JP4689890B2 - Surface texture measuring device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to, for example, a three-dimensional measuring machine, a shape measuring machine, and other surface property measuring apparatuses that operate a probe along the surface of an object to be measured and display information necessary for measurement on a monitor.
[0002]
[Background]
Coordinate measuring machines that accurately measure the dimensions of objects having complex shapes are well known, and are used in various industrial fields as two-dimensional or three-dimensional measuring machines. In the measurement using this coordinate measuring machine, the probe held via the X, Y, and Z axis drive mechanisms incorporated in the coordinate measuring machine is placed at a predetermined location on the object to be measured placed on the surface plate. Abut. The dimension of the object to be measured is measured by obtaining the center coordinate value of the spherical probe tip at the moment when the probe contacts the object to be measured.
[0003]
The center coordinate value of the probe tip obtained in this way is output to the host computer via the drive control device and subjected to processing such as geometric calculation. As a result, various dimensional information of the object to be measured is displayed on the monitor or printed out on a printer or the like. The probe movement operation is performed manually by holding the tip of the Z-axis spindle, and is performed by inputting a program to a host computer (not shown) via a keyboard or the like during automatic control.
[0004]
[Problems to be solved by the invention]
However, at the time of measurement with these coordinate measuring machines, a CRT screen of a personal computer (PC), which is a general-purpose data processing device, or a display screen of a dedicated data processing device is used in order to perform command input or measurement operation of manual operation or measurement operation. In order to operate while viewing, it was necessary to alternately view the object to be measured and the display screen at a distant position. Therefore, the operability at the time of measurement was very bad.
Also, when measuring the inside of the hole on the object to be measured, the measuring machine had to be operated in a posture that looked into the inside of the hole, which put an extra burden on the work of the measurement operator. .
[0005]
In view of such a point, the present invention has an object to provide a surface texture measuring device that improves operability by simultaneously viewing a monitor and an object to be measured and can reduce the work burden on a measurement operator. And
[0006]
[Means for Solving the Problems]
  Therefore, the present invention intends to achieve the object by displaying information displayed on the monitor even in the vicinity of the probe.
  Specifically, the surface texture measuring device of the present invention isProvided for each X, Y, Z axis drive mechanismProbeAlong the surface of the object to be measuredManipulateConnected to a drive control device with a controller,Information required for measurementProvided on the host computer to processOn the first monitor, Information necessary for the measurement workA surface texture measuring device for display, which is attached to a probe and can be moved back and forth in the vertical direction and movable in a plane perpendicular to the vertical direction.Provided in each X, Y, Z axis drive mechanismThe probe on the spindle was mountedThe lower end of the Z-axis spindle in the vertical directionAnd a second monitor for displaying information displayed on the first monitor, and an input means for a touch panel provided on the display surface of the second monitor for inputting information necessary for measurement work. And imaging means for imaging the tip of the probe together with the object to be measured and outputting the imaging results to the first monitor and the second monitor, and outputting the warning, warning, signal sound, and processing state by voice to the operator And a means for informing the user.
[0007]
  In the present invention, the vicinity of the place where the second monitor for displaying the contents displayed on the first monitor performs the measurement workSpecifically, the lower end portion in the vertical direction of the Z-axis spindle to which the probe in the spindle provided in each of the X, Y, and Z axis drive mechanisms is attachedBy arranging in the position, the measurement object and the display screen can be seen at the same time while performing the measurement work, so that the work efficiency of the measurement work can be improved.
[0008]
  Here, in the present invention, the second monitor is detachably provided on the spindle to which the probe is attached.TheIn this configuration, since the second monitor is installed on the spindle in the vicinity of the probe that the operator pays most attention during the work, the second monitor arranged closest can be seen at the same time while observing the movement of the probe. . For this reason, the operator can avoid the useless work movement of seeing both the probe and the monitor at a distant place, so that the workability of the measuring apparatus can be greatly improved. Moreover, since the second monitor is detachable from the probe, the second monitor can be removed when measurement is possible without the second monitor.
