JP3946610B2 - Resonator support device for ultrasonic bonding equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a support device for attaching a resonator to a holder of an ultrasonic bonding apparatus.
[0002]
[Prior art]
A support device for attaching a resonator to a holder of a conventional ultrasonic bonding device resonates with the force by which the wedge outer cylinder is compressed from the holder when the nut is tightened, and the wedge action of the wedge inner cylinder and the wedge outer cylinder. The resonator is fixedly supported, and the parallelism between the bonding action surface that contacts the workpiece of the resonator and the surface of the workpiece mounting table that contacts the workpiece is obtained. Then, by repeating the processing operation by the ultrasonic bonding apparatus, the bonding surface that contacts the workpiece of the resonator gradually wears, or the bonding surface due to fine foreign matter sandwiched between the workpiece and the bonding surface. If the workpiece is damaged, inconveniences such as poor bonding and workpiece damage occur. In order to prevent this, the resonator may be replaced with a new one when the bonding action surface is damaged, but this is uneconomical. Therefore, a plurality of bonding action surfaces are assigned to one resonator in the circumferential direction around the vibration transmission direction axis so that another bonding action surface can be used if one bonding action surface is damaged (for example, , See Patent Document 1).
[0003]
[Patent Document 1]
Patent No. 2934602 (first page, claims, FIG. 1)
[0004]
[Problems to be solved by the invention]
However, since the conventional example has a structure in which the resonator is fixedly supported by the holder, when using another bonding action surface from one bonding action surface, the nut is loosened to fix the resonator to the holder. In a state where the support is released, the resonator is rotated in the circumferential direction with the vibration transmission direction axis as the center of rotation, and the parallelism between the newly used joint action surface and the surface that contacts the workpiece of the workpiece mounting table is obtained. . After that, it is necessary to retighten the nut and support the resonator fixedly to the holder. If the fastening force when the nut is retightened changes, the vibration balance of the resonator changes. There has been a problem that it takes a lot of labor and time to switch from a bonding surface to another bonding surface.
[0005]
Therefore, the present invention provides a resonator support device for an ultrasonic bonding apparatus that can easily switch the bonding action surface to be used.
[0006]
[Means for Solving the Problems]
  In the present inventionResonator support device for ultrasonic bonding apparatusOn the device bodyIsRuderIs provided so as to be moved up and down by an actuator, and a plurality of arm portions are provided on the holder so as to be opposed to each other, and the plurality of arm portions resonate with ultrasonic vibration transmitted from the vibrator.The resonatorBoth are supported at two minimum vibration amplitude points separated in the direction of vibration transmission and via a rotation support mechanismThe center of vibration transmission direction is the center of rotation.In the circumferential directionMounted rotatablyThe outer peripheral surface of the resonator is assigned in the circumferential direction centered on the vibration transmission direction axis at the maximum vibration amplitude point between two minimum vibration amplitude points that are supported by a plurality of arm portions on the outer peripheral surface of the resonator. AndMultiple bonding surfacesIn a state where one of the bonding action surfaces faces the upper surface of the work mounting table provided below the resonator, a plurality of the one bonding action surface and the upper surface of the work mounting table are formed by the lowering of the holder by the actuator. Ultrasonic wave that pressurizes and holds the overlapped part of the workpieces of the workpiece, and the resonator resonates with the ultrasonic vibration transmitted from the vibrator to join the overlapped parts of the plurality of workpieces. A resonator support device for a joining device, wherein the rotation support mechanism includes a plurality of latches that rotate together with the resonator when the resonator is rotated relative to the holder in a circumferential direction about the vibration transmission direction axis. The portion is provided at an allocation angle that is the same as the allocation angle in the circumferential direction around the center of vibration transmission direction of the plurality of bonding surfaces, and the holder fits at least one of the plurality of latching portions. thing Therefore, the resonator to the holderThe center of vibration transmission direction is the center of rotation.Fix so that it does not rotate in the circumferential directionAngle indexBody is providedTheIt is characterized by that. Therefore, according to the resonator support device of the ultrasonic bonding apparatus according to the present invention, the rotation support mechanism includes the resonator when the resonator is rotated relative to the holder in the circumferential direction about the vibration transmission direction axis. Since the plurality of latching portions that rotate together are provided for each position of the allocation angle in the circumferential direction with the same number as the plurality of bonding action surfaces and around the vibration transmission direction axis of the plurality of bonding action surfaces,Angle indexThe body is fitted with at least one of the plurality of hooks so that the resonator can be held by the holder.The center of vibration transmission direction is the center of rotation.By fixing so as not to rotate in the circumferential directionIt is possible to easily switch the bonding action surface. Also, in the present inventionIn the resonator support device of the ultrasonic bonding apparatus, Angle indexOn the bodyAngle indexBodyIn the holderAgainst the resonatorCan move in the direction that intersects the axis of vibration transmission directionA long hole is provided, and the holder has a plurality of holes.HookA fixture for fixing the angle indexing body to the holder at a position where it fits with at least one latching portion is provided from the outside of the angle indexing body via a long hole.IfHolds the connection between the angle indexer and the latchbe able to. Also, in the present inventionIn the resonator support device of the ultrasonic bonding apparatus, Angle indexThe body is provided with an opening that penetrates in the direction parallel to the vibration transmission direction axis of the resonator,In the holderIs rotated from the outside of the angle indexing body to move the angle indexing body to a position where it fits with at least one latching part of the plurality of latching parts and a position where it is released from the one latching part And a cam is disposed at the opening.This makes it easy to calculate the angle..
