JP5114527B2 - Liquid supply device - Google Patents

Description

  The present invention relates to a liquid supply apparatus that discharges a predetermined amount of liquid with high accuracy, and more particularly, to a liquid supply apparatus that discharges a high-viscosity chemical solution to an object to be coated at high pressure.

  A liquid supply device is used to apply a liquid such as a photoresist solution from a coating nozzle to the surface of an object to be coated on a semiconductor wafer or a glass substrate. As a liquid supply device used for such an application, there is a drive pump having a configuration in which an elastically deformable pump member is reciprocated in an axial direction by a drive rod. The drive rod is mounted in a cylindrical housing so as to be capable of reciprocating in the axial direction, and a pump member that is elastically deformable in the axial direction is provided between the tip of the drive rod and the housing. A pump chamber that expands and contracts, that is, a drive chamber is formed inside. As a pump member, there are a form using a bellows as described in Patent Document 1 and a form using a diaphragm as described in Patent Document 2.

  The liquid supply apparatus having a drive pump of the form described in these publications supplies a liquid such as a chemical solution directly to an object to be coated from a pump chamber that is expanded and contracted by a drive rod. On the other hand, there is an indirect operation type chemical liquid supply device that is also called a tube diaphragm and is configured to drive a chemical liquid supply pump provided with a flexible tube that partitions the pump chamber and the drive chamber by the drive pump of the above-described form. For example, it is described in Patent Document 3. In the chemical solution supply apparatus of this aspect, the chemical solution supply pump is indirectly driven by supplying the liquid from the drive pump to the drive chamber of the chemical solution supply pump.

  As a drive pump using a bellows, as described in Patent Document 4, there is a pump that performs a pump operation by expanding and contracting the bellows by supplying gas into the bellows. In this drive pump, a restricting member is incorporated in the bellows in order to prevent inward deformation of the bellows when the bellows expands and contracts. Moreover, in the bellows type drive pump described in Patent Document 5, an annular bellows protection member is attached to the outside of the bellows that is extended and contracted by the drive rod so that the bellows portion is not deformed.

JP-A-7-310838 JP-A-8-170744 Japanese Patent Laid-Open No. 11-230048 JP 2007-315295 A JP 2005-83250 A

  In a pretreatment process for manufacturing a semiconductor or a liquid crystal panel, a chemical liquid such as a photoresist liquid is applied to a semiconductor wafer or a glass substrate using the liquid supply apparatus having the above-described form. The chemical liquid stored in the liquid container is sucked by the liquid supply device and discharged from the application nozzle. As a form of the pump, there are a syringe type in addition to the above-described bellows type, diaphragm type, and tube type. In the liquid supply apparatus used for these applications, chemical resistance is required so as not to be corroded by the chemical solution, and a portion in contact with the chemical solution is mainly made of fluororesin, stainless steel, or ceramics. Furthermore, it is important that the liquid supply device has low dust generation and cleanliness in order to apply a liquid with a uniform film thickness to an object to be coated and eliminate product defects such as missing circuit patterns.

  In particular, in a bellows type or diaphragm type liquid supply device, since the pump member is elastically deformed at the time of discharge operation or suction operation, the pump member requires not only chemical resistance but also flexibility. Resin is selected.

  In the step of applying the chemical solution, pressure is generated in the pump chamber and the chemical solution by the discharge and suction operation due to the influence of various conditions such as the apparatus and piping conditions, the viscosity of the chemical solution, and the discharge flow rate. When the discharge pressure at the time of discharging the chemical liquid is high, the pump member made of a fluororesin bellows or diaphragm is an elastic material, and therefore deforms due to a discharge load applied to the pump member. On the other hand, when the suction negative pressure when sucking the chemical liquid is high, the pump member is deformed by the suction load applied to the pump member. As a result, the pump chamber does not expand and contract with a volume change amount corresponding to the stroke of the drive rod, resulting in insufficient discharge amount of the chemical solution and variations in discharge amount accuracy. Further, when a high pressure is applied to the pump member, the pump member made of a bellows, a diaphragm or the like may be deformed, deteriorated, or damaged. In the long term, it will cause a reduction in the life of the chemical supply device.

  When a pump member such as a bellows is deformed, not only the discharge amount accuracy varies, but also various effects such as a delay in the rise of the flow rate at the start of discharge, a flow rate fluctuation during discharge, and the like. As a result, the film thickness of the chemical solution applied to the surface of the semiconductor wafer becomes non-uniform, and the manufacturing yield of semiconductor products is reduced. In the actual semiconductor manufacturing process, it is necessary to control the driving speed according to the discharge flow rate characteristic in order to reduce the influence of the flow rate fluctuation of the chemical solution discharged from the chemical solution supply device. Complicated program recipe is inevitable. On the other hand, if the chemical solution is applied thicker than necessary and the excess chemical solution is scattered, the chemical solution used is wasted, and the production efficiency and production cost are inevitably increased.

  The most ideal discharge characteristic of the chemical solution supply apparatus is that the discharge flow rate rises quickly from the start of discharge and discharge can be performed at a constant flow rate without fluctuation.

  However, at present, the discharge pressure causes the discharge accuracy and the quality of the manufactured product to be affected, so the driving performance of the chemical supply device is limited by the pump performance. Because it has a safety margin, it must be used at a low pressure level. For this reason, production under ideal conditions is difficult, and the pump life depends on the discharge pressure conditions. As a result, it is no exaggeration to say that the limits on production efficiency and production cost are limited by pump performance.

  To sum up, a flexible pump member such as a bellows or a diaphragm is a member that is functionally required to be flexible and at the same time requires rigidity, and requires contradictory performance. However, in actuality, it is difficult to achieve both of these.

  On the other hand, the syringe-type pump is excellent in rigidity and pressure resistance. The syringe type is a form in which a liquid is pressurized by a piston, and has a high pressure resistance performance, so that there is little influence on discharge accuracy due to pressure load. However, since the piston comes into sliding contact with the inner peripheral surface of the cylinder, the generation of abrasion powder, that is, particles from the sliding part is unavoidable, and there is a risk of chemical contamination or leakage from the particles. Using a syringe type pump in a semiconductor manufacturing process is very risky. For this reason, frequent maintenance is required to check the sliding parts, and the operating life is shorter than other types of pumps. However, it is not used much in the semiconductor manufacturing process.

  An object of the present invention is to improve the discharge accuracy of a liquid supply apparatus having a flexible pump member such as a bellows.

  Another object of the present invention is to improve the durability of the liquid supply apparatus.

  The liquid supply device of the present invention is a liquid supply device that expands and contracts a drive pump chamber by a drive rod to allow liquid to flow into the drive pump chamber, and discharges the flowed liquid from the drive pump chamber to the outside. A drive housing in which a drive rod is mounted so as to be reciprocally movable in an axial direction in a forward direction and a backward direction, and is provided between the drive rod and the housing, and communicates with an inner peripheral surface of the housing. A pump member that forms a chamber and elastically deforms in the axial direction along with the movement of the drive rod, and is arranged on the drive rod, partitions the inside of the housing into the drive pump chamber and the communication chamber, and an outer peripheral surface and the An orifice member forming a communication gap for communicating the drive pump chamber and the communication chamber with the housing; and disposed in the orifice member; A valve body that closes a through-hole formed in the orifice member when the drive rod is moved forward and opens the through-hole when the drive rod is moved backward, and moves the drive rod forward to move the drive rod The drive pump chamber is pressurized and driven by the pump member with the through hole closed, and when the drive rod moves backward, the liquid in the communication chamber is supplied to the drive pump chamber through the through hole. It is characterized by guiding.

