JP4635617B2 - Cutting apparatus, control method therefor, and silicon single crystal cutting method - Google Patents

Description

  The present invention relates to a cutting apparatus for cutting an object such as a silicon single crystal, a control method therefor, and a method for cutting a silicon single crystal.

A silicon single crystal or the like (target object) manufactured by pulling a single crystal by the CZ method (Czochralski method) has a length of about several tens of centimeters to several meters, so that it is easy to handle. The block-shaped silicon single crystal is cut into a wafer shape in a subsequent process. In order to cut an object in a block shape, for example, a cutting device is used in which an endless belt-shaped blade having a diamond fine powder electrodeposited thereon is wound around the outer peripheral surfaces of a pair of pulleys. In this cutting apparatus, the pulley is rotated by a motor to rotate the blade, and the rotating blade is pressed against the object to cut the object. For details of the conventional cutting apparatus, see, for example, Patent Document 1 below.
JP 2002-273724 A

  By the way, when the object is cut by the above-described conventional cutting apparatus, there is a specific direction that is easily cut due to the crystal arrangement of the object. When the blade is new, the object can be cut almost linearly regardless of this direction, so that the cut surface of the object is substantially flat. However, if the blade wears out while repeating the cutting of the object, the resistance between the object and the object increases, and the cutting tends to proceed along a specific direction of the object. Will arise. It should be noted that the blade swing direction is a direction that intersects the blade rotation direction at the location where the blade contacts the object.

  If the blade runout becomes too large, the cut end surface accuracy of the cut block will deteriorate and the blade may be damaged. Therefore, when the blade runout exceeds a predetermined control value (for example, 100 μm) Is controlled to stop the cutting device when the cutting is completed. In order to resume the operation of the stopped cutting device, it is necessary to give instructions for restarting the operation along with adjustment work (including blade replacement work) to suppress the shake by the operator. When the cutting device stops, the cutting device remains stopped until the operator comes to work the next day, resulting in a problem that work efficiency is extremely reduced. Further, if the frequency of replacement of blades or the like is increased as an adjustment operation, the cost is increased accordingly.

  The present invention has been made in view of the above circumstances, and cutting that can reduce the stop time of the apparatus and reduce the frequency of adjustment work by an operator by suppressing the vibration of the blade at the time of cutting the object. An object of the present invention is to provide an apparatus, a control method therefor, and a silicon single crystal cutting method.

In order to solve the above problems, a cutting device according to the present invention includes an endless belt-like blade (15) wound around a pair of pulleys (14a, 14b) that are spaced apart from each other, and is rotated by the rotating blade. In the cutting device (10) for cutting the object (IN), the detection device (25) for detecting the vibration of the blade, the water and air are individually blown to the blade (24), And a control device (26) for controlling the predetermined fluid sprayed from the spraying portion to the blade based on the detection result of the detection device.
Further, in the cutting device of the present invention, the detection device is disposed on the first end side of the blade contacting the object, and the spraying portion is a first side opposite to the first end portion. It is characterized by being arranged on the two end side.
Further, the position where the spraying part blows the water is set at the center in the width direction of the blade, and the position where the spraying part blows the air is set at the upper end side of the blade. It is said.
In the cutting device according to the present invention, at least one pair of the blowing parts is provided between the pulley and the contact portion where the blade contacts the object, with the blade interposed therebetween. .
In the cutting device according to the present invention, the control device may be configured such that, among the at least one pair of the spraying portions, the blade is disposed from a spraying portion disposed in a direction opposite to a swinging direction of the blade detected by the detection device. The air is controlled to be blown.
Further, the cutting device according to the present invention is disposed at a substantially intermediate position between the first end side and the second end side of the blade, and sprays water at a constant water pressure onto the blade to cut the blade edge of the blade. The water spraying part (23) which stabilizes the direction of is provided.
In the cutting device according to the present invention, the detection device is a non-contact displacement sensor that detects a shake of the blade without contact with the blade.
In order to solve the above-mentioned problem, the cutting device control method of the present invention comprises an endless belt-like blade (15) wound around a pair of pulleys (14a, 14b) arranged apart from each other, and rotates. In the control method of the cutting device (10) for cutting the object (IN) by the blade, based on the detection step (S12) for detecting the shake of the blade , and the result of detection of the shake detection step in which water is constantly blown. And a control step (S13 to S24) for controlling the fluid of air blown onto the blade.
Further, in the control method for a cutting device according to the present invention, the control step performs control to spray the predetermined fluid onto the blade from a direction opposite to the vibration direction of the blade detected in the detection step. It is said.
In order to solve the above-mentioned problem, a silicon single crystal cutting method of the present invention is a silicon single crystal cutting method in which a silicon single crystal (IN) is cut by an endless blade (15), and water is constantly sprayed. The silicon single crystal is cut while controlling the air blown to the blade in accordance with the detection result of the vibration of the blade.

