JP4044475B2 - Curvature setting device for polishing jig - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a curvature setting device for a polishing jig, and in particular, a balloon for a polishing jig used in a polishing device for polishing a concave surface made of a toric surface, an aspherical surface, a non-toric surface, an arbitrary free-form surface or the like of a plastic lens. The present invention relates to a curvature setting device for a polishing jig that automatically sets the curvature of a dome-shaped surface of a member according to the shape of a surface to be polished of a lens.
[0002]
[Prior art]
Conventionally, in order to polish a concave surface of a lens cut into a spherical or toric surface shape by an NC control curve generator with a polishing apparatus, a polishing pad is attached to a metal polishing jig having a convex surface substantially matching the shape of the concave surface to be polished. Is applied by sliding the polishing jig and the lens relative to each other in a state where the polishing jig is pressed against the concave surface to be polished. Therefore, in such a polishing method, it is necessary to prepare different polishing jigs for each concave shape of the lens to be polished. For example, in the case of a toric lens for correcting astigmatism, a toric surface (a part of a surface obtained by rotating an arc around the axis that is in the same plane as the arc and does not pass through the center of curvature of the arc) is 3000 to 4000. Since there are many types, it was necessary to prepare as many polishing jigs as there were. For this reason, not only the manufacturing cost of the polishing jig is increased, but also a large storage space is required for orderly storing a large number of polishing jigs, and the management thereof is complicated.
[0003]
Also, not only spherical surfaces and toric surfaces, but also aspherical surfaces (parts of rotating surfaces whose curvature continuously changes from the apex to the periphery), non-toric surfaces (surfaces having mutually perpendicular principal meridians with different curvatures, at least On the other hand, a concave surface with a complicated shape, such as a free-form surface such as a progressive multifocal lens, may be formed. The conventional polishing method has a problem that it cannot be polished. Therefore, as a method for solving such a problem, for example, a polishing apparatus and a polishing jig described in Patent Document 1 have been proposed.
[0004]
[Patent Document 1]
JP 2000-117604 A
[0005]
The polishing apparatus disclosed in the above Japanese Unexamined Patent Publication No. 2000-117604 includes a holding tool for holding an object to be polished, a polishing jig having a flexible sheet that is inflated into a dome shape by air pressure, and the flexible sheet. A polishing pad that is attached to the surface of the workpiece, and the object to be polished in a track-free polishing locus in which the locus of polishing is slightly shifted every round by the reciprocating motion of the holder in the right and left and back and forth directions and the swinging movement of the polishing jig. A surface to be polished of an object is polished by an abrasive supplied between the polishing pad and the surface to be polished.
[0006]
In this way, if the curvature of the dome is changed by air pressure, a single jig can handle a wide range of concave shapes, so there is no need to prepare different polishing jigs for each concave shape. There is an advantage that the number can be greatly reduced.
[0007]
[Problems to be solved by the invention]
In using the above-described polishing jig, it is desired to develop an apparatus capable of automatically performing a dome curvature setting operation in accordance with the curvature of the surface to be polished in order to improve workability.
[0008]
The polishing apparatus disclosed in the above Japanese Patent Application Laid-Open No. 2000-117604 sets the curvature of the dome portion by changing the internal pressure of the flexible sheet, but the deformation amount of the dome portion with respect to the pressure fluctuation amount is large. In some cases, it may be difficult to adjust the pressure according to the curvature, and the desired curvature may not be obtained even with the same pressure due to deterioration of the flexible sheet.
[0009]
Therefore, the present inventors have previously measured the correlation between the vertex height of the dome portion and the curvature, and by supplying air, the dome portion of the balloon member is adjusted to a height corresponding to the desired curvature. It was considered to use a method of inflating until the dome portion was set.
[0010]
In the practical application of an apparatus using such a method, it is desired that the apex height can be accurately measured by a simple operation, and that the apparatus has a simple structure and is inexpensive. Further, in order to maintain the measurement accuracy, periodic adjustment is required, but it is desirable that the adjustment work be easy.
[0011]
The present invention has been made to meet the above-described conventional problems and requirements, and the object of the present invention is to accurately measure the apex height of various dome parts having different curvatures with a relatively simple structure. It is another object of the present invention to provide a curvature setting device for a polishing jig that is easy to operate for setting the curvature.
[0012]
[Means for Solving the Problems]
To achieve the above object, according to a first aspect of the present invention, there is provided a curvature setting for a polishing jig in which the surface of the balloon member is inflated into a dome shape by supplying air to the balloon member of the polishing jig and set to a predetermined curvature. An apparatus having an air inlet to which a valve of the polishing jig is connected and on which the polishing jig is installed; a stepping motor for moving the slider up and down; and a height measurement position of the balloon member A height measuring device that is mounted on the slider so as to be positioned above and measures the apex height of the dome surface of the balloon member, a control unit that sends a pulse signal to the stepping motor, and a control unit that controls the control unit. Height input means for inputting vertex height data on the surface of the balloon member, and the height measurement is performed at a height corresponding to the vertex height data input from the height input means. The height measuring device detects the apex height of the surface of the balloon member expanded by the air supply, and stops the air supply to set the curvature of the surface of the balloon member. is there.
[0013]
In the first invention, when air is supplied to the balloon member, the surface of the balloon member expands in a dome shape (hereinafter, the portion expanding in the dome shape is referred to as a dome portion). Since there is a correlation between the apex height of the dome and the curvature, this correlation is measured in advance, and the dome is adjusted to a predetermined curvature by measuring the apex height of the dome with a height measuring device. It can be determined whether or not.
In the actual measurement, the height measuring device is moved to a predetermined height by the stepping motor, so even a variety of dome parts with different curvatures have a minute height change of about 0.1 mm. Can be measured. When the height measuring device detects the apex height of the dome, the detection signal is sent to the control unit. The control unit determines that the curvature of the dome portion has reached a predetermined curvature when the detection signal is input. Further, when the height corresponding to the data input to the control unit becomes equal to the height detected by the height measuring device, the control unit stops the supply of air.
[0014]
According to a second invention, in the first invention, the height measuring device is a vertically movable height detecting means that contacts a vertex of the dome-shaped surface of the balloon member, and the height detecting means is a balloon member. And a detection means for detecting the height detection means.
[0015]
In the second invention, when the dome portion is expanded by supplying air, the height detecting means is pushed up by the dome portion. When the height detection means rises by a certain amount, the detection means detects the height detection means.
[0016]
In a third aspect based on the second aspect, the detection means for detecting the height detection means is a photosensor.
[0017]
In the third invention, since the photosensor is used, a detection means that is simple in structure and inexpensive can be obtained.
[0018]
According to a fourth invention, in the first, second or third invention, the height measuring device is attached to a slider via a zero point adjusting mechanism so that the height can be adjusted.
[0019]
In the fourth invention, the zero point adjustment mechanism performs the zero point adjustment of the height measuring device. The zero point adjustment is to adjust the height of the height measuring device with respect to the slider so that the height from the reference plane can be accurately detected.
