JP5806493B2 - Positive photosensitive resin composition, dry film, cured product, and printed wiring board - Google Patents

Positive photosensitive resin composition, dry film, cured product, and printed wiring board Download PDF

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JP5806493B2
JP5806493B2 JP2011081297A JP2011081297A JP5806493B2 JP 5806493 B2 JP5806493 B2 JP 5806493B2 JP 2011081297 A JP2011081297 A JP 2011081297A JP 2011081297 A JP2011081297 A JP 2011081297A JP 5806493 B2 JP5806493 B2 JP 5806493B2
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resin composition
photosensitive resin
epoxy resin
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resin
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JP2012215719A (en
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弦人 岩山
弦人 岩山
峰岸 昌司
昌司 峰岸
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Taiyo Ink Manufacturing Co Ltd
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Priority to KR1020137028706A priority patent/KR101624021B1/en
Priority to PCT/JP2012/057223 priority patent/WO2012133062A1/en
Priority to CN201280017006.9A priority patent/CN103460134B/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452Solder masks

Description

本発明は、ポジ型感光性樹脂組成物、これを用いたドライフィルム、及びこれらの硬化物と、これらの硬化物を用いたプリント配線板に関する。   The present invention relates to a positive photosensitive resin composition, a dry film using the same, a cured product thereof, and a printed wiring board using the cured product.

近年、民生用プリント配線板や、産業用プリント配線板のソルダーレジストにおいて、高精度、高密度の観点から、紫外線照射後、現像することにより画像形成し、熱及び/又は光照射で仕上げ硬化(本硬化)する液状現像型ソルダーレジストが使用されている。また、エレクトロニクス機器の軽薄短小化に伴うプリント配線板の高密度化に対応して、ソルダーレジストの作業性の向上や高性能化が要求されている。   In recent years, from the viewpoint of high accuracy and high density, solder printed circuit boards for consumer use and industrial printed circuit boards are used to form images by developing after UV irradiation, and finish-curing by heat and / or light irradiation ( A liquid development type solder resist that is fully cured) is used. In addition, there is a demand for improved solder resist workability and higher performance in response to the increase in the density of printed wiring boards accompanying the reduction in size and size of electronic equipment.

液状現像型ソルダーレジストに用いられる感光性樹脂組成物には、露光した部分が、現像液に溶けにくくなるネガ型の他に、溶けやすくなるポジ型がある。   The photosensitive resin composition used for the liquid development type solder resist includes a positive type in which the exposed portion is easily dissolved in addition to the negative type in which the exposed portion is difficult to dissolve in the developer.

ポジ型の感光性樹脂組成物は、通常構成要件の一つとしてフォトセンシタイザーと呼ばれるキノンジアジド基を含有する感光性化合物を有し、300〜500nmの波長の光照射により感光性化合物中のキノンジアジド基が分解してカルボキシル基が生じることにより、フォトレジスト材料がアルカリ不溶性からアルカリ可溶性に変化し、現像することができる。   The positive-type photosensitive resin composition has a photosensitive compound containing a quinonediazide group called a photosensitizer as one of the usual structural requirements, and the quinonediazide group in the photosensitive compound is irradiated with light having a wavelength of 300 to 500 nm. As a result of decomposition, a carboxyl group is generated, whereby the photoresist material changes from alkali-insoluble to alkali-soluble and can be developed.

特開平11−052568号公報Japanese Patent Application Laid-Open No. 11-052568 特開2000−250211号公報Japanese Patent Laid-Open No. 2000-250211 特開2000−147757号公報JP 2000-147757 A 特開平10−153868号公報JP-A-10-153868 特開平7−64284号公報JP-A-7-64284

本発明の目的は、従来のポジ型樹脂組成物とは組成が異なった新規のポジ型の感光性樹脂組成物、これを用いたドライフィルム、及びこれらの硬化物と、これらの硬化物を用いたプリント配線板を提供することにある。   An object of the present invention is to use a novel positive photosensitive resin composition having a composition different from that of a conventional positive resin composition, a dry film using the same, a cured product thereof, and a cured product thereof. It is to provide a printed wiring board.

本発明者等は、上記目的実現に向け鋭意検討した結果、従来ではポジ型の感光性樹脂組成物が得られるとは考えられなかった特定の組成の樹脂組成物が、ポジ型の感光性樹脂組成物になることを見出し、本発明を完成するに至った。   As a result of intensive studies aimed at realizing the above-mentioned object, the present inventors have found that a positive photosensitive resin composition having a specific composition, which has not been considered to be a positive photosensitive resin composition, can be obtained. The present inventors have found that it becomes a composition and have completed the present invention.

すなわち、本発明のポジ型感光性樹脂組成物は、3級アミン構造を有するエポキシ樹脂と、フェノール樹脂と、光カチオン重合開始剤と、を含有することを特徴とするものである。   That is, the positive photosensitive resin composition of the present invention contains an epoxy resin having a tertiary amine structure, a phenol resin, and a photocationic polymerization initiator.

本発明の他のポジ型感光性樹脂組成物は、エポキシ樹脂と、フェノール樹脂と、光カチオン重合開始剤と、複素環式化合物と、を含有することを特徴とするものである。   Another positive type photosensitive resin composition of the present invention is characterized by containing an epoxy resin, a phenol resin, a photocationic polymerization initiator, and a heterocyclic compound.

上記複素環式化合物は、含窒素複素環式化合物であることが好ましく、イミダゾール系化合物であることがより好ましい。   The heterocyclic compound is preferably a nitrogen-containing heterocyclic compound, and more preferably an imidazole compound.

本発明の感光性ドライフィルムは、上記のいずれかのポジ型感光性樹脂組成物を、フィルム上に塗布乾燥して得られることを特徴とするものである。   The photosensitive dry film of the present invention is obtained by applying and drying any of the positive photosensitive resin compositions described above on a film.

本発明の硬化物は、上記のいずれかのポジ型感光性樹脂組成物、または、感光性ドライフィルムを、活性エネルギー線照射によりパターニングを行い加熱により硬化して得られることを特徴とするものである。   The cured product of the present invention is obtained by patterning any of the above positive photosensitive resin compositions or photosensitive dry films by irradiation with active energy rays and curing by heating. is there.

本発明のプリント配線板は、上記の硬化物を具備することを特徴とするものである。   The printed wiring board of the present invention comprises the above cured product.

