JP4310586B2 - Ultrasonic probe and ultrasonic diagnostic apparatus - Google Patents

Ultrasonic probe and ultrasonic diagnostic apparatus Download PDF

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JP4310586B2
JP4310586B2 JP2005508127A JP2005508127A JP4310586B2 JP 4310586 B2 JP4310586 B2 JP 4310586B2 JP 2005508127 A JP2005508127 A JP 2005508127A JP 2005508127 A JP2005508127 A JP 2005508127A JP 4310586 B2 JP4310586 B2 JP 4310586B2
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piezoelectric layer
ultrasonic
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JPWO2004064643A1 (en
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英樹 岡崎
美喜雄 泉
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Hitachi Healthcare Manufacturing Ltd
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    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface

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Description

本発明は、被検体との間で超音波を送受信する超音波探触子及びその探触子を備えた超音波診断装置に係り、具体的には、短軸方向の口径を変えることができる超音波探触子に関する。  The present invention relates to an ultrasonic probe that transmits / receives ultrasonic waves to / from a subject and an ultrasonic diagnostic apparatus that includes the probe, and more specifically, can change the aperture in the minor axis direction. It relates to an ultrasound probe.

一般に、超音波の振動子は圧電材からなる層（以下、圧電層という。）を挟んで一対の電極を配設して構成され、複数の振動子を例えば１次元配列して超音波探触子が構成される。そして、複数の振動子が配列された長軸方向の所定数の振動子を口径として設定し、その口径に属する複数の振動子を駆動して被検体内の計測部位に超音波ビームを収束させて照射すると共に、その口径に属する複数の振動子により被検体から発する超音波の反射エコー等を受信して電気信号に変換する機能を有している。
一方、上記の長軸方向に直交する短軸方向についても超音波の周波数を変えることにより、開口径を変えて超音波ビームのビーム径を細くして解像度を改善する試みが行なわれている（特許文献１：特開平７−１０７５９５号公報）。この特許文献１の超音波探触子は、短軸方向に沿って中心部の圧電層の厚みを薄く、端部に向かうにつれて圧電層を厚く形成することにより、中心部で高周波に対する高い応答が得られ、短軸方向の端部で低周波に対する高い応答が得られることから、広帯域の周波数特性が得られる。その結果、超音波探触子の短軸方向の開口径が周波数に反比例して変化するため、浅い深度から深い深度まで細かいビーム径を形成することができる。
しかしながら、特許文献１に記載された超音波探触子によれば、短軸方向の両端部における低周波応答が中心部の低周波応答よりも高くなり、両端部の音圧が中心部よりも高い不均一な音圧分布となるため、分解能が低下してしまう問題がある。In general, an ultrasonic transducer is configured by arranging a pair of electrodes with a layer made of a piezoelectric material (hereinafter referred to as a piezoelectric layer) interposed therebetween. A child is constructed. Then, a predetermined number of transducers in the major axis direction in which a plurality of transducers are arranged is set as the aperture, and the plurality of transducers belonging to the aperture are driven to converge the ultrasonic beam on the measurement site in the subject. And has a function of receiving reflected echoes of ultrasonic waves emitted from the subject by a plurality of transducers belonging to the aperture and converting them into electrical signals.
On the other hand, an attempt has been made to improve the resolution by changing the aperture diameter to reduce the beam diameter of the ultrasonic beam by changing the frequency of the ultrasonic wave in the minor axis direction orthogonal to the major axis direction ( (Patent Document 1: JP-A-7-107595). In the ultrasonic probe of Patent Document 1, the piezoelectric layer at the center is thin along the minor axis direction, and the piezoelectric layer is formed thicker toward the end, so that a high response to high frequency is generated at the center. As a result, a high response to a low frequency can be obtained at the end in the minor axis direction, so that a wideband frequency characteristic can be obtained. As a result, since the aperture diameter in the short axis direction of the ultrasonic probe changes in inverse proportion to the frequency, a fine beam diameter can be formed from a shallow depth to a deep depth.
However, according to the ultrasonic probe described in Patent Document 1, the low frequency response at both ends in the minor axis direction is higher than the low frequency response at the center, and the sound pressure at both ends is higher than that at the center. Since the sound pressure distribution is high and uneven, there is a problem that the resolution is lowered.

本発明は、超音波探触子の短軸方向の低周波に対する周波数応答を均等化することを課題とする。
本発明は、次に述べる手段により、上記課題を解決するものである。
本発明は、圧電層と該圧電層を挟んで設けられた一対の電極を含んでなる超音波振動子を複数配列して形成された超音波探触子において、前記圧電層を共通電極を挟んで超音波の射出側に配設された第１圧電層と反対側に配設された第２圧電層とを有して構成し、前記超音波振動子の配列方向に直交する短軸方向の全口径で均等な低周波応答分布を有し、前記短軸方向の中心部において高い高周波応答分布を有してなるものとする。
このような周波数応答分布は、具体的には、以下の（１）乃至（９）の手段により実現できる。
（１）第１圧電層は前記短軸方向の端部の厚みが中心部の厚みよりも薄く形成され、第２圧電層は前記端部の厚みが前記中心部よりも厚く形成されてなるもの、
（２）第１圧電層と第２圧電層の前記一対の電極に接する面がそれぞれ平面に形成され、第１圧電層と第２圧電層との境界面が第２圧電層側に凹ませた曲面に形成されてなるもの、
（３）第１圧電層と第２圧電層の前記一対の電極に接する面がそれぞれ平面に形成され、第１圧電層と第２圧電層との境界面は、前記短軸方向の中心部に稜線を有する山形に形成されてなるもの、
（４）第１圧電層と第２圧電層の前記一対の電極に接する面がそれぞれ平面に形成され、第１圧電層と第２圧電層との境界面は、前記短軸方向の中心部において第２圧電層側に突出させた平坦部と、両端部において第１圧電層側に突出させて形成された平坦部とを有してなるもの、
（５）第１圧電層の超音波の射出側の面が凹面に形成され、第２圧電層の超音波の反射出側の面が凸面に形成され、第１圧電層と第２圧電層との境界面が第１圧電層の超音波の射出側の面の曲率よりも大きな曲率で第２圧電層側に凹ませて形成されてなるもの、
（６）第１圧電層の超音波の射出側の面が凹面に形成され、第２圧電層の超音波の反射出側の面が凸面に形成され、第１圧電層と第２圧電層との境界面は、前記短軸方向の中心部に稜線を有する山形に形成されてなるもの、
（７）第１圧電層と第２圧電層がそれぞれ一定の厚みに形成され、第１圧電層は前記短軸方向の中心部から端部に向かうにつれて該圧電層を構成する圧電材の密度が小さくなるように形成され、第２圧電層は前記短軸方向の中心部から端部に向かうにつれて該圧電層を構成する圧電材の密度が大きくなるように形成されてなるもの、
（８）上記の（１）乃至（７）の構成に加えて、第２圧電層の超音波の反射出側に、前記圧電層を構成する圧電材に近い音響インピーダンスを有する調整層が設けられ、該調整層は前記短軸方向の厚みが中心部から端部に向かうにつれて徐々に厚く形成されてなるもの。
上記の（１）乃至（７）は、圧電層を２層構造とし、第１圧電層と第２圧電層の短軸方向の周波数と音圧との特性を互いに補うように構成することにより、短軸方向の低周波に対する周波数応答を均等化することを特徴とする。つまり、第２圧電層の厚みは、超音波振動子の配列方向に直交する方向（以下、短軸方向という。）の中心部から端部に向かうにつれて厚くなるように形成されるから、中心部において高周波の応答に優れたものとなる。一方、第１圧電層の厚みは短軸方向の中心部から端部に向かうにつれて薄く形成されるから、中心部における低周波の応答に優れたものとなる。これら第１圧電層と第２圧電層の周波数応答特性が合成されることにより、低周波に対する短軸方向の応答特性を均等化することができる。したがって、本発明の超音波探触子によれば、振動子の短軸方向中心部で高周波の高応答を得ることができ、全口径で低周波の均一な応答を得ることができるから、深度の浅い位置から深い位置まで超音波ビーム径を細く形成でき、高い分解能を実現することができる。
また、（８）の構成の調整層は、圧電材に近い音響インピーダンスを有するから、通常、調整層の反圧電層側に設けられるバッキング層と音響インピーダンスの差が大きい。したがって、調整層で超音波が効果的に反射するとともに、その反射の周波数特性が厚みに依存することになる。その結果、振動子の低周波に対する短軸方向の応答特性を一層均等化することができる。また、振動子から背面側に射出される超音波のうち高周波成分は、振動子中心部の薄い調整層により反射されて超音波射出面側に戻される。これにより、超音波探触子の短軸方向中心部から被検体に射出される高周波の音圧が高くなって、振動子の短軸方向中心で高周波の応答を得ることができる。
ここで、バッキング層は音響インピーダンスが圧電層の音響インピーダンスに比べて非常に小さく、かつ、減衰率の高い素材とする。これにより、短軸方向に周波数特性を変化させることができ、周波数に応じた口径可変機能を実現できる。なお、調整層の短軸方向の厚み分布は、所望の高周波の応答分布を得るような周波数特性に定める。
また、上記（１）乃至（８）に代えて、（９）第１圧電層と第２圧電層がそれぞれ一定の厚みに形成され、第２圧電層に接する電極の背面に、圧電層を構成する圧電材に近い音響インピーダンスを有する材料からなる調整層を設け、該調整層の厚みを、前記超音波振動子の端軸方向の中心部から端部に向かうにつれて徐々に厚く形成されてなるものとすることができる。
このように形成された調整層を設けることにより、上述したように、振動子の低周波に対する短軸方向の応答特性を均等化することができ、かつ振動子の短軸方向中心部で高周波の高応答を得ることができる。
また、本発明の超音波診断装置は、本発明の超音波探触子を用いるとともに、超音波探触子の前記振動子を駆動する超音波信号を供給する送信手段は、制御指令に応じた周波数の超音波信号を前記超音波探触子に供給する機能を有し、超音波探触子により受信される反射エコー信号を受信処理する受信処理手段は、前記制御指令に応じた周波数の反射エコー信号を選択して受信処理する機能を有してなるものとすることにより、振動子の短軸方向中心で高周波の応答を得ることができるとともに、低周波に対する短軸方向の周波数特性を均等化できるから、深度の浅い位置から深い位置まで超音波ビーム径を細くでき、高い分解能を実現することができる。An object of the present invention is to equalize the frequency response of the ultrasonic probe to the low frequency in the short axis direction.