  In the liquid supply device of the present invention, the valve body is formed of an annular plate material, the valve body is disposed so as to face the plurality of through holes formed in the orifice member, and the inner peripheral surface side of the valve body And an auxiliary gap is formed on at least one of the outer peripheral surface side and the drive pump chamber and the communication chamber when the drive rod moves backward and the valve body opens the through hole. It is characterized by. In the liquid supply device of the present invention, the valve body is disposed outside an annular valve guide attached to the drive rod, and an auxiliary gap formed on the inner peripheral surface side of the valve body is moved during the backward movement of the drive rod. A notch to be opened is formed in the valve guide.

  The liquid supply device of the present invention is incorporated in a chemical liquid housing provided with an inflow port to which a chemical liquid inflow pipe is connected, an outflow port to which a chemical liquid outflow pipe is connected, and the chemical liquid housing, A chemical pump including a chemical pump chamber that communicates with the inflow port and the outflow port and an elastically deformable partition membrane member that partitions the drive chamber that communicates with the drive pump chamber, and the drive rod moves forward In this case, the partition film member is pressurized and driven by the liquid supplied from the drive pump chamber to the drive chamber. The liquid supply apparatus according to the present invention includes an inflow port connected to the driving pump chamber to which an inflow pipe for chemical liquid is connected and an outflow port to which an outflow pipe for chemical liquid is connected to the drive housing, When the rod moves forward, the liquid is directly discharged from the drive pump chamber to the outflow port.

  The liquid supply device of the present invention is a liquid supply device that expands and contracts a drive pump chamber by a drive rod to allow liquid to flow into the drive pump chamber, and discharges the flowed liquid from the drive pump chamber to the outside. A drive housing in which a drive rod is mounted so as to be reciprocally movable in an axial direction in a forward direction and a backward direction, and is provided between the drive rod and the housing, and communicates with an inner peripheral surface of the housing. A pump member that forms a chamber and elastically deforms in the axial direction along with the movement of the drive rod, and is arranged on the drive rod, partitions the inside of the housing into the drive pump chamber and the communication chamber, and an outer peripheral surface and the An orifice member forming a communication gap for communicating the drive pump chamber and the communication chamber with the housing; and disposed in the orifice member; A valve body that closes a through hole formed in the orifice member when the drive rod is moved backward, and opens the through hole when the drive rod is moved forward, and moves the drive rod backward to move the drive rod. The drive pump chamber is sucked and driven by the pump member with the through hole closed, and when the drive rod moves forward, the liquid in the communication chamber is guided to the drive pump chamber through the through hole. It is characterized by doing.

  In the liquid supply device of the present invention, the valve body is formed of an annular plate material, the valve body is disposed so as to face the plurality of through holes formed in the orifice member, and the inner peripheral surface side of the valve body And an auxiliary gap that communicates the drive pump chamber and the communication chamber when the drive rod advances and the valve element opens the through hole on at least one of the outer peripheral surface side and the outer peripheral surface side. It is characterized by. In the liquid supply apparatus of the present invention, the valve body is disposed outside an annular valve guide attached to the drive rod, and an auxiliary gap formed on the inner peripheral surface side of the valve body is moved forward when the drive rod is moved forward. A notch to be opened is formed in the valve guide.

  The liquid supply device of the present invention is incorporated in a chemical liquid housing provided with an inflow port to which a chemical liquid inflow pipe is connected, an outflow port to which a chemical liquid outflow pipe is connected, and the chemical liquid housing, A chemical pump including a chemical pump chamber that communicates with the inflow port and the outflow port and an elastically deformable partition membrane member that partitions the drive chamber that communicates with the drive pump chamber, and the drive rod moves backward In this case, the partition film member is driven to be sucked by the liquid supplied from the drive chamber to the drive pump chamber. The liquid supply apparatus according to the present invention includes an inflow port connected to the driving pump chamber to which an inflow pipe for chemical liquid is connected and an outflow port to which an outflow pipe for chemical liquid is connected to the drive housing, When the rod moves backward, the liquid is directly sucked into the drive pump chamber from the inflow port.

  The liquid supply apparatus according to the present invention is characterized in that the difference between the outer diameter of the outer peripheral surface of the orifice member and the inner diameter of the inner peripheral surface of the driving housing is 0.1 mm or less. The liquid supply apparatus of the present invention is characterized in that an outer diameter size of the valve body is smaller than an outer diameter size of the orifice member. The liquid supply apparatus of the present invention is characterized in that the valve body is formed by a ball or a poppet valve, and the valve bodies are arranged in the plurality of through holes formed in the orifice member.

  In the liquid supply apparatus of the present invention, the drive pump chamber and the communication chamber are partitioned by an orifice member. When the drive rod is driven against the discharge load, the liquid flows between the drive pump chamber and the communication chamber through a slight communication gap between the orifice member and the inner peripheral surface of the receiving hole, and the flow direction of the communication gap Since the length is sufficiently long with respect to the communication gap, a sufficient pressure gradient can be obtained. On the other hand, when the drive rod is driven against the suction load, the liquid flows through the slight communication gap between the drive pump chamber and the communication chamber, and the length of the communication gap in the flow direction is smaller than the communication gap. Since it is long enough, a sufficient pressure gradient is obtained. Therefore, even if the driving pump chamber is in a pressurized state, the pressure in the communication chamber does not change and remains constant, so that the pump member is prevented from being elastically deformed. On the other hand, even if the drive pump chamber is in a negative pressure state, the pressure in the communication chamber does not fluctuate and is constant, so that the pump member is prevented from being elastically deformed.

  The pump member is prevented from being elastically deformed, and the pump member is elastically deformed linearly with the movement stroke of the drive rod, so that the liquid discharged from the drive pump chamber to the outside or the liquid sucked from the outside to the drive pump chamber rises. The characteristics can be improved and the discharge accuracy of the pump can be improved.

  When the pump member is driven, the pump member does not make sliding contact with the inner peripheral surface of the housing, and a communication gap is formed between the outer peripheral surface of the orifice member and the inner peripheral surface of the housing. There is no generation of abrasion powder from the sliding portion, and the durability of the liquid supply device can be improved. In addition, since there is no generation of wear powder from the sliding portion, even if liquid such as a chemical solution is directly discharged from the drive pump chamber to the coated member, no foreign matter is mixed into the applied liquid. .

  Since the pump member is not subjected to the pressure of the driving pump chamber, the pump member is not deformed unnecessarily, the life is extended, and the durability of the chemical solution supply apparatus can be improved.

