JP4420000B2 - Optical device manufacturing method and inspection device - Google Patents

Description

  The present invention relates to an optical device, a manufacturing method thereof, and an inspection apparatus.

As an optical device including a layer made of a functional material, for example, there is a color filter having a predetermined color layer (color material layer). Also, some optical devices conventionally employ a structure in which an optical functional material layer (such as a color material layer) and a lens (microlens) are combined in order to improve optical performance. (For example, refer to Patent Document 1).
Japanese Patent Laid-Open No. 3-63626 (pages 1 to 3 and FIG. 3)

  In the optical device having the structure described above, when there are a plurality of functional material layers, lenses are individually arranged for each of the plurality of functional material layers. In such an optical device manufacturing method, a plurality of functional material layers and a lens body including a plurality of lenses corresponding thereto are separately formed, and then they are aligned and bonded to each other.

  However, in the above manufacturing method, it is difficult to accurately align the optical center of the lens with respect to all of the plurality of functional material layers, and misalignment is likely to occur. The above-described misalignment tends to cause a decrease in optical performance and causes display quality variations.

The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a manufacturing method that can manufacture a high-performance optical device with little misalignment between the optical functional material and the lens. .
Another object of the present invention is to provide an optical device with improved optical performance.
Another object of the present invention is to provide a display device with improved display performance.
Another object of the present invention is to provide an electronic device with improved quality and an inspection device with improved testability.

The optical device manufacturing method of the present invention is a method of manufacturing an optical device including a step of disposing a reactive agent (functional material) for a biochip in a predetermined region on a substrate, and a bank that partitions the predetermined region The method includes a step of forming a lens using a liquid lens material therein, and a step of disposing a reagent (functional material) for the biochip in the bank.
The step of forming a lens using the liquid lens material includes, for example, a step of disposing the liquid lens material in the bank and a step of drying the lens material.
In the optical device manufacturing method described above, the functional material and the lens material are both disposed in the region partitioned by the bank, so that the functional material and the lens are reliably stacked in the bank. That is, the bank prevents misalignment between the optical functional material and the lens. Therefore, an optical device with high optical performance can be manufactured.

The method for manufacturing an optical device may include a step of processing the surface of the bank to make the lens material lyophobic or lyophilic before the lens material is arranged.
Here, the liquid repellency is a characteristic that shows non-affinity with respect to the lens material, and the lyophilic property is a characteristic that shows affinity with the lens material.
For example, when the surface of the bank is processed to be liquid repellent, a convex lens can be formed in the partitioned region using surface tension.
Further, by processing the surface of the bank to be lyophilic, a concave lens can be formed in the partitioned area by utilizing surface tension.

In the optical device manufacturing method, a droplet discharge method of discharging a liquid material into droplets may be used for arranging at least one of the functional material and the lens material.
By ejecting the liquid material in the form of droplets, the functional material or the lens material can be reliably arranged in the region partitioned by the bank.
Furthermore, in the above-described optical device manufacturing method, a droplet discharge method of discharging a liquid material in the form of droplets may be used in order to arrange the banks that partition the predetermined region.

In the optical device manufacturing method, the planar shape of the region defined by the bank may be a polygon, an ellipse, or a substantially circular shape.
When the planar shape of the partitioned area is a polygon, an ellipse, or a substantially circular shape, surface tension effectively acts on the formation of a lens having a curved surface.

In the method for manufacturing an optical device described above, the functional material may be a color material for a color filter.
In this case, the performance of the color filter can be improved.

In the method for manufacturing an optical device, the functional material may be a biochip reactant.
In this case, the detection performance is improved by improving the optical performance.
In addition, the inspection device using the inspection substrate manufactured by this optical device manufacturing method can improve the inspection performance.

