JP5037191B2 - Substrate transfer device and cable wiring structure - Google Patents

Description

  The present invention relates to a cable wiring structure for wiring a plurality of cables for supplying electric power, signals, and the like to a mechanism that rotates, such as a rotary table equipped with a transfer arm for transferring a semiconductor wafer, an FPD (Flat Panel Display) substrate, or the like. And a substrate transfer apparatus.

  For example, in a semiconductor manufacturing apparatus that performs a predetermined process such as etching or film formation on a substrate such as a semiconductor wafer or an FPD substrate in a semiconductor manufacturing process, a substrate transfer apparatus including a transfer arm for transferring the substrate to various places in the apparatus Is provided. The transfer arm is mounted on, for example, a rotary table so that the expansion / contraction direction of the arm can be changed. In such a substrate transfer apparatus, since the drive mechanism of the transfer arm is mounted on the rotary table, a plurality of filaments for supplying power and signals to the drive mechanism, such as electric wires and cables, are wired on the rotary table. It is required to do.

  For example, when a plurality of cables are wired to such a rotating member such as a rotary table, conventionally, a plurality of cables are separately distributed between such a rotating member and the bottom of the casing. The cable wiring space was increased to such an extent that the cables would not rub against each other.

JP 2000-69655 A

  By the way, in recent years, with the increase in the number of functions of semiconductor manufacturing apparatuses, it is required to make a small unit in such a substrate transfer apparatus, and it is also required to save a space for wiring a cable as much as possible. . On the other hand, with the increase in the number of functions of the transfer arm provided on the rotary table, the number of cables that have to be wired increases, and further, the power to be supplied also increases and the diameter of the cables tends to increase.

  In order to place such cables in a narrower space than in the past, if the cables are distributed as they are in the same manner as before, the smaller the cable wiring space, the more the cables move when the rotary table rotates and the cables move. Will be rubbed and entangled easily. In this case, a load is applied to the cable itself, which may cause damage to the cable or disconnection. Also, when the rotary table rotates and the cable moves, many cables are entangled and move, so it is very difficult to predict the overall form and movement trajectory.

  In this case, it is possible to consolidate these many cables into one with a cable duct or cable bear. However, when such a cable duct or cable bear is used, the larger the number of cables, the greater the diameter of a single cable. The thicker the cable, the thicker the cable duct and cable bear, so the cable duct and cable bear itself cannot be placed in a narrow space. Even if it can be inserted, when the turntable rotates, there is a risk that a large number of cables will rub against each other in the cable duct or cable track and a load will be applied to the cable.

  In Patent Document 1, a plurality of single cables formed in a ring are sequentially arranged in the radial direction, and a flat ring-shaped assembled cable formed by joining them together is folded in a vertical direction in plan view. A cable device bent in a substantially U shape so as to be bent is described. In this cable device, when the bent portion is rotated, the bent portion swells in the vertical direction, so that the relative rotation of the bent portion is absorbed to prevent the cable from being entangled. In such a case, since the bent portion is bent into a U-shape, it is effective when the diameter of the single cable is relatively small and can be easily bent. However, as described above, the larger the diameter of a single cable is, the more difficult it is to bend in a U shape itself, and even if it can be bent in a U shape, Since the load applied to is extremely large, it is not appropriate to use this form.

  Therefore, the present invention has been made in view of such a problem, and the object of the present invention is to reduce the load applied to each linear member constituting the cable while wiring the cable to the rotating member. It is an object of the present invention to provide a cable wiring structure and a board transfer device that can prevent rubbing and entanglement when a cable moves with rotation of a member, and can further reduce the cable wiring space.

  In order to solve the above-described problems, according to one aspect of the present invention, a casing having a cable wiring space, and a rotating member disposed in the casing so as to be relatively rotatable so as to look into the cable wiring space, , A plurality of strips arranged in a strip shape are joined and integrated with each other, and each of the strips is wired in the rotating member so as to be arranged in the vertical direction and accommodated in the cable wiring space. A flat cable, and one end of the flat cable is attached to a position deviated from the rotation center of the rotating member so that the winding diameter gradually increases toward the cable wiring space. In addition, a cable wiring structure is provided in which the other end is attached to the casing. The rotating member includes not only a rotating member main body that rotates alone, such as a rotating table, but also a rotating body and a rotating plate that are attached to the rotating member main body and rotate together with the rotating member main body.

