JP3837680B2 - Mold for metal-ceramic composite substrate manufacturing - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a metal-ceramic composite substrate manufacturing mold, particularly to a manufacturing technique for manufacturing a strong composite member of an oxide, nitride, carbide ceramic and metal suitable for automobile parts, electronic parts and the like.
[0002]
[Prior art]
Metal-ceramic composite members that take advantage of the characteristics of ceramics such as chemical stability, high melting point, insulation, and high hardness, and the characteristics of metals such as high strength, high toughness, easy processability, and conductivity are used in automobiles and electronic devices. Widely used in Typical examples include a rotor for an automobile turbocharger, a substrate for mounting a high-power electronic device, and a package.
[0003]
Conventionally, methods such as adhesion, plating, metallization, thermal spraying, brazing, DBC, shrink fitting, and cast-in are known as main methods for producing metal-ceramic composite members.
[0004]
However, the above-described production method has a problem that the bonding method has low adhesive strength and poor heat resistance. In the case of plating, metallization, and thermal spraying, the formed ceramic (metal) is limited to a thin layer having a thickness of several μm to several tens of μm. The shrink-fit and cast-in methods are limited to specific cases where at least a portion of the ceramic member is held in the metal.
[0005]
In the DBC method, the metal that can be bonded is limited to copper, and the bonding temperature is limited to a narrow range near the eutectic point of Cu-O, so that a bonding defect such as swelling or non-contact is likely to occur. There is a point. In the case of the brazing method, an expensive brazing material is used and bonding must be performed in a vacuum, so that the cost is high and the application range is limited. In addition, a brazing material is generally a eutectic alloy to which a metal to be joined, another metal, and even a non-metal are added, and is generally harder than the metal to be joined. There were problems such as a short heat cycle life of the body.
[0006]
As disclosed in Japanese Patent Laid-Open No. 8-198692 “Metal-ceramic composite member manufacturing apparatus”, the present inventors as a device for solving the above problems, a conveying means for continuously supplying a ceramic member, A preheating portion for preheating the ceramic member, a joining portion for allowing the preheated ceramic member to pass through the molten metal in the crucible and joining the metal to the peripheral surface of the ceramic member, and the joined ceramic member gradually. An apparatus comprising a cooling unit that is cooled to form a metal-ceramic composite member is provided.
[0007]
A large amount of the metal-ceramic composite member can be continuously manufactured by the above manufacturing apparatus, and a great effect is obtained in terms of actual operation. The metal thickness of both sides of the ceramic of the composite member is as described above. Due to the structure of the joint, both sides had the same thickness.
[0008]
[Problems to be solved by the invention]
In recent years, as these metal-ceramic composite members, there has been a demand for composite members that attempt to improve heat conduction characteristics by making the metal thickness of the heat sink thinner than the metal thickness of the circuit surface. It could not be manufactured with a manufacturing device.
[0009]
An object of the present invention is to provide a fitting type mold capable of manufacturing a specially shaped metal-ceramic composite member having excellent characteristics at low cost.
[0010]
The inventors of the present invention have intensively studied to solve such problems. As a result, they have found that a molten metal can be joined to a ceramic member by developing a fitting type mold.
[0011]
[Means for Solving the Problems]
That is, the present invention is made of one and the other of the mold is divided into right and left, an integral-type mold occupy together forming each other by sandwiching a ceramic member between them, the one mold inner surface, the molten metal injection tube fixing And a molten metal introduction part, the circuit surface part for the ceramic member , and the feeder part are connected to each other, and on the other mold inner surface, there are a molten metal injection cylinder fixing part, a molten metal introduction part, the radiator plate part for the ceramic member, or a fin part. A mold for producing a metal / ceramic composite substrate, wherein an integrated heat dissipating part and a feeder part are connected to each other.
[0012]
The present invention is made of a mold divided left and right and center, to sandwich the respective ceramic member between the left and right mold and the central mold a unitary mold Ru allowed coupled together, on both sides of the central mold, The molten metal injection cylinder fixing portion, the molten metal introduction portion, the circuit surface portion for the ceramic member , and the feeder portion are connected to each other , and the molten metal injection cylinder fixing portion is provided on each of the left and right mold inner surfaces arranged on both sides of the central mold. A mold for producing a metal / ceramic composite substrate, comprising a molten metal introducing portion, a heat radiating portion integrated with the ceramic heat radiating plate portion or the fin portion, and a feeder portion.
[0013]
The molten metal is metal aluminum or an alloy mainly composed of aluminum.
