JP4625746B2

JP4625746B2 - Sealing material

Info

Publication number: JP4625746B2
Application number: JP2005293759A
Authority: JP
Inventors: 王昭松浦; 康司加納
Original assignee: Mitsubishi Cable Industries Ltd
Current assignee: Mitsubishi Cable Industries Ltd
Priority date: 2005-10-06
Filing date: 2005-10-06
Publication date: 2011-02-02
Anticipated expiration: 2025-10-06
Also published as: JP2007100900A

Description

本発明は、半導体製造装置又は液晶パネルの表面処理装置等に使用される耐腐食ガス性に優れたシール材に係り、特には、シール性に加え、耐プラズマ性、耐腐食性を兼ね備えたシール材に関する。 The present invention relates to a sealing material excellent in corrosion gas resistance used for a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus, and in particular, a seal having plasma resistance and corrosion resistance in addition to sealing performance. Regarding materials.

半導体製造装置又は液晶パネルの表面処理装置に使用されるシール材は、真空環境を作り出すために、一般にフッ素ゴムのＯリングが用いられていたが、このＯリングは、半導体のドライエッチングや液晶パネルの表面処理プロセスに於て、反応性ガス（具体的には、四フッ化炭素、三フッ化炭素、六フッ化硫黄）雰囲気下、酸素ガス雰囲気下、又は、反応性ガスと酸素ガスとの混合気体雰囲気下でのプラズマ処理という過酷な条件に曝されるため、劣化（腐食）して発塵し、半導体ウエハー上にコンタミ（不純物・異物）を付着させる原因となっていた。
一方、耐腐食ガス性（耐反応ガス性及び耐プラズマ性）を有する材料には、フッ素樹脂等が挙げられるが、フッ素樹脂は弾性が小さいので、シール性が充分でなく接面漏れが発生し、真空を保持する目的には使用できなかった。 In order to create a vacuum environment, a fluorine rubber O-ring is generally used as a sealing material used in a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus. This O-ring is used for dry etching of a semiconductor or a liquid crystal panel. In the surface treatment process, the reactive gas (specifically, carbon tetrafluoride, carbon trifluoride, sulfur hexafluoride) atmosphere, the oxygen gas atmosphere, or the reactive gas and the oxygen gas Since it was exposed to the harsh conditions of plasma treatment in a mixed gas atmosphere, it deteriorated (corroded) and generated dust, causing contamination (impurities / foreign matter) to adhere to the semiconductor wafer.
On the other hand, examples of the material having corrosion gas resistance (reaction gas resistance and plasma resistance) include fluororesins, but since fluororesins have low elasticity, sealing performance is not sufficient and contact surface leakage occurs. It could not be used for the purpose of maintaining a vacuum.

そこで、上記問題を解決するため、図11に示すように、従来の装着溝に装着されるＯリングは、合成ゴムの部位40と耐腐食性材料の部位41とから成り、合成ゴムの部位40を大気22側に配置し、耐腐食性材料の部位41を腐食ガス21側に配置することで、耐腐食性材料の部位41は合成ゴムの部位40を腐食ガス21から保護し、合成ゴムの部位40は真空を維持できた（例えば、特許文献１参照）。
特開平１１−２３２８号公報 Therefore, in order to solve the above problem, as shown in FIG. 11, the conventional O-ring mounted in the mounting groove is composed of a synthetic rubber portion 40 and a corrosion-resistant material portion 41. Is placed on the atmosphere 22 side, and the part 41 of the corrosion-resistant material is placed on the side of the corrosive gas 21, so that the part 41 of the corrosion-resistant material protects the part 40 of the synthetic rubber from the corrosive gas 21, and The part 40 was able to maintain a vacuum (for example, refer patent document 1).
Japanese Patent Laid-Open No. 11-2328

しかし、図11に示した従来のシール材は断面が円形であるため、そのＯリングが相手部材20から圧縮荷重を受けた圧縮使用状態に於て、耐腐食性材料の部位41は装着溝及び相手部材20に密着する範囲が少ない。従って、合成ゴムの部位40と耐腐食性材料の部位41との隣接部分で、耐腐食性材料の部位41は、合成ゴムを腐食ガス21から完全に保護することができず、長期的に合成ゴムの劣化を抑止して真空を維持することができない問題があった。具体的には、シール面に樹脂（耐腐食性材料の部位41）が存在すると、（ｉ）接面漏れを起こす。
また、（ii）シール面に２種類の材料（樹脂とゴム）が混在するので、シール性が不安定であり、例えば、ねじれがあると、樹脂（耐腐食性材料の部位41）のみがシール面に存在することになり、シール性が格段に低下したり、逆に、ゴム（合成ゴムの部位40）のみがシール面に存在する場合、腐食性ガスの種類によっては、耐性がなく、シール性を保つことができなくなるという問題があった。
そこで、本発明は、真空保持性（密封性）と耐腐食ガス性を具備し、その真空保持性（密封性）と耐腐食ガス性を長期的に維持できるシール材を提供することを目的とする。 However, since the conventional sealing material shown in FIG. 11 has a circular cross section, the portion 41 of the corrosion-resistant material has a mounting groove and a portion of the O-ring in a compressed usage state in which a compression load is received from the counterpart member 20. There is little range in contact with the mating member 20. Therefore, in the adjacent part of the synthetic rubber part 40 and the corrosion-resistant material part 41, the corrosion-resistant material part 41 cannot completely protect the synthetic rubber from the corrosive gas 21, and it is synthesized over the long term. There was a problem that the vacuum could not be maintained by suppressing the deterioration of the rubber. Specifically, if resin (corrosion resistant material portion 41) is present on the seal surface, (i) contact surface leakage occurs.
In addition, (ii) since two types of materials (resin and rubber) are mixed on the sealing surface, the sealing performance is unstable. For example, if there is a twist, only the resin (corrosion-resistant material portion 41) seals. If there is only a rubber (synthetic rubber part 40) on the seal surface, there is no resistance depending on the type of corrosive gas. There was a problem that it was impossible to keep the sex.
Accordingly, an object of the present invention is to provide a sealing material that has vacuum retention (sealing) and corrosion gas resistance, and can maintain the vacuum retention (sealing) and corrosion gas resistance for a long period of time. To do.

上記目的を達成するために、本発明に係るシール材は、開口部と、第１側壁面と、第２側壁面と、底壁面とを、有する環状の装着溝内に装着される環状のシール材であって、腐食ガス収納室側の第１側壁面に対向して配設される耐腐食用リングと、第２側壁面側に配設される弾性シール本体と、から成り、上記耐腐食用リングは、装着未圧縮状態に於て第２側壁面側に拡大しつつ開口する勾配面を有する嵌込凹部を備えた横断面形状略Ｃ字状であり、上記弾性シール本体は、装着未圧縮状態の横断面に於て第２側壁面側に膨出する弧状部と、上記底壁面側と上記開口部に相対的に接近する相手部材側にそれぞれ膨出する突隆部と、上記嵌込凹部内に挿嵌される突部と、を有し、上記突部の上記底壁面側の端面を該底壁面と平行に配設すると共に、上記突部の上記相手部材側の端面を該相手部材と平行に配設し、装着未圧縮状態に於て、上記各端面と各端面に対向する上記嵌込凹部の上記勾配面との間に三角形状隙間を形成したものである。 To achieve the above object, a sealing material according to the present invention is an annular seal mounted in an annular mounting groove having an opening, a first side wall surface, a second side wall surface, and a bottom wall surface. A corrosion-resistant ring disposed opposite to the first side wall surface on the corrosive gas storage chamber side, and an elastic seal body disposed on the second side wall surface side. The ring for use is substantially C-shaped in cross section with a fitting recess having a sloped surface that opens while expanding toward the second side wall surface in the uncompressed state. An arcuate portion that bulges to the second side wall surface side in a cross section in a compressed state, a protruding portion that bulges to the bottom wall surface side and the counterpart member side that is relatively close to the opening, and the fitting A protrusion inserted into the insertion recess, and the end surface of the protrusion on the bottom wall surface side is disposed in parallel with the bottom wall surface. The end surface of the protrusion on the side of the mating member is disposed in parallel with the mating member, and in an uncompressed state between the end surfaces and the sloped surface of the fitting recess facing the end surfaces. Is formed with a triangular gap.