  In order to solve the above-described problem, according to another aspect of the present invention, there is provided a cable wiring structure in which a cable is wired to a relatively rotatable rotating member, and the cable includes a plurality of strips arranged in a strip shape. It is a flat cable in which linear bodies are joined to each other, and the flat cable has one end attached to a position deviated from the vertical center of rotation of the rotating member and is directed vertically therefrom. Provided is a cable wiring structure characterized in that wiring is performed in a spiral shape with gradually increasing winding diameter.

  According to the present invention, the flat cable draws a trajectory such that the spiral winding diameter changes according to the rotation of the rotating member (for example, twisted pendulum movement). Thereby, it becomes easy to predict the form and locus of the flat cable that changes according to the rotation of the rotating member, and it is possible to prevent rubbing and entanglement when the flat cable moves along with the rotation of the rotating member. . In addition, since a plurality of filaments are joined together to form an integrated flat cable, rubbing and entanglement of each filament can be prevented. In addition, by forming the flat cable into a spiral shape in which the winding diameter gradually increases from the rotating member toward the cable wiring space, even if the diameter of the linear body constituting the flat cable is large, Such a load can be reduced. In addition, since the wiring is performed in a spiral shape in the vertical direction, the horizontal cable wiring space can be further reduced. Furthermore, by attaching one end of the flat cable at a position shifted from the rotation center of the rotating member, the horizontal cable wiring space can be used efficiently.

  The rotating member rotates in the forward / reverse direction from the start point angle to the end point angle, and the length of the flat cable is at least according to the rotation angle from the start point angle to the end point angle of the rotating member. It is preferable that the length of the coil is changed. Thereby, since the form and locus | trajectory of a flat cable are limited according to the range of the rotation angle used with a rotation member, the length of a flat cable can be adjusted to the minimum necessary according to it.

  Further, it is preferable that one end of the flat cable at a rotation angle of the rotating member when the winding diameter of the flat cable is the smallest is shifted in the horizontal direction from the other end of the flat cable. Thereby, a certain extent can be given to the winding diameter of a flat cable. Thereby, the height direction of a cable wiring space can be made lower.

  Also, one end of the flat cable at the rotation angle of the rotating member when the winding diameter of the flat cable is the smallest is shifted to the same side as the other end of the flat cable when viewed from the center of the rotating member. Preferably it is. As a result, when the rotating member rotates and the flat cable is unwound, it can be prevented from widening to the opposite side in the horizontal direction, so the cable wiring space can also be made narrower in the horizontal direction. .

  Moreover, it is preferable that the plurality of filaments constituting the flat cable have the same bending rate. Thereby, when it moves so that the winding diameter of a flat-shaped cable may change, it can prevent that a load is applied to each filament. Moreover, it is preferable that all of the plurality of filaments constituting the flat cable have the same diameter. Thereby, when a flat cable moves, it can prevent that a load is applied only to a specific linear body (for example, small diameter cable).

  Further, the plurality of filaments constituting the flat cable include a multicore cable obtained by converging a plurality of single cables. As a result, the total number of filaments constituting the flat cable can be reduced.

  In order to solve the above-described problem, according to another aspect of the present invention, a turntable provided relatively rotatably on the upper surface of a casing, and a transfer for transferring a substrate mounted on the turntable. An arm, a rotating plate disposed above the casing and rotating around the vertical axis together with the rotating cable, and a plurality of strips arranged in a band are joined together and integrated, A flat cable wired in a space between the rotating plate and the bottom surface of the casing so that the linear bodies are arranged in a vertical direction, and the flat cable has one end at the rotation center of the rotating plate. There is provided a substrate transport mechanism characterized in that the other end is attached to the casing so as to be a spiral shape in which the winding diameter gradually increases downward from the position. .

  According to the present invention, when a cable is wired to a rotating plate that rotates together with the rotating table, the cable applied along with the rotation of the rotating table (rotating plate) while suppressing the load applied to each linear member constituting the cable. This prevents rubbing and entanglement when the cable moves, saving more space for cable wiring. Thereby, the whole board | substrate conveyance apparatus can be reduced more in size.