[0007]
DETAILED DESCRIPTION OF THE INVENTION
FIGS. 1 to 5 show a first embodiment, FIG. 1 shows a cross section cut in the longitudinal direction of the resonator support device, FIG. 2 shows an angle indexing operation of the resonator support device, and FIG. 4 shows a disassembled appearance of the rotation support mechanism 5 in the resonator support device, FIG. 4 shows a disassembled appearance of the angle indexing mechanism 12 in the resonator support device, and FIG. 5 shows an appearance of the ultrasonic bonding apparatus.
[0008]
With reference to FIG. 5, an ultrasonic bonding apparatus using the resonator support apparatus will be described. The ultrasonic bonding apparatus is provided with a working space 2 that opens to the front and right and left in the apparatus main body 1, a holder 3 is disposed in the working space 2, and a resonator 4 is disposed in the holder 3 on the left and right. Are attached to both supports in a rotatable manner, and an oscillator 6 that generates and outputs ultrasonic vibrations of a predetermined frequency by power supplied from an ultrasonic generator (not shown) is coupled to one end of the resonator 4 A workpiece mounting base 7 is provided at the bottom of the space 2, and a workpiece W is mounted on the workpiece mounting base 7, and a holder 3 is provided inside the apparatus body 1. Is lowered by an actuator having a pressurizing function as described above, and the bonded portion W is pressed and held between the work surface 8 and the work mounting base 7 at the center of the resonator 4, and the resonator 4. Is a supersonic wave generated by the vibrator 6 After bonding the overlapping surface of the workpiece to resonate to the vibration, so as to stop rising of the holder 3 in the actuator.
[0009]
Referring to FIGS. 1 and 2, with respect to the resonator support device, the holder 3 is connected so that the plurality of arm portions 11 are opposed to each other at predetermined intervals, and the plurality of bonding surfaces 8 transmit vibrations of the resonator 4. An example in which the resonator 4 is both supported by the arm portion 11 and is allocated in the circumferential direction around the direction axis L1 will be described. As shown in FIG. 1, the plurality of bonding action surfaces 8 are located on a circumference that is coaxial with the elevation center line L <b> 2 of the holder 3 and are allocated in the circumferential direction of the resonator 4. The resonator support device is provided with a rotation support mechanism 5 and an angle indexing mechanism 12 in the holder 3, and the rotation support mechanism 5 is mounted on the arm portion 11 so that the resonator 4 can be rotated about the vibration transmission direction axis L1 as a rotation center. The angle indexing mechanism 12 fixes the resonator 4 to the arm portion 11 at a circumferential allocation angle centered on the vibration transmission direction axis L1 of the plurality of bonding surfaces 8. One joining action surface 8 facing downward of the resonator 4 and the upper surface 13 on which the work piece mounting base 7 to be joined W (see FIG. 5) is placed are parallel to each other and are opposed to each other. It is a flat surface orthogonal to L2. An unillustrated mark indicating the center in the left-right direction is arranged on the work mounting base 7 coaxially with the elevation center line L <b> 2 of the holder 3.