The present invention solves the above problems by the following means.
The present invention relates to an ultrasonic probe formed by arranging a plurality of ultrasonic transducers including a piezoelectric layer and a pair of electrodes provided with the piezoelectric layer interposed therebetween, and the piezoelectric layer is sandwiched between common electrodes. The first piezoelectric layer disposed on the ultrasonic wave emission side and the second piezoelectric layer disposed on the opposite side, and having a minor axis direction orthogonal to the arrangement direction of the ultrasonic transducers It has a uniform low frequency response distribution over the entire aperture, and a high high frequency response distribution at the center in the short axis direction.
Specifically, such frequency response distribution can be realized by the following means (1) to (9).
(1) The first piezoelectric layer is formed such that the end in the minor axis direction is thinner than the center, and the second piezoelectric layer is formed so that the end is thicker than the center. ,
(2) The surfaces of the first piezoelectric layer and the second piezoelectric layer that are in contact with the pair of electrodes are each formed as a flat surface, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is recessed toward the second piezoelectric layer. A curved surface,
(3) The surfaces of the first piezoelectric layer and the second piezoelectric layer that are in contact with the pair of electrodes are each formed as a flat surface, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is at the center in the minor axis direction. Formed into a mountain shape with a ridgeline,
(4) The surfaces of the first piezoelectric layer and the second piezoelectric layer that are in contact with the pair of electrodes are each formed as a flat surface, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is at the central portion in the minor axis direction. One having a flat portion protruding toward the second piezoelectric layer and a flat portion formed protruding toward the first piezoelectric layer at both ends;
(5) The ultrasonic emission side surface of the first piezoelectric layer is formed as a concave surface, the ultrasonic wave reflection side surface of the second piezoelectric layer is formed as a convex surface, and the first piezoelectric layer, the second piezoelectric layer, The boundary surface of the first piezoelectric layer is formed to be recessed toward the second piezoelectric layer with a curvature larger than the curvature of the ultrasonic emission side surface of the first piezoelectric layer,
(6) The ultrasonic wave emission side surface of the first piezoelectric layer is formed as a concave surface, the ultrasonic wave reflection side surface of the second piezoelectric layer is formed as a convex surface, and the first piezoelectric layer, the second piezoelectric layer, The boundary surface of is formed in a mountain shape having a ridge line at the center in the minor axis direction,
(7) The first piezoelectric layer and the second piezoelectric layer are each formed to have a constant thickness, and the density of the piezoelectric material constituting the piezoelectric layer increases as the first piezoelectric layer moves from the center to the end in the minor axis direction. The second piezoelectric layer is formed so that the density of the piezoelectric material constituting the piezoelectric layer increases from the center to the end in the minor axis direction;
(8) In addition to the above configurations (1) to (7), an adjustment layer having an acoustic impedance close to that of the piezoelectric material constituting the piezoelectric layer is provided on the ultrasonic wave reflection side of the second piezoelectric layer. The adjustment layer is formed such that the thickness in the minor axis direction gradually increases as it goes from the center to the end.
In the above (1) to (7), the piezoelectric layer has a two-layer structure, and is constructed so as to supplement the characteristics of the frequency and sound pressure in the minor axis direction of the first piezoelectric layer and the second piezoelectric layer. It is characterized by equalizing the frequency response to the low frequency in the short axis direction. That is, the thickness of the second piezoelectric layer is formed so as to increase from the center to the end in the direction orthogonal to the arrangement direction of the ultrasonic transducers (hereinafter referred to as the short axis direction). In this case, the high frequency response is excellent. On the other hand, since the thickness of the first piezoelectric layer is formed so as to decrease from the central portion in the short axis direction toward the end portion, the first piezoelectric layer has excellent low-frequency response in the central portion. By combining the frequency response characteristics of the first piezoelectric layer and the second piezoelectric layer, it is possible to equalize the response characteristics in the short axis direction with respect to the low frequency. Therefore, according to the ultrasonic probe of the present invention, a high-frequency high response can be obtained at the center of the minor axis direction of the transducer, and a low-frequency uniform response can be obtained over the entire aperture. The ultrasonic beam diameter can be narrowly formed from a shallow position to a deep position, and high resolution can be realized.
In addition, since the adjustment layer having the configuration (8) has an acoustic impedance close to that of the piezoelectric material, the difference between the acoustic impedance and the backing layer provided on the anti-piezoelectric layer side of the adjustment layer is usually large. Therefore, the ultrasonic wave is effectively reflected by the adjustment layer, and the frequency characteristic of the reflection depends on the thickness. As a result, the response characteristic in the short axis direction with respect to the low frequency of the vibrator can be made more uniform. Further, the high frequency component of the ultrasonic wave emitted from the transducer to the back side is reflected by the thin adjustment layer at the center of the transducer and returned to the ultrasonic wave emission surface side. As a result, the high-frequency sound pressure emitted from the central portion of the ultrasonic probe in the short axis direction to the subject increases, and a high-frequency response can be obtained at the center of the transducer in the short axis direction.
Here, the backing layer is made of a material whose acoustic impedance is very small compared with the acoustic impedance of the piezoelectric layer and has a high attenuation rate. Thereby, the frequency characteristic can be changed in the minor axis direction, and the aperture variable function corresponding to the frequency can be realized. The thickness distribution in the minor axis direction of the adjustment layer is determined to have a frequency characteristic that obtains a desired high-frequency response distribution.
Further, instead of the above (1) to (8), (9) the first piezoelectric layer and the second piezoelectric layer are formed with a constant thickness, and the piezoelectric layer is formed on the back surface of the electrode in contact with the second piezoelectric layer. An adjustment layer made of a material having an acoustic impedance close to that of the piezoelectric material to be provided is provided, and the thickness of the adjustment layer is gradually increased from the center in the end axis direction of the ultrasonic transducer toward the end. It can be.
By providing the adjustment layer formed in this way, as described above, the response characteristic in the short axis direction with respect to the low frequency of the vibrator can be equalized, and the high frequency can be obtained at the center of the short axis direction of the vibrator. High response can be obtained.
The ultrasonic diagnostic apparatus of the present invention uses the ultrasonic probe of the present invention, and the transmission means for supplying the ultrasonic signal for driving the transducer of the ultrasonic probe responds to the control command. The reception processing means for receiving and processing the reflected echo signal received by the ultrasonic probe has a function of supplying an ultrasonic signal of a frequency to the ultrasonic probe, and reflects the frequency according to the control command. By having a function to select and receive the echo signal, it is possible to obtain a high frequency response at the center of the minor axis of the transducer and to equalize the frequency characteristics in the minor axis with respect to the low frequency. Therefore, the ultrasonic beam diameter can be reduced from a shallow position to a deep position, and high resolution can be realized.