  According to the present invention, when a cable is wired to a rotating member, wiring is performed so that the form and trajectory can be easily predicted while suppressing the load on each linear body constituting the cable. As a result, rubbing and entanglement when the cable moves can be prevented, and the cable wiring space can be further reduced.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(Substrate transfer device)
First, an embodiment in which the present invention is applied to a substrate transfer apparatus for transferring a substrate will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing the configuration of the substrate transfer apparatus. The substrate transfer apparatus 100 includes a box-shaped casing 110, a disk-shaped rotary table 120 that is rotatably provided on the upper surface of the casing 110, and a horizontally-extensible transfer arm that is provided on the rotary table 120. 130. In the present embodiment, a cable wiring structure in which a cable 200 for supplying power, signals, and the like to the rotating mechanism is wired in a narrow space in the casing 110 is taken as an example.

  The casing 110 has a box shape with an open top surface, and a table driving motor 112 for rotating or turning the rotary table 120 about a central axis (vertical axis) is attached to the upper portion of the casing 110. ing. For example, the table driving motor 112 is provided with a flange portion 113, and the flange portion 113 is attached to the upper inner surface of the casing 110 with a fastening member such as a bolt. A rotating shaft (driving shaft) 114 of the table driving motor 112 protrudes from an opening on the upper surface of the casing 110 and is attached to the lower surface of the rotating table 120 via a flange portion 115.

  The transfer arm 130 is configured as an arm (manipulator) composed of, for example, a three-axis horizontal articulated robot (scalar robot) as shown in FIG. Specifically, the transfer arm 130 is formed by connecting two links (first link 132, second link 134) rotatable in a horizontal plane and an end effector 136 in series. More specifically, the base end portion of the first link 132 arranged at the lowermost position is attached to the rotary table 120 via a rotary shaft (shoulder shaft) 142 so as to be rotatable in a horizontal plane.

  A base end portion of the second link 134 disposed above the first link 132 is attached to a distal end portion of the first link 132 via a rotation shaft (elbow shaft) 144 so as to be rotatable in a horizontal plane. A proximal end portion of an end effector 136 configured as tweezers on which the substrate G can be placed and held is attached to the distal end portion of the second link 134 via a rotation axis (wrist axis) 146 so as to be rotatable in a horizontal plane. Yes.

  In the first and second links 132 and 134, transmission mechanisms (for example, pulleys, etc.) that transmit a driving force generated by an arm expansion / contraction driving motor (not shown) attached to the rotary table 120 to each link part or hand part. Belt, reducer, etc.). In the example shown in FIG. 1, the links 132 and 134 and the end effector are arranged so that the end effector 136 moves straight in the longitudinal direction with the rotation shaft (shoulder shaft) 142 at the base end of the first link 132 as the origin. 136 is configured to rotate in conjunction with each other.

  According to the transport arm 130, the arm G can be extended and contracted in the horizontal direction by driving the arm extension / contraction drive motor, and the substrate G can be transferred. The configuration of the transfer arm 130 is not limited to that shown in FIG. For example, the transfer arm 130 may be a linear slide type transfer arm including an arm that can be expanded and contracted by linear drive.

  Since such a transfer arm 130 rotates integrally with the rotary table 120, the arm can be expanded and contracted in a desired direction. In this case, the rotary table 120 is rotated to a desired angle by forward rotation or reverse rotation without making one rotation or more. Thereby, the length of the cable 200 can be minimized.

  On the lower surface of the turntable 120, a pipe 122 for passing wiring of internal devices such as the arm expansion / contraction drive motor disposed in the turntable 120 is attached. The pipe 122 is inserted into a through hole 124 formed so as to penetrate the table driving motor 112 and the rotating shaft 114 so that the lower end of the pipe 122 protrudes from below the table driving motor 112 and extends into the casing 110. Placed in. A disc-shaped rotating plate 126 is attached to the lower end of the pipe 122. The rotating plate 126 is arranged above the casing 110 so as to look into the wiring space 116 in the casing 110.

  Below the rotating plate 126, an upper connector 150 that connects wiring in the pipe 122 is attached via, for example, an L-shaped member 152. Accordingly, the pipe 122, the rotating plate 126, and the upper connector 150 rotate together with the rotary table 120. On the other hand, a lower connector 160 is attached to the bottom surface of the casing 110 via, for example, an L-shaped member 162. The upper connector 150 and the lower connector 160 are configured as, for example, multipolar connectors in which a plurality of terminals are accommodated in a connector housing.

