JP4098792B2 - Mirror device - Google Patents

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JP4098792B2
JP4098792B2 JP2005168215A JP2005168215A JP4098792B2 JP 4098792 B2 JP4098792 B2 JP 4098792B2 JP 2005168215 A JP2005168215 A JP 2005168215A JP 2005168215 A JP2005168215 A JP 2005168215A JP 4098792 B2 JP4098792 B2 JP 4098792B2
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良文 高橋
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Description

本発明は、反射板の角度や位置を大きく可変するための技術に関する。   The present invention relates to a technique for greatly changing the angle and position of a reflector.

例えば可変波長光源や光フィルタ等の光学装置では、ミラーの角度や位置を可変し、光の出射方向や光路長を可変するミラー装置が用いられている。
上記のようなミラー装置のうち、小型で精密性が要求される場合、半導体製造に用いる基板に対するエッチング処理により精密に且つ小型に形成した、所謂ＭＥＭＳ（Micro Electro Mechanical Systems）構造のものが用いられている。 For example, in an optical device such as a variable wavelength light source or an optical filter, a mirror device that changes the angle and position of the mirror and changes the light emission direction and the optical path length is used.
Of the mirror devices described above, when a small size and high precision are required, a so-called MEMS (Micro Electro Mechanical Systems) structure that is precisely and smallly formed by etching a substrate used for semiconductor manufacturing is used. ing.

図１３は、ＭＥＭＳ技術で構成されたミラー回動型のミラー装置（所謂光スキャナ）１の基本的な構造を示すものである。   FIG. 13 shows a basic structure of a mirror rotation type mirror device (so-called optical scanner) 1 constructed by the MEMS technology.

このミラー装置１は、矩形枠状の固定部２の内側に、捩れ変形自在な軸部３、４を介して反射板５を回動自在に支持しており、電界や磁界による力Ｆ、Ｆ′を反射板５の両端に交互に付与し、反射板５を回動させる。   This mirror device 1 supports a reflecting plate 5 rotatably inside a rectangular frame-shaped fixed portion 2 via torsionally deformable shaft portions 3 and 4, and forces F and F due to electric and magnetic fields. 'Is alternately applied to both ends of the reflecting plate 5 to rotate the reflecting plate 5.

このような構造のミラー装置１では、半導体基板に対するエッチング処理により薄く且つ小型に形成されているため、高速動作が可能となる。   Since the mirror device 1 having such a structure is formed thin and small by etching processing on the semiconductor substrate, it can operate at high speed.

ところが、上記のように薄型に形成されたミラー装置１の反射板５に対して直接力を加えると、反射板５自体に歪みが発生し、所望の反射特性が得られない場合がある。   However, when a force is directly applied to the reflecting plate 5 of the mirror device 1 formed thin as described above, the reflecting plate 5 itself may be distorted, and desired reflection characteristics may not be obtained.

これを解決する技術として、反射板５に直接力を加えずに、軸部３、４に対して捩れ方向に力を与えることで、反射板５を間接的に回動駆動する方法が知られている。   As a technique for solving this, there is known a method of indirectly rotating and driving the reflecting plate 5 by applying a force in a twisting direction to the shaft portions 3 and 4 without directly applying a force to the reflecting plate 5. ing.

図１４に示すミラー装置１０は、上記間接駆動型の一例であり、矩形平板状の支持板１１の一面側両端にピエゾ素子１２、１３をそれぞれ設け、各ピエゾ素子１２、１３上に、可動板１４、１５をそれぞれ支持している。   A mirror device 10 shown in FIG. 14 is an example of the indirect drive type, and is provided with piezo elements 12 and 13 at both ends of one surface side of a rectangular flat plate-like support plate 11, and a movable plate on each of the piezo elements 12 and 13. 14 and 15 are supported.

各可動板１４、１５は、外形コの字状で左右対称に形成され、基部１４ａ、１５ａと、基部の両端から平行に延びた腕部１４ｂ、１４ｃ、１５ｂ、１５ｃとを有し、互いの腕部の先端同士を近接させた状態で各ピエゾ素子１２、１３にそれぞれ支持されており、駆動信号に対するピエゾ素子１２、１３の厚さ方向の変形により、前後方向（支持板１１の厚さ方向）に往復移動する。   Each of the movable plates 14 and 15 has a U-shaped outer shape and is symmetrically formed. The movable plates 14 and 15 have base portions 14a and 15a and arm portions 14b, 14c, 15b and 15c extending in parallel from both ends of the base portion. The arm portions are supported by the piezo elements 12 and 13 with their tips close to each other, and are deformed in the thickness direction of the piezo elements 12 and 13 with respect to the driving signal, so that the front and rear direction (thickness direction of the support plate 11). ).

可動板１４、１５の内側中央には矩形状の反射板１６が第１軸１７および第２軸１８を介して支持されている。   A rectangular reflecting plate 16 is supported at the inner center of the movable plates 14 and 15 via a first shaft 17 and a second shaft 18.

第１軸１７は、反射板１６の上縁中央から上方に直線状に延びて左右に分岐し、その一方が可動板１４の腕部１４ｂの先端に連結され、他方が可動板１５の腕部１５ｂの先端に連結されている。また、第２軸１８は、反射板１６の下縁中央から下方に直線状に延びて左右に分岐し、その一方が可動板１４の腕部１４ｃの先端に連結され、他方が可動板１５の腕部１５ｃの先端に連結されている。   The first shaft 17 linearly extends upward from the center of the upper edge of the reflecting plate 16 and branches left and right, one of which is connected to the tip of the arm portion 14 b of the movable plate 14 and the other is the arm portion of the movable plate 15. It is connected to the tip of 15b. The second shaft 18 linearly extends downward from the center of the lower edge of the reflecting plate 16 and branches to the left and right. One of the second shafts 18 is connected to the tip of the arm portion 14 c of the movable plate 14, and the other is the movable plate 15. It is connected to the tip of the arm portion 15c.

この構造のミラー装置１０では、例えば可動板１４が支持板１１側に移動すると、第１軸１７および第２軸１８が上方からみて時計回りに捩れ、反射板１６が時計回りに回動し、逆に、可動板１５が支持板１１側に移動すると、第１軸１７および第２軸１８が上方からみて反時計回りに捩れ、反射板１６が反時計回りに回動することになる。   In the mirror device 10 having this structure, for example, when the movable plate 14 moves to the support plate 11 side, the first shaft 17 and the second shaft 18 are twisted clockwise as viewed from above, and the reflecting plate 16 is rotated clockwise, Conversely, when the movable plate 15 moves to the support plate 11 side, the first shaft 17 and the second shaft 18 are twisted counterclockwise as viewed from above, and the reflecting plate 16 rotates counterclockwise.

したがって、可動板１４、１５が交互に同一方向に移動するようにピエゾ素子１２、１３を駆動することで、反射板１６を往復回動させることができる。   Therefore, the reflecting plate 16 can be reciprocally rotated by driving the piezo elements 12 and 13 so that the movable plates 14 and 15 alternately move in the same direction.