It is sectional drawing which shows the liquid supply apparatus which is the 1st Embodiment of this invention in a dormant state. It is sectional drawing which shows the liquid supply apparatus which is 1st Embodiment in a chemical | medical solution discharge state. It is sectional drawing which shows the liquid supply apparatus which is 1st Embodiment in a chemical | medical solution inhalation state. It is sectional drawing which expands and shows a part of FIG. It is sectional drawing which expands and shows a part of FIG. It is sectional drawing which expands and shows a part of FIG. It is sectional drawing which expands and shows a part of FIG. It is the 8-8 sectional view taken on the line in FIG. FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 6. FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 6. It is a characteristic diagram which shows the change of the pressure of a drive pump chamber and a communicating chamber at the time of the drive operation | movement and return operation | movement in the liquid supply apparatus of this invention. (A), (B) is a characteristic diagram which shows the starting characteristic of the liquid supply apparatus of this invention. It is sectional drawing which shows the liquid supply apparatus which is the 2nd Embodiment of this invention in a chemical | medical solution discharge state. It is sectional drawing which shows the liquid supply apparatus which is the 2nd Embodiment of this invention in a chemical | medical solution inhalation state. It is sectional drawing which expands and shows a part of FIG. It is sectional drawing which expands and shows a part of FIG. It is sectional drawing which shows a part of liquid supply apparatus which is the 3rd Embodiment of this invention. It is sectional drawing which shows a part of liquid supply apparatus which is the 4th Embodiment of this invention. It is sectional drawing which shows a part of liquid supply apparatus which is the 5th Embodiment of this invention. It is sectional drawing which shows a part of liquid supply apparatus which is the 6th Embodiment of this invention. It is sectional drawing which shows the modification of an orifice member and a valve body. It is sectional drawing which shows the other modification of an orifice member and a valve body.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same code | symbol is attached | subjected to the common member.

  The liquid supply apparatus 10 a shown in FIGS. 1 to 3 includes a drive pump 11 and a chemical pump 12. The drive pump 11 has a drive housing 13a, the chemical liquid pump 12 has a chemical liquid housing 13b, and both the housings 13a and 13b are formed by an integrated housing member 13, and the housing member 13 is driven. It can be attached to the unit 14. A cylindrical housing hole 15 is formed inside the drive housing 13a. One end of the housing 13a is a closed end closed by a closed wall 16, and an opening is formed at the other end of the housing 13a. 17 is formed.

  A drive rod 18 is mounted in the housing 13a so as to be able to reciprocate linearly. The drive rod 18 is reciprocated by a drive device (not shown) including an electric motor and a pneumatic cylinder incorporated in the drive unit 14. The The movement of the drive rod 18 toward the blocking wall 16 is defined as a forward movement, and the movement away from the blocking wall 16 is defined as a backward movement.

  A bellows 21 as a pump member is mounted in the housing 13a. As shown in FIG. 4, the bellows 21 has a bellows portion 22, an end plate portion 23 provided at one end portion thereof, and a ring portion 24 provided at the other end portion thereof. Are molded as a unit. The end plate portion 23 is formed with a screw hole 23 a that is screwed to a male screw 18 a provided at the distal end portion of the drive rod 18, and the end plate portion 23 is fixed to the distal end portion of the drive rod 18. On the other hand, the ring portion 24 abuts on a step portion 17a formed in the opening portion 17 of the housing 13a and is sandwiched between the drive unit 14 and the housing 13a.

  In the bellows 21, when the drive rod 18 reciprocates in the axial direction, the end plate portion 23 moves in the axial direction together with the drive rod 18, and the bellows portion 22 is elastically deformed in the axial direction. A communication chamber 25 is formed between the bellows 21 and the inner peripheral surface of the accommodation hole 15 of the housing 13a. The inside of the bellows 21 communicates with the outside through a breathing hole (not shown) formed in the drive unit 14, and external air flows into the inside of the bellows 21 along with the reciprocating movement of the drive rod 18 and the internal air. Is discharged to the outside.

  A space between the end plate portion 23 of the bellows 21 and the blocking wall 16 is a drive pump chamber 26 of the drive pump 11, and a liquid flows into the drive pump chamber 26 and the communication chamber 25. The drive pump chamber 26 contracts when the drive rod 18 moves forward, and the liquid inside the drive pump chamber 26 is discharged to the outside of the housing 13a. On the other hand, when the drive rod 18 moves backward, the drive pump chamber 26 expands, and liquid is sucked into the inside thereof.

  As shown in FIGS. 1 to 3, a housing hole 27 penetrating in the longitudinal direction is formed in the chemical solution housing 13 b, and an inflow-side joint member 28 is attached to the lower end portion of the housing 13 b, and the upper end portion A joint member 29 on the outflow side is attached. Each joint member 28, 29 forms part of the housing 13b. An inflow pipe 31 is connected to the inflow port 28 a formed in the inflow side joint member 28, and an outflow pipe 32 is connected to the outflow port 29 a formed in the outflow side joint member 29. The inflow pipe 31 is connected to a chemical liquid container 33, and a discharge nozzle 34 for applying a chemical liquid is provided at the tip of the outflow pipe 32. The inflow pipe 31 is provided with an open / close valve 35 for opening and closing the internal flow path, and the outflow pipe 32 is provided with an open / close valve 36 for opening and closing the internal flow path.

  As shown in FIGS. 1 to 3, a flexible tube 37 that is elastically deformable in the radial direction, such as a fluororesin, is mounted in the housing 13 b as a partition film member. The inflow end portion of the tube 37 is sandwiched between the housing 13 b and the joint member 28, and the outflow end portion is sandwiched between the housing 13 b and the joint member 29. The inflow end of the tube 37 may be welded to the housing 13b, and the outflow end may be similarly welded. The inside of the housing 13 b is partitioned by the tube 37 into a chemical liquid pump chamber 38 inside the tube 37 and a driving chamber 39 outside. The chemical pump chamber 38 communicates with the inflow port 28a and the outflow port 29a. The outflow port 29a is provided above the inflow port 28a, and both the ports 28a and 29a are coaxial. Thereby, even if bubbles are mixed in the chemical solution, the bubbles are prevented from stopping in the chemical solution pump chamber 38.

  The drive chamber 39 communicates with the drive pump chamber 26 through a communication hole 41 formed in the housing member 13, and liquid is sealed in the drive pump chamber 26, the drive chamber 39, the communication hole 41, and the communication chamber 25. . The encapsulated liquid is indicated by dots in the figure. When the drive rod 18 is moved forward, the drive pump chamber 26 contracts, the liquid in the drive pump chamber 26 is supplied to the drive chamber 39, the drive chamber 39 expands, and the tube 37 contracts in the radial direction. . When the tube 37 is contracted, as shown in FIG. 2, when the flow path in the inflow pipe 31 is closed by the on-off valve 35 and the flow path in the outflow pipe 32 is opened by the on-off valve 36, the chemical pump chamber 38. The internal chemical is supplied to the discharge nozzle 34. On the other hand, when the drive rod 18 is moved backward, the drive pump chamber 26 expands, the liquid in the drive chamber 39 is sucked into the drive pump chamber 26, the drive chamber 39 contracts, and the tube 37 expands in the radial direction. Will do. When the tube 37 is expanded, as shown in FIG. 3, if the flow path in the inflow pipe 31 is opened by the on-off valve 35 and the flow path in the outflow pipe 32 is closed by the on-off valve 36, The chemical solution is sucked into the chemical solution pump chamber 38.