The optical device of the present invention is an optical device in which a functional material is disposed in a predetermined region on a substrate, and is disposed in a bank that partitions the region in which the functional material is disposed, and a region partitioned by the bank. And a lens laminated with the functional material.
According to the optical device described above, since the functional material and the lens material are both disposed in the area partitioned by the bank, the functional material and the lens are securely stacked in the bank, and thereby the optical function Misalignment between the material and the lens is prevented. Therefore, the optical performance can be improved.

A display device according to the present invention includes a color filter manufactured by the method for manufacturing an optical device described above.
According to the above display device, the performance of the color filter can be improved, so that the display performance can be improved.

An electronic apparatus according to the present invention includes the display device described above.
According to the electronic apparatus, since the display device having excellent display performance is provided, the quality can be improved.

  FIGS. 1A to 1E are diagrams schematically illustrating a method for manufacturing a color filter as an optical device as an example of an embodiment according to the present invention. The color filter to be manufactured has a structure in which a layer made of a color material and a lens (microlens) are combined. The color filter manufacturing method according to the present embodiment includes a bank formation step (FIG. 1A), a liquid repellency step (FIG. 1B), a lens material placement step (FIG. 1C), and a lens curing step ( 1D), a functional material arrangement step (FIG. 1E), and the like. For the arrangement of the lens material and the functional material, a droplet discharge method, that is, a so-called ink jet method in which a liquid material is discharged in a droplet shape through a nozzle of the discharge head is used.

A transparent or translucent substrate is used as the substrate for the color filter.
Examples of the transparent or translucent substrate include a glass substrate, a quartz substrate, and a resin substrate (plastic substrate, plastic film substrate), and a particularly inexpensive soda glass substrate is preferably used. Also included are those in which a semiconductor film, a metal film, a dielectric film, an organic film or the like is formed as a base layer on the surface of these various material substrates.

(Bank formation process)
First, as shown in FIG. 1A, a bank 11 is formed on a base 10 to partition a region where a color material is arranged. Specifically, for example, an acrylic resin, polyimide resin, or other resist melted in a solvent is applied by spin coating, dip coating, or the like to form an insulating layer, and the insulating layer is etched by a photolithography technique or the like. To do. As a result, a bank 11 having a predetermined pattern is formed on the substrate 10. As the insulating layer, for example, a synthetic resin such as an acrylic resin, a polyimide resin, a fluorine resin, or silicon is used.

(Liquid repellent process)
Next, as shown in FIG. 1B, before the lens material is arranged, the surface of the bank 11 (including the wall surface) is processed to be liquid repellent with respect to the lens material. Examples of the liquid repellency method include a plasma treatment method (plasma polymerization method), a eutectoid plating method, a liquid repellency method using gold thiol, or a FAS (fluoroalkylsilane) method. Various known methods can be employed. Among these, the plasma processing method has an advantage that various characteristics can be given to the surface to be processed by the selection of raw materials and the like, and the control is easy.

In the plasma processing method, for example, a fluorine-based processing gas such as tetrafluoromethane (carbon tetrafluoride) is converted into plasma and irradiated onto the surface of the target object (CF ₄ plasma processing). As a result, fluorine groups are introduced to the surface of the target object and liquid repellency is imparted. The processing gas is not limited to tetrafluoromethane (carbon tetrafluoride), and other fluorocarbon gases may be used. Furthermore, a treatment gas other than fluorine-based gas may be used as long as it can impart liquid repellency to the liquid material.

  Further, when liquid repellency is imparted to the bank by the plasma processing method, the liquid repellency of the bank surface with respect to the lens material can be controlled by changing the processing time of the plasma processing. For example, when the time for irradiating the bank surface with the processing gas in the plasma state is increased, the liquid repellency of the bank surface is improved. That is, by managing the processing time of the plasma processing, the liquid repellency of the bank surface can be brought close to a desired state. The liquid repellency of the bank surface is controlled so that the lens shape described later is in a desired state. Further, the liquid repellency of the bank surface is managed based on, for example, a contact angle (dynamic contact angle, static contact angle).

