JP4710278B2 - Droplet ejection apparatus and electro-optic device manufacturing method - Google Patents

Description

The present invention relates to the production how the functional liquid droplet droplet discharge apparatus head pressure of the functional liquid to be supplied with an adjustable pressure regulating valve to the discharge head and the electro-optical device.

  Conventionally, ink supplied to a recording head without providing a predetermined water head difference between a recording head (functional liquid droplet ejection head) into which ink (functional liquid) has been introduced and an ink chamber (functional liquid tank) for storing ink A valve unit (pressure adjustment) that can adjust the water head pressure of the ink supplied to the print head between the print head and the ink chamber in order to properly manage the head pressure of the print head (slightly less than atmospheric pressure). There is known a liquid droplet ejection apparatus that ejects ink droplets while reciprocating a recording head via a carriage with respect to a recording paper (work).

The valve unit provided in the droplet discharge device supplies ink introduced from the ink chamber to the ink supply chamber (primary chamber) to the recording head via the pressure chamber (secondary chamber), and A movable valve (valve element) provided in an ink supply hole (communication flow path) that communicates between the ink supply chamber and the pressure chamber is moved forward and backward by using a pressure received by a film member (diaphragm) constituting one surface as a reference adjustment pressure. The ink supply hole is opened and closed to adjust the pressure of the pressure chamber. Further, the valve unit is mounted on the carriage together with the recording head in order to shorten the liquid supply tube (functional liquid flow path). (See Patent Document 1).
JP 2003-211701 A

  In a droplet discharge device provided with such a valve unit, when an ink droplet is discharged while reciprocating the recording head (moving in the main scanning direction), the valve unit mounted on the carriage also reciprocates together with the recording head. Therefore, at the start and end of the reciprocating motion, inertia acts on the ink and the movable valve in the valve unit, and the movable valve pulsates in the reciprocating direction of the valve unit (recording head) regardless of the reference adjustment pressure. As a result, the ink supply hole is opened and closed, and the pressure in the pressure chamber may fluctuate. Therefore, even if a pressure adjusting valve is interposed between the ink chamber and the recording head, the water head pressure of the ink supplied to the recording head can be appropriately adjusted, particularly at the start and end of movement of the recording head. There was a problem that I could not.

The present invention relates to a droplet discharge device provided with a pressure adjustment valve capable of appropriately adjusting the hydraulic head pressure of the functional liquid supplied to the functional droplet discharge head even when the movement of the functional droplet discharge head starts and ends. Another object of the invention is to provide a manufacturing how the electro-optical device.

The droplet discharge device of the present invention includes a functional droplet discharge head into which a functional liquid is introduced , a functional liquid tank that stores the functional liquid and supplies the functional liquid to the functional droplet discharge head under natural flow, and a functional liquid tank. The functional liquid introduced into the primary chamber from the first chamber is supplied to the functional liquid droplet ejection head via the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is used as a reference adjustment pressure. A pressure adjusting valve that adjusts the pressure in the secondary chamber by opening and closing the communication channel by moving the valve body provided in the communication channel communicating with the secondary chamber in a direction perpendicular to the surface of the diaphragm, and a functional liquid A carriage having a droplet discharge head and a pressure adjustment valve mounted thereon, an X-axis table for moving the workpiece in the main scanning direction with respect to the functional droplet discharge head, and the functional droplet discharge head in the main scanning direction via the carriage with respect to the workpiece Orthogonal sub-scanning method A Y-axis table that moves the main liquid in a main scanning direction, and a main liquid ejecting functional liquid droplets from the functional liquid droplet ejection head in synchronization with the movement of the work in the main scanning direction, and the functional liquid droplet ejection head is moved in the sub-scanning direction. The droplet discharge device performs the drawing process on the workpiece by performing the sub-scanning, and the pressure adjustment valve is mounted on the carriage so that the advance / retreat direction of the valve body is substantially orthogonal to the sub-scanning direction. It is characterized by.

  According to this configuration, the valve body of the pressure regulating valve advances and retreats in a direction substantially orthogonal to the sub-scanning direction to open and close the communication channel. For this reason, even if inertia in the sub-scanning direction acts on the functional liquid or valve body in the pressure adjustment valve at the start or end of movement (sub-scanning) of the functional liquid droplet ejection head in the sub-scanning direction, pressure adjustment The valve body does not pulsate in the valve regardless of the reference adjustment pressure. Accordingly, since the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head does not fluctuate due to movement in the sub-scanning direction, functional liquid droplets can be accurately ejected in the next main scanning. .

Another liquid droplet ejection apparatus of the present invention includes a functional liquid droplet ejection head into which a functional liquid is introduced , a functional liquid tank that stores the functional liquid and supplies the functional liquid to the functional liquid droplet ejection head under natural flow, and a function The functional liquid introduced from the liquid tank into the primary chamber is supplied to the functional liquid droplet ejection head through the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is used as a reference adjustment pressure. A pressure regulating valve for adjusting the pressure in the secondary chamber by opening and closing the communication channel by moving the valve body provided in the communication channel communicating the secondary chamber and the secondary chamber in a direction perpendicular to the surface of the diaphragm; A carriage having the functional liquid droplet ejection head and the pressure adjustment valve mounted thereon, and a moving means for moving the functional liquid droplet ejection head in the main scanning direction with respect to the workpiece via the carriage; Synchronize with move to A liquid droplet ejection apparatus that performs main scanning for ejecting functional liquid droplets from a liquid droplet ejection head and performs a drawing process on a workpiece. It is mounted on a carriage.

According to this configuration, the valve body of the pressure adjusting valve advances and retreats in a direction substantially orthogonal to the main scanning direction to open and close the communication flow path. For this reason, when the functional liquid droplet ejection head is moved in the main scanning direction in the main scanning, or when the functional liquid droplet ejection head is moved in the main scanning direction without ejecting the functional liquid droplets before the main scanning, Even if inertia in the main scanning direction is applied to the functional fluid or valve body in the pressure adjustment valve at the start or end of movement of the droplet discharge head in the main scanning direction, the valve body is in the reference adjustment pressure. There is no pulsation regardless of. Accordingly, since the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head does not fluctuate due to the movement in the main scanning direction, the functional liquid droplet is always maintained in a state where the hydraulic head pressure of the functional liquid is appropriately controlled. Can be discharged.
In this case, the functional liquid ejection head may be moved in the main scanning direction with respect to the work, and the work may be moved in the sub-scanning direction with respect to the functional liquid droplet ejection head. A so-called line-type head unit in which ejection heads are arranged to form a wide drawing line may be provided, and functional droplets may be ejected only by main scanning.

Another liquid droplet ejection apparatus of the present invention includes a functional liquid droplet ejection head into which a functional liquid is introduced , a functional liquid tank that stores the functional liquid and supplies the functional liquid to the functional liquid droplet ejection head under natural flow, and a function The functional liquid introduced from the liquid tank into the primary chamber is supplied to the functional liquid droplet ejection head through the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is used as a reference adjustment pressure. A pressure regulating valve for adjusting the pressure in the secondary chamber by opening and closing the communication channel by moving the valve body provided in the communication channel communicating the secondary chamber and the secondary chamber in a direction perpendicular to the surface of the diaphragm; A carriage equipped with a functional liquid droplet ejection head and a pressure adjustment valve; and an XY table for moving the functional liquid droplet ejection head with respect to the workpiece in the main scanning direction and the sub scanning direction orthogonal to the main scanning direction. Functional droplet ejection A main scanning for ejecting function liquid droplets from the functional liquid droplet ejection heads in synchronism with the movement in the main scanning direction of the head, is moved in the sub-scanning direction the functional liquid droplet ejection head without the ejection of functional liquid droplets A droplet discharge device that performs sub-scanning and performs drawing processing on a workpiece, and that the pressure adjustment valve is mounted on the carriage so that the advancing / retreating direction of the valve body is substantially orthogonal to the main scanning direction. Features.

