JP5297749B2 - Automatic dimension measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatic dimension measurement device including a three-dimensional size and shape measuring function which enables absolute dimension measurement in a scale by single master calibration. <P>SOLUTION: A floating mechanism 11 includes: a guide table 7; and a floating table 30 engaging with a guide rail 12 on the guide table 7 and provided to be relatively movable in an X-axis direction with respect to the guide table 7 via a guide 29 comprising a direct acting bearing. An X-axis detecting head 5 is fixed to an immovable region of an X-axis, and an X-axis scale 15 opposite the X-axis detecting head 5 is provided on the floating table 30. A measurement probe 13 is provided on a floating table 29 and gripped by elastic supports 31 and 31 made of a coil spring or an air cylinder, so that measurement is carried out while applying a suitable measurement load when the probe 13 comes into contact with a workpiece 16. Thus, accurate and stable measurement results are obtained. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an automatic dimension measuring apparatus for measuring a dimension of a precision machined part such as a bearing part with high accuracy, and in particular, a three-dimensional dimension capable of measuring an absolute dimension in a scale by one master calibration. -It is related with the automatic dimension measuring apparatus provided with the shape measuring function.

  Conventionally, dimensional measurement (comparison measurement of sampling) of precision parts that are mass-produced such as rolling bearing parts is performed by making a block gauge or a dedicated master in advance and performing comparative measurement using a dial gauge. Since these measurements are comparative measurements with the master, basically there is a master or measurement table for each measurement dimension, the operator reads the gauge value, records it, and whether the part dimensions are within tolerances. It is done by judging.

  A three-dimensional comparative measuring apparatus as shown in FIG. 9 is known as an apparatus that automates such conventional dimension measurement. This three-dimensional comparative measurement apparatus is a tertiary that relatively moves a workpiece (measurement object) held on a measurement table and a probe supported by a slider of the measurement apparatus in X, Y, and Z axis directions orthogonal to each other. In the original comparative measuring device, the X / Y / Z coordinate value 51 of the workpiece and the X / Y / Z coordinate value 52 of the master are compared by the comparison operation unit 53 to calculate the subtraction value, and then this subtraction value And the dimensional tolerance input from the tolerance measuring unit 54 is measured by the comparison discriminating unit 55. This result is recorded or displayed via the recording display unit 56. Further, the calibration with respect to the temperature change is performed by the master coordinate value updating means 57. That is, the temperature calculation unit 59 checks how much the temperature measured by the workpiece temperature sensor 58 has changed from a predetermined time point, and this value is a value set in the temperature difference measuring device 61 in advance by the temperature comparison unit 60. When the value of the temperature calculation unit 59 exceeds the set value, an activation signal is output to the measurement value update command unit 62. On the other hand, a time measuring device 63 for detecting the passage of the measurement time is provided, the time from this predetermined time point is integrated by the time calculating unit 64, and this value is preset in the time difference setting unit 66 by the time comparing unit 65. When the value of the time calculation unit 64 is exceeded as compared with the value, an activation signal is issued to the measurement value update command unit 62.

This makes it possible to accurately and easily determine the quality of the workpiece, and use the determination result to quickly link other related devices. In addition, in response to changes in the environmental temperature of the measurement work, a temperature calibration function is provided, and the X, Y, Z coordinate values 51 of the model are measured again based on the update command instructed from this device, and stored in the memory. Since the stored reference data is updated, it is possible to always obtain a comparative measurement result with high accuracy (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 05-60543

  However, this conventional three-dimensional comparative measurement apparatus is premised on measurement at a position programmed in advance within one workpiece, and does not have a function as an absolute dimension measurement apparatus within the effective scale range of the measurement apparatus. In other words, there is no problem when performing comparative measurement in a short time, but if three-dimensional measurement is performed, after one master calibration is completed, if absolute dimension measurement within the effective range of the scale is not possible, rolling will occur. It is not practical in the field where measuring dimensions of precision parts that are mass-produced such as bearing parts. In other words, in the method of correcting only by this temperature information, as a factor that most affects the measurement accuracy, the straightness of each table and the change in the attitude of the guide surface must be reduced as much as possible in addition to the measurement temperature. It is difficult to accurately measure the absolute dimension of the space.

