JP5669981B1 - Heat treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily perform a work of moving a transfer unit to a position facing a processing chamber and connecting it to the processing chamber in a sealed state. When a transport unit 30 is moved to a position facing a processing chamber H such as a heating chamber 10 or a cooling chamber 20 and is connected to the processing chamber in a sealed state, a transport unit is placed on the facing portion of the processing chamber. While providing the 1st connection part 130,230 to connect, the 2nd connection part 330 attached to the said 1st connection part is provided in the facing part of the conveyance unit, This 2nd connection part protruded toward the process chamber The projecting portion 331, a movable portion 332 that is moved from the projecting portion toward the processing chamber and coupled to the first connecting portion, and a first seal member S1 that seals between the projecting portion and the movable portion are provided. A second seal member S2 that seals between the movable part and the first connection part is provided on at least one of the movable part and the first connection part in a state where the first connection part is connected to the first connection part. [Selection] Figure 4

Description

  The present invention is provided with a processing chamber for heat-treating an object to be processed and a transport unit for transporting the object to be processed to the processing chamber. The transport unit is moved to a position facing the processing chamber. The present invention relates to a heat treatment facility in which a transfer unit is connected to a processing chamber facing each other in a sealed state, and the object to be processed is transferred between the connected transfer unit and the processing chamber. In particular, the heat treatment facility is characterized in that when transferring the object to be processed between the transfer unit and the processing chamber, the operation of connecting the transfer unit and the processing chamber in a sealed state can be easily performed. Is.

  Conventionally, as a heat treatment facility for carburizing and quenching a workpiece, the workpiece is sequentially introduced into a long continuous furnace, and the workpiece is sequentially moved in the continuous furnace. Heat treatment equipment of continuous furnace type that continuously performs heat treatment such as heating, soaking, cooling, etc. on the processed material, and heating, soaking, cooling without moving the object to be processed in an independent batch furnace A batch furnace type heat treatment facility that performs heat treatment such as the above is known.

  Here, in the case of a continuous furnace type heat treatment equipment, since the object to be treated is continuously heat treated in a constant heat treatment pattern, the productivity is good, but the heat treatment pattern such as temperature rise and temperature fall becomes constant, As in recent years, there has been a problem that it is not possible to flexibly respond to a request to produce various kinds of products in small quantities by diversifying heat treatment patterns such as temperature rise and fall.

  On the other hand, in the batch furnace type heat treatment equipment, heat treatment is performed by changing the heat treatment conditions such as heating, soaking, and cooling in one furnace, so that it takes a lot of time to process one workpiece. As a result, there was a problem of poor productivity.

  For this reason, in recent years, as shown in Patent Documents 1 and 2, etc., as a processing chamber for heat-treating the workpiece, at least a heating chamber for heating the workpiece and cooling for cooling the heated workpiece. A processing unit that separates the chamber and provides a transport unit that transports an object to be processed to the processing chamber, moves the transport unit to a position facing the processing chamber, and faces the transport unit. A heat treatment facility has been proposed in which the workpieces are connected in a sealed state and the workpiece is transferred between the connected transfer unit and the processing chamber.

  Here, when the transfer unit is moved to a position facing the processing chamber composed of a heating chamber and a cooling chamber as described above, and the transfer unit is connected to the facing processing chamber in a sealed state, The entire transport unit is slid toward a processing chamber composed of a heating chamber and a cooling chamber facing each other, and the transport unit is connected to these processing chambers in a sealed state.

  Moreover, in the thing of patent document 2, the flexible joint which became the bellows shape was provided in the conveyance unit, and this flexible joint was extended toward the process chamber which consists of a heating chamber and a cooling chamber in the state which faced. The flexible joint is connected to these processing chambers in a sealed state by the flexible joint.

  However, as shown in Patent Document 1, when the entire transport unit is slid toward the processing chamber composed of a heating chamber and a cooling chamber facing each other, the entire transport unit is heavy, so the entire transport unit is slid. For this purpose, a large drive device, a guide mechanism, and the like are required, which causes a problem that the cost is very high and the device is enlarged.

  Further, as shown in Patent Document 2, a flexible joint having a bellows shape is provided in the transport unit, and the flexible joint is extended toward a processing chamber composed of a heating chamber and a cooling chamber, so that the transport unit can be When connecting to the cooling chamber, the object to be processed that has reached a high temperature is transferred through the flexible joint between the transport unit and the heating chamber or the cooling chamber. It is necessary to use it, and its cost is high. When this flexible joint is repeatedly expanded and contracted many times, the flexible joint gradually deteriorates and cannot be used stably over a long period of time. It is necessary to replace the battery at an appropriate time, which requires time and labor for the replacement work and high maintenance costs.

JP 2006-63363 A JP-A-5-86416

  The present invention is provided with a processing chamber for heat-treating an object to be processed and a transport unit for transporting the object to be processed to the processing chamber. The transport unit is moved to a position facing the processing chamber. To solve the above-mentioned various problems in the heat treatment equipment in which the transfer unit is connected in a sealed state to the processing chamber facing the transfer unit, and the object to be processed is transferred between the connected transfer unit and the processing chamber. This is a problem.

  That is, according to the present invention, in the heat treatment facility as described above, the transport unit is moved to a position facing the processing chamber, the transport unit and the processing chamber are connected in a sealed state, and It is an object of the present invention to easily perform an operation of connecting a transfer unit and a processing chamber in a sealed state when delivering a processed material between the transfer unit and the processing chamber.

  In the first heat treatment facility according to the present invention, in order to solve the above-described problems, a processing chamber for heat-treating an object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided. The transfer unit is moved to a position facing the processing chamber, the transfer unit is connected to the processing chamber facing the sealing chamber in a sealed state, and the workpiece is transferred between the connected transfer unit and the processing chamber. In the heat treatment facility to be provided, a first connection part for connecting the transfer unit is provided at a facing part of the processing chamber facing the transfer unit, while a processing chamber is provided at the facing part of the transfer unit facing the processing chamber. A second connecting portion that is connected in a sealed state to the first connecting portion provided on the facing portion, and a protruding portion that protrudes from the transfer unit toward the processing chamber facing the second connecting portion; A movable part that is moved from the protruding part toward the processing chamber and connected to the first connecting part, and a first seal member that seals between the protruding part and the movable part are provided, and In a state where the movable portion is connected to the first connecting portion, a second seal member that seals between the movable portion and the first connecting portion is provided on at least one of the movable portion and the first connecting portion. It was.