  When acrylic resin, polyimide resin, fluorine resin, silicon, or the like is used as a bank forming material, these materials often have liquid repellency with respect to the lens material. When the bank forming material has sufficient liquid repellency with respect to the lens material to be used, the liquid repellency step can be omitted.

(Lens material placement process)
Next, as shown in FIG. 1C, the lens material 12 is disposed in a region on the substrate 10 partitioned by the bank 11. The lens material is preferably a transparent and high refractive index material. For example, a photo-curing or thermosetting resin, an inorganic material, or the like is used. In this example, a photocurable resin is used for the purpose of reducing the temperature of the curing process.

  For the arrangement of the lens material, a droplet discharge method (so-called inkjet method) in which a liquid material is discharged in the form of droplets is used. The arrangement of the liquid material using the droplet discharge method is performed, for example, while relatively moving (scanning) the discharge head 20 and the substrate 10 in a state where the nozzles formed in the discharge head 20 are disposed facing the substrate 10. The lens material 12 in which the amount of liquid per droplet is controlled is ejected from the nozzle toward the substrate 10 in the form of droplets.

Here, examples of the discharge technique of the droplet discharge method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method. In the charge control method, a charge is applied to a material by a charging electrode, and the flight direction of the material is controlled by a deflection electrode and discharged from a nozzle. In addition, the pressurized vibration method is a method in which an ultra-high pressure of about 30 kg / cm ² is applied to the material and the material is discharged to the nozzle tip side. When no control voltage is applied, the material goes straight and is discharged from the nozzle. When a control voltage is applied, electrostatic repulsion occurs between the materials, and the materials are scattered and are not discharged from the nozzle. The electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) is deformed by receiving a pulse-like electric signal. The piezoelectric element is deformed through a flexible substance in a space where material is stored. Pressure is applied, and the material is extruded from this space and discharged from the nozzle. In the electrothermal conversion method, a material is rapidly vaporized by a heater provided in a space in which the material is stored to generate bubbles, and the material in the space is discharged by the pressure of the bubbles. In the electrostatic attraction method, a minute pressure is applied in a space in which the material is stored, a meniscus of the material is formed on the nozzle, and an electrostatic attractive force is applied in this state before the material is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of a fluid due to an electric field and a system that uses a discharge spark are also applicable.
The droplet discharge method has an advantage that the use of the material is less wasteful and a desired amount of the material can be accurately disposed at a desired position. In this example, the above-described electromechanical conversion method (piezo method) is used.

FIG. 2 is a diagram for explaining the principle of discharging a liquid material by a piezo method.
In FIG. 2, a piezo element 22 is installed adjacent to a liquid chamber 21 for storing a liquid material. The liquid material is supplied to the liquid chamber 21 via a liquid material supply system 23 including a material tank that stores the liquid material. The piezo element 22 is connected to a drive circuit 24, and a voltage is applied to the piezo element 22 via the drive circuit 24 to deform the piezo element 22, whereby the liquid chamber 21 is deformed and the liquid material is discharged from the nozzle 25. Is discharged. In this case, the amount of distortion of the piezo element 22 is controlled by changing the value of the applied voltage. Further, the strain rate of the piezo element 22 is controlled by changing the frequency of the applied voltage. Since the droplet discharge by the piezo method does not apply heat to the material, it has an advantage of hardly affecting the composition of the material.

  Returning to FIG. 1C, in this example, since the surface of the bank 11 is processed to be liquid repellent, the liquid lens material 12 disposed is suppressed from spreading in the bank 11. Therefore, the lens material 12 becomes a shape having a convex curved surface due to the influence of the surface tension. As described above, the shape of the curved surface is managed by controlling the liquid repellency of the surface (including the wall surface) of the bank 11 so that a desired optical function can be obtained.

