JP5205643B2 - Surface texture measuring device, contact model generation method thereof, and program - Google Patents

Description

  The present invention relates to a surface property measuring apparatus such as a three-dimensional measuring machine that performs displacement measurement using a contact, a contact model generation method thereof, and a contact model generation program.

  In a contact measurement method using a contact type probe (contact), it is generally assumed that the tip of the contact is a sphere, and the center position is given as a measurement point. Since the measurement point in this case is different from the position where the contact is in contact with the object to be measured, the measurement point includes an error with respect to the actual shape of the object to be measured. Accordingly, such measurement points are referred to herein as pseudo measurement points. The error between the pseudo measurement point and the true measurement point is eliminated by offsetting the tip sphere by the radius of the tip sphere, considering the shape of the contactor as an ideal sphere. Can be obtained.

  However, the position on the object to be measured depends on the shape of the contact, and it is necessary to consider the shape of the contact in order to obtain a highly accurate measurement point. With the recent improvement in measurement accuracy, there has been a situation where sufficient accuracy cannot be obtained with the conventional correction processing in which the contact shape is an ideal sphere. Development of a highly accurate measurement point acquisition method is desired.

  For this reason, Patent Document 1 discloses that an object to be measured resulting from a contact shape error is obtained by using contact shape error data obtained by measuring a reference workpiece whose calibration reference shape is known. There has been proposed a surface texture measuring apparatus which corrects the measurement error.

  However, the technique disclosed in Patent Document 1 drives a contactor in the three-axis directions of XYZ to measure the reference workpiece. In general, the measurement accuracy deteriorates as the number of driven axes increases. Therefore, in the three-axis drive, the influence of the error becomes large, and a contactor model cannot be generated with sufficiently high accuracy.

JP 2002-357415 A

  The present invention provides a surface texture measuring apparatus capable of generating a three-dimensional contact model with high accuracy, a contact model generation method thereof, and a program.

  The surface texture measuring apparatus according to the present invention includes a contactor whose tip can be in contact with an object to be measured, a first axis in the horizontal direction and a second axis orthogonal to each other, and a third axis in the vertical direction. Contact driving means for moving, and pseudo measurement point acquisition means for driving the contact so as to follow the surface of the object to be measured by the contact driving means and acquiring the tip position of the contact as a pseudo measurement point; Calculating means for calculating a surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contact model defining a tip shape of the contact; and a reference work having a reference shape as the contact In the surface texture measuring device comprising contact model calculation means for calculating the three-dimensional contact model by copying with a child, the contact drive means rotates the contact about the third axis. Drive The contactor model calculating means moves the contactor along the first axial direction and the third axial direction by the contactor driving means at each of a plurality of rotational positions of the rotationally driven contactor. The pseudo-measurement point is acquired by moving the reference workpiece and measuring it, and the three-dimensional contactor model is calculated based on the acquired pseudo-measurement point.

  A contactor model generation method for a surface texture measuring device according to the present invention includes a contactor whose tip can be in contact with an object to be measured, a horizontal first axis and a second axis orthogonal to each other, and a vertical direction. A contact driving means that moves along the third axis, and the contact driving means drives the contact so as to follow the surface of the object to be measured, and obtains the tip position of the contact as a pseudo measurement point. Surface comprising: pseudo measurement point acquisition means; and calculation means for calculating the surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contact model that defines the tip shape of the contact A contactor model generation method for a property measuring device, wherein the contactor is rotated about the third axis, and the contactor driving means is used to rotate the contactor at each of a plurality of rotational positions of the contactor. The first Moving along the direction and the third axis direction, measuring the reference workpiece by copying, obtaining the pseudo measurement point, and calculating the three-dimensional contactor model based on the obtained pseudo measurement point To do.

  A contactor model generation program for a surface texture measuring device according to the present invention includes a contactor whose tip can contact an object to be measured, a horizontal first axis and a second axis perpendicular to each other, and a vertical direction A contact driving means that moves along the third axis, and the contact driving means drives the contact so as to follow the surface of the object to be measured, and obtains the tip position of the contact as a pseudo measurement point. Surface comprising: pseudo measurement point acquisition means; and calculation means for calculating the surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contact model that defines the tip shape of the contact A contact model generation program for a property measuring device, wherein the computer rotates the contact about the third axis, and the contact driver is rotated at each of a plurality of rotational positions of the contact. The contact is moved along the first axis direction and the third axis direction by means to measure the reference workpiece to obtain the pseudo measurement point, and based on the obtained pseudo measurement point, the three-dimensional A contactor model is calculated.

