JP4650012B2 - Protective case mounted with electronic paper with input / output device and management system using the same - Google Patents

Description

  The present invention relates to a protective case used in a semiconductor manufacturing process and a photomask manufacturing process, particularly to a protective case on which electronic paper with an input / output device is mounted, and a system using the protective case.

  Currently, for example, in a semiconductor manufacturing process and a photomask manufacturing process, a protective case represented by SMIF-POD is used. The substrate for semiconductor manufacturing processes and photomasks is stored in a protective case, and in that state, temporarily stored in the process, or transported between processes, and taken out of the protective case for processing on the substrate, and then inside the processing apparatus. And after completion of processing of the device, it is stored in the original protective case. Therefore, the substrate in the process is handled by a method of visualizing the protective case. In general, an identification label or the like is attached to the protective case, and the label is confirmed with the label.

  Conventionally, in an automated production line, since the process is automated up to the final process, it is not always necessary to identify the process progress status in a state that is visible to the worker. Since it is not suitable for automation, an operator intervenes, and as a means of product identification or transportation to the next process and provision of product information, a paper medium with such information is pasted on the surface of the protective case, etc. Processing is in progress.

  In the manufacturing process, there is a problem of mass use of paper media. When it is necessary for the operator to manually transport or transport the protective case between processes, work such as pasting a paper medium on which the providing means such as product identification or provision of product information is applied to the surface of the protective case is necessary. Thus, the amount of paper medium consumed in the manufacturing process increases. In addition, since the paper medium is reused or incinerated after use, the processing cost for it increases.

  In the manufacturing process, there is a problem of an increase in dust generation sources. Originally, semiconductors, photomasks, pharmaceuticals, foodstuffs, etc. are manufactured in an ultra-clean clean room environment, and in the manufacturing process of products that do not like dust generation, paper media used as a source of dust generation are brought in. Increases the amount of airborne dust in the clean room atmosphere, resulting in product contamination or product failure.

  In the manufacturing process, there is a problem of occurrence of a protective case, that is, a management defect in product identification, for example, loss of a product. In the product management method based on product identification using paper media, the occurrence of an unidentifiable protective case or a protective case without paper media occurs due to contamination of the paper media or loss of the paper media, and the location of the product is unknown. There is a problem that causes accidents.

  In the manufacturing process, there is a problem that it takes a lot of man-hours and a lot of time to confirm the progress of the protective case and to inquire about its quality information. Since the identification means for product identification by paper media and the management system for progress and quality information related to products are independent and do not share the information, it is very important for the registration and inquiry of information related to products. Time is required, and there is a problem in the effective use of the information. These problems have been proposed (see Patent Document 1).

The known literature is described below.
JP 2003-216334 A

  The object of the present invention is to prevent the loss of the product and to prevent the loss of the product by integrating the management system such as the removal of the dust generation source by reducing the amount of the paper medium and the product identification, the progress of the product and the performance information inquiry of the quality information. It is to provide a management system that shortens the time for information registration and inquiry.

The invention according to claim 1 of the present invention is a protective case made and mounted on the upper surface or the outer surface of the protective casing a motor touch panel with an electronic paper, an IC tag, which is a control unit having an IC chip and an antenna, The information data is exchanged with the RF-ID · R / W (Reader / Writer) of the wireless communication base station via the antenna of the IC tag, and the character information input from the touch panel is exchanged with the antenna of the IC tag and the RF-ID. Transmitting to the wireless communication base station via R / W, the wireless communication base station transmitting to the data server, the data server transmitting output data information to the wireless communication base station, and the wireless base station Transmits the output data information to the IC tag via the RF-ID · R / W and an antenna of the IC tag, and the IC tag transmits the output data information. A protective case, characterized in that to the screen displayed on the electronic paper.

The invention according to claim 2 of the present invention is a management system for managing information of steps of a product and process for manufacturing a product, a management system using a protective case according to claim 1 Symbol placement, the radio response and an IC tag of the IC chip, with an external device, via said RF-ID · R / W, information on which is stored in the protective case products radio communication base station was replaced, the radio base station By exchanging information with a data server, the information is displayed on an electronic paper mounted in a protective case, and the product is managed.