[0015]
In the present invention, after the ceramic member is sandwiched by the mold, an aluminum metal as a molten metal is poured, and a circuit forming surface having a thickness of about 0.5 mm is provided on one surface of the ceramic member. A heat radiating part integrated with a heat sink of about 3 mm or a fin part is manufactured in a series of steps.
[0016]
The metal used in the present invention is a pure metal of aluminum, which improves conductivity and obtains softness. In this case, the higher the purity is, the better the conductivity is. However, since the price is higher, 99.9% (3N) pure aluminum is used in the present invention.
[0017]
The ceramic member used in the present invention is a ceramic member such as alumina, aluminum nitride, silicon nitride, silicon carbide, zirconia, glass, or the like. In this case, a high-strength material is still more preferable.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the mold of the present invention will be described in detail with reference to the drawings.
[0019]
Example 1
[0020]
FIG. 1 is a perspective view showing the entire mold of the present invention. The mold of the present invention is, for example, 150 mm long, 150 mm wide, and 45 mm thick, and has a structure in which the left and right molds are fitted approximately in the middle.
[0021]
As shown in FIGS. 2 to 5, on the inner surface of the right mold 1, a molten metal injection cylinder fixing portion 4, a molten metal introducing portion 5, a ceramic member fixing concave portion 6, a circuit surface concave portion 6 ′, a feeder portion 7, a gas vent A hole 8 is provided, and as shown in FIGS. 6 to 9, on the inner surface of the left mold 2, a molten metal injection tube fixing portion 4, a molten metal introduction portion 5, a heat radiating plate portion 10, and a feeder portion 7 are provided. After fixing an alumina member having a length of 112 mm, a width of 54 mm, and a thickness of 0.635 mm in the concave portion 6 for fixing the ceramic member, and then fixing the molten metal injection cylinder 3 having a diameter of 30 mm to the molten metal injection cylinder fixing portion 4, both The molds 1 and 2 are fitted. Reference numeral 11 denotes a concave portion formed in the left mold 2 for receiving the convex portion 9 of the right mold 1. Also, as shown in FIG. 3, the depth of the ceramic member fixing recess 6 is a depth for receiving the alumina member having a thickness of 0.635 mm, and the circuit surface recess 6 'is 1.15 mm deeper than this, for example. is there.
[0022]
Next, molten aluminum having a purity of 99.9% (3N) obtained by separately heating is poured from the molten metal injection cylinder 3 while applying pressure, and finally injected until some aluminum comes out from the vent hole 8. .
[0023]
Stop the injection of molten aluminum in the above state, cool the mold to near room temperature while applying a temperature gradient so that no shrinkage and defects remain on the circuit formation and heat sink, and then move the mold to the left and right as originally. The aluminum-ceramic composite member was obtained by dividing. The composite member obtained by the present invention, the circuit formation portion 14 is a thickness of 0.5 mm, which is formed between the concave portion 6 'for one side and the circuit surface of the alumina member. The thickness of the heat sink 15 formed on the heat sink 10 on the opposite surface of the alumina member was 0.3 mm.
[0024]
An etching resist was thermocompression bonded to the circuit forming surface 14 thus obtained, and a desired pattern was formed by shading and developing, and then etching was performed on the ferric chloride solution to form a circuit. Further, the surface of the circuit was replaced with Zn and subjected to Ni plating to obtain an aluminum-ceramics direct bonding substrate having a shape as shown in FIG. Reference numeral 16 denotes a Ni plating film.
[0025]
When various characteristics of the composite substrate were measured, the following results were obtained.
[0026]
Peel strength> 21 kg / cm (aluminum can be cut)
[0027]
Heat cycle> 3000 times (no cracks)
[0028]
Folding strength: 61.6kg / mm ²
[0029]
Deflection: 170 μm
[0030]
(Example 2)
[0031]
As shown in FIGS. 11 and 12, the left and right mold 2 has the same left and right molds as those shown in Example 1, except that the heat radiating plate 10 is replaced with a fin 12. As an example, an aluminum nitride member having a length of 112 mm, a width of 54 mm, and a thickness of 0.635 mm was used to obtain the aluminum-ceramic composite member with fins 17 having the shape shown in FIG.
[0032]
Example 3
[0033]
FIG. 14 is a perspective view showing an entire mold according to a third embodiment of the present invention. This mold is formed by integrally joining three molds 18 to 20 that communicate with one molten metal injection cylinder 3, and the left and right molds 18 and 20 sandwich the central mold 19. .
