insulation inspection between wirings, when there is an insulation failure in which wirings to be inspected have a high resistance value (for example, a resistance value of several MΩ). There is a problem that this insulation failure cannot be detected. This is a problem that since the capacitance between the wirings is a very small capacitance value (for example, a capacitance value of several pF), the impedance of the insulation failure location can be detected only by a measurement error.

JP 2000-338168 A

  The present invention has been made in view of such circumstances, and proposes an insulation inspection apparatus and method that have a simplified configuration and can detect an insulation failure even with a high-resistance insulation failure. To do.

The invention according to claim 1 is an insulation inspection apparatus that performs an insulation inspection between a plurality of wirings formed on an inspection object, and applies power at a predetermined frequency in order to perform an insulation inspection between the wirings to be inspected. Power supply means, a first power supply unit disposed in a non-contact manner on one of the wires to supply the power between the wires, and the power supply between the wires, A second power feeding unit disposed in a non-contact manner on the other wiring between the wirings, and a contact with the one wiring or the other wiring in order to detect an electrical signal of the one wiring or the other wiring; Based on the measurement electrode unit to be arranged, the calculation means for calculating the impedance between the wires based on the electrical signal from the measurement electrode unit, and prompting the power supply means to supply power of a predetermined frequency, the calculation unit The power of the predetermined frequency is applied to Encourages to calculating and control means is prompted to calculate the impedance when the impedance at the time of supplying the power of at least two or more different predetermined frequency to said control unit, static in the two or more impedance calculated There is provided an insulation inspection apparatus comprising: a determination unit that determines the quality of an insulation state between the wirings based on a capacitance component and a resistance component of a capacitance .
The invention according to claim 2 is characterized in that the determination means calculates a displacement amount corresponding to the frequency of two or more calculated impedances, and determines pass / fail according to the displacement amount. An insulation inspection apparatus is provided.
The invention according to claim 3 is an insulation inspection method for performing an insulation inspection between a plurality of wirings formed on an inspection object, and supplies power to one wiring and the other wiring forming the wiring to be inspected. A power supply plate is arranged in a non-contact manner, and a measurement plate for detecting an electric signal of the one wiring is arranged in a non-contact manner to supply power of two or more different frequencies, and each frequency An insulation inspection method is provided for calculating the impedance between the wirings at the two and determining the quality of the insulation state between the wirings based on the capacitance component and the resistance component of the capacitance at the two or more calculated impedances.
By providing these inventions, the above problems can be solved.

According to the invention of claim 1 or 3, by calculating the impedance using power of a plurality of frequencies and performing an insulation test based on these impedances, the short circuit that is an insulation abnormality has a high resistance value. Can be detected accurately, and can be detected with an inexpensive apparatus configuration without using complicated equipment.
According to the second aspect of the invention, since the insulation state is determined using the amount of impedance displacement, a more accurate insulation test can be performed by using a plurality of impedances.

It is a block diagram which shows the schematic structure of the insulation test | inspection apparatus which concerns on this invention. The graph in the case where the case where an insulation state is favorable and the case where an insulation state is bad is shown is shown. The horizontal axis indicates the logarithmic display of the frequency, and the vertical axis indicates the impedance output (ratio of the capacitance component and the resistance component). It is the schematic which shows the test | inspection state of the insulation test | inspection apparatus which concerns on this invention. 2 shows a flowchart of an insulation inspection method according to the present invention.

The best mode for carrying out the present invention will be described.
In the inspection object to be inspected by the insulation inspection apparatus or the insulation inspection method of the present invention, a plurality of wirings are formed on the surface of the inspection object. The shape of the wiring is not particularly limited, but the insulation state between adjacent wirings can be suitably inspected in the present invention.

  The insulation inspection apparatus 1 of the present invention will be described. As shown in FIG. 1, the insulation inspection apparatus 1 includes a power supply unit 2, a first power supply unit 3, a second power supply unit 4, a measurement electrode unit 5, a calculation unit 6, a control unit 7, and a determination unit 8. . In addition, between the wirings to be inspected, two wirings are selected, and the insulation between these two wirings is the target of the insulation inspection.