本発明により、従来のポジ型感光性樹脂組成物とは組成が異なるポジ型感光性樹脂組成物、これを用いたドライフィルム、これらの硬化物、及び、これらを用いたプリント配線板を提供することができる。   According to the present invention, a positive photosensitive resin composition having a composition different from that of a conventional positive photosensitive resin composition, a dry film using the same, a cured product thereof, and a printed wiring board using the same are provided. be able to.

以下、本発明の実施の形態について、詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail.

[エポキシ樹脂]
本発明のポジ型感光性樹脂組成物は、エポキシ樹脂として3級アミン構造を有するエポキシ樹脂を用いるか、または、複素環式化合物を含有する場合には、特にエポキシ樹脂の種類は限定されず、広く公知慣用のエポキシ樹脂を用いることができる。
[Epoxy resin]
The positive photosensitive resin composition of the present invention uses an epoxy resin having a tertiary amine structure as an epoxy resin, or when it contains a heterocyclic compound, the type of the epoxy resin is not particularly limited, Widely known and commonly used epoxy resins can be used.

上記3級アミン構造を有するエポキシ樹脂としては、公知の3級アミン構造を有するエポキシ樹脂を使用することができる。具体的には、N,N−ジメチルアミノエチルグリシジルエーテル、N,N−ジメチルアミノトリルグリシジルエーテル、N,N−ジメチルアミノフェニルグリシジルエーテル、N,N−ジグリシジル−4−グリシジルオキシアニリン、1,3,5−トリグリシジルイソシアヌレート、N,N−ジグリシジルアニリン、4,4’−メチレンビス[N,N−ジグリシジルアニリン、イソシアネート変性エポキシ樹脂等が挙げられる。市販品としては、N,N−ジグリシジル−4−グリシジルオキシアニリンであるjER630(三菱化学社製)、1,3,5−トリグリシジルイソシアヌレートであるアラルダイドPT810(BASF社製)やTEPIC(日産化学工業社製)、イソシアネート変性エポキシ樹脂としてXAC4151、AER4152(旭化成イーマテリアルズ社製)等が挙げられる。更に、上記3級アミン構造を有するエポキシ樹脂が、含窒素複素環式エポキシ樹脂、アニリン型エポキシ樹脂、イソシアネート変性エポキシ樹脂であることが好ましい。上記3級アミン構造を有するエポキシ樹脂は、1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。   As the epoxy resin having a tertiary amine structure, a known epoxy resin having a tertiary amine structure can be used. Specifically, N, N-dimethylaminoethyl glycidyl ether, N, N-dimethylaminotolyl glycidyl ether, N, N-dimethylaminophenyl glycidyl ether, N, N-diglycidyl-4-glycidyloxyaniline, 1,3 , 5-triglycidyl isocyanurate, N, N-diglycidylaniline, 4,4′-methylenebis [N, N-diglycidylaniline, isocyanate-modified epoxy resin, and the like. Commercially available products include N, N-diglycidyl-4-glycidyloxyaniline jER630 (Mitsubishi Chemical), 1,3,5-triglycidyl isocyanurate, Araldide PT810 (BASF) and TEPIC (Nissan Chemical). XAC4151, AER4152 (made by Asahi Kasei E-Materials) etc. are mentioned as an isocyanate modified epoxy resin. Further, the epoxy resin having a tertiary amine structure is preferably a nitrogen-containing heterocyclic epoxy resin, an aniline type epoxy resin, or an isocyanate-modified epoxy resin. The said epoxy resin which has a tertiary amine structure may be used individually by 1 type, and may be used in combination of 2 or more type.

本発明において、上記3級アミン構造を有するエポキシ樹脂の3級アミン構造のアミンが、炭素数3〜10の直鎖又は分岐鎖のエポキシアルキル基を有することがより好ましく、特に、炭素数3〜6の直鎖又は分岐鎖のエポキシアルキル基を有することが好ましい。   In the present invention, the amine having the tertiary amine structure of the epoxy resin having the tertiary amine structure more preferably has a linear or branched epoxyalkyl group having 3 to 10 carbon atoms, and particularly 3 to 3 carbon atoms. It is preferable to have 6 linear or branched epoxyalkyl groups.

上記3級アミン構造を有するエポキシ樹脂の好ましい化合物の具体例として、下記の化合物が挙げられるが、本発明はこれらの化合物に限定されるものではない。   Specific examples of preferable compounds of the epoxy resin having the tertiary amine structure include the following compounds, but the present invention is not limited to these compounds.

Figure 0005806493
N,N−ジグリシジル−4−グリシジルオキシアニリン
Figure 0005806493
N, N-diglycidyl-4-glycidyloxyaniline

Figure 0005806493
1,3,5−トリグリシジルイソシアヌレート
Figure 0005806493
1,3,5-triglycidyl isocyanurate

