JP5412617B2 - PRESSURE DEVICE, JOINING DEVICE USING THE DEVICE, PRESSURE METHOD, AND JOINING METHOD USING THE METHOD - Google Patents

Description

  The present invention relates to a technique for appropriately pressurizing an object to be pressurized.

  Conventionally, as described in Patent Document 1, when joining objects to be joined, a technique for joining the objects to be joined by applying ultrasonic vibration simultaneously while pressing the objects to be joined is known. Are known. At this time, as a device for pressurizing the objects to be joined, a pressurizing device using a fluid pressure cylinder described in Patent Document 1, or a servo mechanism using a ball screw for converting the rotational force of a motor into a pressurizing force. Is known.

Japanese Patent No. 3447798 (paragraphs 0006 to 0010, FIG. 1, FIG. 2, etc.)

  By the way, in the pressurizing device described in the above-mentioned Patent Document 1, the fluid inside the fluid cylinder is controlled by controlling the supply of the fluid into the fluid pressure cylinder and the discharge of the fluid outside the fluid cylinder using a fluid such as air. The pressure applied to the pressed body by the pressing body is adjusted by adjusting the pressure. Therefore, compared with the response characteristic of the pressurizing device by the servo mechanism that controls the rotation of the motor, the pressurizing device using the fluid pressure cylinder has a problem that the response characteristic is poor. Therefore, there is a possibility that a delay occurs when the pressurization to the pressurized body by the pressurizing device is started or when the pressurization to the pressurized body is stopped, and the pressurized body cannot be appropriately pressurized.

  On the other hand, the pressurizing device by the servo mechanism using the ball screw is configured to convert the rotational force of the motor into the pressurizing force by the pressing body by the ball screw. There is a risk of malfunction. Therefore, similarly to the pressurizing device using the fluid pressure cylinder, a delay occurs when the pressurization to the pressurized body by the pressurizing device is started or when the pressurization to the pressurized subject is stopped. There was a possibility that the pressurized body could not be pressurized properly.

  This invention is made | formed in view of the said subject, and makes it the 1st objective to provide the technique which can pressurize a to-be-pressurized body appropriately.

  In addition, a second object of the present invention is to provide a technique capable of satisfactorily bonding the objects to be bonded by appropriately pressing the objects to be bonded.

In order to solve the first object described above, a pressurizing device according to the present invention includes a magnet motor shaft provided so as to be movable in the vertical direction, and a cylindrical motor coil through which the magnet motor shaft is inserted. A shaft motor, a pressing body that is provided at a lower end in the vertical direction of the magnet motor shaft, moves integrally with the magnet motor shaft, and presses a pressed object directly under the magnet motor shaft, and the magnet Provided at the upper end of the motor shaft in the up-down direction , canceling the total weight by pulling the magnet motor shaft in the direction directly above the magnet motor shaft with at least the same pulling force as the total weight of the magnet motor shaft and the pressing body Canceling means, and the pressing body That the includes a pressure detecting means for detecting the pressure applied to the pressure body, and a control means for controlling the current to the motor coil for driving the magnet motor shaft in the vertical direction, the cancel means, A fluid pressure cylinder, a piston head that is slidably disposed in the fluid pressure cylinder, and that separates the fluid pressure cylinder into first and second pressure chambers; one end connected to the piston head and the other end A piston body having a piston shaft led out of the fluid pressure cylinder and connected to the upper end of the magnet motor shaft and arranged coaxially with the magnet motor shaft, and the first and second pressure chambers via a pressure reducing valve Before adjusting the pressure of the fluid to be supplied to the upper end of the magnet motor shaft via the piston shaft Always piston head substantially constant the pulling force and a fluid circuit for pulling to the right above direction, the control means, upon pressurization of the target pressure body according to at least the pressing member, said detected by pressure detecting means The current applied to the motor coil is controlled so that the applied pressure is a predetermined pressure set in advance according to the material of the pressed object (claim 1).

Further, the pressurizing method according to the present invention includes a shaft motor having a magnet motor shaft provided so as to be movable in the vertical direction, a cylindrical motor coil through which the magnet motor shaft is inserted, and a magnet motor shaft. A pressing body that is provided at a lower end in the vertical direction and moves integrally with the magnet motor shaft and presses a pressed object directly under the magnet motor shaft ; and is provided at an upper end in the vertical direction of the magnet motor shaft. Canceling means for canceling the total weight by pulling the magnet motor shaft in a direction immediately above the magnet motor shaft with at least the same traction force as the total weight of the magnet motor shaft and the pressing body; Check the pressure applied to the object Wherein the pressurizing method for pressurizing the pressure body, slidably disposed a piston head fluid pressure cylinder provided in said canceling means and by the pressing member using a pressure device comprising a pressure detecting means for The fluid pressure supplied to the first and second pressure chambers of the fluid pressure cylinder separated by the fluid pressure is adjusted by a fluid circuit, and the other end is led out of the fluid pressure cylinder and connected to the upper end of the magnet motor shaft. The piston head connected to one end of a piston shaft coaxially arranged with the magnet motor shaft is always pulled in the upward direction with the substantially constant traction force, and at least the pressure object is applied by the pressing body. During pressurization, the applied pressure detected by the applied pressure detecting means becomes a predetermined applied pressure set in advance according to the material of the pressurized object. It is characterized by controlling the current to the motor coil as (claim 6).

  In the invention configured as described above, the pressure detected by the pressure detection means is appropriate in advance according to the material, shape, size, etc. of the pressed body at least when the pressed body is pressed by the pressing body. The current to the motor coil is controlled so as to be a predetermined pressurizing force set to. Accordingly, the magnet motor shaft is driven by energization of the motor coil, and the pressurized body is pressurized with a predetermined pressing force set in advance by the pressing body. While being able to press, it can pressurize appropriately, without pressing a to-be-pressurized object with a press body too much.

  Further, the canceling means provided at the upper end of the magnet motor shaft cancels the total weight by pulling the magnet motor shaft upward with at least substantially the same pulling force as the total weight of the magnet motor shaft and the pressing body. Therefore, since the total weight of the magnet motor shaft and the pressing body is not applied to the pressed body via the pressing body, only the pressing force (shaft motor torque) generated by energizing the motor coil is pressed. It can be applied to the body to be pressed through the body. Therefore, especially when the object to be pressurized is a very small part or cannot apply a high pressure, only a relatively small pressure generated by the shaft motor is accurately applied to the object to be pressed. This is very convenient.

  In addition, since the object to be pressurized is pressurized with a pressing body by driving a shaft motor which is a kind of so-called linear motor, a pressurizing device using a fluid cylinder using a fluid such as air or the rotational force of the motor Compared with a pressurizing device using a servo mechanism that converts the pressure into a pressing force of the pressing body with a ball screw, the response characteristic to the control signal is very good. The shaft motor is a non-contact magnet motor shaft and cylindrical motor coil, and furthermore, since the motor coil is a coreless linear motor that does not have a core, a so-called linear motor with a core is generated. Cogging does not occur, and so-called backlash-like problems that may occur in a servo mechanism using a ball screw due to the structure of the shaft motor do not occur.

  Therefore, when moving the magnet motor shaft (pressing body), cogging and backlash that do not cause disturbances do not occur. Therefore, compared to the conventional pressurizing apparatus described above, There is no possibility that a delay will occur when the pressurization to the pressurized object is stopped. For this reason, since the pressure applied to the pressurized object by the pressing body can be controlled more accurately, the pressurized object cannot be properly pressurized and the pressurized object is damaged. Further, it is possible to effectively prevent the pressed body from being destroyed by pressurizing the pressed body with a very high applied pressure.

  By the way, conventionally, the shaft motor has been employed as an actuator for a positioning device or a component conveying device using the magnet motor shaft of the present application as a fixed portion and the motor coil of the present application as a moving portion because of its high positioning accuracy. That is, the shaft motor has been conventionally employed as an actuator for an XY stage as a positioning device, or as an actuator for a component conveying device that conveys a processed component to a processing device. However, the inventor of the present application paid attention not only to such positioning accuracy of the shaft motor but also to control the moving state of the moving portion with high accuracy when the shaft motor is driven. Then, the motor coil of the shaft motor is a fixed part and the magnet motor shaft is a moving part. The moving part, which has not been paid attention at all in the past, that is, the moving state of the magnet motor shaft is controlled to control the load. One of the major features of the present invention is that the shaft motor is adopted as the actuator of the pressure device by performing (torque) control.

  By adopting such a configuration, based on the excellent control characteristics of the shaft motor, it is possible to perform load control with high accuracy that could not be achieved by the conventional pressurizing device. A pressing force can be applied. Moreover, since the pressurization apparatus of the present invention has high position accuracy as usual in addition to load control with very high accuracy, the following unique effects can also be achieved. That is, even when an external force is applied to the magnet motor shaft as a disturbance in the same direction as the moving direction or in the opposite direction, the shaft motor maintains the current position of the magnet motor shaft against the applied external force. The ability is very high. Therefore, for example, even if the stress generated in the pressed object increases as the object to be pressed is pressed with the pressing body, the shaft motor is opposite to the original moving direction due to the increased stress of the magnet motor shaft. Since the movement in the direction can be prevented and the proper movement state of the magnet motor shaft in the pressurizing direction can be maintained, the pressurizing device according to the present invention can always pressurize the object to be pressed appropriately. Thus, the pressurizing device according to the present invention has a very high servo rigidity.

  Further, the pressure generated by the movement of the magnet motor shaft is directly applied to the object to be pressed by the pressing body directly under the magnet motor shaft, which is the moving direction of the magnet motor shaft. Therefore, the torque generated by the shaft motor when the motor coil is energized can be applied to the object to be pressed very efficiently. Further, since the shaft motor according to the present invention is configured such that the magnet motor shaft moves, the torque generated by the shaft motor can be applied to the pressing body simply by providing a pressing body at the lower end of the magnet motor shaft as the moving portion. Since a special transmission mechanism is not required to transmit the driving force generated on the magnet motor shaft to the pressing body, the configuration can be simplified.

  Furthermore, since the shaft motor can be given propulsive force in any direction without contact with the magnet motor shaft to be driven, it does not require a transmission mechanism for propulsion such as a ball screw, has little change over time, and is maintainable. Further, it is extremely excellent in reliability, and it is possible to improve the durability of a pressure device using the same. As described above, those skilled in the art mainly focused only on the positioning accuracy of the shaft motor, but focused on the fact that the moving state of the moving part can be controlled with very high accuracy when the shaft motor is driven. The fact that the moving part is composed of a magnet motor shaft different from the conventional one and the shaft motor is employed as the actuator of the pressurizing device is based on the original idea of the present inventors. Therefore, as described above, the pressurizing device of the present invention and the pressurizing method using this pressurizing device are not limited to the position accuracy characteristics of the shaft motor that has been attracting attention in the past. Focusing on the control characteristics of the moving state of the motor shaft), the shaft motor can be constructed for the first time by adopting a configuration that did not exist conventionally.

  The pressing force applied to the member to be pressed by the pressing body may be set appropriately according to the material, shape, size, etc. of the member to be pressed. It may be determined, or a theoretical value calculated from the hardness of the material of the pressed body may be set as the applied pressure. In short, it is only necessary to apply a pressure that can reliably pressurize and deform the member to be pressed and that does not destroy the member to be pressed by an excessive pressure.