Also with this configuration, the valve body of the pressure regulating valve advances and retreats in a direction substantially orthogonal to the main scanning direction to open and close the communication flow path. For this reason, as in the above configuration, when the functional liquid droplet ejection head is moved in the main scanning direction in the main scanning, or the functional liquid droplet ejection head is not ejected before the main scanning in the main scanning direction. Even if the inertia in the main scanning direction is applied to the functional fluid or valve body in the pressure adjustment valve, the valve body will not pulsate regardless of the reference adjustment pressure. .
In this case, when the functional liquid droplet ejection head moves in the sub-scanning direction, the valve body may pulsate in the sub-scanning direction in the pressure adjustment valve. After moving in the scanning direction, the function liquid ejection head is moved in the main scanning direction after stabilizing the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head by waiting for a predetermined time. It is preferable to discharge droplets.
In these cases, the pressure regulating valve is preferably arranged so that the surface of the diaphragm is substantially perpendicular to the horizontal plane. According to this, the diaphragm can be displaced without being affected by the weight of the functional liquid, and the pressure regulating valve can be installed in a compact manner.

  In these cases, it is preferable that the pressure adjustment valve uses the atmospheric pressure received by the diaphragm facing the atmosphere as the reference adjustment pressure.

  According to this configuration, the functional liquid can be supplied to the functional liquid droplet ejection head with an appropriate head pressure regardless of the height of the functional liquid tank with respect to the functional liquid droplet ejection head. More preferably, the pressure in the secondary chamber can be made slightly negative from the atmospheric pressure by providing a spring for urging the diaphragm toward the outside, and supplied to the functional liquid droplet ejection head. The hydraulic head pressure of the functional fluid can be made slightly negative from the atmospheric pressure.

  In these cases, the functional liquid tank is preferably mounted on the carriage together with the functional liquid droplet ejection head and the pressure adjustment valve.

  According to this configuration, the functional liquid tank and the liquid supply tube connecting the functional liquid tank and the pressure regulating valve move together with the functional liquid droplet ejection head. Therefore, it is not necessary for the liquid supply tube to function like a cable bear (registered trademark) and to follow the movement of the functional liquid droplet ejection head. Therefore, the bent portion of the liquid supply tube does not continuously move with the movement of the functional liquid droplet discharge head, and pulsation occurs in the liquid supply tube, and the discharge becomes unstable due to fluctuations in the water head pressure. There is nothing. Moreover, according to this structure, the tube length can be shortened, pressure loss can be suppressed, and mixing of air due to permeation can also be suppressed.

  In these cases, a plurality of functional liquid droplet ejection heads are provided, and a plurality of pressure regulating valves and functional liquid tanks are provided corresponding to the plurality of functional liquid droplet ejection heads. A plurality of tank-side liquid supply tubes that respectively connect the pressure adjustment valves; and a plurality of head-side liquid supply tubes that respectively connect the plurality of functional liquid droplet ejection heads and the plurality of pressure adjustment valves. It is preferable that the functional liquid droplet ejection heads and the plurality of pressure adjusting valves are arranged in correspondence with each other so that the tube lengths of the plurality of head-side liquid supply tubes are the same.

  According to this configuration, the tube lengths and bends of the plurality of head-side liquid supply tubes can be configured to be the same, so that the pressure loss of the plurality of head-side liquid supply tubes can be made uniform. Accordingly, the hydraulic head pressure of the functional liquid supplied to the plurality of functional liquid droplet ejection heads can be made uniform.

  In this case, it is preferable that the plurality of functional liquid tanks and the plurality of pressure adjusting valves are respectively arranged in correspondence with each other so that the tube lengths of the plurality of tank-side liquid supply tubes are the same.

  When the hydraulic head pressure of the functional liquid supplied to multiple pressure control valves is extremely different from each other, the hydraulic head pressure of the functional liquid supplied to each functional liquid droplet ejection head is uniform even through each pressure control valve It may not be possible. According to this configuration, the tube lengths and the bends of the plurality of tank-side liquid supply tubes can be configured to be the same, so that the pressure loss of the plurality of tank-side liquid supply tubes can be made uniform. Therefore, the hydraulic head pressure of the functional liquid supplied to each functional liquid droplet ejection head can be made uniform without the hydraulic head pressure of the functional liquid supplied to the plurality of pressure regulating valves being extremely different from each other.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

According to this configuration, since it is manufactured using a droplet discharge device that can appropriately discharge functional droplets, a highly reliable electro-optical device can be manufactured. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. Electron emission devices include so-called FED (Field Emission Display) and SED (Surface-conduction Electron-Emitter).
It is a concept including a display device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. In other words, a film forming portion made of functional droplets is formed on a substrate such as a color filter.

  As shown in FIG. 1, the liquid droplet ejection apparatus 1 includes a machine base 2 and a functional liquid droplet ejection head 41, and a drawing apparatus 3 widely placed over the entire area of the machine base 2, and a functional liquid droplet ejection A functional liquid supply device 4 connected to the head 41 and a head maintenance device 5 placed on the machine base 2 so as to be attached to the drawing device 3 are provided. Maintenance of the functional liquid droplet ejection head 41 is performed by the head maintenance device 5. In addition to performing the operation (maintenance), the drawing apparatus 3 performs a drawing operation for discharging functional droplets onto the workpiece W. Further, although not shown in the figure, the droplet discharge device 1 includes a workpiece recognition camera 7 for recognizing the position of the workpiece W, a head recognition camera 8 for recognizing the position of the functional droplet discharge head 41, and a drawing apparatus. 3 and a controller 6 (control unit 200) that comprehensively controls each component device such as the head maintenance device 5 are incorporated, and the controller 6 is connected to a host computer 180 that controls the entire drawing system. (See FIG. 10). The droplet discharge device 1 is accommodated in a chamber device (not shown), and a drawing operation is performed under temperature control by the chamber device.

  The drawing device 3 is orthogonal to the X-axis table 12 and the X-axis table 12 for moving the workpiece W in the X-axis direction (main scanning direction) with respect to the functional droplet ejection head 41, and the functional droplet ejection head with respect to the workpiece W An XY moving mechanism 11 comprising a Y-axis table 13 that moves 41 in the Y-axis direction (sub-scanning direction), a carriage 14 that is movably attached to the Y-axis table 13, and that has a head θ-axis table 15; And a head unit 16 mounted with a functional liquid droplet ejection head 41.

  The X-axis table 12 has an X-axis slider 21 driven by an X-axis motor (not shown) constituting a drive system in the main scanning direction, and a set table 22 including a suction table 23, a work θ-axis table 24, and the like. It is configured to be freely movable. Similarly, the Y-axis table 13 has a Y-axis slider 31 driven by a Y-axis motor (not shown) constituting a drive type in the sub-scanning direction, and the above-described carriage 14 that supports the head unit 16 is sub-scanned thereon. It is configured to be movable in the direction. The X-axis table 12 is disposed in parallel with the main scanning direction and is directly supported on the machine base 2. On the other hand, the Y-axis table 13 is supported by left and right support columns 32, 32 erected on the machine base 2, and extends in the sub-scanning direction so as to straddle the X-axis table 12 and the head maintenance device 5. .

  The Y-axis table 13 includes the head unit 16 mounted on the Y-axis table 13 between the drawing area 36 located immediately above the X-axis table 12 and the maintenance area 37 located directly above the head maintenance device 5. , Move as appropriate. That is, when performing the drawing operation on the workpiece W introduced into the X-axis table 12, the Y-axis table 13 causes the head unit 16 to face the drawing area 36 and performs a maintenance operation of the functional liquid droplet ejection head 41 described later. In this case, the head unit 16 is brought to the maintenance area 37. On the other hand, one end of the X-axis table 12 serves as a work introduction area 38 for setting the work W on the X-axis table 12.

  As shown in FIG. 2, the head unit 16 includes a plurality (12) of functional liquid droplet ejection heads 41 and a head plate 42 on which the functional liquid droplet ejection heads 41 are mounted via a head holding member (not shown). Have. The head plate 42 is detachably supported by a support frame 46 described later, and the head unit 16 is positioned and mounted on the carriage 14 via the support frame 46. Although details will be described later, the support frame 46 supports the valve unit 72 and the tank unit 71 of the functional liquid supply device 4 along with the head unit 16 (see FIG. 4).

