JP4710748B2 - Marking apparatus and marking method - Google Patents

Description

  The present invention relates to a marking device and a marking method for marking a surface of a target object.

  When performing drilling or the like on the target object, a portion to be drilled is irradiated with laser light in order to clearly indicate the drilling point. At this time, since the indication point may be difficult to understand depending on the laser beam, a marking device for marking the irradiation point of the laser beam on the target object surface has been proposed.

Patent Document 1 describes an apparatus that automatically marks a target object when the marking apparatus is moved on the surface of the target object and laser light is irradiated to a preset reference position in the apparatus. ing. Since this marking device automatically performs marking when the setting position is irradiated with laser light, it is possible to omit an artificial operation of the operator for marking. Therefore, it is possible to eliminate the marking error caused by the artificial operation and perform accurate marking.
Japanese Patent Application Laid-Open No. 07-043155

  In the marking device described in Patent Document 1, the laser light receiving device and the marking printer device are integrated. When the laser light reception is confirmed at the reference position of the light receiving device, the printer device automatically operates. A configuration for marking a target object is adopted. In this case, the ink as the marking means ejected from the printer device is ejected perpendicular to the target object. However, the laser beam does not necessarily enter the marking device perpendicularly. Therefore, even when laser light is incident on the marking device at an angle, the printer device ejects ink vertically, so the deviation between the ink ejection direction and the laser light irradiation direction causes the actual laser light on the target object to be There is a possibility of marking at a position different from the irradiation point. In addition, the marking device described in Patent Document 1 has a problem that work efficiency is poor because an operator must manually move the marking device until the laser beam is applied to the reference position of the light receiving device.

  The present invention has been made to cope with the above-described problem. The purpose of the present invention is to enable accurate marking even when the laser beam is incident at an angle, and the laser beam can be obtained without the operator manually moving the apparatus. An object of the present invention is to provide a marking device capable of grasping the irradiation point.

  In order to achieve the above object, a feature of the present invention is that a marking device having a marking member for marking an irradiation point of light irradiated on a target object from a light source is different from a predetermined first plane and the first plane. A light receiving portion arranged to be movable on a second plane, a light receiving portion driving means for driving the light receiving portion so that the light receiving portion moves on the first plane and the second plane, and the first Based on light reception information and movement information of the light receiving unit moving on the plane, first estimation means for estimating an irradiation point of light on the first plane, and light reception of the light receiving unit moving on the second plane Second estimation means for estimating a light irradiation point on the second plane based on the information and the movement information; a light irradiation point on the first plane estimated by the first estimation means; and Second guess Based on the light irradiation point on the second plane estimated by the means, the third estimation for estimating the light irradiation point on the third plane which is a plane different from the first plane and the second plane And marking member moving means for moving the marking member so as to mark the light irradiation point estimated by the third estimating means.

  According to the marking device of the present invention described above, the light receiving unit is moved on the first plane and the second plane by the light receiving unit driving means, and is irradiated from the light source toward the target object on two different planes. The received light is received. The irradiation point of light on the first plane is estimated from the light reception information of the light receiving unit on the first plane and the movement information of the light receiving unit on the first plane by the light receiving unit driving means. The light irradiation point on the second plane is estimated from the light reception information of the light receiving unit on the second plane and the movement information of the light receiving unit on the second plane by the light receiving unit driving means. Based on the position of the irradiation point on the first plane and the position of the irradiation point on the second plane estimated in this way, the position of the irradiation point on the third plane is estimated by the third estimation means. . Then, the marking member moving means moves the marking member to the position of the irradiation point on the third plane estimated by the third estimating means, and marking is performed at the position.

  Therefore, even when the light is irradiated in a state inclined with respect to the third plane, the inclination of the light is taken into consideration from the irradiation position of the light irradiated on the other two planes (the first plane and the second plane). The irradiation position of light on the third plane can be estimated. Therefore, if the marking device according to the present invention is disposed with the third plane facing the surface of the target object, and the target object is irradiated with light, even if the target object is irradiated with light inclined The position of the irradiation point of the light irradiated on the target object surface can be accurately estimated, and marking can be accurately performed on the position of the irradiation point of the light thus accurately estimated. Moreover, since the light irradiation point can be automatically searched by moving the light receiving unit by the light receiving unit driving means, the light irradiation can be performed without the operator manually moving the device and searching for the irradiation point. The point can be grasped.

  In the present invention, the “first plane” and the “second plane” are moving planes when the light receiving unit moves, such as a laser beam that irradiates the target object when the marking device marks the target object. The surface through which the light passes. In addition, the “third plane” is a surface that faces a surface including a portion to be marked among the surface of the target object when the marking apparatus performs marking on the target object. These three planes are different planes. These three planes are preferably parallel.

  In the above invention, the “light receiving unit” may detect light and output information related to the detected light to the outside. Moreover, it is good to output the physical quantity (for example, electric current) proportional to the detected light intensity to the outside. An example of the light receiving unit is a CCD (Charge Coupled Device). The “light reception information” is information that can be used to determine whether or not the light receiving unit has detected light, and is preferably information that indicates the intensity of light received by the light receiving unit. The “movement information” is information indicating the amount of movement of the light receiving unit by the light receiving unit driving means on the first plane or the second plane. Examples of the movement information include a movement distance from a predetermined reference position on the first plane or the second plane.

  In the above invention, the light receiving unit is moved on the first plane and the second plane by the light receiving unit driving means. At this time, it is preferable that the light receiving unit be moved so as to receive light passing through each plane. That is, when the light is irradiated on the surface of the target object and the light passes through the first plane and the second plane, the light receiving unit moves within the area including the light passage portion in both planes. Is good. In addition, when the first plane and the second plane are finite regions in the structure of the apparatus, and these finite regions are the first plane portion and the second plane portion, respectively, the first plane portion and the second plane It is preferable that the apparatus is arranged with respect to the target object so that light passes through the part, and the light receiving part moves in substantially the entire area of the first plane part and the second plane part. Further, when the third plane is a finite region in terms of the structure of the apparatus, and this finite region is the third plane portion, the first plane portion, the second plane portion, and the third plane portion are substantially parallel to each other. And should be coaxial in the vertical direction. Further, it is preferable that all the flat portions are configured to have substantially the same shape.

  In addition, the light receiving section preferably has a long light receiving area in which a plurality of light receiving elements are arranged. The light receiving unit may be moved in a direction perpendicular to the longitudinal direction of the elongated light receiving region by the light receiving unit driving means. By using the long light receiving part as described above and moving the light receiving part in a direction perpendicular to the longitudinal direction, the light receiving information can be obtained for a wide rectangular area simply by moving the light receiving part in one direction. Obtainable. The elongated light receiving region may be formed by arranging a plurality of light receiving elements such as CCDs. The light receiving elements may be arranged in an orderly matrix, a staggered arrangement, or a cluttered arrangement. Further, not only an area sensor formed in a double row but also a line sensor formed in a single row may be used.

  In addition, the first estimating means may determine the longitudinal direction of the light receiving area of the light receiving unit on the first plane from the intensity distribution of the light received in the light receiving area of the light receiving unit moving on the first plane. A first position determining means for determining a first position, which is an irradiation position of light, and a moving distance on the first plane of the light receiving portion moved by the light receiving portion driving means on the first plane. It is good to have the 2nd position determination means which determines the 2nd position which is the irradiation position of the light in the movement direction of the said light-receiving part. Further, the second estimating means is configured to determine, in the longitudinal direction of the light receiving region of the light receiving unit on the second plane, from an intensity distribution of light received by the light receiving region of the light receiving unit moving on the second plane. From the moving position on the second plane of the light receiving unit moved by the light receiving unit driving unit, a third position determining unit that determines a third position that is a light irradiation position, on the second plane It is good to have a 4th position determination means which determines the 4th position which is the irradiation position of the light in the movement direction of the said light-receiving part. And the said 3rd estimation means is good to estimate the irradiation point of the light in said 3rd plane based on said 1st position, said 2nd position, said 3rd position, and said 4th position.

  In this case, the third estimating means calculates the coordinate value (X1, Y1) of the irradiation point of the light in the first coordinate system defined on the first plane from the first position and the second position, A coordinate value (X2, Y2) of a light irradiation point in a second coordinate system defined on the second plane is calculated from the third position and the fourth position, and the coordinate value (X1, Y1), Based on the coordinate values (X2, Y2), the relationship between the first coordinate system and the third coordinate system defined on the third plane, and the relationship between the second coordinate system and the third coordinate system The coordinate value (X3, Y3) of the light irradiation point in the third coordinate system may be estimated.

  According to the above invention, by analyzing the intensity distribution of the light received in the long light receiving region of the light receiving unit when the light receiving unit is moving on the first plane, The center position (first position) of the light irradiation point in the longitudinal direction of the light receiving unit can be estimated. In addition, the movement amount of the light receiving unit on the first plane when the center position is estimated is obtained from the light receiving unit driving means, so that the movement direction of the light receiving unit on the first plane (the longitudinal direction of the light receiving unit) It is possible to estimate the light irradiation position (second position) in a direction perpendicular to the first position. If a first coordinate system is defined on the first plane, the coordinate values (X1, Y1) of the irradiation point on the first plane represented by the first position and the second position in the first coordinate system are Can be identified. Similarly, if the second coordinate system is defined on the second plane, the coordinate value (X2) in the second coordinate system of the irradiation point on the second plane represented by the third position and the fourth position is defined. , Y2) can also be specified. If a third coordinate system is also defined on the third plane, these coordinate values, the relative positional relationship between the first coordinate system and the third coordinate system, the second coordinate system and the third coordinate system Based on the relative positional relationship with the system, the coordinate value of the light irradiation point in the third coordinate system can be estimated. In this way, it is possible to accurately estimate the irradiation point of light irradiated on the third plane that theoretically faces the target object surface as the coordinate value in the third coordinate system.

