JP4570436B2 - Metal mesh and wiring pattern transfer sheet - Google Patents

Metal mesh and wiring pattern transfer sheet Download PDF

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JP4570436B2
JP4570436B2 JP2004297304A JP2004297304A JP4570436B2 JP 4570436 B2 JP4570436 B2 JP 4570436B2 JP 2004297304 A JP2004297304 A JP 2004297304A JP 2004297304 A JP2004297304 A JP 2004297304A JP 4570436 B2 JP4570436 B2 JP 4570436B2
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metal
silver
fine
support
wiring pattern
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JP2006111889A (en
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和久 小林
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Mitsubishi Paper Mills Ltd
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本発明は、金属メッシュおよび配線パタンに関し、特に細線から成り光透過性が高く、かつ自立した金属メッシュ、および様々な支持体に転写することができる微細配線パタン転写シートに関する。   The present invention relates to a metal mesh and a wiring pattern, and more particularly to a metal mesh that is made of fine wires and has high light transmittance and is self-supporting, and a fine wiring pattern transfer sheet that can be transferred to various supports.

近年、無線ネットワーク、RF−IDといった電磁波の高度な利用が活発になってきたため、電子機器等のEMC対策が急務となってきた。その中でも、プラズマディスプレーパネルや窓ガラスなどに用いるための透明性を有するシールド材の要望が高まっている。このような用途には、金属ワイヤを格子状に編んだ金網や、特に高い透明性が求められる場合、ポリエステル等の透明基材上に細線金属メッシュを形成させたものなどが用いられている。   In recent years, since advanced use of electromagnetic waves such as wireless networks and RF-IDs has become active, EMC countermeasures for electronic devices and the like have become urgent. Among them, there is an increasing demand for a shielding material having transparency for use in plasma display panels and window glass. For such applications, a wire mesh knitted in a metal wire or a metal wire mesh formed on a transparent base material such as polyester is used when particularly high transparency is required.

このような細線金属メッシュを形成させる方法としては、樹脂上に貼付あるいは形成させた金属箔にフォトレジストを塗布し、像様露光したのち、現像、エッチング、レジスト剥離を行うといった方法が一般的である。さらに例えば特開2000−196285号公報には、導電性ペーストを印刷し、無電解めっきを施すことにより、導電性パタンを形成する方法が開示されている。また、特開2000−261186号公報には、無電解めっき触媒用金属粒子を一様に支持体表面に設け、さらにその上にフォトレジスト層を設けたのち、ウエットプロセスにてパタン形成し、無電解めっき、レジスト剥離により導電性パタンを形成させる方法が開示されている。   As a method for forming such a fine metal mesh, a method is generally used in which a photoresist is applied to a metal foil affixed or formed on a resin, imagewise exposed, and then developed, etched, and resist stripped. is there. Further, for example, Japanese Patent Laid-Open No. 2000-196285 discloses a method of forming a conductive pattern by printing a conductive paste and performing electroless plating. Japanese Patent Laid-Open No. 2000-261186 discloses a method in which metal particles for electroless plating catalyst are uniformly provided on the surface of a support and a photoresist layer is further provided thereon, followed by pattern formation by a wet process. A method of forming a conductive pattern by electrolytic plating or resist stripping is disclosed.

しかしながら上記のいずれの方法では自立した細線金属メッシュを形成させることは困難である。自立したメッシュを形成させる技術としては、特許文献1に、フォトレジストを用いた方法が開示されているが、工程が複雑で、薄膜化が金属箔に制限される、などの問題点から、自立した薄い細線金属メッシュを簡易な方法で得ることが強く求められてきた。   However, it is difficult to form a self-supporting fine wire metal mesh by any of the above methods. As a technique for forming a self-supporting mesh, Patent Document 1 discloses a method using a photoresist. However, since the process is complicated and thinning is limited to metal foil, it is self-supporting. There has been a strong demand for obtaining a thin metal mesh with a simple method.