By the way, as compared with a hydraulic cylinder using a conventional fluid or a servo mechanism using a ball screw as an actuator of a pressurizing device, the pressure (torque) that the shaft motor of the present application can generate is small. It becomes. Therefore, the canceling unit adjusts the pressure of the fluid that the fluid circuit supplies to the first and second pressure chambers via the pressure reducing valve , at least when the pressurized body is pressurized by the pressing body. Then, by pressing the piston head connected to the upper end of the magnet motor shaft through the piston shaft downward with a substantially constant additional pressure, the magnet motor shaft is moved downward with a substantially constant additional pressure. It is good also as a structure further provided with the function as a pressurizing force addition means to pressurize (Claim 2).

  With such a configuration, when pressurizing an object to be pressurized that requires a pressure higher than the torque that can be generated by the shaft motor to be deformed into a predetermined shape, the magnet motor shaft is applied by the pressure addition means. Can be pressed downward with a substantially constant additional pressure. Therefore, the additional pressure applied by the additional pressure means is added to the applied pressure generated by the shaft motor, and the pressurized object can be pressurized with an appropriate applied pressure according to the pressurized object. Can be reliably deformed.

  As described above, the shaft motor included in the pressure device of the present application has very high positioning accuracy characteristics. Therefore, even when the magnet motor shaft is pressed downward by the additional pressurizing means when the pressed body is pressed by the pressing body, that is, when the movement of the magnet motor shaft is controlled, the magnet motor shaft (pressing body) is pressed. The proper movement state in the direction can be maintained.

Further, since the magnet motor shaft is pulled upward by utilizing the differential pressure obtained by adjusting the pressure of the fluid supplied to the first and second pressure chambers of the fluid pressure cylinder, the magnet motor can be easily pulled with a substantially constant traction force. The shaft can be pulled upward. In addition, because of the configuration of the canceling means using the fluid pressure cylinder, it is extremely unlikely that the canceling means will generate a disturbance such as a frictional force other than the traction force. Therefore, it is possible to control the pressure applied to the pressed body by the pressing body with higher accuracy. Further, the canceling means configured as described above has a structure that generates an unnecessary frictional force and the like, and therefore has excellent durability. Moreover, since unnecessary frictional force or the like is not generated, pressure control with a low applied pressure can be performed with high accuracy, and the followability of the pressing body that follows the deformation of the pressed body is improved.

In addition, since the magnet motor shaft is pressed downward using the differential pressure by adjusting the pressure of the fluid supplied to the first and second pressure chambers of the fluid pressure cylinder, respectively, it is possible to easily add a substantially constant additional pressure. The magnet motor shaft can be pressed downward. In addition, due to the configuration of the additional pressure means using a fluid pressure cylinder, the additional pressure generated by the additional pressure means is very low because the additional pressure means is very unlikely to generate a disturbance such as friction force in addition to the additional pressure. The pressing force and all of the torque generated by the shaft motor can be transmitted to the pressing body as the pressing force, and the pressing force applied to the pressed body by the pressing body can be controlled with higher accuracy. In addition, the pressurizing force adding means configured in this way is extremely excellent in durability because it does not have a structure that generates unnecessary frictional force. Moreover, since unnecessary frictional force or the like is not generated, pressure control with a low applied pressure can be performed with high accuracy, and the followability of the pressing body that follows the deformation of the pressed body is improved.

Further, when the pressing force detected by the pressing force detecting means becomes a preset upper limit pressing force when the pressed body is pressed by the pressing body, the control means moves downward of the pressing body. movement may be controlling the current to the motor coil so as to stop (claim 3).

  With such a configuration, as the stress generated in the member to be pressed increases due to pressurization, the pressing force applied to the member to be pressed by the pressing member becomes a predetermined upper limit pressing force appropriately set in advance. If it becomes, the pressurization to the to-be-pressurized body by the pressing body is stopped. Therefore, it is possible to prevent the pressurized body from being damaged or broken by pressurizing the pressurized pressure exceeding a predetermined upper limit pressing force set in advance. For example, when the pressed body is an alloy, the stress generated in the pressed body before the pressing body reaches the normal stop position due to variations in the hardness of the pressed body during the manufacturing process. The pressure applied to the pressurized object by the pressing body may increase to a predetermined upper limit pressure set in advance. However, if the pressure applied by the pressing body reaches a predetermined upper limit pressing force set in advance, the pressing body stops moving downward, so that the pressed body exceeds the predetermined upper limit pressing force by the pressing body. It is possible to prevent the material from being excessively pressurized and destroyed.

Further, the apparatus further comprises shaft position detecting means for detecting the position of the magnet motor shaft, and the control means is based on a shaft position detection signal from the shaft position detecting means when the pressed body is pressed by the pressing body. by detecting that it has moved to a position where the pressing member is set in advance, it may be configured to control the current to the motor coil so as to stop the downward movement of the pressing member (claim 4) .

  With such a configuration, when it is detected that the pressing body has moved to a preset position based on the shaft position detection signal from the shaft position detecting means when the pressed body is pressed by the pressing body, In order to control the current to the motor coil so as to stop the downward movement of the body, the pressed body moves beyond a preset position, so that the pressurized body is excessively pressurized and damaged. Can be surely prevented.

  In addition, the current to the motor coil is controlled so that the pressing body is held at the position where the pressing to the pressed body is stopped for a predetermined time after the pressing to the pressed body by the pressing body is stopped. May be. With such a configuration, the pressing body is held at the stop position for a predetermined time after the pressed body is pressed and deformed by the pressing body and the movement of the pressing body is stopped. The stress of the member to be pressed is removed during the holding, so that the member to be pressed can be surely plastically deformed and collapsed into a predetermined shape.

  In addition, while moving the pressing body from the position where the pressing to the pressed body by the pressing body is stopped to the position where the pressing to the pressed body by the pressing body is started, the moving speed of the pressing body is You may control the electric current to a motor coil so that it may become a value different from the speed at the time of moving to the pressurization direction at the time of the pressurization to the to-be-pressurized body by a press body.

  With such a configuration, the moving speed of the pressing body is increased during the return movement of the pressing body from the position where the pressurizing to the pressurized body is stopped to the position where the pressing of the pressurized body is started. By controlling to a value different from the speed when moving in the pressure direction, the pressed body is pressed and deformed by the pressing body and the movement of the pressing body is stopped, and then the magnitude of the speed set to a different value is set. The pressure applied to the member to be pressed by the pressing body can be gradually removed at a moving speed not exceeding. Therefore, since the stress of the pressurized body is gradually removed while the pressure applied by the pressing body to the pressurized body is gradually removed, the pressurized pressurized body is deformed to a predetermined degree by the residual stress. It is possible to prevent the state from returning to its original form. The speed of the pressing body during the return movement of the pressing body is a speed at which the stress of the pressed body can be gradually removed by gradually removing the pressure applied by the pressing body to the pressed body. Any speed may be used, but a sufficiently low speed is more preferable. Further, after the pressing body is moved back to the contact position, the moving speed of the pressing body may be arbitrarily changed to further move the pressing body to a predetermined position.

In order to solve the second object described above, a joining apparatus according to the present invention uses a pressurizing apparatus according to any one of claims 1 to 6 to be joined as the body to be pressed. In a joining apparatus that pressurizes and joins each other, the stage includes a stage disposed opposite to the pressing body, and holds one object to be bonded by the pressing body, and holds the other object to be bonded by the stage, The control means pressurizes and joins the joint portions of the objects to be joined by bringing the pressing body close to the stage (Claim 5 ).

The bonding method according to the present invention is a bonding method in which the objects to be bonded are pressed and bonded by the pressing method according to claim 8, and one of the objects to be bonded is held by the pressing body, and the other is bonded. The object to be bonded is held by a stage disposed opposite to the pressing body, and the pressing body is brought close to the stage to pressurize and bond the bonded portions of the objects to be bonded as the pressed body. (Claim 7 ).

  In the invention configured as described above, one object to be bonded held by the pressing body and the other object to be bonded held by the stage are pressurized with a predetermined pressure to join both objects to be bonded. The parts to be joined are joined by gradually crushing the parts. Therefore, when pressurizing the objects to be joined, since the newly formed surfaces that appear after the oxide film and organic layer adhering to the surface of the joint are removed due to the uniform collapse of the joint, the joints are good. Can be joined. In addition, since the pressure applied by the pressing body is appropriately set according to the material, shape, size, and the like of the object to be bonded, the object to be bonded can be prevented from being broken or damaged. Thus, by appropriately pressing the objects to be joined, the objects to be joined can be favorably joined without damaging the objects to be joined.

  In addition, after the pressurization of the object to be joined by the pressing body is stopped, if the current to the motor coil is controlled so that the pressing body is held at the position where the pressing is stopped for a predetermined time, the pressing body is held at the stop position. The stress of the crushed joint is removed during the process. Therefore, it can prevent effectively that the to-be-joined objects joined by the residual stress peel off again.

  Moreover, if it is set as the structure which controls the speed | rate which separates a press body from a stage and returns to a contact position after joining to-be-joined object, the removal speed of the applied pressure to the junction part of both to-be-joined objects by a press body will be set. Can be controlled. Therefore, since the pressure applied by the pressing body can be gradually removed from the objects to be joined after joining the objects to be joined, the joints crushed while gradually removing the pressure from both objects to be joined Since the stress is gradually removed and the newly formed surfaces appearing to be crushed by the contact, the joined objects can be efficiently prevented from being separated again by the residual stress of the joint.

  In the above-described joining apparatus and joining method, the pressure applied to the object to be joined by the pressing body may be appropriately set according to the material, shape, size, etc. of the joined part of the object to be joined. The applied pressure may be determined by performing the test pressurization, or may be a theoretical value calculated from the hardness of the material of the joint. In short, any pressure may be used as long as the joint can be reliably pressed and crushed and the joint is not destroyed by excessive pressure. For example, when the object to be bonded is a Si wafer and 100 Au bumps are formed on the Si wafer as bonding portions (electrodes), a pressure of 0.3 N (120 MPa) is applied to each Au bump. An applied pressure of 30 N (0.3 N × 100) can be applied. When Cu bumps are formed instead of Au bumps, a pressure of 50 N (0.5 N × 100) is applied so that a pressure of 0.5 N (200 MPa) is applied to each Cu bump. Can be added.

  Moreover, as a position of the pressing body which stops the pressurization to the object to be pressed by the pressing body, for example, a bump having a height of 50 μm is formed, and when the tip portion 30 μm is pressed, the crushing is performed. As a substitute, a position where the bumps are not crushed by 30 μm or more can be set as a position where pressing is stopped.

  Further, ultrasonic vibration may be applied to both objects to be bonded by ultrasonic vibration applying means while the bonded portions of the bonded object are crushed.

  With such a configuration, since ultrasonic vibration is applied while the joint is crushed by the pressing body, ultrasonic vibration is applied while the joint is pressed in the process of being crushed. As a result, relative vibration occurs between the joints due to the relative vibration of both joints, and the joints rub against each other, and the dust, oxide film, organic layer, etc. on the joint surface are efficiently removed. Thus, a new surface can efficiently appear at the joint, and the objects to be joined can be joined more efficiently. In addition, the pressurizing force when pressurizing the objects to be joined may be a speed at which the joining portion is prevented from being rapidly collapsed and ultrasonic vibration energy can be uniformly applied to the joining portion.

