JP3959436B2 - Flow fluctuation structure and micromixer - Google Patents

Description

  The present invention relates to a flow fluctuation structure and a micromixer.

  Clinical analysis chips, environmental analysis chips, gene analysis chips (DNA chips), protein analysis chips (proteome chips), glycan chips, chromatograph chips, cell analysis chips, pharmaceutical screening chips, etc. Conventionally, test tubes, beakers and stirring bars In recent years, a technique called Lab on Chip, in which an experiment performed using an instrument such as the above, is performed on a chip, has attracted attention. This chip is provided with a flow path of several nanometers to several millimeters, and can handle a minute amount of fluid (including gas, liquid, fine particles, gel substance, etc.). Such a chip is generally called a microchip. The channel on the chip is called a micro channel. The following method is disclosed as a method of mixing a plurality of types of fluids that have flowed into the microchannel.

  In Patent Document 1, a plurality of first branch paths branching from a first flow path for flowing in a first fluid and second branch paths branching from a second flow path for flowing in a second fluid are provided in layers so as to be adjacent to each other. The configuration is disclosed. A plurality of types of fluids are alternately introduced into the first branch path and the second branch path provided in the layer form. A plurality of types of fluids are mixed in the mixing channel to which the first branch path and the second branch path are connected. At this time, a plurality of types of fluids merge in the mixed flow path so as to be adjacent to each other in a layered state parallel to the tube axis of the first branch path and the second branch path, and diffuse at the contact interface of the adjacent fluids. For more efficient diffusion mixing.

Furthermore, regarding the method of disturbing the fluid flow in the micro-channel and mixing the fluid more efficiently, the following structure for disturbing the fluid flow is disclosed.
In Non-Patent Document 1, the flow in a laminar flow state is disturbed by providing a continuous groove on the inner wall in the microchannel, and a screw-like flow is generated. In addition, by forming a U-shaped groove on the inner wall of the microchannel, the flow is disturbed and mixing is achieved.
Also, in Non-Patent Documents 2 and 3, as a method of disturbing the laminar flow in the microchannel, the microelectrodes are integrated in the microchannel on the silicon substrate and mixed in the channel by applying a variable magnetic field. A method of stirring magnetic particles has been proposed.
JP 2003-1077 A SCIENCE, Vol. 295, pp. 647-651 (25 January 2002) Suzuki (Hiro), Kasagi, Ho, “Chaotic micro-mixing device using magnetic particles”, Proceedings of Annual Meeting of the Japan Society of Mechanical Engineers, Vol. VI, Tokyo, pp. 103-104 Suzuki (Hiroshi), Kasagi, Ho, “Chaos mixer for micro cell separation system using magnetic particles”, Biotechnology Symposium of the University of Tokyo, pp. 24-25

  However, in the micromixer described in Patent Document 1, the second flow path into which the second fluid flows is arranged on a different plane from the first flow path, the first branch path, and the second branch path into which the first fluid flows. Is done. Therefore, it is necessary to provide a connection path for connecting the second flow path to the second branch path arranged on a different plane. This complicates the manufacturing process and increases costs. When the micromixer described in Patent Document 1 is formed by an injection molding method, an imprint method, or the like, the substrate on which the first flow path, the first branch path, and the second branch path are formed, and the second flow The accuracy of alignment with the substrate on which the path and the connection path are formed is required. Therefore, the manufacturing process is further complicated and the cost is increased.

Further, in the method of disturbing the fluid flow by forming a continuous groove or a U-shaped groove on the inner wall of the microchannel described in Non-Patent Document 1, a further minute groove is formed on the inner wall of the microchannel. There is a need. For this reason, when the micromixer described in Non-Patent Document 1 is formed by an injection molding method, an embossing method, or the like, there is a problem that processing of a mold serving as a mold becomes extremely complicated. In particular, the height of the flow path portion and the groove portion of the mold is different and the groove interval is 100 μm or less, so that it is difficult to create a mold.
Further, in the method of disturbing the fluid flow using the magnetic beads described in Non-Patent Documents 2 and 3, it is necessary to mix the magnetic beads in the solution to be mixed. In this case, it may be a problem that the biomolecules in the solution are adsorbed on the magnetic beads. Further, there may be a case where the magnetic beads must be extracted and separated from the mixed solution. Thus, in the mixing method using magnetic beads, treatment before and after use is necessary, and there is a problem that the application is limited.

Then, an object of this invention is to provide the simple structure which disturbs the flow of a fluid.
Another object of the present invention is to provide a micromixer that can efficiently mix fluids.

  In order to solve the above-mentioned problems, the first invention of the present application is a flow fluctuation structure formed in a substrate, and is connected to at least one fluid inflow port into which a plurality of types of fluids flow, and the fluid inflow port. And bent and / or curved so as to change the traveling direction of a plurality of types of fluids that are formed along a direction along the main surface of the substrate (hereinafter referred to as a main surface direction) and that flow from the fluid inlet. At least a portion of the first flow direction change path, and a fluid outlet connected to the first flow direction change path and for allowing fluid to flow out of the first flow direction change path. And at least one of the surfaces forming the flow path of the first flow direction change path has a flow variation structure in which the main surface of the substrate and a surface that is inclined with respect to a surface orthogonal to the main surface are inclined. provide.

  In the flow path of the first flow direction change path through which a plurality of types of fluids that have flowed into the fluid inlet pass, at least one of the surfaces forming the flow path is in relation to the main surface of the substrate and the surface orthogonal to the main surface. Have an inclination. Further, the first flow direction change path is bent and / or curved so that the traveling direction of the fluid flowing in the first flow direction change path changes. At this time, the positions of the plurality of types of fluid that have passed through the bent and / or curved portion of the first flow direction change path are displaced and disturbed. Specifically, in the bent and / or curved portion of the first flow direction change path, the fluid flow is disturbed when the fluid located inside tries to flow outside. The above-described structure is mainly formed so as to spread in the two-dimensional direction of the substrate. Therefore, a structure that causes disturbance of the fluid can be easily produced in the substrate by using a semiconductor processing technique, an injection molding method, an imprint method, or the like. In addition, the thickness and size can be reduced. Furthermore, since the first flow direction change path is bent and / or curved, a structure that disturbs the flow of the fluid can be formed with a high density, and the size can be reduced.

A second invention of the present application provides the flow variation structure according to the first invention of the present application, wherein the inclined surface forms a straight line in the cross-sectional shape of the first flow direction change path.
A third invention of the present application provides the flow variation structure according to the first invention of the present application, wherein the inclined surface forms a curve in the cross-sectional shape of the first flow direction change path.
A fourth invention of the present application provides the flow variation structure according to any one of the first to third inventions of the present application, wherein at least one of surfaces forming the flow path of the first flow direction change path is parallel to the main surface. .
Since at least one of the surfaces forming the flow path is parallel to the main surface, it is possible to easily produce the first flow direction change path by bonding another substrate to the one substrate on which the grooves are formed. it can.

A fifth invention of the present application provides the flow variation structure according to the first invention of the present application, wherein a cross-sectional shape of the first flow direction change path is a trapezoid.
When the cross-sectional shape is trapezoidal, it is easy to produce a first flow direction change path by pressing with a mold, or to produce a first flow direction change path by photolithography.
A sixth invention of the present application is the first invention of the present application, wherein the first flow direction change path is branched, the branched first flow direction change paths are connected, and each of the branched first flow direction change paths is connected. The flow variation structure further includes a confluence channel formed to collide with the fluid.

A plurality of types of fluids collide with each other by joining a plurality of types of fluids whose flow is disturbed in the branched first flow direction change path in the combined flow path. Therefore, the flow of a plurality of types of fluids can be further disturbed.
A seventh invention of the present application provides the flow variation structure according to the sixth invention of the present application, wherein each of the branched first flow direction change paths is arranged line-symmetrically.
By making the first flow direction path axisymmetric, the design of the micromixer becomes easy.
The eighth invention of the present application provides the flow variation structure according to the sixth invention of the present application, wherein the flow resistance of each of the first flow direction change paths branched is different.

Since the flow resistance of each of the branched first flow direction change paths is different, the behavior of the fluid in each of the branched first flow direction change paths is different. Therefore, it is possible to further disturb the flow of the fluid that has collided in the combined flow path.
A ninth invention of the present application is a flow fluctuation structure formed in a substrate, and is connected to at least one fluid inlet for inflowing a plurality of types of fluids and the fluid inlet, and is provided on the main surface of the substrate. A second portion that is formed by branching into two along a direction along which the fluid flows (hereinafter, referred to as a main surface direction), and is bent and / or curved so that the traveling directions of a plurality of types of fluids flowing from the fluid inflow port change A first flow direction change path and a branched first flow direction change path connected to each other, and a first flow direction change path formed to collide with fluid in each of the branched first flow direction change paths; A fluid outlet that is connected to the flow direction change path and allows the fluid to flow out of the first flow direction change path, wherein the first flow direction change path is one of the branched first flow direction change paths. At least one of the surfaces forming the flow path The main surface of the substrate and a surface having an inclination with respect to the surface orthogonal to the main surface, and in the other branched first flow direction changing path, in the traveling direction of the fluid in the flow path A flow variation structure is provided in which the cross-section in the intersecting direction is a substantially rectangular or square surface.