[0020]
In a fifth aspect based on the fourth aspect, a position where the slider is raised to a predetermined height is defined as an origin position, and a pulse signal having a predetermined number of pulses from the origin position is sent from the control unit to the stepping motor. A position where the slider is lowered by a distance corresponding to the number of pulses is set as a zero point adjustment position, and a pulse signal of the number of pulses necessary to descend from the origin position to a height position corresponding to the height data is obtained. The slider is sent from the control unit to the stepping motor to lower the slider.
[0021]
In the fifth invention, when the slider is lowered from the origin position by a distance corresponding to the required number of pulses by the stepping motor, the height measuring device has a height corresponding to the vertex height data inputted from the height input means. Located in.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
1 is a front view showing an embodiment of a curvature setting device for a polishing jig according to the present invention, FIG. 2 is a side sectional view showing the same curvature setting device, and FIG. 3 is a state in which the polishing jig is installed on an installation table. 4 is an enlarged cross-sectional view taken along the line IV-IV in FIG. 3, FIG. 5 is a cross-sectional view showing the structure and valve of the air inlet, and FIG. 7 and 7 are cross-sectional views of the height measuring device. 8 is a schematic configuration diagram of a polishing apparatus in which the curvature setting apparatus is used, FIG. 9 is a plan view showing a polishing jig to which a polishing pad is attached, FIG. 10 is a bottom view showing the polishing jig, and FIG. 9 is a cross-sectional view taken along line XI-XI, FIG. 12 is a view showing the relationship between the height of the polishing jig and the radius of curvature of the dome portion of the balloon member, FIG. 13 is a plan view showing the polishing pad, and FIG. FIGS. 15A and 15B are diagrams showing trackless polishing trajectories, and FIGS. 16A, 16B and 16C are the zero point adjustment of the height measuring device and the dome portion. FIG. 17 is a diagram for explaining the measurement of the apex height, FIG. 17 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting device, and FIG. 18 is a diagram showing another embodiment of the mounting structure of the height measuring device. FIG. 19 is a block diagram of the curvature setting device.
[0023]
The curvature setting device for a polishing jig according to the present invention is used in a polishing device for polishing a concave surface of a spectacle lens. In the present embodiment, an example applied to polishing a concave surface made of a toric surface of a plastic lens for correcting astigmatism is shown. As a lens to be polished, a semi-finished lens having only a convex surface made of urethane or epithio resin was used.
[0024]
First, before explaining the curvature setting apparatus for a polishing jig according to the present invention, the configuration of the polishing apparatus and the polishing jig used in this polishing apparatus will be outlined.
In FIG. 8, a spectacle lens polishing apparatus denoted as a whole by reference numeral 1 includes an apparatus main body 2 installed on the floor, and a paper axis centering on a horizontal axis 3 that is movable to the apparatus main body 2 in the left-right direction on the paper surface. A gate-shaped arm 4 rotatably disposed in a direction orthogonal to the arm, an arm drive device (not shown) for reciprocating the arm 4 in the left-right direction and rotating in the direction orthogonal to the paper surface, and the arm 4 and a lens mounting portion 6 to which a lens 5 is mounted via a lens holder 7, and a jig driving device (not shown) disposed in the apparatus main body 2 so as to be positioned below the lens mounting portion 6. Thus, a swinging device 8 or the like that swings and swings around a vertical axis K (not rotating) is provided. Further, a polishing jig 9 detachably provided on the rocking device 8, a polishing pad 10 detachably attached to the polishing jig 9, a lens lifting device 11 for raising and lowering the lens mounting portion 6, and the like It has. The oscillating device 8 is attached to the vertical rotating shaft 21 so as to swing and swing at an oscillating angle α (for example, 5 °), and the polishing jig 9 is provided on the upper surface. Yes.
[0025]
Such a polishing apparatus 1 is widely used conventionally except for the new structure of the polishing jig 9. For example, a general-purpose polishing apparatus (TORO-X2SL) manufactured by LOH, which is generally commercially available, is used. It is used for polishing the lens 5.
[0026]
The lens 5 is a semi-finished lens in which only the convex surface 5a is finished, and the concave surface 5b is cut into a predetermined toric surface shape by a curve generator that performs three-dimensional NC control in advance (processing accuracy within 3 μm: lens diameter) 50 mm, maximum surface roughness Ry 0.3 to 0.5 μm). In order to attach the lens 5 to the curve generator and the polishing apparatus 1, the lens holding body 7 is attached to the lens convex surface 5a in advance by an apparatus called a layout blocker manufactured by LOH, for example.
[0027]
The lens holder 7 is composed of a yato 13 made of tool steel and the like, and an adhesive 16 that bonds the yato 13 and the lens 5 together. As the adhesive 16, a low melting point alloy, for example, an alloy composed of bismuth, lead, tin, indium, gallium (melting point: about 49 ° C.) is used.
[0028]
The concave surface polishing of the lens 5 by the polishing apparatus 1 is performed by attaching a lens 5 having a concave surface 5b cut to the lens mounting portion 6 of the arm 4 via a lens holder 7 and attaching a polishing pad 10 to the polishing jig 9. Is attached to the rocking device 8, and the lens 5 is lowered by the lens lifting device 11 to press the concave surface 5 b against the surface of the polishing pad 10. In this state, the abrasive is supplied to the surface of the polishing pad 10, and the swinging device 8 is swung and swung while the arm 4 is reciprocated in the left and right and front and rear directions. By these movements, the concave surface 5b of the lens 5 is polished by the polishing pad 10 and the polishing agent in a trackless polishing locus in which the polishing locus is slightly shifted every round as shown in FIG. 15 (a) or (b). Finish to the desired toric surface. The polishing allowance is about 5 to 9 μm. As the abrasive, for example, a solution in which an abrasive (abrasive grains) such as alumina oxide or diamond powder is dispersed in a polishing liquid (eg, nitric acid aqueous solution) is used.
[0029]
4, 5, and 9 to 11, the polishing jig 9 closes the balloon member 25 that is formed in a cup shape by an elastic material and that opens on the back surface side, and the lower surface side opening of the balloon member 25. A fixing tool 26 that holds the inside of the balloon member 25 and a valve 27 that supplies air 23 to the inside of the balloon member 25 are configured.
[0030]
The balloon member 25 has a substantially oval shape when viewed from the front and a surface having a flat or gently convex curved surface, and a substantially oval shape integrally extending downward from the outer periphery of the dome portion 25A. The tube portion 25B and an annular inner flange 25C extending integrally at the rear end of the tube portion 25B are configured.
[0031]
As the material of the balloon member 25, for example, synthetic rubber (for example, IIR) or natural rubber close to natural rubber having a hardness of 20 to 50 degrees (JIS) is used. The thickness T of the balloon member 25 is substantially uniform throughout and is about 0.5 to 2 mm (usually equal to about 1 mm). It is preferable to prepare a plurality of types of balloon members 25 according to the size of the lens 5 to be polished and the shape of the surface to be polished.