The present invention has been made for the purpose of shortening the stoppage time of the apparatus by reducing the vibration of the blade at the time of cutting the object and reducing the frequency of adjustment work by the operator. For this purpose, the present invention includes an endless belt-shaped blade wound around a pair of pulleys arranged apart from each other, and detects a vibration of the blade in a cutting device that cuts an object with the rotating blade. And a control unit that controls the predetermined fluid sprayed from the spraying unit to the blade based on a detection result of the detection device. Yes.
According to this invention, the vibration of the blade is detected by the detection device, and the predetermined fluid sprayed from the spraying portion to the blade is controlled based on the detection result. As a result, the amount of fluid sprayed onto the blade changes according to the vibration of the blade, so that the vibration of the blade can be suppressed. When the vibration of the blade is suppressed, the control value is less likely to be exceeded, and the opportunity for the cutting device to stop is reduced, thereby shortening the stop time of the device. In addition, when the blade swing is reduced, the blade wear is reduced and the frequency of adjustment work such as replacement of the blade is also reduced. As a result, an increase in cost can be suppressed.
Here, at the time of cutting, the cutting edge of the blade is engaged with the object, so that it is difficult to eliminate the vibration even if the fluid is sprayed on the meshed portion. For this reason, in the present invention, the detection device is disposed on a first end side of the blade that contacts the object, and the spraying portion is a second end opposite to the first end portion. It is characterized by being arranged on the part side.
According to the present invention, the vibration of the blade is detected by the detection device disposed on the first end side that contacts the object of the blade, and the spraying disposed on the second end side opposite to the first end portion. The predetermined fluid is sprayed to the second end portion side of the blade by the portion. By locating the detection device on the first end side in contact with the object, it is possible to accurately detect the vibration of the blade edge of the blade, and a spraying unit for spraying a predetermined fluid is disposed on the second end side of the blade. Accordingly, it is possible to easily suppress the vibration of the blade as compared with the case where the fluid is sprayed to the blade edge side (first end portion side) of the blade meshing with the object.
Blade runout occurs in either the direction of cutting more objects or the direction of cutting less objects. For this reason, the present invention is characterized in that at least one pair of the blowing portions is provided between the pulley and the contact portion where the blade contacts the object, with the blade interposed therebetween. Thereby, even if it is a case where a braid | blade shakes in which direction, the shake can be suppressed.
Here, according to the present invention, the control device is configured such that, among the at least one pair of the spray units, the spray unit disposed in a direction opposite to the blade swing direction detected by the detection device is applied to the blade. And controlling to spray the predetermined fluid.
According to this invention, a predetermined fluid is sprayed from the spraying part arrange | positioned in the direction opposite to the shake direction of a braid | blade. That is, the predetermined fluid is sprayed on the second end side of the blade in the same direction as the vibration direction of the blade. As a result, a force in the direction of vibration acts on the second end portion side of the blade, the blade tilts, and the cutting edge of the blade advances in the direction toward the direction of reducing the vibration. As a result, the blade can be disposed at the original position, and the vibration of the blade can be reduced.
Further, the present invention is arranged at a substantially intermediate position between the first end portion side and the second end portion side of the blade, and sprays water of a constant water pressure onto the blade so that the blade edge of the blade is oriented. It is desirable to provide a water spraying part for stabilization. Since the blade is supported by the water sprayed onto the blade, the direction of the blade edge can be stabilized.
Here, it is preferable that the detection device is a non-contact displacement sensor that detects a shake of the blade without contact with the blade.
The predetermined fluid is preferably one of air and water.
The cutting device control method of the present invention is a cutting device control method comprising an endless belt-shaped blade wound around a pair of pulleys arranged apart from each other, and cutting the object with the rotating blade. It is characterized by having a detection step for detecting the shake of the blade and a control step for controlling the predetermined fluid sprayed to the blade based on the detection result of the shake detection step.
According to the present invention, the vibration of the blade is detected, and the predetermined fluid sprayed onto the blade is controlled based on the detection result. As a result, the amount of fluid sprayed onto the blade changes according to the vibration of the blade, so that the vibration of the blade can be suppressed. When the vibration of the blade is suppressed, the control value is less likely to be exceeded, and the opportunity for the cutting device to stop is reduced, so that the stop time of the device can be shortened. In addition, when the blade swing is reduced, the blade wear is reduced and the frequency of adjustment work such as replacement of the blade is also reduced. As a result, an increase in cost can be suppressed.
Here, it is preferable that the control step performs a control of spraying the predetermined fluid to the blade from a direction opposite to the direction of the blade vibration detected in the detection step.
The silicon single crystal cutting method of the present invention is a silicon single crystal cutting method in which a silicon single crystal is cut by an endless belt-like blade, and a predetermined fluid sprayed on the blade is controlled according to a detection result of the vibration of the blade. The silicon single crystal is cut while performing.
According to the present invention, the object is cut in a state where the direction of the blade edge is sufficiently stabilized.