  In this case, the first coordinate system, the second coordinate system, and the third coordinate system are all planar coordinate systems, and the origin of each coordinate axis is a point on one straight line, and this straight line is defined by all the coordinates. It should be perpendicular to the coordinate plane of the system. By doing so, when light passes vertically through each plane part, the coordinate values in the coordinate system of each plane part are equal, and each plane part has a relationship of being separated by a predetermined distance in the vertical direction. Since the predetermined distance can be easily known from the structure of the apparatus, the coordinate value of the light irradiation point in the third coordinate system can be estimated more easily.

  The light receiving unit driving unit includes a first light receiving unit driving unit that moves the light receiving unit on the first plane, and a second light receiving unit driving unit that moves the light receiving unit on the second plane. It may be a thing. If it does in this way, the freedom degree in the movement of the light-receiving part which moves on a 1st plane and a 2nd plane can be raised. In this case, the light receiving unit may include a first light receiving unit that moves on the first plane and a second light receiving unit that moves on the second plane. By doing so, the light receiving unit can move separately on the first plane and the second plane, and the movement of each light receiving unit can be controlled independently. Further, when the marking device is configured with one light receiving unit, it is preferable that the light receiving unit includes a plane moving unit that moves the light receiving unit from the first plane to the second plane. Since one light receiving unit can be moved from the first plane to the second plane by the plane moving means, light can be received on both planes by one light receiving unit.

  Another feature of the present invention is a marking method for marking an irradiation point of light irradiated on a target object from a light source, and receives light on a first plane which is a plane through which light emitted from the light source passes. A first light receiving step for receiving light from the light source on the first plane, light reception information on the light received in the first light receiving step, and the first light receiving step. A first irradiation point estimating step for estimating a position of an irradiation point of light on the first plane based on movement information of the light receiving unit; a plane through which light emitted from the light source passes; and the first plane The second light receiving step for receiving light from the light source on the second plane, and the light receiving information of the light received in the second light receiving step, Move on the second plane A second irradiation point estimating step for estimating a position of an irradiation point of light on the second plane based on the movement information of the light receiving unit; and the first plane estimated in the first irradiation point estimating step Based on the light irradiation point on the top and the light irradiation point on the second plane estimated in the second irradiation point estimation step, the light irradiation point on the third plane facing the surface of the target object The third irradiation point estimation step to be estimated, the marking member moving step for moving the marking member to the position of the light irradiation point estimated in the third irradiation point estimation step, and the marking member moving step are moved. And a marking step of marking the surface of the target object with the marking member.

  According to the method of the present invention, the light emitted from the light source is received by the light receiving unit on the first plane and the second plane. The light irradiation point on the first plane is estimated from the light reception information of the light received by the light receiving unit on the first plane and the movement information of the light receiving unit moving on the first plane. Similarly, the irradiation point of light on the second plane is also estimated. Then, from the estimated positions of the light irradiation points on the first and second planes, the light irradiation points on the third plane facing the surface of the target object are estimated. And a marking member is moved to the irradiation point of the light on the estimated 3rd plane, and marking is performed in the position. Therefore, it is possible to accurately mark the surface of the target object.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described. FIG. 1 is an external view of a stamp device as a marking device in the present embodiment. As shown in the figure, the stamp device 100 has an outer frame 12 and a base 13 that form an outer shell. The outer frame 12 has an opening in the lower part of the figure and a rectangular window part 14 formed on the upper surface. The window part 14 has a transparent material (for example, glass, polycarbonate resin, acrylic resin, etc.). A window formed by is attached. The base 13 is disposed in the lower part of the outer frame 12 in the figure, is covered with the outer frame 12 in a state facing the lower opening of the outer frame 12, and is coupled to the outer frame 12 with screws at four corners.

  An activation button 16 is attached to the upper surface of the outer frame 12. The operation of the stamp device 100 is started by pressing the activation button 16. A stop lamp 18, an operation lamp 20, and a warning lamp 22 are provided on the upper surface of the outer frame 12. The stop lamp 18 is turned on when the operation of the stamp apparatus 100 is stopped and turned off when the operation is being performed. The operation lamp 20 is turned on when the stamp device 100 is operating, and is turned off when the operation is stopped. The warning lamp 22 blinks for a predetermined time when the stamp apparatus 100 is activated and attempts to detect laser light, which will be described later, but cannot be detected, and then turns off.

  FIG. 2 is a schematic perspective view showing the internal structure of the apparatus set on the base 13. In FIG. 2, for convenience of explanation, the illustrated arrow A direction is the forward direction, the illustrated arrow B direction is the backward direction, the illustrated arrow C direction is the left direction, and the illustrated arrow D direction is the right direction. It shall be orthogonal. As shown in FIG. 2, the base 13 is formed in a square shape, and a large square hole 13a is formed at the approximate center thereof. Further, four struts 31 (first strut 31a, second strut 31b, third strut 31c, and fourth strut 31d) are erected vertically from the vicinity of the four corners on the base 13. Between the first column 31a and the third column 31c, a first front / rear frame 32a is attached so as to connect the upper ends of both columns 31a, 31c. Similarly, a second front / rear frame 32b is attached between the second column 31b and the fourth column 31d so as to connect the upper ends of both columns 31b and 31d. The first front / rear frame 32a and the second front / rear frame 32b are arranged in parallel at the same height position.

  Further, in the portion close to the lower end of each column 31, there are two front and rear frames 32 (third front and rear frame 32c, fourth front and rear frame 32d) and two left and right frames 33 (first left and right frames 33a and second left and right frames). 33b) is attached. The third front / rear frame 32c is attached between the first support post 31a and the third support post 31c so as to be positioned vertically below the first front / rear frame 32a. Similarly, the fourth front and rear frame 32d is attached between the second support column 31b and the fourth support column 31d so as to be positioned vertically below the second front and rear frame 32b. The third front / rear frame 32c and the fourth front / rear frame 32d are arranged in parallel at the same height position. The first left and right frame 33a is attached between the first support 31a and the second support 31b, and the second left and right frame 33b is attached between the third support 31c and the fourth support 31d. , 33b are arranged in parallel at the same height position.

  The first front and rear frames 32a and 32b are respectively provided with guide grooves 34a and 34b on the upper surface in the figure along the longitudinal direction (front and rear direction). Similarly, guide grooves 34c and 34d are formed in the illustrated upper surfaces of the third front and rear frames 32c and 32d along the longitudinal direction (front and rear direction), respectively. A first moving body 35 is attached to the guide grooves 34a and 34b of the first front and rear frames 32a and 32b so as to straddle both grooves. A second moving body 37 and a stamper moving body 40 are attached to the guide grooves 34c and 34d of the third front and rear frames 32c and 32d so as to straddle both grooves.

  As shown in the drawing, the first moving body 35 is formed in a long plate shape in the left-right direction, and protrusions 35a, 35a along the front-rear direction are formed on the lower surfaces of both ends. The protrusions 35a and 35a are fitted in the guide grooves 34a and 34b of the first and second front and rear frames 32a and 32b, respectively. Therefore, the first moving body 35 is allowed to move in the front-rear direction by the protrusions 35a, 35a being guided by the guide grooves 34a, 34b, and the movement in the left-right direction is restricted. A first light receiving sensor 36 is attached to the upper surface of the first moving body 35 in the figure. In the present embodiment, the first light receiving sensor 36 is composed of a line sensor in which CCDs (charge coupled devices) are arranged in a single row, and when light is irradiated to the arrangement region of the CCD, it corresponds to the intensity of the light. Current is generated. In addition, the light receiving region of the first light receiving sensor 36 is formed in an elongated shape in the left-right direction following the shape of the first moving body 35.

  On the lower surface on the left end side of the first moving body 35, a protruding portion 35b protruding downward is formed. A screw hole 35c penetrating in the front-rear direction is formed in the protruding portion 35b. A first screw 35d is screwed into the screw hole 35c. The first screw 35d has a rod shape extending in the front-rear direction. The output shaft of the first motor 35e is connected to the front end of the first screw 35d. The first motor 35e is fixedly attached to a bracket 35f formed by a business trip in the right direction from the right side surface on the upper end side of the second support post 31b. Further, the rear end of the first screw 35d is rotatably supported by a bearing member 35h such as a bearing attached to a bracket 35g formed by a business trip in the right direction from the right side surface on the upper end side of the fourth support 31d. ing.

  Therefore, when the first motor 35e is driven to rotate, this rotation is transmitted to the first screw 35d via the output shaft. The first moving body 35 in which the screw hole 35c screwed to the first screw 35d is formed by the rotation of the first screw 35d moves along the axial direction of the first screw 35d. Since the first light receiving sensor 36 is attached to the upper surface of the first moving body 35, the first light receiving sensor 36 is a plane including the upper surface of the first moving body 35 by driving the first motor 35e (first plane). It will be possible to move within. Moreover, the moving direction of the 1st light receiving sensor 36 is a direction perpendicular | vertical to the elongate light-receiving area | region of the 1st light receiving sensor 36 evidently from a figure.

