JP4779799B2 - Case for measuring temperature characteristics of magnetic sensor and method for measuring temperature characteristics of magnetic sensor - Google Patents

Case for measuring temperature characteristics of magnetic sensor and method for measuring temperature characteristics of magnetic sensor Download PDF

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JP4779799B2
JP4779799B2 JP2006134600A JP2006134600A JP4779799B2 JP 4779799 B2 JP4779799 B2 JP 4779799B2 JP 2006134600 A JP2006134600 A JP 2006134600A JP 2006134600 A JP2006134600 A JP 2006134600A JP 4779799 B2 JP4779799 B2 JP 4779799B2
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直喜 西村
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Shimadzu Corp
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Description

この発明は、磁気センサの温度特性測定用ケース及び磁気センサの温度特性測定方法に関する。   The present invention relates to a temperature characteristic measuring case for a magnetic sensor and a temperature characteristic measuring method for the magnetic sensor.

従来、恒温槽内に磁気シールドケースを組み込み、その磁気シールドケース内に測りたい磁気センサを入れて磁気センサの温度試験（温度特性の測定）を行っていた。   Conventionally, a magnetic shield case is incorporated in a thermostatic chamber, and a magnetic sensor to be measured is put in the magnetic shield case, and a temperature test (measurement of temperature characteristics) of the magnetic sensor is performed.

また、通信機器の妨害電磁波に対する排除能力を測定する場合にも、電磁シールド筐体が使用される。   An electromagnetic shield housing is also used when measuring the ability of communication devices to eliminate electromagnetic interference.

この種の電磁シールド筐体を用いて、通信機器を所定の温度条件下で電波特性や電気特性を測定するものとして、電磁シールド筐体の内部空間を恒温槽として使用し、この筐体の開口部に対して着脱可能な送風管、筐体内の温度センサから内部空間の温度を示す電気信号を受信する温度観測器、筐体の内部空間の温度を設定する温度入力器、所定の恒温槽温度に達するまで送風管を通じて内部空間に温風又は冷風を強制対流させる送風機を備えた温度制御装置により、電磁シールド筐体内の温度を制御する技術が開示されている（例えば、特許文献１参照）。
特開平１１−１３４０３９号公報 Using this type of electromagnetic shield housing, the internal space of the electromagnetic shield housing is used as a thermostatic chamber for measuring radio wave characteristics and electrical characteristics of communication equipment under a predetermined temperature condition. Air duct that can be attached to and detached from the unit, a temperature observer that receives an electrical signal indicating the temperature of the internal space from a temperature sensor in the housing, a temperature input device that sets the temperature of the internal space of the housing, and a predetermined temperature chamber temperature A technology for controlling the temperature in the electromagnetic shield housing by a temperature control device provided with a blower that forcibly convects hot air or cold air in the internal space through the blower pipe until reaching to (for example, see Patent Document 1).
JP-A-11-134039

しかしながら、恒温槽内に磁気シールドケースを組み込む場合、磁気シールドケースの温度特性もあるので、磁気センサの出力は自身の温度特性と磁気シールドケースの温度特性とを加えたものとなり、磁気センサのみの温度特性を正確に測定することが困難である。また、恒温槽から発生する磁気、振動もノイズとなるため、磁気センサの温度特性のみを抽出することは容易ではない。   However, when a magnetic shield case is incorporated in a thermostatic chamber, the temperature characteristics of the magnetic shield case are also present, so the output of the magnetic sensor is the sum of its own temperature characteristics and the temperature characteristics of the magnetic shield case. It is difficult to accurately measure temperature characteristics. In addition, since the magnetism and vibration generated from the thermostatic chamber also become noise, it is not easy to extract only the temperature characteristics of the magnetic sensor.

また、上記特許文献１に記載された技術の場合、電磁シールド筐体の内部空間を恒温槽として使用し、この内部空間全体の温度を制御するので、電磁シールド筐体自体から発生する磁気が内部空間の温度変化による影響を受けて変動し、これがノイズとなるため、やはり磁気センサの温度特性だけを正確に測定することが困難である。   In the case of the technique described in Patent Document 1, the internal space of the electromagnetic shield casing is used as a thermostatic bath, and the temperature of the entire internal space is controlled, so that the magnetism generated from the electromagnetic shield casing itself is internal. Since it fluctuates under the influence of the temperature change of the space and this becomes noise, it is still difficult to accurately measure only the temperature characteristics of the magnetic sensor.