  For example, the value of the applied pressure can be calculated as a theoretical value from the height, shape, etc. of the bump. Specifically, when a bump having a height of 50 μm is formed and the tip portion of 30 μm is used as a crushing margin when pressed, the ultrasonic vibration energy is sufficiently applied while the crushing margin of 30 μm is collapsed. The applied pressure that can be applied may be a predetermined applied pressure. The predetermined pressure does not need to be a constant pressure, and the pressure may be gradually increased monotonously.

  In addition, at the initial stage of crushing the joints of both objects to be joined, since the oxide film or the like on the surface of the joint is not sufficiently removed, the joint area that is the joint part of the joint is small. For this reason, since the bonding force between the objects to be bonded is small, if large ultrasonic vibration energy is applied in this state, the objects to be bonded vibrate excessively, the objects to be bonded are damaged, or the bonding positions of the objects to be bonded are This may cause misalignment. Therefore, it is preferable to apply a relatively small ultrasonic vibration energy in the initial stage of joining (stage where pressurization of the objects to be joined is started).

  However, when the pressure between the joints of both objects to be joined advances and the new surface of the joint surface increases as the oxide film etc. on the joint surface is removed, the joint area where the joints are already joined And the joining force between the objects to be joined increases. Therefore, the relative vibration between the joints due to the relative vibration of both joints of the two joints is sufficient with the relatively small ultrasonic vibration energy applied at the initial stage of joining the joints. Therefore, it is preferable to increase the ultrasonic vibration energy applied to the object to be bonded. Therefore, the ultrasonic vibration energy applied during crushing between the joints of both objects to be joined increases as the new surface appearing at the joint increases in the process of crushing the joint and the joint area increases. Is more preferable.

  Specifically, by controlling the speed at which the joint of both objects to be crushed is controlled linearly and monotonically, the speed at which the new surface (joint area) that appears at the joint increases is controlled. As the new surface increases, the ultrasonic vibration energy applied to the object to be bonded may be increased. If it does in this way, the ultrasonic vibration energy applied to a to-be-joined object can be increased as the new surface which appears in a joined part increases, and a joined area increases.

  In addition, if the ultrasonic vibration is continuously applied even after the pressurization to the bonded portion of both the bonded objects is completed and the crushing of the bonded portion is completed, excessive ultrasonic vibration is applied, and the bonded object is There is a risk of damage. Therefore, after the pressurization to the body to be pressed by the pressing body is stopped, it may be controlled to end the application of ultrasonic vibration to both objects to be bonded. With such a configuration, it is possible to prevent the objects to be bonded from being damaged by applying excessive ultrasonic vibration energy to both objects to be bonded.

  Moreover, you may heat both to-be-joined objects by a heating means, while crushing the junction part of both to-be-joined objects.

  With such a configuration, it is possible to join the objects to be joined by melting the joint by the heating means. Therefore, the objects to be joined can be joined with a lower pressure. In addition, as a kind of joining part, it is more preferable to employ | adopt the metal which fuse | melts at comparatively low temperature, such as solder.

  Moreover, the structure further provided with the guide which prevents rotation of a magnet motor shaft may be sufficient. With such a configuration, since the moving direction of the magnet motor shaft can be limited to only one direction, the positional accuracy can be improved.

  The cutting surface of at least the portion of the magnet motor shaft guided by the guide has a polygonal shape, the cutting surface of the guide has substantially the same shape as the cutting surface of the magnet motor shaft, and a plurality of rollers on the inner peripheral surface of the guide The piston shaft may be inserted into the guide.

  With such a configuration, since the rigidity of the guide can be improved, the pressed body can be pressed by the pressing body with a relatively strong pressing force. In addition, for example, when the object to be pressurized is pressed while applying the ultrasonic vibration as described above, in particular, the ultrasonic vibration that vibrates in a direction substantially perpendicular to the axial direction of the magnet motor shaft. Even when a force is applied in the lateral direction with respect to the axial direction of the guide, etc., if the guide is configured as described above, the rigidity of the guide is high, so that ultrasonic vibration energy can be efficiently transmitted to the pressurized object. Can do. Therefore, for example, when joining objects to be joined by the joining device using the above-described pressure device, ultrasonic vibration energy can be efficiently transmitted to the objects to be joined. . The portion guided by the guide may be integrated with the magnet motor shaft, or the portion guided by the guide and the magnet motor shaft may be separated. Further, even if sliding friction occurs between the magnet motor shaft and the guide, it is possible to reliably pressurize the member to be pressed with an appropriate pressure by the excellent positioning characteristics and movement accuracy characteristics of the shaft motor.

  Further, the cut surface of at least a portion of the magnet motor shaft guided by the guide may be polygonal and the guide may be an air bearing.

  With such a configuration, the sliding friction between the magnet motor shaft and the air bearing can be made extremely small. Therefore, it is possible to pressurize the pressed body with a pressing body with a relatively low pressure and with high accuracy. In addition, since almost no sliding friction occurs between the magnet motor shaft and the air bearing, all of the torque generated by the shaft motor can be applied to the object to be pressed, and applied with very high accuracy. The pressure body can be pressurized. The columnar magnet motor shaft may be configured to be guided by a cylindrical air bearing.

Moreover, the structure which is a chip | tip which divided | segmented the to-be-joined object into a wafer or a wafer may be sufficient. The wafer is made of, for example, a metal such as Si, SiO ₂ , glass, lithium ionic acid, oxide single crystal (LT), an oxide including a ceramic system, and the chip is generally obtained by dicing the wafer. An individual piece is shown, which is composed of transistors, resistors, capacitors, reactances, and the like. It should be noted that relatively strong pressure is required when bonding wafers or wafers having hundreds to thousands of bonding portions (bumps) formed thereon as bonding objects. Therefore, when joining these objects to be joined, it is more preferable to join by applying ultrasonic vibration with a strong pressing force using the above-described guide having a plurality of rollers.

  Moreover, the structure by which a to-be-joined object is an optical element may be sufficient. There are various optical elements such as a Ga-As element, and any optical element may be adopted as long as it is a well-known one. Note that these elements are relatively small elements, and many elements are destroyed when a strong pressure is applied. Therefore, when these elements are bonded, it is more preferable to use the above-described air bearing to melt and bond the bonded portion of the optical element with a weak pressure.

  Moreover, you may form devices, such as a semiconductor device, a MEMS device, or an optical element device, with the above-mentioned joining apparatus and joining method. By forming various devices using the method described above, when pressing wafers, chips, etc. during the device creation process, the pressure can be accurately controlled and the joints can be crushed uniformly. You can create a device. Therefore, it is possible to form a semiconductor device, a MEMS device, an optical element device, and the like that require bonding of electrodes composed of fine bumps with particularly high accuracy.

According to the first and sixth aspects of the present invention, the pressure detected by the pressure detection means is at least the material, shape, size, etc. of the pressed body when the pressed body is pressed by the pressing body. Accordingly, the current to the motor coil is controlled so as to obtain a predetermined pressurizing force set appropriately in advance. Accordingly, the magnet motor shaft is driven by energization of the motor coil, and the pressurized body is pressurized with a predetermined pressing force set in advance by the pressing body. While being able to press, it can pressurize appropriately, without pressing a to-be-pressurized object with a press body too much. Further, since the magnet motor shaft is pulled upward by utilizing the differential pressure obtained by adjusting the pressure of the fluid supplied to the first and second pressure chambers of the fluid pressure cylinder, the magnet motor can be easily pulled with a substantially constant traction force. The shaft can be pulled directly above.

According to the second aspect of the present invention, since the magnet motor shaft can be pressed downward with a substantially constant additional pressure by the pressure addition means, the pressure addition means is added to the pressure generated by the shaft motor. It is possible to pressurize the member to be pressed with an appropriate pressing force according to the member to be pressed by adding the additional pressing force. In addition, since the magnet motor shaft is pressed downward using the differential pressure by adjusting the pressure of the fluid supplied to the first and second pressure chambers of the fluid pressure cylinder, respectively, it is possible to easily add a substantially constant additional pressure. The pressing body can be pressed directly under the magnet motor shaft.

According to the third aspect of the present invention, as the pressing body moves in the pressurizing direction, the stress generated in the pressurized body increases, so that the pressing body applies the pressure to the pressed body. When the pressure reaches an upper limit pressure set appropriately in advance, pressurization to the pressurized object by the pressing body is stopped. It is possible to prevent the pressurized body from being damaged or destroyed.

According to the fourth aspect of the present invention, when it is detected that the pressing body has moved to a preset position based on the shaft position detection signal from the shaft position detecting means when the pressed body is pressed by the pressing body. In order to control the current to the motor coil so as to stop the pressurization of the pressed body by the pressing body, the pressed body is excessively pressurized by moving beyond the preset position. Can be reliably prevented from being damaged.

According to the inventions described in claims 5 and 7 , since the joints are uniformly crushed by pressurizing with a predetermined pressure, the new surfaces appearing on the surface of the joints are in good contact with each other. In addition, since the pressure applied by the pressing body is appropriately set according to the material of the object to be bonded, the object to be bonded can be prevented from being broken or damaged.

<First Embodiment>
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a view showing a first embodiment of a joining apparatus according to the present invention. FIG. 2 is an enlarged schematic view showing the pressurizing device 100 in the joining device 200 shown in FIG. 1, wherein (a) is a front view and (b) is a schematic view showing the configuration of the shaft motor 112. FIG. 3 is a view showing the guide 108a of the pressure device 100 shown in FIG. FIG. 4 is an operation explanatory view showing a first operation example of the bonding apparatus 200 of FIG. FIG. 5 is a schematic diagram showing a state of joining of objects to be joined using the joining apparatus 200 of FIG. FIG. 6 is a schematic diagram illustrating a state before and after bonding of the objects to be bonded. FIG. 7 is an operation explanatory diagram illustrating a second operation example of the bonding apparatus 200 of FIG. FIG. 8 is an operation explanatory view showing a third operation example of the bonding apparatus 200 of FIG. In the bonding apparatus 200 shown in FIG. 1, the resonator 7 (corresponding to the “pressing body” of the present invention) is one object to be bonded, and has a metal electrode (bump) 20a made of gold on the bonding surface of the semiconductor. A chip (wafer) 20 and a substrate (wafer) 22 having a metal electrode (bump) 22a, which is the other object to be bonded, held by the stage 10 disposed opposite to the resonator 7 are moved by a pressure device 100. The chip 20 and the substrate 22 are bonded together by applying pressure so that the metal electrode 20a and the metal electrode 22a are in contact with each other and applying ultrasonic vibration by the vibrator 8 and the resonator 7. Thus, in this embodiment, the chip 20 and the substrate 22 that are the objects to be bonded are pressed as the “pressurized body” of the present invention.