また近年、電子機器の小型化が進んでいるが、これらを実現するためにはプリント基板の多層化、回路の高密度化が必要である。このような目的のためにはビルドアップ法と呼ばれる方法により多層配線基板が作成される。これは回路パタンを有する基板上に絶縁層、銅箔を積層しさらに回路パタンを形成、層間はビアホールを介して電気的接続をとり、これを繰り返すことにより多層構造の配線基板が得られる。   In recent years, electronic devices have been miniaturized, and in order to realize these, it is necessary to increase the number of printed circuit boards and the density of circuits. For this purpose, a multilayer wiring board is produced by a method called a build-up method. This is because a circuit pattern is formed by laminating an insulating layer and a copper foil on a substrate having a circuit pattern, and electrical connection is made between the layers via via holes. By repeating this, a multilayered wiring substrate is obtained.

この方法で、ファインパタンを得るためには、特許文献2に、積層する絶縁層上に。直接回路パタンを転写する方法が開示されているが、転写シートの作成には複雑な工程が必要で、かつ膜厚が金属箔の厚みに制限されるなど、改善が求められている。
特開2002−275661号公報 特開平10―178255号公報
In order to obtain a fine pattern by this method, it is disclosed in Patent Document 2 on an insulating layer to be laminated. Although a method for directly transferring a circuit pattern has been disclosed, the creation of a transfer sheet requires a complicated process, and improvements are required such that the film thickness is limited to the thickness of the metal foil.
JP 2002-275661 A Japanese Patent Laid-Open No. 10-178255

本発明の目的は、容易な工程で、自立した薄い細線金属メッシュを提供することである。本発明の他の目的は、容易な工程で、薄膜の金属パタンを、接着剤を用い別の支持体に転写することができる微細配線パタン転写シートを提供することである。   An object of the present invention is to provide a thin metal metal mesh that is self-supporting in an easy process. Another object of the present invention is to provide a fine wiring pattern transfer sheet capable of transferring a thin metal pattern to another support using an adhesive in an easy process.

1.タンパク質含有下引き層を有する支持体上に、ハロゲン化銀拡散転写法により形成された銀細線格子画像を金属でめっきし、タンパク質分解酵素を含有する液を作用させ、そのめっきされた金属細線格子画像を支持体から剥離することによって得られる自立細線金属メッシュ。   1. A silver fine wire lattice image formed by silver halide diffusion transfer method is plated with a metal on a support having a protein-containing undercoat layer, and a solution containing a proteolytic enzyme is allowed to act thereon. A self-supporting fine metal mesh obtained by peeling an image from a support.

2.タンパク質含有下引き層を有する支持体上に、ハロゲン化銀拡散転写法により形成された微細銀配線パタンを金属でめっきし、タンパク質分解酵素を含有する液を作用させ、そのめっきされた金属微細配線パタンを、接着剤を用い別の支持体に転写することができる微細配線パタン転写シート。   2. On a support having a protein-containing undercoat layer, a fine silver wiring pattern formed by silver halide diffusion transfer method is plated with a metal, and a solution containing a proteolytic enzyme is allowed to act thereon, so that the plated metal fine wiring A fine wiring pattern transfer sheet capable of transferring a pattern to another support using an adhesive.

本発明により、薄層で、細線からなり光透過率が高い自立金属メッシュを簡易な方法で提供することができる。また、接着剤を用い薄層で、微細な金属配線を別の支持体に転写することができる微細配線パタン転写シートを、簡易な方法で提供することができる。   According to the present invention, it is possible to provide a self-supporting metal mesh which is a thin layer and is made of a thin line and has a high light transmittance by a simple method. In addition, a fine wiring pattern transfer sheet that can transfer a fine metal wiring to another support with a thin layer using an adhesive can be provided by a simple method.

以下、本発明を詳細に説明する。本発明において、銀細線格子画像や微細銀配線パタンは、ハロゲン化銀拡散転写法により形成される。この技術による導電性銀膜形成方法は、特開2003−77350号公報に記載されているように、支持体にあらかじめ物理現像核として、パラジウム等の重金属あるいはその硫化物を含む層が設けられ、その上にハロゲン化銀乳剤層を設ける。そのハロゲン化銀乳剤層に像様露光を与え、可溶性銀錯塩形成剤および還元剤を含むアルカリ現像液で処理することにより、未露光部のハロゲン化銀乳剤から供給される銀イオンが、物理現像核上に析出し導電性の銀膜が像様に形成されるものである。   Hereinafter, the present invention will be described in detail. In the present invention, the silver fine wire lattice image and the fine silver wiring pattern are formed by a silver halide diffusion transfer method. As described in JP-A-2003-77350, the method for forming a conductive silver film by this technique is provided with a layer containing a heavy metal such as palladium or a sulfide thereof as a physical development nucleus in advance on a support, A silver halide emulsion layer is provided thereon. By subjecting the silver halide emulsion layer to imagewise exposure and processing with an alkaline developer containing a soluble silver complex salt forming agent and a reducing agent, the silver ions supplied from the unexposed silver halide emulsion are physically developed. A conductive silver film is deposited on the nucleus to form an image.