  Further, in the second heat treatment facility of the present invention, in order to solve the above-described problems, a treatment chamber for heat treating the object to be treated and a transfer unit for conveying the object to be treated to the treatment chamber are provided. The transport unit is moved to a position facing the processing chamber, the transport unit is connected to the processing chamber facing the sealing chamber in a sealed state, and the object to be processed is connected between the transport unit and the processing chamber. In the heat treatment equipment to be transferred in, while providing a first connecting portion for connecting the processing chamber to the facing portion of the transfer unit facing the processing chamber, on the facing portion of the processing chamber facing the transfer unit, A second connecting portion that is connected in a sealed state to the first connecting portion provided on the facing portion of the transfer unit is provided, and the second connecting portion protrudes from the processing chamber toward the transfer unit that faces the second connecting portion. A movable portion that is moved from the protruding portion toward the transport unit and connected to the first connecting portion, and a first seal member that seals between the protruding portion and the movable portion. In a state where the movable part is connected to the first connecting part, a second seal member that seals between the movable part and the first connecting part is provided at least between the movable part and the first connecting part. Provided on one side.

  And in the 1st and 2nd heat treatment equipment in the present invention, in the state where the transfer unit was moved to the position facing the processing chamber, the movable part is moved from the protruding part in the second connecting part. The first seal is formed between the projecting portion and the movable portion in a state where the movable portion in the second connection portion is connected to the first connection portion. In addition to sealing with the member, the movable unit and the first connecting portion are sealed with the second sealing member, and the transfer unit and the processing chamber are connected in a sealed state. Is transferred between the transfer unit and the processing chamber.

  In the first and second heat treatment facilities according to the present invention, when carburizing and quenching is performed on an object to be processed, the second connecting portion is sealed with respect to the first connecting portion as described above. And the workpiece is transferred between the transfer unit and the processing chamber in a non-oxidizing atmosphere. Here, the non-oxidizing atmosphere means an atmosphere in which the heated workpiece is not oxidized. For example, a reduced pressure atmosphere such as a vacuum, an inert atmosphere using an inert gas, or a reduced pressure atmosphere and an inert atmosphere. It means that the atmosphere is a combination.

  In the first and second heat treatment facilities according to the present invention, a deformable first seal member is used as the first seal member, and the movable portion is connected to the first connection portion. While a gap is formed between the first seal member and the projecting portion or the movable portion, the projecting portion and the movable portion are separated by the first seal member in a state where the movable portion is coupled to the first coupling portion. The first seal member can be deformed so that the gap is sealed. If it does in this way, when moving the said movable part toward a 1st connection part from a protrusion part, a 1st seal member will closely_contact | adhere between a protrusion part and a movable part, and the movement of a movable part is suppressed. Therefore, the movable part is smoothly moved toward the first connecting part, and the operation of connecting the movable part to the first connecting part can be easily performed. And when moving a movable part toward a 1st connection part as mentioned above and connecting a movable part to a 1st connection part, a 1st seal member is changed, a projection part and a movable part Can be easily sealed by the first seal member.

  Moreover, in the heat treatment equipment of the present invention, a deformable second seal member is used as the second seal member, and the second seal member is connected with the movable portion being connected to the first connection portion. The second seal member can be deformed so that the space between the movable portion and the first connecting portion is sealed.

  Further, in the heat treatment facility of the present invention, a sealed opening / closing door is provided at the facing portion of the processing chamber, and a sealed opening / closing door is provided at the facing portion of the transfer unit, so that the object to be processed is transferred to the processing chamber. When passing between the unit and the processing chamber, the doors provided in the processing chamber and the transfer unit can be opened and closed. If it does in this way, the inside of a processing chamber or a conveyance unit will be made into a non-oxidizing atmosphere in the state where each opening-and-closing door in a processing chamber or a conveyance unit was closed, and in this state, the 2nd connecting part was made into the 1st connecting part as mentioned above The transfer unit can be attached to the processing chamber in a sealed state, and the connection portion between the transfer unit and the processing chamber attached in this manner can be brought into a non-oxidizing atmosphere. An object can be moved between the transfer unit and the processing chamber without touching the outside air.

  In the heat treatment facility of the present invention, the processing chambers can be arranged on both sides intersecting the moving direction of the transfer unit for transferring the object to be processed. In this way, it is possible to arrange many processing chambers by reducing the distance for moving the transfer unit.

  In the heat treatment facility according to the present invention, when the transfer unit is moved to a position facing the processing chamber and the transfer unit is connected to the processing chamber, the movable portion is moved from the protruding portion of the second connecting portion. Is moved toward the first connecting portion, and the movable portion in the second connecting portion is connected to the first connecting portion, and the first connecting portion is connected between the protruding portion and the movable portion. The transfer unit can be easily connected to the processing chamber in a sealed state by sealing with the one seal member and sealing between the movable portion and the first connecting portion with the second seal member. become able to.

  For this reason, when performing heat treatment such as carburizing and quenching on an object to be processed using the heat treatment equipment in the present invention, by simply connecting the transfer unit to the processing chamber in a sealed state as described above. In addition, the work of transferring the object to be processed between the transfer unit and the processing chamber in a non-oxidizing atmosphere can be easily performed.