According to the present invention, there is an effect that it is possible to suppress the vibration of the blade when the object is cut. Thereby, there is an effect that the stop time of the apparatus can be shortened and the frequency of the adjustment work by the operator can be reduced.
In addition, according to the present invention, since the object is cut in a state where the direction of the blade edge is sufficiently stabilized, the cutting end surface accuracy of the object can be improved.

  Hereinafter, a cutting apparatus, a control method thereof, and a silicon single crystal cutting method according to an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing a schematic configuration of a cutting device according to an embodiment of the present invention. In the following description, if necessary, an XYZ orthogonal coordinate system is set in the drawing, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. In the XYZ orthogonal coordinate system shown in FIG. 1, the XY plane is set to a plane parallel to the horizontal plane, and the Z axis is set to the vertically upward direction.

  As shown in FIG. 1, the cutting apparatus 10 of the present embodiment is a pedestal 11 on which an ingot IN made of a substantially cylindrical silicon single crystal as an object is placed with its axis parallel to the Y axis and horizontal. And a lifting platform 12 configured to be movable up and down on the upper side (+ Z direction) of the pedestal 11. The lifting platform 12 is spaced apart from each other so as to be located on both sides (± X direction) across the axis of the ingot IN on the pedestal 11 and in the vertical direction (Z direction) intersecting the axis of the ingot IN. A pair of main shaft portions 13a and 13b configured to be rotatable around the shaft is provided.

  A pulley 14a is provided at the lower end of the main shaft portion 13a so as to be coaxial with the main shaft portion 13a and configured to be rotatable integrally with the main shaft portion 13a. A pulley 14b is provided at the lower end of the main shaft portion 13b. The pulley 14b is coaxial with the main shaft portion 13b and is configured to be rotatable integrally with the main shaft portion 13b. Although not shown in the drawing, slipper members made of rubber or the like are provided on the outer peripheral surfaces of the pulleys 14a and 14b, and the pulleys 14a and 14b are disposed on the outer peripheral surfaces of the slip members. A plurality of grooves extending in the circumferential direction are formed.