  The present invention has been made in view of such circumstances, and provides an automatic dimension measuring apparatus having a three-dimensional dimension / shape measuring function capable of measuring an absolute dimension in a scale by one master calibration. It is an object.

  In order to achieve the object, the invention according to claim 1 of the present invention is provided on a bed, a rotary table on which a workpiece is placed, a Z-axis table standing on the bed, and the Z-axis table. An X-axis table that is mounted on the axis table and can be moved relative to the Z-axis via a feed mechanism that can be positioned at any position, and a feed mechanism that is mounted on this X-axis table and can be positioned at any position It is arranged via a guide table that is relatively movable in the X-axis direction, a height measurement detector disposed on the guide table, and a floating mechanism, and is configured to be relatively movable in the X-axis direction. A Z-axis scale and a Z-axis detection head opposite to the Z-axis scale are disposed between the X-axis table and the Z-axis table, and the X-axis table and the guide table. During the X-axis scale, X-axis detection head that faces to the X-axis scale is provided, the measuring probe is supported by the elastic support portion.

  By adopting such a configuration, it is possible to perform measurement in a state where an appropriate measurement load is applied when the measurement probe comes into contact with the workpiece, and it is possible to obtain a highly accurate and stable measurement result. It is possible to provide an automatic dimension measuring apparatus having a three-dimensional dimension / shape measuring function capable of measuring an absolute dimension within a scale by master calibration.

  Preferably, as in the invention described in claim 2, the floating mechanism is provided with a floating table disposed so as to be relatively movable in the X-axis direction with respect to the guide table via a guide portion formed of a linear motion bearing. If it is provided, the measurement probe and the X-axis scale can move in a pair, and a highly accurate and stable measurement result can be obtained.

  According to a third aspect of the present invention, the feed mechanism includes a drive motor, and a ball screw mechanism that converts the rotation of the drive motor into an axial motion and relatively moves the X-axis table and the guide table. And may be provided.

  Further, as in the invention according to claim 4, if the elastic support portion is formed of a coil spring or an air cylinder and the measurement probe is sandwiched by the elastic support portion from both sides, the measurement probe, the X-axis scale, Can move in a pair, and the position where the measurement probe contacts the workpiece can be stably read with high accuracy on the X-axis scale.

  Further, as in the invention described in claim 5, if the runout data of the reference surface of the rotary table is stored in the arithmetic device in advance by the detector for measuring the height dimension, the workpiece is placed on the chuck of the rotary table. In the case of holding, it is possible to correct the runout of the reference plane by subtracting from the measurement data.

  Further, as in the invention described in claim 6, if the measurement probe is moved in the Z-axis direction in contact with the reference plane and the inflection point of the X-axis scale is obtained, the step difference from the reference plane can be measured. This makes it possible to measure the level difference of the workpiece.

  Further, as in the invention according to claim 7, the measurement probe is moved in the Z-axis direction in contact with the workpiece, the change amount of the X-axis scale is read, and the read value of the Z-axis scale is If the calculation is performed, the shape such as the curvature can be measured, and the three-dimensional shape can be measured by rotating the rotary table.

  An automatic dimension measuring apparatus according to the present invention is provided on a bed, a rotary table on which a workpiece is placed, a Z-axis table standing on the bed, and the Z-axis table, which is installed at an arbitrary position. An X-axis table that is relatively movable in the Z-axis direction via a feed mechanism that can be positioned, and a guide that is mounted on the X-axis table and can be relatively moved in the X-axis direction via a feed mechanism that can be positioned at an arbitrary position A table, a height measurement detector disposed on the guide table, and a measurement probe disposed via a floating mechanism and configured to be relatively movable in the X-axis direction. A Z-axis scale and a Z-axis detection head opposite to the Z-axis scale are disposed between the table and the Z-axis table, and an X-axis scale is connected between the X-axis table and the guide table. Since an X-axis detection head facing the X-axis scale is provided and the measurement probe is supported by an elastic support portion, measurement is performed with an appropriate measurement load applied when the measurement probe contacts the workpiece. Provided is an automatic dimension measuring device having a three-dimensional dimension / shape measuring function capable of obtaining an absolute dimension measurement within a scale by one master calibration and capable of obtaining a highly accurate and stable measurement result. be able to.