上記複素環式化合物を含有する場合の、本発明のポジ型感光性樹脂組成物において、エポキシ樹脂としては、公知のいずれのものも用いることができ、前記3級アミン構造を有するエポキシ樹脂であってもよい。前記エポキシ樹脂の例として、三菱化学社製のjER828、jER834、jER1001、jER1004、DIC社製のエピクロン840、エピクロン850、エピクロン1050、エピクロン2055、東都化成社製のエポトートYD−011、YD−013、YD−127、YD−128、ダウケミカル社製のD.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、住友化学工業社製のスミ−エポキシESA−011、ESA−014、ELA−115、ELA−128、旭化成工業社製のA.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(何れも商品名)のビスフェノールA型エポキシ樹脂;三菱化学社製のjERYL903、DIC社製のエピクロン152、エピクロン165、東都化成社製のエポトートYDB−400、YDB−500、ダウケミカル社製のD.E.R.542、住友化学工業社製のスミ−エポキシESB−400、ESB−700、ADEKA社製のA.E.R.711、A.E.R.714等(何れも商品名)のブロム化エポキシ樹脂;三菱化学社製のjER152、jER154、ダウケミカル社製のD.E.N.431、D.E.N.438、DIC社製のエピクロンN−730、エピクロンN−770、エピクロンN−865、東都化成社製のエポトートYDCN−701、YDCN−704、日本化薬社製のEPPN−201、EOCN−1025、EOCN−1020、EOCN−104S、RE−306、NC−3000、住友化学工業社製のスミ−エポキシESCN−195X、ESCN−220、旭化成工業社製のA.E.R.ECN−235、ECN−299等(何れも商品名)のノボラック型エポキシ樹脂;DIC社製のエピクロン830、三菱化学社製jER807、東都化成社製のエポトートYDF−170、YDF−175、YDF−2004等(何れも商品名)のビスフェノールF型エポキシ樹脂;東都化成社製のエポトートST−2004、ST−2007、ST−3000(商品名)等の水添ビスフェノールA型エポキシ樹脂;三菱化学社製のjER604、東都化成社製のエポトートYH−434、住友化学工業社製のスミ−エポキシELM−120等(何れも商品名)のグリシジルアミン型エポキシ樹脂;ヒダントイン型エポキシ樹脂;ダイセル化学工業社製のセロキサイド2021等(何れも商品名)の脂環式エポキシ樹脂;三菱化学社製のYL−933、ダウケミカル社製のT.E.N.、EPPN−501、EPPN−502等(何れも商品名)のトリヒドロキシフェニルメタン型エポキシ樹脂;三菱化学社製のYL−6056、YX−4000、YL−6121(何れも商品名)等のビキシレノール型もしくはビフェノール型エポキシ樹脂又はそれらの混合物;日本化薬社製EBPS−200、ADEKA社製EPX−30、DIC社製のEXA−1514(商品名)等のビスフェノールS型エポキシ樹脂;三菱化学社製のjER157S(商品名)等のビスフェノールAノボラック型エポキシ樹脂;三菱化学社製のjERYL−931等(何れも商品名)のテトラフェニロールエタン型エポキシ樹脂;日産化学工業社製のTEPIC等(何れも商品名)の複素環式エポキシ樹脂;日本油脂社製ブレンマーDGT等のジグリシジルフタレート樹脂;東都化成社製ZX−1063等のテトラグリシジルキシレノイルエタン樹脂;新日鐵化学社製ESN−190、ESN−360、DIC社製HP−4032、EXA−4750、EXA−4700等のナフタレン基含有エポキシ樹脂;DIC社製HP−7200、HP−7200H等のジシクロペンタジエン骨格を有するエポキシ樹脂;日本油脂社製CP−50S、CP−50M等のグリシジルメタアクリレート共重合系エポキシ樹脂;さらにシクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂;CTBN変性エポキシ樹脂(例えば東都化成社製のYR−102、YR−450等)等の多官能エポキシ樹脂が挙げられるが、これらに限られるものではない。中でも、クレゾールノボラック型エポキシ樹脂、フェノールノボラック型エポキシ樹脂が好ましい。これらのエポキシ樹脂は、1種を単独で用いてもよく、2種以上を併用して用いてもよい。   In the positive photosensitive resin composition of the present invention containing the heterocyclic compound, any known epoxy resin can be used, and the epoxy resin having the tertiary amine structure. May be. Examples of the epoxy resin include jER828, jER834, jER1001, and jER1004 manufactured by Mitsubishi Chemical Corporation, Epicron 840, Epicron 850, Epicron 1050, Epicron 2055, Epoto YD-011, YD-013 manufactured by Tohto Kasei Co., Ltd. YD-127, YD-128, D.C. E. R. 317, D.E. E. R. 331, D.D. E. R. 661, D.E. E. R. 664, Sumitomo Epoxy ESA-011, ESA-014, ELA-115, ELA-128, manufactured by Sumitomo Chemical Co., Ltd., A.A. E. R. 330, A.I. E. R. 331, A.I. E. R. 661, A.I. E. R. Bisphenol A type epoxy resin such as 664 (all trade names); jERYL903 manufactured by Mitsubishi Chemical, Epicron 152, Epicron 165 manufactured by DIC, Epototo YDB-400, YDB-500 manufactured by Tohto Kasei Co., Ltd., manufactured by Dow Chemical Of D. E. R. 542, Sumitomo Epoxy ESB-400, ESB-700, manufactured by Sumitomo Chemical Co., Ltd., A. E. R. 711, A.I. E. R. Brominated epoxy resins such as 714 (both trade names); jER152 and jER154 manufactured by Mitsubishi Chemical Corporation, and D.C. E. N. 431, D.D. E. N. 438, Epicron N-730, Epicron N-770, Epicron N-865 manufactured by DIC, Epototo YDCN-701, YDCN-704 manufactured by Tohto Kasei Co., Ltd. EPPN-201, EOCN-1025, EOCN manufactured by Nippon Kayaku Co., Ltd. -1020, EOCN-104S, RE-306, NC-3000, Sumitomo Epoxy ESCN-195X, ESCN-220, manufactured by Sumitomo Chemical Co., Ltd., A.C. E. R. Novolak type epoxy resins such as ECN-235, ECN-299, etc. (both trade names); Epicron 830 manufactured by DIC, jER807 manufactured by Mitsubishi Chemical Co., Ltd. Epototo YDF-170, YDF-175, YDF-2004 manufactured by Tohto Kasei Co., Ltd. (All trade names) bisphenol F-type epoxy resin; hydrogenated bisphenol A-type epoxy resins such as Epototo ST-2004, ST-2007, ST-3000 (trade name) manufactured by Toto Kasei Co., Ltd .; jER604, Etototo YH-434 manufactured by Tohto Kasei Co., Ltd. Sumitomo Chemical Co., Ltd. Sumi-epoxy ELM-120, etc. (all trade names) glycidylamine type epoxy resin; Hydantoin type epoxy resin; 2021 etc. (all trade names) alicyclic epoxy resin; Y manufactured by Mitsubishi Chemical Corporation -933, manufactured by Dow Chemical Company of T. E. N. , EPPN-501, EPPN-502, etc. (all trade names) trihydroxyphenylmethane type epoxy resin; Mitsubishi Chemical Corporation YL-6056, YX-4000, YL-6121 (all trade names) Type or biphenol type epoxy resin or a mixture thereof; Nippon Kayaku EBPS-200, ADEKA EPX-30, DIC EXA-1514 (trade name) and other bisphenol S type epoxy resins; Bisphenol A novolac type epoxy resin such as jER157S (trade name); tetraphenylolethane type epoxy resin such as jERYL-931 (all trade name) made by Mitsubishi Chemical; TEPIC made by Nissan Chemical Industries (all) Product name) heterocyclic epoxy resin; Niguri such as Bremer DGT manufactured by NOF Corporation Zylphthalate resin; Tetraglycidylxylenoylethane resin such as ZX-1063 manufactured by Tohto Kasei; ESN-190, ESN-360 manufactured by Nippon Steel Chemical Co., Ltd., HP-4032, EXA-4750, EXA-4700 manufactured by DIC Naphthalene group-containing epoxy resin; epoxy resin having a dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by DIC; glycidyl methacrylate copolymer epoxy resin such as CP-50S and CP-50M manufactured by NOF Corporation; Furthermore, a polyfunctional epoxy resin such as a copolymerized epoxy resin of cyclohexylmaleimide and glycidyl methacrylate; a CTBN-modified epoxy resin (for example, YR-102, YR-450, etc. manufactured by Tohto Kasei Co., Ltd.) can be mentioned. Absent. Among these, a cresol novolac type epoxy resin and a phenol novolac type epoxy resin are preferable. These epoxy resins may be used alone or in combination of two or more.