なお、上記構造のミラー装置は例えば次の特許文献１に開示されている。   The mirror device having the above structure is disclosed in, for example, the following Patent Document 1.

特開２００１−２６７４６７６号公報JP 2001-267476 A

しかしながら、上記構造のミラー装置１０のように、ピエゾ素子１２、１３により、可動板１４、１５を支持板１１に対して接近、離間するように移動させ、反射板１６を回動させる構造では、反射板１６に大きな振幅を与えることが困難であり、反射板１６を広い角度範囲に回動させることができないという問題があった。また、２つの可動板１４、１５をそれぞれピエゾ素子１２、１３で支持する構造であるため、装置全体を薄く形成できないという別の問題もあった。   However, in the structure in which the movable plates 14 and 15 are moved toward and away from the support plate 11 by the piezo elements 12 and 13 and the reflection plate 16 is rotated by the piezo elements 12 and 13 as in the mirror device 10 having the above structure, There is a problem that it is difficult to give a large amplitude to the reflecting plate 16, and the reflecting plate 16 cannot be rotated in a wide angle range. Further, since the two movable plates 14 and 15 are supported by the piezoelectric elements 12 and 13, respectively, there is another problem that the entire apparatus cannot be formed thin.

本発明は、この問題を解決し、反射板の角度や位置を大幅に可変でき、また、薄く形成できるミラー装置を提供することを目的としている。   An object of the present invention is to solve this problem, and to provide a mirror device in which the angle and position of a reflecting plate can be greatly varied and can be formed thin.

前記目的を達成するために、本発明の請求項１のミラー装置は、
枠板状に形成された固定部（２１）と、
基部（２５ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（２５ｂ、２５ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央側に向けた状態で前記枠内の一端側に配置された第１駆動板（２５）と、
前記第１駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第１駆動軸（２６）と、
前記第１駆動板の他方の腕部の外縁から前記第１駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第１駆動軸とともに前記固定部の枠内で前記第１駆動板を回動自在に支持する第２駆動軸（２７）と、
基部（３０ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（３０ｂ、３０ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央部に向けた状態で前記枠内の他端側に配置された第２駆動板（３０）と、
前記第２駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第３駆動軸（３１）と、
前記第２駆動板の他方の腕部の外縁から前記第３駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第３駆動軸とともに前記固定部の枠内で前記第２駆動板を回動自在に支持する第４駆動軸（３２）と、
前記固定部の枠内で且つ前記第１駆動板および第２駆動板とで囲まれた領域のほぼ中央に配置され、光を反射するための反射面が少なくとも一面側に形成された反射板（３５）と、
前記第１駆動板の一方の腕部に近い前記反射板の外縁と該第１駆動板の一方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第１支持軸（３６）と、
前記第１駆動板の他方の腕部に近い前記反射板の外縁と該第１駆動板の他方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第２支持軸（３７）と、
前記第２駆動板の一方の腕部に近い前記反射板の外縁と該第２駆動板の一方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第３支持軸（３８）と、
前記第２駆動板の他方の腕部に近い前記反射板の外縁と該第２駆動板の他方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第４支持軸（３９）と、
前記第１駆動板の基部および第２駆動板の基部に力を付与して前記第１駆動板および第２駆動板を回動させ、前記反射板の角度または位置を変化させる駆動手段（２２、２３、４０）とを備えている。 In order to achieve the above object, the mirror device according to claim 1 of the present invention comprises:
A fixing portion (21) formed in a frame plate shape;
The base portion (25a) and a pair of arm portions (25b, 25c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions are formed into a frame of the fixing portion. A first drive plate (25) arranged on one end side in the frame in a state directed toward the center side inside,
A first drive shaft (26) that connects between an outer edge of one arm portion of the first drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The first drive plate extends from the outer edge of the other arm portion so as to be aligned with the first drive shaft, connects the inner edge of the fixed portion, and is formed to be able to be twisted and deformed in the length direction thereof. A second drive shaft (27) for rotatably supporting the first drive plate within the frame of the fixed portion together with the first drive shaft;
The base portion (30a) and a pair of arm portions (30b, 30c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions is formed into a frame of the fixing portion. A second drive plate (30) disposed on the other end side in the frame in a state of being directed toward the center of the inside,
A third drive shaft (31) that connects between an outer edge of one arm portion of the second drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The second drive plate extends from the outer edge of the other arm of the second drive plate so as to be aligned with the third drive shaft, and is connected to the inner edge of the fixed portion so that it can be twisted and deformed in the length direction. A fourth drive shaft (32) for rotatably supporting the second drive plate within the frame of the fixed portion together with the third drive shaft;
A reflecting plate (disposed in the frame of the fixed portion and at substantially the center of the region surrounded by the first driving plate and the second driving plate) and having a reflecting surface for reflecting light formed on at least one surface side ( 35)
The outer edge of the reflection plate close to one arm portion of the first drive plate is connected to the tip of one arm portion of the first drive plate, and elastic deformation including torsional deformation along the length direction thereof. A free first support shaft (36);
The outer edge of the reflection plate close to the other arm portion of the first drive plate is connected to the tip of the other arm portion of the first drive plate, and elastic deformation including torsional deformation along its length direction A free second support shaft (37);
The outer edge of the reflection plate near one arm portion of the second drive plate is connected to the tip of the one arm portion of the second drive plate, and includes elastic deformation including torsional deformation along the length direction thereof. A free third support shaft (38);
The outer edge of the reflection plate close to the other arm portion of the second drive plate is connected to the tip of the other arm portion of the second drive plate, and includes elastic deformation including torsional deformation along the length direction thereof. A free fourth support shaft (39);
Driving means (22, for applying a force to the base of the first drive plate and the base of the second drive plate to rotate the first drive plate and the second drive plate to change the angle or position of the reflection plate) 23, 40).

また、本発明の請求項２のミラー装置は、請求項１記載のミラー装置において、
前記駆動手段は、
前記固定部に設けられ、前記第１駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第１電極（２２）と、
前記固定部に設けられ、前記第２駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第２電極（２３）と、
前記第１電極および第２電極に電圧を与えて前記第１駆動板および第２駆動板を回動させる駆動信号発生器（４０）とを含んでいることを特徴としている。 The mirror device according to claim 2 of the present invention is the mirror device according to claim 1,
The driving means includes
A first electrode (22) provided on the fixed part and for applying a voltage for generating an electrostatic attractive force between the fixed part and the base of the first drive plate;
A second electrode (23) for applying a voltage for generating an electrostatic attraction between the fixed portion and the base of the second drive plate;
And a drive signal generator (40) for applying a voltage to the first electrode and the second electrode to rotate the first drive plate and the second drive plate.

