JP5274400B2 - Planar actuator mounting unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting unit of planar type actuators, wherein two planar type actuators are appropriately installed, interference of holding members is not caused, further wires are easily routed. <P>SOLUTION: A mounting frame 8 having a primary side actuator supporting frame 9 and a secondary side actuator supporting frame 10 is integrated into one unit, so that the internal angle between the primary side actuator-supporting frame 9 and the secondary side actuator-supporting frame 10 may be kept to be a prescribed angle. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a planar actuator mounting unit, and in particular, to a planar actuator for mounting and fixing a planar actuator that pivotally supports a flat movable portion on a frame-shaped fixed portion. It is about the unit.

Conventionally, as an actuator having a structure in which a plate-like movable part is pivotally supported on a frame-like fixed part, for example, using a semiconductor manufacturing technique, a silicon substrate is anisotropically etched to form a frame-like fixed part. A flat movable part and a torsion bar that pivotally supports the movable part are integrally formed on the fixed part, a drive coil is provided on the movable part, and a static magnetic field is applied to the drive coil of the movable part, for example, a static magnet such as a permanent magnet. There is an electromagnetically driven planar actuator that has a magnetic field generating means and swings the movable part by utilizing Lorentz force generated by the interaction between the magnetic field generated in the drive coil by energization and the static magnetic field generated by the static magnetic field generating means. (For example, refer to Patent Document 1).
Such an actuator is applied to, for example, an optical scanner that deflects and scans a light beam by providing a mirror on a movable part.

  When such an actuator is applied to a scanner or the like, conventionally, two actuators are used, and two-dimensional scanning is performed by swinging the movable part of each actuator in directions orthogonal to each other.

Japanese Patent No. 2722314

  However, in the prior art, in order to install the two actuators at a predetermined angle, it is necessary to align each actuator one by one using a jig for adjusting the predetermined angle. There is a problem that adjustment work is extremely difficult. In addition, when each actuator is installed, there is a possibility that a member for holding each actuator may interfere, and there is a problem that proper installation cannot be performed. Furthermore, when each actuator is installed, when electrical wiring to each actuator is performed, there is a problem that wiring is extremely difficult and the size is increased.

  The present invention has been made in view of the above-described points, and can appropriately install two actuators, without causing interference of a holding member, and can easily carry out wiring. It is an object of the present invention to provide a planar actuator mounting unit that can be miniaturized.

In order to achieve the above object, the planar actuator mounting unit according to the first aspect of the present invention mounts a primary side actuator support frame for mounting a primary side planar type actuator and a secondary side planar type actuator. Mounting a planar actuator for supporting a planar actuator for mounting the respective actuators so as to perform two-dimensional scanning by swinging a movable portion of each actuator. A unit,
The mounting frame is integrated so as to hold an inner angle formed by the primary side actuator support frame and the secondary side actuator support frame at a predetermined angle, and the primary side actuator support frame and the secondary side actuator A support frame side terminal portion provided on a support frame and electrically connected to an actuator side terminal portion of the primary side planar actuator and the secondary side planar actuator, and the primary side actuator support from the support frame side terminal portion And a wiring pattern that is routed around at least one surface of the frame, the secondary actuator support frame, and the holding member and connected to the connection terminal portion .

  According to a second aspect of the present invention, in the first aspect, the attachment frame is provided with a holding member that holds an internal angle formed by the primary side actuator support frame and the secondary side actuator support frame at a predetermined angle. It is characterized by being.

According to a third aspect of the present invention, in the first or second aspect, the support frame side terminal portion is provided in the terminal forming portion, and the terminal forming portion has a surface higher than a surface of the terminal forming portion. A dripping prevention part is formed.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the primary side actuator support frame and the secondary side actuator support frame include the primary side planar actuator and the secondary side. A yoke support concave portion or a positioning convex portion for positioning a frame-shaped yoke surrounding the static magnetic field generating member of the planar actuator is formed.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the primary-side planar actuator and the secondary-side planar type of the primary-side actuator support frame and the secondary-side actuator support frame. The surface opposite to the surface on which the actuator is mounted is an installation surface for holding the mounting frame when the primary planar actuator and the secondary planar actuator are mounted. To do.

The invention according to claim 6 is characterized in that, in any one of claims 1 to 5, the mounting frame is integrally formed by injection molding.