[0032]
4 and 11, the fixture 26 is composed of two members, an inner fixture 29 and an outer fixture 30, which are arranged in a stacked manner, whereby the lower end portion of the tubular portion 25B of the balloon member 25 and the inner flange 25C are connected to each other. By sandwiching from the inside and the outside, the lower surface side opening of the balloon member 25 is hermetically sealed.
[0033]
The inner fixture 29 is formed of an elliptical plate having the same size as the inner shape of the cylindrical portion 25B of the balloon member 25, and forms a sealed space 32 together with the dome portion 25A of the balloon member 25.
[0034]
The outer fixing tool 30 includes a main body 30A formed in an elliptical cup shape that opens upward, and a protrusion 30B that protrudes integrally with the lower surface of the main body 30A, and has a recessed portion 36 of the main body 30A. The inner fixing tool 29 is fitted and inserted together with the cylindrical portion 25 </ b> B of the balloon member 25, and is fixed by a plurality of set screws 37. Thereby, the inner flange 25C of the balloon member 25 is pressed against the bottom surface of the recessed portion 36, and the sealed space 32 of the balloon member 25 is kept airtight.
[0035]
The protruding body 30B of the outer fixing tool 30 extends over the entire length of the lower surface of the main body 30A in the major axis direction of the recessed portion 36 of the outer fixing tool 30, and two engaging recesses 38, 39 are formed on the lower surface of the protruding body 30B. Through holes 42 (FIGS. 10 and 11) are formed in the upper surface of the main body 30A, and engaging grooves 40 (FIGS. 4 and 10) are formed on the left and right side surfaces over the entire length.
[0036]
In FIG. 5, the valve 27 includes a valve body 43 whose upper end is screwed into a screw hole 41 provided in the inner fixture 29 and whose lower end is located in the through hole 42 of the outer fixture 30. A ball 44, conical coil springs 45, 46, an exhaust pin 47, a seat 48 and an E ring 49 are incorporated in the valve body 43.
[0037]
The inside of the valve main body 43 is partitioned into two upper and lower chambers 51 a and 51 b by a partition wall 50, and these two chambers can be communicated by a communication hole 52 provided in the partition wall 50. The ball 44 is housed in the upper chamber 51 a and is biased downward by the conical coil spring 45, so that the ball 44 is normally seated on a valve seat 53 formed in the upper opening of the communication hole 52, thereby causing the communication hole 52. Is blocked.
[0038]
The exhaust pin 47 is disposed in the lower chamber 51b so as to be movable up and down, penetrates the receiving seat 48 and the E-ring 49, and is normally biased downward by a conical coil spring 46 to receive the receiving pin 47. It is pressed against the seat 48. An upper end 47 a of the exhaust pin 47 is loosely inserted into the communication hole 52 and faces the ball 44 in close proximity, and a lower end 47 b protrudes below the valve body 43.
[0039]
9, 10, 13, and 14, the polishing pad 10 used for polishing the concave surface 5 b of the lens 5 is made of, for example, a fibrous cloth such as polyurethane, felt, or nonwoven fabric, a synthetic resin, or the like. And a polishing portion 55 (FIG. 13) formed in an oval shape having the same size as the front view of the dome portion 25A of the balloon member 25, and the periphery of the polishing portion 55 And a plurality of fixed pieces 56 extending outward from the outer side. The polishing portion 55 is composed of eight petal pieces 58 that are radially formed by a plurality of grooves 57 that are formed from the outer periphery toward the center. The fixed piece 56 is formed by extending the outer edges of four petal pieces 58 positioned in the major axis direction and the minor axis direction of the eight petal pieces 58 in the radial direction.
[0040]
Such a polishing pad 10 is detachably attached to the polishing jig 9 by a fastening member 60 shown in FIG. 14 formed in a ring shape by a spring material. When attaching the polishing pad 10, the dome portion 25A of the balloon member 25 is expanded in advance to a predetermined shape by supplying air 23, and then the polishing portion 55 of the polishing pad 10 is placed on the dome portion 25A. Next, both ends 60a, 60b of the tightening member 60 are sandwiched between fingers to narrow the distance between them, thereby increasing the diameter of the tightening member 60. In this state, the tightening member 60 is pressed against the fixed piece 56 from above. Bend downward and fit to the outer periphery of the outer fixture 30. When the fingers are removed from both end portions 60a and 60b, the fastening member 60 returns to its original small-diameter shape, so that the fixing piece 56 is tightened and pressed against the outer periphery of the outer fixture 30, thereby completing the mounting of the polishing pad 10. To do.
[0041]
Next, the structure and the like of the curvature setting device for a polishing jig according to the present invention will be described.
1 to 7 and FIG. 19, a polishing jig curvature setting device generally indicated by reference numeral 70 includes a box-shaped casing 72 installed on a work table 71, and an upper rear end portion of the casing 72. And a vertical box-shaped cover 73 erected at the center in the width direction, and an air supply device (air compressor) 77 for supplying the air 23 to the balloon member 25 is disposed on one side of the housing 72. It is installed.
[0042]
At the center of the upper surface of the casing 72, a polishing jig conveying device 74 for reciprocating the polishing jig 9 in the front-rear direction is installed, an operation unit 80 is provided on the front surface, and a control unit 82 is arranged inside. It is installed. The upper surface plate 72A of the housing 72 forms a base on which the polishing jig transport device 74 is installed.
[0043]
The cover 73 is opened at the lower front portion and accommodates the rear half of the polishing jig transport device 74, and a height measuring device 75 for measuring the apex height of the dome portion 25 </ b> A of the balloon member 25 at the upper part inside. And the raising / lowering apparatus 76 which raises / lowers this height measuring apparatus 75 is arrange | positioned.
[0044]
The operation unit 80 includes a power switch 81, a height data input means 83 for inputting the apex height of the dome portion 25A of the balloon member 25 to the control unit 82, a start button 84, A pause button 85 and the like are provided. In this case, in the present embodiment, an example in which an operation button is used as the height data input unit 83 is shown, but the present invention is not limited to this. For example, a keyboard, a bar code reader, an externally connected computer, via a network It may be a data input or the like.
[0045]
The polishing jig transporting device 74 includes a box-shaped fixed case 90 that is open upward and downward and is long in the front-rear direction, and in the case 90 in the front-rear direction so as to cover a part of the upper surface opening of the fixed case 90. An installation table 91 on which the polishing jig 9 is installed so as to be movable, and the installation table 91 is installed at a jig mounting position C. ₁ And height measurement position C ₂ And a drive device 92 that reciprocates between two positions. Jig mounting position C ₁ Is a position in front of the upper surface of the polishing jig conveying device 74, and a height measuring position C ₂ Is a position behind the upper surface of the polishing jig conveying device 74 and a position directly below the height measuring device 75.