  The upper connector 150 is for electrically interconnecting the wiring of an internal device such as an arm telescopic drive motor mounted on the rotary table 120 and the cable 200. The lower connector 160 is used to electrically connect the wiring of an external device such as a power supply device provided outside the casing 110 and the cable 200. The wiring of the internal device is connected to the internal device in the turntable 120 through the pipe 122, for example, and the wiring of the external device extends out of the casing 110 from a hole 118 provided at the bottom of the casing 110, for example. Connected to an external device.

  The upper connector 150 and the lower connector 160 are connected by a cable 200. The cable 200 is for supplying a signal and electric power of the above-mentioned arm extension / contraction drive motor, and details of the configuration will be described later. Note that a wiring (not shown) is attached to the lower connector 160, and the wiring extends to the outside from the hole 118 of the casing 110, for example. These wirings are connected to, for example, an external power supply device and a control device.

  In the substrate transport apparatus 100 having such a configuration, the cable 200 must be wired in the space 116 below the rotating plate 126 in the casing 110. While such cable wiring space is required to save more space than before, the number of cables that have to be wired increases with the increase in the number of functions such as the transfer arm provided on the rotary table. As the power supplied increases, the cable diameter increases.

  Further, the upper connector 150 that connects one end of the cable 200 rotates around the vertical axis, and the lower connector 160 that connects the other end of the cable 200 is fixed to the casing 110, so that the upper connector 150 rotates. The cable 200 itself also moves to change its form. Accordingly, it is necessary to predict the trajectory of the cable 200 and route the cable 200 so as to enter the narrow space 116 in any form.

  However, as the cable 200 used in the substrate transfer apparatus 100 according to the present embodiment, a cable that supplies power and signals to the rotation mechanism is composed of a number of cables having different diameters such as power cables and signal cables. If these cables are wired apart as they are, when the upper connector 150 rotates and the cables move, the cables are rubbed or entangled. In this case, a load is applied to the cable itself, which may cause damage to the cable or disconnection. In addition, when the upper connector 150 rotates and the cable moves, a large number of cables are intertwined and moved, so that it is very difficult to predict the overall form and movement trajectory.

  In this case, it is conceivable that these many cables are combined into one cable duct or cable bear. However, when such cable ducts or cable bears are combined, the larger the number of cables, the larger the diameter of each cable. The thicker the cable duct or the cable bear, the thicker the cable duct or the cable bear must be selected, and the narrow space 116 as in this embodiment cannot contain the cable duct or the cable bear itself. Even if it can be inserted, when the upper connector 150 rotates, there is a possibility that a large number of cables will rub against each other in the cable duct or cable carrier, and a load may be applied to the cable.

  Therefore, in the present embodiment, the cable 200 is a flat cable in which a plurality of strips arranged in a strip shape are joined to each other and integrated, and the flat cable 200 is gradually wound in the vertical direction. Wire so as to form a spiral. Thereby, the plurality of linear bodies constituting the cable 200 are not rubbed or entangled, and even if the diameter of the linear body constituting the cable 200 is large, the load applied to each linear body is reduced. can do.

  In addition, when the upper connector 150 rotates forward and backward together with the rotating plate 126, the spiral cable 200 moves in a monotonous manner (for example, twisted pendulum motion, Therefore, the overall form and the trajectory of the movement are extremely easy to predict. For this reason, since it becomes easy to determine the number of turns, the length, the positions of both ends, etc. of the cable 200 so that the cables 200 do not rub against each other or touch the inner surface of the casing 110, the cable 200 can be used efficiently in a narrow space. 200 can be wired.

(Cable configuration example and wiring)
The configuration example and wiring example of the cable 200 according to the present embodiment will be described in detail with reference to the drawings. FIG. 2 is a cross-sectional view of the cable 200 shown in FIG. First, a configuration example of the cable will be described. The cable 200 according to the present embodiment is formed by arranging a plurality of (here, five) linear bodies 210 to 250 in a line and joining them together as shown in FIG. Thereby, the cable 200 can be made into a flat shape.