According to the first aspect of the present invention, the mounting frame is integrated so that the inner angle formed by the primary side actuator support frame and the secondary side actuator support frame is maintained at a predetermined angle. Since the primary-side planar actuator and the secondary-side planar actuator are mounted on the secondary actuator support frame, no jig is required to adjust the angle of each planar actuator, and the opening angle Therefore, the adjustment work is unnecessary. A support frame side terminal portion provided on the primary side actuator support frame and the secondary side actuator support frame and electrically connected to an actuator side terminal portion of the primary side planar type actuator and the secondary side planar type actuator; Since a wiring pattern is provided to be connected to the connection terminal portion by routing at least one of the surfaces of the primary side actuator support frame, the secondary side actuator support frame and the holding member from the side terminal portion. A large routing space can be secured, and the wiring pattern can be easily routed.

  According to the invention of claim 2, the mounting frame is provided with the holding member that holds the inner angle formed by the primary side actuator support frame and the secondary side actuator support frame at a predetermined angle. Further, it is possible to reinforce so that the inner angle formed by the primary side actuator support frame and the secondary side actuator support frame is securely held at a predetermined angle.

According to the invention of claim 3, the support frame side terminal portion is provided in the terminal forming portion, and the dripping prevention portion having a surface higher than the surface of the terminal forming portion is formed in the terminal forming portion. When electrically connecting the frame side terminal part and the actuator side terminal part by wire bonding etc., the actuator side terminal part and the support frame side terminal part are protected from corrosion and disconnection due to external factors. Therefore, it is possible to prevent the potting or the like from flowing out to an unnecessary portion.

According to the fourth aspect of the present invention, the frame-shaped yoke surrounding the static magnetic field generating member of the primary side planar actuator and the secondary side planar actuator is positioned on the primary side actuator support frame and the secondary side actuator support frame. Because the yoke support recess or positioning projection is formed, the yoke is bonded to the yoke support recess or positioning projection, thereby increasing the bonding area of the yoke and facilitating the positioning of the yoke. Thus, the yoke portion can be securely and accurately fixed.

According to the fifth aspect of the present invention, the surface on the side opposite to the surface on which the primary side planar actuator and the secondary side planar actuator are mounted on the primary side actuator support frame and the secondary side actuator support frame is the primary side planar type. When mounting the actuator and secondary planar type actuator, it is used as an installation surface for holding the mounting frame, so that the primary actuator support frame and the secondary actuator support frame can be properly held by this installation surface. In addition, it is possible to easily perform the mounting work of the primary side planar type actuator and the secondary side planar type actuator.

According to the invention which concerns on Claim 6, a mounting frame can be manufactured easily so that a mounting frame may be integrally formed by injection molding.

It is the schematic which shows embodiment of the planar actuator mounted in the attachment unit of the planar actuator which concerns on this invention. It is sectional drawing which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a perspective view which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a side view which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a perspective view of the primary side actuator support frame part which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a top view of the primary side actuator support frame part which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a perspective view of the secondary side actuator support frame part which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention. It is a top view of the secondary side actuator support frame part which shows embodiment of the attachment unit of the planar type actuator which concerns on this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic view showing an embodiment of a planar actuator mounted on a mounting unit according to the present invention.

  As shown in FIG. 1, the planar actuator 1 according to the present embodiment includes a frame-shaped fixing portion 2, and a flat plate-like shape is provided inside the fixing portion 2 via a pair of torsion bars 3 and 3. The movable part 4 is supported in a swingable manner.

  A drive coil (not shown) for driving the movable part 4 is provided on the movable part 4, and the opposite magnetic poles are arranged on the upper surface of the fixed part 2 with the movable part 4 interposed therebetween. A pair of static magnetic field generating members 5 are arranged. A yoke 6 is disposed on the upper surface of the fixed portion 2 so as to surround the static magnetic field generating member 5.

  2 to 6 show an embodiment of a planar actuator mounting unit according to the present invention. In this embodiment, the mounting unit 7 includes a mounting frame 8. The mounting frame 8 includes a primary side actuator support frame 9 for mounting the primary side planar type actuator 1a and a secondary side actuator support frame 10 for mounting the secondary side planar type actuator 1b. These primary-side actuator support frame 9 and secondary-side actuator support frame 10 are substantially mutually connected so that the inner angle formed by these primary-side actuator support frame 9 and secondary-side actuator support frame 10 is maintained at a predetermined angle. It is integrally fixed between a pair of holding members 11a and 11b arranged in parallel. The mounting unit 7 in this embodiment is integrally molded by injection molding. Instead of injection molding, molding may be performed by three-dimensional molding (such as three-dimensional machining) using a laser or the like.