[0046]
The fixed case 90 includes two end plates 94 and 94 (FIG. 2) that are installed on the base 72 </ b> A of the casing 72 so as to oppose each other in the front-rear direction, and the left and right symmetry connecting the end plates 94 and 94. And a pair of outer frames 96, 96 (FIG. 4). The outer frame 96 is formed of a vertical plate 96a, an upper horizontal piece 96b, and a lower horizontal piece 96c by being formed in a U shape by bending a metal plate. Further, as shown in FIG. 3, the upper horizontal piece 96b is not constant in width over the entire length, and the width of the front half 96b-1 is set to be narrower than the width of the rear half 96b-2. The distance D between the front half portions 96b-1 of the 96 upper horizontal pieces 96b ₁ Is set slightly wider than the width of the protrusion 30B of the outer fixture 30. On the other hand, the distance D between the latter half 96b-2 ₂ Is the distance D between the first half 96b-1 ₁ The inner jigs 196c and 196c facing each other are set narrower and the polishing jig 9 is positioned at the height measurement position C. ₂ When it moves to, the engagement with the engagement groove 40 (FIG. 4) of the protrusion 30 </ b> B restricts the lifting of the polishing jig 9 by the air 23 when supplying air to the balloon member 25. The front end portion 196e of the inner front end portion 196c is bent upward at an appropriate angle by forming the cut groove 196d so that the engagement to the engagement groove 40 can be smoothly performed.
[0047]
The lower horizontal piece 96c of each outer frame 96 is separated from the upper surface of the base 72A, and an appropriate gap G is set. The gap G allows the abrasive to flow out of the case when the abrasive enters the case from the upper open portion of the fixed case 90. The front and rear ends of the outer frame 96 are supported by support members 154 attached to the inner side surfaces of the front and rear end plates 94.
[0048]
The installation base 91 is formed in a rectangular plate shape with a material having a small friction coefficient such as a fluororesin, and a fitting groove 97 (FIG. 4) in which the protrusion 30 </ b> B of the outer fixing tool 30 is fitted at the center of the upper surface. Is formed. Further, the bottom surface of the fitting groove 97 forms a reference surface (H) for measuring the apex height of the dome portion 25A of the balloon member 25, and includes an air injection port portion 95 and a pair of front and rear positioning pins. 99a and 99b (FIG. 11) are provided. On the other hand, near the both sides of the lower surface of the installation base 91, a total of four engaging portions 100 (FIG. 4) for driving force transmission are formed. The engaging part 100 is formed by a concave part with a circular (or rectangular) horizontal cross section. Such an installation table 91 is usually provided with the jig mounting position C of the polishing jig conveying device 74. ₁ The polishing jig 9 is installed from above while stopped. Installation base 91 is height measurement position C ₂ The height interval between the upper surface of the fitting groove 97 and the lower surface of the inner front end portion 196c of the rear half portion 96b-2 of the upper horizontal piece 96b in the state of being located at the position of the protrusion 30B of the outer fixing tool 30 Since the height of the portion below the engaging groove 40 is the same, the polishing jig 9 is at the height measurement position C. ₂ Is moved, the polishing jig 9 is fixed in a state where the lower surface of the protrusion 30B and the upper surface of the fitting groove 97 (the reference surface for height measurement) are in contact with each other.
[0049]
5 and 6, the air injection port portion 95 of the polishing jig curvature setting device 70 includes the injection port member 98 and a cover member 102 covering the injection port member 98.
[0050]
The injection port member 98 includes a disk-shaped main body 98A and a male screw portion 98B protruding integrally at the center of the lower surface of the main body 98A, and a recess 103 is formed at the center of the upper surface of the main body 98A. An air inlet 104 is formed. The inner diameter of the recess 103 is set to be larger than the outer diameter of the lower end 47 b of the exhaust pin 47 so that the exhaust pin 47 can be loosely fitted. The air inlet 104 includes a horizontal hole 104A formed in a radial direction passing through the center of the main body 98A, and a vertical vertical hole 104B whose upper end communicates with the horizontal hole 104A and whose lower end opens to the lower surface of the male screw portion 98B. The openings 104a at both ends of the lateral hole 104A are open to the outer peripheral surface of the main body 98A. The lateral hole 104A is not limited to this, and may be formed obliquely as shown by a two-dot chain line 105 in FIG. 5, for example, and may be opened on the slope 106 formed on the outer periphery of the upper surface of the main body 98A.
[0051]
The male screw portion 98B is formed in a cylindrical shape having the vertical hole 104B inside, and a male screw that is screwed into a screw hole 111 formed on the upper surface of the installation base 91 is formed on the outer periphery. The screw hole 111 forms a supply passage for the air 23 and is connected to the air supply device 77 via a pipe 112 (FIG. 1).
[0052]
The cover member 102 is formed in a cup shape by an elastic material such as rubber, so that a disc-shaped elastic deformation portion 102A having a round opening 115 in the center and an outer periphery of the elastic deformation portion 102A are integrally provided. And a cylindrical portion 102B surrounding the outer periphery of the main body 98A. The elastic deformation portion 102A is in close contact with the upper surface 116 of the inlet member 98 as shown in FIG. 5 except when air is supplied, and prevents the abrasive from entering the air inlet 104.
[0053]
The cylindrical portion 102B is formed to be thicker than the elastic deformation portion 102A, and the lower end portion is fixed to the lower end portion of the outer peripheral surface of the main body 98A of the inlet member 98 by welding or the like. An annular gap 120 is formed between the inner circumferential surface of the cylindrical portion 102B and the outer circumferential surface of the main body 98A, and the air inlet 104 communicates with the gap 120. The cylindrical portion 102B has an outer diameter set to be approximately the same as or slightly smaller than the hole of the through hole 42 of the outer fixture 30, thereby facilitating fitting into the through hole 42. When the pressure in the cover member 102, that is, the pressure in the gap 120 is increased by the supply, the cover member 102 is elastically deformed outward and pressed against the inner wall of the through hole 42.
[0054]
When the air 23 is supplied from the air supply device 77 to the inlet member 98, the air 23 is guided to the gap 120 through the air inlet 104 and raises the pressure in the cover member 102. Therefore, the elastically deforming portion 102A is elastically deformed upward as shown in FIG. 6 and is separated from the upper surface 116 of the inlet member 98, and is in close contact with the lower surface 43a of the valve body 43. The side chamber 51b (FIG. 5) is communicated. When the air 23 is supplied to the lower chamber 51b, the pressure in the lower chamber 51b rises, and the ball 44 is pushed up against the conical coil spring 45 by this pressure to open the communication hole 52. Accordingly, the air 23 is injected into the balloon member 25 through the communication hole 52 and expands the dome portion 25A.