また、開口部と、相互に該開口部側に近づくにつれて接近する第１側壁面・第２側壁面と、底壁面とを、有する環状の蟻溝形の装着溝内に装着される環状のシール材であって、腐食ガス収納室側の第１側壁面に対向して配設される耐腐食用リングと、第２側壁面側に配設される弾性シール本体と、から成り、上記耐腐食用リングは、装着未圧縮状態に於て第２側壁面側に拡大しつつ開口する勾配面を有する嵌込凹部を備えた横断面形状略Ｃ字状であり、上記弾性シール本体は、装着未圧縮状態の横断面に於て第２側壁面側に膨出する弧状部と、上記底壁面側と上記開口部に相対的に接近する相手部材側にそれぞれ膨出する突隆部と、上記嵌込凹部内に挿嵌される突部と、を有し、上記突部の上記底壁面側の端面を該底壁面と平行に配設すると共に、上記突部の上記相手部材側の端面を該相手部材と平行に配設し、装着未圧縮状態に於て、上記各端面と各端面に対向する上記嵌込凹部の上記勾配面との間に三角形状隙間を形成したものである。 An annular seal mounted in an annular dovetail mounting groove having an opening, a first side wall surface and a second side wall surface that approach each other toward the opening side, and a bottom wall surface. A corrosion-resistant ring disposed opposite to the first side wall surface on the corrosive gas storage chamber side, and an elastic seal body disposed on the second side wall surface side. The ring for use is substantially C-shaped in cross section with a fitting recess having a sloped surface that opens while expanding toward the second side wall surface in the uncompressed state. An arcuate portion that bulges to the second side wall surface side in a cross section in a compressed state, a protruding portion that bulges to the bottom wall surface side and the counterpart member side that is relatively close to the opening, and the fitting A protrusion inserted into the recess, and the end surface of the protrusion on the bottom wall surface side is disposed in parallel with the bottom wall surface. Further, an end surface of the protrusion on the side of the mating member is arranged in parallel with the mating member, and in an uncompressed state of mounting, the end surfaces and the sloped surfaces of the fitting recesses facing the end surfaces. A triangular gap is formed between them.

また、上記突隆部は、上記装着溝の底壁面と上記相手部材に圧接する平坦部を有する横断面略矩形状とした。 In addition, the protruding portion has a substantially rectangular cross section having a flat portion that press-contacts the bottom wall surface of the mounting groove and the mating member.

また、装着未圧縮状態に於て、上記底壁面側の上記平坦部は、上記耐腐食用リングの底壁面側の端縁より底壁面側へ突出し、上記相手部材側の上記平坦部は、上記耐腐食用リングの相手部材側の端縁より相手部材側へ突出して形成された。 Further, in the uncompressed state, the flat portion on the bottom wall surface side protrudes from the edge on the bottom wall surface side of the corrosion-resistant ring toward the bottom wall surface side, and the flat portion on the counterpart member side is The anti-corrosion ring was formed to protrude from the end of the mating member to the mating member.

また、装着未圧縮状態に於て、上記耐腐食用リングの上記底壁面・相手部材側の両端縁は、その接線が上記第２側壁面側へ拡大する円弧状にそれぞれ形成されている。 Further, in the uncompressed state of mounting, both end edges of the corrosion-resistant ring on the bottom wall surface and the mating member side are each formed in an arc shape whose tangent line expands toward the second side wall surface side.

また、上記耐腐食用リングはフッ素樹脂から成り、上記弾性シール本体はフッ素ゴム又はシリコーンゴムから成っている。
また、半導体製造装置用又は液晶パネルの表面処理装置に用いられるものである。 The corrosion-resistant ring is made of a fluororesin, and the elastic seal body is made of fluororubber or silicone rubber.
Further, it is used for a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus.

本発明は、次のような著大な効果を奏する。
本発明に係るシール材によれば、耐腐食用リングは、腐食ガスが弾性シール本体側へ流れるのを抑止でき、弾性シール本体は、大気が腐食ガス側（真空側）へ入り込むのを阻止できる。従って、弾性シール本体は腐食ガスによって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体の発塵が起こらないので、製品に不純物が付着することがなくなる。
また、突部の底壁面側の端面を底壁面と平行に配設すると共に、突部の相手部材側の端面を相手部材と平行に配設したので、圧縮使用状態に於て、耐腐食用リングの両端縁は、底壁面・相手部材とそれぞれ（接触面積が広い）面的圧着して、密封性が向上する。
さらに、装着未圧縮状態に於て、弾性シール本体の各端面と勾配面との間に三角形状隙間を形成したので、圧縮使用状態に於て、耐腐食用リングの両突出端部が弾性シール本体（の突部）へ食い込む（応力集中が生じる）ことがなく、その結果、破損原因となるクラック等を抑制できるので、シール材としての製品寿命（シール性等の特性の維持）を長くすることができる。
また、耐腐食用リングは横断面形状が略Ｃ字状であるので、圧縮弾性変形し易く、シール取付部材と相手部材との間隔の増減にも対応可能であり、安定姿勢を保ちつつ、腐食ガスが弾性シール本体に接触することを防ぎ得る。 The present invention has the following remarkable effects.
According to the sealing material according to the present invention, the anti-corrosion ring can prevent the corrosive gas from flowing to the elastic seal body side, and the elastic seal body can prevent the atmosphere from entering the corrosive gas side (vacuum side). . Therefore, since the elastic seal body is not deteriorated by the corrosive gas, the vacuum holding property can be maintained for a long time, and the elastic seal body does not generate dust due to the deterioration, so that impurities are not attached to the product.
In addition, the end surface on the bottom wall surface side of the protrusion is disposed in parallel with the bottom wall surface, and the end surface on the mating member side of the protrusion is disposed in parallel with the mating member. Both end edges of the ring are surface-bonded to the bottom wall surface and the mating member (with a wide contact area) to improve the sealing performance.
Furthermore, since a triangular gap is formed between each end face of the elastic seal body and the sloped surface in the uncompressed state, the both ends of the corrosion-resistant ring are elastically sealed in the compression use state. It does not bite into the main body (protruding part) (stress concentration occurs), and as a result, cracks that cause damage can be suppressed, thus extending the product life (maintaining characteristics such as sealing properties) as a sealing material be able to.
Moreover, since the cross-sectional shape of the corrosion-resistant ring is substantially C-shaped, it is easy to compress and elastically deform, and can respond to the increase and decrease of the distance between the seal mounting member and the mating member, and while maintaining a stable posture, It is possible to prevent gas from coming into contact with the elastic seal body.

以下、実施の形態に示す図面に基づき本発明を詳説する。
本発明のシール材は、主に半導体の製造や液晶パネルの表面処理に用いられるプラズマエッチング装置に使用されるものである。
図１〜図３に示す第１の実施形態に於て、図１と図３に示す23はシール取付部材であり、シール取付部材23は装着溝５を具備し、装着溝５は、開口部４と、相互にその開口部４に近づくにつれて接近する第１側壁面１・第２側壁面２と、底壁面３とを、有する環状の横断面台形の蟻溝である。また、第１の実施形態では、装着溝５は、第１側壁面１を内周側に配設し、第２側壁面２を外周側に配設している。なお、この環状には円形状、矩形状及びその他の形状も含まれる。 Hereinafter, the present invention will be described in detail with reference to the drawings shown in the embodiments.
The sealing material of the present invention is mainly used in a plasma etching apparatus used for manufacturing semiconductors and surface treatment of liquid crystal panels.
In the first embodiment shown in FIGS. 1 to 3, 23 shown in FIGS. 1 and 3 is a seal mounting member, the seal mounting member 23 includes a mounting groove 5, and the mounting groove 5 is an opening. 4, an annular transverse cross-sectional trapezoidal dovetail groove having a first side wall surface 1, a second side wall surface 2, and a bottom wall surface 3 that approach each other as they approach the opening 4. In the first embodiment, the mounting groove 5 has the first side wall surface 1 disposed on the inner peripheral side and the second side wall surface 2 disposed on the outer peripheral side. This annular shape includes a circular shape, a rectangular shape, and other shapes.