  An endless belt-like blade 15 having a cutting edge formed on the lower edge is wound around the outer peripheral surfaces of the pair of pulleys 14a and 14b, and is rotatable with the rotation of the pulleys 14a and 14b. The blade 15 has a structure in which fine diamond powder is electrodeposited on the surface of an endless base metal. Here, the pair of pulleys 14a and 14b are in a state where the outer peripheral surfaces are exposed on the side facing the other pulleys 14b and 14a, respectively.

  The lifting platform 12 includes a drive motor 16 in a state where the drive shaft portion is substantially vertical. An endless V-belt 17 is wound around the drive shaft portion of the drive motor 16 and the above-described main shaft portion 13a, whereby the rotation of the drive shaft portion is transmitted to the main shaft portion 13a via the V-belt 17. The pulley 14a attached to the main shaft portion 13a is rotationally driven. In the configuration shown in FIG. 1, the main shaft portion 13a rotated by the drive motor 16 is on the drive side, and the other main shaft portion 13b is on the driven side. The drive motor 16, the V belt 17, and the main shaft portion 13a constitute a drive mechanism that rotationally drives the pulley 14a. It is assumed that the blade 15 is rotated in the direction of the arrow indicated by the symbol d in FIG. 1 by the rotational drive of the pulley 14a.

  Further, the lifting platform 12 includes a pair of pressure control units 18a and 18b that guide the blade 15 at both ends of a range located between the pair of pulleys 14a and 14b and suppress the blade 15 from shaking within the range. . The cutting device 10 cuts the ingot IN within a range located between the pair of pressure suppression units 18a and 18b. Further, the lifting platform 12 includes cutting water supply mechanisms 19a and 19b for supplying cutting water to the blade 15 between the pressure control units 18a and 18b. In addition, the lifting platform 12 has a U-shaped cross section in a position facing the ingot IN on the pedestal 11 in parallel with the ingot IN on the pedestal 11 to avoid interference with the ingot IN when the ingot IN is cut. The groove 20 is formed.

  The cutting device 10 is desirably provided with a pulley cleaning mechanism for cleaning the outer peripheral surfaces of the pulleys 14a and 14b. As this pulley cleaning mechanism, for example, a spray mechanism that sprays cleaning liquid onto the exposed outer peripheral surfaces of the pulleys 14a and 14b can be used. For example, the spray mechanism is moved up and down with a cleaning liquid supply source (not shown) and one end connected to the cleaning liquid supply source and the other end opposed to the exposed outer peripheral surface of the pulleys 14a and 14b. A cleaning liquid supply pipe (not shown) attached to the base 12 and a cleaning liquid injection nozzle (not shown) provided at the end of the cleaning liquid supply pipe on the pulley 14 side with the tips facing the pulleys 14a and 14b. Has been.

  FIG. 2 is a diagram illustrating a main configuration of the cutting device 10. In FIG. 2, the pulleys 14a and 14b, the blade 15, the pressure control units 18a and 18b, etc. of the cutting device 10 are shown in a plan view, and the members corresponding to those shown in FIG. Is attached. Moreover, in FIG. 2, the control system of the cutting device 10 is illustrated as a block diagram. As shown in FIG. 2, the pressure control unit 18a is disposed between a contact portion where the blade 15 contacts the ingot IN and the pulley 14a, and the pressure control unit 18b is disposed between the contact portion and the pulley 14b. Has been. The pressure control unit 18 a includes a pair of pressure suppression plates 21 a and 22 a that sandwich the blade 15, and the pressure control unit 18 b includes a pair of pressure suppression plates 21 b and 22 b that sandwich the blade 15. These pressure suppression plates 21a, 21b, 22a, and 22b are made of, for example, carbon, have a width of about 100 mm, a height of about 75 mm, and a thickness of about 15 mm. In addition, the space | interval between the pressure suppression plates 21a, 21b, 22a, 22b and the braid | blade 15 is about several dozen micrometer.