また、本発明の請求項３のミラー装置は、請求項２記載のミラー装置において、
絶縁層（１０１）を第１導電層（１０２）と第２導電層（１０３）とで挟む３層構造の一枚のＳＯＩ基板（１００）に対するエッチング処理により一体的に形成されたミラー装置であって、
前記固定部は、前記絶縁層を第１導電層と第２導電層とで挟む３層構造を有し、
前記第１電極および第２電極は、前記ＳＯＩ基板の導電層に対するエッチング処理で形成されたギャップ（２４）により前記固定部から絶縁されて形成されていることを特徴としている。 The mirror device according to claim 3 of the present invention is the mirror device according to claim 2,
A mirror device integrally formed by etching a single SOI substrate (100) having a three-layer structure in which an insulating layer (101) is sandwiched between a first conductive layer (102) and a second conductive layer (103). And
The fixing portion has a three-layer structure in which the insulating layer is sandwiched between a first conductive layer and a second conductive layer,
The first electrode and the second electrode are formed so as to be insulated from the fixed portion by a gap (24) formed by etching the conductive layer of the SOI substrate.

また、本発明の請求項４のミラー装置は、請求項３記載のミラー装置において、
前記第１電極と第２電極は前記ＳＯＩ基板の一方の導電層に形成されていることを特徴としている。 The mirror device according to claim 4 of the present invention is the mirror device according to claim 3,
The first electrode and the second electrode are formed in one conductive layer of the SOI substrate.

また、本発明の請求項５のミラー装置は、請求項３記載のミラー装置において、
前記第１電極は前記ＳＯＩ基板の一方の導電層に形成され、第２電極は前記ＳＯＩ基板の他方の導電層に形成されていることを特徴としている。 The mirror device according to claim 5 of the present invention is the mirror device according to claim 3,
The first electrode is formed on one conductive layer of the SOI substrate, and the second electrode is formed on the other conductive layer of the SOI substrate.

上記のように、本発明のミラー装置は、固定部の枠内の両端に設けた第１駆動板および第２駆動板の回動駆動により、反射板の第１駆動板寄りの位置および第２駆動板寄りの位置が固定部の表面から突出する方向あるいは引っ込む方向に変化して、反射板の角度あるいは位置が変化する構造であるため、その角度や位置を大きく可変することができる。   As described above, according to the mirror device of the present invention, the first driving plate and the second driving plate provided at both ends in the frame of the fixed portion are driven to rotate and the second driving plate is positioned closer to the first driving plate. Since the position near the drive plate changes in the direction protruding from the surface of the fixed portion or in the retracting direction and the angle or position of the reflection plate changes, the angle and position can be varied greatly.

また、絶縁層を第１導電層と第２導電層とで挟む３層構造のＳＯＩ基板により形成された固定部の導電層に対するエッチング処理で形成されたギャップにより、駆動手段を構成する第１電極と第２電極とを固定部から絶縁して形成したものでは、一枚の既成のＳＯＩ基板に対する簡単なエッチング処理によりミラー装置全体を構成することができ、少ない工程および材料で低コストに且つ薄型に製造できる。   The first electrode constituting the driving means is formed by a gap formed by etching the conductive layer of the fixed portion formed of the three-layer SOI substrate sandwiching the insulating layer between the first conductive layer and the second conductive layer. And the second electrode are insulated from the fixed portion, the entire mirror device can be formed by a simple etching process on a single existing SOI substrate, and it is low-cost and thin with fewer processes and materials. Can be manufactured.

以下、図面に基づいて本発明の実施の形態を説明する。
図１、図２は、本発明を適用したミラー装置２０の構成を示している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show a configuration of a mirror device 20 to which the present invention is applied.

これらの図に示しているように、ミラー装置２０は、例えばＳｉＯ２の絶縁層１０１を厚さが等しく高い導電性を有するシリコン（Ｓｉ）の第１導電層１０２と第２導電層１０３とで挟む３層構造のＳＯＩ基板１００に対するエッチング処理により一体的に形成されたものである。 As shown in these figures, the mirror device 20 includes, for example, an insulating layer 101 made of SiO 2 having a first conductive layer 102 and a second conductive layer 103 made of silicon (Si) having the same and high conductivity. The SOI substrate 100 having a three-layer structure sandwiched is integrally formed by etching.

固定部２１は、上記した絶縁層１０１、第１導電層１０２および第２導電層１０３からなる３層構造を有し、上板２１ａ、下板２１ｂ、側板２１ｃ、２１ｄにより矩形枠状に形成されている。   The fixing portion 21 has a three-layer structure including the insulating layer 101, the first conductive layer 102, and the second conductive layer 103, and is formed in a rectangular frame shape by the upper plate 21a, the lower plate 21b, and the side plates 21c and 21d. ing.

固定部２１の側板２１ｃ、２１ｄの一面側の第１導電層１０２部分には、櫛型の第１電極２２、第２電極２３が左右対称に設けられている。   Comb-shaped first electrodes 22 and second electrodes 23 are provided symmetrically on the first conductive layer 102 portion on one side of the side plates 21c and 21d of the fixing portion 21.

第１電極２２および第２電極２３は、エッチング処理により形成されたギャップ２４、２４により固定部２１の第１導電層部分と絶縁されている。   The first electrode 22 and the second electrode 23 are insulated from the first conductive layer portion of the fixed portion 21 by gaps 24 and 24 formed by an etching process.

第１電極２２には、固定部２１の枠の内側へ向かって延びた複数の突起２２ａが所定間隔で設けられ、第２電極２３にも、固定部２１の枠の内側へ向かって延びた複数の突起２３ａが所定間隔で設けられている。   The first electrode 22 is provided with a plurality of protrusions 22a extending toward the inside of the frame of the fixing portion 21 at a predetermined interval, and the second electrode 23 also has a plurality of protrusions extending toward the inside of the frame of the fixing portion 21. The projections 23a are provided at predetermined intervals.

固定部２１の枠内には、略コの字状に形成され左右対称の第１駆動板２５と第２駆動板３０とが配置され、第１駆動板２５と第２駆動板３０の間に反射板３５が配置されている。   A first drive plate 25 and a second drive plate 30 that are substantially U-shaped and symmetrical are arranged in the frame of the fixed portion 21, and are disposed between the first drive plate 25 and the second drive plate 30. A reflector 35 is disposed.

第１駆動板２５は、固定部２１の側板２１ｃに沿って延びた帯状の基部２５ａ、基部２５ａの両端から基部２５ａと直交する方向（固定部２１の上板２１ａ、下板２１ｂにそれぞれ沿った方向）に延びた一対の腕部２５ｂ、２５ｃとにより略コの字状に形成されており、一対の腕部２５ｂ、２５ｃを固定部２１の枠内の中央に向けた状態で固定部２１の枠内の左側に配置されている。   The first drive plate 25 has a strip-like base 25a extending along the side plate 21c of the fixed portion 21, and directions perpendicular to the base 25a from both ends of the base 25a (along the upper plate 21a and the lower plate 21b of the fixed portion 21, respectively. And a pair of arm portions 25b and 25c extending in the direction), and the pair of arm portions 25b and 25c is directed toward the center in the frame of the fixing portion 21 and Located on the left side of the frame.