  As shown in FIG. 1, the joining device 200 includes a joining mechanism 27, a mounting mechanism 28 having a stage 10 and a stage table 12, a position recognition unit 29, a transport unit 30, and a control device 31. . The joining mechanism 27 includes a vertical drive mechanism 25 and a pressure device 100 having a pressing body portion 26, and the vertical drive mechanism 25 is guided by the vertical guide 3 by the vertical drive motor 1 and the bolt / nut mechanism 2. However, the pressure device holding unit 6 is moved up and down. The pressure device holding portion 6 is guided in the vertical direction by the head escape guide 5 and is connected to the bolt / nut mechanism 2 while being pulled by the own weight counter 4 for canceling the own weight. The pressure device 100 having the pressing body portion 26 is coupled to the pressure device holding portion 6. Further, the pressing body portion 26 included in the pressurizing apparatus 100 holds the chip 20 by suction, the resonator heater 9 is embedded therein, and a pressure sensor 114 is provided at the lower end of a magnet motor shaft 110 included in a shaft motor 112 described later. And a resonator 7 that moves integrally with the magnet motor shaft 110 and presses the chip 20 and the substrate 22, and a vibrator 8, and is arranged so that the vibration of the resonator 7 is not hindered. Has been. The height of the pressing body portion 26 can be detected by the pressing body portion height detecting means 24 provided in the pressurizing device holding portion 6. Further, the pressure sensor 114 (corresponding to the “pressure detection means” of the present invention) is constituted by a load cell or the like, detects the pressure applied to the chip 20 and the substrate 22 by the resonator 7, and applies the pressure to the control device 31. A detection signal for detecting the pressure is output. The configuration and operation of the pressure device 100 will be described later in detail.

  Further, the mounting mechanism 28 sucks and holds the substrate 22, the stage 10 including the stage heater 11 therein, and a stage table having a movable shaft that can be moved in parallel and rotationally to adjust the position of the substrate 22 with respect to the chip 20. 12. The joining mechanism 27 is coupled to the frame 34, and the frame 34 is connected to the gantry 35 by the four support columns 13 arranged so as to surround the periphery of the pressing center of the pressing device 100. In this way, the chip 20 and the substrate 22 that are the objects to be bonded can be heated by the resonator heater 9 and the stage heater 11. A part of the support column 13 and the frame 34 is not shown.

  The position recognizing unit 29 is inserted between the chip 20 and the substrate 22 arranged to face each other, and the upper and lower mark recognizing means 14 for recognizing the alignment marks for position recognition of the upper and lower chips 20 and the substrate 22, respectively, Point recognition means 33, amplitude detector (not shown) for detecting the amplitude of the chip 20, substrate 22 and resonator 7, and recognition means for moving these recognition means 14, 33 and amplitude detector horizontally and / or up and down And a moving table 15. Further, the transport unit 30 includes a substrate transport device 16 and a substrate transport conveyor 17 that transport the substrate 22, and a chip supply device 18 and a chip tray 19 that transport the chips 20. Further, the control device 31 functions as a “control unit” of the present invention, and includes an operation unit that controls the pressurizing device 100 and controls the entire joining device 200, and press body unit height detecting unit. The vertical drive mechanism 25 can be controlled by the detection signal from 24 to adjust the height of the pressing body portion 26 in the direction of arrow Z in FIG. The configuration and operation of the control device 31 will be described later in detail.

  Next, the pressure device 100 will be described in detail with reference to FIGS. 1 and 2. As shown in FIG. 2A, the pressure device 100 includes a pressure mechanism 101 and a pressing body portion 26, and the pressure mechanism 101 includes a shaft motor 112 and an air cylinder 113. Further, the shaft motor 112 has a magnet motor shaft 110 provided so as to be movable in the vertical direction that is the direction of the arrow Z, and a cylindrical motor coil 111 through which the magnet motor shaft 110 is inserted. Further, as shown in FIG. 4B, in this embodiment, the magnet motor shaft 110 is formed by arranging magnets in a cylindrical stainless steel cylinder, and the motor coil 111 is controlled based on the control by the control device 31. By energizing the three-phase alternating current, the magnet motor shaft 110 can be arbitrarily moved up and down.

  In this embodiment, the magnet motor shaft 110 is moved by energizing the motor coil with a three-phase alternating current. However, the shaft motor 112 is driven by a direct current in the same manner as a so-called direct current brushless motor. May be. That is, the relative position of the magnet motor shaft 110 with respect to the motor coil 111 is detected by providing a hall element or the like, and the direct current is changed to pseudo 3 based on the detected relative position of the magnet motor shaft 110 with respect to the motor coil 111. The magnet motor shaft 110 may be moved by converting the pulse current into a phase alternating current and energizing the motor coil 111. As described above, the configuration of the shaft motor 112 may be any as long as it has the same structure as the basic structure shown in FIG. The drive format described in this embodiment is not limited.

  Further, the pressurizing device 100 detects a relative position of the magnet motor shaft 110 with respect to the motor coil 111 and outputs a shaft position detection signal to the control device 31 (in the “shaft position detecting means” of the present invention). Equivalent) 106. As such a position sensor 106, various linear sensors can be employed. For example, if a magnetic sensor is employed as the position sensor 106, the position sensor 106 may change in magnetism as the magnet motor shaft 110 moves. Can be detected to detect the position of the magnet motor shaft 110. Alternatively, a linear scale may be provided on the magnet motor shaft 110 and the position of the magnet motor shaft 110 may be detected by reading the linear scale with the position sensor 106. As described above, any position sensor 106 may be used as long as it can reliably detect the position of the magnet motor shaft 110.

  The air cylinder 113 is provided at the upper end of the magnet motor shaft 110 and is slidably disposed in the fluid pressure cylinder 102 and the fluid pressure cylinder 102. The interior of the fluid pressure cylinder 102 is in the first and second pressure chambers. A piston body 103 having a piston head 103a divided into 104a and 104b and one end connected to the piston head 103a and the other end led out of the fluid pressure cylinder 102 and connected to the upper end of the magnet motor shaft 110; The fluid circuit 105 that drives the piston head 103a by adjusting the pressure of the compressed air supplied to the first and second pressure chambers 104a and 104b via the pressure reducing valve 105b, and the first and second pressure chambers 104a and 104b, respectively. Pressure sensor that detects the differential pressure and outputs a differential pressure detection signal And 07, and a guide 108a for preventing rotation of the piston shaft 103b. Thus, in this embodiment, the piston head 103a is driven using compressed air as a fluid.

  Further, as described above, the control device 31 shown in FIG. 1 functions as the “control unit” of the present invention, and is based on the shaft position detection signal of the position sensor 106 and the pressure detection signal of the pressure sensor 114. By energizing the coil 111, the shaft motor 112 is controlled to drive the magnet motor shaft 110 in the vertical direction. Specifically, the control device 31 includes a speed calculation unit 31 a that calculates the moving speed of the resonator 7 (pressing body portion 26) connected to the magnet motor shaft 110 based on the shaft position detection signal of the position sensor 106, and an addition unit. A contact position deriving unit (not shown) for deriving a contact position where the chip 20 held by the resonator 7 contacts the substrate 22 held by the stage 10 based on the pressure detection signal of the pressure sensor 114, A sudden decrease position deriving unit (not shown) for deriving a sudden decrease position where the speed of the moving resonator 7 (pressing body portion 26) suddenly decreases based on the shaft position detection signal, the speed calculation unit 31a, the contact position deriving unit, The pressure applied to the chip 20 and the substrate 22 by the resonator 7 (pressing body portion 26) based on the signal from the sudden decrease position calculation unit and the pressure sensor 114, and the moving speed of the resonator 7 And a function as a control unit for controlling (not shown). Then, the control device 31 energizes the motor coil 111 based on each detection signal and each derived signal to control the shaft motor 112, and drives the magnet motor shaft 110 in the vertical direction, so that the resonator 7 and the stage are driven. The chip 20 and the substrate 22 held on the substrate 10 can be pressurized with an arbitrary pressure, and the pressing body 26 can be moved close to or away from the stage 10 at an arbitrary moving speed.

  Further, the control device 31 receives the differential pressure detection signal from the pressure sensor 107 and controls the fluid circuit 105 to drive the piston head 103a. Specifically, the fluid circuit 105 is controlled by the control device 31, and constantly introduces a constant pressure of air into the first pressure chamber 104a to keep the pressure of the first pressure chamber 104a constant. In the present embodiment, the control device 31 controls the fluid circuit 105 to adjust the pressure of the first pressure chamber 104a, so that the piston head has at least approximately the same traction force as the total weight of the magnet motor shaft 110 and the pressing body portion 26. By pressing 103a upward, the magnet motor shaft 110 is pulled upward with a substantially constant traction force to cancel this total weight.

  Further, the fluid circuit 105 adjusts the pressure reducing valve 105b according to the signal from the control device 31, and adjusts the pressure of the second pressure chamber 104b by introducing the air having the adjusted pressure and flow rate into the second pressure chamber 104b. Thus, the piston head 103a can be pressed downward. The magnet motor shaft 110 can be pressed downward by pressing the piston head 103a downward in this way.

  That is, the control device 31 controls the fluid circuit 105 to adjust the pressure of the first pressure chamber 104a, so that the piston head 103a is moved upward with at least approximately the same traction force as the total weight of the magnet motor shaft 110 and the pressing body portion 26. By pulling the magnet motor shaft 110, the total weight can be canceled by pulling the magnet motor shaft 110 upward with a substantially constant pulling force. Further, the control device 31 controls the fluid circuit 105 to adjust the pressure of the second pressure chamber 104b, so that at least when the chip 20 and the substrate 22 are pressurized by the resonator 7, the control device 31 responds to the types of the chip 20 and the substrate 22. By pressing the piston head 103a downward with an appropriate additional pressing force, the magnet motor shaft 110 can be pressed downward with a substantially constant additional pressing force. As described above, the air cylinder 113 functions as the “cancel means” and the “pressurizing force adding means” of the present invention.

  The fluid pressure cylinder 102 has a space having a circular cross section, and a piston head 103a having a circular cross section is inserted into the space. On the other hand, as shown in FIG. 3, the guide 108a has a polygonal cross section (here, a decagonal shape), and a piston shaft 103b having substantially the same cross sectional shape is inserted into the guide 108a so as to be slidable in the axial direction. The rotation of the piston shaft 103b is prevented. Specifically, as shown in FIG. 3 (a), the piston shaft 103b of the piston body 103 provided in the pressurizing device 100 has a polygonal cross-sectional shape, as shown in FIG. 3 (b). The piston shaft 103b is inserted through a guide 108a having a plurality of cylindrical rollers 108a1 disposed on the inner peripheral surface thereof. Therefore, the piston shaft 103b is slidable in the axial direction with respect to the guide 108a and is prevented from rotating.

  As described above, in the pressurizing apparatus 100 according to the present embodiment, as a control system for the shaft motor 112, a position feedback system based on the shaft position detection signal from the position sensor 106 and a pressure applied by the pressure detection signal from the pressure sensor 114. A feedback system is formed. That is, the control device 31 energizes the motor coil 111 included in the shaft motor 112 based on the shaft position detection signal and the applied pressure detection signal to control the movement of the magnet motor shaft 110, thereby causing the resonator 7 (pressing body). The highly accurate positioning control, pressure control, and movement speed control of the unit 26) can be performed simultaneously. In the present embodiment, the control device 31 determines that the pressing force detected by the pressing force sensor 114 is at least when the object to be pressed such as the chip 20 and the substrate 22 is pressed by the resonator 7. The current to the motor coil 111 is controlled so as to be a predetermined pressurizing force set in advance according to the material.