本発明において支持体は、タンパク質含有下引き層を有する。具体的にはゼラチン、アルブミン、カゼインあるいはこれらの混合物が好ましく用いられる。層中のタンパク質の量は、1mあたり10〜300mgが好ましい。本発明において物理現像核は、あらかじめこのタンパク質含有下引き層に含有させても良いし、またタンパク質含有下引き層を塗設後に含浸させても、該下引き層上に物理現像核を含有する層を設けてもよい。 In the present invention, the support has a protein-containing subbing layer. Specifically, gelatin, albumin, casein or a mixture thereof is preferably used. The amount of protein in the layer is preferably 10 to 300 mg per 1 m 2 . In the present invention, the physical development nuclei may be previously contained in the protein-containing undercoat layer, or even if the protein-containing undercoat layer is impregnated after coating, the physical development nuclei are contained on the undercoat layer. A layer may be provided.

本発明に用いられる樹脂支持体としては、具体的には、ポリエチレンテレフタレート、ポリエチレンナフタレート等のポリエステル樹脂、トリアセチルセルロース、ジアセチルセルロース等のセルロース樹脂、ポリカーボネート樹脂、ポリイミド樹脂等が挙げられる。これらの支持体にタンパク質含有下引き層を設けるために、親水性基を有するポリ塩化ビニリデンやポリウレタンなどを含む易接着層をあらかじめ設けてもよい。またタンパク質含有下引き層を設ける前に、放電処理を行うことは好ましい。放電処理としては、コロナ放電処理、プラズマ放電処理、大気圧グロー放電処理などが挙げられるが、インライン処理が容易で、均一性の高いコロナ放電処理を行うことが特に好ましい。   Specific examples of the resin support used in the present invention include polyester resins such as polyethylene terephthalate and polyethylene naphthalate, cellulose resins such as triacetyl cellulose and diacetyl cellulose, polycarbonate resins, and polyimide resins. In order to provide a protein-containing undercoat layer on these supports, an easy-adhesion layer containing polyvinylidene chloride having a hydrophilic group, polyurethane, or the like may be provided in advance. Moreover, it is preferable to perform a discharge treatment before providing the protein-containing undercoat layer. Examples of the discharge treatment include corona discharge treatment, plasma discharge treatment, atmospheric pressure glow discharge treatment, and the like, but it is particularly preferable to perform corona discharge treatment with high in-line treatment and high uniformity.

本発明では、得られた銀細線格子画像や微細銀配線パタンは、金属によりめっきされる。金属の種類は、目的によって選ばれ、特に限定されないが、金、銀、銅、スズ、ニッケル、クロム、またはこれらの合金などがあげられる。まためっき層は、多層構造をとっても良い。めっきの厚みも目的に応じて任意に選びうるが、自立膜を形成する、あるいは破壊されずに転写されるためには0.5ミクロン以上が好ましく、さらに好ましくは1〜6ミクロンである。   In the present invention, the obtained silver fine wire lattice image and fine silver wiring pattern are plated with metal. The type of metal is selected according to the purpose and is not particularly limited, and examples thereof include gold, silver, copper, tin, nickel, chromium, and alloys thereof. The plating layer may have a multilayer structure. Although the thickness of the plating can be arbitrarily selected according to the purpose, it is preferably 0.5 microns or more, more preferably 1 to 6 microns in order to form a free-standing film or to be transferred without being destroyed.