Since each of the branched first flow direction change paths has a different cross-sectional structure, the behavior of the fluid in each of the branched first flow direction change paths is different. Therefore, when a plurality of types of fluid collide with each other in the combined flow path, for example, a fluid in a state where a plurality of fluids are mixed in layers can be obtained. Therefore, the mixing efficiency of a plurality of types of fluids can be further increased.
A tenth aspect of the present invention provides a micromixer having a flow fluctuation structure according to any one of the first to ninth aspects of the present invention.
The eleventh invention of the present application is a micromixer formed in a substrate, and is connected to at least one fluid inlet for inflowing a plurality of types of fluids, and to the fluid inlet, along the main surface of the substrate. A first flow direction change path that is formed along a direction (hereinafter referred to as a main surface direction) and is bent and / or curved so as to change a traveling direction of a plurality of types of fluids that flow from the fluid inflow port; The flow path width that is connected to the first flow direction change path and that extends along the principal surface direction is larger than the flow path width of the first flow direction change path or that is perpendicular to the flow path width. A first connection path deeper than a flow path depth of the first flow direction change path; and a fluid outlet that allows the plurality of types of fluids flowing into the first connection path to flow out, the first flow direction change path. At least a portion of the first flow direction change. At least one of the surfaces forming the flow path of, but provides a micro-mixer is a surface having an inclination with respect to a plane perpendicular to the main surface and the primary surface of the substrate.

  A plurality of types of fluids flowing into the fluid inlet are disturbed in the first flow direction change path. At this time, when the contact interface of a plurality of types of fluids whose flow is disturbed spreads along the main surface direction, the fluid flows into the first connection path having a larger channel width than the first flow direction change path. The contact area between a plurality of types of fluids increases, and diffusion mixing between the fluids easily occurs. On the other hand, when the contact interface of a plurality of types of fluids whose flow is disturbed extends in a direction substantially perpendicular to the principal surface direction, the flow path depth in the direction perpendicular to the principal surface direction is the first flow direction change path. By flowing into the larger first connection path, the contact area between a plurality of types of fluids increases, and diffusion mixing between the fluids easily occurs.

Since the above-described structure is mainly formed so as to spread in the two-dimensional direction of the substrate, it is possible to easily produce a structure that can efficiently mix a plurality of inflowed fluids.
A twelfth invention of the present application is a micromixer formed in a substrate, which is connected to at least one fluid inflow port into which a plurality of kinds of fluids flow, and the fluid inflow port, and is along the main surface of the substrate. A first flow direction change path that is formed along a direction (hereinafter referred to as a main surface direction) and is bent and / or curved so as to change a traveling direction of a plurality of types of fluids that flow from the fluid inflow port; The flow path width that is connected to the first flow direction change path and that extends along the principal surface direction is larger than the flow path width of the first flow direction change path or that is perpendicular to the flow path width. A first connection path deeper than a flow path depth of the first flow direction change path; and a fluid outlet that allows the plurality of types of fluids flowing into the first connection path to flow out, the first flow direction change path. Is branched into two, and the first flow of one branched In the direction change path, at least one of the surfaces forming the flow path is a surface having an inclination with respect to the main surface of the substrate and a surface orthogonal to the main surface, and the other of the branched second ones. In one flow direction change path, a micromixer is provided in which a cross section in a direction intersecting a traveling direction of a fluid in the flow path is a substantially rectangular or square surface.

  Since each of the branched first flow direction change paths has a different cross-sectional structure, the behavior of the fluid in each of the branched first flow direction change paths is different. Therefore, when a plurality of types of fluid collide with each other in the first connection path, for example, a fluid in a state where a plurality of fluids are mixed in layers can be obtained. Therefore, the mixing efficiency of a plurality of types of fluids can be further increased.

  In the present invention, the flow direction of the fluid is changed in the direction along the substrate, and at least one of the surfaces forming the flow path is inclined with respect to the main surface of the substrate and the surface orthogonal to the main surface. A path is made in the substrate. When a plurality of types of fluid are flowed in the flow path, the fluid flow can be disturbed. Since the flow path produced according to the present invention is mainly formed so as to expand in the two-dimensional direction of the substrate, a structure capable of disturbing the flow of a plurality of types of fluids can be easily produced. . Further, by forming the above-described flow path in the micromixer, the fluid can be efficiently mixed with a simple structure.

<First embodiment>
1 is a perspective view of a micromixer that mixes fluid in a flow channel according to a first embodiment of the present invention, FIG. 2 is a plan view of the micromixer of FIG. 1, and FIG. 3 is a first flow direction change. The cross-sectional shape of the road.
(1) Configuration of Micromixer The micromixer includes a first substrate 41 and a second substrate 42 which are substrates. The first substrate 41 is provided with fluid inlets 43-1a, 43-2a, and 43-3a for introducing a plurality of types of fluids, and a fluid outlet 45a for taking out the mixed fluid. In the same plane of the second substrate 42, fluid inlets 43-1b, 43-2b and 43-3b corresponding to the fluid inlets 43-1a, 43-2a and 43-3a, and fluid outlet 45a are provided. A fluid outlet 45b, a first flow direction change path 47, and a first connection path 49 are provided. The first flow direction changing path 47 is formed along a direction along the main surface of the second substrate 42 (hereinafter referred to as a main surface direction), and the upstream side of the first flow direction changing path 47 is the fluid inflow ports 43-1b to 43-43. -3b, the downstream side is connected to the first connection path 49. Moreover, the downstream side of the 1st connection path 49 is connected to the fluid outflow port 45b.

  The first flow direction change path 47 has a portion 47a that is bent and / or curved so as to change the traveling direction of a plurality of types of fluids flowing from the fluid inlets 43-1b to 43-3b. . Furthermore, the cross section in the direction intersecting with the fluid traveling direction in the first flow direction changing path 47, that is, the A1-A1 'cross section shown in FIG. 2 has a trapezoidal shape as shown in FIG. Here, the cross-sectional shape of the first flow direction change path 47 is not limited to a trapezoidal shape, and at least one of the surfaces forming the flow path of the first flow direction change path 47 is formed on the main surface and the main surface of the substrate. What is necessary is just to have inclination with respect to the orthogonal surface. The cross-sectional shape of the first flow direction change path 47 includes a shape in which the cross-sectional shape of the inclined surface constituting the flow path has a straight line or a curve. For example, in the A1-A1 'cross section shown in FIG. 2, cross-sectional shapes such as parallelograms, triangles, and arcs as shown in FIGS.

Furthermore, when at least one of the surfaces forming the flow path of the first flow direction changing path 47 is formed in a direction along the main surface direction, it is easy and preferable to form the flow path. For example, when the micromixer is formed of two substrates, the first flow direction change having a surface along the main surface is obtained by bonding another substrate to one substrate in which grooves are formed. The path 47 can be easily formed. In addition, when the first flow direction change path 47 has a trapezoidal shape, for example, the angles θa and θb (see FIG. 3A) formed with the main surface may be different from each other.
The first flow direction change path 47 is composed of a part connected to the first connection path 49 from a part where the fluid inflow ports 43-1b to 43-3b join, and in at least a part of the flow path, It is only necessary that the surface forming the path has an inclination. That is, in the bent and / or curved portion 47a of the first flow direction changing path 47, the flow path cross section has a trapezoidal shape, and the fluid inflow ports 43-1b to 43-3b are joined to each other. The cross-sectional shape of the first flow direction change path 47 connected to the connected first flow direction change path 47 or the first connection path 49 may not be trapezoidal. Furthermore, the direction and the number of times of bending and / or curving are not limited as long as the direction of the flow path is changed so as to change the flow direction of a plurality of types of fluid in the flow path. Further, if the bent portion 47a of the first flow direction changing path 47 has a curvature at the corner of the portion 47a, the accumulation of air at the corner is reduced. Therefore, the decrease in the channel width in the portion 47a due to the accumulation of air can be reduced, the unpredictable variation in channel resistance can be suppressed, and the design of the micromixer can be facilitated.

As shown in FIG. 2, the first connection path 49 is formed so as to have a portion where the flow path width W2 of the first connection path 49 is larger than the flow path width W1 of the first flow direction change path 47. Here, the channel width means the length of the channel in the main surface direction in the substrate.
(2) Fluid Flow in Micromixer Next, the behavior of the fluid in the micromixer will be outlined with reference to FIG. Here, FIG. 4 shows the state of the fluid in each section of the plan view of FIG. Here, the cross-sectional shape of the first flow direction changing path 47 is trapezoidal as shown in FIG. 4A, and the cross-sectional shape of the first connecting path 49 is rectangular as shown in FIG. 4C. And Moreover, in the cross section of the 1st flow direction change path 47 and the 1st connection path 49, the two parallel sides which oppose are parallel to the main surface of a board | substrate. Hereinafter, the fluid positional relationship in the cross-section will be described by paying attention to the traveling direction of the fluid.