本発明は、そのような問題点に着目してなされたものであって、磁気センサのみの温度特性を正確かつ容易に測定することが可能な磁気センサの温度特性測定用ケース及び磁気センサの温度特性測定方法を提供することを目的としている。   The present invention has been made paying attention to such problems, and is a case for measuring the temperature characteristics of a magnetic sensor capable of accurately and easily measuring the temperature characteristics of only the magnetic sensor, and the temperature of the magnetic sensor. The object is to provide a characteristic measurement method.

前記課題を解決するために、この発明の磁気センサの温度特性測定用ケースは、磁気シールドケースと、この磁気シールドケース内に配置された恒温槽と、この恒温槽内に設けられた磁気センサと、前記恒温槽内に設けられて前記磁気センサの温度特性を測定するための温度センサと、前記磁気シールドケースの外部に配置され、前記恒温槽内の温度を所定範囲に調節するための冷熱発生源からなり、かつ全体が磁気シールドで覆われた温度調節器と、一端が前記恒温槽内に接続され、他端が前記磁気シールドケース外部に導出されて前記温度調節器に接続され、かつ非磁性体で構成された熱媒体と、を備えることを特徴とする。 In order to solve the above-mentioned problems, a temperature characteristic measuring case of the magnetic sensor of the present invention includes a magnetic shield case, a thermostat disposed in the magnetic shield case, and a magnetic sensor provided in the thermostat. A temperature sensor provided in the thermostatic chamber for measuring the temperature characteristics of the magnetic sensor; and a cold heat generator disposed outside the magnetic shield case for adjusting the temperature in the thermostatic chamber to a predetermined range. consists source, and the whole temperature controller which is covered by the magnetic shield, one end of which is connected to the constant temperature bath, the other end is connected to the temperature controller is derived to the magnetic shield case outside and non And a heat medium made of a magnetic material .

また、磁気シールドケースは全体が断熱材で覆われていることが好ましい。   Moreover, it is preferable that the magnetic shield case is entirely covered with a heat insulating material.

更に、恒温槽内に熱伝導性ブロックが配置され、この熱伝導性ブロックに磁気センサが配置されるとともに、この熱伝導性ブロックに温度センサが磁気センサに近接して配置されていることが好ましい。   Furthermore, it is preferable that a heat conductive block is arranged in the thermostat, a magnetic sensor is arranged in the heat conductive block, and a temperature sensor is arranged in the heat conductive block in the vicinity of the magnetic sensor. .

この発明の磁気センサの温度特性測定方法は、磁気シールドケースと、この磁気シールドケース内に配置された恒温槽と、この恒温槽内に設けられた磁気センサと、前記恒温槽内に設けられて前記磁気センサの温度特性を測定するための温度センサと、前記磁気シールドケースの外部に配置され、前記恒温槽内の温度を所定範囲に調節するための冷熱発生源からなり、かつ全体が磁気シールドで覆われた温度調節器と、一端が前記恒温槽内に接続され、他端が前記磁気シールドケース外部に導出されて前記温度調節器に接続され、かつ非磁性体で構成された熱媒体と、を備える磁気センサの温度特性測定用ケースを用いて、磁気センサの温度特性を測定する方法であって、被測定の磁気センサを前記恒温槽内に配置し、前記温度調節器より前記熱媒体を介して前記恒温槽内の温度を制御し、前記温度センサの出力と前記磁気センサの出力を前記磁気シールドケース外部に導出して、前記磁気センサの温度・出力特性を得ることを特徴とする。 The method for measuring temperature characteristics of a magnetic sensor according to the present invention includes: a magnetic shield case; a thermostat disposed in the magnetic shield case; a magnetic sensor provided in the thermostat; and the thermostat. A temperature sensor for measuring temperature characteristics of the magnetic sensor , and a cold heat source for adjusting the temperature in the thermostatic chamber to a predetermined range, which is arranged outside the magnetic shield case , and is entirely magnetic shield a temperature controller that is covered with one end connected to the constant temperature bath, the other end is connected to the temperature controller is derived to the magnetic shield case outside, and a heat medium, configured with a non-magnetic material The temperature characteristic of the magnetic sensor is measured using a case for measuring the temperature characteristic of the magnetic sensor, and the magnetic sensor to be measured is disposed in the thermostat and is placed in front of the temperature controller. The temperature in the thermostatic chamber is controlled via a heat medium, and the output of the temperature sensor and the output of the magnetic sensor are derived outside the magnetic shield case to obtain the temperature / output characteristics of the magnetic sensor. And