[0055]
When the top of the dome portion 25A reaches a predetermined height and the supply of the air 23 is stopped, the pressure in the air injection port 104 is reduced, so that the elastic deformation portion 102A is elastically restored to the original state, and the injection port member It adheres to the upper surface 116 of 98. Moreover, since the pressure in the lower chamber 51b is also reduced by stopping the injection of the air 23, the ball 44 is lowered by the spring force of the conical coil spring 45 to close the communication hole 52, and thus the air to the balloon member 25 is removed. 23 injection is completed. In order to return the inside of the balloon member 25 to atmospheric pressure, the ball 44 is pushed up by the exhaust pin 47 to open the communication hole 52 of the valve 27 and the sealed space 32 of the balloon member 25 is opened to the atmosphere.
[0056]
2 and 4, a commercially available rodless air cylinder is used as the drive device 92 for linearly reciprocating the installation base 91 in the front-rear direction. The rodless air cylinder 92 includes a cylinder body 150 that is long in the front-rear direction and a movable member 151 that is linearly reciprocated by the cylinder body 150 in the front-rear direction. The cylinder body 150 has an upper surface covered with a guide member 152, an opening formed on the lower surface side over substantially the entire length in the longitudinal direction, and a piston (not shown) slidably incorporated therein. It is being fixed to the board 94,94, respectively.
[0057]
The movable member 151 is formed of a bottom portion 151A and a pair of side portions 151B and 151C facing in the left-right direction by being formed into a U-shape whose front view is opened upward by bending a metal plate. Has been. The bottom portion 151 </ b> A is located below the cylinder body 150 and is fixed to a piston in the cylinder body 150 via a connecting member 153. The bottom 151A is spaced from the upper surface of the base 72A.
[0058]
Each of the side portions 151B and 151C has an engaging portion 155a (FIG. 2) integrally projecting upward at the front and rear ends of the upper end surface. The engaging portions 155a of the side portions 151B and 151C are respectively engaged with the engaging portions 100 of the installation base 91 from below, and these engaging portions 100 and 155a generate the driving force of the cylinder body 150. A driving force transmission portion for transmitting to the installation base 91 is formed. That is, when the rodless air cylinder 92 is driven, the engaging portion 155 a presses the inner wall of the engaging portion 100, so that the installation base 91 moves integrally with the movable body 151. Note that the upper end of the engaging portion 155 a is not in contact with the engaging portion 100. This is because the driving force transmission unit simply transmits the driving force and does not support the weight of the installation table 91 including the polishing jig 9. When supported, the installation table 91 and the movable member 151 are distorted by the weight, and the installation table 91 cannot be smoothly moved.
[0059]
The guide member 152 covers the entire upper surface of the cylinder body 150, and the installation base 91 is slidably mounted on the upper surface in the front-rear direction. In addition, the guide member 152 integrally includes bent pieces 152a and 152a that are bent downward at both left and right ends. The guide member 152 is placed on the upper surface of the cylinder body 150 via an intervening member 156 as necessary, and both front and rear ends of the guide member 152 are supported by support plates 157 attached to the inner side surfaces of the front and rear end plates 94. Since the guide member 153 covers the upper surface of the cylinder body, the abrasive that has entered from the opening above the fixed case 90 is prevented from directly falling on the cylinder body.
[0060]
In FIG. 2, the elevating device 76 includes a Z-axis guide 160 vertically attached to the back plate of the cover 73, a slider 161 on which the height measuring device 75 is mounted, and the slider 161 as the Z-axis guide. It is comprised with the drive device 162 etc. which raise / lower along 160. A stepping motor was used for this driving device 162.
[0061]
A stepping motor is a motor that has a predetermined step angle per pulse signal and moves by a predetermined step angle in accordance with an input pulse signal, and can perform high-precision drive control with little angle error per step. Even when the motor is continuously rotated, the error is not accumulated, and the motor is suitable for position control because it has a self-holding force at that position even when stopped. By applying such a stepping motor to the driving device 162 of the curvature setting device 70 for the polishing jig, it is possible to measure the height with high accuracy with a simple structure. Here, in this embodiment, a stepping motor having a basic step angle of 0.72 degrees is used, but in order to enable a finer position adjustment, the rotation angle is divided into 20 by a drive circuit 196 described later. The microstep is performed, and the motor is driven at a rotation angle of 0.036 degrees per pulse. The stepping motor is not limited to this, and for example, a linear stepping motor may be used.
[0062]
As shown in FIG. 7, the height measuring device 75 includes the height detecting means 88, a detecting means 170 for detecting the height detecting means 88, and the detecting means 170 serving as a reference surface H (see FIG. 16) and a zero point adjusting mechanism 171 for manually adjusting the height of the detecting means 170 so that the height from 16) can be detected.
[0063]
The height detecting means 88 is fitted to the rod 174 slidably fitted into the cylindrical body 172 via the bearing 173, the contact terminal 175 attached to the lower end of the rod 174, and the upper end of the rod 174. And a retaining ring 177 fixed by screws 176. The retaining ring 177 is placed on the upper surface of the holding member 178 that supports the upper end of the cylindrical body 172, thereby preventing the rod 174 from dropping from the cylindrical body 172. The lower surface of the contact terminal 175 is formed as a flat surface and contacts the apex P of the dome portion 25A.
[0064]
As the detection means 170, a photosensor including a light emitting unit (for example, a light emitting diode as a light emitting element) 181 a and a light receiving unit (for example, a photodiode, a phototransistor, a photo IC as a light receiving element) 181 b is used. Installed on. In this embodiment, a photosensor is used in which the light emitting element is a light emitting diode and the light receiving element is a phototransistor. The holder 180 is attached to the holding member 178 via the connecting plate 182 so as to be positioned above the holding member 178, and the tip is positioned above the rod 174. The holder 180 has a through hole (or recess) 183 through which the upper end of the rod 174 can be inserted, and the light emitting diode 181a and the phototransistor 181b are arranged on the inner wall of the through hole 183 so as to face each other. It is buried 180 degrees apart in the direction. The phototransistor 181b is configured to receive the light emitted from the light emitting diode 181a, convert it into an electrical signal, and send it to the control unit 82. When the rod 174 rises to block the light from the light emitting diode 181a, the output signal of the phototransistor 181b changes, whereby the height detecting means 88 is detected by the detecting means 17.
[0065]
The zero point adjustment mechanism 171 includes a holding member 178 that holds the cylindrical body 172, an adjustment screw 185 that moves the holding member 178 up and down, a screw support member 186 to which the adjustment screw 185 is attached, and the like. It is configured.
[0066]
The holding screw 185 is screwed into the adjustment screw 185, and a knob 185A is integrally formed at the upper end. A lock nut 190 is screwed into a portion between the knob 185A and the screw support member 186. ing. On the other hand, a ring 191 is attached to the lower end side of the adjusting screw 185, and a compression coil spring 192 is mounted between the ring 191 and the holding member 178, and backlash of the holding member 178 is caused. Prevents rattling. The screw support member 186 is fixed to the lower surface of the slider 161.
[0067]
The control unit 82 controls the driving device 162 to change the height of the height measuring device 75 according to the input vertex height data, and the piping according to the detection signal from the detection means 170. 112 has a function of opening and closing a valve 166 (FIG. 1) provided in the middle of 112 to control the supply of air 23.