  Two types of fluids α and β are transferred from the fluid inlets 43-1a to 43-3a and the fluid inlets 43-1b to 43-3b to the first flow direction change path 47, for example, in the A1-A1 ′ cross section of FIG. As shown in FIG. 4A, it is assumed that the fluid α and the fluid β flow in so as to have a contact interface in a direction intersecting with the main surface direction. The two types of fluids α and β pass through the first flow direction change path 47 having a trapezoidal cross-sectional shape and a bent and / or curved portion 47a. When the fluids α and β pass through the bent and / or curved portion 47a, the positions of the fluids α and β in the first flow direction change path 47 are, for example, in the section A2-A2 ′ in FIG. As shown in FIG. 4B, the contact area is displaced and the contact area in the direction along the main surfaces of the plurality of types of fluids increases. Thus, the 1st flow direction change path 47 comprises the flow fluctuation structure which disturbs the flow of the multiple types of fluid in the flow path.

As shown in FIG. 4B, the flow of the two kinds of fluids α and β is disturbed because the first flow direction change path is bent and / or curved in the first flow direction change path 47. This is because the fluid β located inside 47 attempts to flow outward. Such disturbance of the fluid flow in the first flow direction change path 47 increases as the flow velocity in the first flow direction change path 47 increases. Therefore, the desired fluid disturbance can be obtained by adjusting the flow velocity.
Furthermore, the fluids α and β flow into the first connection path 49 having a channel width larger than that of the first flow direction change path 47. Therefore, as shown in FIG. 4B, the fluid mixed so that the fluids α and β have a contact interface in the principal surface direction as shown in FIG. It flows in the first connecting path 49 so that the contact area in the main surface direction is widened. For this reason, the contact area between the fluid α and the fluid β increases, and diffusion mixing between the fluids is promoted. Then, the diffusively mixed fluid flows out from the fluid outlet 45b.
(3) Manufacturing Method of Micromixer Next, an example of a manufacturing method of the micromixer according to the first embodiment will be described. FIG. 5 is an example of a method for manufacturing MicroMiki according to the first embodiment.

First, as a mold 10 for forming a flow path or the like, a silicon substrate mold or an organic material mold created by selectively exposing and removing a mold created by mechanical processing or a resist laminated by photolithography is used. Create (see FIG. 5A).
A pattern is transferred to the PET substrate 22 by molding a PET (Poly Ethylene Terephthalate) substrate 22 using the substrate formed in FIG. 10A as a mold 10 (see FIG. 5B). A PET substrate 24 having a fluid inlet 3a and a fluid outlet 5a for flowing in and out of fluid from outside and the PET substrate 22 having a pattern in FIG. (See (c) in the figure).

As described above, the micromixer can be produced by an imprint method or an injection molding method. Note that it is preferable that the first flow direction change path has an inverted trapezoidal shape because it is easy to produce a flow path by pressing with a mold or to produce a flow path by photolithography.
Depending on the method of manufacturing the substrate, other Si, Si oxide film, quartz, glass, PDMS (polydimethylsiloxane), PMMA (polymethylmethacrylate), PC (polycarbonate), PP (polypropylene), PS ( Polystyrene), PVC (polyvinyl chloride), polysiloxane, allyl ester resin, cycloolefin polymer, Si rubber and the like can be used.

The fluid inlets 43-1b to 43-3b, the fluid outlet 45b, and the first flow direction change path 47 may be formed on the first substrate 41 as necessary. It is also possible to use the first substrate 41 and the second substrate 42 without bonding them.
In the micromixer described above, at least one of the surfaces forming the flow path of the first flow direction change path 47 is inclined with respect to the main surface of the substrate and the surface orthogonal to the main surface. Further, the first flow direction change path 47 is bent and / or curved so that the traveling direction of the fluid flowing in the first flow direction change path 47 changes. For this reason, the positions of the plurality of types of fluids that have passed through the first flow direction change path 47 are displaced and disturbed. Therefore, in order to disturb the flow of fluid in the flow path, there is no need to mix magnetic beads or the like in the fluid, there is no need to create an electrode, or there is no need to make a fine structure such as a groove in the flow path. A structure that disturbs the flow of fluid can be easily created.

  Furthermore, since the fluid flows into the first connecting passage 49 having a wider channel width than the first flow direction changing passage 47, diffusion between the fluids is promoted, and diffusion mixing is performed efficiently. Such a micromixer is formed to have a spread mainly in the two-dimensional direction of the substrate. Therefore, a micromixer capable of efficiently mixing a plurality of types of fluids can be easily manufactured in a substrate using a semiconductor processing technique, an injection molding method, an imprint method, or the like. For example, the micromixer can be easily manufactured in the substrate by forming the first flow direction changing path 47 and the like on one substrate by a semiconductor processing technique and bonding another substrate. In addition, the micromixer can be reduced in thickness and size. Furthermore, since the first flow direction change path 47 is bent and / or curved, it is possible to reduce the size by forming the structure that disturbs the flow of the fluid at a high density.

  In the above-described micromixer, a plurality of fluid inflow ports and inflow passages for inflowing a plurality of types of fluid are formed in the same plane along the main surface of the substrate. At this time, even if a plurality of types of fluid flows from the inflow path into the first flow direction change path 47 so as to have a contact interface in the direction intersecting the main surface direction, the fluid flow is disturbed and the fluids contact each other. The area can be increased. And when the fluid flows into the 1st connection path 49 whose flow path width is larger than the 1st flow direction change path 47, the contact area of fluids increases further and a diffusive mixing can be promoted. Therefore, a micromixer capable of efficiently mixing fluids can be easily produced in the substrate.

Furthermore, when the flow path depth D2 shown in FIG. 4C of the first connection path 49 is designed to be shallower than the flow path depth D1 of the first flow direction change path 47 shown in FIG. The ratio of the diffusion distance of the fluid in the flow path depth direction to the flow path depth in the first connection path 49 is larger than that in the first flow direction change path 47, and the diffusion mixing of a plurality of types of fluids is further promoted. And preferred. Here, the channel depth means the length of the channel in the direction perpendicular to the channel width.
Moreover, the 1st connection path 49 according to the property etc. of the fluid as follows can also be applied to a micro mixer. FIG. 6 is a perspective view of a micromixer in which the shape of the first connection path 49 is different, and FIG. 7 is a plan view of the micromixer in FIG. The configuration of the micromixer in FIG. 6 is the same as that of the micromixer in FIG. 1 except for the first connection path 49.

  In the micromixer of FIG. 1, the fluid flow is disturbed in the first flow direction change path 47 so that the contact area in the direction along the main surfaces of the fluids α and β increases, and flows into the first connection path 49. The The fluids α and β flowing into the first connection path 49 have a large contact area in the direction along the main surface. On the contrary, in the micromixers shown in FIGS. 6 and 7 below, the fluids α and β flow into the first connection channel 49, so that the contact area in the direction intersecting the main surfaces of the fluids α and β is large. Become. Due to the difference in the behavior of the fluid, the shape of the first connecting path 49 is designed to be different from the above-described micromixer. For example, in the micromixer shown in FIGS. 6 and 7, the first connection path 49 has a flow path depth D2 ′ of the first connection path 49 as shown in FIG. It is formed to be deeper than D1 ′.

  In the micromixer shown in FIGS. 6 and 7, two kinds of fluids α and β are transferred from the fluid inlets 43-1a to 43-3a and the fluid inlets 3-1b to 43-3b to the first flow direction change path 47. Suppose that it was introduced. When the two kinds of fluids α and β pass through the first flow direction change path 47, the fluids located outside the bent and / or curved portions of the first flow direction change path 47 in the fluids α and β are inside. A behavior that tries to flow into Due to this influence, the fluid positions of the fluids α and β are displaced. For example, in the cross section A4-A4 ′ in FIG. 7A, the fluids α and β flow so as to have a contact interface as shown in FIG. 7B. Suppose. The fluids α and β flow into the first connection path 49 having a flow path depth deeper than that of the first flow direction change path 47. At this time, the fluids α and β are in the first connection path 49 so that the contact area in the direction orthogonal to the principal surface thereof increases as shown in FIG. 7C in the cross section A5-A5 ′ in FIG. Flowing inside. For this reason, the contact area between the fluid α and the fluid β increases, and diffusion mixing between the fluids is promoted. Then, the diffusively mixed fluid flows out from the fluid outlet 45b. Therefore, it is possible to efficiently diffuse and mix a plurality of types of fluids while increasing the degree of freedom in designing the micromixer according to the properties of the fluid. Thus, the first connection path 49 can be designed according to the behavior of the fluids α and β in the first connection path 49.

  Further, in the first flow direction change path 47, when the contact interface of a plurality of types of fluids whose flow is disturbed spreads along the main surface direction, the fluid is wider than the first flow direction change path 47. When flowing into the first connecting path 49 having a large size, the contact area in the main surface direction becomes large, and diffusion mixing of fluids easily occurs. On the other hand, when the contact interface of a plurality of types of fluids whose flow is disturbed extends in a direction substantially perpendicular to the principal surface direction, the flow path depth in the direction perpendicular to the principal surface direction is the first flow direction. If it flows into the 1st connection path 49 larger than the change path 47, since the contact area of the direction orthogonal to the main surface direction of multiple types of fluids will become large, it will become easy to produce the diffusive mixing of fluids.