  Further, in the pressurizing apparatus 100 in the present embodiment, a pressure feedback system based on a differential pressure detection signal from the pressure sensor 107 is formed as a control system for the air cylinder 113. That is, the control device 31 performs input / output control of the fluid (compressed air) to the second pressure chamber 104b by controlling the pressure reducing valve 105b included in the fluid circuit 105 on the basis of the differential pressure detection signal. Pressure control can be performed by pressing 103 upward or downward.

  By the way, if it is the structure which performs the movement control of the press body part 26, and the pressurization control by the press body part 26 only with the pressurization apparatus (henceforth an "air servo") using the conventional air, on the structure, accuracy In order to perform good control, if the configuration of the pressing body portion 26 changes and the total weight of the magnet motor shaft 110 and the pressing body portion 26 fluctuates, the gain adjustment of the air servo must be performed, which is very maintenance. Was troublesome. However, according to the configuration of the present embodiment described above, the movement control of the pressing body portion 26 and the pressure control by the pressing body portion 26 are performed by the shaft motor 112, so the total weight of the magnet motor shaft 110 and the pressing body portion 26. Even if the air pressure fluctuates, the traction force upward of the magnet motor shaft 110 by the air cylinder 113, that is, the air flow rate in the first pressure chamber 104a is controlled to finely adjust the pressure in the first pressure chamber 104a. The moving state of the pressing body portion 26 can be controlled with very high accuracy. As described above, according to the configuration of the present embodiment, even if the configuration of the pressing body portion 26 is changed, there is no need for troublesome gain adjustment and the maintenance can be made very easy. Further, unlike the conventional shaft motor, since the magnet motor shaft 110 is configured as a moving part, a cable can be easily wired to the motor coil 111 as a fixed part that needs to be energized.

  The pressure control means that the pressure receiving area of the piston head 103a facing the second pressure chamber 104b is S2, the pressure acting on the piston head 103a is P2, and the pressure receiving area of the piston head 103a facing the first pressure chamber 104a is S1 ( However, if S2> S1) and the pressure acting on it is P1 (where P1> P2), a magnet provided at the other end of the piston shaft 103b based on the calculation of pressure P = P2, S2-P1, and S1. In this control, pressure is applied to the motor shaft 110 based on an arbitrarily set value.

1. First Operation Example Next, a first operation example in which the objects to be joined are joined by the joining apparatus 200 will be described with reference to FIGS. First, the chip 20 is supplied from the chip tray 19 to the resonator 7 by the chip supply device 18 and is sucked and held. The substrate 22 is supplied from the substrate transfer conveyor 17 to the stage 10 by the substrate transfer device 16 and is held by suction. Then, the upper / lower mark recognition means 14 is inserted between the chip 20 and the substrate 22 whose opposing surfaces are held opposite to each other by the recognition means moving table 15, and the alignment marks for alignment between the chips 20 and the substrate 22 held opposite to each other are inserted. The position is recognized by the vertical mark recognition means 14. Thereafter, the position of the substrate 22 is moved by moving the stage table 12 in parallel and rotating with the position of the chip 20 as a reference, and the positions of the chip 20 and the substrate 22 are aligned.

  Next, the upper and lower mark recognizing means 14 is retracted by the recognizing means moving table 15 in a state where the joining positions of the chip 20 and the substrate 22 are aligned (the positions of the metal electrodes 20a and 22a are aligned). Subsequently, the pressure device holding unit 6 is lowered by the vertical drive mechanism 25, stopped just before the chip 20 (metal electrode 20a) and the substrate 22 (metal electrode 22a) come into contact, and held at that position. Note that the position in the height direction (in the direction of arrow Z) of the pressurizing device holding unit 6 is detected by the pressing body unit height detecting means 24, and after the pressurizing device holding unit 6 is stopped, the control device 31. Starts the control of the pressurizing apparatus 100, further lowers the pressing body portion 26, and brings the chip 20 and the substrate 22 close to each other. Further, the air cylinder 113 is controlled by the control device 31 so as to pull the magnet motor shaft 110 upward with substantially the same traction force as the total weight of the magnet motor shaft 110 and the pressing body portion 26.

  As shown in FIGS. 4A to 4C, the control device 31 is configured so that the pressure device holding unit 6 is positioned at the position (height) ZH from the stage 10 (standby position). Then, the control of the pressurizing device 100 is started, and the lowering of the pressing body portion 26 is started at time a little faster than VD that is a preset set speed from time t0. Then, when the position of the pressing body portion 26 reaches the height Z0 at time t1, the contact position deriving unit contacts the chip 20 and the substrate 22 based on the pressure detection signal from the pressure sensor 114. After that, pressure control to the chip 20 and the substrate 22 by the pressing body portion 26, application of ultrasonic vibration, and control of the moving speed V of the pressing body portion 26 are started. The contact position deriving unit can detect the contact position Z0 by detecting the change in the applied pressure based on the applied pressure detection signal when the chip 20 and the substrate 22 contact each other at the contact position Z0. it can.

  Specifically, from the time t1 when the chip 20 contacts the substrate 22, the moving speed (movement amount) of the pressing body portion 26 detected by the sudden decrease position deriving unit based on the position detection signal from the position sensor 106 at time t2. Until the sudden decrease position Z1 where V sharply decreases, that is, during the arrow DT in FIG. 4C, the chip 20 and the substrate 22 are made in accordance with the materials of the metal electrodes 20a and 22b as shown in FIG. 4B. Pressurization is performed with a substantially constant pressure P0. Then, as shown in FIG. 4C, control is performed so that the magnitude of the moving speed V of the pressing body portion 26 is equal to or lower than a preset set speed VD. Further, as shown in FIG. 4A, as the pressing body portion 26 is lowered, the metal electrodes 20a and 22a (joining portions) are crushed and the joining area S is increased, as shown in FIG. 4B. Furthermore, as the bonding area between the chip 20 and the substrate 22 increases, the ultrasonic vibration energy E applied to the chip 20 and the substrate 22 is increased.

  In FIG. 4A, Smax is the size of the bonding area when the pressing body portion 26 moves beyond the sudden decrease position Z1 to the limit position ZL that may cause the chip and the substrate 22 to be destroyed. 4B, Emax is the maximum value of the ultrasonic vibration energy E applied to the chip 20 and the substrate 22, and the ultrasonic vibration energy E indicated by the alternate long and short dash line in FIG. When the position reaches the limit position ZL, the maximum value Emax is increased. While applying the ultrasonic vibration, while applying the ultrasonic vibration while confirming that a relative vibration is generated between the chip 20 and the substrate 22 by an amplitude detector (not shown), The pressing body portion 26 is brought close to (lowered) the stage 10.

  Further, the moving speed V of the pressing body portion 26 rapidly decreases as the magnitude of the stress of the metal electrodes 20a and 22a, which increases as the metal electrodes 20a and 22a are crushed, approaches the magnitude of the applied pressure P0. The body part 26 stops at a sudden decrease position (stop position) Z1 at time t2. Then, at the time t2 when the pressing body portion 26 is stopped, the application of the ultrasonic vibration energy E to the chip 20 and the substrate 22 is finished, and thereafter, for a predetermined time ST until the time t3, Control is performed to hold the position at the sudden decrease position (stop position) Z1. At this time, by performing annealing by heating the chip 20 and the substrate 22 with the heaters 9 and 11, diffusion occurs between the metal electrodes 20a and 22b, and the stress can be removed.

  Subsequently, after the pressing body portion 26 is held at the sudden decrease position (stop position) Z1 for a certain time ST, the suction of the chip 20 by the resonator 7 is released at time t3, and standby from the sudden decrease position (stop position) Z1. The return movement of the pressing body portion 26 is started up to the position ZH. At this time, the moving speed of the pressing body 26 is controlled to a value VU different from the set speed VD from the position Z1 where the movement of the pressing body 26 stops to the contact position Z0, that is, from time t3 to t4. To do. That is, in FIG. 4C, during the arrow UT, control is performed so that the moving speed of the pressing body portion 26 is equal to or less than VU, and the applied to the chip 20 and the substrate 22 as shown in FIG. The pressure P is gradually removed. In this embodiment, control is performed with the set speeds VD and VU having the same value.

  Then, from time t4 when the position of the pressing body portion 26 reaches the contact position Z0, the magnitude of the moving speed of the pressing body portion 26 is made larger than VU and moved until the pressing body portion 26 reaches the standby position ZH. The movement of the pressing body 26 is stopped at time t5 when the pressing body 26 reaches the standby position ZH. Thereafter, the substrate 22 held on the stage 10 in a state where the chip 20 is mounted is discharged to the substrate transfer conveyor 17 by the substrate transfer device 16, and a series of joining operations is completed.

  As described above, in the first operation example, at least during pressurization by the resonator 7, the pressing body portion 26 is moved from the contact position Z0 between the chip 20 (metal electrode 20a) and the substrate 22 (metal electrode 22a) to the metal. While the electrode 20a, 22a is pressed and the stress generated is increased, the pressing force P applied by the pressing body 26 is changed to a metal while moving to the sudden decrease position (stop position) Z1 where the moving speed V of the pressing body 26 decreases rapidly. The pressing body 26 moves at a moving speed equal to or lower than a preset set speed VD while maintaining a substantially constant pressure P0 appropriately set according to the material, shape, size, etc. of the electrodes 20a, 22a. So that it is controlled. Therefore, as the pressing body portion 26 moves, the stress applied to the metal electrodes 20a and 22a increases, and as the increased stress approaches the applied pressure P0 of the pressing body portion 26, the pressing body portion 26. Since the moving speed (moving amount) in the pressurizing direction decreases rapidly, the chip 20 (metal electrode 20a) and the substrate 22 (metal electrode 22a) can be reliably pressed by the pressing body 26, and the chip 20 and The substrate 22 is not excessively pressurized by the pressing body portion 26 and is not destroyed.

  Further, since the pressing body portion 26 moves at a moving speed equal to or lower than the set speed VD between the contact position Z0 and the sudden decrease position Z1, the chip 20 and the substrate 22 are pressurized, and therefore, as shown in FIG. As shown, since the metal electrodes 20a and 22a are gradually crushed in the state of FIG. 5B, the metal electrodes 20a and 22a are rapidly crushed so that the pressing body portion 26 is deformed into the metal electrodes 20a and 22a. It is possible to prevent the movement of the metal electrodes 20a and 22a from being ununiformly deformed. Therefore, it can pressurize appropriately, without damaging chip 20 (metal electrode 20a) and substrate 22 (metal electrode 22a).

  In addition, as described above, the speed at which the metal electrodes 20a and 22a (joint portions) are crushed is controlled, and the metal electrodes 20a and 22a (joint portions) are uniformly crushed at a predetermined set speed VD or less. The newly formed surfaces of the metal electrodes 20a and 22a appearing after removal of the oxide film, organic layer, and the like attached to 22a can be brought into good contact with each other, and the metal electrodes 20a and 22a can be joined with each other.

  Further, since ultrasonic vibration is applied while the metal electrodes 20a and 22a are crushed by the pressing body portion 26, relative vibration occurs between the metal electrodes 20a and 22a in a state where the metal electrodes 20a and 22a are pressed against each other. By rubbing, dust, oxide film, organic substance layer and the like on the surfaces of the metal electrodes 20a and 22a are efficiently removed. Therefore, a new surface can appear more efficiently in the metal electrodes 20a and 22a, and the chip 20 and the substrate 22 can be bonded more efficiently.