また、基部２５ａの外縁には、第１電極２２の複数の突起２２ａの隙間にそれぞれの先端部が進入するように延びた複数本の突起２５ｄが平行に設けられている。   In addition, a plurality of projections 25 d extending in parallel so that the respective leading ends enter the gaps between the plurality of projections 22 a of the first electrode 22 are provided in parallel on the outer edge of the base portion 25 a.

第１駆動板２５の腕部２５ｂの上縁と固定部２１の上板２１ａの内縁と間は、長さ方向に捩れ変形可能に細く形成された第１駆動軸２６によって連結されている。また、第１駆動板２５の腕部２５ｃの下縁と固定部２１の下板２１ｂとの間は、長さ方向に捩れ変形可能に細く形成された第２駆動軸２７によって連結されている。   The upper edge of the arm portion 25b of the first drive plate 25 and the inner edge of the upper plate 21a of the fixed portion 21 are connected by a first drive shaft 26 that is formed so as to be twistable and deformable in the length direction. In addition, the lower edge of the arm portion 25c of the first drive plate 25 and the lower plate 21b of the fixed portion 21 are connected by a second drive shaft 27 that is thinly formed to be twistable in the length direction.

第１駆動軸２６と第２駆動軸２７は、固定部２１の側板２１ｃ、２１ｄと平行で且つ互いに一直線上に並ぶ位置に設けられており、固定部２１の内側で第１駆動板２５を回動自在に支持している。   The first drive shaft 26 and the second drive shaft 27 are provided at positions parallel to the side plates 21 c and 21 d of the fixed portion 21 and aligned with each other, and rotate around the first drive plate 25 inside the fixed portion 21. Supports freely.

第２駆動板３０は、第１駆動板２５と左右対称に形成され、固定部２１の側板２１ｄに沿って延びた帯状の基部３０ａ、基部３０ａの両端から基部３０ａと直交する方向（固定部２１の上板２１ａ、下板２１ｂにそれぞれ沿った方向）に延びた一対の腕部３０ｂ、３０ｃとにより略コの字状に形成されており、一対の腕部３０ｂ、３０ｃを固定部２１の枠内の中央に向けた状態で固定部２１の枠内の右側に配置されている。   The second drive plate 30 is formed symmetrically with the first drive plate 25 and extends along the side plate 21d of the fixed portion 21, and a direction perpendicular to the base portion 30a from both ends of the base portion 30a (the fixed portion 21). And a pair of arm portions 30b and 30c extending in a direction along each of the upper plate 21a and the lower plate 21b), and the pair of arm portions 30b and 30c is formed into a frame of the fixed portion 21. It is arranged on the right side in the frame of the fixed portion 21 in a state directed toward the center.

また、基部３０ａの外縁には、第２電極２３の複数の突起２３ａの隙間にそれぞれの先端部が進入するように延びた複数本の突起３０ｄが平行に設けられている。   In addition, a plurality of protrusions 30 d are provided in parallel on the outer edge of the base portion 30 a so as to extend into the gaps between the plurality of protrusions 23 a of the second electrode 23.

第２駆動板３０の腕部３０ｂの上縁と固定部２１の上板２１ａの内縁と間は、長さ方向に捩れ変形可能に細く形成された第３駆動軸３１によって連結されている。また、第２駆動板３０の腕部３０ｃの下縁と固定部２１の下板２１ｂとの間は、長さ方向に捩れ変形可能に細く形成された第４駆動軸３２によって連結されている。   The upper edge of the arm portion 30b of the second drive plate 30 and the inner edge of the upper plate 21a of the fixed portion 21 are connected by a third drive shaft 31 that is formed so as to be twistable and deformable in the length direction. Further, the lower edge of the arm portion 30c of the second drive plate 30 and the lower plate 21b of the fixed portion 21 are connected by a fourth drive shaft 32 that is thinly formed to be twistable in the length direction.

第３駆動軸３１と第４駆動軸３２は、固定部２１の側板２１ｃ、２１ｄと平行で且つ互いに一直線上に並ぶ位置に設けられており、固定部２１の枠内で第２駆動板３０を回動自在に支持している。   The third drive shaft 31 and the fourth drive shaft 32 are provided at positions parallel to the side plates 21 c and 21 d of the fixed portion 21 and aligned with each other, and the second drive plate 30 is disposed within the frame of the fixed portion 21. It is pivotably supported.

反射板３５は、外形が横長矩形で、第１駆動板２５と第２駆動板３０とで囲まれた矩形の領域の中央に配置されている。反射板３５の両面または一方の面には光を反射するための反射面が形成されている。   The reflection plate 35 has a horizontally long outer shape and is arranged at the center of a rectangular region surrounded by the first drive plate 25 and the second drive plate 30. A reflecting surface for reflecting light is formed on both surfaces or one surface of the reflecting plate 35.

反射板３５の外縁のうち、第１駆動板２５の上側の腕部２５ｂに近い位置と、第１駆動板２５の上側の腕部２５ｂの先端との間は、その長さ方向に沿った捩れ変形を含む弾性変形可能に細く且つＳ字に形成された第１支持軸３６を介して連結され、反射板３５の外縁のうち、第１駆動板２５の下側の腕部２５ｃに近い位置と、第１駆動板２５の下側の腕部２５ｂの先端との間も、第１支持軸３６と同一形状の第２支持軸３７を介して連結されている。   Between the position of the outer edge of the reflecting plate 35 close to the upper arm portion 25b of the first drive plate 25 and the tip of the upper arm portion 25b of the first drive plate 25, the twist along the length direction thereof. It is connected via a first support shaft 36 that is thin and S-shaped so as to be elastically deformable including deformation, and is located on the outer edge of the reflector 35 close to the arm portion 25c on the lower side of the first drive plate 25. Also, the tip of the lower arm portion 25 b of the first drive plate 25 is connected via a second support shaft 37 having the same shape as the first support shaft 36.

また、反射板３５の外縁のうち、第２駆動板３０の上側の腕部３０ｂに近い位置と、第２駆動板３０の上側の腕部３０ｂの先端との間は、第１支持軸３６と左右対称な第３支持軸３８を介して連結され、反射板３５の外縁のうち、第２駆動板３０の下側の腕部３０ｃに近い位置と、第２駆動板３０の下側の腕部３０ｂの先端との間は、第２支持軸３７と左右対称な第４支持軸３９を介して連結されている。   Further, between the outer edge of the reflecting plate 35 and the position close to the upper arm portion 30b of the second drive plate 30 and the tip of the upper arm portion 30b of the second drive plate 30, the first support shaft 36 and It is connected via a symmetric third support shaft 38, and a position close to the lower arm 30 c of the second drive plate 30 and the lower arm of the second drive plate 30 among the outer edges of the reflecting plate 35. The tip of 30b is connected via a second support shaft 37 and a symmetric fourth support shaft 39.