(Lens curing process)
Next, as shown in FIG. 1D, the lens material 12 disposed on the substrate 10 is cured. The curing process is performed by irradiating the lens material with light having a predetermined wavelength. When a thermosetting resin is used as the lens material, the curing process is performed by heating the lens material to a predetermined temperature. A convex curved lens 13 is formed in the area partitioned by the bank 11 by the curing process.

(Functional material placement process)
Next, as shown in FIG. 1E, red (R), green (G), and blue (B) color materials 14, 15, and 16 as functional materials are arranged in regions partitioned by the banks 11. . Since the convex curved lens 13 described above is already formed in the area partitioned by the bank 11, the color material 14, 15, 16 is arranged on the curved lens 13 in the bank 11 due to the arrangement of the color materials 14, 15, 16. The materials 14, 15, and 16 are laminated.

  As the color material for the color filter, for example, a material containing a light absorbing pigment is used. As an example, the coloring material is prepared by dispersing inorganic pigments of R, G, and B colors in a polyurethane oligomer or polymethyl methacrylate oligomer, then using cyclohexanone and butyl acetate as a low boiling solvent, and butyl carbitol acetate as a high boiling solvent. In addition, if necessary, a nonionic surfactant is added as a dispersant, and the viscosity is adjusted to a predetermined range.

In addition, the above-described droplet discharge method is used for arranging the color material. That is, for example, in a state where the nozzle formed on the ejection head 20 is disposed opposite to the substrate 10, the liquid amount per droplet is controlled from the nozzle while relatively moving (scanning) the ejection head 20 and the substrate 10. The applied color material is discharged in the form of droplets toward the substrate 10.
In addition, after the color materials 14, 15 and 16 are arranged in the bank 11, the solvent contained in the color materials 14, 15 and 16 is evaporated by heat treatment or the like. As a result, a color material layer is formed on the substrate 10, and a color filter having layers of R, G, and B colors is formed.

  In the color filter manufacturing method described above, since the color materials 14, 15, 16 as the optical functional material and the lens material 12 are both arranged in the area partitioned by the bank 11, the color materials 14, 15 are used. 16 and the lens 13 are securely stacked in the bank 11. Further, since the droplet discharge method is used for arranging the material, there is little waste in using the lens material or the color material, and a desired amount of the material is accurately arranged in the bank 11. Accordingly, misalignment between the color material layer and the lens is prevented, the optical relationship between the color material layer and the lens is in a desired state, and a color filter with high optical performance is manufactured.

FIG. 3 is a diagram schematically showing an example of a color filter manufactured by the above-described manufacturing method as an embodiment of the optical device of the present invention.
In FIG. 3, in this color filter, light incident from the substrate 10 side is extracted after passing through the convex lens 13 and the color materials 14, 15, 16. At this time, the light is condensed by passing through the convex lens 13 and becomes light in a predetermined wavelength band by passing through the color materials 14, 15 and 16. In addition, the brightness of the extracted light is improved by the condensing of the convex lens 13. In this embodiment, the convex lens is formed in the bank. However, in the present invention, the shape of the lens is not limited to this.

FIG. 4 is a diagram schematically showing another example of the color filter.
In FIG. 4, this color filter has a concave lens 30 formed in the bank 11, unlike the color filter shown in FIG. 3. That is, a concave lens 30 is formed in a region on the base 10 defined by the bank 11, and R, G, and B color material layers 31, 32, and 33 are formed on the concave lens 30. Also in this color filter, since the color material and the lens material are arranged in an overlapped area in the bank 11, there is little misalignment between the color material layer and the lens, and the optical performance is improved. Figured.

  In this color filter, light incident from the substrate 10 side is extracted after passing through the concave lens 30 and the color materials 31, 32, 33. At this time, the light is diverged by passing through the concave lens 30, and becomes light in a predetermined wavelength band by passing through the color materials 31, 32, 33.