[0068]
Next, the procedure of the curvature setting operation of the balloon member 25 by the curvature setting method and the curvature setting device 70 for the polishing jig will be described with reference to FIGS.
First, the zero point adjustment of the height measuring device 75 is performed according to the following procedure.
Zero point adjustment is performed so that the height measuring device 75 can accurately detect the height from the reference surface H, and the height measuring device 75 detects the height of the reference surface H as zero. Thus, the height position of the height measuring device 75 with respect to the slider 161 is adjusted.
When this zero point adjustment is performed, the slider 161 is moved to the lowest point position (zero point adjustment position Q as shown in FIG. 16A). ₁ ). This zero point adjustment position Q ₁ Is a position when zero height is detected, and the origin position Q of the slider 161 is set in advance. ₀ To a position where a pulse signal of a predetermined number of pulses (20,000 pulses in this embodiment) is sent to the stepping motor 162 and lowered.
[0069]
Origin position Q ₀ Is set to a predetermined height in consideration of the height of the height measuring device 75, the height measurement range of the polishing jig, and the like. In this embodiment, when the slider 161 is raised, the slider 161 is stopped at a predetermined height on the Z-axis guide by a detection signal from the origin positioning sensor 163, and the position is set to the origin position Q. ₀ It is said. In the following description, when the position of the slider 161 on the Z-axis guide is represented by the number of pulses, the pulse that raises the slider 161 is counted as plus, and the pulse that descends is counted as minus, and the origin position Q ₀ Is set to 20,000 pulses, and the zero point adjustment position Q ₁ The number of pulses is zero.
[0070]
Slide slider 161 to zero point adjustment position Q ₁ In the state where the contact terminal 175 is lowered, the lower surface of the contact terminal 175 contacts the reference surface H, the retaining ring 177 contacts or separates upward from the upper surface of the holding member 178, and the upper end of the rod 174 is above or below the detection means 170. In FIG. 16A, the retaining ring 177 is separated from the holding member 178, the upper end of the rod 174 is located below the detecting means 170, and the light from the light emitting diode 181a is emitted. The state which does not block is shown.
[0071]
Next, the adjusting screw 185 is rotated to gradually lower the holding member 178, and the rotation of the adjusting screw 185 is stopped at the moment when the rod 174 blocks the light emitted from the light emitting diode 181a and is detected by the photo sensor 170. The holding member 178 is fixed, and the zero point adjustment of the height measuring device 75 is finished (this state is indicated by a two-dot chain line). At this time, the zero point adjustment position Q ₁ , The contact terminal 175 is in contact with the reference surface H and the detection means 170 has detected the height detection means 88, and the height detected by the height measuring device 75 is zero when the number of pulses is zero. It will be adjusted.
[0072]
The slider 161 is moved to the zero point adjustment position Q. ₁ When the contact terminal 175 is in contact with the reference plane H and the upper end of the rod 174 is positioned above the detection means 170, the holding member is kept until the rod 174 does not block the light from the light emitting diode 181a. After raising 178, the zero point may be adjusted by the method described above.
[0073]
Further, the slider 161 is moved to the zero point adjustment position Q. ₁ If the contact terminal 175 does not come into contact with the reference surface H at the time, the adjustment screw 185 is turned down until the contact terminal 175 contacts the reference surface H, and the holding member 178 is lowered. do it.
If the contact terminal 175 cannot be brought into contact with the reference plane H within the adjustment range of the zero point adjustment mechanism, or if the upper end of the rod 174 cannot be positioned below the detection means 170, the origin position Q ₀ Or change the origin position Q ₀ To zero point adjustment position Q ₁ It is only necessary to change the number of pulses to be lowered so that the zero point can be adjusted.
The structure of the zero point adjusting mechanism is not particularly limited as long as the height position of the height measuring device with respect to the slider 161 can be finely adjusted. For example, the holding screw 185 is turned upside down as shown in FIG. May be attached to the upper side of the support member 186 so as to be movable up and down.
[0074]
Next, the power switch 81 is turned on (step 200 in FIG. 17), and the installation base 91 is moved to the jig mounting position C. ₁ (Step 201). In step 202, a pulse signal is sent to the stepping motor 162 to move the slider 161 to the origin position Q. ₀ And the height measuring device waits upward (FIG. 16B). When the slider 161 is raised to a predetermined position, the origin positioning sensor 163 detects the slider 161. When the detection signal is sent to the control unit, the control unit stops the driving of the stepping motor 162, and the origin position Q ₀ The slider 161 stops.
[0075]
Next, the polishing jig 9 described in the processing instruction column of the instruction sheet for the lens 5 to be polished is selected and installed on the installation table 91 (step 203). At this time, the polishing pad 10 is not yet attached to the balloon member 25. In order to install the polishing jig 9 on the installation base 91, the polishing jig 9 is placed on the installation base 91 as shown in FIG. 5 and the injection port member 98 is inserted into the through hole 42 through the cover member 102. At the same time, the polishing jig 9 may be positioned in the front-rear and left-right directions with respect to the installation base 91 by engaging the positioning recesses 38, 39 and the positioning pins 99a, 99b shown in FIG. In this state, the lower surface 43a of the valve body 43 faces the upper surface of the elastically deforming portion 102A of the cover member 102 with a slight gap as shown in FIG. 5, and the lower end portion of the exhaust pin 47 is loose in the recess 103. The air 23 can be supplied to the balloon member 25 by being inserted.
[0076]
Next, the vertex height data of the balloon member 25 of the polishing jig 9 installed on the installation table 91 is confirmed according to the instruction sheet, and the data is input to the control unit 82 by the height data input means 83 (step). 204).
[0077]
When the data input and the installation of the polishing jig 9 on the installation table 91 are completed, the start button 84 is operated (step 205). Thus, the control unit 82 performs arithmetic processing based on the input data, and drives the stepping motor 162 by a predetermined number of pulses to move the slider 161 to the origin position Q. ₀ As shown in FIG. 16 (c), it is lowered by a predetermined amount, and the height measuring device 75 is held at a predetermined height position corresponding to the input data (step 206).
[0078]
The control of the stepping motor 162 will be described in more detail with reference to FIG. 19. The vertex height data input to the control unit 82 and stored in the vertex height data storage unit 193 is converted into the number of pulses in the arithmetic processing unit 194. Origin position Q of slider 161 ₀ The number of pulses obtained by subtracting the number of pulses at the apex height from the number of pulses is calculated, a pulse signal having the number of pulses is generated from the pulse oscillator 195, converted into a stepping motor drive signal by the drive circuit 196, and the stepping motor 162 And the stepping motor 162 is driven to lower the slider 161.
[0079]
For example, the zero point adjustment position Q ₁ To origin position Q ₀ Up to h ₁ Is 100 mm (pulse number 20,000), and apex height W of the dome portion 25A of the balloon member 25 after air injection is 28 mm (pulse number 5600), the slider 161 is 72 mm (100-28, pulse from the initial position). It is lowered by the number 14,400).
