JP4237348B2 - Microspectroscope - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microscopic spectroscopic device capable of observing a magnified image of a sample and measuring a spectrum of an object to be measured with a microscope, and more particularly to an improvement in an aperture setting operation required when performing spectroscopic measurement of a sample with a microspectroscopic device.
[0002]
[Prior art]
Means for observing a magnified image of a sample with a microscope and measuring a spectrum for more detailed analysis of the sample are used in various fields in modern times.
Thus, when performing spectrum measurement from a sample, an aperture is set to measure only the spectrum from a specific part. For example, if a substrate is used as a sample and the spectrum of dirt adhered on the substrate is measured, the entire observed image of the sample collects the spectrum of the substrate in addition to the dirt. It is set to measure.
[0003]
[Problems to be solved by the invention]
Conventionally, the aperture is set while viewing the observation image of the sample. However, the shape of the spectrum measurement target portion is various, whereas the shape of the aperture is rectangular. For this reason, it is difficult and difficult to set the aperture according to the spectrum measurement target part.
Moreover, although the aperture was used when measuring the mapping spectrum of the sample, it was difficult to arrange the lattice points according to the shape of the measurement target part.
The present invention has been made in view of the above problems, and an object of the present invention is to provide an apparatus that can easily set an optimum aperture in accordance with the shape of a spectrum measurement target portion of a sample.
[0004]
[Means for Solving the Problems]
In order to achieve the above object, a microspectroscopic device according to the present invention includes a microscope capable of observing a magnified image of a sample, and in a microspectroscopic device capable of performing spectrum measurement, image capturing means for capturing a microscopic observation image of the sample, A display unit for displaying a sample observation image captured by the image capturing unit, a spectrum measurement target part for collecting a spectrum from the sample observation image displayed on the display unit, and a region for performing spectrum measurement are set. Measuring region designating means, masking means set so that a spectrum can be collected from the spectrum measuring region set by the measuring region designating means, and spectrum collecting means for collecting a spectrum from the spectrum measuring region of the sample. Desired for spectral measurement from the sample observation image by the measurement region designating means If you specify a contour line of spectrum stbm, contour measurement area designation image of the designated spectrum stbm Part of When the measurement region designating unit sets a region for spectrum measurement using the contour line of the measurement region designating image displayed on the display unit and displayed on the display unit, the mask unit is based on the setting. Is set.
[0005]
Further, in the present invention, the mechanism for designating the contour line of the spectrum measurement target portion by the measurement area designating means is displayed on the display means and is displayed as the pointer that moves by the operation of the measurement area designating means or the measurement area designating means. Preferably, a device that reads position information from the upper display image is used, and the contour line of the spectrum measurement target region is traced from the sample observation image by the pointer or the device.
Further, in the present invention, the mechanism for designating the contour line of the spectrum measurement target portion by the measurement area designating means is displayed on the display means and is displayed as the pointer that moves by the operation of the measurement area designating means or the measurement area designating means. When using a device that reads position information from the upper display image and specifying a part of the contour of the spectrum measurement target region from the sample observation image using the pointer or the device, the brightness or color indicated by the specified location is the same. , And recognize the outer periphery of the area as an outline, or select the adjacent display area that is displayed with the brightness or color with the least change in brightness or color indicated by the specified location, and the selection area The adjacent display area that is displayed in the brightness or color with the least change in brightness or color It is preferred that by repeating the work to continue to select is to recognize the contour line.
Further, in the present invention, the mechanism for designating the contour line of the spectrum measurement target portion by the measurement area designating means is displayed on the display means and is displayed as the pointer that moves by the operation of the measurement area designating means or the measurement area designating means. Using a device that reads position information from the display image above, a polygon that connects the specified points by specifying three or more points from the contour line of the spectrum measurement target part in the sample observation image by the pointer or the device Is preferably recognized as a contour line.
[0006]
In the present invention, it is preferable that the mask means is substantially an aperture.
In the present invention, it is preferable that the aperture is automatically set based on the contour line displayed in the measurement region designation image so as to have a maximum area within the contour line. In the present invention, it is preferable that the number of measurement points and the size and angle of the aperture for measuring the mapping spectrum of the sample are automatically set based on the contour line displayed on the measurement region designation image.