Further, in the present invention, it is preferable that the spindle is movable in a vertical direction and movable in a plane perpendicular to the vertical direction, and the second monitor is provided in the vicinity of the probe of the spindle. In this configuration, since the second monitor provided in the vicinity of the probe of the spindle moves in the same manner as the spindle in the measurement operation, the distance between the probe and the second monitor is always kept constant. Easy.
In the present invention, an imaging means for imaging the object to be measured and outputting the imaging result is provided, and the second monitor displays the imaging result. In this configuration, for example, when measuring a minute part of an object to be measured, an image is picked up by an image pickup unit, and the picked-up image can be enlarged and displayed on the second monitor, so that there is no error in the measurement part and the measurement reliability is improved. .
[0011]
  Furthermore, in the present invention, the second monitor is provided with input means for inputting information necessary for measurement.TheIn this configuration, necessary commands and the like can be input on the second monitor while looking at the probe according to the measurement work procedure, so that the burden on the operator is reduced and the work efficiency is further improved.
[0012]
On the other hand, in the present invention, the spindle may be provided with an input means for inputting information necessary for measurement in the vicinity of the second monitor. In this configuration, necessary commands and the like according to the measurement work procedure can be input by the input means while looking at the probe and the second monitor that are arranged close to each other, so that work efficiency is further improved.
[0013]
In the present invention, the input means preferably includes an origin recognition switch for recognizing the origin position of the probe and a measurement end notification switch for notifying the data processing device of the end of measurement. In this configuration, since the origin recognition and the measurement end notification important for measurement can be performed by operating the input means arranged in the vicinity of the probe, the burden on the worker in performing these operations is reduced.
[0014]
Furthermore, in the present invention, it is preferable that a measurement data processing device for processing measurement data is provided, and the second monitor transmits and receives data to and from the measurement data processing device by wireless transmission. In this configuration, for example, since there is no restriction due to cable wiring, the second monitor can be fixed to the most convenient part for measurement work, and the second monitor can be easily operated by hand, thereby reducing malfunctions. Measurement efficiency.
[0017]
In the present invention, it is preferable that a voice data synthesizer that synthesizes voice data and a loudspeaker that amplifies the voice data synthesized by the voice data synthesizer as voice or a cueing sound are provided. In this configuration, the command instructed in the measurement and the abnormal content of the measurement result can be confirmed by sound as a sound or a cue sound, so that an alarm indicating a measurement abnormality is not overlooked and work efficiency is improved.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0020]
FIG. 1 shows a first embodiment of the present invention.
In FIG. 1, a surface texture measuring apparatus 1 according to the first embodiment is a three-dimensional measuring machine that can be controlled by a computer and performs measurement in three axial directions of an X axis, a Y axis, and a Z axis. In the measurement using the surface texture measuring device 1, the probe 2 held via the X, Y and Z axis driving mechanisms incorporated in the surface texture measuring device 1 was placed on the surface plate 3. It is made to contact | abut to the predetermined location of the to-be-measured object 5. FIG. This is performed by obtaining the center coordinate value of the tip of the spherical probe 2 at the moment when the probe 2 comes into contact with the object 5 to be measured.
[0021]
On the other hand, each of the X, Y, and Z axis driving mechanisms includes a portal column 6, a slider 7, and a Z axis spindle 8. The center coordinate value of the tip of the probe 2 obtained in this way is output to the host computer 10 via the drive control device 9 and subjected to processing such as geometric calculation. Thereby, various dimension information of the DUT 5 is displayed on the first monitor 11 or printed out on the printer 12 or the like. Note that automatic control of probe movement is mainly performed by inputting a program to the host computer 10 via the keyboard 13 or the like.
[0022]
The entire surface texture measuring device 1 is operated by the console 20. The console 20 is provided with a joystick lever 15 for remotely operating the probe 2. However, the surface texture measuring apparatus 1 can also perform manual measurement. That is, for example, the control of the X, Y, and Z axis drive mechanisms is canceled and each axis is free, the tip of the Z axis spindle is gripped, and the probe 2 is moved manually to an arbitrary position.