  As shown in FIG. 3, the functional liquid droplet ejection head 41 is a so-called double type, a functional liquid introduction unit 51 having two connection needles 52, and a dual head substrate that is continuous with the functional liquid introduction unit 51. 53 and a head main body 54 which is connected to the lower side (upper side in the figure) of the functional liquid introduction portion 51 and has an in-head flow path filled with the functional liquid therein. The connection needle 52 is connected to a later-described functional liquid tank 81 and supplies the functional liquid to the in-head flow path of the functional liquid droplet ejection head 41. The head main body 54 includes a cavity 61 formed of a piezoelectric element or the like, and a nozzle plate 62 having a nozzle surface 63 in which two nozzle rows 64 and 64 are formed in parallel to each other. Each nozzle row 64 is configured by arranging a plurality (180) of nozzles 65 at an equal pitch. The head substrate 53 is provided with two connectors 66 and 66 connected to a head driver 191 (see FIG. 10) described later via a flexible flat cable. Then, when a drive waveform is applied from the head driver 191 to the cavity 61 and the functional droplet discharge head 41 is driven to discharge, functional droplets are discharged from the nozzle 65 by the pump action of the cavity 61.

  In addition, each functional liquid droplet ejection head 41 has a larger ejection amount from the nozzles 65 located at both ends in the structure of the flow path in the head than the ejection amount from the nozzle 65 located in the central portion. For example, functional droplets are ejected from only the 160 nozzles 65 from the 11th to the 170th, and no functional droplets are ejected from the 20 nozzles 65 from the 1st to the 10th and from the 171st to the 180th. It is preferable to make it.

  As shown in FIG. 2, the head plate 42 is composed of a rectangular thick plate made of stainless steel or the like, and positions 12 functional liquid droplet ejection heads 41 and each functional liquid droplet ejection head 41 by a head holding member. A mounting opening (not shown) for fixing is formed.

Each functional liquid droplet ejection head 41 is fixed to the head plate 42 so that the two nozzle rows 64 and 64 are parallel to the sub-scanning direction when mounted on the carriage 14. The twelve functional liquid droplet ejection heads 41 are divided into six sets of two, which are closely overlapped in the width direction (main scanning direction) and in the longitudinal direction (sub-scanning direction) for each set. The nozzle rows 64 are shifted by the length of the nozzle row 64 in a stepwise manner in the main scanning direction and the sub-scanning direction, and all the nozzles 65 (all discharge nozzles) are continuously formed in the sub-scanning direction to form a drawing line. is doing.
The number and arrangement of the functional liquid droplet ejection heads 41 are arbitrary. However, as will be described later, the functional liquid tank 81 and the pressure adjustment valve 91 may be arranged following the arrangement of the functional liquid droplet ejection heads 41. preferable.

  As shown in FIG. 4, the functional liquid supply device 4 is mounted on the support frame 46 together with the head unit 16, and includes a tank unit 71 including a plurality (12) of functional liquid tanks 81 for storing the functional liquid, A valve unit 72 composed of a plurality (twelve) pressure regulating valves 91 connected to the two connection needles 52 of the droplet discharge head 41 and adjusting the hydraulic head pressure of the functional liquid supplied to the functional droplet discharge head 41. A plurality of (twelve) tank-side liquid supply tubes 73 connecting twelve functional liquid tanks 81 and twelve pressure regulating valves 91, respectively, and twelve pressure regulating valves 91 and twelve functional liquid droplets. A plurality of (24) head-side liquid supply tubes 74 that respectively connect the heads 41 (each of the two connecting needles 52) are provided. Two head-side liquid supply tubes 74 are connected to an outflow connector 125 (described later) of each pressure regulating valve 91 via a branch joint 75.

  The head unit 16, the valve unit 72, and the tank unit 71 are mounted on the support frame 46, and are arranged in this order in the longitudinal direction of the support frame 46. Therefore, the twelve functional liquid tanks 81 are mounted on the carriage 14 together with the twelve functional liquid droplet ejection heads 41 and the twelve pressure regulating valves 91 (see FIG. 1). According to this, the functional liquid tank 81 and the tank side liquid supply tube 73 connecting the functional liquid tank 81 and the pressure regulating valve 91 move together with the functional liquid droplet ejection head 41. Therefore, it is not necessary for the tank-side liquid supply tube 73 to function like a cable bear (registered trademark) and to follow the movement of the functional liquid droplet ejection head 41. Therefore, the bent portion of the tank-side liquid supply tube 73 does not continuously shift with the movement of the functional liquid droplet discharge head 41, and pulsation occurs in the tank-side liquid supply tube 73, resulting in discharge due to fluctuations in water head pressure. Does not become unstable. Moreover, according to this structure, the tube length of the tank side liquid supply tube 73 can be shortened, pressure loss can be suppressed, and mixing of air by permeation can also be suppressed.

The support frame 46 is formed in a substantially rectangular frame shape, and when mounted on the carriage 14, the support frame 46 is configured such that its longitudinal direction is parallel to the sub-scanning direction. Although not shown, the support frame 46 is provided with a head positioning mechanism for positioning the head unit 16. The head positioning mechanism has three positioning pins that protrude from the back surface of the support frame 46, and the three positioning pins are brought into contact with the end surface of the head plate 42. The side direction and the short side direction (main scanning direction) of the support frame 46 can be positioned and mounted with high accuracy in a state where the side direction and the short side direction (main scanning direction) coincide with each other.
Further, the valve unit 72 and the tank unit 71 are supported by the support frame 46 via the support plate 48. The support plate 48 is fixed to the support frame 46 so that the short side direction thereof coincides with the long side direction of the support frame 46. The support plate 48 is provided with a plurality of valve positioning holes 49 for positioning the valve unit 72 and a plurality of tank positioning holes 50 for positioning the tank unit 71. Therefore, the valve unit 72 can be mounted such that the short side direction of the later-described valve plate 92 and the short side direction of the support plate 48 (long side direction of the support frame 46) coincide with each other, and the tank unit 71 is mounted. Can be mounted such that the short side direction of the tank plate 82, which will be described later, and the short side direction of the support plate 48 (long side direction of the support frame 46) coincide with each other.
A pair of handles 47 and 47 are attached to both ends of one short side of the support frame 46, respectively, and the support frame 46 can be inserted into the carriage 14 using the pair of handles 47 and 47 as a hand-held part. It is like that.

  As shown in FIGS. 4 and 5, the tank unit 71 includes twelve functional liquid tanks 81 corresponding to the twelve functional liquid droplet ejection heads 41, and a tank plate for positioning and fixing the twelve functional liquid tanks 81, respectively. 82 and a tank setting jig (not shown) for setting each functional liquid tank 81 on the tank plate 82. Each functional liquid tank 81 has a cartridge type in which a functional liquid pack 83 obtained by vacuum-packing functional liquid is housed in a thin cartridge case 86 made of resin. The functional liquid pack 83 is composed of a film sheet in which a plurality of materials having corrosion resistance and gas impermeability to the functional liquid are laminated. It can be used up. Note that the functional liquid is preferably degassed in advance.

  The tank plate 82 is made of stainless steel and is formed of a substantially rectangular thick plate with a part cut away, and is positioned by the tank positioning hole 50 and fixed to the support plate 48. Further, twelve set members (not shown) for positioning the twelve functional liquid tanks 81 are attached to the tank plate 82. Since each functional liquid tank 81 is set on the set member such that the longitudinal direction thereof is orthogonal to the long side of the tank plate 82, the tank unit 71 is mounted on the carriage 14 via the support frame 46. Each tank plate 82 has a longitudinal direction parallel to the sub-scanning direction.

The twelve set members are divided into two sets of six, and are fixed to the tank plate 82 in a stepped manner following the six sets of functional liquid droplet ejection heads 41 arranged in two steps. ing. Therefore, the twelve functional liquid tanks 81 are divided into two sets of six, and step by step on the tank plate 82 following the six sets of functional liquid droplet ejection heads 41 arranged in two steps. It will be arranged.
Each functional liquid tank 81 is supported in a vertically placed state, that is, in a manner in which the wide surface of the cartridge case 86 is substantially vertical with respect to the tank plate 82, and the installation space for the functional liquid tank 81 is larger than in the horizontal placement. Can be kept compact.