  ADVANTAGE OF THE INVENTION According to this invention, the surface property measuring apparatus which can produce | generate a three-dimensional contactor model with high precision, its contactor model production | generation method, and a program can be provided.

It is an external appearance perspective view which shows schematic structure of the surface texture measuring apparatus which concerns on 1st Embodiment of this invention. It is an enlarged view which shows the stylus 23 and the contactor 24 of the surface texture measuring apparatus which concerns on 1st Embodiment. It is a block diagram which shows the structure of the arithmetic processing unit main body 31 of the surface texture measuring apparatus which concerns on 1st Embodiment. It is a flowchart which shows operation | movement of the surface texture measuring apparatus which concerns on 1st Embodiment. It is a figure for demonstrating the operation | movement of step S101. It is a figure which shows the pseudo | simulation measurement point Pi. It is a figure which shows the two-dimensional contactor model M1i. It is a figure for demonstrating operation | movement of step S103. It is a figure for demonstrating operation | movement of step S105. It is a figure for demonstrating operation | movement of step S105. It is a figure which shows the three-dimensional contactor model M2. It is a flowchart explaining operation | movement of step S105. It is a figure for demonstrating operation | movement of step S205. It is a figure for demonstrating operation | movement of step S205. It is a flowchart which shows operation | movement of the surface texture measuring apparatus which concerns on 2nd Embodiment of this invention. It is a figure for demonstrating "three-dimensional pseudo measurement point P1ij" in step S304, S305. It is a figure for demonstrating the reference | standard shape M4 (M4A, M4B, M4C).

  Next, an embodiment according to the present invention will be described with reference to the drawings.

[First Embodiment]
(Configuration of surface texture measuring apparatus according to the first embodiment)
First, the configuration of the surface texture measuring apparatus according to the first embodiment will be described with reference to FIG. FIG. 1 is an external perspective view of a surface texture measuring device (shape measuring device) according to the first embodiment.

  This surface texture measuring device includes a measuring machine main body 1 and an arithmetic processing device 2 connected to the measuring machine main body 1 via a drive control device 1a. The measuring machine main body 1 is mounted on the base 3, a table 5 provided on the base 3 for placing a reference work 4 (a measured object having a known reference shape), and the table 5. A displacement detection device 6 for detecting the displacement of the surface of the reference workpiece 4 and an operation unit 7 for operating them are configured. The table 5 is configured to be movable on the base 3 in the X-axis direction (left-right direction) in the figure and the Y-axis direction (direction orthogonal to the paper surface) in the figure. Further, the table 5 has a configuration with an inclination adjustment function capable of adjusting the placement surface of the reference workpiece 4 to an arbitrary posture.

  The displacement detection device 6 is configured as follows. That is, a column 21 extending upward is erected on the base 3, and a slider 22 is mounted on the column 21 so as to be movable up and down. A stylus 23 is attached to the slider 22. The stylus 23 is configured to be drivable in the horizontal (X-axis, Y-axis) and vertical (Z-axis) directions, and a contactor 24 is provided at the tip thereof. That is, the stylus 23 is configured to be movable relative to the table 5. The contact 24 is configured such that the tip thereof can contact the object to be measured.

  As shown in FIG. 2, the contactor 24 extends downward from the lower surface of the tip of the stylus 23 and is configured to be rotatable about a direction perpendicular to the table 5 (Z-axis direction) as a rotation axis. The column 21, the slider 22, and the stylus 23 constitute contactor driving means including rotational driving of the contactor 24.

  The slider 22 and the stylus 23 are moved, and the contact 24 is scanned (traced) on the surface of the reference workpiece 4, whereby the surface height Z at each position in the X-axis direction is measured data (pseudo measurement point Pi). It has come to be obtained. Further, the scan line (measurement path) extending in the X-axis direction can be switched by moving the reference workpiece 4 in the Y-axis direction with the table 5.