なお、図２に示しているように、上記した各駆動板２５、３０、各駆動軸２６、２７、３１、３２、反射板３５および各支持軸３６〜３９は、前記ＳＯＩ基板１００の第２導電層１０３により形成されており、非駆動状態（静止状態）において、各駆動板２５、３０の突起２５ｄ、３０ｄと、各電極２２、２３の突起２２ａ、２３ａとは厚さ方向にずれている。   As shown in FIG. 2, the drive plates 25, 30, the drive shafts 26, 27, 31, 32, the reflection plate 35, and the support shafts 36 to 39 are the second ones of the SOI substrate 100. The conductive layer 103 is formed, and the protrusions 25d and 30d of the drive plates 25 and 30 and the protrusions 22a and 23a of the electrodes 22 and 23 are shifted in the thickness direction in the non-drive state (stationary state). .

このため、各電極２２、２３と各駆動板２５、３０との間に電圧を印加すると、突起間の生じる静電的な吸引力により、各駆動板２５、３０はその突起２５ｄ、３０ｄの厚さ中心が電極２２、２３の突起２２ａ、２３ａの厚さ中心に一致する方向に回動することになる。   For this reason, when a voltage is applied between the electrodes 22 and 23 and the drive plates 25 and 30, the drive plates 25 and 30 have a thickness of the protrusions 25d and 30d due to the electrostatic attractive force generated between the protrusions. The center of rotation rotates in a direction that coincides with the thickness center of the protrusions 22a and 23a of the electrodes 22 and 23.

固定部２１の裏面（第２導電層部分）の任意の点、第１電極２２および第２電極２３は駆動信号発生器４０に接続されている。   Arbitrary points on the back surface (second conductive layer portion) of the fixing portion 21, the first electrode 22 and the second electrode 23 are connected to the drive signal generator 40.

駆動信号発生器４０は、第１電極２２および第２電極２３とともにこの実施形態の駆動手段を構成するものであり、固定部２１の第２導電層部分を基準電位として、第１電極２２および第２電極２３に対して駆動信号Ｓ１、Ｓ２を与え、反射板３５の位置あるいは角度を所望状態にする。   The drive signal generator 40 constitutes the drive means of this embodiment together with the first electrode 22 and the second electrode 23, and the first electrode 22 and the second electrode with the second conductive layer portion of the fixed portion 21 as a reference potential. Drive signals S1 and S2 are given to the two electrodes 23, and the position or angle of the reflecting plate 35 is set to a desired state.

ここで、反射板３５に対する駆動形態は位置可変と角度可変とがある。
位置可変の場合には、基本的に各電極２２、２３に駆動信号Ｓ１、Ｓ２を直流の同一電圧Ｖに設定する。 Here, the driving mode for the reflecting plate 35 includes variable position and variable angle.
In the case of variable position, the drive signals S1, S2 are basically set to the same DC voltage V for the electrodes 22, 23.

この場合、図３の（ａ）のように、第１駆動板２５は電圧Ｖに対応した力を受け、駆動軸２６、２７を中心にして反時計回りに回動し、第２駆動板３０も同じ大きさの力を受け、駆動軸３１、３２を中心にして時計回りに回動する。   In this case, as shown in FIG. 3A, the first drive plate 25 receives a force corresponding to the voltage V, rotates counterclockwise about the drive shafts 26 and 27, and the second drive plate 30. Also receives the same force and rotates clockwise around the drive shafts 31 and 32.

第１駆動板２５が反時計回りに回動すると、その腕部２５ｂ、２５ｃの先端は、図３において上方へ移動し、腕部２５ｂ、２５ｃの先端と第１支持軸３６、第２支持軸３７を介して連結されている反射板３５の左部も図３において上方に移動する。   When the first drive plate 25 rotates counterclockwise, the tips of the arm portions 25b, 25c move upward in FIG. 3, and the tips of the arm portions 25b, 25c, the first support shaft 36, and the second support shaft. 3 also moves upward in FIG. 3.

同様に、第２駆動板３０が時計回りに回動すると、その腕部３０ｂ、３０ｃの先端は、図３において上方へ移動し、腕部３０ｂ、３０ｃの先端と第３支持軸３８、第４支持３９を介して連結されている反射板３５の右部も図３において上方に移動する。   Similarly, when the second drive plate 30 rotates clockwise, the tips of the arm portions 30b and 30c move upward in FIG. 3, and the tips of the arm portions 30b and 30c, the third support shaft 38, and the fourth The right part of the reflector 35 connected via the support 39 also moves upward in FIG.

上記したように、このミラー装置２０は左右対称構造であるので、反射板３５は固定部２１の表面に平行な状態を維持したまま図３において上方へ平行移動することになり、各駆動板２５、３０の回動力と、各駆動軸２６、２７、３１、３２および各支持軸３６〜３９の変形に対する復帰力とが釣り合った位置で静止することになる。   As described above, since the mirror device 20 has a bilaterally symmetric structure, the reflecting plate 35 translates upward in FIG. 3 while maintaining a state parallel to the surface of the fixed portion 21, and each driving plate 25. , 30 and the return force against the deformation of the drive shafts 26, 27, 31, 32 and the support shafts 36 to 39 are stationary.

各駆動板２５、３０の回動力は電圧Ｖの大きさ（絶対値）に依存しているから、印加電圧をより高くすれば、図３の（ｂ）のように、反射板３５の位置をさらに上方に移動させることができる。   Since the rotational force of each drive plate 25 and 30 depends on the magnitude (absolute value) of the voltage V, if the applied voltage is made higher, the position of the reflector 35 is changed as shown in FIG. Further, it can be moved upward.

このように、各電極２２、２３に印加する電圧の絶対値が等しい状態でその値を可変することで、反射板３５を固定部２１に対して平行状態のまま所定範囲内で任意の位置に設定することができる。   In this way, by varying the value of the voltage applied to the electrodes 22 and 23 in the same state, the reflector 35 can be placed in an arbitrary position within a predetermined range while being parallel to the fixed portion 21. Can be set.

なお、機構的に不平衡要因がある場合、上記のように同一電圧を印加しても反射板３５が固定部２１に対して角度をもつ場合があるが、その場合には、印加電圧に僅かに差を与えて平行状態に補正すればよい。   When there is a mechanical imbalance factor, the reflector 35 may have an angle with respect to the fixed portion 21 even when the same voltage is applied as described above. It is sufficient to correct the parallel state by giving a difference to.

また、反射板３５の位置を連続的に且つ周期的に可変する場合には、例えば図４に示すように時間経過に伴って電圧が単調変化する三角波（正弦波でもよい）の信号を前記駆動信号Ｓ１、Ｓ２として第１電極２２、第２電極２３に同相供給すればよい。   Further, when the position of the reflector 35 is continuously and periodically changed, for example, as shown in FIG. 4, a triangular wave signal (which may be a sine wave) whose voltage monotonously changes with the passage of time is driven. The signals S1 and S2 may be supplied in phase to the first electrode 22 and the second electrode 23.