In the present invention, it is preferable that at least one of a touch pen, a light pen, a touch panel, and a mouse is used as the measurement area designating unit.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
A method for identifying and analyzing a substance by observing an enlarged image of a sample using a microscope and measuring a spectrum from a specific portion therein is a widely used means in the present age. In this case, it is always necessary to set a mask means for measuring a spectrum only from a specific part. This is a very important operation because an accurate spectrum cannot be obtained unless the mask means is set.
The present invention can provide a microspectroscopic device having a mechanism for simplifying the setting of the mask means.
[0008]
FIG. 1 shows a schematic diagram of a microspectroscopic device that is one embodiment of the present invention.
A microspectroscopic device 2 shown in the figure displays a microscope 4 that can observe an enlarged image of a sample, an image capturing unit 6 that captures a microscopic observation image of the sample, and a sample observation image that is captured by the image capturing unit 6. A display unit 8; a measurement region designating unit 10 for designating a spectrum measurement target region for collecting a spectrum from a sample observation image displayed on the display unit 8; and a region for performing spectrum measurement; and the measurement region designation Mask means 12 is set so that a spectrum can be collected from the spectrum measurement region set by means 10, and spectrum collection means 14 for collecting a spectrum from the spectrum measurement region of the sample.
[0009]
In the present embodiment, the spectrum collecting means 14 comprises a spectrophotometer, and the microscope 4 is connected to the spectrophotometer, and the spectrum is collected by this spectrophotometer.
In the present embodiment, the mask means 12 is provided in the microscope 4.
Further, in the present embodiment, the microscope 4 and the spectrophotometer which is the spectrum collection means 14 are connected to a personal computer, respectively, and are totally controlled by the CPU 16 of the personal computer.
[0010]
Then, when the measurement region specifying means 10 designates the contour line of the spectrum measurement target portion desired to be measured from the sample observation image, the designated contour line of the spectrum measurement target portion is displayed on the display means 8 as the measurement region designation image. When the region for spectrum measurement is set by the measurement region specifying unit 10 using the contour line of the measurement region specifying image displayed and displayed on the display unit 8, the setting is transmitted from the CPU 16 to the control unit 18. Then, the control means 18 drives the drive means 20 based on the setting, and sets the mask means 12.
Hereinafter, spectrum measurement is actually performed using an embodiment of the present invention, and the apparatus of the present invention will be described in more detail.
[0011]
FIG. 2 shows a schematic diagram of an infrared microspectroscopic device to which the present invention is applied.
An infrared microspectroscopic device 22 shown in FIG. 1 includes a microscope 24 that can observe an enlarged image of a sample, and a CCD camera 28 that is attached above a trinocular finder 26 as image capturing means for capturing a microscopic image of the sample. A CRT 30 as a display means for displaying a sample observation image captured by the CCD camera 28, a spectrum measurement target region for collecting a spectrum from the sample observation image displayed on the CRT 30, and a region for performing spectrum measurement A light pen 32 as a measurement area designating means for setting, an aperture provided in the microscope as a mask means set so as to be able to collect a spectrum from the spectrum measurement area set by the light pen 32, and a spectrum of the sample As a spectrum sampling means to collect spectra from the measurement area And a infrared spectrophotometer 34.
In this embodiment, the microscope 24 and the infrared spectrophotometer 34 are connected to a personal computer 36 and are controlled in an integrated manner.
[0012]
In actual observation, an IC substrate was used as a sample.
First, a sample was set on the stage of the microscope 24, and first an enlarged image thereof was observed. Observing the displayed sample observation image, we found dirt on the substrate. The spectrum of this soil was measured.
[0013]
FIG. 3A shows an example of a display screen on which an observation image of the sample is displayed. As shown in the figure, a sample observation image 42 displayed in the sample observation image display window 40 is displayed on the screen 38 of the CRT 30. In the sample observation image 42, a stain 44, which is a spectral measurement target portion, is observed. Has been. In order to measure the spectrum of the dirt 44, it is necessary to set an aperture. In the present invention, in setting the aperture for performing spectrum measurement from the spectrum measurement target portion, first, the sample observation image is measured by the measurement region designating means. The contour line of the dirt 44, which is the spectral measurement target part for which spectral measurement is desired, is designated from the observation images of the 42 substrates.