  The tank setting jig is configured to slide the functional liquid tank 81 into the set member by pushing the functional liquid tank 81 from the back surface of the cartridge case 86 toward the functional liquid droplet ejection head 41. The tank plate 82 is formed with guide holes (not shown) along the long side on the back side of the functional liquid tank 81, and the tank setting jig is guided by the guide holes to face each set member. It is supposed to be. Further, a connecting tool 76 having a hollow needle 77 is attached to the upstream end of each tank-side liquid supply tube 73. Each connecting tool 76 is fixed in a state of being positioned on a fixing member 88 standing on the tank plate 82. When the functional liquid tank 81 is completely set on the set member, the hollow needle 77 becomes butyl rubber. The functional liquid tank 81 and the tank side liquid supply tube 73 are connected.

As shown in FIGS. 4 and 6, the valve unit 72 includes twelve pressure regulating valves 91 corresponding to the twelve functional liquid droplet ejection heads 41 and a valve plate for positioning and supporting the twelve pressure regulating valves 91. 92. Each pressure regulating valve 91 includes a primary chamber 101 that communicates with the functional liquid tank 81, a secondary chamber 102 that communicates with the functional liquid droplet ejection head 41, and a communication channel 103 that communicates the primary chamber 101 and the secondary chamber 102. Is formed in the valve housing 104. A diaphragm 105 is provided on one surface of the secondary chamber 102 so as to face the outside, and a valve body 106 is provided in the communication channel 103 (see FIG. 8 and FIG. 9). The functional liquid introduced from the functional liquid tank 81 into the primary chamber 101 is supplied to the functional liquid droplet ejection head 41 via the secondary chamber 102. At this time, the atmospheric pressure (usually high in the chamber apparatus) is supplied. When the diaphragm 105 is displaced by the atmospheric pressure), the valve body 106 advances and retreats in a direction orthogonal to the surface of the diaphragm 105 to open and close the communication flow path, thereby adjusting the pressure in the secondary chamber 102 (for details). Will be described later).
Note that 24 pressure adjusting valves 91 may be provided in correspondence with two (24 in total) connecting needles 52 of each of the twelve functional liquid droplet ejection heads 41.

  The valve plate 92 is made of stainless steel or the like and is formed of a substantially square thick plate with a part cut away. The valve plate 92 is positioned by the valve positioning hole 49 and fixed to the support plate 48. Further, twelve valve support members 93 for positioning and fixing the twelve pressure regulating valves 91 are attached. Each pressure regulating valve 91 is attached to the valve support member 93 such that the surface of the diaphragm 105 is orthogonal to the long side of the valve plate 92 so that the advance / retreat direction of the valve body 106 is approximately orthogonal to the sub-scanning direction. Therefore, when the valve unit 72 is mounted on the carriage 14 via the support frame 46, the surface of each diaphragm 105 becomes parallel to the sub-scanning direction.

The twelve valve support members 93 are fixed to the valve plate 92 in a stepped manner following the six functional liquid droplet ejection heads 41 arranged in two in a stepped manner. Therefore, the twelve pressure regulating valves 91 are divided into six sets of two, and stepwise on the valve plate 92 following the six sets of functional liquid droplet ejection heads 41 arranged in two steps. It will be arranged.
Each pressure regulating valve 91 is supported in a vertically placed state, that is, placed in a manner in which the surface of the diaphragm 105 is substantially vertical with respect to the valve plate 92, thereby forming concentric with the diaphragm 105 as will be described later. In addition, bubbles can be prevented from accumulating in the primary chamber 101 and the secondary chamber 102.

  The tank-side liquid supply tube 73 and the head-side liquid supply tube 74 have a laminated structure in which a plurality of materials having corrosion resistance and gas impermeability to the functional liquid are laminated, as with the functional liquid pack 83 described above. Has been. Of course, the twelve tank-side liquid supply tubes 73 are configured to have the same tube diameter, and similarly, the twenty-four head-side liquid supply tubes 74 are configured to have the same tube diameter. Yes.

  In this way, by arranging the twelve pressure regulating valves 91 following the arrangement of the twelve functional droplet ejecting heads 41, 24 pressures of the twelve pressure regulating valves 91 and the twelve functional droplet ejecting heads 41 are arranged. The lengths and the bends of the 24 head-side liquid supply tubes 74 that connect the respective connecting needles 52 can be made the same, and the pressure loss of the 24 head-side liquid supply tubes 74 can be made uniform. it can. Therefore, the hydraulic head pressure of the functional liquid supplied to the twelve functional liquid droplet ejection heads 41 can be made uniform.

  In addition to this, as described above, 12 functional liquid tanks 81 are arranged in accordance with the arrangement of the 12 functional liquid droplet ejection heads 41, so that 12 pressure adjusting valves 91 are provided in the 12 pieces. Therefore, the lengths and the bends of the twelve tank-side liquid supply tubes 73 connecting the twelve functional liquid tanks 81 and the twelve pressure regulating valves 91 may be the same. The pressure loss of the 12 tank side liquid supply tubes 73 can be made uniform. Therefore, the hydraulic head pressure of the functional liquid supplied to the twelve pressure regulating valves 91 is not extremely different from each other, and the hydraulic head pressure of the functional liquid supplied to each functional droplet discharge head 41 can be made uniform. it can.

  As shown in FIG. 7, the water head difference between the functional liquid droplet ejection head 41 and the pressure adjustment valve 91 is set in advance, and the height difference between the functional liquid droplet ejection head 41 and the pressure adjustment valve 91 is based on this set value. It has been established. Specifically, based on the set water head difference, the height of the center position of the outflow port 124 (described later) of the pressure regulating valve 91 is higher than the height position of the nozzle surface 63 of the functional liquid droplet ejection head 41. The height position of the pressure regulating valve 91 is determined so as to be increased by a predetermined height (90 mm in this embodiment).

  In the present embodiment, the height position of the functional liquid tank 81 is set based on the height position of the pressure adjustment valve 91, and the primary chamber 101 of the pressure adjustment valve 91 and the functional liquid tank 81 The functional liquid is configured to flow from the functional liquid tank 81 to the pressure regulating valve 91 due to a water head difference (natural flow). Specifically, when the tank unit 71 and the valve unit 72 are mounted on the support frame 46, the supply port 87 of the functional liquid tank 81 is positioned higher than the inflow port 118 (described later) of the pressure regulating valve 91. Thus, the position of the functional liquid tank 81 is set. In other words, the height position of the functional liquid tank 81 is set with reference to the height position of the pressure regulating valve 91 set based on the height position of the nozzle surface 63 of the functional liquid droplet ejection head 41. It has become. The height position of the functional liquid tank 81 is not so precise, and the height of the pressure regulating valve 91 with respect to the outflow port 124 can be set within a range of, for example, 50 mm to 1000 mm. Make sure that the heights are aligned.

  As shown in FIGS. 8 and 9, the valve housing 104 of each pressure regulating valve 91 has a primary chamber housing 111 in which the primary chamber 101 is formed, a secondary chamber 102 and a communication channel 103 in the interior. The secondary chamber housing 112, which is slightly larger than the primary chamber housing 111, and the ring plate 113 for fixing the diaphragm 105 to the secondary chamber housing 112, are all formed of a corrosion resistant material such as stainless steel. ing. Each of these three members has an appearance that is concentric with an axis passing through the center of the circular diaphragm 105, and the ring plate 113 and the primary chamber housing 111 are overlapped on the secondary chamber housing 112 from the front and rear. Are butt-joined in an airtight manner. Further, a mounting plate 114 made of a stainless steel plate is fixed to the rear side surface of the secondary chamber housing 112, and the pressure adjusting valve 91 is mounted on the valve support member 93 by the mounting plate 114.