[0034]
As shown in FIGS. 15 to 17, on the inner surface of the right mold 18, a molten metal injection cylinder fixing portion 21 a, a molten metal introducing portion 22, ceramic member fixing concave portions 23 and 24, circuit surface concave portions 25 and 26, and a hot water portion 27. 28, gas vent holes 29, 30 are provided, and as shown in FIGS. 18 to 20, on the opposed surface of the central mold 19 facing the right mold 18, the molten metal injection cylinder fixing portion 21b and the molten metal introducing portion 22 ′ are provided. The heat sinks 31, 32, the feeder parts 27 ′, 28 ′, the ceramic member fixing concave parts 23, 24, and the concave part 33 ′ for receiving the convex part 33 of the right mold 18 are provided.
[0035]
Further, as shown in FIG. 21, on the opposite surface of the central mold 19, the molten metal injection cylinder fixing portion 21b, the molten metal introducing portion 34, the ceramic member fixing concave portions 35 and 36, the heat radiating plate portions 37 and 38, the hot water supply 22 and 24, as shown in FIGS. 22 to 24, on the inner surface of the left mold 20 facing the opposite surface of the central mold 19, a molten metal injection cylinder fixing portion 21c, a molten metal introducing portion 34 ', The circuit surface recesses 41 and 42, the feeders 39 'and 40', the gas vent holes 43 and 44, and the recesses 45 'for receiving the projections 45 of the central mold 19 are provided, and the four alumina members are formed as described above. After fixing in the ceramic member fixing recesses 23, 24, 35, and 36, and then fixing the molten metal injection cylinder 3 to the molten metal injection cylinder fixing portion 21b of the central mold 19, the right and left molds 18 and 20 is fitted.
[0036]
Next, molten aluminum having a purity of 99.9% (3N) obtained by heating separately is poured from the molten metal injection cylinder 3 while applying pressure, and finally, a slight amount of gas is released from the vent holes 29, 30, 43, and 44. Pour until aluminum comes out.
[0037]
In the above state, the injection of molten aluminum is stopped, the mold is cooled to near room temperature while applying a temperature gradient so that no shrinkage and defects remain in the circuit formation and the heat sink, and then the mold is divided as originally. Thus, an aluminum-ceramic composite member was obtained. Hereinafter, the composite member obtained by the present invention is processed in the same manner as in the other examples.
[0038]
According to this embodiment, four composite substrates can be mass-produced at a time.
[0039]
【The invention's effect】
Since the mold of the present invention is a fitting type, a metal-ceramic composite substrate having a specific shape can be manufactured, and since the mold can be used repeatedly, there is a great advantage that a composite substrate having a specific shape can be manufactured at low cost. is there.
[Brief description of the drawings]
FIG. 1 is a perspective view showing the entire mold of the present invention.
FIG. 2 is a front view of the right mold as viewed in the direction A in FIG.
FIG. 3 is a plan view of a right mold.
4 is a cross-sectional view taken along line 4-4 of FIG.
5 is a cross-sectional view taken along line 5-5 of FIG.
6 is a front view of the left mold as viewed in the direction B in FIG. 1. FIG.
FIG. 7 is a plan view of the left mold.
8 is a cross-sectional view taken along line 8-8 of FIG.
9 is a cross-sectional view taken along line 9-9 of FIG.
FIG. 10 is a cross-sectional view of a composite substrate obtained in Example 1 of the present invention.
FIG. 11 is a front view showing another form of the left mold.
12 is a sectional view taken along line 12-12 of FIG.
FIG. 13 is a cross-sectional view of a composite substrate obtained in Example 2 of the present invention.
FIG. 14 is a perspective view showing an entire mold according to a third embodiment of the present invention.
FIG. 15 is a front view of the right mold.
FIG. 16 is a plan view of the right mold.
FIG. 17 is a side view of the same.
FIG. 18 is a front view of the central mold.
FIG. 19 is a plan view of the central mold.
FIG. 20 is a side view of the central mold.
FIG. 21 is a rear view of the same.
FIG. 22 is a front view of the left mold.
FIG. 23 is a plan view of the left mold.