  A rotary table provided on a bed and on which a workpiece is placed, a Z-axis table standing on the bed, and a Z-axis via a feed mechanism that is mounted on the Z-axis table and can be positioned at an arbitrary position An X-axis table that can be moved relative to the direction, a guide table that is mounted on the X-axis table and that can be moved relative to the X-axis via a feed mechanism that can be positioned at any position, and is disposed on the guide table It is arranged via a floating mechanism consisting of a height measuring detector and a floating table that can move relative to the guide table in the X-axis direction via the guide part, and can be moved relative to the X-axis direction. When a Z-axis scale and a Z-axis detection head facing the Z-axis scale are arranged between the X-axis table and the Z-axis table, In, between the guide table and the X-axis table and the X-axis scale, X-axis detection head that faces to the X-axis scale is provided, the measuring probe is supported by the elastic support portion.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 is a front view showing an embodiment of an automatic dimension measuring apparatus according to the present invention, FIG. 2 is a side view of FIG. 1, and FIG. 3A shows a manual measuring instrument having a general outer diameter. Front view, (b) is a side view of (a), FIG. 4 (a) is a front view showing a manual measuring instrument of the same height as above, (b) is a side view of (a), FIG. Fig. 6 is a plan view showing a floating mechanism according to the present invention, Fig. 6 is an explanatory diagram showing a measurement operation of a stepped portion, Fig. 7 is an explanatory diagram showing an embodiment of outer diameter measurement, and Fig. 8 is an embodiment of the present invention. It is a functional block diagram of the automatic dimension measuring device.

  The configuration of the automatic dimension measuring apparatus according to the present invention will be described with reference to FIGS. This automatic dimension measuring apparatus is mounted on a rotary table (θ-axis) 2 provided on a bed 1 and a Z-axis table 3 erected on the bed 1, and an X-axis table 4 capable of relative movement in the Z-axis direction. And. The X-axis table 4 is provided with an X-axis detection head 5 and a feed mechanism 6 that can be positioned at an arbitrary position. Further, the feed mechanism 6 is provided with a guide table 7 that is relatively movable in the X-axis direction.

  The feed mechanism 6 converts a drive motor 8 fixed to one end of the X-axis table 4 and the rotation of the drive motor 8 into the X-axis direction, and guide rails 9 and 9 arranged side by side on the X-axis table 4. And a ball screw mechanism 10 for moving the guide table 7 relatively.

  On the guide table 7, a measurement probe 13 supported by a floating mechanism 11 described later and configured to be relatively movable in the X-axis direction via the guide rails 12 and 12, a detector 14 for measuring the height dimension, An X-axis scale 15 made of an optical glass scale or the like is disposed. The measurement probe 13 attached to the floating table 30 and the X-axis scale 15 are configured to perform a pair of movements, and the position where the measurement probe 13 is in contact with the object to be measured 16 (hereinafter referred to as a workpiece) can be read. it can. The work 16 is placed on the rotary table 2 described above.

  Similarly to the X-axis table 4, the Z-axis table 3 is provided with a Z-axis scale 17 made of an optical glass scale or the like and a Z-axis detection head 18, and a feed mechanism 19 that can be positioned at an arbitrary position. Is equipped. The feed mechanism 19 converts a drive motor 20 fixed to one end of the Z-axis table 3 and rotation of the drive motor 20 into the Z-axis direction, and guide rails 21 and 21 arranged in parallel on the Z-axis table 3. And a ball screw mechanism 22 for moving the X-axis table 7 relatively.