本発明はその装着溝５内に装着される（全体が環状の）シール材30であって、図１と図３に示す20は装着溝５の開口部４に相対的に接近する相手部材である。また、シール取付部材23と相手部材20のそれぞれ向かい合う対向面23ａ，20ａ、及び、シール取付部材23の底壁面３は、互いに平行に配設されている。 The present invention is a seal member 30 (in general, annular) mounted in the mounting groove 5, and 20 shown in FIGS. 1 and 3 is a mating member relatively approaching the opening 4 of the mounting groove 5. is there. The opposed surfaces 23a, 20a of the seal mounting member 23 and the mating member 20 and the bottom wall surface 3 of the seal mounting member 23 are arranged in parallel to each other.

図１は、シール材30が装着溝５内に装着されシール材30が相手部材20から圧縮荷重を受けていない状態──装着未圧縮状態──を示し、図２は、シール材30が装着溝５へ装着される前の状態──自由状態──を示す。また、図３は、シール材30が装着溝５内に装着されて相手部材20から圧縮荷重を受けている状態──圧縮使用状態──を示す。 FIG. 1 shows a state in which the sealing material 30 is installed in the mounting groove 5 and the sealing material 30 does not receive a compressive load from the mating member 20, that is, a state in which the sealing material 30 is not compressed, and FIG. The state before being installed in the groove 5 is shown: a free state. FIG. 3 shows a state in which the sealing material 30 is mounted in the mounting groove 5 and receives a compressive load from the mating member 20--compression use state--.

図１に示す装着未圧縮状態に於て、Ｚは、反応性ガス（具体的には、四フッ化炭素、三フッ化炭素、六フッ化硫黄）やプラズマ状態にあるガス等が含まれる腐食ガス21を収納する腐食ガス収納室であり、第１側壁面１は腐食ガス収納室Ｚ側に配置され、第２側壁面２は大気22側に配置されている。
シール材30は、第１側壁面１側に（接近又は接触するように）配設される耐腐食用リング６と、第２側壁面２側に（接近又は接触するように）配設される弾性シール本体７と、から成り、言い換えると、耐腐食用リング６は内周側に配置され、弾性シール本体７は外周側に配置されている。 In the uncompressed state shown in FIG. 1, Z is a corrosion that includes reactive gas (specifically, carbon tetrafluoride, carbon trifluoride, sulfur hexafluoride) or gas in a plasma state. The first side wall surface 1 is disposed on the side of the corrosive gas storage chamber Z, and the second side wall surface 2 is disposed on the atmosphere 22 side.
The sealing material 30 is disposed on the first side wall surface 1 side (so as to approach or contact) and the anticorrosion ring 6 and close to the second side wall surface 2 side (so as to approach or contact). In other words, the corrosion-resistant ring 6 is disposed on the inner peripheral side, and the elastic seal body 7 is disposed on the outer peripheral side.

図１に於て、耐腐食用リング６は、横断面形状略Ｃ字状に形成され、第２側壁面２側──大気側──に（テーパ状に）拡大しつつ開口する勾配面17，18を有する（環状の）嵌込凹部８を備えている。即ち、嵌込凹部８は、底部24と、底部24の両端から第２側壁面２側へ互いに離間するように延伸する勾配面17，18と、から形成されている。また、耐腐食用リング６の底壁面３・相手部材20側の両端縁12，13は、その接線Ｘ，Ｙが第２側壁面２側へ拡大する円弧状にそれぞれ形成されている。 In FIG. 1, the corrosion-resistant ring 6 is formed in a substantially C-shaped cross section, and is an inclined surface 17 that opens while expanding (tapered) to the second side wall surface 2 side--atmosphere side--. , 18 (annular) fitting recesses 8 are provided. That is, the fitting recess 8 is formed of a bottom 24 and gradient surfaces 17 and 18 extending from both ends of the bottom 24 so as to be separated from each other toward the second side wall surface 2 side. Further, both end edges 12 and 13 on the bottom wall surface 3 and the counterpart member 20 side of the corrosion-resistant ring 6 are respectively formed in arc shapes whose tangent lines X and Y expand to the second side wall surface 2 side.

弾性シール本体７は、装着未圧縮状態の横断面に於て、第２側壁面２側に膨出する弧状部９と、底壁面３側と相手部材20側にそれぞれ膨出する突隆部11，11と、耐腐食用リング６の上記嵌込凹部８内に挿嵌される突部10と、を有している。 The elastic seal body 7 has an arcuate portion 9 that bulges toward the second side wall surface 2 side, and a bulge portion 11 that bulges toward the bottom wall surface 3 side and the mating member 20 side, respectively, in a cross-section in an uncompressed state. 11 and a protrusion 10 that is inserted into the insertion recess 8 of the corrosion-resistant ring 6.

突部10の底壁面３側の端面15は底壁面３と平行に配設され、相手部材20側の端面16は相手部材20（の対向面20ａ）と平行に配設されている。つまり、突部10の両端面15，16は互いに平行に配設されている。
そして、突部10の各端面15，16と各端面15，16に対向する勾配面17，18との間に三角形状隙間19，19が設けられている。 An end surface 15 on the bottom wall surface 3 side of the protrusion 10 is disposed in parallel with the bottom wall surface 3, and an end surface 16 on the mating member 20 side is disposed in parallel with the mating member 20 (opposing surface 20 a thereof). That is, both end faces 15 and 16 of the protrusion 10 are arranged in parallel to each other.
Further, triangular gaps 19, 19 are provided between the end faces 15, 16 of the protrusion 10 and the gradient surfaces 17, 18 facing the end faces 15, 16.

また、突隆部11，11は、底壁面３と相手部材20に圧接（接触）する平坦部14，14を有する横断面略矩形状に形成されている。
そして、装着未圧縮状態に於て、底壁面３側の平坦部14は、耐腐食用リング６の底壁面３側の端縁12より底壁面３側へ突出して配置され、相手部材20側の平坦部14は、耐腐食用リング６の相手部材20側の端縁13より相手部材20側へ突出して配置されている。 Further, the protruding portions 11 and 11 are formed in a substantially rectangular cross section having flat portions 14 and 14 which are in pressure contact (contact) with the bottom wall surface 3 and the mating member 20.
In the uncompressed state, the flat portion 14 on the bottom wall surface 3 side is disposed so as to protrude from the edge 12 on the bottom wall surface 3 side of the anticorrosion ring 6 toward the bottom wall surface 3 side. The flat portion 14 is disposed so as to protrude from the edge 13 on the mating member 20 side of the corrosion-resistant ring 6 toward the mating member 20 side.

図２に示す自由状態に於て、耐腐食用リング６と弾性シール本体７の形状について詳しく説明する。なお、図２の（Ａ）は耐腐食用リング６の嵌込凹部８に弾性シール本体７の突部10を嵌め込んだ状態───嵌込組付状態───の断面図、（Ｂ）は分解した弾性シール本体７の断面図、（Ｃ）は分解した耐腐食用リング６の断面図を示す。なお、耐腐食用リング６と弾性シール本体７とを、嵌め合わせる前後では、それぞれの形状の変化はほとんど生じない。
耐腐食用リング６の嵌込凹部８の底部24は、弧状の凹曲面に形成され、嵌込凹部８の反対側には半円弧状の圧着面部25が形成されている。また、耐腐食用リング６の両端に有する突出端部28，28の厚さ寸法は、その先端へ向かうにつれて大きく（厚く）なるように設定されている。 The shapes of the anticorrosion ring 6 and the elastic seal body 7 will be described in detail in the free state shown in FIG. 2A is a cross-sectional view of a state in which the protrusion 10 of the elastic seal body 7 is fitted into the fitting recess 8 of the anticorrosion ring 6—the fitting assembly state— ) Is a cross-sectional view of the disassembled elastic seal body 7, and (C) is a cross-sectional view of the disassembled corrosion-resistant ring 6. In addition, before and after fitting the corrosion-resistant ring 6 and the elastic seal body 7 together, the change in each shape hardly occurs.
The bottom 24 of the fitting recess 8 of the corrosion-resistant ring 6 is formed in an arcuate concave curved surface, and a semi-arc-shaped crimping surface 25 is formed on the opposite side of the fitting recess 8. Further, the thickness dimension of the projecting end portions 28, 28 at both ends of the corrosion-resistant ring 6 is set so as to increase (thicken) toward the tip.