  The arithmetic processing device 2 takes in the pseudo measurement point Pi obtained by the displacement detection device 6. The arithmetic processing device 2 includes an arithmetic processing device main body 31 that executes arithmetic processing, an operation unit 32, and a display screen 33. In addition, the arithmetic processing device 2 is configured to be able to control the operation of the measuring machine main body 1 in the same manner as the operation unit 7.

  Next, the configuration of the arithmetic processing unit main body 31 will be described with reference to FIG. FIG. 3 is a block diagram showing a configuration of the arithmetic processing unit main body 31 according to the embodiment of the present invention.

  As shown in FIG. 3, the arithmetic processing unit main body 31 mainly includes a control unit (CPU: Central Processing Unit) 41, a RAM (Random Access Memory) 42, a ROM (Read Only Memory) 43, and an HDD (Hard Disk Drive). 44 and a display control unit 45. In the arithmetic processing unit main body 31, code information and position information input from the operation unit 32 are input to the control unit 41 via the I / F 46a. The control unit 41 executes various processes according to the macro program stored in the ROM 43 and the various programs stored in the RAM 42 from the HDD 44 via the I / F 46b.

  The control unit 41 controls the measuring machine main body 1 via the I / F 46c according to the measurement execution process. The HDD 44 is a recording medium that stores various control programs. The RAM 42 stores various programs and provides a work area for various processes. In addition, the control unit 41 displays measurement results and the like on the display screen 33 via the display control unit 45.

  The control unit 41 reads out various programs from the HDD 44 and executes the programs to execute operations shown in FIGS. 4 and 12 described later. The control unit 41 controls the column 21, the slider 22, and the stylus 23 to move the contactor 24 along the horizontal X axis and Y axis that are orthogonal to each other and the vertical Z axis. At the time of measurement, the control unit 41 drives the contactor 24 so as to follow the surface of the object to be measured, and acquires the tip position of the contactor 24 as a pseudo measurement point Pi. The control unit 41 calculates the surface shape of the object to be measured based on the acquired pseudo measurement point Pi and the three-dimensional contact model M2 that defines the tip shape of the contact 24. The control unit 41 calculates the three-dimensional contact model M2 by measuring the reference workpiece 4 having the reference shape by copying with the contact 24.

  In addition, the control unit 41 controls a drive mechanism inside the stylus 23 (not shown) to drive the contactor 24 to rotate about the Z axis. The control unit 41 moves the contactor 24 along the X-axis direction and the Z-axis direction to measure the reference workpiece 4 at each of a plurality of rotational positions of the contactor 24 that is rotationally driven, thereby measuring the pseudo measurement point Pi. And the three-dimensional contactor model M2 is calculated based on the acquired pseudo measurement point Pi.

  Further, the control unit 41 calculates a two-dimensional contact model M1i based on the acquired pseudo measurement point Pi at each rotational position of the contact 24, and the two-dimensional contact at each calculated rotational position of the contact 24. A model Mi is synthesized to calculate a three-dimensional contact model M2.

  In addition, the control unit 41 arranges the three-dimensional contactor model M0 given as an initial value or the calculated three-dimensional contactor model in the virtual space at the pseudo measurement point Pi, and the three-dimensional contactor model and the reference work 4 is checked, and the process of correcting the three-dimensional contactor model based on the contact state is repeated.

(Operation of the surface texture measuring device according to the first embodiment)
Next, the operation of the surface texture measuring apparatus according to the first embodiment will be described with reference to FIG. FIG. 4 is a flowchart showing the operation of the surface texture measuring apparatus according to the first embodiment.

  First, the control unit 41 scans the stylus 23 in the X-axis direction and acquires a pseudo measurement point Pi (step S101). For example, as shown in FIG. 5, the stylus 23 is scanned in the X-axis direction so that the contact 24 contacts the surface of the reference workpiece 4 (work surface S0). As shown in FIG. 6, the pseudo measurement point Pi is a point indicating a predetermined position of the contact 24 when contacting the reference workpiece 4. A line segment connecting the plurality of pseudo measurement points Pi constitutes the pseudo measurement surface S1 with a predetermined distance from the work surface S0.

  Next, the control unit 41 generates a two-dimensional contactor model M1i based on the pseudo measurement point Pi (step S102). The two-dimensional contact model M1i is represented as a set of discrete point sequences as shown in FIG.

  Subsequently, the control unit 41 rotates the contactor 24 by a predetermined angle around the Z-axis direction (step S103). As shown in FIG. 8, the contactor 24 rotates at a predetermined position after crossing the reference workpiece 4.

