JP5714941B2 - 摩擦力顕微鏡 - Google Patents
摩擦力顕微鏡 Download PDFInfo
- Publication number
- JP5714941B2 JP5714941B2 JP2011048198A JP2011048198A JP5714941B2 JP 5714941 B2 JP5714941 B2 JP 5714941B2 JP 2011048198 A JP2011048198 A JP 2011048198A JP 2011048198 A JP2011048198 A JP 2011048198A JP 5714941 B2 JP5714941 B2 JP 5714941B2
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- probe
- displacement
- force microscope
- frictional force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 claims description 89
- 238000006073 displacement reaction Methods 0.000 claims description 39
- 230000035945 sensitivity Effects 0.000 claims description 19
- 238000005452 bending Methods 0.000 claims description 18
- 230000003321 amplification Effects 0.000 claims description 8
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/26—Friction force microscopy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
図2に本発明に係る摩擦力顕微鏡の一例の主な構成を示す。
2…探針
3…サンプル
4…XY駆動機構
5…Z駆動機構
6…レーザーダイオード
7…ハーフミラー
8…4分割フォトダイオード
9…光学顕微鏡
10…DIF信号増幅器
11…FFM信号増幅器
12…コントローラ
13…カンチレバー加振部
14…変位検出手段
Claims (5)
- 先端に探針を持つカンチレバーを有し、該探針に対向配置したサンプル表面に対して前記探針を平行なX−Y平面に移動させるXY駆動機構および前記サンプル表面に垂直なZ方向に移動させるZ駆動機構と、カンチレバーの撓み方向の変位情報および捻れ方向の変位情報を検出する変位検出手段を備えた摩擦力顕微鏡において、
前記捩れ方向の変位情報に基づく捩れ変位信号から摩擦力を算定するために必要なパラメータとして、カンチレバーの捻れの中心から前記探針の先端までの探針高さhおよびカンチレバーの捩れによる捩れバネ定数Kt を、前記カンチレバーの撓み方向の変位情報から求めた撓み感度および前記捩れ方向の変位情報から求めた捩れ感度ならびに前記カンチレバーの捩れ方向の共振周波数f t によりそれぞれを算定し、該算定した探針高さhおよび捩れバネ定数Ktにより摩擦力を算定する摩擦力算定手段を備えることを特徴とする摩擦力顕微鏡。 - 前記カンチレバーをZ方向に振動させるカンチレバー加振手段を有し、
該カンチレバーを、その撓み方向の共振周波数近辺の所定の周波数範囲にて掃引させた際の振動状態から得た撓み方向の周波数特性及びそれと併せて取得した捩れ方向の周波数特性とから、前記捩れ方向の共振周波数ftを求めるものである請求項1乃至3のいずれかに記載の摩擦力顕微鏡。 - 前記カンチレバーのレバー部長さLと、
前記カンチレバーの前記探針側端部から前記探針先端位置までの前記レバー部に平行な長さdと、
前記カンチレバーの幅wと、が、光学像又電子像を基に側長を行なうものである請求項1〜4のいずれかに記載の摩擦力顕微鏡。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011048198A JP5714941B2 (ja) | 2011-03-04 | 2011-03-04 | 摩擦力顕微鏡 |
US13/409,249 US8601609B2 (en) | 2011-03-04 | 2012-03-01 | Friction force microscope |
CN201210063860.0A CN102721834B (zh) | 2011-03-04 | 2012-03-02 | 摩擦力显微镜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011048198A JP5714941B2 (ja) | 2011-03-04 | 2011-03-04 | 摩擦力顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012185037A JP2012185037A (ja) | 2012-09-27 |
JP5714941B2 true JP5714941B2 (ja) | 2015-05-07 |
Family
ID=46754166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011048198A Active JP5714941B2 (ja) | 2011-03-04 | 2011-03-04 | 摩擦力顕微鏡 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8601609B2 (ja) |
JP (1) | JP5714941B2 (ja) |
CN (1) | CN102721834B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201216529D0 (en) | 2012-09-17 | 2012-10-31 | Univ St Andrews | Torsional stiffness measurement |
US20150338248A1 (en) * | 2013-01-11 | 2015-11-26 | Council Of Scientific & Industrial Research | An optical fiber-based force transducer for microscale samples |
CN105181501B (zh) * | 2015-08-10 | 2018-01-16 | 西南交通大学 | 一种真空下多探针摩擦磨损测试及原位形貌探测系统 |
JP2017181135A (ja) * | 2016-03-29 | 2017-10-05 | 株式会社日立ハイテクサイエンス | 走査型プローブ顕微鏡及びそのプローブ接触検出方法 |
CN107817459B (zh) * | 2017-11-24 | 2024-03-08 | 中国石油大学(北京) | 一种往复式摩擦过程中磁畴原位观测系统 |
CN108414435A (zh) * | 2018-01-22 | 2018-08-17 | 南京理工大学 | 一种通过表面受限效应调控石墨烯表面摩擦系数的方法 |
CN109269976B (zh) * | 2018-11-16 | 2023-10-03 | 西南科技大学 | 测量电场下固液界面间摩擦力的测量装置及测量方法 |