弾性シール本体７の突部10の先端部には、図２（Ａ）に示す嵌込組付状態で、嵌込凹部８の底部24と対向する弧状の凸曲面部26が形成され、凸曲面部26と底部24との間には逃げ用空間部27が設けられ、シール材30を装着溝５に容易に装着することができるようになっている。 An arc-like convex curved surface portion 26 is formed at the tip of the protrusion 10 of the elastic seal main body 7 so as to face the bottom 24 of the fitting concave portion 8 in the fitting assembled state shown in FIG. A clearance space 27 is provided between the portion 26 and the bottom 24 so that the sealing material 30 can be easily mounted in the mounting groove 5.

また、耐腐食用リング６は、ＰＦＡ、ＦＥＰ、ＰＴＦＥ等のフッ素樹脂製であり、中でも、耐腐食性の点でＰＴＦＥが最も好ましい。弾性シール本体７は、公知のゴム材料であれば良く、具体的には、シリコーンゴム製、フッ素ゴム製、又はニトリルゴム製等が適用でき、中でも、耐プラズマ性や耐腐食ガス性が優れている点で、シリコーンゴム製、フッ素ゴム製が好ましい。さらに、シール材30が物理的劣化（イオン化した原子が弾性シール本体７を削り取るように傷つけること）の起こり易い箇所に装着される場合は、弾性シール本体７はシリコーンゴム製であることが好ましく、シール材30が化学的劣化（反応性ガスが弾性シール本体７に接触し、腐食劣化させること）の起こり易い箇所に装着される場合は、弾性シール本体７はフッ素ゴム製であることが好ましい。 The corrosion-resistant ring 6 is made of a fluororesin such as PFA, FEP, PTFE, etc. Among them, PTFE is most preferable in terms of corrosion resistance. The elastic seal body 7 may be a known rubber material, and specifically, silicone rubber, fluorine rubber, nitrile rubber, etc. can be applied, and among them, plasma resistance and corrosion gas resistance are excellent. In view of this, silicone rubber and fluorine rubber are preferable. Furthermore, when the sealing material 30 is mounted in a place where physical deterioration (the ionized atoms are damaged so as to scrape off the elastic seal body 7), the elastic seal body 7 is preferably made of silicone rubber. When the sealing material 30 is attached to a place where chemical deterioration (reactive gas comes into contact with the elastic seal body 7 and causes corrosion deterioration) is likely to occur, the elastic seal body 7 is preferably made of fluoro rubber.

さらに、弾性シール本体７は、特に酸素プラズマ処理（酸素ラジカル状態）の環境下で用いられる場合、以下に記す耐酸素プラズマ性に優れた（ア）又は（イ）の素材から成型されることが好ましい。
（ア）は、フッ化ビニリデン−六フッ化プロピレン共重合体、又は、及び、フッ化ビニリデン−六フッ化プロピレン−四フッ化エチレン共重合体 100重量部に対して、硫酸バリウム20〜100 重量部を配合して成る組成物をポリオール加硫した素材である。
（イ）は、フッ化ビニリデン−六フッ化プロピレン共重合体、又は、及び、フッ化ビニリデン−六フッ化プロピレン−四フッ化エチレン共重合体 100重量部に対して、さらに四フッ化エチレン樹脂 0.5〜30重量部を配合して成る素材である。 Furthermore, the elastic seal body 7 may be molded from the material (a) or (b) excellent in oxygen plasma resistance described below, particularly when used in an environment of oxygen plasma treatment (oxygen radical state). preferable.
(A) is a vinylidene fluoride-hexafluoropropylene copolymer or a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, 100 to 100 parts by weight of barium sulfate, 20 to 100 weights. This is a material obtained by vulcanizing a composition obtained by blending parts.
(I) is a vinylidene fluoride-hexafluoropropylene copolymer or a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, and further, a tetrafluoroethylene resin for 100 parts by weight of the copolymer. It is a material formed by blending 0.5 to 30 parts by weight.

また、本発明のシール材が酸素ラジカルが発生する箇所、言い換えれば、プラズマが少なく酸素ラジカルが存在する箇所に配設される場合は、耐腐食用リング６の素材として、（耐プラズマ性と耐酸素ラジカル性を有する）上記フッ素樹脂を適用する方が好ましい。 Further, when the sealing material of the present invention is disposed in a location where oxygen radicals are generated, in other words, in a location where there is little plasma and oxygen radicals are present, as a material for the corrosion-resistant ring 6, (plasma resistance and resistance) It is preferable to apply the above fluororesin (having oxygen radical properties).

図10に示すように、本発明が使用されるプラズマエッチング装置等は、腐食ガス収納室Ｚを有し、腐食ガス収納室（反応管）Ｚ内に配設されたプラズマを除去するための内管（エッチトンネル）44内では、Ｎ₂Ｏと希ガス、Ｎ₂とＯ₂と希ガス、又は、Ｏ₂と希ガスをプラズマ励起し、酸素励起活性種として酸素ラジカルが発生する。
つまり、プラズマと酸素ラジカルが混在するガスを、腐食ガス収納室Ｚで発生させ、腐食ガス収納室Ｚの内管（エッチトンネル）44でプラズマを除去し、酸素ラジカルのみにて半導体ウエハーの表面処理（エッチング等）を行う。表面処理後、内管44内の酸素ラジカルは、開閉扉46ａを開放し配管45ｃから排出され、一方、表面処理された半導体ウエハーは、別の開閉扉46ｂを開けて取り出される。 As shown in FIG. 10, a plasma etching apparatus or the like in which the present invention is used has a corrosive gas storage chamber Z, and is used for removing plasma disposed in the corrosive gas storage chamber (reaction tube) Z. In the tube (etch tunnel) 44, N ₂ O and rare gas, N ₂ and O ₂ and rare gas, or O ₂ and rare gas are plasma-excited to generate oxygen radicals as oxygen-excited active species.
That is, a gas containing plasma and oxygen radicals is generated in the corrosive gas storage chamber Z, the plasma is removed by the inner tube (etch tunnel) 44 of the corrosive gas storage chamber Z, and the surface treatment of the semiconductor wafer is performed only with oxygen radicals. (Etching etc.) is performed. After the surface treatment, oxygen radicals in the inner tube 44 are discharged from the pipe 45c by opening the door 46a, while the surface-treated semiconductor wafer is taken out by opening another door 46b.

具体的には、例えば、本シール材30が、腐食ガス収納室Ｚと配管45ａとの連結部Ｌや、腐食ガス収納室Ｚに通ずる配管45ａ，45ｂ同士の連結部Ｍ等（のプラズマと酸素ラジカルが混在する場所）に配設される場合は、耐腐食用リング６の材質として耐プラズマ性に優れたシリコーンゴム製を適用することが好ましく、一方、本シール材30が、酸素ラジカルを排出する配管45ｃと腐食ガス収納室Ｚとの連結部（開閉扉46ａの密閉部）Ｐや、半導体ウエハーを取り出す開閉扉46ｂの密閉部Ｑ等（のプラズマが少ない場所）に配設される場合は、耐腐食用リング６をフッ素樹脂製とすることが望ましい。 Specifically, for example, the sealing material 30 includes a connecting portion L between the corrosive gas storage chamber Z and the pipe 45a, a connecting portion M between the pipes 45a and 45b communicating with the corrosive gas storage chamber Z, etc. It is preferable to use silicone rubber with excellent plasma resistance as the material of the anti-corrosion ring 6, while the sealing material 30 discharges oxygen radicals. When the pipe 45c is connected to the corrosive gas storage chamber Z (sealed portion of the opening / closing door 46a) P or the sealing portion Q of the opening / closing door 46b for taking out the semiconductor wafer (where the plasma is low) The corrosion-resistant ring 6 is preferably made of a fluororesin.

図４と図５に示す第２の実施の形態に於て、図４は装着未圧縮状態を示す。また、図５は分解した自由状態を示し、（Ａ）は弾性シール本体７の断面図であり、（Ｂ）は耐腐食用リング６の断面図である。
この場合、環状の装着溝５の第１側壁面１は外周側に配設され、第２側壁面２は内周側に配設されている。そして、第１側壁面１（外周）側には、耐腐食用リング６が配置され、第２側壁面２（内周）側には、弾性シール本体７が配置されている。
なお、図４と図５に於て、図１・図２と同一の符号は図１・図２と同様の構成であるので、説明を省略する。 In the second embodiment shown in FIG. 4 and FIG. 5, FIG. 4 shows the uncompressed state. 5 shows a disassembled free state, (A) is a cross-sectional view of the elastic seal body 7, and (B) is a cross-sectional view of the corrosion-resistant ring 6.
In this case, the first side wall surface 1 of the annular mounting groove 5 is disposed on the outer peripheral side, and the second side wall surface 2 is disposed on the inner peripheral side. A corrosion-resistant ring 6 is disposed on the first side wall surface 1 (outer periphery) side, and an elastic seal body 7 is disposed on the second side wall surface 2 (inner periphery) side.
4 and FIG. 5, the same reference numerals as those in FIG. 1 and FIG. 2 have the same configurations as those in FIG. 1 and FIG.