  The floating mechanism 11 is engaged with the guide table 7 and the guide rails 12 and 12 on the guide table 7, and can be moved relative to the guide table 7 in the X-axis direction via a guide portion 29 formed of a linear motion bearing. The floating table 30 is provided. The X-axis detection head 5 is fixed to the X-axis stationary part, and the X-axis scale 15 facing the X-axis detection head 5 is disposed at the end of the floating table 30. The measurement probe 13 is disposed on the floating table 30 and is sandwiched between elastic support portions 31 and 31 made of a coil spring or an air cylinder. As a result, the measurement probe 13 and the X-axis scale 15 can move in a pair, and the position where the measurement probe 13 contacts the workpiece 16 can be read by the X-axis scale 15. In other words, when the measurement probe 13 is not in contact with the workpiece 16, the measurement probe 13 supported by the elastic support portions 31 and 31 from both sides is stopped at the neutral position (reading of the X-axis scale 15). Although the value is also a constant value), the reading value of the X-axis scale 15 changes when the measurement probe 13 is moved in the X-axis direction and brought into contact with the workpiece 16. The feed can be stopped at a position where a certain amount of feed is given from this position, and the read value of the X-axis scale 15 at that position can be measured. That is, when the measurement probe 13 comes into contact with the work 16, measurement can be performed with an appropriate measurement load applied, and a highly accurate and stable measurement result can be obtained.

  Here, before explaining the comparative measurement method of the height dimension and the outer diameter dimension of the automatic dimension measuring apparatus according to the present invention, the height dimension and the outer diameter dimension of the ring-shaped parts such as the bearing parts are manually compared and measured. A method will be described.

  In order to manually compare and measure the height dimension of the ring-shaped part, a manual measuring instrument 23 as shown in FIG. 3 is generally used. The manual measuring instrument 23 includes a measurement table 24, a support column 26 standing on the measurement table 24, a fixed portion 27 attached to the support column 26 so as to be relatively movable in the Z-axis direction, and the fixed portion. 27 and a dial gauge 28 attached to 27.

  First, the master 25 is placed on the measurement table 24, the height of the fixing portion 27 is adjusted so as to correspond to the height of the master 25, and the height of the dial gauge 28 is adjusted. The average value of the readings of the dial gauge 28 when the master 25 is rotated around the measuring table 24 (one rotation) with the measuring element 28a of the dial gauge 28 in contact with the end face of the master 25 is zero position. It is said.

  Next, in place of the master 25, the work to be measured is placed on the measuring table 24, and the work piece is rotated once while the measuring element 28a of the dial gauge 28 is in contact with the work in the same manner. The average value of the readings of the dial gauge 28 becomes the workpiece height dimension, that is, the comparison value with the master 25.

  In order to manually compare and measure the outer diameter of the ring-shaped part, a manual measuring instrument 23 as shown in FIG. 4 is generally used. First, the master 25 is placed on the measurement table 24, the height of the fixing portion 27 is adjusted so as to correspond to the outer diameter of the master 25, and the height of the dial gauge 28 is adjusted. Then, the master 25 is slid in the Y-axis direction on the measuring table 24, and the reading value of the dial gauge 28 when the probe 28a of the dial gauge 28 is brought into contact with the outer diameter of the master 25 is recorded. Then, the master 25 is rotated by a predetermined amount and this operation is repeated, and one round of the master 25 is divided into several places, and the reading value of the dial gauge 28 is recorded. The average value of these readings is taken as the zero position. There is also a method of obtaining the maximum value from the read value for one round and setting this position as the zero position.

  Next, in place of the master 25, the workpiece to be measured is placed on the measurement table 24, and in the same manner, the workpiece is slid in the Y-axis direction on the measurement table 24, and the probe 28a of the dial gauge 28 is moved. The reading of the dial gauge 28 when it is brought into contact with the outer diameter of the work is recorded. Then, the work is rotated by a predetermined amount, and this operation is repeated, and one round of the work is divided into several places, and the reading value of the dial gauge 28 is recorded. The average value of these reading values becomes the outer diameter size of the workpiece, that is, a comparison value with the master 25. There is also a method in which the maximum value is obtained from the read value for one round and the value is compared with the master 25.