[0014]
In specifying the contour line, the apparatus of the present invention uses a pointer that is displayed on the display means and moves by the operation of the measurement area specifying means, or a device that reads position information from the display image on the display means as the measurement area specifying means. .
[0015]
In this embodiment, a light pen is used. This light pen is equipped with a light sensitive mechanism at the tip of the pen. When using the light pen, signal light for position identification is transmitted from a small area on the display screen, and this signal light is displayed at high speed on the display screen. This is a device that recognizes a part designated by the light pen by the observer depending on where the signal light emitted from the light pen is received by scanning the top. When such a device is used, the outline of the dirt 44 that is the measurement target region may be designated from the screen 38 with the light pen 46 as shown in FIG.
[0016]
Touch pens and the like can be used in the same manner as this light pen. The touch pen is provided with a sensing mechanism that senses a designated part in advance on the surface of the display screen, and detects a part designated on the display image by the observer from the part sensed by the touch pen. Even when the touch pen is used, the dirt 44 that is the measurement target part may be designated from the measurement target part screen 38 as in the case of the light pen. In this way, if a touch pen or a light pen is used as the measurement area designating means, the apparatus can be easily operated as a pen. As described above, if a device that reads position information from the display image on the display means is used as the measurement region specifying means, there is an advantage that the operation is relatively simple.
[0017]
Devices commonly used in computers include a mouse and a touch panel. These are devices that move the pointer displayed on the display screen by operating a mouse or touch panel, and send a signal to the device when the pointer and the specified position overlap, allowing the device to recognize the specified position. It is. In the present invention, such a mouse or a touch panel can also be used. When a mouse or a touch panel is used, the pointer 48 displayed on the display screen 38 is designated in accordance with the outline of the dirt 44 that is the measurement target part by operating the measurement area designating means as shown in FIG. Just do it.
[0018]
If a mouse or a touch panel is used as a measurement area designating means in this way, there is an advantage that these devices are generally provided in a computer and thus no special external device is required.
As described above, the present invention can use a light pen, a touch pen, a mouse, a touch panel, or the like as a measurement area designating unit that uses an outline.
[0019]
In the apparatus of the present invention, the following four cases can be considered as the mechanism for designating the region where the spectrum measurement is desired from the sample observation image 42 in order to set the aperture, that is, the outline of the dirt 44 by the measurement region designating means. It is done. The first is a mechanism for tracing the outline of the dirt 44 that is the measurement target area. Second, when a part of the outline of the dirt 44 is designated from the sample observation image, a region having the same brightness or color indicated by the designated portion is recognized, and the outer periphery of the region is designated as the designated outline. Third, when a part of the outline of the dirt 44 is specified from the sample observation image, the adjacent display area displayed with the brightness or color with the least change in color or the color indicated by the specified location is outlined. Continuing by repeating the process of selecting as a constituent area and selecting the adjacent display area displayed with the lightness or color with the least change in color or color as the selected area as the contour constituent area. A mechanism that uses the contour configuration area as the contour line, and the fourth is a polygon that connects the specified points by specifying three or more points from the dirt contour line. That.
Hereinafter, it demonstrates in order.
[0020]
FIG. 4 shows an explanatory diagram of the outline designating mechanism of the spectrum measurement target region by the measurement region designating means.
First, as shown in FIG. 4A, the mechanism for tracing the contour line of the stain 44 that is the spectrum measurement target region from the first sample observation image 42 is the spectrum 44 that is the spectrum measurement target region. The designated portion 50 indicated by the dotted line in FIG. 4A is used as the contour line by continuously designating the contour line by the pointer 48. According to this mechanism, there is an advantage that the spectrum measurement target region desired by the observer can be specified accurately.