図１は、本発明の一実施形態に係る超音波探触子の主要部の斜視図である。
図２は、本発明の一実施形態の超音波診断装置の全体構成図である。
図３は、図１の実施形態の圧電層に係る部分の断面図である。
図４は、図１実施形態の周波数特性を示すグラフである。
図５は、図１実施形態の周波数と焦点深度との関係を説明する線図である。
図６は、図１実施形態の周波数と相対音圧の関係を説明する線図である。
図７は、本発明の第２実施形態の圧電層に係る部分の断面図である。
図８は、本発明の第３実施形態の圧電層に係る部分の断面図である。
図９は、本発明の第４実施形態の圧電層に係る部分の断面図である。
図１０は、本発明の第５実施形態の圧電層に係る部分の断面図である。
図１１は、本発明の第６実施形態の圧電層に係る部分の断面図である。
図１２は、本発明の第７実施形態の圧電層に係る部分の断面図である。
図１３は、本発明の第８実施形態の圧電層に係る部分の断面図である。
図１４は、本発明の第９実施形態の圧電層に係る部分の断面図である。
図１５は、本発明の第１０実施形態の圧電層に係る部分の断面図である。
図１６は、本発明の第１１実施形態の圧電層に係る部分の断面図である。FIG. 1 is a perspective view of a main part of an ultrasonic probe according to an embodiment of the present invention.
FIG. 2 is an overall configuration diagram of an ultrasonic diagnostic apparatus according to an embodiment of the present invention.
FIG. 3 is a cross-sectional view of a portion related to the piezoelectric layer of the embodiment of FIG.
FIG. 4 is a graph showing the frequency characteristics of the embodiment of FIG.
FIG. 5 is a diagram illustrating the relationship between the frequency and the depth of focus in the embodiment of FIG.
FIG. 6 is a diagram illustrating the relationship between the frequency and the relative sound pressure in the embodiment of FIG.
FIG. 7 is a cross-sectional view of a portion related to the piezoelectric layer of the second embodiment of the present invention.
FIG. 8 is a cross-sectional view of a portion related to the piezoelectric layer of the third embodiment of the present invention.
FIG. 9 is a cross-sectional view of a portion related to the piezoelectric layer of the fourth embodiment of the present invention.
FIG. 10 is a cross-sectional view of a portion relating to the piezoelectric layer of the fifth embodiment of the present invention.
FIG. 11 is a cross-sectional view of a portion related to the piezoelectric layer of the sixth embodiment of the present invention.
FIG. 12 is a cross-sectional view of a portion related to the piezoelectric layer of the seventh embodiment of the present invention.
FIG. 13 is a cross-sectional view of a portion related to the piezoelectric layer of the eighth embodiment of the present invention.
FIG. 14 is a cross-sectional view of a portion relating to the piezoelectric layer of the ninth embodiment of the present invention.
FIG. 15 is a cross-sectional view of a portion relating to the piezoelectric layer of the tenth embodiment of the present invention.
FIG. 16 is a cross-sectional view of a portion relating to the piezoelectric layer of the eleventh embodiment of the present invention.

以下、本発明の実施の形態について図を用いて説明する。
（第１の実施形態）
本発明の一実施形態を図１〜図３を用いて説明する。図１は本発明の一実施形態に係る超音波探触子の主要部の斜視図、図２は本発明の一実施形態の超音波診断装置の全体構成図、図３は本実施形態の圧電層に係る部分の断面図である。
図２において、超音波パルス発生回路３１から出力される超音波パルスは送信手段３２に入力され、ここにおいて送信フォーカス処理及び増幅処理などの送信処理が施され、送受分離部３３を介して超音波探触子１に供給される。超音波探触子１により受信された反射エコー信号は、送受分離部３３を介して受信処理手段３５に入力され、ここにおいて増幅処理及び受信整相処理などの受信処理が施される。受信処理手段３５から出力される反射エコー信号は画像処理手段３６に入力され、ここにおいて所定の画像再構成処理が行なわれる。画像処理手段３６により再構成された超音波画像は、モニタ３７に表示されるようになっている。上述した超音波パルス発生回路３１、送信手段３２、受信処理手段３５、画像処理手段３６は、コンピュータなどにより構成される制御手段３８からの制御指令に基づいて制御されるようになっている。また、制御手段３８は、入力手段３９から入力される指令に基づいて各種の設定、制御を実行するようになっている。なお、制御手段３８は、図示していない口径選択スイッチを制御して、超音波ビームを走査する構成を選択するようになっている。また、受信処理手段３５の一部及び画像処理手段３６は、コンピュータなどによって構成することができる。
本実施形態の超音波探触子１は、図１に示すように、圧電層２と、圧電層２の超音波射出面側に配設された音響整合層３と、圧電層２の背面側に配設されたバッキング層４と、音響整合層３の超音波射出面側に配設された音響レンズ５とを有して構成される。圧電層２と音響整合層３は、超音波探触子１の長軸方向にわたって配列された複数の分離層６によって複数に分離され、それぞれが振動子として機能するように構成されている。また、バッキング層４の圧電層２に接する側の一部も複数の分離層６によって複数に区分されている。
ここで、音響レンズ５は、短軸方向のフオーカスを行うためのものであり、シリコンゴムなど音響インピーダンスが生体に近く、音速が生体より遅いものを材料として形成されている。音響整合層３は、２層構造であり、それぞれ中心周波数に対する１／４波長板としての役割を果たしている。また、音響整合層３の下層の材料は、音響インピーダンスが圧電層２よりも小さいセラミックスなどが用いられる。また、音響整合層３の上層は下層よりも音響インピーダンスがより生体に近い樹脂などを材料として形成される。圧電層２は、圧電セラミックスＰＺＴ、ＰＺＬＴ、圧電単結晶ＰＺＮ−ＰＴ、ＰＭＮ−ＰＴ、あるいは有機圧電材料ＰＶＤＦなど、又はそれらと樹脂とで構成される複合圧電層などを用いて形成される。バッキング層４は、超音波の減衰率が大きく、圧電層２の背面方向に射出される超音波を減衰させる素材を用いて形成される。分離層６は、超音波の減衰の大きい材料（例えば、真空相当の材料）により形成される。
図３は、本実施形態の圧電層２とバッキング層４の部分の断面図を示している。同図は、圧電層２を長軸方向に直交する短軸方向の断面図である。圧電層２は、第１圧電層２−１と第２圧電層２−２が積層された２層構造になっている。第１圧電層２−１の超音波射出面と、第２圧電層２−２の背面側の面とに一対の電極７−１、７−２が配設されている。また、第１圧電層２−１と第２圧電層２−２の境界に共通電極８が配設されている。これらの電極７−１、７−２、８は、銀、白金、金、銅、ニッケルなどの金属により１０μｍ以下の厚みに形成される。
ここで、第１圧電層２−１は、超音波の射出面が平面で背面が凸面の平−凸型に形成されている。そして、中心部が最も厚い厚みＴ１ｍａｘに形成され、両端部に向かって厚みが薄くなるように形成され、端部で最小の厚みＴ１ｍｉｎに形成されている。一方、第２圧電層２−２は、超音波の射出面が凹面で、背面が平面の凹−平型に形成されている。そして、中心部が最も薄い厚みＴ２ｍｉｎに形成され、両端部に向かって厚みが厚くなるように形成され、端部で最大の厚みＴ２ｍａｘに形成されている。したがって、圧電層２の電極７−１、７−２に接する面は互いに平行な平面に形成され、第１圧電層２−１と第２圧電層２−２との境界面は第２圧電層２−２側に凹ませて形成されている。なお、例えば、Ｔ１ｍａｘ＝Ｔ２ｍｉｎに形成し、Ｔ１ｍｉｎ／Ｔ２ｍａｘ＝１／４に形成することができる。
このように構成される本実施形態の超音波探触子を用いた超音波診断の動作について説明する。まず、電極７−１と電極７−２を接地し、共通電極８に送信手段３２から超音波の送信信号を印加する。ここで、超音波探触子を駆動する送信信号の周波数は、超音波パルス発生回路３１により制御される。また、超音波ビームの焦点位置（フォーカス位置）は、計測部位の深度に応じて制御手段３８により演算される。計測部位は、入力手段３９を介して、操作者により入力設定することができる。このようにして、設定される計測部位の深度に応じて、制御手段３８から超音波パルス発生回路３１と送信手段３２に指令を送って、送信信号の周波数及びフォーカス位置が設定される。また、制御手段３８は、受信処理手段３５に指令を送って、受信処理対象の反射エコー信号の周波数及びフォーカス位置を送信信号のそれらに合せて設定する。
このようにして超音波探触子を駆動することにより、圧電層２において超音波が発生し、電極７−１側の面から超音波が放射される。このとき、圧電層２−２は凹−平型であることから、従来技術と同様に低周波では端部において共振して低周波の音圧が強くなる。一方、圧電層２−１は平−凸型で端部付近で厚さが薄いため、端部における低周波の音圧が小さい。その結果、圧電層２−１と圧電層２−２を積層させることにより、低周波における端部音圧の強調を抑制できる。
ここで、本実施形態の超音波探触子の周波数特性に関する効果を、図４〜図６を参照して説明する。図４は、本実施形態の周波数特性のグラフを示し、図５は本実施形態の周波数と焦点深度との関係を説明する線図、図６は本実施形態の周波数と相対音圧の関係を説明する線図である。図４において、横軸は周波数、縦軸は相対音圧を示し、実線１１は短軸方向の中心部における周波数特性曲線を、一点鎖線１２は中心と端部との中間位置における周波数特性曲線、点線１３は端部における周波数特性曲線を示している。また、同図において、ｆｃｅｎｔｅｒは高周波ｆｈｉｇｈと低周波ｆｌｏｗの中心周波数である。同図から明らかなように、本実施形態によれば、高周波ｆｈｉｇｈは中心部において、低周波ｆｌｏｗは端部から中心にかけて共振する。これにより、高周波ｆｈｉｇｈでは口径が小さくなり、探触子の近傍で細いビームを形成することができる。一方、減衰の小さい低周波ｆｌｏｗでは口径が大きくなり、深部で細いビームを得ることができる。
その結果、図５に示すように、周波数に応じた口径可変機能を持つことになる。なお、図５は、横軸が圧電層２の短軸方向、縦軸が深度を表している。したがって、図６に示すように、低周波ｆｌｏｗにおいても、端部の音圧が中心に比べて高くならず、音圧分布が均一化されていることからＳ／Ｎ比が低下せず、近傍から深部にかけて分解能の高い画像が得られる。これに対して、圧電層２−１を備えていない従来技術によれば、超音波探触子の短軸方向の両端部で低周波成分が強く共振する。そのため、図６の低周波ｆｌｏｗの特性図に、破線で示すように、端軸方向の端部の音庄が高くなり、中心部の音圧が低くなる相対音圧分布になることから、Ｓ／Ｎ比が低下してしまうのである。