FIG. 24 is a side view of the same.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Right side mold 2 Left side mold 3 Molten injection cylinder 4 Molten injection cylinder fixing | fixed part 5 Molten metal introducing | transducing part 6 Ceramic member fixing recessed part 6 'Circuit surface recessed part 7 Feeding part 8 Degassing hole 9 Convex part 10 Radiating plate part 11 Concave part 12 Fin part 13 Ceramic member 14 Circuit forming surface 15 Heat sink 16 Ni plating film 17 Fin 18 Mold 19 Central mold 20 Mold 21a Molten injection cylinder fixing part 21b Molten injection cylinder fixing part 21c Molten injection cylinder fixing part 22 Molten injection part fixing part 22 'Molten metal introduction part 22' Introduction part 23 Recess for fixing ceramic member 24 Recess for fixing ceramic member 25 Recess for circuit surface 26 Recess for circuit surface 27 Feeding part 28 Feeding part 27 'Feeding part 28' Feeding part 29 Gas vent hole 30 Gas vent hole 31 heat sink plate 32 heat sink plate 33 mold convex portion 33 ′ mold concave portion 34 molten metal introducing portion 34 ′ molten metal introducing portion 35 concave portion 36 for fixing a ceramic member Lamix member fixing recess 37 Heat sink plate 38 Heat sink plate 39 Hot water supply portion 39 'Hot water supply portion 40 Hot water supply portion 40' Hot water supply portion 41 Circuit surface recess 42 Circuit surface recess 43 Gas vent hole 44 Gas vent hole 45 Mold convex part 45 'Mold concave part

Claims (7)

Consists one and the other of the mold is divided into right and left, an integral-type mold occupy together forming each other by sandwiching a ceramic member between them, the one mold inner surface, the molten metal injection tube fixing portion, the molten metal inlet section, The ceramic member circuit surface part and the hot metal part are connected to each other, and the molten metal injection cylinder fixing part, the molten metal introducing part, the ceramic member heat radiation plate part and the hot metal part are connected to the other mold inner surface. A mold for producing a metal / ceramic composite substrate. Consists mold divided left and right and center, to sandwich the respective ceramic member between the left and right mold and the central mold a unitary mold Ru allowed coupled together, on both sides of the central mold, the molten metal injection tube fixing portion, molten metal introduction, the ceramic member for a circuit surface, provided by concatenating feeder unit, to each of the left and right mold inner surface is arranged on either side of the central mold, the molten metal injection tube fixing portion, the molten metal inlet portion, the ceramic A mold for producing a metal / ceramic composite substrate, wherein a member heat radiating plate portion and a feeder portion are connected to each other. It is composed of one and other molds divided into right and left, and is an integral mold in which a ceramic member is sandwiched between them and bonded together, and on the inner surface of one mold, a molten metal injection cylinder fixing part, a molten metal introducing part, The ceramic member circuit surface part and the feeder part are connected to each other, and on the other mold inner surface, the molten metal injection tube fixing part, the molten metal introduction part, the fin part, and the above-mentioned ceramic member radiator plate part and feeder part A metal-ceramic composite substrate manufacturing mold, characterized in that they are connected to each other. The mold is divided into left and right and center molds, and is an integral mold in which the ceramic members are sandwiched between the left and right molds and the center mold and bonded to each other. An introduction part, a circuit surface part for the ceramic member, and a hot metal part are connected to each other, and a molten metal injection cylinder fixing part, a molten metal introduction part, a fin part, A mold for producing a metal / ceramic composite substrate, wherein the integrated heat dissipating plate portion for the ceramic member and the feeder portion are connected to each other. It consists of a mold divided into left and right and center, and is an integral mold that sandwiches the ceramic members between the left and right molds and the center mold and bonds them to each other. A molten metal introduction part, a heat radiating part integrated with the heat dissipating plate part for the ceramic member, and a feeder part are connected to each other, and a molten metal injection cylinder is fixed to each of the left and right mold inner surfaces arranged on both sides of the central mold A mold for producing a metal / ceramic composite substrate, comprising: a metal part, a molten metal introduction part, a circuit surface part for the ceramic member, and a feeder part. It consists of a mold divided into left and right and center, and is an integral mold that sandwiches the ceramic members between the left and right molds and the center mold and bonds them to each other. A molten metal introduction part, a heat dissipating part integrated with the ceramic member fin part, and a feeder part are connected to each other, and a molten metal injection cylinder fixing part is provided on each of the left and right mold inner surfaces arranged on both sides of the central mold. A mold for producing a metal / ceramic composite substrate, comprising: a molten metal introduction portion, a circuit surface portion for the ceramic member, and a feeder portion connected to each other. The molten metal, according to claim 1, characterized in that an alloy mainly composed of metallic aluminum or aluminum, 2, 3, 4, 5 or 6 wherein the metal - ceramic composite substrate manufacturing mold.

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