[0021]
When a part of the outline of the dirt 44 is designated from the second sample observation image, an area having the same brightness or color indicated by the designated location is recognized, and the outer periphery of the area is designated as the designated outline. The mechanism moves the pointer 48 to a part of the outline of the dirt 44 by the measurement area designating means as shown in FIG. 4B, and designates the point 52 as an example in FIG. 4B. In this way, the region 54 having the same brightness or color indicated by the designated location is recognized, and the outer periphery 56 of the region is used as the outline. According to this mechanism, the observer can designate the contour line only by designating a part of the region desired to be the contour line, so that the contour line can be designated very easily.
[0022]
When a part of the contour line is specified from the third sample observation image, the adjacent display area displayed with the lightness or color with the least change in color or color indicated by the specified location is selected as the contour composition area. In addition, by repeating the operation of selecting the adjacent display area displayed with the lightness or color with the least change in brightness or color as the selected area as the outline configuration area, the continuous outline configuration area The contour line can be designated as shown in FIG. 4B in the same way as the second mechanism, but the contour recognition mechanism is different. When the display image 38 is enlarged, it is constituted by a group of minute dots 58 as shown in FIG. 4D, and the brightness or color indicated by the designated dot 52 is compared with the brightness or color of the dots 60 to 74 which are adjacent display areas. Then, the adjacent display area displayed with the lightness or the color with the least change is selected as the outline forming area. Here, it is assumed that the dot 72 is selected. Then, the brightness or color indicated by the dot 72 is compared with the brightness or color of the dots 66 to 80 as the adjacent display area, and the adjacent display area 80 displayed with the lightness or color with the least change is outlined. The operation of selecting as a line configuration area is repeated, and a continuous contour configuration area 82 as shown in FIG. According to this mechanism, in addition to the advantage of the second mechanism, it is possible to accurately recognize the contour line even if the sample is not flat but displayed with gradation.
[0023]
Finally, a mechanism for designating a polygon connecting the designated points by designating three or more points from the contour line of the fourth sample observation image is as shown in FIG. 4 (f). Then, three or more points, for example, points 86 to 104 are designated from the outline of the dirt 44 by the measurement area designation means, and the polygon 84 connecting the points is recognized as the outline of the dirt 44. . According to this mechanism, when the shape of the measurement target area is a shape close to a polygon, it is possible to easily specify the measurement target area, and it is easier than the first mechanism by increasing the number of points to be specified. Moreover, it is possible to designate the contour line in a state close to the shape of the spectrum measurement target region that the observer wants to perform spectrum measurement.
[0024]
In describing this mechanism, in FIG. 4, a mouse is used as the measurement area designation means, and the contour line is designated using the mouse pointer 48. As described above, the touch panel or the light is used as the measurement area designation means. Even if a pen, a touch pen, or the like is used, the contour line can be designated by the same mechanism.
Further, in the present invention, the above-described four mechanisms are given as the mechanism for designating the contour line of the spectrum measurement target part. However, the mechanism for designating the contour line is not limited to this, and can be suitably designated elsewhere. If there is a mechanism, that mechanism may be used.
[0025]
As described above, when the contour line of the spectrum measurement region is designated by the measurement region designating means, the designated contour line 106 is displayed in the sample observation image 42 displayed in the sample observation image window 40 as shown in FIG. At the same time, an outline 108 having the same shape as the outline 106 is displayed on the CRT 38 as a measurement region designation image display window 110 that is a separate image from the sample observation image display window 40.
[0026]
In this state, the observer compares the contour of the dirt 44 displayed on the sample observation image 42 with the designated contour 106 to determine whether the designated contour 106 is the contour of the region where spectrum measurement is desired. If the contour is different as shown in FIG. 6, the wrong portion 112 is designated by the measurement area designating means, and the correct contour 114 is designated again to correct it. be able to. This correction is also reflected in the contour line displayed in the measurement area designation image display window. Although the correction method in the present embodiment has been described here, the contour correction method is not limited to this.
[0027]
When it is confirmed that an accurate contour has been specified, the actual aperture setting is entered. Assuming that the specification of the outline of the spectrum measurement region has been completed by the above-described procedure by the apparatus of FIG.
What is characteristic in the present invention is that the aperture setting, which has been set by repeating trial and error in the past, is set to the same shape as the rectangular image by setting the rectangular image on the measurement area designating image. With this, the aperture can be easily set.