In the heat treatment equipment according to one embodiment of the present invention, a schematic plan view showing a state in which treatment chambers composed of a plurality of heating chambers and cooling chambers are linearly arranged on one side of a traveling rail on which the transport unit travels. It is. In the heat treatment facility according to the above embodiment, a state before the first connecting portion provided in the facing portion of the heating chamber or the cooling chamber is connected to the second connecting portion provided in the facing portion of the transport unit is shown. FIG. In the heat treatment facility according to the above embodiment, a state before the first connecting portion provided in the facing portion of the heating chamber or the cooling chamber is connected to the second connecting portion provided in the facing portion of the transport unit is shown. FIG. In the heat treatment facility according to the above-described embodiment, a state in which the first connecting portion provided in the facing portion of the heating chamber or the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected in a sealed state. FIG. In the heat treatment facility according to the above-described embodiment, a state in which the first connecting portion provided in the facing portion of the heating chamber or the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected in a sealed state. FIG. In the heat treatment facility according to the above-described embodiment, the first connecting portion provided in the facing portion of the heating chamber or the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected in a sealed state to be covered. It is longitudinal cross-sectional explanatory drawing which showed the state which delivers a processed material between a conveyance unit, a heating chamber, and a cooling chamber. In the heat treatment facility according to the above embodiment, a first modified example is shown in which the first connecting portion provided in the heating chamber or the cooling chamber and the second connecting portion provided in the transfer unit are changed, and (A) shows the heating chamber. FIG. 5B is a cross-sectional explanatory view showing a state before the first connecting portion provided in the facing portion of the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected, and FIG. FIG. 5 is a cross-sectional explanatory view in which a first connecting portion provided on the facing portion of the cooling chamber and a second connecting portion provided on the facing portion of the transport unit are connected in a sealed state. In the heat treatment equipment according to the above embodiment, a second modified example is shown in which the first connecting portion provided in the heating chamber or the cooling chamber and the second connecting portion provided in the transfer unit are changed, and (A) shows the heating chamber. FIG. 5B is a cross-sectional explanatory view showing a state before the first connecting portion provided in the facing portion of the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected, and FIG. FIG. 5 is a cross-sectional explanatory view in which a first connecting portion provided on the facing portion of the cooling chamber and a second connecting portion provided on the facing portion of the transport unit are connected in a sealed state. In the heat treatment equipment according to the above embodiment, a third modified example is shown in which the first connecting portion provided in the heating chamber or the cooling chamber and the second connecting portion provided in the transfer unit are changed, and (A) shows the heating chamber. FIG. 5B is a cross-sectional explanatory view showing a state before the first connecting portion provided in the facing portion of the cooling chamber and the second connecting portion provided in the facing portion of the transport unit are connected, and FIG. FIG. 5 is a cross-sectional explanatory view in which a first connecting portion provided on the facing portion of the cooling chamber and a second connecting portion provided on the facing portion of the transport unit are connected in a sealed state. In the heat treatment facility according to the embodiment, a schematic plan view showing a state in which a transfer unit into which an object to be processed is introduced from a supply unit is moved to a position facing a predetermined heating chamber. In the heat treatment facility according to the above-described embodiment, the second connection part in the transfer unit and the first connection part in the heating chamber are connected in a sealed state, and the object to be processed introduced into the transfer unit is introduced into the heating chamber. It is the schematic plan view which showed the state. In the heat treatment facility according to the above-described embodiment, the transfer unit is guided to a position facing the heating chamber in which the workpiece is heat-treated, and the second connection portion in the transfer unit and the first connection portion in the heating chamber are sealed. It is the schematic plan view which showed the state which connects and heat-processed to-be-processed object is introduce | transduced in a conveyance unit from a heating chamber. In the heat treatment facility according to the embodiment, the conveyance unit into which the heat-treated workpiece is introduced is led to a position facing the cooling chamber, and the second connection portion in the conveyance unit and the first connection portion in the cooling chamber are connected. It is the schematic plan view which showed the state which connected in the sealing state and introduce | transduced the to-be-processed object heat-processed in the cooling chamber from the inside of a conveyance unit. In the heat treatment facility according to the above embodiment, it is a schematic plan view showing a modified example in which a heat retaining unit for retaining the heat-treated object is provided on one side in the moving direction of the transport unit. FIG. 15 is a schematic plan view illustrating a state in which an object to be processed that has been kept warm in the heat retaining section is introduced from the inside of the transfer unit into the cooling chamber in the modification shown in FIG. 14. In the heat treatment facility according to the above-described embodiment, a plurality of heating chambers, a temperature-preserving chamber, and a cooling chamber are disposed on both sides of the traveling rail on which the transport unit travels as processing chambers for heat-treating the workpiece W. It is the schematic plan view which showed the example of a change. In the modification shown in FIG. 16, a transport unit is led so as to face the heat retaining portion and the cooling chamber facing each other via the traveling rail, and the transport unit is connected to the heat retaining chamber and the cooling chamber in a sealed state. It is the schematic plan view which showed the state which guides the to-be-processed object heat-retained in the greenhouse to a cooling chamber by a linear path | route through a conveyance unit. In the heat treatment facility according to the embodiment of the present invention, the first connection portion is provided at the facing portion of the transfer unit, while the second connection portion is provided at the facing portion of the heating chamber or the cooling chamber, and the traveling rail on which the transfer unit travels is provided. It is the schematic plan view which showed the state which arranged the processing chamber which consists of a some heating chamber and cooling chamber on one side linearly.

  Hereinafter, a heat treatment facility according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. In addition, the heat treatment equipment according to the present invention is not limited to the one shown in the following embodiment, and can be appropriately changed and implemented within a range not changing the gist of the invention.

  In the heat treatment facility according to this embodiment, as shown in FIG. 1, a plurality of (three in the example shown in the figure) heating chambers 10 for heating the workpiece W as the processing chamber H for heat-treating the workpiece W. And the cooling chamber 20 which cools the to-be-processed object W heated in the heating chamber 10 is arrange | positioned through the required space | interval on the one side of the traveling rail L on which the conveyance unit 30 drive | works. In addition, a supply unit P that supplies the workpiece W to the transport unit 30 is provided on one side of the traveling rail L that is the same as the heating chamber 10 and the cooling chamber 20 arranged in this manner.

  In the heat treatment facility according to this embodiment, as shown in FIG. 2 and the like, in the heating chamber 10 and the cooling chamber 20, the facing portion facing the transfer unit 30 is respectively located between the transfer unit 30 and the heating unit 10. Are provided with opening portions 11 and 21 for delivering the workpiece W, and sealed opening and closing doors 12 and 22 for opening and closing these opening portions 11 and 21. Further, in the heating chamber 10 and the cooling chamber 20, annular first coupling portions 130 and 230 are provided at positions closer to the transport unit 30 than the opening and closing doors 12 and 22.

  Further, in the transport unit 30, an opening 31 is provided at the facing portion facing the heating chamber 10 and the cooling chamber 20 to deliver the workpiece W between the heating chamber 10 and the cooling chamber 20. The opening / closing door 32 for opening and closing the opening 31 is provided, and the second connecting portion 330 is provided so as to protrude from the opening / closing door 32 toward the heating chamber 10 and the cooling chamber 20. The two connecting portions 330 are connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 in a sealed state.

  Here, in this embodiment, when providing the 2nd connection part 330 in the conveyance unit 30, it becomes the cylinder shape which protrudes required length toward the said heating chamber 10 and the cooling chamber 20 further from the said opening-and-closing door 32. As shown in FIG. Provided with a movable portion 332 that is moved from the protruding portion 331 toward the heating chamber 10 or the cooling chamber 20. The movable portion 332 is provided in the heating chamber 10 or the cooling chamber 20. The first connecting portions 130 and 230 are connected to each other.

  In addition, in this embodiment, the movable portion 332 is provided with an outer peripheral cylindrical portion 332a that is formed in a cylindrical shape on the outer peripheral side of the protruding portion 331 so as to face the protruding portion 331 with a required interval. In addition, an annular flange portion 332b extending from the projecting end of the outer peripheral cylindrical portion 332a to the outer peripheral side is provided, and the annular flange portion 332b is provided in the heating chamber 10 or the cooling chamber 20 as described above. It connects with the cyclic | annular 1st connection part 130,230.

  Here, in this embodiment, when the movable portion 332 provided in the transport unit 30 is moved toward the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20, an outer periphery is provided. The expansion rod 34a in the extrusion cylinder 34 is attached to the flange portion 332b extending from the end on the protruding side of the cylindrical portion 332a to the outer peripheral side, and the expansion rod 34a is expanded and contracted by the extrusion cylinder 34 to move the movable portion. The part 332 is moved to a position away from the first connection parts 130 and 230 and a position to be connected to the first connection parts 130 and 230. In this embodiment, a plurality of the above-described extrusion cylinders 34 are provided on both sides of the facing portion of the transport unit 30 in the vertical direction with a required interval.

  In this embodiment, the deformable first seal member S1 that seals between the protruding portion 331 and the outer peripheral cylindrical portion 332a of the movable portion 332 in the second connecting portion 330 is replaced with the movable portion 332. Are provided on the inner peripheral side of the outer peripheral cylindrical portion 332a.

  Here, as the first seal member S1, for example, an elastic and lubricating material is used, and the movable portion 332 is slid and moved while the first seal member S1 is in close contact. However, before the movable portion 332 is connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 by using a material that expands and contracts by introducing a gas or a liquid therein. As shown in FIGS. 2 and 3, a gap is formed between the first seal member S1 and the protruding portion 331 in a state in which the first seal member S1 is contracted. In this state, the telescopic rod 34a in the extrusion cylinder 34 is extended so that no load is applied when the movable portion 332 is moved toward the first connecting portions 130 and 230.

  On the other hand, in a state where the telescopic rod 34 a in the extrusion cylinder 34 is extended and the movable part 332 is connected to the first connection parts 130 and 230 provided in the heating chamber 10 and the cooling chamber 20, FIG. 4 and FIG. 5, the first seal member S1 is expanded and brought into close contact with the protruding portion 331. By the first seal member S1, the protruding portion 331 and the outer peripheral cylindrical portion 332a of the movable portion 332 are arranged. It is trying to seal between. In this embodiment, the first seal member S1 is provided on the inner peripheral side of the outer peripheral cylindrical portion 332a in the movable portion 332. However, the first seal member S1 is provided on the outer periphery of the protruding portion 331. Alternatively, the movable portion 332 may be provided on both the inner peripheral side of the outer peripheral cylindrical portion 332a and the outer peripheral side of the protruding portion 331.

  Further, in this embodiment, in the flange portion 332b of the movable portion 332, an annular second seal member S2 is provided along the flange portion 332b on the facing portion facing the first connecting portions 130 and 230. When the movable portion 332 is connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 as described above, the second seal member S2 is connected to the first connecting portion 130 and 230. The second seal member S2 is in close contact with the portions 130 and 230 so that the gap between the flange portion 332b and the first connection portions 130 and 230 is sealed.

  Here, as a method of bringing the second seal member S2 into close contact with the first connecting portions 130 and 230, the telescopic rod 34a in the extrusion cylinder 34 is extended as described above, and the second seal member S2 is moved to the first connection portion 130 and 230. In addition to being pressed against the first connecting portions 130 and 230, a member that expands and contracts by introducing a gas or liquid into the inside may be used as the second seal member S2.

  Further, in this embodiment, the second seal member S2 is provided on the facing portion of the flange portion 332b in the movable portion 332 facing the first coupling portions 130 and 230. However, the second seal member S2 is provided on the flange portion. It is also possible to provide the first connecting portions 130 and 230 facing the 332b or to provide both the flange portion 332b and the first connecting portions 130 and 230.

  Here, in the heat treatment facility in this embodiment, when the workpiece W is transferred between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 in a non-oxidizing atmosphere state, The opening / closing door 32 is closed to make the inside of the transport unit 30 a non-oxidizing atmosphere, and the opening / closing doors 12 and 22 in the heating chamber 10 and the cooling chamber 20 that deliver the workpiece W are closed to close the workpiece W. The inside of the heating chamber 10 and the cooling chamber 20 that transfers the air is set to a non-oxidizing atmosphere, and as shown in FIGS. 2 and 3, the transport unit 30 is connected to the heating chamber 10 and the cooling chamber 20 that transfers the object W to be processed. It moves to the position which faces through a space | interval. In addition, when the transfer unit 30, the heating chamber 10, and the cooling chamber 20 are brought into a non-oxidizing atmosphere state as described above, the inside thereof is changed to a reduced pressure atmosphere such as a vacuum or an inert atmosphere using an inert gas or the like. I will let you.

  Next, as described above, the first seal member S1 attached to the inner peripheral side of the outer peripheral cylindrical portion 332a in the movable portion 332 is contracted, and between the first seal member S1 and the protruding portion 331, the first seal member S1 is contracted. In a state where a gap is formed, the telescopic rod 34 a in the extrusion cylinder 34 is extended, and the movable portion 332 in the second connection portion 330 is replaced with the first connection portion 130 provided in the heating chamber 10 or the cooling chamber 20. , 230 is moved to a position to be connected.

  4 and 5, the second seal member S2 provided at the facing portion of the flange portion 332b in the movable portion 332 is brought into close contact with the first connecting portions 130 and 230, and the While sealing between the collar part 332b and the 1st connection parts 130 and 230, the said 1st seal member S1 is expanded, The outer periphery cylinder in the said protrusion part 331 and the movable part 332 by this 1st seal member S1. The unit 332a is sealed, and the second connection unit 330 in the transport unit 30 and the first connection units 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 are sealed, and the transport unit 30 is sealed. Are connected to the heating chamber 10 and the cooling chamber 20.

  Next, the space A between the second connecting portion 330 in the transport unit 30 connected in a sealed state as described above and the first connecting portions 130 and 230 in the heating chamber 10 and the cooling chamber 20 is set to a non-oxidizing atmosphere. In addition, when the space A between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 is set to a non-oxidizing atmosphere, as in the case of the transport unit 30, the heating chamber 10 or the cooling chamber 20, the connecting portion The inside is made into a reduced pressure atmosphere such as a vacuum, or an inert atmosphere using an inert gas or the like.

  After that, as shown in FIG. 6, the opening / closing door 32 in the transport unit 30 and the opening / closing doors 12 and 22 in the connected heating chamber 10 and cooling chamber 20 are opened, and the workpiece W is processed in a non-oxidizing atmosphere state. Is transferred between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20.

  After delivering the workpiece W in this way, the open / close door 32 in the transport unit 30 and the open / close doors 12 and 22 in the connected heating chamber 10 and cooling chamber 20 are closed, and a non-oxidizing atmosphere is provided. The space A between the transport unit 30 in the state and the heating chamber 10 or the cooling chamber 20 is returned to atmospheric pressure, and the movable portion 332 in the transport unit 30 is connected to the first connection in the heating chamber 10 or the cooling chamber 20. The transport unit 30 is separated from the heating chamber 10 and the cooling chamber 20 by moving in a direction away from the units 130 and 230.

  In order to connect the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 and the second connecting portion 330 provided in the transfer unit 30 in a sealed state, the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20 are provided. The configuration of the first connecting portions 130 and 230 and the configuration of the second connecting portion 330 provided in the transport unit 30 are not limited to those shown in the above embodiment, and may be configured as shown in the following modified example. .

  Here, in the modification shown in FIGS. 7A and 7B, the first connecting portions 130 and 230 in the heating chamber 10 and the cooling chamber 20 are used as the transport unit 30 rather than the open / close doors 12 and 22. At the position on the side, the cylindrical first connecting portions 130 and 230 are provided so as to protrude toward the transport unit 30 by a predetermined length.

  On the other hand, the second connecting portion 330 in the transport unit 30 is provided with the cylindrical protruding portion 331 as described above, and a movable portion that is moved from the protruding portion 331 toward the heating chamber 10 or the cooling chamber 20. As the outer peripheral side of the protruding portion 331, an outer peripheral cylindrical portion 332a is provided on the outer peripheral side of the protruding portion 331 so as to face the protruding portion 331 with a required interval, and on the inner peripheral side of the outer peripheral cylindrical portion 332a. A deformable first seal member S1 that seals between the projecting portion 331 is provided, and the first seal member S1 has the cylindrical shape with a required interval on the projecting side with respect to the first seal member S1. Further, a deformable second seal member S2 for sealing between the first connecting portions 130 and 230 is provided, and the telescopic rod 3 in the extrusion cylinder 34 is further provided on the outer peripheral side of the outer peripheral cylindrical portion 332a. It is provided with a mounting portion 332c for attaching the a.

  Here, in this modified example, before the movable portion 332 is connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20, as shown in FIG. Further, the first seal member S1 and the second seal member S2 are contracted, and between the first seal member S1 and the protruding portion 331, and between the second seal member S2 and the first connecting portions 130 and 230. A gap is formed between the two.

  In this state, the telescopic rod 34a in the extrusion cylinder 34 is extended to move the movable portion 332 toward the first connecting portions 130 and 230, and the outer cylindrical portion 332a in the movable portion 332 is moved. The second seal member S2 provided on the inner peripheral side is guided to a position facing the first connecting portions 130 and 230.

  Next, as shown in FIG. 7B, the first seal member S1 is expanded, and the gap between the protruding portion 331 and the outer peripheral cylindrical portion 332a of the movable portion 332 is caused by the first seal member S1. In addition to sealing, the second seal member S2 is expanded, and the space between the first connecting portions 130 and 230 and the outer peripheral cylindrical portion 332a of the movable portion 332 is sealed by the second seal member S2, and heated. The first connecting portions 130 and 230 provided in the chamber 10 and the cooling chamber 20 and the second connecting portion 330 provided in the transport unit 30 are connected in a sealed state.

  8A and 8B, the first connecting portions 130 and 230 in the heating chamber 10 and the cooling chamber 20 have the transport unit 30 rather than the opening and closing doors 12 and 22, respectively. At the position on the side, cylindrical first connecting portions 130 and 230 projecting a predetermined length toward the transport unit 30 are provided.

  Further, in the second connecting portion 330 in the transport unit 30, a stopper portion 331 a extending to the outer peripheral side is provided at the protruding end portion of the cylindrical protruding portion 331, while the protruding portion In the movable portion 332 that is moved from the 331 toward the heating chamber 10 or the cooling chamber 20, the stopper portion 331a faces from the end opposite to the protruding side of the cylindrical outer cylindrical portion 332a. The abutting portion 332d is extended toward the inner peripheral side. Further, a first seal member S1 is provided at a position where the abutting portion 332d faces the abutting stop portion 331a, and a second seal member S2 that can be deformed to the inner peripheral side on the protruding side of the outer peripheral cylindrical portion 332a is provided. Further, a mounting portion 332c for attaching the telescopic rod 34a in the extrusion cylinder 34 is provided on the outer peripheral side of the outer peripheral cylindrical portion 332a. In this modification, the first seal member S1 is provided in the abutting portion 332d. However, the first seal member S1 is provided in the abutting stop portion 331a facing the abutting portion 332d. Or can be provided on both the abutting portion 332d and the abutting stop portion 331a facing each other.

  Here, in this modified example, before the movable portion 332 is connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20, as shown in FIG. In addition, the second seal member S2 is contracted so that a gap is formed between the second seal member S2 and the first connecting portions 130 and 230.

  In this state, the telescopic rod 34a in the extrusion cylinder 34 is extended to move the movable part 332 toward the first connecting parts 130 and 230, as shown in FIG. 8B. The first seal member S1 provided in the abutting portion 332d of the outer peripheral cylindrical portion 332a is pressed against the abutting stop portion 331a provided at the projecting end of the projecting portion 331 so that the projecting portion 331 is movable. The portion 332 is sealed between the outer peripheral cylindrical portion 332a and the second sealing member S2 provided on the inner peripheral side of the outer peripheral cylindrical portion 332a in the movable portion 332 is positioned to face the first connecting portions 130 and 230. The second seal member S2 is moved and expanded, and the second seal member is interposed between the first connecting portions 130 and 230 and the outer peripheral cylindrical portion 332a of the movable portion 332. 2 by sealed by, so as to connect the second connecting portion 330 which is provided first connecting portion 130 and 230 provided in the heating chamber 10 and cooling chamber 20 and the transport unit 30 in a sealed state.

  Further, in the embodiment shown in FIGS. 9A and 9B, the first connecting portions 130 and 230 in the heating chamber 10 and the cooling chamber 20 are the transport unit 30 rather than the open / close doors 12 and 22. At the position on the side, the annular first connecting portions 130 and 230 are provided so as to protrude toward the transport unit 30 side.

  Further, in the second connecting portion 330 in the transport unit 30, a stopper portion 331 a extending to the outer peripheral side is provided at the protruding end portion of the cylindrical protruding portion 331, while the protruding portion In the movable portion 332 that is moved from the 331 toward the heating chamber 10 or the cooling chamber 20, the stopper portion 331a faces from the end opposite to the protruding side of the cylindrical outer cylindrical portion 332a. The abutting portion 332d extends toward the inner peripheral side, and extends from the protruding end portion of the outer peripheral cylindrical portion 332a toward the inner peripheral side so as to face the first connecting portions 130 and 230 in the transport unit 30. A protruding portion 332e is provided. The first sealing member S1 is provided at a position where the abutting portion 332d faces the abutting stopping portion 331a, and an extending portion 332e provided at an end portion on the protruding side of the outer peripheral cylindrical portion 332a The second seal member S2 is provided at a position facing the first connecting portions 130 and 230, and an attachment portion 332c for attaching the telescopic rod 34a in the extrusion cylinder 34 is provided on the outer peripheral side of the outer peripheral cylindrical portion 332a. .

  Here, in this embodiment, before the movable portion 332 is connected to the first connecting portions 130 and 230 provided in the heating chamber 10 and the cooling chamber 20, as shown in FIG. In addition, the telescopic rod 34a in the extrusion cylinder 34 is contracted to move the movable portion 332 away from the first connecting portions 130 and 230, and the first seal member S1 provided in the abutting portion 332d is disposed. The second seal member S2 provided in the extending portion 332e is separated from the first connecting portions 130 and 230 while being separated from the abutting stop portion 331a.

  Then, from this state, the telescopic rod 34a in the extrusion cylinder 34 is extended to move the movable part 332 toward the first connecting parts 130 and 230, as shown in FIG. 9B. The first seal member S1 provided in the abutting portion 332d of the outer peripheral cylindrical portion 332a is pressed against the abutting stop portion 331a provided at the projecting end of the projecting portion 331 so that the projecting portion 331 is movable. The space between the outer peripheral cylindrical portion 332a in the portion 332 is sealed by the first seal member S1, and the second seal member S2 provided in the extending portion 332e in the outer peripheral cylindrical portion 332a of the movable portion 332 is used as the above-mentioned. The second seal portion is pressed between the first connecting portions 130 and 230 and the outer peripheral cylindrical portion 332a of the movable portion 332 by pressing against the first connecting portions 130 and 230. S2, is sealed by, so as to connect the second connecting portion 330 which is provided first connecting portion 130 and 230 provided in the heating chamber 10 and cooling chamber 20 and the transport unit 30 in a sealed state.

  As described above, when the first seal member S1 is pressed against the stopper 331a of the projecting portion 331 and the second seal member S2 is pressed against the first connecting portions 130 and 230, the outer peripheral cylinder of the movable portion 332 is provided. The first seal member S1 and the second seal member S2 can be appropriately pressed against the abutment portion 331a of the protruding portion 331 and the first coupling portions 130 and 230 due to manufacturing errors of the portion 332a. When it is difficult, the first seal member S1 and the second seal member S2 are deformable, and the first seal member S1 and the second seal member S2 are deformed to change the first seal member S1. And the second seal member S2 are pressed against the stopper 331a of the protruding portion 331 and the first connecting portions 130 and 230. Can.

  Here, in the heat treatment equipment in each of the above embodiments, when the heat treatment such as carburizing and quenching is performed on the workpiece W in a non-oxidizing atmosphere state, the workpiece W is transferred from the supply unit P into the transport unit 30. After the introduction, the transfer unit 30 is moved to a position facing the predetermined heating chamber 10 as shown in FIG.

  Next, as shown in FIG. 11, the second connecting portion 330 in the transport unit 30 and the first connecting portion 130 in the heating chamber 10 facing each other are connected in a sealed state as described above, and the inside of the transport unit 30. The workpiece W introduced into the heating chamber 10 is introduced into the heating chamber 10, and the workpiece W is heated in the heating chamber 10, and such an operation is repeated to process the workpiece in each heating chamber 10. The object W is introduced, and the object to be processed W is heated in each heating chamber 10.

  When the workpiece W is heat-treated in any of the heating chambers 10, the transfer unit 30 is moved to a position facing the heating chamber 10 where the workpiece W is heat-treated. As shown in FIG. 12, the first connection part 130 in the heating chamber 10 and the second connection part 330 in the transport unit 30 are connected in a sealed state as described above, and the heat-treated workpiece W is obtained. It is introduced into the transport unit 30 from within the heating chamber 10.

  Next, the conveyance unit 30 into which the workpiece W thus heat-treated is introduced is led to a position facing the cooling chamber 20, and as shown in FIG. 13, the second connecting portion 330 in the conveyance unit 30. Are connected to the first connecting portion 230 in the cooling chamber 20 in a sealed state as described above, and the heat-treated object W is introduced into the cooling chamber 20 from the transport unit 30. The to-be-processed object W heat-processed in is cooled. When the workpiece W is cooled in the cooling chamber 20, for example, an oil cooling bath (not shown) is provided in the cooling chamber 20, and the heated workpiece W is oil-cooled so that the workpiece is processed. W can be hardened. Moreover, the method of cooling the to-be-processed object W is not restricted to oil cooling as mentioned above, What kind of methods, such as water cooling and gas cooling, may be sufficient.

  Further, in the heat treatment facility in the above embodiment, as shown in FIG. 14, a heat retaining portion 35 that is continuous with the transport unit 30 is provided on one side in the moving direction of the transport unit 30, and from the inside of the heating chamber 10 as described above. The heat-treated object W introduced into the transport unit 30 can be kept warm in the heat retaining section 35.

  And in the state which heat-processed to-be-processed object W was heat-retained in the heat retention part 35, as mentioned above, the conveyance unit 30 is guide | induced to the position which faces the said cooling chamber 20, and as shown in FIG. The second connecting part 330 in the transport unit 30 and the first connecting part 230 in the cooling chamber 20 are connected in a sealed state as described above, and the workpiece W kept warm in the heat retaining part 35 is transferred to the transport unit 30. It can be introduced into the cooling chamber 20 from the inside.

  In this way, the heat-treated workpiece W is guided to the position facing the cooling chamber 20 by the transport unit 30, and the second connecting portion 330 in the transport unit 30 and the first connecting portion 230 in the cooling chamber 20 Even if it takes time to connect them in a sealed state as described above, in particular, it takes time to evacuate the space A between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 to make a non-oxidizing atmosphere. Even if the heat treatment is applied, the heat-treated object W is maintained in the heat-retaining part 35 and is prevented from decreasing before the temperature of the heat-treated object W is guided to the cooling chamber 20. Is done.

  Further, in the heat treatment facility in the above-described embodiment, as the processing chamber H for heat-treating the workpiece W, a plurality of heating chambers 10 for heating the workpiece W and the workpiece W heated in the heating chamber 10 are used. The cooling chamber 20 to be cooled is merely disposed on one side of the traveling rail L on which the transport unit 30 travels, but the type and number of the processing chambers H that heat-treat the workpiece W are not particularly limited. In addition, these processing chambers H can be arranged on both sides of the traveling rail L on which the transport unit 30 travels.

  For example, in the modified example shown in FIG. 16, as the processing chamber H that heat-treats the workpiece W, a plurality of heating chambers 10 that heat the workpiece W and the workpiece W heated in the heating chamber 10 are kept warm. Both sides of the traveling rail L on which the transport unit 30 travels are the warming chamber 40 to be heated and the cooling chamber 20 to cool the workpiece W heated in the heating chamber 10 and the workpiece W warmed in the warming chamber 40. It is arranged in.

  And in this example of a change, while providing the supply part P which supplies the to-be-processed object W to the conveyance unit 30, the some heating chamber 10, and the cooling chamber 20 in the one side of the traveling rail L, while being opposite to the traveling rail L On the side, a plurality of heating chambers 10 and a warming chamber 40 are provided, and the cooling chamber 20 and the warming chamber 40 are opposed to each other with the travel rail L therebetween.

  In the heating chamber 10, the cooling chamber 20, and the warming room 40, the first connecting portions 130, 230, and 430 as described above are provided on the facing portions facing the transport unit 30, respectively, In the transport unit 30, the first connecting portions 130, 230, and 430 are respectively provided on the facing portions on both sides facing the heating chamber 10, the cooling chamber 20, and the warming chamber 40 provided on both sides of the traveling rail L. As described above, the second connecting portion 330 is provided to be connected in a sealed state.

  Here, in this modified example, when the heat-treated object W is kept warm in the temperature-retaining room 40, and then the object W kept in the heat-retaining room 40 is guided to the cooling chamber 20, FIG. As shown in FIG. 2, the transport unit 30 is guided between the cold room 40 and the cooling chamber 20 provided so as to face each other via the traveling rail L. It faces both the cooling chamber 20. And while connecting the 2nd connection part 330 in the one side of this conveyance unit 30 to the 1st connection part 430 provided in the thermal storage 40 in the sealing state, the 2nd connection part 330 in the other side of this conveyance unit 30 is connected. The first connection part 230 provided in the cooling chamber 20 is connected in a sealed state. Thereafter, the opening / closing doors 42 in the warming chamber 40, the opening / closing doors 32 on both sides of the transport unit 30, and the opening / closing door 22 in the cooling chamber 20 are opened, and the openings 41 in the warming chamber 40, the transport unit 30 and the cooling chamber 20. , 31 and 21 are opened, and the workpiece W kept warm in the warming chamber 40 is guided through the transport unit 30 into the cooling chamber 20 through a straight path.

  16 and 17, when the processing chamber H that heat-treats the workpiece W is disposed on both sides of the travel rail L on which the transport unit 30 travels, the transport unit 30 is A number of processing chambers H can be arranged by shortening the distance to be moved, and the length of the heat treatment equipment can be shortened to be compact.

  In the heat treatment facility in the above-described embodiment, the first connecting portions 130, 230, and 430 are provided in the processing chamber H including the heating chamber 10, the cooling chamber 20, and the thermal storage room 40, while the second connecting portion is provided in the transport unit 30. 330, the second connecting portions 140 and 240 are provided in the processing chamber H including the heating chamber 10 and the cooling chamber 20 as in the heat treatment facility shown in FIG. It is also possible to provide 340.

  Here, in the heat treatment facility shown in FIG. 18, similarly to the heat treatment facility shown in FIG. 1, a plurality of (three in the example shown in FIG. 18) heating the workpiece W as the treatment chamber H that heat-treats the workpiece W. The heating chamber 10 and the cooling chamber 20 for cooling the workpiece W heated in the heating chamber 10 are arranged on one side of the traveling rail L on which the transport unit 30 travels with a required interval. . In addition, a supply unit P that supplies the workpiece W to the transport unit 30 is provided on one side of the traveling rail L that is the same as the heating chamber 10 and the cooling chamber 20 arranged in this manner.