この発明（請求項１，４記載の発明）によれば、次の効果が得られる。
（１）今まで難しかった磁気センサの温度特性が簡単かつ正確に測れる。
（２）磁気センサの温度特性に磁気シールドケースの温度特性が影響しないので、磁気シールドケースの温度特性の計測が不要である。
（３）恒温槽の振動や磁気或いは電磁シールド筐体の磁気により発生するノイズの対策が不要である。
（４）磁気センサの温度特性に係る計測システムが小型化、省電力化できる。
（５）熱媒体や温度調節器からの磁気の影響を受けないので、磁気センサの温度特性をより正確に測定することができる。
（６）請求項２の構成とすることで、磁気シールドケース内、延いては恒温槽内に外部温度が影響し難くなるので、磁気センサの温度特性をより正確に測定することができる。
（７）請求項３の構成とすることで、磁気センサの温度を応答性良く測定することができるだけでなく、温度をより正確に測定できる。 According to this invention (inventions of claims 1 and 4 ), the following effects can be obtained.
(1) The temperature characteristics of a magnetic sensor, which has been difficult until now, can be measured easily and accurately.
(2) Since the temperature characteristics of the magnetic shield case do not affect the temperature characteristics of the magnetic sensor, it is not necessary to measure the temperature characteristics of the magnetic shield case.
(3) It is not necessary to take measures against noise generated by vibration of the thermostatic chamber, magnetism, or magnetism of the electromagnetic shield housing.
(4) The measurement system related to the temperature characteristics of the magnetic sensor can be reduced in size and power consumption.
(5 ) Since it is not affected by magnetism from the heat medium or the temperature controller, the temperature characteristics of the magnetic sensor can be measured more accurately.
(6) With the configuration of claim 2 , the external temperature is less likely to be affected in the magnetic shield case, and thus in the thermostat, so that the temperature characteristics of the magnetic sensor can be measured more accurately.
(7) With the configuration of the third aspect , not only can the temperature of the magnetic sensor be measured with good responsiveness, but also the temperature can be measured more accurately.

以下、実施の形態により、この発明を更に詳細に説明する。   Hereinafter, the present invention will be described in more detail with reference to embodiments.

その実施形態に係る磁気センサの温度特性測定用ケースの要部断面図を図１に示す。この温度特性測定用ケース１は磁気シールドケース１０を備え、この磁気シールドケース１０は、外熱の影響を受け難くするために全体が断熱材１１で覆われ、内部に恒温槽２が配置されている。恒温槽２は全体が断熱材２１で覆われ、この断熱材２１の内部に熱伝導性ブロックとしてアルミブロック２２が配置され、アルミブロック２２上に磁気センサ２３が設けられている。磁気センサ２３は磁気シールドケース１０の外部に導出されたケーブル２４を介して磁気シールドケース１０の外部のセンサ駆動回路２５に接続され、更にセンサ駆動回路２５からセンサ出力２６が取り出される。   FIG. 1 shows a cross-sectional view of a main part of a temperature characteristic measuring case of a magnetic sensor according to the embodiment. This temperature characteristic measuring case 1 includes a magnetic shield case 10, and the magnetic shield case 10 is entirely covered with a heat insulating material 11 so as to be hardly affected by external heat, and the thermostatic chamber 2 is disposed therein. Yes. The thermostat 2 is entirely covered with a heat insulating material 21, an aluminum block 22 is disposed as a heat conductive block inside the heat insulating material 21, and a magnetic sensor 23 is provided on the aluminum block 22. The magnetic sensor 23 is connected to a sensor drive circuit 25 outside the magnetic shield case 10 via a cable 24 led out of the magnetic shield case 10, and a sensor output 26 is taken out from the sensor drive circuit 25.

アルミブロック２２には磁気センサ２３の温度を測定するための温度センサ３０が取り付けられている。但し、磁気センサ２３の温度を温度センサ３０により応答性良く測定できるのであれば、必ずしもアルミブロック２２である必要はなく、他の良熱伝導性のもので代替可能である。また、磁気センサ２３の温度を正確に計る意味から、温度センサ３０は磁気センサ２３にできるだけ接近させて設ける方がよい。   A temperature sensor 30 for measuring the temperature of the magnetic sensor 23 is attached to the aluminum block 22. However, as long as the temperature of the magnetic sensor 23 can be measured by the temperature sensor 30 with good responsiveness, the aluminum block 22 is not necessarily required, and another good heat conductive material can be substituted. In addition, in order to accurately measure the temperature of the magnetic sensor 23, the temperature sensor 30 is preferably provided as close to the magnetic sensor 23 as possible.