[0023]
The Z-axis spindle 8 can move back and forth in the vertical direction (Z-axis direction) and can move in an XY plane orthogonal to the vertical direction. A second monitor 29 is detachably attached to the spindle 8 in the vicinity of the probe 2. The second monitor 29 is preferably attached to the spindle 8 with a screw or the like. In addition, in order to make attachment / detachment easy, it is good also as a magnet fixed type fixed with a magnet. Further, a connector 30 (see FIG. 2) is preferably provided at the lower end of the Z-axis spindle 8 in order to supply power to the second monitor 29 and to exchange measurement signals.
[0024]
FIG. 3 shows a side view of the Z-axis spindle 8 shown by rotating the Z-axis spindle 8 of FIG. 2 by 90 °.
A connector 30 is provided at the lower end of the Z-axis spindle 8, and a cable 27 extends from the connector 30 to the second monitor 29.
[0025]
The second monitor 29 may be disposed at an arbitrary position on the surface plate 3. The second monitor 29 is detachable from a connector 30 provided on the portal column 6 of the surface texture measuring device, for example. Is provided.
[0026]
The Z-axis spindle 8, the drive control device 9, the console 20, the host computer 10, and the connector 30 for connecting the first monitor 11 and the second monitor 29 are connected to each other by a cable 27. It is connected.
[0027]
FIG. 2 is a schematic configuration diagram of the surface texture measuring apparatus 1.
In FIG. 2, the drive control device 9 includes a controller 25. The controller 25 is electrically connected to the probe 2, the console 20, and the host computer 10, respectively. The connector 30 that can be connected to the second monitor 29 is electrically connected to the host computer 10, and the host computer 10 is also electrically connected to the first monitor 11.
[0028]
The probe 2 at the tip of the Z-axis spindle 8 latches position data from the signal data at the moment of contact with the object 5 to be measured. The controller 25 takes in the point cloud data on the surface of the DUT 5 as the measurement value from the position data latched by the probe 2 and transmits it to the host computer 10. The host computer 10 performs arithmetic processing on the measurement data input from the controller 25, displays the measurement results on the first monitor 11 and the second monitor 29, and prints them on the printer 12 or the like.
[0029]
The configuration of the display unit 29A of the second monitor 29 is shown in FIG.
In FIG. 4, the display unit 29 </ b> A displays a stereoscopic image 32 of the object to be measured 5, a distance 33 </ b> A in the X-axis direction, a distance 33 </ b> B in the Y-axis direction, and a distance 33 </ b> C in the Z-axis direction. Yes. A numeric keypad 34, an origin recognition switch 35, and a measurement end notification switch 36 as input means are displayed at the lower right part of the display unit 29A.
[0030]
The numeric keypad 34 is used to input information necessary for measurement by touching the screen. The information can also be input to the host computer 10 by the keyboard 13. Specifically, the keyboard 13 is used when designating the shape of the measurement target part of the DUT 5. For example, “1” is input when the measurement target is a point, “2” is input when the object is a line, and “3” is input when the object is a plane. In another use example, the number of measurement points to be measured by bringing the probe 2 into contact with the object to be measured 5 can be designated. For example, when “3” is input, the shape calculation is automatically performed after 3 points are measured, and when “4” is input, the shape is automatically calculated after 4 points are measured. The shape calculation is performed.
[0031]
The origin recognition switch 35 is a switch for recognizing the origin position (ABS) by manually moving the measuring machine to the origin position and pressing at the position. The measurement end notification switch 36 notifies the measurement data processing device built in the host computer 10 that the measurement has been completed in the function of automatically determining the shape of the DUT 5 by inputting the necessary measurement points. To do.
[0032]
In the first embodiment, the origin recognition switch 35 and the measurement end notification switch 36 may be combined with one switch.
[0033]
Measurement using the surface texture measuring device 1 is performed as follows.
A console 20 that controls the operation of the entire surface texture measuring device 1 is installed in the vicinity of the object 5 to be measured on the surface plate 3. Thereafter, the joystick lever 15 of the console 20 is operated, and the probe 2 held via the X, Y, and Z axis driving mechanisms incorporated in the surface texture measuring device 1 is placed on the surface plate 3. The measured object 5 is brought into contact with a predetermined location. At the moment of contact, the center coordinate value of the tip of the spherical probe 2 is obtained. The coordinate values obtained in this way are output to the host computer 10 via the drive control device 9, and processing such as geometric calculation is performed.