A comparative measuring method of the height dimension and the outer diameter dimension of the ring-shaped part by the automatic dimension measuring apparatus according to the present invention will be described with reference to FIGS. Height dimension measurement (comparative measurement)
1. A master (workpiece) 16 is set on a chuck (not shown) provided on the rotary table 2. The height measuring detector 14 is moved from the machine origin position to the vicinity of the master 16 by using a teaching mechanism (joystick) (not shown) provided in the measuring machine.
2. Next, when the measurement start switch is pressed, the height measurement detector 14 starts to contact the master 16 at a predetermined speed, and the feed is stopped when a certain amount of contact is reached. Measurement can be started from this point.
3. Thereafter, the rotary table 2 is rotated, and measurement is performed while the master 16 is rotated by one turn.
4). It is also possible to read the value of the Z-axis scale 17 when the detector 14 for measuring the height dimension is rotated once in contact with the master 16, average the measurement data, and set the measured height dimension to the zero position. However, it may be a predetermined height dimension.
5. Since the measurement of the height dimension of the master 16 is completed by such an operation, the detector 14 for measuring the height dimension is returned to the machine origin.
6). Next, the workpiece 16 to be measured is set on the rotary table 2, and the measurement data for the number of times of measurement (division number) for one round programmed in advance is automatically measured, and the difference from the already measured master 16 is calculated. In the present embodiment, any measurement location can be set by a program. That is, by performing model calibration with one master 16, it is possible to measure absolute dimensions within the effective range of the scales 15 and 17 provided on the X and Z axes.

  Here, when the master 16 is held on the chuck of the turntable 2, the surface runout of the reference surface of the turntable 2 becomes a problem, but the surface runout data of the reference surface is previously calculated by the detector 14 for height measurement. If it is stored in the memory, it can be corrected by subtracting from the measurement data.

Also, outer diameter dimension measurement (comparative measurement)
1. The master 16 is set on a chuck provided on the rotary table 2. The measuring probe 13 is moved from the machine origin position to the vicinity of the master 16 using a teaching mechanism provided in the measuring instrument.
2. Next, when the measurement start switch is pressed, the measurement probe 13 starts to contact the master 16 at a predetermined speed, and the feed is stopped when a certain amount of contact is reached. Measurement can be started from this point.
3. Thereafter, the rotary table 2 is rotated, and measurement is performed while the master 16 is rotated by one turn.
4). The amount of change in the X-axis scale 15 when the measurement probe 13 is rotated around the master 16 in contact with the master 16 is read, the measurement data is averaged, and the measured outer diameter may be set to the zero position. It is good also as an outer diameter dimension.
5. Since the measurement of the outer diameter of the master 16 is completed by such an operation, the measurement probe 13 is returned to the machine origin.
6). Next, the workpiece 16 to be measured is set on the rotary table 2, and the measurement data for the number of times of measurement (division number) for one round programmed in advance is automatically measured, and the difference from the already measured master 16 is calculated. In the present embodiment, any measurement location can be set by a program as in the measurement in the Z-axis direction. That is, the straightness relating to the running of the Z-axis table 3 and the X-axis table 4, that is, the pitching and yawing accuracy are kept high, the rotation accuracy (surface runout) of the rotary table 2, and the center of the probe ball of the measurement probe 13 By suppressing the misalignment error at the center of the θ-axis to the minimum, by performing model calibration with one master 16, each of the scales 15 and 17 arranged in the Z-axis table 3 and the X-axis table 4 Measurement of absolute dimensions within the effective range is also possible.

  Here, the workpiece 16 made of a ring-shaped part is illustrated, but the present invention is not limited to this. For example, the work 32 made of a shaft part having a diameter difference as shown in FIG. 6 may be used. That is, when measuring the step of the workpiece 32, the reference surface is obtained by moving the measuring probe 13 of the outer diameter dimension in the Z-axis direction in contact with the reference surface 32a and obtaining the inflection point of the X-axis scale 15. The step difference from 32a can be measured.