  Next, the control unit 41 determines whether or not the contactor 24 has rotated 180 ° (step S104). Here, if the control part 41 judges that the contactor 24 has not rotated 180 degrees (step S104, N), it will perform the control from step S101 again. That is, the control unit 41 calculates the two-dimensional contactor model M1i based on the acquired pseudo measurement point Pi at each rotational position of the contactor 24 until the contactor 24 rotates 180 °.

  On the other hand, when the control unit 41 determines that the contactor 24 has rotated 180 ° (step S104, Y), the control unit 41 synthesizes the two-dimensional contactor model M1i at each rotation position of the calculated contactor 24 to generate a three-dimensional contact. A child model M2 is generated (step S105).

  As shown in FIG. 9, the three-dimensional contact model M2 includes a plurality of two-dimensional contact models M1i representing a plurality of planes (plane-1, plane-2, plane-3,..., Plane-i,...). Generated by overlapping. For example, as shown in FIG. 10, the coordinates of the vertex ci of the two-dimensional contactor model M1i may be different from the coordinates of the vertex cj of the two-dimensional contactor model M1i. In this case, the coordinate system of the two-dimensional contactor model M1i or the two-dimensional contactor model M1j is translated, and the vertex ci and the vertex cj are matched with the coordinate of the vertex c. As shown in FIG. 11, the three-dimensional contactor model M2 generated through such a process is represented as a set of discrete point sequences. Thus, the operation of the control unit 41 ends.

  Next, the details of step S105 described above will be described with reference to FIG. FIG. 12 is a flowchart showing step S105 of FIG.

  First, the control unit 41 represents the pseudo measurement surface S1 and the work surface S0 in the same coordinate system in the virtual space (see FIG. 6). That is, the control unit 41 aligns the pseudo measurement surface S1 and the workpiece surface S0 (step S201). For example, it is assumed that a sphere is applied to the pseudo measurement surface S1, and the center of the reference workpiece 4 is located at the center position of the sphere.

  Subsequently, the control unit 41 receives an input of the initial three-dimensional contact model M0 as an initial value (step S202). Here, the initial three-dimensional contact model M0 is determined by the nominal value of the contact 24, for example. Next, the control unit 41 places the initial three-dimensional contactor model M0 at the pseudo measurement point Pi of the pseudo measurement surface S1 (step S203).

  Subsequently, the control unit 41 confirms the contact state between the initial three-dimensional contact model M0 and the work surface S0 (step S204). Next, the control unit 41 corrects the initial three-dimensional contactor model M0 based on the contact state (step S205). Here, as shown in FIG. 13, when the initial three-dimensional contact model M0 bites into the work surface S0, the initial three-dimensional contact model M0 is corrected so as to contact the work surface S0. As shown in FIG. 14, when the initial three-dimensional contact model M0 is away from the work surface S0, the initial three-dimensional contact model M0 is corrected so as to come into contact with the work surface S0.

  Next, the control unit 41 determines whether or not the corrected value is less than a predetermined value (step S206). If the control unit 41 determines that the corrected value is not less than the predetermined value (step S206, N), the control unit 41 executes the operation from step S203 again. In the subsequent operation from step S203, the control unit 41 uses the three-dimensional contactor model calculated in the processing up to step S206.

  On the other hand, when the control unit 41 determines in step S206 that the corrected value is less than the predetermined value (step S206, Y), the operation ends. Note that the shape of the three-dimensional contact model converges to a predetermined value by repeatedly executing the processes of steps S203 to S206.

(Effects of the surface texture measuring device according to the first embodiment)
Next, effects of the surface texture measuring apparatus according to the first embodiment will be described. The surface texture measuring apparatus according to the first embodiment generates a three-dimensional contactor model M2 only by scanning the stylus 23 in the X-axis direction and rotating the contactor 24 around the Z-axis direction, that is, by two-axis driving. Can do. Therefore, since the surface texture measuring device according to the first embodiment has fewer drive shafts that cause errors than the device that generates a three-dimensional contact model by three-axis driving, the three-dimensional contact model M2 is highly accurate. Can be generated.