  Similarly to the first moving body 35, the second moving body 37 has a long plate shape in the left-right direction. As shown in FIG. 2, protrusions 37a, 37a along the front-rear direction are formed on the lower surfaces of both ends. Has been. The protrusions 37a and 37a are fitted into the guide grooves 34c and 34d of the third and fourth front and rear frames 32c and 32d, respectively. For this reason, the protrusion 37a, 37a is guided by the guide grooves 34c, 34d so that the second moving body 37 can move in the front-rear direction, and the movement in the left-right direction is restricted. A second light receiving sensor 38 is attached to the upper surface of the second moving body 37 in the figure. Similarly to the first light receiving sensor 36, the second light receiving sensor 38 is constituted by a line sensor in which CCDs (charge coupled devices) are arranged in a single row, and is formed in a long shape in the left-right direction.

  On the lower surface on the left end side of the second moving body 37, a protruding portion 37b protruding downward is formed. A screw hole 37c penetrating in the front-rear direction is formed in the protruding portion 37b, and a second screw 37d is screwed into the screw hole 37c. The second screw 37d has a rod shape extending in the front-rear direction, and an output shaft of a second motor 37e attached to the left end portion of the first left and right frame 33a is connected to the front end thereof. The rear end of the second screw 37d is rotatably supported by a bearing member (not shown) such as a bearing attached to the left end of the second left and right frame 33b.

  Therefore, when the second motor 37e is driven to rotate, this rotation is transmitted to the second screw 37d via the output shaft. The second moving body 37 formed with the screw hole 37c screwed into the second screw 37d is moved along the axial direction of the second screw 37d by the rotation of the second screw 37d. Since the second light receiving sensor 38 is attached to the upper surface of the second moving body 37, the second light receiving sensor 38 is driven by the second motor 37e so that the plane including the upper surface of the second moving body 37 (second plane). ) Will be movable. Moreover, the moving direction of the second light receiving sensor 38 is a direction perpendicular to the long light receiving region of the second light receiving sensor 38 as is apparent from the drawing.

  The stamper moving body 40 is held by the stamper guide portion 41 that is formed in a long shape in the left-right direction, a stamper holding portion 42 that is guided by the stamper guide portion 41 and can move in the left-right direction, and the stamper holding portion 42. A stamper 43 is provided. On the lower surfaces of both ends of the stamper guide portion 41 in the figure, protrusions 41a and 41a are formed along the front-rear direction. The protrusions 41a and 41a are fitted into the guide grooves 34c and 34d of the third and fourth front and rear frames 32c and 32d, respectively. Therefore, the stamper guide portion 41 is allowed to move in the front-rear direction by the protrusions 41a, 41a being guided by the guide grooves 34a, 34b, and the movement in the left-right direction is restricted. Further, a projecting portion (not shown) projecting downward is formed on the lower surface on the right end side of the stamper guide portion 41, and a screw hole (not shown) penetrating in the front-rear direction is formed in this projecting portion. Yes. A third screw (not shown) is screwed into this screw hole. The third screw has a rod shape extending in the front-rear direction, and an output shaft of a third motor 41e fixed to the right end side of the first left and right frame 33a is connected to the front end thereof. The rear end of the third screw is rotatably supported by a bearing member (not shown) such as a bearing attached to the right end of the second left and right frame 33b. Therefore, when the third motor 41e is rotationally driven, this rotation is transmitted to the third screw via the output shaft. The stamper guide part 41 in which the screw hole screwed into the third screw is formed by the rotation of the third screw moves along the axial direction (front-rear direction) of the third screw.

  The stamper guide portion 41 has a guide groove 41b formed on its upper surface along the longitudinal direction (left-right direction). A stamper holding portion 42 is engaged with the guide groove 41b. The stamper holding portion 42 has a rectangular parallelepiped shape, and as shown in the drawing, a protrusion 42a is formed on the lower surface along the left-right direction. The protrusion 42 a is fitted in the guide groove 41 b of the stamper guide portion 41. Accordingly, the stamper holding portion 42 is allowed to move in the left-right direction by the protrusion 42a being guided by the guide groove 41b, and the movement in the front-rear direction is restricted.

  A screw hole 42c penetrating in the left-right direction is formed on the rear end side of the stamper holding portion 42. A fourth screw 42d is screwed into the screw hole 42c. The fourth screw 42d has a bar shape extending in the left-right direction, and an output shaft of a fourth motor 42e fixed to a bracket 41g formed at the right end of the stamper guide portion 41 is connected to the right end thereof. is doing. The left end of the fourth screw 42d is rotatably supported by a bearing member (not shown) such as a bearing attached to a bracket 41g formed on the left end of the stamper guide portion 41. Therefore, when the fourth motor 42e is driven to rotate, this rotation is transmitted 42d to the fourth screw via the output shaft. The stamper holding part 42 in which the screw hole 42c screwed with the fourth screw 42d is formed by the rotation of the fourth screw 42d moves along the axial direction (left-right direction) of the fourth screw.

  On the front end side of the stamper holding portion 42, a hole portion penetrating vertically is formed, and a stamper 43 is attached to the hole portion. The stamper 43 is formed in a long and thin pen shape as shown in the drawing, and a pen tip capable of marking a target object is attached to the tip (lower end in the figure). The nib can be expanded and contracted in the vertical direction in the figure so that it can protrude from the hole 13a of the base 13, and the object to which the nib faces the hole 13a by this expansion / contraction operation. The surface of the object is touched, and marking is performed on the surface of the target object. The stamper 43 is held by the stamper holding portion 42 as described above, and the stamper holding portion 42 is guided by the stamper guide portion 41. Therefore, the stamper 43 can be moved back and forth and right and left on the plane facing the hole 13a of the base 13 by moving the stamper guide portion 41 back and forth and the stamper holding portion 42 left and right.

  Inside the outer frame 12 shown in FIG. 1, a controller for controlling the operation of the stamp device 100 and an electric circuit connected to the controller are attached. FIG. 3 is a block diagram showing an electrical connection relationship of the controller 50. As shown in FIG. 3, the first motor 35e, the second motor 37e, the third motor 41e, the fourth motor 42e, the start button 16, the stop lamp 18, the operation lamp 20, the warning lamp 22, the stamper 43, the first light receiving sensor. 36 and the second light receiving sensor 38 are electrically connected to the controller 50. The controller 50 includes a microcomputer including a CPU, a ROM, a RAM, and the like as main components. The motors 35e, 37e, 41e, and 42e are driven and controlled based on a command signal from the controller 50, and the lamps 18, 20, and 22 are controlled to be turned on, off, and blinking based on the command signal from the controller 50. . Further, based on the command signal from the controller 50, the operation of marking the target object by the expansion and contraction of the stamper 43 is controlled. The first light receiving sensor 36 and the second light receiving sensor 38 output a current value output according to the intensity to the controller 50 when light is received. The activation button 16 outputs a signal (activation signal) indicating that the activation button 16 has been pressed by the operator to the controller 50.

  Further, each motor 35e, 37e, 41e, 42e has a movement distance calculation circuit 51 (first movement distance calculation circuit 51a, second movement distance calculation circuit 51b, third movement distance calculation circuit 51c, fourth movement distance calculation circuit, respectively. 51d). The first movement distance calculation circuit 51a and the second movement distance calculation circuit 51b are incorporated in the first motor 35e and the second motor 37e when receiving a command to start driving the first motor 35e and the second motor 37e from the controller 50. In addition, the counting of the number of pulses of the pulse signal input from each encoder 35e1 and 37e1 is started, the moving distance of the first moving body 35 and the second moving body 37 corresponding to the pulse count number is calculated, and the digital signal is obtained. Output to the controller 50. When the controller 50 receives a command signal to stop driving the first motor 35e or stop driving the second motor 37e, the calculation of the movement distance for the motor related to the stop command is stopped. Further, a command to return the first and second light receiving sensors 36 and 38 to the initial position is received from the controller 50, and thereafter no pulse signal is input from the encoders 35e1 and 37e1 of the first and second motors 35e and 37e. If it is, a signal indicating completion of movement to the initial position is output to the controller 50, and the pulse count number is reset. The first movement distance calculation circuit 51a and the second movement distance calculation circuit 51b receive pulses from the encoders 35e1 and 37e1 even though the drive commands for the first and second motors 35e and 37e are received from the controller 50. When there is no signal input, a limit position signal is output to the controller 50.

  When the third movement distance calculation circuit 51c and the fourth movement distance calculation circuit 51d receive a movement command for the stamper 43 from the controller 50, they are input from the encoders 41e1 and 42e1 incorporated in the third motor 41e and the fourth motor 42e. The counting of the number of pulses of the pulse signal is started, the moving distance corresponding to the number of counts is calculated, and the digital signal is output to the controller 50. When receiving a command to stop the movement of the stamper 43 from the controller 50, the calculation of the movement distance is stopped. When the controller 50 receives a command to move the stamper 43 to the initial position and no pulse signal is input from the encoders of the third and fourth motors 41e and 42e after that, the controller 50 moves to the initial position. A signal indicating completion is output and the count number is reset.

  In the stamp apparatus 100 configured as described above, the stamp apparatus 100 is placed on the surface of the target object so that the irradiation point on the target object enters the window portion 14 when the operator irradiates the target object with laser light. Move and fix the stamp device 100 to the target object. Thereafter, when it is determined that the laser beam has passed through the window portion 14, the worker presses the activation button 16 of the stamp device 100. Then, an activation signal is input to the controller 50, and the controller 50 obtains an accurate position of the laser beam irradiation point on the target object by executing the irradiation point calculation program shown in FIGS.