（第２実施形態）
図７に、本発明に係る超音波探触子の第２実施形態の圧電層部分の断面図を示す。本実施形態が第１の実施形態と異なる点は、圧電層２の２層構造の構成と、圧電層２の背面に調整層９を設けたことにある。まず、圧電層２を、同一に形成された２つの平板状の圧電層２−３、２−４を積層して形成している。この圧電層２−４の背面に配設される調整層９は、音響インピーダンスが圧電層２に近い材料であって、セラミックスやアルミや銅などの金属などの材料を用いて形成する。なお、バッキング層４は、調整層９よりも非常に小さい音響インピーダンスを持ち、かつ減衰率の大きい材料を用いる。例えば、ゴムや樹脂と金属粒子（例えばタングステン粒子）などとの混合物、又はゴムや樹脂などにガスを含むビーズやマイクロバルーンなどを混合した材料を用いる。
本実施形態の調整層９は、図７に示すように、圧電層２−４と接する面が平面に、反対側の面が凹面状に形成されている。つまり、短軸方向の中心で厚みが最も薄く、端部に向かって徐々に厚くなるように形成されていることを特徴とする。このように、本実施形態によれば、調整層９とバッキング層４と音響インピーダンスの差が大きいことから、調整層９において超音波が効果的に反射するとともに、その反射の周波数特性が厚みに依存することになる。これにより、本実施形態の超音波探触子は、短軸方向の調整層９の厚みに依存した周波数特性が得られ、第１実施形態と同様に、図４〜図６に示した周波数特性の効果を得ることができる。つまり、高周波ｆｈｉｇｈでは中心部からの応答が大きく口径を小さくして近傍で細いビームを形成でき、低周波ｆｌｏｗでは全口径でビームが短軸方向に均等な音圧をもち、深部にフオーカスされる。その結果、近傍から深部にかけて分解能の高い画像が得られる。
（第３の実施形態）
図８に、本発明に係る超音波探触子の第３実施形態の圧電層部分の断面図を示す。本実施形態が第１の実施形態と異なる点は、圧電層２の背面に調整層９を設けたことにある。言い換えれば、第１と第２の実施形態の特徴部を組み合わせたものであり、本実施形態によれば第１と第２の実施形態の効果を合わせた効果が得られる。つまり、低周波で短軸方向に均等な音庄をもち、各周波数でよりビームの細い口径可変機能を実現することができる。
（第４の実施形態）
図９に、本発明に係る超音波探触子の第４実施形態の圧電層部分の断面図を示す。本実施形態が第１の実施形態と異なる点は、圧電層２の断面形状を図のように凹状とし、それに沿って音響整合層３の断面を凹状にしたことにある。つまり、圧電層２は、超音波の射出面と背面とが平行な凹面となるように形成し、射出側の圧電層２−１は中心部で最も厚く、両端部に向かって薄くなり、端部で最も薄い構造に形成している。一方、背面側の圧電層２−２は、中心部で最も薄く両端部に向かって厚くなり、端部で最も厚くなる構造に形成している。また、バッキング層４は圧電層２−２の背面の凹面に沿った形状にされている。また、音響レンズを取り除き、カバー材１０としては、音響インピーダンスと音速が被検体である生体に近い材料、例えばポリウレタンやフラックス、ブタジエンゴム、ポリエーテルブロックアミドなどの材料を用いて形成されている。また、この形状は凸型とし、生体との接触をよくすることができる。この構造により、短軸可変フォーカス機能を備えるとともに、凹面の圧電層２によりビームをフォーカスすることができる。その結果、音響レンズを使用しなくてもビームをフォーカスできるため、超音波の減衰を減らし、高感度な画像を得ることができる。
（第５の実施形態）
図１０に、本発明に係る超音波探触子の第５実施形態の圧電層部分の断面図を示す。本実施形態が第２の実施形態と異なる点は、圧電層２の断面形状を図のように凹状とし、それに沿って音響整合層３の断面を凹状にしたことにある。つまり、圧電層２は超音波の射出面と背面とが平行な凹面となるように形成し、さらに圧電層２の背面に調整層９を配設し、調整層９の厚みを中心部で最も薄く、両端部に向かって厚くし、端部で最も厚くなる構造に形成している。これにより、厚みに依存した周波数特性が得られる。また、音響レンズに代えてカバー材１０を設けた構造にしている。調整層９とカバー材１０の材料は、第４実施形態と同様である。この第５実施形態によれば、短軸可変フォーカス機能を備えるとともに、凹面の圧電層２によりビームをフォーカスすることができる。その結果、音響レンズを使用しなくてもビームをフォーカスできるため、超音波の減衰を減らし、高感度な画像を得ることができる。
（第６の実施形態）
図１１に、本発明に係る超音波探触子の第６実施形態の圧電層部分の断面図を示す。本実施形態は、第４と第５の実施形態を組み合わせたもので、それら２つの実施形態の効果を合わせた効果が得られる。つまり、低周波で短軸方向に均等な音圧をもち、各周波数においてビームの一層細い可変口径機能を実現することができる。また、レンズを使用しないため減衰を減らすことができ高感度な画像が得られる。
（第７の実施形態）
図１２に、本発明に係る超音波探触子の第７実施形態の圧電層部分の断面図を示す。本実施形態は、図３の実施形態と同様に、第１圧電層２−１は、超音波の射出面が平面で、背面が凸面の平−凸型に形成されている。また、第２圧電層２−２は、超音波の射出面が凹面で、背面が平面の凹−平型に形成されている。それら第１圧電層２−１と第２圧電層２−２との境界面は、短軸方向の中心部に稜線を有する山形に形成され、この境界面に共有電極８が設けられている。
この実施形態によれば、図３の実施形態と同様に、低周波においても、端部の音圧が中心に比べて高くならず、音圧分布が均一化されていることからＳ／Ｎ比が低下せず、近傍から深部にかけて分解能の高い画像が得られる。
なお、本実施形態においても、第２圧電層２−２の背面側に、図７の調整層９を設けることができる。
（第８の実施形態）
図１３に、本発明に係る超音波探触子の第８実施形態の圧電層部分の断面図を示す。本実施形態は、図１１の実施形態の第１圧電層２−１と第２圧電層２−２の構造を、図１２と同様に、それらの境界面が短軸方向の中心部に稜線を有する山形に形成されたものである。これによっても、図１１の実施形態と同様に、低周波で短軸方向に均等な音圧をもち、各周波数においてビームの一層細い可変口径機能を実現することができる。また、レンズを使用しないため減衰を減らすことができ高感度な画像が得られる。
なお、本実施形態においても、第２圧電層２−２の背面側に、図７の調整層９を設けることができる。
（第９の実施形態）
図１４に、本発明に係る超音波探触子の第９実施形態の圧電層部分の断面図を示す。本実施形態は、図１２の実施形態の圧電層２の超音波の射出側に音響整合層３を設け、音響レンズ５の形状を凹面の音響レンズ１１に代えたものである。この凹面の音響レンズ１１によれば、レンズの薄い部分と厚い部分で音圧の差ができる。これにより、超音波ビームが短軸方向に一層細くなり、圧電層２の構造との結合により、低周波の超音波ビームも細くなるから、各周波数で一層細いビームの可変項形機能を実現することができる。
この凹面の音響レンズ１１は、他の実施形態にも適用することができる。また、本実施形態においても、第２圧電層２−２の背面側に図７の調整層９を設けることができる。
（第１０の実施形態）
図１５に、本発明に係る超音波探触子の第１０実施形態の圧電層部分の断面図を示す。本実施形態は、図３の実施形態と同様に、第１圧電層１２−１は、超音波の射出面が平面で、背面が凸面の平−凸型に形成されている。また、第２圧電層１２−２は、超音波の射出面が凹面で、背面が平面の凹−平型に形成されている。それら第１圧電層１２−１と第２圧電層１２−２との境界面は、短軸方向の中心部において第２圧電層側に突出させた平坦部と、両端部において第１圧電層側に突出させて形成された平坦部とを有して形成され、この境界面に共有電極８が設けられている。
この実施形態によれば、図３の実施形態と同様に、低周波においても、端部の音圧が中心に比べて高くならず、音圧分布が均一化されていることからＳ／Ｎ比が低下せず、近傍から深部にかけて分解能の高い画像が得られる。また、本実施形態においても、第２圧電層１２−２の背面側に図７の調整層９を設けることができる。
（第１１の実施形態）
図１６に、本発明に係る超音波探触子の第１１実施形態の圧電層部分の断面図を示す。本実施形態は、圧電層１３を、それぞれ一定の厚みに形成された第１圧電層１３−１と第２圧電層１３−２とで構成し、第１圧電層１３−１は短軸方向の中心部から端部に向かうにつれて圧電材の密度が小さくなるように形成され、第２圧電層は短軸方向の中心部から端部に向かうにつれて圧電材の密度が大きくなるように形成されている。これにより、第１圧電層１３−１は中心から両端に向かって周波数定数が大きく、第２圧電層１３−２は中心から両端に向かって周波数定数が小さくなり、短軸方向の周波数応答特性を調整することができる。圧電材の密度は、前述した圧電セラミックスなどの圧電材の気孔率を変えることにより調整できる。また、樹脂などを混入することにより、調整できる。
本実施形態によれば、低周波で短軸方向に均等な音圧を有する分布を形成することができ、広い周波数の範囲でビームの細い可変口径機能を実現できる。また、本実施形態においても、第２圧電層１３−２の背面側に図７の調整層９を設けたり、図９のように圧電層を凹面状に形成したり、図１４の凹面音響レンズ１１を設けたりするなど、適宜、他の実施形態の特徴技術を採用することができる。
また、本実施形態における圧電材の密度を調整することに代えて、圧電材の弾性定数を調整することによっても、同様の効果を得ることができる。つまり、第１圧電層１３−１は短軸方向の中心部で弾性定数が小さく、端部に向かうにつれて弾性定数が大きくなるように形成され、第２圧電層は短軸方向の中心部で弾性定数が大きく、端部に向かうにつれて弾性定数が小さくなるように形成する。
以上述べたように、本発明の各実施形態によれば、短軸方向の中心から端部にかけて周波数の応答特性が変化し、中心部では低周波から高周波までの広い帯域をもち、端部では高周波の応答が小さくなる狭い帯域を有する特性を持たせることができる。また、低周波の場合も両端の音圧が高くならず、中心から端にかけて均等な音圧を得ることができる。さらに、高周波では中心部からの応答が大きくなり、プローブ近傍にフォーカスされ、低周波では全口径の応答により深部にフォーカスされ、分解能の高い画像が得られる。Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of a main part of an ultrasonic probe according to an embodiment of the present invention, FIG. 2 is an overall configuration diagram of an ultrasonic diagnostic apparatus according to an embodiment of the present invention, and FIG. It is sectional drawing of the part which concerns on a layer.
In FIG. 2, the ultrasonic pulse output from the ultrasonic pulse generation circuit 31 is input to the transmission unit 32, where transmission processing such as transmission focus processing and amplification processing is performed, and the ultrasonic wave is transmitted via the transmission / reception separating unit 33. Supplied to the probe 1. The reflected echo signal received by the ultrasound probe 1 is input to the reception processing means 35 via the transmission / reception separating unit 33, where reception processing such as amplification processing and reception phasing processing is performed. The reflected echo signal output from the reception processing unit 35 is input to the image processing unit 36, where a predetermined image reconstruction process is performed. The ultrasonic image reconstructed by the image processing means 36 is displayed on the monitor 37. The above-described ultrasonic pulse generation circuit 31, transmission means 32, reception processing means 35, and image processing means 36 are controlled based on a control command from a control means 38 constituted by a computer or the like. In addition, the control unit 38 executes various settings and controls based on commands input from the input unit 39. The control means 38 controls an aperture selection switch (not shown) to select a configuration for scanning the ultrasonic beam. Further, a part of the reception processing unit 35 and the image processing unit 36 can be configured by a computer or the like.