  The upper boss 116 formed on the upper rear surface of the primary chamber housing 111 has a primary chamber air vent port 117 opened at the top thereof and an inflow opening with a displacement in the circumferential direction with respect to the primary chamber air vent port. Port 118 is formed. The tank side liquid supply tube 73 is connected to the inflow port 118 through an inflow connector 119 screwed into the inflow port 118. Then, the functional liquid in the functional liquid tank 81 flows obliquely from the inflow port 118 and is supplied to the primary chamber 101.

  On the other hand, the vertical boss 121 located at the upper back of the secondary chamber housing 112 is formed with a secondary chamber air vent port 122 opened at the top of the vertical boss 121, and is inclined at the lower back of the secondary chamber housing 112. The boss portion 123 is formed with an outflow port 124 opened on the side surface thereof. The head side liquid supply tube 74 is connected to the outflow port 124 via an outflow connector 125 screwed into the outflow port 124. Then, the functional liquid in the secondary chamber 102 flows obliquely from the outflow port 124 and flows out to the functional liquid droplet ejection head 41.

  As shown in FIG. 9, the primary chamber 101 has a truncated cone shape that is concentric with the diaphragm 105 and has a diameter smaller than that of the diaphragm 105, and has a tapered shape that is slightly reduced in diameter toward the secondary chamber side. . The primary chamber 101 communicates with the primary chamber air vent port 117 and the inflow port 118 on the inner peripheral wall 101a (taper surface).

  The secondary chamber 102 has a truncated cone-shaped main chamber 131 whose front surface is opened to attach the diaphragm 105, and a spring that expands toward the main chamber 131 and continues to the main chamber, and houses a pressure receiving plate biasing spring 152, which will be described later. Chamber 132. The main chamber 131 has a truncated cone shape that is concentric with the diaphragm 105 and has a front surface with the same diameter as the diaphragm 105, and the spring chamber 132 is concentric with the diaphragm 105 and has a smaller diameter than the diaphragm 105 (substantially the same as the primary chamber 101). The same diameter) is formed in a truncated cone shape.

  The inner peripheral wall 131a of the main chamber 131 has a tapered surface that greatly expands forward so as to follow the negative deformation of the diaphragm 105. On this tapered surface, the main chamber 131 is the secondary chamber air vent port. 122 and the outflow port 124.

  The communication channel 103 is formed in a direction orthogonal to the surface of the diaphragm 105 and has a circular cross section that is concentric with the diaphragm 105 and sufficiently smaller in diameter than the diaphragm 105. A shaft section 147 (to be described later) of 106 is configured by a circular cross-section axial insertion section that is slidably received, and a cross-shaped cross-section flow path section that extends in the four radial directions from the shaft insertion section.

  The diaphragm 105 is used to adjust the pressure of the secondary chamber 102 using the pressure received by the diaphragm 105 as a reference adjustment pressure, and the ring plate 113 together with the packing 143 attached to the outside from the outer surface of the secondary chamber housing 112. It is fixed airtight. The diaphragm 105 is formed in a circular shape having the same diameter as the front surface of the secondary chamber housing 112, and is formed in a concentric disk shape having a diameter smaller than that of the diaphragm main body 141 and a concentric disk. And a resin pressure receiving plate 142 with which the tip end portion 147a of the shaft portion 147 of the abutment 106 abuts. The pressure receiving plate 142 is provided on the inner side of the diaphragm main body 141 in order to prevent damage due to separation / contact of the shaft portion 147 of the valve body 106.

  The valve body 106 has a “T” shape with a transverse cross-sectional orientation, a disc-shaped valve body main body 146, a shaft portion 147 extending in one direction perpendicularly from the center of the valve body main body 146, and the valve body main body 146. And an annular valve seal 148 adhered to the back surface (shaft side). The valve body main body 146 and the shaft portion 147 are integrally formed of a corrosion resistant material such as stainless steel. On the back surface of the valve body 146, an annular small protrusion 146a is formed as a portion to which the valve seal 148 is engaged and bonded. The valve seal 148 is made of soft silicone rubber, and an annular seal projection 148a is provided on the back surface thereof corresponding to the annular small projection 146a of the valve body main body 146. When the valve body 106 is closed, the annular seal projection 148a comes into contact with the back surface of the secondary chamber housing 112 serving as a valve seat, that is, the opening edge 103a of the communication channel 103, and the communication channel 103 becomes the primary. It is blocked from the room side. The valve body 146 is formed so that the circular cross-sectional area thereof is sufficiently smaller than the circular cross-sectional area of the diaphragm 105 so that the valve body 106 can be moved back and forth in response to slight pressure fluctuations in the secondary chamber 102. ing.

  The primary chamber 101 is provided with a valve body biasing spring 151 that is positioned between the valve body 106 and the rear wall of the primary chamber 101 and biases the valve body toward the secondary chamber. Yes. Similarly, the spring chamber 132 is provided with a pressure receiving plate urging spring 152 that is located between the pressure receiving plate 142 and the rear wall of the spring chamber 132 and urges the diaphragm main body 141 to the outside via the pressure receiving plate 142. It is arranged. The valve body biasing spring 151 complements the hydraulic head pressure of the functional liquid tank 81 applied to the back surface (primary chamber 101 side) of the valve body 106. On the other hand, the pressure receiving plate urging spring 152 complements plus deformation of the diaphragm 105 and acts so that the secondary chamber 102 is slightly negative with respect to atmospheric pressure.

  The valve body 106 has a force (hereinafter referred to as “F1”) that acts on the valve body 106 from the primary chamber 101 side to a force (hereinafter referred to as “F2”) that acts on the valve body 106 from the secondary chamber 102 side. Is smaller, the communication channel is slid to the primary chamber 101 side, that is, moved in a direction orthogonal to the surface of the diaphragm 105 (goes to the primary chamber 101 side), and the valve is opened (valve opening amount). Increase). On the other hand, when F1 becomes larger than F2, the communication channel slides toward the secondary chamber 102, that is, moves in a direction orthogonal to the surface of the diaphragm 105 (returns to the secondary chamber 102). Close the valve (open the valve). Here, F <b> 1 is a combination of the force (the hydraulic head pressure between the functional fluid tank 81 and the pressure regulating valve 91) that the functional fluid in the primary chamber 101 acts on the valve body 106 and the spring force of the valve body biasing spring 151. Power (sum). F2 is a force that the diaphragm 105 pushes the valve body, that is, a combined force (difference) between the atmospheric pressure, the pressure of the functional liquid in the secondary chamber 102, and the spring force of the pressure receiving plate biasing spring 152.

  Here, the operating principle of the pressure regulating valve 91 will be briefly described. The valve body 106 is always in the open state during the drawing operation, and the functional liquid is allowed to flow from the primary chamber 101 into the secondary chamber 102. However, when the valve body 106 is opened (moved toward the primary chamber 101), the valve body 106 is closed. The amount of functional fluid flowing from the primary chamber 101 into the secondary chamber 102 is adjusted by adjusting the valve opening amount by repeating the valve operation (movement toward the secondary chamber 102 side).

  That is, when the functional liquid is consumed (discharged) by the functional liquid droplet ejection head 41, the pressure of the functional liquid in the secondary chamber 102 decreases and F2 increases. Therefore, F2> F1, and the diaphragm 105 undergoes negative deformation, and the valve body 106 is slightly pushed toward the primary chamber 101 side with the negative deformation of the diaphragm 105. Then, the valve opening amount of the valve body 106 increases, the amount of functional fluid flowing from the primary chamber 101 into the secondary chamber 102 increases, and the pressure of the functional fluid in the secondary chamber 102 returns to a normal value. On the other hand, when the functional liquid flows into the secondary chamber 102 and the pressure of the functional liquid in the secondary chamber 102 increases, F2 decreases. Therefore, F1> F2, and the diaphragm 105 shifts to plus deformation, and the valve body 106 returns to the secondary chamber 102 side with the plus deformation of the diaphragm 105. Then, the valve opening amount of the valve body 106 is reduced, the amount of functional fluid flowing from the primary chamber 101 into the secondary chamber 102 is decreased, and the pressure of the functional fluid in the secondary chamber 102 returns to a normal value. In this way, by repeating the valve opening operation and the valve closing operation of the valve body 106 using the atmospheric pressure as the reference adjustment pressure, the functional liquid is supplied while the secondary chamber 102 is maintained at a substantially constant pressure.