  According to the protective case of the first aspect of the present invention, it is possible to identify the product contained in the case or to inquire about the product information by displaying the electronic paper. Integrated with an information management system, the display information of electronic paper can be rewritten by an input / output device, and functions equivalent to or better than those of conventional paper media can be provided. By replacing with paper, the paper medium is not brought into the clean room, and the environmental load due to mass use can be reduced.

  Furthermore, according to the protective case of the present invention, by mounting the touch panel mechanism on the electronic paper, it is possible to register product information, or write information such as information provision or transmission information and its source, etc. Can provide the same or better writing function, simplify the registration of product information, greatly reduce the work load of workers, simplify the information query for product identification, and locate the product It becomes clear and there are no accidents where the location of the protective case is unknown.

  According to the protective case of the invention of claim 2 of the present invention, by adding a wireless communication function to the electronic paper with an input / output device, between the electronic paper of the protective case and the related device or an external system, Since product information can be exchanged quickly and constantly, updating of information on the electronic paper is simplified, and the latest information is output on the electronic paper and shared with the worker.

  According to the protective case with electronic paper and the system using the same according to claim 3 of the present invention, when the electronic paper and the system are integrated, related information provided from the device or external system and transmission to the related department Since the information can be referred to on the electronic paper, the current processing step and the information can be referred online from the terminal of another apparatus. Furthermore, problems such as defective products and missing product locations can be solved, and the work load on workers can be greatly reduced.

  A protective case in which electronic paper with an input / output device according to the present invention is mounted and a management system using the protective case will be described below based on an embodiment.

  1A and 1B are a side cross-sectional view of an electronic paper with an input / output device mounted on a protective case according to the present invention and a conceptual diagram illustrating the output device. a is an overall view of the output device, and b is a partially enlarged view thereof.

  In FIG. 1 a, an electronic paper unit 10 with an input / output device is mounted on a main body frame 7 of a protective case. An electronic paper unit 10 with an input / output device includes a matrix switch sheet 16, a TFT protective substrate (hereinafter referred to as a TFT electrode) 15, an electronic paper layer 14, and an electronic paper protective substrate (hereinafter referred to as a transparent electrode) 13 from the lower side of the drawing. And a touch panel sensor layer 12, a touch panel protective film layer 11, and a composite member laminated in that order. An electronic paper unit 10 with an input / output device is provided on the main body frame 7 of the protective case via an adhesive layer 6.

  The touch panel sensor layer 12 and the matrix switch sheet 16 have a function of providing an input function for contacting the touch panel sensor layer 12 and inputting information, and the transparent electrode 13, the electronic paper layer 14, and the TFT electrode 15 are output. It has a function of providing a function, and is connected to a control unit 8 that controls the input / output function.

  The control unit 8 is connected to a power source 9 such as a battery in order to obtain power necessary for operating it. Moreover, the antenna 110 is also connected as means for communicating with the outside.

  Next, the input / output function of the electronic paper system with an input / output device will be described. First, information is input from the touch panel sensor layer 12. There are two types of input methods. One input method is a method of outputting image information output from a database or the like on a screen of electronic paper and contacting the output screen of the image information, for example, a method of using the surface of the touch panel sensor layer 12 by contact input. It is. The second input method is a method of inputting the contact line as information to the surface of the touch panel sensor layer 12 by continuously inputting a predetermined input device, for example, an input pen, etc. System. The pattern diagram of the input image can be output to electronic paper with an input / output device.

  Next, as a bonding method of laminating each layer, there are a method of fixing with an adhesive and a method of providing a bonding point with an adjacent layer for each layer and fitting or fixing the bonding points to each other. In the method of fixing with an adhesive, it is necessary to use an organic adhesive, but it is possible to make the shape and size of the electronic paper layer 14 smaller than other layers. In the fitting method, the shape and size of the electronic paper layer 14 cannot be made smaller than those of other layers, but can be fixed without using an adhesive, and the layer can be easily replaced at the time of failure.

  Next, FIG. 1 b is a partially enlarged view of the electronic paper unit with an input / output device, and the electronic paper unit will be mainly described. The electronic paper unit 10 of the present invention inputs image information output from an external database or the like onto the screen of the electronic paper, and optionally makes contact with the surface using an input pen or the like to input character information. Or means for outputting the inputted character information on the screen of the electronic paper. The input / output means of the input pen and the image information output means will be described.