図６と図７に示す第３の実施の形態に於て、図６は装着未圧縮状態を示し、図７は圧縮使用状態を示す。
装着溝５の第１側壁面１と第２側壁面２は、底壁面３に直交して形成されている。即ち、装着溝５は、第１側壁面１と第２側壁面２が互いに平行に配設された横断面正方形又は長方形に形成された環状の溝である。
また、装着溝５の第１側壁面１は内周側に配設され、第２側壁面２は外周側に配設されている。そして、第１側壁面１（内周）側には、耐腐食用リング６が配設され、第２側壁面２（外周）側には、弾性シール本体７が配設されている。
なお、図６と図７に於て、図１・図３と同一の符号は図１・図３と同様の構成であるので、説明を省略する。 In the third embodiment shown in FIGS. 6 and 7, FIG. 6 shows an uncompressed state of attachment, and FIG. 7 shows a state of compression use.
The first side wall surface 1 and the second side wall surface 2 of the mounting groove 5 are formed orthogonal to the bottom wall surface 3. That is, the mounting groove 5 is an annular groove formed in a square or rectangular cross section in which the first side wall surface 1 and the second side wall surface 2 are arranged in parallel to each other.
Further, the first side wall surface 1 of the mounting groove 5 is disposed on the inner peripheral side, and the second side wall surface 2 is disposed on the outer peripheral side. A corrosion-resistant ring 6 is disposed on the first side wall surface 1 (inner periphery) side, and an elastic seal body 7 is disposed on the second side wall surface 2 (outer periphery) side.
6 and FIG. 7, the same reference numerals as those in FIG. 1 and FIG. 3 have the same configurations as those in FIG. 1 and FIG.

また、第１側壁面１と第２側壁面２が底壁面３に直交して形成される環状の装着溝５に於て、耐腐食用リング６を外周側に配設し、弾性シール本体７を内周側に配設した（第１側壁面１を外周側に配設し、第２側壁面２を内周側に配設した）シール材を本発明の第４の実施形態としてもよい（図示省略）。 Further, in an annular mounting groove 5 in which the first side wall surface 1 and the second side wall surface 2 are formed perpendicular to the bottom wall surface 3, a corrosion-resistant ring 6 is disposed on the outer peripheral side, and an elastic seal body 7 is provided. A sealing material that is disposed on the inner peripheral side (the first side wall surface 1 is disposed on the outer peripheral side and the second side wall surface 2 is disposed on the inner peripheral side) may be used as the fourth embodiment of the present invention. (Not shown).

本発明のシール材は設計変更自由であり、弾性シール本体７の素材として、上記のものの他に、エチレン−プロピレンゴム又は水素添加ニトリルゴムを適用してもよい。 The seal material of the present invention can be freely changed in design, and as a material for the elastic seal body 7, in addition to the above, ethylene-propylene rubber or hydrogenated nitrile rubber may be applied.

図８と図９は比較例を示し、図８は装着未圧縮状態を示し、図９は圧縮使用状態を示す。
図８に於て、この比較例のシール材50は、蟻溝型の装着溝５内に装着されており、第１側壁面１に対向して配設される弾性シール本体70と、第２側壁面２に対向して配設される耐腐食用リング60と、から成っている。
比較例のシール材50の弾性シール本体70は、本発明のシール材30の弾性シール本体７と同一形状であるが、比較例のシール材50が有する耐腐食用リング60は、本発明が有する耐腐食用リング６と形状が異なっている。 8 and FIG. 9 show a comparative example, FIG. 8 shows an uncompressed state of attachment, and FIG. 9 shows a compression use state.
In FIG. 8, a sealing material 50 of this comparative example is mounted in a dovetail mounting groove 5, and an elastic seal body 70 disposed opposite to the first side wall surface 1, and a second And a corrosion-resistant ring 60 disposed opposite to the side wall surface 2.
The elastic seal body 70 of the seal material 50 of the comparative example has the same shape as the elastic seal body 7 of the seal material 30 of the present invention. However, the corrosion-resistant ring 60 included in the seal material 50 of the comparative example has the present invention. The shape is different from the corrosion-resistant ring 6.

以下、比較例の耐腐食用リング60と本発明が有する耐腐食用リング６との相違点について説明する。
まず、比較例の耐腐食用リング60は略Ｃ字状に形成されているが、嵌込凹部80は第２側壁面２側へ向かって互いに平行に配設される平行面62，62を有し、本発明のような勾配面17，18を有していない（図１参照）。言い換えれば、耐腐食用リング60の両突出端部61，61は、装着未圧縮状態で、弾性シール本体70の突部71との間に隙間は設けられておらず、接触して配設されている。
また、耐腐食用リング60の底壁面３側と相手部材20側の端縁には、平坦面部63，63が形成され、各平坦面部63，63は底壁面３と平行に配設されている。 Hereinafter, differences between the anticorrosion ring 60 of the comparative example and the anticorrosion ring 6 of the present invention will be described.
First, although the corrosion-resistant ring 60 of the comparative example is formed in a substantially C shape, the fitting recess 80 has parallel surfaces 62 and 62 arranged in parallel to each other toward the second side wall surface 2 side. However, it does not have the inclined surfaces 17, 18 as in the present invention (see FIG. 1). In other words, the protruding end portions 61 and 61 of the corrosion-resistant ring 60 are in an uncompressed state and are not in contact with the protruding portion 71 of the elastic seal main body 70, and are disposed in contact with each other. ing.
Further, flat surface portions 63 and 63 are formed on the bottom wall 3 side and the mating member 20 side edge of the corrosion-resistant ring 60, and the flat surface portions 63 and 63 are arranged in parallel with the bottom wall surface 3. .

比較例のシール材50が圧縮荷重を受け図９に示す圧縮使用状態となった場合、耐腐食用リング60は弾性変形して、両突出端部61，61の先端が弾性シール本体70の突部71の基部へ食い込む（応力集中が生じる）。そして、突部71の基部が局部的に圧縮されることにより、破損原因となるクラックが発生し、シール性が短期間で低下する。
また、平坦面部63，63と底壁面３・相手部材20との間に隙間49，49が生じ完全に密着しないので、収納室Ｚからの腐食ガス21が弾性シール本体70側へ漏れ、弾性シール本体70が劣化し易い。
即ち、比較例のシール材50では、製品寿命が短く、長期的にシール性を維持できないものである。
なお、図８と図９に於て、図１・図３と同一の符号は同様の構成であるので説明を省略する。 When the sealing material 50 of the comparative example is subjected to a compressive load and is in a compressed use state shown in FIG. 9, the corrosion-resistant ring 60 is elastically deformed, and the tips of both protruding end portions 61, 61 are protruded from the elastic seal body 70. It bites into the base of the portion 71 (stress concentration occurs). And the base part of the protrusion 71 is compressed locally, the crack which causes a breakage generate | occur | produces and a sealing performance falls in a short period.
In addition, since gaps 49 and 49 are formed between the flat surface portions 63 and 63 and the bottom wall surface 3 and the mating member 20, the corrosive gas 21 from the storage chamber Z leaks to the elastic seal body 70 side, and the elastic seal The main body 70 is likely to deteriorate.
That is, the sealing material 50 of the comparative example has a short product life and cannot maintain the sealing performance for a long time.
In FIG. 8 and FIG. 9, the same reference numerals as those in FIG. 1 and FIG.