CN110907663B (zh) * | 2019-12-18 | 2021-12-21 | 哈尔滨工业大学 | 基于t状悬臂梁探针的开尔文探针力显微镜测量方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0758283B2 (ja) * | 1991-01-31 | 1995-06-21 | 石川県 | 機械的定数測定装置 |
US5400647A (en) * | 1992-11-12 | 1995-03-28 | Digital Instruments, Inc. | Methods of operating atomic force microscopes to measure friction |
JP3226649B2 (ja) | 1993-02-18 | 2001-11-05 | セイコーインスツルメンツ株式会社 | 摩擦力顕微鏡 |
JPH07181028A (ja) * | 1993-12-22 | 1995-07-18 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡 |
JP2852397B2 (ja) * | 1994-11-15 | 1999-02-03 | 工業技術院長 | 原子間力顕微鏡および原子間力顕微鏡における摩擦の解析方法 |
DE19900114B4 (de) * | 1999-01-05 | 2005-07-28 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Verfahren und Vorrichtung zur gleichzeitigen Bestimmung zumindest zweier Materialeigenschaften einer Probenoberfläche, umfassend die Adhäsion, die Reibung, die Oberflächentopographie sowie die Elastizität und Steifigkeit |
US6349591B1 (en) * | 2000-01-13 | 2002-02-26 | Universite Pierre & Marie Curie | Device and method for controlling the interaction of a tip and a sample, notably for atomic force microscopy and nano-indentation |
US6945099B1 (en) * | 2002-07-02 | 2005-09-20 | Veeco Instruments Inc. | Torsional resonance mode probe-based instrument and method |
JP2005083886A (ja) * | 2003-09-08 | 2005-03-31 | Lion Corp | 微少領域の摩擦力および摩擦係数測定方法 |
KR20060048334A (ko) * | 2004-11-03 | 2006-05-18 | 학교법인 포항공과대학교 | 원자 현미경의 각변환 계수 산출방법 및 이 각변환 계수를이용한 원자 현미경 마찰신호의 정량화 방법 |
CN1854793A (zh) * | 2005-04-28 | 2006-11-01 | 株式会社日立制作所 | 扫描探针显微镜、使用其的试样观察方法及装置制造方法 |
US7637149B2 (en) * | 2005-06-17 | 2009-12-29 | Georgia Tech Research Corporation | Integrated displacement sensors for probe microscopy and force spectroscopy |
US20070103697A1 (en) * | 2005-06-17 | 2007-05-10 | Degertekin Fahrettin L | Integrated displacement sensors for probe microscopy and force spectroscopy |
US8220318B2 (en) * | 2005-06-17 | 2012-07-17 | Georgia Tech Research Corporation | Fast microscale actuators for probe microscopy |
US7552625B2 (en) * | 2005-06-17 | 2009-06-30 | Georgia Tech Research Corporation | Force sensing integrated readout and active tip based probe microscope systems |
US7461543B2 (en) * | 2005-06-17 | 2008-12-09 | Georgia Tech Research Corporation | Overlay measurement methods with firat based probe microscope |
US7441447B2 (en) * | 2005-10-07 | 2008-10-28 | Georgia Tech Research Corporation | Methods of imaging in probe microscopy |
US7395698B2 (en) * | 2005-10-25 | 2008-07-08 | Georgia Institute Of Technology | Three-dimensional nanoscale metrology using FIRAT probe |
JP4546535B2 (ja) * | 2006-02-14 | 2010-09-15 | 独立行政法人科学技術振興機構 | 測定プローブ、試料表面測定装置、及び試料表面測定方法 |
JP2008051556A (ja) * | 2006-08-22 | 2008-03-06 | Sii Nanotechnology Inc | 光学式変位検出機構及びそれを用いた表面情報計測装置 |
JP2008051555A (ja) * | 2006-08-22 | 2008-03-06 | Sii Nanotechnology Inc | 光学式変位検出機構及びそれを用いたプローブ顕微鏡 |
CA2675619C (en) * | 2007-01-19 | 2016-08-16 | Sunnybrook Health Sciences Centre | Scanning mechanisms for imaging probe |
US8460195B2 (en) * | 2007-01-19 | 2013-06-11 | Sunnybrook Health Sciences Centre | Scanning mechanisms for imaging probe |
US7966867B2 (en) * | 2007-04-10 | 2011-06-28 | Hitachi, Ltd. | Scanning probe microscope |
JP5340119B2 (ja) * | 2009-02-10 | 2013-11-13 | 株式会社日立ハイテクサイエンス | 走査型プローブ顕微鏡における探針とサンプルの近接方法 |
JP5410880B2 (ja) * | 2009-08-07 | 2014-02-05 | 株式会社日立ハイテクサイエンス | 摩擦力測定方法および摩擦力測定装置 |