[0028]
There are several measurement methods for measuring a spectrum. That is, in the designated contour line, one-point measurement for collecting a spectrum from only one point, in the designated contour line, multi-point measurement for collecting a spectrum from a plurality of points, in the designated contour line , Straight line measurement that collects a spectrum with a straight line passing through the contour line, mapping measurement to collect a spectrum from a wide place in and around the designated contour line, and investigate a wide spectrum state . The device of the present invention can cope with any of these measurements.
The aperture setting method for each of these measurements will be described below.
[0029]
First, the case of the most basic single point measurement in spectrum measurement will be described. FIG. 7 is an explanatory diagram showing a state in which the aperture is being set. As shown in FIG. 7, in the present invention, after the designation of the outline of the spectrum measurement region including the region where the spectrum measurement is desired is completed, which part of the spectrum measurement target region is desired to be measured from the sample observation image 42 Is designated by the light pen 32, a rectangular image 116 appears at a part corresponding to the designated part in the contour 108 displayed in the measurement area designated image display window 110. This rectangular image 116 becomes an aperture image set in actual measurement.
[0030]
The rectangular image that appears here can be freely changed in size and angle using a light pen 32 as shown in FIG. The display state of the CRT 38 in which the rectangular image 116 is set using the contour line 108 displayed in the measurement area designation image display window 110 in this manner is shown in FIG. The rectangular image 116 can be set within the contour line 108, and the size and angle can be adjusted while confirming that the rectangular image 116 does not protrude from the contour line. Is possible. Since the aperture is set corresponding to the rectangular image 116, the setting of the aperture, which has been set by trial and error in the past, can be performed very easily.
[0031]
In the present embodiment, the size and angle of the rectangular image 116 can be automatically set based on the contour line displayed in the measurement region designation image so as to have the maximum area within the contour line. Thus, when performing one-point measurement in the present invention, it is preferable that the aperture having the maximum size in the designated measurement region can be automatically set.
[0032]
This is the setting for multipoint measurement, which is almost the same as the setting method for single point measurement. FIG. 10 is a schematic diagram showing how the aperture is being set. In addition, about the site | part corresponding to FIG.7,8,9, the code | symbol 100 is added and described. As shown in FIG. 10, in the present invention, after the specification of the contour line 206 of the spectrum measurement target part including the part for which spectrum measurement is desired is completed, a plurality of parts whose spectra are to be measured are designated by the light pen 132 from the sample observation image 142. Then, as many rectangular images 216 as the designated number appear in the part corresponding to the designated part in the outline 208 displayed in the measurement region designated image display window 210.
[0033]
The rectangular image that appears here can be freely changed in size and angle by using the light pen 232 for each rectangular image, as in the case of single point measurement. A display state of the CRT 238 in which the rectangular image 216 is set using the outline 208 of the spectrum measurement target region displayed in the measurement region designation image display window 210 in this way is shown in FIG.
[0034]
In the present embodiment, the difference from the case of one-point measurement is that a list 218 indicating the size, coordinates, and angle information of each rectangular image is created because there are a plurality of designated points. The observer can check the information of each rectangular image numerically by this list.
[0035]
Since apertures can be set at a number of points at the same time, in addition to the effects described in single-point measurement, each measurement region can be set without overlapping, and the spectrum can be set without protruding from the region to be measured. An aperture can be set in a region where measurement is desired, and it has become possible to perform measurement very efficiently when compared with conventional devices.
[0036]
In this way, the one-point measurement for measuring the spectrum indicated by the specific part and the measurement somewhat different from the multi-point measurement are the linear measurement and the mapping measurement.
In linear measurement and mapping measurement, the change state of the spectrum of the sample can be captured visually, in other words, the existence state of the substance can be examined. Therefore, the entire region where the spectrum measurement is desired is measured. Inevitably, the number of measurement points is inevitably plural, and the measurement areas are arranged in an orderly manner.
[0037]
First, a setting method in the case of linear measurement will be described. FIG. 12 is a schematic diagram showing the state during aperture setting. In addition, about the site | part corresponding to FIG.7,8,9, the code | symbol 200 is added and described. As shown in FIG. 12 (a), after the specification of the contour line of the spectrum measurement target part including the part where spectrum measurement is desired in the present invention, the spectrum is measured along any straight line from the sample observation image 242. Use the light pen 232 to specify what you want to do. The straight line designation mechanism in the present embodiment assumes a straight line for which a spectral straight line measurement is desired from the sample observation image, and designates the start point 320 and the end point 322 with the light pen 232.