温度センサ３０は磁気シールドケース１０の外部に導出されたケーブル３１を介して磁気シールドケース１０の外部に配置された温度調節器４０に接続されている。温度調節器４０は、例えば冷熱発生源からなるものであり、磁気シールドケース１０と磁気的に影響のない程度に離して配置されるとともに、磁気の影響が恒温槽２内の磁気センサ２３に及ばないように全体が磁気シールド４１で覆われている。   The temperature sensor 30 is connected to a temperature regulator 40 disposed outside the magnetic shield case 10 via a cable 31 led out to the outside of the magnetic shield case 10. The temperature controller 40 is composed of, for example, a cold heat generation source, and is arranged so as not to be magnetically affected from the magnetic shield case 10, and the influence of magnetism reaches the magnetic sensor 23 in the thermostat 2. The whole is covered with a magnetic shield 41 so as not to exist.

恒温槽２には熱媒体としてのヒートパイプ４２の一端が接続され、ヒートパイプ４２の他端は磁気シールドケース１０の外部に導出されて温度調節器４０に接続されている。このヒートパイプ４２も、磁気の影響が恒温槽２内の磁気センサ２３に及ばないように非磁性体で構成されている。なお、温度調節器４０によるヒートパイプ４２を介しての恒温槽２内の温度調整範囲は、例えば−１０〜５０℃である。   One end of a heat pipe 42 as a heat medium is connected to the thermostat 2, and the other end of the heat pipe 42 is led out of the magnetic shield case 10 and connected to the temperature controller 40. The heat pipe 42 is also made of a non-magnetic material so that the influence of magnetism does not reach the magnetic sensor 23 in the thermostat 2. In addition, the temperature adjustment range in the thermostat 2 via the heat pipe 42 by the temperature controller 40 is, for example, −10 to 50 ° C.

この温度特性測定用ケース１では、測定対象となる磁気センサ２３を恒温槽２内に配置し（アルミブロック２２上に取り付け）、温度調節器４０によりヒートパイプ４２を介して恒温槽２内の温度を制御し、磁気シールドケース１０の外部に導出される磁気センサ２３の出力と温度センサ３０の出力に基づいて、磁気センサ２３の温度・出力特性を計測する。   In this temperature characteristic measurement case 1, the magnetic sensor 23 to be measured is arranged in the thermostatic chamber 2 (attached on the aluminum block 22), and the temperature in the thermostatic chamber 2 through the heat pipe 42 by the temperature controller 40. And temperature / output characteristics of the magnetic sensor 23 are measured based on the output of the magnetic sensor 23 led out of the magnetic shield case 10 and the output of the temperature sensor 30.

この温度特性測定用ケース１によれば、磁気シールドケース１０内に恒温槽２があるので、磁気センサ２３の温度特性に磁気シールドケース１０の温度特性が影響せず、磁気シールドケース１０の温度特性も合わせて計測する必要がなく、磁気センサ２３のみの温度特性を容易に測定することができる。また、恒温槽２から発生する振動や磁気によるノイズの影響が及ばないので、そのノイズ対策が不要である。しかも、磁気センサ２３の温度特性に係る計測システムを小型化、省電力化できる。   According to this temperature characteristic measuring case 1, since the thermostatic chamber 2 is provided in the magnetic shield case 10, the temperature characteristic of the magnetic shield case 10 does not affect the temperature characteristic of the magnetic sensor 23, and the temperature characteristic of the magnetic shield case 10. In addition, it is not necessary to measure the temperature characteristics of the magnetic sensor 23 alone, and the temperature characteristics of only the magnetic sensor 23 can be easily measured. Moreover, since the influence of the noise generated by the vibration or magnetism generated from the thermostat 2 is not affected, no countermeasure against the noise is required. In addition, the measurement system related to the temperature characteristics of the magnetic sensor 23 can be reduced in size and power can be saved.

実施形態に係る磁気センサの温度特性測定用ケースの要部断面図である。It is principal part sectional drawing of the case for temperature characteristic measurement of the magnetic sensor which concerns on embodiment.