  The irradiation point calculation program is started in step S100 of FIG. 4, and initialization is first executed in step S101. This initialization includes returning the first moving body 35, the second moving body 37, the stamper guide portion 41, and the stamper holding portion 42 to the initial positions. In the present embodiment, the initial positions of the first moving body 35 and the second moving body 37 are the front end of the stamp device 100, the initial position of the stamper guide portion 41 is the rear end, and the initial position of the stamper holding portion 42 is It is the left end.

  After initialization is performed in step S101, the controller 50 sets 1 as the initial values of the counter values n and m in step S102. Next, in step S104, the stop lamp 18 is turned off and the operation lamp 20 is turned on. This notifies the operator that stamping (marking) processing has started. Next, the controller 50 drives the first motor 35e to rotate forward in step S106. Thereby, the first motor 35e rotates, and the first moving body 35 moves from the initial position (front end position in FIG. 2) to the rear side in FIG. At this time, the pulse signal output by the encoder 35e1 of the first motor 35e is input to the first movement distance calculation circuit 51a.

  As described above, when the first moving body 35 is moved by driving the first motor 35e, the first light receiving sensor 36 provided on the upper surface of the first moving body 35 is also moved in the first plane. Since this moving direction is a direction (front-rear direction) perpendicular to the light receiving area of the first light receiving sensor 36 formed in a long shape, the first light receiving sensor 36 passes through a wide rectangular area in the first plane. Will do. Therefore, the first moving body 35 only moves once from the initial position to the rear end, and the first light receiving sensor receives almost all the light incident from the window portion 14 formed in the outer frame 12 and passing through the first plane. 36 can receive light.

  After driving the first motor 35e in step S106, the controller 50 causes the first light receiving sensor 36 to move while the first motor 35e is driven and the first light receiving sensor 36 is moving on the first plane in step S108. Determine whether laser light is detected. This determination is to determine whether or not laser light is detected in any one of all the light receiving elements constituting the first light receiving sensor 36. When the laser beam is detected, the process proceeds to step S110, and when the laser beam is not detected, the process proceeds to step S152.

  When it is determined in step S108 that the first light receiving sensor 36 has not detected the laser beam and the process proceeds to step S152, a limit position signal is input from the first movement distance calculation circuit 51a in step S152. It is determined whether or not. If the limit position signal is not input, the first moving body 35 is still considered to be movable, so the process returns to step S108 and the first light receiving sensor 36 detects the laser light again while the first motor 35e is being driven. It is determined whether it is done. If it is determined in step S152 that the limit position signal has been input, the process proceeds to step S154.

  If it is determined in step S152 that the limit position signal has been input, it is impossible to move the first moving body 35 any more. In such a situation, that is, a situation in which the limit position signal is input from the first movement distance calculation circuit 51a without receiving the laser light by the first light receiving sensor 36, the irradiation direction of the laser light is greatly increased from the stamp device 100. This may occur when the laser beam is not incident from the window 14 of the stamp apparatus 100. Therefore, since the laser beam cannot be detected by the stamp device 100 in such a situation, the driving of the first motor 35e is stopped in the next step S154, and then the first moving body 35 is initialized in the step S155. Move to position. By the process of step S155, the first motor 35e is rotationally driven in the reverse direction, and the first moving body 35 moves to the front end that is the initial position.

  Next, in step S156, the warning lamp 22 is blinked, and in step S158, the stop lamp 18 is turned on and the operation lamp 20 is turned off. Due to such a change in the state of the lamp, the operator can recognize that the stamp apparatus 100 has failed to detect the laser beam and has stopped operating. Next, in step S160, it is determined whether a predetermined time has elapsed. When the predetermined time has elapsed, in step S162, the warning lamp 22 stops blinking and the warning lamp is turned off. In step S164, the execution of this program is terminated.

  On the other hand, when it is determined in step S108 that light is detected by the first light receiving sensor 36 and the process proceeds to step S110, the latest input from the first movement distance calculation circuit 51a is input in step S110. The movement distance L1 is stored in the storage area of the controller 50 as the distance L1 (n). Next, the process proceeds to step S112. In step S112, the received light data D1 received by the first light receiving sensor 36 is stored in the storage area of the controller 50 as received light data D1 (n). In this case, the controller 50 takes in the intensity value of light received by all the light receiving elements constituting the first light receiving sensor 36 or a physical quantity corresponding thereto, and stores it as received light data D1 (n). The light reception data D1 (n) is stored so that it can be understood from which light reception element the light reception data of each light reception element is input.

  After storing the moving distance L1 (n) and the received light data D1 (n) in step S110 and step S112, the controller 50 increments the counter value n to n + 1 in step S114. Subsequently, in step S116, the controller 50 determines whether the first light receiving sensor 36 is currently detecting the laser beam. When it is determined that the laser beam is not detected, it is considered that the detection of the laser beam on the first plane by the first light receiving sensor 36 is completed. Accordingly, in order to end the light receiving step by the first light receiving sensor 36, the process proceeds to step S122, and the driving of the first motor 35e is stopped.

  On the other hand, when it is determined in step S116 that light is detected by the first light receiving sensor 36, it can be determined that not all the irradiation regions of the laser light on the first plane have been detected yet. In this case, the process proceeds to step S118, and it is determined whether a limit position signal is input from the first movement distance calculation circuit 51a. When the limit position signal is input, it can be determined that the first moving body 35 cannot be moved any more. In such a situation, that is, although the first light receiving sensor 36 detects the laser light, the first moving body 35 cannot move any further and cannot grasp all the irradiation points of the laser light. The situation is that the laser light is applied to the corners of the window portion 14 of the stamp apparatus 100, and the laser light is detected by the first light receiving sensor 36 at the point where the first light receiving sensor 36 can move on the first plane. However, this may occur when the first moving body 35 reaches the movement limit before the entire irradiation area of the laser beam is detected. In this case, the process proceeds to the above-described step S154. In step S154, the driving of the first motor 35e is stopped, and then the first moving body 35 is moved to the initial position (S155), and the warning lamp 22 is blinked ( In step S156, the stop lamp 18 is turned on and the operation lamp 20 is turned off (S158). After a predetermined time has elapsed, the warning lamp is turned off (S160, S162), and the execution of this program is terminated (S164).

  If it is determined in step S118 that the limit position signal has not been input, the process proceeds to step S120. In this step S120, it is determined whether or not the difference between the currently input latest value of the distance L1 from the first moving distance calculation circuit 51a and the previously stored distance L1 (n) is equal to or greater than a predetermined distance B. . By this determination, it is determined whether or not the first moving body 35 has moved by B from the previously stored distance L1 (n). If the difference is smaller than B in step S120, the process returns to step S116, and the determination in step S120 is performed again through step S118.

  If the difference between the latest value of the distance L1 and the previously stored distance L1 (n) is equal to or greater than B in step S120, the process returns to step S110. In step S110, the latest value of the currently detected moving distance L1 is stored as L1 (n + 1). Thereafter, the process proceeds to step S112, where the latest received light information D1 from the first light receiving sensor 36 currently detected is stored as D1 (n + 1). Subsequently, in step S114, the counter value n is incremented, and the moving distance and the light reception data are acquired again through steps S116, S118, and S120.

  As described above, the light reception information D1 obtained from the first light receiving sensor 36 is stored every time the moving distance L1 of the first moving body 35 increases B by repeating the processes of steps S110 to S120. Therefore, corresponding to the moving distances L1 (1), L1 (2), L1 (3)... L1 (n), the received light data D1 (1), D1 (2), D1 (3). .. D1 (n) is stored in the storage area of the controller 50. If the determination in step S116 is No during the repeated processing, that is, if the detection of the laser light by the first light receiving sensor 36 is stopped, the first light receiving sensor 36 is on the first plane. In step S122, the first motor 35e is stopped. In step S123, the first motor 35e is rotationally driven in the reverse direction so as to move the first moving body 35 to the initial position (front end in FIG. 1).

  The detection of the irradiation area of the laser beam on the first plane is completed, the process proceeds to step S122, the first motor 35e is stopped, and the first motor 35e is rotationally driven in the reverse direction in step S123 to move the first moving body. Is moved to the initial position, the controller 50 proceeds to step S124 shown in FIG. 5, and the second motor 37e is driven to rotate forward in step S124. As a result, the second motor 37e rotates, and the second moving body 37 moves from the initial position (front end position in FIG. 1) to the rear side in FIG. At this time, the pulse signal output by the encoder 37e1 of the second motor 37e is input to the second movement distance calculation circuit 51b.

  As the second moving body 37 moves as described above, the second light receiving sensor 38 provided on the upper surface of the second moving body 37 also moves in the second plane. Since this moving direction is a direction (front-rear direction) perpendicular to the light receiving area of the second light receiving sensor 38 formed in a long shape, the second light receiving sensor 38 passes through a wide rectangular area in the second plane. Will do. Therefore, the second moving body 37 only moves once from the initial position to the rear end, and receives almost all the light incident from the window portion 14 formed in the outer frame 12 and passing through the second plane. 38 can receive light.

  After driving the second motor 37e in step S124, the controller 50 causes the second light receiving sensor 38 to move while the second motor 37e is driven and the second light receiving sensor 38 is moving on the second plane in step S126. Determine whether laser light is detected. This determination is to determine whether or not laser light is detected by any one of all the light receiving elements constituting the second light receiving sensor 38. If the laser light is detected, the process proceeds to step S128, and if the light is not detected, the process proceeds to step S166.