[0034]
As a result, various dimension information of the DUT 5 is displayed on the display unit 29A of the second monitor 29 and the first monitor 11, respectively. The display result is printed out to the printer 12 or the like as necessary.
[0035]
Therefore, according to the first embodiment, the following operational effects are obtained.
(1) In the surface texture measuring apparatus 1 that operates the probe 2 along the surface of the object to be measured 5 and displays information necessary for measurement on the first monitor 11, the information displayed on the first monitor 11 is the probe 2. The second monitor 29 is displayed in the vicinity of the second monitor 29, and necessary information is displayed on the second monitor 29, so that the measurement operation is performed while viewing the display unit 29A of the second monitor 29 and the device under test 5. be able to. For this reason, measurement work can be performed easily and efficiently.
[0036]
(2) Since the second monitor 29 is installed on the Z-axis spindle 8 in the vicinity of the probe 2 to which the operator pays most attention during the work, the second monitor 29 disposed closest to the operator 2 while watching the movement of the probe 2 Can be seen at the same time. For this reason, the useless work movement in which the operator looks at both the probe 2 and the first monitor 11 at a remote location is eliminated. Therefore, the workability of the measuring apparatus can be greatly improved.
[0037]
(3) Since the second monitor 29 is detachable from the Z-axis spindle 8, the second monitor 29 can be removed when measurement is possible without the second monitor 29.
[0038]
(4) Since the second monitor 29 includes the numeric keypad 34 for inputting information necessary for measurement, an operation of moving to the input means originally arranged near the first monitor 11 at the time of input is performed. The useless movement of the person can be eliminated. In addition, necessary data required during the measurement operation can be input from the second monitor 29 immediately. Therefore, the measurement operation can be performed more quickly and efficiently.
[0039]
(5) Since the Z-axis spindle 8 can be moved back and forth in the vertical direction and movable in a plane perpendicular to the vertical direction, and the second monitor 29 is provided in the vicinity of the probe 2 of the Z-axis spindle 8, it is easy to use. A good three-dimensional surface texture measuring apparatus 1 can be provided.
[0040]
(6) It is important for measurement by comprising an origin recognition switch 35 for recognizing the origin position of the probe 2 and a measurement end notification switch 36 for notifying the measurement data processing device of the end of measurement as input means. Origin recognition and measurement end notification can be performed by operating the input means arranged near the probe. For this reason, the burden on the operator in performing these operations can be reduced.
[0041]
Next, a second embodiment of the present invention will be described with reference to FIG.
In the second embodiment, the connector 30 in the first embodiment also serves as a connector for connecting the CCD camera and the illumination device. Other configurations are the same as those in the first embodiment.
[0042]
FIG. 5 shows a main part of the surface texture measuring apparatus 1 according to the second embodiment. Note that in the second embodiment, the same or similar components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified. Since the basic configuration shown in FIGS. 1 to 4 is the same as that of the first embodiment, the illustration of FIGS. 1 to 4 is omitted in the description of the second embodiment.
[0043]
In the Z-axis spindle 8, a CCD camera 31 is attached on the opposite side of the second monitor below the spindle 8. The lens portion 31A of the CCD camera 31 can photograph the tip of the probe 2. When measuring the inside (not shown) of the hole formed in the DUT 5, the CCD camera 31 photographs the probe tip and the inside of the hole at the same time.
[0044]
The positional relationship between the tip of the probe 2 and the inside of the hole is zoomed up and displayed on the second monitor 29. The operator operates the joystick lever 15 while viewing the image to move the tip of the probe 2 and measures the location inside the required hole. When photographing the inside of such a hole, an illumination device for the CCD camera 31 may be attached to the tip of the probe 2 in order to photograph the inside more clearly.
[0045]
According to the second embodiment, in addition to the effects (1) to (6) in the first embodiment, the following effects can be obtained.