[0010]
The resonator 4 has a form in which boosters 15 are coupled to both sides of the horn 14 coaxially by a screw hole (not shown) and a headless bolt (not shown). On one end face of one booster 15, the vibrator 6 is coaxially coupled with a screw hole (not shown) and a headless bolt (not shown). For example, the horn 14 has a length of one wavelength from the maximum vibration amplitude point f3 to the maximum vibration amplitude point f7 that resonates with the ultrasonic vibration transmitted from the vibrator 6, and is located at the center maximum vibration amplitude point f5. A bonding action surface 8 is provided on the outer surface of the horn 14. One booster 15 has a length of ½ wavelength from the maximum vibration amplitude point f1 that resonates with the ultrasonic vibration transmitted from the vibrator 6 to the maximum vibration amplitude point f3, and the minimum vibration amplitude point f2 at the center thereof. And a support portion 16 that is bent outward from the portion and protrudes in an annular shape. The other booster 15 has a length of ½ wavelength from the maximum vibration amplitude point f7 to the maximum vibration amplitude point f9 that resonates with the ultrasonic vibration transmitted from the vibrator 6, and the minimum vibration amplitude point f8 at the center thereof. And a support portion 16 that is bent outward from the portion and protrudes in an annular shape. The outer surface of the support portion 16 is a perfect surface located on one circumference centered on the vibration transmission direction axis.
[0011]
As shown in FIG. 2, the circumferential surface of the resonator 4 is 90 degrees so that the plurality of bonding action surfaces 8a; 8b; 8c; 8d are positioned on two mutually orthogonal straight lines passing through the vibration transmission direction axis L1. However, the bonding action surfaces 8a-8d may protrude from the peripheral surface of the resonator 4 or may be recessed, and may be resonant. When the portion on which the bonding action surfaces 8 a to 8 d of the resonator 4 are provided has a square cross section, the bonding action surfaces 8 a to 8 d can be carried out even if they are the same surface as the peripheral surface of the resonator 4. And, for example, as shown in FIG. 2a-d, when one of the bonding surfaces 8a-8d used for bonding is switched to another bonding surface 8b, the following is performed. To work. First, as shown in FIG. 2a, in the state where the angle indexing mechanism 12 and the rotation support mechanism 5 are coupled to each other and one joining action surface 8a is located at the lower part, FIG. As shown in the figure, the angle indexing mechanism 12 is moved upward by human operation to release the coupling between the angle indexing mechanism 12 and the rotation support mechanism 5. Thereafter, as shown in FIG. 2c, the rotation support mechanism 5 is rotated by the human operation in the right direction with the vibration transmission direction axis L1 as the rotation center. Then, as shown in FIG. 2 d, when the rotation support mechanism 5 is rotated 90 degrees to the right when the view a is used as a reference, the angle indexing mechanism 12 is moved downward by human operation and the angle indexing mechanism 12. And the rotation support mechanism 5 are coupled to each other. As a result, another bonding action surface 8b is replaced with the bonding action surface 8a and becomes the bonding action surface 8 used for bonding facing downward.
[0012]
  With reference to FIG. 3, the internal structure of the arm part 11 of the holder 3 and the internal structure of the rotation support mechanism 5 will be described. The arm portion 11 is formed with a true circular recess 21 opened on the outer surface thereof, and a through hole 22 having a smaller diameter than the recess 21 is formed at the bottom of each recess 21, and at the boundary between the through hole 22 and the recess 21. An annular step portion 23 is formed, and a screw hole D for fastening a set screw B to the periphery around the through hole 21 is provided. The step 23 is the bearing AOutaA ring to hold the ring. The concave portion 21, the through hole 22, and the step portion 23 are formed as a single horizontal straight line (axial center in the direction in which vibration is transmitted in the resonator 4 (vibration transmission direction axial center L1). ) And the same straight line as the center. A pedestal 24 that protrudes outward in a direction parallel to the vibration transmission direction axis L1 is provided above the one arm portion 11 of the holder 3 so as to be positioned in the front-rear direction. A guide groove 26 is a guide groove 26 extending in the vertical direction between the pedestals 24 positioned at the front and rear, and the guide groove 26 is provided with a screw hole 27 for attaching the cam shaft 75 of the angle indexing mechanism 12 shown in FIG.
[0013]
The rotation support mechanism 5 includes a wedge inner cylinder 31, a wedge outer cylinder 32, a wedge side nut 33, a bearing A, a wedge covering body 34, a latching portion 35, a bearing support body 36, a bearing receiving body 37, and a bearing side nut 38. . The wedge inner cylinder 31 includes a male threaded portion 39 on one half of the outer peripheral surface, and a wedge portion 40 whose outer diameter gradually increases from the male threaded portion 39 side to the opposite side on the other half. A collar 41 is provided at the end. The wedge inner cylinder 31 includes a true circular inner hole 42 having substantially the same diameter as the outer diameter of the support portion 16 of the booster 15 shown in FIG. 1, and a slit 43 is formed so that the peripheral wall is cut off at one place. The elastic hole 31 opens the inner hole 42 so that the diameter of the inner hole 42 can be accommodated in contact with the inside of the inner hole 42, and the outer diameter of the end of the wedge portion 40 on the large opening side is the bearing. In this embodiment, the support 36 is opened to a size smaller than the inner diameter. The male screw portion 39, the wedge portion 40, and the inner hole 42 are coaxial.