Furthermore, when the flow path width W2 ′ shown in FIG. 7A of the first connection path 49 is designed to be narrower than the flow path width W1 ′ of the first flow direction change path 47, The ratio of the diffusion distance of the fluid in the flow path width direction with respect to the flow path width is larger than that of the first flow direction change path 47, and diffusion mixing of a plurality of types of fluids is further promoted, which is preferable.
<Second Embodiment>
FIG. 8 is a perspective view of a micromixer that mixes fluid in a flow channel according to the second embodiment of the present invention.
(1) Configuration of Micromixer The micromixer of the second embodiment includes a first substrate 51 and a second substrate 52 that are substrates. The first substrate 51 is provided with fluid inlets 53-1 a, 53-2 a, and 53-3 a for introducing a plurality of types of fluids to be mixed, and a fluid outlet 55 a for taking out the mixed fluid. In the same plane of the second substrate 52, a plurality of fluid inlets 53-1, b, 53-2b, and 53-3b corresponding to the plurality of fluid inlets 53-1, a, 53-2a, and 53-3a, each fluid. Inlet channels 57, 59, and 61 for guiding the fluid that has flowed into the inflow port 53-3, an inflow channel 63 in which the inlet channel merges, a mixing unit 70 in which the fluid that has merged in the inflow channel 63 flows in, and a fluid outlet 55a Is provided with a fluid outlet 55b.
(1-2) Configuration of Mixing Unit Next, the configuration of the mixing unit 70 will be described. Although two mixer units 70a are connected to the mixing unit 70 in FIG. 8, the number of the mixer units 70a can be appropriately set in consideration of the mixed state of plural types of fluids, the size of the substrate, and the like. The number of mixer units 70a to be connected may be one, or two or more. At this time, the mixer unit 70 a is continuously provided in the main surface direction of the second substrate 52.

  FIG. 9 is a plan view of the mixer unit 70a constituting the mixing unit 70, FIG. 10 is a plan view of the mixer unit 70a, and FIG. 11 shows the state of the fluid in each section of the mixer unit. The mixer unit 70a includes a plurality of first flow direction change paths 71 through which a fluid flows, a concave wall 73, a first connection path 74, and an outflow path 76 through which the mixed fluid flows out. As shown in FIG. 9A, the first flow direction change path 71 is formed and branched along a direction along the main surface (hereinafter referred to as a main surface direction). Further, the branched first flow direction change path 71 is bent and / or bent so as to change the traveling direction of the fluid flowing into the first flow direction change path 71 by the concave wall 73 provided in the mixer unit 70a. It is curved. Each of the branched first flow direction change paths 71L and 71R in FIG. 9A has two bent and / or curved portions 72a and 72b as indicated by arrows in FIG. 9B. Further, the B3-B3 ′ cross section and the B5-B5 ′ cross section shown in FIG. 10 in the direction intersecting the fluid traveling direction in the first flow direction changing paths 71L and 71R are shown in FIGS. 11A and 11B, respectively. It has a trapezoidal shape. Here, the shape of the cross section of the first flow direction change path 71L and 71R is not limited to the trapezoidal shape, and at least one of the surfaces forming the flow path of the first flow direction change path 71 is the main surface of the substrate and the main surface. What is necessary is just to have inclination with respect to the surface orthogonal to a surface. The cross-sectional shape of the first flow direction change path 71 includes a shape in which the cross-sectional shape of the inclined surface constituting the flow path has a straight line or a curve. Furthermore, when at least one of the surfaces forming the flow path of the first flow direction change path 71 is formed in a direction along the main surface direction, it is easy and preferable to form the flow path. In addition, when the cross-sectional shape of the first flow direction change path 71 is, for example, a trapezoid, the angles θc and θd (see FIG. 11A) formed with the main surface may be different from each other. Furthermore, the cross sections 71L and 71R of the branched first flow direction change path 71 need not be the same cross section. For example, it is assumed that the angles formed with the main surface in the B5-B5 'cross section of the first flow direction change path 71L shown in FIG. 10 are θe and θf (see FIG. 11B). At this time, the angles θc and θd formed with the main surface in the cross section of the first flow direction change path 71R may be different from the angles θe and θf in the first flow direction change path 71L.

  The first flow direction change path 71 is composed of a part connected to the first connection path 74 from a part where the fluid inflow ports 53-1 b to 53-3 b join, but in at least a part of the flow path. It is sufficient that the surface forming the flow path has an inclination. Furthermore, the first flow direction change path 71 may be a flow path that changes the traveling direction of the fluid in the first flow direction change path 71, and the degree and number of bending and / or bending are not limited. The bent and / or curved portions 72a and 72b preferably have a curvature so that air does not collect. In FIG. 9A, the first flow direction change path 71 is branched in two left and right directions, but is not limited to right and left, and may be branched in two or more directions. However, it is preferable that the first flow direction change path 71 is branched in two left and right directions, and the branched first flow direction change paths 71L and 71R are arranged in line symmetry so that the design is easy.

Further, when the first flow direction changing path 71 is bent so as to be bent at least approximately 90 degrees or at least once or change approximately 90 degrees or more, the fluids collide with each other in the first connection path 74 to further efficiently mix them. This is preferable.
(1-3) Configuration of First Connection Path Next, the configuration of the first connection path 74 will be described. The first connection path 74 connects the first flow direction change path 71L and the first flow direction change path 71R, joins the fluids whose flow is disturbed in each of the first flow direction change paths 71L and 71R, and collides with each other. , Diffuse and mix. Therefore, a plurality of types of fluid flowing into the micromixer can be mixed efficiently. Further, even a small micromixer that mixes a minute amount of fluid can efficiently mix fluids with the above-described structure. Furthermore, as shown in FIG. 9A, the first connection path 74 is designed such that the flow path width W5 is larger than the flow path widths W3 and W4 of the first flow direction change paths 71L and 71R, respectively. ing. If the flow path width W5 is designed to be larger than the sum (W3 + W4) of the flow path widths W3 and W4 of the first flow direction change paths 71L and 71R, the first flow direction with a large flow path width Since a plurality of types of fluids flow into the first connection channel 74 having a wide channel width from the change paths 71L and 71R, the contact area between the plurality of types of fluids increases, and diffusion mixing of the fluid can be enhanced. preferable.

It is preferable that the flow path width of the first connection path 74 becomes smaller toward the downstream end from the connection portion between the plurality of types of first flow direction change paths 71L and 71R. By gradually reducing the flow path width of the first connection path 74 toward the downstream end, a sudden change in flow path resistance is suppressed, and connection to the next mixer section 70a having a small flow path width or to the fluid outlet 55 is performed. Can be easily connected. Further, the gap between the mixer portions 70a can be reduced to increase the density of the mixer portions 70a, and the micromixer can be reduced in size.
(2) Fluid Flow in Micromixer The fluid flow of the micromixer according to the second embodiment as described above will be outlined below. Here, FIG. 12 shows the state of the fluid in each section of the plan view of FIG. Here, the cross-sectional shape of the first flow direction change path 71 is trapezoidal, and the cross-sectional shape of the outflow path 76 in the B5-B5 ′ cross section of FIG. 10 is rectangular as shown in FIG. To do. Further, in the cross section of the first flow direction change path 71, the two parallel sides facing each other are parallel to the main surface of the substrate. Hereinafter, the fluid positional relationship in the cross-section will be described by paying attention to the traveling direction of the fluid.

  A plurality of types of fluids flow into the inflow path 63 from the plurality of fluid inlets 53-1 a, 53-2 a, and 53-3 a in FIG. 8 through the plurality of inlet channels 57, 59, and 61. At this time, it is assumed that the fluid α flows in from the fluid inflow ports 53-1a and 53-3a, and the fluid β flows in from the fluid inflow port 53-2a. At this time, since the plurality of fluid inlets 53-1, the plurality of inlet channels 57, 59 and 61, and the inflow channel 63 are formed in the same plane of the second substrate, the B1-B1 ′ cross section of FIG. As shown in FIG. 12A, the fluid α and the fluid β are introduced so as to have a contact interface in a direction intersecting with the main surface direction. In this way, the fluids α and β flowing into the first-stage mixer unit 70a flow into the branched first flow direction change paths 71L and 71R. Here, the left half of the broken line in FIG. 10A flows into the left first flow direction change path 71L, and the right half of the broken line flows into the right first flow direction change path 71R. At this time, when focusing on the first flow direction changing path 71R, the fluid located inside the bent and / or curved portion 72a of the first flow direction changing path 71R tends to flow into the outer fluid. Disturbance occurs in the fluid. Therefore, in the B2-B2 'cross section of FIG. 10, the inside fluid α spreads throughout the first flow direction change path 71R so as to flow outward, and the fluids α, β flow as shown in FIG. Further, in the B3-B3 ′ cross section after passing through the bent and / or curved portion 72a, the fluid α inside the bent and / or curved portion 72a flows to the outside, as shown in FIG. The fluid flows through. Further, by passing through the bent and / or curved portion 72b, the inner fluid α similarly moves so as to flow outward, and in the B4-B4 ′ cross section, as shown in FIG. Flowing. Furthermore, in the B5-B5 'cross section, the fluid that has passed through the first flow direction change paths 71L and 71R on the left and right merges in the first connection path 74 and flows as shown in FIG. Then, the fluid that has passed through the first-stage mixer section 70a flows into the second-stage mixer section 70a connected to the first-stage mixer section 70a. The fluid that has passed through the second-stage mixer unit 70a flows out from the fluid outlet 55b. Here, the fluid flowing out from the first-stage mixer section 70a may be taken out, or the second-stage mixer section 70a may be further connected to the next-stage mixer section 70a.