  If it is determined in step S126 that the second light receiving sensor 38 has not detected the laser beam and the process proceeds to step S166, a limit position signal is input from the second movement distance calculation circuit 51b in step S166. It is determined whether or not. If the limit position signal has not been input, it is considered that the second moving body 37 is still movable, so the process returns to step S126 and the second light receiving sensor 38 detects the laser beam again while the second motor 37e is being driven. It is determined whether it is done. If it is determined in step S166 that the limit position signal has been input, the process proceeds to step S167.

  When it is determined in step S166 that the limit position signal has been input, it is a case where the second moving body 37 cannot be moved any more. Therefore, the driving of the second motor 37e is stopped in the next step S167, and then the second moving body 37 is moved to the initial position in step S168. By the processing in step S168, the second motor 37e is rotationally driven in the reverse direction, and the second moving body 37 moves to the front end that is the initial position.

  Next, returning to step S156, the warning lamp 22 blinks, and the stop lamp 18 is turned on and the operation lamp 20 is turned off in step S158. Subsequently, in step S160, it is determined whether a predetermined time has elapsed. When the predetermined time has elapsed, in step S162, the warning lamp 22 stops blinking and the warning lamp is turned off. In step S164, the execution of this program is terminated.

  On the other hand, if it is determined in step S126 that light is detected by the second light receiving sensor 38 and the process proceeds to step S128, the latest input from the second movement distance calculation circuit 51b is input in step S128. The moving distance L2 is stored in the storage area of the controller 50 as the distance L2 (m). Next, the process proceeds to step S130. In step S130, the received light data D2 received by the second light receiving sensor 38 is stored in the storage area of the controller 50 as received light data D2 (m). In this case, the controller 50 takes in the intensity value of light received by all the light receiving elements constituting the second light receiving sensor 38 or a physical quantity corresponding thereto and stores it as received light data D2 (m). The light reception data D2 (m) is stored so that it can be understood from which light reception element the light reception data of each light reception element is input.

  After storing the moving distance L2 (m) and the received light data D2 (m) in step S128 and step S130, the controller 50 increments the counter value m to m + 1 in step S132. Subsequently, in step S134, the controller 50 determines whether or not laser light is currently detected by the second light receiving sensor 38. When it is determined that the laser beam is not detected, it is considered that the detection of the laser beam on the second plane by the second light receiving sensor 38 is completed. Therefore, in order to end the light receiving step by the second light receiving sensor 38, the process proceeds to step S138, and the driving of the second motor 37e is stopped.

  On the other hand, when it is determined in step S134 that light is detected by the second light receiving sensor 38, it can be determined that all the irradiation areas of the laser light on the second plane have not yet been detected. In this case, the process proceeds to step S135, and it is determined whether a limit position signal is input from the second movement distance calculation circuit 51b. When the limit position signal is input, it can be determined that the second moving body 37 cannot be moved any more. Accordingly, the process proceeds to step S167, where the driving of the second motor 37e is stopped in step S167, and then the second moving body 37 is moved to the initial position (S168), the warning lamp 22 is blinked (S156), and the stop is performed. The lamp 18 is turned on and the operation lamp 20 is turned off (S158). After a predetermined time has elapsed, the warning lamp is turned off (S160, S162), and the execution of this program is terminated (S164).

  If it is determined in step S135 that the limit position signal has not been input, the process proceeds to step S136. In this step S136, it is determined whether or not the difference between the latest input value of the distance L2 from the second moving distance calculation circuit 51b and the previously stored distance L2 (m) is greater than or equal to the predetermined distance B. . When the difference is smaller than B, the process returns to step S134, and the determination in step S136 is performed again through step S136.

  In step S136, when the difference between the latest value of the distance L2 and the previously stored distance L2 (m) is B or more, the process returns to step S128. In step S128, the latest value of the currently detected moving distance L2 is stored as L2 (m + 1). Thereafter, the process proceeds to step S130. In this step S130, the latest light reception information D2 from the second light reception sensor 38 currently detected is stored as D2 (m + 1). Thereafter, the counter value m is incremented in step S132, and the moving distance and the received light data are acquired again through steps S134, S135, and S136.

  As described above, the light reception information D2 obtained from the second light receiving sensor 38 is stored each time the moving distance L2 of the second moving body 37 increases B by repeating the processing of step S128 to step S136. Therefore, corresponding to the moving distances L2 (1), L2 (2), L2 (3)... L2 (m), the received light data D2 (1), D2 (2), D2 (3). .. D2 (m) is stored in the storage area of the controller 50. If the determination in step S134 is No during the repeated processing, that is, if the second light receiving sensor 38 no longer detects light, the second light receiving sensor 38 performs laser on the second plane. It is determined that the detection of the light irradiation area has been completed, and the process proceeds to step S138 to stop the second motor 37e.

  After the detection of the laser light irradiation region on the second plane is completed and the process proceeds to step S138, and the second motor 37e is stopped, the controller 50 proceeds to step S140 shown in FIG. 6, and in this step S140. The second motor 37e is rotationally driven in the reverse direction so as to move the second moving body 37 to the initial position (front end in FIG. 1). Next, the controller 50 calculates the coordinate value of the irradiation point (passing point) of the laser beam on the first plane in step S141. In this case, in the first plane, which is the moving plane on which the first light receiving sensor 36 moves, the longitudinal direction (left-right direction in FIG. 2) of the light receiving region of the first light receiving sensor 36 is the x direction, The moving direction (the front-rear direction in FIG. 2) is the y direction, the y direction position of the first light receiving sensor 36 when the first moving body 35 is in the initial position is 0, and FIG. The coordinate axis origin is determined with the x-direction position of the light receiving element arranged at the rightmost position in FIG. And the coordinate value (X1, Y1) of the irradiation point of a laser beam is computed within the coordinate system (1st coordinate system) defined in the 1st plane in this way.

  Here, the movement distance L1 (n) stored in the controller 50 is a distance corresponding to the y-direction component in the first coordinate system. The light reception data D1 (n) stored in the controller 50 is data indicating the intensity of light detected by each light receiving element constituting the first light reception sensor 36. The first light reception sensor 36 is a line. Since it is a sensor, each light receiving element is arranged along the x-axis direction of the first coordinate system. Therefore, the controller 50 takes the movement distance L1 (n) on the y axis, takes the distance from the origin of the first coordinate system of each light receiving element of the first light receiving sensor 36 on the x axis, and moves each movement distance L1 on the z axis. By taking the intensity value of the light detected by each light receiving element in (n), the data of the intensity distribution of the laser beam are aligned. When this data is shown visually, a graph as shown in FIG. 7 is obtained. This graph shows the intensity distribution of the laser beam in the first coordinate system defined on the first plane.

  Then, the controller 50 calculates the coordinate value of the center position of the laser beam in the first coordinate system from the intensity distribution data of the laser beam. This calculation is simply performed by extracting a region having a value greater than or equal to the predetermined light intensity in FIG. 7, obtaining the center position in the x-axis direction and the center position in the y-axis direction in this region, and expressing this by the center position. The coordinate value to be used is the coordinate value of the center position of the laser beam. The coordinate value of the irradiation point of the laser beam on the first plane calculated in this way is, for example, (X1, Y1).

  Next, the controller 50 calculates the coordinate value of the irradiation point of the laser beam on the second plane in step S142. In this case, in the second plane, which is the moving plane on which the second light receiving sensor 38 moves, the longitudinal direction (left-right direction in FIG. 2) of the light receiving region of the second light receiving sensor 38 is the x direction, and the first light receiving sensor moves. 2 is the y direction, the y direction position of the second light receiving sensor 38 when the second moving body 37 is in the initial position is 0, and the second light receiving sensor 38 at that time in FIG. The coordinate axis origin is determined by setting the x-direction position of the light receiving element arranged at the right end to 0. And the coordinate value of the irradiation point of a laser beam is calculated within the coordinate system (2nd coordinate system) defined by the 2nd plane in this way. In this case, as in the case of calculating the coordinate values (X1, Y1), the movement distance L2 (m) of the second moving body 37 is taken on the y axis, and each light receiving element of the second light receiving sensor 38 is taken on the x axis. By taking the distance from the origin of the second coordinate system and taking the intensity value of the light detected by each light receiving element at each moving distance L2 (m) on the z axis, the data of the intensity distribution of the laser light are aligned. When this data is shown visually, a graph as shown in FIG. 8 is obtained. This graph shows the intensity distribution of the laser beam in the second coordinate system defined on the second plane. And the coordinate value of the irradiation center of a laser beam is calculated | required from the data of the intensity distribution of this laser beam. The coordinate value calculated in step S142 in this way is, for example, (X2, Y2).

  Next, the controller 50 calculates the coordinate value of the irradiation point on the third plane in step S143. In the present embodiment, the third plane is a plane including the lower surface in FIG. 2 of the base 13 of the stamp apparatus 100. The lower surface of the base 13 is a surface that faces the surface of the target object when the stamp device 100 is attached to the target object. Therefore, it can be said that the lower surface of the base 13 is the surface of the target object.

  In the present embodiment, the lower surface (third plane) of the base 13, the first plane that is the moving plane of the first light receiving sensor 36, and the second plane that is the moving plane of the second light receiving sensor 38 are parallel. Is formed. When the coordinate system defined on the third plane is the third coordinate system, the straight line connecting the coordinate axis origins of the first coordinate system, the second coordinate system, and the third coordinate system is perpendicular to each plane. . That is, the coordinate system defined in each plane is in a relationship formed by being shifted by a predetermined interval in a direction perpendicular to each plane. In such a relationship, the vertical distance z1 from the lower surface of the base 13 to the first plane and the vertical distance z2 from the lower surface of the base 13 to the second plane are determined in advance from the structure of the apparatus. It becomes a value that can be known.