  In each of the pressure control plates 21a, 21b, 22a, and 22b, a water discharge port 23 for blowing a high-pressure water flow to the blade 15 and an air discharge port 24 for blowing air as a predetermined fluid to the blade 15. Are formed respectively. The air discharge port 24 is formed at a position closer to the ingot IN than the water discharge port 23. Here, the reason why the high-pressure water flow is blown from each of the water discharge ports 23 to the blade 15 is to stabilize the direction of the cutting edge 15 a (see FIG. 3) formed on the lower edge of the blade 15. The reason why air is blown from each of the air discharge ports 24 to the blade 15 is to suppress the vibration of the blade 15 when the ingot IN is cut.

  Although details will be described later, during the cutting of the ingot IN, the high-pressure water flow is constantly blown to the blade 15 from all of the water discharge ports 23 formed in each of the pressure control plates 21a, 21b, 22a, and 22b. The blade 15 is blown to the blade 15 from one or more of the air discharge ports 24 formed in the pressure suppression plates 21a, 21b, 22a, 22b according to the vibration of the blade 15 only when the blade 15 is shaken.

  In addition, a displacement sensor 25 that detects a shake of the blade 15 (a shake in the Y direction that intersects the rotation direction of the blade 15) is attached to the pressure suppression plate 22b. As the displacement sensor 25, it is desirable to use a non-contact displacement sensor that detects the vibration of the blade 15 in a non-contact manner. FIG. 3 is a diagram showing a positional relationship between the water discharge port 23, the air discharge port 24, and the displacement sensor 25 in the pressure suppression plate 22b. In addition, the number of the water discharge ports 23 should just be one or more, and in FIG. 3, the structure in which the three water discharge ports 23 are formed is illustrated as an example.

  As shown in FIG. 3, the water discharge port 23 is formed at a position where the water discharge port 23 is arranged at the center in the width direction (Z direction) of the blade 15. The width of the blade 15 is about 60 mm. The air discharge port 24 is formed at a position closer to the ingot IN than the water discharge port 23 and located on the upper end (second end) side of the blade 15. The displacement sensor 25 is formed at a position below the air discharge port 24 (−Z direction) and on the end (first end) side where the cutting edge 15a of the blade 15 is formed. ing.

  With the above configuration, water from the water discharge port 23 is blown to the central portion in the width direction of the blade 15, and air from the air discharge portion 24 is blown to the upper end of the blade 15. Here, the reason why the displacement sensor 25 is arranged on the end side where the cutting edge 15a is formed is to detect the displacement amount of the cutting edge 15a that actually cuts the ingot IN more accurately. Further, the air discharge port 24 is arranged on the upper end side of the blade 15 because the cutting blade 15a is engaged with the ingot IN when the ingot IN is cut, so even if air is blown to the end portion side where the cutting blade 15a is formed. This is because the vibration of the blade 15 cannot be suppressed.

  Since the high-pressure water flow from the water discharge port 23 shown in FIG. 3 is blown to the center portion in the width direction of the blade 15, by blowing air from the air discharge port 24, the center portion in the width direction of the blade 15 is a fulcrum, The air blowing position can be used as a power point. Thus, the end side where the cutting edge 15a is formed according to the principle of leverage can be used as an action point, and as a result, the vibration of the blade 15 is suppressed.

  The pressure suppression plate 21b has the same configuration as the pressure suppression plate 22b shown in FIG. 3 except that the displacement sensor 25 is not attached. The pressure control plates 21b and 22b are disposed such that the water discharge ports 23 formed in each of the pressure control plates 21b and 22b and the air discharge ports 24 formed in each of the pressure control plates 21b and 22b face each other with the blade 15 interposed therebetween. The pressure suppression plates 21a and 22b are symmetrical with the pressure suppression plate 21b with respect to the YZ plane. The pressure control plates 21 a and 22 a are also arranged so that the water discharge ports 23 formed in each of them and the air discharge ports 24 formed in each of them face each other with the blade 15 interposed therebetween.