めっきの方法には特に限定はなく、格子パタンのように全体に導通のとれる場合は電解めっき、無電解めっきが、電気的に孤立した部分を持ちうる配線パタンの場合には無電解めっきが選ばれる。具体的なめっきの方法は、例えば「最新表面処理技術総覧」(株)産業技術サービスセンター発行(昭和62年12月21日初版)などに詳しく記述されている。   There is no particular limitation on the plating method, and electroplating and electroless plating are selected when the whole is conductive like a lattice pattern, and electroless plating is selected when the wiring pattern has an electrically isolated portion. It is. Specific plating methods are described in detail in, for example, “Latest Surface Treatment Technology Overview” published by Industrial Technology Service Center Co., Ltd. (first edition, December 21, 1987).

本発明において、めっきされた画像をタンパク質含有下引き層上に有するシートは、タンパク質分解酵素を含有する液(以下、酵素液)を作用させることにより、めっきされた画像と支持体との接着力が弱められる。このタンパク質分解酵素は、ゼラチンなどのタンパク質を加水分解できる植物性または動物性酵素で、公知のものが用いられる。例えば、ペプシン、レンニン、トリプシン、キモトリプシン、カテプシン、パパイン、フィシン、トロンビン、レニン、コラゲナーゼ、ブロメライン、細菌プロティナーゼ等が挙げられる。この中でも特に、トリプシン、パパイン、フィシン、細菌プロティナーゼが好ましい。酵素液中の酵素の含有量は、0.2〜10g/L程度が適当である。   In the present invention, the sheet having the plated image on the protein-containing subbing layer has a bonding force between the plated image and the support by the action of a solution containing a proteolytic enzyme (hereinafter referred to as an enzyme solution). Is weakened. This proteolytic enzyme is a plant or animal enzyme that can hydrolyze proteins such as gelatin, and known ones are used. Examples include pepsin, rennin, trypsin, chymotrypsin, cathepsin, papain, ficin, thrombin, renin, collagenase, bromelain, bacterial proteinase and the like. Of these, trypsin, papain, ficin, and bacterial proteinase are particularly preferable. The content of the enzyme in the enzyme solution is suitably about 0.2 to 10 g / L.

この酵素液には、上記酵素に加え、pH緩衝剤、抗菌性化合物、湿潤剤、保恒剤など必要に応じて含有させることができる。酵素液のpHは、酵素の働きが最大限得られるように実験により選ばれるが、一般に5〜7であることが好ましい。また酵素液の温度も酵素の働きが高まる温度、具体的には25〜45℃であることが好ましい。酵素液を作用させるには、シートを酵素液中に浸せきさせる、過剰の液をシート上にのせる、あるいはスプレー状にシートに吹き付けるなどの方法がある。   In addition to the above enzyme, this enzyme solution can contain a pH buffer, an antibacterial compound, a wetting agent, a preservative, and the like as necessary. The pH of the enzyme solution is selected by experiment so as to obtain the maximum function of the enzyme, but is generally preferably 5 to 7. The temperature of the enzyme solution is also preferably a temperature at which the action of the enzyme is increased, specifically 25 to 45 ° C. In order to make the enzyme solution act, there are methods such as immersing the sheet in the enzyme solution, placing excess liquid on the sheet, or spraying the sheet in a spray form.

自立膜作成の場合は、シート端の両面にリードフィルムを粘着させ、2枚のリードフィルムを慎重に引くことにより支持体と自立膜を分離させることができる。この場合、酵素液を作用させ、水洗乾燥させたのちにこの操作を行っても良いし、酵素液中で引きはがしても良い。他の支持体へ転写を行うには、シートに紫外線硬化型樹脂を塗布して、他の支持体に圧着して、シートの、金属と反対側から紫外線照射をして金属と支持体を剥離する、あるいは他の支持体にブチラール樹脂などを塗布し、本発明のシートと合わせて熱圧着したのち金属と支持体を剥離する方法などが挙げられる。   In the case of producing a self-supporting film, the support film and the self-supporting film can be separated by sticking the lead film to both sides of the sheet edge and carefully drawing the two lead films. In this case, this operation may be performed after the enzyme solution is acted, washed with water and dried, or may be peeled off in the enzyme solution. To transfer to another support, apply UV curable resin to the sheet, press it to the other support, and irradiate the sheet with UV light from the opposite side of the metal to peel the metal and support. Or a method in which a butyral resin or the like is applied to another support and thermocompression bonded together with the sheet of the present invention, and then the metal and the support are peeled off.