  Next, the head maintenance device 5 will be briefly described with reference to FIG. The head maintenance device 5 is placed on the machine base 2, and a moving table 161 extending in the main scanning direction, a suction unit 162 placed on the moving table 161, and the moving table 161 aligned with the suction unit 162. And a wiping unit 163 disposed in the space. The moving table 161 is configured to be movable in the main scanning direction, and is configured to appropriately move the suction unit 162 and the wiping unit 163 to the maintenance area 37 when the functional liquid droplet ejection head 41 is maintained. In addition to the above units, a discharge inspection unit for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 41, and the weight of the functional liquid droplets ejected from the functional liquid droplet ejection head 41 are measured. It is preferable to mount a weight measuring unit or the like to the head maintenance device 5.

  The suction unit 162 has twelve caps 171 (indicated by a single rectangle in FIG. 1) corresponding to the arrangement of the functional liquid droplet ejection head 41 so as to seal the nozzle surface 63 of the functional liquid droplet ejection head 41. A cap stand 172 having an elevating mechanism and supporting 12 caps 171 so as to be movable up and down, and a single suction pump (not shown) capable of sucking 12 functional liquid droplet ejection heads 41 through each cap 171 And a suction tube (not shown) for connecting each cap 171 and the suction pump.

  When suctioning the functional liquid droplet ejection head 41, the cap 171 is raised by the cap stand 172 to seal the nozzle surface 63 of the functional liquid droplet ejection head 41 and drive the suction pump. Thereby, a suction force can be applied to the functional liquid droplet ejection head 41 via the cap 171, and the functional liquid is forcibly discharged from the functional liquid droplet ejection head 41. The suction of the functional liquid is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 41, and when the liquid droplet ejection apparatus 1 is newly installed or when the head of the functional liquid droplet ejection head 41 is replaced. For example, this is performed to fill the functional liquid flow path from the functional liquid tank 81 to the functional liquid droplet ejection head 41.

  The cap 171 has a function of a flushing box that receives the functional liquid ejected by the discarding (preliminary ejection) of the functional liquid droplet ejection head 41, and drawing on the workpiece W as when the workpiece W is replaced. The function liquid of the regular flushing performed when stopping temporarily is received. In this discard discharge (flushing operation), the cap stand 172 moves the upper surface of the cap 171 slightly away from the nozzle surface 63 of the functional liquid droplet discharge head 41.

  The suction unit 162 is also used to store the functional droplet discharge head 41 when the droplet discharge device 1 is not in operation. In this case, the head unit 16 faces the maintenance area 37 and the cap 171 is sealed on the nozzle surface 63 of the functional liquid droplet ejection head 41. As a result, the nozzle 65 of the functional liquid droplet ejection head 41 is prevented from being dried and nozzle clogging can be prevented.

  The wiping unit 163 includes a winding unit 177 that winds and winds the wiping sheet 176 wound in a roll by a motor drive, and a cleaning liquid nozzle (spray nozzle: not shown). And a wiping unit 179 for wiping the nozzle surface 57 with a wiping sheet 176 on which the cleaning liquid has been sprayed. Then, the wiping unit 163 faces the head unit 16 located in the maintenance area 37, the wiping sheet 176 is fed out, and the wiping unit 163 is moved in the main scanning direction by the moving table 161, so that the functional droplet By wiping (wiping) the nozzle surface 63 of the discharge head 41 with a wiping sheet 176 impregnated with a cleaning liquid, dirt (functional liquid) adhering to the nozzle surface 63 is removed.

  Next, with reference to FIG. 10, a control system of the entire droplet discharge device 1 will be described. The control system of the droplet discharge apparatus 1 basically includes a host computer 180 that performs overall control of the entire drawing system, the function droplet discharge head 41, the X-axis table 12, the Y-axis table 13, the head maintenance device 5, and the like. And a control unit 200 (controller 6) that performs overall control of the entire droplet discharge device 1 including the drive unit 190.

  The host computer 180 is configured by connecting a computer 181 connected to the controller 7 to a keyboard 182, a display 183 that displays an input result of the keyboard 182, and the like.

  The driving unit 190 includes a head driver 191 that controls the ejection of the functional liquid droplet ejection head 41, a movement driver 192 that controls the motors of the XY movement mechanism 11, a suction unit 162 of the head maintenance device 5, and a wiping unit. 163 and a maintenance driver 193 for driving and controlling the moving table 161.

  The control unit 200 includes a CPU 201, ROM 202, RAM 203, and P-CON 204, which are connected to each other via a bus 205. The ROM 202 has a control program area for storing a control program processed by the CPU 201 and a control data area for storing control data for performing a drawing operation, a function recovery process, and the like.

  The RAM 203 has various registers such as a drawing data storage unit that stores drawing data for drawing on the work W, a position data storage unit that stores position data of the work W and the functional liquid droplet ejection head 41, and the like. It is used as various work areas for control processing. In addition to the various drivers of the drive unit 190, the P-CON 204 is connected to the workpiece recognition camera 7, the head recognition camera 8, various sensors, and the like. The P-CON 204 supplements the functions of the CPU 201 and provides interface signals with peripheral circuits. A logic circuit for handling is constructed and incorporated. For this reason, the P-CON 204 fetches various commands and the like from the host computer 180 as they are or processes them into the bus 205, and in conjunction with the CPU 201, the data and control signals output from the CPU 201 and the like to the bus 205 are directly received. Or it processes and outputs to the drive part 190. FIG.

  The CPU 201 inputs various detection signals, various commands, various data, etc. via the P-CON 204 according to the control program in the ROM 202, processes various data, etc. in the RAM 203, and then drives via the P-CON 204. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 190 and the like. For example, the CPU 201 controls the functional liquid droplet ejection head 41, the X-axis table 12, and the Y-axis table 13 to perform drawing on the workpiece W under predetermined drawing conditions and predetermined movement conditions.

  Here, with reference to FIG. 11, a series of discharge operations to the workpiece W by the drawing apparatus 3 in the present embodiment will be described. First, as preparation before discharging functional droplets, position correction of the workpiece W set on the suction table 23 includes position correction in the θ-axis direction by the workpiece θ-axis table 24, main scanning direction and sub-scanning of the workpiece W. The position correction of the head unit 16 set on the carriage 14 is performed by the position correction in the θ-axis direction by the head θ-axis table 15, the main scanning direction of the functional liquid droplet ejection head 41, and This is performed by correcting the position data in the sub-scanning direction.

  Then, the drawing apparatus 3 moves the workpiece W forward in the main scanning direction (X-axis direction) by the X-axis table 12 while being controlled by the control unit 200, and each functional liquid droplet ejection head 41 is synchronized therewith. Are selectively driven to discharge the functional liquid droplets (main scanning) onto the workpiece W. Then, the work W is moved backward and the head unit 16 is moved (sub-scanning) by the drawing line in the sub-scanning direction (Y-axis direction) by the Y-axis table 13, and then the work W is reciprocated in the main scanning direction again. The movement and the driving of the functional liquid droplet ejection head 41 are performed. As described above, the main scanning accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W and the sub-scanning not accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W are performed. By repeating a plurality of times, drawing is performed from end to end of the workpiece W. In the present embodiment, functional liquid droplets are ejected only during forward movement, but functional liquid droplet ejection (reciprocating drawing operation) may be performed during both forward movement and backward movement.