First, input / output means of the input pen will be described. The input / output means includes a transparent touch panel sensor sheet 12, a matrix switch sheet 16, and a control unit 8 connected between both sheets. The touch panel sensor sheet 12 outputs a signal for specifying the contact position to the control unit 8 when the input pen 3 as a writing means contacts the surface. The input pen 3 that can be used differs depending on the position specifying method of the touch panel sensor sheet 12, but any input pen 3 corresponding to the method may be used.

  The matrix switch sheet 16 facing the touch panel sensor sheet 12 includes a matrix of element switches like the TFT electrode 15 of the electronic paper layer 14, and the control of the element switches is based on a control signal from the control unit 8. Do it. The control signal is output according to the contact position specifying signal input from the touch panel sensor sheet 12. Accordingly, the control unit 8 applies a voltage between the touch panel sensor sheet 12 and the matrix switch sheet 16. The touch panel sensor sheet 12 and the matrix switch sheet 16 are usually configured so that the same potential can be maintained. Normally, the electronic paper layer 14 is kept in a stopped state.

  In the electronic paper section 10 of the present invention shown in FIG. 1, the matrix switch sheet 16 is incorporated. However, even if the matrix switch sheet 16 is changed to the TFT electrode 15, that is, the matrix switch sheet 16 is deleted, the same function as described above. Can be held. In this case, the control unit 8 applies a voltage between the touch panel sensor sheet 12 and the TFT electrode 15.

  Below, the procedure which records a handwritten character on the electronic paper layer 14 using the input pen 3 is demonstrated. When the touch panel sensor sheet 12 side has a negative potential with respect to the opposing matrix switch sheet 16, the black color of the electronic ink appears on the touch panel sensor sheet 12 side, that is, the front side. The initial state is set to the initial state, that is, the matrix switch sheet 16 side has a negative potential, and the direction of the electronic ink is aligned. Next, a character is written on the surface of the touch panel sensor sheet 12 with the input pen 3. The touch panel sensor sheet 12 detects a position where the input pen 3 is in contact, and outputs a position specifying signal for specifying the position to the control unit 8. The control unit 8 outputs a signal for controlling the element switch of the matrix switch sheet 16 based on the input position specifying signal. A positive voltage is applied to the matrix switch sheet 16 side by the element switch so that an electric field at a location corresponding to the contact position is directed from the matrix switch sheet 16 side to the touch panel sensor sheet 12 side. Accordingly, the electronic ink at the position corresponding to the contact position of the input pen 3 becomes black, and handwritten characters can be displayed.

  Next, image information output means will be described. The data output device of the electronic paper unit 10 from an image, chart, character information management system, or the like will be described. In the electronic paper unit 10 of FIG. 1b, the transparent electrode 13, the electronic paper layer 14, and the TFT electrode 15 have a function of providing an output function, and the touch panel sensor layer 12 is not involved in the output function. A connection terminal for connecting to the control unit 8, for example, an information output unit 5 is provided. The data output device can be used as a display screen for displaying data such as an external database if the electronic paper layer 14 is sandwiched between the transparent electrode 13 and the TFT electrode 15 and connected to an external database or the like via the control unit 8. it can. If the control unit 8 controls on / off of the element switch of the TFT electrode 15 according to data such as an external database, a charge pattern corresponding to the ON / OFF is formed on the TFT electrode 15. Data is displayed on the electronic paper layer 14 based on the charge pattern.

The TFT electrode 15 of the electronic paper layer 14 includes a matrix of element switches, and the element switches are controlled based on a control signal from the control unit 8. The control signal is output in response to an on / off signal input from the external database or the like via the control unit 8. Therefore, the control unit 8 applies a voltage between the transparent electrode 13 and the TFT electrode 15. The electronic paper layer 14 and the TFT electrode 15 are usually structured so that the same potential can be maintained. Normally, the electronic paper layer 14 is kept in a stopped state.