  In the liquid supply apparatus 10a, the drive pump 11 and the chemical liquid pump 12 are provided in the housing member 13, but the drive pump 11 and the chemical liquid pump 12 may be separated. In that case, the drive pump chamber 26 and the drive chamber 39 are connected by piping.

  The liquid supply apparatus 10a shown in FIG. 1 has a discharge load applied to the bellows 21 when the tube 37 is contracted by moving the drive rod 18 forward and the chemical liquid in the chemical pump chamber 38 is discharged from the discharge nozzle 34. It is used when the tube 37 is expanded by retreating the drive rod 18 and the suction load applied to the bellows 21 is larger when the drug solution in the drug solution container 33 is sucked into the drug solution pump chamber 38. When the distance from the outflow port 29a to the discharge nozzle 34 is longer than the distance from the inflow port 28a to the chemical liquid container 33, when the discharge speed is high, or there is a filter or other resistance between the discharge nozzle and the discharge nozzle. In some cases, the discharge load is greater than the suction load.

  When the liquid supply device 10a is in a resting state as shown in FIG. 1 and the tube 37 is expanded radially outward, the drive rod 18 is advanced to contract the tube 37. Therefore, it is necessary to pressurize the drive pump chamber 26 by driving the drive rod 18 in the forward direction against the discharge load described above.

  On the other hand, when the liquid is sucked from the drive chamber 39 into the drive pump chamber 26 to expand the tube 37, the suction load applied to the bellows 21 is smaller than the discharge load.

  As described above, when the drive rod 18 is moved forward against the discharge load and the tube 37 is contracted, the drive rod 18 is driven, and when the drive rod 18 is moved backward, the drive rod 18 is returned.

  As shown in FIGS. 4 and 5, the end plate portion 23 of the bellows 21 is provided with a valve holding portion 42 that protrudes toward the closing wall 16, and the valve holding portion 42 has an annular orifice member 43. Is assembled. The outer diameter of the orifice member 43 is set to be slightly smaller than the inner diameter of the accommodation hole 15. Between the inner peripheral surface of the accommodation hole 15, that is, the inner peripheral surface of the housing 13 a and the outer peripheral surface of the orifice member 43, A communication gap 44 for slightly communicating the drive pump chamber 26 and the communication chamber 25 is formed. The drive pump chamber 26 and the communication chamber 25 are communicated with each other through the communication gap 44 in both the driving operation and the return operation of the drive rod 18.

  As shown in FIG. 5, the orifice member 43 is held on the tip end side of the drive rod 18 by an annular valve guide 45 fixed to the valve holding portion 42, and the valve guide 45 is held by a stop ring 46. It is fixed to the part 42. As shown in FIG. 5, the valve guide 45 is formed with a guide surface 48 in the radial direction, and the orifice member 43 is held between the guide surface 48 and the end surface 47 of the end plate portion 23, and the orifice member The axial movement of 43 is restricted. Further, the valve guide 45 is provided with a small diameter portion 49 projecting from the guide surface 48 toward the end surface 47, and the outer diameter of the small diameter portion 49 is set smaller than the inner diameter of the orifice member 43. Accordingly, the orifice member 43 is held on the distal end side of the drive rod 18 so as to move slightly in the radial direction without moving in the axial direction.

  As shown in FIGS. 5 and 9, a plurality of through holes 51 are formed in the orifice member 43 at intervals in the circumferential direction. The orifice member 43 is provided with a valve body 53 made of an annular plate material, and the valve body 53 is movable in the axial direction with respect to the guide portion 52 of the valve guide 45. When the valve body 53 contacts the valve seat surfaces 56 a and 56 b of the orifice member 43, the through hole 51 is closed by the valve body 53. On the other hand, when the valve body 53 is separated from the orifice member 43, the through hole 51 is opened, and the communication chamber 25 and the drive pump chamber 26 are in communication with each other through the through hole 51.

  The valve body 53 closes the through hole 51 formed in the orifice member 43 when the drive rod 18 is moved forward, and opens the through hole 51 when the drive rod 18 is moved backward. Therefore, when the drive rod 18 is moved forward and the drive pump chamber 26 is pressure-driven by the bellows 21, the through hole 51 is closed by the valve body 53, and the communication chamber 25 communicates with the drive pump chamber 26. Since only the communication is made through the gap 44, even if a large discharge load is applied to the tube 37 and the bellows 21 and the pressure in the drive pump chamber 26 is increased, an increase in the pressure in the communication chamber 25 is suppressed. Thereby, even if a large discharge load is applied to the drive pump chamber 26, the bellows 21 is prevented from being deformed in the radial direction.

  On the other hand, when the drive rod 18 is moved backward and the liquid is sucked from the drive chamber 39 to the drive pump chamber 26 by the bellows 21, the through hole 51 is opened by the valve body 53, but the suction load is large. In addition, since the pressure difference between the communication chamber 25 in the negative pressure state and the inside of the bellows 21 in the atmospheric state is small, the bellows 21 is prevented from being deformed in the radial direction.

  The outer diameter of the valve body 53 is smaller than the outer diameter of the orifice member 43, and the gap C2 between the outer peripheral surface of the valve body 53 and the inner peripheral surface of the accommodation hole 15 is communicated as shown in FIG. The gap 44 is set to be larger than the dimension C1. Further, the inner diameter of the valve body 53 is set to be larger than the outer diameter of the guide portion 52, and an auxiliary gap 54 a is formed between the valve body 53 and the guide portion 52. The auxiliary gap 54 a allows the communication chamber 25 and the drive pump chamber 26 to communicate with each other through the through hole 51 when the valve body 53 is separated from the orifice member 43. In order to regulate the position at which the valve body 53 separates from the orifice member 43, a stopper 55 having a larger diameter than the guide portion 52 is provided at the end of the valve guide 45. As shown in FIG. 8, the stopper 55 is formed with a notch portion 55a, and the notch portion 55a forms a notch gap 54b communicating with the auxiliary gap 54a. Thereby, when the valve body 53 contacts the stopper 55, the drive pump chamber 26 and the communication chamber 25 communicate with each other through the notch gap 54b.

  As shown in FIG. 5, valve seat surfaces 56a and 56b with which the valve body 53 contacts are formed in an annular shape on the outer peripheral portion and the inner peripheral portion of the orifice member 43, and both of the valve seat surfaces 56a and 56b are formed. The surface in between is not in contact with the valve body 53. By bringing the valve body 53 into contact only with the valve seat surfaces 56a and 56b, the valve body 53 can be smoothly separated from the orifice member 43. As shown in FIG. 5, an annular protrusion 57 is provided on the outer peripheral portion of the back surface of the orifice member 43 opposite to the valve body 53, and the axial dimension of the communication gap 44 is the same as that of the orifice member 43. It is set larger than the plate thickness. On the outer peripheral surface of the orifice member 43, as shown in FIG. 5, a tapered surface that is inclined inward in the radial direction toward the end surface including the protrusion 57 is formed.