  FIG. 9 is a schematic diagram showing the relationship between the first plane, the second plane, and the third plane, and how the laser light passes through these planes. 9, the y direction is the front-rear direction (see FIG. 2) in the stamp apparatus 100, and the x direction is the left-right direction (see FIG. 2). The z direction is a direction perpendicular to the x direction and the y direction. FIG. 10 is a schematic diagram showing the state shown in FIG. 9 on the xz plane, and FIG. 11 is a schematic diagram showing the state shown in FIG. 9 on the yz plane.

In FIG. 10, a straight line connecting the laser beam irradiation point A on the first plane and the laser beam irradiation point B on the second plane indicates that the laser beam incident on the stamp device 100 is from the xz plane. It is a straight line seen. Therefore, the x component of the coordinate value of the point where this straight line intersects with the third plane indicates the x coordinate value of the irradiation point of the laser beam on the third plane. In this case, the vertical distance between the first plane and the third plane is z1, the vertical distance between the second plane and the third plane is z2, and the coordinate value x of the irradiation point of the laser beam on the first plane is x2. Assuming that the component is X1, the x component of the coordinate value of the laser light irradiation point on the second plane is X2, and the x component of the coordinate value of the laser light irradiation point on the third plane is X3, the relationship is similar. , (X1-X2) :( z1-z2) = (X1-X3): z1 holds. From the above formula, X3 can be expressed as in the following formula 1.

In FIG. 11, a straight line connecting the laser light irradiation point C on the first plane and the laser light irradiation point D on the second plane represents the laser light incident on the stamp apparatus 100 as yz. It is a straight line seen from the plane. Therefore, the y component of the coordinate value of the point where this straight line intersects the third plane indicates the y coordinate value of the laser beam irradiation point on the third plane. In this case, the y component of the coordinate value of the laser beam irradiation point on the first plane is Y1, the y component of the coordinate value of the laser beam irradiation point on the second plane is Y2, and the laser beam on the third plane. If the y component of the coordinate value of the irradiation point of Y is Y3, the relationship of (Y1-Y2) :( z1-z2) = (Y1-Y3): z1 holds from the similar relationship. From the above formula, Y3 can be expressed as the following formula 2.

Therefore, the coordinate value (X3, Y3) in the third coordinate system of the accurate irradiation point of the laser beam on the third plane, that is, on the surface of the target object can be expressed as the following Expression 3.

Thus, after calculating the coordinate value in the third coordinate system of the exact irradiation point of the laser beam on the target object in step S143, the controller 50 receives the light receiving position in the third coordinate system in step S144. It is determined whether or not the coordinate value (X3, Y3) has been calculated. This is because the coordinate value of the laser light irradiation point can be calculated by either the first light receiving sensor 36 or the second light receiving sensor 38 depending on the inclination of the laser light, but the irradiation point is detected by either one of the light receiving points. This is because the coordinate value (X3, Y3) in the third plane cannot be calculated. If it is determined in step S144 that the coordinate value (X3, Y3) has been calculated, the process proceeds to step S145. If it is determined that the calculation has not been performed, the process proceeds to step S156, where the ramp process is performed and then the execution of this program is terminated.
In step S145, the third motor 41e and the fourth motor 42e are driven and controlled so that the stamper 43 moves to the coordinate value (X3, Y3). When the third motor 41e is rotationally driven, the third screw connected to the third motor 41e is rotated, and the stamper guide portion 41 screwed with the third screw is rotated in the front-rear direction in FIG. Move to. Along with this, the stamper 43 also moves in the front-rear direction (y direction). Further, when the fourth motor 42e is driven to rotate, the fourth screw 42d connected to the fourth motor 42e rotates, and the stamper holding portion 42 screwed with the fourth screw 42d moves in the left-right direction (x direction). . Along with this, the stamper 43 attached to the stamper holding portion 42 also moves in the x direction. Thus, the stamper 43 moves in the x direction and the y direction by driving the third motor 41e and the fourth motor 42e. When the stamper 43 reaches the coordinate value (X3, Y3), stamping is performed in the next step S146 to mark the target object. Thereafter, in step S147, the third motor 41e and the fourth motor 42e are driven to return the stamper 43 to the initial position. In step S148, the stop lamp 18 is turned on and the operation lamp 20 is turned off. In step S150. End execution of this program

  As described above, according to the present embodiment, the position (coordinate values (X1, Y1) of the irradiation point of the laser beam on two planes (first plane and second plane) different from the surface (third plane) of the target object. ) And coordinate values (X2, Y2)) and the relative positional relationship between the planes (distance z1 between the first plane and the third plane and distance z2 between the second plane and the third plane). Since the irradiation point of the laser beam on the surface (third plane) is estimated, even when the laser beam is tilted and irradiated, an accurate irradiation point that takes this tilt into account can be estimated.

(Second embodiment)
FIG. 12 is a schematic view showing the internal configuration of the stamp apparatus according to the second embodiment of the present invention. The appearance of the stamp apparatus according to this embodiment is the same as that of FIG. 1 described in the first embodiment. The stamp apparatus described in the first embodiment includes a light receiving sensor (first light receiving sensor 36) that receives laser light on the first plane and a light receiving sensor (second light receiving) that receives laser light on the second plane. Although an example in which the sensor 38) is provided separately is shown, in the present embodiment, laser light on the first plane and the second plane is received by one light receiving sensor. Further, in the stamp device 200 according to the present embodiment, the first moving body 35 and the second moving body 37 described in the first embodiment are shared by one light receiving unit moving body. A plane moving means for moving the partial moving body from the first plane to the second plane is provided. Other structural configurations are the same as those in the first embodiment. Therefore, in FIG. 12, the same part as 1st embodiment is shown with the same code | symbol, and the specific description is abbreviate | omitted.

  As shown in FIG. 12, in the stamp device 200 according to the present embodiment, the light receiving unit moving body 65 is divided into three parts, a light receiving unit support unit 651, a right guide unit 652, and a left guide unit 653. . As shown in the figure, the light receiving portion support portion 651 is formed in an elongated shape in the left-right direction, and the light receiving sensor 39 is attached to the upper surface thereof. In the present embodiment, the light receiving sensor 39 is a line sensor. Further, a screw hole 651a penetrating in the vertical direction is formed on the left end side of the light receiving portion support portion 651.

  The right guide portion 652 is provided on the right end side of the light receiving portion support portion 651, and is formed in the vertical direction from the first front / rear frame 32a to the third front / rear frame 32c. Further, a protrusion 652a is formed on the lower surface of the right guide portion 652 along the front-rear direction, and the protrusion 652a is fitted into a guide groove 34c formed on the upper surface of the third front-rear frame 32c. Yes. Therefore, the right guide portion 652 is allowed to move in the front-rear direction and the movement in the left-right direction is restricted by the fitting of the protrusion 652a and the guide groove 34c. The left guide portion 653 is provided on the left end side of the light receiving portion support portion 651, and is formed in the vertical direction from the second front / rear frame 32b to the fourth front / rear frame 32d. A protrusion 653a is formed on the lower surface of the left guide portion 653 along the front-rear direction, and the protrusion 653a is fitted in a guide groove 34d formed on the upper surface of the fourth front-rear frame 32d. Therefore, the left guide portion 653 is allowed to move in the front-rear direction and the movement in the left-right direction is restricted by the fitting of the protrusion 653a and the guide groove 34d.

  A guide groove (not shown) is formed on the surface of the right guide portion 652 facing the left guide portion 653. Similarly, a guide groove 653f is formed on the surface of the left guide portion 653 facing the right guide portion 652. A protrusion (not shown) formed on the right end surface of the light receiving portion support portion 651 is fitted in the guide groove formed in the right guide portion 652. Further, a protrusion (not shown) formed on the left end surface of the light receiving portion support portion 651 is fitted in the guide groove 653f formed in the left guide portion 653. Therefore, the light receiving portion support portion 651 is movable in the vertical direction by the protrusions formed at both ends thereof being fitted in the guide grooves of the left and right side guide portions 652 and 653, and in the front and rear, left and right directions. Independent movement is restricted. In addition, when the left guide portion 653 moves in the front-rear direction in the state shown in the drawing, the light receiving portion support portion 651 and the right guide portion 652 also move in the front-rear direction. In this case, for example, a connecting member is disposed on the lower side of the light receiving portion support portion 651 in the drawing so that the moving force in the front-rear direction of the left guide portion 653 is directly transmitted to the right guide portion 652. You may comprise so that the guide part 653 and the right side guide part 652 may be connected.

  A first protruding portion 653b protruding rightward is formed below the left guide portion 653 in the figure. A second protruding portion 653c protruding rightward is also formed above the left guide portion 653 in the figure. A hole (not shown) penetrating vertically is formed in the first projecting portion 653b, and an upper and lower screw 653d is inserted through this hole. The upper and lower screws 653d are inserted into the screw holes 651a formed in the light receiving portion support portion 651 at the same time as the holes are inserted, and are screwed into the light receiving portion support portion 651 through the screw holes 651a. ing. The upper end of the upper and lower screw 653d in the figure is rotatably supported by a bearing member (not shown) such as a bearing attached to the lower surface of the second projecting portion 653c. The lower end of the vertical screw 653d in the figure is connected to the output shaft of the vertical motor 653e fixed to the first protrusion 653b. Therefore, when the vertical screw 653d is rotated by the rotational drive of the vertical motor 653e, the light receiving unit support 651 is moved up and down along with the rotation.