  Hereinafter, a procedure for displaying output data information on the electronic paper layer 14 using an external database or the like will be described. When the transparent electrode 13 side has a negative potential with respect to the opposing TFT electrode 15, the black color of the electronic ink appears on the transparent electrode 13 side, that is, the front side. The initial state is set to the initial state, that is, the TFT electrode 15 side has a negative potential, and the direction of the electronic ink is aligned. Next, data to be displayed is taken into the control unit 8 from an external database or the like. That is, a signal position for controlling on / off of the element switch of the TFT electrode 15 is detected according to the data, and a position specifying signal for specifying the data position is output to the control unit 8. The control unit 8 outputs a signal for controlling the element switch of the TFT electrode 15 based on the position specifying signal of the input data. A positive voltage is applied to the TFT electrode 15 side by the element switch so that an electric field at a location corresponding to the data position is directed from the TFT electrode 15 side to the transparent electrode 13 side. Accordingly, the electronic ink at a position corresponding to the data position becomes black, and data such as an image, a chart, or a character can be displayed.

  An electronic paper unit 10 according to the present invention shown in FIGS. 1A and 1B is an input / output device including an image information output unit and an input / output unit of an input pen, and the shape thereof is paper or sheet. Is a protective case in which an electronic paper with an input / output device is mounted, which combines the three functions of a label, an instruction form, and a display screen.

  The touch panel sensor sheet 12 of the input / output device is a system in which pressure is applied to the touch panel sensor sheet 12 in a resistance type position detection such as a 4-wire system, a 5-wire system, a 7-wire system, or an 8-wire system. Or in the infrared detection system using a light emitting diode or a phototransistor, it is a system which blocks the light of touch panel sensor sheet 12. Alternatively, the analog capacitive coupling method is a method of detecting a contact position when a current flows from the contact point. In addition, there are a retroreflective method, an ultrasonic surface acoustic wave (SAW) method, a real touch method, or an electronic transfer tider method. The touch panel sensor sheet 12 of the present invention is free to be any type of touch panel. The input pen 3 will be described. In the case of resistance type position detection, an input pen 3 that can be pressurized is used. In the case of position detection using a method of blocking light, an input pen 3 that does not transmit light is used. In the case of capacitive coupling type position detection, the input pen 3 uses a conductor.

  FIG. 2 is a top view showing an embodiment of the electronic paper with an input / output device in a protective case in which the electronic paper with the input / output device of the present invention is mounted. The electronic paper 22 with a touch panel is equipped with a control unit 21. The control unit 21 includes an antenna, an IC chip, and a circuit device incorporating a power source. Information can be input to the surface of the electronic paper 22 with a touch panel with an input pen. The control unit 21 can input / output an external network and its information by non-contact or contact, and can display a data screen on the electronic paper 22 with a touch panel when necessary.

  FIG. 3 is a display screen showing an example of data display of electronic paper in a protective case in which the electronic paper with an input / output device of the present invention is mounted. On the screen, there are displayed a management menu, selection items, etc. with products and management numbers of g Electronics Industry.

FIG. 4 is a display screen for explaining an example of a method of inputting data or information from the touch panel to the electronic paper with an input / output device of the present invention. Is a method of use in which a touch panel is brought into contact and the position is displayed as a pattern or an image. In FIG. 4a, the input pen 3 is brought into contact with the vicinity of the progress introduction from the screen to switch to the progress introduction screen of the management number 000123 of g Electronics. 4b shows that the input pen 3 is brought into contact with the alphanumeric characters in the management menu from the screen, and the management number of the electronic industry,
Character information is directly input to the screen of 000123. The character information includes a message from the worker in the process to a worker in the next process, a work precaution, and the like. FIG. 4c is an input screen of the g-electronic industry management number 000123 displayed on the screen, the management menu is a completion report, all processes are completed, no abnormal items occur, and the final confirmer Touched the input pen 3, and a signature, for example, toppan, was written. 4A to 4C, display data is taken out from the memory unit inside the control unit 21 and displayed on the electronic paper 22. When the operator touches and selects a key on the display screen via the touch panel, information corresponding to the selected key is acquired from the control unit 21. If necessary, necessary data is acquired from an external database or the like via a circuit device such as an antenna, and the data is displayed. In addition, the operator can write information on the touch panel using the input pen 3, and a schematic pattern, an electronic signature, and the like can be displayed on the screen.