  Returning to FIG. 2, the control system of the cutting apparatus 10 includes a control device 26, a high-pressure water flow supply device 27, and an air supply device 28. Based on the detection result of the displacement sensor 25, the control device 26 controls the pressure, amount, and timing of the air blown to the blade 15 from each of the air discharge ports 24 formed in the pressure suppression plates 21a, 21b, 22a, 22b. A control signal is output to the air supply device 28. In addition, a control signal for controlling the pressure and amount of the high pressure water flow blown to the blade 15 from the water discharge port 23 formed in the pressure control plates 21a, 21b, 22a, 22b is output to the high pressure water flow supply device 27.

  Based on the control signal from the control device 26, the air supply device 28 supplies air to each of the air flow paths 29a to 29d connected to the air discharge ports 24 formed in the pressure suppression plates 21a, 21b, 22a, 22b. Supply. Further, the high pressure water flow supply device 27 is a flow connected to the water discharge ports 23 formed in the pressure control plates 21a, 21b, 22a, 22b, respectively, with a high pressure water flow of the pressure and amount indicated by the control signal from the control device 26. Supply to each of the paths 30a to 30d.

  Next, the operation at the time of cutting the ingot IN will be described. FIG. 4 is a flowchart showing a control method of the cutting device according to an embodiment of the present invention. When a cutting start instruction is given by the operator, the processing shown in FIG. 4 is started. When the processing is started, the pulleys 14a and 14b are driven to rotate the blade 15, and a high-pressure water flow is blown to the blade 15 from the water discharge ports 23 formed in the pressure control plates 21a, 21b, 22a, and 22b. However, an initial non-control time is provided after the start of processing, and air blowing control is not performed during a certain time after the start of processing regardless of the detection result of the displacement sensor 25 (step S1).

  When the initial non-control time has elapsed, the detection result of the displacement sensor 25 is taken into the control device 26. Here, four types of threshold values are provided for the swing width of the blade 15. Two types of thresholds TP1 and TP2 for + Y direction shake, and TN1 and TN2 for -Y direction shake. These threshold values have a relationship of TN2 <TN1 <TP1 <TP2. When the detection result of the displacement sensor 25 is captured, the detection result and each threshold value are compared (steps S13 to S17). If the comparison formula in step S13 is established, the control device 26 outputs a control signal to the air supply device 28 and discharges air from the air discharge ports 24 provided in the pressure control plates 22a and 22b. (Step S18).

  If the comparison expression in step S14 is established, the control device 26 sets an air discharge timer that defines the time for discharging air to a predetermined time (for example, several tens of seconds) (step S19), and supplies air. A control signal is output to the device 28 and air is discharged from the air discharge ports 24 provided in the pressure control plates 22a and 22b only for the time set by the air discharge timer (step S23). Also, assuming that the comparison formula in step S15 is established, if air is being discharged from any of the air discharge ports 24 formed in the pressure suppression plates 21a, 21b, 22a, 22b, the discharge is performed. Stop (step S20).

  If the comparison formula in step S16 is established, the control device 26 sets an air discharge timer that defines the time for discharging air to a predetermined time (for example, several tens of seconds) (step S21), and supplies air. A control signal is output to the device 28 and air is discharged from the air discharge ports 24 provided in the pressure control plates 21a and 21b only for the time set by the air discharge timer (step S24). If the comparison formula in step S17 is established, the control device 26 outputs a control signal to the air supply device 28 so that air is discharged from the air discharge ports 24 provided in the pressure suppression plates 21a and 21b. (Step S22).

  If any of the processes in steps S18, S23, S20, S24, and S22 described above is taken, the controller 26 determines whether or not there is a stop instruction by the operator (step S25), and the determination result is “NO”. The control device 26 determines whether or not a predetermined time (for example, 15 seconds) set in advance has elapsed (step S26). If the determination result is “NO”, the determination in step S26 is performed. Repeated. On the other hand, when the determination result in step S26 is “YES”, the process returns to step S12, the detection result of the displacement sensor 12 is taken into the control device 26, and the processes in steps S13 to S24 described above are repeated. The processing described above ends when a stop instruction is given from the operator and the determination result in step S25 is “YES”.