  The first protrusion 653b is also formed with a screw hole 653g penetrating in the front-rear direction. The front and rear screws 653h are screwed into the screw holes 653g. The front / rear screw 653h has a rod shape extending in the front / rear direction, and an output shaft of a front / rear motor 653i attached to the left end of the first left / right frame 33a is connected to the front end thereof. The rear ends of the front and rear screws 653h are rotatably supported by bearing members (not shown) such as bearings attached to the left ends of the second left and right frames 33b. Therefore, when the front / rear motor 653i is rotationally driven, this rotation is transmitted to the front / rear screw 653h via the output shaft. The left guide portion 653 screwed into the front and rear screw 653h is moved along the axial direction of the front and rear screw 653h by the rotation of the front and rear screw 653h. As the left guide portion 653 moves in the front-rear direction, the light receiving portion support portion 651 and the right guide portion 652 are also moved in the front-rear direction. Since the configuration other than this is the same as that of the first embodiment, a specific description is omitted.

  FIG. 13 is a block diagram showing an electrical connection relationship of a controller that controls the operation of the stamp apparatus 200 in the present embodiment. As shown in FIG. 13, the front / rear motor 653i, the up / down motor 653e, the third motor 41e, the fourth motor 42e, the start button 16, the stop lamp 18, the operation lamp 20, the warning lamp 22, the stamper 43, and the light receiving sensor 39 are the controller. 250 is electrically connected. The motors 653i, 653e, 41e, and 42e are driven and controlled based on a command signal from the controller 250.

  The front / rear motor 653i is electrically connected to the front / rear movement distance calculation circuit 102. When the front-rear movement distance calculation circuit 102 receives a command to start driving the front-rear motor 653i from the controller 250, the front-rear movement distance calculation circuit 102 starts counting the number of pulses of the pulse signal input from the encoder 653i1 incorporated in the front-rear motor 653i. The movement distance of the light receiving unit moving body 65 corresponding to the number is calculated, and the digital signal is output to the controller 250. In this case, the calculation of the movement distance continues even when the controller 250 receives a command to stop driving the front and rear motors 653i. Here, since the pulse signal from the encoder 653i is a signal that can detect the rotation direction, after receiving a command to stop driving the front and rear motor 653i from the controller 250, the pulse signal from the encoder 653i moves to the initial position (that is, the front and rear motor 653i is In the case of rotating in the reverse direction), the count number is calculated by subtracting the pulse count number counted when moving to the initial position from the pulse count number counted before the front and rear motors 653i are stopped. The movement distance of the light receiving unit moving body 65 is calculated based on the above and output to the controller 250. Further, after receiving a command to move the light receiving sensor 39 to the initial position from the controller 250 (command to rotate the front / rear motor 653i in the reverse direction), when a pulse signal is not input from the encoder 653i1 of the front / rear motor 653i, A signal indicating that the light receiving unit moving body 65 is completed at the initial position (front end) is output to the controller 250.

  The vertical motor 653e is electrically connected to the vertical movement distance calculation circuit 104. The vertical movement distance calculation circuit 104 receives the command to start driving the vertical motor 653e from the controller 250, and when the pulse signal is not input from the encoder 653e1 incorporated in the vertical motor 653e, the light receiving section support section 651 moves. A signal indicating completion of movement to the limit position (upper limit position) is output to the controller 250. In addition, after receiving a command to move the light receiving unit support 651 from the controller 250 to the initial position, when the pulse signal is not input from the encoder 653e1, the light receiving unit support 651 is completely moved to the initial position (lower limit position). A signal indicating this is output to the controller 250. In FIG. 13, the other configuration is the same as the configuration shown in FIG. 3 described in the first embodiment.

  In the present embodiment, the controller 250 estimates the irradiation position of the laser beam by executing the position detection program shown in FIGS. Since this program has many parts in common with the position detection program shown in FIGS. 4 to 6 described in the first embodiment, the specific steps of the same processing as the program described in the first embodiment are described. Description is omitted.

  The irradiation point calculation program according to the present embodiment is started in step S200 of FIG. 14, and is initialized in step S201. This initialization includes returning the light receiving unit moving body 65, the light receiving unit support unit 651, the stamper guide unit 41, and the stamper holding unit 42 to the initial positions. In the present embodiment, the initial position of the light receiving unit moving body 65 is the front end of the stamp device 100, and the initial position of the light receiving unit support unit 651 is the lower limit position along the right guide unit 652 and the left guide unit 653. It is.

  Thereafter, the controller 250 sets the counter values n and m to 1 in step S202, performs lamp lighting and extinguishing processing in step S204, and drives the front and rear motors 653i in the forward direction in step S206. By driving the front-rear motor 653i, the light-receiving unit moving body 65 is guided from the front end to the rear end in a state of being guided by the guide groove 34c formed in the third front-rear frame 32c and the guide groove 34d formed in the fourth front-rear frame 32d. Move towards. Along with this, the light receiving sensor 39 moves within a predetermined plane. The moving plane of the light receiving sensor 39 at this time corresponds to the second plane in the first embodiment (hereinafter, the predetermined plane is referred to as a second plane). Then, by repeatedly executing the processing of step S208 to step S220, the light receiving sensor 39 receives the laser light irradiated in the second plane, and the moving distance L2 (m) and the light receiving data D2 (m) at that time are received. Remember. If it is determined in step S216 that the detection of the laser beam by the light receiving sensor 39 has ceased, the process proceeds to step S222 in FIG.

  In step S222, is the difference between the movement distance L2 of the light receiving unit moving body 65 currently calculated by the front-rear movement distance calculation circuit 102 and the most recently stored distance L2 (m) greater than or equal to a predetermined distance S? Determine. If the difference is greater than or equal to S, the process proceeds to step S224. If the difference is not greater than or equal to the distance S, the process proceeds to step S276, where it is determined whether or not a limit position signal has been input from the longitudinal movement distance calculation circuit 102. If not, the process returns to step S222. Proceed to S224. By the processing of step S222 and step S276, the light receiving unit moving body 65 moves to the rear side by the distance S even if the light receiving sensor 39 does not detect the laser beam on the second plane. The reason for moving the light receiving unit moving body 65 to the rear side by an extra distance S from the detection point of the laser beam on the second plane is that the light receiving unit supporting unit 651 is moved upward after performing the above-described processing, as will be described later. The laser beam is detected again on the first plane located above the second plane. At this time, if the laser beam is incident obliquely, the irradiation position of the laser beam on the first plane is on the second plane. In such a case, if the light receiving unit moving body 65 is moved to the rear end side by the distance S, the first position must be moved upward. This is because the laser beam cannot be detected on one plane.

  After moving the light receiving unit moving body 65 to the rear side by the distance S from the detection point of the laser beam by the processing of the above steps S222 and S276, after stopping the driving of the front and rear motor 653i in step S224, the controller 250 proceeds to step S226. Then, driving of the vertical motor 653e is started. By driving the up / down motor 653e, the up / down screw 653d rotates, and the light receiving portion support portion 651 screwed to the up / down screw 653d is lifted while being guided by the right guide portion 652 and the left guide portion 653. Thereafter, the controller 250 determines whether or not a limit position signal is input from the vertical movement distance calculation circuit 104 in step S228. If not, the process returns to step S228. If it is input, the process proceeds to step S229, the drive of the up / down motor 653e is stopped, and the process proceeds to step S230. By the processing in steps S226, S228, and S229, the light receiving portion support portion 651 moves up to the upper limit position along the right guide portion 652 and the left guide portion 653.

  In step S230, the front / rear motor 653i is rotated in the reverse direction. Thereby, the light-receiving-part moving body 65 moves in a predetermined plane toward the front end. The plane on which the light receiving sensor 39 moves at this time corresponds to the first plane in the first embodiment (hereinafter, the predetermined plane is referred to as the first plane). The first plane is parallel to the second plane, but is a plane that is separated from the second plane by a distance that the light receiving unit support 651 has moved upward by driving of the vertical motor 653e.

  In step S230, after instructing the front and rear motor 653i to rotate in the reverse direction, the controller 250 repeatedly executes the processes in steps S232 to S242, whereby the light receiving sensor 39 is irradiated onto the first plane. Light is received, and the moving distance L1 (n) and received light data D1 (n) at that time are stored. If it is determined in step S240 that the light receiving sensor 39 has no longer detected the laser beam in the middle of the repetition process, the process proceeds to step S244 in FIG. And the coordinate value (X3, Y3) of the irradiation point of the laser beam on a 3rd plane, ie, the target object surface, is calculated by execution of the process of step S244-S246. At this time, the distance z2 between the third plane and the second plane can be known from the device structure. Further, the distance z1 between the third plane and the first plane is a distance obtained by adding the moving distance when the light receiving unit supporting unit 651 is lifted by driving the vertical motor 653e to the distance z2. In the present embodiment, since the light receiving unit support unit 651 moves from the lower limit position to the upper limit position, if the distance between them is examined in advance, z1 can be easily known. If the distance can be calculated at, z1 can also be calculated based on the distance.