  FIG. 5 is an explanatory diagram of an embodiment of a protection case management system in which the electronic paper with an input / output device of the present invention is mounted. In each process in the manufacturing process, the protective case 51 containing the manufacturing substrate is conveyed in the process order. The protective case 51 is monitored and managed by a management system. As shown in FIG. 5, the protective case 51 is equipped with the electronic paper with an input / output device and the IC tag 55 of the present invention. On the other hand, a radio communication base station having an RF-ID (Radio Frequency IDentification) R / W (Reader / Writer) at a position where the external network 54 and the IC tag 55 of the protective case 51 can be monitored centering on the data server 53. 52 was arranged and networked by the management system. The IC tag 55 and the RF-ID · R / W 56 are a management system with the protective case 51 with the IC tag 55 and the RF-ID · R / W 56. The IC tag 55 is a control unit including a circuit device incorporating an IC chip, an antenna, a battery, and the like. The RF-IDR / W 56 can transmit and receive data by wireless communication between the two, and has a function of reading or writing data to the IC chip. Data transmitted by the protective case 51 is received by the radio communication base station 52 via the antenna of the IC tag 55 and the RF-ID • R / W 56. The received data is sent to the data server 53 of the management system, recorded or processed, and displayed on a predetermined electronic paper as output data information. In the reverse direction, the product can be verified from the data server 53. By installing a plurality of wireless communication base stations in the management system area and transmitting the verified wireless communication base stations to the data server 53, the current position of the corresponding protective case 51 can be grasped, and the product is lost. Can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side sectional view of an electronic paper with an input / output device mounted on a protective case of the present invention and a conceptual diagram for explaining the output device, where a is an overall view of the output device, and b is an enlarged view of the electronic paper portion. It is a sectional side view. It is a top view which shows one Example of the electronic paper with an input / output device in the protective case which mounted the electronic paper with an input / output device of this invention. It is a display screen figure which shows an example of the data display of electronic paper in the protective case which mounted the electronic paper with an input / output device of this invention. It is a display screen explaining one example of the method of inputting from the touch panel to the electronic paper with an input / output device of the present invention, where ab is a method used as a keyboard, and c is a contact method used for displaying as an image. It is. It is explanatory drawing of one Example of the management system of the protective case which mounted the electronic paper with an input / output device of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 3 ... Input pen 4 ... Information input part 5 ... Information output part 6 ... Adhesive layer 7 ... Protective case surface 8 ... Control unit 9 ... Power supply (power supply unit)
DESCRIPTION OF SYMBOLS 10 ... Electronic paper part with input / output 11 ... Touch panel protective film 12 ... Touch panel sensor sheet 13 ... Transparent electrode (electronic paper protective substrate: glass)
14 ... Electronic paper layer (electronic paper ink layer)
15 ... TFT electrode (TFT protection substrate: glass)
16 ... Matrix switch sheet 21 ... Control unit 22 ... Electronic paper with touch panel 23 ... Protective case 51 ... Protective case with wireless communication function 52 ... Wireless communication base station 53 ... Data server 54 ... External network 55 ... IC tag 56 ... RF-ID・ R / w
110 ... antenna

Claims (2)

A top or a protective case made and mounted on the outer surface of the protective casing a motor touch panel with electronic paper,
An IC tag that is a control unit having an IC chip and an antenna,
The information data is exchanged with the RF-ID · R / W (Reader / Writer) of the wireless communication base station via the antenna of the IC tag, and the character information input from the touch panel is exchanged with the antenna of the IC tag and the RF-ID. Transmitting to the wireless communication base station via R / W, the wireless communication base station transmitting to the data server, the data server transmitting output data information to the wireless communication base station, and the wireless base station Transmits the output data information to the IC tag via the RF-ID · R / W and an antenna of the IC tag, and the IC tag displays the output data information on the electronic paper on the screen. Protective case. In the management system for managing information of a product and process of the process of manufacturing the product, a management system using a protective case according to claim 1 Symbol mounting, the IC tag of the wireless transponder IC chip, an external device between, via the RF-ID · R / W, information on which is stored in the protective case products replace radio communication base station, the radio base station by exchanging data server and information, A management system that displays the information on an electronic paper mounted in a protective case and manages the product.

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