  A primary-side planar actuator 1a is mounted on the primary-side actuator support frame 9, and the primary-side planar-type actuator 1a is arranged such that its torsion bar 3 is along the longitudinal direction of the primary-side actuator support frame 9. Yes. A plurality of actuator side terminal portions 12a for performing predetermined wiring are arranged at predetermined intervals at both ends of the fixed portion 2 of the primary side planar actuator 1a, and the primary side planar plate of the primary side actuator support frame 9 is arranged. Terminal forming portions 13a are formed along the edges of the primary-side planar actuator 1a at positions corresponding to both ends of the mold actuator 1a. A plurality of support frame side terminal portions 14a are arranged at predetermined intervals at a position corresponding to the actuator side terminal portion 12a of the terminal forming portion 13a, and a position away from the primary side planar actuator 1a of the terminal forming portion 13a. Is formed with a dripping prevention portion 15a protruding upward. A wiring pattern 16 is connected to the support frame side terminal portion 14a, and the wiring pattern 16 is routed from both ends of the primary side actuator support frame 9 to the side plate 11b.

  Furthermore, yoke support recesses 17a for supporting the lower surface and side surfaces of the yoke 6 on the primary side planar actuator 1a side are formed on both sides of the primary side actuator support frame 9, and the upper surface of the yoke support recess 17a is formed. Is formed so as to have substantially the same height as the upper surface of the fixed portion 2 of the primary-side planar actuator 1a. In addition, the lower surface of the primary side actuator support frame 9 is provided on the lower side of the primary side actuator support frame 9 when the mounting frame 8 is installed on a mounting device (not shown) for mounting the primary side planar actuator 1a. The primary installation surface 18a is parallel to the mounting surface of the primary planar actuator 1a.

  The secondary side actuator support frame 10 is mounted with a secondary side planar actuator 1b. The secondary side planar actuator 1b has a torsion bar 3 in the width direction of the secondary side actuator support frame 10. It is arranged along. That is, the primary-side planar actuator 1a and the secondary-side planar actuator 1b are arranged so as to be movable in directions orthogonal to each other.

  A plurality of actuator side terminal portions 12b for performing predetermined wiring are arranged at predetermined intervals at one end portion of the fixed portion 2 of the secondary side planar actuator 1b. A terminal forming portion 13b is formed along the edge of the secondary planar actuator 1b at a position corresponding to one end of the secondary planar actuator 1b. A plurality of support frame side terminal portions 14b are arranged at predetermined intervals at positions corresponding to the actuator side terminal portions 12b of the terminal forming portion 13b, and are separated from the secondary planar type actuator 1b of the terminal forming portion 13b. A dripping prevention part 15b protruding upward is formed at the position. A wiring pattern 16 is connected to the support frame side terminal portion 14b, and the wiring pattern 16 is routed from the side portion of the secondary side actuator support frame 10 to the holding member 11b. Furthermore, a yoke support recess 17b for supporting the lower surface of the yoke 6 of the secondary planar actuator 1b is formed on both sides of the secondary actuator support frame 10, and the upper surface of the yoke support recess 17b is The secondary side planar actuator 1b is formed so as to have substantially the same height as the upper surface of the fixed portion 2. Further, a positioning convex portion 19 for positioning when the yoke 6 is mounted is formed on one side edge of the yoke supporting concave portion 17b. The portion corresponding to the positioning convex portion 19 of the yoke 6 on the secondary planar type actuator 1b side is formed with a concave portion so that the positioning convex portion 19 can be fitted.

  Further, when the mounting frame 8 is installed on the mounting device (not shown) for mounting the secondary side planar actuator 1b, the lower surface of the secondary side actuator support frame 10 is attached to the secondary side actuator of the mounting frame 8. The secondary installation surface 18b is parallel to the mounting surface of the secondary planar actuator 1b so that the support frame 10 can be held horizontally.

  Further, the holding member 11b is formed with a plurality of connection terminal portions 20, 20... That are electrically connected to a control device (not shown). The connection terminal portion 20 is pulled from the primary actuator support frame 9. The rotated wiring pattern 16 and the wiring pattern 16 routed from the secondary actuator support frame 10 are connected to each other. On the other hand, the holding member 11a of the present embodiment is configured as a surface for holding the mounting unit 7 horizontally. In the present embodiment, the wiring pattern 16 is not formed, but the wiring pattern 16 and the like are formed. You may make it do. These holding members 11a and 11b have a function of reinforcing the inner angle formed by the primary side actuator support frame 9 and the secondary side actuator support frame 10 so as to be reliably held at a predetermined angle. It is not limited to a planar shape, and may be a beam shape or the like. Further, if the strength is ensured only by the mounting frame 8, it is not always necessary.