[0038]
Then, as shown in FIG. 12B, a rectangular image group 324 corresponding to the straight line is automatically set in the measurement region designation image display window 310. Each rectangular image 326 of the rectangular image group 324 can be adjusted by the light pen 232 as in the case of single point measurement or multipoint measurement in terms of size and angle. If adjusted, the adjustment is reflected in all the rectangular images of the set rectangular image group 324. Furthermore, when the number of automatically set rectangular images 324 is large or small, that is, when the number of measurement points is large or small, the observer can correct the number of measurement points.
[0039]
The measurement area designation image display window 310 that has been set in this way is shown in FIG. Each rectangular image group 324 corresponds to an aperture image, and an aperture is set for each of the rectangular images 326, and linear measurement can be performed by sequentially performing spectrum measurement.
[0040]
Finally, mapping measurement will be described. FIG. 13 is a schematic diagram showing a state during aperture setting. In addition, about the site | part corresponding to FIG.7,8,9, the code | symbol 300 is added and described. Since the mapping measurement is a spectrum measurement for the entire region where the measurement is desired, unlike the other measurements described above, after the specification of the contour line of the spectrum measurement target part including the part where the spectrum measurement is desired is completed. , Based on the contour line 408 designated from the sample observation image and drawn in the measurement area designation image display window 410 as shown in FIG. The optimal rectangular image group 428 is automatically set and displayed.
[0041]
Each rectangular image 430 in the rectangular image group 428 can be adjusted with a light pen in both the size and angle as in the case of the linear measurement described above, as in the case of single point measurement or multipoint measurement. If any one of the rectangular images is adjusted, the adjustment is reflected in all the rectangular images in the set rectangular image group 428.
[0042]
In addition, if there is an unnecessary rectangular image that is set automatically, delete the unnecessary rectangular image, or if a rectangular image is not set at the required location, set the rectangular image there. It is also possible to adjust the number of measurement points such as.
[0043]
FIG. 13B shows the measurement region designation image 410 that has been set.
After the setting is completed in this way, the mapping spectrum can be measured by associating the apertures one by one with the rectangular image and sequentially measuring the spectrum.
[0044]
For the mapping spectrum, it is common to collect spectrum data around the spectrum measurement target part for comparison. In such a case, it is not necessary to specify the exact contour line from the measured object image. Therefore, assuming the polygon surrounding the area where the mapping measurement is to be performed, the position of the apex is specified and the specified Alternatively, a polygon connecting the points may be displayed as an outline on the measurement region instruction image. This is shown in FIG. 13 (c).
[0045]
As shown in the figure, in order to designate a contour line from the sample observation image 342, a polygon 432 surrounding the dirt 344 is assumed, and the polygon 432 is designated as the contour line. In this embodiment, when such a polygon is designated, it is not necessary to trace the polygon, and by designating each vertex, it is recognized that the polygon connecting the vertices is designated. Therefore, when the observer designates a polygon, it is only necessary to input how much data around the stain 344 is to be collected in performing mapping measurement.
[0046]
When the polygon is designated as an outline, an outline 434 having the same shape as the designated polygon 432 is displayed in the measurement area designation image display window 410 as shown in FIG. When a command for performing mapping measurement is input, the rectangular image group 436 is automatically set in accordance with the contour line 434, so that the observer can measure the number of measurement points and the size of the rectangular image in accordance with the purpose of mapping measurement he / she wants to perform. The measurement can be performed with fine adjustment of the angle and the like.
[0047]
As described above, according to the present invention, since a rectangular image is automatically set based on a designated contour line, and aperture adjustment for performing mapping measurement can be performed by adjusting the rectangular image, conventionally, a complicated complex image is required. It is possible to easily set the optimum aperture while visually confirming the lattice points of the aperture, which has been difficult to set for the shape measurement target region.
In addition, if the contour line is designated by a polygon, the contour line can be easily designated in a desired range for performing mapping measurement, and the aperture can be set very easily.