[0014]
The wedge outer cylinder 32 has an annular flange 44 projecting radially outward at one end of an outer peripheral surface formed in a true circle having substantially the same diameter as the inner diameter of the wedge support 49 in the wedge cover 34, and a flange on the inner peripheral surface. A wedge portion 45 having an inner diameter that gradually increases from the 44 side toward the opposite side is provided. The wedge outer cylinder 32 is formed by penetrating the wedge portion 45 so as to have the same inclination angle as the wedge portion 40 of the wedge inner cylinder 31, and is divided into two equal parts at the diameter portion. The cylinder 32 may be formed so as to reduce the inner diameter by separating the peripheral wall at one place with a slit so as to be similar to the wedge inner cylinder 31. The flange portion 44 and the wedge portion 45 are coaxial. The wedge-side nut 33 has an internal thread portion 46 that is screwed into the external thread portion 39 of the wedge inner cylinder 31, and an insertion hole 47 into which an outer peripheral portion other than the flange portion 44 of the wedge outer cylinder 32 can be inserted at the other end. And an annular groove portion 48 for accommodating the flange portion 44 of the wedge outer cylinder 32 between the insertion hole 47 and the female screw portion 46. The wedge cover 34 is provided with a wedge support portion 49 for fitting the wedge portion 45 of the wedge outer cylinder 32 inwardly in one half, and a male screw portion for screw fitting to the female screw portion 52 of the bearing support 36 at the other end. 50. The latching portion 35 cooperates with the stopper 72 of the angle indexing mechanism 12 to cause the resonator 4 to have a circumferential allocation angle (90 in the first embodiment) centered on the vibration transmission direction axis L1 of the plurality of bonding action surfaces 8. It is an element fixed at a degree, and is a recess provided at a position divided into four equal parts at 90 degrees on the outer peripheral surface of the wedge covering 34.
[0015]
The bearing support 36 includes a concave portion 51 formed in a true circle having substantially the same diameter as the outer diameter of the flange portion 41 of the wedge inner cylinder 31 at one end, and the male screw portion 50 of the wedge covering 34 is formed on the inner peripheral surface of the concave portion 51. And a cylindrical bearing support portion 53 fitted inwardly to the outer peripheral surface of the outer ring of the bearing A in the other half, and a peripheral wall surrounding the recess 51 and the bearing support portion 53. A protrusion 54 is provided at a portion connected to the peripheral wall surrounding the outer peripheral wall, and a male screw portion 55 fitted to the female screw portion 58 of the bearing side nut 38 is provided at the other end portion of the bearing support portion 53. The bearing receiving body 37 is an annular shape having a through hole 56 having a diameter larger than that of the inner ring of the bearing A and smaller than that of the outer ring and an outer diameter larger than that of the outer ring. A through hole C for inserting a set screw B to be attached to the arm portion 11 is provided. The bearing side nut 38 has an annular shape having an outer diameter smaller than that of the through hole 22 of the holder 3, and has an internal thread portion 58 that fits into the external thread portion 55 of the bearing support 36, and has an inner surface of the bearing A on one end surface. An annular protrusion 59 for holding the ring is provided, and a tool recess 60 (see FIG. 1) for inserting a tool for fastening and loosening the bearing side nut 38 is provided on the other end surface.
[0016]
A case where the resonator 4 is attached to the holder 3 by the rotation support mechanism 5 will be described with reference to FIGS. 1 and 3. The bearing A is inserted into the concave portion 21 of the arm portion 11 in the holder 3 from the outside, and the bearing receiving body 37 is applied so as to contact the end surface of the arm portion 11 around the opening of the concave portion 21 and the end surface of the outer ring of the bearing A. After that, the set screw B is fastened from the through hole C of the bearing receiving body 37 to the screw hole D of the arm portion 11, and the bearing support portion of the bearing support 36 is mounted in the state where the bearing A is attached to the arm portion 11. 53 is inserted into the bearing A from the outside in the vibration transmission direction of the arm portion 11, and the female screw portion 58 of the bearing side nut 38 is screwed into the male screw portion 55 projecting inward from the bearing A of the bearing support 36 in the vibration transmission direction. And the bearing side nut 38 is fastened by a fastening tool (not shown) mounted in the tool recess 60. Thus, the stepped portion 23 of the arm portion 11 and the bearing receiving body 37 support the outer ring of the bearing A sandwiched from both sides in the vibration transmission direction, and the protrusion 54 of the bearing support 36 and the bearing side nut 38 The protrusion 59 supports the inner ring of the bearing A in a manner sandwiched from both sides of the vibration transmission direction, and the bearing A is individually attached to the arm portion 11 of the holder 3.