  In addition, since the application of ultrasonic vibration to the chip 20 and the substrate 22 is finished after the pressing body portion 26 has moved to the sudden decrease position (stop position) Z1, excessive ultrasonic vibration is applied to the chip 20 and the substrate 22. By applying the energy E, it is possible to prevent the chip 20 and the substrate 22 from being damaged.

  Further, after the movement of the pressing body portion 26 stops at the sudden decrease position (stop position) Z1 and the metal electrodes 20a and 22b are crushed by the pressing body portion 26, the pressing body portion 26 is rapidly decreased for a predetermined time ST. It is held at the position (stop position) Z1. Accordingly, since the stress of the metal electrodes 20a and 22a is removed while the pressing body portion 26 is held at the sudden decrease position (stop position) Z1, the metal electrodes 20a and 22a are reliably plastic as shown in FIG. It can be made into the state where the new surface appeared on the surface by deforming. Further, since the annealing is performed while the pressing body portion 26 is held at the sudden decrease position (stop position) Z1, the stress of the metal electrodes 20a and 22a can be more efficiently removed. Therefore, it is possible to efficiently prevent the bonded chip 20 and the substrate 22 from being peeled off again due to the residual stress of the metal electrodes 20a and 22a.

  Further, while the pressing body portion 26 is moved back from the sudden decrease position (stop position) Z1 to the contact position Z0, the pressing body portion 26 is controlled so that the magnitude of the moving speed V of the pressing body portion 26 becomes VU or less. 26, the stress applied to the chip 20 and the substrate 22 is gradually removed, so that the stress of the metal electrodes 20a and 22a is gradually removed while the applied pressure is gradually removed from the chip 20 and the substrate 22. Therefore, it is possible to more efficiently prevent the crushed metal electrodes 20a and 22a from being crushed by the residual stress and returning to the original shape and peeling off again.

  Further, since the rotation of the piston shaft 103b is blocked by the guide 108a, the moving direction of the piston shaft 103b can be limited to only one direction, so that the positional accuracy can be improved. Further, as shown in FIG. 3B, since the rigidity of the guide 108a can be improved by using the guide 108a provided with a plurality of cylindrical rollers, the chip can be formed with a relatively strong pressure P. 20 and the substrate 22 can be pressed by the pressing body 26.

  Further, since the magnet motor shaft 110 can be pressed downward by the air cylinder 113 with a substantially constant additional pressure, the additional pressure applied by the air cylinder 113 is added to the pressure generated by the shaft motor 112 as necessary. Thus, it is possible to pressurize them with appropriate pressure depending on the chip 20 and the substrate 22.

  Further, by utilizing the air differential pressure by the air cylinder 113, the magnet motor shaft 110 can be easily pulled upward with a substantially constant traction force, and the magnet motor shaft 110 can be easily pressed downward with a substantially constant additional pressure. it can.

  In the bonding apparatus 200 described above, the pressure P0 applied to the chip 20 and the substrate 22 by the pressing body portion 26 may be set appropriately according to the material, shape, size, etc. of the metal electrodes 20a, 22a. The pressure P0 may be determined by performing test pressurization of the substrate 20 and the substrate 22, or the pressure P0 may be set as a theoretical value calculated from the hardness of the material of the metal electrodes 20a and 22a. In short, the pressurizing force P0 may be used as long as the metal electrodes 20a and 22a can be reliably pressed and crushed and the metal electrodes 20a and 22a are not destroyed by excessive pressurizing force. For example, when the metal electrode is an Au bump and 100 Au bumps having an area of 50 μm × 50 μm are formed between the bonding surfaces of the chip 20 and the substrate 22, 0. A pressure of 30 N (0.3 N × 100) can be applied so that a pressure of 3 N (120 MPa) is applied. When Cu bumps are formed instead of Au bumps, a pressure of 50 N (0.5 N × 100) is applied so that a pressure of 0.5 N (200 MPa) is applied to each Cu bump. Can be added.

  Further, the set speed VD of the pressing body portion 26 when pressing the chip 20 and the substrate 22 prevents the metal electrodes 20a and 22a from being crushed rapidly, and the ultrasonic vibration energy E is uniformly applied to the metal electrodes 20a and 22a. Any speed may be used as long as it can be applied. For example, the value of the set speed VD can be calculated as a theoretical value from the height, shape, etc. of the bumps (metal electrodes 20a, 22a). Specifically, when a bump having a height of 50 μm is formed and the tip portion of 30 μm is used as a crushing margin when pressed, the ultrasonic vibration energy E is sufficiently generated while the crushing margin of 30 μm is collapsed. The moving speed that can be given is set as the set speed VD. For example, when the bump having the above shape is an Au bump, the set speed can be set to about 4 mm / s.

  The method of increasing the applied ultrasonic vibration energy E is not limited to the method described above, and it may be increased exponentially or logarithmically. In short, the ultrasonic vibration energy E to be applied may be increased as the bonding area S increases.

  Further, as a method for always setting the amplitude at the bonding interface to be actually bonded ("relative vibration" between the chip 20 and the substrate 22) to an optimum value for bonding, the amplitude for detecting the amplitude of the chip 20 and the substrate 22 is used. A plurality of detectors may be provided, and the ultrasonic vibration energy E applied so that the amplitude between the chip 20 and the substrate 22 becomes an arbitrary constant value may be controlled. Alternatively, the amplitude of the chip 20 or the substrate 22 may be detected by an amplitude detector, and the ultrasonic vibration energy E applied so that one of the amplitudes becomes an arbitrary constant value may be controlled. As described above, when the bonding area between the metal electrodes 20a and 22a is increased, the bonding force between the objects to be bonded becomes strong. Therefore, when the ultrasonic vibration energy E is constant, the amplitude between the objects to be bonded gradually decreases. . Therefore, by increasing the ultrasonic vibration energy E applied so that the amplitude is constant between the chip 20 and the substrate 22, a constant amplitude can always be obtained at the bonding interface, so that the bonding can be performed better. it can.

  In order to obtain the amplitude between the chip 20 and the substrate 22, it is preferable to provide a plurality of amplitude detectors and measure the amplitude of the chip 20 and the substrate 22 simultaneously. After measuring the amplitude of 20 and the substrate 22, the amplitude between the chip 20 and the substrate 22 can be measured by calculating the amplitude difference in a state where the time axes are shifted and the time axes are overlapped. Further, if the chip 20 and the substrate 22 are securely held by the resonator 7 and the stage 10, it is only necessary to detect the amplitude of either the chip 20 or the substrate 22.

  As the amplitude detector, any known detector such as an eddy current type, a capacitance type, a light irradiation type or a sound wave detection type may be used. By using these means, for example, cost reduction can be achieved as compared with the case of using a laser Doppler measuring device.

  In this embodiment, the case where the object to be bonded is the chip 20 having the metal electrodes 20a and 22a and the substrate 22 has been described. However, the object to be bonded may be a material other than a semiconductor. In addition, Au, Al, Cu, or the like is suitable for the joint, but any other metal or other metal may be used as long as it can be joined by applying ultrasonic vibration.

  Further, the object to be bonded may have any form such as a chip obtained by dicing a wafer. In addition, the metal electrode as the bonding portion may have a plurality of independent bump shapes, or may have a shape in which a certain region between the objects to be bonded can be sealed between the objects to be bonded. . Moreover, you may join not the joining of electrodes but the whole one surface of a to-be-joined object as a junction part.

  Moreover, as a structure of a joining apparatus, as shown in FIG. 1, a to-be-joined object may be overlap | superposed and joined in the up-down direction (Z direction), and it overlaps and joins in the left-right direction substantially orthogonal to a Z direction. It may be configured. Further, three or more objects to be joined may be overlapped and joined.

  In addition, the “relative vibration” that occurs between the bonding surfaces of the objects to be bonded means that the amplitude required to bond the objects to be bonded by removing the oxide film etc. at the bonding part under an appropriate pressure. This is slippage at the joint interface caused by the above. The magnitude of the “relative vibration” varies depending on the material and area of the joint, but as an example, the amplitude can be about 0.1 μm to 0.5 μm.

  Next, “second operation example” and “second operation example”, which are different from the “first operation example” described above, will be described. Only the parts different from the above-mentioned “1. First operation example” will be described, and the description of the same configuration and operation will be omitted. Also in the “second operation example” and “third operation example” described below, the same effects as described above can be obtained.

2. Second Operation Example A second operation example for joining objects to be joined by the joining apparatus 200 will be described with reference to FIGS. The second operation example shown in FIG. 7 is different from the first operation example described above in that the pressure P is gradually increased when the resonator 20 pressurizes the chip 20 and the substrate 22 and is detected by the pressure sensor 114. If the applied pressure becomes a preset applied pressure PS, the current to the motor coil 111 is controlled so that the pressurization of the chip and the substrate 22 by the resonator 7 is stopped. Further, in the second operation example and the third operation example described later, at least the control relating to the moving speed of the pressing body portion 26 at the time of applying pressure to the chip 20 and the substrate 22 is not performed. Other configurations and operations are the same as those in the first operation example described above, and thus description of the configurations and operations is omitted.

  As shown in FIGS. 7A to 7C, the control device 31 is configured so that the pressure device holding unit 6 is positioned at the position (height) ZH from the stage 10 (standby position). Then, the control of the pressurizing device 100 is started, and the lowering of the pressing body portion 26 is started at time a little faster than VD that is a preset set speed from time t0. Then, when the position of the pressing body portion 26 reaches the height Z0 at time t1, the contact position deriving unit contacts the chip 20 and the substrate 22 based on the pressure detection signal from the pressure sensor 114. Then, control of the pressure applied to the chip 20 and the substrate 22 by the pressing body portion 26 and application of ultrasonic vibration are started. The contact position deriving unit can detect the contact position Z0 by detecting the change in the applied pressure based on the applied pressure detection signal when the chip 20 and the substrate 22 contact each other at the contact position Z0. it can.

  Specifically, from time t1 when the chip 20 contacts the substrate 22, the pressure applied to the chip 20 and the substrate 22 by the resonator 7 is preset based on the pressure signal from the pressure sensor 114 at time t2. Until the pressure PS is reached, that is, during the arrow DT in FIG. 7C, the chip 20 and the substrate 22 are pressed according to the material of the metal electrodes 20a and 22b as shown in FIG. 7B. Pressurize while gradually increasing P. Further, as shown in FIG. 7A, as the pressing body portion 26 is lowered, the metal electrodes 20a and 22a (joining portions) are crushed and the joining area S is increased, as shown in FIG. 7B. Furthermore, as the bonding area between the chip 20 and the substrate 22 increases, the ultrasonic vibration energy E applied to the chip 20 and the substrate 22 is increased.

  In FIG. 7A, Smax is the size of the bonding area when the pressing body portion 26 moves to the limit position ZL that may cause the chip and the substrate 22 to be destroyed. 7B, Emax is the maximum value of the ultrasonic vibration energy E applied to the chip 20 and the substrate 22, and the ultrasonic vibration energy E indicated by the alternate long and short dash line in FIG. When the position reaches the limit position ZL, the maximum value Emax is increased. While applying the ultrasonic vibration, while applying the ultrasonic vibration while confirming that "relative vibration" is generated between the chip 20 and the substrate 22 by an amplitude detector (not shown), The pressing body portion 26 is brought close to (lowered) the stage 10.