  In the liquid supply apparatus 10a described above, as shown in FIG. 5, when the inner diameter of the inner peripheral surface of the housing 13a is D1, and the outer diameter of the orifice member 43 is D2, the inner diameter D1 is 38 mm (cross 0). .01 mm) and the outer diameter D2 is set to 37.9 mm (intersect 0.005 mm). Therefore, the difference between the outer diameter dimension D2 and the inner diameter dimension D1 is 0.1 mm, and the gap dimension C1 of the communication gap 44 is set to 0.05 mm. Further, the length of the straight portion of the communication gap 44 is set to 1.63 mm. If the dimensional difference between the outer diameter dimension D2 and the inner diameter dimension D1 is increased to about 0.15 mm, the pressure in the communication chamber 25 also varies due to the pressure variation in the drive pump chamber 26. Even if the pressure in the drive pump chamber 26 increased, the pressure in the communication chamber 25 hardly increased.

  When the discharge flow rate when the liquid in the drive pump chamber 26 is discharged into the drive chamber 39 is 0.1 ml / second (0.1 milliliter per second), the pressure in the communication chamber 25 is changed by the pressure fluctuation in the drive pump chamber 26. Although fluctuations occur, when the discharge flow rate is set to 0.5 ml / second or more, the valve body 53 reliably blocks the through hole 51 of the orifice member 43, and communication due to pressure fluctuation in the drive pump chamber 26 occurs. The pressure fluctuation in the chamber 25 did not occur.

  A liquid supply apparatus 10a shown in FIGS. 1 to 10 includes a drive pump 11 and a chemical pump 12, and expands and contracts the drive pump chamber 26 to use the liquid enclosed therein as an indirect medium. It is an indirect operation type that is driven. In addition, the liquid supply device 10 a has an operation mode in which the discharge load is larger than the suction load, and the pressure of the drive pump chamber 26 and the atmospheric pressure inside the bellows 21 when the chemical liquid is discharged from the discharge nozzle 34. The pressure difference is larger than the pressure difference when the chemical liquid in the chemical liquid container 33 is sucked into the chemical liquid pump chamber 38.

  In order to supply the chemical solution such as photoresist or pure water supplied from the chemical solution container 33 into the chemical solution pump chamber 38 to the discharge nozzle 34 by operating the liquid supply device 10a, as shown in FIG. Are moved forward, that is, projecting toward the blocking wall 16, and the liquid in the drive pump chamber 26 is discharged to the drive chamber 39 through the communication hole 41. When the drive rod 18 is moved forward, the bellows 21 becomes longer in the axial direction, so that the volume of the communication chamber 25 increases.

  At this time, a discharge load is applied to the drive pump chamber 26, and the drive rod 18 performs a drive operation to pressurize the drive pump chamber 26. At the time of this driving operation, as shown in FIGS. 4 and 5, the liquid in the drive pump chamber 26 is squeezed and flows into the communication chamber 25 via the communication gap 44. The valve body 53 comes into close contact with the orifice member 43 by the liquid inside, and the through hole 51 is closed. During the driving operation, the liquid is squeezed from the drive pump chamber 26 and flows into the communication chamber 25, so that the pressure increase in the communication chamber 25 is suppressed by the pressure loss generated when the liquid flows through the communication gap 44 that is long in the axial direction at that time. Is done. That is, if the pressure of the chemical pump chamber 38 is PD, the pressure of the drive pump chamber 26 is P1, and the pressure of the communication chamber 25 is P2, the pressure P1 of the drive pump chamber 26 is almost the same as the pressure PD. On the other hand, the pressure P2 in the communication chamber 25 is lower than the pressures PD and P1.

  In this way, the communication chamber 25 communicates with the drive pump chamber 26 only through the communication gap 44 during the driving operation, and the pressure increase in the communication chamber 25 is suppressed by the pressure loss due to the throttle action. The bellows part 22 is prevented from being elastically deformed radially inward. Thereby, when the drive rod 18 starts to move forward, the pressure in the drive pump chamber 26 immediately rises, so that the chemical pump chamber 38 is immediately contracted and the rising characteristics of the chemical pump 12 can be improved. Further, since the deformation of the bellows portion 22 of the bellows 21 is prevented, the discharge characteristic of the chemical liquid from the outflow port 29a of the chemical liquid pump 12 changes linearly according to the stroke of the drive rod 18. That is, when the bellows portion 22 of the bellows 21 is deformed in the radial direction, the stroke of the drive rod 18 and the amount of liquid sent to the drive chamber 39 are not proportional, but this is not the case with the liquid supply device of the present invention. . Furthermore, the durability of the bellows 21 can be increased.

  To supply the chemical liquid from the chemical liquid container 33 to the chemical liquid pump chamber 38 by moving the drive rod 18 backward, the drive rod 18 is moved backward in the direction away from the blocking wall 16 as shown in FIG. The liquid is supplied to the drive pump chamber 26.

  Since the suction load is not large during this return operation, the negative pressure in the drive pump chamber 26 is close to atmospheric pressure. 6 and 7, during the return operation, the valve body 53 is separated from the orifice member 43, the through hole 51 is opened, and the auxiliary gap 54a is opened by the notch gap 54b. The pressure P2 is substantially the same as the pressure P1 of the drive pump chamber 26. As a result, the bellows 21 does not elastically deform in the radial direction when the drive rod 18 moves backward.

  FIG. 11 is a characteristic diagram showing changes in pressure in the drive pump chamber 26 and the communication chamber 25 during the drive operation and the return operation in the liquid supply apparatus 10a, and FIG. 12 (A) shows the rising characteristics of the liquid supply apparatus 10a. It is a characteristic line figure shown in comparison with a prior art example.

  As shown in FIG. 11, when the chemical liquid is discharged from the chemical pump chamber 38, the pressure P1 in the drive pump chamber 26 is a high pressure corresponding to the discharge pressure PD, whereas the pressure P2 in the communication chamber 25 is shown. Is squeezed by the orifice member 43 and becomes lower than the pressure P1. In FIG. 11, the alternate long and short dash line indicates the pressure of the conventional communication chamber 25 shown as a comparative example. When the orifice member 43 is not provided, the pressure of the communication chamber 25 is the same as the pressure of the drive pump chamber 26 when the chemical solution is discharged. The bellows 21 is elastically deformed in the radial direction.

  For this reason, conventionally, as shown by a one-dot chain line in FIG. 12A, the bellows is elastically deformed when the drive rod 18 is activated by the elastic deformation of the bellows, and the rise time of the chemical liquid discharged from the chemical liquid pump chamber 38 is long. It was. On the other hand, in the liquid supply apparatus 10a of the present invention, the rising characteristics are improved. As shown by the alternate long and short dash line in FIG. 12A, in the conventional liquid supply apparatus, if the discharge conditions such as the discharge pressure, flow velocity, and acceleration condition are made different from condition 1 to condition 3, the rise time becomes T1 to T3. In the chemical solution supply apparatus 10a, the rise time T did not change even when the discharge conditions were changed. If the rise times are different as T and T1, the total discharge amount indicated by the hatched area in FIG. 12A is the difference in the total discharge amount when starting up the liquid supply device. The total discharge amount is calculated by the product of the liquid flow rate per unit time and the rise time.