FIGS. 5A to 5E are diagrams schematically showing an example of a method for manufacturing the color filter shown in FIG. The color filter manufacturing method of this example includes a bank formation step (FIG. 5A), a lyophilic step (FIG. 5B), a lens material placement step (FIG. 5C), and a lens curing step (FIG. 5). (D)), and a functional material arrangement step (FIG. 5 (e)). In addition, the arrangement of the lens material and the functional material uses a droplet discharge method in which a liquid material is discharged in the form of droplets via a nozzle of the discharge head, a so-called inkjet method.
The bank forming process, the lens material arranging process, the lens curing process, and the functional material arranging process are the same as those described with reference to FIG. 1, and the description thereof is omitted or simplified here.

5B, in the lyophilic step, the surface of the bank 11 (including the wall surface) is processed to be lyophilic (or active) with respect to the lens material 12 before the lens material 12 is arranged. As a method for lyophilicity, for example, in addition to decane, UV irradiation, etc., in the plasma polymerization method described above, oxygen can be used as a processing gas (O ₂ plasma treatment). That is, by irradiating the surface of the target object with oxygen in a plasma state, the surface becomes lyophilic or activated.

  In FIG. 5C, in the functional material arranging step, the surface of the bank 11 is processed in advance to be lyophilic, so that the arranged liquid lens material 12 spreads out in the bank 11. Promoted. For this reason, the lens material 12 has a concave curved surface due to the influence of the surface tension. Thereafter, the lens material 12 is cured, whereby the concave curved lens 30 is formed in the region partitioned by the bank 11.

6 and 7 are diagrams schematically showing another example of the color filter.
The color filter shown in FIGS. 6 and 7 differs from the embodiment shown in FIGS. 3 and 4 in that R, G, and B color material layers 40, 41, and 42 are formed on the substrate 10, A convex curved lens 43 or a concave curved lens 44 is formed on the top. This color filter is manufactured by first arranging a color material in an area defined by the bank 11 and then arranging a lens material. Even in this manufacturing process, both the color material and the lens material are placed over the area partitioned by the bank, so that misalignment between the color material and the lens is prevented, and optical performance is achieved. High optical device is manufactured.

FIGS. 8A, 8B, and 8C respectively show planar arrangement patterns of color materials for a color filter as an optical device according to the present invention.
8A shows a pattern in which each of the R, G, and B color materials is arranged in a stripe shape, and FIG. 8B shows a pattern in which each of the color materials is arranged in a mosaic shape. ) Shows a pattern in which each color material is arranged in a delta shape (matrix shape).
Various patterns can be applied as the color material arrangement pattern of the color filter according to the present invention.

9 and 10 show an example of a planar structure of a color filter as an optical device according to the present invention.
In the color filter shown in FIG. 9, the color materials of R, G, and B are arranged in a delta shape (matrix shape), and the planar shape of the region where the color materials are arranged is formed in a circle. That is, the planar shape of the area where the color material is arranged by the bank is divided into circles, and the color material and the lens are arranged so as to overlap in the divided area. Since the partition region is formed in a circular shape, the surface tension works effectively when a lens material is arranged in the partition region, and a lens having a curved surface is favorably formed.

  In the color filter shown in FIG. 10, the R, G, and B color materials are arranged in a delta shape (matrix shape), and the planar shape of the region where the color materials are arranged is formed in a hexagon. That is, the planar shape of the area where the color material is arranged by the bank is divided into hexagons, and the color material and the lens are arranged so as to overlap in the divided area. By forming the partition region in a hexagonal shape, as in the case of a circular shape, when a lens material is arranged in the partition region, the surface tension works effectively, and a lens having a curved surface is favorably formed. In addition, compared with the case where the partitioned areas are formed in a circular shape, the layout of the partitioned areas is less wasteful and the aperture ratio can be improved.

  Further, the partition area may be another polygonal shape or an elliptical shape, and a plurality of these shapes may be combined. By arranging the partition area having the proper shape at the proper position, the aperture ratio can be improved by the efficient placement of the partition area, and the light quantity correction for each partition area can be performed by combining a plurality of shapes. .