  In the mixer section 70a of the above-described micromixer, the first flow direction change path 71 that changes the flow direction of the fluid is branched into a plurality, and at least one of the surfaces forming the flow path is the main surface of the substrate. And it has inclination with respect to the surface orthogonal to the main surface. Further, the branched first flow direction change path 71 is connected in a first connection path 74 having a large channel width. Therefore, a plurality of types of fluids whose flow is disturbed in the branched first flow direction change path 71 can be joined in the first connection path 74 to collide, diffuse and mix the fluids. In addition, since the micromixer is mainly formed so as to extend in the two-dimensional direction of the substrate, the micromixer that can efficiently mix a plurality of types of fluids is incorporated into the substrate using a semiconductor processing technique or the like. It can be easily manufactured. Further, the first flow direction change path 71 is branched and bent and / or curved, so that the flow path length of the first flow direction change path 71 is long and the flow path width is narrow within a predetermined chip size. be able to. Therefore, the diffusion effect of the fluid in the channel width direction can be particularly enhanced in the first flow direction change path 71 while reducing the size and thickness of the micromixer.

In the above micromixer, the fluid inlet, the inlet channel, and the inlet channel are formed in the same plane along the main surface of the substrate, and a plurality of types of fluids are provided so as to have a contact interface in a direction intersecting with the main surface direction. Is infused. At this time, even if a plurality of types of fluid flow into the first flow direction change path 71 from the inflow path so as to have a contact interface in a direction intersecting with the main surface direction, the fluid flow is disturbed and the fluids contact each other. The area can be increased. Therefore, a micromixer that can efficiently perform diffusion mixing can be easily manufactured in the substrate.
Also, the micromixer can be easily fabricated in the substrate by providing the mixer portion 70a continuously in the direction of the main surface of the second substrate.
<Third Embodiment>
FIG. 13 is a plan view of a mixer unit 70a constituting the mixing unit 70 according to the third embodiment of the present invention. The only difference is the configuration of the mixer unit 70a. The rest is the same as the configuration of the micromixer according to the second embodiment, and the same reference numerals represent the same components.
(1) Configuration of Mixer Unit The first flow direction change path 71 of the mixer unit 70a according to the third embodiment is branched into first flow direction change paths 71L and 71R along the main surface direction. Here, the cross section in the direction intersecting the traveling direction of the fluid in one branched first flow direction change path 71L, that is, the C1-C1 ′ cross section of FIG. 13A is a table as shown in FIG. 13B. It has a shape. Here, the shape of the cross section of the first flow direction change path 71L is not limited to the trapezoidal shape, and at least one of the surfaces forming the flow path of the first flow direction change path 71L is formed on the main surface and the main surface of the substrate. What is necessary is just to have inclination with respect to the orthogonal surface. The cross section in the direction intersecting with the fluid traveling direction in the other first flow direction change path 71R branched, that is, the C2-C2 ′ cross section in FIG. 13A is substantially rectangular as shown in FIG. 13C. Or square shape. A substantially rectangular or square shape does not necessarily mean a rectangle or square. For example, as described later, the behavior that the fluid positioned inside the bent and / or curved portions 72a and 72b (see FIG. 9B) of the first flow direction change path 71 flows outside does not occur. It means the cross-sectional shape of the flow path. In particular, when the shape is rectangular or square, a behavior in which the fluid located inside the flow path flows into the outside hardly occurs. FIG. 13 shows a configuration in which the cross-sectional shapes of the flow paths of the first flow direction change paths 71L and 71R branched in the left and right directions are different, but the cross-sectional shapes of the flow paths branched in a plurality of directions are different. You may form in. The other mixer part 70a has the same configuration as that of the second embodiment.
(2) Fluid Flow in Micromixer The flow of the micromix fluid according to the third embodiment as described above will be described below with reference to FIG. FIG. 14 shows the state of the fluid in each section of the plan view of FIG. Hereinafter, the fluid positional relationship in the cross section is based on the traveling direction of the fluid.

  In the micromixer of FIG. 8, the fluid α is introduced from the fluid inlets 53-1a and 53-3a, and the fluid β is introduced from the fluid inlet 53-2a. At this time, similarly to the second embodiment, the contact interface is formed in the direction in which the fluid α and the fluid β intersect with each other in the principal surface direction as shown in FIG. 14A in the section C3-C3 ′ in FIG. Suppose that it flows in as if to have. The left half of the broken line in FIG. 14A flows into the left first flow direction changing path 71L, and the right half of the broken line flows into the right first flow direction changing path 71R. Here, the cross sections of the first flow direction change paths 71L and 71R have different shapes as shown in FIGS. 13B and 13C, respectively. Therefore, the behaviors of a plurality of types of fluids flowing through the first flow direction change paths 71L and 71R are different. The fluids α and β flowing in the first flow direction change path 71L having a trapezoidal cross section pass through the bent and / or curved portion, thereby being located inside the first flow direction change path 71L. Tends to flow into the outer fluid, resulting in disturbance of the fluid and an increase in contact area between a plurality of types of fluids. That is, the behavior as shown in FIGS. 12B to 12D is shown as in the second embodiment. On the other hand, as shown in FIG. 13C, the flow of the fluid in the first flow direction change path 71R having a substantially rectangular or square cross section is as follows. In the fluids α and β flowing through the first flow direction change path 71R having a substantially rectangular cross section, the inner fluid flows to the outside at the bent and / or curved portion of the first flow direction change path 71R. Such behavior does not occur. Therefore, fluid flows through the C2-C2 'cross section and the C4-C4' cross section of the first flow direction change path 71R as shown in FIGS. 14B and 14C, respectively. Then, the fluid that has passed through the first flow direction change path 71L and the fluid that has passed through the first flow direction change path 71R merge at the first connection path 74, as shown in FIG. 14 (d) in the C5-C5 ′ cross section. Fluids α and β flow through At this time, the fluids α and β are in the form of stripes in contact with each other, and the contact area between the fluids is increased.

  In the above-described micromixer, the shape of each channel cross section of the branched first flow direction change path 71 of the mixer section 70a is designed to be different. Therefore, the behavior of the fluid in each first flow direction change path 71 is different. A plurality of types of fluids exhibiting different behaviors can be merged in the first connection path 74 having a channel width larger than that of the first flow direction change path 71, and the fluids can collide, diffuse and mix. Further, as described above, by connecting the first flow direction change paths 71 having different cross-sectional shapes by the first connection paths 74, it is possible to obtain stripe-shaped fluids that are alternately contacted in the first connection paths 74. it can. Therefore, since the contact area between fluids increases, the efficiency of diffusion mixing can be further increased.

In addition, by changing the flow resistance of each of the branched first flow direction change paths 71, it is possible to design different types of fluid flows in each first flow direction change path 71. For example, as shown in FIG. 15, the length of the left and right flow paths is changed to change the left and right flow path resistance. And the fluid which passed through each branched 1st flow direction change path 71 is made to merge by the 1st connection path 74, and multiple types of fluid can be collided, spread | diffused and mixed.
<Example of Fourth Embodiment>
FIG. 16 is a perspective view of a micromixer that mixes fluid in a flow channel according to the fourth embodiment of the present invention, and FIG. 17 shows a plan view of FIG. 16 micromixer and the state of fluid in each section. The fluid that has passed through the mixing unit 70 including the mixer unit 70a flows out from the fluid outlet 55b and the fluid outlet 55a via the second flow direction change path 80 and the second connection path 85. The other configuration is the same as the micromixer according to the second embodiment except that the second flow direction changing path 80 and the second connection path 85 are further included. The code numbers represent the same components.
(1) Configuration of Micromixer The micromixer according to the fourth embodiment is further provided with a second flow direction change path 80 and a second connection path 85 in the micromixer according to the second embodiment.

The second flow direction change path 80 is connected to the downstream end of the mixing unit 70, and the second connection path 85 is connected to the downstream end of the second flow direction change path 80. A fluid outlet 55 b is connected to the downstream end of the second connection path 85.
(2) Configuration of Second Flow Direction Change Path and Second Connection Path The second flow direction change path 80 connected to the mixing unit 70 changes the traveling direction of a plurality of types of fluids flowing from the mixing unit 70. Has a portion 80a bent and / or curved. Furthermore, the cross section in the direction intersecting the fluid traveling direction in the second flow direction changing path 80, that is, the cross section E1-E1 ′ of FIG. 17A has a trapezoidal shape as shown in FIG. ing. Here, the shape of the cross section of the second flow direction change path 80 is not limited to a trapezoidal shape, and at least one of the surfaces forming the flow path of the second flow direction change path 80 is formed on the main surface and the main surface of the substrate. What is necessary is just to have inclination with respect to the orthogonal surface.