上述した本発明のシール材の使用方法（作用）について説明する。
まず、図２（Ａ）に示すように、耐腐食用リング６の嵌込凹部８内に、弾性シール本体７の突部10を挿嵌して組み合わせ、自由状態にあるシール材30を形成する。
次に、突部10の先端（凸曲面部26）と嵌込凹部８の底部24とが接近又は接触するように、シール材30を圧縮しながら装着溝５内に押し込んで装着し、図１に示す装着未圧縮状態とする。 The use method (action) of the sealing material of the present invention described above will be described.
First, as shown in FIG. 2 (A), the protrusion 10 of the elastic seal body 7 is inserted and combined in the insertion recess 8 of the corrosion-resistant ring 6 to form a sealing material 30 in a free state. .
Next, the seal material 30 is pressed into the mounting groove 5 while being compressed so that the tip (convex curved surface portion 26) of the protrusion 10 and the bottom 24 of the fitting recess 8 approach or contact each other, and FIG. The uncompressed state shown in FIG.

そして、シール取付部材23と相手部材20とを相対的に接近させると、シール材30は圧縮荷重を受け図３に示すように圧縮使用状態になる。この時、耐腐食用リング６は圧縮弾性変形して、圧着面部25は底壁面３・第１側壁面１・相手部材20に密着する。詳しくは、圧着面部25の両端縁12，13が底壁面３・相手部材20とそれぞれ密着し、圧着面部25の中間部が第１側壁面１と密着している。そして、嵌込凹部８の勾配面17，18は、凸突部10の端面15，16とそれぞれ密着し、隙間19，19（図１参照）は消滅する。 When the seal mounting member 23 and the mating member 20 are brought relatively close to each other, the sealing material 30 receives a compressive load and enters a compressed use state as shown in FIG. At this time, the corrosion-resistant ring 6 is compressed and elastically deformed, and the pressure-bonding surface portion 25 is in close contact with the bottom wall surface 3, the first side wall surface 1, and the mating member 20. Specifically, both end edges 12 and 13 of the crimping surface portion 25 are in close contact with the bottom wall surface 3 and the mating member 20, and an intermediate portion of the crimping surface portion 25 is in close contact with the first side wall surface 1. And the gradient surfaces 17 and 18 of the insertion recessed part 8 are closely_contact | adhered with the end surfaces 15 and 16 of the convex protrusion 10, respectively, and the clearance gaps 19 and 19 (refer FIG. 1) lose | disappear.

また、弾性シール本体７の突隆部11，11は、圧縮荷重により圧縮され潰され、平坦部14，14は、底壁面３・相手部材20と高い面圧にて密着する。そして、弾性シール本体７の圧縮弾性変形による体積移動にて、弧状部９は第２側壁面２側へさらに膨出し第２側壁面２と密着する。 Further, the protruding portions 11 and 11 of the elastic seal body 7 are compressed and crushed by the compressive load, and the flat portions 14 and 14 are in close contact with the bottom wall surface 3 and the mating member 20 with high surface pressure. The arc-shaped portion 9 further bulges toward the second side wall surface 2 and comes into close contact with the second side wall surface 2 by volume movement due to the compression elastic deformation of the elastic seal body 7.

以上のように、本発明のシール材は、開口部４と、第１側壁面１と、第２側壁面２と、底壁面３とを、有する環状の装着溝５内に装着される環状のシール材であって、腐食ガス収納室Ｚ側の第１側壁面１に対向して配設される耐腐食用リング６と、第２側壁面２側に配設される弾性シール本体７と、から成り、耐腐食用リング６は、装着未圧縮状態に於て第２側壁面２側に拡大しつつ開口する勾配面17，18を有する嵌込凹部８を備えた横断面形状略Ｃ字状であり、弾性シール本体７は、装着未圧縮状態の横断面に於て第２側壁面２側に膨出する弧状部９と、底壁面３側と開口部４に相対的に接近する相手部材20側にそれぞれ膨出する突隆部11，11と、嵌込凹部８内に挿嵌される突部10と、を有し、突部10の底壁面３側の端面15を底壁面３と平行に配設すると共に、突部10の相手部材20側の端面16を相手部材20と平行に配設し、装着未圧縮状態に於て、各端面15，16と各端面15，16に対向する嵌込凹部８の勾配面17，18との間に三角形状隙間19，19を形成したので、耐腐食用リング６は、腐食ガス21が弾性シール本体７側へ流れるのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。従って、弾性シール本体７は腐食ガス21によって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体７の発塵が起こらないので、製品に不純物が付着することがなくなる。
また、突部10の底壁面３側の端面15を底壁面３と平行に配設すると共に、突部10の相手部材20側の端面16を相手部材20と平行に配設したので、圧縮使用状態に於て、耐腐食用リング６の両端縁12，13は、底壁面３・相手部材20とそれぞれ（接触面積が広い）面的圧着して、密封性が向上する。
さらに、装着未圧縮状態に於て、弾性シール本体７の各端面15，16と勾配面17，18との間に三角形状隙間19，19を形成したので、圧縮使用状態に於て、耐腐食用リング６の両突出端部28，28が弾性シール本体７（の突部10）へ食い込む（応力集中が生じる）ことがなく、その結果、破損原因となるクラック等を抑制できるので、シール材としての製品寿命（シール性等の特性の維持）を長くすることができる。
また、耐腐食用リング６は横断面形状が略Ｃ字状であるので、圧縮弾性変形し易く、シール取付部材23と相手部材20との間隔の増減にも対応可能であり、安定姿勢を保ちつつ、腐食ガス21が弾性シール本体７に接触することを防ぎ得る。 As described above, the sealing material of the present invention has an annular mounting groove 5 mounted in the annular mounting groove 5 having the opening 4, the first side wall surface 1, the second side wall surface 2, and the bottom wall surface 3. A seal material, a corrosion-resistant ring 6 disposed opposite to the first side wall surface 1 on the corrosive gas storage chamber Z side, an elastic seal body 7 disposed on the second side wall surface 2 side, The anti-corrosion ring 6 has a substantially C-shaped cross section with a fitting recess 8 having sloped surfaces 17 and 18 that open while expanding toward the second side wall surface 2 in the uncompressed state. The elastic seal body 7 includes an arcuate portion 9 that bulges toward the second side wall surface 2 side in a cross-section in an uncompressed state, and a counterpart member that is relatively close to the bottom wall surface 3 side and the opening 4. The protrusions 11 and 11 bulge to the 20 side and the protrusions 10 inserted into the insertion recesses 8, and the end surface 15 on the bottom wall surface 3 side of the protrusion 10 is connected to the bottom wall surface 3. Arranged in parallel In addition, the end face 16 on the mating member 20 side of the protrusion 10 is disposed in parallel with the mating member 20, and in the uncompressed state, the end faces 15 and 16 are fitted to face the end faces 15 and 16, respectively. Since the triangular gaps 19 and 19 are formed between the inclined surfaces 17 and 18 of the recess 8, the corrosion-resistant ring 6 can suppress the flow of the corrosive gas 21 toward the elastic seal body 7, and the elastic seal body 7 Can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side). Therefore, since the elastic seal body 7 is not deteriorated by the corrosive gas 21, the vacuum retention can be maintained for a long time, and the dust generation of the elastic seal body 7 due to the deterioration does not occur, so that impurities may adhere to the product. Disappear.
In addition, the end surface 15 on the bottom wall surface 3 side of the protrusion 10 is disposed in parallel with the bottom wall surface 3 and the end surface 16 on the mating member 20 side of the protrusion 10 is disposed in parallel with the mating member 20, so that compression is used. In this state, both end edges 12 and 13 of the corrosion-resistant ring 6 are surface-bonded to the bottom wall surface 3 and the mating member 20 (which have a wide contact area) to improve the sealing performance.
Further, since the triangular gaps 19 and 19 are formed between the end faces 15 and 16 of the elastic seal body 7 and the inclined surfaces 17 and 18 in the uncompressed state, the corrosion resistance is maintained in the compression use state. The projecting end portions 28 and 28 of the ring 6 do not bite into the elastic seal body 7 (projection portion 10) (stress concentration occurs), and as a result, cracks and the like that cause damage can be suppressed. The product life (maintaining characteristics such as sealing properties) can be extended.
Further, since the cross-sectional shape of the corrosion-resistant ring 6 is substantially C-shaped, it is easily compressed and elastically deformed, and can cope with an increase or decrease in the distance between the seal mounting member 23 and the mating member 20, and maintains a stable posture. However, the corrosive gas 21 can be prevented from coming into contact with the elastic seal body 7.