As shown in FIG. 1, the ultrasonic probe 1 of the present embodiment includes a piezoelectric layer 2, an acoustic matching layer 3 disposed on the ultrasonic emission surface side of the piezoelectric layer 2, and a back side of the piezoelectric layer 2. And the acoustic lens 5 disposed on the ultrasonic emission surface side of the acoustic matching layer 3. The piezoelectric layer 2 and the acoustic matching layer 3 are separated into a plurality by a plurality of separation layers 6 arranged along the major axis direction of the ultrasonic probe 1, and each is configured to function as a vibrator. A part of the backing layer 4 on the side in contact with the piezoelectric layer 2 is also divided into a plurality of parts by a plurality of separation layers 6.
Here, the acoustic lens 5 is for performing a focus in the short axis direction, and is made of a material such as silicon rubber having an acoustic impedance close to that of a living body and a sound speed slower than that of the living body. The acoustic matching layer 3 has a two-layer structure, and each plays a role as a quarter-wave plate with respect to the center frequency. Further, as the material under the acoustic matching layer 3, ceramic or the like whose acoustic impedance is smaller than that of the piezoelectric layer 2 is used. Further, the upper layer of the acoustic matching layer 3 is made of a resin or the like having a sound impedance closer to that of a living body than the lower layer. The piezoelectric layer 2 is formed using piezoelectric ceramics PZT, PZLT, piezoelectric single crystal PZN-PT, PMN-PT, organic piezoelectric material PVDF, or a composite piezoelectric layer composed of these and a resin. The backing layer 4 has a large ultrasonic attenuation rate, and is formed using a material that attenuates ultrasonic waves emitted toward the back surface of the piezoelectric layer 2. The separation layer 6 is formed of a material having a large attenuation of ultrasonic waves (for example, a material corresponding to a vacuum).
FIG. 3 shows a cross-sectional view of the piezoelectric layer 2 and the backing layer 4 of this embodiment. This figure is a cross-sectional view of the piezoelectric layer 2 in the minor axis direction orthogonal to the major axis direction. The piezoelectric layer 2 has a two-layer structure in which a first piezoelectric layer 2-1 and a second piezoelectric layer 2-2 are stacked. A pair of electrodes 7-1 and 7-2 are disposed on the ultrasonic emission surface of the first piezoelectric layer 2-1 and the back surface of the second piezoelectric layer 2-2. A common electrode 8 is disposed at the boundary between the first piezoelectric layer 2-1 and the second piezoelectric layer 2-2. These electrodes 7-1, 7-2, and 8 are formed with a thickness of 10 μm or less with a metal such as silver, platinum, gold, copper, or nickel.
Here, the first piezoelectric layer 2-1 is formed in a plano-convex shape in which the ultrasonic wave emission surface is flat and the back surface is convex. The central portion is formed to have the thickest thickness T1max, the thickness is decreased toward both ends, and the end portion is formed to have the minimum thickness T1min. On the other hand, the second piezoelectric layer 2-2 is formed in a concave-flat shape in which the ultrasonic wave emission surface is concave and the back surface is flat. The central portion is formed to have the thinnest thickness T2min, the thickness is formed to increase toward both ends, and the end portion is formed to have the maximum thickness T2max. Accordingly, the surfaces of the piezoelectric layer 2 in contact with the electrodes 7-1 and 7-2 are formed in parallel planes, and the boundary surface between the first piezoelectric layer 2-1 and the second piezoelectric layer 2-2 is the second piezoelectric layer. It is formed to be recessed on the 2-2 side. For example, it can be formed at T1max = T2min and can be formed at T1min / T2max = 1/4.
An operation of ultrasonic diagnosis using the ultrasonic probe of the present embodiment configured as described above will be described. First, the electrode 7-1 and the electrode 7-2 are grounded, and an ultrasonic transmission signal is applied to the common electrode 8 from the transmission unit 32. Here, the frequency of the transmission signal for driving the ultrasonic probe is controlled by the ultrasonic pulse generation circuit 31. Further, the focal position (focus position) of the ultrasonic beam is calculated by the control means 38 in accordance with the depth of the measurement site. The measurement part can be input and set by the operator via the input means 39. In this way, according to the depth of the measurement site to be set, a command is sent from the control means 38 to the ultrasonic pulse generation circuit 31 and the transmission means 32, and the frequency and focus position of the transmission signal are set. Further, the control unit 38 sends a command to the reception processing unit 35 to set the frequency and focus position of the reflected echo signal to be received and processed in accordance with those of the transmission signal.