[0017]
Further, the flange portion 44 of the wedge outer cylinder 32 is attached to the groove portion 48 of the wedge side nut 33, and the wedge portion 45 of the wedge outer cylinder 32 protruding from the wedge side nut 33 and the wedge support portion 49 of the wedge covering 34 are formed. The wedge part 45 of the wedge outer cylinder 32 and the wedge part 40 of the wedge inner cylinder 31 are fitted together, and the flange part 41 of the wedge inner cylinder 31 protruding from the male screw part 50 of the wedge cover 34 is supported by the bearing. It is attached to the bottom of the recess 51 via the female threaded portion 52 of the body 36, while the male threaded portion 50 of the wedge covering body 34 is screwed to the female threaded portion 52 of the bearing support 36, and the female threaded portion of the wedge side nut 33. 46 is screwed to the male threaded portion 39 of the wedge inner cylinder 31, so that the wedge inner cylinder 31, wedge outer cylinder 32, wedge side nut 33, bearing A, bearing receiver 37, bearing support 36, wedge covering Body 34, hook 35, bearing side nut Two pairs of rotary support mechanism 5 consisting of 8 is assembled to the arm portions 11 of the holder 3.
[0018]
Thereafter, the wedge-side nut 33 is tightened, so that the wedge portion 40 of the wedge inner tube 31 and the wedge portion 45 of the wedge outer tube 32 come into contact with each other, and the outer peripheral surface of the wedge outer tube 32 and the wedge cover 34 are penetrated. The inner peripheral surface of the hole inner cylinder 42 is brought into contact with the inner peripheral surface of the hole by the external force in the compressing direction received by the wedge outer cylinder 32 from the wedge covering body 34 and the wedge action of both wedge portions 40; 45. It is set in a state where the diameter is open so that the support portion 16 of the booster 15 can be brought into contact with the inside thereof. In this state, as shown in FIG. 1, a gap 61 is formed between the large-diameter opening end of the wedge outer cylinder 32 and the flange 41 of the wedge inner cylinder 31, and the wedge-side nut 33 is It is away from the covering 34.
[0019]
Subsequently, as shown in FIG. 1, the booster 15 located on the opposite side of the resonator 6 of the resonator 4 is connected to the right rotation support mechanism 5 via the inner hole 42 of the wedge inner cylinder 31 in the left rotation support mechanism 5. The booster 15 located on the vibrator 6 side is inserted into the inner hole 42 of the left rotation support mechanism 5. Thereafter, a member having the same thickness as the workpiece W to be joined is placed on the workpiece mounting base 7 or the holder 3 is lowered without placing the member on the workpiece mounting base 7, and below the resonator 4. One joining action surface 8 facing the lower side of the resonator 4 and the upper surface of the work mounting table 7 are brought into contact with a member on the workpiece mounting table 7 or the workpiece mounting table 7 by contacting one facing bonding action surface 8 to the workpiece mounting table 7. Parallelism with 13 is taken. In this case, the air pressure of the air cylinder that raises and lowers the holder 3 is set low enough that the holder 3 having a weight including the resonator 4 and the vibrator 6 does not fall by its own weight. Then, the resonator 4 is moved to the left and right by hand, and one bonding action surface 8 facing downward of the resonator 4 is aligned with a mark outside the drawing of the work mounting base 7 so that the bonding action surface 8 is held in the holder. 3 is positioned so as to be positioned on the up-and-down center line L2.
[0020]
Furthermore, one bonding action surface 8 facing downward of the resonator 4 is brought into contact with a member on the workpiece mounting table 7 or the upper surface 13 of the workpiece mounting table 7, and one bonding action facing downward of the resonator 4. The wedge-side nut 33 presses the wedge outer cylinder 32 toward the stepped portion 23 side of the holder 3 by tightening the wedge-side nut 33 while maintaining the parallelism between the surface 8 and the upper surface 13 of the workpiece mounting base 7. The distance between the slits 43 of the wedge inner cylinder 31 is narrowed by the external force received by the wedge outer cylinder 32 from the recess 21 of the holder 3 and the wedge action of both wedge portions 40; 45, and the wedge inner cylinder The inner hole 42 of 31 is reduced to a perfect circle, and the outer peripheral surface of the support portion 16 of the resonator 4 is tightened from the radially outer side. As a result, the resonator 4 having a plurality of bonding action surfaces 8 is mounted on the holder 3 by the rotation support mechanism 5 so as to be rotatable about the vibration transmission direction axis L1.