  The support frame side terminal portions 14a and 14b, the wiring pattern 16 and the connection terminal portion 20 are integrally formed on the mounting unit 7 by surface wiring, and the routing route of the wiring pattern 16 is arbitrarily set. The connecting terminal portion 20 may also be formed at an arbitrary position.

  Next, the operation of this embodiment will be described.

  First, a method for mounting the primary side planar actuator 1a and the secondary side planar actuator 1b on the mounting frame 8 will be described.

  First, the primary side installation surface 18a of the attachment frame 8 is installed on a predetermined mounting device to hold the primary side actuator support frame 9 horizontally. Thus, the primary side installation surface 18a is provided, and the primary side actuator support frame 9 can be properly held by the primary side installation surface 18a, and the primary side planar actuator 1a can be easily mounted. Is.

  In this state, the primary planar actuator 1a is mounted on the primary actuator support frame 9 of the attachment frame 8. At this time, the yoke 6 of the primary-side planar actuator 1a is brought into contact with the rising portion of the yoke support recess 17a for positioning, and the primary-side planar actuator 1a is bonded to the primary-side actuator support frame 9, and the yoke 6 is Adhere to the yoke support recess 17a. At this time, the yoke 6 is fixed not only to the bottom surface of the yoke support recess 17a but also to the rising portion of the yoke support recess 17a, so that the yoke 6 can be fixed in two surfaces (two directions). Can be securely fixed.

  Next, after electrically connecting the support frame side terminal portion 14a of the primary side actuator support frame 9 and the actuator side terminal portion 12a of the primary side planar actuator 1a by wire bonding or the like, the actuator side terminal portion 12a is made by potting or the like. And the support frame side terminal portion 14a are protected from corrosion and disconnection due to external factors. At this time, in this embodiment, since the dripping prevention part 15a protruding upward is formed at a position away from the primary side planar actuator 1a of the terminal forming part 13a, potting is performed at the time of potting or the like. It is possible to reliably prevent a connection failure of the connection terminal portion 20 due to the resin or the like sagging toward the wiring pattern 16 side.

  Similarly, the secondary side actuator support frame 10 of the mounting frame 8 with the secondary side installation surface 18b of the mounting frame 8 installed on a predetermined mounting device and the secondary side actuator support frame 10 held horizontally. The secondary planar type actuator 1b is mounted on the. At this time, the notch portion of the yoke 6 of the secondary-side planar actuator 1b and the positioning convex portion 19 are fitted and positioned, and the secondary-side planar actuator 1b is bonded to the secondary-side actuator support frame 10. The yoke 6 is bonded to the yoke support recess 17 b and the positioning protrusion 19. At this time, the yoke 6 can be securely fixed by adhering the yoke 6 to the bottom and rising portions of the yoke support recess 17b and the positioning projection 19.

  Next, the support frame side terminal part 14b of the secondary side actuator support frame 10 and the actuator side terminal part 12b of the secondary side planar actuator 1b are electrically connected by wire bonding or the like. Thereafter, the actuator-side terminal portion 12b is protected from corrosion or the like by potting or the like.

  After the mounting frame 8 on which the primary side planar type actuator 1a and the secondary side planar type actuator 1b are mounted in this way is installed at a predetermined position of the device provided with the predetermined optical device and the control device, the side plate 11b By connecting the connection terminal portion 20 to the control device side, the mounting of the mounting frame 8 is completed.

  In this state, the two-dimensional scanning of the light irradiated from the optical device is performed by swinging the movable part 4 of the primary-side planar actuator 1a and the movable part 4 of the secondary-side planar actuator 1b in directions orthogonal to each other. Is possible. The driving principle when the movable part 4 of the planar actuator is vibrated in the torsion mode is described in detail in, for example, Japanese Patent No. 2722314, and will be briefly described below.

  That is, when a current is passed through the drive coil of the movable part 4, Lorentz force is generated by the interaction with the static magnetic field generated by the static magnetic field generating means, and the opposite sides of the movable part 4 parallel to the axial direction of the torsion bar 3 are opposite to each other. Directional rotational force is generated, and the movable part 4 swings. Since the rotational force for swinging the movable portion 4 is proportional to the drive current value flowing through the drive coil, the swing angle of the movable portion 4 is controlled by controlling the drive current value supplied to the drive coil. Can do.