  Further, by increasing the pressure P applied by the pressing body portion 26 in accordance with the magnitude of the stress of the metal electrodes 20a and 22a that increases as the metal electrodes 20a and 22a are crushed, the pressing body portion 26 is substantially It will descend at a constant speed. And the press body part 26 is stopped in the time t2 when the pressurization force by the press body part 26 turns into the pressurization pressure PS. Then, at the time t2 when the pressing body portion 26 is stopped, the application of the ultrasonic vibration energy E to the chip 20 and the substrate 22 is finished, and thereafter, for a predetermined time ST until the time t3, Control is performed to hold the position at the stop position. At this time, by performing annealing by heating the chip 20 and the substrate 22 with the heaters 9 and 11, diffusion occurs between the metal electrodes 20a and 22b, and the stress can be removed.

  Subsequently, after the pressing body portion 26 is held at the stop position for a certain time ST, the suction of the chip 20 by the resonator 7 is released at time t3, and the pressing body portion 26 returns from the stop position to the standby position ZH. To start. At this time, the moving speed of the pressing body 26 is controlled to a value VU different from the set speed VD from the position where the movement of the pressing body 26 is stopped to the contact position Z0, that is, from time t3 to t4. . That is, in FIG. 7C, during the arrow UT, control is performed such that the magnitude of the moving speed of the pressing body portion 26 is equal to or less than VU, and as shown in FIG. The pressure P is gradually removed. In this embodiment, control is performed with the set speeds VD and VU having the same value.

  Then, from time t4 when the position of the pressing body portion 26 reaches the contact position Z0, the magnitude of the moving speed of the pressing body portion 26 is made larger than VU and moved until the pressing body portion 26 reaches the standby position ZH. The movement of the pressing body 26 is stopped at time t5 when the pressing body 26 reaches the standby position ZH. Thereafter, the substrate 22 held on the stage 10 in a state where the chip 20 is mounted is discharged to the substrate transfer conveyor 17 by the substrate transfer device 16, and a series of joining operations is completed.

  According to such a configuration, the pressing force P detected by the pressing force sensor 114 at least when the chip 20 and the substrate 22 are pressed by the pressing body portion 26 is changed to the material, shape, size, and the like of the chip 20 and the substrate 22. Accordingly, the current to the motor coil 111 is controlled so that the pressure P increases monotonously until a predetermined pressure PS set appropriately in advance is reached. Therefore, the magnet motor shaft 110 is driven by energization of the motor coil 111, and the chip 20 and the substrate 22 are pressurized with the predetermined pressure P set in advance by the pressing body portion 26. It is possible to pressurize the chip 20 and the substrate 22 with 26, and appropriately pressurize the chip 20 and the substrate 22 without excessively pressing the chip 20 and the substrate 22 with the pressing body portion 26.

  Further, the pressure P is monotonously increased as the stress generated in the pressurized chip 20 and the substrate 22 increases as the resonator 7 moves in the pressing direction, but the chip 20 by the resonator 7 increases. When the pressure applied to the substrate 22 reaches a predetermined pressure PS appropriately set in advance, the downward movement of the resonator 7 is stopped, and the chip 20 and the substrate 22 are pressurized with a higher pressure. Since the operation is stopped, the chip 20 and the substrate 22 can be prevented from being damaged or destroyed by pressurizing the chip 20 and the substrate 22 beyond a predetermined pressure force PS set in advance.

3. Third Operation Example A third operation example in which the objects to be joined are joined by the joining apparatus 200 will be described with reference to FIGS. The third operation example shown in FIG. 8 is different from the first and second operation examples described above in that the pressure P is gradually increased when the resonator 7 pressurizes the chip 20 and the substrate 22, and the position sensor 106. If it is detected that the resonator 7 (pressing body portion 26) has moved to the preset position Z2 based on the shaft position detection signal by the above, the motor coil 111 is stopped so that the downward movement of the resonator 7 is stopped. This is the point that controls the current. Other configurations and operations are the same as those in the first and second operation examples described above, and thus the description of the configurations and operations is omitted.

  As shown in FIGS. 8A to 8C, the control device 31 is configured so that the pressurizing device holding portion 6 is positioned (standby position) where the position of the pressing body portion 26 is a position (height) ZH from the stage 10. Then, the control of the pressurizing device 100 is started, and the lowering of the pressing body portion 26 is started at time a little faster than VD that is a preset set speed from time t0. Then, when the position of the pressing body portion 26 reaches the height Z0 at time t1, the contact position deriving unit contacts the chip 20 and the substrate 22 based on the pressure detection signal from the pressure sensor 114. Then, control of the pressure applied to the chip 20 and the substrate 22 by the pressing body portion 26 and application of ultrasonic vibration are started. The contact position deriving unit can detect the contact position Z0 by detecting the change in the applied pressure based on the applied pressure detection signal when the chip 20 and the substrate 22 contact each other at the contact position Z0. it can.

  Specifically, from the time t1 when the chip 20 contacts the substrate 22 to the time when the resonator 7 moves to a preset position Z2 based on the position detection signal from the position sensor 106 at the time t2, that is, FIG. During the arrow DT in FIG. 8C, the pressure P is gradually increased between the chip 20 and the substrate 22 according to the material of the metal electrodes 20a and 22b as shown in FIG. 8B. Further, as shown in FIG. 8A, as the pressing body portion 26 is lowered, the metal electrodes 20a and 22a (joining portions) are crushed and the joining area S is increased, as shown in FIG. 8B. Furthermore, as the bonding area between the chip 20 and the substrate 22 increases, the ultrasonic vibration energy E applied to the chip 20 and the substrate 22 is increased.

  In FIG. 8A, Smax is the size of the bonding area when the pressing body portion 26 moves beyond the set position Z2 to the limit position ZL that may cause the chip and the substrate 22 to be destroyed. 8B, Emax is the maximum value of the ultrasonic vibration energy E applied to the chip 20 and the substrate 22, and the ultrasonic vibration energy E indicated by the alternate long and short dash line in FIG. When the position reaches the limit position ZL, the maximum value Emax is increased. While applying the ultrasonic vibration, while applying the ultrasonic vibration while confirming that "relative vibration" is generated between the chip 20 and the substrate 22 by an amplitude detector (not shown), The pressing body portion 26 is brought close to (lowered) the stage 10.

  Further, by increasing the pressure P applied by the pressing body portion 26 in accordance with the magnitude of the stress of the metal electrodes 20a and 22a that increases as the metal electrodes 20a and 22a are crushed, the pressing body portion 26 is substantially It will descend at a constant speed. Even before the pressure P becomes the set pressure PS, if the position of the resonator 7 becomes Z2 at time t2, the pressing body portion 26 is stopped. Then, at the time t2 when the pressing body portion 26 is stopped, the application of the ultrasonic vibration energy E to the chip 20 and the substrate 22 is finished, and then the position of the resonator 7 for a predetermined time ST until the time t3. Is held at the set position (stop position) Z2. At this time, by performing thermal diffusion by heating the chip 20 and the substrate 22 with the heaters 9 and 11, diffusion occurs between the metal electrodes 20a and 22b, and stress can be removed.

  Subsequently, after holding the pressing body portion 26 at the set position Z2 for a certain time ST, the suction of the chip 20 by the resonator 7 is released at time t3, and the pressing body portion 26 is moved from the setting position Z2 to the standby position ZH. Start return movement. At this time, the moving speed of the pressing body 26 is controlled to a value VU different from the set speed VD from the position Z2 where the movement of the pressing body 26 is stopped to the contact position Z0, that is, from time t3 to t4. To do. That is, in FIG. 8 (c), during the arrow UT, control is performed so that the moving speed of the pressing body portion 26 becomes VU or less, and as shown in FIG. The pressure P is gradually removed. In this embodiment, control is performed with the set speeds VD and VU having the same value.

  Then, from time t4 when the position of the pressing body portion 26 reaches the contact position Z0, the magnitude of the moving speed of the pressing body portion 26 is made larger than VU and moved until the pressing body portion 26 reaches the standby position ZH. The movement of the pressing body 26 is stopped at time t5 when the pressing body 26 reaches the standby position ZH. Thereafter, the substrate 22 held on the stage 10 in a state where the chip 20 is mounted is discharged to the substrate transfer conveyor 17 by the substrate transfer device 16, and a series of joining operations is completed.

  According to such a configuration, when the chip 20 and the substrate 22 are pressed by the resonator 7, it is detected that the resonator 7 has moved to the preset position Z2 based on the shaft position detection signal from the position sensor 106. In order to control the current to the motor coil 111 so as to stop the downward movement of the resonator 7, the chip 20 and the substrate 22 are excessively added by moving the resonator 7 beyond the preset position Z2. It can be surely prevented from being damaged by being pressed.

  Note that the control in the second and third operation examples may be performed simultaneously. That is, if the pressing force applied to the chip 20 and the substrate 22 by the resonator 7 becomes a preset pressing force PS, or if the position of the resonator 7 becomes a preset position Z2, the lower side of the resonator 7 is reached. What is necessary is just to control the electric current to the motor coil 111 so that the movement to may be stopped. With such a configuration, the effects of the second and third operation examples described above can be achieved simultaneously.

Second Embodiment
Next, a second embodiment of the present invention will be described in detail with reference to FIG. 9 and FIG. FIG. 9 is an enlarged schematic view of a pressure device 100b in the second embodiment of the joining device 200 according to the present invention. FIG. 10 is a view showing the guide 108b of the pressure device 100b shown in FIG. This embodiment differs greatly from the first embodiment described above in that the pressing body portion 260 corresponds to a chip holding tool (a “pressing body” of the present invention) in which a chip holding tool heater 90 is built in place of the resonator 7. ) 70, and the guide 108b is formed of an air bearing. Further, the chip 20 and the substrate 22 are heated by the chip holding tool heater 90 and the stage heater 11 instead of applying ultrasonic vibration while the pressing body portion 260 is brought close to the stage 10 and the metal electrodes 20a and 22a are crushed. Yes. Since other configurations and operations are the same as those in the first embodiment, the same reference numerals are given and description of the configurations and operations will be omitted, and the following description will focus on differences from the first embodiment. .

  As shown in FIG. 9, the pressurizing apparatus 100 b includes a chip holding tool 70 including a chip holding tool heater 90, and the chip is held by the chip holding tool heater 90 and the stage heater 11 while the metal electrodes 20 a and 22 a are crushed. By heating 20 and the substrate 22, the metal electrodes 20 a and 22 a can be melted to join the chip 20 and the substrate 22.

  Further, as shown in FIG. 10B, the guide 108b provided in the pressurizing device 100b has an air introduction port 108b1, and is a static pressure air bearing portion formed around a piston shaft 103b having a polygonal cross section. By introducing air into the air 108b2 (the inner peripheral surface of the guide 108b) from the air introduction port 108b1, the piston body 103 can be linearly moved without sliding friction, and the rotation of the piston body 103 can be prevented. Therefore, in the drive system using the shaft motor 112 and the air cylinder 113, the possibility of occurrence of sliding friction that becomes a disturbance when controlling the pressure applied to the chip 20 and the substrate 22 by moving the chip holding tool 70 can be extremely reduced. Therefore, when the chip 20 and the substrate 22 are pressed by the pressing body portion 260 with a relatively weak pressure P, the pressure can be applied particularly accurately. As described above, since the chip 20 and the substrate 22 can be accurately pressed with a weak pressure P, an element that is easily broken by being pressed, such as a light emitting element (optical element), can be accurately used as the chip 20. Can be pressurized.