[0080]
Further, the air cylinder 92 is driven almost simultaneously with the start of the lowering of the height measuring device 75, and the installation table 91 is moved to the jig mounting position C. ₁ To height measurement position C ₂ The movement is started (step 207). When the movable member 151 of the rodless air cylinder 92 is moved by the cylinder body 150, the engaging portion 155a (FIG. 4) of the movable member 151 moves the engaging portion 100 of the installing base 91. This is done by pressing in the moving direction of the member 151 and moving the installation base 91 along the upper surface of the guide member 152. The respective moving speeds of the height measuring device 75 and the installation table 91 are the height measurement position C of the installation table 91. ₂ Is set so that the arrival at is ahead of the predetermined position of the height measuring device 75.
[0081]
When the height measuring device 75 and the polishing jig 9 are moved to predetermined positions and the completion of the movement is confirmed (step 208), the valve 166 is opened by a signal from the control unit 82, and the air 23 is supplied from the air supply device 77. Supply to the inlet member 98 and injection into the balloon member 25 is started (step 209). When the air 23 is supplied to the balloon member 25, the dome portion 25A gradually expands as the pressure in the sealed space 32 increases, and the height of the apex P (FIG. 7) increases. When the vertex height becomes equal to a predetermined height, that is, a value input to the control unit 82, the vertex P contacts the lower surface of the contact terminal 175 and pushes it up. For this reason, the upper end of the rod 174 is inserted into the through hole 183 from below to block the light emitted from the light emitting diode 181a, and it is detected that the apex height has reached a predetermined height (step 210).
[0082]
When the rod 174 blocks the light emitted from the light emitting diode 181a, the phototransistor 181b does not receive the light from the light emitting diode 181a, so that the output signal of the detecting means 170 changes, and control is performed based on the change in this output signal. The part 82 determines that the curvature of the dome part 25A has reached a predetermined curvature, and closes the valve 166 to stop the supply of the air 23 from the air supply device 77 (step 211).
[0083]
When air 23 is injected into the sealed space 32 and the dome portion 25A is expanded, the radius of curvature of the cross section including the central axis of the dome portion 25A is minimized in the minor axis direction (Y direction in FIG. 9), and the major axis direction ( A shape close to the toric surface that is the largest in the direction of FIG. 9X is formed. In this case, since the radius of curvature of the dome portion 25A changes according to the center height (vertex height) of the dome portion 25A as shown in FIG. 12, the height measuring device 75 measures the height of the dome center. By adjusting, the curvature radius of dome part 25A can be made into a desired curvature radius. Note that FIG. 12 shows the jig height in the polishing jig 9 having the balloon member 25 in which the major axis of the dome portion 25A is 90 mmφ and the ratio of the minor axis to the major axis is 0.9 (from the bottom of the polishing jig to the center of the dome portion It is a figure which shows the relationship between the height to a) and the curvature radius of the dome part 25A.
[0084]
When the injection of the air 23 into the balloon member 25 is completed, the height measuring device 75 is moved to the origin position Q. ₀ (Step 212), the installation base 91 is moved to the jig mounting position C. ₁ When the polishing jig 9 is further removed from the installation table 91 (step 214), the curvature setting operation of the balloon member 25 by the polishing jig curvature setting device 70 is completed (step 215). The switch is turned off (step 216). Furthermore, when performing the curvature setting operation of the other balloon member 25 continuously, the operation after step 203 is repeated.
[0085]
The polishing jig 9 in which the air 23 is injected into the balloon member 25 is removed from the installation base 91, and then the polishing pad 10 is attached and attached to the swing device 8 of the polishing apparatus 1 shown in FIG. Thus, the lens 5 is used for polishing the concave surface.
[0086]
In such a curvature setting device 70 for a polishing jig, a stepping motor is used as the driving device 162 that raises and lowers the height measuring device 75, so the height of the height measuring device 75 is set to be equal to one pulse of the stepping motor 162. It is possible to change the height corresponding to the rotation angle of the dome portion, and to accurately measure the apex heights of various balloon members 25 having slightly different curvatures of the dome portion.
[0087]
Further, since the height measuring device 75 includes a contact-type height detecting means 88 that can move up and down and a detecting means 170 that detects the height detecting means 88, the apex height of the balloon member is directly measured. The structure is simple and inexpensive without the need for a complicated structure or expensive height detection means.
[0088]
Further, the surface of the installation table 91 on which the polishing jig 9 is installed is set as a reference surface H, and the contact terminal 175 is brought into contact with the reference surface H, whereby the zero of the height measuring device 75 is provided. Since the point adjustment is performed, the zero point adjustment is performed on the surface where the polishing jig is actually attached, so that the adjustment can be performed accurately and the adjustment can be easily performed, so that the measurement accuracy can be maintained. Further, the height measuring device 75 can be automatically set at a predetermined height position corresponding to the input data simply by inputting the vertex height data of the balloon member 25 to the control unit 82 in accordance with the instruction sheet. The device can be easily handled and the burden on the operator can be reduced.
[0089]
In addition, the origin position of the pulse count is provided above, and the zero point adjustment position Q ₁ To origin position Q ₀ Since the height measuring device 75 is lowered to the lowest point position and adjusted with respect to the reference plane H at the time of zero point adjustment, the origin position Q ₀ And zero point adjustment position Q ₁ Even if they are different, the height relative to the reference plane can be measured accurately. In order to accurately measure the height, the slider 161 is once moved to the origin position Q. ₀ To the origin position Q ₀ It is important to send a predetermined number of pulses from ₀ Is positioned upward, so that the slider 161 is moved to the origin position Q. ₀ There is no worry of hitting the polishing jig 9 and the height measuring device 75 when returning to the initial position.
[0090]
In the above-described embodiment, the gap type photosensor is used as the detection unit 170. However, the present invention is not limited to this, and a reflection type photosensor may be used.
In the present embodiment, the installation base 91 is located at the jig mounting position C. ₁ And height measurement position C ₂ Although an example in which the polishing jig 9 is conveyed by moving between them is shown, the height measurement position C is not limited to this, and the installation table 91 is positioned directly below the height measurement device 75. ₂ It may be fixedly arranged.
[0091]
Next, as a second embodiment, the zero point adjustment position Q of the slider 161 ₁ And origin position Q ₀ Will be described with reference to FIGS. 20 and 21. FIG. FIG. 20 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting apparatus according to the second embodiment, and FIGS. 21 (a), (b), and (c) are those in the second embodiment. It is a figure explaining the zero point adjustment of a height measuring apparatus, and the measurement of the vertex height of a dome part.
In the second embodiment, the lowest point position of the slider is set to the zero point adjustment position Q. ₁ And pulse position count origin position Q ₀ This origin position Q ₀ The position that has been increased by a predetermined number of pulses from the initial position Q ₂ Except for the above, this embodiment is the same as the first embodiment.