  Each of the wire bodies 210 to 250 transmits a control signal between a controller and a plurality of power cables (power lines) that supply power to the motors and end effectors of each axis of the transfer arm, encoders and sensors, and various control devices. It is composed of a plurality of signal cables (signal lines) for sending and receiving. In addition, each linear body 210-250 may include not only a cable but also an electric wire, a hollow tube that supplies liquid or gas, and the like.

  Each of the wire bodies 210 to 250 is configured by bundling a plurality of single cables having the same diameter or different diameters one by one or plural. For example, when there is a single cable with a large diameter such as a power cable and a single cable with a small diameter such as a signal cable, a single large-diameter cable is used as a strip, and multiple small-diameter single cables are bundled together. By using a multi-core cable, the total number of filaments constituting the cable 200 can be reduced.

  For example, each of the wire bodies 210, 230, and 250 is configured by a single large-diameter single cable 212, 232, and 252, and the wire body 220 is formed by a multi-core cable in which three small-diameter single cables 222 are bundled. The linear member 240 is composed of a multicore cable in which two small-diameter single cables 242 are bundled.

  In addition, the shield processing is collectively performed for the linear body composed of a multi-core cable having a plurality of signal cables. In this way, the signal cable is shielded, thereby preventing malfunction due to noise generated from the electronic device itself and transmission / reception of the generated noise. In addition, when a multicore cable is not used, it is necessary to use a shielded cable for each signal cable (not shown). Each shielded cable is composed of, for example, a conductor core wire, an insulating endothelium covering the periphery of the core wire, a braided wire provided around the insulating endothelium, and an insulating sheath provided around the braided wire. .

  Each of these linear bodies 210 to 250 is adjusted in bending strength so as to have at least the same degree of bending. The bending strength can be adjusted, for example, by adjusting the thickness or material of the sheaths (for example, insulating jackets made of insulating resin) 214 to 254 of the filaments 210 to 250, or the gaps in the filaments 220 and 240. It is possible to adjust with braided wires 226, 246 and cushioning material to be filled. The braided wire is formed by knitting fine wires in a lattice shape, but copper foil or the like can be used as a shield member instead of the braided wire.

  In this way, by making the wire bodies 210 to 250 all have the same bending rate, it is possible to prevent the wire bodies 210 to 250 from being loaded when the winding diameter of the cable 200 changes. it can. In addition, since it is possible to eliminate the uneven bending strength of each of the wire bodies 210 to 250, the cable 200 can be moved in such a manner that only the winding diameter changes in a state that is always parallel to the vertical direction. Thereby, since the cables 200 are not inclined, it is possible to prevent the wound cables 200 from contacting each other.

  Further, in the cable 200 according to the present embodiment, not only the bending rate of each linear body 210 to 250 but also the diameter (thickness) is adjusted to be approximately the same. Regarding the adjustment of the diameter (thickness), it is possible to adjust the thickness and material of the sheath, and the fine thread or cushioning material that fills the gaps between the filaments in the same manner as the adjustment of the bending rate. For example, when a small-diameter cable and a large-diameter cable are arranged in a row and joined to form a flat shape, a load is easily applied to the small-diameter cable when the cable 200 moves. Therefore, as in the case of the cable 200 according to the present embodiment, by making all the strips 210 to 250 have the same diameter, when the cable 200 moves, only a specific strip (for example, a small-diameter cable) is loaded. Can be prevented.

  Next, a wiring example of the cable 200 will be described. Here, the rotary table 120 is controlled so that it can be rotated from the start point angle (here, 0 degrees) to the end point angle (here, 270 degrees) by a forward rotation and a reverse rotation to a desired angle. To do. In this case, the length of the cable 200 is preferably set such that the winding diameter of the cable 200 changes at least from the start point angle to the end point angle of the turntable 120 according to the rotation angle. Thereby, since the form and locus | trajectory of the cable 200 are limited according to the range of the rotation angle used with the turntable 120, the length of the cable 200 can be adjusted to the minimum necessary according to it.

  An example of the optimal wiring of the cable 200 in such a case will be described below with reference to FIGS. FIG. 3 is a diagram showing the appearance of the form of the cable 200 when the turntable 120 is at the start point angle, and FIG. 4 is a view showing the appearance of the form of the cable 200 when the turntable 120 is at the end point angle.