  Here, in the case of a three-axis-driven surface texture measuring device, the work used when generating a three-dimensional contactor model is limited to a sphere (hemisphere) shape. On the other hand, since the surface texture measuring apparatus according to the first embodiment is biaxially driven, the reference workpiece 4 used for generating the three-dimensional contactor model is not limited to a sphere (hemisphere), but is a semi-cylinder or a triangular prism. May be. That is, in the surface texture measuring apparatus according to the first embodiment, calibration measurement can be diversified, and its usability is improved.

[Second Embodiment]
(Configuration of Surface Texture Measuring Device According to Second Embodiment)
Next, the configuration of the surface texture measuring device according to the second embodiment will be described. In the surface texture measuring apparatus according to the second embodiment, only the control unit 41 is different from the first embodiment. Note that in the second embodiment, identical symbols are assigned to configurations similar to those in the first embodiment and descriptions thereof are omitted.

  In the second embodiment, the control unit 41 converts the acquired pseudo measurement point Pi at each rotational position of the contactor 24 according to the coordinate conversion according to the rotational position of the contactor 24 to obtain a three-dimensional pseudomeasurement point P1ij. The three-dimensional contact model M2 is calculated from the above.

(Operation of the surface texture measuring device according to the second embodiment)
Next, the operation of the surface texture measuring apparatus according to the second embodiment will be described with reference to FIG. FIG. 15 is a flowchart showing the operation of the surface texture measuring apparatus according to the second embodiment.

  First, the control unit 41 scans the stylus 23 in the X-axis direction and acquires a pseudo measurement point Pi (step S301). Next, the control unit 41 rotates the contactor 24 by a predetermined angle around the Z-axis direction (step S302).

  Subsequently, the control unit 41 determines whether or not the contactor 24 has rotated 180 ° (step S303). Here, when the control unit 41 determines that the contactor 24 has not rotated 180 ° (step S303, N), the control unit 41 executes the control from step S301 again.

  On the other hand, when the control unit 41 determines that the contactor 24 is rotated by 180 ° (step S303, Y), the control unit 41 performs coordinate conversion of the acquired pseudo measurement point Pi according to the rotation position of the contactor 24, A three-dimensional pseudo measurement point P1ij is generated (step S304). Next, the control unit 41 generates a reference shape M4 based on all the three-dimensional pseudo measurement points P1ij (step S305). Details of the three-dimensional pseudo measurement point P1ij and the reference shape M4 will be described later.

  Subsequently, the control unit 41 generates a three-dimensional contactor model M2 based on the reference shape M4 (step S306). Thus, the operation of the control unit 41 ends.

  Next, with reference to FIG. 16 and FIG. 17, “three-dimensional pseudo measurement point P1ij” and “reference shape M4” in steps S304 and S305 will be described.

  As shown in FIG. 16, in the actual measurement, the measurement [A], [B] is performed by scanning the stylus 23 in the X-axis direction along the same path on the reference workpiece 4. In the measurements [A] and [B], the contactor 24 rotates by α °.

  On the other hand, as shown in FIG. 16, assuming a measurement in which the contact 24 does not rotate, actual measurements [A] and [B] are converted into measurements [A ′] and [B ′]. That is, in the measurements [A ′] and [B ′], the contact 24 does not rotate. In measurement [A ′], the stylus 23 is scanned in the X-axis direction, and in measurement [B ′], the stylus 23 is scanned in a direction having an angle of α ° with respect to the X-axis direction. A value corresponding to the case where the pseudo measurement points Pi in the measurements [A] and [B] are converted into the above measurements [A ′] and [B ′] is “three-dimensional pseudo measurement points P1ij”.

  The control unit 41 generates a reference shape M4 (M4A, M4B, M4C) as shown in FIG. 17 based on the three-dimensional pseudo measurement point P1ij, and generates a three-dimensional contactor model M2.

  For example, as shown in FIG. 17, when the actual reference workpiece 4A is a semi-cylinder, the reference shape M4A generated based on the three-dimensional pseudo measurement point P1ij is a hemisphere. When the actual reference workpiece 4B is a triangular prism, the reference shape M4B is a cone. In addition, when the actual reference workpiece 4C is a hemisphere, the reference shape M4C is a hemisphere.

(Effects of the surface texture measuring device according to the second embodiment)
The surface texture measuring apparatus according to the second embodiment has substantially the same configuration as that of the first embodiment and has the same effects as those of the first embodiment.