以下実施例によって本発明を更に詳しく説明するが、本発明はこの実施例に限定されるものではない。   Hereinafter, the present invention will be described in more detail by way of examples. However, the present invention is not limited to these examples.

厚み100ミクロンのポリエチレンテレフタレートフィルム両面上に以下の下引き層を設けた。なお部数は全て固形分質量換算である。
下塗り第1層:塩化ビニリデンラテックス(旭化成工業製、L−536B、ビニリデン含有率90%以上)、100部、乾燥膜厚0.3ミクロン。
下塗り第2層:石灰処理ゼラチン、100部、乾燥膜厚0.15ミクロン。
The following undercoat layers were provided on both sides of a polyethylene terephthalate film having a thickness of 100 microns. All parts are in terms of solid mass.
Undercoat first layer: vinylidene chloride latex (manufactured by Asahi Kasei Corporation, L-536B, vinylidene content 90% or more), 100 parts, dry film thickness 0.3 microns.
Undercoat second layer: lime-processed gelatin, 100 parts, dry film thickness 0.15 microns.

このようにして準備した、下引き層を有するポリエチレンテレフタレートフィルム上にまず、露光波長に吸収極大をもつ染料を含有するアンチハレーション層塗布液を塗布した。引き続き、アンチハレーション層の反対側に、下記の物理現像核層塗液を、硫化パラジウムが固形分で0.4mg/mになるように塗布し、乾燥した。
<硫化パラジウムゾルの調製>
A液 塩化パラジウム 5g
塩酸 40ml
蒸留水 1000ml
B液 硫化ソーダ 8.6g
蒸留水 1000ml
A液とB液を撹拌しながら混合し、30分後にイオン交換樹脂の充填されたカラムに通し硫化パラジウムゾルを得た。
<物理現像核層塗液の調製>
前記硫化パラジウムゾル 50ml
2質量%のグルタルアルデヒド溶液 20ml
界面活性剤 1g
水を加えて全量を2000mlとする。
First, an antihalation layer coating solution containing a dye having an absorption maximum at the exposure wavelength was applied onto the polyethylene terephthalate film having an undercoat layer prepared as described above. Subsequently, the following physical development nucleus layer coating solution was applied to the opposite side of the antihalation layer so that palladium sulfide was 0.4 mg / m 2 in solid content, and dried.
<Preparation of palladium sulfide sol>
Liquid A Palladium chloride 5g
Hydrochloric acid 40ml
1000ml distilled water
B liquid sodium sulfide 8.6g
1000ml distilled water
Liquid A and liquid B were mixed with stirring, and 30 minutes later, the solution was passed through a column filled with an ion exchange resin to obtain palladium sulfide sol.
<Preparation of physical development nucleus layer coating solution>
50 ml of palladium sulfide sol
20% 2% glutaraldehyde solution
Surfactant 1g
Add water to make a total volume of 2000 ml.

続いて、下記組成のハロゲン化銀乳剤層を銀量で3.0g/mとなるように、および不定形シリカマット剤を含む保護層をゼラチン量で1.0g/mとなるように、上記物理現像核層の上にスライド同時塗布した。ハロゲン化銀乳剤は、写真用ハロゲン化銀乳剤の一般的なダブルジェット混合法で製造した。このハロゲン化銀乳剤は、塩化銀95モル%と臭化銀5モル%で、平均粒径が0.1μmになるように調製した。 Subsequently, the silver halide emulsion layer having the following composition is 3.0 g / m 2 in terms of silver, and the protective layer containing the amorphous silica matting agent is 1.0 g / m 2 in terms of gelatin. The slide was simultaneously applied onto the physical development nucleus layer. The silver halide emulsion was prepared by a general double jet mixing method for photographic silver halide emulsions. This silver halide emulsion was prepared so that the average grain size was 0.1 μm with 95 mol% of silver chloride and 5 mol% of silver bromide.