  When the liquid in the drive pump chamber 26 is highly viscous, the discharge speed of the liquid from the drive pump chamber 26 by the drive rod 18 is high, the resistance of the discharge flow path for guiding the liquid is large, etc. When a large pressure loss is large, the pressure resistance, that is, the rigidity of the pump head portion including the bellows greatly affects the rising characteristics at the start of discharge. When the bellows part 22 of the bellows 21 receives a pressure load at the start of operation and the bellows part 22 is momentarily deformed, the cross-sectional area is reduced, the rising flow rate is reduced, and further the cause of the damping phenomenon (flow rate fluctuation) Become. These become dead zones at the start of discharge and affect the bad rise.

  In addition, the bellows deformation area increases as the discharge pressure load increases, such as when the chemical viscosity is high, the flow rate is fast, or the acceleration is fast. Will shrink. As a result, the discharge flow rate decreases, and as a result, the discharge amount of one shot cannot be discharged as set. That is, since the chemical solution viscosity, the discharge pressure, the pump operation conditions, and the like greatly affect the discharge amount, the discharge accuracy is not stabilized as a result.

  However, in the liquid supply apparatus 10a of the present invention, the effect of the instantaneous discharge pressure is received by the valve body for preventing the backflow and the orifice resistance, and the rising characteristics, which is also a drawback of the bellows structure, are improved. The flow rate can be stabilized over a wide range.

  13-16 is sectional drawing which shows the liquid supply apparatus 10b which is other embodiment of this invention. In the liquid supply device 10b, when the drive rod 18 is moved backward, the tube 37 is expanded, and the suction load applied to the bellows 21 when the chemical liquid in the chemical liquid container 33 is sucked into the chemical liquid pump chamber 38 is generated by the drive rod 18. This is used when the tube 37 is contracted by moving the tube forward to discharge the chemical liquid in the chemical liquid pump chamber 38 from the discharge nozzle 34 and is larger than the discharge load applied to the bellows 21. When the distance from the outflow port 29a to the discharge nozzle 34 is shorter than the distance from the inflow port 28a to the chemical liquid container 33, when the suction speed is high, or a resistance such as a filter is provided between the inflow port and the chemical liquid container. When there is something, the suction load is larger than the discharge load.

  Therefore, when the chemical liquid is discharged from the chemical pump chamber 38 to the discharge nozzle 34, a large discharge load is not applied to the bellows 21. On the other hand, when the driving rod 18 is moved backward to expand the chemical pump chamber 38, the driving rod 18 is driven in the backward direction against a large suction load to drive the liquid in the driving chamber 39 to the driving pump. It is necessary to suck into the chamber 26. At this time, the negative pressure in the drive pump chamber 26 becomes larger than that of the liquid supply apparatus 10a described above. Thus, in the liquid supply apparatus 10b applied when the suction load is larger than the discharge load, when the drive rod 18 is moved backward, the drive rod 18 is driven and when the drive rod 18 is moved forward. In this case, the drive rod 18 returns.

  As shown in FIGS. 15 and 16, unlike the liquid supply device 10 a described above, the valve holding portion 42 has an orifice member 43 and a valve element 53 arranged in an inverted state in the axial direction. . That is, the valve body 53 is disposed between the orifice member 43 and the end surface 47 of the bellows 21. Therefore, when the drive rod 18 is moved backward, the through hole 51 is closed by the valve body 53, and when the drive rod 18 is moved forward, the through hole 51 is opened by the valve body 53, and the drive rod 18 is moved backward. The drive pump chamber 26 is suction driven by the bellows 21 serving as a pump member with the through hole 51 closed. On the other hand, when the drive rod 18 moves forward, the liquid in the communication chamber 25 is guided into the drive pump chamber 26 through the through hole 51.

  When the drive pump chamber 26 is in a negative pressure state during the drive operation for moving the drive rod 18 backward, as shown in FIG. 16, the through hole 51 is closed by the valve body 53, so that the drive pump chamber 26 and the communication chamber 25 are A communication state is established only by the communication gap 44, and the communication gap 44 is throttled. Thus, the negative pressure in the drive pump chamber 26 is not transmitted to the communication chamber 25, and the bellows 21 is not deformed in the radial direction during the driving operation for sucking the chemical liquid into the chemical liquid pump chamber 38.

  FIG. 12B is a characteristic diagram showing the rising characteristics of the liquid supply apparatus 10b in comparison with the conventional example. Conventionally, as shown by a one-dot chain line in FIG. 12B, the bellows is elastically deformed during the suction operation of the drive rod 18 due to the elastic deformation of the bellows, and the rise time of the chemical liquid sucked into the chemical liquid pump chamber 38 is lengthened. It was. On the other hand, in the liquid supply apparatus 10b of the present invention, the rising characteristics are improved. As shown by the alternate long and short dash line in FIG. 12 (B), in the conventional liquid supply apparatus, if the suction conditions such as the discharge pressure, the flow velocity, and the acceleration condition are made different from condition 1 to condition 3, the rise time becomes T1 to T3. In the chemical solution supply apparatus 10b, the rise time T did not change even when the inhalation conditions were changed. When the rise times are different as T and T1, the total suction amount indicated by the hatched area in FIG. 12B is the difference in the total suction amount when starting up the liquid supply device. The total amount of inhalation is calculated by the product of the liquid flow rate per unit time and the rise time.

  Thus, even when a suction load is applied to the bellows 21 that performs the suction operation, the liquid supply device 10b receives the influence of the instantaneous suction pressure by the valve body for preventing the backflow and the orifice resistance. The rise characteristic, which is also a drawback of the bellows structure, can be improved and the flow rate can be stabilized over the entire area.

  FIG. 17 is a cross-sectional view showing a liquid supply apparatus 10c according to another embodiment of the present invention. In this liquid supply device 10 c, unlike the above-described form, the partition film member is formed by an elastically deformable diaphragm 61 instead of the tube 37. The housing 61 is partitioned into a drive chamber 39 and a chemical pump chamber 38 by the diaphragm 61. Therefore, when the diaphragm 61 is deformed in a direction in which the chemical liquid pump chamber 38 is contracted, the chemical liquid in the chemical liquid pump chamber 38 is discharged from the discharge nozzle 34 through the outflow port 29a, and the diaphragm 61 is expanded in the direction in which the chemical liquid pump chamber 38 is expanded. When deformed, the chemical liquid in the chemical liquid container 33 is sucked into the chemical liquid pump chamber 38 through the inflow port 28a. In the illustrated embodiment, the joint members 28 and 29 described above are not provided, and the inflow port 28a and the outflow port 29a are formed integrally with the housing 13b.

  As in the liquid supply apparatus 10a shown in FIG. 1, the liquid supply apparatus 10c has a discharge load applied to the bellows 21 when the drive rod 18 is moved forward to discharge the chemical liquid in the chemical liquid pump chamber 38 from the discharge nozzle 34. It is used when the suction load applied to the bellows 21 is larger when the chemical liquid in the chemical liquid container 33 is sucked into the chemical liquid pump chamber 38 by moving the drive rod 18 backward. Therefore, the positional relationship between the orifice member 43 and the valve body 53 is the same as that of the liquid supply apparatus 10a shown in FIGS.