[0048]
As described above, the four types of spectrum measurement have been described. Thus, the present invention uses the contour line of the measurement region designation image displayed on the display unit to determine the region where the spectrum measurement is performed by the measurement region designation unit. By setting with the rectangular image, the setting is transmitted from the computer to the control means, and the control means drives the driving means provided in the microscope based on the setting so that the aperture image has the same shape as the rectangular image. Since the aperture is set, the aperture can be set very easily, and the setting method can be made intuitive and easy to understand.
In the present embodiment, the procedure for performing the spectrum measurement after setting the aperture can be performed in the same manner as the conventional machine.
[0049]
Further, in the present embodiment, it is possible to create an overall enlarged image of the sample by combining the enlarged images of the sample observation image. Then, it is possible to determine a spectrum measurement target part while observing the entire magnified image, and measure the spectrum from the spectrum measurement target part. FIG. 14 shows an explanatory diagram of the process of determining a spectrum measurement target part from the entire magnified image of the sample and performing the spectrum measurement.
[0050]
The entire enlarged image 138 shown in FIG. 5A is displayed on the screen of the display means by taking the sample observation image for each region and pasting the observation images stored in the storage device in the apparatus. Then, when the observer observes the entire magnified image 138 of the sample and finds a site where the spectrum is desired to be collected, the site is designated by the measurement region designating means.
[0051]
When the desired region for spectrum acquisition is designated, the apparatus confirms the position of the region occupied by the designated region, and displays a real image of the region on the display screen 148. Now, suppose that the desired region for spectrum collection is the region 140. The apparatus reads the position data of this area from the storage device, and displays the real image observation image 144 of the area 140 in the sample observation image display window 142 as shown in FIG. As described above, the observer designates the contour line of the spectrum measurement target portion by the measurement region designation means from the real image observation image 144, and has the same shape as the designated contour line displayed in the measurement region designation image display window 146. Using the contour line, a rectangular image can be set and various spectrum measurements described above can be performed.
[0052]
Then, when the contour line of the spectrum measurement target part is designated in this way, when the whole enlarged image 138 is displayed again on the display means, the region 140 is designated as shown in FIG. The contour line of the spectrum measurement target area is displayed.
[0053]
In this way, observing the part to be spectrum measured using the whole magnified image has the advantage that it is easy to find the characteristic part because the whole can be overlooked. Is also displayed on the entire enlarged image, so that it is possible to prevent mistakes such as taking a spectrum at the same place many times.
The whole enlarged image referred to here is not limited to the whole image of the sample, and may be a whole image in a range that can be displayed as a sample observation image when the sample is large.
[0054]
When the spectrum of dirt was measured with the aperture set as described above, it was possible to obtain consistent results that were consistent even when compared with the results obtained using a conventional machine. As a result, it was confirmed that the aperture setting of the microspectrophotometer of this embodiment is accurate. Furthermore, compared with the measurement time performed by the conventional machine, the measurement performed using the present embodiment can make the setting of the aperture much simpler, and thus the measurement time can be shortened.
[0055]
In the present embodiment, the object image and the measurement region designation image are displayed on the same screen. However, the present invention is not limited to this, and one of the images is sequentially displayed as necessary. The display image may be specified depending on the viewer's intention or the will of the observer, and there is no particular limitation on this.
In describing the present invention, a light pen is mainly used as a measurement area designating means. However, the present invention is not limited to this, and various input devices such as a mouse, a touch pen, a touch panel, and a joystick are used. Is possible.
[0056]
【The invention's effect】
As described above, according to the microspectroscopic device of the present invention, the contour line of the spectrum measurement target part is designated, the contour line having the same shape as the contour line is used, and the rectangular image corresponding to the aperture therein Since the aperture can be set by setting, it is possible to easily set the optimum aperture for the object to be measured having a complicated shape.
[Brief description of the drawings]
FIG. 1 is a schematic view of a microspectroscopic device according to an embodiment of the present invention.
FIG. 2 is a schematic view of an infrared microspectroscopic device to which the present invention is applied.
FIG. 3 is an example of a display screen on which a sample observation image is displayed.