[フェノール樹脂]
フェノール樹脂としては、公知のフェノール樹脂を使用することができる。例えば、フェノールノボラック樹脂、クレゾールノボラック樹脂、ビスフェノールA型ノボラック樹脂、ビスフェノールF型ノボラック樹脂、ナフトールノボラック樹脂などが挙げられる。中でも、フェノールノボラック樹脂、クレゾールノボラック樹脂が好ましく、特にフェノールノボラック樹脂が好ましい。このようなフェノール樹脂は1種を単独で用いてもよく、2種以上を併用して用いてもよい。
[Phenolic resin]
As a phenol resin, a well-known phenol resin can be used. For example, a phenol novolak resin, a cresol novolak resin, a bisphenol A type novolak resin, a bisphenol F type novolak resin, a naphthol novolak resin, and the like can be given. Of these, phenol novolac resins and cresol novolac resins are preferable, and phenol novolac resins are particularly preferable. Such a phenol resin may be used individually by 1 type, and may be used in combination of 2 or more type.

このフェノール樹脂の配合量は、固形分として、エポキシ樹脂100質量部に対して、好ましくは20〜150質量部、より好ましくは35〜130質量部、更に好ましくは50〜100質量部である。20質量部未満であると現像ができず目的とする解像性が得られない。一方、150質量部を超えると、耐アルカリ性が低下し目的とする解像性が得られない。   The blending amount of the phenol resin is preferably 20 to 150 parts by mass, more preferably 35 to 130 parts by mass, and further preferably 50 to 100 parts by mass with respect to 100 parts by mass of the epoxy resin as a solid content. If it is less than 20 parts by mass, development cannot be performed and the desired resolution cannot be obtained. On the other hand, if it exceeds 150 parts by mass, the alkali resistance is lowered and the desired resolution cannot be obtained.

[光カチオン重合開始剤]
光カチオン重合開始剤としては、公知のいずれのものも用いることができる。本発明において、光カチオン重合開始剤とは、活性エネルギー線の照射を受けてカチオンを発生する化合物であればよく、本発明の効果であるポジ型パターンの発現が得られる限り、実際に光カチオン重合開始剤として機能するか否かによって、限定されるものではない。光カチオン重合開始剤として、例えば、ジフェニルヨードニウムテトラフルオロボロエート、トリフェニルスルホニウムヘキサフルオロアンチモネート、2,4,6−トリフェニルチオピリリウムヘキサフルオロホスフェートや、市販品として、(株)ADEKA製オプトマ−SP−170やSP−152、サンアプロ社製CPI−100P、CPI−101A、CPI−200K、CPI−210S等のスルホニウム塩系光カチオン重合開始剤や、BASF社製イルガキュアー(登録商標)261等が挙げられる。中でも、SP−152、CPI−100P、CPI−200Kが好ましく、特に対アニオンとしてヘキサフルオロホスフェートを有するスルホニウム塩系光カチオン重合開始剤が好ましい。このような光カチオン重合開始剤は1種を単独で用いてもよく、2種以上を併用して用いてもよい。
[Photocationic polymerization initiator]
Any known cationic photopolymerization initiator can be used. In the present invention, the photocation polymerization initiator may be any compound that generates a cation upon irradiation with an active energy ray, and is actually a photocation as long as the positive pattern expression that is the effect of the present invention is obtained. It is not limited by whether or not it functions as a polymerization initiator. Examples of the cationic photopolymerization initiator include diphenyliodonium tetrafluoroboroate, triphenylsulfonium hexafluoroantimonate, 2,4,6-triphenylthiopyrylium hexafluorophosphate, and commercially available products such as Optoma manufactured by ADEKA Corporation. -SP-170, SP-152, sulfonium salt photocationic polymerization initiators such as CPI-100P, CPI-101A, CPI-200K, CPI-210S manufactured by San Apro, Irgacure (registered trademark) 261 manufactured by BASF, etc. Is mentioned. Among these, SP-152, CPI-100P, and CPI-200K are preferable, and a sulfonium salt-based photocationic polymerization initiator having hexafluorophosphate as a counter anion is particularly preferable. Such photocationic polymerization initiators may be used alone or in combination of two or more.

この光カチオン重合開始剤の配合量は、固形分として、エポキシ樹脂100質量部に対して、好ましくは1〜25質量部、より好ましくは5〜20質量部、更に好ましくは10〜20質量部である。1質量部未満であると未露光部に耐現像性が得られずパターンが得られない。一方、25質量部を超えると、露光部に耐現像性が発現し解像性が得られない。   The compounding amount of the photocationic polymerization initiator is preferably 1 to 25 parts by mass, more preferably 5 to 20 parts by mass, and further preferably 10 to 20 parts by mass with respect to 100 parts by mass of the epoxy resin as a solid content. is there. When the amount is less than 1 part by mass, development resistance cannot be obtained in the unexposed part, and a pattern cannot be obtained. On the other hand, when the amount exceeds 25 parts by mass, development resistance is developed in the exposed portion and resolution cannot be obtained.