一方、角度可変の場合、基本的に駆動信号Ｓ１、Ｓ２の電圧を異なる値に設定する。
例えばＳ１＝Ｖ、Ｓ２＝０とすると、図５の（ａ）のように、第１駆動板２５は直流電圧Ｖに対応した力を受けて反時計回りに回動するが、第２駆動板３０は第２電極２３からの力を受けない。 On the other hand, when the angle is variable, the voltages of the drive signals S1 and S2 are basically set to different values.
For example, if S1 = V and S2 = 0, as shown in FIG. 5A, the first drive plate 25 rotates counterclockwise by receiving a force corresponding to the DC voltage V, but the second drive plate 30 does not receive a force from the second electrode 23.

したがって、第１駆動板２５の反時計回りに回動により、反射板３５の左部が図５において上方に移動する。このとき、反射板３５の左部に連結されている第１支持軸３６、第２支持軸３７は反時計回りに捩れ、その復帰力により反射板３５の右部を上方に移動させる方向、即ち、第２駆動板３０を時計回りに回動させる方向に働くが、第２駆動板３０を支持している第３駆動軸３１および第４駆動軸３２は各支軸軸３６〜３９より太く、支持軸の復帰力ではほとんど回動しない。   Therefore, the left portion of the reflecting plate 35 moves upward in FIG. 5 as the first driving plate 25 rotates counterclockwise. At this time, the first support shaft 36 and the second support shaft 37 connected to the left portion of the reflecting plate 35 are twisted counterclockwise, and the return force causes the right portion of the reflecting plate 35 to move upward, that is, The third drive shaft 31 and the fourth drive shaft 32 supporting the second drive plate 30 are thicker than the respective support shafts 36 to 39, while acting in the direction in which the second drive plate 30 is rotated clockwise. It hardly turns with the return force of the support shaft.

したがって、反射板３５の右部の位置も非駆動時とほぼ変わらず、左部のみが大きく上方に移動した状態、即ち時計回りに回動した状態で静止することになる。   Therefore, the position of the right part of the reflecting plate 35 is almost the same as that at the time of non-driving, and only the left part is largely moved upward, that is, it is stationary in a state where it is rotated clockwise.

逆に、Ｓ１＝０、Ｓ２＝Ｖの場合には、図５の（ｂ）のように、第２駆動板３０は直流電圧Ｖに対応した力を受けて時計回りに回動するが、第１駆動板２５は第１電極２２からの力を受けない。   Conversely, when S1 = 0 and S2 = V, the second drive plate 30 receives a force corresponding to the DC voltage V and rotates clockwise as shown in FIG. The one drive plate 25 does not receive a force from the first electrode 22.

したがって、第２駆動板３０の時計回りに回動により反射板３５の右部が上方に移動し、左部の位置は前記同様にほとんど変化しないため、反射板３５は反時計回りに回動した状態で静止することになる。   Accordingly, the right portion of the reflecting plate 35 is moved upward by the clockwise rotation of the second driving plate 30, and the position of the left portion is hardly changed in the same manner as described above, so that the reflecting plate 35 is rotated counterclockwise. It will be stationary in the state.

よって、例えば電極２２、２３に対して印加する駆動信号Ｓ１、Ｓ２の直流電圧の絶対値およびその大小関係を可変することにより、固定部２１に対する反射板３５の角度を所定範囲内で任意に設定することができる。   Therefore, for example, by changing the absolute value of the DC voltage of the drive signals S1 and S2 applied to the electrodes 22 and 23 and the magnitude relationship thereof, the angle of the reflector 35 with respect to the fixed portion 21 is arbitrarily set within a predetermined range. can do.

また、反射板３５の角度を連続的に且つ周期的に可変する場合には、例えば図６の（ａ）、（ｂ）に示すように最大電圧Ｖの矩形波の駆動信号Ｓ１と、これを反転した駆動信号Ｓ２とをそれぞれ第１電極２２、第２電極２３に供給すればよい。   When the angle of the reflector 35 is continuously and periodically varied, for example, as shown in FIGS. 6A and 6B, a rectangular wave drive signal S1 having the maximum voltage V and The inverted drive signal S2 may be supplied to the first electrode 22 and the second electrode 23, respectively.

また、上記位置設定と角度設定とを併用することで、例えば図７に示すように、反射板３５から遠く離れた点Ｏを中心にして反射板３５を回動させて任意の角度で停止させることができる。この動作モードは、半導体レーザ、回折格子とともにリトロー型の外部共振式可変波長光源を形成するミラー装置に適用できる。   Further, by using the position setting and the angle setting together, for example, as shown in FIG. 7, the reflecting plate 35 is rotated around a point O far from the reflecting plate 35 and stopped at an arbitrary angle. be able to. This operation mode can be applied to a mirror device that forms a Littrow external resonance variable wavelength light source together with a semiconductor laser and a diffraction grating.

このような実施形態のミラー装置２０は、反射板３５の両端にそれぞれ弾性変形可能な各支持軸３６〜３９を介して連結された第１駆動板２５と第２駆動板３０とを回動駆動することで、反射板３５の位置または角度を変化させているので、反射板３５の移動距離や角度を格段に大きくすることができる。   The mirror device 20 of such an embodiment rotationally drives the first drive plate 25 and the second drive plate 30 that are coupled to both ends of the reflector plate 35 via respective support shafts 36 to 39 that can be elastically deformed. Thus, since the position or angle of the reflecting plate 35 is changed, the moving distance and angle of the reflecting plate 35 can be significantly increased.

次に、上記ミラー装置２０の製造方法の一例について説明する。
始めに、図８の（ａ）のように、ＳＯＩ基板１００の第１導電層１０２の表面のうち、固定部２１、第１電極２２、第２電極２３の形成部分に、マスク２０１をフォトリソグラフィ技術により形成してから、図８の（ｂ）のように、ＩＣＰ−ＲＩＥ装置でマスク２０１に覆われていない第１導電層部分をエッチング除去する。 Next, an example of a method for manufacturing the mirror device 20 will be described.
First, as shown in FIG. 8A, a mask 201 is formed on the surface of the first conductive layer 102 of the SOI substrate 100 at a portion where the fixed portion 21, the first electrode 22, and the second electrode 23 are formed by photolithography. After the formation by the technique, as shown in FIG. 8B, the first conductive layer portion not covered with the mask 201 is removed by etching with an ICP-RIE apparatus.

次に、第１導電層１０２側のマスク２０１を除去して、図８の（ｃ）のように、ＳＯＩ基板１００の裏面側、即ち、第２導電層１０３の表面の固定部２１、各駆動板２５、３０、各駆動軸２６、２７、３１、３２、反射板３５、各支持軸３６〜３９の形成部分にマスク２０２を形成してから、図８の（ｄ）のように、マスク２０２に覆われていない第２導電層部分をエッチング除去する。   Next, the mask 201 on the first conductive layer 102 side is removed, and as shown in FIG. 8C, the fixing portion 21 on the back surface side of the SOI substrate 100, that is, the surface of the second conductive layer 103, each drive A mask 202 is formed on the formation portions of the plates 25, 30, the drive shafts 26, 27, 31, 32, the reflection plate 35, and the support shafts 36 to 39, and then, as shown in FIG. The portion of the second conductive layer not covered with is etched away.