In this embodiment, the movement of the cable 200 from the state of the cable 200 when the turntable 120 as shown in FIG. 3 is at the start point angle to the state of the cable 200 when the turntable 120 as shown in FIG. 4 is at the end point angle. Wiring is performed so that the (trajectory) enters the space 116. Specifically, as shown in FIG. 3, the upper connector 150 to which one end of the cable 200 is connected and the lower connector 160 to which the other end of the cable 200 is connected are separated by a height H _AB in the vertical direction. And are spaced apart by a distance D _{AB in the} horizontal direction. Thus, the cable 200 can be spirally arranged in the height direction from one end on the inner diameter side to the other end on the outer shape side. At this time, in the cable 200, the linear bodies 210 to 250 are wound in parallel vertically.

  Here, the movement (trajectory) of the cable 200 when the cable 200 is wired in the space 116 of the casing 110 as described above is shown in FIGS. 5A to 5D. 5A to 5D are diagrams illustrating the movement of the cable 200 from the start point angle to the end point angle, and are views of the cable 200 as viewed from above. 5A to 5D, the rotary table 120 is omitted. However, since the rotary table 120 and the rotary plate 126 rotate together, the angle of the rotary table 120 will be described below as the angle of the rotary plate 126. 5A to 5D, the position (fixed) of the lower connector 160 is B, and the position (start point) of the upper connector 150 when the rotating plate 126 is at the start point angle is A.

  FIG. 5A shows a winding state of the cable 200 when the rotating plate 126 is 0 degree (degree) which is the starting point angle. FIG. 5B shows a winding state of the cable 200 when the rotating plate 126 is rotated 90 degrees clockwise from the starting point angle. FIG. 5C shows the rotating plate 126 clockwise from the starting point angle. The winding state of the cable 200 when rotating 180 degrees (degree) is shown. FIG. 5D shows the winding state of the cable 200 when the rotating plate 126 rotates 270 degrees (degree) which is the end point angle clockwise from the start point angle.

  As shown in FIG. 5A, when the rotating plate 126 is at the starting point angle, the cable 200 is in the most wound state, and the winding diameter of the cable 200 is the smallest. From this state, as the rotating plate 126 rotates as shown in FIGS. 5B and 5C, the cable 200 is unwound and the winding diameter of the cable 200 gradually increases. As shown in FIG. 5D, when the rotating plate 126 is at the end point angle, the cable 200 is in the most unfolded state, and the winding diameter of the cable 200 is also the largest. In this way, the winding state of the cable 200 can be accommodated in the space 116 without interfering with any state from FIG. 5A to FIG. 5D.

Thus, in the cable 200 that is spirally wired in the space 116 that extends in the height direction and the horizontal direction, the upper connector 150 that is one end of the cable 200 and the lower portion that is the other end when the rotary table 120 is at the starting point angle. The connector 160 is preferably arranged so as to be shifted in the horizontal direction. In the present embodiment, as shown in FIG. 3, it is arranged shifted by D _AB and upper connector 150 and lower connector 160 in the horizontal direction.

  In this way, by shifting the horizontal position of one end and the other end of the cable 200 when the turntable 120 is at the starting point angle, the winding diameter of the cable 200 can be expanded to some extent. Thereby, the height direction of the wiring space 116 of the cable 200 can be made lower.

  For example, when the rotary table 120 is at the starting point angle, the horizontal position of the upper connector 150 that is one end of the cable 200 and the horizontal position of the lower connector 160 that is the other end are both close to the rotation center of the rotary table 120. Since the winding diameter decreases as the distance between the cables is increased, the vertical space is necessary to prevent the cables 200 from interfering with each other.

In contrast, by separating the horizontal position of the upper connector 150 from the horizontal position of the lower connector 160 at the other end, the winding diameter can be gradually increased from the inside to the outside. The height H _AB between the upper connector 150 and the lower connector 160 can be further lowered while maintaining the state where the cables 200 do not interfere with each other. Thereby, space saving in the casing 110 which wires the cable 200 can be achieved.