[複素環式化合物]
複素環式化合物としては、公知のいずれのものも用いることができる。例えば、ピペリジン、ピペラジン、ピロリジン、ピロール、ピリジン、ピラジン、ピリミジン、トリアゾール、ピラゾール、イミダゾール、インドール、オキサゾール、チアゾール系化合物等の含窒素複素環式化合物、フラン、テトラヒドロフラン、テトラヒドロピラン系化合物等の含酸素複素環式化合物、チオフェン、テトラヒドロチオフェン系化合物等の含硫黄複素環式化合物が挙げられる。中でも、含窒素複素環式化合物が好ましく、イミダゾール系化合物がより好ましい。イミダゾール系化合物としては、イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、4−フェニルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−(2−シアノエチル)−2−エチル−4−メチルイミダゾール等が挙げられる。このような複素環式化合物は1種を単独で用いてもよく、2種以上を併用して用いてもよい。
[Heterocyclic compound]
As the heterocyclic compound, any known compound can be used. For example, nitrogen-containing heterocyclic compounds such as piperidine, piperazine, pyrrolidine, pyrrole, pyridine, pyrazine, pyrimidine, triazole, pyrazole, imidazole, indole, oxazole and thiazole compounds, oxygen-containing compounds such as furan, tetrahydrofuran and tetrahydropyran compounds Examples thereof include sulfur-containing heterocyclic compounds such as heterocyclic compounds, thiophene, and tetrahydrothiophene compounds. Of these, nitrogen-containing heterocyclic compounds are preferable, and imidazole compounds are more preferable. Examples of imidazole compounds include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2 -Cyanoethyl) -2-ethyl-4-methylimidazole and the like. Such a heterocyclic compound may be used individually by 1 type, and may be used in combination of 2 or more type.

上記複素環式化合物を配合する場合の配合量は、固形分として、エポキシ樹脂100質量部に対して、好ましくは1〜10質量部、より好ましくは1〜5質量部である。1質量部未満であると未露光部に耐現像性がなくパターンが得られない。一方、10質量部を超えると、露光部に耐現像性が発現し解像性が得られない。   The compounding amount in the case of compounding the heterocyclic compound is preferably 1 to 10 parts by mass, more preferably 1 to 5 parts by mass with respect to 100 parts by mass of the epoxy resin as a solid content. If it is less than 1 part by mass, the unexposed part has no development resistance and a pattern cannot be obtained. On the other hand, when the amount exceeds 10 parts by mass, development resistance is developed in the exposed portion and resolution cannot be obtained.

[バインダーポリマー]
さらに本発明のポジ型感光性樹脂組成物には、指触乾燥性の改善、ハンドリング性の改善などを目的にバインダーポリマーを使用することができる。バインダーポリマーとして用いることができるものとしては、例えば、ポリエステル系ポリマー、ポリウレタン系ポリマー、ポリエステルウレタン系ポリマー、ポリアミド系ポリマー、ポリエステルアミド系ポリマー、アクリル系ポリマー、セルロース系ポリマー、ポリ乳酸系ポリマー、フェノキシ系ポリマーなどが挙げられる。これらのバインダーポリマーは、1種を単独で用いてもよく、2種類以上の混合物として用いてもよい。
[Binder polymer]
Furthermore, a binder polymer can be used in the positive photosensitive resin composition of the present invention for the purpose of improving touch drying properties and handling properties. Examples of the binder polymer that can be used include polyester polymers, polyurethane polymers, polyester urethane polymers, polyamide polymers, polyester amide polymers, acrylic polymers, cellulose polymers, polylactic acid polymers, and phenoxy polymers. Examples thereof include polymers. These binder polymers may be used alone or as a mixture of two or more.

上記バインダーポリマーを配合する場合の配合量は、固形分として、エポキシ樹脂100質量部に対して、好ましくは5〜50質量部、より好ましくは10〜40質量部である。5質量部未満であるとハンドリングクラックが発生する。一方、50質量部を超えると、現像性が低下し満足した解像性が得られない。   The blending amount in the case of blending the binder polymer is preferably 5 to 50 parts by mass, more preferably 10 to 40 parts by mass with respect to 100 parts by mass of the epoxy resin as a solid content. When it is less than 5 parts by mass, handling cracks occur. On the other hand, if it exceeds 50 parts by mass, the developability is lowered and satisfactory resolution cannot be obtained.

また、本発明のポジ型感光性樹脂組成物には、必要に応じて、さらに各種の添加剤や成分、例えば、酸化防止剤、充填剤(フィラー)、シランカップリング剤、熱硬化性成分、熱硬化触媒、光硬化性成分、光開始助剤または増感剤、イソシアネート基又ブロックイソシアネート基を有する化合物、ウレタン化触媒、エチレン性不飽和基を有する化合物等の感光性モノマー、エラストマー、有機溶剤、着色剤、紫外線吸収剤、連鎖移動剤、密着促進剤、チキソ化剤、熱重合禁止剤、消泡剤、レベリング剤、防錆剤、銅害防止剤等を配合することができる。   The positive photosensitive resin composition of the present invention may further include various additives and components, for example, an antioxidant, a filler (filler), a silane coupling agent, a thermosetting component, if necessary. Photosensitive monomers such as thermosetting catalysts, photocurable components, photoinitiator aids or sensitizers, compounds having isocyanate groups or blocked isocyanate groups, urethanization catalysts, compounds having ethylenically unsaturated groups, elastomers, organic solvents , Colorants, ultraviolet absorbers, chain transfer agents, adhesion promoters, thixotropic agents, thermal polymerization inhibitors, antifoaming agents, leveling agents, rust inhibitors, copper damage inhibitors, and the like can be blended.