  Further, by moving the Z-axis table 3 up and down and tracing the measurement probe 13 on the workpiece 32, the shape such as curvature can be measured. That is, the curvature can be measured by moving the measurement probe 13 in the Z-axis direction in contact with the workpiece 32, reading the change amount of the X-axis scale 15, and calculating with the read value of the Z-axis scale 17. . Furthermore, three-dimensional shape measurement can be performed by rotating the rotary table 2.

  Here, when the master 16 is held on the chuck of the rotary table 2, there is inevitably misalignment between the center of the θ axis of the turntable 2 and the axis of the master 16, but accurate measurement is possible even with this misalignment. By performing the averaging process with reference to the measurement data at the 180 ° phase facing each other, it is possible to accurately measure the outer diameter dimension even when there is a slight misalignment in the X-axis direction. . That is, as shown in FIG. 7, for example, when taking data of 8 divisions on the circumference of the workpiece 16, in order to obtain an outer diameter (diameter) dimension, n = 16 measurement data Xn, which is twice the division number, is used. The outer diameter dimension X = (X1 + X2 +... + Xn) / n can be obtained by sampling and dividing the sum by n.

  In the present embodiment, when the X-axis table 4 is moved, the floating table 30 placed on the X-axis table 4 also starts the same operation (movement) via the elastic support portion 31. At this time, the value of the X-axis scale 15 changes sequentially corresponding to the movement of the floating table 30. Next, when the measurement probe 13 comes into contact with the master 16, the floating table 30 is restrained, so that the value of the X-axis scale 15 stops at that position. This position is taken as the contact start point, and the drive motor 8 is fed by an appropriate contact amount from here. Then, this position is set as a contact completion position, and data collection of the scale value of the X-axis scale 15 is started from here. Thus, since the measurement probe 13 is disposed on the floating table 29 and is sandwiched between the elastic support portions 31, 31, an appropriate measurement load can be applied when the measurement probe 13 contacts the workpiece 16. A highly accurate measurement result can be obtained, and a touch probe type such as a three-dimensional measuring machine need not be used, and stable measurement can be performed at low cost.

  The above configuration can be shown by the block diagram shown in FIG. The values of the X-axis scale 15 and the Z-axis scale 17 at each measurement point are read by the X-axis coordinate reading unit 33 and the Z-axis coordinate reading unit 34, converted by the coordinate value conversion unit 35, and the θ-axis encoder 36, respectively. Is read by the θ-axis coordinate reader 37 and converted by the coordinate value converter 35 via the angle phase calculator 38. The fetched data is stored and is subject to arithmetic processing at the same time. That is, the master coordinate value 39 already stored is taken out, and these data and the workpiece coordinate value 40 obtained by measuring the workpiece are compared and calculated by the comparison calculation unit 41. The comparison / computation value is compared with the tolerance stored in advance in the tolerance setting unit 42 by the comparison determination unit 43. The determination result display unit 44 displays pass / fail according to the comparison result. That is, when the measurement result is within the tolerance in the comparison / determination unit 43, OK is displayed as a non-defective product, and conversely, when the measurement result is out of the tolerance, the product is indicated as NG. The absolute dimension of the workpiece compared and calculated by the comparison calculation unit 41 is calculated by the absolute dimension determination unit 45 and is also displayed by the determination result display unit 44.

  The embodiment of the present invention has been described above, but the present invention is not limited to such an embodiment, and is merely an example, and various modifications can be made without departing from the scope of the present invention. Of course, the scope of the present invention is indicated by the description of the scope of claims, and further, the equivalent meanings described in the scope of claims and all modifications within the scope of the scope of the present invention are included. Including.

  The automatic dimension measuring apparatus according to the present invention can be applied as an apparatus for measuring dimensions and shapes of various parts, including comparative measurement of bearing parts such as rolling bearings.

It is a front view which shows one Example of the automatic dimension measuring apparatus which concerns on this invention. It is a side view of FIG. (A) is a front view which shows the manual measuring device of a general outer diameter size. (B) is a side view of (a). (A) is a front view which shows a manual measuring device of a height dimension same as the above. (B) is a side view of (a). It is a top view which shows the floating mechanism which concerns on this invention. It is explanatory drawing which shows the measurement operation | movement of a step part. It is explanatory drawing which shows the Example of an outer diameter measurement. It is a functional block diagram of the automatic dimension measuring device concerning the present invention. It is a block diagram which shows the function of the conventional three-dimensional comparison measuring apparatus.