The second connection path 85 is connected to the downstream end of the second flow direction change path 80, and the flow path width W7 is designed to be larger than the flow path width W6 of the second flow direction change path 80. ing.
(2) Fluid Flow in Micromixer Next, the behavior of the fluid in the micromixer will be outlined with reference to FIG. Here, the cross-sectional shape of the second flow direction changing path 80 is trapezoidal, and the cross-sectional shape of the second connecting path 85 in the E3-E3 ′ cross section of FIG. 17 is rectangular as shown in FIG. Suppose there is. Moreover, in the cross-sectional shape of the 2nd flow direction change path 80 and the 2nd connection path 85, the two parallel sides which oppose are parallel to the main surface of a board | substrate. Hereinafter, the fluid positional relationship in the cross-section will be described by paying attention to the traveling direction of the fluid.

  A plurality of types of fluid flows in the fluid inlet 53-1, the inlet channels 57, 59, and 61, the inlet channel 63, and the mixing unit 70 are the same as those in the second embodiment, and thus the description thereof is omitted. A plurality of types of fluids flowing out from the mixing unit 70 flows into the second flow direction change path 80. It is assumed that two types of fluids α and β are flowing as shown in FIG. 17B, for example, in E1-E1 ′ of the second flow direction change path 80 shown in FIG. In FIG. 17B, the two types of fluids α and β flow so as to have contact interfaces alternately in the direction intersecting the main surface direction. While this fluid passes through the second flow direction change path 80 in which at least one of the surfaces forming the flow path is inclined with respect to the main surface of the substrate and the surface orthogonal to the main surface, It passes through the curved portion 80a. When the fluids α and β pass through the bent and / or curved portion 80a, the positions of the fluids α and β in the second flow direction change path 80 are the E2-E2 ′ cross section of FIG. In FIG. 17C, for example, the contact area is displaced as shown in FIG. 17C, and the contact area in the direction along the main surfaces of the plurality of types of fluids increases. As described above, the disturbance of the flow of the two types of fluids α and β occurs at the inside of the second flow direction change path 80 in the bent and / or curved portion 80a of the second flow direction change path 80. This is because the fluid to be flown tries to flow outward.

Furthermore, the fluids α and β flow into the second connection path 85 having a channel width larger than that of the second flow direction change path 80. Therefore, as shown in FIG. 17 (c), the fluid in which the fluids α and β are mixed so as to have a contact interface in the direction along the principal surface is shown in FIG. 17 (d) in the E3-E3 ′ cross section of FIG. As shown in FIG. 4, the second connection path 85 flows so that the contact area in the main surface direction is widened. For this reason, the contact area between the fluid α and the fluid β increases, and diffusion mixing between the fluids is promoted. Then, the diffusively mixed fluid flows out from the fluid outlet 55b.
In the micromixer described above, a plurality of types of fluid are diffused and mixed in the mixing unit 70, and the flow of the plurality of types of fluid is disturbed in the second flow direction change path 80. Furthermore, since diffusion mixing is performed in the second connection path 85, the mixing efficiency of a plurality of types of fluids can be further increased.

Moreover, it is preferable to design the flow path depth D4 of the second connection path 85 shown in FIG. 17D to be shallower than the flow path depth D3 of the second flow direction change path 80 shown in FIG. . If designed as described above, the ratio of the diffusion distance of the fluid in the flow path depth direction to the flow path depth in the second connection path 85 is larger than that in the second flow direction change path 80, and a plurality of types of fluids The diffusion mixing is further promoted and preferable.
Contrary to the second connection path 85 described above, as shown in FIGS. 18A to 18C, the flow path width W8 of the second connection path 85 is equal to the flow path width W6 ′ of the second flow direction change path 80. It is preferable to design so that it may become smaller. Here, FIG. 18A is a plan view of the second connecting path 85 and the second flow direction changing path 80 in the case of W8 <W6 ′, and FIGS. 18B and 18C are respectively E4 of FIG. It is the cross-sectional shape of the flow path in -E4 'cross section and E5-E5' cross section. By designing in this way, the ratio of the diffusion distance of the fluid in the flow path width direction with respect to the flow path width in the second connection path 85 becomes larger than that in the second flow direction change path 80, and a plurality of types of fluids Is further promoted. At this time, as shown in FIGS. 18B and 18C, the flow path depth D4 ′ shown in FIG. 18C of the second connecting path 85 is equal to that of the second flow direction changing path 80 shown in FIG. If it is designed to be deeper than the flow path depth D3 ′ shown in FIG.
<Fifth Embodiment>
In the fifth embodiment, the micromixer of the above-described embodiment is used for a light detection method such as an ultraviolet / visible absorption photometry method or an infrared absorption method.

  For example, the fluid containing the inspection target substance and the fluid containing the substance that reacts with the inspection target substance flow into the fluid inlets 43-1a, 43-2a, and 43-3a of the micromixer of FIG. 1 shown in the first embodiment. . By passing the first flow direction change path 47 and the first connection path 49, these fluids are diffusively mixed. Then, a substance to be inspected is inspected by applying a photodetection method such as an ultraviolet / visible absorptiometry, an infrared absorption method, or a fluorescence utilization method to the diffusion mixed fluid obtained at the fluid outlets 45a and 45b. Specifically, it can be applied to DNA sensing, biochemical examination, antigen-antibody sensing and the like as described below.

First, a DNA sensor that senses DNA will be described.
(1) DNA sensor FIG. 19 is a schematic diagram of a DNA sensor having a micromixer according to the first embodiment of the present invention. The DNA sensor is used to detect, for example, DNA having a specific sequence having a genetic problem, RNA generated when a protein harmful to the human body is expressed, and the like. The configuration of the DNA sensor according to the first embodiment is shown below.
(1-1) Configuration of DNA Sensor The DNA sensor has a plurality of micromixers 90, an excitation light irradiation unit 103, filters (105a, 105b, 105c...) 105 and light receiving elements (110a, 110b, 110c...) 110. ing. The excitation light irradiation direction from the excitation light irradiation unit 103 is set to be perpendicular to the detection directions of the filter 105 and the light receiving element 110 because the excitation light is strong. The micromixer 90 in the DNA sensor is configured by providing fluid inlets 91 a and 91 b, inlet passages 92 a and 92 b, a first flow direction change path 93, a first connection path 94, and a detection unit 95 in the substrate 100. ing.
(1-2) DNA Sensor Inspection Method Next, a DNA inspection method using a DNA sensor will be described. For example, DNA collected from a patient flows from the target DNA holding unit 115 into one fluid inlet 91a provided in the micromixer in the DNA sensor. The target DNA holding unit 115 holds target DNA to be inspected that has been preprocessed to be a single strand. Further, single-stranded probe DNA corresponding to the test item of the target DNA flows into the other fluid inlet 91b from the probe DNA holding unit (120a, 120b, 120c, 120d, 120e...) 120. At this time, as shown in FIG. 19, the target DNA flows into one fluid inlet 91a of the plurality of micromixers 90 in common to the plurality of micromixers 90, and a plurality of fluid inlets 91b has a plurality of pieces. Different probe DNA flows into each of the micromixers 90. By doing in this way, according to the kind of test | inspection of target DNA, test | inspection of target DNA and several probe DNA can be performed simultaneously.

  The target DNA and the probe DNA that have flowed into the respective micromixers 90 are caused to flow into the first flow direction change path 93 and the first connection path 94 via the inlet flow paths 92a and 92b. The target DNA and the probe DNA are diffused and mixed by passing through the first flow direction change path 93 and the first connection path 94. The diffusion-mixed target DNA and probe DNA flow into the detection unit 95. Then, the excitation light irradiation unit 103 irradiates the detection unit 95 with excitation light. At this time, fluorescence observed when the target DNA and the probe DNA specifically react with each other is detected. The fluorescence emitted by the detection unit 95 is detected by the light receiving element 110 through the filter 105 in order to cut off the fluorescent light other than the specific wavelength. When fluorescence is detected, it can be seen that the target DNA has a specific DNA to be examined.