Further, as shown in FIGS. 3 and 5A, when the rotary table 120 is at the starting point angle, the horizontal position of the upper connector 150 that is one end of the cable 200 is rotated to the arrangement side of the lower connector 160 that is the other end. It is preferable that the table 120 be shifted from the center of rotation. In the present embodiment, as shown in FIG. 3, it is arranged shifted by D _A top connector 150 from the rotation center of the turntable 120 on the same side as the lower connector 160.

  As a result, when the turntable 120 rotates and the cable 200 unwinds, it can be prevented from spreading greatly to the opposite side in the horizontal direction, so that the wiring space 116 of the cable 200 is also made narrower in the horizontal direction. be able to.

  For example, the closer the horizontal position of the upper connector 150, which is one end of the cable 200 when the turntable 120 is at the starting point angle, is closer to the center, the more the cable 200 is unfastened when the turntable rotates and the cable 200 is unwound. Since it spreads greatly in the space opposite to the arrangement side 150 (the space on the right side of the rotation center of the rotary table 120 in FIG. 3), a large space in the horizontal direction is required.

  On the other hand, the horizontal position of the upper connector 150, which is one end of the cable 200 when the turntable 120 is at the starting point angle, is shifted from the rotation center of the turntable 120, thereby moving to the opposite space. Since it is possible to suppress a large spread, the horizontal space can also be narrowed. Thereby, further space saving in the casing 110 in which the cable 200 is wired can be achieved.

  Although FIG. 3 shows an example in which the upper connector 150, which is one end of the cable 200, is attached to the bottom surface of the rotating plate 126, the present invention is not necessarily limited thereto. For example, the upper connector 150 may be attached to the side surface of the rotating plate 126. 3 shows an example in which the lower connector 160, which is the other end of the cable 200, is attached to the bottom surface of the casing 110. However, the present invention is not necessarily limited to this. For example, the lower connector 160 may be attached to the side surface of the casing 110.

  Incidentally, the number of turns and the length of the cable 200 described above are preferably determined according to the position of the end of the cable 200 and the size of the space 116 in which the cable 200 is routed. For example, the number of turns of the cable 200 in this embodiment is 1.5, for example. According to this, when the turntable 120 around which the cable 200 is wound most as shown in FIG. 5A rotates from the start point angle to the end point angle where the cable 200 is unwound as shown in FIG. 5D, FIGS. In any state, the cable 200 can be accommodated in the space 116. The number of turns of the cable 200 is not limited to the above.

  Further, in the present embodiment, a case has been described in which the rotation table 120 has a start point angle of 0 degree (degree) and an end point angle of 270 degrees (degree), but the present invention is not necessarily limited thereto. Depending on the use of the rotary table 120, the end point angle may be any angle within the range of 0 degrees (degrees) to 360 degrees (degrees).

  Further, in this embodiment, for example, as in the cable 200 shown in FIG. 3, the flat cable is wired in the cable wiring space below the rotating member, and one end of the flat cable is shifted from the rotational center of the rotating member. The other end is attached to the casing so that the winding diameter gradually increases toward the lower cable wiring space, but the present invention is not necessarily limited thereto. Although not shown, for example, when a cable wiring space is provided above the rotating member and a flat cable is wired in the space, one end of the flat cable is attached to a position shifted from the rotation center of the rotating member. The other end may be attached to the casing so that the winding diameter gradually increases toward the upper cable wiring space.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the case where the present invention is applied to the substrate transfer apparatus has been described. However, the present invention is not necessarily limited to this. For example, the present invention is applied to a rotating member such as a turning part of an industrial robot or a turntable in a machine tool. The present invention is also applicable when wiring a plurality of cables.

  The present invention can be applied to a cable wiring structure for wiring a plurality of cables for supplying electric power, signals, etc. to a mechanism with rotation, and a substrate transfer device.