また、開口部４と、相互に開口部４側に近づくにつれて接近する第１側壁面１・第２側壁面２と、底壁面３とを、有する環状の蟻溝形の装着溝５内に装着される環状のシール材であって、腐食ガス収納室Ｚ側の第１側壁面１に対向して配設される耐腐食用リング６と、第２側壁面２側に配設される弾性シール本体７と、から成り、耐腐食用リング６は、装着未圧縮状態に於て第２側壁面２側に拡大しつつ開口する勾配面17，18を有する嵌込凹部８を備えた横断面形状略Ｃ字状であり、弾性シール本体７は、装着未圧縮状態の横断面に於て第２側壁面２側に膨出する弧状部９と、底壁面３側と開口部４に相対的に接近する相手部材20側にそれぞれ膨出する突隆部11，11と、嵌込凹部８内に挿嵌される突部10と、を有し、突部10の底壁面３側の端面15を底壁面３と平行に配設すると共に、突部10の相手部材20側の端面16を相手部材20と平行に配設し、装着未圧縮状態に於て、各端面15，16と各端面15，16に対向する嵌込凹部８の勾配面17，18との間に三角形状隙間19，19を形成したので、耐腐食用リング６は、腐食ガス21が弾性シール本体７側へ流れるのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。従って、弾性シール本体７は腐食ガス21によって劣化しないので、真空保持性を長期的に維持でき、かつ、その劣化による弾性シール本体７の発塵が起こらないので、製品に不純物が付着することがなくなる。
また、突部10の底壁面３側の端面15を底壁面３と平行に配設すると共に、突部10の相手部材20側の端面16を相手部材20と平行に配設したので、圧縮使用状態に於て、耐腐食用リング６の両端縁12，13は、底壁面３・相手部材20とそれぞれ（接触面積が広い）面的圧着して、密封性が向上する。
さらに、装着未圧縮状態に於て、弾性シール本体７の各端面15，16と勾配面17，18との間に三角形状隙間19，19を形成したので、圧縮使用状態に於て、耐腐食用リング６の両突出端部28，28が弾性シール本体７（の突部10）へ食い込む（応力集中が生じる）ことがなく、その結果、破損原因となるクラック等を抑制できるので、シール材としての製品寿命（シール性等の特性の維持）を長くすることができる。
また、耐腐食用リング６は横断面形状が略Ｃ字状であるので、圧縮弾性変形し易く、シール取付部材23と相手部材20との間隔の増減にも対応可能であり、安定姿勢を保ちつつ、腐食ガス21が弾性シール本体７に接触することを防ぎ得る。 Moreover, it mounts in the cyclic | annular dovetail-shaped mounting groove 5 which has the opening part 4, the 1st side wall surface 1 and the 2nd side wall surface 2, and the bottom wall surface 3 which approach as the opening part 4 side mutually approaches. The ring-shaped sealing material is an anti-corrosion ring 6 disposed opposite to the first side wall surface 1 on the corrosive gas storage chamber Z side, and an elastic seal disposed on the second side wall surface 2 side. The corrosion-resistant ring 6 comprises a main body 7 and has a cross-sectional shape with a fitting recess 8 having sloped surfaces 17 and 18 that open while expanding toward the second side wall surface 2 in an uncompressed state. The elastic seal main body 7 is substantially C-shaped, and the elastic seal main body 7 is relatively positioned relative to the arcuate portion 9 that bulges to the second side wall surface 2 side, the bottom wall surface 3 side, and the opening 4 in the cross section of the uncompressed state. The protrusions 11 and 11 bulge toward the approaching counterpart member 20 side, and the protrusion 10 inserted into the insertion recess 8, and the end surface 15 on the bottom wall surface 3 side of the protrusion 10 is In addition to being arranged in parallel with the bottom wall surface 3, the end face 16 on the mating member 20 side of the protrusion 10 is arranged in parallel with the mating member 20, and each end face 15, 16 and each end face 15 are in an uncompressed state. Since the triangular gaps 19 and 19 are formed between the sloped surfaces 17 and 18 of the fitting recess 8 that faces the fitting recess 8, the corrosion-resistant ring 6 prevents the corrosive gas 21 from flowing toward the elastic seal body 7 side. The elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side). Therefore, since the elastic seal body 7 is not deteriorated by the corrosive gas 21, the vacuum retention can be maintained for a long time, and the dust generation of the elastic seal body 7 due to the deterioration does not occur, so that impurities may adhere to the product. Disappear.
In addition, the end surface 15 on the bottom wall surface 3 side of the protrusion 10 is disposed in parallel with the bottom wall surface 3 and the end surface 16 on the mating member 20 side of the protrusion 10 is disposed in parallel with the mating member 20, so that compression is used. In this state, both end edges 12 and 13 of the corrosion-resistant ring 6 are surface-bonded to the bottom wall surface 3 and the mating member 20 (which have a wide contact area) to improve the sealing performance.
Further, since the triangular gaps 19 and 19 are formed between the end faces 15 and 16 of the elastic seal body 7 and the inclined surfaces 17 and 18 in the uncompressed state, the corrosion resistance is maintained in the compression use state. The projecting end portions 28 and 28 of the ring 6 do not bite into the elastic seal body 7 (projection portion 10) (stress concentration occurs), and as a result, cracks and the like that cause damage can be suppressed. The product life (maintaining characteristics such as sealing properties) can be extended.
Further, since the cross-sectional shape of the corrosion-resistant ring 6 is substantially C-shaped, it is easily compressed and elastically deformed, and can cope with an increase or decrease in the distance between the seal mounting member 23 and the mating member 20, and maintains a stable posture. However, the corrosive gas 21 can be prevented from coming into contact with the elastic seal body 7.

また、突隆部11，11は、装着溝５の底壁面３と相手部材20に圧接する平坦部14，14を有する横断面略矩形状としたので、圧縮使用状態に於て、平坦部14，14が底壁面３と相手部材20に確実に密着でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。 Further, since the protruding portions 11 and 11 have a substantially rectangular cross section having flat portions 14 and 14 that are in pressure contact with the bottom wall surface 3 of the mounting groove 5 and the mating member 20, the flat portions 14 are used in a compressed state. 14 can securely contact the bottom wall surface 3 and the mating member 20, and the elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side).

また、装着未圧縮状態に於て、底壁面３側の平坦部14は、耐腐食用リング６の底壁面３側の端縁12より底壁面３側へ突出し、相手部材20側の平坦部14は、耐腐食用リング６の相手部材20側の端縁13より相手部材20側へ突出して形成されたので、圧縮使用状態に於て、突隆部11，11が圧縮荷重により圧縮され潰されることにより、弾性シール本体７の平坦部14，14は底壁面３と相手部材20に高い面圧にて密着できる。これにより、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。 In the uncompressed state, the flat portion 14 on the bottom wall surface 3 side protrudes from the edge 12 on the bottom wall surface 3 side of the corrosion-resistant ring 6 toward the bottom wall surface 3 side, and the flat portion 14 on the mating member 20 side. Is formed so as to protrude from the edge 13 on the mating member 20 side of the anticorrosion ring 6 to the mating member 20 side, so that the ridges 11 and 11 are compressed and crushed by the compressive load in the compression use state. Thus, the flat portions 14 and 14 of the elastic seal body 7 can be in close contact with the bottom wall surface 3 and the mating member 20 with a high surface pressure. Thereby, the elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side).

また、装着未圧縮状態に於て、耐腐食用リング６の底壁面３・相手部材20側の両端縁12，13は、その接線Ｘ，Ｙが第２側壁面２側へ拡大する円弧状にそれぞれ形成されているので、圧縮使用状態に於て、耐腐食用リング６の両端縁12，13は、底壁面３・相手部材20とそれぞれ確実に圧着して、密封性を一層向上させることができる。 Further, in the uncompressed state of mounting, both end edges 12 and 13 on the bottom wall surface 3 and the mating member 20 side of the anticorrosion ring 6 have an arc shape whose tangent lines X and Y expand toward the second side wall surface 2 side. Since both are formed, both end edges 12 and 13 of the corrosion-resistant ring 6 can be securely bonded to the bottom wall surface 3 and the mating member 20 in a compressed use state to further improve the sealing performance. it can.