By driving the ultrasonic probe in this way, ultrasonic waves are generated in the piezoelectric layer 2, and ultrasonic waves are emitted from the surface on the electrode 7-1 side. At this time, since the piezoelectric layer 2-2 is a concave-flat type, the low-frequency sound pressure is increased by resonating at the end portion at a low frequency as in the prior art. On the other hand, since the piezoelectric layer 2-1 is a flat-convex type and has a small thickness near the end, the low-frequency sound pressure at the end is small. As a result, by stacking the piezoelectric layer 2-1 and the piezoelectric layer 2-2, it is possible to suppress the enhancement of the end sound pressure at a low frequency.
Here, the effect regarding the frequency characteristic of the ultrasonic probe of this embodiment is demonstrated with reference to FIGS. FIG. 4 shows a graph of frequency characteristics of the present embodiment, FIG. 5 is a diagram for explaining the relationship between the frequency and the focal depth of the present embodiment, and FIG. 6 shows the relationship between the frequency and the relative sound pressure of the present embodiment. It is a diagram to explain. In FIG. 4, the horizontal axis represents frequency, the vertical axis represents relative sound pressure, the solid line 11 represents a frequency characteristic curve at the center in the minor axis direction, and the alternate long and short dash line 12 represents a frequency characteristic curve at an intermediate position between the center and the end. A dotted line 13 indicates a frequency characteristic curve at the end. In the figure, f center is the center frequency of the high frequency f high and the low frequency f low . As is clear from the figure, according to this embodiment, the high frequency f high resonates at the center, and the low frequency f low resonates from the end to the center. As a result, the aperture becomes small at high frequency f high , and a narrow beam can be formed in the vicinity of the probe. On the other hand, at a low frequency f low with low attenuation, the aperture becomes large, and a thin beam can be obtained at a deep part.
As a result, as shown in FIG. 5, it has a variable aperture function according to the frequency. In FIG. 5, the horizontal axis represents the minor axis direction of the piezoelectric layer 2 and the vertical axis represents the depth. Therefore, as shown in FIG. 6, even at a low frequency f low , the sound pressure at the end is not higher than the center, and the sound pressure distribution is uniform, so the S / N ratio does not decrease, An image with high resolution is obtained from the vicinity to the deep part. On the other hand, according to the prior art that does not include the piezoelectric layer 2-1, the low frequency component resonates strongly at both ends in the minor axis direction of the ultrasonic probe. Therefore, in the characteristic diagram of the low frequency f low in FIG. 6, as indicated by the broken line, the sound pressure at the end portion in the end axis direction becomes high and the sound pressure distribution at the center portion becomes low, resulting in a relative sound pressure distribution. The S / N ratio decreases.
(Second Embodiment)
FIG. 7 shows a cross-sectional view of the piezoelectric layer portion of the second embodiment of the ultrasonic probe according to the present invention. This embodiment is different from the first embodiment in that a two-layer structure of the piezoelectric layer 2 and an adjustment layer 9 are provided on the back surface of the piezoelectric layer 2. First, the piezoelectric layer 2 is formed by laminating two flat piezoelectric layers 2-3 and 2-4 formed in the same manner. The adjustment layer 9 disposed on the back surface of the piezoelectric layer 2-4 is a material having an acoustic impedance close to that of the piezoelectric layer 2, and is formed using a material such as ceramics, aluminum, or copper. The backing layer 4 is made of a material having an acoustic impedance much smaller than that of the adjustment layer 9 and having a large attenuation rate. For example, a mixture of rubber or resin and metal particles (for example, tungsten particles) or a material in which beads or microballoons containing gas are mixed in rubber or resin is used.
As shown in FIG. 7, the adjustment layer 9 of the present embodiment is formed such that the surface in contact with the piezoelectric layer 2-4 is a flat surface and the opposite surface is a concave surface. That is, it is characterized in that the thickness is the smallest at the center in the minor axis direction and gradually increases toward the end. Thus, according to this embodiment, since the difference in acoustic impedance between the adjustment layer 9 and the backing layer 4 is large, the ultrasonic wave is effectively reflected by the adjustment layer 9 and the frequency characteristic of the reflection is the thickness. Will depend. Thereby, the ultrasonic probe of the present embodiment can obtain frequency characteristics depending on the thickness of the adjustment layer 9 in the short axis direction, and the frequency characteristics shown in FIGS. 4 to 6 as in the first embodiment. The effect of can be obtained. In other words, the high frequency f high has a large response from the center and a small aperture, and a narrow beam can be formed in the vicinity. The low frequency f low has a uniform sound pressure in the short axis direction at all apertures, and a deep focus. Is done. As a result, an image with high resolution is obtained from the vicinity to the deep part.
(Third embodiment)
FIG. 8 shows a cross-sectional view of a piezoelectric layer portion of a third embodiment of the ultrasonic probe according to the present invention. This embodiment is different from the first embodiment in that an adjustment layer 9 is provided on the back surface of the piezoelectric layer 2. In other words, the features of the first and second embodiments are combined, and according to the present embodiment, an effect obtained by combining the effects of the first and second embodiments can be obtained. In other words, it is possible to realize a variable aperture function with a narrower beam at each frequency, with a low frequency and uniform sound in the short axis direction.
(Fourth embodiment)
FIG. 9 shows a cross-sectional view of the piezoelectric layer portion of the fourth embodiment of the ultrasonic probe according to the present invention. This embodiment is different from the first embodiment in that the cross-sectional shape of the piezoelectric layer 2 is concave as shown in the figure, and the cross section of the acoustic matching layer 3 is concave along that. That is, the piezoelectric layer 2 is formed so that the ultrasonic wave emission surface and the back surface are parallel concave surfaces, and the piezoelectric layer 2-1 on the emission side is thickest at the center, and becomes thinner toward both ends. It is formed in the thinnest structure. On the other hand, the piezoelectric layer 2-2 on the back side is formed so as to be thinnest at the center and thicker toward both ends, and thickest at the ends. The backing layer 4 is shaped along the concave surface on the back surface of the piezoelectric layer 2-2. Further, the acoustic lens is removed, and the cover material 10 is formed using a material having acoustic impedance and sound velocity close to a living body, such as polyurethane, flux, butadiene rubber, or polyether block amide. Moreover, this shape is made into a convex shape, and can make a good contact with a living body. With this structure, the short axis variable focus function is provided, and the beam can be focused by the concave piezoelectric layer 2. As a result, since the beam can be focused without using an acoustic lens, attenuation of ultrasonic waves can be reduced and a highly sensitive image can be obtained.
(Fifth embodiment)
FIG. 10 shows a cross-sectional view of the piezoelectric layer portion of the fifth embodiment of the ultrasonic probe according to the present invention. This embodiment is different from the second embodiment in that the cross-sectional shape of the piezoelectric layer 2 is concave as shown, and the cross-section of the acoustic matching layer 3 is concave along that. That is, the piezoelectric layer 2 is formed so that the ultrasonic wave emission surface and the back surface are parallel concave surfaces, and the adjustment layer 9 is disposed on the back surface of the piezoelectric layer 2 so that the thickness of the adjustment layer 9 is the most at the center. It is thin and thicker toward both ends, and is formed to be thickest at the ends. Thereby, frequency characteristics depending on the thickness can be obtained. Further, a cover material 10 is provided instead of the acoustic lens. The materials of the adjustment layer 9 and the cover material 10 are the same as those in the fourth embodiment. According to the fifth embodiment, the short axis variable focus function is provided, and the beam can be focused by the concave piezoelectric layer 2. As a result, since the beam can be focused without using an acoustic lens, attenuation of ultrasonic waves can be reduced and a highly sensitive image can be obtained.
(Sixth embodiment)
FIG. 11 is a cross-sectional view of the piezoelectric layer portion of the sixth embodiment of the ultrasonic probe according to the present invention. This embodiment is a combination of the fourth and fifth embodiments, and an effect obtained by combining the effects of the two embodiments can be obtained. That is, it is possible to realize a variable aperture function with a narrower beam at each frequency with a sound frequency that is equal in the short axis direction at a low frequency. Further, since no lens is used, attenuation can be reduced, and a highly sensitive image can be obtained.
(Seventh embodiment)
FIG. 12 is a sectional view of the piezoelectric layer portion of the seventh embodiment of the ultrasonic probe according to the present invention. In the present embodiment, similarly to the embodiment of FIG. 3, the first piezoelectric layer 2-1 is formed in a flat-convex shape in which the ultrasonic wave emission surface is flat and the back surface is convex. Further, the second piezoelectric layer 2-2 is formed in a concave-flat shape in which the ultrasonic wave emission surface is concave and the back surface is flat. The boundary surface between the first piezoelectric layer 2-1 and the second piezoelectric layer 2-2 is formed in a mountain shape having a ridge line at the center in the minor axis direction, and the shared electrode 8 is provided on the boundary surface.