  The power supply means 2 applies power of a predetermined frequency in order to perform an insulation test between wirings to be tested. The power supply means 2 supplies an alternating voltage whose frequency is changed in accordance with an electric signal from the control means 7 described later. The power supply means 2 can use an AC power supply that can change the frequency. The power supply means 2 can appropriately change the AC voltage of the frequency required by the control means 7 in accordance with a command from the control means 7.

  The first power feeding unit 3 is arranged in a non-contact manner on one wiring TA between the wirings in order to supply power from the power supply means 2 between the wirings. The first power feeding unit 3 is formed of a conductive plate-like member having a shape that is the same as or smaller than the width of one wiring TA so that power can be supplied only to one wiring TA. The The first power feeding unit 3 is disposed opposite to the one wiring TA with a certain distance. By arranging the first power feeding unit 3 in this way, the first power feeding unit 3 and one wiring TA are capacitively coupled.

  The second power feeding section 4 is disposed in a non-contact manner on the other wiring TB between the wirings in order to supply power from the power supply means 2 between the wirings. The second power feeding section 4 is formed of a conductive plate-like member having a shape equal to or smaller than the width of the other wiring TB so that power can be supplied only to the other wiring TB. The The second power feeding unit 4 is disposed to face the other wiring TB with a certain distance. By arranging the second power feeding unit 4 in this way, the second power feeding unit 4 and the other wiring TB are capacitively coupled.

  By arranging the first power feeding unit 3 and the second power feeding unit 4 as described above, an electrical closed loop is formed between the power feeding unit and the wiring.

  The measurement electrode unit 5 is disposed in a non-contact manner on one wiring TA in order to detect an electrical signal of the one wiring TA. The measurement electrode portion 5 is formed of a conductive plate-like member having a shape that is the same as or smaller than the width of one wiring TA so that an electric signal from one wiring TA can be detected. It is preferable. The measurement electrode unit 5 is disposed opposite to the one wiring TA with a certain distance. By arranging the measurement electrode unit 5 in this way, the measurement electrode unit 5 and one wiring TA are capacitively coupled. In the above description, the measurement electrode unit 5 has been described as being disposed in a non-contact manner on one wiring TA. However, the measurement electrode portion 5 may be disposed in a non-contact manner on the other wiring TB. Instead of this, the other wiring TB may be adjusted so as to meet the above conditions.

  The first power feeding unit 3 and the second power feeding unit 4 are disposed at one end of one wiring TA and the other wiring TB, respectively, and the measurement electrode unit 5 is disposed at the other end of one wiring TA or the other wiring TB. It is preferred that By arranging in this way, it is possible to detect the insulation state between the entire wirings.

  The calculation means 6 calculates the impedance between the wirings based on the electrical signal from the measurement electrode unit 5. The calculation means 6 is electrically connected to the measurement electrode section 5 and receives an electric signal from the measurement electrode section 5 and information on the electric signal and power information (frequency value information) supplied by the power supply means 2. And AC voltage value information). The calculation result calculated by the calculation unit 6 is transmitted to the determination unit 8 described later together with the information between the wirings. The calculation means 6 can use an arithmetic processing unit that can collect and calculate electrical signal information and power information.

  The control means 7 urges the power supply means 2 to supply power of a predetermined frequency and prompts the calculation means 6 to calculate the impedance when the power of the predetermined frequency is applied. The control means 7 controls the power applied to the power supply means 2 and controls the impedance between the wirings when this power is applied.

  The determination means 8 prompts the control means 7 to calculate the impedance when supplying power of at least two or more different predetermined frequencies, and determines the quality of insulation between the wirings from the two or more calculated impedances. . The determination unit 8 supplies power of two or more different frequencies to the control unit 7 and calculates two or more impedances. And the determination means 8 determines the quality of the insulation state between wiring using two or more calculated impedance.

  An insulation state determination method performed by the determination unit 8 will be described. As described above, two or more pieces of impedance information are calculated. In the description here, a case where two pieces of impedance information are used will be described. The impedance information acquired by the determination unit 8 is acquired together with the frequency information. For this reason, the determination means 8 can handle this impedance information as a displacement value when the frequency is changed, and determines the quality of the insulation state according to the displacement of the impedance.