このようにして得た光画像記録材料を、水銀灯を光源とする密着プリンターで400nm以下の光をカットする樹脂フィルターを介し、線幅25ミクロン、線間隔300ミクロンの格子の透過原稿を密着させて露光し、続いて、下記のアルカリ液(銀錯塩拡散転写用現像液)中に25℃で40秒間浸漬した後、続いてハロゲン化銀乳剤層、保護層および裏面のアンチハレーション層を温水で水洗除去して、導電性銀格子パタンを形成させた。   The optical image recording material thus obtained is brought into close contact with a transmission original having a line width of 25 microns and a line interval of 300 microns through a resin filter that cuts light of 400 nm or less with a contact printer using a mercury lamp as a light source. After exposure, it was immersed in the following alkaline solution (silver complex diffusion transfer developer) at 25 ° C. for 40 seconds, and then the silver halide emulsion layer, the protective layer and the antihalation layer on the back surface were washed with warm water. Removed to form a conductive silver lattice pattern.

<アルカリ液>
水酸化ナトリウム 20g
ハイドロキノン 20g
1−フェニル−3−ピラゾリドン 2g
亜硫酸ナトリウム 30g
モノメチルエタノールアミン 10g
全量を水で1000ml
pH=13に調整する。
<Alkaline solution>
Sodium hydroxide 20g
Hydroquinone 20g
1-phenyl-3-pyrazolidone 2g
Sodium sulfite 30g
10g monomethylethanolamine
Total volume 1000ml with water
Adjust to pH = 13.

こうして得られた導電性銀格子パタンに、下記の硫酸銅めっき液を用いて、銅の厚みが4ミクロンとなるようにめっきを行った。
<硫酸銅めっき液>
硫酸銅・5水和物 220g
硫酸 60g
1N塩酸 1.4ml
全量を水で1000ml
めっきされたシートは、引き続き下記の酵素液に40℃で5分間浸せきし、水洗乾燥させた。酵素液のpHは7.0であった。
<酵素液>
水 900ml
85%オルトリン酸 7.4g
トリエタノールアミン 20g
タンパク質分解酵素※ 2g
全量を水で1000ml
※)細菌プロティナーゼ:長瀬産業(株)製、ビオプラーゼAL15
The conductive silver lattice pattern thus obtained was plated using the following copper sulfate plating solution so that the copper thickness was 4 microns.
<Copper sulfate plating solution>
Copper sulfate pentahydrate 220g
60g of sulfuric acid
1N hydrochloric acid 1.4ml
Total volume 1000ml with water
The plated sheet was subsequently immersed in the following enzyme solution at 40 ° C. for 5 minutes, washed with water and dried. The pH of the enzyme solution was 7.0.
<Enzyme solution>
900ml water
7.4 g of 85% orthophosphoric acid
20g triethanolamine
Proteolytic enzyme * 2g
Total volume 1000ml with water
*) Bacterial proteinase: Biolase AL15, manufactured by Nagase Sangyo Co., Ltd.

酵素液で処理したシートの端の両面にリードフィルムを粘着させ、静かに2枚のリードフィルムを引くことにより、自立した厚み4ミクロン、線幅25ミクロン、線間隔300ミクロンの銅メッシュを得ることができた。   By sticking the lead film to both sides of the edge of the sheet treated with the enzyme solution and gently drawing the two lead films, a self-supporting copper mesh with a thickness of 4 microns, a line width of 25 microns, and a line spacing of 300 microns can be obtained. I was able to.

実施例1と同様の方法で得た線幅/線間隔50ミクロンの銀回路パタンを、メルテックス(株)製、厚付け用高速無電解銅めっき液、メルプレートCU−5100を用いて、厚さ約1ミクロンの回路パタンを得た。このシートを、実施例1と同様の方法で酵素液処理、水洗乾燥し、このシートの回路パタン側を、ガラスエポキシからなる半硬化状態の絶縁シートにあわせ、加熱プレスを行い、シートの支持体を静かに剥離することにより、絶縁シート上に転写された回路パタンが得られた。   A silver circuit pattern having a line width / line interval of 50 microns obtained by the same method as in Example 1 was obtained using Meltex Co., Ltd., high-speed electroless copper plating solution for thickening, and Melplate CU-5100. A circuit pattern of about 1 micron was obtained. The sheet was treated with an enzyme solution in the same manner as in Example 1, washed with water and dried, and the circuit pattern side of this sheet was aligned with a semi-cured insulating sheet made of glass epoxy, and heated and pressed to provide a sheet support. The circuit pattern transferred onto the insulating sheet was obtained by gently peeling the film.