本発明のポジ型感光性樹脂組成物は、例えば前記有機溶剤で塗布方法に適した粘度に調整し、基材上に、ディップコート法、フローコート法、ロールコート法、バーコーター法、スクリーン印刷法、カーテンコート法等の方法により塗布し、約60〜100℃の温度で組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させることにより、タックフリーの塗膜を形成できる。その後、接触式(又は非接触方式)により、パターンを形成したフォトマスクを通して選択的に活性エネルギー線により露光し、もしくはレーザーダイレクト露光機により直接パターン露光し、露光部をアルカリ水溶液(例えば0.3〜3%炭酸ソーダ水溶液)や有機溶剤により現像して樹脂絶縁層パターンが形成される。さらに、本発明のポジ型感光性樹脂組成物は、エポキシ樹脂とフェノール樹脂を含有しているため、例えば約100〜200℃の温度に加熱して熱硬化させることにより耐熱性、耐薬品性、耐吸湿性、密着性、電気特性などの諸特性に優れた硬化塗膜を形成することができる。尚、エチレン性不飽和結合を有する光硬化性成分を含有しているのであれば、熱処理することにより、露光時に未反応の状態で残った光硬化性成分のエチレン性不飽和結合が熱ラジカル重合し、塗膜特性が向上するため、目的・用途により、熱処理(熱硬化)してもよい。   The positive photosensitive resin composition of the present invention is adjusted to a viscosity suitable for the coating method using, for example, the organic solvent, and is applied on the substrate by a dip coating method, a flow coating method, a roll coating method, a bar coater method, screen printing. A tack-free coating film can be formed by applying the organic solvent contained in the composition at a temperature of about 60 to 100 ° C. and performing volatile drying (temporary drying). Thereafter, the exposed portion is selectively exposed to active energy rays through a photomask on which a pattern is formed by a contact method (or non-contact method), or directly exposed to a pattern by a laser direct exposure machine, and the exposed portion is exposed to an alkaline aqueous solution (for example 0.3 A resin insulating layer pattern is formed by development with a ~ 3% sodium carbonate aqueous solution) or an organic solvent. Furthermore, since the positive photosensitive resin composition of the present invention contains an epoxy resin and a phenol resin, for example, it is heated to a temperature of about 100 to 200 ° C. and cured by heat, A cured coating film excellent in various properties such as moisture absorption resistance, adhesion, and electrical characteristics can be formed. In addition, if it contains a photocurable component having an ethylenically unsaturated bond, the radically polymerized ethylenically unsaturated bond of the photocurable component remaining in an unreacted state upon exposure is subjected to heat treatment. In order to improve the coating properties, heat treatment (thermosetting) may be performed depending on the purpose and application.

上記基材としては、予め回路形成されたプリント配線板やフレキシブルプリント配線板の他、紙−フェノール樹脂、紙−エポキシ樹脂、ガラス布−エポキシ樹脂、ガラス−ポリイミド、ガラス布/不繊布−エポキシ樹脂、ガラス布/紙−エポキシ樹脂、合成繊維−エポキシ樹脂、フッ素樹脂・ポリエチレン・PPO・シアネートエステル等の複合材を用いた全てのグレード(FR−4等)の銅張積層板、ポリイミドフィルム、PETフィルム、ガラス基板、セラミック基板、ウエハ板等を用いることができる。   As the substrate, in addition to a printed circuit board and a flexible printed circuit board in which circuits are formed in advance, paper-phenol resin, paper-epoxy resin, glass cloth-epoxy resin, glass-polyimide, glass cloth / non-woven cloth-epoxy resin , Glass cloth / paper-epoxy resin, synthetic fiber-epoxy resin, copper-clad laminate of all grades (FR-4 etc.) using polyimide, polyethylene, PPO, cyanate ester, etc., polyimide film, PET A film, a glass substrate, a ceramic substrate, a wafer plate, or the like can be used.

本発明のポジ型感光性樹脂組成物を塗布した後に行う揮発乾燥は、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブンなどを用いて行うことができる。   Volatile drying performed after applying the positive photosensitive resin composition of the present invention can be performed using a hot-air circulating drying furnace, an IR furnace, a hot plate, a convection oven, or the like.

上記活性エネルギー線照射による露光に用いられる露光機としては、直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)、メタルハライドランプを搭載した露光機、(超)高圧水銀ランプを搭載した露光機、水銀ショートアークランプを搭載した露光機、もしくは(超)高圧水銀ランプなどの紫外線ランプを使用した直接描画装置を用いることができる。活性エネルギー線としてレーザー光を用いる場合、最大波長が350〜410nmの範囲にあればガスレーザー、固体レーザーどちらでもよい。上記直接描画装置としては、例えば最大波長が350〜410nmのレーザー光を発振する装置である日本オルボテック社製、ペンタックス社製等のものを使用することができ、高圧水銀ランプを有する装置であればオーク製作所社製、大日本スクリーン社製等のものであればいずれの装置を用いてもよい。   As the exposure machine used for the exposure by the active energy ray irradiation, a direct drawing apparatus (for example, a laser direct imaging apparatus that directly draws an image with a laser using CAD data from a computer), an exposure machine equipped with a metal halide lamp, (ultra) high pressure An exposure machine equipped with a mercury lamp, an exposure machine equipped with a mercury short arc lamp, or a direct drawing apparatus using an ultraviolet lamp such as a (super) high pressure mercury lamp can be used. When laser light is used as the active energy ray, either a gas laser or a solid laser may be used as long as the maximum wavelength is in the range of 350 to 410 nm. As the direct drawing device, for example, a device that oscillates a laser beam having a maximum wavelength of 350 to 410 nm can be used, such as those manufactured by Nippon Orbotec, Pentax, etc. Any device may be used as long as it is manufactured by Oak Seisakusho or Dainippon Screen.

前記現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができ、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類などのアルカリ水溶液が使用できる。また、有機溶剤による現像に際しては、アセトン、トルエン、メチルエチルケトン等の有機溶剤を用いることができる。   The developing method can be a dipping method, a shower method, a spray method, a brush method or the like, and as a developer, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, Alkaline aqueous solutions such as ammonia and amines can be used. In developing with an organic solvent, an organic solvent such as acetone, toluene, or methyl ethyl ketone can be used.

本発明のポジ型感光性樹脂組成物は、上述のように、液状で直接基材に塗布する方法以外にも、予めポリエチレンテレフタレート等のフィルムに感光性樹脂組成物を塗布・乾燥して形成したポジ型の感光性樹脂組成物層を有するドライフィルムの形態で使用することもできる。
本発明のポジ型感光性樹脂組成物をドライフィルムとして使用する場合を以下に示す。
As described above, the positive photosensitive resin composition of the present invention was formed by applying and drying the photosensitive resin composition on a film of polyethylene terephthalate or the like in advance, in addition to the method of applying it directly to the substrate in a liquid state. It can also be used in the form of a dry film having a positive photosensitive resin composition layer.
The case where the positive photosensitive resin composition of the present invention is used as a dry film is shown below.