[0021]
The internal structure of the angle indexing mechanism 12 will be described with reference to FIG. The angle indexing mechanism 12 includes an angle indexing body 71, a stopper 72, an operating body 73, a cam 74, a cam shaft 75, a guide projection 76 as a guide, a connector 77, a pin 78, a set screw 79 such as a set screw, FIG. The latching part 35 shown in FIG. The angle indexing body 71 is a horizontally long plate provided in the holder 3 so as to be movable in a direction intersecting with the vibration transmission direction axis L1 in FIG. 1 (the same direction as the lifting and lowering direction of the holder 3; up and down direction). An opening 81 that penetrates in the direction parallel to the vibration transmission direction axis L 1 at the center, a guide protrusion 76 that is in sliding contact with the guide groove 26 of the holder 3, and a vertically elongated hole 82 on both sides on the left and right sides of the guide protrusion 76. Is provided. Then, in a state where the guide protrusion 76 is fitted in the guide groove 26 of the holder 3, the screw portion 84 of the fixture 83 such as a stepped screw is passed from the outside of the angle indexing body 71 through the vertically long hole 82 to the holder 3. The head 85 of the fixture 83 is moved around the longitudinal elongated hole 82 of the angle indexing body 71 before the fixture 83 is abutted against the pedestal 24 of the holder 3 around the screw hole 25. And the fixture 83 fixes the angle indexing body 71 to the holder 3 so as not to move in the vertical direction. In the fixed state, the fastening of the male screw portion 84 to the screw hole 25 in the fixture 83 is loosened, so that the head 85 of the fixture 83 is disposed so as to face the non-contact with the periphery of the longitudinal hole 82 of the angle indexing body 71. The fixture 83 can raise and lower the angle indexing body 71 with respect to the holder 3 and does not fall off.
[0022]
The guide protrusion 76 is provided on the back surface of the angle indexing body 71 in a form having a width in the front-rear direction larger than the opening 81. The opening 81 is formed across the angle index body 71 and the guide protrusion 76. The stopper 72 is rotatably attached to an extending portion 86 that protrudes downward from the left and right end portions of the angle indexing body 71. In a state where the stopper 72 is attached to the extending portion 86, a part of the outer peripheral portion of the stopper 72 protrudes from the extending portion 86. The latching portion 35 is a portion that is provided on the wedge cover 34 of the rotation support mechanism 5 and fits to a part of the outer peripheral portion that protrudes from the extending portion 86 of the stopper 72 at the allocation angle of the plurality of bonding surfaces 8. . The operation body 73 is provided on the holder 3 so as to be rotatable, and the cam 74 is fixed to the operation body 73. In the case of the first embodiment, the coupling structure between the operating body 73 and the cam 74 is as follows. The operating body 73 includes a deformed hole 89 having a square shape at one end, and a screw hole 90 penetrating the deformed hole 89 and the outer peripheral surface of the one end. The cam 74 has a shape in which the cam portion 92 protrudes from the outer peripheral portion of the circular base portion 91 to one side in the radial direction, and a true circular recessed portion 93 that opens at one end portion of the base portion 91 is formed. A bearing hole 94 having a diameter smaller than 93 is formed, and a pin insertion hole 95 penetrating the bearing hole 94 and the outer peripheral surface of one end is formed.
[0023]
Then, the cam 74 is disposed in the guide groove 26 of the holder 3 from the outside of the angle indexing body 71 attached to the holder 3 via the opening 81, and the male threaded portion 96 of the cam shaft 75 extends from the concave portion 93 of the cam 74. The camshaft 75 is screwed into the screw hole 27 of the holder 3 via the bearing hole 94, and the camshaft 75 is fastened by a fastening tool (not shown) attached to the tool recess 98 of the head 97, whereby the camshaft 75 is in contact with the surface of the guide groove 26 around the screw hole 27 and fixed to the holder 3, the cam shaft 75 and the bearing hole 94 are rotatably fitted to each other, and the head 97 of the cam shaft 75 is formed in the recess 93. The cam 74 is disposed on the side of the bearing hole 94 and is rotatably attached to the holder 3. On the other hand, the rectangular bar portion 99 of the connector 77 is inserted into the deformed hole 89 of the operation body 73, and the set screw 79 is fastened to the screw hole 90 from the outside of the operation body 73 and hits the square bar portion 99. The child 77 and the operation body 73 are combined with each other. Further, the disc portion 100 of the connector 77 is fitted into the recess 93 of the cam 74, and the pin 78 is inserted into the pin of the disc portion 100 of the connector 77 from the outside of the cam 74 via the pin insertion hole 95 of the cam 74. The connector 77 and the cam 74 are combined with each other by being pushed into the hole 101. Thus, the operating body 73 and the cam 74 are coupled via the connector 77 so that they can rotate together.