実施例1と同様の方法で、線幅60ミクロンの蛇行した回路パタンを得たのち、下記のニッケルめっき浴で電解ニッケルめっきすることにより、厚み5ミクロンのニッケル回路パタンを得た。このシートを、実施例1と同様の方法で酵素液処理、水洗乾燥し、転写シートを得た。このシートを、あらかじめポリビニルブチラールを塗布したソーダライムガラスと密着させ、熱プレスを行なったのち、支持体を静かに剥離することにより、ガラスと一体化した回路パタンが得られた。このパタンは防曇用ヒーターや、窓からの破壊侵入を防ぐセンサーとして利用できる。
<ニッケルめっき液>
硫酸ニッケル 300g
塩化ニッケル 50g
ホウ酸 40g
全量を水で1000ml
A meandering circuit pattern having a line width of 60 microns was obtained by the same method as in Example 1, and then nickel nickel was patterned by electrolytic nickel plating in the following nickel plating bath to obtain a nickel circuit pattern having a thickness of 5 microns. This sheet was treated with an enzyme solution, washed with water and dried in the same manner as in Example 1 to obtain a transfer sheet. The sheet was brought into close contact with soda lime glass previously coated with polyvinyl butyral, subjected to hot pressing, and then the support was gently peeled to obtain a circuit pattern integrated with the glass. This pattern can be used as an anti-fogging heater or a sensor that prevents destructive intrusion from windows.
<Nickel plating solution>
Nickel sulfate 300g
Nickel chloride 50g
40g boric acid
Total volume 1000ml with water

本発明の活用例として、自立金属メッシュでは、電磁波シールド用途に加え、精密ふるいや、スクリーン印刷用メッシュなどが挙げられる。また転写シートの活用例としては、プリント基板やヒーターといった能動素子用途に加え、ICカードや、車の窓ガラス上のアンテナ等の受動素子用途が挙げられる。   As an application example of the present invention, in the case of a self-supporting metal mesh, in addition to the electromagnetic wave shielding application, a precision sieve, a screen printing mesh, and the like can be given. In addition to active element applications such as printed circuit boards and heaters, transfer sheet applications include passive element applications such as IC cards and antennas on car window glass.

Claims (2)

タンパク質含有下引き層を有する支持体上に、ハロゲン化銀拡散転写法により形成された銀細線格子画像を金属でめっきし、タンパク質分解酵素を含有する液を作用させ、そのめっきされた金属細線格子画像を支持体から剥離することによって得られる自立細線金属メッシュ。   A silver fine wire lattice image formed by silver halide diffusion transfer method is plated with a metal on a support having a protein-containing undercoat layer, and a solution containing a proteolytic enzyme is allowed to act thereon. A self-supporting fine metal mesh obtained by peeling an image from a support. タンパク質含有下引き層を有する支持体上に、ハロゲン化銀拡散転写法により形成された微細銀配線パタンを金属でめっきし、タンパク質分解酵素を含有する液を作用させ、そのめっきされた金属微細配線パタンを、接着剤を用い別の支持体に転写することができる微細配線パタン転写シート。   On a support having a protein-containing undercoat layer, a fine silver wiring pattern formed by silver halide diffusion transfer method is plated with a metal, and a solution containing a proteolytic enzyme is allowed to act thereon, so that the plated metal fine wiring A fine wiring pattern transfer sheet capable of transferring a pattern to another support using an adhesive.
JP2004297304A 2004-10-12 2004-10-12 Metal mesh and wiring pattern transfer sheet Expired - Fee Related JP4570436B2 (en)

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JP5079369B2 (en) * 2007-03-30 2012-11-21 藤森工業株式会社 Frequency selective shielding type electromagnetic shielding laminate
JP5189815B2 (en) * 2007-09-28 2013-04-24 三菱製紙株式会社 Manufacturing method of conductive material
JP2011513890A (en) * 2007-12-20 2011-04-28 シーマ ナノ テック イスラエル リミティド Microstructured material and method for manufacturing the same
JP5400826B2 (en) * 2011-04-08 2014-01-29 三井金属鉱業株式会社 Composite metal foil and manufacturing method thereof
US8960899B2 (en) * 2012-09-26 2015-02-24 Google Inc. Assembling thin silicon chips on a contact lens

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