(7) The measurement content of the CCD camera 31 is displayed on the second monitor 29 when measuring the inside of the hole of the object 5 to be measured, so that the measurement work in an unreasonable posture such as looking into the hole of the object 5 to be measured is performed. Can be eliminated, and the burden on the measurer in the measurement work can be reduced.
[0046]
Next, a third embodiment of the present invention will be described based on FIG. 1, FIG. 3, FIG. 5, and FIG.
The third embodiment is different from the first and second embodiments in the attachment position of the input means 40, and the other structure is the same as the first and second embodiments.
As shown by the imaginary lines in FIGS. 1, 3, and 5, the input means 40 is detachably attached to the Z-axis spindle 8 in the vicinity of the second monitor 29.
[0047]
The input means 40 has a portable structure such as a mobile phone. Between the input means 40 and the host computer 10, for example, in addition to a wired connection using an electric wire, an optical fiber, or the like, a wireless method such as a sound wave, an ultrasonic wave, light, or a radio wave can be used. The input means 40 can be operated in a hand-held state, and can easily give instructions to the host computer 10.
[0048]
FIG. 6 shows a specific configuration of the input means 40.
Similar to the first and second embodiments, the input means 40 includes a numeric keypad 34, an origin recognition switch 35, and a measurement end notification switch 36.
[0049]
Therefore, in the third embodiment, in addition to the operational effects (1), (2), (3), (5), and (7) of the first and second embodiments, the following effects are obtained. can get.
(8) Since the Z-axis spindle 8 in the vicinity of the second monitor 29 is provided with input means 40 for inputting information necessary for measurement, a command or the like required according to the measurement work procedure is provided. Since it is possible to input with the input means 40 while looking at the probe 2 and the second monitor 29 arranged close to each other, the work efficiency can be further improved.
[0050]
Next, a fourth embodiment of the present invention will be described with reference to FIG.
In the fourth embodiment, the second monitor 29 in the first embodiment is provided so that it can be attached to an operator who operates the probe 2 along the surface of the object to be measured 5.
[0051]
  In FIG.It is a premise technique of the present inventionAn operator who operates the surface texture measuring device 1 according to the fourth embodiment is shown. In addition, thisPrerequisite technologyThe same reference numerals are used for the same or similar components as those in the first to third embodiments, and the description thereof is omitted or simplified.
  In FIG. 7, 51 is an operator, and the operator 51 is equipped with a small computer 52 which is a so-called wearable computer. A mounting band 53 as a mounting means such as a belt is detachably attached to the small computer 52. For example, the attachment band 53 is detachably attached to the waist of the operator 51, and the small computer 52 is detachably attached to the operator 51 by attaching the attachment band 53.
[0052]
The small computer 52 is connected to the host computer 10 by radio 54 such as sound waves, ultrasonic waves, light, and radio waves, and can transmit and receive signals between the two. In addition, as a configuration for transmitting and receiving signals, in addition to connecting via radio, for example, connecting by wire such as an electric wire or optical fiber, or via a mobile communication device such as a so-called mobile phone or PHS (Personal Handyphone System) It can be connected to send and receive signals.
[0053]
The operator 51 is equipped with a headset 57 having a display device 56 as a second monitor which is a so-called head-mounted display. The headset 57 has a head mounting portion 58 as mounting means that is detachably attached to the head 51A of the operator 51. The display device 56 is in a state in which the head mounting portion 58 is attached to the operator 51 and covers at least a part of the field of view of the operator 51, for example, covers both eyes while being positioned in front of one eye. Is attached. The display device 56 is formed with translucency so that the operator 51 can recognize the display screen and can recognize the object 5 and the probe 2 through the display device 56. The display device 56 is attached to the head mounting portion 58 so as to be retractable from the position in front of both eyes of the operator 51 by rotation.
[0054]
The display device 56 can correspond to any device using a liquid crystal panel or an organic EL (electroluminescent) device. For example, like goggles, the operator 51 can be attached to the front of both eyes of the operator 51 so as to integrally cover the entire field of view or almost the entire field, or only one eye side can be provided. Moreover, although formed with translucency, for example, in the case where it is provided at the lower front side of both eyes so as to obtain a front field of view, a configuration without translucency may be employed. Furthermore, it may be provided in a configuration that does not rotate.