Explanation of symbols

1 ... bed 2 ... rotary table 3 ... Z-axis table 4 ... X-axis table 5 ... ..... X-axis detection heads 6 and 19 ... Feed mechanism 7 ... ... Guide tables 8 and 20 ... Drive motors 9, 12, 21 ... Guide rails 10, 22... Ball screw mechanism 11... Floating mechanism 13 ... Measurement probe 14 ... Detector 15 for height measurement ...・ X axis scale 16, 25, 32 ・ Work (master)
17... Z axis scale 18... Z axis detection head 23... Manual measuring instrument 24. ·························································· Dial gauge 28a ·········· Floating table 31... Elastic support portion 32 a... Reference surface 33... X axis coordinate reading unit 34. ........ Coordinate value conversion unit 36... Θ axis encoder 37... Θ axis coordinate reading unit 38. ...... Master coordinate value 40 ... Work coordinate value 41 ... Comparison calculation unit 42 ... Tolerance setting unit 43 ... Comparison Judgment Section 44... Judgment result display section 45... Absolute dimension judgment section 51... XYZ coordinate value 52 of work 52. Value 53 ········· Comparison calculation unit 54 ········· Tolerance setting unit 55 ······ Comparison discrimination unit 56 ······ Recording display unit 57 ... Master coordinate value update means 58 ... Temperature sensor 59 ... Temperature calculation unit 60 ... Temperature comparison unit 61 ... Temperature difference Measuring device 62... Measurement value update command unit 63... Time measuring device 64... Time calculating unit 65.・ ・ ・ ・ ・ ・ Time difference measuring instrument n ・ ・ ・ Number of measurement divisions X ・ ・ ・ External diameter X1 + ・ + Xn ・ Measurement data

Claims (7)

A rotary table provided on the bed and on which the workpiece is placed;
A Z-axis table erected on the bed;
An X-axis table mounted on the Z-axis table and relatively movable in the Z-axis direction via a feed mechanism that can be positioned at an arbitrary position;
A guide table which is mounted on the X-axis table and is relatively movable in the X-axis direction via a feed mechanism which can be positioned at an arbitrary position;
A height measurement detector disposed on the guide table, and a measurement probe disposed via a floating mechanism and configured to be relatively movable in the X-axis direction;
Between the X-axis table and the Z-axis table, a Z-axis scale and a Z-axis detection head facing the Z-axis scale are disposed,
An X-axis scale and an X-axis detection head facing the X-axis scale are disposed between the X-axis table and the guide table, and the measurement probe is supported by an elastic support portion. Dimension measuring device.   2. The automatic dimension measuring apparatus according to claim 1, wherein the floating mechanism includes a floating table disposed so as to be relatively movable in the X-axis direction with respect to the guide table via a guide portion formed of a linear motion bearing.   The said feed mechanism is provided with the drive motor and the ball screw mechanism which converts rotation of this drive motor into an axial motion, and moves the said X-axis table and a guide table relatively. Automatic dimension measuring device.   The automatic dimension measuring device according to any one of claims 1 to 3, wherein the elastic support portion is formed of a coil spring or an air cylinder, and the measurement probe is sandwiched by the elastic support portion from both sides.   The automatic dimension measuring device according to any one of claims 1 to 4, wherein surface deflection data of a reference surface of the rotary table is stored in advance in the arithmetic unit by the height dimension measuring detector.   The automatic dimension measuring apparatus according to any one of claims 1 to 5, wherein the inflection point of the X-axis scale is obtained by moving the measuring probe in the Z-axis direction in contact with a reference plane.   The measurement probe according to any one of claims 1 to 6, wherein the measurement probe is moved in the Z-axis direction in contact with the workpiece, the amount of change in the X-axis scale is read, and the calculated value is calculated from the read value of the Z-axis scale. Automatic dimension measuring device.

Images