[0024]
When the operating body 73 is operated, the cam 74 rotates about the cam shaft 75 with respect to the holder 3, and the cam portion 92 of the cam 74 contacts the upper inner surface surrounding the opening 81 of the angle indexing body 71. Accordingly, the angle indexing body 71 is raised with respect to the holder 3, and the stopper 72 is moved upward from the latching portion 35 and released as the angle indexing body 71 rises as shown in FIG.
[0025]
With reference to FIG. 2, the case where the bonding action surface 8a facing downward of the bonding action surface 8 used for bonding is switched to another bonding action surface 8b will be described in detail. In FIG. 2 a, the inner peripheral surface of the opening 81 of the angle indexing body 71 is positioned so that the cam portion 92 (see FIG. 4) of the cam 74 in the angle indexing mechanism 12 faces the left side from the cam shaft 75. The stopper 72 of the angle indexing mechanism 12 and the latching portion 35 of the rotation support mechanism 5 are coupled to each other, and one joining action surface 8a is located at the lower part. In this state, after the operator loosens the attachment tool 83 shown in FIG. 2a to release the fixing of the angle indexing body 71 to the holder 3 by the attachment tool 83, the operator operates the operation tool 73 shown in FIG. 2 is rotated rightward by hand, the cam 74 of the angle indexing mechanism 12 rotates rightward about the cam shaft 75 as shown in FIG. When the cam portion 92 is positioned upward and the cam portion 92 faces upward, the operator stops the rotation operation to the right with respect to the operation body 73.
[0026]
In this process, the cam portion 92 contacts the upper inner peripheral surface of the opening 81 in the process of changing from the posture facing the right side shown in FIG. 2a to the posture facing the upper side shown in FIG. After that, the angle indexing body 71 is moved upward, and the coupling between the stopper 72 and the latching portion 35 is released along with the upward movement (elevation) of the angle indexing body 71. After that, in FIG. 2c, when the operator rotates, for example, the part around the latching portion of the angle indexing body 71 with his hand and rotates it to the right, the resonator 4 rotates the vibration transmission direction axis L1. It is rotated to the right as the center. Then, as shown in FIG. 2d, when the resonator 4 is rotated 90 degrees to the right when the figure a is a reference, the operator manually rotates the operation body 73 of FIG. 4 in the left direction, When the cam 74 of the angle indexing mechanism 12 rotates leftward about the cam shaft 75, the cam portion 92 is positioned so as to face the left side from the cam shaft 75, and the cam portion 92 faces the left side. The leftward rotation operation on the operation body 73 is stopped.
[0027]
In this way, in the process of changing the cam portion 92 from the upward orientation shown in FIG. 2c to the left orientation shown in FIG. 2d, the cam portion 92 moves away from the upper inner peripheral surface of the opening 81. Accordingly, the angle indexing body 71 moves downward under its own weight. When the lowering of the angle indexing body 71 due to its own weight is not appropriate, the operator pushes down, for example, a portion around the hooking portion 35 in the angle indexing body 71 by hand. As the angle indexing body 71 moves downward (down), the stopper 72 and the latching portion 35 are coupled to each other. As a result, another bonding action surface 8b is replaced with the bonding action surface 8a and becomes the bonding action surface 8 used for bonding. After the one joining action surface 8a is switched to another joining action surface 8b, the operator performs a fastening operation of the attachment tool 83, and the attachment tool 83 fixes the angle indexing body 71 to the holder 3 and the stopper 72. By holding the connection between the hooking portion 35 and the hook portion 35, the new bonding action surface 8 b faces the upper surface 13 of the work mounting table 7 in FIG. 1 in parallel.
[0028]
6 and 7 show a second embodiment, FIG. 6 shows a side surface of the angle indexing mechanism 111, and FIG. 7 shows a cross section of the internal structure of the angle indexing mechanism 111. In the first embodiment, the angle indexing mechanism 12 is formed manually, whereas in the second embodiment, the angle indexing mechanism 111 is driven. 6 and 7, the angle indexing mechanism 111 includes a step motor 112 attached to the holder 3 and a gear train 113 that transmits the rotation of the step motor 112 to the rotation support mechanism 5. The gear train 113 includes a small-diameter gear 115 attached so as to rotate together with the output shaft 114 of the step motor 112 and a large-diameter gear 116 attached so as to rotate together with the wedge cover 34 of the rotation support mechanism 5. Prepare. In the second embodiment, the large-diameter gear 116 is attached so as to rotate together with a cylindrical portion that surrounds and forms the wedge portion 45 in a state where the latching portion 35 is removed from the wedge cover 34 in FIG.