[0055]
Further, the headset 57 is attached with an earphone 59 as a sound output means as a loudspeaker at a position corresponding to at least one ear of the operator 51 with the head mounting portion 58 attached to the operator 51. It has been. The small computer 52 or the host computer 10 connected to the headset 57 functions as a voice data synthesis unit that synthesizes voice data, and the earphone 59 outputs the synthesized voice data as voice.
[0056]
In addition, not only the earphone 59 but any configuration that allows the operator 51 to recognize by voice can be used. The earphones 59 may be provided at positions corresponding to both ears. The earphone 59 is not limited to the configuration attached to the head mounting portion 58, and may be a separate structure, for example, directly attached to the ear.
[0057]
Furthermore, a microphone 60 as voice input means is attached to the headset 57 at a position corresponding to the vicinity of the mouth of the operator 51 with the head mounting portion 58 attached to the operator 51. The small computer 52 connected to the headset 57 takes in the audio data obtained from the microphone 60, recognizes the audio data by the setting means built in the small computer 52 or the host computer 10, processes it, and performs various controls. It has become.
[0058]
Note that the voice input means is not limited to the microphone 60, and any configuration that can recognize the voice of the operator 51 can be used. In addition, the microphone 60 may be attached so as to be retractable by rotation from a position near the mouth. Furthermore, the structure is not limited to the structure attached to the head mounting portion 58, and may be a separate structure, for example, separately attached to clothing.
[0059]
The headset 57 is connected to the small computer 52 by wire such as an electric wire or an optical fiber, and can transmit and receive signals between the two. In addition, it is good also as a structure connected not only by a wire but by radio waves, such as a sound wave, an ultrasonic wave, light, and an electromagnetic wave.
[0060]
  thisPrerequisite technologyIn the measurement at, data such as the measured coordinate values is subjected to processing such as geometric calculation in the host computer 10, and the processed result is displayed on the display device 56 of the headset 57 together with the first monitor 11. Further, if necessary, the operator 51 utters and inputs and sets predetermined control through the microphone 60 by voice. Thereby, the display by the display device 56 can be switched, and the result obtained by performing another process in the small computer 52 or the host computer 10 can be displayed. Further, in the case of a measurement error or the like, a warning, an alarm, a signal sound, a processing state, or the like is output by voice through the earphone 59 and notified to the operator 51.
[0061]
  thisPrerequisite technologyAccording to the surface texture measuring apparatus 1 that operates the probe 2 along the surface of the object to be measured 5 and displays information necessary for measurement on the first monitor 11 as in the first embodiment. The display device 56 includes a display device 56 that directly displays and displays information displayed on the first monitor 11 to an operator operating in the vicinity of the probe 2, and displays necessary information on the display device 56. The measurement work can be performed while looking at 56 and the DUT 5. For this reason, measurement work can be performed easily and efficiently.
[0062]
  Also,Prerequisite technologyAccording to the above, the following effects can be obtained. (9) Since the display device 56 as the second monitor is mounted so as to cover at least a part of the field of view of the operator 51, the viewpoint is hardly changed between the object to be measured 5 and the probe 2 and the display device 56. Thus, the reliable operation of the probe 2 and quick measurement work can be performed, and accurate measurement results and work efficiency can be further improved.
[0063]
(10) Since the display device 56 is formed with translucency so that the device under test 5 and the probe 2 are visible, the device under test 5 is enlarged even if the display device 56 is enlarged and positioned on the line of sight. And the probe 2 can be recognized, the amount of display information can be increased by increasing the size of the display device 56, and a display method that allows the operator 51 to easily recognize the display content, such as increasing the display, can be easily achieved. Efficiency can be further improved.
[0064]
(11) Since various kinds of control can be input by the microphone 60, the measurement operation can be efficiently performed without interruption for the control, and the work efficiency can be further improved.
[0065]
(12) With the earphone 59, various warnings, alarms, signal sounds, processing states, etc. can be recognized by voice, and work efficiency can be further improved.