  Therefore, when predetermined light is incident on the movable portion 4 of the primary planar actuator 1a from the optical device, the incident light from the optical device is one-dimensionally moved by the swinging operation of the movable portion 4 of the primary planar actuator 1a. It is scanned and reflected toward the movable part 4 of the secondary-side planar actuator 1b. The reflected light from the primary-side planar actuator 1a is scanned in a direction orthogonal to the scanning direction by the primary-side planar actuator 1a by the swinging motion of the movable portion 4 of the secondary-side planar actuator 1b, and a predetermined output is obtained. Reflect on the part. This makes it possible to manipulate light from the optical device in two dimensions.

  As described above, in the present embodiment, the attachment frame 8 is provided with the primary side actuator support frame 9 and the secondary side actuator support frame 10 that are held at a predetermined angle. Since the primary-side planar actuator 1a and the secondary-side planar actuator 1b are mounted on the secondary-side actuator support frame 10 respectively, it is not necessary to adjust the angle of each actuator, and a two-dimensional actuator can be obtained. Further, the wiring pattern 16 routed from the primary actuator support frame 9 and the wiring pattern 16 routed from the secondary actuator support frame 10 are arranged on the holding member 11, and the wiring pattern 16 is connected to the connection terminal portion. Therefore, a large space for routing the wiring pattern 16 can be ensured, and the wiring pattern 16 can be easily routed.

  In addition, this invention is not limited to the said embodiment, A various deformation | transformation is possible based on the meaning of this invention.

DESCRIPTION OF SYMBOLS 1a Primary side planar type actuator 1b Secondary side planar type actuator 2 Fixed part 3 Torsion bar 4 Movable part 5 Static magnetic field generating member 6 Yoke 7 Mounting unit 8 Mounting frame 9 Primary side actuator supporting frame 10 Secondary side actuator supporting frame 11a, 11b Holding member 12a, 12b Actuator side terminal part 13a, 13b Terminal forming part 14a, 14b Support frame side terminal part 15a, 15b Dripping prevention part 16 Wiring pattern 17a, 17b Yoke support recessed part 18a Primary side installation surface 18b Secondary side installation Surface 19 Positioning convex part 20 Connection terminal part

Claims (6)

A primary side actuator support frame for mounting the primary side planar type actuator, and a mounting frame comprising a secondary side actuator support frame for mounting the secondary side planar type actuator. A planar actuator mounting unit capable of installing the actuators so as to perform two-dimensional scanning by swinging;
The mounting frame is integrated so as to hold an inner angle formed by the primary side actuator support frame and the secondary side actuator support frame at a predetermined angle, and the primary side actuator support frame and the secondary side actuator A support frame side terminal portion provided on a support frame and electrically connected to an actuator side terminal portion of the primary side planar actuator and the secondary side planar actuator, and the primary side actuator support from the support frame side terminal portion A planar actuator mounting unit comprising: a frame; a wiring pattern connected to a connection terminal portion by routing at least one surface of the secondary actuator support frame and the holding member; .   2. The planar according to claim 1, wherein the mounting frame is provided with a holding member that holds an inner angle formed by the primary side actuator support frame and the secondary side actuator support frame at a predetermined angle. Type actuator mounting unit. Claim wherein the support frame side terminal portion is provided in the terminal portion, the terminal forming portion, characterized in that the sag preventing part solution having a higher surface of the terminal forming portion surface is formed A planar actuator mounting unit according to claim 1 or 2 . The primary actuator support frame and the secondary actuator support frame include yoke support recesses for positioning a frame-shaped yoke surrounding a static magnetic field generating member of the primary planar actuator and the secondary planar actuator. 4. The planar actuator mounting unit according to claim 1, further comprising a positioning convex portion . The surface of the primary side actuator support frame and the side of the secondary side actuator support frame opposite to the surface on which the primary side planar type actuator and the secondary side planar type actuator are mounted are the primary side planar type actuator and the secondary side. 5. The planar actuator mounting unit according to claim 1, wherein the mounting unit is a mounting surface for holding the mounting frame when the side planar actuator is mounted. 6. . The planar actuator mounting unit according to any one of claims 1 to 5, wherein the mounting frame is integrally formed by injection molding.

Images