According to this embodiment, as in the embodiment of FIG. 3, the sound pressure at the end does not become higher than the center even at low frequencies, and the S / N ratio is uniform because the sound pressure distribution is uniform. Is not lowered, and an image with high resolution is obtained from the vicinity to the deep part.
Also in this embodiment, the adjustment layer 9 of FIG. 7 can be provided on the back side of the second piezoelectric layer 2-2.
(Eighth embodiment)
FIG. 13 is a sectional view of the piezoelectric layer portion of the eighth embodiment of the ultrasonic probe according to the present invention. In this embodiment, the structure of the first piezoelectric layer 2-1 and the second piezoelectric layer 2-2 in the embodiment of FIG. 11 is similar to FIG. 12, and the boundary surface thereof has a ridge line at the center in the minor axis direction. It is formed in a mountain shape. Also by this, similarly to the embodiment of FIG. 11, it is possible to realize a variable aperture function with a narrower beam at each frequency with a sound frequency that is equal in the short axis direction at a low frequency. Further, since no lens is used, attenuation can be reduced, and a highly sensitive image can be obtained.
Also in this embodiment, the adjustment layer 9 of FIG. 7 can be provided on the back side of the second piezoelectric layer 2-2.
(Ninth embodiment)
FIG. 14 is a cross-sectional view of the piezoelectric layer portion of the ninth embodiment of the ultrasonic probe according to the present invention. In the present embodiment, the acoustic matching layer 3 is provided on the ultrasonic wave emission side of the piezoelectric layer 2 of the embodiment of FIG. 12, and the shape of the acoustic lens 5 is replaced with a concave acoustic lens 11. According to the concave acoustic lens 11, a difference in sound pressure can be made between a thin portion and a thick portion of the lens. As a result, the ultrasonic beam becomes thinner in the short axis direction, and the low-frequency ultrasonic beam becomes thinner due to the coupling with the structure of the piezoelectric layer 2, thereby realizing a variable term shape function of a thinner beam at each frequency. be able to.
The concave acoustic lens 11 can be applied to other embodiments. Also in the present embodiment, the adjustment layer 9 of FIG. 7 can be provided on the back side of the second piezoelectric layer 2-2.
(Tenth embodiment)
FIG. 15 is a cross-sectional view of the piezoelectric layer portion of the tenth embodiment of the ultrasonic probe according to the present invention. In the present embodiment, as in the embodiment of FIG. 3, the first piezoelectric layer 12-1 is formed in a flat-convex shape in which the ultrasonic wave emission surface is flat and the back surface is convex. Further, the second piezoelectric layer 12-2 is formed in a concave-flat shape in which the ultrasonic wave emission surface is concave and the back surface is flat. The boundary surface between the first piezoelectric layer 12-1 and the second piezoelectric layer 12-2 has a flat portion protruding toward the second piezoelectric layer at the center in the minor axis direction, and the first piezoelectric layer side at both ends. The common electrode 8 is provided on this boundary surface.
According to this embodiment, as in the embodiment of FIG. 3, the sound pressure at the end does not become higher than the center even at low frequencies, and the S / N ratio is uniform because the sound pressure distribution is uniform. Is not lowered, and an image with high resolution is obtained from the vicinity to the deep part. Also in the present embodiment, the adjustment layer 9 of FIG. 7 can be provided on the back side of the second piezoelectric layer 12-2.
(Eleventh embodiment)
FIG. 16 is a cross-sectional view of the piezoelectric layer portion of the eleventh embodiment of the ultrasonic probe according to the present invention. In the present embodiment, the piezoelectric layer 13 includes a first piezoelectric layer 13-1 and a second piezoelectric layer 13-2 that are formed to have a constant thickness, and the first piezoelectric layer 13-1 has a short axis direction. The density of the piezoelectric material is formed so as to decrease from the center portion toward the end portion, and the second piezoelectric layer is formed so that the density of the piezoelectric material increases from the center portion in the short axis direction toward the end portion. . As a result, the first piezoelectric layer 13-1 has a large frequency constant from the center toward both ends, and the second piezoelectric layer 13-2 has a frequency constant that decreases from the center toward both ends. Can be adjusted. The density of the piezoelectric material can be adjusted by changing the porosity of the piezoelectric material such as the piezoelectric ceramic described above. Moreover, it can adjust by mixing resin etc.
According to the present embodiment, it is possible to form a distribution having a low sound frequency and a uniform sound pressure in the short axis direction, and to realize a variable aperture function with a narrow beam in a wide frequency range. Also in this embodiment, the adjustment layer 9 of FIG. 7 is provided on the back side of the second piezoelectric layer 13-2, the piezoelectric layer is formed in a concave shape as shown in FIG. 9, or the concave acoustic lens of FIG. 11 may be adopted as appropriate.
Moreover, it can replace with adjusting the density of the piezoelectric material in this embodiment, and the same effect can be acquired also by adjusting the elastic constant of a piezoelectric material. In other words, the first piezoelectric layer 13-1 is formed such that the elastic constant is small at the central portion in the short axis direction, and the elastic constant increases toward the end portion, and the second piezoelectric layer is elastic at the central portion in the short axis direction. The constant is large, and the elastic constant is decreased toward the end.
As described above, according to each embodiment of the present invention, the frequency response characteristic changes from the center in the minor axis direction to the end, and has a wide band from low frequency to high frequency in the center, and at the end. A characteristic having a narrow band in which a high frequency response is small can be provided. Further, even at low frequencies, the sound pressure at both ends does not increase, and a uniform sound pressure can be obtained from the center to the end. Furthermore, the response from the central portion becomes large at high frequencies and is focused in the vicinity of the probe. At low frequencies, it is focused at the deep portion due to the response of the full aperture, and an image with high resolution can be obtained.

Claims (10)

複数の振動子を有してなる超音波探触子と、該超音波探触子の前記振動子を駆動する超音波信号を供給する送信手段と、前記超音波探触子により受信される反射エコー信号を受信処理する受信処理手段と、該受信処理手段により処理された前記反射エコー信号に基づいて超音波画像を再構成する画像処理手段と、該画像処理手段により再構成された超音波画像を表示する画像表示手段とを備えた超音波診断装置において、
前記超音波探触子は、超音波振動子を複数配列して形成され、
前記各超音波振動子の圧電層は、一方の面が超音波射出面となる第１圧電層と、該第１圧電層の前記超音波射出面の反対面に積層された第２圧電層と、前記第１圧電層と前記第２圧電層の積層境界面に設けられ、前記超音波信号が供給される共通電極と、前記第１圧電層の前記超音波射出面に設けられた第１の接地電極と、前記第２圧電層の積層境界面の反対側の背面に設けられた第２の接地電極を備えてなり、
前記第１圧電層と前記第２圧電層が積層されてなる前記圧電層は、前記超音波射出面と前記背面とが前記各超音波振動子の長軸方向に直交する短軸方向に沿って平行な平面又は前記短軸方向に沿って前記超音波射出方向に平行な凹面となるように形成され、かつ前記第１圧電層は前記短軸方向に沿う厚みが中心部で最も厚く両端部に向かって薄くなるように形成され、前記第２圧電層は前記短軸方向に沿う厚みが中心部で最も薄く両端部に向かって厚くなるように形成されてなることを特徴とする超音波診断装置。 An ultrasonic probe having a plurality of transducers, a transmission means for supplying an ultrasonic signal for driving the transducers of the ultrasonic probe, and a reflection received by the ultrasonic probe Reception processing means for receiving an echo signal, image processing means for reconstructing an ultrasonic image based on the reflected echo signal processed by the reception processing means, and an ultrasonic image reconstructed by the image processing means In an ultrasonic diagnostic apparatus comprising image display means for displaying
The ultrasonic probe is formed by arranging a plurality of ultrasonic transducers,
The piezoelectric layer of each ultrasonic transducer includes a first piezoelectric layer having one surface serving as an ultrasonic emission surface, and a second piezoelectric layer stacked on the opposite surface of the first piezoelectric layer to the ultrasonic emission surface. A common electrode to which the ultrasonic signal is supplied, and a first electrode provided on the ultrasonic emission surface of the first piezoelectric layer, provided on a laminated boundary surface of the first piezoelectric layer and the second piezoelectric layer. A ground electrode and a second ground electrode provided on the back surface opposite to the laminated boundary surface of the second piezoelectric layer;