[0066]
  In addition, thisPrerequisite technologyIn the above description, the small computer 52 is attached to the circumference of the operator 51 as a separate body from the headset 57, but the small computer 52 is integrated with the headset 57, or the small computer 52 is not provided. A signal may be transmitted and received by directly connecting to the host computer 10. Further, the headset 57 may be configured without the earphone 59 or the microphone 60. The wearing means for wearing the headset 57 is not limited to the head wearing part 58 to be worn on the head 51A. For example, an operator such as a state of hanging on the neck, a state of placing on the shoulder, a state of attaching to the waist. It is good also as a structure mounted in any position of 51.
[0067]
Further, the present invention is not limited to the above-described embodiments, and modifications, improvements and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the present invention, the second monitor 29 can be installed at various installation locations other than the vicinity of the Z-axis spindle 8. Further, the second monitor 29 is not fixedly installed, and for example, as shown in the fourth embodiment, a control command is given by the microphone 60 while performing measurement so that the second monitor 29 can be carried during work, Data necessary for measurement may be input from the numeric keypad 34 of the display unit 29A held in the hand.
[0068]
The portable second monitor 29 is connected to the measurement data processing device of the host computer 10 using a known wireless transmission means such as sound waves, ultrasonic waves, light, radio waves, electromagnetic coupling, etc., in addition to wired wires such as electric wires and optical fibers. A configuration may be employed in which an instruction command is transmitted, or pre-measurement information such as workpiece design data and post-measurement information of a shape analysis result can be received from the measurement data processing device of the host computer 10. In this configuration, the second monitor 29 transmits and receives data to and from the measurement data processing device by wireless transmission, so that there is no restriction due to cable wiring, and the second monitor 29 is the most convenient part for measurement work. Can be fixed to. In addition, it is easy to operate the second monitor 29 by hand, and malfunctions are reduced and measurement efficiency is improved.
[0069]
Further, only the numeric keypad 34 may be carried by hand as a separate body from the second monitor, and data may be directly input from the measurement operator's hand while measuring.
[0070]
In the second embodiment, the second monitor 29, the CCD camera 31, and the illuminating device are separated from each other. However, they may be integrated, and the captured image is transmitted by the wireless transmission means described above. You may go. Further, in the portable second monitor 29 with a CCD camera, the imaging result may be enlarged and displayed on the second monitor 29, and used as an electronic magnifier to confirm details of the measurement target. That is, in the present invention, a configuration may be adopted in which the CCD camera 31 is provided as imaging means for imaging the object to be measured 5 and outputting the imaging result, and the imaging result is displayed on the second monitor 29. In this configuration, since the image captured by the CCD camera 31 can be enlarged and displayed on the second monitor 29, there is no error in the measurement site, and the reliability of measurement is improved.
[0071]
  Furthermore, in the present invention, for example,Prerequisite technologyAs shown in FIG. 5, the microphone is a voice input means, the voice data input by the microphone is processed, and the voice data processing device is provided, and the measurement command instructed by voice is analyzed by the voice data processing device. The result may be displayed on the second monitor 29 and the measurement command may be executed.
[0072]
For example, when a voice command “en” is given, it is analyzed that circle measurement is commanded by the voice data processing device. Then, it displays on the second monitor 29 that the command is a circle measurement, and the host computer 10 waits for three measurement data as a circle measurement. When three pieces of measurement data are input by operating the probe 2, the host computer 10 automatically calculates the parameters (center, radius, etc.) of the circle from the three points of data. The result may be displayed on the first monitor 11 and the second monitor 29. Here, the microphone and the second monitor 29 may be separate, but may be integrated. The audio data processing device may be incorporated in the host computer 10.
[0073]
In this configuration, since voice input can be performed instead of manual input means operation, a command can be input without keeping the line of sight away from the object to be measured 5. Therefore, it is possible to concentrate on the measurement work, so that the measurement reliability and measurement capability are further improved.