[0029]
Therefore, when switching from the joining action surface 8a used for joining to the joining action surface 8b as shown in FIG. 2, when the operator operates the operation member 122 such as a button in the angle switching operation unit 121 shown in FIG. The switch 123 of the switching operation unit 121 outputs an angle switching start signal to the control device 124, and the control device 124 rotationally drives the step motor 112 within a 90-degree rotational angular motion range. As the step motor 112 is driven to rotate, the rotation support mechanism 5 rotates through a gear train 113 within a rotation angle movement range of 90 degrees. As the rotation support mechanism 5 rotates, the resonator 4 rotates in the vibration transmission direction axis. By rotating around L1 as the center of rotation, the bonding action surface 8a is replaced with the bonding action surface 8b to become a bonding action surface 8 used for bonding. By switching the joining action surface 8a to the joining action surface 8b, the rotation drive for the step motor 112 by the control device 124 is stopped. After stopping the rotation drive for the step motor 112 by the control device 124, the rotation support mechanism 5 is held so as not to rotate by the function of holding the rotation position by the permanent magnet in the step motor 112, and the resonator 4 transmits vibration. Since it does not rotate with the direction axis L1 as the center of rotation, it is possible to ensure a posture in which the bonding action surface 8b faces downward.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing a first embodiment.
FIG. 2 is a process chart showing an angle indexing operation of the resonator support device of the first embodiment.
FIG. 3 is an exploded perspective view showing the rotation support mechanism of the first embodiment.
FIG. 4 is an exploded perspective view showing the angle indexing mechanism of the first embodiment.
FIG. 5 is a perspective view showing the ultrasonic bonding apparatus according to the first embodiment.
FIG. 6 is a side view showing an angle indexing mechanism of a second embodiment.
FIG. 7 is a longitudinal sectional view showing an angle indexing mechanism of a second embodiment.
[Explanation of symbols]
3 holder, 4 resonator, 5 rotation support mechanism, 8; 8a-8b bonding action surface, 12 angle indexing mechanism.

Claims (3)

The apparatus main body is provided so as ho Ruda to lift by the actuator, the holder is provided with a plurality of arm portions are opposed phases, the plurality of arm portions resonates with ultrasonic vibration transmitted from the vibrator resonance vessel is rotatably mounted in the circumferential direction of the rotation about the vibration transmission direction axis through the rotation support mechanism while being both supported by the two minimum vibration amplitude points away to the vibration transmission direction, the outer peripheral surface of the resonator The plurality of joint action surfaces are assigned in the circumferential direction centered on the vibration transmission direction axis at the maximum vibration amplitude point between the two minimum vibration amplitude points that are both supported by the plurality of arm portions, so that a plurality of joint actions are provided. in one state the bonding working surface opposed to the workpiece mount of the upper surface provided in the lower than resonators of the faces, the one bonding working face by lowering of the holder by the actuator and the work The upper surface of the mounting table pressurizes and holds the bonded portion where the plurality of workpieces are superimposed, and the resonator resonates with the ultrasonic vibration transmitted from the vibrator to overlap the plurality of workpieces. This is a resonator support device for an ultrasonic bonding apparatus for bonding a bonded portion, and the rotation support mechanism is provided together with the resonator when the resonator is rotated relative to the holder in the circumferential direction around the vibration transmission direction axis. The plurality of latching portions that rotate in the same direction are provided at the same allocation angle as the circumferential allocation angle centered on the vibration transmission direction axis of the plurality of bonding action surfaces, and the holder has at least one of the plurality of latching portions. An ultrasonic bonding apparatus characterized in that an angle indexing body is provided for fixing the resonator to the holder so as not to rotate in the circumferential direction about the center of rotation of the vibration transmission direction by fitting with the two latching portions. Resonator support device. Angle indexing member elongated hole to allow movement in a direction intersecting the vibration transmission direction axis of the resonator against the angle indexing member on the holder is provided on, among the plurality of engaging portions on the holder The attachment for fixing an angle indexing body to a holder in the position which fits at least 1 latching part was provided via the long hole from the outer side of the angle indexing body. Resonator support device for ultrasonic bonding apparatus. The angle indexing body is provided with an opening penetrating in a direction parallel to the axis of vibration transmission direction of the resonator, and the holder is rotated from the outside of the angle indexing body so that a plurality of angle indexing bodies are arranged. The cam which moves to the position which fits at least one latching part of a latching part, and the position released from the one latching part is provided so that it may be arranged in the opening. The resonator support device of the ultrasonic bonding apparatus according to Item 1 .

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