  After calculating the coordinate value (X3, Y3), the controller 250 determines whether the coordinate value (X3, Y3) has been calculated (S247). If not calculated, the process proceeds to step S266, and after executing the ramp process, the execution of this program is terminated. If calculated, the process proceeds to step S248, where it is confirmed that the light receiving unit moving body 65 has been moved to the initial position (front end), the stamper 43 is moved to the coordinate value (X3, Y3) (S250), and the stamp (S251). Thereafter, the stamper guide portion 41 and the stamper holding portion 42 are moved to the initial position (S252), the vertical motor 653e (light receiving portion support portion 651) is moved to the initial position (lower limit position) (S254), and the lamp is turned on / off. Processing is performed (S256), and the execution of this program is terminated (S258). Note that steps S262 to S274 (FIG. 14) for performing the termination process at the time of abnormality are basically the same as the processes in the first embodiment (steps S154 to S164 in FIG. 4), and thus description thereof is omitted.

  As described above, also in the present embodiment, the position (coordinate values (X1, Y1) of the irradiation point of the laser light on two planes (first plane and second plane) different from the surface (third plane) of the target object and Based on the coordinate value (X2, Y2)) and the relative positional relationship between the planes (distance z1 between the first plane and the third plane and distance z2 between the second plane and the third plane) Since the irradiation point of the laser beam in the third plane) is estimated, even when the laser beam is tilted and irradiated, an accurate irradiation point that takes this tilt into account can be estimated.

  Although the embodiments of the present invention have been described above, the present invention can be variously modified in addition to the above embodiments. For example, in the first embodiment, the second light receiving sensor 38 is moved after the first light receiving sensor 36 is moved. Conversely, the first light receiving sensor 36 is moved after the second light receiving sensor 38 is moved. It may be. In this case, after the second light receiving sensor 38 located on the lower side (the side far from the laser light source) detects the laser light, the first light receiving located on the upper side (the side closer to the laser light source) without returning to the initial position. Since the detection of the laser light by the sensor 36 is not affected, the first light receiving sensor 36 can be moved to detect the laser light without returning the second light receiving sensor 38 to the initial position.

  In the first embodiment, the first light receiving sensor 36 and the second light receiving sensor 38 are moved separately by driving the first motor 35e and the second motor 37e, respectively. A mechanism in which a moving mechanism having a light receiving sensor attached to a moving part by the motor is selectively coupled may be used. The same effect can be expected by this.

  In the first embodiment, the first light receiving sensor 36 and the second light receiving sensor 38 are moved by driving the first motor 35e and the second motor 37e, respectively. The moving mechanism may be a mechanism that detects the light receiving position of the light receiving sensor by rotating it once using a caterpillar. The same effect can be expected by this.

  In the second embodiment, the light receiving position of the laser beam is detected by the light receiving sensor at two plane positions perpendicular to the third plane (object surface), but the light is received at three or more plane positions. The light receiving position of the laser beam may be detected by a sensor, and the coordinate value of the stamp position on the target object surface may be obtained by regression calculation such as the least square method. In this way, the stamp position on the target object surface can be obtained more accurately.

  In the first and second embodiments, two different light receiving positions are obtained on a plane parallel to each other, but two different light receiving positions may be obtained on a non-parallel plane. In this case, if the relationship between the plane that receives light and the plane that stamps the target object is known in advance, the exact stamp position on the target object can be estimated by determining the coordinate value in consideration of this relationship. it can.

It is an external view of the stamp apparatus in embodiment of this invention. It is a schematic perspective view which shows the internal structure of the stamp apparatus which concerns on 1st embodiment of this invention. It is a block diagram which shows the circuit structure electrically connected with the controller of the stamp apparatus which concerns on 1st embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 1st embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 1st embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 1st embodiment of this invention. It is a graph showing the intensity | strength of the light detected by the light receiving sensor on the 1st plane. It is a graph showing the intensity | strength of the light detected by the light receiving sensor on the 2nd plane. It is a schematic diagram which shows a mode that a laser beam passes the relationship between a 1st plane, a 2nd plane, and a 3rd plane, and these planes. It is the schematic diagram which showed the mode shown by FIG. 9 on the xz plane. It is the schematic diagram which showed the mode shown by FIG. 9 on the yz plane. It is a schematic perspective view which shows the internal structure of the stamp apparatus which concerns on 2nd embodiment of this invention. It is a block diagram which shows the circuit structure electrically connected with the controller of the stamp apparatus which concerns on 2nd embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 2nd embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 2nd embodiment of this invention. It is a program for performing stamp operation | movement by the stamp apparatus which concerns on 2nd embodiment of this invention.

Explanation of symbols

35 ... 1st moving body, 35e ... 1st motor (light-receiving part drive means, 1st light-receiving part drive means), 36 ... 1st light-receiving sensor (light-receiving part, 1st light-receiving part), 37 ... 2nd moving body, 37e ... Second motor (light receiving unit driving means, second light receiving unit driving means), 38 ... second light receiving sensor (light receiving unit, second light receiving unit), 39 ... light receiving sensor (light receiving unit), 40 ... stamper moving body (marking) Member moving means), 41 ... stamper guide portion, 41e ... third motor, 42 ... stamper holding portion, 42e ... fourth motor, 43 ... stamper, 50 ... controller, 65 ... light receiving portion moving body, 651 ... light receiving portion support portion , 652 ... right side guide part, 653 ... left side guide part, 653e ... vertical motor (plane moving means), 653i ... front and rear motor (light receiving part driving means), 100, 200 ... stamp device (marking device)

Claims (8)

In the marking device having a marking member for marking the irradiation point of the light irradiated to the target object from the light source,
A light receiving unit arranged to be movable on a predetermined first plane and a second plane different from the first plane;
A light receiving unit driving means for driving the light receiving unit so that the light receiving unit moves on the first plane and the second plane;
First estimation means for estimating an irradiation point of light on the first plane based on light reception information and movement information of the light receiving unit moving on the first plane;
Second estimation means for estimating an irradiation point of light on the second plane based on light reception information and movement information of the light receiving unit moving on the second plane;
Based on the irradiation point of light on the first plane estimated by the first estimation unit and the irradiation point of light on the second plane estimated by the second estimation unit, the first plane And third estimating means for estimating an irradiation point of light on a third plane which is a plane different from the second plane,
Marking member moving means for moving the marking member so as to mark the irradiation point of light estimated by the third estimating means;
A marking device comprising: The marking device according to claim 1,
The marking device according to claim 1, wherein the light receiving unit has a long light receiving region in which a plurality of light receiving elements are arranged, and moves in a direction perpendicular to a long direction of the long light receiving region. The marking device according to claim 2,
The first estimation unit is configured to detect light in a longitudinal direction of the light receiving region of the light receiving unit on the first plane from an intensity distribution of light received by the light receiving region of the light receiving unit moving on the first plane. A first position determining means for determining a first position that is an irradiation position of the light receiving portion, and a moving distance on the first plane of the light receiving portion moved by the light receiving portion driving means, Second position determining means for determining a second position that is an irradiation position of light in the moving direction of the light receiving unit,
The second estimating unit is configured to detect light in a longitudinal direction of the light receiving region of the light receiving unit on the second plane from an intensity distribution of light received by the light receiving region of the light receiving unit moving on the second plane. A third position determining means for determining a third position that is an irradiation position of the light receiving portion; and a moving distance on the second plane of the light receiving portion moved by the light receiving portion driving means, A fourth position determining means for determining a fourth position which is a light irradiation position in the moving direction of the light receiving unit,
The third estimating means estimates a light irradiation point on the third plane based on the first position, the second position, the third position, and the fourth position. . The marking device according to claim 3,
The third estimating means calculates a coordinate value (X1, Y1) of a light irradiation point in a first coordinate system defined on the first plane from the first position and the second position, and The coordinate value (X2, Y2) of the light irradiation point in the second coordinate system defined on the second plane is calculated from the position and the fourth position, and the coordinate value (X1, Y1), the coordinate value ( X2, Y2), based on the relationship between the first coordinate system and the third coordinate system defined on the third plane, and the relationship between the second coordinate system and the third coordinate system. A marking device for estimating a coordinate value (X3, Y3) of a light irradiation point in a three-coordinate system. In the marking device according to any one of claims 1 to 4,
The light receiving unit driving unit includes a first light receiving unit driving unit that moves the light receiving unit on the first plane, and a second light receiving unit driving unit that moves the light receiving unit on the second plane. A marking device. In the marking device according to any one of claims 1 to 4,
A marking device comprising a plane moving means for moving the light receiving portion from the first plane to the second plane. In the marking device according to any one of claims 1 to 5,
The marking device, wherein the light receiving unit includes a first light receiving unit that moves on the first plane and a second light receiving unit that moves on the second plane. A marking method for marking an irradiation point of light irradiated on a target object from a light source,
A first light receiving step of receiving light from the light source on the first plane by moving the light receiving unit on the first plane that is a plane through which the light emitted from the light source passes;
First irradiation for estimating the position of the light irradiation point on the first plane based on the light reception information of the light received in the first light receiving step and the movement information of the light receiving unit moving on the first plane A point estimation step;
A second light receiving unit that receives light from the light source on the second plane when the light receiving unit moves on a second plane different from the first plane through which light emitted from the light source passes. Steps,
Second irradiation for estimating the position of the light irradiation point on the second plane based on the light reception information of the light received in the second light receiving step and the movement information of the light receiving unit moving on the second plane. A point estimation step;
Based on the irradiation point of light on the first plane estimated in the first irradiation point estimation step, the irradiation point of light on the second plane estimated in the second irradiation point estimation step, A third irradiation point estimation step for estimating an irradiation point of light in a third plane facing the surface of the target object;
A marking member moving step for moving the marking member to the position of the light irradiation point estimated in the third irradiation point estimation step;
A marking step for marking the surface of the target object by the marking member moved in the marking member moving step;
A marking method comprising:

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