[0074]
  In the present invention, for example,Prerequisite technologyAs shown in FIG. 4, the voice data synthesizer for synthesizing the voice data, and a loudspeaker that amplifies the voice data synthesized by the voice data synthesizer as voice or cue sound, for example, a speaker or an earphone, The voice data may be synthesized by a voice data synthesizer based on whether the measurement result is good or not (whether it falls within a specified tolerance), and the voice data may be amplified by a speaker or the like as voice or cue sound. Here, the speaker and the second monitor may be separate but may be integrated. The voice data synthesizer may be incorporated in the host computer 10.
  In this configuration, the command instructed in the measurement and the abnormal content of the measurement result can be confirmed by sound as a sound or a cue sound, so that an alarm indicating a measurement abnormality is not overlooked and work efficiency is improved.
[0075]
In addition to operating on a machine coordinate system, the present invention can also be implemented using an arbitrary coordinate system set on a coordinate measuring machine, for example, a coordinate system called a workpiece coordinate system or an object coordinate system. Furthermore, if it is a device that measures surface properties, it does not need to be a three-dimensional measuring machine. For example, a device that measures coordinates in a plane, a device that measures coordinates in a linear direction, or a shape measurement It may be a machine, a roundness measuring machine, etc., and is particularly effective when the apparatus is large.
[0076]
【The invention's effect】
  As mentioned above, according to this invention, the 2nd monitor which displays the content displayed on a 1st monitorButPlaced near the place where measurement work is performedIsThatAndThus, the measurement object and the display screen can be seen at the same time while performing the measurement work, so that the work efficiency of the measurement work can be improved.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of a surface texture measuring apparatus according to a first embodiment of the present invention.
FIG. 2 is a schematic configuration diagram of the surface texture measuring apparatus.
FIG. 3 is a side view of a Z-axis spindle.
FIG. 4 is a diagram showing a display unit of a second monitor.
FIG. 5 is a side view of a Z-axis spindle showing a surface texture measuring device according to a second embodiment of the present invention.
FIG. 6 is a front view of input means according to a third embodiment of the present invention.
FIG. 7Technology that is a prerequisite for explainingIt is explanatory drawing which shows the operator who mounts and operates the display apparatus concerning.
[Explanation of symbols]
      1 Surface texture measuring device
      2 Probe
      5 DUT
      8 Z-axis spindle
    11 First monitor
    29 Second monitor
    29A Display section
    30 connectors
    34 Numeric Keypad
    40 input means
    51 Operator
    56 Display device as second monitor
    58 Head mounting part as a mounting means

Claims (4)

Connected to a drive control device equipped with a controller that operates the probes provided on the X, Y, and Z axis drive mechanisms along the surface of the object to be measured, and is provided on a host computer that processes information necessary for measurement work. A surface texture measuring device for displaying information necessary for the measurement work on the first monitor,
A vertical axis of a Z-axis spindle to which the probe is attached in a spindle provided in each of the X, Y, and Z-axis drive mechanisms, which is attached to the probe and can be moved back and forth in the vertical direction, and movable in a plane perpendicular to the vertical direction. A second monitor that is detachably provided at a lower end in the direction and displays information displayed on the first monitor;
An input means of a touch panel provided on the display surface of the second monitor for inputting information necessary for measurement work;
Imaging means for imaging the tip of the probe together with an object to be measured and outputting the imaging result to the first monitor and the second monitor;
And a means for outputting warnings, warnings, signal sounds, and processing statuses by voice and notifying an operator of the surface texture measuring apparatus. In the surface texture measuring apparatus according to claim 1 ,
The surface texture measuring apparatus characterized in that the input means includes an origin recognition switch for recognizing the origin position of the probe and a measurement end notification switch for notifying the data processing apparatus of the end of measurement. In the surface texture measuring device according to claim 1 or 2 ,
A measurement data processing device for processing measurement data;
The second monitor is a surface texture measuring device which transmits and receives data to and from the measurement data processing device by wireless transmission. In the surface texture measuring device according to any one of claims 1 to 3 ,
A voice data synthesizer for synthesizing voice data;
A surface texture measuring apparatus comprising: a sounding means for sounding the sound data synthesized by the sound data synthesizing apparatus as a sound or a cue sound.

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