In the above-described DNA sensor, the target DNA and the probe DNA are mixed by a micromixer having a microchannel on the order of micrometer, so that many items can be inspected with a very small amount of blood. Further, in the first flow direction change path 93, the flow of the fluid in the flow path can be disturbed even if the fluid flows at a high speed. Therefore, since target DNA and probe DNA are efficiently diffused and mixed in the detection unit 95, a high-throughput DNA sensor can be obtained. In addition, a DNA sensor with higher throughput can be obtained by sequentially exchanging probe DNA.
(2) Biochemical Inspection Device Next, an ultraviolet / visible absorption photometric method for the purpose of biochemical inspection will be described. FIG. 20 is a schematic diagram of a biochemical test apparatus.
(2-1) Configuration of Biochemical Inspection Apparatus The biochemical inspection apparatus includes a plurality of micromixers 90, an ultraviolet / visible light irradiation unit 107, filters (105a, 105b, 105c ...) 105, and light receiving elements (110a, 110b, 110c). ...) 110. Since the configuration of the micromixer 90 in the biochemical test apparatus is the same as that of the DNA sensor, the description thereof is omitted. In the ultraviolet / visible absorptiometry, in order to observe the absorbance of light of a specific wavelength incident on the detection unit 95, the irradiation direction of the ultraviolet / visible absorption is substantially linear with the detection direction in the filter 105 and the light receiving element 110. To be located.
(2-2) Inspection Method Using Biochemical Inspection Device Next, an inspection method using the biochemical inspection device will be described. Similarly to the DNA sensor, serum flows from the serum holding unit 117 into one fluid inlet 91a provided in the micromixer in the biochemical test apparatus. Further, a plurality of types of reagents flow from the reagent holding portions (119a, 119b, 119c, 119d, 119e,...) 119 into the other fluid inlet 91b.

Serum and reagents that have flowed into the respective micromixers 90 flow into the first flow direction change path 93 and the first connection path 94 via the inlet channels 92a and 92b, and are diffused and mixed. The diffusion-mixed serum and reagent flow into the detection unit 95. Then, the detection unit 95 is irradiated with ultraviolet / visible light from the ultraviolet / visible light irradiation unit 107, and the change in absorbance of light of a specific wavelength due to the reaction product is detected by the filter 105 and the light receiving element 110.
In the biochemical examination apparatus described above, a high-throughput biochemical examination apparatus can be obtained in the same manner as a DNA sensor that measures fluorescence.
<Experimental example 1>
FIG. 21 is a plan view of a micromixer according to Experimental Example 1 of the present invention. The configuration of the micromixer according to Experimental Example 1 will be described below.
[Configuration of micromixer]
The micromixer according to Experimental Example 1 includes fluid inlets 201, 203, and 205, connection paths (210a, 210b, and 210c) 210, and flow direction change paths (220a, 220b) 220 in a plate-like substrate. ing. Each of the connection paths 210 has the same shape. Further, each of the flow direction changing paths 220 has the same shape. The dimensions of each part are as follows.

L10 = 8.5 mm, L11 = 0.4 mm, L12 = 1 mm, L13 = 2 mm, L14 = 1 mm, L15 = 0.9 mm, L16 = 200 μm, θ1 = 30 ° and θ2 = 45 °. The flow direction changing path 220 is curved so as to change the traveling direction of the fluid over the entire flow path. Furthermore, the F1-F1 ′ cross section of FIG. 21A of the flow direction changing path 220 has an inverted trapezoidal shape as shown in FIG. At this time, the angle of the flow path in the F1-F1 ′ cross section of the flow direction change path 220 is θ3 = 55 °. The channel depth is 100 μm.
[Micromixer manufacturing method]
Next, a manufacturing method of the above micromixer will be described.

First, a silicon substrate mold is created by selectively exposing and removing resists laminated by photolithography. Then, using the formed substrate as a mold, the PET substrate is molded to transfer the pattern to the PET substrate, thereby creating a single substrate on which the flow path and the like are formed. Further, a fluid inlet for injecting fluid into the plate-like hill, and another PET substrate in which the fluid inlet is previously provided with a drill or the like, are bonded to each other by thermocompression bonding with a pattern transferred substrate.
[Micromix mixing evaluation]
The micromixer produced as described above was visually evaluated for mixing effects. A fluorescent substance FITC (Fluorescein Isothiocyanate) aqueous solution 20 μM was introduced from the fluid inlet 203 and PBS buffer was introduced from the fluid inlets 201 and 205. The result of observing the state of mixing at this time with a CCD camera attached to a fluorescence microscope is shown in FIGS. A mercury lamp was used as a light source, and excitation was performed with light of 490 nm, and fluorescence of 530 nm emitted by blocking light of 520 nm or less with a filter block was observed. 22 to 25 show the observation results when the flow velocity in the flow path is 10 μl / min, 40 μl / min, 60 μl / min, and 80 μl / min, respectively. In addition, in FIG. 22 to FIG. 25, numbers and channel names are given in the order in which the fluid travels. From the experimental results, it can be seen that the fluorescent materials introduced at the fluid inlets 201, 203 and 205 are mixed in the downstream direction at all flow rates. Moreover, when the mixing state in each flow rate was compared, the part which the fluorescent substance of the connection path 210c did not reach the both ends of the connection path 210c was observed at 40 microliters / min. However, at 60 μl / min, it was observed that the fluorescent material in the connection path 210c spreads throughout the connection path 210c. Therefore, it was found that mixing at a flow rate of 60 μl / min or more is preferable because the fluid can be mixed efficiently.
<Experimental example 2>
FIG. 26 is a plan view of a micromixer according to Experimental Example 2 of the present invention, and FIG. 27 is an enlarged view of the mixer unit. The configuration of the micromixer will be described below.
[Configuration of micromixer]
The micromixer according to Experimental Example 1 includes a fluid inlet (315a, 315b, 315c) 315, an inlet channel (317a, 317b, 317c) 317, a mixing unit 307, a fluid outlet 305, and a plate-like substrate. have. The mixing unit 307 includes a plurality of mixer units 320 and a connection path 325. In Experimental Example 2, the mixing section 307 is provided with two-stage mixer sections 320 and two-stage connection paths 325 alternately. Further, as shown in FIGS. 26 and 27A, the mixer unit 320 is formed with a flow direction change path 335 in which the flow direction of the fluid is suddenly changed by the H type wall 330. By forming the flow path by the H-shaped wall 330 in this way, the integration rate of the mixer unit 320 can be increased, and the micromixer can be reduced in size. At this time, the cross-sectional shape of the flow direction changing path 335 has a trapezoidal shape as shown in FIG. The dimensions of each part of the mixer section 320 of this micromixer will be described below.
[Dimensions of mixer section]
L30 = 3000 μm, L40 = 118 μm, L41 = 141 μm, L42 = 100 μm, L43 = 100 μm, L44 = 100 μm, L45 = 170 μm, L46 = 400 μm, L47 = 200 μm, L48 = 400 μm, L49 = 170 μm, L50 = 1340 μm, L51 = 380 μm, L52 = 100 μm, L53 = 441 μm, L54 = 957.5 μm, L55 = 441 μm and θ4 = 45 °. The flow direction changing path 335 is curved so as to change the traveling direction of the fluid over the entire flow path by the H-shaped wall 330 as described above, and the cross section of the flow path is trapezoidal. At this time, the angle of the flow path in the G1-G1 ′ cross section shown in FIG. 27A of the flow direction change path 335 is θ5 = 55 °. The channel depth is 100 μm.
[Evaluation of micromixer]
The micromixer prepared as described above was visually evaluated.

  The fluorescent substance FITC aqueous solution 20 μM was introduced from the fluid inlet 315b, and PBS buffer was introduced from the fluid inlets 315a and 315c. FIG. 28 shows the result of observing the state of mixing in the mixing unit 307 at this time with a CCD camera attached to a fluorescence microscope. A mercury lamp was used as a light source, and excitation was performed with light of 490 nm, and fluorescence of 530 nm emitted by blocking light of 520 nm or less with a filter block was observed. FIG. 28 shows the observation results when the flow velocity in the flow path is 100 μl / min, and the numbers and the names of the flow paths are given in the direction in which the fluid proceeds. From FIG. 28, it can be seen that the fluid position of the fluorescent material introduced at the fluid inlet 315 changes as it goes to the fluid outlet 305. Therefore, it was found from Experimental Example 2 that the flow of a plurality of types of fluids can be disturbed by allowing the fluid to pass through a flow direction change path having a trapezoidal cross section.

  By using the present invention, it is possible to efficiently disturb the flow of a plurality of types of fluid in the flow path. Further, the present invention can be used to provide a micromixer that can efficiently mix a microfluid.

The perspective view of the micromixer which mixes the fluid in the flow path which concerns on the example of 1st Embodiment of this invention. The top view of the micromixer of FIG. (A) Sectional shape (1) of the A1-A1 'section of the micromixer according to the first embodiment.

(B) Sectional shape (2) of the A1-A1 ′ section of the micromixer according to the first embodiment.
(C) Sectional shape (3) of the A1-A1 ′ section of the micromixer according to the first embodiment.
(D) Sectional shape (4) of the A1-A1 ′ section of the micromixer according to the first embodiment. (A) The schematic diagram which shows the state of the fluid in the A1-A1 'cross section of the top view of FIG. (B) The schematic diagram which shows the state of the fluid in the A2-A2 'cross section of the top view of FIG. (C) The schematic diagram which shows the state of the fluid in the A3-A3 'cross section of the top view of FIG. (A) An example (1) of the manufacturing method of the micro Miki which concerns on 1st Embodiment.