[0092]
When performing zero point adjustment, the slider 161 is moved to the lowest point position (zero point adjustment position Q as shown in FIG. 21A). ₁ , Origin position Q ₀ ). The zero point adjustment position (origin position) may be set to an arbitrary position where the zero point can be adjusted by the zero point adjustment mechanism, and this position is set to a zero pulse number position by the same method as in the first embodiment. Perform point adjustment.
[0093]
Next, the difference between the curvature setting operation procedure and the first embodiment will be described.
In the second embodiment, a pulse signal is sent to the stepping motor 162 in step 202 ′, and the slider 161 is moved to the initial position Q. ₂ And the height measuring device waits upward (FIG. 21 (b)). This initial position Q ₂ Is the origin position Q as described above ₀ The position is increased by a predetermined number of pulses (in the second embodiment, the number of pulses is 20,000).
[0094]
In step 206, the control unit performs arithmetic processing based on the input data, drives the stepping motor 162 by a predetermined number of pulses, and moves the slider 161 to the initial position Q. ₂ 21c, the height measuring device 75 is lowered at a predetermined height position corresponding to the input data. For example, the zero point adjustment position Q ₁ (Home position Q ₀ ) To initial position Q ₂ Up to h ₁ Is 100 mm (pulse number 20,000), and the apex height after air injection of the dome portion 25A of the balloon member 25 is 28 mm (pulse number 5,600), the slider 161 is 72 mm (100− 28, the number of pulses is decreased by 14,400).
[0095]
In step 212 ′, when the injection of the air 23 into the balloon member 25 is completed, the height measuring device 75 is returned to the initial position.
[0096]
Since steps other than those described above are the same as those in the first embodiment, description thereof will be omitted.
In the case of the second embodiment, the zero point adjustment position (origin position) may be set to an arbitrary position where zero point adjustment is possible, and the number of pulses at this position may be set to zero. As an example, there is an advantage that a special structure for positioning the slider 161 at a predetermined origin position is not required.
[0097]
【The invention's effect】
As described above, according to the curvature setting device for a polishing jig according to the present invention, the apex height of various balloon members having different curvatures can be automatically measured, and the curvature setting work can be automated. . In addition, since a stepping motor is used as a slider driving device equipped with a height measuring device, the structure can be simplified and high-precision control is possible, and the apex height of the balloon can be measured with high accuracy, which is inexpensive. A curvature setting device can be provided.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a curvature setting device for a polishing jig according to the present invention.
FIG. 2 is a side sectional view showing the same curvature setting device.
FIG. 3 is a plan view showing a state in which a polishing jig is installed on an installation table.
4 is an enlarged cross-sectional view taken along line IV-IV in FIG. 3;
FIG. 5 is a cross-sectional view showing a structure of an air inlet port and a valve.
FIG. 6 is a cross-sectional view showing a state of an elastic member when air is supplied.
FIG. 7 is a cross-sectional view of a height measuring device.
FIG. 8 is a schematic configuration diagram of a polishing apparatus in which a curvature setting device is similarly used.
FIG. 9 is a plan view showing a polishing jig to which a polishing pad is attached.
FIG. 10 is a bottom view showing the polishing jig.
11 is a cross-sectional view taken along line XI-XI in FIG.
FIG. 12 is a diagram showing the relationship between the height of the polishing jig and the radius of curvature of the dome portion of the balloon member.
FIG. 13 is a plan view showing a polishing pad.
FIG. 14 is a perspective view showing a tightening member of a polishing pad.
FIGS. 15A and 15B are conceptual diagrams showing trackless polishing trajectories of the polishing apparatus, respectively.
16A, 16B, and 16C are diagrams for explaining zero point adjustment of the height measuring device and measurement of the apex height of the dome portion.
FIG. 17 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting device.
FIG. 18 is a view showing another embodiment of the mounting structure of the height measuring device.
FIG. 19 is a block diagram of a curvature setting device.
FIG. 20 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting device according to the second embodiment.
FIGS. 21A, 21B, and 21C are diagrams for explaining zero point adjustment and measurement of the apex height of the dome portion of the height measuring device according to the second embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Polishing apparatus, 5 ... Lens, 5a ... Convex surface, 5b ... Concave surface, 9 ... Polishing jig, 23 ... Air, 25 ... Balloon member, 25A ... Dome part, 27 ... Valve, 70 ... Curvature setting apparatus for polishing jig , 74: Polishing jig conveying device, 75 ... Height measuring device, 77 ... Air supply device, 83 ... Height data input means, 88 ... Height detection means, 91 ... Installation table, 170 ... Detection means, 162 ... Stepping Motor, 170 ... detecting means (photo sensor), 171 ... zero point adjusting mechanism, 174 ... rod, 175 ... contact terminal, 181a ... light emitting diode, 181b ... phototransistor, C ₁ ... Jig mounting position, C ₂ ... height measurement position, H ... reference plane.

Claims (5)

A polishing jig curvature setting device that expands the surface of the balloon member into a dome shape by supplying air to the balloon member of the polishing jig and sets the predetermined curvature.
An installation base having an air inlet to which the valve of the polishing jig is connected and on which the polishing jig is installed;
A stepping motor that raises and lowers the slider;
A height measuring device that is attached to the slider so as to be positioned above the height measuring position of the balloon member and measures the apex height of the dome surface of the balloon member;
A control unit for controlling the stepping motor by sending a pulse signal;
A height input means for inputting vertex height data of the surface of the balloon member to the control unit;
Positioning the height measuring device at a height corresponding to the vertex height data input from the height input means;
A polishing treatment, wherein the height measurement device detects the apex height of the surface of the balloon member expanded by the supply of air, thereby stopping the supply of air and setting the curvature of the surface of the balloon member. Tool curvature setting device. The curvature setting device for a polishing jig according to claim 1,
The height measuring device detects the height detecting means when the height detecting means is moved up and down by the balloon member, and the height detecting means is movable up and down to contact the apex of the dome-shaped surface of the balloon member. A curvature setting device for a polishing jig, comprising: a detecting means. In the curvature setting device for a polishing jig according to claim 2,
The polishing jig curvature setting apparatus, wherein the detecting means for detecting the height detecting means is a photosensor. In the curvature setting device for a polishing jig according to claim 1, 2, or 3,
The height measuring device is attached to a slider through a zero point adjusting mechanism so that the height can be adjusted freely. The zero point adjusting mechanism is adjusted to zero with respect to a reference surface on which a polishing jig is installed. A curvature setting device for a polishing jig. In the curvature setting device for a polishing jig according to claim 4,
The position where the slider is raised to the specified height is the origin position,
A position where a pulse signal having a predetermined number of pulses from the origin position is sent from the control unit to the stepping motor and the slider is lowered by a distance corresponding to the number of pulses is set as a zero point adjustment position.
A polishing jig, wherein a pulse signal having a number of pulses necessary to descend from the origin position to a height position corresponding to the height data is sent from the control unit to the stepping motor to lower the slider. Curvature setting device.

Images