  As described above, in the present embodiment, when the blade 15 swings in the −Y direction, air is discharged from the air discharge ports 24 provided in the suppression blades 22a and 22b, and conversely, the blade 15 swings in the + Y direction. In such a case, air is discharged from the air discharge port 24 provided in the suppression blades 21a and 21b. The ingot IN is cut by pressing the cutting edge 15a of the blade 15 against the ingot IN while performing the above control. With the above control, the vibration of the blade 15 is reduced, so that the accuracy of the cut end face can be prevented from being deteriorated, and the life of the blade 15 and the like can be extended.

  As mentioned above, although embodiment of this invention was described, this invention is not restricted to said content, It can change freely within the scope of the present invention. For example, in the above embodiment, the case of cutting a silicon single crystal has been described as an example. However, other single crystals (for example, sapphire, gallium arsenide (GaAs), gallium nitride (GaN), and other single crystals) are used. The present invention can also be applied to cutting.

  In the above embodiment, the case where air is used as the predetermined fluid to be sprayed on the blade has been described as an example, but water may be sprayed instead of air. In the flow shown in FIG. 4, the time for blowing air is controlled according to the detection result of the displacement sensor 25. However, the amount of blowing air or the blowing pressure is controlled according to the detection result of the displacement sensor 25. May be.

It is a perspective view which shows schematic structure of the cutting device by one Embodiment of this invention. 1 is a diagram illustrating a configuration of a main part of a cutting device 10. It is a figure which shows the positional relationship of the water discharge port 23, the air discharge port 24, and the displacement sensor 25 in the pressure suppression plate 22b. It is a flowchart which shows the control method of the cutting device by one Embodiment of this invention.

Explanation of symbols

10 Cutting device 14a, 14b Pulley 15 Blade 23 Water discharge port (water spraying part)
24 Air outlet (Blowing part)
25 Displacement sensor (detection device)
26 Control device IN Ingot (object)

Claims (10)

In a cutting device comprising an endless belt-shaped blade wound around a pair of pulleys arranged apart from each other, and cutting an object with the rotating blade,
A detection device for detecting vibration of the blade;
A spraying unit that sprays water and air individually on the blade,
Based on the detection result of the detection device, a control device that controls the air blown from the blowing unit to the blade;
A cutting apparatus comprising: The detection device is disposed on a first end side of the blade contacting the object,
The cutting device according to claim 1, wherein the spraying portion is disposed on a second end side opposite to the first end portion. The position where the spraying part blows the water is set at a central part in the width direction of the blade, and the position where the spraying part blows the air is set at the upper end side of the blade. The cutting device according to claim 2. The blowing unit, between the abutment portion where the blade abuts on the object pulleys, any one of claims 1 to 3, characterized in that provided at least a pair across the blade The cutting device according to item . The control device performs control to blow the air to the blade from a blowing portion disposed in a direction opposite to a vibration direction of the blade detected by the detection device among the at least one pair of the blowing portions. The cutting device according to claim 4 , wherein the cutting device is performed. A water spraying part which is disposed at a substantially intermediate position between the first end part side and the second end part side of the blade and sprays water of a constant water pressure onto the blade to stabilize the direction of the blade edge of the blade. cutting device according to any one of claims 1 to 5, characterized in that it comprises a. The detection device, the cutting device according to any one of claims 1 to 6, wherein said blade is a non-contact displacement sensor which detects a shake of the blade without contact. In a control method of a cutting device comprising an endless belt-shaped blade wound around a pair of pulleys arranged apart from each other, and cutting an object by the rotating blade,
A detecting step for detecting the shake of the blade;
A control step of controlling the air sprayed on the blade based on the detection result of the shake detection step. The control method for a cutting apparatus according to claim 8, wherein the control step performs control to blow the air to the blade from a direction opposite to a swing direction of the blade detected in the detection step. In a silicon single crystal cutting method of cutting a silicon single crystal with an endless belt blade,
A method for cutting a silicon single crystal, characterized in that water is constantly blown and the silicon single crystal is cut while controlling air to be blown onto the blade in accordance with a detection result of the vibration of the blade.

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