  Here, as described above, the pressure adjustment valve 91 is configured such that the advance / retreat direction of the valve body 106 is substantially perpendicular to the sub-scanning direction, and the valve body 106 of the pressure adjustment valve 91 advances / retreats in the main scanning direction. The hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 is adjusted by opening and closing the communication channel 103. Further, since the pressure adjusting valve 91 is mounted on the carriage 14 together with the functional liquid droplet ejection head 41, it moves in the sub-scanning direction during the sub-scanning. For this reason, even if the inertia in the sub-scanning direction acts on the functional liquid in the pressure adjustment valve 91 or the valve element 106 at the start or end of the sub-scan, the valve element 106 in the pressure adjustment valve 91 becomes the reference adjustment pressure. Regardless of this, there is no pulsation in the main scanning direction. That is, the above F1 and F2 do not fluctuate due to the influence of inertia due to the movement of the pressure regulating valve 91 in the sub-scanning direction. Accordingly, since the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 does not fluctuate due to the movement in the sub-scanning direction, the functional liquid droplet can be accurately ejected in the next main scanning. it can.

  Next, with reference to FIG. 12, a droplet discharge device according to a second embodiment will be described. The droplet discharge device 1 has a basic structure substantially the same as that of the droplet discharge device 1 of the first embodiment. However, the XY movement mechanism 11 including the X-axis table 12 and the Y-axis table 13 is used. Instead of this, a head moving mechanism that moves the functional liquid droplet ejection head 41 via the carriage 14 with respect to the work W when performing main scanning with the functional liquid droplet ejection from the functional liquid droplet ejection head 41 to the work W. The difference is that 211 is provided. Therefore, a different part from the droplet discharge device 1 of 1st Embodiment is demonstrated.

  The head moving mechanism 211 moves the head unit 16 mounted on the head moving mechanism 211 in the X-axis direction (main scanning direction), and is configured substantially the same as the Y-axis table 13 of the first embodiment. Furthermore, it is configured substantially the same as the X-axis table 12 of the first embodiment, and includes a workpiece moving mechanism 212 that moves the workpiece W in the sub-scanning direction. Further, the valve unit 72 mounted on the carriage 14 together with the head unit 16 is configured substantially the same as the valve unit 72 of the first embodiment, but each pressure regulating valve 91 is mainly in the forward and backward direction of the valve body 106. Since the surface of the diaphragm 105 is supported by the valve support member 93 so that the surface of the diaphragm 105 is parallel to the long side of the valve plate 92 so as to be substantially orthogonal to the scanning direction, the valve unit 72 is moved through the support frame 46 to the carriage. 14, the surface of each diaphragm 105 is parallel to the main scanning direction.

A series of discharge operations to the workpiece W by the drawing device 3 in the second embodiment will be described. First, in the same manner as in the first embodiment, preparation (positioning of the functional liquid droplet ejection head 41 and the work W) before ejecting the functional liquid droplets is performed. Then, the drawing device 3 moves the head unit 16 forward in the main scanning direction (X-axis direction) by the head moving mechanism 211, and selectively drives each functional liquid droplet ejection head 41 in synchronization therewith, Functional droplet ejection (main scanning) is performed on the workpiece W. Then, the head unit 16 is moved backward, and the work W is moved (sub-scanning) by the work moving mechanism 212 in the sub-scanning direction (Y-axis direction) by the drawing line, and then the head unit 16 is moved again in the main scanning direction. The reciprocating movement and the driving of the functional liquid droplet ejection head 41 are performed. As described above, the main scanning accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W and the sub-scanning not accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W are performed. By repeating a plurality of times, drawing is performed from end to end of the workpiece W.
In this case, even if the configuration includes a so-called line-type head unit 16 in which a plurality of functional liquid droplet ejection heads 41 are arranged to form a wide drawing line, the functional liquid droplets are ejected only by main scanning. Good.

  Here, as described above, the pressure adjustment valve 91 is configured such that the advance / retreat direction of the valve body 106 is substantially perpendicular to the main scanning direction, and the valve body 106 of the pressure adjustment valve 91 advances / retreats in the sub-scanning direction. The hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 is adjusted by opening and closing the communication channel 103. For this reason, when the functional liquid droplet ejection head 41 moves forward or when the functional liquid droplet ejection head 41 moves backward, at the start or end of the movement, the functional liquid in the pressure regulating valve 91 or the valve body 106 is moved in the main scanning direction. Even if this inertia works, the valve body 106 does not pulsate in the pressure adjusting valve 91 regardless of the reference adjusting pressure. Accordingly, since the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 does not fluctuate due to the movement in the main scanning direction, the functional liquid droplets are always ejected in a state where the hydraulic head pressure is appropriately managed. It can be performed.

  Furthermore, with reference to FIG. 13, a droplet discharge device according to a third embodiment will be described. The droplet discharge device 1 has a basic structure substantially the same as that of the droplet discharge device 1 of the first embodiment. However, the XY movement mechanism 11 including the X-axis table 12 and the Y-axis table 13 is used. Instead, when performing the main scanning accompanied by the discharge of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W, the functional liquid droplet ejection head 41 is moved with respect to the work W via the carriage 14, and the function An XY table 221 for moving the functional liquid droplet ejection head 41 in the sub-scanning direction via the carriage 14 with respect to the work W when performing sub-scanning without discharging functional liquid droplets onto the work W from the liquid droplet ejection head 41. It differs in that it is equipped with. Therefore, a different part from the droplet discharge device 1 of 1st Embodiment is demonstrated.

  The XY table 221 is a so-called XY robot, and an X-axis table 222 that moves the head unit 16 in the X-axis direction (main scanning direction) and a motor drive that moves the X-axis table 222 in the Y-axis direction (sub-scanning direction). Y-axis table 223 and a Y-axis guide 224 that is arranged in parallel to the Y-axis table 223 and guides the movement of the X-axis table 222. The X-axis table 222 is configured substantially the same as the Y-axis table 13 of the first embodiment. Further, the valve unit 72 mounted on the carriage 14 together with the head unit 16 is configured substantially the same as the valve unit 72 of the first embodiment, but each pressure regulating valve 91 is mainly in the forward and backward direction of the valve body 106. Since the surface of the diaphragm 105 is supported by the valve support member 93 so that the surface of the diaphragm 105 is parallel to the long side of the valve plate 92 so as to be substantially orthogonal to the scanning direction, the valve unit 72 is moved through the support frame 46 to the carriage. 14, the surface of each diaphragm 105 is parallel to the main scanning direction.

  A series of discharge operations to the workpiece W by the drawing device 3 in the third embodiment will be described. First, in the same manner as in the first embodiment, preparation (positioning of the functional liquid droplet ejection head 41 and the work W) before ejecting the functional liquid droplets is performed. Then, the drawing device 3 moves the head unit 16 forward in the main scanning direction (X-axis direction) by the X-axis table and selectively drives each functional liquid droplet ejection head 41 in synchronism with this to move the work unit. Functional droplet ejection (main scanning) with respect to W is performed. The head unit 16 is moved by the drawing line in the sub scanning direction (sub scanning) by moving the X axis table 222 by the Y axis table 223 in the sub scanning direction (Y axis direction), and then again the head unit 16. Are moved in the main scanning direction (return) and the functional liquid droplet ejection head 41 is driven. As described above, the main scanning accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W and the sub-scanning not accompanied by the ejection of the functional liquid droplets from the functional liquid droplet ejection head 41 to the work W are performed. By repeating a plurality of times, drawing is performed from end to end of the workpiece W. In this embodiment, the reciprocating drawing operation is performed. However, the functional liquid droplets may be ejected only during the forward movement.

Here, as described above, the pressure adjustment valve 91 is configured such that the advance / retreat direction of the valve body 106 is substantially perpendicular to the main scanning direction, and the valve body 106 of the pressure adjustment valve 91 advances / retreats in the sub-scanning direction. The hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 is adjusted by opening and closing the communication channel 103. For this reason, when the functional liquid droplet ejection head 41 moves forward or when the functional liquid droplet ejection head 41 moves backward, at the start or end of the movement, the functional liquid in the pressure regulating valve 91 or the valve body 106 is moved in the main scanning direction. Even if this inertia works, the valve body 106 does not pulsate in the pressure adjusting valve 91 regardless of the reference adjusting pressure. Accordingly, since the hydraulic head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 does not fluctuate due to the movement in the main scanning direction, the functional liquid droplets are always ejected in a state where the hydraulic head pressure is appropriately managed. It can be performed.
In this case, when the functional liquid droplet ejection head 41 moves in the sub-scanning direction, the valve element 106 may pulsate in the sub-scanning direction in the pressure adjustment valve 91. After the head 41 moves in the sub-scanning direction, the functional liquid droplet ejection head 41 is subjected to main scanning after the head pressure of the functional liquid supplied to the functional liquid droplet ejection head 41 is stabilized by waiting for a predetermined time. It is preferable to eject functional droplets by moving in the direction.