FIG. 4 is an explanatory diagram showing a mechanism for designating a contour line of a spectrum measurement target region.
FIG. 5 is an example of a display screen when a contour line of a spectrum measurement target region is designated from a sample observation image.
FIG. 6 is an example of a display screen when a contour line of a designated spectrum measurement target region is corrected.
FIG. 7 is an explanatory diagram showing a state in which an aperture is set in one-point measurement according to an embodiment of the present invention.
FIG. 8 is an explanatory diagram showing a state in which an aperture is set in one-point measurement according to an embodiment of the present invention.
FIG. 9 is an explanatory diagram showing a state in which an aperture is set in one-point measurement according to an embodiment of the present invention.
FIG. 10 is an explanatory diagram showing a state in which an aperture is set in multipoint measurement according to an embodiment of the present invention.
FIG. 11 is an explanatory diagram showing a state in which an aperture is set in multipoint measurement according to an embodiment of the present invention.
FIG. 12 is an explanatory diagram showing a state in which an aperture is being set in linear measurement according to an embodiment of the present invention.
FIG. 13 is an explanatory diagram showing a state in which an aperture is being set in mapping measurement according to an embodiment of the present invention.
FIG. 14 is an explanatory diagram showing a state in which a spectrum measurement target region is designated from an entire enlarged image according to an embodiment of the present invention.
[Explanation of symbols]
2 Microspectroscope
4 Microscope
6 Image capture means
8 Display means
10 Measurement area designation means
12 Mask means
14 Spectrum collection means
16 CPU
18 Control means
20 Driving means

Claims (5)

With a microscope that can observe a magnified image of a sample,
Image capturing means for capturing a microscopic image of the sample;
Display means for displaying the sample observation image captured by the image capturing means;
A spectrum measurement target region for collecting a spectrum from the sample observation image displayed on the display means is designated, and a measurement region designation means for setting a spectrum measurement region;
Mask means set so that a spectrum can be collected from the spectrum measurement area set by the measurement area designating means;
A spectrum collecting means for collecting a spectrum from a spectrum measurement region of the sample;
A contour line designating unit for designating a contour line of a spectrum measurement target part for which spectrum measurement is desired by designating a part of the spectrum measurement target part from a sample observation image,
A mechanism for designating a contour line of a spectrum measurement target part by the measurement region designating means is displayed on the display means,
A pointer that is moved by an operation of the measurement region designating unit or a device that reads position information from a display image on a display unit is used as the measurement region designating unit, and a contour of a spectrum measurement target region is measured from a sample observation image by the pointer or the device. If you specify a part of
The outline designating means recognizes an area having the same brightness or color indicated by the designated location, recognizes the outer periphery of the area as an outline,
Alternatively, when a part of the spectrum measurement target part is designated by the pointer or the device,
In the contour designating means, the sample observation image is composed of a group of minute dots, dots corresponding to a part of the spectrum target part are designated, and dots around the designated or selected dots are displayed in adjacent display areas. And selecting a dot in the adjacent display area having the smallest brightness or color difference indicated by the designated dot, and further displaying an adjacent display area having the smallest brightness or color difference indicated by the selected dot. Recognize it as a contour line by repeating the process of selecting the dots in it,
The contour line of the spectrum measurement object recognized by the contour line designating unit is displayed on the display unit as a part of the measurement region designating image,
The microscope is set based on the setting when the spectrum measurement region is set by the measurement region specifying unit using the contour line of the measurement region specifying image displayed on the display unit. Spectrometer. A microsurgical spectrometer according to claim 1, microscopic spectrometer, characterized in that the masking means there Pacha. 3. The microspectroscopic device according to claim 2, wherein the aperture is automatically set so as to have a maximum area within the contour line based on the contour line displayed in the measurement region designation image. A microsurgical spectrometer according to claim 2 or 3, be set automatically based on the measurement points and the aperture size outline displayed in the measurement area specifying images for performing mapping spectral measurement of the sample Microspectroscopic device characterized by A microsurgical spectrometer according to any one of claims 1 to 4, as the measurement area specifying device, at least a touch pen, a light pen, a touch panel, microspectroscopy apparatus characterized by using one of the mouse .

Images