最後に、フッ酸（ＦＨ）を用いて図８の（ｅ）のように、絶縁層１０１のうち、ギャップ２４の部分を除いて表面に露出している不要部分を除去することで、前記構成のミラー装置２０が完成する。   Finally, by using hydrofluoric acid (FH), as shown in FIG. 8E, the unnecessary portion exposed on the surface of the insulating layer 101 excluding the gap 24 is removed. The mirror device 20 is completed.

このように、上記実施形態のミラー装置２０は、一枚の既成のＳＯＩ基板１００に対する簡単なエッチング処理により構成することができ、少ない工程および材料で低コストに且つ薄型に製造できる。   As described above, the mirror device 20 according to the above embodiment can be configured by a simple etching process on a single existing SOI substrate 100, and can be manufactured thinly with a small number of processes and materials at low cost.

なお、前記実施形態では、反射板３５の移動距離や回動角を大きくするために、各支持軸３６〜３９をＳ字状に形成し、変形の余裕度を大きくしていたが、移動距離や回動角を微小変化させる場合には、図９のように各支持軸３６〜３９を直線に形成してもよい。   In the above embodiment, the support shafts 36 to 39 are formed in an S shape to increase the moving distance and the rotation angle of the reflecting plate 35, and the deformation margin is increased. When the rotation angle is slightly changed, the support shafts 36 to 39 may be formed in a straight line as shown in FIG.

また、前記実施形態では、第１駆動板２５および第２駆動板３０を第２導電層１０３のみで形成していたが、第１駆動板２５および第２駆動板３０を、絶縁層１０１、第１導電層１０２および第２導電層１０３からなる３層構造で形成してもよい。ただし、各支持軸３６〜３９は弾性変形しやすいように一方の導電層で薄く形成することが望ましい。   In the above embodiment, the first drive plate 25 and the second drive plate 30 are formed only by the second conductive layer 103. However, the first drive plate 25 and the second drive plate 30 are formed of the insulating layer 101, the first drive plate 30, and the second drive plate 30. A three-layer structure including the first conductive layer 102 and the second conductive layer 103 may be used. However, each of the support shafts 36 to 39 is desirably formed thin with one conductive layer so as to be easily elastically deformed.

また、前記実施形態では、第１電極２２と第２電極２３を同一面（同一導電層）に設けていたが、反射板３５の角度のみを可変する場合には、図１０、図１１に示すミラー装置２０′のように、第１電極２２を一方の導電層（第１導電層）側に設け、第２電極２をギャップ２４を含めて他方の導電層（第２導電層）側に設けるとともに、各駆動板２５、３０の基部２５ａ、３０ａを３層構造とし、第１駆動板２５には前記同様に第２導電層側に突起２５ｄを形成し、第２駆動板３０には第１導電層側に突起３０ｄを形成する。   Moreover, in the said embodiment, although the 1st electrode 22 and the 2nd electrode 23 were provided in the same surface (same conductive layer), when changing only the angle of the reflecting plate 35, it shows in FIG. 10, FIG. Like the mirror device 20 ′, the first electrode 22 is provided on one conductive layer (first conductive layer) side, and the second electrode 2 is provided on the other conductive layer (second conductive layer) side including the gap 24. At the same time, the base portions 25a and 30a of the drive plates 25 and 30 have a three-layer structure, and the first drive plate 25 is formed with a protrusion 25d on the second conductive layer side as described above, and the second drive plate 30 has the first A protrusion 30d is formed on the conductive layer side.

このミラー装置２０′の場合、両電極２２、２３に同一電圧の駆動信号Ｓ１、Ｓ２を与えることで、図１２のように、第１駆動板２５と第２駆動板３０とを反時計回りに回動させることができ、これにより反射板３５を時計回りに大きく回動させることができる。ただしこの場合、原理的に反射板３５を反時計回りに回動させた状態で静止させることはできない。   In the case of this mirror device 20 ', by applying drive signals S1, S2 of the same voltage to both electrodes 22, 23, the first drive plate 25 and the second drive plate 30 are rotated counterclockwise as shown in FIG. Thus, the reflector 35 can be largely rotated clockwise. However, in this case, in principle, the reflecting plate 35 cannot be stationary while being rotated counterclockwise.

本発明の実施形態の全体構成図Overall configuration diagram of an embodiment of the present invention 図１のＡ−Ａ線拡大断面図AA line enlarged sectional view of FIG. 実施形態の平行移動の動作説明図Operational explanation diagram of parallel movement of embodiment 実施形態の要部の信号例Signal example of the main part of the embodiment 実施形態の回動の動作説明図Rotation operation explanatory diagram of the embodiment 実施形態の要部の信号例Signal example of the main part of the embodiment 実施形態の動作説明図Operation explanatory diagram of the embodiment 実施形態の製造方法の一例を示す図The figure which shows an example of the manufacturing method of embodiment 実施形態の要部の変形例を示す図The figure which shows the modification of the principal part of embodiment. 他の実施形態の全体構成図Overall configuration diagram of another embodiment 図１０の実施形態のＢ−Ｂ線拡大断面図BB expanded sectional view of the embodiment of FIG. 他の実施形態の動作説明図Operation explanatory diagram of other embodiments 従来装置の概略構成図Schematic configuration diagram of conventional equipment 従来装置の概略構成図Schematic configuration diagram of conventional equipment

符号の説明Explanation of symbols

２０、２０′……ミラー装置、２１……固定部、２２……第１電極、２３……第２電極、２４……ギャップ、２５……第１駆動板、２６……第１駆動軸、２７……第２駆動軸、３０……第２駆動板、３１……第３駆動軸、３２……第４駆動軸、３５……反射板、３６……第１支持軸、３７……第２支持軸、３８……第３支持軸、３９……第４支持軸、４０……駆動信号発生器   20, 20 '... mirror device, 21 ... fixed part, 22 ... first electrode, 23 ... second electrode, 24 ... gap, 25 ... first drive plate, 26 ... first drive shaft, 27 …… Second drive shaft, 30 …… Second drive plate, 31 …… Third drive shaft, 32 …… Fourth drive shaft, 35 …… Reflector plate, 36 …… First support shaft, 37 …… First 2 support shafts 38... 3rd support shaft 39. 4th support shaft 40... Drive signal generator

Claims (5)