  As described above, according to the liquid droplet ejection apparatus 1 of the first to third embodiments, the functional liquid droplet ejection head 41 is supplied to the functional liquid droplet ejection head 41 at the start and end of the movement. The functional liquid droplets can be discharged in a state where the hydraulic head pressure of the functional liquid is appropriately adjusted.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 14 is a flowchart showing the manufacturing process of the color filter, and FIG. 15 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 15B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 15C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S13), as shown in FIG. 15 (d), functional droplets are ejected by the functional droplet ejection head 41 to enter each pixel region 507a surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 41 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 15, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 16 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 41. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 41.

FIG. 17 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 18 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 19 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 20, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 21, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 41, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the work table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 23, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 41 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 24, a drying treatment and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 25, the pixel region (with the second composition containing the light-emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 25)) as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above, so the second composition Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 26, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 41, as shown in FIG. 27, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode formation step (S25), as shown in FIG. 28, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 29 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the work table 22 of the droplet discharge device 1.
First, the liquid material (functional liquid) containing the conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 41. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 41, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 30 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 31A, and when these are formed, as shown in FIG. 31B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a droplet discharge device. It is a perspective view of a head unit. It is an external appearance perspective view of a functional droplet discharge head. It is a top view of a head unit, a valve unit, and a tank unit. It is a perspective view of a tank unit. It is a perspective view of a valve unit. It is the figure which showed the height relationship of a functional droplet discharge head, a pressure control valve, and a functional liquid tank. It is an external appearance perspective view of a pressure control valve. It is a longitudinal cross-sectional view of a pressure control valve. It is a block diagram explaining the control system of a droplet discharge apparatus. It is a figure explaining drawing operation by the droplet discharge device concerning a 1st embodiment. It is a figure explaining drawing operation by the droplet discharge device concerning a 2nd embodiment. It is a figure explaining drawing operation by the droplet discharge device concerning a 3rd embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus 11 ... XY moving mechanism 12 ... X-axis table 13 ... Y-axis table 14 ... Carriage 41 ... Functional liquid droplet discharge head 73 ... Tank side liquid supply tube 74 ... Head side liquid supply tube 81 ... Functional liquid tank DESCRIPTION OF SYMBOLS 91 ... Pressure regulating valve 101 ... Primary chamber 102 ... Secondary chamber 103 ... Communication flow path 105 ... Diaphragm 106 ... Valve body 211 ... Head moving mechanism 221 ... XY table 500 ... Color filter W ... Workpiece

Claims (8)

A functional liquid droplet ejection head introduced with a functional liquid;
A functional liquid tank for storing the functional liquid and supplying the functional liquid to the functional liquid droplet ejection head under natural flow ;
The functional liquid introduced from the functional liquid tank into the primary chamber is supplied to the functional droplet discharge head through the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is adjusted as a reference. As the pressure, a valve body provided in a communication channel that communicates the primary chamber and the secondary chamber is opened and closed in a direction perpendicular to the surface of the diaphragm to open and close the communication channel, and the secondary chamber A pressure regulating valve to regulate the pressure,
A carriage carrying the functional liquid droplet ejection head and the pressure regulating valve;
An X-axis table for moving the workpiece in the main scanning direction with respect to the functional droplet discharge head;
A Y-axis table that moves the functional liquid droplet ejection head with respect to the work in the sub-scanning direction orthogonal to the main scanning direction via the carriage;
In synchronization with the movement of the workpiece in the main scanning direction, main scanning for discharging functional liquid droplets from the functional liquid droplet discharging head and sub scanning for moving the functional liquid droplet discharging head in the sub scanning direction are performed. A droplet discharge device for performing a drawing process on the workpiece,
The droplet discharge device, wherein the pressure adjusting valve is mounted on the carriage so that the advance / retreat direction of the valve body is substantially orthogonal to the sub-scanning direction. A functional liquid droplet ejection head introduced with a functional liquid;
A functional liquid tank for storing the functional liquid and supplying the functional liquid to the functional liquid droplet ejection head under natural flow ;
The functional liquid introduced from the functional liquid tank into the primary chamber is supplied to the functional droplet discharge head through the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is adjusted as a reference. As the pressure, a valve body provided in a communication channel that communicates the primary chamber and the secondary chamber is opened and closed in a direction perpendicular to the surface of the diaphragm to open and close the communication channel, and the secondary chamber A pressure regulating valve to regulate the pressure,
A carriage carrying the functional liquid droplet ejection head and the pressure regulating valve;
Moving means for moving the functional liquid droplet ejection head in the main scanning direction with respect to the workpiece via the carriage,
A liquid droplet ejection apparatus that performs a main scanning for ejecting a functional liquid droplet from the functional liquid droplet ejection head in synchronization with the movement of the functional liquid droplet ejection head in the main scanning direction and performs a drawing process on the workpiece. And
The droplet discharge device according to claim 1, wherein the pressure adjusting valve is mounted on the carriage such that the advancing / retreating direction of the valve body is substantially orthogonal to the main scanning direction. A functional liquid droplet ejection head introduced with a functional liquid;
A functional liquid tank for storing the functional liquid and supplying the functional liquid to the functional liquid droplet ejection head under natural flow ;
The functional liquid introduced from the functional liquid tank into the primary chamber is supplied to the functional droplet discharge head through the secondary chamber, and the pressure received by the diaphragm constituting one surface of the secondary chamber is adjusted as a reference. As the pressure, a valve body provided in a communication channel that communicates the primary chamber and the secondary chamber is opened and closed in a direction perpendicular to the surface of the diaphragm to open and close the communication channel, and the secondary chamber A pressure regulating valve to regulate the pressure,
A carriage carrying the functional liquid droplet ejection head and the pressure regulating valve;
An XY table that moves the functional liquid droplet ejection head with respect to a workpiece via the carriage in a main scanning direction and a sub-scanning direction orthogonal to the main scanning direction;
Main scanning for discharging functional liquid droplets from the functional liquid droplet discharging head in synchronization with the movement of the functional liquid droplet discharging head in the main scanning direction, and the functional liquid droplet discharging head without discharging functional liquid droplets And a sub-scan that moves in the sub-scanning direction to perform a drawing process on the workpiece,
The droplet discharge device according to claim 1, wherein the pressure adjusting valve is mounted on the carriage such that the advancing / retreating direction of the valve body is substantially orthogonal to the main scanning direction.   4. The droplet discharge device according to claim 1, wherein the pressure adjustment valve uses an atmospheric pressure received by the diaphragm facing the atmosphere as the reference adjustment pressure. 5.   5. The droplet discharge device according to claim 1, wherein the functional liquid tank is mounted on the carriage together with the function droplet discharge head and the pressure adjustment valve. A plurality of the functional liquid droplet ejection heads are provided,
The pressure regulating valve and the functional liquid tank are provided in a plurality corresponding to the plurality of functional liquid droplet ejection heads,
A plurality of tank side liquid supply tubes respectively connecting the plurality of functional liquid tanks and the plurality of pressure regulating valves;
A plurality of head side liquid supply tubes respectively connecting the plurality of functional liquid droplet ejection heads and the plurality of pressure regulating valves;
The plurality of functional liquid droplet ejection heads and the plurality of pressure adjustment valves are respectively arranged to correspond to each other so that the tube lengths of the plurality of head side liquid supply tubes are the same. The droplet discharge device according to any one of 1 to 5.   The plurality of functional liquid tanks and the plurality of pressure adjustment valves are respectively arranged so as to correspond to each other so that the tank-side liquid supply tubes have the same tube length. The liquid droplet ejection apparatus described.   8. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 1 is used to form a film forming portion with functional droplets on the workpiece.

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