[Other Embodiments]
The embodiment of the surface texture measuring device has been described above, but the present invention is not limited to the above embodiment, and various modifications, additions, substitutions, and the like are possible without departing from the spirit of the invention. is there. For example, the present invention can be applied to a contour measuring machine and a roughness measuring machine.

  DESCRIPTION OF SYMBOLS 1 ... Measuring machine main body, 2 ... Arithmetic processing unit, 3 ... Base, 4 ... Work, 5 ... Table, 6 ... Displacement detection device, 7 ... Operation part, 21 ... Column, 22 ... Slider, 23 ... Stylus, 24 ... Contact, 31... Arithmetic processing unit main body, 32... Operation unit, 33.

Claims (6)

A contactor whose tip can contact the object to be measured;
Contact driving means for moving the contacts along a first axis and a second axis in the horizontal direction perpendicular to each other and a third axis in the vertical direction;
A pseudo measurement point acquiring means for driving the contactor to follow the surface of the object to be measured by the contact driving means and acquiring the tip position of the contact as a pseudo measurement point;
An arithmetic means for calculating the surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contact model that defines the tip shape of the contact;
A surface texture measuring device comprising: contact model calculation means for calculating the three-dimensional contact model by measuring a reference workpiece having a reference shape with the contact.
The contact drive means rotates the contact around the third axis,
The contact model calculation means moves the contact along the first axial direction and the third axial direction by the contact driving means at each of a plurality of rotational positions of the rotationally driven contact. A surface texture measuring apparatus characterized by measuring the reference workpiece to obtain the pseudo measurement point and calculating the three-dimensional contactor model based on the obtained pseudo measurement point. The contact model calculation means calculates a two-dimensional contact model at each rotational position of the contact based on the acquired pseudo measurement point, and the calculated two-dimensional contact at each rotational position of the contact The surface texture measuring apparatus according to claim 1, wherein the model is synthesized to calculate a three-dimensional contactor model. The contact model calculation means is configured to convert the acquired pseudo measurement point at each rotational position of the contact from the three-dimensional pseudo measurement point obtained by performing coordinate conversion according to the rotation position of the contact. The surface property measuring apparatus according to claim 1, wherein a contact model is calculated. The contact model calculation means arranges a three-dimensional contact model given as an initial value or a calculated three-dimensional contact model at the pseudo measurement point in a virtual space, and the three-dimensional contact model and the The surface property measuring apparatus according to claim 1, wherein a contact state with a reference workpiece is checked, and the process of correcting the three-dimensional contactor model based on the contact state is repeated. A contactor whose tip can contact the object to be measured;
Contact driving means for moving the contacts along a first axis and a second axis in the horizontal direction perpendicular to each other and a third axis in the vertical direction;
A pseudo measurement point acquiring means for driving the contactor to follow the surface of the object to be measured by the contact driving means and acquiring the tip position of the contact as a pseudo measurement point;
A contactor model of a surface texture measuring device comprising: an arithmetic means for calculating a surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contactor model that defines a tip shape of the contactor A generation method,
Rotating the contact around the third axis;
At each of the plurality of rotational positions of the contactor, the contactor driving means moves the contactor along the first axis direction and the third axis direction to measure the reference workpiece to measure the pseudo measurement point. And calculating the three-dimensional contactor model based on the acquired pseudo measurement points. A contactor model generating method for a surface texture measuring device. A contactor whose tip can contact the object to be measured;
Contact driving means for moving the contacts along a first axis and a second axis in the horizontal direction perpendicular to each other and a third axis in the vertical direction;
A pseudo measurement point acquiring means for driving the contactor to follow the surface of the object to be measured by the contact driving means and acquiring the tip position of the contact as a pseudo measurement point;
A contactor model of a surface texture measuring device comprising: an arithmetic means for calculating a surface shape of the object to be measured based on the acquired pseudo measurement point and a three-dimensional contactor model that defines a tip shape of the contactor A generation program,
The computer rotates the contactor about the third axis,
At each of the plurality of rotational positions of the contactor, the contactor driving means moves the contactor along the first axis direction and the third axis direction to measure the reference workpiece to measure the pseudo measurement point. And calculating the three-dimensional contactor model based on the acquired pseudo measurement points. A contactor model generation program for a surface texture measuring device.

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