  The determination by the determination means 8 as described above is based on the amount of impedance displacement due to frequency displacement. When the insulation state between the wirings is good, an electrical signal affected only by the capacitance between the wirings is detected. If the insulation state between the two is poor, the electrical signal affected by the capacitance between the wires and the resistance (short circuit) is detected, so the impedance values at two (multiple) different frequencies By calculating, it is carried out by detecting whether it is affected by capacitance or resistance.

Specifically, when the insulation state between the wirings is good, even if impedances of different frequencies are calculated, only the influence due to the capacitance between the wirings is calculated. That is, even if the frequency is changed, the resistance component is not detected, and only the capacitance component of the capacitance between the wirings is calculated.
Further, when the insulation state between the wirings is poor, the influence of the capacitance between the wirings and the influence of the short circuit are calculated. That is, the influence of the resistance component is largely reflected in the low frequency region, while the influence of the capacitance component is largely reflected in the high frequency region.

  As described above, by changing the frequency in this way, the influence of the resistance component is detected to determine the insulation state. In addition, in FIG. 2, the graph in the case where the case where an insulation state is favorable as shown above and the case where an insulation state is bad is shown.

  As described above, by calculating the characteristics of the two frequencies and the respective impedances, the determination means 8 calculates a displacement amount associated with the frequency displacement based on the calculated impedance, and the displacement amount is predetermined. If it is within the range, it can be determined that the insulation state is good or bad. Further, it is also possible to set a displacement amount when the insulation state is good as a reference value in advance and determine according to a deviation from the reference value. The determination means 8 can be dealt with by providing an arithmetic processing device or a storage device.

In the above description, the case where the two frequencies are different from each other is described, and the two different frequencies are divided into two, a low frequency and a high frequency, but the frequency itself is defined as a low frequency (for example, 10 to 1000 Hz). A frequency in a high frequency range (for example, 1 MHz to 100 MHz) can be used, one frequency is a specific frequency, and the other frequency is a frequency that is 100 times or 1000 times the specific frequency. You can also.
Note that the number of different frequencies is not limited to two, and two or more can be used. By using three or more, it becomes possible to accurately detect the amount of impedance displacement due to the frequency, thereby improving the inspection accuracy. be able to.

A plurality of electric power having a predetermined frequency that the control means 7 prompts the power supply means 2 can be set in advance in the control means 7 or can be appropriately input to the control means 7 by a user or the like. Note that the predetermined frequency to be controlled by the control means 7 can be appropriately changed according to the interval between the wirings and the shape and area of the measurement electrode unit 5.
This completes the description of the configuration of the insulation inspection apparatus of the present invention.

Next, the operation of the insulation inspection apparatus of the present invention will be described.
FIG. 3 is a plan view schematically showing the insulation inspection method of the present invention. In FIG. 3, one wiring TA and the other wiring TB are shown between the wirings to be inspected, and the insulation state between the wiring TA and the wiring TB is inspected. FIG. 4 is a flowchart showing each step of the insulation inspection method of the present invention.

In order to perform an insulation test, a first frequency and a second frequency are set. At this time, for example, the first frequency is set to 100 Hz and the second frequency is set to 100 MHz. In addition, in order to determine the insulation state between the wires, the displacement amount of the impedance when the first frequency AC voltage and the second frequency AC voltage are applied in a good insulation state is set as a determination reference value. Keep it. At this time, for example, ± 10% of the determination reference value is set as a threshold value for determining the good state.
First, in order to select between the wirings to be inspected, the first power feeding unit 3 is disposed at one end of one wiring TA, the second power feeding unit 4 is disposed at one end of the other wiring TB, and the measurement electrode The part 5 is disposed at the other end of the one wiring TA (see S1).

Next, the control means 7 prompts the power supply means 2 and the calculation means 6 to calculate an impedance value when an alternating voltage of the first frequency is applied between the wirings. For this reason, the power supply means 2 supplies the alternating voltage of 1st frequency between wiring via the 1st electric power feeding part 3 and the 2nd electric power feeding part 4 (refer S2).