  Next, FIG. 11 is a cross-sectional view showing an embodiment in which the display device of the present invention is applied to a liquid crystal display device. In FIG. 11, a liquid crystal display device 450 is configured by combining a color filter 400 and a counter substrate 466 between upper and lower polarizing plates 462 and 467 and enclosing a liquid crystal composition 465 therebetween. Further, alignment films 461 and 464 are formed between the color filter 400 and the counter substrate 466, and a TFT (thin film transistor) element (not shown) and a pixel electrode 463 are formed on the inner surface of one counter substrate 466. Are formed in a matrix.

  The color filter 400 includes pixels (filter elements) arranged in a predetermined pattern, and the boundary between the pixels is divided by a partition (bank) 413. One of the color materials of red (R), green (G), and blue (B) is introduced into each pixel. Each color material constitutes a colored layer 421. An overcoat layer 422 and an electrode layer 423 are formed on the top surfaces of the partition 413 and the colored layer 421.

  In this display device, a color filter manufactured by the above-described manufacturing method is used as the color filter 400. Therefore, optical performance is high and display performance is improved.

12A to 12C show an embodiment of an electronic apparatus according to the present invention.
The electronic apparatus of this example includes the display device of the present invention such as the above-described liquid crystal display device as a display unit.
FIG. 12A is a perspective view showing an example of a mobile phone. In FIG. 12A, reference numeral 600 denotes a mobile phone main body, and reference numeral 601 denotes a display unit using the display device.
FIG. 12B is a perspective view showing an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 12B, reference numeral 700 denotes an information processing apparatus, reference numeral 701 denotes an input unit such as a keyboard, reference numeral 703 denotes an information processing apparatus body, and reference numeral 702 denotes a display unit using the display device.
FIG. 12C is a perspective view illustrating an example of a wristwatch type electronic device. In FIG. 12C, reference numeral 800 denotes a watch body, and reference numeral 801 denotes a display unit using the display device.
Each of the electronic devices shown in FIGS. 12A to 12C includes the display device of the present invention as a display unit, so that display with excellent quality can be realized.

Next, FIGS. 13A, 13 </ b> B, and 13 </ b> C are diagrams illustrating an embodiment in which the optical device of the present invention is applied to a biochip as an inspection apparatus, and FIG. , (B) and (c) are AA sectional views. The technology related to the biochip, particularly the technology related to the gene chip (DNA chip) is described in, for example, Japanese Patent Application Laid-Open Nos. 10-168386 and 2000-232883. Hereinafter, the biochip of gene (DNA) will be mainly described.
13A and 13B, the biochip of this example has a configuration in which a curved lens 901 is provided on a substrate 900, and a reactive agent 902 is fixed on the lens 901. Further, the lens 901 and the reactive agent 902 are disposed so as to overlap with the area partitioned by the bank 903. As a reagent for a biochip, for example, a DNA fragment is used. Several tens to several hundreds of DNA fragments whose gene sequences are known in advance are contained in the solution and fixed to the corresponding bank 903.
Furthermore, as shown in FIG. 13C, the biochip of this example is configured such that light enters from the back side of the substrate 900 and is taken out through the lens 901 and the reactive agent 902. In using the biochip of this example, a liquid gene sample 905 is prepared and placed on the chip. When there is a gene that matches the sample, the base sequence is identified by reacting with the reaction agent 902 by a capture reaction, and fluorescence is emitted by the synthesized fluorescent dye. Light incident from the back side of the substrate 900 is collected by the lens 901, the brightness of the extracted light is increased, and visibility is improved.

  FIGS. 14A to 14C are diagrams schematically showing the manufacturing process of the biochip. For simplification, in FIGS. 14A to 14C, only the cross section shown in FIG. 13B is partially enlarged. The biochip manufacturing method of this example includes a bank forming process (FIG. 14A), a liquid repellent process (FIG. 14B), a lens material arranging process (FIG. 14C), and a lens curing process (FIG. 14). (D)), a reactant arrangement step (FIG. 14 (e)) and the like.