また、耐腐食用リング６はフッ素樹脂から成り、弾性シール本体７はフッ素ゴム又はシリコーンゴムから成るので、耐腐食用リング６は、耐腐食ガス性───耐反応ガス性及び耐プラズマ性───を長期的に維持でき、弾性シール本体７は、真空維持力（弾発力）を長期的に維持できる。このことにより、耐腐食用リング６と弾性シール本体７の劣化による発塵が起こらないので、製品に不純物が付着することがなくなる。 Further, since the corrosion-resistant ring 6 is made of fluororesin and the elastic seal body 7 is made of fluoro-rubber or silicone rubber, the corrosion-resistant ring 6 is resistant to corrosion gas—reaction gas resistance and plasma resistance— ── can be maintained over a long period of time, and the elastic seal body 7 can maintain a vacuum maintaining force (elastic force) over a long period of time. As a result, dust generation due to deterioration of the corrosion-resistant ring 6 and the elastic seal body 7 does not occur, so that impurities do not adhere to the product.

半導体製造装置用又は液晶パネルの表面処理装置に用いられるので、反応性ガス雰囲気下、酸素ガス雰囲気下、又は、反応性ガスと酸素ガスの混合気体雰囲気下に於て、耐腐食用リング６は、腐食ガス21が弾性シール本体７側に接触するのを抑止でき、弾性シール本体７は、大気22が腐食ガス21側（真空側）へ入り込むのを阻止できる。 Since it is used for a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus, the corrosion-resistant ring 6 can be used in a reactive gas atmosphere, an oxygen gas atmosphere, or a mixed gas atmosphere of a reactive gas and an oxygen gas. The corrosive gas 21 can be prevented from coming into contact with the elastic seal body 7 side, and the elastic seal body 7 can prevent the atmosphere 22 from entering the corrosive gas 21 side (vacuum side).

本発明の第１の実施の形態を示す装着未圧縮状態の断面図である。It is sectional drawing of the mounting | wearing uncompressed state which shows the 1st Embodiment of this invention. 自由状態を示す断面図であって、（Ａ）は耐腐食用リングの嵌込凹部に弾性シール本体の突部を嵌め込んだ状態の断面図、（Ｂ）は弾性シール本体の断面図、（Ｃ）は耐腐食用リングの断面図である。It is sectional drawing which shows a free state, Comprising: (A) is sectional drawing of the state which inserted the protrusion of the elastic seal main body in the insertion recessed part of the ring for corrosion resistance, (B) is sectional drawing of an elastic seal main body, C) is a cross-sectional view of a corrosion-resistant ring. 圧縮使用状態を示す断面図である。It is sectional drawing which shows a compression use state. 第２の実施の形態を示す装着未圧縮状態の断面図である。It is sectional drawing of the mounting | wearing uncompressed state which shows 2nd Embodiment. 自由状態を示す断面図であって、（Ａ）は弾性シール本体の断面図、（Ｂ）は耐腐食用リングの断面図である。It is sectional drawing which shows a free state, Comprising: (A) is sectional drawing of an elastic seal main body, (B) is sectional drawing of a ring for corrosion resistance. 第３の実施の形態を示す装着未圧縮状態の断面図である。It is sectional drawing of the mounting uncompressed state which shows 3rd Embodiment. 圧縮使用状態を示す断面図である。It is sectional drawing which shows a compression use state. 比較例を示す装着未圧縮状態の断面図である。It is sectional drawing of the mounting | wearing uncompressed state which shows a comparative example. 圧縮使用状態を示す断面図である。It is sectional drawing which shows a compression use state. 説明用の概略図である。It is a schematic diagram for explanation. 従来のシール材を示す断面図である。It is sectional drawing which shows the conventional sealing material.

Explanation of symbols

１第１側壁面
２第２側壁面
３底壁面
４開口部
５装着溝
６耐腐食用リング
７弾性シール本体
８嵌込凹部
９弧状部
10 突部
11 突隆部
12 端縁
13 端縁
14 平坦部
15 端面
16 端面
17 勾配面
18 勾配面
19 隙間
20 相手部材
Ｘ接線
Ｙ接線
Ｚ腐食ガス収納室 DESCRIPTION OF SYMBOLS 1 1st side wall surface 2 2nd side wall surface 3 Bottom wall surface 4 Opening part 5 Mounting groove 6 Corrosion-resistant ring 7 Elastic seal main body 8 Insertion recessed part 9 Arc-shaped part
10 protrusion
11 Ridge
12 Edge
13 Edge
14 Flat part
15 End face
16 End face
17 Inclined surface
18 Inclined surface
19 Clearance
20 Mating member X Tangent Y Tangent Z Corrosion gas storage chamber

Claims

An annular seal member mounted in an annular mounting groove (5) having an opening (4), a first side wall surface (1), a second side wall surface (2), and a bottom wall surface (3). Because
Corrosion-resistant ring (6) disposed opposite the first side wall surface (1) on the side of the corrosive gas storage chamber (Z), and an elastic seal body (located on the second side wall surface (2) side) 7)
The corrosion-resistant ring (6) includes a fitting recess (8) having sloped surfaces (17) and (18) that open while expanding toward the second side wall surface (2) in the uncompressed state. The elastic seal body (7) has an arcuate portion (9) that bulges toward the second side wall surface (2) in the transverse cross section in an uncompressed state, and the bottom Inserted into the ridges (11) and (11) that bulge to the wall (3) side and the counterpart member (20) side that is relatively close to the opening (4), and the fitting recess (8). A protrusion (10) to be fitted,
The end surface (15) on the bottom wall surface (3) side of the protrusion (10) is disposed in parallel with the bottom wall surface (3), and the end surface on the counterpart member (20) side of the protrusion (10). (16) is arranged in parallel with the mating member (20), and in the uncompressed state, the fitting recesses facing the end faces (15) (16) and the end faces (15) (16) A sealing material characterized in that triangular gaps (19) and (19) are formed between the inclined surfaces (17) and (18) of (8).

An annular ant having an opening (4), a first side wall surface (1), a second side wall surface (2), and a bottom wall surface (3) approaching each other toward the opening (4) side. An annular sealing material mounted in the groove-shaped mounting groove (5),
Corrosion-resistant ring (6) disposed opposite the first side wall surface (1) on the side of the corrosive gas storage chamber (Z), and an elastic seal body (located on the second side wall surface (2) side) 7)
The corrosion-resistant ring (6) includes a fitting recess (8) having sloped surfaces (17) and (18) that open while expanding toward the second side wall surface (2) in the uncompressed state. The elastic seal body (7) has an arcuate portion (9) that bulges toward the second side wall surface (2) in the transverse cross section in an uncompressed state, and the bottom Inserted into the ridges (11) and (11) that bulge to the wall (3) side and the counterpart member (20) side that is relatively close to the opening (4) and the fitting recess (8). A projection (10) to be fitted,
An end surface (15) on the bottom wall surface (3) side of the protrusion (10) is disposed in parallel with the bottom wall surface (3), and an end surface on the counterpart member (20) side of the protrusion (10). (16) is arranged in parallel with the mating member (20), and in the uncompressed state, the fitting recesses facing the end faces (15) (16) and the end faces (15) (16) A sealing material characterized in that triangular gaps (19) and (19) are formed between the inclined surfaces (17) and (18) of (8).

The ridges (11) and (11) are substantially rectangular in cross section having flat surfaces (14) and (14) that are in pressure contact with the bottom wall surface (3) of the mounting groove (5) and the mating member (20). The sealing material according to claim 1 or 2.

In the uncompressed state, the flat portion (14) on the bottom wall surface (3) side has a bottom wall surface (3) from the edge (12) on the bottom wall surface (3) side of the anticorrosion ring (6). ) Side and the flat part (14) on the mating member (20) side faces the mating member (20) side from the edge (13) on the mating member (20) side of the anticorrosion ring (6). The sealing material according to claim 3, which is formed to project.

In the uncompressed state of attachment, the tangents (X) and (Y) of the both ends (12) and (13) on the bottom wall (3) and mating member (20) side of the anticorrosion ring (6) are The sealing material according to claim 1, 2, 3, or 4, wherein the sealing material is formed in an arc shape that expands toward the second side wall surface (2).

The sealing material according to claim 1, 2, 3, 4 or 5, wherein the corrosion-resistant ring (6) is made of a fluororesin, and the elastic seal body (7) is made of fluororubber or silicone rubber.

The sealing material according to claim 1, 2, 3, 4, 5 or 6, which is used for a semiconductor manufacturing apparatus or a liquid crystal panel surface treatment apparatus.