(B) An example (2) of the manufacturing method of the micro mix according to the first embodiment.
(C) An example (3) of the manufacturing method of the micro mix according to the first embodiment. The perspective view of another micromixer concerning the example of a 1st embodiment of the present invention. (A) The top view of the micromixer of FIG. (B) The schematic diagram which shows the state of the fluid in the A4-A4 'cross section of the top view of Fig.7 (a).

(B) A schematic diagram showing the state of fluid in the A5-A5 ′ cross section of the plan view of FIG. The perspective view of the micromixer which mixes the fluid in the flow path which concerns on the example of 2nd Embodiment of this invention. (A) The top view of the mixer part which comprises a mixing part. (B) Explanatory drawing which shows the bent and / or curved part. The schematic diagram which shows the state of the fluid in the plane of a mixer part. (A) Sectional shape (1) of the B3-B3 ′ section of the micromixer according to the second embodiment.

(B) Sectional shape (2) of the B5-B5 ′ section of the micromixer according to the second embodiment. (A) The schematic diagram which shows the state of the fluid in the B1-B1 'cross section of the top view of FIG. (B) The schematic diagram which shows the state of the fluid in the B2-B2 'cross section of the top view of FIG. (C) The schematic diagram which shows the state of the fluid in the B3-B3 'cross section of the top view of FIG. (D) The schematic diagram which shows the state of the fluid in the B4-B4 'cross section of the top view of FIG. (E) The schematic diagram which shows the state of the fluid in the B5-B5 'cross section of the top view of FIG. (A) The top view of the mixer part which comprises the mixing part which concerns on the example of 3rd Embodiment.

(B) The cross-sectional shape of the C1-C1 ′ cross section of the mixer section according to the third embodiment.
(C) The cross-sectional shape of the C2-C2 ′ cross section of the mixer section according to the third embodiment. (A) The schematic diagram which shows the state of the fluid in the C3-C3 'cross section of the top view of Fig.13 (a). (B) The schematic diagram which shows the state of the fluid in the C2-C2 'cross section of the top view of Fig.13 (a). (C) The schematic diagram which shows the state of the fluid in the C4-C4 'cross section of the top view of Fig.13 (a). (D) The schematic diagram which shows the state of the fluid in the C5-C5 'cross section of the top view of Fig.13 (a). The top view of another mixer part of the example of a 3rd embodiment. The perspective view of the micromixer which mixes the fluid in the flow path which concerns on the example of 4th Embodiment. (A) The top view of the micromixer which concerns on the example of 4th Embodiment.

(B) The schematic diagram which shows the state of the fluid in the E1-E1 'cross section of the top view of Fig.17 (a).
(C) The schematic diagram which shows the state of the fluid in E2-E2 'cross section of the top view of Fig.17 (a).
(D) The schematic diagram which shows the state of the fluid in the E3-E3 'cross section of the top view of Fig.17 (a). (A) The top view of another micromixer which concerns on the example of 4th Embodiment. (B) Schematic diagram showing the state of fluid in the E4-E4 ′ cross section of the plan view of FIG. (C) The schematic diagram which shows the state of the fluid in the E5-E5 'cross section of the top view of Fig.18 (a). The schematic diagram of the DNA sensor which has a micromixer. The schematic diagram of the biochemical test | inspection apparatus which has a micromixer. (A) The top view of the micromixer which concerns on Experimental example 1. FIG.

(B) The cross-sectional shape of the F1-F1 ′ cross section of the micromixer according to Experimental Example 1. The result of Experimental Example 1 when the flow rate in the flow path is 10 μl / min. The result of the experiment example 1 in the flow rate in a flow path is 40 microliters / min. The result of Experimental Example 1 when the flow rate in the flow path is 60 μl / min. The result of Experimental Example 1 when the flow rate in the flow path is 70 μl / min. FIG. 6 is a plan view of a micromixer according to Experimental Example 2. (A) The enlarged view of a mixer part.

(B) G1-G1 'sectional drawing of a mixer part. The result of Experimental Example 1 when the flow rate in the flow path is 100 μl / min.

Explanation of symbols

41, 51: first substrate 42, 52: second substrate 43, 53-1, 53-2, 53-3: fluid inlet 45, 55: fluid outlet 47, 71: first flow direction changing path 47a, 80a: bent and / or curved portions 49, 74: first connection paths 57, 59, 61: inlet flow path 63: inflow path 70: mixing section 70a: mixer section 80: second flow direction change path 85: Second connecting path

Claims (12)

A flow fluctuation structure formed in a substrate,
At least one fluid inlet for allowing a plurality of types of fluid to flow;
Being connected to said fluid inlet, a direction along the main surface of the substrate (hereinafter, the main surface direction) is formed as bent and / or curved along by the bending and / or curved, the A first flow direction change path for increasing a contact area between the plurality of types of fluids by changing a traveling direction of the plurality of types of fluids flowing from the fluid inlet;
A fluid outlet that is connected to the first flow direction change path and causes a mixture of a plurality of types of fluid flowing from the fluid inlet to the first flow direction change path to flow out of the first flow direction change path ;
At least a part of the first flow direction change path is at least one of surfaces forming a flow path of the first flow direction change path , and is inclined with respect to the main surface of the substrate and a surface orthogonal to the main surface. A surface having
Including flow fluctuation structure.   The flow variation structure according to claim 1, wherein the inclined surface forms a straight line in a cross-sectional shape of the first flow direction change path.   The flow fluctuation structure according to claim 1, wherein the inclined surface forms a curve in a cross-sectional shape of the first flow direction change path.   The flow variation structure according to any one of claims 1 to 3, wherein at least one of surfaces forming the flow path of the first flow direction change path is parallel to the main surface.   The flow variation structure according to claim 1, wherein a cross-sectional shape of the first flow direction change path is a trapezoidal shape. The first flow direction change path is branched;
The flow fluctuation according to claim 1, further comprising a combined flow path configured to connect the branched first flow direction change paths and collide the fluid of each of the branched first flow direction change paths. Construction.   The flow variation structure according to claim 6, wherein each of the branched first flow direction change paths is arranged line-symmetrically.   The flow variation structure according to claim 6, wherein each of the branching first flow direction change paths has a different flow path resistance. A flow fluctuation structure formed in a substrate,
At least one fluid inlet for receiving a plurality of types of fluids;
Connected to the fluid inlet, formed in two along the direction along the main surface of the substrate (hereinafter referred to as the main surface direction), and a plurality of types of fluids flowing from the fluid inlet A first flow direction change path that is bent and / or curved so that the direction of travel changes;
Connecting the branched first flow direction change paths, and a combined flow path formed to collide the fluid of each of the branched first flow direction change paths;
A fluid outlet that is connected to the first flow direction change path and causes the fluid to flow out of the first flow direction change path;
In the first flow direction changing path, one of the branched first flow direction changing paths is such that at least one of surfaces forming the flow path is a main surface of the substrate and a surface orthogonal to the main surface. In the other first flow direction changing path that is inclined and has a slope, the cross section in the direction that intersects the direction of travel of the fluid in the flow path is a substantially rectangular or square surface. There is a flow fluctuation structure.   A micromixer having the flow fluctuation structure according to claim 1. A micromixer formed in a substrate,
At least one fluid inlet for allowing a plurality of types of fluid to flow;
Being connected to said fluid inlet, a direction along the main surface of the substrate (hereinafter, the main surface direction) is formed as bent and / or curved along by the bending and / or curved, the A first flow direction change path for increasing a contact area between the plurality of types of fluids by changing a traveling direction of the plurality of types of fluids flowing from the fluid inlet;
The flow path width that is connected to the first flow direction change path and that extends along the principal surface direction is larger than the flow path width of the first flow direction change path or that is perpendicular to the flow path width. A first connection path deeper than a flow path depth of the first flow direction change path;
Is connected to the first connecting passage, and a fluid outlet port for flowing out the mixture of the plurality of types of fluid flowing into the first connection path through said first flow direction change path from said fluid inlet from the first connecting passage ,
At least a part of the first flow direction change path is at least one of surfaces forming a flow path of the first flow direction change path , and is inclined with respect to the main surface of the substrate and a surface orthogonal to the main surface. A surface having
Including micro mixer.
A micromixer formed in a substrate,
At least one fluid inlet for receiving a plurality of types of fluids;
Connected to the fluid inflow port, formed along a direction along the main surface of the substrate (hereinafter referred to as a main surface direction), and the traveling direction of a plurality of types of fluids flowing from the fluid inflow port changes. A first flow direction change path that is bent and / or curved
The flow path width that is connected to the first flow direction change path and that extends along the principal surface direction is larger than the flow path width of the first flow direction change path or that is perpendicular to the flow path width. A first connection path deeper than a flow path depth of the first flow direction change path;
A fluid outlet for discharging the plurality of types of fluid that has flowed into the first connection path,
The first flow direction changing path is branched into two, and in one of the branched first flow direction changing paths, at least one of the surfaces forming the flow path is the main surface of the substrate and the main surface. In the other first flow direction change path that is inclined with respect to the plane orthogonal to the plane, the cross section in the direction that intersects the traveling direction of the fluid in the flow path is substantially A micromixer that is a rectangular or square surface.