The piezoelectric layer formed by laminating the first piezoelectric layer and the second piezoelectric layer has a short axis direction in which the ultrasonic emission surface and the back surface are orthogonal to the long axis direction of each ultrasonic transducer. The first piezoelectric layer is formed to be a parallel plane or a concave surface parallel to the ultrasonic wave emitting direction along the minor axis direction, and the first piezoelectric layer is thickest along the minor axis direction at the center and is thick at both ends. The ultrasonic diagnostic apparatus, wherein the second piezoelectric layer is formed so that the thickness along the minor axis direction is the thinnest at the center and thicker toward both ends. . 前記各超音波振動子は、前記短軸方向に均等な低周波応答分布を有し、前記短軸方向の中心部において高い高周波応答分布を有してなる請求項1に記載の超音波診断装置。Wherein each of the ultrasonic transducers, said has a uniform low-frequency response distribution in the minor axis direction, the ultrasonic diagnostic apparatus according to claim 1 comprising a high frequency response distribution at the center part in the minor-axis direction . 前記第２圧電層の前記背面側に、前記圧電層を構成する圧電材に近い音響インピーダンスを有する材料からなる調整層が設けられ、該調整層は前記短軸方向の厚みが中心部から端部に向かうにつれて徐々に厚く形成されてなることを特徴とする請求項１に記載の超音波診断装置。An adjustment layer made of a material having an acoustic impedance close to that of the piezoelectric material constituting the piezoelectric layer is provided on the back side of the second piezoelectric layer, and the adjustment layer has a thickness in the minor axis direction from the center to the end. The ultrasonic diagnostic apparatus according to claim 1, wherein the ultrasonic diagnostic apparatus is formed so as to gradually increase in thickness toward the center. 前記第１圧電層の前記接地電極側に配設された音響整合層と、前記第２圧電層の前記接地電極側に配設されたバッキング層とを備えてなる請求項１に記載の超音波診断装置。  The ultrasonic wave according to claim 1, further comprising: an acoustic matching layer disposed on the ground electrode side of the first piezoelectric layer; and a backing layer disposed on the ground electrode side of the second piezoelectric layer. Diagnostic device. 前記第１圧電層と前記第２圧電層の前記第１と第２の接地電極に接する面がそれぞれ平面に形成され、前記第１圧電層と前記第２圧電層との境界面は、前記短軸方向の中心部に稜線を有する山形に形成されてなることを特徴とする請求項１に記載の超音波診断装置。The surfaces of the first piezoelectric layer and the second piezoelectric layer that are in contact with the first and second ground electrodes are each formed in a plane, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is the short surface. The ultrasonic diagnostic apparatus according to claim 1, wherein the ultrasonic diagnostic apparatus is formed in a mountain shape having a ridge line at a central portion in an axial direction. 前記第１圧電層と前記第２圧電層の前記第１と第２の接地接する面がそれぞれ平面に形成され、第１圧電層と第２圧電層との境界面は、前記短軸方向の中心部において第２圧電層側に突出させた平坦部と、両端部において第１圧電層側に突出させて形成された平坦部とを有してなることを特徴とする請求項１に記載の超音波診断装置。The first and second ground contact surfaces of the first piezoelectric layer and the second piezoelectric layer are each formed as a flat surface, and a boundary surface between the first piezoelectric layer and the second piezoelectric layer is a center in the short axis direction. 2. The superstructure according to claim 1, further comprising: a flat portion projecting toward the second piezoelectric layer at the portion; and a flat portion projecting toward the first piezoelectric layer at both ends. Ultrasonic diagnostic equipment. 前記第１圧電層の前記超音波射出面が凹面に形成され、前記第２圧電層の前記背面が凸面に形成され、前記第１圧電層と前記第２圧電層との境界面が第１圧電層の超音波射出面の曲率よりも大きな曲率で前記第２圧電層側に凹ませて形成されてなることを特徴とする請求項１に記載の超音波診断装置。The ultrasonic emission surface of the first piezoelectric layer is formed as a concave surface, the back surface of the second piezoelectric layer is formed as a convex surface, and a boundary surface between the first piezoelectric layer and the second piezoelectric layer is a first piezoelectric layer. 2. The ultrasonic diagnostic apparatus according to claim 1, wherein the ultrasonic diagnostic apparatus is formed to be recessed toward the second piezoelectric layer with a curvature larger than a curvature of an ultrasonic emission surface of the layer. 前記第１圧電層の前記超音波射出面が凹面に形成され、前記第２圧電層の前記背面が凸面に形成され、前記第１圧電層と前記第２圧電層との境界面は、前記短軸方向の中心部に稜線を有する山形に形成されてなることを特徴とする請求項１に記載の超音波診断装置。The ultrasonic emission surface of the first piezoelectric layer is formed as a concave surface, the back surface of the second piezoelectric layer is formed as a convex surface, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is the short surface. The ultrasonic diagnostic apparatus according to claim 1, wherein the ultrasonic diagnostic apparatus is formed in a mountain shape having a ridge line at a central portion in an axial direction. 複数の振動子を有してなる超音波探触子と、該超音波探触子の前記振動子を駆動する超音波信号を供給する送信手段と、前記超音波探触子により受信される反射エコー信号を受信処理する受信処理手段と、該受信処理手段により処理された前記反射エコー信号に基づいて超音波画像を再構成する画像処理手段と、該画像処理手段により再構成された超音波画像を表示する画像表示手段とを備えた超音波診断装置において、  An ultrasonic probe having a plurality of transducers, a transmission means for supplying an ultrasonic signal for driving the transducers of the ultrasonic probe, and a reflection received by the ultrasonic probe Reception processing means for receiving an echo signal, image processing means for reconstructing an ultrasonic image based on the reflected echo signal processed by the reception processing means, and an ultrasonic image reconstructed by the image processing means In an ultrasonic diagnostic apparatus comprising image display means for displaying
前記超音波探触子は、圧電層と該圧電層を挟んで設けられた一対の電極を含んでなる超音波振動子を複数配列して形成され、  The ultrasonic probe is formed by arranging a plurality of ultrasonic transducers including a piezoelectric layer and a pair of electrodes provided with the piezoelectric layer interposed therebetween,
前記圧電層は共通電極を挟んで超音波の射出側に配設された第１圧電層と反対側に配設された第２圧電層とを有し、  The piezoelectric layer has a first piezoelectric layer disposed on the ultrasonic emission side and a second piezoelectric layer disposed on the opposite side across the common electrode;
前記第１圧電層と前記第２圧電層の前記一対の電極に接する面がそれぞれ平面に形成され、第１圧電層と第２圧電層との境界面は、前記超音波振動子の配列方向に直交する短軸方向の中心部において第２圧電層側に突出させた平坦部と、両端部において第１圧電層側に突出させて形成された平坦部とを有してなることを特徴とする超音波診断装置。  The surfaces of the first piezoelectric layer and the second piezoelectric layer that are in contact with the pair of electrodes are each formed in a plane, and the boundary surface between the first piezoelectric layer and the second piezoelectric layer is in the arrangement direction of the ultrasonic transducers. It has a flat portion that protrudes toward the second piezoelectric layer at the center in the direction of the perpendicular minor axis, and a flat portion that protrudes toward the first piezoelectric layer at both ends. Ultrasonic diagnostic equipment. 複数の振動子を有してなる超音波探触子と、該超音波探触子の前記振動子を駆動する超音波信号を供給する送信手段と、前記超音波探触子により受信される反射エコー信号を受信処理する受信処理手段と、該受信処理手段により処理された前記反射エコー信号に基づいて超音波画像を再構成する画像処理手段と、該画像処理手段により再構成された超音波画像を表示する画像表示手段とを備えた超音波診断装置において、  An ultrasonic probe having a plurality of transducers, a transmission means for supplying an ultrasonic signal for driving the transducers of the ultrasonic probe, and a reflection received by the ultrasonic probe Reception processing means for receiving an echo signal, image processing means for reconstructing an ultrasonic image based on the reflected echo signal processed by the reception processing means, and an ultrasonic image reconstructed by the image processing means In an ultrasonic diagnostic apparatus comprising image display means for displaying
前記超音波探触子は、圧電層と該圧電層を挟んで設けられた一対の電極を含んでなる超音波振動子を複数配列して形成され、  The ultrasonic probe is formed by arranging a plurality of ultrasonic transducers including a piezoelectric layer and a pair of electrodes provided with the piezoelectric layer interposed therebetween,
前記圧電層は共通電極を挟んで超音波の射出側に配設された第１圧電層と反対側に配設された第２圧電層とを有し、  The piezoelectric layer has a first piezoelectric layer disposed on the ultrasonic emission side and a second piezoelectric layer disposed on the opposite side across the common electrode;
前記第１圧電層の超音波の射出側の面が凹面に形成され、前記第２圧電層の超音波の反射出側の面が凸面に形成され、前記第１圧電層と前記第２圧電層との境界面が第１圧電層の超音波の射出側の面の曲率よりも大きな曲率で前記第２圧電層側に凹ませて形成されてなることを特徴とする超音波診断装置。  The ultrasonic wave emission side surface of the first piezoelectric layer is formed as a concave surface, the ultrasonic wave reflection side surface of the second piezoelectric layer is formed as a convex surface, and the first piezoelectric layer and the second piezoelectric layer are formed. The ultrasonic diagnostic apparatus is characterized in that a boundary surface between the first piezoelectric layer and the second piezoelectric layer is recessed with a curvature larger than the curvature of the ultrasonic emission side surface of the first piezoelectric layer.
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