US8387443B2 (en) * | 2009-09-11 | 2013-03-05 | The Board Of Trustees Of The University Of Illinois | Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer |
FR2959823B1 (fr) * | 2010-05-07 | 2013-05-17 | Centre Nat Rech Scient | Microscope a force atomique fonctionnant en mode circulaire, dispositif permettant sa mise en oeuvre et procede de mesure |
-
2011
- 2011-03-04 JP JP2011048198A patent/JP5714941B2/ja active Active
-
2012
- 2012-03-01 US US13/409,249 patent/US8601609B2/en active Active
- 2012-03-02 CN CN201210063860.0A patent/CN102721834B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US20120227139A1 (en) | 2012-09-06 |
CN102721834A (zh) | 2012-10-10 |
CN102721834B (zh) | 2016-03-16 |
JP2012185037A (ja) | 2012-09-27 |
US8601609B2 (en) | 2013-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5714941B2 (ja) | 摩擦力顕微鏡 | |
Palacio et al. | Normal and lateral force calibration techniques for AFM cantilevers | |
US7089787B2 (en) | Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy | |
Munz | Force calibration in lateral force microscopy: a review of the experimental methods | |
US8844061B2 (en) | Scanning probe microscope | |
KR102484671B1 (ko) | 헤테로다인 원자력 현미경 장치, 방법 및 리소그래피 시스템 | |
US20110041224A1 (en) | Atomic force microscope including accelerometer | |
JP5410880B2 (ja) | 摩擦力測定方法および摩擦力測定装置 | |
US9829427B2 (en) | Method and system for characterization of nano- and micromechanical structures | |
US20080011046A1 (en) | Displacement Method for Determining the Spring Constant of Scanning Probe Microscope Cantileers using MEMS Actuators | |
RU2442131C1 (ru) | Устройство для измерения параметров рельефа поверхности и механических свойств материалов | |
JP3675406B2 (ja) | マイクロ材料試験装置及びこれによる力学特性評価方法 | |
TWI810184B (zh) | 用以對映樣品之表面上之奈米結構的掃描探針顯微術系統及方法 | |
JP2012093325A (ja) | 原子間力顕微鏡用のカンチレバー、原子間力顕微鏡、および、原子間力の測定方法 | |
CN104950142B (zh) | 悬臂的振动特性测定方法以及悬臂的振动特性测定装置 | |
US9766267B2 (en) | Actuator position calculation device, actuator position calculation method, and actuator position calculation program | |
RU2510009C1 (ru) | Устройство для измерения параметров рельефа поверхности и механических свойств материалов | |
JP5874995B2 (ja) | カンチレバーのバネ定数特定方法およびその方法を採用した走査型プローブ顕微鏡 | |
US7395697B2 (en) | Force method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators | |
JP2019049487A (ja) | 走査型プローブ顕微鏡の校正方法 | |
Sader | Atomic Force Microscopy: Cantilever Calibration | |
Voigtländer et al. | Technical Aspects of Atomic Force Microscopy (AFM) | |
JP7444017B2 (ja) | 走査型プローブ顕微鏡 | |
JP2005201908A (ja) | マイクロ材料試験装置 | |
EP3361266A1 (en) | Method of lateral force calibration in an afm microscope and device for lateral force calibration in an afm microscope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20121122 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131120 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140709 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140715 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140903 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20150202 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150224 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150312 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5714941 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |