JP5636213B2 - Cutting device - Google Patents

Description

  The present invention relates to a cutting apparatus that cuts various workpieces using a cutting blade.

  For example, in a semiconductor device manufacturing process, a circuit such as an IC or an LSI is formed in a large number of regions arranged in a grid on the surface of a substantially disc-shaped semiconductor wafer, and a predetermined region is defined to partition the region where the circuit is formed. Each semiconductor chip is manufactured by dicing along a street (cutting line). As a device for dicing a semiconductor wafer as described above, a cutting device is generally used. A cutting apparatus for dicing a semiconductor wafer includes a chuck table that holds a workpiece with a negative pressure, and a cutting mechanism that includes a cutting blade that cuts the workpiece held on the chuck table (see, for example, Patent Document 1). ).

  There are two types of cutting blades: a type consisting only of an annularly shaped grindstone called a washer blade, and a type where an annular grindstone is fixed to the outer periphery of a disk-shaped base called a hub blade, The washer blade is fixed to the tip of the spindle with a nut while being sandwiched between two flanges, and the hub blade is fixed to the tip of the spindle with a nut while facing the one flange.

  Thus, since the cutting blade is fixed in contact with the flange, the flange end face blurring during rotation of the spindle must be 90 degrees unless the angle between the surface of the flange contacting the cutting blade and the rotation center line of the spindle is 90 degrees. This causes a problem that precise processing cannot be performed. For this reason, in order to solve such a problem, the present applicant has filed a patent application concerning an invention of a flange end face jig for grinding and correcting the end face of the flange (see, for example, Patent Document 2).

  The flange end surface correcting jig described in Patent Document 2 includes a grinding block for grinding the flange, and the grinding block itself has a lower surface area than the holding surface of the holding means for sucking and holding the grinding block. Is fixed to the plate member, and the plate member is held by the holding means.

JP-A-8-25209 Japanese Patent No. 3472390

  The invention described in Patent Document 2 provides a highly versatile end face correction jig. However, if a plate-shaped member with a size covering the holding surface of the holding means for holding a large workpiece in recent years is used, the part becomes large and difficult to handle, and the holding surface of the holding means formed with high flatness accuracy is damaged by mistake. There was also a case. On the other hand, if the plate-shaped member is made smaller than the holding surface of the holding means, it is necessary to prepare a dedicated end face correction holding means individually for the end face correction and replace it with a holding table for holding the work. Furthermore, when the end face correction jig is replaced with a holding table for holding a workpiece, it is necessary to measure the position of the upper surface of the holding table that serves as a reference for the cutting depth during cutting. The conventional flange end face correction jig has such a problem.

  The present invention has been made in view of the above-mentioned facts, and its main technical problem is that it is not necessary to perform the above-described complicated work when performing end face correction, and is an end face correction jig that is small and easy to handle. It is providing the cutting device which can use.

The present invention relates to a holding means having a holding table for holding a workpiece, a rotation support portion for rotating the holding table, and a support portion cover surrounding the rotation support portion, a cutting blade for cutting the workpiece held on the holding table, and cutting The present invention relates to a cutting device having a spindle for rotating a blade and a cutting means having a flange for clamping and fixing the cutting blade at the end of the spindle at the end of the spindle. A sub-table is arranged on the support cover adjacent to the holding table. have been set, the sub-table, a dress board to dress the cutting blade, and the end surface modified jig selectively sucking and holding and a grindstone supporting member for supporting the grinding wheel and grinding wheel for grinding the end face of the flange After the end face is ground by the end face correction jig held on the sub-table, the end face correction jig is replaced with a dressboard. .

  Since the cutting device according to the present invention includes the sub-table for selectively sucking and holding the dressboard and the end surface correction jig, the cutting device for holding the workpiece can be obtained by holding the dress board or the end surface correction jig in the sub table. While holding the workpiece in the holding means, dressing of the cutting blade can be performed, or the end face of the flange constituting the cutting means can be ground. Therefore, when dressing the cutting blade or grinding the end face of the flange, the holding table is removed from the holding means for holding the workpiece and replaced with an end face correction jig. After the dressing of the cutting blade or after end face grinding, the dress board or end face correction jig There is no need to perform complicated work such as removing from the holding means and replacing it with a holding table. Further, by providing a sub-table separately from the holding means for holding the workpiece, the end face correction jig is not affected by the increase in size of the holding means due to the increase in size of the workpiece. Can prevent accidental damage.

It is a perspective view which shows an example of a cutting apparatus. It is sectional drawing which shows the state with which the hub blade was mounted | worn with the spindle. It is sectional drawing which shows the state with which the washer blade was mounted | worn with the spindle. It is the perspective view which expanded and showed the C section of FIG. 1, and showed the dressboard and the end surface correction jig | tool. It is a perspective view which shows a subtable. It is sectional drawing which shows a holding means and a subtable schematically. It is sectional drawing which shows schematically the state which faced the grindstone of the end surface correction jig to the end surface of the flange of a cutting means. It is sectional drawing which shows schematically the state which made the grinding stone contact the end surface of the flange of a cutting means. It is explanatory drawing which shows the state which grinds the end surface of the flange of a cutting means using a grinding wheel. It is explanatory drawing which shows the state which dresses a cutting blade.

  The cutting apparatus 1 shown in FIG. 1 performs cutting while moving two cutting means 3a and 3b in a Y direction and a Z direction with respect to a workpiece (workpiece) held by a holding means 2 movable in the X direction. It is a device that performs processing. Here, the X direction is the moving direction of the holding means 2, the Y direction is a direction orthogonal to the horizontal direction with respect to the X direction, and the Z direction is a direction orthogonal to the X direction and the Y direction. .

  The holding means 2 includes a holding table 20 that holds a workpiece. The holding table 20 is formed with a suction surface 21 that communicates with a suction unit (not shown) and sucks a workpiece. Further, around the suction surface 21, when the work W is attached to the tape T and integrated with the ring-shaped frame F attached to the outer peripheral portion of the tape T as shown in FIG. The clamp part 22 which fixes is arrange | positioned. The clamp portion 22 has a holding portion 220 that rotates around a horizontal rotation axis and holds the frame F. The holding table 20 is surrounded from the periphery by a support portion cover 23, and bellows 24 are connected to both ends in the X direction of the support portion cover 23, and the holding means 2 moves in the X direction with the expansion and contraction of the bellows 24. It has a configuration.

  Since the two cutting means 3a and 3b are configured in the same manner, they will be described with common reference numerals. The cutting means 3 a and 3 b are configured such that a cutting blade 30 is mounted on a spindle 31 having a rotation axis in the Y-axis direction, and the cutting blade 30 is rotated by the rotation of the spindle 31. Imaging means 38a and 38b for detecting a position to be cut of the workpiece held on the holding table 2 are fixed to the cutting means 3a and 3b. The cutting means 3a and 3b are driven by two Z-direction moving means 5a and 5b, respectively, and can be moved in the Z direction, and are also driven by two Y-direction moving means 6a and 6b, respectively, to move in the Y direction. It is possible.

  Since the two Z-direction moving units 5a and 5b are configured in the same manner, they will be described with common reference numerals. The Z-direction moving means 5 includes a ball screw 50 having a vertical rotation axis, a guide rail 51 disposed in parallel to the ball screw 50, a pulse motor 52 connected to one end of the ball screw 50, and a side portion. And an elevating base 53 in which a nut (not shown) is screwed to the ball screw 50, and the ball screw 50 driven by the pulse motor 52 is rotated to rotate the elevating base. 53 is guided by the guide rail 51 and moves in the Z direction, and the cutting means 3a and 3b fixed to the lifting base 53 are moved up and down in the Z direction.

  Since the two Y-direction moving units 6a and 6b are configured in the same manner, they will be described with common reference numerals. The Z-direction moving means 6 includes a ball screw 60 having a rotation axis in the Y-axis direction, a guide rail 61 disposed in parallel with the ball screw 60, a pulse motor 62 connected to one end of the ball screw 60, and a side And a moving base 63 in which a nut (not shown) is screwed into the ball screw 60 while the portion is in sliding contact with the guide rail 61, and the moving base is rotated by the rotation of the ball screw 60 driven by the pulse motor 62. The table 63 is guided by the guide rail 61 and moves in the Y-axis direction to move the cutting means 3a and 3b in the Y direction.

  As the cutting blades 30 of the cutting means 3a and 3b, for example, there are two types of blades, a hub blade 32 shown in FIG. 2 and a washer blade 33 shown in FIG. A hub blade 32 shown in FIG. 2 is electrodeposited on a base 320 formed in a ring shape with a through hole for insertion into the spindle 31 in the thickness direction, and an outer peripheral portion on one surface side of the base 320. And a cutting blade 321. The cutting blade 321 is formed, for example, by dispersing diamond abrasive grains in a nickel base material. On the other hand, the washer blade 33 shown in FIG. 3 is, for example, a blade composed only of a cutting blade formed in a very thin ring shape by dispersing diamond abrasive grains in a nickel base material.

  As shown in FIGS. 2 and 3, a flange 34 is attached to the spindle 31 of the cutting means 3a, 3b. The flange 34 includes a boss portion 340 that protrudes in the Y direction, and a diameter-expanded portion 341 that increases in diameter from the boss portion 340. A male screw 340 a is formed at the tip of the boss 340. In addition, an end surface 341 a that supports the hub blade 32 or the washer blade 33 from the side is provided on the peripheral edge portion of the enlarged diameter portion 341.

  The hub blade 32 shown in FIG. 2 is inserted so that the cutting blade 321 contacts the end surface 341 a of the flange 34. The hub blade 32 is sandwiched between the flange 34 and the nut 36 by screwing the nut 36 onto the male screw 340 a formed on the boss portion 340. The hub blade 32 sandwiched between the flange 34 and the nut 36 is fixed to the tip of the spindle 31 by screwing a bolt 35 to a female screw 310 formed at the tip of the spindle 31.

  The washer blade 33 shown in FIG. 3 is inserted so that one surface abuts against the end surface 341 a of the flange 34. The washer blade 33 is attached to the flange 34 and the detachable flange by inserting the detachable flange 37 having the same outer diameter as the flange 34 into the boss portion 340 and screwing the nut 36 to the male screw 340a formed on the boss portion 340. The washer blade 33 sandwiched between the flange 34 and the detachable flange 37 is fixed to the tip of the spindle 31 by screwing a bolt 35 to a female screw 310 formed at the tip of the spindle 31. .

  As shown in FIG. 4, the sub-table 4 is disposed at a position adjacent to the holding table 20. The sub-table 4 includes a mounting portion 40 having a flat mounting surface 40a, and a suction groove 400 is formed in the mounting portion 40. The suction groove 400 communicates with the suction portion 41, and the dressboard 7 and the end surface correction jig 8 can be selectively sucked and held by the negative pressure acting on the suction groove 400.

  The dressboard 7 shown in FIG. 4 is formed by forming abrasive grains made of green carborundum, alundum, etc. into a plate shape with a binder such as resin bond, and is formed on the mounting portion 40 of the sub-table 4. The suction groove 400 is placed so as to be entirely covered, and is sucked and held by applying a negative pressure to the suction groove 400. The cutting blade 321 and the washer blade 33 of the hub blade 32 shown in FIGS. 2 and 3 are cut into the dress board 7 so that the cutting blade 321 and the washer blade 33 of the hub blade 32 are sharpened, rounded out, etc. The external shape can be corrected and shaped.

  An end face correction jig 8 shown in FIG. 4 is formed in a horizontal direction from a flat plate member 80, a grindstone support member 81 fixed to the upper surface of the plate member 80, and a grindstone support member 81 supported by the grindstone support member 81. It is composed of a protruding chip-shaped grinding wheel 82 and is placed so that the suction groove 400 is entirely covered on the placement portion 40 of the sub-table 4, and a negative pressure is applied to the suction groove 400. Is held by suction. The end face correcting jig 8 can correct the angle of the face of the end face 341a by grinding the end face 341a of the flange 34 shown in FIGS.

  As shown in FIG. 4, a warp pressing portion 42 that fixes the dress board 7 or the end surface correction jig 8 and presses the warp of the dress board 7 is disposed at one end portion of the sub-table 4. As shown in FIG. 5, the warp pressing portion 42 includes a first pressing portion 43 and a second pressing portion 44, each of which is configured by a leaf spring. The first pressing portion 43 and the second pressing portion 44 are formed in a bent shape at the bent portions 430 and 440. The fixed portions 431 and 441 depending from the bent portions 430 and 440 are respectively fixed to the side surface 45 of the sub-table 4 by bolts 432 and 442. The holding members 433 and 443 extending in a substantially horizontal direction while slightly descending from the bent portions 430 and 440 have shapes in which the tips are bent upward in the curved portions 434 and 444.

  As shown in FIG. 6, the holding table 20 is connected to the rotation support unit 25, and the holding table 20 is also rotated when the rotation support unit 25 is driven to rotate by a motor (not shown). A suction path 250 that communicates with the suction section 26 is formed inside the rotation support section 25, and the suction path 250 communicates with the suction surface 21. The rotation support portion 25 is surrounded by a support portion cover 23, which is a separate member that is neither connected nor in contact with the rotation support portion 25. The sub table 4 is disposed in a state of being fixed to the support portion cover 23 and is not connected to the holding table 20 and the rotation support portion 24. The upper end portion of the warp pressing portion 42 is at a position lower than the suction surface 21, and the cutting blade 30 is less likely to contact the warp pressing portion 42. In FIG. 6, the clamp portion 22 shown in FIGS. 1 and 4 is not shown.

  In the cutting apparatus 1 configured as described above, in order to perform precise cutting with an angle formed by the end surface 341a of the flange 34 and the rotation axis of the spindle 31 shown in FIGS. To grind. For this grinding, the end face correction jig 8 shown in FIG. 4 is used.

  In grinding the end surface 341a of the flange 34, first, the end surface correcting jig 8 is mounted on the mounting portion 40 of the sub-table 4 shown in FIGS. 4 and 5, and as shown in FIG. The end face correction jig 8 is sucked and held by applying a negative pressure to 40a. Further, the plate member 80 of the end surface correction jig 8 is pressed by the first pressing portion 43 and the second pressing portion 44 that constitute the warp pressing portion 42. For example, when the end face 341a of the flange 34 constituting the cutting means 3a is ground to correct the end face shape, the holding table 20 and the sub-table 4 are placed in the state where the cutting blade 3 is not attached to the cutting means 3a. 1 and the Z direction moving means 5a shown in FIG. 1 moves the cutting means 3a in the Z direction. As shown in FIG. 7, the X direction between the lower end of the end surface 341a of the flange 341 and the grinding wheel 82 and Align in the Z direction.

  After the end surface 341a of the flange 341 and the grinding wheel 73 are aligned in the X direction and the Z direction, the cutting means 3a is moved in the Y direction to bring the end surface 341a closer to the grinding wheel 82, as shown in FIG. The lower end of the end surface 341a of the flange 341 and the grinding wheel 82 are brought into contact with each other.

  Next, after the cutting means 3a is lifted in the Z direction from the state where the lower end of the end surface 341a is in contact with the grinding wheel 82, the sub-table 4 is rotated while the spindle 31 is rotated in the A direction as shown in FIG. Is reciprocated a plurality of times in the X direction to grind the end surface 341a of the flange 341. Further, the flange 341 is index-fed by a predetermined distance in the Y direction, and the same grinding is performed. If it does so, while the end surface 341a of the flange 34 which comprises the cutting means 3a will be planarized, the axis line of the spindle 31 and the end surface 341a will become a right angle. When grinding the end face 341a of the flange 34 constituting the cutting means 3b, the end face correcting jig 6 is placed in the direction opposite to that shown in FIGS. 7 and 8, that is, the tip of the grinding wheel 82 is the cutting means. It is placed on the sub-table 4 so as to face the 3b side, and grinding similar to the above is performed.

When the shape of the end surface 341a of the cutting means 3a and 3b is corrected in this way, the spindle 31 is used with the hub blade 32 shown in FIG. 2 or the washer blade 33 shown in FIG. 3 as the cutting blade 30 of the cutting means 3a and 3b. Attach to. Referring to FIG. 1, the holding table 2 holds the workpiece W supported by the frame F via the tape T. On the surface of the workpiece W, a plurality of devices D are formed by being partitioned by streets S. The workpiece is not particularly limited. For example, a semiconductor wafer such as silicon wafer, gallium arsenide, or silicon carbide, an adhesive member such as DAF (Die Attach Film) provided on the back surface of the wafer for chip mounting, or a package for semiconductor products. Ceramics, glass, sapphire (Al ₂ O ₃ ) -based inorganic material substrates, various electronic components such as liquid crystal display drivers, and various processing materials that require micron-order processing position accuracy.

  When the workpiece W is held by the holding table 20, the imaging means 38a, 38b is positioned above the workpiece W by the movement of the holding table 20 in the X direction and the movement of the cutting means 3a, 3b in the Y direction and the Z direction, The work S is imaged to detect each street S to be cut. Then, after aligning the cutting blades 30 of the cutting means 3a and 3b with the street S where the position is detected, the cutting blade 30 is lowered while rotating at high speed, and the holding table 2 is moved in the X direction to move the workpiece W. The cutting blade 30 is cut into the two, and the street S is cut two by two. The cutting amount of the cutting blade 30 in the Z direction relative to the workpiece W is controlled by the Z direction moving means 5a and 5b with the upper surface of the holding table 20 as a reference. Such cutting is similarly performed on other streets while the cutting means 3a and 3b are index-fed in the Y direction. Furthermore, when the same cutting is performed after the holding table 2 is rotated 90 degrees, all the streets S are cut and divided into individual devices D.

  The cutting process performed in this way, specifically, during the cutting of one workpiece, or between the end of cutting of the workpiece and the cutting of the next workpiece, the cutting blade 30 of the cutting blades 3a and 3b. Clogging may occur. Therefore, the cutting blade 30 (the cutting blade 321 in the hub blade 32 shown in FIG. 2 or the washer blade 33 shown in FIG. 3) at an appropriate timing, for example, after cutting a predetermined distance or after cutting a predetermined number of streets S. Do the dress. In order to dress the cutting blade 30, the end face correction jig 8 is removed from the sub-table 4, and the dress board 7 is placed on the sub-table 4 and held by suction. Further, as shown in FIG. 10, the dress board 7 is pressed by the first pressing portion 43 and the second pressing portion 44 that constitute the warp pressing portion 42. Note that the sub-table 4 may be replaced with the dress board 7 immediately after the end face correction of the flange 34 is completed. Further, the workpiece W is held on the holding table 20 even during cutting.

  Next, as shown in FIG. 10, the cutting blade 321 (33) of the cutting blade 30 to be dressed is positioned on the extension line in the X direction of the dressboard 7, and the cutting blade 30 is rotated in the B direction and the subtable 4 Is moved in the X direction, and the cutting blade 321 (33) is cut into the dress board 7 by moving the cutting blade 30 and the dress board 7 relative to each other in the X direction. Perform shape correction. After such a dress, the workpiece is cut again. When resuming cutting, it is not necessary to replace the holding table 20 that holds the workpiece with the dressboard 7, and therefore the upper surface position of the holding table 20 does not change from the beginning, and therefore the measurement of the upper surface position of the holding table 20 is unnecessary. is there.

  As described above, the cutting apparatus 1 selectively holds the dressboard 7 for dressing the cutting blade 30 and the end face correction jig 8 for grinding the end face 341a of the flange 34 of the cutting means 3a, 3b. Since the subtable 4 that can be used is provided, it is not necessary to hold the end face correction jig 8 in the holding table 20 that holds the workpiece. Therefore, it is not necessary to replace the holding table 20 that holds the workpiece and the end face correction jig 8 in the holding means 2, and complicated work before and after the end face correction becomes unnecessary. Since it is not necessary to replace the holding table 20 that holds the workpiece and the end face correction jig 8, it is not necessary to measure the upper surface position of the holding table 20 after the end face correction. Further, since the sub-table 4 is provided separately from the holding means 2 for holding the workpiece, the end face correction jig 8 is not affected by the increase in size of the holding means 2 due to the increase in size of the workpiece. It is possible to prevent the surface 21 from being damaged accidentally.

  Further, as shown in FIG. 6, since the sub-table 4 is fixed to the support cover 23 and is not connected to the holding table 20 and the rotation support 24, the end face correction jig 8 is used for end face correction and dressing. Even when a strong force is applied to the dressing board 7, the end face correction jig 8 and the dress board 7 do not shake, and the dressing and end face of the cutting blade can be ground while being stably supported. it can.

1: Cutting device 2: Holding means 20: Holding table 21: Suction surface 22: Clamping part 220: Pressing part 23: Supporting part cover 24: Bellows 25: Rotation supporting part 250: Suction path 26: Suctioning part 3a, 3b: Cutting means 30: Cutting blade 31: Spindle 310: Female screw 32: Hub blade 320: Base 321: Cutting blade 33: Washer blade 34: Flange 340: Boss portion 340a: Male screw 341: Expanded portion 341a: End face 35: Bolt 36 : Nuts 37: Detachable flange 4: Sub table 40: Placement part 40a: Placement surface 400: Suction groove 41: Suction part 42: Warp holding part 43: First holding part 44: Second holding parts 430 and 440 : Bending part 431, 441: Fixed part 432: 442: Bolt 433, 443: Pressing member 434, 444: Curved 45: Side surfaces 38a, 38b: Imaging means 5a, 5b: Z direction moving means 50: Ball screw 51: Guide rail 52: Pulse motor 53: Elevating base 6a, 6b: Y direction moving means 60: Ball screw 61: Guide rail 62: Pulse motor 63: Moving base 7: Dress board 8: End face correction jig 80: Plate member 81: Grinding wheel support member 82: Grinding wheel

Claims (1)

Holding means having a holding table for holding a workpiece, a rotation support portion for rotating the holding table, and a support portion cover surrounding the rotation support portion;
A cutting means having a cutting blade for cutting the work held on the holding table, a spindle for rotating the cutting blade, and a flange for holding the cutting blade at the end face of the spindle and fixing the cutting blade to the end of the spindle;
A cutting device comprising:
A sub-table is disposed on the support cover adjacent to the holding table;
The sub-table is
A dress board for dressing the cutting blade, and an end face correction jig having a grinding wheel for grinding the end face of the flange and a grinding wheel support member for supporting the grinding wheel are selectively sucked and held on the sub-table. A cutting apparatus that replaces the end face correction jig with the dressboard after grinding the end face with the held end face correction jig .

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