  FIG. 18 is a cross-sectional view showing a liquid supply apparatus 10d according to another embodiment of the present invention. As the pump member of the drive pump 11 in the liquid supply apparatus 10d, a diaphragm 62 is used instead of the bellows 21 described above. The diaphragm 62 is elastically deformed in the axial direction following the axial movement of the drive rod 18. In the chemical liquid pump 12, the diaphragm 61 is used as a partition film member in the same manner as the liquid supply apparatus 10c shown in FIG. In the liquid supply apparatus 10d, both diaphragms 61 and 62 are incorporated in the accommodation hole 15 formed in the housing 13a. Therefore, in this liquid supply apparatus 10d, the drive pump chamber 26 and the drive chamber 39 are integrated, and the entire size including the drive pump 11 and the chemical liquid pump 12 can be reduced.

  The liquid supply device 10d shown in FIG. 18 is also used when the discharge load is larger than the suction load, similarly to the liquid supply device 10c shown in FIG. However, when each of the liquid supply devices 10c and 10d is used when the suction load is larger than the discharge load, the orifice member 43 and the valve body 53 are reversed in the axial direction in the valve holding portion 42. Be placed. That is, the valve body 53 is disposed between the orifice member 43 and the end surface 47 of the bellows 21.

  FIG. 19 is a cross-sectional view showing a liquid supply apparatus 10e according to another embodiment of the present invention. The liquid supply device 10e is an indirect operation type in which the liquid supply devices 10a to 10d described above drive the chemical liquid pump 12 using the indirect liquid driven by the drive pump 11 as a drive source, whereas the drive pump 11 Therefore, it is a direct operation type in which the chemical liquid is supplied to the discharge nozzle. The structure of the drive pump 11 is the same as that of the liquid supply apparatus 10a described above.

  FIG. 20 is a cross-sectional view showing a liquid supply apparatus 10f according to another embodiment of the present invention. This liquid supply device 10f is also a direct operation type similar to that shown in FIG. 19, and supplies the chemical liquid supplied from the chemical liquid container into the drive pump chamber 26 toward the discharge nozzle. In the liquid supply apparatus 10f shown in FIG. 20, a diaphragm 62 is used as a pump member similarly to the liquid supply apparatus 10d shown in FIG. 18, and the diaphragm 62 is elastically deformed in the axial direction.

  The inflow side joint member 28 and the outflow side joint member 29 in the liquid supply devices 10e and 10f shown in FIGS. 19 and 20 are provided integrally with the housing 13a, and the inflow port 28a and the outflow port 29a are respectively provided. The drive pump chamber 26 communicates with the drive pump chamber 26.

  As described above, in the directly actuated liquid supply devices 10e and 10f, the chemical liquid in the drive pump chamber 26 is discharged to the outflow pipe 32 by the forward movement of the drive rod 18, and driven from the inflow pipe 31 by the backward movement of the drive rod 18. The chemical solution is sucked into the pump chamber 26. Thereby, the chemical | medical solution in a drive pump chamber is directly discharged to a discharge nozzle.

  The liquid supply device 10e shown in FIG. 19 and the liquid supply device 10f shown in FIG. 20 are both used when the discharge load is larger than the suction load. However, when each of the liquid supply devices 10e and 10f is used when the suction load is larger than the discharge load, the orifice member 43 and the valve body 53 are disposed in the valve holding portion 42 in a state where the positional relationship is reversed. Is done. That is, the valve body 53 is disposed between the orifice member 43 and the end surface 47 of the bellows 21. The inflow pipe 31 and the outflow pipe 32 in FIGS. 19 and 20 are provided with the on-off valves 35 and 36 shown in FIG.

  21 and 22 show modified examples of the orifice member 43 and the valve body 53, respectively. In the orifice member 43 shown in FIG. 21, a valve body accommodation hole 63 is formed coaxially with the through hole 51, and the valve body accommodation hole 63 is formed between the large diameter hole 63 a and the through hole 51. And a tapered hole 63b. A plurality of through holes 51 are formed at intervals in the circumferential direction, and valve body accommodation holes 63 are formed continuously to the respective through holes 51, and balls 64 are arranged as valve bodies in the valve body accommodation holes 63. Has been. In order to prevent the ball 64 from being detached from the valve body accommodation hole 63, a retainer 65 is attached to the end of the valve body accommodation hole 63, and a through hole for guiding the liquid is formed in the retainer 65. .

  In the orifice member 43 shown in FIG. 22, a poppet valve 66 is disposed as a valve body in a valve body housing hole 63 formed coaxially with the through hole 51, and a valve shaft portion 66 a is formed in a retainer 67. The guide hole 68 is slidably fitted.

  The orifice member 43 shown in FIGS. 21 and 22 is provided with a ball 64 and a poppet valve 66 so as to close the through hole 51 when the drive pump chamber 26 is pressurized. The through hole 51 is closed when moving forward, and the through hole 51 is opened when moving backward. On the other hand, when the drive pump chamber 26 is in a negative pressure state when the drive rod 18 is moved backward as in the liquid supply device 10b shown in FIGS. , 22 are arranged on the front end side of the drive rod 18 with the top and bottom being inverted.

  In the liquid supply apparatus of the present invention, the communication chamber 25 formed between the pump member made of the bellows 21 and the diaphragm 62 and the housing 13a is partitioned from the drive pump chamber 26 by the orifice member 43. In the embodiment in which the drive pump chamber 26 is pressurized against the discharge load by the drive rod 18, the liquid in the drive pump chamber 26 is squeezed and guided to the communication chamber 25 through the communication gap 44 by closing the through hole 51. Therefore, the pressure fluctuation in the drive pump chamber 26 is not transmitted to the communication chamber 25. On the other hand, in the form in which the drive pump chamber 26 is sucked against the suction load by the drive rod 18, the liquid in the communication chamber 25 is restricted to the drive pump chamber 26 through the communication gap 44 by closing the through hole 51. Therefore, the pressure fluctuation in the drive pump chamber 26 is not transmitted to the communication chamber 25.

  Accordingly, when the drive pump chamber 26 is expanded and contracted by the pump member, the communication chamber 25 formed between the pump member and the housing has no pressure fluctuation, and the pump members such as the bellows 21 and the diaphragm 62 move the drive rod 18. Elastically deforms linearly with respect to the stroke.

  In particular, in the early stage of the driving operation, the flexible pump member in the prior art is greatly elastically deformed by the pressure applied thereto and the rising characteristic of the driving pump 11 is poor, whereas the orifice member 43 is used in the present invention. By partitioning the drive pump chamber 26 and the communication chamber 25, the pressure fluctuation in the drive pump chamber 26 is prevented from being transmitted to the communication chamber 25, so that the rising characteristics of the drive pump can be improved.