符号の説明Explanation of symbols

１ 温度特性測定用ケース
２ 恒温槽
１０ 磁気シールドケース
１１，２１ 断熱材
２２ アルミブロック（熱伝導性ブロック）
２３ 磁気センサ
３０ 温度センサ
４０ 温度調節器
４１ 磁気シールド
４２ ヒートパイプ（熱媒体） DESCRIPTION OF SYMBOLS 1 Case for temperature characteristic measurement 2 Constant temperature bath 10 Magnetic shield case 11, 21 Heat insulation material 22 Aluminum block (thermal conductive block)
23 Magnetic sensor 30 Temperature sensor 40 Temperature controller 41 Magnetic shield 42 Heat pipe (heat medium)

Claims (4)

磁気シールドケースと、
この磁気シールドケース内に配置された恒温槽と、
この恒温槽内に設けられた磁気センサと、
前記恒温槽内に設けられて前記磁気センサの温度特性を測定するための温度センサと、
前記磁気シールドケースの外部に配置され、前記恒温槽内の温度を所定範囲に調節するための冷熱発生源からなり、かつ全体が磁気シールドで覆われた温度調節器と、
一端が前記恒温槽内に接続され、他端が前記磁気シールドケース外部に導出されて前記温度調節器に接続され、かつ非磁性体で構成された熱媒体と、
を備えることを特徴とする磁気センサの温度特性測定用ケース。 Magnetic shield case,
A thermostat placed in the magnetic shield case;
A magnetic sensor provided in the thermostat;
A temperature sensor for measuring a temperature characteristic of the magnetic sensor provided in the thermostat;
A temperature controller disposed outside the magnetic shield case, comprising a cold source for adjusting the temperature in the thermostatic chamber to a predetermined range , and entirely covered with a magnetic shield ;
One end connected to the constant temperature bath, the other end is connected to the temperature controller is derived to the magnetic shield case outside, and a heat medium, configured with a non-magnetic material,
A case for measuring temperature characteristics of a magnetic sensor, comprising: 前記磁気シールドケースは全体が断熱材で覆われていることを特徴とする請求項１記載の磁気センサの温度特性測定用ケース。 2. The case for measuring temperature characteristics of a magnetic sensor according to claim 1, wherein the magnetic shield case is entirely covered with a heat insulating material. 前記恒温槽内に熱伝導性ブロックが配置され、この熱伝導性ブロックに前記磁気センサが配置されるとともに、この熱伝導性ブロックに前記温度センサが前記磁気センサに近接して配置されたことを特徴とする請求項１又は請求項２記載の磁気センサの温度特性測定用ケース。 A heat conductive block is disposed in the thermostatic chamber, the magnetic sensor is disposed in the heat conductive block, and the temperature sensor is disposed in proximity to the magnetic sensor in the heat conductive block. 3. A case for measuring temperature characteristics of a magnetic sensor according to claim 1 or 2 . 磁気シールドケースと、
この磁気シールドケース内に配置された恒温槽と、
この恒温槽内に設けられた磁気センサと、
前記恒温槽内に設けられて前記磁気センサの温度特性を測定するための温度センサと、
前記磁気シールドケースの外部に配置され、前記恒温槽内の温度を所定範囲に調節するための冷熱発生源からなり、かつ全体が磁気シールドで覆われた温度調節器と、
一端が前記恒温槽内に接続され、他端が前記磁気シールドケース外部に導出されて前記温度調節器に接続され、かつ非磁性体で構成された熱媒体と、
を備える磁気センサの温度特性測定用ケースを用いて、磁気センサの温度特性を測定する方法であって、
被測定の磁気センサを前記恒温槽内に配置し、前記温度調節器より前記熱媒体を介して前記恒温槽内の温度を制御し、前記温度センサの出力と前記磁気センサの出力を前記磁気シールドケース外部に導出して、前記磁気センサの温度・出力特性を得ることを特徴とする磁気センサの温度特性測定方法。 Magnetic shield case,
A thermostat placed in the magnetic shield case;
A magnetic sensor provided in the thermostat;
A temperature sensor for measuring a temperature characteristic of the magnetic sensor provided in the thermostat;
A temperature controller disposed outside the magnetic shield case, comprising a cold source for adjusting the temperature in the thermostatic chamber to a predetermined range , and entirely covered with a magnetic shield ;
One end connected to the constant temperature bath, the other end is connected to the temperature controller is derived to the magnetic shield case outside, and a heat medium, configured with a non-magnetic material,
A method for measuring temperature characteristics of a magnetic sensor using a case for measuring temperature characteristics of a magnetic sensor comprising:
A magnetic sensor to be measured is arranged in the thermostat, the temperature in the thermostat is controlled by the temperature controller via the heat medium, and the output of the temperature sensor and the output of the magnetic sensor are sent to the magnetic shield. A method for measuring temperature characteristics of a magnetic sensor, characterized in that the temperature / output characteristics of the magnetic sensor are obtained outside the case.
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KR101242085B1 (en) 2011-12-20 2013-03-11 한국표준과학연구원 Thermostat device for measuring a electromagnetic wave property

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