It is sectional drawing which shows the board | substrate conveyance apparatus concerning embodiment of this invention. FIG. 2 is a cross-sectional view taken along the line P-P ′ of the cable shown in FIG. 1. It is a figure which shows the external appearance of the form of a cable when a turntable is a starting point angle. It is a figure which shows the external appearance of the form of a cable when a turntable is an end point angle. It is the figure which looked at the winding state of the cable when a turntable (rotary plate) is 0 degree which is a starting point angle from the upper direction. It is the figure which looked at the winding state of the cable when a turntable (rotary plate) rotated 90 degree | times from the starting point angle from the upper direction. It is the figure which looked at the winding state of the cable when a turntable (rotary plate) rotated 180 degree | times from the starting point angle from the upper direction. It is the figure which looked at the winding state of the cable when a turntable (rotary plate) rotated 270 degree | times from the starting point angle from the upper direction.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Substrate conveyance apparatus 110 Casing 112 Table drive motor 113 Flange part 114 Rotating shaft (drive shaft)
115 Flange 116 space (wiring space)
118 Hole 120 Rotary table 122 Piping 124 Through hole 126 Rotary plate 130 Transport arm 132, 134 Link 136 End effector 142 Rotary shaft (shoulder shaft)
144 Rotating shaft (elbow shaft)
146 Rotation axis (wrist axis)
150 Upper connector 152 L-shaped member 160 Lower connector 162 L-shaped member 200 Cable 210, 220, 2230, 240, 250 Line body 212, 222, 232, 242, 252 Single cable 214, 224, 234, 244, 254 Sheath 226 246 Braided wire G Substrate

Claims (9)

A casing having cable wiring space;
A rotating member disposed relatively rotatably so as to look into the cable wiring space in the casing;
After adjusting the bending strength so that the same bending rate is obtained for each of a plurality of types of wire bodies wired to the rotating member, one by one or by bundling a plurality of wires. , A cable that is arranged in a band and joined and integrated,
The cable is routed to the rotating member such that the linear bodies are arranged in a vertical direction, and is accommodated in the cable wiring space, and one end thereof is attached to a position deviated from the rotation center of the rotating member. A cable wiring structure, wherein the other end is attached to the casing so that the winding diameter gradually increases toward the cable wiring space. 2. The cable wiring structure according to claim 1, wherein the linear body is any one of a power cable, a signal cable, an electric wire, a hollow tube, or a combination thereof. The bending strength of the filaments is adjusted by one of the thickness and material of the sheath, or a combination thereof, for each one. The cable wiring structure according to claim 1 or 2, wherein the cable wiring structure is adjusted by any one or a combination of a braided wire to be filled, a buffer material and a thickness and a material of the sheath. A plurality of striatal constituting the front mute Buru, the cable wiring structure according to any one of claims 1-3, characterized in that all of the same diameter. The rotating member rotates in the forward and reverse direction from the starting point angle to the ending point angle,
Before the length of the mute Buru is of at least the rotary member start angle from the end angle to claim 1-4 for, characterized in that the winding diameter is changed length before listen Buru in accordance with the rotation angle The cable wiring structure according to any one of the above. Claim One end of the front listen Buru in the rotation angle of the rotary member when the winding diameter of the front listen Buru is minimized is from the other end of the front listen Buru characterized in that it is horizontally offset 5 Cable wiring structure as described in 1. One end of the pre-listen Buru in the rotation angle of the rotary member when the winding diameter of the front listen Buru is minimized is shifted to the same side as the other end of the pre-listen Buru viewed from the center of said rotary member The cable wiring structure according to claim 5 , wherein: A turntable provided relatively rotatably on the upper surface of the casing;
A transfer arm for transferring a substrate mounted on the rotary table;
A rotating plate disposed above the casing and rotating about a vertical axis together with the rotating cable;
The bending strength is adjusted so that the same bending rate is obtained for each of a plurality of types of wire bodies to be wired to the rotating member, one by one or by bundling a plurality of wires. And a cable that is arranged in a band and joined and integrated,
The cable is routed to the rotating member such that the linear bodies are arranged in a vertical direction, and is accommodated in the cable wiring space, and one end thereof is attached to a position deviated from the rotation center of the rotating member. A substrate transport mechanism, wherein the other end is attached to the casing so that the winding diameter gradually increases toward the cable wiring space. A cable wiring structure in which a cable is wired to a relatively rotatable rotating member,
The cable has the bending strength so that the same bending rate is obtained for all of the plurality of types of wire bodies wired to the rotating member, one by one or by bundling a plurality of wires. After adjusting, it is arranged in a band and joined and integrated .
Before Listen Buru is cabling, characterized in that one end of it attached to the position displaced from the vertical center of rotation of the rotary member, and wiring gradually winding diameter widens spirally toward therefrom in the vertical direction Construction.

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