  Specifically, first, a bank 903 that partitions a region where a reactant is disposed is formed on the substrate 900, and the surface of the bank 903 is processed to be liquid repellent. Next, a lens material 904 is disposed in a region partitioned by the bank 903 and is cured to form a convex curved lens 901 in the bank 903. Next, the reactive agent 902 is arranged in an area partitioned by the bank 903 and fixed on the lens 901. Thereby, a biochip is manufactured. Various forming materials are appropriately selected and used. The lens material 904 and the reactive agent 902 are arranged using a droplet discharge method in which a liquid material is discharged into droplets via a nozzle of the discharge head, a so-called inkjet method.

  In the biochip manufacturing method described above, both the reactive agent 902 as a functional material and the lens material 904 are arranged in a region partitioned by the bank 903, so that the lens material 904 and the reactive agent 902 are in the bank 903. Is surely laminated. Further, since the droplet discharge method is used for arranging the material, there is little waste in using the lens material or the reactive agent, and a desired amount of the material is accurately arranged in the bank 903.

  As described above, the preferred embodiments according to the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

The figure which shows typically the method of manufacturing the color filter as an optical device as an example of embodiment which concerns on this invention. The figure for demonstrating the discharge principle of the liquid material by a piezo system. The figure which shows typically the form example of the color filter manufactured by the said manufacturing method as an embodiment of the optical device of this invention. The figure which shows the other example of a color filter typically. The figure which shows the other example of the manufacturing method of a color filter typically. The figure which shows typically the example of another form of a color filter. The figure which shows typically the example of another form of a color filter. The figure which shows the planar arrangement pattern of the color material for color filters as an optical device which concerns on this invention. The figure which shows an example of the planar structure of the color filter as an optical device which concerns on this invention. The figure which shows an example of the planar structure of the color filter as an optical device which concerns on this invention. 1 is a cross-sectional view illustrating an embodiment in which a display device of the present invention is applied to a liquid crystal display device. FIG. 11 illustrates an example of an embodiment of an electronic device of the invention. The figure which shows the embodiment which applied the optical device of this invention to the biochip. The figure which shows the manufacturing process of a biochip typically.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Base | substrate, 11 ... Bank, 12 ... Lens material, 20 ... Discharge head, 13 ... Lens, 14, 15, 16 ... Color material (functional material).

Claims (9)

A method for producing an optical device comprising a step of disposing a biochip reactant in a predetermined region on a substrate,
An optical device comprising: forming a lens using a liquid lens material in a bank that partitions the predetermined region; and disposing a reagent for the biochip in the bank. Manufacturing method.   The step of forming a lens using the liquid lens material includes a step of disposing the liquid lens material in the bank and a step of drying the lens material. Optical device manufacturing method.   3. The optical device according to claim 1, further comprising a step of processing the surface of the bank with respect to the lens material to be liquid repellent or lyophilic before the lens material is arranged. Manufacturing method.   4. The method of manufacturing an optical device according to claim 3, wherein a convex lens is formed in the partitioned area by processing the surface of the bank to be liquid repellent.   The method for manufacturing an optical device according to claim 3, wherein a concave lens is formed in the partitioned area by processing the surface of the bank to be lyophilic.   6. The droplet discharge method of discharging a liquid material into droplets is used for arranging at least one of the reactant for the biochip and the lens material. The manufacturing method of the optical device in any one of them.   7. The optical device according to claim 1, wherein a droplet discharge method of discharging a liquid material in the form of droplets is used to arrange the banks that partition the predetermined region. Device manufacturing method.   8. The method of manufacturing an optical device according to claim 1, wherein a planar shape of the area partitioned by the bank is a polygon, an ellipse, or a substantially circular shape. 9.   An inspection apparatus using an inspection substrate manufactured by the method for manufacturing an optical device according to claim 1.

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