  Further, in the heating chamber 10 and the cooling chamber 20, openings 11 and 21 for delivering the workpiece W to and from the transport unit 30 are provided on the facing portions facing the transport unit 30, respectively. The opening / closing doors 12 and 22 for opening and closing the openings 11 and 21 are provided, and in the transfer unit 30, the heating chamber 10 and the cooling chamber are provided on a facing portion facing the heating chamber 10 and the cooling chamber 20. An opening 31 for transferring the workpiece W to and from the chamber 20 is provided, and a sealed opening / closing door 32 for opening and closing the opening 31 is provided.

  In the heat treatment facility according to this embodiment, the facing portion of the transfer unit 30 facing the heating chamber 10 and the cooling chamber 20 protrudes toward the heating chamber 10 and the cooling chamber 20 from the opening / closing door 32. In this manner, the annular first connecting portion 340 is provided, while the heating unit 10 and the cooling chamber 20 facing the transport unit 30 are arranged on the transport unit 30 side of the opening / closing doors 12 and 22. The annular second connecting portions 140 and 240 are provided so as to protrude toward the front, and as the second connecting portions 140 and 240, a cylindrical protruding portion 141 that protrudes to the transport unit 30 side by a required length is provided. , 241, and movable parts 142, 242 that are moved toward the transport unit 30 guided to positions facing the projecting parts 141, 241. The parts 142 and 242, so as to couple to the first coupling portion 340 of the provided conveying unit 30.

  In addition, about said 2nd connection part 140,240 provided in the heating chamber 10 or the cooling chamber 20, what was comprised similarly to the 1st connection part 230 provided in the conveyance unit 30 in the said embodiment is used. it can.

DESCRIPTION OF SYMBOLS 10: Heating chamber 11: Opening part 12: Opening / closing door 20: Cooling chamber 21: Opening part 22: Opening / closing door 30: Transfer unit 31: Opening part 32: Opening / closing door 34: Extrusion cylinder 34a: Expandable rod 35: Insulating part 40: Thermal storage 41: Opening 42: Opening / closing door 130: First connecting part 140: Second connecting part 141: Protruding part 142: Movable part 230: First connecting part 240: Second connecting part 241: Protruding part 242: Movable part 330: 2nd connection part 331: Protrusion part 331a: Stopping part 332: Movable part 332a: Outer peripheral cylinder part 332b: Gutter part 332c: Attachment part 332d: Contact part 332e: Extension part 340: 1st connection part 430: 1st 1 connection part A: space H: processing chamber L: travel rail P: supply part S1: first seal member S2: second seal member W: object to be processed

Claims (7)

  A processing chamber for heat-treating the object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided. The transfer unit is moved to a position facing the processing chamber, and the transfer unit is faced. In a heat treatment facility that is connected to a processing chamber in a sealed state and transfers the object to be processed between the connected transfer unit and the processing chamber, a transfer unit is provided at a facing portion of the processing chamber that faces the transfer unit. A second coupling unit that is coupled in a sealed manner to the first coupling unit provided on the facing part of the processing chamber to the facing part of the transfer unit that faces the processing chamber. A connecting portion is provided, and the second connecting portion is protruded toward the processing chamber facing from the transfer unit, and is moved from the protruding portion toward the processing chamber to the first connecting portion. Connect The movable portion and the first connecting portion are provided in a state in which the movable portion and the first seal member that seals between the protruding portion and the movable portion are provided, and the movable portion is connected to the first connecting portion. A heat treatment facility characterized in that a second seal member for sealing between the first and second movable portions and the first connecting portion is provided.   A processing chamber for heat-treating the object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided. The transfer unit is moved to a position facing the processing chamber, and the transfer unit is faced. In a heat treatment facility that is connected to a processing chamber in a sealed state and transfers the object to be processed between the connected transfer unit and the processing chamber, a processing chamber is provided at a facing portion of the transfer unit that faces the processing chamber. A second coupling unit is connected to the first coupling unit provided on the facing part of the transport unit in a sealed state on the facing part of the processing chamber facing the transport unit. A connecting portion is provided, and the second connecting portion is protruded toward the transfer unit facing from the processing chamber, and is moved from the protruding portion toward the transfer unit to the first connecting portion. Linking And a first seal member for sealing between the projecting portion and the movable portion, and the movable portion and the first connection in a state where the movable portion is connected to the first connection portion. A heat treatment facility characterized in that a second seal member for sealing between the first and second portions is provided on at least one of the movable portion and the first connecting portion.   3. The heat treatment facility according to claim 1, wherein the second connecting portion is mounted in a sealed state with respect to the first connecting portion, and the object to be processed is transferred to the transfer unit and the processing chamber in a non-oxidizing atmosphere. Heat treatment equipment characterized by passing between   4. The heat treatment facility according to claim 1, wherein a deformable first seal member is used as the first seal member, and the movable portion is connected to the first connection portion. 5. Before the gap is formed between the first seal member and the protruding portion or the movable portion, the movable portion is connected to the first connecting portion, and the protruding portion is separated from the protruding portion by the first seal member. A heat treatment facility characterized in that the first seal member is deformed so that the space between the movable portion and the movable portion is sealed.   5. The heat treatment facility according to claim 1, wherein a deformable second seal member is used as the second seal member, and the movable portion is connected to the first connection portion. In this state, the second seal member is deformed so that the space between the movable portion and the first connecting portion is sealed by the second seal member.   The heat treatment equipment according to any one of claims 1 to 5, wherein a sealing type opening / closing door is provided on the facing part of the processing chamber, and a sealing type opening / closing door is provided on the facing part of the transfer unit. A heat treatment facility provided to open and close the open / close doors provided in the processing chamber and the transfer unit when the workpiece is transferred between the transfer unit and the processing chamber. The heat treatment facility according to any one of claims 1 to 6, wherein the processing chambers are arranged on both sides intersecting a moving direction of the transfer unit for transferring an object to be processed. Heat treatment equipment.

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