枠板状に形成された固定部（２１）と、
基部（２５ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（２５ｂ、２５ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央側に向けた状態で前記枠内の一端側に配置された第１駆動板（２５）と、
前記第１駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第１駆動軸（２６）と、
前記第１駆動板の他方の腕部の外縁から前記第１駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第１駆動軸とともに前記固定部の枠内で前記第１駆動板を回動自在に支持する第２駆動軸（２７）と、
基部（３０ａ）および該基部の両端から該基部と直交する方向に延びた一対の腕部（３０ｂ、３０ｃ）とにより略コの字状に形成され、該一対の腕部を前記固定部の枠内の中央部に向けた状態で前記枠内の他端側に配置された第２駆動板（３０）と、
前記第２駆動板の一方の腕部の外縁から前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能な第３駆動軸（３１）と、
前記第２駆動板の他方の腕部の外縁から前記第３駆動軸と一直線上に並ぶように延びて前記固定部の内縁との間を連結し、その長さ方向に捩れ変形可能に形成され、前記第３駆動軸とともに前記固定部の枠内で前記第２駆動板を回動自在に支持する第４駆動軸（３２）と、
前記固定部の枠内で且つ前記第１駆動板および第２駆動板とで囲まれた領域のほぼ中央に配置され、光を反射するための反射面が少なくとも一面側に形成された反射板（３５）と、
前記第１駆動板の一方の腕部に近い前記反射板の外縁と該第１駆動板の一方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第１支持軸（３６）と、
前記第１駆動板の他方の腕部に近い前記反射板の外縁と該第１駆動板の他方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第２支持軸（３７）と、
前記第２駆動板の一方の腕部に近い前記反射板の外縁と該第２駆動板の一方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第３支持軸（３８）と、
前記第２駆動板の他方の腕部に近い前記反射板の外縁と該第２駆動板の他方の腕部の先端との間を連結し、その長さ方向に沿った捩れ変形を含み弾性変形自在な第４支持軸（３９）と、
前記第１駆動板の基部および第２駆動板の基部に力を付与して前記第１駆動板および第２駆動板を回動させ、前記反射板の角度または位置を変化させる駆動手段（２２、２３、４０）とを備えたミラー装置。 A fixing portion (21) formed in a frame plate shape;
The base portion (25a) and a pair of arm portions (25b, 25c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions are formed into a frame of the fixing portion. A first drive plate (25) arranged on one end side in the frame in a state directed toward the center side inside,
A first drive shaft (26) that connects between an outer edge of one arm portion of the first drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The first drive plate extends from the outer edge of the other arm portion so as to be aligned with the first drive shaft, connects the inner edge of the fixed portion, and is formed to be able to be twisted and deformed in the length direction thereof. A second drive shaft (27) for rotatably supporting the first drive plate within the frame of the fixed portion together with the first drive shaft;
The base portion (30a) and a pair of arm portions (30b, 30c) extending in a direction orthogonal to the base portion from both ends of the base portion are formed in a substantially U-shape, and the pair of arm portions is formed into a frame of the fixing portion. A second drive plate (30) disposed on the other end side in the frame in a state of being directed toward the center of the inside,
A third drive shaft (31) that connects between an outer edge of one arm portion of the second drive plate and an inner edge of the fixed portion, and is capable of being twisted and deformed in the length direction thereof;
The second drive plate extends from the outer edge of the other arm of the second drive plate so as to be aligned with the third drive shaft, and is connected to the inner edge of the fixed portion so that it can be twisted and deformed in the length direction. A fourth drive shaft (32) for rotatably supporting the second drive plate within the frame of the fixed portion together with the third drive shaft;
A reflecting plate (disposed in the frame of the fixed portion and at substantially the center of the region surrounded by the first driving plate and the second driving plate) and having a reflecting surface for reflecting light formed on at least one surface side ( 35)
The outer edge of the reflection plate close to one arm portion of the first drive plate is connected to the tip of one arm portion of the first drive plate, and elastic deformation including torsional deformation along the length direction thereof. A free first support shaft (36);
The outer edge of the reflection plate close to the other arm portion of the first drive plate is connected to the tip of the other arm portion of the first drive plate, and elastic deformation including torsional deformation along its length direction A free second support shaft (37);
The outer edge of the reflection plate near one arm portion of the second drive plate is connected to the tip of the one arm portion of the second drive plate, and includes elastic deformation including torsional deformation along the length direction thereof. A free third support shaft (38);
The outer edge of the reflection plate close to the other arm portion of the second drive plate is connected to the tip of the other arm portion of the second drive plate, and includes elastic deformation including torsional deformation along the length direction thereof. A free fourth support shaft (39);
Driving means (22, for applying a force to the base of the first drive plate and the base of the second drive plate to rotate the first drive plate and the second drive plate to change the angle or position of the reflection plate) 23, 40). 前記駆動手段は、
前記固定部に設けられ、前記第１駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第１電極（２２）と、
前記固定部に設けられ、前記第２駆動板の基部との間に静電的な引力を生じさせるための電圧を印加するための第２電極（２３）と、
前記第１電極および第２電極に電圧を与えて前記第１駆動板および第２駆動板を回動させる駆動信号発生器（４０）とを含んでいることを特徴とする請求項１記載のミラー装置。 The driving means includes
A first electrode (22) provided on the fixed part and for applying a voltage for generating an electrostatic attractive force between the fixed part and the base of the first drive plate;
A second electrode (23) for applying a voltage for generating an electrostatic attraction between the fixed portion and the base of the second drive plate;
The mirror according to claim 1, further comprising a drive signal generator (40) for applying a voltage to the first electrode and the second electrode to rotate the first drive plate and the second drive plate. apparatus. 絶縁層（１０１）を第１導電層（１０２）と第２導電層（１０３）とで挟む３層構造の一枚のＳＯＩ基板（１００）に対するエッチング処理により一体的に形成されたミラー装置であって、
前記固定部は、前記絶縁層を第１導電層と第２導電層とで挟む３層構造を有し、
前記第１電極および第２電極は、前記ＳＯＩ基板の導電層に対するエッチング処理で形成されたギャップ（２４）により前記固定部から絶縁されて形成されていることを特徴とする請求項２記載のミラー装置。 A mirror device integrally formed by etching a single SOI substrate (100) having a three-layer structure in which an insulating layer (101) is sandwiched between a first conductive layer (102) and a second conductive layer (103). And
The fixing portion has a three-layer structure in which the insulating layer is sandwiched between a first conductive layer and a second conductive layer,
3. The mirror according to claim 2, wherein the first electrode and the second electrode are formed to be insulated from the fixed portion by a gap (24) formed by etching the conductive layer of the SOI substrate. apparatus. 前記第１電極と第２電極は前記ＳＯＩ基板の一方の導電層に形成されていることを特徴とする請求項３記載のミラー装置。   4. The mirror device according to claim 3, wherein the first electrode and the second electrode are formed on one conductive layer of the SOI substrate. 前記第１電極は前記ＳＯＩ基板の一方の導電層に形成され、前記第２電極は前記ＳＯＩ基板の他方の導電層に形成されていることを特徴とする請求項３記載のミラー装置。   4. The mirror device according to claim 3, wherein the first electrode is formed on one conductive layer of the SOI substrate, and the second electrode is formed on the other conductive layer of the SOI substrate.
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JP6514804B1 (en) * 2017-07-06 2019-05-15 浜松ホトニクス株式会社 Optical device
JP6480091B1 (en) 2017-07-06 2019-03-06 浜松ホトニクス株式会社 Mirror unit and optical module
EP4160295A1 (en) 2017-11-15 2023-04-05 Hamamatsu Photonics K.K. Optical device production method

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