  At this time, the calculation means 6 calculates the impedance between the wirings based on the electrical signal measured through the measurement electrode unit 5 (see S3). Information on the alternating voltage applied by the power supply means 2 and information on the calculated impedance are stored in a storage means such as a memory.

Next, the control means 7 prompts the power supply means 2 and the calculation means 6 to calculate an impedance value when an alternating voltage of the second frequency is applied between the wirings. For this reason, the power supply means 2 supplies the alternating voltage of a 2nd frequency between wirings via the 1st electric power feeding part 3 and the 2nd electric power feeding part 4 (refer S4).

  At this time, the calculation means 6 calculates the impedance between the wirings based on the electrical signal measured through the measurement electrode unit 5 (see S5). Information on the alternating voltage applied by the power supply means 2 and information on the calculated impedance are stored in a storage means such as a memory.

When the AC voltage of the first frequency and the AC voltage of the second frequency are applied and the impedance when each voltage is applied is measured, the amount of displacement of the impedance is calculated (see S6).
When the displacement amount of the impedance is calculated, this calculation result is compared with a predetermined determination reference value, and it is determined whether the calculation result exists within the threshold value of the determination reference value. At this time, if the calculation result is within the determination reference threshold value, it is determined that the insulation state between the wirings to be inspected is good, and if the calculation result does not exist within the determination reference threshold value, it is determined between the inspection target wirings. It is determined that the insulation state is defective (see S7).

After the insulation state between the wirings to be inspected is determined, the insulation state between the next wirings is determined, and the first power supply unit 3, the second power supply unit 4, and the measurement electrode unit 5 are the inspection targets. It moves to each position between the wirings to be arranged.
In addition, when it is determined that the insulation state is defective, the insulation inspection of this inspection object may be terminated.
The above is the description of the insulation inspection method according to the present invention.

DESCRIPTION OF SYMBOLS 1 ... Insulation inspection apparatus 2 ... Power supply means 3 ... 1st electric power feeding part 4 ... 2nd electric power feeding part 5 ... Measurement electrode part 6 ... Calculation means 7 ... Control means 8 ..Judging means TA ・ ・ One wiring TB ・ ・ The other wiring

Claims (3)

An insulation inspection apparatus for performing an insulation inspection between a plurality of wires formed on an inspection object,
In order to perform an insulation inspection between wirings to be inspected, power supply means for applying power of a predetermined frequency,
In order to supply the electric power between the wirings, a first power feeding unit disposed in a non-contact manner on one wiring between the wirings;
A second power feeding unit disposed in a non-contact manner on the other wiring between the wirings in order to supply the power between the wirings;
In order to detect an electrical signal of the one wiring or the other wiring, the measurement electrode unit disposed in a non-contact manner on the one wiring or the other wiring;
Calculation means for calculating an impedance between the wirings based on an electrical signal from the measurement electrode unit;
Control means for urging the power supply means to supply power of a predetermined frequency, and for urging the calculation means to calculate an impedance when the power of the predetermined frequency is applied;
The controller is urged to calculate an impedance when power of at least two or more different predetermined frequencies is supplied, and based on the capacitance component and the resistance component of the capacitance at the two or more calculated impedances . An insulation inspection apparatus comprising: a determination unit that determines whether the insulation state between the wires is good or bad.       The insulation inspection apparatus according to claim 1, wherein the determination unit calculates a displacement amount corresponding to the frequency of two or more calculated impedances, and determines pass / fail according to the displacement amount. An insulation inspection method for performing an insulation inspection between a plurality of wires formed on an inspection object,
A power supply plate for supplying power is arranged in a non-contact manner on one wiring and the other wiring forming the wiring to be inspected, and a measurement plate for detecting an electric signal of the one wiring is not provided. Placed in contact,
While supplying power of two or more different frequencies, calculate the impedance between wiring at each frequency,
An insulation inspection method for determining the quality of the insulation state between the wirings based on a capacitance component and a resistance component of capacitance at the two or more calculated impedances.

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