ドライフィルムは、キャリアフィルムと、感光性樹脂組成物層と、必要に応じて用いられる剥離可能なカバーフィルムとが、この順序に積層された構造を有するものである。感光性樹脂組成物層は、感光性樹脂組成物をキャリアフィルム又はカバーフィルムに塗布・乾燥して得られる層であり、目的に応じて二以上の層であってもよい。キャリアフィルムに感光性樹脂組成物層を形成した後に、カバーフィルムをその上に積層するか、カバーフィルムに感光性樹脂組成物層を形成し、この積層体をキャリアフィルムに積層すればドライフィルムが得られる。   The dry film has a structure in which a carrier film, a photosensitive resin composition layer, and a peelable cover film used as necessary are laminated in this order. The photosensitive resin composition layer is a layer obtained by applying and drying the photosensitive resin composition on a carrier film or a cover film, and may be two or more layers depending on the purpose. After forming the photosensitive resin composition layer on the carrier film, the cover film is laminated thereon, or the photosensitive resin composition layer is formed on the cover film, and this laminate is laminated on the carrier film. can get.

キャリアフィルムとしては、2〜150μm厚みのポリエステルフィルム等の熱可塑性フィルムが用いられる。
感光性樹脂組成物層は、本発明のポジ型感光性樹脂組成物をブレードコーター、リップコーター、コンマコーター、フィルムコーター等でキャリアフィルム又はカバーフィルムに10〜150μmの厚さで均一に塗布し乾燥して形成される。感光性樹脂組成物層が二層以上の場合は、別の感光性樹脂組成物層の上に、本発明のポジ型感光性樹脂組成物を塗布してもよい。
カバーフィルムとしては、ポリエチレンフィルム、ポリプロピレンフィルム等を使用することができるが、感光性樹脂組成物層との接着力が、キャリアフィルムよりも小さいものが好ましい。
As the carrier film, a thermoplastic film such as a polyester film having a thickness of 2 to 150 μm is used.
The photosensitive resin composition layer is formed by uniformly applying the positive photosensitive resin composition of the present invention to a carrier film or a cover film with a thickness of 10 to 150 μm using a blade coater, lip coater, comma coater, film coater, and the like. Formed. When there are two or more photosensitive resin composition layers, the positive photosensitive resin composition of the present invention may be applied on another photosensitive resin composition layer.
As the cover film, a polyethylene film, a polypropylene film, and the like can be used, but those having an adhesive force with the photosensitive resin composition layer smaller than that of the carrier film are preferable.

ドライフィルムを用いてプリント配線板上に樹脂絶縁層を作成するには、カバーフィルムを剥がし、感光性樹脂組成物層と回路形成された基材を重ね、ラミネーター等を用いて貼り合わせ、回路形成された基材上に感光性樹脂組成物層を形成する。形成された感光性樹脂組成物層に対し、前記と同様に露光、現像、加熱硬化すれば、硬化塗膜を形成することができる。キャリアフィルムは、露光前又は露光後のいずれかに剥離すればよい。   To create a resin insulation layer on a printed wiring board using a dry film, peel off the cover film, stack the photosensitive resin composition layer and the substrate on which the circuit is formed, and bond them together using a laminator, etc. A photosensitive resin composition layer is formed on the formed substrate. If the formed photosensitive resin composition layer is exposed, developed and heat-cured in the same manner as described above, a cured coating film can be formed. The carrier film may be peeled off either before exposure or after exposure.

以下、実施例及び比較例を示して、本発明について具体的に説明するが、本発明は下記実施例に限定されるものではない。なお、以下において「部」及び「%」とあるのは、特に断りのない限り全て質量基準である。   EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not limited to the following Example. In the following, “parts” and “%” are based on mass unless otherwise specified.

<樹脂組成物の調製>
下記表1に示す種々の成分と共に表1に示す割合(質量部)にて配合し、撹拌機にて予備混合した後、3本ロールミルで混練し、実施例1〜5、参考例6、7及び比較例1、2の樹脂組成物を調製した。
<Preparation of resin composition>
It mix | blends with the ratio (mass part) shown in Table 1 with the various components shown in following Table 1, knead | mixes with a 3 roll mill after premixing with a stirrer, Examples 1-5, Reference Examples 6 and 7 And the resin composition of Comparative Examples 1 and 2 was prepared.

<ドライフィルムの作製>
実施例1〜5、参考例6、7及び比較例1、2の樹脂組成物をそれぞれメチルエチルケトンにて希釈し、PETフィルム(38μm)上に塗布した。これを90℃で15分乾燥し、厚さ20μmの乾燥塗膜を形成し、さらにその上にカバーフィルムを貼り合わせて、ドライフィルムを作製した。
<Production of dry film>
The resin compositions of Examples 1 to 5, Reference Examples 6 and 7, and Comparative Examples 1 and 2 were each diluted with methyl ethyl ketone and coated on a PET film (38 μm). This was dried at 90 ° C. for 15 minutes to form a dry coating film having a thickness of 20 μm, and a cover film was further bonded thereon to produce a dry film.

<評価基板の作成>
銅ベタ(ラミネート銅箔)をメックエッチボンドCZ−8100B(メック社製)に30℃で浸漬させて、粗化処理(Ra値:1μm)を行った。上記で作製したドライフィルムからカバーフィルムを剥がし、前処理した銅箔基板に、ラミネートした(70℃、真空引き60秒、スラップダウン0.10MPa、8秒)。次いで、この基板にメタルハライドランプを搭載した露光装置を用いて、最適露光量でパターン露光を行った(レジスト上3J/cm)。露光後、キャリアフィルムを剥がし、90℃×15分で加熱した。その後、5.0wt%の2−アミノエタノール水溶液で撹拌浸漬して現像し(35℃、3分)、パターンの形成された評価基板を得た。
<Creation of evaluation board>
A solid copper (laminated copper foil) was immersed in Mec Etch Bond CZ-8100B (made by Mec Co., Ltd.) at 30 ° C. to perform a roughening treatment (Ra value: 1 μm). The cover film was peeled off from the dry film produced above and laminated on a pretreated copper foil substrate (70 ° C., vacuuming 60 seconds, slap down 0.10 MPa, 8 seconds). Subsequently, pattern exposure was performed with an optimal exposure amount using an exposure apparatus in which a metal halide lamp was mounted on the substrate (3 J / cm 2 on the resist). After exposure, the carrier film was peeled off and heated at 90 ° C. for 15 minutes. Thereafter, development was performed by immersion with stirring in a 5.0 wt% aqueous 2-aminoethanol solution (35 ° C., 3 minutes) to obtain an evaluation substrate on which a pattern was formed.