  In the liquid supply device of the present invention, the drive pump chamber 26 is expanded and contracted using the flexible bellows 21 and the diaphragm 62 as pump members. There is no sliding contact with the inner peripheral surface. Thereby, since the sliding part does not wear, there is no occurrence of liquid leakage from the drive pump, and the durability of the drive pump can be improved. Therefore, frequent maintenance of the liquid supply device is not necessary. Further, since there is no sliding portion, there is no flow rate fluctuation due to the stick-slip phenomenon even when liquid is discharged at a low speed. Since there is no generation of wear powder from the sliding portion, in the direct acting liquid supply device in which the chemical liquid is directly discharged from the discharge nozzle 34 by the drive pump, the wear powder is not mixed in the chemical liquid. The production yield of semiconductor wafers and liquid crystal panels can be increased.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, the liquid supply apparatus of the present invention is not limited to a case where a semiconductor wafer or a liquid crystal substrate is used as an object to be coated and a chemical solution is discharged onto the substrate, and can be applied to a case where liquid is quantitatively supplied with high accuracy.

10a to 10f Liquid supply device 11 Drive pump 12 Chemical liquid pump 13 Housing member 13a Drive housing 13b Chemical liquid housing 15 Housing hole 16 Closure wall 18 Drive rod 21 Bellows (pump member)
22 bellows portion 25 communication chamber 26 drive pump chamber 28a inflow port 29a outflow port 31 inflow tube 32 outflow tube 37 tube (partition membrane member)
38 Chemical pump chamber 39 Drive chamber 41 Communication hole 43 Orifice member 44 Communication gap 51 Through hole 53 Valve element 54a Auxiliary gap

Claims (13)

A liquid supply device that expands and contracts a drive pump chamber by a drive rod to flow liquid into the drive pump chamber, and discharges the liquid that flows in from the drive pump chamber to the outside;
A drive housing in which the drive rod is mounted so as to reciprocate in the axial direction in the forward and backward directions; and
A pump member provided between the drive rod and the housing, forming a communication chamber between the inner peripheral surface of the housing and elastically deforming in the axial direction along with the movement of the drive rod;
An orifice which is disposed on the drive rod and divides the inside of the housing into the drive pump chamber and the communication chamber and forms a communication gap between the outer peripheral surface and the housing to communicate the drive pump chamber and the communication chamber. Members,
A valve body that is disposed on the orifice member, closes a through hole formed in the orifice member when the drive rod is moved forward, and opens the through hole when the drive rod is moved backward. ,
The drive pump chamber is pressurized and driven by the pump member with the drive rod moved forward to close the through hole, and when the drive rod moves backward, the drive is driven through the through hole. A liquid supply apparatus for guiding a liquid in the communication chamber into a pump chamber.   2. The liquid supply apparatus according to claim 1, wherein the valve body is formed of an annular plate member, the valve body is disposed to face the plurality of through holes formed in the orifice member, and an inner periphery of the valve body is formed. An auxiliary gap is formed on at least one of the surface side and the outer peripheral surface side to connect the drive pump chamber and the communication chamber when the drive rod moves backward and the valve element opens the through hole. A liquid supply apparatus.   3. The liquid supply apparatus according to claim 2, wherein the valve body is disposed outside an annular valve guide attached to the drive rod, and an auxiliary gap formed on the inner peripheral surface side of the valve body is moved backward in the drive rod. A liquid supply device, wherein the valve guide is formed with a notch that is opened during movement. The liquid supply apparatus according to any one of claims 1 to 3,
A chemical liquid housing provided with an inflow port to which a chemical liquid inflow pipe is connected, and an outflow port to which a chemical liquid outflow pipe is connected;
A chemical pump that is incorporated in the chemical liquid housing and includes an elastically deformable partition membrane member that partitions a chemical pump chamber communicating with the inflow port and the outflow port and a drive chamber communicating with the drive pump chamber; Have
The liquid supply apparatus, wherein the partition membrane member is pressurized and driven by liquid supplied from the drive pump chamber to the drive chamber when the drive rod moves forward. The liquid supply apparatus according to any one of claims 1 to 3,
An inflow port connected to the inflow pipe of the chemical liquid in communication with the drive pump chamber and an outflow port connected to the outflow pipe of the chemical liquid are provided in the drive housing,
A liquid supply apparatus that discharges liquid directly from the drive pump chamber to the outflow port when the drive rod moves forward. A liquid supply device that expands and contracts a drive pump chamber by a drive rod to flow liquid into the drive pump chamber, and discharges the liquid that flows in from the drive pump chamber to the outside;
A drive housing in which the drive rod is mounted so as to reciprocate in the axial direction in the forward and backward directions; and
A pump member provided between the drive rod and the housing, forming a communication chamber between the inner peripheral surface of the housing and elastically deforming in the axial direction along with the movement of the drive rod;
An orifice which is disposed on the drive rod and divides the inside of the housing into the drive pump chamber and the communication chamber and forms a communication gap between the outer peripheral surface and the housing to communicate the drive pump chamber and the communication chamber. A member,
A valve body disposed on the orifice member, closing a through hole formed in the orifice member when the drive rod is moved backward, and opening the through hole when the drive rod is moved forward; ,
The drive pump chamber is sucked and driven by the pump member while the drive rod is moved backward and the through hole is closed. When the drive rod moves forward, the drive pump is passed through the through hole. A liquid supply apparatus for guiding a liquid in the communication chamber into a room.   The liquid supply apparatus according to claim 6, wherein the valve body is formed of an annular plate member, the valve body is disposed to face the plurality of through holes formed in the orifice member, and an inner periphery of the valve body An auxiliary gap is formed on at least one of the surface side and the outer peripheral surface side to communicate the drive pump chamber and the communication chamber when the drive rod advances and the valve element opens the through hole. A liquid supply apparatus.   8. The liquid supply apparatus according to claim 7, wherein the valve body is disposed outside an annular valve guide attached to the drive rod, and the drive rod is advanced through an auxiliary gap formed on an inner peripheral surface side of the valve body. A liquid supply device, wherein the valve guide is formed with a notch that is opened during movement. The liquid supply apparatus according to any one of claims 6 to 8,
A chemical liquid housing provided with an inflow port to which a chemical liquid inflow pipe is connected, and an outflow port to which a chemical liquid outflow pipe is connected;
A chemical pump that is incorporated in the chemical liquid housing and includes an elastically deformable partition membrane member that partitions a chemical pump chamber communicating with the inflow port and the outflow port and a drive chamber communicating with the drive pump chamber; Have
The liquid supply apparatus, wherein the partition film member is driven to be sucked by the liquid supplied from the drive chamber to the drive pump chamber when the drive rod moves backward. The liquid supply apparatus according to any one of claims 6 to 8,
An inflow port connected to the inflow pipe of the chemical liquid in communication with the drive pump chamber and an outflow port connected to the outflow pipe of the chemical liquid are provided in the drive housing,
A liquid supply apparatus for sucking liquid directly from the inflow port to the drive pump chamber when the drive rod moves backward.   8. The liquid supply apparatus according to claim 2, wherein a difference between an outer diameter of the outer peripheral surface of the orifice member and an inner diameter of the inner peripheral surface of the driving housing is 0.1 mm or less. Liquid supply device.   8. The liquid supply apparatus according to claim 2, wherein an outer diameter dimension of the valve body is smaller than an outer diameter dimension of the orifice member.   7. The liquid supply apparatus according to claim 1, wherein the valve body is formed by a ball or a poppet valve, and the valve bodies are arranged in a plurality of the through holes formed in the orifice member. Liquid supply device.

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