<Others>
The present invention is not limited to the above-described embodiments, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, when the pressing body portions 26 and 260 move beyond the sudden decrease position Z1 to the limit position ZL that may cause the chip (light emitting element) 20 and the substrate 22 to be destroyed (see FIG. 4), the pressing body portions 26 and 260. May be controlled to stop at a position not exceeding the limit position ZL. With such a configuration, the pressing body portions 26 and 260 are determined from the material, height, shape, size, and the like of the chip 20 and the substrate 22, and the limit position ZL that may cause the chip 20 and the substrate 22 to be destroyed. In the case of the movement, the pressing body portions 26 and 260 are stopped at a position not exceeding the limit position ZL.

  Therefore, for example, the hardness and height of the chip 20 and the metal electrodes 20a and 22a of the substrate 22 vary in the manufacturing process, and the pressing body portions 26 and 260 exceed the normal sudden decrease position (stop position) Z1 and reach the limit position ZL. When the chip 20 and the substrate 22 are broken, the pressing body portions 26 and 260 are stopped at positions that do not exceed the limit position ZL before the chip 20 and the substrate 22 are broken by the pressurization by the pressing body portions 26 and 260. In addition, the substrate 22 can be prevented from being destroyed. Further, as the limit position ZL, for example, a bump having a height of 50 μm is formed, and the limit position ZL is set at a position where the bump is not collapsed by 30 μm or more as a crushing margin when the tip portion 30 μm is pressed. be able to.

  In the first embodiment, the chip 20 and the substrate 22 are heated at the same time as the ultrasonic vibration is applied to melt the metal electrodes 20a and 22a, and the chip 20 and the substrate 22 are joined. Good. In the second embodiment described above, the light emitting element (chip) 20 and the substrate 22 are heated while applying ultrasonic vibration, with the pressing body portion 260 serving as the pressing body portion 26 of the first embodiment. It is good also as a structure to join.

  Further, in the first and second embodiments described above, the contact position deriving unit is configured such that the pressing body is moved to the pressed body based on the pressure detection signal when the pressing body is moving in the pressing direction. ) Although the contact position to be contacted is derived, the method of deriving the contact position is not limited to this method. In short, any method can be used as long as it can detect that the objects to be joined are in contact with each other. May be.

  In the first and second embodiments described above, the joining mechanism 27 is configured by joining the vertical drive mechanism 25 to which the pressurizing device 100 is joined to the frame 34, but the vertical drive mechanism 25 is not used. The joining mechanism may be configured by directly coupling the pressing device 100 having the pressing body portion 26 to the frame 34.

  In the first and second embodiments described above, the guide and the piston shaft 103b have a decagonal cross section. However, the cross sectional shape is not limited to the decagonal shape, and may be any shape such as a square shape. It doesn't matter. In short, any shape may be used as long as it can reliably prevent the rotation of the piston shaft 103b by the guide. A guide may be provided on the magnet motor shaft 110. Further, a cylindrical guide may be used to prevent the magnet motor shaft 110 from swaying in a direction substantially perpendicular to the major axis direction.

  In the first and second embodiments described above, the pressure receiving areas S1 and S2 of the piston head 103a are different areas, but may be the same area. The point is that any configuration can be applied to the magnet motor shaft 110 provided at the other end of the piston shaft 103b based on the calculation of the pressure P described above.

  Further, in the first and second embodiments described above, control is performed to stop the pressing body portions 26 and 260 after pressurizing the object to be pressed. This is applied by the pressing body portions 26 and 260. After the predetermined pressurization to the pressure object is completed, the pressing body portions 26 and 260 may be controlled to move to the standby position ZH without stopping.

In the first and second embodiments described above, the pressurizing apparatus according to the present invention is used as the pressurizing apparatus of the joining apparatus, but the application target of the pressurizing apparatus is not limited to this. . That is, the present invention can be applied to all apparatuses that perform press working to process a pressed body into a specific shape, such as processing a lens by pressing the pressed body such as glass. In addition, the bonding apparatus according to the present invention includes an object to be bonded (metal such as Si, SiO ₂ , glass, lithium ionic acid, oxide single crystal (surface-activated) (plasma activated treatment). LT), wafers made of oxides including ceramics, etc.) can also be used as a joining device for joining together.

  In the first and second embodiments described above, the stage 10 side is configured to have an alignment function, and the pressing body portions 26 and 260 are configured to have a vertical driving function. However, the alignment function and the vertical driving function are the stage 10 side and the pressing body portion. It may be combined in any way on the 26, 260 side, or may be configured to overlap. Moreover, although the press body parts 26 and 260 and the stage 10 are arrange | positioned in the up-down direction (arrow Z direction), as an arrangement direction, it is not limited to this, The left-right direction and the diagonal direction may be sufficient.

It is a figure showing a 1st embodiment of a joining device concerning this invention. It is an expansion schematic diagram of the pressurization apparatus of the joining apparatus shown in FIG. It is a figure which shows the guide of the pressurization apparatus shown in FIG. It is operation | movement explanatory drawing which shows the 1st operation example of the joining apparatus of FIG. It is a schematic diagram which shows the mode of joining of the to-be-joined objects using the joining apparatus of FIG. It is a schematic diagram which shows the state before and after joining of a to-be-joined object. FIG. 10 is an operation explanatory diagram illustrating a second operation example of the bonding apparatus of FIG. 1. FIG. 9 is an operation explanatory diagram illustrating a third operation example of the bonding apparatus in FIG. 1. It is an expansion schematic diagram of the pressurization apparatus in 2nd Embodiment of the joining apparatus concerning this invention. It is a figure which shows the guide of the pressurization apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Stage 100,100b Pressurizing device 102 Fluid pressure cylinder 103 Piston body 103a Piston head 103b Piston shaft 104a First pressure chamber 104b Second pressure chamber 105 Fluid circuit 106 Position sensor (shaft position detection means)
112 Shaft motor 113 Air cylinder (cancellation means, pressure force addition means)
114 Pressure sensor (Pressure detection means)
200 Bonding device 20 Chip (Pressurized object, Bonded object)
20a, 22a Metal electrode (joint)
22 Substrate (Pressurized object, Bonded object)
31 Control device (control means)
7 Resonator (pressing body)
70 Tip holding tool (pressing body)
P0 Predetermined pressure PS Predetermined pressure Z2 Setting position

Claims (7)

A magnet motor shaft provided so as to be movable in the vertical direction;
A shaft motor having a cylindrical motor coil through which the magnet motor shaft is inserted;
A pressing body that is provided at a lower end in the vertical direction of the magnet motor shaft, moves integrally with the magnet motor shaft, and presses a pressed body directly under the magnet motor shaft ;
The total weight is provided at the upper end of the magnet motor shaft in the vertical direction , and the magnet motor shaft is pulled in the direction directly above the magnet motor shaft with at least the same pulling force as the total weight of the magnet motor shaft and the pressing body. Canceling means to cancel,
A pressure detection means for detecting a pressure applied to the pressed body by the pressing body;
Control means for controlling the current to the motor coil to drive the magnet motor shaft in the vertical direction;
The canceling means is
A fluid pressure cylinder;
A piston head that is slidably disposed within the fluid pressure cylinder and separates the fluid pressure cylinder into first and second pressure chambers, one end connected to the piston head, and the other end outside the fluid pressure cylinder. A piston body having a piston shaft that is led out and connected to the upper end of the magnet motor shaft and arranged coaxially with the magnet motor shaft;
By adjusting the pressure of the fluid supplied to the first and second pressure chambers via the pressure reducing valve, the piston head connected to the upper end of the magnet motor shaft via the piston shaft is allowed to have a substantially constant traction force. And a fluid circuit that always pulls in the directly above direction,
The control means includes
At least when the pressed body is pressed by the pressing body, the applied pressure detected by the applied pressure detecting means is a predetermined applied pressure set in advance according to the material of the pressed body. A pressurizing device characterized by controlling a current to a motor coil. The canceling unit adjusts the pressure of the fluid that the fluid circuit supplies to the first and second pressure chambers via the pressure reducing valve when the pressurized body is pressurized by at least the pressing body , By pressing the piston head connected to the upper end of the magnet motor shaft through the piston shaft downward with a substantially constant additional pressure, the magnet motor shaft is pressed downward with a substantially constant additional pressure. The pressurizing apparatus according to claim 1, further comprising a function as pressurizing force adding means. The control means includes
When the pressing body is pressed by the pressing body, if the pressing force detected by the pressing force detecting means reaches a preset upper limit pressing force, the downward movement of the pressing body is stopped. pressure device according to claim 1 or 2, characterized in that for controlling the current to the motor coil. A shaft position detecting means for detecting the position of the magnet motor shaft;
The control means includes
When it is detected that the pressing body has moved to a preset position based on a shaft position detection signal from the shaft position detecting means when the pressed body is pressed by the pressing body, the pressure body moves downward. The pressure device according to any one of claims 1 to 3 , wherein a current to the motor coil is controlled so as to stop the movement of the motor coil. In the joining apparatus which pressurizes and joins the to-be-joined objects as said to-be-pressed body using the pressurization apparatus in any one of Claims 1 thru | or 4 ,
A stage disposed opposite to the pressing body,
While holding one object to be bonded with the pressing body, holding the other object to be bonded with the stage,
The control means includes
A joining apparatus characterized by pressing the joining parts of the objects to be joined together by bringing the pressing body close to the stage. A magnet motor shaft provided so as to be movable in the vertical direction;
A shaft motor having a cylindrical motor coil through which the magnet motor shaft is inserted;
A pressing body that is provided at a lower end in the vertical direction of the magnet motor shaft, moves integrally with the magnet motor shaft, and presses a pressed body directly under the magnet motor shaft ;
The total weight is provided at the upper end of the magnet motor shaft in the vertical direction , and the magnet motor shaft is pulled in the direction directly above the magnet motor shaft with at least the same pulling force as the total weight of the magnet motor shaft and the pressing body. Canceling means to cancel,
In a pressurizing method of pressurizing the pressed body with the pressing body using a pressurizing device comprising a pressing force detecting means for detecting a pressing force on the pressed body with the pressing body,
The pressure of the fluid supplied to the first and second pressure chambers of the fluid pressure cylinder separated by the piston head slidably disposed in the fluid pressure cylinder included in the canceling means is adjusted by a fluid circuit, and the like. The piston head connected to one end of a piston shaft that is led out of the fluid pressure cylinder and connected to the upper end of the magnet motor shaft and arranged coaxially with the magnet motor shaft is always kept at a substantially constant traction force. Pulling in the direction directly above,
At least when the pressed body is pressed by the pressing body, the applied pressure detected by the applied pressure detecting means is a predetermined applied pressure set in advance according to the material of the pressed body. A pressurizing method characterized by controlling a current to a motor coil. In the joining method which pressurizes and joins to-be-joined objects by the pressurization method of Claim 6 ,
While holding one object to be bonded by the pressing body, the other object to be bonded is held by a stage disposed opposite to the pressing body,
A joining method, wherein the pressing body is brought close to the stage to press and join the joining portions of the objects to be joined as the body to be pressurized.

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