<ポジ型パターンの評価>
得られた評価基板について、実施例1〜5、参考例6、7および比較例1、2の樹脂組成物を用いたポジ型パターンの発現性を目視にて評価した。結果を下記表1に示す。
<Evaluation of positive pattern>
About the obtained evaluation board | substrate, the expression property of the positive type pattern using the resin composition of Examples 1-5, Reference Examples 6 and 7, and Comparative Examples 1 and 2 was evaluated visually. The results are shown in Table 1 below.

Figure 0005806493
*1 フェノールノボラック樹脂(HF−1CA75(固形分:75wt%)、明和化成社製)
*2 クレゾールノボラック樹脂(MER−7959CA75(固形分:75wt%)、明和化成社製)
*3 スルホニウム塩系光カチオン重合開始剤(CPI−100P、サンアプロ社製)
*4 スルホニウム塩系光カチオン重合開始剤(アデカオプトマーSP−152、ADEKA社製)
*5 アニリン型エポキシ樹脂(N,N−ジグリシジル−4−グリシジルオキシアニリン:JER630、ジャパンエポキシレジン社製)
*6 クレゾールノボラック型エポキシ樹脂(EOCN−104SH70(固形分:70wt%)、日本化薬製)
*7 含窒素複素環式エポキシ樹脂(1,3,5−トリグリシジルイソシアヌレート:TEPIC−HP、日産化学工業社製)
*8 2−エチル−4−メチルイミダゾール(2E4MZ、四国化成工業社製)
*9 2−フェニル−4,5−ジヒドロキシメチルイミダゾール(2PHZ、四国化成工業社製)
*10 フェノキシ樹脂(YX8000BH30(固形分:30wt%)、三菱化学社製)
*11 3元ブロック共重合体:ポリスチレン−ポリブタジエン−ポリメチルメタクリレート(SBM−E41(固形分:30wt%)、アルケマ(株)製)
Figure 0005806493
* 1 Phenol novolac resin (HF-1CA75 (solid content: 75 wt%), manufactured by Meiwa Kasei Co., Ltd.)
* 2 Cresol novolac resin (MER-7959CA75 (solid content: 75 wt%), manufactured by Meiwa Kasei Co., Ltd.)
* 3 Sulfonium salt photocationic polymerization initiator (CPI-100P, manufactured by San Apro)
* 4 Sulfonium salt photocationic polymerization initiator (Adekaoptomer SP-152, manufactured by ADEKA)
* 5 Aniline type epoxy resin (N, N-diglycidyl-4-glycidyloxyaniline: JER630, manufactured by Japan Epoxy Resin Co., Ltd.)
* 6 Cresol novolac epoxy resin (EOCN-104SH70 (solid content: 70 wt%), manufactured by Nippon Kayaku)
* 7 Nitrogen-containing heterocyclic epoxy resin (1,3,5-triglycidyl isocyanurate: TEPIC-HP, manufactured by Nissan Chemical Industries)
* 8 2-Ethyl-4-methylimidazole (2E4MZ, manufactured by Shikoku Chemicals)
* 9 2-Phenyl-4,5-dihydroxymethylimidazole (2PHZ, manufactured by Shikoku Chemicals)
* 10 Phenoxy resin (YX8000BH30 (solid content: 30 wt%), manufactured by Mitsubishi Chemical Corporation)
* 11 Ternary block copolymer: Polystyrene-polybutadiene-polymethyl methacrylate (SBM-E41 (solid content: 30 wt%), manufactured by Arkema Co., Ltd.)

実施例1〜に示す結果より、本実施形態の樹脂組成物がポジ型パターンを発現することを明らかとした。また、比較例1に示すように、3級アミン構造を有しないエポキシ樹脂を使用した場合には、ポジ型パターンは得られないが、参考例6、7の結果より、そのような3級アミン構造を有しないエポキシ樹脂を使用した場合でも、複素環式化合物を用いればポジ型パターンが得られることを明らかとした。比較例2に示すように、フェノール樹脂を含有しない場合は、ポジ型パターンが発現しないことを明らかとした。 From the results shown in Examples 1 to 5 , it was made clear that the resin composition of the present embodiment expresses a positive pattern. In addition, as shown in Comparative Example 1, when an epoxy resin having no tertiary amine structure is used, a positive pattern cannot be obtained. From the results of Reference Examples 6 and 7, such a tertiary amine is obtained. Even when an epoxy resin having no structure is used, it has been clarified that a positive pattern can be obtained by using a heterocyclic compound. As shown in Comparative Example 2, it was clarified that no positive pattern was developed when no phenol resin was contained.

Claims (4)

3級アミン構造を有するエポキシ樹脂および1,3,5−トリグリシジルイソシアヌレートから選ばれる少なくとも1種と、
フェノール樹脂(ただし、酸分解性エステル基を有する重量平均分子量500〜40,000の樹脂化合物、および、フェノール性水酸基を有する樹脂にモノビニルエーテル化合物を付加した重量平均分子量500〜40,000の樹脂を除く)と、
光カチオン重合開始剤と、を含有することを特徴とするポジ型感光性樹脂組成物。
At least one selected from an epoxy resin having a tertiary amine structure and 1,3,5-triglycidyl isocyanurate;
Phenol resin (however, a resin compound having a weight average molecular weight of 500 to 40,000 having an acid-decomposable ester group, and a resin having a weight average molecular weight of 500 to 40,000 obtained by adding a monovinyl ether compound to a resin having a phenolic hydroxyl group) Except)
A positive-type photosensitive resin composition comprising a photocationic polymerization initiator.
請求項1に記載のポジ型感光性樹脂組成物を、フィルム上に塗布乾燥して得られる感光性ドライフィルム。   The photosensitive dry film obtained by apply | coating and drying the positive photosensitive resin composition of Claim 1 on a film. 請求項1に記載のポジ型感光性樹脂組成物、または、請求項2に記載の感光性ドライフィルムを、活性エネルギー線照射によりパターニングを行い加熱により硬化して得られることを特徴とする硬化物。   A cured product obtained by patterning the positive photosensitive resin composition according to claim 1 or the photosensitive dry film according to claim 2 by irradiation with active energy rays and curing by heating. . 請求項3に記載の硬化物を具備することを特徴とするプリント配線板。   A printed wiring board comprising the cured product according to claim 3.
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